JP2006009722A - Vacuum pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase ultimate pressure and enhance vacuum, and to facilitate change in specifications of the vacuum and displacement by a single vacuum pump. <P>SOLUTION: This vacuum pump comprises: a drive source 2; a crank link rotor 4 attached to an eccentric shaft 3A of a crankshaft 3; a plurality of connecting rods 6 swingably fixed on an outer periphery of the crank link rotor 4; a piston 8 freely rotatably attached to a tip of each connecting rod 6; a plurality of cylinder chambers 9 circumferentially disposed to slidably house each piston 8; and a cylinder main body 13 making opening end sides of cylinder chambers 9 communicate with intake/exhaust ports of individual check valve heads 10, and taking air therein or exhaust air therefrom through exhaust side check valves 12A disposed on one side and intake side check valve 12B disposed on the other side. An exhaust port of at least a check valve head 10 is connected with an intake port of the other check valve head 10 through a pipe 41. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vacuum pump that can perform intake and exhaust using a rotor that rotates eccentrically and a plurality of pistons.

Conventionally, as this type of vacuum pump, for example, there are those of Hankel type, scroll type, rolling piston type, vane type and the like. Each of these has a rotor that is housed in an eccentric arrangement in the casing, and in a single pump chamber formed between the inner surface of the casing and the outer periphery of the rotor by a rotational movement accompanied by rotation, revolution, or revolution of the rotor by a drive source. This is due to a single compression stage that repeatedly changes the volume of the intake and exhaust air. At this time, the gas in the pump chamber that has shifted to the compression stroke passes through a check valve provided in each exhaust hole from the exhaust hole and is discharged to the outside through the drain pipe. Further, as a conventional check valve, a check valve structure in which a ball is held by a spring is used.
nothing special

  However, since various types of conventional vacuum pumps are configured by a single compression stage that performs intake and exhaust by causing a volume change in a single pump chamber formed between the inner surface of the casing and the outer periphery of the rotor. Intake and exhaust can be performed only in the cylinders, and therefore, intake and exhaust can be performed simultaneously in two or more cylinders. In the conventional vacuum pump, the load applied to the drive source is large, and in the case of the piston type, the load applied to the resin piston ring is also increased. In addition, conventional vacuum pumps cannot handle both pressure and pressure reductions, and the valve structure cannot be used for fluids. In addition, vibration and noise are high, pulsating flow is remarkable, and heat is generated. The amount is greatly accompanied. Further, the conventional check valve has various problems such as noise generated from the check valve itself because the ball is held by a spring.

  Therefore, the present invention was created in view of the existing circumstances as described above, and has a structure with a so-called multiple compression stage that enables linear movement of a plurality of pistons by a single power source. Simultaneous intake / exhaust of two or more cylinders enables high vacuum to be obtained in a short time, and the ultimate pressure can be increased, and one unit can be provided by various connection forms of the plurality of compression stages. In addition to being able to easily change the specifications of the degree of vacuum and displacement with this pump, it is possible to reduce the load on the drive source, the load on the resin piston ring, etc. To provide a vacuum pump with a valve structure that can be used for fluids, low vibration and noise, low pulsation, and low heat generation For the purpose.

  In order to solve the above-described problem, in the present invention, a power source, a crank shaft having an eccentric shaft to which an output shaft of the power source is attached, a crank link rotor attached to the eccentric shaft of the crank shaft, and a crank A plurality of connecting rods pivoted so as to be swingable at a plurality of locations on the outer periphery of the link rotor, a piston mounted to be freely rotatable at the tip of each connecting rod, and each piston slidably received Provided with a plurality of cylinder chambers arranged at equal intervals along the circumferential direction, the open end side of each cylinder chamber communicates with the intake and exhaust holes of individual check valve heads, the exhaust side check valve disposed on the upper side, the lower side At least one check in a vacuum pump comprising a cylinder body that performs intake and exhaust by each intake side check valve arranged on the side The exhaust hole of the head which are connected to the air inlet of the other check valve head.

