JP2006013124A - Flush lamp unit - Google Patents

Flush lamp unit Download PDF

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JP2006013124A
JP2006013124A JP2004187900A JP2004187900A JP2006013124A JP 2006013124 A JP2006013124 A JP 2006013124A JP 2004187900 A JP2004187900 A JP 2004187900A JP 2004187900 A JP2004187900 A JP 2004187900A JP 2006013124 A JP2006013124 A JP 2006013124A
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flash lamp
power supply
supply line
line
terminal
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Kenichiro Matsushita
賢一郎 松下
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Ushio Denki KK
Ushio Inc
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Ushio Denki KK
Ushio Inc
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Priority to JP2004187900A priority Critical patent/JP2006013124A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a flash lamp unit wherein the feed line of a flash lamp is not broken, if the line vibrates during lighting of the lamp. <P>SOLUTION: The flash lamp unit has a flash lamp composed of a pair of opposed electrodes hermetically sealed in an emitting cylindrical tube closed with end walls at both ends, lead bars connected to the electrodes, and a feed line 4 electrically connected to the lead bars led out of the end walls. The feed line 4 is connected to a terminal base 1 through a feed terminal 2 with a flexible member 30 at the feed line end for limiting the movement of the feed line 4. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、半導体や薄膜トランジスタ製造の際の加熱に用いられるフラッシュランプ装置に関する。   The present invention relates to a flash lamp device used for heating in manufacturing a semiconductor or a thin film transistor.

半導体のイオン注入層の活性化等の熱処理工程において、従来まで、ハロゲンランプを使用した熱処理を行なっていた。この方法では、活性化可能な温度領域まで昇温するのに処理時間が１〜６０秒程度かかる。この時間によって熱伝導により活性化されるイオン注入層の厚みはどうしても厚くなってしまう。
従来までは、この方法で充分であったが、半導体の進む方向は、集積回路をさらに小型、高速化、省エネ化するための性能アップです。そのためには、イオン注入層の活性化させる層の深さをより浅くする必要がある。そうなると、ハロゲンランプによる熱処理では、処理時間がかかりすぎて深いところまで加熱してしまい、浅い層の活性化には不適です。 Conventionally, heat treatment using a halogen lamp has been performed in a heat treatment process such as activation of an ion implantation layer of a semiconductor. In this method, it takes about 1 to 60 seconds to increase the temperature to the temperature range where activation is possible. By this time, the thickness of the ion implantation layer activated by heat conduction inevitably increases.
Up until now, this method was sufficient, but the direction of progress in semiconductors is to improve performance to further reduce the size, speed, and energy of integrated circuits. For this purpose, it is necessary to make the depth of the layer to activate the ion implantation layer shallower. In this case, the heat treatment with a halogen lamp takes too much time and heats up to a deep location, making it unsuitable for activating shallow layers.

そこで出てきたフラッシュランプによる熱処理は、処理時間が１ｍｓｅｃ程度とハロゲンランプよりはるかに短時間で活性化可能な温度領域まで昇温処理できるので、浅い層の活性化に適している。
現在では、フラッシュランプによる熱処理装置が半導体工場に導入され、浅い層の活性化等の熱処理に使用されだした。
このようなフラッシュランプによる熱処理装置においては、図６に示すように、フラッシュランプへの給電のための給電線４の端部は、給電端子２の圧着部５を圧着することによって給電端子２と連結され、その給電端子２は固定ネジ３等を用いて熱処理装置の本体に設けられた端子台１に直接固定していた。 Thus, the heat treatment using the flash lamp is suitable for activating a shallow layer because the heat treatment can be performed up to a temperature range in which the treatment time is about 1 msec and can be activated in a much shorter time than a halogen lamp.
At present, a heat treatment apparatus using a flash lamp has been introduced into a semiconductor factory and has been used for heat treatment such as activation of a shallow layer.
In such a heat treatment apparatus using a flash lamp, as shown in FIG. 6, the end of the power supply line 4 for supplying power to the flash lamp is connected to the power supply terminal 2 by crimping the crimping part 5 of the power supply terminal 2. The power supply terminal 2 was directly fixed to the terminal block 1 provided in the main body of the heat treatment apparatus using a fixing screw 3 or the like.

