JP2005337071A5 - - Google Patents

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Publication number
JP2005337071A5
JP2005337071A5 JP2004155060A JP2004155060A JP2005337071A5 JP 2005337071 A5 JP2005337071 A5 JP 2005337071A5 JP 2004155060 A JP2004155060 A JP 2004155060A JP 2004155060 A JP2004155060 A JP 2004155060A JP 2005337071 A5 JP2005337071 A5 JP 2005337071A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004155060A
Other languages
Japanese (ja)
Other versions
JP2005337071A (en
JP4671624B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2004155060A priority Critical patent/JP4671624B2/en
Priority claimed from JP2004155060A external-priority patent/JP4671624B2/en
Priority to PCT/JP2005/009148 priority patent/WO2005116448A1/en
Publication of JP2005337071A publication Critical patent/JP2005337071A/en
Publication of JP2005337071A5 publication Critical patent/JP2005337071A5/ja
Application granted granted Critical
Publication of JP4671624B2 publication Critical patent/JP4671624B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004155060A 2004-05-25 2004-05-25 Vacuum pump Expired - Lifetime JP4671624B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004155060A JP4671624B2 (en) 2004-05-25 2004-05-25 Vacuum pump
PCT/JP2005/009148 WO2005116448A1 (en) 2004-05-25 2005-05-19 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004155060A JP4671624B2 (en) 2004-05-25 2004-05-25 Vacuum pump

Publications (3)

Publication Number Publication Date
JP2005337071A JP2005337071A (en) 2005-12-08
JP2005337071A5 true JP2005337071A5 (en) 2007-06-28
JP4671624B2 JP4671624B2 (en) 2011-04-20

Family

ID=35450953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004155060A Expired - Lifetime JP4671624B2 (en) 2004-05-25 2004-05-25 Vacuum pump

Country Status (2)

Country Link
JP (1) JP4671624B2 (en)
WO (1) WO2005116448A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2472119B1 (en) * 2009-08-26 2016-10-12 Shimadzu Corporation Turbo-molecular pump and method of manufacturing rotor
JP5796948B2 (en) * 2010-11-09 2015-10-21 エドワーズ株式会社 Vacuum pump
JP6069981B2 (en) * 2012-09-10 2017-02-01 株式会社島津製作所 Turbo molecular pump
US9879684B2 (en) 2012-09-13 2018-01-30 Kla-Tencor Corporation Apparatus and method for shielding a controlled pressure environment
JP6942610B2 (en) * 2017-07-14 2021-09-29 エドワーズ株式会社 A method for diagnosing a vacuum pump, a temperature control control device applied to the vacuum pump, an inspection jig, and a temperature control function unit.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732956Y2 (en) * 1987-08-13 1995-07-31 セイコー精機株式会社 Turbo molecular pump
JPH0334699A (en) * 1989-06-30 1991-02-14 Nec Corp Low-frequency underwater ultrasonic transmitter-receiver
JPH11247790A (en) * 1998-03-04 1999-09-14 Shimadzu Corp Vacuum pump
JP2000161286A (en) * 1998-11-25 2000-06-13 Shimadzu Corp Turbo-molecular pump
JP2001193686A (en) * 2000-01-14 2001-07-17 Shimadzu Corp Vacuum pump
JP4657463B2 (en) * 2001-02-01 2011-03-23 エドワーズ株式会社 Vacuum pump

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