JP2006019383A5

JP2006019383A5 -

Info

Publication number: JP2006019383A5
Application number: JP2004193735A
Authority: JP
Filing date: 2004-06-30
Publication date: 2007-03-29
Anticipated expiration: 2024-06-30

Claims

A pinned layer having a magnetization direction fixed in a certain direction;
A free layer in which the magnetization direction changes according to an external magnetic field, and when the external magnetic field is zero, the magnetization direction is parallel to the magnetization direction of the pinned layer;
A laminate including: an intermediate layer sandwiched between the fixed layer and the free layer;
The magnetic detecting element, wherein the intermediate layer has a thickness such that an exchange bias magnetic field in the magnetization direction of the pinned layer generated between the pinned layer and the free layer is positive.

The magnetic detection element according to claim 1, wherein the intermediate layer has a thickness of 2.1 nm to 2.5 nm.

A pinned layer having a magnetization direction fixed in a certain direction;
A free layer whose magnetization direction changes according to an external magnetic field, and when the external magnetic field is zero, the magnetization direction is antiparallel to the magnetization direction of the pinned layer;
A laminate including: an intermediate layer sandwiched between the fixed layer and the free layer;
The magnetic detection element, wherein the intermediate layer is configured to have a thickness such that an exchange bias magnetic field in the magnetization direction of the pinned layer generated between the pinned layer and the free layer is negative.

The magnetic detection element according to claim 3 , wherein the intermediate layer is configured to have a thickness of 1.9 nm to 2.0 nm.

The magnetic detection element according to any one of claims 1 to 4, wherein the intermediate layer is made of copper.

The magnetic detection element according to any one of claims 1 to 5, wherein the free layer has an easy axis of magnetization parallel to the magnetization direction of the pinned layer.

The magnetism according to any one of claims 1 to 6, further comprising bias applying means for applying a bias magnetic field to the stacked body in a direction orthogonal to the magnetization direction of the pinned layer. Detection element.

The magnetic detection element according to claim 7, wherein the bias applying unit is one of a permanent magnet or a bias current line extending in a magnetization direction of the pinned layer.

Lamination is performed by sequentially forming a first ferromagnetic layer whose magnetization direction changes according to an external magnetic field, an intermediate layer, and a second ferromagnetic layer having a coercive force larger than that of the first ferromagnetic layer. A laminating process for forming a body;
A regularization step of performing regularization so that the magnetization directions of the first and second ferromagnetic layers are parallel to each other,
Forming the intermediate layer so that an exchange bias magnetic field in the magnetization direction of the second ferromagnetic layer generated between the first and second ferromagnetic layers has a thickness that is positive;
The method of forming a magnetic detecting element, wherein the setting of the magnetization directions of the first and second ferromagnetic layers in the initial state where the external magnetic field is zero is completed by the ordering step.

The method for forming a magnetic detection element according to claim 9, wherein the intermediate layer is formed to have a thickness of 2.1 nm to 2.5 nm.

Forming the first ferromagnetic layer to have an easy axis of magnetization;
The method of forming a magnetic sensing element according to claim 9 or 10, wherein the ordering is performed so that the magnetization directions of the first and second ferromagnetic layers are parallel to the easy axis of magnetization.

The method of forming a magnetic sensing element according to claim 11, wherein the direction of the easy axis is set by forming the first ferromagnetic layer while applying a magnetic field in a certain direction.

Method of forming a magnetic sensing element according to claim 11 or claim 1 2, characterized in that the ordering by annealing while applying a magnetic field in the same direction of the magnetization easy axis.

The method for forming a magnetic sensing element according to claim 13, wherein annealing is performed at a temperature of 250 ° C. to 400 ° C. while applying a magnetic field of 1.6 kA / m to 160 kA / m.

Lamination is performed by sequentially forming a first ferromagnetic layer whose magnetization direction changes according to an external magnetic field, an intermediate layer, and a second ferromagnetic layer having a coercive force larger than that of the first ferromagnetic layer. A laminating process for forming a body;
A regularization step of performing regularization so that the magnetization directions of the first and second ferromagnetic layers are antiparallel to each other,
Forming the intermediate layer so that the exchange bias magnetic field in the magnetization direction of the second ferromagnetic layer generated between the first and second ferromagnetic layers has a thickness that is negative;
The method of forming a magnetic detecting element, wherein the setting of the magnetization directions of the first and second ferromagnetic layers in the initial state where the external magnetic field is zero is completed by the ordering step.

The method for forming a magnetic sensing element according to claim 15, wherein the intermediate layer is formed so as to have a thickness of 1.9 nm to 2.0 nm.

Forming the first ferromagnetic layer to have an easy axis of magnetization;
Ordering is performed so that the magnetization direction of the second ferromagnetic layer is parallel to the easy axis and the magnetization direction of the first ferromagnetic layer is antiparallel to the easy axis. A method for forming a magnetic sensing element according to claim 15 or 16.

The method of forming a magnetic sensing element according to claim 17, wherein the direction of the easy axis is set by forming the first ferromagnetic layer while applying a magnetic field in a certain direction.

In the regularization step,
A first step of applying an annealing process while applying a magnetic field in the same direction as the direction of the easy axis;
A second step of applying an annealing process while applying a magnetic field in a direction opposite to the direction of the easy axis;
Magnetic detection according to claim 17 or claim 1 8, characterized in that performing the ordering by performing a third step of applying the annealing treatment in order while applying a magnetic field in the same direction of the magnetization easy axis Element formation method.

The annealing process is performed at a temperature of 250 ° C or higher and 400 ° C or lower while applying a magnetic field of 1.6 kA / m or higher and 160 kA / m or lower in the first to third steps. Method for forming a magnetic sensing element.

The method for forming a magnetic sensing element according to any one of claims 9 to 20, wherein the intermediate layer is formed using copper.