しかしながら、最近は、基板等の加熱条件を達成するために、フラッシュランプはより短いパルス幅でかつより高いエネルギーで瞬間的に点灯されることが要求されるようになってきた。
このような、より大きなエネルギーが投入されるフラッシュランプでは、給電線４が振動することが起き、それによって特に給電線４と端子２の接続部である圧着部５が断線する、という従来にはなかった新たな問題が生ずることがわかってきた。 Recently, however, flash lamps have been required to be turned on instantaneously with a shorter pulse width and higher energy in order to achieve heating conditions for the substrate and the like.
In such a flash lamp in which a larger amount of energy is input, the feeding line 4 is vibrated, and in particular, the crimping part 5 that is a connecting part between the feeding line 4 and the terminal 2 is disconnected. It has been found that there were new problems that did not exist.

このような点灯時に振動が発生する原因は、はっきりと解明されてはいないが、以下のように考えられる。
１、給電線の周りに生ずる磁界によって、ランプハウスなどの金属部分に渦電流が生じ、該渦電流によって給電線にローレンツ力が働く。この力はフラッシュランプ点灯時の一瞬に働くため、給電線は振動する。
２、複数のフラッシュランプが近接配置されていると、各給電線の周りに生ずる磁界の中に、他のランプの給電線が存在することで、他のランプの給電線にローレンツ力が生じる。この力はフラッシュランプ点灯時の一瞬に働くため、給電線は振動する。
これらが原因で給電線が振動すると考えられている。
特開昭５７−１６２３４０号公報 The reason for the occurrence of vibration at the time of lighting is not clearly understood, but is considered as follows.
1. An eddy current is generated in a metal part such as a lamp house by a magnetic field generated around the feed line, and a Lorentz force acts on the feed line by the eddy current. Since this force works instantaneously when the flash lamp is lit, the feeder line vibrates.
2. When a plurality of flash lamps are arranged close to each other, the Lorentz force is generated in the power supply lines of the other lamps because the power supply lines of the other lamps exist in the magnetic field generated around each power supply line. Since this force works instantaneously when the flash lamp is lit, the feeder line vibrates.
It is thought that the feed line vibrates due to these reasons.
JP 57-162340 A

そこで、本願発明は、フラッシュランプの点灯時に、給電線が振動しても、断線しない、フラッシュランプ装置を提供することを目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide a flash lamp device that does not break even when a power supply line vibrates when the flash lamp is turned on.

そこで、フラッシュランプの点灯時の振動によって、給電線が振動して断線することを回避するために、給電線端部に給電線の移動を制限する柔軟な部材が設けられている。
より詳細には、該柔軟な部材は、給電線を端子台に固定するバンドである。
また、該柔軟な部材は、給電線端部の外周に設けられた管状部材である。 Therefore, in order to prevent the power supply line from vibrating and being disconnected due to vibration when the flash lamp is lit, a flexible member that restricts the movement of the power supply line is provided at the end of the power supply line.
More specifically, the flexible member is a band that fixes the feeder line to the terminal block.
The flexible member is a tubular member provided on the outer periphery of the end portion of the feeder line.

本願発明は、給電端子で固定された給電線端部に給電線の移動を制限する柔軟な部材を設けたことで、たとえフラッシュランプの点灯時に給電線に振動が発生しても、該振動のエネルギーがこの柔軟な部材に吸収されて、給電線と給電端子の接続部である圧着部に伝わることがなく該圧着部での断線を防ぐことができるフラッシュランプ装置を提供することができる。   The present invention provides a flexible member that restricts the movement of the power supply line at the end of the power supply line fixed by the power supply terminal, so that even if vibration occurs in the power supply line when the flash lamp is lit, It is possible to provide a flash lamp device in which energy is absorbed by the flexible member and is not transmitted to the crimping portion which is a connection portion between the power supply line and the power supply terminal, and disconnection at the crimping portion can be prevented.

