JP2006018977A - Mold for mounting transfer printing plate and transfer printing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mold for mounting a transfer printing plate which is miniaturized and simple, has a short tact time as well as a high precision high positioning of the printing, and to provide a transfer printing method. <P>SOLUTION: In the mold for mounting the transfer printing plate for transferring the protruded and recessed shape of the transfer printing plate to a member to be printed, by pressing under vacuum the transfer printing plate 24 which has the recesses and protrusions against the member 25 to be printed, when an upper mold 16 and a lower mold 18 thereof are put together, a vacuum depressurization chamber 19 is formed in the upper mold 16 or the lower mold 18 for holding either the transfer printing plate 24 or the member 25 to be printed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention provides a transfer printing plate for use in an imprint printing method in which a printing member having fine irregularities on its surface is used to print a member to be printed using a thermosetting resin, a thermoplastic resin, a photocurable resin, or the like. The present invention relates to a metal mold to be mounted.

  Optical disks such as CD-ROMs and DVD-ROMs are currently made by a dot pattern resin molding method using a metal resin molding die produced by a photolithography method. On this optical disk, data such as video and music is recorded as a dot pattern, which is read and reproduced with a laser beam.

  Also, in magneto-optical disks such as MO, a magnetic thin film is formed as a recording thin film after forming a dot pattern with a metal mold. In MO, this recording thin film data can be read by laser light, and can be erased and written, and is commercially available as a recording medium capable of repeated recording (erasing and writing).

  Recently, these recording media have been required to improve recording density year by year due to high market demands such as reduction in size and weight, portability, storability, manageability, and increase in capacity. For this reason, there is an active competition for technological development of high-density dot pattern formation methods. Among them, in a method called an imprint method, a thermosetting resin, a thermoplastic resin, a photocurable photosensitive resin, or the like is used as a pattern forming resin, and a printing plate called an uneven mold is used. This is a method of printing a dot pattern or the like by a transfer printing method. Further, a substrate made of silicon, quartz or the like is mainly used as a transfer printing mold for pattern formation, and a fine pattern is formed on this substrate by an EB method (electron beam method). In the imprint, even if the mold material is not metal, it is customarily called a mold. In the EB method, it is easy to form a dot pattern of 100 nanometers or less. By using this as a mold, it is possible to form a high-density recording medium. In addition, when using a photo-curing type as the recording medium resin, it is possible to form a dot pattern at a lower temperature than when using a thermosetting resin or a thermoplastic resin, and the distortion of the pattern due to heat is taken into consideration. Therefore, there is a feature that enables high-density recording.

  In the case of a conventional CD-ROM, MO, etc., the shape that is a normal dot pattern is 0.4 μm wide and 0.9-3.3 μm deep. On the other hand, in the imprint method, it is possible to form a dot pattern of 1/10 size, and a recording density of 10 times can be achieved. The development of this optical nanoprint technology is expected to enable future 100 GB recording media.

  This imprint technique was first introduced by Chou in 1995, and since the days are shallow, there are still few academic papers. For example, Journal of the Japan Society for Abrasives, Vol. 46, No. 6, p282, (2002) (Non-Patent Document 1) ) Is introduced as the current state of nanoprint technology. Among them, sapphire patterned with EB is used for the mold.

  In this apparatus, thermal transfer printing can be performed using a thermosetting resin, a thermoplastic resin, or the like, but a photo-transfer type photosensitive resin can also be used. When a photosensitive resin is used, the resin is cured by irradiating ultraviolet rays from above. In the thermal transfer system, the printing member can be heated by a heater provided under the printing member (substrate holder in Non-Patent Document 1).

  The sapphire mold used as the transfer printing plate in Non-Patent Document 1 is referred to as a mold in Non-Patent Document 1, and an ultraviolet irradiation lens made of sapphire is disposed on the mold. This ultraviolet irradiation lens is attached to a pedestal having a bellows movable up and down. Further, in order to make a vacuum state or a reduced pressure state between the irradiation lens and the mold and the periphery thereof, the whole has a sealed structure, and a part thereof is connected to a rotary pump. Non-Patent Document 1 describes a drawing of a printing apparatus as an optical nanoprint lithography apparatus.

