JP2005329140A - Electron beam irradiator and method for using ozone - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam irradiator that limits an area where ozone is generated by electron beam irradiation and makes useful effects of ozone generated. <P>SOLUTION: The electron beam irradiator 1 disinfects or sterilizes an object X to be irradiated by irradiating the object X to be irradiated with electron beams B and is equipped with an air curtain forming means 13 to form an air curtain c around the irradiation section 10 of the electron beams B, a suction opening 16 arranged below the irradiation section 10 and to suck air ag containing ozone g surrounded by the air curtain c, and a circulation pipe 19 branched from an exhaust pipe 17 connected to the suction opening 16 and supplying some ag2 of the air ag containing the ozone g sucked to the air curtain forming means 13 for circulation. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electron beam irradiation apparatus that irradiates an irradiation object with an electron beam to sterilize and sterilize the irradiation object, and a method of using ozone generated with the irradiation of the electron beam.

  As an electron beam irradiation apparatus, as shown in FIG. 6 and FIG. 7, there is an electron beam irradiation apparatus 61 having a great feature that it can be introduced into a factory line as an inline type. In this apparatus 61, the irradiation object X is sequentially conveyed by the belt conveyor 63 below the apparatus main body 62, and the irradiation object X is irradiated in an electron beam irradiation section (irradiation area) 64 between the apparatus main body 62 and the belt conveyor 63. The irradiation object X is continuously sterilized and sterilized by irradiating the electron beam B generated by the apparatus main body 62 from above.

  In the apparatus 61, when the electron beam B is irradiated, the electron beam B reacts with oxygen molecules in the air near the irradiation unit 64, and ozone g is generated. Ozone is harmful and corrodes materials such as Cu, Fe, and resin. For this reason, various methods are conventionally used for the treatment of ozone generated from the electron beam irradiation apparatus.

  For example, there is a method in which an inert gas (such as nitrogen) is introduced in the vicinity of an irradiation part, which is a source of ozone, and the reaction between the electron beam and oxygen molecules is reduced to lower the concentration of exhaust ozone and exhaust it to the outside. is there.

  In the device 61, air ag containing ozone g from the irradiation unit 64 is sucked by the blower 67 through the exhaust pipe 66 from the suction port 65 provided below the device main body 62, and ozone is passed through the catalyst (ozone killer) 68. By reducing g, the exhaust ozone concentration is lowered and exhausted from the exhaust port 69.

  By the way, in the apparatus 61, in order to shield the electron beam B, the lower part of the apparatus main body 62 and its periphery are covered with a shield 70 formed of SUS or the like. The shield 70 is provided with a carry-in port 71 and a carry-out port 72 which are frontage for carrying the irradiation object X into and out of the irradiation unit 64. The irradiation object X is transported by the belt conveyor 63 from the previous process to the sterilization / sterilization process and the subsequent process through the transport inlet 71 and the transport outlet 72.

  However, there is a problem that ozone g generated simultaneously with the irradiation of the electron beam B diffuses from the carry-in entrance 71 and the carry-out exit 72 to the space outside the shield 70, and there is a concern about corrosion of components having low ozone corrosion resistance. The

  Therefore, in the device 61, the irradiation unit 64 is covered with a cover 73 formed of SUS or the like having high ozone corrosion resistance, and the irradiation unit 64 is brought to a negative pressure, thereby drawing the ambient air a into the irradiation unit 64. , Ozone g was sucked to the catalyst 68 side.

  The prior art document information related to the invention of this application includes the following.

JP 2002-171949 A

  However, when the sterilization / sterilization of the irradiation object X is continuously performed as in the device 61, the cover 73 and the shield 70 are usually provided with a frontage, so that the irradiation unit 64 can be kept airtight. There is a problem that ozone g diffuses into the space outside the cover 73 and the shield 70.

  Further, in the method of introducing the inert gas into the irradiation unit 64, it is necessary to secure an inert gas storage tank and an inert gas introduction line.

  Furthermore, since the apparatus 61 irradiates the electron beam B from above the irradiation object X, depending on the shape of the measurement object X, spatial non-uniformity occurs in the effect of sterilization and sterilization by the electron beam B. .

  As described above, various treatment methods such as introduction of an inert gas or exhaust through a catalyst have been used for the treatment of ozone generated from an electron beam irradiation apparatus. No device or method has been devised that utilizes the beneficial effects of ozone, which has the ability to sterilize and have deodorizing power, bleaching power, and freshness retention.

