JP2005345503A - Image blur correction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image blur correction device that will not be enlarged, in a planar direction perpendicular to the optical axis. <P>SOLUTION: A fixed part has 1st and 2nd horizontal direction position detecting magnets, used to detect the position of a movable part in a 1st direction, and 1st and 2nd vertical direction position detecting magnets, used to detect the position of the movable part in a 2nd direction. Then, 1st and 2nd horizontal direction Hall elements hh1 and hh2 are set in positional relation facing the 1st and the 2nd horizontal direction position detecting magnets in the 2nd direction, and 1st and 2nd vertical direction Hall elements hv1 and hv2 are set at positional relation facing the 1st and the 2nd vertical direction position detecting magnets in the 1st direction. A 1st detection position signal px is obtained, based on the mean value of output from each of the 1st and the 2nd horizontal direction Hall elements hh1 and hh2, and a 2nd detection position signal py is obtained, based on the mean value of output from each of the 1st and the 2nd vertical direction Hall elements hv1 and hv2. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an image blur correction apparatus in an imaging apparatus, and more particularly to a position detection apparatus for a movable part such as an image sensor that has moved for image blur correction.

  Conventionally, image blurring on the image plane is suppressed by moving the image blur correction lens or image sensor on a plane perpendicular to the optical axis in accordance with the amount of camera shake that occurs during imaging in an imaging device such as a camera. An image blur correction device has been proposed.

Patent Document 1 discloses an apparatus in which a movable part including an image blur correction lens is moved by a magnet and a coil, and position detection before and after the movement is performed by a Hall element and a magnet.
JP 2002-229090 A

  However, in the apparatus of Patent Document 1, since members such as magnets and Hall elements are arranged on a plane perpendicular to the optical axis, the image blur correction apparatus is enlarged in the plane direction perpendicular to the optical axis.

  Accordingly, an object of the present invention is to provide an image blur correction apparatus that does not increase in size in a plane direction perpendicular to the optical axis.

  An image blur correction apparatus for an image pickup apparatus according to the present invention includes either an image sensor or an image blur correction lens, and a first direction orthogonal to the optical axis of the photographing lens with respect to either the image sensor or the image blur correction lens. A movable part that is movable in a second direction orthogonal to the optical axis and the first direction and that performs an image blur correction operation by moving in the first and second directions, and the movable part is moved in the first and second directions. A fixed part that is freely supported, and one of the movable part and the fixed part is used to detect the position of the movable part in the first direction for obtaining the first detection position signal. A movable part having a horizontal magnetic field change detecting element and first and second vertical magnetic field change detecting elements used for detecting a position of the movable part in the second direction performed for obtaining a second detection position signal; Any one of the fixed parts is positioned in the first direction of the movable part. The first and second horizontal position detection magnets used for detection, and the first and second vertical position detection magnets used for position detection of the movable portion in the second direction. The second horizontal magnetic field change detecting element is in a positional relationship facing the first and second horizontal position detecting magnets in the second direction, and the first and second vertical magnetic field change detecting elements are first and second. The first detection position signal is obtained based on the average value of the outputs of the first and second horizontal magnetic field change detection elements, which are in a positional relationship facing the vertical position detection magnet in the first direction. 2nd detection position signal is calculated | required based on the average value of each output of 2 vertical direction magnetic field change detection elements.

  As a result, the members necessary for position detection in the image blur correction operation are arranged in the plane direction perpendicular to the first direction or the plane direction perpendicular to the second direction. Miniaturization in the planar direction is possible. In addition, it is possible to perform accurate position detection in consideration of a change in magnetic flux density between the magnetic field change detection element and the magnet that is generated when the movable portion moves in a direction orthogonal to the direction in which position detection is performed.

  Preferably, the movable part has first and second horizontal magnetic field change detecting elements and first and second vertical magnetic field change detecting elements, and the fixed part is for detecting the first and second horizontal position. A magnet and first and second vertical position detecting magnets.

  More preferably, when the vicinity of the center of one of the image sensor and the image blur correction lens is in a positional relationship passing through the optical axis, the second of the first horizontal magnetic field change detecting element and the first horizontal position detecting magnet. The first and second horizontal magnetic field changes are detected so that the first distance in the direction is equal to the second distance in the second direction between the second horizontal magnetic field change detecting element and the second horizontal position detecting magnet. The position in the second direction of the element is set, the distance in the second direction between the first horizontal position detection magnet and the vicinity of the center of one of the image sensor or the image blur correction lens, and the second horizontal position detection The positional relationship between the movable part and the fixed part is set so that the distance in the second direction between the magnet and the vicinity of the center of one of the image sensor and the image blur correction lens becomes equal.

  More preferably, when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis, the first vertical magnetic field change detection element and the first vertical position detection magnet The first and second vertical magnetic fields are set such that the third distance in the first direction is equal to the fourth distance in the first direction between the second vertical magnetic field change detecting element and the second vertical position detecting magnet. The position in the first direction of the change detection element is set, the distance in the first direction between the first vertical position detection magnet and the vicinity of the center of one of the image sensor or the image blur correction lens, and the second vertical position. The positional relationship between the movable portion and the fixed portion is set so that the distance in the first direction between the detection magnet and the vicinity of the center of one of the image sensor and the image blur correction lens is equal.

  More preferably, the movable part is used to move the movable part in the first direction and the first and second horizontal driving coils used to move the movable part in the first direction by electromagnetic force. First and second vertical driving coils, and the first and second horizontal driving coils are disposed at positions facing the first and second horizontal position detecting magnets, respectively. The second vertical driving coils are respectively arranged at positions facing the first and second vertical position detecting magnets, and the first and second horizontal position detecting magnets are also used for generating electromagnetic force. The first and second vertical position detecting magnets are also used for generating electromagnetic force.

  Accordingly, the members necessary for moving the movable part in the image blur correction operation are arranged in the plane direction perpendicular to the first direction or the plane direction perpendicular to the second direction. Further downsizing in the vertical plane direction is possible.

  More preferably, the coil patterns of the first and second horizontal driving coils and the first and second vertical driving coils are line segments used for generating electromagnetic force and parallel to the third direction parallel to the optical axis. Have

  More preferably, the first and second horizontal magnetic field change detecting elements are respectively disposed in the windings of the first and second horizontal driving coils, and the first and second vertical magnetic field change detecting elements are respectively It arrange | positions in the coil | winding of the coil for a 1st, 2nd vertical direction drive. This makes it possible to reduce the size of the magnet and effectively use the movement range and detection position range.

  More preferably, the first and second horizontal driving coils and the first and second vertical driving coils are sheet coils in which a spiral coil pattern is formed from the outer peripheral portion of the winding toward the center. It is.

  More preferably, the first and second horizontal driving coils are multilayer sheet coils formed by overlapping coil patterns in the second direction, and the first and second vertical driving coils are coil patterns. Is a multi-layer sheet coil formed by being stacked in the first direction.

  More preferably, the fixed portion is made of a polygonal magnetic material having a U-shape when viewed from the first direction and is in contact with the first horizontal position detection magnet. A first horizontal direction position detecting yoke that is in a positional relationship sandwiching the first horizontal direction driving coil and the first horizontal direction magnetic field change detecting element in the second direction, and the second horizontal position detecting magnet. A second horizontal direction position detecting magnet, a second horizontal direction driving coil, and a second horizontal direction magnetic field change detecting element, which are made of a polygonal magnetic material having a U-shape when viewed from the first direction. Is a polygonal cylindrical magnetic material that is in contact with the second horizontal position detecting yoke and the first vertical position detecting magnet, and has a U-shape when viewed from the second direction. A first vertical direction detecting magnet, a first vertical The first vertical direction position detection yoke and the second vertical direction position detection magnet, which are in a positional relationship sandwiching the direction drive coil and the first vertical direction magnetic field change detection element in the first direction, are seen from the second direction. The second vertical direction position detecting magnet, the second vertical direction driving coil, and the second vertical direction magnetic field change detecting element are sandwiched in the first direction. And a second vertical position detecting yoke in a positional relationship.

  Preferably, the first and second horizontal differential amplifier circuits for amplifying a signal difference between the output terminals of the first and second horizontal magnetic field change detecting elements, and the first and second horizontal differential amplifiers. Outputs of the first and second horizontal subtraction circuits for obtaining the first and second horizontal potential differences from the difference between the signal difference amplified by each circuit and the reference voltage, and the first and second vertical magnetic field change detection elements, respectively. The first and second vertical differential amplifier circuits that amplify the signal difference between the terminals, and the difference between the signal difference amplified by the first and second vertical differential amplifier circuits and the reference voltage are first and second. First and second vertical direction subtracting circuits for obtaining a vertical potential difference, and an average value of first and second horizontal potential differences, and a horizontal addition for obtaining a first detection position signal by multiplying this by a certain amplification factor A circuit, a horizontal inverting amplifier circuit, and a first, A magnetic field change detection element signal processing circuit having a vertical direction addition circuit for obtaining an average value of the two vertical direction potential differences and multiplying the average value by a constant amplification factor to obtain a second detection position signal; .

  Preferably, the first and second horizontal position detecting magnets are arranged with the north and south poles arranged in the first direction, and the first and second vertical position detecting magnets are arranged in the second direction. N poles and S poles are arranged side by side.

