JP2005338007A - Trace mechanism, and recording reproducing test device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a trace mechanism capable of tracing surely a traced object without running out from an orbit given preliminarily, and a recording reproducing test device capable of scanning surely a medium by a probe without running out from an orbit given preliminarily. <P>SOLUTION: This recording reproducing test device 1 has a driving stage 2 for attaching a sample 10, a stage position detector 4 for detecting a position of the sample 10 by detecting a position of the driving stage 2, a drive unit 6 for moving the driving stage 2 omnidirectionally, a controller 8 for drive-controlling the drive unit 6, based on positional information of the sample 10, the probe 20 arranged to contact with the sample 10, and a reflection face 30 for reflecting a laser beam from a laser device 32 arranged fixedly to the probe 20. The controller 8 controls the drive unit 6, based on an optional orbit given preliminarily, monitors a posture of the probe 20 with respect to the sample 10, and conducts feedback control not to make an opposed portion between the both run out from the orbit. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a trace mechanism such as a probe microscope or a spin stand that relatively traces a traced object and a tracer along a predetermined trajectory. The present invention relates to a recording / reproducing test apparatus that performs a recording or reproducing test by recording or reproducing the data.

  2. Description of the Related Art In general, a magnetic recording / reproducing apparatus called a hard disk drive (hereinafter simply referred to as an HDD) is incorporated in video and music recording / reproducing apparatuses such as personal computers and is widely used.

  In HDD development, a test device called a spin stand is used for final performance evaluation of a magnetic disk and a head. The spin stand rotates a test magnetic disk on a spindle, positions a test magnetic head on a predetermined track of the magnetic disk, and records test data on the test track of the magnetic disk via this magnetic head. By reproducing, the performance of the magnetic disk and head is evaluated.

  In this type of spin stand, the slider with the magnetic head mounted is levitated to a height of several nanometers from the surface of the magnetic disk by the air flow generated by the rotation of the magnetic disk, and the gap between the magnetic head and the magnetic disk. Is kept constant.

  Therefore, in this type of performance evaluation using a spin stand, an extremely flat and smooth magnetic disk for testing and a slider that realizes an extremely low flying posture must be prepared. Furthermore, since the density of magnetic disks is increasing more than improving the accuracy of the spindle, even a spinstand at the development stage records a positioning signal (hereinafter sometimes referred to as a marker) on the magnetic disk for testing. Had to be done. In other words, in order to use this type of spinstand, a magnetic disk and magnetic head capable of reproducing a stable positioning signal had to be prepared.

  For this reason, when the electromagnetic characteristics of a magnetic disk or a magnetic head are simply evaluated, the above-mentioned preparation becomes a burden, and a simple test apparatus that does not require this has been demanded.

  In response to this requirement, as an example of a test apparatus that does not use a magnetic disk, SYYamamoto et al. We report on a quasi-static recording / reproducing test machine that performs recording / reproducing tests using a magnetic head equipped with a slab. In this testing machine, the magnetic head and the magnetic medium are relatively moved at a sufficiently low relative speed of about 3 [mm / sec] to 30 [mm / sec] with the magnetic head and the magnetic medium in contact with each other. The electromagnetic characteristics of magnetic heads and magnetic media during recording and playback are being evaluated.

However, in such a quasi-static recording / reproducing test machine, since the magnetic head and the magnetic medium always make relative motion at a low speed while in contact with each other, the suspension mechanism supporting the magnetic head is deformed by the stress caused by the contact. When the scanning path is switched back, there is a problem that a traveling deviation of several tens of nanometers occurs in the width direction between the forward path and the backward path. Further, even during traveling in one direction, there is a problem that the contact portion between the magnetic head and the magnetic medium deviates from a predetermined trajectory, and a fluctuation of several nanometers occurs in the width direction. These are not significantly affected by the recording track width (200 to 500 nanometers) in the experiments reported in the above paper and the subsequent additional reports, but as the density of magnetic media further increases, Expected to be a serious problem.
IEEE Transaction on Magnetics (Vol133, no1, pp891,1997)

  SUMMARY OF THE INVENTION An object of the present invention is to provide a trace mechanism capable of reliably tracing an object to be traced with a tracer without deviating from a predetermined trajectory, and a recording / reproducing test apparatus capable of reliably scanning a medium with a probe without deviating from the predetermined trajectory. Is to provide.

