JP2006011306A - Emitting beam adjusting device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an emitting beam adjusting device and an emitting beam adjusting method with which a directional adjustment of the beam axis of a mirror with respect to an emitting target is easily and accurately conducted and the directional performance of the optical axis of the mirror is not degraded by external disturbance such as vibration or the like. <P>SOLUTION: The emitting beam adjusting device is provided with a first movable frame body 13 which is assembled into a fixed frame body 11 having a cylindrical cavity section and a second movable frame body 14 which incorporates a mirror 27. The direction in the opening end face of the first movable frame body 13 is provided to have a prescribed angular difference with respect to the surface direction orthogonal to a center axis a2. The opening end face of the second movable frame body 14 is provided to have a prescribed angular difference with respect to the surface direction orthogonal to a center axis a3. By turning at least either one of the first movable frame body 13 or the second movable frame body 14 around the center axis, the beam direction of the emitting beams via the mirror 27 can be arbitrarily adjusted while holding the surface contact condition of the opening end faces of the movable frame bodies 13 and 14. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an exit beam adjustment apparatus and an exit beam adjustment method including a mirror that reflects or transmits a beam having a predetermined frequency, and in particular, a beam such as a light beam having a required frequency can be adjusted with respect to an exit target via a mirror. The present invention relates to an exit beam adjustment apparatus and an exit beam adjustment method that can be easily and accurately performed.

  Conventionally, this type of exit beam adjusting device needs to adjust the correct beam axis in advance toward the exit target in order to obtain the correct direction of the exit beam.

  When adjusting the beam axis, fine adjustment with a considerable degree of accuracy is required according to the size and distance of the injection target, and the direction (elevation angle and azimuth angle) of the emission beam axis is slightly changed during this fine adjustment. The required beam axis is obtained.

  As such an exit beam adjusting device, there is one disclosed in Japanese Patent Laid-Open No. 2001-153725 (see [Patent Document 1]).

  As shown in FIG. 7, the exit beam adjusting apparatus includes a fixed frame 2 that forms an outline of the exit beam adjusting apparatus 1, and a mirror provided so that a beam axis 3 can be obtained at the center of the fixed frame 2. 4, a movable frame 5 provided so that the mirror 4 can be rotated around the beam axis 3, and a control for controlling the rotation angle of the movable frame 5 to control the beam axis 3 in a required direction. Part 6 is provided.

The mirror 4 is provided so that the control unit 6 can automatically control the beam axis 3 directed in the beam axis direction in a required direction, or the movable frame 5 can be controlled by manual operation. Further, the control unit 6 has a function of fixing the movable frame body 5 so as not to move after the movable frame body 5 is controlled to a predetermined rotation angle.
JP 2001-153725 A (page 4, left column, lines 5 to 36 and FIG. 3)

  According to the configuration of the emission beam adjusting device 1, the mirror 4 is provided so that the movable frame 5 is rotated manually to control the direction of the beam axis 3 or can be automatically adjusted by the control unit 6. Therefore, the exact direction of the emitted beam can be obtained.

  According to the configuration of the exit beam adjusting device 1, the direction of the beam axis 3 obtained by the mirror 4 is finely adjusted only by the rotation of one movable frame 5 that rotates in a plane orthogonal to the beam axis 3. As a result, the range and accuracy of fine adjustment were limited.

  Further, since the mirror 4 is provided so as to be rotatable with respect to the movable frame 5, there is a possibility that disturbance such as vibration is added and the optical axis direction performance is slightly deteriorated.

  Therefore, according to the exit beam adjusting device 1, when the distance from the mirror 4 to the exit target is considerably long or when the exit target is considerably small, the optical axis direction performance of the mirror 4 is significantly deteriorated. Accordingly, there has been a demand for an improved exit beam adjusting device.

  The present invention has been made in view of the above circumstances, and in actual operation, the beam axis obtained by the mirror can be easily and accurately adjusted, and the optical axis of the mirror can be controlled against disturbances such as vibration. An object of the present invention is to provide an exit beam adjustment device and an exit beam adjustment method that do not impair directional performance.