  Therefore, an object of the present invention is to provide an electron beam irradiation apparatus and a method for using ozone that can limit the ozone generation region by electron beam irradiation and can use the beneficial effect of the generated ozone.

  The present invention was devised to achieve the above object, and the invention of claim 1 is an electron beam irradiation apparatus for sterilizing and sterilizing an irradiation object by irradiating the irradiation object with an electron beam. An air curtain forming means for forming an air curtain around the irradiating portion, a suction port that is disposed below the irradiating portion and sucks air containing ozone surrounded by the air curtain, and is connected to the suction port. An electron beam irradiating apparatus including a circulation pipe that circulates by supplying a part of the air containing ozone that is branched and sucked from the exhaust pipe to the air curtain forming means.

  According to a second aspect of the present invention, the air curtain forming means includes an annular flow path provided so as to surround a scan horn that emits an electron beam, and a plurality of injection holes provided at a lower portion of the annular flow path. It is an electron beam irradiation apparatus of Claim 1 comprised by these.

  According to a third aspect of the present invention, an exhaust blower is connected to an upstream side of the exhaust pipe from which the circulation pipe is branched, and air containing ozone flowing through the exhaust pipe is connected to a connection portion between the exhaust pipe and the circulation pipe. The electron beam irradiation apparatus according to claim 1 or 2, wherein a diversion ratio adjusting means for adjusting a diversion ratio between the flow rate of the gas and the flow rate of air containing ozone flowing through the circulation pipe is connected.

  According to a fourth aspect of the present invention, the ozone concentration adjusting means is connected to the upstream side of the exhaust blower, and the ozone concentration supplied and circulated from the circulation pipe to the air curtain forming means is adjusted. It is an electron beam irradiation apparatus.

  According to a fifth aspect of the present invention, there is provided the electronic according to any one of the first to fourth aspects, wherein a compressor is connected to the circulation pipe, and the flow velocity of air containing ozone injected from the injection hole of the air curtain forming means is adjusted. It is a line irradiation device.

  According to a sixth aspect of the present invention, an ozone sensor is disposed in the irradiation section, and the flow rate of air introduced into the circulation pipe is adjusted according to the concentration of ozone detected by the ozone sensor. The electron beam irradiation apparatus according to claim 1.

  According to a seventh aspect of the present invention, in the electronic device according to any one of the first to sixth aspects, the suction port is disposed below a conveyor on which the irradiation object is conveyed, and is formed to have substantially the same opening size as the air curtain. It is a line irradiation device.

  In the invention of claim 8, when an irradiation object is irradiated with an electron beam to sterilize and sterilize the irradiation object, an air curtain is formed around the irradiation part of the electron beam, and ozone surrounded by the air curtain is formed. This is a method of using ozone in an electron beam irradiation apparatus that sucks in air and circulates a part of the air containing the sucked ozone as the air curtain.

  According to the present invention, the following excellent effects are exhibited.

  (1) It is possible to limit the generation region of ozone generated in the vicinity of the irradiated portion by electron beam irradiation.

  (2) The sterilization / sterilization effect can be improved and uniformized, and the generated ozone can be used effectively.

  Conventionally, ozone generated from an electron beam irradiation apparatus is harmful and has been treated as unnecessary from the viewpoint of corrosion to materials having no ozone corrosion resistance such as Cu, Fe, and resin. On the other hand, ozone has sterilizing power several hundred times more than that of chlorinated fungicides, and has various beneficial effects such as deodorizing power, bleaching power, freshness retention due to secondary effects, and agricultural chemical decomposition effects.

  Thus, as a result of earnest research on whether or not there is a method for effectively using ozone in the electron beam irradiation apparatus, the present inventor has created the present invention.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings.

  FIG. 1 is a front view of an electron beam irradiation apparatus showing a preferred embodiment of the present invention, and FIG. 2 is a side view thereof.

  As shown in FIG. 1 and FIG. 2, an electron beam irradiation apparatus 1 according to the present embodiment includes an apparatus main body 2 that irradiates an irradiation object X below with an electron beam B, and an irradiation object below the apparatus main body 2. It is mainly comprised by the conveying apparatus 3 which conveys X sequentially, and the piping system 4. FIG.