  More preferably, the position of the first horizontal magnetic field change detecting element in the first direction is the first horizontal position when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis. The position of the second horizontal magnetic field change detecting element in the first direction is near the center of one of the image sensor and the image blur correction lens. Is in the vicinity of the same distance from each of the north and south poles of the second horizontal position detecting magnet.

  More preferably, the position of the first vertical magnetic field change detecting element in the second direction is the first vertical when the vicinity of the center of either the imaging element or the image blur correction lens passes through the optical axis. The position of the second vertical magnetic field change detecting element in the second direction is near the center of either the image sensor or the image blur correction lens. When in a positional relationship passing through the optical axis, they are in the vicinity of the same distance from the north and south poles of the second vertical position detecting magnet.

  Preferably, when the movable part moves so that the vicinity of the center of either the image sensor or the image stabilization lens passes through the optical axis, the movable part is at the center of the moving range in both the first and second directions. To position.

  Preferably, each of the first and second horizontal magnetic field change detecting elements and the first and second vertical magnetic field change detecting elements is a Hall element, an MI sensor, a magnetic resonance type magnetic field detecting element, or an MR element. It is an element.

  As described above, according to the present invention, it is possible to provide an image blur correction apparatus that does not increase in size in a plane direction perpendicular to the optical axis.

  Hereinafter, the present embodiment will be described with reference to the drawings. The imaging device 1 will be described as a digital camera. In order to describe the direction, in the imaging device 1, the horizontal direction orthogonal to the optical axis LX is the first direction x, the vertical direction orthogonal to the optical axis LX is the second direction y, and the horizontal direction parallel to the optical axis LX is The third direction z will be described. 5 is a configuration diagram of the image blur correction unit 30 of FIG. 4 as viewed from the second horizontal position detection and drive yoke 422b side in the second direction y, and FIG. 6 is a view taken along line AA of FIG. The block diagram in a cross section is shown.

  The parts related to the imaging of the imaging apparatus 1 are the Pon button 11 for switching on / off the power, the release button 13, the LCD monitor 17, the CPU 21, the imaging block 22, the AE unit 23, the AF unit 24, and the imaging unit 39a of the image blur correcting unit 30. And a photographing lens 67. In response to pressing of the Pon button 11, the on / off state of the Pon switch 11 a is switched, and thereby the on / off state of the power supply of the imaging device 1 is switched. The subject image is captured as an optical image through the photographing lens 67 by the imaging block 22 that drives the imaging unit 39a, and the image captured by the LCD monitor 17 is displayed. The subject image can also be optically observed with an optical viewfinder (not shown).

  When the release button 13 is half-pressed, the photometry switch 12a is turned on to perform photometry, distance measurement, and focusing operation. When the release button 13 is fully pressed, the release switch 13a is turned on to take an image. Is stored in memory.

  The CPU 21 is a control unit that controls each unit related to imaging and controls each unit related to image blur correction described later. Further, the CPU 21 stores a value of a parameter IS for determining whether or not a correction mode to be described later.

  The imaging block 22 drives the imaging unit 39a. The AE unit 23 performs a photometric operation of the subject to calculate an exposure value, and calculates an aperture value and an exposure time necessary for photographing based on the exposure value. The AF unit 24 performs distance measurement, and performs focus adjustment by displacing the photographing lens 67 in the optical axis direction based on the distance measurement result.

  The part relating to the image blur correction device of the image pickup apparatus 1, that is, the image blur correction, is a hole as a signal processing circuit of the image blur correction button 14, the CPU 21, the angular velocity detection unit 25, the driver circuit 29, the image blur correction unit 30 An element signal processing circuit 45 and a photographing lens 67 are included.

  When the image blur correction button 14 is pressed, the image blur correction switch 14a is turned on, and the angular velocity detection unit 25 and the image blur correction unit 30 are driven at regular intervals independently of other operations such as photometry. Thus, image blur correction is performed. The parameter IS = 1 is set in the correction mode in which the image blur correction switch 14a is turned on, and the parameter IS = 0 is set in the correction mode in which the image blur correction switch 14a is not turned off. In the present embodiment, this fixed time will be described as 1 ms.

  Various outputs corresponding to the input signals of these switches are controlled by the CPU 21. On / off information of the photometry switch 12a, release switch 13a, and image blur correction switch 14a is input to the ports P12, P13, and P14 of the CPU 21 as 1-bit digital signals, respectively. The imaging block 22, the AE unit 23, and the AF unit 24 input and output signals at ports P3, P4, and P5, respectively.

  Next, details of the angular velocity detection unit 25, the driver circuit 29, the image blur correction unit 30, the Hall element signal processing circuit 45, and the input / output relationship with the CPU 21 will be described.

  The angular velocity detection unit 25 includes first and second angular velocity sensors 26 and 27 and an amplifier / high pass filter circuit 28. The first and second angular velocity sensors 26 and 27 detect angular velocities in the first direction x and the second direction y every fixed time (1 ms) of the imaging device 1. The first angular velocity sensor 26 detects the angular velocity in the first direction x, and the second angular velocity sensor 27 detects the angular velocity in the second direction y. The amplifier / high-pass filter circuit 28 amplifies the signal related to the angular velocity, cuts the null voltage and panning of the first and second angular velocity sensors 26 and 27, and outputs an analog signal as the first and second angular velocities vx and vy of the CPU 21. Input to A / D0 and A / D1.

  The CPU 21 performs A / D conversion on the first and second angular velocities vx and vy input to A / D0 and A / D1, and then performs image blurring that occurs in a certain time (1 ms) by a conversion coefficient that takes into account the focal length and the like. Calculate the quantity. Therefore, the angular velocity detection unit 25 and the CPU 21 have an image blur amount calculation function.

  The CPU 21 calculates and sets the position S to be moved of the imaging unit 39a according to the image blur amount obtained by the calculation for each of the first direction x and the second direction y. The first direction x component of the position S is sx, and the second direction y component is sy. Movement of the movable part 30a including the imaging part 39a is performed by an electromagnetic force described later. In order to move the movable part 30a to this position S, the first direction x component of the driving force D that drives the driver circuit 29 is defined as a first PWM duty dx, and the second direction y component is defined as a second PWM duty dy.

  The image blur correction unit 30 moves the imaging unit 39a to the position S to be moved calculated by the CPU 21, thereby eliminating the deviation of the optical axis LX on the imaging plane of the subject image caused by the blur and imaging with the subject image. This is a device that keeps the surface position constant and corrects image blur, and includes a movable part 30a including an imaging part 39a and a movable area, and a fixed part 30b. The image blur correction unit 30 includes a driving part that moves the movable part 30a by an electromagnetic force generated by the direction of the current flowing through the coil and the direction of the magnetic field of the magnet, and a position detection part that detects the position of the movable part 30a. It can be divided into two categories.

  The movable portion 30a of the image blur correction unit 30 is driven by the first and second horizontal driving coils via the driver circuit 29 that receives the output of the first PWM duty dx from the PWM 21 and the second PWM duty dy from the PWM 1 of the CPU 21. 31a, 32a, first and second vertical driving coils 33a, 34a, first and second horizontal position detecting and driving magnets 401b and 402b, first and second vertical position detecting and driving magnets 411b, This is performed by the electromagnetic force generated by 412b. The position P before or after the movement of the movable portion 30a moved by driving the driver circuit 29 is detected by the Hall element portion 44a and the Hall element signal processing circuit 45. Information on the detected position P is input to A / D2 and A / D3 of the CPU 21 as the first detection position signal px as the first direction x component and the second detection position signal py as the second direction y component, respectively. . The first and second detection position signals px and py are A / D converted via A / D2 and A / D3. The first direction x component and the second direction y component of the position P after A / D conversion with respect to the first and second detection position signals px and py are set to pdx and pdy, respectively. PID control is performed based on the data of the detected position P (pdx, pdy) and the data of the position S (sx, sy) to be moved.

  The movable part 30a includes first and second horizontal driving coils 31a and 32a, first and second vertical driving coils 33a and 34a, an imaging part 39a, a hall element part 44a as a magnetic field change detecting element part, and a movable part. It has a substrate 49a, a moving shaft 50a, first to third horizontal moving bearings 51a to 53a, and a plate 64a.

  The fixed portion 30b includes first and second horizontal position detection and drive magnets 401b and 402b, first and second vertical position detection and drive magnets 411b and 412b, and first and second horizontal position detection and drive. Yokes 421b and 422b, first and second vertical position detecting and driving yokes 431b and 432b, first to fourth vertical movement bearing portions 54b to 57b, and a base plate 65b.

  The details of the fixed portion 30b supporting the movable portion 30a so as to be movable in the first direction x and the second direction y will be described.

  The U-shaped moving shaft 50a viewed from the third direction z of the movable portion 30a is perpendicular to the first to fourth vertical moving bearing portions 54b to 57b attached to the base plate 65b of the fixed portion 30b. It is supported so as to be movable in the (second direction y). The first and second vertical movement bearing portions 54b and 55b have a long hole shape extending in the second direction y when viewed from the first direction x. Thereby, the movable part 30a can move in the vertical direction with respect to the fixed part 30b.

  The moving shaft 50a is supported so as to be movable in the horizontal direction (first direction x) with the first to third horizontal moving bearing portions 51a to 53a of the movable portion 30a. Thereby, the movable part 30a excluding the moving shaft 50a can move in the horizontal direction with respect to the moving shaft 50a and the fixed part 30b.