  Alternatively, a power source, a sun gear attached to the output shaft of the power source, a plurality of planetary gears meshed with the sun gear, and pivotally mounted so as to be swingable at the outer peripheral portion of each planetary gear. A plurality of connecting rods, pistons attached to the tips of the connecting rods so as to be freely rotatable, and a plurality of cylinder chambers arranged at equal intervals along the circumferential direction so as to slidably accommodate each piston. Cylinders in which the open end side of each cylinder chamber is connected to the intake / exhaust hole of an individual check valve head, and intake / exhaust is performed by an exhaust side check valve disposed on one side and an intake side check valve disposed on the other side. In a vacuum pump comprising a main body, an exhaust hole of at least one check valve head may be connected to an intake hole of another check valve head.

  An intake hole of one check valve head of a plurality of cylinder chambers arranged at equal intervals along the circumferential direction is connected to the vacuum device side, and an exhaust hole of the check valve head is an intake air of another check valve head The exhaust hole of the other check valve head is further connected to the intake hole of the other check valve head until the final other check valve head is repeated.

  Further, six check valve heads are arranged along the circumferential direction, and among these, the exhaust holes of three check valve heads adjacent to each other are connected to the intake holes of the other two check valve heads. The exhaust holes of the two check valve heads can be connected to the intake holes of the other check valve head at the same time.

  Six check valve heads are arranged along the circumferential direction. Of these, the exhaust holes of four check valve heads adjacent to each other are simultaneously connected to the intake holes of the other check valve head, and the other check valve heads are connected. The exhaust hole of one check valve head may be connected to the intake hole of another check valve head.

  Six check valve heads are arranged along the circumferential direction. Of these, the check valve head exhaust holes on both sides of the three adjacent check valve heads are connected to the intake holes of the central check valve head. What is connected simultaneously can be comprised as a pair.

  Six check valve heads are arranged along the circumferential direction, and one of the two check valve heads adjacent to each other is connected to the exhaust hole of one check valve head with the intake hole of the other check valve head. These can be configured as three sets.

  Six check valve heads are arranged along the circumferential direction. Among them, an intake hole of a certain check valve head is connected to the vacuum apparatus side, and an exhaust hole of the check valve head is an intake air of another check valve head. A pair of the exhaust holes connected to the holes and the exhaust holes of the other check valve heads connected to the intake holes of the other check valve heads may be paired.

  Each of the exhaust side check valve and the intake side check valve can be formed by inserting a spherical valve element between a valve seat and a valve presser made of synthetic resin.

  The cylinder body having the above-described structure can be formed by overlapping a plurality of stages.

  In the vacuum pump according to the present invention configured as described above, when the crank link rotor rotates eccentrically via the crankshaft by the rotational drive of the power source, a plurality of parts connected to the outer periphery of the crank link rotor via the connecting rod Each of the pistons slides back and forth in the cylinder chamber of the cylinder body with a predetermined time lag. Alternatively, when the surrounding planetary gears are rotated via the sun gear by the rotation drive of the power source, each of the plurality of pistons connected to the outer periphery of each planetary gear via the connecting rods has a predetermined time lag. Reciprocates in the room. Thus, intake and exhaust are individually performed by each of a plurality of check valve heads having an exhaust side check valve arranged on one side and an intake side check valve arranged on the other side.

  In this way, the rotary motion of the power source is converted into the linear motion of multiple pistons by rotating the crank link rotor eccentrically with a single power source or rotating the surrounding planetary gears via the sun gear. To form a plurality of compression stages. And since the piston located on the opposite side has the same vector direction moment with respect to a certain one piston, the load applied to the power source is reduced.

  Further, by connecting the exhaust hole of at least one check valve head to the intake hole of another check valve head, a higher degree of vacuum can be achieved easily, and the degree of vacuum and displacement can be achieved with a single vacuum pump. Allows specification changes.

  Furthermore, the exhaust-side check valve and the intake-side check valve, in which a spherical valve body is inserted between the valve seat and the valve presser made of synthetic resin, each have a valve seat and valve presser made of synthetic resin. Gives cushioning to the body and keeps it sealed.

  The cylinder body formed by overlapping a plurality of stages makes it possible to double the number of pistons without increasing the overall outer shape of the apparatus.