図１は本発明に係るフラッシュランプ装置の全体を示す外観図である。
複数本の棒状のフラッシュランプ１２がランプハウス１０内に紙面に平行に並べて配置されている。フラッシュランプ１２からの放射は窓１３を介してその下におかれた基板等のワークを加熱する。フラッシュランプ１２の端部は給電線１４に接続され、本体に設けられた端子台１に固定されている。端子台１からは給電線１５を介して電源装置１１に電気的に接続されている。給電線１４，１５の端部の固定部分近傍には給電線押さえ１７が設けられている。フラッシュランプ１２には点灯始動用のトリガワイヤ回路が設けられているが、この図では省略されている。 FIG. 1 is an external view showing an entire flash lamp device according to the present invention.
A plurality of rod-like flash lamps 12 are arranged in the lamp house 10 in parallel with the paper surface. Radiation from the flash lamp 12 heats a workpiece such as a substrate placed under the window 13. An end portion of the flash lamp 12 is connected to a power supply line 14 and is fixed to a terminal block 1 provided in the main body. The terminal block 1 is electrically connected to the power supply device 11 through the feeder line 15. In the vicinity of the fixed portion at the ends of the feeder lines 14 and 15, a feeder line presser 17 is provided. The flash lamp 12 is provided with a trigger wire circuit for starting lighting, but is omitted in this figure.

図２は、フラッシュランプ装置に用いられる一般的なフラッシュランプである。
フラッシュランプ１２は、発光管１８が石英ガラスからなり、発光管１８の外径φ８ ｍｍ〜φ１８ｍｍ、肉厚１ｍｍ〜１．５ｍｍ、発光管全長１２０ｍｍ〜１１００ｍｍであり、内部にはキセノンガスが１３．３ｋＰａ〜６６．５ｋＰａ（１００Ｔｏｒｒ〜５００Ｔｏｒｒ）（２５℃換算）封入されている。係る発光管１８内部において電極１９が対向配置され、各電極１９に連設されたリード棒２０が前記発光管１８の端壁部を介して気密に導出されている。発光管１８の外周にはトリガワイヤ２１が設けられている。リード棒２０の外端部には給電線１４が接続され、フラッシュランプ１２に給電される。このフラッシュランプ１２において、電極１９間距離即ちアークの長さは例えば７０ｍｍ〜１０００ｍｍである。フラッシュランプ１２は、トリガワイヤ２１による高電圧によって電極１９間に放電破壊が生じ、その後給電線１４を介して電極１９間に主放電が生じて、閃光放電が生成される。 FIG. 2 shows a general flash lamp used in a flash lamp device.
In the flash lamp 12, the arc tube 18 is made of quartz glass, the arc tube 18 has an outer diameter of φ8 mm to φ18 mm, a wall thickness of 1 mm to 1.5 mm, and a total length of the arc tube of 120 mm to 1100 mm. 3 kPa to 66.5 kPa (100 Torr to 500 Torr) (in terms of 25 ° C.) are enclosed. In the arc tube 18, the electrodes 19 are disposed so as to face each other, and lead bars 20 connected to the electrodes 19 are led out in an airtight manner through the end wall portion of the arc tube 18. A trigger wire 21 is provided on the outer periphery of the arc tube 18. A power supply line 14 is connected to the outer end portion of the lead bar 20 to supply power to the flash lamp 12. In the flash lamp 12, the distance between the electrodes 19, that is, the length of the arc is, for example, 70 mm to 1000 mm. In the flash lamp 12, a discharge breakdown occurs between the electrodes 19 due to the high voltage generated by the trigger wire 21, and then a main discharge occurs between the electrodes 19 via the power supply line 14 to generate a flash discharge.