  In order to achieve the above object, the tracing mechanism of the present invention moves the traced body and the tracer relative to each other along a predetermined trajectory in close proximity to each other, and moves the traced body along the trajectory. A tracing means for tracing; a monitoring means for monitoring a relative positional relationship between the traced body and the tracer between traces by the tracing means; and based on a monitoring result by the monitoring means, the traced body and the tracer. And correcting means for moving at least one as necessary to prevent the facing portion between the traced body and the tracer from deviating from the trajectory.

  Further, the tracing mechanism of the present invention moves the traced body to the trajectory by moving the traced body and the tracer at a relative speed having a predetermined characteristic along a predetermined trajectory in a state where the traced object and the tracer are closely opposed to each other. Tracing means for tracing along, monitoring means for monitoring the relative positional relationship between the traced body and the tracer between traces by the tracing means, and based on the monitoring result by the monitoring means, the traced body and At least one of the tracers is moved as necessary to prevent the opposing portion between the traced body and the tracer from deviating from the trajectory, and the relative speed between the traced body and the tracer satisfies the above characteristics. And a correction unit that suppresses fluctuation from the relative speed.

  According to the trace mechanism of the above invention, the relative positional relationship between the traced body and the tracer is monitored, and at least one of the traced body and the tracer is placed so that the opposing portion does not deviate from the predetermined trajectory. Since the movement is made as necessary, the traced object can be reliably traced by the tracer regardless of the state of the traced object and the tracer.

  Further, the recording / reproducing test apparatus of the present invention scans the medium along the trajectory by relatively moving the information recording / reproducing medium and the probe along a predetermined trajectory in close proximity to each other. Monitoring means, a recording / reproducing means for recording and reproducing information on the medium based on scanning by the scanning means, and a relative positional relationship between the medium and the probe during scanning by the scanning means. And a correcting unit that moves at least one of the medium and the probe as necessary based on a monitoring result by the monitoring unit, and suppresses a facing portion of the medium and the probe from being deviated from the orbit, It is characterized by having.

  Furthermore, the recording / reproducing test apparatus of the present invention moves the information recording and reproducing medium and the probe at a relative speed having a predetermined characteristic along a predetermined trajectory in a state where the probe is in close proximity to the medium. Scanning means along the trajectory, recording / reproducing means for recording and reproducing information on the medium based on scanning by the scanning means, and scanning of the medium and the probe during scanning by the scanning means. A monitoring unit that monitors the relative positional relationship, and at least one of the medium and the probe is moved as necessary based on the monitoring result by the monitoring unit, and the opposite part of the medium and the probe is out of the trajectory. And a correction means for suppressing fluctuation in the scanning speed between the medium and the probe from the relative speed having the above characteristics. It is characterized in.

  According to the recording / reproducing test apparatus of the above invention, the relative positional relationship between the medium and the probe is monitored, and at least one of the medium and the probe is required so that the facing portion does not deviate from the predetermined trajectory. Accordingly, the medium can be reliably scanned with the probe regardless of the state of the medium and the probe.

  Since the tracing mechanism of the present invention has the above-described configuration and operation, the traced object can be reliably traced by the tracer without deviating from the previously given trajectory.

  Further, since the recording / reproducing test apparatus of the present invention has the above-described configuration and operation, the medium can be reliably scanned with the probe without deviating from the predetermined trajectory.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 schematically shows a schematic structure of a recording / reproducing test apparatus 1 (hereinafter simply referred to as apparatus 1) as a trace mechanism according to an embodiment of the present invention. FIG. 2 is a block diagram of a control system that controls the operation of the apparatus 1. The apparatus 1 is a test for evaluating the characteristics of the sample 10 or the probe 20 by relatively moving a test sample 10 to be described later and a tester 20 to be described later along a predetermined trajectory. Device. Here, the case where the present invention is applied to a test apparatus will be described. However, the present invention can be applied to a recording / reproducing apparatus such as an HDD or a probe microscope which records or reproduces information by tracing a medium.

  The apparatus 1 has a drive stage 2 that holds a sample 10 (a traced object, a medium) so as to be precisely movable in all directions. The sample 10 is held by a sample holder (not shown), and is fixed to the drive stage 2 by attaching the sample holder to the drive stage 2. Here, the sample 10 will be described by taking a rectangular plate as an example, but it may have any shape as viewed three-dimensionally. In the following description, as the moving direction of the sample 10 by the drive stage 2, the left-right direction in FIG. 1 is the X direction, the up-down direction in FIG. 1 is the Y direction, and the paper surface direction is the Z direction.