  According to the present invention, by adopting a structure with a plurality of compression stages that enables linear movement of a plurality of pistons by a single power source, intake and exhaust can be performed simultaneously in two or more cylinders, thereby shortening the time. A high degree of vacuum can be easily obtained, and the ultimate pressure can be increased, and the specifications of the degree of vacuum and displacement can be easily changed with a single pump by various connection forms of these multiple compression stages. In addition, the load on the drive source and the load on the resin piston ring can be reduced. In addition to being able to handle both pressure and pressure reduction, the valve structure can also be used for fluids and has low vibration and The noise can be reduced, the pulsating flow is small, and the calorific value is small.

  Further, since the valve structure itself is a watertight structure, it can be used for fluid intake and discharge, and can be used even under mist conditions. In addition, the load on the power source can be reduced because the piston located on the opposite side has the same vector direction moment with respect to a certain piston, and therefore the intake and exhaust air can be reduced at the check valve head positions facing each other. When both are performed at the same time, the connecting / disconnecting operations of the connecting rods arranged opposite to each other can be performed in a balanced manner.

  In particular, when connecting the exhaust hole of at least one check valve head to the intake hole of another check valve head, the first stage and the first stage of checking that the intake hole of the check valve head is connected to the vacuum device side By the second stage of connecting the exhaust hole of the valve head to the intake hole of the other check valve head, the third stage of connecting the exhaust hole of the second check valve head to the intake hole of the other check valve head,. Since it comprised, the higher degree of vacuum can be achieved easily. In addition, according to the connection method of the fourth to seventh aspects, it is possible to change the specifications of the degree of vacuum and the displacement with a single vacuum pump.

  A sun gear attached to the output shaft of the power source; a plurality of planetary gears meshed with the sun gear; and a plurality of connecting rods pivotally mounted so as to be swingable at the outer peripheral portion of each planetary gear; Therefore, it is not necessary to fix one of the connecting rods so as not to swing with respect to the mounting hole on the outer periphery of the crank link rotor by the crank pin, so that the connecting rod has a uniform swing width.

  Furthermore, the exhaust-side check valve and the intake-side check valve, in which a spherical valve body is inserted between the valve seat and the valve presser made of synthetic resin, each have a valve seat and valve presser made of synthetic resin. It is possible to provide cushioning to the body and to maintain the sealing property, thereby preventing the generation of noise such as hitting the valve seat and the valve presser with the valve body.

  A cylinder body formed by overlapping a plurality of stages can double the number of pistons without enlarging the outer shape of the entire apparatus, and enables smooth multistage compression. Moreover, the balance of operation is obtained by making the movements of the pistons opposite each other in the upper and lower stages, and the vibration of the entire vacuum pump can be suppressed as much as possible.

  Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings. Reference numeral 1 shown in the figure is absorbed by a plurality of cylinders by an eccentric rotating crank link rotor 4 and a plurality of pistons 8 described later. This is a vacuum pump that can perform exhaust. In this embodiment, the case of six cylinders has been described. However, the present invention is not limited to this, and is a plurality of cylinders other than six cylinders. Of course it is also good.

  That is, as shown in detail in FIG. 2 and subsequent figures, the vacuum pump 1 includes a single power source 2 such as a brushless motor, and an output shaft 2A of the power source 2 attached to the lower central shaft hole and is eccentric to the upper side. The crankshaft 3 having the shaft 3A, the disc-shaped crank link rotor 4 attached to the eccentric shaft 3A of the crankshaft 3, and a plurality of locations on the outer periphery of the crank link rotor 4, for example, six locations at equal intervals on the circumference. For example, six connecting rods 6 that are pivotally attached to the mounting holes via the crank pins 5 so that each of them can swing, and free rotation via the piston pins 7 at the tips of the connecting rods 6. Each of the cylinders is provided with six pistons 8 attached so as to be capable of being provided, and six cylinder chambers 9 arranged at equal intervals along the circumferential direction so as to accommodate the pistons 8 so as to be slidable. The opening end side of the chamber 9 is communicated with the intake / exhaust hole 11 of the individual check valve head 10, and intake / exhaust is performed by the exhaust side check valve 12A arranged on the upper side and the intake side check valve 12B arranged on the lower side, respectively. The cylinder body 13 is generally composed of a substantially donut-shaped cylinder body 13.