  In order to make maximum use of the imaging range of the image sensor 39a1, when the optical axis LX of the photographic lens 67 is in a positional relationship passing through the vicinity of the center of the image sensor 39a1, the movable portion 30a is provided in both the first direction x and the second direction y. The positional relationship between the movable part 30a and the fixed part 30b is set so as to be located at the center of the movement range (at the movement center position). The center of the image sensor 39a1 refers to the intersection of two diagonal lines of a rectangle that forms the imaging surface of the image sensor 39a1.

  The movable unit 30a is attached with the imaging unit 39a, the plate 64a, and the first substrate 49a1 of the movable substrate 49a in the optical axis direction when viewed from the direction of the photographing lens 67. The imaging unit 39a includes an imaging device 39a1, a stage 39a2, a pressing unit 39a3, and an optical low-pass filter 39a4. The stage 39a2 and the plate 64a sandwich and urge the imaging device 39a1, the pressing unit 39a3, and the optical low-pass filter 39a4. The first to third horizontal movement bearing portions 51a to 53a are attached to the stage 39a2. The plate 64 a is positioned so that the image sensor 39 a 1 is perpendicular to the optical axis LX of the photographic lens 67 when the image sensor 39 a 1 is attached. Further, when the plate 64a is made of a metal material, the plate 64a is further brought into a heat radiation effect by being in contact with the image sensor 39a1.

  The movable substrate 49a includes a first substrate 49a1 on a plane perpendicular to the third direction z, and second to fifth substrates 49a2 to 49a5 attached perpendicular to the first substrate 49a1. The second and third substrates 49a2 and 49a3 are on a plane perpendicular to the second direction y, and these are in a positional relationship with the image sensor 39a1 sandwiched in the second direction y. The fourth and fifth substrates 49a4 and 49a5 are on a plane perpendicular to the first direction x, and are in a positional relationship with the image sensor 39a1 sandwiched in the first direction x.

  The second substrate 49a2 includes a first horizontal driving coil 31a in which a sheet-like and spiral coil pattern is formed, and the first horizontal hall element hh1 of the hall element portion 44a perpendicular to the second direction y. It is attached to the side opposite to the side where the image sensor 39a1 is present on a plane.

  The coil pattern of the first horizontal driving coil 31a is the first horizontal direction by the electromagnetic force generated from the current direction of the first horizontal driving coil 31a and the first horizontal position detection and the magnetic field direction of the driving magnet 401b. In order to move the movable portion 30a including the driving coil 31a in the first direction x, the movable portion 30a has a line segment parallel to the third direction z.

  The third substrate 49a3 is configured such that the second horizontal driving coil 32a in which a sheet-like and spiral coil pattern is formed and the second horizontal hall element hh2 of the hall element portion 44a are perpendicular to the second direction y. It is attached to the side opposite to the side where the image sensor 39a1 is present on a plane.

  The coil pattern of the second horizontal driving coil 32a is the second horizontal direction by the electromagnetic force generated from the current direction of the second horizontal driving coil 32a and the second horizontal position detection and the magnetic field direction of the driving magnet 402b. In order to move the movable part 30a including the driving coil 32a in the first direction x, the movable part 30a has a line segment parallel to the third direction z.

  In the fourth substrate 49a4, the first vertical driving coil 33a in which a sheet-like and spiral coil pattern is formed and the first vertical hall element hv1 of the hall element portion 44a are perpendicular to the first direction x. It is attached to the side opposite to the side where the image sensor 39a1 is present on a plane.

  The coil pattern of the first vertical driving coil 33a is the first vertical direction by the electromagnetic force generated from the current direction of the first vertical driving coil 33a and the first vertical position detection and the magnetic field direction of the driving magnet 411b. In order to move the movable portion 30a including the driving coil 33a in the second direction y, the movable portion 30a has a line segment parallel to the third direction z.

  The fifth substrate 49a5 is configured such that the second vertical driving coil 34a in which a sheet-like and spiral coil pattern is formed and the second vertical hall element hv2 of the hall element portion 44a are perpendicular to the first direction x. It is attached to the side opposite to the side where the image sensor 39a1 is present on a plane.

  The coil pattern of the second vertical driving coil 34a is the second vertical direction by the electromagnetic force generated from the current direction of the second vertical driving coil 34a and the second vertical position detection and the magnetic field direction of the driving magnet 412b. In order to move the movable part 30a including the driving coil 34a in the second direction y, the movable part 30a has a line segment parallel to the third direction z.

  The first and second horizontal hall elements hh1 and hh2 and the first and second vertical hall elements hv1 and hv2 included in the hall element unit 44a will be described later.

  The first and second horizontal driving coils 31a and 32a and the first and second vertical driving coils 33a and 34a are each formed with a spiral coil pattern from the outer peripheral portion of the winding toward the center. Sheet coil. Therefore, the thickness of the first and second horizontal driving coils 31a and 32a in the second direction y and the thickness of the first and second vertical driving coils 33a and 34a in the first direction x are reduced. Is possible.

  Further, in order to increase the electromagnetic force in the first direction x, even if each of the first and second horizontal driving coils 31a and 32a has a configuration in which a plurality of sheet coils are stacked in the second direction y, the second direction y The thickness of the film hardly increases. In order to increase the electromagnetic force in the second direction y, even if each of the first and second vertical driving coils 33a and 34a has a configuration in which a plurality of sheet coils are stacked in the first direction x, the thickness in the first direction x There is little increase.

  In the present embodiment, in the first horizontal driving coil 31a, sheet coils are stacked in two layers in the second direction y, and further, the first horizontal hall element hh1 is stacked in the second direction y (see FIG. 7). ). Similarly to the first horizontal driving coil 31a, the second horizontal driving coil 32a has a sheet coil laminated in two layers in the second direction y, and the second horizontal hall element hh2 has a second direction y. (Not shown). As with the first and second vertical driving coils 31a and 32a, the first and second vertical driving coils 33a and 34a are laminated in two layers in the first direction x. The second vertical hall elements hv1, hv2 are overlapped in the first direction x (not shown). However, the number of stacked first and second horizontal driving coils 31a and 32a and the first and second vertical driving coils 33a and 34a is not limited to two.

  The first and second horizontal driving coils 31a and 32a and the first and second vertical driving coils 33a and 34a are connected to a driver circuit 29 for driving them through a flexible substrate (not shown). The driver circuit 29 receives the first and second PWM duties dx and dy from the PWM0 and PWM1 of the CPU 21. The driver circuit 29 supplies power to the first and second horizontal driving coils 31a and 32a according to the input first PWM duty dx, and drives the movable portion 30a in the first direction x. The driver circuit 29 supplies power to the first and second vertical driving coils 33a and 34a according to the input second PWM duty dy, and drives the movable portion 30a in the second direction y.

  The first horizontal driving coil 31a and the second horizontal driving coil 32a are connected in series. The first vertical driving coil 33a and the second vertical driving coil 34a are connected in series.

  The first horizontal position detecting and driving magnet 401b is attached to the fixed portion 30b so as to face the first horizontal driving coil 31a and the first horizontal hall element hh1 in the second direction y. That is, the first horizontal position detecting and driving magnet 401b and the first horizontal driving coil 31a are arranged along the second direction y. The first horizontal position detecting and driving magnet 401b and the first horizontal hall element hh1 are arranged along the second direction y.

  The second horizontal position detecting and driving magnet 402b is attached to the fixed portion 30b so as to face the second horizontal driving coil 32a and the second horizontal hall element hh2 in the second direction y. That is, the second horizontal position detecting and driving magnet 402b and the second horizontal driving coil 32a are arranged along the second direction y. The second horizontal position detecting and driving magnet 402b and the second horizontal hall element hh2 are arranged along the second direction y.

  The first and second horizontal position detection and drive magnets 401b and 402b have N and S poles arranged on a plane perpendicular to the second direction y and in the first direction x. In addition, the first horizontal position detection and driving magnet 401b and the second horizontal position detection and driving magnet 402b are in a positional relationship of sandwiching the movable portion 30a in the second direction y.

  The first vertical position detecting and driving magnet 411b is attached to the fixed portion 30b so as to face the first vertical driving coil 33a and the first vertical hall element hv1 in the first direction x. That is, the first vertical direction position detection and drive magnet 411b and the first vertical direction drive coil 33a are arranged along the first direction x. The first vertical position detecting and driving magnet 411b and the first vertical hall element hv1 are arranged along the first direction x.

  The second vertical position detecting and driving magnet 412b is attached to the fixed portion 30b so as to face the second vertical driving coil 34a and the second vertical hall element hv2 in the first direction x. That is, the second vertical position detecting and driving magnet 412b and the second vertical driving coil 34a are arranged along the first direction x. The second vertical position detection and drive magnet 412b and the second vertical hall element hv2 are disposed along the first direction x.

  The first and second vertical position detection and drive magnets 411b and 412b are arranged with N and S poles on a plane perpendicular to the first direction x and in the second direction y. In addition, the first vertical position detection and driving magnet 411b and the second vertical position detection and driving magnet 412b are in a positional relationship of sandwiching the movable portion 30a in the first direction x.

  The first horizontal position detection and drive magnet 401b is attached to the first horizontal position detection and drive yoke 421b attached on the base plate 65b of the fixed portion 30b and on the movable portion 30a side in the third direction z. . The length in the third direction z of the first horizontal position detection and drive magnet 401b is set to be longer than the first effective length L1 in the third direction z of the first horizontal drive coil 31a.