以下、本願発明を、給電線押さえ１７の具体的な構成に基づいて、説明する。   Hereinafter, the present invention will be described on the basis of a specific configuration of the feeder holding member 17.

図３は、本発明の第１の実施例である。給電線押さえ１７として、弾性体で出来た結束バンド３０で固定した構造を説明する図である。
第１の実施例は、給電端子２を固定ネジ３等によって本体に設けられた端子台１に固定する。更に、ゴム、樹脂等の弾性体からなるバンド、たとえば結束バンド３０を、端子台１の固定用孔３１に通してから、給電端子２近傍の給電線４をも束ねることで、給電端子２近傍の給電線４の端部を端子台１に固定している。これによって、給電線４に振動が生じても、その振動は弾性体の結束バンド３０で緩和されることによって、給電線４と給電端子２の接続部である圧着部５に伝わることはなく、該圧着部５が破断する等の問題が生じない。なお、結束バンド３０の数は１本に限らず、複数本の結束バンド３０によって給電線４を端子台１に取り付けても良い。また、圧着部５を保護するためにチューブ等の被覆保護部材３２を設けても良い。 FIG. 3 shows a first embodiment of the present invention. It is a figure explaining the structure fixed with the binding band 30 made of an elastic body as the feeder line presser 17.
In the first embodiment, the power supply terminal 2 is fixed to the terminal block 1 provided on the main body by a fixing screw 3 or the like. Furthermore, a band made of an elastic body such as rubber or resin, for example, a binding band 30 is passed through the fixing hole 31 of the terminal block 1 and then the power supply line 4 in the vicinity of the power supply terminal 2 is also bundled so that the vicinity of the power supply terminal 2 The end of the feeder line 4 is fixed to the terminal block 1. As a result, even if vibration occurs in the feeder line 4, the vibration is not transmitted to the crimping portion 5, which is a connection portion between the feeder line 4 and the feeder terminal 2, by being relaxed by the elastic binding band 30. There is no problem that the crimping part 5 is broken. Note that the number of the binding bands 30 is not limited to one, and the power supply line 4 may be attached to the terminal block 1 by a plurality of binding bands 30. In addition, a covering protection member 32 such as a tube may be provided to protect the crimping portion 5.

図４は、本発明の第２の実施例である。給電線押さえ１７として、弾性体３３で挟み固定する構造を説明する図である。
第２の実施例は、給電端子２を固定ネジ３等によって本体に設けられた端子台１に固定するとともに、給電線４の固定端子２近傍をゴム、樹脂等の弾性体３３で挟み、固定用部品３４で固定する。これによって、給電線４に振動が生じても、その振動はゴム等の弾性体３３で吸収されて、給電線４と給電端子２の接続部である圧着部５に伝わることはなく、該圧着部５が破断する等の問題が生じない。なお、複数のフラッシュランプを並列に並べて使用するランプ装置の場合には、１つの幅広なゴム、樹脂等の弾性体３３で複数のフラッシュランプの給電線４の端部を一括して挟み、固定するようにしても良い。 FIG. 4 shows a second embodiment of the present invention. It is a figure explaining the structure pinched and fixed by the elastic body 33 as the feeder line holding | suppressing 17.
In the second embodiment, the power supply terminal 2 is fixed to the terminal block 1 provided on the main body by a fixing screw 3 or the like, and the vicinity of the fixed terminal 2 of the power supply line 4 is sandwiched between elastic bodies 33 such as rubber and resin, and fixed. The parts 34 are fixed. As a result, even if vibration occurs in the power supply line 4, the vibration is absorbed by the elastic body 33 such as rubber and is not transmitted to the crimping part 5 that is a connection part between the power supply line 4 and the power supply terminal 2. Problems such as breakage of the portion 5 do not occur. In the case of a lamp device that uses a plurality of flash lamps arranged in parallel, the end portions of the power supply lines 4 of the plurality of flash lamps are collectively sandwiched and fixed by one wide elastic body 33 such as rubber or resin. You may make it do.