  The crank link rotor 4 is formed in the shape of a thin disk around the center hole, and the crank pin is inserted into each of the six mounting holes formed at equal intervals along the circumference of this portion at intervals of 60 °. One end side of the connecting rod 6 is pivotally attached via 5 so that each except one can swing. At this time, the front end side of the crank pin 5 is made into a D-cut shape, the front end side is fitted into the mounting hole of the crank link rotor 4 after the connecting rod 6 is inserted, and the screw 17 is screwed from the outer peripheral side to lock the D-cut flat side. By doing so, the crank pin 5 and the crank link rotor 4 are integrated.

  In addition, one of the six connecting rods 6 is formed with a threaded portion at the insertion point of the connecting pin 6 of the crank pin 5 so as not to swing with respect to the mounting hole on the outer periphery of the crank link rotor 4, and faces this. Then, the screw hole of the crankpin 5 is fixed by screwing into the screw hole formed in the connecting rod 6. The head of the crankpin 5 to be fixed is formed to be thick and a hole for attaching a hexagon wrench is provided at the center, thereby facilitating the screwing operation of the crankpin 5.

  Furthermore, the other end side of the connecting rod 6 is fitted and inserted into a horizontally long rectangular recess formed on the rear plane side of the cylindrical piston 8, and a hole formed on the other end side of the connecting rod 6 and the piston 8. The long piston pin 7 is inserted into both holes after matching the holes formed so as to penetrate the upper and lower sides of the rear plane side, and formed at both ends of the piston pins 7 protruding vertically The E-shaped retaining ring 18 is fixed to the annular groove portion that is formed.

  An annular groove portion 19A for fitting an O-ring 19 is formed at two locations on the front and rear sides of the peripheral surface of the piston 8, and six cylinder bodies 13 are fitted through these O-rings 19 to be fitted thereto. Each of the six pistons 8 can slide in the cylinder chamber 9. Thus, each piston 8 has a three-point support structure to which support by the connecting rod 6 is added.

  The cylinder body 13 is formed in a substantially donut shape as a whole, and six cylinder chambers 9 are formed at regular intervals at intervals of 60 ° along the circumference so as to face the six pistons 8. Yes. And the one end opening side of the cylinder chamber 9 is arrange | positioned at the inner peripheral surface side of the donut-shaped cylinder main body 13, and the other end opening side of the cylinder chamber 9 is arrange | positioned at the outer peripheral surface side. The piston 8 is inserted from one end opening side of the cylinder chamber 9 on the inner peripheral surface side.

  The check valve heads 10 are individually arranged on the outer opening end side of each cylinder chamber 9 so as to face one of the T-shaped intake / exhaust holes 11 formed in the check valve head 10. The intake valve 11 is connected to the upper exhaust side check valve 12A communicating with the intake / exhaust hole 11 of the check valve head 10 and the lower intake side check valve 12B. Exhaust is performed. Both the check valves 12A and 12B have a configuration in which a cylindrical spacer collar 22 is interposed between the valve seat 20 and the valve presser 21, and a spherical valve body 23 is inserted into each of these members. Yes.

  That is, the exhaust-side check valve 12A is formed by a pipe body having a nut-shaped pipe connection hole at one end, as shown in FIGS. Then, a thin donut-shaped valve seat 20 made of synthetic resin is fitted, then a metal cylindrical spacer collar 22 is inserted, a valve body 23 is further inserted, and then a cross-shaped slit portion is formed on the bottom surface side. A circular cap-shaped synthetic resin valve presser 21 having 21A formed therein is fitted from the bottom side.

  On the other hand, the intake side check valve 12B is formed by a pipe body having a nut-shaped pipe connection hole at one end, as shown in FIGS. 6 (c) and 6 (d). A circular cap-shaped synthetic resin valve presser 21 having a cross-shaped slit portion 21A formed on the bottom side is fitted with the bottom side facing outward, and then a metal cylindrical spacer collar 22 is inserted. Further, after inserting the valve body 23, a thin plate donut-shaped valve seat 20 made of synthetic resin is fitted.