  The driving stage 2 includes a stage position detector 4 (monitoring means) that detects the absolute position of the sample 10 by detecting the position of the driving stage 2, and a driving device 6 that precisely drives the driving stage 2 in all directions. (Trace means, scanning means) are connected. The controller 8 functioning as the correcting means of the present invention includes an arbitrary trajectory f (t) having time functions x0 (t), y0 (t) and z0 (t) in each direction component as a predetermined trajectory, and a stage. Based on the position information of the sample 10 detected via the position detector 4, the drive device 6 is feedback-controlled to move the sample 10 precisely in a desired direction.

  As a combination of the stage position detector 4 and the driving device 6, for example, a combination of a capacitive displacement meter and an actuator using a piezoelectric element can be considered. However, the combination of the detector 4 and the drive device 6 is not limited to this, and various combinations such as a combination of an interferometer, a photoelectric detector, and a motorized actuator supported by an air bearing can be employed.

  In addition, the apparatus 1 has an elongated leaf spring-like arm 22 (supporting means) that suspends and supports a probe 20 (tracer or probe) that scans (traces) the surface of the sample 10 in a cantilever state, and any arm 22. It has a suspension device 24 (adjustment means) with 6 degrees of freedom that can be held in a posture. The measuring element 20 is fixed to the distal end of the arm 22, and the base end of the arm 22 is fixed by a suspension device 24.

  The suspension device 24 positions and arranges the arm 22, that is, the measuring element 20 with high accuracy so that the measuring element 20 at the tip of the arm 22 faces the sample 10 on the driving stage 2 on the above-described track in an arbitrary posture. . Further, the suspension device 24 feedback-controls the position of the arm 22 so that the attitude of the measuring element 20 becomes a desired attitude in accordance with the state of the measuring element 20 monitored by the monitoring means described later.

  The claims and the “proximity facing” herein include the state where the sample 10 and the probe 20 are in contact with each other. In particular, the apparatus 1 described here relatively moves both the probe 20 in contact with the surface (opposing surface) of the sample 10. For example, the contact force obtained from the spring constant of the arm 22 and the amount of deformation of the arm tip can be controlled to an arbitrary value. It is also possible to install a sensor such as a strain gauge for detecting the load on the arm 22 to detect the contact force and control it to an arbitrary value.

  Further, in the present embodiment, the suspension device 24 fixes and positions the measuring element 20 at a predetermined position. However, the position of the measuring element 20 is detected by a monitoring unit to be described later, and the measuring element 20 is placed at an arbitrary position. Or the measuring element 20 may be moved based on information acquired via the measuring element 20.

  In this example, a magnetic head that writes and reads magnetic recording information to and from a magnetic recording medium is assumed as the probe 20. However, the probe 20 is a probe that measures physical information of the sample 10. It may be an element that physically influences from the outside, or may include both. Further, here, the probe 20 is directly attached to the tip of the arm 22. However, when a magnetic head is assumed, the probe 20 is formed on the head slider, and the slider is attached to the tip of the arm 22. Become.

  Furthermore, the apparatus 1 includes a reflecting surface 30 fixed to the measuring element 20 and a laser device 32 as monitoring means for monitoring the relative positional relationship of the measuring element 20 with respect to the sample 10. The reflecting surface 30 may be directly fixed to the measuring element 20 as in the present embodiment, but may be individually provided in a fixing means (not shown) such as a slider in which the measuring element 20 is fixed. The child 20 may be individually provided on the arm 22 attached to the tip. Assuming that the probe 20 is a magnetic head, the reflecting surface 30 may be fixed to a slider or suspension arm that forms the magnetic head, or a parallel link suspension that holds the head.

3 shows a parallel link suspension 100 (hereinafter simply referred to as suspension 100).
) Is schematically shown. The suspension 100 has a connecting portion 106 (fixing means) that holds the head 102 (tracer, probe) in close proximity to the facing surface 105 of the medium 104, and a tip that can freely rotate at two positions spaced apart from each other. The first arm 112 and the second arm 114 attached to the first arm 112, and the fixing portion 116 to which the base ends of the first and second arms 112 and 114 are rotatably attached. In the present embodiment, the first and second arms 112 and 114 are formed in parallel with each other and have the same length, and have a parallelogram shape together with the connecting portion 106 and the fixing portion 116. Note that both ends of the first and second arms 112 and 114 are connected to the connecting portion 106 and the fixing portion 116 via elastic hinges 120 that allow the end portions to be elastically rotated.

