JP2005539389A - メッキ法 - Google Patents
メッキ法 Download PDFInfo
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- JP2005539389A JP2005539389A JP2004537254A JP2004537254A JP2005539389A JP 2005539389 A JP2005539389 A JP 2005539389A JP 2004537254 A JP2004537254 A JP 2004537254A JP 2004537254 A JP2004537254 A JP 2004537254A JP 2005539389 A JP2005539389 A JP 2005539389A
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- Japan
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- Prior art date
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- 238000007747 plating Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 56
- 239000002184 metal Substances 0.000 claims abstract description 56
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims abstract description 45
- 239000000178 monomer Substances 0.000 claims abstract description 44
- 239000002253 acid Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000003999 initiator Substances 0.000 claims abstract description 15
- 229920000642 polymer Polymers 0.000 claims abstract description 13
- 239000002245 particle Substances 0.000 claims abstract description 9
- 238000003486 chemical etching Methods 0.000 claims abstract description 8
- 239000004094 surface-active agent Substances 0.000 claims abstract description 8
- 239000003513 alkali Substances 0.000 claims abstract description 7
- 238000006116 polymerization reaction Methods 0.000 claims abstract description 7
- 239000002904 solvent Substances 0.000 claims abstract description 7
- 239000003086 colorant Substances 0.000 claims abstract description 6
- 238000007641 inkjet printing Methods 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 27
- 229910052802 copper Inorganic materials 0.000 claims description 27
- 239000010949 copper Substances 0.000 claims description 27
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 23
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 239000010931 gold Substances 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- 239000011135 tin Substances 0.000 claims description 9
- 229910052718 tin Inorganic materials 0.000 claims description 9
- 239000011133 lead Substances 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 4
- JKFSTSLUNHRNNX-UHFFFAOYSA-N 1-o-ethyl 2-o-(2-methylprop-2-enoyl) benzene-1,2-dicarboxylate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OC(=O)C(C)=C JKFSTSLUNHRNNX-UHFFFAOYSA-N 0.000 claims 1
- 230000005855 radiation Effects 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000000976 ink Substances 0.000 description 59
- 239000000203 mixture Substances 0.000 description 22
- 239000010410 layer Substances 0.000 description 21
- 229920002120 photoresistant polymer Polymers 0.000 description 19
- 239000000049 pigment Substances 0.000 description 11
- -1 methacryloyl group Chemical group 0.000 description 10
- 239000000126 substance Substances 0.000 description 9