  Next, the method for changing the specifications of the vacuum pump having the above-described configuration will be described. In the present invention, as many compression stages as the number of pistons 8 can be made, so that the degree of vacuum can be achieved with one vacuum pump by these connection methods. The displacement can be easily changed. Specifically, the exhaust hole of at least one check valve head 10 is connected to the intake hole of another check valve head 10 by a pipe 41 made of, for example, a vinyl chloride pipe or a stainless steel pipe.

  For example, in the case of a six-cylinder vacuum pump that can expect a maximum six-fold displacement, a check is made by connecting a suction port directly to the piston 8 that sucks air from the vacuum device side, that is, a vacuum device side (not shown) via a pipe 41. Assuming that the piston 8 of the valve head 10 is in the first stage, the number of pistons 8 (check valve head 10) in the first stage determines the exhaust amount. The second stage is the piston 8 of the other check valve head 10 when the exhaust hole of the check valve head 10 of the first stage is connected to the intake hole of the other check valve head 10 by the pipe 41. Further, the third stage is the piston 8 of the other check valve head 10 when the exhaust hole of the second stage check valve head 10 is connected to the intake hole of the other check valve head 10 by the pipe 41.

  Similarly, the ultimate pressure is determined by the number of stages (number of stages). In the case of a six-cylinder vacuum pump, up to six stages can be taken. If the stages are simply made up of the same number of 6 cylinders, as described later, there are 6 stages of 1: 1: 1: 1: 1: 1 (see FIGS. 7 and 8), 3 stages of 2: 2: 2, There are three patterns of two stages of 3: 3.

  However, since the displacement is determined by the number of pistons 8 in the first stage, even in the same two stages, the number of pistons 8 that intake air from the vacuum device side is large. For example, as shown in FIG. The intake holes of one check valve head 10 are connected to the vacuum device side via a pipe 41 (first stage × 4), and the exhaust holes of the first stage check valve head 10 are used as intake holes of other check valve heads 10. The other check valve heads 10 connected by the pipe 41 have two (second stage × 2) 4: 2 or five check valve heads 10 and the suction holes of the check valve heads 10 are connected to the vacuum device side (first stage × 5). ) There is one (second stage × 1) other check valve head 10 in which the exhaust hole of the first stage check valve head 10 is connected to the intake hole of the other check valve head 10 by a pipe 41. 5: 1 The higher exhaust is obtained.

  Next, a specific connection method will be described. In the case of 1: 1: 1: 1: 1: 1 with a 6-cylinder vacuum pump, as shown in FIG. 7 and FIG. The intake hole is connected to the vacuum device side via a pipe 41 (first stage × 1), and the exhaust hole of the first stage check valve head 10 is connected to the intake hole of another check valve head 10 via the pipe 41 One other check valve head 10 (second stage × 1), the other check valve head 10 having the exhaust hole of the second stage check valve head 10 connected to the intake hole of the other check valve head 10 by a pipe 41 10 is one (third stage × 1)...

  As shown in FIG. 9, in the case of 3: 2: 1 with a 6-cylinder vacuum pump, the intake holes of the three check valve heads 10 are connected to the vacuum device side via a pipe 41 (first stage × 3) Two other check valve heads 10 in which the exhaust holes of the check valve head 10 in the first stage are connected to the intake holes of other check valve heads 10 by piping (second stage × 2), the second stage The other check valve head 10 in which the exhaust hole of the check valve head 10 is connected to the intake hole of the other check valve head 10 by a pipe 41 is one (third stage × 1). That is, among the six check valve heads 10, the exhaust holes of the three check valve heads 10 adjacent to each other are connected to the intake holes of the other two check valve heads 10 by the pipe 41, and the other two check valve heads are connected. The exhaust hole of the head 10 is configured to be simultaneously connected to the intake hole of another check valve head 10 by a pipe 41.