  The second horizontal position detection and drive magnet 402b is attached to the second horizontal position detection and drive yoke 422b attached to the movable part 30a side on the base plate 65b of the fixed part 30b in the third direction z. . The length in the third direction z of the second horizontal position detection and driving magnet 402b is set to be longer than the first effective length L1 in the third direction z of the second horizontal driving coil 32a.

  The first vertical position detecting and driving magnet 411b is attached to the first vertical position detecting and driving yoke 431b attached to the movable part 30a side on the base plate 65b of the fixed part 30b in the third direction z. . The length of the first vertical direction position detection and driving magnet 411b in the third direction z is set to be longer than the first effective length L1 of the first vertical direction driving coil 33a in the third direction z.

  The second vertical position detecting and driving magnet 412b is attached to the second vertical position detecting and driving yoke 432b attached to the movable part 30a side on the base plate 65b of the fixed part 30b in the third direction z. . The length in the third direction z of the second vertical direction position detection and drive magnet 412b is set to be longer than the first effective length L1 in the third direction z of the second vertical direction drive coil 34a.

  The first horizontal position detecting and driving yoke 421b is formed of a polygonal soft magnetic material having a U-shape when viewed from the first direction x, and the first horizontal position detecting and driving magnet 401b, The first horizontal driving coil 31a and the first horizontal hall element hh1 are mounted on the base plate 65b of the fixed portion 30b so as to sandwich the first horizontal hall element hh1 in the second direction y. The portion of the first horizontal position detection and drive yoke 421b on the side in contact with the first horizontal position detection and drive magnet 401b prevents the magnetic field of the first horizontal position detection and drive magnet 401b from leaking to the surroundings. To play a role. The first horizontal position detecting and driving magnet 401b in the first horizontal position detecting and driving yoke 421b, the first horizontal driving coil 31a, and the portion facing the second substrate 49a2 are in the first horizontal direction. It plays the role of increasing the magnetic flux density between the position detecting and driving magnet 401b and the first horizontal driving coil 31a and between the first horizontal position detecting and driving magnet 401b and the first horizontal hall element hh1.

  The second horizontal position detecting and driving yoke 422b is formed of a polygonal soft magnetic material having a U-shape when viewed from the first direction x, and the second horizontal position detecting and driving magnet 402b, The second horizontal driving coil 32a and the second horizontal hall element hh2 are mounted on the base plate 65b of the fixed portion 30b so as to sandwich the second horizontal hall element hh2 in the second direction y. The portion of the second horizontal position detection and drive yoke 422b on the side in contact with the second horizontal position detection and drive magnet 402b prevents the magnetic field of the second horizontal position detection and drive magnet 402b from leaking to the surroundings. To play a role. The second horizontal position detecting and driving magnet 422b in the second horizontal position detecting and driving magnet 402b, the second horizontal driving coil 32a, and the portion facing the third substrate 49a3 are in the second horizontal direction. The position detecting and driving magnet 402b and the second horizontal driving coil 32a and the second horizontal position detecting and driving magnet 402b and the second horizontal hall element hh2 are increased.

  The first vertical position detecting and driving yoke 431b is formed of a polygonal soft magnetic material having a U-shape when viewed from the second direction y, and the first vertical position detecting and driving magnet 411b, The first vertical driving coil 33a and the first vertical hall element hv1 are mounted on the base plate 65b of the fixed portion 30b so as to sandwich the first vertical hall element hv1 in the first direction x. The portion of the first vertical position detecting and driving yoke 431b on the side in contact with the first vertical position detecting and driving magnet 411b prevents the magnetic field of the first vertical position detecting and driving magnet 411b from leaking to the surroundings. To play a role. The first vertical direction position detection and drive magnet 411b, the first vertical direction drive coil 33a, and the portion facing the fourth substrate 49a4 in the first vertical position detection and drive yoke 431b are in the first vertical direction. It serves to increase the magnetic flux density between the position detection and drive magnet 411b and the first vertical driving coil 33a, and between the first vertical position detection and drive magnet 411b and the first vertical hall element hv1.

  The second vertical position detecting and driving yoke 432b is formed of a polygonal soft magnetic material having a U-shape when viewed from the second direction y, and the second vertical position detecting and driving magnet 412b. The second vertical driving coil 34a and the second vertical hall element hv2 are mounted on the base plate 65b of the fixed portion 30b so as to be sandwiched in the first direction x. The portion of the second vertical position detection and drive magnet 432b on the side in contact with the second vertical position detection and drive magnet 412b prevents the magnetic field of the second vertical position detection and drive magnet 412b from leaking to the surroundings. To play a role. The second vertical position detection and driving magnet 412b, the second vertical driving coil 34a, and the portion facing the fifth substrate 49a5 in the second vertical position detection and driving yoke 432b are in the second vertical direction. It serves to increase the magnetic flux density between the position detection and drive magnet 412b and the second vertical drive coil 34a, and between the second vertical position detection and drive magnet 412b and the second vertical hall element hv2.

  The Hall element unit 44a includes four Hall elements that are magnetoelectric conversion elements utilizing the Hall effect, and a current position P (first detection position signal px, first detection position signal px, second direction y) of the movable unit 30a in the first direction x and the second direction y. 2 is a uniaxial Hall element that detects a detection position signal py). Among the four Hall elements, the Hall element for position detection in the first direction x is used as the first and second horizontal Hall elements hh1, hh2, and the position detection in the second direction y as two horizontal magnetic field change detection elements. The Hall elements are first and second vertical Hall elements hv1 and hv2 as two vertical magnetic field change detection elements.

  The first horizontal hall element hh1 is mounted on the second substrate 49a2 of the movable part 30a as viewed from the second direction y, and at a position facing the first horizontal position detection and driving magnet 401b of the fixed part 30b. It is done. The second horizontal hall element hh2 is mounted on the third substrate 49a3 of the movable part 30a when viewed from the second direction y, and at a position facing the second horizontal position detecting and driving magnet 402b of the fixed part 30b. It is done.

  The first vertical hall element hv1 is mounted on the fourth substrate 49a4 of the movable portion 30a when viewed from the first direction x and at a position facing the first vertical position detection and driving magnet 411b of the fixed portion 30b. It is done. The second vertical hall element hv2 is mounted on the fifth substrate 49a5 of the movable part 30a as viewed from the first direction x and at a position facing the second vertical position detection and driving magnet 412b of the fixed part 30b. It is done.

  The first and second horizontal hall elements hh1 and hh2 are arranged in the windings of the first and second horizontal driving coils 31a and 32a, and particularly arranged near the center with respect to the first direction x. desirable. The first and second vertical hall elements hv1 and hv2 are preferably arranged in the windings of the first and second vertical driving coils 33a and 34a, particularly in the vicinity of the center in the second direction y. . The first and second horizontal position detection and drive magnets 401b and 402b, the first and second vertical position detection and the first and second horizontal position detection used for both the movement and the position detection of the movable part 30a by arranging in the winding. The drive magnets 411b and 412b can be downsized. Furthermore, the moving range of the movable part 30a and the center of the position detection range can be matched, and both ranges can be used efficiently.

  The portion of the movable substrate 49a where the first horizontal hall element hh1 is located, that is, the second substrate 49a2, has two layers of the first horizontal driving coil 31a and one layer of the first horizontal hall element hh1 (see FIG. 7). In the portion of the movable substrate 49a where the second horizontal hall element hh2 is provided, that is, the third substrate 49a3, two layers of the second horizontal driving coil 32a and one layer of the second horizontal hall element hh2 are laminated. The portion of the movable substrate 49a where the first vertical hall element hv1 is located, that is, the fourth substrate 49a4, is formed by laminating two layers of the first vertical driving coil 33a and one layer of the first vertical hall element hv1. In the portion of the movable substrate 49a where the second vertical hall element hv2 is located, that is, the fifth substrate 49a5, two layers of the second vertical driving coil 34a and one layer of the second vertical hall element hv2 are laminated. The second to fifth substrates 49a2 to 49a5 are multilayer substrates.

  In order to perform position detection by making the most of the range in which position detection with high accuracy can be performed using a linear change amount, the position of the first horizontal hall element hh1 in the first direction x is near the center of the image sensor 39a1. Are in the vicinity of the same distance from the N and S poles of the first horizontal position detection and drive magnet 401b when the position is in a positional relationship passing through the optical axis LX. Similarly, the position of the second horizontal hall element hh2 in the first direction x is N in the second horizontal position detection and driving magnet 402b when the vicinity of the center of the image sensor 39a1 passes through the optical axis LX. It is desirable that the poles and S poles be in the vicinity of the same distance.

  The position in the second direction y of the first vertical hall element hv1 is in the vicinity of the center of the image sensor 39a1 in order to perform position detection by making the most of the range in which position detection with high accuracy can be performed using the linear change amount. Are in the vicinity of the same distance from the north pole and south pole of the first vertical position detection and drive magnet 411b. Similarly, the position of the second vertical hall element hv2 in the second direction y is N when the position of the second vertical direction position detection and drive magnet 412b is determined when the vicinity of the center of the image sensor 39a1 passes through the optical axis LX. It is desirable that the poles and S poles be in the vicinity of the same distance.