  The apparatus body 2 is provided with a cathode and an anode, and an uppermost electron gun 5 for generating electrons, an acceleration tube 6 for accelerating the electrons generated by the electron gun 5 downward, and an electron beam from the acceleration tube 6 A scanning electromagnet 7 that scans in a horizontal plane and a scan horn 8 formed of SUS for emitting an electron beam scanned by the electromagnet 7 downward are provided. At the bottom of the scan horn 8, an extraction window 9 made of Ti for extracting the electron beam B downward is provided.

  In order to pass the irradiation object X through the irradiation unit (irradiation area) 10 of the electron beam B below the scan horn 8, the transport device 3 moves the irradiation object X from upstream to downstream (in FIG. 1, the back side of the paper surface). From the front to the near side (in the direction of arrow A in FIG. 2). In the present embodiment, a belt conveyor in which a mesh belt 12 is wound around a roller 11 is used as the conveying device 3. A roller conveyor may be used as the transport device 3.

  The irradiation unit 10 is a space defined between the lower surface of the scan horn 8 and the upper surface of the mesh belt 12. In the apparatus 1, the irradiation unit 10 irradiates the electron beam B generated in the apparatus main body 2 from above the irradiation object X. At the time of irradiation with the electron beam B, the electron beam B reacts with oxygen molecules in the air existing in the vicinity of the irradiation unit 10 to generate ozone g.

  In the lower part of the scan horn 8, air curtain forming means 13 for forming a cylindrical air curtain c around the irradiation unit 10 is provided. The air curtain forming means 13 includes an annular flow path 14 provided so as to surround the periphery of the lower portion of the scan horn 8, and a plurality of downward injection holes (discharge ports) 15 provided at the lower portion of the annular flow path 14. Consists of.

  The piping system 4 includes a suction port 16 disposed below the conveying device 3 below the irradiation unit 10, an exhaust pipe 17 having one end connected to the suction port 16, and a connecting portion (branching) from the exhaust pipe 17. Part) 18 and is mainly composed of a circulation pipe 19 branched and connected. The other branched end of the exhaust pipe 17 is connected to the exhaust port 20.

  The suction port 16 sucks air (ozone mixed air) ag containing ozone g surrounded by the air curtain c and sucks the air curtain c. The suction port 16 is formed in a cylindrical shape having the same diameter (opening dimension) as that of the cylindrical air curtain c or a slightly larger diameter. The circulation pipe 19 supplies a part of the sucked ozone mixed air ag (ozone mixed air ag2 described later) to the air curtain forming means 9 for circulation.

  An exhaust blower 21 is connected to the exhaust pipe 17 upstream of the connection portion 18 between the exhaust pipe 17 and the circulation pipe 19. A first stage catalyst 22 as an ozone concentration adjusting means is connected to the exhaust pipe 17 on the upstream side of the exhaust blower 21. The catalyst 22 adjusts the ozone concentration supplied to the air curtain forming means 13 from the circulation pipe 19 and circulated.

  The connecting portion 18 adjusts a flow division ratio (flow rate ratio) between the flow rate of the ozone mixed air agl flowing through the exhaust pipe 17 downstream of the connecting portion 18 and the flow rate of the ozone mixed air ag2 flowing through the circulation pipe 19. A three-way valve 23 is connected as a diversion ratio adjusting means.

  A second stage catalyst (ozone killer) 24 is connected to the exhaust pipe 17 on the downstream side of the connecting portion 18. The catalyst 24 decomposes the ozone concentration of the ozone mixed air agl to a concentration that can be released into the atmosphere.

  A compressor 25 is connected to the circulation pipe 19. A flow rate adjusting valve 26 is connected to the circulation pipe 19 on the downstream side of the compressor 25. The flow rate of the ozone mixed air ag2 injected from each injection hole 15 of the air curtain forming means 13 is adjusted by the compressor 25 and the flow rate adjusting valve 26.

  An ozone sensor 27 for detecting the ozone concentration of the irradiation unit 10 is disposed on the lower surface of the scan horn 8 in the irradiation unit 10. By means of this ozone sensor 27, for example, an circulation line 19 between the three-way valve 23 and the compressor 25 is connected to an air a introduction line 28, and an opening / closing valve 29 for opening and closing the introduction line 28 is provided. The flow rate of the air a introduced into 19 is adjusted.