  The prior art will be described in more detail with reference to the figures published in Non-Patent Document 1. A diagram published in Non-Patent Document 1 is shown in FIG.

  A substrate (a member to be printed) 2 is disposed under the sapphire mold 1. In the optical nanoimprint, in order to irradiate ultraviolet rays from above, if the upper part of the mold 1 is held by a material that does not transmit light, light such as ultraviolet rays is blocked. It is important to keep the surface of the mold 1 as wide as possible so that the surface of the mold 1 can be irradiated with ultraviolet rays over a wide area. A stage 12 is disposed below, and the stage 12 rises in the direction of the stage rising arrow 13 and is pressed by the sapphire mold 1. At this time, the substrate (printed member) 2 disposed on the stage 12 is also lifted, and contracts even if the partition wall portion 12a provided on the stage 12 comes into contact with the bellows 6 attached to the pedestal 6a and is pressed. Thus, a configuration in a vacuum reduced state of the chamber R is possible. At the same time, the substrate (printed member) 2 is also pressed against the mold 1 so that transfer printing is possible. When the vacuum decompression state is configured, decompression is then started from the rotary pump connection port 8 to form a vacuum or decompression state. An irradiation lens 4 is attached to the upper part of the sapphire (ultraviolet irradiation plate) 3, and ultraviolet rays are guided from the optical fiber 5 to the irradiation lens 4. Below the stage 12 is a load cell 10 that can record and adjust printing pressure. A ball screw 11 is provided under the load cell 10, and the stage 12 is pushed up by the stepping motor 7 through the ball screw 11. After printing, the stepping motor 7 rotates in the reverse direction and the stage 12 is lowered.

  The above is a conventional transfer printing machine, but the required characteristics of a mounting mold for transfer printing in imprint including not only the photo-curing type but also the thermal transfer method are as follows: 1) Vacuum or reduced pressure conditions The transfer printing chamber to be maintained is as simple and small as possible, 2) vacuum or reduced pressure conditions can be obtained in a short time, 3) the overall printing tact time is short, and 4) the printing press is inexpensive, 5) The printing positional accuracy is high, and 6) the transfer printing plate and the member to be printed are always printed in a parallel state.

  It is important that the transfer printer solves these problems and is excellent in printing productivity, but the contrivance has not yet been found in the prior art.

Satoshi Taniguchi and three others, “Current Status of Nanoimprint Technology”, Journal of Abrasive Technology, Abrasive Technology Association, June 2002, 46, 6, p. 282

  As described in the prior art, particularly important points are: 1) the transfer printing chamber that maintains the vacuum or reduced pressure conditions is as simple and small as possible, and 2) the vacuum or reduced pressure conditions can be obtained in a short time. 3) The overall printing tact time is short, 4) the printing press is inexpensive, 5) the printing positional accuracy is high, and 6) the transfer printing plate and the printing member are always printed in parallel. Is Rukoto.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a transfer printing plate mounting mold and a transfer printing method that are small and simple, have a short tact time, and have high printing positional accuracy in order to solve the above-described problems.

  In order to achieve the above object, the invention of claim 1 is for a transfer printing plate in which a transfer printing plate on which unevenness is formed is pressed against a printing member under vacuum to transfer the uneven shape of the transfer printing plate to the printing member. In a mounting mold, a mounting mold for a transfer printing plate in which a vacuum decompression chamber is formed when the upper mold and the lower mold are combined with an upper mold and a lower mold that hold either the transfer printing plate or the printing target member. It is.

  According to the second aspect of the present invention, the lower mold is provided with a substrate mounting table for holding the printing member, the upper printing mold is held on the upper mold, and a sealing member such as an O-ring is provided on the mating surface of the lower mold and the upper mold. 2. The mounting mold for a transfer printing plate according to claim 1, wherein when the lower mold and the upper mold are combined, a vacuum decompression chamber is formed in the upper mold and the lower mold by the sealing member.