  A first distance d1 in the second direction y between the first horizontal hall element hh1 and the first horizontal position detection and drive magnet 401b when the vicinity of the center of the image sensor 39a1 is in a positional relationship passing through the optical axis LX; The first and second horizontal hall elements hh1 and hh2 are arranged so that the second distance d2 in the second direction y between the second horizontal hall element hh2 and the second horizontal position detection and driving magnet 402b is equal. The position in the second direction y is set. At this time, the distance in the second direction y between the first horizontal position detection and drive magnet 401b and the vicinity of the center of the image sensor 39a1, and the second horizontal position detection and drive magnet 402b and the center of the image sensor 39a1. It is desirable to set the positional relationship between the movable portion 30a and the fixed portion 30b so that the distance in the second direction y with the vicinity is equal.

  Thereby, it becomes possible to arrange | position position detection members, such as a Hall element and a magnet, substantially symmetrically with respect to the 2nd direction y across the optical axis LX. Further, it becomes possible to dispose drive members such as coils and magnets almost symmetrically with the optical axis LX separated from the positional relationship between the Hall element and the coil.

  A third distance d3 in the first direction x between the first vertical hall element hv1 and the first vertical position detection and drive magnet 411b when the vicinity of the center of the image sensor 39a1 is in a positional relationship passing through the optical axis LX; The first and second vertical hall elements hv1, hv2 are set so that the fourth distance d4 in the first direction x between the second vertical hall element hv2 and the second vertical position detection and drive magnet 412b is equal. A position in the first direction x is set. At this time, the distance in the first direction x between the first vertical position detection and drive magnet 411b and the vicinity of the center of the image sensor 39a1, and the second vertical position detection and drive magnet 412b and the center of the image sensor 39a1. It is desirable to set the positional relationship between the movable portion 30a and the fixed portion 30b so that the distance in the first direction x with the vicinity is equal.

  Thereby, it becomes possible to arrange | position position detection members, such as a Hall element and a magnet, substantially symmetrically with respect to the 1st direction x across the optical axis LX. Further, it becomes possible to dispose drive members such as coils and magnets almost symmetrically with the optical axis LX separated from the positional relationship between the Hall element and the coil.

  The base plate 65b is a plate-like member that serves as a base to which the first and second horizontal position detection and drive yokes 421b and 422b are attached in the fixed portion 30b, and is arranged in parallel with the imaging surface of the imaging device 39a1. In the present embodiment, the base plate 65b is closer to the photographing lens 67 than the movable substrate 49a in the third direction z, but the positional relationship is such that the movable substrate 49a is closer to the photographing lens 67. There may be.

  First horizontal driving coil 31a and second horizontal driving coil 32a, first vertical driving coil 33a and second vertical driving coil 34a, first horizontal position detecting and driving magnet 401b and second Horizontal position detection and drive magnet 402b, first vertical position detection and drive magnet 411b and second vertical position detection and drive magnet 412b, first horizontal position detection and drive yoke 421b and second horizontal direction. Position detection and drive yoke 422b, first vertical position detection and drive yoke 431b and second vertical position detection and drive yoke 432b, first horizontal hall element hh1 and second horizontal hall element hh2, first The vertical hall element hv1 and the second vertical hall element hv2 have the same characteristics. This is for the purpose of driving and detecting the position of the movable portion 30a with high accuracy along the moving direction of the moving shaft 50a, that is, the first direction x and the second direction y.

  The hall element signal processing circuit 45 detects the first horizontal potential difference x1 between the output terminals of the first horizontal hall element hh1 from the output signal of the first horizontal hall element hh1, and outputs the second horizontal hall element hh2. A first detection position for detecting a second horizontal potential difference x2 between the output terminals of the second horizontal hall element hh2 from the signal, and multiplying the average value by a constant amplification factor to identify the position in the first direction x From the first hall element signal processing circuit 450 that outputs the signal px to the A / D2 of the CPU 21 and the output signal of the first vertical hall element hv1, the first vertical potential difference between the output terminals of the first vertical hall element hv1. y1 is detected, and the second vertical potential difference y2 between the output terminals of the second vertical hall element hv2 is calculated from the output terminal of the second vertical hall element hv2. And a second Hall element signal processing circuit 460 for outputting a second detection position signal py for specifying the position in the second direction y by multiplying the average value by a constant amplification factor to the A / D 3 of the CPU 21. .

  A circuit configuration relating to input / output signals of the first and second horizontal hall elements hh1 and hh2 in the first hall element signal processing circuit 450 will be described (see FIG. 8). In FIG. 8, the circuit configuration (second Hall element signal processing circuit 460) relating to the input / output signals of the first and second vertical Hall elements hv1 and hv2 is omitted (see FIG. 16).

  The first Hall element signal processing circuit 450 includes, as output units, first and second horizontal differential amplifier circuits 451 and 452, first and second horizontal subtraction circuits 453 and 454, a horizontal addition circuit 455, and horizontal inversion. It has an amplifier circuit 456, and has first and second horizontal power supply circuits 457 and 458 as input sections.

  The output terminal of the first horizontal hall element hh1 is connected to the first horizontal differential amplifier circuit 451, and the first horizontal differential amplifier circuit 451 is connected to the first horizontal subtraction circuit 453. The output terminal of the second horizontal hall element hh2 is connected to the second horizontal differential amplifier circuit 452, and the second horizontal differential amplifier circuit 452 is connected to the second horizontal subtraction circuit 454. The first and second horizontal differential amplifier circuits 451 and 452 are differential amplifier circuits that amplify a signal difference between the output terminals of the first and second horizontal hall elements hh1 and hh2. The first and second horizontal subtracting circuits 453 and 454 determine the first and second horizontal potential differences between the output terminals of the first and second horizontal Hall elements hh1 and hh2 from the difference between the amplified signal difference and the reference voltage Vref. It is a subtraction circuit for obtaining x1 and x2 (Hall output voltage).

  The first and second horizontal direction subtraction circuits 453 and 454 are connected to the horizontal direction addition circuit 455. The horizontal direction addition circuit 455 is connected to the horizontal direction inversion amplifier circuit 456. The horizontal inverting amplifier circuit 456 is connected to the CPU 21. The horizontal direction addition circuit is an addition circuit, and the horizontal direction inversion amplifier circuit is an inversion amplification circuit. The first horizontal direction potential difference x1 output from the first horizontal direction subtraction circuit 453 and the second horizontal direction subtraction circuit 454 are output. The first detection position signal px is obtained by obtaining an average value of the second horizontal potential difference x2 and multiplying the average value by a certain amplification factor.

  The first horizontal differential amplifier circuit 451 includes first to third resistors R1 to R3, and first and second operational amplifiers A1 and A2. One of the output terminals of the first horizontal hall element hh1 is connected to the non-inverting input terminal of the first operational amplifier A1, and the other terminal is connected to the non-inverting input terminal of the second operational amplifier A2. The inverting input terminal of the first operational amplifier A1 is connected to the first and second resistors R1 and R2, and the inverting input terminal of the second operational amplifier A2 is connected to the first and third resistors R1 and R3. The output terminal of the first operational amplifier A1 is connected to the second resistor R2 and the seventh resistor R7 of the first horizontal direction subtracting circuit 453. The output terminal of the second operational amplifier A2 is connected to the third resistor R3 and the ninth resistor R9 of the first horizontal direction subtracting circuit 453.

  The second horizontal differential amplifier circuit 452 includes fourth to sixth resistors R4 to R6, and third and fourth operational amplifiers A3 and A4. One of the output terminals of the second horizontal hall element hh2 is connected to the non-inverting input terminal of the third operational amplifier A3, and the other terminal is connected to the non-inverting input terminal of the fourth operational amplifier A4. The inverting input terminal of the third operational amplifier A3 is connected to the fourth and fifth resistors R4 and R5, and the inverting input terminal of the fourth operational amplifier A4 is connected to the fourth and sixth resistors R4 and R6. The output terminal of the third operational amplifier A3 is connected to the fifth resistor R5 and the eleventh resistor R11 of the second horizontal subtracting circuit 454. The output terminal of the fourth operational amplifier A4 is connected to the sixth resistor R6 and the thirteenth resistor R13 of the second horizontal subtracting circuit 454.

  The first horizontal direction subtraction circuit 453 includes seventh to tenth resistors R7 to R10 and a fifth operational amplifier A5. The inverting input terminal of the fifth operational amplifier A5 is connected to the seventh resistor R7 and the eighth resistor R8, the non-inverting input terminal is connected to the ninth resistor R9 and the tenth resistor R10, and the output terminal is connected to the eighth resistor R8 and the horizontal direction. The first horizontal direction potential difference x1 is output by being connected to the fifteenth resistor R15 of the adder circuit 455. One terminal of the tenth resistor R10 is connected to the power source of the reference voltage Vref.

  The second horizontal direction subtraction circuit 454 includes first to fourteenth resistors R11 to R14 and a sixth operational amplifier A6. The inverting input terminal of the sixth operational amplifier A6 is connected to the eleventh resistor R11 and the twelfth resistor R12, the non-inverting input terminal is connected to the thirteenth resistor R13 and the fourteenth resistor R14, and the output terminal is connected to the twelfth resistor R12 and the horizontal direction. The second horizontal potential difference x2 is output by being connected to the seventeenth resistor R17 of the adder circuit. One terminal of the fourteenth resistor R14 is connected to the power source of the reference voltage Vref.