  Further, as shown in FIG. 10, in the case of 4: 1: 1 with a 6-cylinder vacuum pump, the intake holes of the four check valve heads 10 are connected to the vacuum device side via a pipe 41 (first stage × 4) One other check valve head 10 in which the exhaust hole of the check valve head 10 in the first stage is connected to the intake hole of another check valve head 10 by a pipe 41 (second stage × 1), two stages The other check valve head 10 in which the exhaust hole of the check valve head 10 of the eye is connected to the intake hole of the other check valve head 10 by the pipe 41 is one (third stage × 1). That is, the exhaust holes of four check valve heads 10 adjacent to each other among the six check valve heads 10 are simultaneously connected to the intake holes of the other check valve head 10 by the pipe 41, and the other one check valve is connected. The exhaust hole of the valve head 10 is further connected to the intake hole of another check valve head 10 by a pipe 41.

  As shown in FIG. 11, in the case of 4: 2 with a 6-cylinder vacuum pump, the intake holes of the four check valve heads 10 are connected to the vacuum device side via a pipe 41 (first stage × 4). There are two (second stage × 2) other check valve heads 10 in which the exhaust holes of the first stage check valve head 10 are connected to the intake holes of the other check valve heads 10 by pipes 41. That is, the exhaust holes of the check valve heads 10 on both sides of the three check valve heads 10 adjacent to each other among the six check valve heads 10 are simultaneously connected to the intake holes of the central check valve head 10 by the pipe 41. The configuration is as follows.

  Further, in the above connection method, if the respective intake holes are not collected by the pipe 41 and valves are separately installed, this vacuum pump can take the intake holes as many as the number of the pistons 8. That is, a single vacuum pump can have a plurality of functions, and there are merits in all aspects such as installation location, power source, number of motors, and power consumption. For example, as shown in FIG. 12, among the six cylinders, two sets of check valve heads 10 are connected to each other, and three sets are independent: 1: 1, 1: 1, 1: 1 (intake holes × 3, If it connects by the piping 41 so that it may become an exhaust hole x3), the two-stage pump will be obtained for 3 units | sets. Similarly, if 1: 1: 1 and 1: 1: 1, two three-stage pumps are obtained.

  FIGS. 13 and 14 show another embodiment, in which the cylinder body 13 having the above-described structure is overlapped in a plurality of stages, and the exhaust hole of the check valve head 10 in the lower cylinder body 13 is provided in the upper cylinder. The main body 13 is connected in series to the intake hole of the check valve head 10. At this time, the central portion of the eccentric shaft 3A is stepped so that the protruding eccentric shaft 3A shifted from the rotation center of the crankshaft 3 is in a symmetrical position with respect to the rotation center axis of the crankshaft 3. By attaching the crank link rotor 4 to the upper and lower sides through this central portion, the movements of the pistons 7 of the upper cylinder body 13 and the lower cylinder body 13 are opposite to each other. It is. The configuration of each part of the upper and lower cylinder main body 13 is the same as that of the above-described single-stage cylinder main body 13, and thus the description thereof is omitted.

  FIG. 15 shows still another embodiment, and a planetary gear mechanism is employed in the cylinder body 13 having the above-described structure. In addition, since the structure of each connection method of the check valve head 10 by the piston 8, the cylinder chamber 9, the check valve head 10, and the piping 41 is substantially the same as the above-described embodiment, the description thereof is omitted. That is, in the present embodiment, a sun gear 31 is attached to the output shaft of the power source 2, and a plurality (six) of planetary gears 32 corresponding to the number of pistons 8 (six cylinders) are attached to the sun gear 31. Meshed arrangement. Then, the connecting rods 6 are pivotally mounted so as to be swingable to the outer peripheral portions of the planetary gears 32 (positions deviated from the rotation center of the planetary gears), and the free ends of the connecting rods 6 can be freely rotated. The piston 8 described above is connected. In this way, the rotating motion of the power source 2 is converted into the linear motion of the plurality of pistons 8 by rotating the surrounding planetary gears 32 via the sun gear 31 rotated by the single power source 2. The compression stage is formed.

  Next, a use operation according to the configuration of the present invention will be described. First, when the power source 2 is driven to rotate, the crank link rotor 4 rotates eccentrically via the crankshaft 3. At this time, each of the plurality of pistons 8 connected to the outer periphery of the crank link rotor 4 via the connecting rod 6 reciprocally slides in the cylinder chamber 9 of the cylinder body 13 with a predetermined time lag.