図５は、本発明の第３の実施例である。給電線押さえ１７として、給電線４の端部近傍に管状部材３５を設けた構造を説明する図である。
第３の実施例は、給電端子２を固定ネジ３等によって本体に設けられた端子台１に固定するとともに、給電線４の固定端子２近傍にゴム、樹脂等の弾性体からなる管状部材３５をその一端が圧着部５を取り囲むように挿入して取り付ける。これによって、給電線４に振動が生じ、その振動が弾性体の管状部材３５に伝わっても、管状部材３５が撓むことで振動が吸収される。これによって、振動が給電線４と給電端子２との接続部である圧着部５に伝わることはなく、該圧着部５が破断する等の問題が生じない。 FIG. 5 shows a third embodiment of the present invention. FIG. 6 is a diagram illustrating a structure in which a tubular member 35 is provided in the vicinity of an end portion of the feeder line 4 as the feeder line retainer 17.
In the third embodiment, the power supply terminal 2 is fixed to the terminal block 1 provided on the main body by a fixing screw 3 or the like, and a tubular member 35 made of an elastic body such as rubber or resin is provided near the fixed terminal 2 of the power supply line 4. Is inserted and attached so that one end thereof surrounds the crimping part 5. As a result, even if vibration is generated in the feeder 4 and the vibration is transmitted to the tubular member 35 that is an elastic body, the vibration is absorbed by the bending of the tubular member 35. As a result, the vibration is not transmitted to the crimping part 5 which is the connection part between the feeder 4 and the feeding terminal 2, and the problem that the crimping part 5 is broken does not occur.

本発明に係るフラッシュランプ装置の全体を示す外観図である。1 is an external view showing an entire flash lamp device according to the present invention. フラッシュランプ装置に用いられる一般的なフラッシュランプの図である。It is a figure of the common flash lamp used for a flash lamp apparatus. 本発明の第１の実施例である、フラッシュランプの給電線を結束バンドで固定した状態を説明する図である。It is a figure explaining the state which fixed the electric power feeding line of the flash lamp which is 1st Example of this invention with the binding band. 本発明の第２の実施例である、フラッシュランプの給電線をゴム等の弾性体で挟み固定した状態を説明する図である。It is a figure explaining the state which pinched | interposed and fixed the electric power supply line of the flash lamp which is the 2nd Example of this invention with elastic bodies, such as rubber | gum. 本発明の第３の実施例である、フラッシュランプの給電線の端部近傍に管状部材を設けた状態を説明する図である。It is a figure explaining the state which provided the tubular member in the edge part vicinity of the feeder of a flash lamp which is the 3rd Example of this invention. 従来の、フラッシュランプの給電線の固定構造の図である。It is a figure of the conventional fixing structure of the feeder of flash lamp.

符号の説明Explanation of symbols

１ 端子台
２ 給電端子
３ 固定ネジ
４ 給電線
５ 圧着部
１０ ランプハウス
１１ 電源装置
１２ フラッシュランプ
１３ 窓
１４、１５ 給電線
１７ 給電押さえ
１８ 発光管
１９ 電極
２０ リード棒
２１ トリガワイヤ
３０ 結束バンド
３１ 固定用孔
３２ 被覆保護部材
３３ 弾性体
３４ 固定用部品
３５ 管状部材
DESCRIPTION OF SYMBOLS 1 Terminal block 2 Feed terminal 3 Fixing screw 4 Feed line 5 Crimp part 10 Lamp house 11 Power supply device 12 Flash lamp 13 Window 14, 15 Feed line
17 Feeding press 18 Arc tube 19 Electrode 20 Lead rod 21 Trigger wire 30 Binding band 31 Fixing hole 32 Cover protection member 33 Elastic body 34 Fixing component 35 Tubular member