  According to the invention of claim 3, after the upper die and the lower die are sealed by the sealing member to form the vacuum decompression chamber, the transfer printing plate is attached to the printing member when the upper die and the lower die are further combined. The mounting mold for a transfer printing plate according to claim 2.

  According to a fourth aspect of the present invention, in the upper mold, the deformable transfer printing plate is held, and the upper mold is formed with a pressurizing chamber for pressing the transfer printing plate against the member to be printed. This is a mounting mold for printing plates.

  The invention according to claim 5 is the mounting mold for the transfer printing plate according to claim 3, wherein the upper mold holds a rigid transfer printing plate, and the transfer printing plate is attached to the member to be printed.

  The invention according to claim 6 is a transfer printing method in which a transfer printing plate on which unevenness is formed is pressed against a member to be printed under vacuum to transfer the uneven shape of the transfer printing plate to the member to be printed. The transfer printing is characterized in that a sealed space is formed when the upper mold and the lower mold holding one of the above and the lower mold are combined, the sealed space is evacuated, and then the transfer printing plate is attached to the printing material. Is the method.

  A seventh aspect of the invention is the transfer printing method according to the sixth aspect of the present invention, wherein after the plate is received, the back surface of the transfer printing plate is pressurized with air pressure and the transfer printing plate is pressed against the member to be printed.

  According to an eighth aspect of the present invention, after the plate is transferred and the unevenness of the transfer printing plate is transferred to the member to be printed, the vacuum state of the sealed space is released, and then the transfer printing plate is released from the member to be printed. This is a transfer printing method.

The present invention has the following effects.
(1) The structure is simple and small without using a bellows or the like.
(2) Since the vacuum decompression chamber can be made structurally small, the time required for vacuum decompression can be shortened. A vacuum pump with a reduced size can be used.
(3) By forming the pressurizing chamber, a uniform pressure is applied to the transfer printing plate, and transfer printing unevenness is eliminated.
(4) By forming the pressurizing chamber by gas, the transfer printing plate can be pressed and peeled off (release) by releasing the pressurizing chamber.
(5) Since it is a pressure type by gas, the transfer printing plate can be made thin, the material cost of artificial quartz or the like can be reduced, and the transfer printing plate can be easily manufactured.
(6) Since the upper and lower structures have a short vertical movement distance, the overall tact time can be shortened.
(7) Since the structure is simple and small, the apparatus cost can be reduced.
(8) A mounting die can be manufactured with the accuracy of the die, and the printing accuracy can be increased.
(9) A seal member made of an elastic body such as an O-ring is used, and printing can be performed while always maintaining the parallelism between the printing member and the transfer printing plate.
(10) Printing can be performed using a general-purpose simple press, and infrastructure can be applied.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a cross-sectional view for explaining a mounting mold for transfer printing according to the present embodiment. FIG. 2 is a cross-sectional view of a mounting mold when an upper mold (hereinafter referred to as an upper mold) and a lower mold (hereinafter referred to as a lower mold) are combined.

  In the figure, a support column 15 is erected on a base 14, and a stage 12 is provided on the support column 15 so as to be movable up and down. Although details are omitted, the stage 12 is rotated as the ball screw 11 is moved as indicated by an arrow 13 in the drawing. Ascending or descending, the rotation of the ball screw 11 is controlled by the stepping motor 7 so that the ascending speed and descending speed of the stage 12 can be freely controlled, and the ball screw 11 and the stage A load cell 10 is provided between the two, and a contact pressure between the transfer printing plate 21 and the printing member 22 can be detected as will be described later.

  A lower mold 18 having a concave cross section is provided on the stage 12, and a substrate mounting table 26 for holding the printing member 25 by a vacuum suction method is attached to the concave portion 18 a.