  In the suspension 100, the first and second arms 112 and 114 are swung up and down around the base end, thereby moving the connecting portion 106 up and down while maintaining the posture as shown in FIG. It has a feature that it can suppress posture fluctuation. For this reason, the posture of the head 102 can be reliably detected by attaching the reflecting surface 30 to the connecting portion 106 to which the head 102 is fixed and monitoring the laser light reflected by the reflecting surface 30.

  Incidentally, the laser device 32 includes a light source (not shown) that irradiates laser light toward the reflecting surface 30 and a light receiving unit (not shown) that receives the laser light reflected through the reflecting surface 30. Then, the laser device 32 gives Y1 (t) having time functions x1 (t), y1 (t) and z1 (t) in each direction component to the controller 8 as a displacement signal (displacement detection result) of the probe 20. Output.

  The controller 8 has Y2 (t) having time functions x2 (t), y2 (t) and z2 (t) in each direction component output as a displacement signal (displacement detection result) of the sample 10 from the stage position detector 4. And based on Y1 (t) described above, the driving device 6 is controlled to set the relative position between the probe 20 and the sample 10 to a desired trajectory.

  Further, the display unit 40 displays information on the trajectory f (t) between the probe 20 and the sample 10 corrected by the controller 8 and output information from the probe 20 as measurement results.

Next, the operation of the device 1 described above will be described with reference to the block diagram shown in FIG.
First, the above-mentioned arbitrary trajectory f (t) is given to the controller 8 as a scanning signal, the driving device 6 is controlled, and the sample 10 is moved by the driving stage 2. Since the measuring element 20 is fixedly arranged, the sample 10 is moved to relatively move (scan, trace). Then, the controller 8 acquires the displacement signal Y1 (t) of the probe 20 (plant P) via the laser device 32 during scanning, and the sample 10 (plant P) via the stage position detector 4. The displacement signal Y2 (t) is acquired as a displacement signal for sample scanning.

  Further, the controller 8 determines the relative positional relationship between the sample 10 and the probe 20 based on the two acquired displacement signals Y1 (t) and Y2 (t), and outputs the scanning signal f (t). provide feedback. Thereby, the scanning trajectory of the probe 20 with respect to the sample 10 can be feedback-controlled to a predetermined trajectory f (t).

  Here, with reference to FIG. 6 and FIG. 7, the attachment angle of the reflective surface 30 mentioned above is considered. Here, a case where a magnetic head (not shown here) is assumed as the probe 20 and the reflecting surface 30 is provided on the side surface of the slider 50 on which the magnetic head is mounted will be described.

  As a measuring means of the magnetic head (measuring element 20), in order to reduce Abbe's error at the time of measurement, the measuring axis of the magnetic head that is the object to be measured needs to be on the operation axis to be measured. It is. The operation axis in the apparatus 1 is a facing surface between the magnetic head and the medium (sample 10). Therefore, the reflecting surface 30 is desirably the side surface of the slider 50 that is substantially perpendicular to the facing surface.

  In recent magnetic heads, the thickness of the slider 50 is generally 0.5 [mm] or less, and a slider having a thickness of about 0.23 has also been proposed. Therefore, the distance from the magnetic head to the object to be measured (working distance) at an angle θ called declination, aperture angle (or alignment angle) is used as an optical means for non-contact measurement. ). That is, as shown in FIG. 6A, measurement becomes impossible when the blind spot of this light beam is reached. For example, when the working distance is 10 [mm] and θ is 1 degree, it becomes 0.17 [mm], and the measurement becomes difficult in view of the head thickness.

  Therefore, in the present invention, as shown in FIG. 6B, the side surface of the head is attached to an angle θ ′ that is equal to or larger than the aperture angle θ, and the measured value is corrected as a product of cos θ ′ obtained by the angle θ ′. Added feedback.

  As described above, according to the present embodiment, since the means for detecting the absolute position of the probe 20 is an optical type, any probe assembly that can mount the reflecting plate 30 can be applied.