- 239000002270 dispersing agent Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- 150000004056 anthraquinones Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000001055 blue pigment Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910000365 copper sulfate Inorganic materials 0.000 description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000001056 green pigment Substances 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 239000012860 organic pigment Substances 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- ZDQNWDNMNKSMHI-UHFFFAOYSA-N 1-[2-(2-prop-2-enoyloxypropoxy)propoxy]propan-2-yl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(C)COCC(C)OC(=O)C=C ZDQNWDNMNKSMHI-UHFFFAOYSA-N 0.000 description 2
- RBGUKBSLNOTVCD-UHFFFAOYSA-N 1-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C RBGUKBSLNOTVCD-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- CYUZOYPRAQASLN-UHFFFAOYSA-N 3-prop-2-enoyloxypropanoic acid Chemical compound OC(=O)CCOC(=O)C=C CYUZOYPRAQASLN-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- JHWGFJBTMHEZME-UHFFFAOYSA-N 4-prop-2-enoyloxybutyl prop-2-enoate Chemical compound C=CC(=O)OCCCCOC(=O)C=C JHWGFJBTMHEZME-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- MJVAVZPDRWSRRC-UHFFFAOYSA-N Menadione Chemical compound C1=CC=C2C(=O)C(C)=CC(=O)C2=C1 MJVAVZPDRWSRRC-UHFFFAOYSA-N 0.000 description 2
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000002318 adhesion promoter Substances 0.000 description 2
- 239000002671 adjuvant Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 2
- 239000011260 aqueous acid Substances 0.000 description 2
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 235000019241 carbon black Nutrition 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000000417 fungicide Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 2
- 239000012456 homogeneous solution Substances 0.000 description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 235000019239 indanthrene blue RS Nutrition 0.000 description 2
- 238000009830 intercalation Methods 0.000 description 2
- 230000002687 intercalation Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- JNELGWHKGNBSMD-UHFFFAOYSA-N xanthone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3OC2=C1 JNELGWHKGNBSMD-UHFFFAOYSA-N 0.000 description 2
- CKGKXGQVRVAKEA-UHFFFAOYSA-N (2-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=CC=C1 CKGKXGQVRVAKEA-UHFFFAOYSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- QWUWMCYKGHVNAV-UHFFFAOYSA-N 1,2-dihydrostilbene Chemical group C=1C=CC=CC=1CCC1=CC=CC=C1 QWUWMCYKGHVNAV-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- VBGBYFYODWKFRS-UHFFFAOYSA-N 1,3,4,12-tetrahydrobenzo[a]anthracene-2,7-dione Chemical compound C1=CC=C2CC3=C(CC(=O)CC4)C4=CC=C3C(=O)C2=C1 VBGBYFYODWKFRS-UHFFFAOYSA-N 0.000 description 1
- AARKXSUDIUNUSI-UHFFFAOYSA-N 1,4-di(propan-2-yl)thioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C(C(C)C)=CC=C2C(C)C AARKXSUDIUNUSI-UHFFFAOYSA-N 0.000 description 1
- DVFAVJDEPNXAME-UHFFFAOYSA-N 1,4-dimethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(C)=CC=C2C DVFAVJDEPNXAME-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- NZTJDPQPEHQIDT-UHFFFAOYSA-N 1-(2-benzylphenyl)-2-methoxy-2-phenylethanone Chemical compound COC(C(C1=C(C=CC=C1)CC1=CC=CC=C1)=O)C1=CC=CC=C1 NZTJDPQPEHQIDT-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- SVPKNMBRVBMTLB-UHFFFAOYSA-N 2,3-dichloronaphthalene-1,4-dione Chemical compound C1=CC=C2C(=O)C(Cl)=C(Cl)C(=O)C2=C1 SVPKNMBRVBMTLB-UHFFFAOYSA-N 0.000 description 1