  The lower mold 18 is provided with a rotary pump connection port 8, an O-ring 17 as a sealing member made of an elastic body is provided on the upper surface thereof, and a positioning pin 21 is erected on the outer periphery thereof. In the illustrated example, two O-rings 17 are provided in the illustrated example, but one O-ring 17 may be provided.

  An upper die 16 is attached to the upper portion of the support 15 via an arm 16a, and a transfer printing plate 24 is attached to a groove formed on the inner periphery of the upper die 16. An upper lid 22 for holding sapphire (ultraviolet irradiation plate) 3 is provided on the upper die 16, and a pressurizing chamber 28 is formed between the transfer printing plate 24 and the upper lid 22.

  A rotary pump or a compressor is connected to the upper die 16 so that air or the like is supplied to the pressurizing chamber 28 so that the transfer printing plate 25 is bent downward at the time of printing, and the pressurizing chamber 28 is gradually decompressed at the time of release. A mouth 23 is provided. On the lower surface of the upper mold 16, a positioning receiving hole 20 is formed for fitting a positioning pin 21 erected on the lower mold 18.

  Further, an irradiation lens 4 and an optical fiber 5 are disposed on the sapphire 3, and ultraviolet rays from the optical fiber 5 pass through these, through the transfer printing plate 24, to an ultraviolet curable resin or the like applied on the printing member 25. Can be irradiated.

  In this transfer printing plate mounting mold, when the stage 12 is raised and the member 25 to be printed is deposited on the transfer printing plate 25, the space between the upper die 16 and the lower die 18 is sealed with an O-ring 17. A space is formed, and air in the space is sucked and exhausted from the rotary pump connection port 8 to form a vacuum decompression chamber 19. In this state, the transfer printing plate 24 is attached to the printing member 25. At the time of the plate-making, bubbles are prevented from being mixed in the ultraviolet curable resin applied on the printing member 25.

  Since the O-ring 17 is an elastic body such as rubber, it can be distorted and deformed by the pressing pressure when the upper die 16 and the lower die 18 are lowered or raised, and the printing pressure can be adjusted simultaneously. Since the lower die 18 is provided with positioning pins 21 and the upper die 16 is provided with positioning receiving holes 20 into which the positioning pins 21 can be inserted, the positioning accuracy of the upper die 18 and the lower die 16 is determined by the positioning pins 21. And the positioning receiving holes 20 while being aligned with high accuracy.

  After the vacuum decompression chamber 19 is formed, the lower mold 18 is further pressed against the upper mold 16, so that the transfer printing plate 24 is applied to the printing member 25. By supplying pressurized air from the rotary pump connection port 8 to the pressurizing chamber 28 at the time of the plate-making, the contact pressure between the transfer printing plate 24 and the printing member 25 can be made uniform.

  In this case, when the transfer printing plate 24 is fixed, the center of the printing member 25 is brought into contact with the transfer printing plate 24 by being slightly bent downward by the pressure in the pressurizing chamber 28, and thereafter gradually. The outer peripheral side contacts. This makes it possible to completely eliminate the bubble entrainment.

  After printing, the ultraviolet curable resin on the printing member 21 is irradiated with ultraviolet rays from the optical fiber 4 and cured.

  At the time of release of the plate, the inside of the pressurizing chamber 28 is gradually depressurized and exhausted, and the transfer printing plate 24 is peeled off from the printing member 25 by lowering the stage 12. At this time, since the transfer printing plate 24 is gradually peeled off from the printing plate 25 from the periphery thereof, it can be easily peeled off. Further, the pressurizing chamber 28 is finally opened to atmospheric pressure (or to a reduced pressure state).

  In this way, when the upper die 16 and the lower die 18 are put together, a vacuum state can be obtained, so that the apparatus becomes simple.

  Next, another embodiment of the present invention will be described with reference to FIGS.

  3 and 4 show only the upper die 16 and the lower die 18, but the lower die 18 is on the stage 12 and the upper die 16 is on the support column 15 via the support arm 16a as in FIGS. It is supposed to be retained.