Claims (3)

円筒管の両端に端壁部が形成されて密閉された発光管の内部に一対の電極が対向配置され、該電極に連設されたリード棒が前記端壁部より導出されてなるフラッシュランプと、リード棒に電気的に接続される給電線とからなるフラッシュランプ装置において、該給電線は給電端子によって端子台に固定されるとともに、給電線端部に給電線の移動を制限する柔軟な部材が設けられていることを特徴とするフラッシュランプ装置。   A flash lamp in which end walls are formed at both ends of a cylindrical tube and a pair of electrodes are disposed opposite to each other inside a sealed arc tube, and a lead rod connected to the electrodes is led out from the end wall; In a flash lamp device comprising a power supply line electrically connected to the lead rod, the power supply line is fixed to the terminal block by a power supply terminal, and a flexible member that restricts the movement of the power supply line to the end of the power supply line A flash lamp device is provided. 該柔軟な部材は、給電線を端子台に固定するバンドであることを特徴とする、請求項１記載のフラッシュランプ装置。   The flash lamp device according to claim 1, wherein the flexible member is a band for fixing the power supply line to the terminal block. 該柔軟な部材は、給電線端部の外周に設けられた管状部材であることを特徴とする、請求項１記載のフラッシュランプ装置。
2. The flash lamp device according to claim 1, wherein the flexible member is a tubular member provided on the outer periphery of the end portion of the feeder line.
JP2004187900A 2004-06-25 2004-06-25 Flush lamp unit Pending JP2006013124A (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
JP7408988B2 (en) 2019-10-10 2024-01-09 ウシオ電機株式会社 flash irradiation device

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JPH01103192A (en) * 1987-10-15 1989-04-20 Yamada Yuki Seizo Kk On/off control circuit for motor
JPH04287076A (en) * 1991-03-15 1992-10-12 Fujitsu Ltd Holding structure for flash lamp
JPH08180913A (en) * 1994-12-21 1996-07-12 Sumitomo Wiring Syst Ltd Alternator terminal cap
JPH11135170A (en) * 1997-10-27 1999-05-21 Furukawa Electric Co Ltd:The Connecting device for communication cable
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JP2003100138A (en) * 2001-09-20 2003-04-04 Harison Toshiba Lighting Corp Holder for discharge lamp lighting equipment and discharge lamp lighting equipment
JP2005019832A (en) * 2003-06-27 2005-01-20 Hitachi Kokusai Electric Inc Substrate processor

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JPS57182865A (en) * 1981-05-06 1982-11-10 Mitsubishi Electric Corp Microprocessor
JPS61153065A (en) * 1984-12-27 1986-07-11 Mitsubishi Heavy Ind Ltd Slidable member
JPS63198177A (en) * 1987-02-13 1988-08-16 Matsushita Electric Ind Co Ltd Optical reader
JPH01103192A (en) * 1987-10-15 1989-04-20 Yamada Yuki Seizo Kk On/off control circuit for motor
JPH04287076A (en) * 1991-03-15 1992-10-12 Fujitsu Ltd Holding structure for flash lamp
JPH08180913A (en) * 1994-12-21 1996-07-12 Sumitomo Wiring Syst Ltd Alternator terminal cap
JPH11135170A (en) * 1997-10-27 1999-05-21 Furukawa Electric Co Ltd:The Connecting device for communication cable
JP2001307794A (en) * 2000-04-17 2001-11-02 Sekisui House Ltd Disconnection preventing structure for box storing terminal
JP2003100138A (en) * 2001-09-20 2003-04-04 Harison Toshiba Lighting Corp Holder for discharge lamp lighting equipment and discharge lamp lighting equipment
JP2005019832A (en) * 2003-06-27 2005-01-20 Hitachi Kokusai Electric Inc Substrate processor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7408988B2 (en) 2019-10-10 2024-01-09 ウシオ電機株式会社 flash irradiation device

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