  In the apparatus 1, in order to shield the electron beam B, the part below the scan horn 8 of the apparatus main body 2, the transport device 3 around the apparatus main body 2, and the suction port 16 are covered with a shield 30 formed of SUS or the like. ing. The shield 30 is provided with a carry-in port 31 and a carry-out port 32 which are frontage for carrying the irradiation object X into and out of the irradiation unit 10.

  The operation of the present embodiment will be described.

  First, before the apparatus 1 is operated, the irradiation energy of the electron beam B (in consideration of the size of the carry-in port 31 and the carry-out port 32 and the size of the irradiation unit 10 according to the irradiation object X to be sterilized and sterilized) When 1 to 10 MeV) is determined, the concentration of ozone g generated in the irradiation unit 10 per unit time is obtained. Based on the concentration of ozone g, the processing capacity of the catalyst 22 and the catalyst 24, the air volume of the exhaust blower 21 and the discharge pressure of the compressor 25 are appropriately selected, and the sucked ozone mixed air ag is adjusted to a certain condition (concentration / flow rate). To do.

  When the apparatus 1 is operated, the irradiation object X is sequentially carried into the shield 30 from the carry-in entrance 31 by the transport apparatus 3 and irradiated with the electron beam B generated by the apparatus main body 2 while passing through the irradiation unit 10. Thus, sterilization and sterilization processing is continuously performed, and the transport device 3 sequentially carries out the shield 30 from the carry-out port 32.

  When the electron beam B is irradiated, ozone g is generated in the irradiation unit 10. Air (ozone mixed air) ag containing ozone g is sucked by the exhaust blower 21 from the suction port 16 and flows through the exhaust pipe 17. The ozone concentration of the sucked ozone mixed air ag is adjusted by the catalyst 22. The air volume of the exhaust blower 21 is controlled by an inverter, for example.

  Furthermore, by adjusting the three-way valve 23 for each irradiation object X, the flow rate of the ozone mixed air ag1 flowing through the exhaust pipe 17 downstream of the connecting portion 18 and the ozone mixed air ag2 flowing through the circulation pipe 19 are adjusted. The diversion ratio (flow rate ratio) to the flow rate is adjusted, and the ozone concentration of the ozone mixed air ag2 that is supplied from the circulation pipe 19 to the air curtain forming means 13 and circulated is adjusted.

  The ozone mixed air ag1 is decomposed by the catalyst 24 into a concentration (for example, 0.1 to 1 ppm) at which the ozone concentration can be released into the atmosphere, and is discharged from the exhaust port 20 into the atmosphere. By adjusting the exhaust amount of the ozone mixed air ag1 released into the atmosphere by the three-way valve 23, the suction port 16 and the inside of the irradiation unit 10 are set to a negative pressure.

  On the other hand, the ozone mixed air ag2 is supplied to the air curtain forming means 13, flows through the annular flow path 14, and is jetted downward from the respective injection holes 15 to the irradiation unit 10, so that a cylindrical shape is formed around the irradiation unit 10. An air curtain c is formed.

  Adjustment of the flow rate of the ozone mixed air ag2 injected from the injection hole 15 is performed by controlling the discharge pressure of the compressor 25 and adjusting the flow rate adjustment valve 26. The discharge pressure of the compressor is controlled by an inverter, for example.

  The air curtain c and the ozone mixed air ag surrounded by the air curtain c have negative pressure in the suction port 16 and the irradiation unit 10, so that the diffusion to the outside of the irradiation unit 10 is prevented and is sucked from the suction port 16 and circulated. To do. When a predetermined time has elapsed after the operation of the apparatus 1, the ozone concentration in the irradiation unit 10 is balanced.

  Thus, in the apparatus 1, when the irradiation object X is irradiated with the electron beam B to sterilize and sterilize the irradiation object, the air curtain c is formed around the irradiation unit 10 and is surrounded by the air curtain c. A part of the ozone mixed air ag (ozone mixed air ag2) is adjusted to an appropriate concentration and flow rate, fed back to the irradiation unit 10, and circulated as an air curtain c.

In order to form the air curtain c, the necessary air volume (flow rate) of the ozone mixed air ag2 ejected from the ejection hole 15 is determined according to the height h of the carry-in port 31 and the carry-out port 32. For example, the height h × When the width is 0.5 to 0.7 m × 0.5 to 0.7 m, it is about 10 m ³ / min.