  In the present embodiment, the transfer printing plate 24a is formed of a thick plate, and the transfer printing plate 24a is directly attached to the printing target member 25. In this example, since the pressurizing chamber 28 shown in FIGS. 1 and 2 is not provided, a simpler apparatus can be obtained.

Example 1
The transfer printing plate mounting mold shown in FIGS. 1 and 2 was used, the upper mold 18 and the lower mold 16 were made of carbide, and the O-ring 17 was made of silicone rubber. Artificial quartz is used for the transfer printing plate 24, and a convex dot pattern having a width of 50 nanometers and a length of 50 to 100 nanometers is formed on the transfer printing plate 24. The artificial quartz for transfer printing plates has a diameter of 4 inches φ (100 mmφ) and a thickness of 0.50 mm. The silicone rubber O-ring 17 has a circular cross section, a thickness of 8.0 mm in diameter, and a silicone rubber hardness of 70 in Shore hardness. Using this transfer printing plate mounting mold, transfer printing was performed on nano glass having a thickness of 1.0 mm and a diameter of 3 inches φ (75 mmφ), which is the member to be printed 25. The photosensitive resin is a PMMA (polymethylmethacrylate) -based solvent-diluted photosensitive resin. This photosensitive resin is coated on the nanoglass to a thickness of 10 μm, and after the solvent is dried, it is placed on the substrate mounting table 12. did. After placing the nanoglass, the lower mold 18 was raised to form a vacuum decompression chamber 19. As shown in FIG. 2, the upper die 16 and the lower die 8 are combined with the mold processing accuracy by inserting the positioning pins 21 into the positioning receiving holes 20. The repeat positioning accuracy of the positioning pin 21 with respect to the positioning receiving hole 20 is 5 μm.

In Example 1, printing was performed using a lower mold ascent type printing machine. After the lower mold 18 is raised to form the vacuum decompression chamber 19, the vacuum decompression chamber 19 and the pressurization chamber 28 are decompressed to 0.1 atm (0.1 kgf / cm ² ) by a rotary vacuum pump, The built-in gas between the nanoglasses and in the photosensitive resin was excluded. In this state, the nano glass which is the member to be printed 25 and the transfer printing plate 24 are not in contact with each other and are held in a gap of 0.05 mm. Since there is no pressure difference between the vacuum decompression chamber 19 and the pressurizing chamber 28, the transfer printing plate is not pushed down and deformed. Thereafter, the pressure reduction was released only in the pressurizing chamber, and the transfer printing plate 24 was pressed against the printing member 25. Since the transfer printing plate 24 is as thin as 0.5 mm, it can be deformed, and the transfer printing plate 24 is pressed against the nanoglass so that transfer printing is possible. After pressing, ultraviolet rays were irradiated for 5 seconds at a light amount of 10 mJ using an ultraviolet lamp with a wavelength of 365 nm. After the irradiation was completed, the reduced pressure in the vacuum decompression chamber 19 was released, the transfer printing plate 24 was peeled off from the nanoglass, and then the lower mold 18 was lowered to complete the printing. By releasing the decompression of the vacuum decompression chamber 19, the gap between the transfer printing plate 24 and the glass is restored to a 0.05 mm gap, so that the dot pattern of the transfer printing plate 24 is transferred to the nanoglass, and a good printing result is obtained.

(Example 2)
Instead of the silicone rubber O-ring of Example 1, a PTFE (fluororubber) O-ring was used. PTFE is known as an ultraviolet resistant material. The same good printing results as in Example 1 were obtained.

Example 3
In Example 3, SUS304 stainless steel was used as the mold material for the upper mold 16 and the lower mold 18. SUS304 stainless steel is not usually used as a mold material. However, a transfer printing plate mold does not directly process metal like cutting and bending or cold forging. For this reason, stainless steel excellent in machinability was experimentally adopted, and good results were obtained as in the examples.