  Further, according to the present embodiment, the controller 8 monitors the absolute position of the sample 10 via the stage position detector 4, and uses the reflector 30 and the laser device 32 for the absolute position of the probe 20. Therefore, even when the stress caused by the contact between the sample 10 and the measuring element 20 acts and the postures of both become unstable, that is, the state of the sample 10 and the measuring element 20 is maintained. Regardless, the relative positional relationship between the two can be detected with high accuracy.

  Thereby, the sample 10 and the probe 20 can be made to follow with high precision, and the fluctuation | variation of relative position of both can be suppressed. For example, according to the present embodiment, it can be controlled so that the facing portion between the sample 10 and the probe 20 does not deviate from a predetermined trajectory, and is moved at a relative speed having a predetermined characteristic. The relative speed fluctuation having the above characteristics can be suppressed with respect to the sample 10 and the probe 20 that are present.

  Further, according to the present embodiment, since the relative position between the sample 10 and the probe 20 can be controlled so as not to change, a marker (positioning for correcting the relative position on the sample 10 as in the conventional spin stand is used. (Information, servo signal) is not necessary.

  In addition, according to the present embodiment, the sample 10 and the probe 20 move relative to each other in a quasi-static (ultra-low speed) of 20 [mm / sec] or less, which is necessary for high-speed relative movement such as air lubrication. Preparation is not necessary, and the basic characteristics of the sample 10 and the probe 20 can be evaluated by eliminating the influence of the performance of these elements. Note that the relative motion speed referred to here is due to the limit of the piezoelectric element at the time of filing of the present invention, and may exceed 20 [mm / sec] in the future.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, you may delete some components from all the components shown by embodiment mentioned above. Furthermore, constituent elements over different embodiments may be appropriately combined.

  For example, the reflecting plate 30 may be attached to a gimbal as a buffer spring member for attaching a slider mounted with a magnetic head to the suspension arm, or the gimbal may be partially bent at the above-described angle to function as the reflecting plate 30.

  Further, a plurality of reflectors 30 fixedly disposed on the probe 20 may be provided, and a plurality of corresponding laser devices 32 may be provided to detect the position of the probe 20 from a plurality of different directions. For example, in FIG. 1, the tilt in the roll direction is detected by providing a measurement means for the upper and lower two axes of the magnetic head in the X direction, and the skew direction is provided by providing a measurement means for the left and right two axes of the head in the X and Y directions. The inclination in the pitch direction may be detected by detecting the inclination and providing a measurement means for the upper and lower two axes of the head in the Y direction.

  Furthermore, the present invention can be used for a recording / reproduction test between a magnetic head and a magnetic medium such as a magnetic disk. Further, the present invention can be used as a means for measuring with an electronic substrate and a measurement probe for countermeasures against electromagnetic wave compatibility (EMC) and electromagnetic interference (EMI). The present invention can also be applied to a probe microscope system such as an atomic force microscope (AFM) or a magnetic force microscope (MFM).

1 is a schematic diagram showing a schematic structure of a recording / reproducing test apparatus according to an embodiment of the present invention. The block diagram of the control system which controls operation | movement of the apparatus of FIG. The schematic diagram for demonstrating the structure of a parallel link suspension. The figure for demonstrating the operation | movement of the suspension of FIG. The block diagram for demonstrating operation | movement of the apparatus of FIG. The figure for demonstrating the attachment angle of a reflective surface. The figure for demonstrating the attachment angle of a reflective surface.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Recording / reproducing test apparatus, 2 ... Drive stage, 4 ... Stage position detector, 6 ... Drive apparatus, 8 ... Controller, 10 ... Sample, 20 ... Measuring element, 22 ... Arm, 24 ... Suspension device, 30 ... Reflecting surface , 32 ... Laser device, 40 ... Display unit, 50 ... Slider, 100 ... Parallel link suspension, 102 ... Head, 104 ... Medium, 105 ... Opposing surface, 106 ... Connecting part, 112 ... First arm, 114 ... Second arm , 116 ... fixing part, 120 ... elastic hinge.