- KIJPZYXCIHZVGP-UHFFFAOYSA-N 2,3-dimethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(C)=C2 KIJPZYXCIHZVGP-UHFFFAOYSA-N 0.000 description 1
- LZWVPGJPVCYAOC-UHFFFAOYSA-N 2,3-diphenylanthracene-9,10-dione Chemical compound C=1C=CC=CC=1C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 LZWVPGJPVCYAOC-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 1
- SEILKFZTLVMHRR-UHFFFAOYSA-L 2-(2-methylprop-2-enoyloxy)ethyl phosphate Chemical compound CC(=C)C(=O)OCCOP([O-])([O-])=O SEILKFZTLVMHRR-UHFFFAOYSA-L 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XHZPRMZZQOIPDS-UHFFFAOYSA-N 2-Methyl-2-[(1-oxo-2-propenyl)amino]-1-propanesulfonic acid Chemical compound OS(=O)(=O)CC(C)(C)NC(=O)C=C XHZPRMZZQOIPDS-UHFFFAOYSA-N 0.000 description 1
- MTPIZGPBYCHTGQ-UHFFFAOYSA-N 2-[2,2-bis(2-prop-2-enoyloxyethoxymethyl)butoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCC(CC)(COCCOC(=O)C=C)COCCOC(=O)C=C MTPIZGPBYCHTGQ-UHFFFAOYSA-N 0.000 description 1
- UFDFFEMHDKXMBG-UHFFFAOYSA-N 2-acetamidoprop-2-enoic acid Chemical compound CC(=O)NC(=C)C(O)=O UFDFFEMHDKXMBG-UHFFFAOYSA-N 0.000 description 1
- YQZHOBBQNFBTJE-UHFFFAOYSA-N 2-chloro-3-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(Cl)=C2 YQZHOBBQNFBTJE-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- YPFYAGNJMVGDEV-UHFFFAOYSA-N 2-decylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CCCCCCCCCC)=CC=C3SC2=C1 YPFYAGNJMVGDEV-UHFFFAOYSA-N 0.000 description 1
- JSLWEMZSKIWXQB-UHFFFAOYSA-N 2-dodecylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CCCCCCCCCCCC)=CC=C3SC2=C1 JSLWEMZSKIWXQB-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- LJRWRLUNESCWRY-UHFFFAOYSA-N 2-methyl-5-sulfooxypent-2-enoic acid Chemical compound S(=O)(=O)(O)OCCC=C(C(=O)O)C LJRWRLUNESCWRY-UHFFFAOYSA-N 0.000 description 1
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- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
- C09D11/36—Inkjet printing inks based on non-aqueous solvents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
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- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Glass Compositions (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
- Chemically Coating (AREA)
Abstract
Description
A)30〜90部の、酸基を含まない、一またはそれ以上の官能価を含むアクリレート官能性単量体であって、5〜95重量%が1種または2種以上の一官能性単量体である上記アクリレート官能性単量体;
B)1〜30部の、1個または2個以上の酸基を含むアクリレート官能性単量体;
C)0〜20部のポリマーまたはプレポリマー;
D)0〜20部のラジカル開始剤;
E)0〜5部の着色剤;
F)0〜5部の界面活性剤
を含み、ここで上記インキは40℃において30cP(mPa)以下の粘度を有し、また全ての部数は重量によるものである上記の製造方法が提供される。
1つの態様では、成分A)+B)+C)+D)+E)+F)の部数=100である。
メッキ抵抗性インキは、さらに、放射線または粒子ビーム硬化性組成物中で一般に使用される他の補助剤を含んでいることができる。このような補助剤に、滑り調節剤、チキソトロープ剤、発泡剤、消泡剤、ワックス、オイル、可塑剤、バインダー、酸化防止剤、光開始剤安定剤、光沢剤、殺カビ剤、殺菌剤、有機および/または無機充填材粒子、均展剤、不透明剤、静電防止剤および金属接着促進剤がある。
メッキ金属は、銅、錫、錫/鉛、銀、パラジウム、ニッケルおよび金であるのが好ましい。メッキ金属が銅であるとき、これは誘電体基板中における銅または銅回路部品の先存層の厚さを増すために使用することができる。メッキ金属が錫、錫/鉛、銀、パラジウム、ニッケルまたは金であるとき、これは、銅を環境から保護し、および/または電気的コンタクトを改善するために、その銅回路部品を覆って使用されることが多い。ニッケル層は、金の銅層中への移行を抑制するためにその銅と金との間で使用されることが多い。