Example 4
In Example 1, the vacuum decompression chamber 19 was also decompressed simultaneously with the pressurization chamber 28, and printing was performed. In this case, the pressure chamber was released from the reduced pressure, and the internal pressure was increased to 2.0 atm (2.0 Kgf / cm 2) with a compressor to press the transfer printing plate 24 against the nanoglass. After irradiating with ultraviolet rays, the electromagnetic valve was opened to release the pressurization of the pressurizing chamber 28, and the transfer printing plate 24 was peeled off from the nanoglass to complete the printing. The same good printing results as in Example 1 were obtained.

(Example 5)
3 and 4, the upper mold 16 and the lower mold 18 were made of carbide, and the O-ring 17 was made of silicone rubber. Artificial quartz is used for the transfer printing plate 24a, and a convex dot pattern having a width of 50 nanometers and a length of 50 to 100 nanometers is formed on the transfer printing plate 24a. The artificial quartz for transfer printing plates has a diameter of 4 inches φ (100 mmφ) and a thickness of 5.0 mm. The silicone rubber O-ring 17 has a circular cross section, a thickness of 8.0 mm in diameter, and a silicone rubber hardness of 70 in Shore hardness. Using this transfer printing plate mounting mold, transfer printing was performed on nano glass having a thickness of 1.0 mm and a diameter of 3 inches φ (75 mmφ), which is the member to be printed 25. As the photosensitive resin, a PMMA (polymethyl methacrylate) -based solvent-diluted photosensitive resin is used. The photosensitive resin is applied on the nanoglass to a thickness of 10 μm, and after the solvent is dried, the photosensitive resin is placed on the substrate mounting table 26. did. After placing the nanoglass, the lower mold 18 was raised to form a vacuum decompression chamber 19. As shown in FIG. 4, the upper mold 16 and the lower mold 18 are combined with the mold processing accuracy by inserting the positioning pins 21 into the positioning receiving holes 20. The repeat positioning accuracy of the positioning pin 21 with respect to the positioning receiving hole 20 is 5 μm.

In Example 5, printing was performed using a lower mold ascent type printing machine. After the lower mold 18 was raised to form a vacuum decompression chamber 19, the pressure was reduced to 0.1 atm (0.1 kgf / cm ² ) by a rotary vacuum pump. In this state, the nano glass which is a member to be printed and the transfer printing plate 24a are kept in contact with each other at a distance of 0.3 mm. Since the thickness of the transfer printing plate is 5 mm, the transfer printing plate 24a is not pushed and deformed by the pressure difference from the atmospheric pressure. By this reduced pressure state, minute built-in gas between the transfer printing plate 24a and the nano glass and in the photosensitive resin is eliminated. Then, the lower mold | type 18 was raised further and the transfer printing plate 24a pressed nano glass. After pressing, ultraviolet rays were irradiated for 5 seconds at a light amount of 10 mJ using an ultraviolet lamp with a wavelength of 365 nm. The upward pressing force by the stage at the time of printing is 0.2 MPa by constant pressure. This pressure is approximately equal to twice the atmospheric pressure and is about 2.0 Kgf / cm ² . The overall flatness of the upper mold 16 and the lower mold 18 including the substrate mounting table 26 is actually measured to be 3 μm. Therefore, the maximum gap when the upper mold 16 and the lower mold 18 are combined is 6 μm. However, the drive shaft for raising the lower mold 18 can be mechanically operated with the base of the lower mold 18 on the order of μm, and the O-ring 17 is provided between the upper and lower molds. It works as a buffer material for tilt correction, and the nanoglass and the transfer printing plate 24a are always pressed in parallel. After the ultraviolet irradiation, the vacuum in the vacuum decompression chamber 19 was released, the lower mold 18 was lowered, and the nanoglass was taken out and confirmed. The dot pattern of the artificial quartz transfer printing plate 24a was transferred to the nanoglass, and good printing results were obtained.

(Example 6)
Instead of the silicone rubber O-ring of Example 5, an O-ring 17 made of PTFE (fluororubber) was used. PTFE is known as an ultraviolet resistant material. Good printing results were obtained as in Example 5.