  In order to achieve the above object, according to the present invention, a fixed frame having a cylindrical cavity, a first movable frame that is concentrically incorporated in the cylindrical cavity of the fixed frame, A second movable frame body concentrically incorporated in the cylindrical cavity portion of the first movable frame body and provided with a mirror, and the first movable frame body has an opening of the cylindrical cavity portion. An end surface is provided so as to have a required angle with a surface orthogonal to the central axis of the cylindrical cavity, and the second movable frame body has an opening end surface of the cylindrical cavity that has the cylindrical cavity. By providing at least one of the first movable frame body and the second movable frame body around the central axis, the first and second movable frame bodies are provided so as to have a required angle with a plane orthogonal to the central axis. An exit bee that exits through the mirror while the opening end surface of the second movable frame body maintains a surface contact state. Providing an injection beam controller according to claim a beam direction that was arbitrarily adjustable.

  To achieve the above object, according to the present invention, the opening end surface of the cylindrical cavity portion of the first movable frame body incorporated on the fixed frame body side is provided with a required angle with the central axis of the cylindrical cavity portion. The opening end surface of the cylindrical cavity portion of the second movable frame body incorporated in the cylindrical cavity portion of the first movable frame body is provided with a required angle with respect to the central axis of the cylindrical cavity portion, and The opening end surfaces of each of the first movable frame body and the second movable frame body are joined in a surface contact state, and at least one of the first movable frame body and the second movable frame body is rotated around the central axis. There is provided an exit beam adjustment method characterized in that an optical axis direction of a mirror can be arbitrarily finely adjusted by moving the mirror.

  According to the present invention, the optical axis of the emitted beam with respect to the emission target can be easily and accurately performed even when the size of the emission target of the beam is considerably small or the distance to the emission target is considerably long. It is possible to provide an exit beam adjusting device and an exit beam adjusting method that do not impair the directional performance of the optical axis against disturbances such as the above.

  An embodiment of an exit beam adjusting apparatus according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a schematic diagram showing an embodiment of an exit beam adjusting apparatus 10 of the present invention.

  The exit beam adjusting device 10 is incorporated into a fixed frame 11 serving as a base and a cylindrical cavity 12 of the fixed frame 11 so as to be rotatable about a central axis a1 of the cylindrical cavity 12. A cylindrical first movable frame 13 having an open end face 23 and an open end face 24 joined in surface contact with the open end face 23 of the first movable frame 13 are formed in a cylindrical shape. 2 movable frame bodies 14.

  As shown in FIG. 2, the fixed frame body 11 has a cylindrical cavity portion 12 having a central axis a <b> 1, and the first movable frame body 13 is concentrically assembled and held in the cylindrical cavity portion 12. The body portion 15, a plurality of leg portions 16 that support and fix the body portion 15 on the attached body (not shown) side, and the outer peripheral side of the body portion 15, for example, protrude in a rib shape in four directions, up, down, left, and right The clamp portion 17 is provided.

  A ring-shaped groove 11a is formed in the cylindrical cavity portion 12 of the fixed frame body 11 at the end of the inner peripheral edge, and the fixed frame body 11 is fixed so as to be engaged with and fixed to the ring-shaped groove 11a. It is incorporated inside the cylindrical cavity 12.

  Reference numeral 18 denotes a tightening screw that is screw-coupled to the screw hole 17a of the clamp portion 17. When the first movable frame body 13 is fixed to the fixed frame body 11 side, for example, a lightweight and rigid saddle type such as an aluminum alloy is used. The stopper 19 is firmly tightened and fixed to the clamp portion 17 side.

  As shown in FIG. 2, the first movable frame 13 includes a cylindrical cavity 20 having a central axis a <b> 2 and an annular groove 22 formed on the outer periphery of the central portion of the first movable frame 13. . Further, the first movable frame 13 is formed with a flange portion 26 adjacent to the annular groove 22 on the outer peripheral side of the center portion thereof.