  That is, as shown in FIGS. 3 to 5, when the crank link rotor 4 is eccentrically rotated through the crankshaft 3 by the rotational drive of the power source 2, one piston 8 (the first on the left side in FIG. 3) The piston 8) of the cylinder 8 is pushed and slid to the maximum in the cylinder chamber 9, and at the same time, the opposite piston 8 (the fourth piston 8 on the right side in FIG. The state of being pulled out and sliding to the limit is defined as the initial position state.

  Next, when the crank link rotor 4 is eccentrically rotated clockwise by, for example, 120 ° from the initial position state, the third piston 8 disposed adjacently along the clockwise direction is pushed into the cylinder chamber 9 to the maximum extent. At the same time, the sixth piston 8 on the opposite side facing the piston 8 is slid out of the cylinder chamber 9 to the maximum extent (see FIG. 4).

  Further, in the state where the crank link rotor 4 is eccentrically rotated clockwise by, for example, 240 ° from the initial position, the fifth piston 8 arranged adjacently along the clockwise direction is pushed into the cylinder chamber 9 to the maximum extent and slid. At the same time, the second piston 8 opposite to the piston 8 is slid out of the cylinder chamber 9 as much as possible (see FIG. 5).

  As described above, the crank link rotor 4 is eccentrically rotated by the single power source 2 to convert the rotational motion of the power source 2 into the linear motion of the plurality of pistons 8. At this time, since the piston 8 located on the opposite side has a moment in the same vector direction with respect to a certain one piston 8, the load applied to the power source 2 is reduced. Thus, intake and exhaust are performed for each individual cylinder chamber 9 by each of the plurality of check valve heads 10 having the exhaust side check valve 12A disposed on the upper side and the intake side check valve 12B disposed on the lower side.

  At this time, for example, as shown in FIG. 11, the intake holes of the four check valve heads 10 are connected to the vacuum device side (first stage × 4), and the exhaust holes of the first check valve head 10 are subjected to other checks. The other check valve heads 10 connected to the intake holes of the valve head 10 are connected so that there is two (second stage × 2) 4: 2, or the intake holes of the five check valve heads 10 are vacuumed. One other check valve head 10 connected to the apparatus side (first stage × 5) and connecting the exhaust hole of the first check valve head 10 to the intake hole of another check valve head 10 (two stages) 1 × 1) By connecting so as to be 5: 1, high exhaust can be obtained.

  Further, for example, as shown in FIG. 12, among the 6 cylinders, two sets of check valve heads 10 are connected to each other to make three sets independent: 1: 1, 1: 1, 1: 1 (intake hole × 3 and exhaust holes × 3), it is possible to obtain three 2-stage pumps. Similarly, if 1: 1: 1 and 1: 1: 1, two three-stage pumps can be obtained.

[BRIEF DESCRIPTION OF THE DRAWINGS] It is a perspective view of the vacuum pump which shows the best form for implementing this invention. It is the longitudinal cross-sectional view of a vacuum pump similarly. It is a top view of the eccentric rotation initial state of a rotor similarly. It is a top view which similarly shows the state rotated eccentrically 120 degrees from the eccentric rotation initial position of the rotor. It is a top view which shows the state which carried out 240 degree eccentric rotation similarly from the eccentric rotation initial position of the rotor. Similarly, an example of the configuration of the exhaust side check valve and the intake side check valve is shown, (a) is an exploded perspective view of the exhaust side check valve, (b) is a cross-sectional view after the exhaust side check valve is assembled, and (c) is the intake side. FIG. 4D is an exploded perspective view of the side check valve, and FIG. 4D is a cross-sectional view after the intake side check valve is assembled. It is a perspective view of a cylinder main body similarly. It is a side view of a cylinder main body similarly. It is a perspective view of the cylinder main body in 2nd Embodiment. It is a perspective view of the cylinder main body in 3rd Embodiment. It is a perspective view of the cylinder main body in 4th Embodiment. It is a perspective view of the cylinder main body in 5th Embodiment. It is a side view of the cylinder main body in 6th Embodiment. Similarly, it is sectional drawing of the cylinder main body in 6th Embodiment. It is a top view of the cylinder body in a 7th embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum pump 2 Power source 3 Crankshaft 4 Crank link rotor 5 Crank pin 6 Connecting rod 7 Piston pin 8 Piston 9 Cylinder chamber 10 Check valve head 11 Intake / exhaust hole 12A Exhaust side check valve 12B Intake side check valve 13 Cylinder body 31 Sun gear 32 Planetary gear 41 Piping