  With this air curtain c, it is possible to reliably prevent the ozone g generated in the vicinity of the irradiation unit 10 from being irradiated by the electron beam B from being diffused to the outside of the irradiation unit 10 and thus to the outside of the shield 30. It can be limited within the irradiation unit 10 (air curtain c).

  Further, after the air curtain c is formed, the irradiation object X that passes through the irradiation unit 10 comes into contact with the air curtain c when being carried into the irradiation unit 10, and is irradiated with the electron beam B in the irradiation unit 10. 10 is brought out of contact with the air curtain c.

  That is, in the apparatus 1, in addition to the irradiation of the electron beam B to the irradiation object X, the irradiation object X is exposed to ozone g having a sterilizing / sterilizing power generated from the apparatus body 2 itself, so that the conventional electron beam is exposed. Spatial non-uniformity of the sterilization / sterilization effect, which was difficult only by irradiation with B, is alleviated, and the sterilization / sterilization effect can be improved and uniformized.

  That is, conventionally, ozone has been exhausted as unnecessary, but in the apparatus 1, since the diffusion of ozone can be prevented by the air curtain c, it can be fed back to the irradiation unit 10 and circulated. . Thereby, the ozone g generated in the apparatus main body 2 can be used effectively, and the beneficial effect of the ozone g can be used.

  Normally, the ozone concentration in the irradiation unit 10 is balanced, but for example, the ozone sensor 27 is detected as an abnormal concentration by monitoring the ozone concentration of the irradiation unit 10 detected by the ozone sensor 27 online by a monitoring unit (not shown). It may be used as an interlock. At the time of detecting an abnormal concentration, the on-off valve 29 is adjusted according to the ozone concentration of the irradiation unit 10 detected by the ozone sensor 27, and the flow rate of the air a introduced from the introduction line 28 to the circulation pipe 19 is adjusted, The ozone concentration of the irradiation unit 10 is adjusted.

  Furthermore, since the suction port 16 is formed in a cylindrical shape having a diameter that is the same as or slightly larger than the diameter of the cylindrical air curtain c, the air curtain c and the ozone mixed air ag can be sucked more reliably.

  Next, a second embodiment will be described.

  As shown in FIG. 3 and FIG. 4, the electron beam irradiation device 41 is provided with air curtain forming means 42 for forming strip-shaped air curtains c <b> 3 on the upstream side and the downstream side of the scan horn 8 at the upper part of the scan horn 8. It is a thing. The air curtain forming means 42 includes straight flow paths 43 provided before and after the upper portion of the scan horn 8, and a plurality of downward injection holes 44 provided at the lower portions of the respective straight flow paths 43.

  The air curtain c3 is formed in the vicinity of the carry-in port 31 and the carry-out port 32, respectively, and is formed to have a width w3 that is the same as or slightly larger than the widths of the carry-in port 31 and the carry-out port 32. The suction ports 45 respectively disposed on the upstream side and the downstream side below the transport device 3 are formed to have the same width as the air curtain c3 or a slightly larger width. The distance d3 between the injection hole 44 and the suction port 45 is, for example, about 1 m.

  Further, in the apparatus 41, a flow rate adjustment for adjusting the flow rate of the ozone mixed air ag1 in the exhaust pipe 17 between the connecting portion 18 and the catalyst 24, instead of the three-way valve 23 in FIGS. A valve 46 is connected, and a flow rate adjusting valve 47 for adjusting the flow rate of the ozone mixed air ag2 is connected to the circulation pipe 19 between the connecting portion 18 and the compressor 25.

  Other configurations of the device 41 are the same as those of the device 1 of FIGS. 1 and 2. This device 41 can provide the same effects as the device 1. Further, instead of the air curtain forming means 42, an air curtain forming means for forming a cylindrical air curtain around the scan horn 8 may be provided above the scan horn 8.

  In the above-described embodiment, the example in which the cylindrical air curtain c and the strip-shaped air curtain c3 are formed has been described. However, the air curtain may be formed by injecting ozone mixed air ag2 around the entire irradiation unit 10. .

  Further, although the flow rates of the ozone mixed gases ag1 and ag2 were adjusted by the three-way valve 23, the flow rate adjusting valves 46 and 47, the air volume of the exhaust blower 21, etc., the reducer is not the same diameter exhaust pipe 17 or circulation pipe 19. Alternatively, the flow rate of the ozone mixed gas ag1, ag2 may be adjusted by appropriately combining a diffuser.