  When the first movable frame 13 is fitted on the fixed frame 11 side, the flange portion 26 is engaged and fixed to the ring-shaped groove 11a on the fixed frame 11 side. .

  The first movable frame 13 has a pair of screw holes 24c that are opposed to each other at a point symmetrical with respect to an axial center point of the central axis a2 (hereinafter referred to as the central axis point) on the opening end face side. And a pair of grooves 25 provided in the diametrical direction at an angular position of 90 ° from the position of the screw holes 24c.

  A surface bonding state between the first movable frame body 13 and the second movable frame body 14 is schematically shown in FIG. 3 on the opening end surface 23 of the first movable frame body 13.

  The first movable frame 13 has a direction in which an axial direction perpendicular to the opening end surface 23 of the first movable frame 13 is perpendicular to the central axis a2 of the cylindrical cavity 20 of the first movable frame 13. In contrast, it has an angle α ° (deg). As shown in FIGS. 3 and 4A to 4D, this angle α ° is, for example, an angle range of 0 ° to 0.5 ° (deg) depending on the direction and distance of the beam emission target T. can do.

  That is, in the state shown in FIG. 3 and FIG. 4A, the direction of the injection target T facing the mirror 27 is 0 ° coaxial with the central axes a1 to a3.

  4B to 4D, the second movable frame 14 is rotated by 90 to 270 degrees as indicated by the arrows in FIGS. The direction indicates directions of α ° and (α + β) ° in the elevation direction.

  Further, although not shown, the azimuth angle direction can be finely adjusted by rotating the first movable frame 13 in the arrow direction shown in FIGS. 4B to 4D or in the opposite direction. .

  Further, as shown in FIG. 2, the second movable frame body 14 is formed with a cylindrical cavity portion 30 having a central axis a <b> 3 and an annular groove 32 on the outer periphery of the center portion of the second movable frame body 14. .

  The opening end surface 24 of the second movable frame 14 has an axial direction orthogonal to the opening surface of the cylindrical cavity 30 shown in FIGS. 5A and 5B as shown in FIGS. Furthermore, it has an angle of β ° (deg) with respect to the direction orthogonal to the central axis a2. This angle β ° can be set to an angle range of 0.01 ° to 0.5 ° (deg), for example, according to the size and distance of the beam emission target.

  And the opening end surface 23 of these 1st movable frame bodies 13 and the opening end surface 24 of the 2nd movable frame body 14 are joined to a surface contact state, as shown in FIG.

  In the joined state, as shown in FIG. 4A, when the central axis a2 of the first movable frame 13 is a reference angle (± 0 °), the central axis of the second movable frame 14 The reference angle (± 0 °) is also set for a3.

  In this state, the direction of the mirror 27 provided on the second movable frame 14 is the same as the direction of the central axis a3 of the cylindrical cavity 30.

  As a joining means between the fixed frame body 11 and the first movable frame body 13, for example, a saddle type fastener 19 having a metal rigidity such as a nickel alloy and a fastening screw 18 a are used.

  When tightening the tightening screw 18a, as shown in FIGS. 2, 5 (a) and 5 (b), the saddle-type stopper 19 is tightened with the base 19a side on the fixing frame 11 side. While fixing by 18a, the side of the flange (locking portion) 19b is engaged with and fixed to the annular groove 22 side of the first movable frame 13.

  Moreover, when fixing the 2nd movable frame 14 to the 1st movable frame 13 side, a pair of saddle-type fasteners 21 and another pair of saddle-type fasteners 31 are used. That is, the pair of saddle-shaped stoppers 21 is made of a resin having a low coefficient of friction characteristic such as a fluorinated resin, and the base portion 21a is placed on the pair of groove portions 25 side of the second movable frame body 14. It is fixed with the fastening screw 18b, and the flanges 21b, 21b are engaged with the annular groove 32 side of the second movable frame body 14 and fixed.