  The horizontal direction addition circuit 455 includes fifteenth to seventeenth resistors R15 to R17 and a seventh operational amplifier A7. The inverting input terminal of the seventh operational amplifier A7 is connected to the 15th to 17th resistors R15 to R17, and the non-inverting input terminal is connected to the power supply of the reference voltage Vref. The output terminal of the seventh operational amplifier A7 is connected to the sixteenth resistor R16 and the eighteenth resistor R18 of the horizontal inverting amplifier circuit 456.

  The horizontal inverting amplifier circuit 456 includes eighteenth and nineteenth resistors R18 and R19 and an eighth operational amplifier A8. The inverting input terminal of the eighth operational amplifier A8 is connected to the eighteenth and nineteenth resistors R18 and R19, and the non-inverting input terminal is connected to the power supply of the reference voltage Vref. The output terminal of the eighth operational amplifier A8 is connected to the nineteenth resistor R19. The eighth operational amplifier A8 outputs the first detection position signal px to A / D2 of the CPU 21.

  The first and fourth resistors R1 and R4 have the same resistance value, the second, third, fifth, and sixth resistors R2, R3, R5, and R6 have the same resistance value, and the seventh to fourteenth resistors R7 to R14 have the same resistance value. The 15th and 17th resistors R15 and R17 are set to the same resistance value, the resistance value of the 16th resistor R16 is set to 1/2 of the resistance value of the 15th resistor R15, and the 18th and 19th resistors R18 and R19 are set to the same resistance value. Is done. The first to fourth operational amplifiers A1 to A4 are set to the same operational amplifier, and the fifth and sixth operational amplifiers A5 and A6 are set to the same operational amplifier.

  The first horizontal power supply circuit 457 includes a twenty-first resistor R21 and an eleventh operational amplifier A11. The inverting input terminal of the eleventh operational amplifier A11 is connected to one of the twenty-first resistor R21 and the input terminal of the first horizontal hall element hh1. The potential of the non-inverting input terminal of the eleventh operational amplifier A11 is set to the first constant voltage XVf corresponding to the constant current value at the input terminal of the first horizontal hall element hh1. An output terminal of the eleventh operational amplifier A11 is connected to one input terminal of the first horizontal hall element hh1. One terminal of the twenty-first resistor R21 is grounded.

  The second horizontal power supply circuit 458 includes a twenty-second resistor R22 and a twelfth operational amplifier A12. The inverting input terminal of the twelfth operational amplifier A12 is connected to one of the twenty-second resistor R22 and the input terminal of the second horizontal hall element hh2. The potential of the non-inverting input terminal of the twelfth operational amplifier A12 is set to the first constant voltage XVf corresponding to the constant current value at the input terminal of the second horizontal hall element hh2. The output terminal of the twelfth operational amplifier A12 is connected to one of the input terminals of the second horizontal hall element hh2. One terminal of the twenty-second resistor R22 is grounded.

  The circuit configuration relating to the input / output signals of the first and second vertical hall elements hv1 and hv2 in the second hall element signal processing circuit 460 is the same. The second Hall element signal processing circuit 460 has first and second vertical differential amplifier circuits 461 and 462, first and second corresponding to the first and second horizontal differential amplifier circuits 451 and 452, respectively, as output units. First and second vertical direction subtraction circuits 463 and 464 corresponding to the horizontal direction subtraction circuits 453 and 454, a vertical direction addition circuit 465 corresponding to the horizontal direction addition circuit 455, and a vertical direction inversion corresponding to the horizontal direction inversion amplification circuit 456. It has an amplifying circuit 466 and has first and second vertical power supply circuits 467 and 468 corresponding to the first and second horizontal power supply circuits 457 and 458 as input sections (see FIG. 16). In FIG. 16, the circuit configuration (first Hall element signal processing circuit 450) relating to the input / output signals of the first and second horizontal hall elements hh1 and hh2 is omitted (see FIG. 8).

  The first and second vertical direction subtraction circuits 463 and 464 output the first and second vertical direction potential differences y1 and y2 corresponding to the first and second horizontal direction potential differences x1 and x2, and the vertical direction inversion amplification circuit 466 is output. The second detection position signal py corresponding to the first detection position signal px is output. A second constant voltage YVf corresponding to the first constant voltage XVf is applied to the input terminals of the first and second vertical hall elements hv1 and hv2 via the first and second vertical power supply circuits 467 and 468. The

  In the conventional technique, a member for performing an image blur correction operation, that is, a magnet and a coil for driving the movable portion 30a, and a hall element and a magnet for detecting the position of the movable portion 30a are all in the third direction. It was arrange | positioned on the plane perpendicular | vertical to z. In the present embodiment, the members for performing the image blur correction operation are arranged on a plane perpendicular to the first direction x or on a plane perpendicular to the second direction y, that is, in the third direction z. As a result, the arrangement of the members for performing the image blur correction operation on the plane perpendicular to the third direction z is reduced, so that the image blur correction device does not increase in size in the plane direction perpendicular to the third direction z.

  In the third direction z, many members for performing the image blur correction operation are arranged. In the third direction z, the photographing lens 67, the image sensor 39a1, and the like are originally arranged. Even if a member for performing the image blur correction operation is arranged around the periphery, it does not cause a large size of the entire imaging apparatus. Accordingly, it is possible to reduce the size of the image pickup apparatus including the image blur correction apparatus as compared with the conventional technique. In particular, the effect is remarkable in an imaging apparatus having a configuration that is long in the third direction z, such as an imaging apparatus with a zoom lens.

  Further, by arranging drive members such as a coil and a magnet almost symmetrically with respect to one correction direction with the optical axis LX therebetween, high-precision urging along the moving shaft 50a can be performed. Thereby, the drive resistance of the movable part 30a can be suppressed, and power saving and high followability to drive can be obtained.

  Further, in the present embodiment, when the movable portion 30a is moved in the second direction y, the first distance d1 between the first horizontal position detection and drive magnet 401b and the first horizontal hall element hh1, and The second distance d2 between the second horizontal position detection and drive magnet 402b and the second horizontal hall element hh2 changes. Similarly, when the movable portion 30a is moved in the first direction x, the third distance d3 between the first vertical position detection and driving magnet 411b and the first vertical hall element hv1, and the second vertical direction The fourth distance d4 between the position detection and drive magnet 412b and the second vertical hall element hv2 changes. When the distance between the magnet and the Hall element changes, the magnetic flux density between them changes, so that the value of the output signal of each Hall element also changes.

  FIG. 9 shows the first and second horizontal position detection and drive magnets 401b and 402b, the first and second horizontal hall elements hh1 and hh2, when the movable part 30a is at the movement center position in the second direction y. The positional relationship of is shown. For simplicity, the first substrate 49a1 and the like are omitted. FIG. 10 shows the amount of movement of the movable part 30a in the first direction x and the first and second horizontal hall elements hh1 and hh2 when the movable part 30a is at the movement center position in the second direction y. It is a graph which shows the relationship of the value of 1st, 2nd horizontal direction electric potential difference x1, x2. Since the values of the first distance d1 and the second distance d2 are equal, the magnetic flux density between the magnet and the Hall element is also equal, the first graph line (1) indicating the value of the first horizontal potential difference x1, and the second horizontal direction The second graph line (2) indicating the value of the potential difference x2 matches. Accordingly, the third graph line (3) indicating the average value of the first and second horizontal potential differences x1 and x2 also coincides.

  FIG. 11 shows the first and second horizontal position detection and drive magnets 401b when the movable portion 30a is closer to the first horizontal position detection and drive magnet 401b than the movement center position in the second direction y. 402b shows the positional relationship between the first and second horizontal hall elements hh1 and hh2. For simplicity, the first substrate 49a1 and the like are omitted. 12 shows the amount of movement of the movable part 30a in the first direction x when the movable part 30a is closer to the first horizontal direction position detection and driving magnet 401b than the movement center position in the second direction y. 4 is a graph showing the relationship between the values of the first and second horizontal potential differences x1 and x2 output from the second horizontal hall elements hh1 and hh2. At this time, since the first distance d1 is shorter than the second distance d2, the magnetic flux density between the first horizontal hall element hh1 and the first horizontal position detecting and driving magnet 401b is the second horizontal direction. It is larger than the magnetic flux density between the hall element hh2 and the second horizontal position detection and drive magnet 402b. Therefore, the output width of the first graph line (1) indicating the value of the first horizontal potential difference x1 is larger than the output width of the second graph line (2) indicating the value of the second horizontal potential difference x2. The third graph line (3) indicating the average value of the first and second horizontal potential differences x1 and x2 at this time coincides with the third graph line (3) of FIG. This is because the amount of decrease in the first distance d1 is equal to the amount of increase in the second distance d2 compared to when the movable part 30a is at the movement center position in the second direction y.