Claims (10)

  A power source, an output shaft of the power source, a crankshaft having an eccentric shaft, a crank link rotor attached to the eccentric shaft of the crank shaft, and a pivot so as to be swingable at a plurality of locations on the outer periphery of the crank link rotor. A plurality of worn connecting rods, pistons attached to the tip of each connecting rod so as to be freely rotatable, and a plurality of pistons arranged at equal intervals along the circumferential direction so as to slidably accommodate each piston. Equipped with cylinder chambers, with the open ends of each cylinder chamber communicating with the intake and exhaust holes of individual check valve heads, and intake and exhaust are performed by the exhaust side check valve disposed on one side and the intake side check valve disposed on the other side In a vacuum pump comprising a cylinder body, the exhaust hole of at least one check valve head is connected to the intake hole of another check valve head. Wherein the vacuum pump connected.   A power source, a sun gear attached to the output shaft of the power source, a plurality of planetary gears meshed with the sun gear, and a plurality of pivotally attached so as to be swingable at the outer periphery of each planetary gear A connecting rod, a piston attached to the tip of each connecting rod so as to be freely rotatable, and a plurality of cylinder chambers arranged at equal intervals along the circumferential direction so as to accommodate each piston slidably, A cylinder main body in which the open end side of each cylinder chamber communicates with the intake / exhaust hole of an individual check valve head, and intake / exhaust is performed by an exhaust side check valve disposed on one side and an intake side check valve disposed on the other side, and A vacuum pump comprising: an exhaust hole of at least one check valve head connected to an intake hole of another check valve head.   An intake hole of one check valve head of a plurality of cylinder chambers arranged at equal intervals along the circumferential direction is connected to the vacuum apparatus side, and an exhaust hole of the check valve head is connected to another check valve head. 2. The structure according to claim 1, wherein the second check valve head is connected to the intake hole, and the exhaust hole of the other check valve head is further connected to the intake hole of the other check valve head until the final other check valve head is repeated. 2. The vacuum pump according to 2.   Six check valve heads are arranged along the circumferential direction. Of these, the exhaust holes of three check valve heads adjacent to each other are connected to the intake holes of the other two check valve heads, and the other two check valve heads are connected. 4. The vacuum pump according to claim 3, wherein the exhaust holes of two check valve heads are simultaneously connected to the intake holes of another check valve head.   Six check valve heads are arranged along the circumferential direction. Of these, the exhaust holes of four check valve heads adjacent to each other are simultaneously connected to the intake holes of the other check valve head, and the other check valve heads are connected. 4. The vacuum pump according to claim 3, wherein an exhaust hole of one check valve head is further connected to an intake hole of another check valve head.   Six check valve heads are arranged along the circumferential direction. Of these, the check valve head exhaust holes on both sides of the three adjacent check valve heads are connected to the intake holes of the central check valve head. 4. The vacuum pump according to claim 3, wherein the vacuum pumps are connected at the same time as a pair.   Six check valve heads are arranged along the circumferential direction, and one of the two check valve heads adjacent to each other is connected to the exhaust hole of one check valve head with the intake hole of the other check valve head. The vacuum pump according to claim 3, wherein three sets are obtained.   Six check valve heads are arranged along the circumferential direction. Among them, an intake hole of a certain check valve head is connected to the vacuum apparatus side, and an exhaust hole of the check valve head is an intake air of another check valve head. 4. The vacuum pump according to claim 3, wherein the vacuum pump is connected to a hole and the exhaust hole of the other check valve head is further connected to the intake hole of another check valve head.   The vacuum pump according to any one of claims 1 to 7, wherein each of the exhaust side check valve and the intake side check valve has a spherical valve element interposed between a synthetic resin valve seat and a valve presser.   The vacuum pump according to any one of claims 1 to 8, wherein the cylinder main body having the structure is stacked in a plurality of stages.

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