  The pair of saddle-type stoppers 31 that fix the first and second movable frame bodies 13 and 14 to each other is a point of the central axis of the central axis a2 (a3) of the first and second movable frame bodies 13 and 14. When the second movable frame body 14 is fixed to the first movable frame body 13 side, these first and second movable frame bodies 13 and 14 are mutually fixed. It is fixed in a surface contact state while being pressed in the direction of the central axis a2 (a3).

  The other pair of saddle-type stoppers 31 are made of metal, such as nickel alloy, and have a base 31a on the side of the pair of screw holes 24c of the first movable frame 13 and tightening screws 18c. The flange 21b is locked to the annular groove 32 side of the second movable frame 14 and fixed.

  The mirror 27 provided on the second movable frame 14 of the exit beam adjusting device 10 passes, for example, a part of the beam and reflects the rest, or passes only a beam having a specific frequency, and the like. A frequency selective mirror that reflects a beam having a predetermined frequency is used. When used as a half mirror, the exit beam adjustment device 10 can be applied to a resonance circuit device of an amplifier (not shown). Further, when used as a frequency selective mirror, it can be applied to, for example, a laser beam processing apparatus (not shown) that requires frequency characteristics.

  Next, the beam emission direction by the emission beam adjusting device 10 will be described with reference to FIGS.

  FIG. 6 shows the adjustable range of the beam axis indicating the emission direction of the beam.

  In the adjustable range of the beam axis shown in FIG. 4A, the beam direction in the range shown in FIG. 6A is defined.

  In adjusting the exit beam adjusting device 10 to a required use state, as shown in FIG. 3, the cylindrical cavities 12, 20 and 20 of the first movable frame body 13 and the second movable frame body 14, respectively. The 30 central axes a1, a2 and a3 are configured to have a common axis.

  From this state, the exit beam is adjusted in the direction most directed to the exit target T side.

  FIGS. 6B to 6D show beam emission directions when the second movable frame body 14 is adjusted from the state in which the first movable frame body 13 is rotated by 90 °, 180 °, and 270 °, respectively. The range of is prescribed.

  That is, when it is assumed that the beam emission direction directed to the emission target T is aimed within the directivity direction area z1 shown in FIG. 6A, for example, as shown in FIGS. The first movable frame 13 remains in the reference direction (the elevation angle is 0 °), the second movable frame 14 is rotated by 0 ° to 360 ° (deg), and the rotation range is within the pointing direction area. Confirm that it is z1. Then, the second movable frame 13 is rotated while the first movable frame 13 is rotated within a range of about ± 30 to 45 ° with reference to the range in the directivity direction area z1 in FIG. The body 14 is rotated in the range of 0 ° to 360 °. By this operation, for example, the beam directing direction (injection direction) with respect to the emission target T1 shown in FIG.

  Furthermore, for example, when aiming in the directivity direction areas z2 to z4 shown in FIGS. 6B to 6D, the first movable frame 13 is oriented as shown in FIG. 6B, for example. When the direction area z2 is specified, the second movable frame body 14 is rotated by 0 ° to 360 ° (deg), and the beam direction of the emission target T2 is searched. Then, the second rotating frame body 14 is temporarily fixed to the first movable frame body 13 by the saddle type fasteners 21 and 31 in the beam direction searched.

  Further, when the directivity direction areas z3 and z4 are specified, the second movable frame body 14 is rotated by 0 ° to 360 ° (deg) in the same manner as when the directivity method area z2 is specified.

  Note that, when the first movable frame body 13 is rotated, a precision drive mechanism such as a micro gear that is interlocked with the rotation operation of the second movable frame body 14 may be employed.

  Then, a more accurate beam direction in this temporarily fixed state is scrutinized by, for example, manual operation, and the operation from the temporarily fixed state to the final tightened state is performed.

  Further, as shown in FIG. 4A, when the angle difference α ° of the first movable frame 13 and the angle difference β ° of the second movable frame 14 are the same angle, FIG. As shown in (a), the central axes a2 and a3 of the cylindrical cavity 20 of the first movable frame 13 and the cylindrical cavity 30 of the second movable frame 14 are concentric.