メッキ抵抗性インキは、化学線または粒子ビーム硬化性組成物の技術分野に知られているどんな方法によっても調製することができる。典型的には、成分A)とB)とが、20〜60℃の温度において、好ましくは均質な溶液が得られるまで減光条件下で急速攪拌しながら一緒に混合される。成分D)が次に加えられ、そして攪拌が20〜60℃において減光条件下で続けられる。最後に、任意成分のC)、E)およびF)が加えられる。
実施例1
Sartomer(登録商標)506(57.04部)、Sartomer(登録商標)306(12.92部)、Actilane(登録商標)430(5.60部)、Actilane(登録商標)251(5.60部)およびアクリル酸(5.0部)を、25℃において1時間一緒に攪拌して均質な溶液を与えた。次に、光開始剤であるSpeedcure(登録商標)EHA(4.0部)、Speedcure(登録商標)ITX(2.0部)およびIrgacure(登録商標)369(4.0部)を加え、そしてそのインキ組成物を60℃で減光条件下において攪拌してそれら光開始剤を溶解させた。
銅メッキに対する抵抗性は、200gm/リットルの硫酸を有する75gm/リットルの硫酸銅で30℃においてメッキしたとき良好であった。
アルカリ剥離処理は、2.5−5%の水酸化ナトリウム水溶液を50℃において超音波浴中で使用したとき良好であった。
Claims (19)
- 非水性メッキ抵抗性インキを、導電性金属(1種または2種以上)により任意に積層されていてよい誘電体基板の選択された領域にインキジェット印刷によって適用し、そのメッキ抵抗性インキを化学線および/または粒子ビーム線に曝露して重合を生じさせ、1つまたは2つ以上の金属層を電解析出法または無電解析出法によって追加し、ここでその上層はエッチ抵抗性金属(1種または2種以上)であり、上記の重合したメッキ抵抗性インキをアルカリにより除去し、最後に上記誘電体基板に任意に直接積層されており、そしてエッチ抵抗性金属(1種または2種以上)の上層によって保護されていない上記導電性金属(1種または2種以上)を化学エッチングによって除去することを含む電子デバイスの製造方法であって、上記メッキ抵抗性インキが実質的に溶媒を含まず、そして
A)30〜90部の、酸基を含まない、一またはそれ以上の官能価を含むアクリレート官能性単量体であって、5〜95重量%が一官能性単量体である上記アクリレート官能性単量体;
B)1〜30部の、1個または2個以上の酸基を含むアクリレート官能性単量体;
C)0〜20部のポリマーまたはプレポリマー;
D)0〜20部のラジカル開始剤;
E)0〜5部の着色剤;
F)0〜5部の界面活性剤
を含み、ここで上記インキは40℃において30cP(mPa)以下の粘度を有し、また全ての部数は重量によるものである上記の製造方法。 - 一官能性アクリレート単量体の量が成分A)の70重量%以上である、請求項1に記載の方法。
- 成分B)の量が1〜10重量部である、請求項1または請求項2のいずれかに記載の方法。
- 成分B)の量が3重量部以上である、請求項1〜2のいずれか1項に記載の方法。
- 成分B)がアクリル酸またはモノ−2−(メタアクリロイル)エチルフタレートである、請求項1〜4のいずれか1項に記載の方法。
- ラジカル開始剤がUV光で活性化される光開始剤である、請求項1〜5のいずれか1項に記載の方法。
- インキが20〜40mN/mの表面張力を有する、請求項1〜6のいずれか1項に記載の方法。
- インキの粘度が40℃において8〜20cP(mPa)である、請求項1〜7のいずれか1項に記載の方法。
- 成分B)がKOH100mg/g以上の酸価を有する、請求項1〜8のいずれか1項に記載の方法。
- エッチ抵抗性インキ全体がKOH30mg/gmより大きい酸価を有する、請求項1〜9のいずれか1項に記載の方法。
- 成分C)の量がゼロである、請求項1〜10のいずれか1項に記載の方法。
- ラジカル開始剤の量が0.1部以上である、請求項1〜11のいずれか1項に記載の方法。
- 誘電体基板が導電性金属により積層される、請求項1〜12のいずれか1項に記載の方法。
- 導電性金属が銅である、請求項13に記載の方法。
- 金属層(1層または2層以上)が電解析出法によって析出される、請求項13または請求項14のいずれかに記載の方法。
- 金属層(1層または2層以上)が銅、ニッケル、錫/鉛、銀、パラジウムまたは金である、請求項15に記載の方法。
- 成分A)+B)+C)+D)+E)+F)の部数=100である、前記請求項のいずれか1項に記載の方法。
- 前記請求項のいずれか1項に記載の方法によって製造されている、導電性回路部品を含んでいる電子デバイス。
- 印刷回路板である、請求項18に記載の電子デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0221891.5A GB0221891D0 (en) | 2002-09-20 | 2002-09-20 | Process |
PCT/GB2003/003679 WO2004028224A1 (en) | 2002-09-20 | 2003-08-22 | Plating process |
Publications (3)
Publication Number | Publication Date |
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JP2005539389A true JP2005539389A (ja) | 2005-12-22 |
JP2005539389A5 JP2005539389A5 (ja) | 2006-09-28 |
JP4392350B2 JP4392350B2 (ja) | 2009-12-24 |
Family
ID=9944477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004537254A Expired - Fee Related JP4392350B2 (ja) | 2002-09-20 | 2003-08-22 | メッキ法 |
Country Status (11)
Country | Link |
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US (1) | US7314573B2 (ja) |
EP (1) | EP1543703B1 (ja) |
JP (1) | JP4392350B2 (ja) |
KR (1) | KR100961713B1 (ja) |
CN (1) | CN1695406A (ja) |
AT (1) | ATE341187T1 (ja) |
AU (1) | AU2003260730A1 (ja) |
DE (1) | DE60308705T2 (ja) |
GB (1) | GB0221891D0 (ja) |
TW (1) | TWI317251B (ja) |