(Example 7)
In Example 7, SUS304 stainless steel was used as the mold material for the upper mold 16 and the lower mold 18. SUS304 stainless steel is not usually used as a mold material. However, a transfer printing plate mold does not directly process metal like cutting and bending or cold forging. For this reason, stainless steel excellent in machinability was experimentally adopted, and good results were obtained as in Example 5.

(Example 8)
In Example 5, without releasing the reduced pressure state immediately after the ultraviolet irradiation, the lower mold is lowered by 0.1 mm with a stepping motor while maintaining the reduced pressure state, and the nano glass as the printing member 25 is transferred from the transfer printing plate. I peeled it off. In this state, since the silicone rubber ring 17 is still pressurized between the upper die 16 and the lower die 18, the reduced pressure state is maintained. Under these conditions, the transfer printing plate 24a was peeled off from the nanoglass in a reduced pressure state, but the same good printing results as in Example 5 were obtained.

Example 9
In Example 5, ultraviolet irradiation was performed after releasing the vacuum state of the vacuum vacuum chamber 19. Even in this state, the same good printing results as in Example 5 were obtained.

It is sectional drawing which shows one Embodiment of the mounting die for transfer printing of this invention. In FIG. 1, it is sectional drawing when the upper mold and lower mold of a mounting mold are united. It is principal part sectional drawing which shows other embodiment of the mounting die for transfer printing of this invention. In FIG. 3, it is sectional drawing when the upper mold and lower mold of a mounting mold are united. It is sectional drawing of the conventional mounting die for transfer printing.

Explanation of symbols

16 Upper mold 17 O-ring (seal member)
18 Lower mold 19 Vacuum decompression chamber 24 Transfer printing plate 25 Printed material

Claims (8)

  In a transfer printing plate mounting mold for transferring the uneven shape of the transfer printing plate to the printing member by pressing the transfer printing plate on which the unevenness is formed to the printing member under vacuum, either the transfer printing plate or the printing member A mounting mold for a transfer printing plate, wherein a vacuum decompression chamber is formed when an upper mold and a lower mold are combined with an upper mold and a lower mold for holding the above.   The lower mold is provided with a substrate mounting table for holding a printing member, the upper mold is held with a transfer printing plate, and a sealing member such as an O-ring is provided on the mating surface of the lower mold and the upper mold. 2. The mounting mold for a transfer printing plate according to claim 1, wherein when the mold is combined, a vacuum decompression chamber is formed in the upper mold and the lower mold by the sealing member.   3. The transfer according to claim 2, wherein after the upper die and the lower die are sealed by the sealing member to form the vacuum decompression chamber, the transfer printing plate is attached to the printing member when the upper die and the lower die are further combined. Mounting mold for printing plate.   The mounting mold for a transfer printing plate according to claim 3, wherein a deformable transfer printing plate is held in the upper mold, and a pressurizing chamber for pressing the transfer printing plate against a member to be printed is formed in the upper mold.   The mounting mold for a transfer printing plate according to claim 3, wherein a rigid transfer printing plate is held on the upper die, and the transfer printing plate is attached to a member to be printed.   In a transfer printing method for transferring a concavo-convex shape of a transfer printing plate to a member to be printed by pressing the transfer printing plate on which the concavo-convex is formed in a vacuum, holding either the transfer printing plate or the member to be printed A transfer printing method comprising: forming a sealed space when an upper mold and a lower mold are combined, evacuating the sealed space, and then depositing a transfer printing plate on a member to be printed.   The transfer printing method according to claim 6, wherein, after the plate is attached, the back surface of the transfer printing plate is pressurized with air pressure to press the transfer printing plate against a member to be printed. The transfer printing method according to claim 6, wherein after the plate is transferred and the unevenness of the transfer printing plate is transferred to the member to be printed, the vacuum state of the sealed space is released, and then the transfer printing plate is released from the member to be printed.

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