JP2005515639A - 薄膜光起電モジュールの製造方法 - Google Patents

薄膜光起電モジュールの製造方法 Download PDF

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Publication number
JP2005515639A
JP2005515639A JP2003561002A JP2003561002A JP2005515639A JP 2005515639 A JP2005515639 A JP 2005515639A JP 2003561002 A JP2003561002 A JP 2003561002A JP 2003561002 A JP2003561002 A JP 2003561002A JP 2005515639 A JP2005515639 A JP 2005515639A
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laser
scribe
photovoltaic
layer
contact layer
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Japanese (ja)
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JP2005515639A5 (https=
Inventor
オズワルド，ロバート・エス
リウ，シェンゾン
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ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド
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Publication of JP2005515639A publication Critical patent/JP2005515639A/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/90—Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33—Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP2003561002A 2002-01-07 2002-01-07 薄膜光起電モジュールの製造方法 Pending JP2005515639A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/000269 WO2003061013A1 (en) 2002-01-07 2002-01-07 Method of manufacturing thin film photovoltaic modules

Related Child Applications (1)

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JP2008330608A Division JP2009072831A (ja) 2008-12-25 2008-12-25 レーザースクライブを形成する装置

Publications (2)

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JP2005515639A true JP2005515639A (ja) 2005-05-26
JP2005515639A5 JP2005515639A5 (https=) 2005-12-22

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JP2003561002A Pending JP2005515639A (ja) 2002-01-07 2002-01-07 薄膜光起電モジュールの製造方法

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EP (1) EP1466368A1 (https=)
JP (1) JP2005515639A (https=)
AU (1) AU2002243473A1 (https=)
WO (1) WO2003061013A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010087041A (ja) * 2008-09-29 2010-04-15 Ulvac Japan Ltd レーザービームによる薄膜の除去方法及び薄膜太陽電池パネルの製造方法
JP2012525007A (ja) * 2009-04-21 2012-10-18 テトラサン インコーポレイテッド 太陽電池内の構造部を形成するための方法
WO2013077431A1 (ja) * 2011-11-25 2013-05-30 昭和シェル石油株式会社 薄膜太陽電池モジュール及びその製造方法
RU2519594C2 (ru) * 2008-12-03 2014-06-20 Эколь Политекник Фотогальванический модуль, содержащий прозрачный проводящий электрод переменной толщины и способы изготовления такого модуля
JP2022095671A (ja) * 2014-08-27 2022-06-28 ヌブル インク 可視ラマンレーザーを用いた材料加工のための用途、方法、及びシステム

Families Citing this family (18)

* Cited by examiner, † Cited by third party
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US20050272175A1 (en) * 2004-06-02 2005-12-08 Johannes Meier Laser structuring for manufacture of thin film silicon solar cells
JP2006054254A (ja) * 2004-08-10 2006-02-23 Kaneka Corp 光電変換装置の製造方法
JP2006121011A (ja) * 2004-10-25 2006-05-11 Kaneka Corp 透明電極層の加工方法およびそれを用いた薄膜光電変換装置
JP2006332453A (ja) * 2005-05-27 2006-12-07 Sharp Corp 薄膜太陽電池の製造方法および薄膜太陽電池
US7879685B2 (en) * 2006-08-04 2011-02-01 Solyndra, Inc. System and method for creating electric isolation between layers comprising solar cells
DE102006051556A1 (de) * 2006-11-02 2008-05-08 Manz Automation Ag Verfahren zum Strukturieren von Solarmodulen und Strukturierungsvorrichtung
JP4411338B2 (ja) * 2007-07-13 2010-02-10 シャープ株式会社 薄膜太陽電池モジュール
DE102007034644A1 (de) * 2007-07-23 2009-01-29 Thüringisches Institut für Textil- und Kunststoff-Forschung e.V. Verfahren und Vorrichtung zur Laserstrukturierung von Solarzellen
US8420979B2 (en) 2007-07-24 2013-04-16 Flisom Ag Method and apparatus for laser beam processing of an element with total transmission for light of a t least 10-5
US20090104342A1 (en) * 2007-10-22 2009-04-23 Applied Materials, Inc. Photovoltaic fabrication process monitoring and control using diagnostic devices
DE102008015807A1 (de) * 2008-03-27 2009-10-22 Schott Solar Gmbh Verfahren zur Strukturierung der Zinkoxid-Frontelektrodenschicht eines photovoltaischen Moduls
WO2009129030A2 (en) 2008-04-14 2009-10-22 Applied Materials, Inc. Solar parametric testing module and processes
US7956337B2 (en) 2008-09-09 2011-06-07 Applied Materials, Inc. Scribe process monitoring methodology
CN102460698A (zh) * 2009-06-05 2012-05-16 欧瑞康太阳能股份公司(特吕巴赫) 用于制造薄膜光伏转换器设备的方法
US20120228275A1 (en) * 2009-06-29 2012-09-13 Reis Group Holding Gmbh & Co. Kg Method for exposing an electrical contact
EP2543081B1 (en) 2010-03-05 2020-04-29 Flisom AG Method and apparatus for fabricating monolithically-integrated photovoltaic modules and photovoltaic module
CN103017064A (zh) * 2011-09-23 2013-04-03 吉富新能源科技(上海)有限公司 一应用于小区、公园类的太阳能电池组件草坪灯
CN104701397B (zh) * 2013-12-07 2018-11-09 威海中玻新材料技术研发有限公司 一种硅基薄膜太阳能电池结构及加工工艺

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4713518A (en) * 1984-06-08 1987-12-15 Semiconductor Energy Laboratory Co., Ltd. Electronic device manufacturing methods
US4892592A (en) * 1987-03-26 1990-01-09 Solarex Corporation Thin film semiconductor solar cell array and method of making
CA2024662A1 (en) * 1989-09-08 1991-03-09 Robert Oswald Monolithic series and parallel connected photovoltaic module
US6324195B1 (en) * 1999-01-13 2001-11-27 Kaneka Corporation Laser processing of a thin film

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010087041A (ja) * 2008-09-29 2010-04-15 Ulvac Japan Ltd レーザービームによる薄膜の除去方法及び薄膜太陽電池パネルの製造方法
RU2519594C2 (ru) * 2008-12-03 2014-06-20 Эколь Политекник Фотогальванический модуль, содержащий прозрачный проводящий электрод переменной толщины и способы изготовления такого модуля
JP2012525007A (ja) * 2009-04-21 2012-10-18 テトラサン インコーポレイテッド 太陽電池内の構造部を形成するための方法
WO2013077431A1 (ja) * 2011-11-25 2013-05-30 昭和シェル石油株式会社 薄膜太陽電池モジュール及びその製造方法
US9634157B2 (en) 2011-11-25 2017-04-25 Solar Frontier K.K. Thin-film solar cell module and method for manufacturing the same
JP2022095671A (ja) * 2014-08-27 2022-06-28 ヌブル インク 可視ラマンレーザーを用いた材料加工のための用途、方法、及びシステム
JP7413424B2 (ja) 2014-08-27 2024-01-15 ヌブル インク 可視ラマンレーザーを用いた材料加工のための用途、方法、及びシステム
JP2024019706A (ja) * 2014-08-27 2024-02-09 ヌブル インク 可視ラマンレーザーを用いた材料加工のための用途、方法、及びシステム

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EP1466368A1 (en) 2004-10-13
AU2002243473A1 (en) 2003-07-30
WO2003061013A1 (en) 2003-07-24

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