WO (1) | WO2004028224A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1633823B1 (en) * | 2003-05-30 | 2008-10-29 | FUJIFILM Imaging Colorants Limited | Process for etching a metal or alloy surface |
GB0324947D0 (en) * | 2003-10-25 | 2003-11-26 | Avecia Ltd | Process |
EP2915856B1 (en) * | 2014-03-03 | 2019-10-16 | Agfa-Gevaert | Etch-resistant inkjet inks for manufacturing conductive patterns |
CN104494310B (zh) * | 2014-09-16 | 2017-04-12 | 苏州锐发打印技术有限公司 | 用于太阳能电池网格导线制作的3d打印系统及控制方法 |
EP3304197A4 (en) * | 2015-06-04 | 2019-01-23 | Kateeva, Inc. | METHOD FOR PRODUCING AN ESTETRESIST PATTERN ON A METALLIC SURFACE |
US10806035B2 (en) | 2015-08-13 | 2020-10-13 | Kateeva, Inc. | Methods for producing an etch resist pattern on a metallic surface |
US10398034B2 (en) | 2016-12-12 | 2019-08-27 | Kateeva, Inc. | Methods of etching conductive features, and related devices and systems |
EP3786239B1 (en) * | 2019-08-26 | 2023-11-15 | Agfa-Gevaert Nv | Radiation curable composition for plating applications |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4315985A (en) * | 1972-11-30 | 1982-02-16 | International Business Machines Corporation | Fine-line circuit fabrication and photoresist application therefor |
US4270985A (en) * | 1978-07-21 | 1981-06-02 | Dynachem Corporation | Screen printing of photopolymerizable inks |
US5270368A (en) * | 1992-07-15 | 1993-12-14 | Videojet Systems International, Inc. | Etch-resistant jet ink and process |
US5721007A (en) * | 1994-09-08 | 1998-02-24 | The Whitaker Corporation | Process for low density additive flexible circuits and harnesses |
JPH10282662A (ja) | 1997-04-07 | 1998-10-23 | Nippon Kayaku Co Ltd | 液状フォトレジストインク組成物及びその硬化物 |
-
2002
- 2002-09-20 GB GBGB0221891.5A patent/GB0221891D0/en not_active Ceased
-
2003
- 2003-08-22 KR KR1020057004708A patent/KR100961713B1/ko not_active IP Right Cessation
- 2003-08-22 CN CNA038252031A patent/CN1695406A/zh active Pending
- 2003-08-22 WO PCT/GB2003/003679 patent/WO2004028224A1/en active IP Right Grant
- 2003-08-22 JP JP2004537254A patent/JP4392350B2/ja not_active Expired - Fee Related
- 2003-08-22 DE DE60308705T patent/DE60308705T2/de not_active Expired - Lifetime
- 2003-08-22 US US10/528,581 patent/US7314573B2/en not_active Expired - Fee Related
- 2003-08-22 EP EP03797363A patent/EP1543703B1/en not_active Expired - Lifetime
- 2003-08-22 AU AU2003260730A patent/AU2003260730A1/en not_active Abandoned
- 2003-08-22 AT AT03797363T patent/ATE341187T1/de not_active IP Right Cessation
- 2003-09-10 TW TW092125053A patent/TWI317251B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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CN1695406A (zh) | 2005-11-09 |
KR20050071496A (ko) | 2005-07-07 |
ATE341187T1 (de) | 2006-10-15 |
JP4392350B2 (ja) | 2009-12-24 |
US7314573B2 (en) | 2008-01-01 |
KR100961713B1 (ko) | 2010-06-10 |
DE60308705T2 (de) | 2007-08-16 |
GB0221891D0 (en) | 2002-10-30 |
AU2003260730A1 (en) | 2004-04-08 |
TWI317251B (en) | 2009-11-11 |
TW200421952A (en) | 2004-10-16 |
US20060049129A1 (en) | 2006-03-09 |
EP1543703B1 (en) | 2006-09-27 |
DE60308705D1 (de) | 2006-11-09 |
EP1543703A1 (en) | 2005-06-22 |
WO2004028224A1 (en) | 2004-04-01 |
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