  FIG. 13 shows the first and second horizontal position detection and drive magnets 401b when the movable part 30a is closer to the second horizontal position detection and drive magnet 402b than the movement center position in the second direction y. 402b shows the positional relationship between the first and second horizontal hall elements hh1 and hh2. For simplicity, the first substrate 49a1 and the like are omitted. FIG. 14 shows the amount of movement of the movable portion 30a in the first direction x when the movable portion 30a is closer to the second horizontal position detection and driving magnet 402b than the movement center position in the second direction y. 4 is a graph showing the relationship between the values of the first and second horizontal potential differences x1 and x2 output from the second horizontal hall elements hh1 and hh2. At this time, since the first distance d1 is longer than the second distance d2, the magnetic flux density between the first horizontal hall element hh1 and the first horizontal position detecting and driving magnet 401b is the second horizontal direction. It is smaller than the magnetic flux density between the hall element hh2 and the second horizontal position detection and drive magnet 402b. Therefore, the output width of the first graph line (1) indicating the value of the first horizontal direction potential difference x1 is smaller than the output width of the second graph line (2) indicating the value of the second horizontal direction potential difference x2. The third graph line (3) indicating the average value of the first and second horizontal potential differences x1 and x2 at this time coincides with the third graph line (3) of FIG. This is because the amount of increase in the first distance d1 and the amount of decrease in the second distance d2 are equal compared to when the movable part 30a is at the movement center position in the second direction y.

  That is, when the movable part 30a is moved in the second direction y so that the first distance d1 increases, the value of the second distance d2 decreases by the increase of the first distance d1. Similarly, when the movable part 30a is moved in the first direction x so that the third distance d3 increases, the value of the fourth distance d4 decreases by the increase of the third distance d3.

  In the present embodiment, using the fact that the increase amount of the first distance d1 and the decrease amount of the second distance d2 are the same, the first horizontal potential difference x1 that is an output value from the first horizontal hall element hh1 is obtained. The first direction of the information on the detected position P of the movable part 30a is obtained by multiplying the average value of the output value from the second horizontal hall element hh2 with the second horizontal potential difference x2 by a constant amplification factor. The first detection position signal px as the x component is assumed. Accordingly, it is possible to accurately detect the position in the first direction x in consideration of the movement of the movable part 30a in the second direction y.

  Similarly, using the fact that the increase amount of the third distance d3 and the decrease amount of the fourth distance d4 are the same, the first vertical potential difference y1 that is the output value from the first vertical hall element hv1, The second direction y component of the detected information on the position P of the movable part 30a is a value obtained by multiplying the average value of the second vertical direction potential difference y2 that is the output value from the two vertical hall elements hv2 by a certain amplification factor. As a second detection position signal py. Accordingly, it is possible to accurately detect the position in the second direction y in consideration of the movement of the movable part 30a in the first direction x.

  Next, the procedure of image blur correction processing that is performed independently of other operations as interrupt processing at regular time intervals (1 ms) will be described with reference to the flowchart of FIG.

  When the image blur correction process interrupt operation starts in step S11, the first and second angular velocities vx and vy output from the angular velocity detection unit 25 in step S12 are converted to A via the A / D0 and A / D1 of the CPU 21, respectively. / D converted and input. In step S13, the first and second detected position signals px and py detected by the Hall element unit 44a and calculated by the Hall element signal processing circuit 45 are A / D converted via the A / D2 and A / D3 of the CPU 21. The current position P (pdx, pdy) is obtained.

  In step S14, it is determined whether IS = 0. When IS = 0, that is, when the correction mode is not set, in step S15, the position S (sx, sy) to which the movable part 30a should move is set to be the same as the movement center position of the movable part 30a. In the case of IS = 1, that is, in the correction mode, in step S16, the position S (sx, sy) to which the movable part 30a should move is calculated and set from the first and second angular velocities vx, vy obtained in step S12.

  In step S17, the driving force D required for the movement of the movable portion 30a from the position S (sx, sy) and the current position P (pdx, pdy) set in step S15 or step S16, that is, for the first and second horizontal driving. First and second PWM duties dx and dy necessary for driving the coils 31a and 32a and the first and second vertical driving coils 33a and 34a are calculated. In step S18, the first and second horizontal driving coils 31a and 32a and the first and second vertical driving coils 33a and 34a are driven by the first and second PWM duties dx and dy via the driver circuit 29 to move the movable part. 30a is moved, and the 1 ms timer interrupt process is terminated. The operations in steps S17 and S18 are automatic control calculations used in PID automatic control that performs general proportional, integral, and differential calculations.

  In the present embodiment, the configuration in which the position detecting magnet and the driving magnet are shared in each of the first direction x and the second direction y has been described.

  Further, the position detecting hall element 44a is connected to the movable portion 30a, and position detecting magnets (first and second horizontal position detecting and driving magnets 401b and 402b, first and second vertical position detecting and driving). The configuration in which the magnets 411b and 412b) are disposed on the fixed portion 30b has been described. However, the configurations of the movable portion 30a and the fixed portion 30b are reversed, that is, the movable portion 30a is a position detection magnet, and the fixed portion 30b is a Hall element. The form which has a part may be sufficient.

  Further, any of the magnets as a device for generating a magnetic field may be a magnet that always generates a magnetic field or an electromagnet that generates a magnetic field as necessary.

  In addition, the imaging unit 39a including the imaging element 39a1 has been described as being arranged and moved on the movable unit 30a. However, the imaging unit 39a is fixed, and the same applies to the configuration in which the image blur correction lens is arranged and moved on the movable unit 30a. The effect is obtained.

  In the Hall element signal processing circuit 45, the average of the first and second horizontal potential differences x1 and x2 is calculated to obtain the first detection position signal px, and the average of the first and second vertical potential differences y1 and y2 is calculated. In the above description, the second detection position signal py is obtained and input to the A / D2 and A / D3 of the CPU 21. However, the calculation for obtaining the average value may be performed by the CPU 21. That is, the Hall element signal processing circuit 45 inputs the first and second horizontal potential differences x1 and x2, the first and second vertical potential differences y1 and y2 to the CPU 21, and performs the first and second detections in the calculation in the CPU 21. Values corresponding to the position signals px and py are obtained. The calculation for obtaining the average value may be performed before A / D conversion or after A / D conversion.

  Further, although the position detection by the Hall element unit 44a using the Hall element as the magnetic field change detection element has been described, another detection element may be used as the magnetic field change detection element. Specifically, an MI sensor (high frequency carrier type magnetic field sensor) capable of obtaining the position detection information of the movable part by detecting a change in the magnetic field, a magnetic resonance type magnetic field detection element, an MR element (magnetoresistance effect element) The same effect as that of the present embodiment using the Hall element can be obtained.

It is the perspective view seen from the back which shows the appearance of the imaging device in this embodiment. It is a front view of an imaging device. It is a circuit block diagram of an imaging device. It is a block diagram of an image blur correction part. FIG. 5 is a configuration diagram of the image blur correction unit of FIG. 4 as viewed from the second horizontal position detection and drive yoke side in the second direction. It is a block diagram of the cross section in the AA of FIG. It is a perspective view which shows the structure of the 1st horizontal direction driving coil, the 1st horizontal direction Hall element, and the 1st horizontal direction position detection and a driving magnet. It is a circuit block diagram of a Hall element part and a 1st Hall element signal processing circuit. It is a figure which shows the positional relationship of a 1st, 2nd horizontal direction position detection and a drive magnet, and a 1st, 2nd horizontal direction hall element when a movable part exists in the movement center position of a 2nd direction. The amount of movement of the movable part in the first direction and the value of the first and second horizontal potential differences output from the first and second horizontal hall elements when the movable part is at the movement center position in the second direction. It is a graph which shows a relationship. First and second horizontal position detection and drive magnets, first and second horizontal holes when the movable part is closer to the first horizontal position detection and drive magnet than the movement center position in the second direction It is a figure which shows the positional relationship of an element. The amount of movement of the movable part in the first direction and the output from the first and second horizontal hall elements when the movable part is closer to the first horizontal position detection and driving magnet than the movement center position in the second direction. It is a graph which shows the relationship of the value of the 1st, 2nd horizontal direction electric potential difference. First and second horizontal position detection and drive magnets, first and second horizontal holes when the movable portion is on the second horizontal position detection and drive magnet side of the movement center position in the second direction It is a figure which shows the positional relationship of an element. The amount of movement of the movable part in the first direction and the output from the first and second horizontal hall elements when the movable part is on the second horizontal position detection and driving magnet side from the movement center position in the second direction. It is a graph which shows the relationship of the value of the 1st, 2nd horizontal direction electric potential difference. It is a flowchart of an image blur correction process performed as an interrupt process at regular intervals. It is a circuit block diagram of a Hall element part and a 2nd Hall element signal processing circuit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imaging device 11 Pon button 12a Metering switch 13 Release button 13a Release switch 14 Image blur correction button 14a Image blur correction switch 17 LCD monitor 21 CPU
22 imaging block 23 AE unit 24 AF unit 25 angular velocity detection unit 26, 27 first and second angular velocity sensor 28 amplifier / high pass filter circuit 29 driver circuit 30 image blur correction unit 30a movable unit 30b fixed unit 31a, 32a first, first 2 Horizontal driving coils 33a, 34a First and second vertical driving coils 39a Imaging unit 39a1 Imaging element 39a2 Stage 39a3 Holding unit 39a4 Optical low-pass filter 401b, 402b First and second horizontal position detection and driving magnets 411b, 412b First and second vertical position detection and drive magnets 421b and 422b First and second horizontal position detection and drive yokes 431b and 432b First and second vertical position detection and drive yokes 44a Hole Element part 45 Hall element signal processing circuit 451, 452 First and second horizontal direction differential amplifier circuits 453 and 454 First and second horizontal direction subtraction circuits 455 Horizontal direction addition circuit 456 Horizontal direction inversion amplification circuit 457 and 458 First and second horizontal direction power supply circuits 49a Movable substrate 49a1 to 49a5 First to fifth substrates 50a Movement shafts 51a to 53a First to third horizontal movement bearing portions 54b to 57b First to fourth vertical movement bearing portions 64a Plate 65b Base plate 67 Shooting lens dx, dy 1st, 2nd PWM duty hh1, hh2 1st, 2nd horizontal hall element hv1, hv2 1st, 2nd vertical hall element LX Optical axis px, py 1st, 2nd detection position signal vx, vy First and second angular velocities