  Therefore, when there is a concentric relationship as described above, the central axis of the mirror 27 of the second rotating frame 14 is also concentric, and the reference angle (± 0 °) for emitting the beam in the front direction is obtained.

  On the other hand, when the second movable frame body 14 is rotated by 180 °, for example, an angle difference of (α + β) ° with respect to the reference angle is obtained as shown in FIG. In other words, as shown in FIG. 6A, an angle difference (α + β) ° in the elevation angle direction is obtained from the beam emitted with this angle difference.

  In the adjustment operation for obtaining the predetermined angle difference, first, the pair of hook-shaped stoppers 21 are used for fixing. The saddle-type stopper 21 can use the low friction coefficient characteristic peculiar to the fluororesin, and when tightened with the tightening screw 18c, the saddle-shaped stopper 21 is in the direction of the central axis a3 of the second movable frame body 14. Can be fixed tightly. That is, the opening end surfaces 23 and 24 of the first and second movable frame bodies 13 and 14 are held in a surface contact state.

  Next, it is fixed using a saddle-type stopper 31.

Further, when the second movable frame body 14 is fixed to the first movable frame body 13 side using the saddle-type stopper 31, either the first movable frame body 13 or the second movable frame body 14 is used. Can be finely adjusted around the central axis a2 (a3).

  That is, since the pair of saddle-shaped stoppers 21 has a low coefficient of friction characteristic, it can be rotated in a minute angle range by applying a predetermined turning force to the direction around the central axis a2 (a3). That is, fine adjustment is possible. This fine adjustment enables directivity adjustment with high accuracy with respect to the injection target T.

  The exit beam adjusting device 10 searches the areas shown in FIGS. 6B to 6D when there is no exit target within the range shown in FIG. That is, in order to adjust the reference angle of the second movable frame 14 within a range of 0 to 360 °, for example, when the first movable frame 13 is at a reference angle of 0 °, for example. As shown in FIG. 6A, the intersection point of the x-axis and the y-axis is set as a reference point p1, and adjustment is possible within the radius r in the + side direction (elevation angle) of the y-axis. FIG. 6A shows that adjustment is possible within the range of an arc m drawn with a radius r.

  In order to adjust the reference angle of the second movable frame 14 within a range of 0 to 360 °, for example, when the first movable frame 13 is at a position of + 90 °, for example, FIG. As shown in FIG. 6 (b), the intersection of the x axis and the y axis can be adjusted within the range of the radius r in the − side direction (azimuth angle) of the x axis with the reference point p2.

  Furthermore, in order to adjust the reference angle of the second movable frame 14 within a range of 0 to 360 °, for example, when the first movable frame 13 is at a position of + 180 °, for example, FIG. As shown in FIG. 6 (c), the intersection of the x-axis and the y-axis can be adjusted within the range of the radius r in the negative side direction (azimuth angle) of the y-axis with the reference point p3.

  Furthermore, when the first movable frame 13 is at a position of + 270 °, for example, and the reference angle of the second movable frame 14 is adjusted within a range of 0 to 360 °, for example, As shown in FIG. 6D, the intersection of the x-axis and the y-axis can be adjusted within the radius r in the + side direction (azimuth angle) of the x-axis with the reference point p4. According to this adjustment work, the workability is improved at the stage of performing a fine adjustment from the temporarily fixed state to the final tightened state.

  According to the exit beam adjusting device 10, the adjustment work in the direction in which the mirror 27 faces the exit target T is performed from the temporarily fixed state of the first movable frame 13 and the second movable frame 14 to the fixed frame 11. At the stage of performing fine adjustment up to the tightening state, the adjustment is easy and accurate adjustment can be performed.

  Furthermore, according to the configuration of the exit beam adjusting apparatus 10 of the present invention, the second movable frame body 14 equipped with the mirror 27 is fixed to the fixed frame body 11 via the first movable frame body 13. Since it is adopted, even when a disturbance such as vibration is added on the equipment side using the emission beam adjusting device 10, the vibration is absorbed on the first and second movable frame bodies 13 and 14 side, and indirectly. Is not transmitted to the mirror 27 side. Therefore, the optical axis of the mirror 27 can be accurately maintained in the expected state.

