JP2006023177A5 - - Google Patents

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Publication number
JP2006023177A5
JP2006023177A5 JP2004201068A JP2004201068A JP2006023177A5 JP 2006023177 A5 JP2006023177 A5 JP 2006023177A5 JP 2004201068 A JP2004201068 A JP 2004201068A JP 2004201068 A JP2004201068 A JP 2004201068A JP 2006023177 A5 JP2006023177 A5 JP 2006023177A5
Authority
JP
Japan
Prior art keywords
guide plate
tip
inner diameter
probe card
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004201068A
Other languages
Japanese (ja)
Other versions
JP4414828B2 (en
JP2006023177A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2004201068A priority Critical patent/JP4414828B2/en
Priority claimed from JP2004201068A external-priority patent/JP4414828B2/en
Publication of JP2006023177A publication Critical patent/JP2006023177A/en
Publication of JP2006023177A5 publication Critical patent/JP2006023177A5/ja
Application granted granted Critical
Publication of JP4414828B2 publication Critical patent/JP4414828B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (3)

ガイド板に設けられたガイド孔にプローブが挿入される垂直型プローブカードにおいて、
該ガイド孔は、該ガイド板の表面に開孔を有する先端孔部と、該先端孔部と連続して形成され先端孔部より口径の大きい内径部とを有し、
該プローブは、該先端孔部から突出する円柱形状の先端部と、該内径部に摺動可能な円柱形状の補正部とを備えたことを特徴とするプローブカード。 In the vertical type probe card in which the probe is inserted into the guide hole provided in the guide plate,
The guide hole has a tip hole portion having an opening on the surface of the guide plate, and an inner diameter portion formed continuously with the tip hole portion and having a larger diameter than the tip hole portion,
The probe card includes a columnar tip protruding from the tip hole and a columnar correction portion slidable on the inner diameter portion. 前記ガイド板は、上ガイド板および底ガイド板から構成されていることを特徴とする請求項１に記載のプローブカード。   The probe card according to claim 1, wherein the guide plate includes an upper guide plate and a bottom guide plate. 前記補正部の外径と上記内径部の内径との寸法差は、上記先端部の外径と上記先端孔部の内径との寸法差よりも小さく設定されていることを特徴とする請求項１に記載のプローブカード。 The dimensional difference between the outer diameter of the correction portion and the inner diameter of the inner diameter portion is set smaller than the dimensional difference between the outer diameter of the tip portion and the inner diameter of the tip hole portion. Probe card as described in
JP2004201068A 2004-07-07 2004-07-07 Probe card Active JP4414828B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004201068A JP4414828B2 (en) 2004-07-07 2004-07-07 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004201068A JP4414828B2 (en) 2004-07-07 2004-07-07 Probe card

Publications (3)

Publication Number Publication Date
JP2006023177A JP2006023177A (en) 2006-01-26
JP2006023177A5 true JP2006023177A5 (en) 2007-08-09
JP4414828B2 JP4414828B2 (en) 2010-02-10

Family

ID=35796550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004201068A Active JP4414828B2 (en) 2004-07-07 2004-07-07 Probe card

Country Status (1)

Country Link
JP (1) JP4414828B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4739269B2 (en) * 2007-04-09 2011-08-03 日本電子材料株式会社 Vertical probe
JP2010281790A (en) * 2009-06-08 2010-12-16 Micronics Japan Co Ltd Contact pin and electrical connection device using the same
WO2011162362A1 (en) * 2010-06-25 2011-12-29 日本発條株式会社 Contact probe and probe unit

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