  In the above-described embodiment, the air curtain and the suction port are disposed so as to face each other via the transport device 3. For example, suction ports may be provided on the upstream side and the downstream side of the air curtain.

  The catalyst 22, the compressor 25, and the flow rate adjustment valve 26 are not necessarily required components, and it is determined whether or not to be incorporated into the apparatus according to the irradiation object X, the size of the carry-in port 31 and the carry-out port 32, and the size of the irradiation unit 10. do it.

  In the present invention, as the irradiation object X, for example, a medical device such as a drop 51 as shown in FIGS. 5A and 5B, a product packed in a corrugated cardboard, or a powder such as a spice is packed. It is particularly effective for sterilization and sterilization of food.

  As shown in FIG. 5 (a), the instillation 51 is composed of a container 51a packed with physiological saline and a container 51b packed with a medicine, which are irradiated with an electron beam r (in FIG. 5 (a)). After covering each with a cover 52 except for the dotted line part) and sterilizing and sterilizing with the above-described apparatus 1 and 41, the containers 51a and 51b are fused with a fusion part 53 in a later step as shown in FIG. Obtained by fusing. The instillation 51 is used by mixing physiological saline and a medicine by hitting or bending the fused portion 53.

It is a front view of the electron beam irradiation apparatus which shows suitable embodiment of this invention. It is a side view of the electron beam irradiation apparatus shown in FIG. It is a front view of the electron beam irradiation apparatus which shows 2nd Embodiment. It is a side view of the electron beam irradiation apparatus shown in FIG. Fig.5 (a) is a top view which shows an example of the irradiation target object before electron beam irradiation, FIG.5 (b) is a top view which shows the product after the production. It is a front view which shows an example of the electron beam irradiation apparatus of background art. It is a side view of the electron beam irradiation apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electron beam irradiation apparatus 8 Scan horn 10 Irradiation part 13 Air curtain formation means 16 Suction port 17 Exhaust pipe 19 Circulation piping c Air curtain g Ozone ag Ozone mixed air ag1 Ozone mixed air ag2 Ozone mixed air

Claims (8)

  In an electron beam irradiation apparatus for irradiating an irradiation object with an electron beam to sterilize and sterilize the irradiation object, an air curtain forming means for forming an air curtain around the irradiation section of the electron beam and disposed below the irradiation section A suction port for sucking air containing ozone surrounded by the air curtain and an exhaust pipe connected to the suction port, and supplying a part of the sucked air containing ozone to the air curtain forming means An electron beam irradiation apparatus comprising a circulation pipe that circulates.   2. The air curtain forming means comprises an annular channel provided so as to surround a scan horn that emits an electron beam, and a plurality of injection holes provided in a lower portion of the annular channel. The electron beam irradiation apparatus of description.   An exhaust blower is connected to the upstream side of the exhaust pipe from which the circulation pipe is branched, and a flow rate of air containing ozone flowing through the exhaust pipe and the circulation pipe are connected to a connection portion between the exhaust pipe and the circulation pipe. The electron beam irradiation apparatus according to claim 1 or 2, wherein a diversion ratio adjusting means for adjusting a diversion ratio with respect to a flow rate of air containing ozone flowing through the is connected.   4. The electron beam irradiation apparatus according to claim 3, wherein ozone concentration adjusting means is connected upstream of the exhaust blower, and the ozone concentration supplied and circulated from the circulation pipe to the air curtain forming means is adjusted.   The electron beam irradiation apparatus according to any one of claims 1 to 4, wherein a compressor is connected to the circulation pipe, and a flow rate of air containing ozone injected from an injection hole of the air curtain forming means is adjusted.   The electron beam irradiation according to any one of claims 1 to 5, wherein an ozone sensor is disposed in the irradiation unit, and a flow rate of air introduced into the circulation pipe is adjusted according to a concentration of ozone detected by the ozone sensor. apparatus.   The electron beam irradiation apparatus according to any one of claims 1 to 6, wherein the suction port is disposed below a conveyor on which the irradiation object is conveyed, and is formed to have substantially the same opening size as the air curtain. When irradiating an irradiation object with an electron beam to sterilize and sterilize the irradiation object, an air curtain is formed around the irradiation part of the electron beam, and air containing ozone surrounded by the air curtain is sucked and sucked A method of using ozone in an electron beam irradiation apparatus, wherein a part of the air containing ozone is circulated as the air curtain.

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