JP2005504648A5 - - Google Patents
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- Publication number
- JP2005504648A5 JP2005504648A5 JP2003534312A JP2003534312A JP2005504648A5 JP 2005504648 A5 JP2005504648 A5 JP 2005504648A5 JP 2003534312 A JP2003534312 A JP 2003534312A JP 2003534312 A JP2003534312 A JP 2003534312A JP 2005504648 A5 JP2005504648 A5 JP 2005504648A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/911,818 US6587613B2 (en) | 2001-07-24 | 2001-07-24 | Hybrid MEMS fabrication method and new optical MEMS device |
| PCT/US2002/022782 WO2003031321A2 (en) | 2001-07-24 | 2002-07-17 | Hybrid mems fabrication method and new optical mems device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005504648A JP2005504648A (ja) | 2005-02-17 |
| JP2005504648A5 true JP2005504648A5 (OSRAM) | 2005-12-02 |
Family
ID=25430904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003534312A Pending JP2005504648A (ja) | 2001-07-24 | 2002-07-17 | ハイブリッドｍｅｍｓ製造方法及び新規な光ｍｅｍｓデバイス |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6587613B2 (OSRAM) |
| EP (1) | EP1461287A2 (OSRAM) |
| JP (1) | JP2005504648A (OSRAM) |
| WO (1) | WO2003031321A2 (OSRAM) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0867701A1 (en) * | 1997-03-28 | 1998-09-30 | Interuniversitair Microelektronica Centrum Vzw | Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer |
| US6892003B2 (en) * | 2001-04-03 | 2005-05-10 | Sumitomo Electric Industries, Ltd. | Variable dispersion compensator and optical transmission system |
| US7060522B2 (en) * | 2001-11-07 | 2006-06-13 | Xerox Corporation | Membrane structures for micro-devices, micro-devices including same and methods for making same |
| US7203394B2 (en) * | 2003-07-15 | 2007-04-10 | Rosemount Aerospace Inc. | Micro mirror arrays and microstructures with solderable connection sites |
| US7065736B1 (en) | 2003-09-24 | 2006-06-20 | Sandia Corporation | System for generating two-dimensional masks from a three-dimensional model using topological analysis |
| US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
| US20060045308A1 (en) * | 2004-09-02 | 2006-03-02 | Microsoft Corporation | Camera and method for watermarking film content |
| DE102005002967B4 (de) * | 2005-01-21 | 2011-03-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt |
| US20070018065A1 (en) * | 2005-07-21 | 2007-01-25 | Rockwell Scientific Licensing, Llc | Electrically controlled tiltable microstructures |
| US7261430B1 (en) * | 2006-02-22 | 2007-08-28 | Teledyne Licensing, Llc | Thermal and intrinsic stress compensated micromirror apparatus and method |
| US9586811B2 (en) * | 2011-06-10 | 2017-03-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices with moving members and methods for making the same |
| US8623768B2 (en) * | 2011-12-02 | 2014-01-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods for forming MEMS devices |
| CN104058363B (zh) * | 2013-03-22 | 2016-01-20 | 上海丽恒光微电子科技有限公司 | 基于mems透射光阀的显示装置及其形成方法 |
| CN108128750B (zh) * | 2017-12-14 | 2020-12-11 | 上海交通大学 | 一种电离式传感器的制造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100213026B1 (ko) * | 1995-07-27 | 1999-08-02 | 윤종용 | 디엠디 및 그 제조공정 |
| WO2000042231A2 (en) * | 1999-01-15 | 2000-07-20 | The Regents Of The University Of California | Polycrystalline silicon germanium films for forming micro-electromechanical systems |
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2001
- 2001-07-24 US US09/911,818 patent/US6587613B2/en not_active Expired - Lifetime
-
2002
- 2002-07-17 WO PCT/US2002/022782 patent/WO2003031321A2/en not_active Ceased
- 2002-07-17 EP EP02795482A patent/EP1461287A2/en not_active Ceased
- 2002-07-17 JP JP2003534312A patent/JP2005504648A/ja active Pending