1 is a perspective view of an emission beam adjusting device according to an embodiment of the present invention. FIG. 2 is an exploded perspective view of the emission beam adjusting device in FIG. 1. The conceptual diagram of the injection | emission beam adjustment apparatus of this invention. It is a figure which shows the adjustable range of the beam axis in the emission beam adjustment apparatus of this invention, (a)-(d) is a figure which divides and shows the adjustable range. FIG. 3 is a longitudinal side view of the exit beam adjusting apparatus showing two states in which the beam axis of the mirror is different in the exit beam adjusting apparatus of FIG. 1. FIG. 5A is a diagram illustrating an adjustable range of a beam axis illustrated in FIG. 4A, and FIGS. 5A to 5D are diagrams illustrating states of an exit beam adjusting apparatus having different beam axes. The perspective view which shows the outline | summary of the conventional injection beam adjustment apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Ejection beam adjustment apparatus 11 Fixed frame 11a Ring-shaped groove | channel 12, 20, 30 Cylindrical cavity part 13 1st movable frame body 14 2nd movable frame body 15 Body part 16 Leg part 17 Clamp part 17a, 24c Screw hole 18a to 18c Clamping screws 19, 21, 31 Scissors type fasteners 19a, 21a, 31a Base portions 19b, 21b, 31b Saddle portions 22, 32 Annular grooves 23, 24 Open end face 25 Groove portion 26 Flange portion 27 Mirrors a1-a3 Central axis m Arc p1-p4 Reference point r Radius z1-z4 Directional direction area T, T1-T4 Injection target

Claims (5)

A fixed frame having a cylindrical cavity, a first movable frame incorporated concentrically in the cylindrical cavity of the fixed frame, and concentric with the cylindrical cavity of the first movable frame And a second movable frame body provided with a mirror,
The first movable frame is provided such that the opening end surface of the cylindrical cavity has a required angle with a surface orthogonal to the central axis of the cylindrical cavity,
The second movable frame is provided such that the opening end surface of the cylindrical cavity has a required angle with a surface orthogonal to the central axis of the cylindrical cavity,
By rotating at least one of the first movable frame body and the second movable frame body around the central axis, the opening end surfaces of the first and second movable frame bodies maintain the surface contact state. An exit beam adjusting device characterized in that the beam direction of an exit beam exiting through a mirror can be arbitrarily adjusted. The second movable frame incorporated in the cylindrical cavity of the first movable frame is fixed to the first movable frame via a saddle type fastener having a low friction coefficient characteristic. The exit beam adjusting device according to claim 1, wherein The second movable frame incorporated in the cylindrical cavity of the first movable frame has a plurality of low friction coefficient characteristics at point-symmetrical positions of the central axis of each of the first and second movable frames. The exit beam adjusting device according to claim 1, wherein the exit beam adjusting device is fixed through a saddle type fastener. The opening end surface of the cylindrical cavity portion of the first movable frame body incorporated on the fixed frame body side is provided with a required angle with the central axis of the cylindrical cavity portion, and the cylindrical cavity portion of the first movable frame body The opening end surface of the cylindrical cavity portion of the second movable frame body incorporated into the center axis of the cylindrical cavity portion and a required angle;
The opening end surfaces of the first movable frame body and the second movable frame body are joined in a surface contact state, and at least one of the first movable frame body and the second movable frame body is rotated around the central axis. The exit beam adjustment method is characterized in that the optical axis direction of the mirror can be arbitrarily finely adjusted by rotating the mirror in the direction. The open end faces of the first and second movable frames are brought into surface contact with each other by a saddle type fastener having a low friction coefficient characteristic at a point-symmetrical position of the central axis of each of the first and second movable frames. When at least one of the first and second movable frame bodies is rotated around the central axis while being held in a state, fine adjustment is possible using the low friction coefficient characteristics of the saddle-type stopper The exit beam adjusting method according to claim 4, wherein:

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