Claims (16)

Tracing means for relatively moving the traced body and the tracer along a trajectory previously given in a state of facing the tracer, and tracing the traced body along the trajectory,
Monitoring means for monitoring the relative positional relationship between the traced body and the tracer during tracing by the tracing means;
Based on the monitoring result by the monitoring means, at least one of the traced body and the tracer is moved as necessary, and the correction means for suppressing the facing portion between the traced body and the tracer from deviating from the trajectory. When,
A trace mechanism characterized by comprising: Trace means for moving the traced body along the trajectory by moving the traced body and the tracer at a relative speed having a predetermined characteristic along a predetermined trajectory in a state where the traced object and the tracer are close to each other.
Monitoring means for monitoring the relative positional relationship between the traced body and the tracer during tracing by the tracing means;
Based on the monitoring result by the monitoring means, at least one of the traced body and the tracer is moved as necessary, and it is possible to prevent the facing portion between the traced body and the tracer from coming off the trajectory. Correction means for suppressing the relative speed of the traced body and the tracer from fluctuating from the relative speed having the characteristics;
A trace mechanism characterized by comprising:   The monitoring means includes a reflecting surface fixed to the tracer, a light source that irradiates the reflecting surface with laser light, and a light receiving unit that receives the laser light reflected through the reflecting surface. The reflection surface is attached so as to be inclined in a direction away from the light source from a surface perpendicular to a facing surface of the traced body facing the tracer. 2. The tracing mechanism according to 2.   The trace mechanism according to claim 3, wherein a plurality of the monitoring means are provided so as to monitor the relative positional relationship between the traced body and the tracer from different directions.   The trace mechanism according to claim 3 or 4, further comprising fixing means for fixing the tracer, wherein the reflecting surface is fixed to the fixing means.   The fixing means is rotatably attached to the distal ends of the elongated first arm and the second arm which are spaced apart from each other and extend substantially in parallel at two different positions and whose base ends are rotatably held. The trace mechanism according to claim 5.   The trace mechanism according to claim 3 or 4, further comprising an elongated support means in which the tracer is fixed at a tip thereof, wherein the reflection surface is fixed to the support means.   The tracing mechanism according to claim 1, further comprising an adjusting unit that adjusts a posture of the tracer facing the traced body. Scanning means for scanning the medium along the trajectory by relatively moving along a predetermined trajectory in a state where the medium for recording and reproducing information and the probe are in close proximity to each other;
Recording / reproducing means for recording and reproducing information on the medium based on scanning by the scanning means;
Monitoring means for monitoring the relative positional relationship between the medium and the probe during scanning by the scanning means;
Based on the monitoring result by the monitoring means, at least one of the medium and the probe is moved as necessary, and a correction means for suppressing the facing portion of the medium and the probe from moving out of the orbit,
A recording / reproducing test apparatus comprising: Scanning means for scanning the medium along the trajectory by moving the medium for recording and reproducing information and the probe at a relative speed having a predetermined characteristic along a predetermined trajectory in a state where the probe is in close proximity to the probe; ,
Recording / reproducing means for recording and reproducing information on the medium based on scanning by the scanning means;
Monitoring means for monitoring the relative positional relationship between the medium and the probe during scanning by the scanning means;
Based on the monitoring result by the monitoring means, at least one of the medium and the probe is moved as necessary to prevent the opposed portion of the medium and the probe from moving out of the trajectory, and between the medium and the probe. Correction means for suppressing the fluctuation of the scanning speed from the relative speed having the above characteristics;
A recording / reproducing test apparatus comprising:   The monitoring means includes a reflecting surface fixed to the probe, a light source that irradiates the reflecting surface with laser light, and a light receiving unit that receives the laser light reflected through the reflecting surface. The reflection surface is attached by being inclined in a direction away from the light source from a surface perpendicular to a facing surface of the medium facing the probe. The recording / reproducing test apparatus described.   12. The recording / reproducing test apparatus according to claim 11, wherein a plurality of the monitoring means are provided so as to monitor the relative positional relationship between the medium and the probe from different directions.   13. The recording / reproducing test apparatus according to claim 11, further comprising fixing means for fixing the probe, wherein the reflecting surface is fixed to the fixing means.   The fixing means is rotatably attached to the distal ends of the elongated first arm and the second arm which are spaced apart from each other and extend substantially in parallel at two different positions and whose base ends are rotatably held. The recording / reproducing test apparatus according to claim 13.   The recording / reproducing test apparatus according to claim 11, further comprising an elongated support unit in which the probe is fixed to a tip, and the reflection surface is fixed to the support unit.   11. The recording / reproducing test apparatus according to claim 9, further comprising adjusting means for adjusting a posture of the probe facing the medium.

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