Claims (16)

A first direction orthogonal to the optical axis of the photographing lens and a first direction orthogonal to the optical axis and the first direction with respect to either the image sensor or the image blur correction lens, and either the image sensor or the image blur correction lens. A movable part that is movable in two directions and that performs an image blur correction operation by movement in the first and second directions;
A fixed portion that movably supports the movable portion in the first and second directions;
Either one of the movable part and the fixed part includes first and second horizontal magnetic field change detection elements used for detecting the position of the movable part in the first direction, which is performed to obtain a first detection position signal. First and second vertical magnetic field change detecting elements used for detecting the position of the movable part in the second direction performed to obtain a second detection position signal;
The other of the movable part and the fixed part is used for first and second horizontal position detection magnets used for detecting the position of the movable part in the first direction, and for detecting the position of the movable part in the second direction. The first and second vertical position detecting magnets used,
The first and second horizontal magnetic field change detecting elements are in a positional relationship facing the first and second horizontal position detecting magnets in the second direction, and the first and second vertical magnetic field change detecting elements are The first and second vertical position detecting magnets are in a positional relationship facing each other in the first direction,
The first detection position signal is obtained based on the average value of the outputs of the first and second horizontal magnetic field change detection elements, and based on the average value of the outputs of the first and second vertical magnetic field change detection elements. And obtaining the second detection position signal. The movable portion includes the first and second horizontal magnetic field change detection elements, and the first and second vertical magnetic field change detection elements,
2. The image blur correction device according to claim 1, wherein the fixing unit includes the first and second horizontal position detection magnets and the first and second vertical position detection magnets.   When the vicinity of the center of one of the image sensor and the image blur correction lens is in a positional relationship passing through the optical axis, a second of the first horizontal magnetic field change detection element and the first horizontal position detection magnet. The first and second horizontal directions so that the first distance in the direction is equal to the second distance in the second direction between the second horizontal magnetic field change detecting element and the second horizontal position detecting magnet. A position in the second direction of the magnetic field change detecting element is set, and a distance in the second direction between the first horizontal position detecting magnet and the vicinity of the center of one of the imaging element or the image blur correcting lens, and the first 2 The positional relationship between the movable part and the fixed part is set so that the distance in the second direction between the horizontal position detection magnet and the vicinity of the center of one of the image sensor and the image blur correction lens is equal. Claim 2 Image blur correction apparatus according.   When the vicinity of the center of one of the image sensor and the image blur correction lens is in a positional relationship passing through the optical axis, a first of the first vertical magnetic field change detection element and the first vertical position detection magnet. The first and second vertical directions so that the third distance in the direction is equal to the fourth distance in the first direction between the second vertical magnetic field change detecting element and the second vertical position detecting magnet. A position in the first direction of the magnetic field change detecting element is set, a distance in the first direction between the first vertical position detecting magnet and the vicinity of the center of one of the image sensor and the image blur correcting lens, and the first (2) The positional relationship between the movable portion and the fixed portion is set so that the distance in the first direction between the magnet for position detection in the vertical direction and the vicinity of the center of one of the image sensor and the image blur correction lens is equal. Claim 2 Image blur correction apparatus according. The movable portion includes first and second horizontal driving coils used for moving the movable portion in a first direction by electromagnetic force, and first and second used for moving in the second direction. 2 vertical driving coils,
The first and second horizontal driving coils are disposed at positions facing the first and second horizontal position detecting magnets, respectively, and the first and second vertical driving coils are respectively connected to the first and second horizontal driving coils. 1, arranged at a position facing the second vertical position detection magnet,
The first and second horizontal position detecting magnets are also used for generating the electromagnetic force, and the first and second vertical position detecting magnets are also used for generating the electromagnetic force. The image blur correction device according to claim 2, wherein the image blur correction device is an image blur correction device.   The coil patterns of the first and second horizontal driving coils and the first and second vertical driving coils are used for generating the electromagnetic force and have a line segment parallel to the third direction parallel to the optical axis. 6. The image blur correction device according to claim 5, further comprising:   The first and second horizontal magnetic field change detecting elements are respectively disposed in the windings of the first and second horizontal driving coils, and the first and second vertical magnetic field change detecting elements are respectively The image blur correction device according to claim 6, wherein the image blur correction device is disposed in a winding of the first and second vertical driving coils.   The first and second horizontal driving coils and the first and second vertical driving coils are sheet coils in which a spiral coil pattern is formed from the outer peripheral portion of the winding toward the center. The image blur correction apparatus according to claim 6, wherein the image blur correction apparatus is an image blur correction apparatus.   The first and second horizontal driving coils are multilayer sheet coils formed by superimposing the coil patterns in a second direction, and the first and second vertical driving coils are the coil patterns. The image blur correction device according to claim 8, wherein the image blur correction device is a multilayer sheet coil formed by being overlapped in the first direction. The fixed portion is in contact with the first horizontal position detection magnet and is formed of a polygonal magnetic material having a U-shape when viewed from the first direction, and the first horizontal position detection magnet, The first horizontal driving coil, the first horizontal position detecting yoke in a positional relationship sandwiching the first horizontal magnetic field change detecting element in the second direction, and the second horizontal position detecting magnet are in contact with each other. The second horizontal position detecting magnet, the second horizontal driving coil, and the second horizontal magnetic field are made of a polygonal magnetic material having a U-shape when viewed from the first direction. A second horizontal position detecting yoke in a positional relationship sandwiching the change detecting element in the second direction;
The first vertical direction position detecting magnet, the first vertical direction position detecting magnet is formed of a polygonal magnetic material having a U-shape when viewed from the second direction in contact with the first vertical direction position detecting magnet. A drive coil and a first vertical position detecting yoke in a positional relationship sandwiching the first vertical direction magnetic field change detecting element in the first direction and the second vertical position detecting magnet are in contact with each other from the second direction. The second vertical position detecting magnet, the second vertical driving coil, and the second vertical magnetic field change detecting element are formed of a polygonal magnetic material having a U-shape. 6. The image blur correction device according to claim 5, further comprising a second vertical position detecting yoke having a positional relationship sandwiched in one direction. First and second horizontal differential amplifier circuits for amplifying a signal difference between the output terminals of the first and second horizontal magnetic field change detecting elements;
First and second horizontal subtracting circuits for obtaining a first and second horizontal potential difference from a difference between a signal difference amplified by each of the first and second horizontal differential amplifier circuits and a reference voltage;
First and second vertical differential amplifier circuits for amplifying a signal difference between the output terminals of the first and second vertical magnetic field change detecting elements;
First and second vertical subtracting circuits for obtaining a first and second vertical potential difference from a difference between a signal difference and a reference voltage amplified by the first and second vertical differential amplifier circuits, respectively;
A horizontal addition circuit, a horizontal direction inversion amplification circuit, which obtains an average value of the first and second horizontal potential differences and multiplies the average value by a constant amplification factor to obtain the first detection position signal;
A magnetic field change detection element having a vertical direction addition circuit and a vertical direction inversion amplification circuit for obtaining an average value of the first and second vertical potential differences and multiplying the average value by a constant amplification factor to obtain the second detection position signal The image blur correction apparatus according to claim 1, further comprising a signal processing circuit.   The first and second horizontal position detecting magnets are arranged with N poles and S poles arranged in the first direction, and the first and second vertical position detecting magnets are N poles in the second direction. The image blur correction apparatus according to claim 1, wherein the first and second poles are arranged side by side.   The position of the first horizontal magnetic field change detecting element in the first direction is the first horizontal position when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis. The N-pole and S-pole of the magnet for detection are in the vicinity of the same distance, and the position of the second horizontal magnetic field change detecting element in the first direction is the vicinity of the center of either the image sensor or the image blur correction lens. 13. The image blur correction device according to claim 12, wherein the image blur correction device is located in the vicinity of an equal distance from each of the north and south poles of the second horizontal position detecting magnet when in a positional relationship passing through the optical axis.   The position of the first vertical magnetic field change detecting element in the second direction is the first vertical position when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis. The N pole and S pole of the magnet for detection are in the vicinity of the same distance, and the position of the second vertical magnetic field change detecting element in the second direction is the vicinity of the center of either the image sensor or the image blur correction lens. 13. The image blur correction device according to claim 12, wherein the image blur correction device is located in the vicinity of an equal distance from each of the north and south poles of the second vertical position detecting magnet when the positional relationship passes through the optical axis.   When the movable part moves, the movable part is positioned at the center of the moving range in both the first and second directions when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis. The image blur correction device according to claim 1, wherein: The detection elements of the first and second horizontal magnetic field change detection elements and the first and second vertical magnetic field change detection elements are Hall elements, MI sensors, magnetic resonance magnetic field detection elements, or MR elements, respectively. The image blur correction device according to claim 1.

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