JP2005310368A - Magnetic recording medium and magnetic recording device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic recording medium and a magnetic recording device capable of realizing high-density recording exceeding a thermal fluctuation limit. <P>SOLUTION: This magnetic recording medium is provided with a substrate, a base layer formed on the substrate and including a magnetic substance, a switching layer formed on the base layer and including a magnetic substance, and a recording layer formed on the switching layer and having a structure comprising magnetic particles and a nonmangetic wall filling between the magnetic particles. The base layer, the switching layer, and the recording layer are stacked together to perform exchange coupling interaction. The structure of the base layer, the switching layer and the recording layer is set to satisfy a condition TcS<TcB where TcS is a Curie temperature of the switching layer and TcB is a Curie temperature of the base layer. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a magnetic recording medium and a magnetic recording apparatus.

  As the processing speed of computers in recent years increases, high speed and high density are always required for magnetic storage devices (HDDs) that perform information / data storage / reproduction functions. However, it is said that there is a physical limit to increasing the density, and it has been questioned whether it can continue to meet this requirement.

  In the case of an HDD device, a magnetic recording medium on which information is recorded has a magnetic layer including an aggregate of fine magnetic particles. In order to perform high density recording, it is necessary to reduce the magnetic domain recorded in the magnetic layer. In order to be able to sort out small recording magnetic domains, it is necessary that the boundaries of the magnetic domains be smooth. To that end, it is necessary to make the magnetic particles contained in the magnetic layer minute. In addition, if magnetization reversal is chained to adjacent magnetic particles, it will disturb the boundary of the magnetic domain. Therefore, the magnetic particles are magnetically separated by a non-magnetic material so that exchange coupling interaction does not occur between the magnetic particles. Need to be. Also, from the viewpoint of magnetic interaction between the head and the medium, it is necessary to reduce the thickness of the magnetic layer in order to perform high density recording. From the above demand, it is necessary to further reduce the volume of the magnetization switching unit (substantially equal to the magnetic particles) in the magnetic layer. However, when the magnetization reversal unit is miniaturized, the magnetic anisotropy energy (magnetic anisotropy energy density Ku × volume Va of the magnetization reversal unit) of the unit becomes smaller than the thermal fluctuation energy, and the magnetic domain is no longer retained. Can not be. This is a thermal fluctuation phenomenon, which is the main cause of the physical limit of recording density (called the thermal fluctuation limit).

  To prevent magnetization reversal due to thermal fluctuation, it is conceivable to increase Ku. However, in the case of the HDD medium as described above, since the coercive force Hcw when performing the magnetization reversal operation (recording) at high speed is almost proportional to Ku, recording cannot be performed with a magnetic field that can be generated by the current recording head. End up.

  In order to solve the above problems, the idea of thermally assisted magnetic recording has been proposed. This is to perform magnetic recording by heating the recording layer during recording to locally reduce Ku. In this system, even if the recording layer has a large Ku in the medium usage environment (usually at room temperature), the magnetization can be reversed by a recording magnetic field that can be generated by the current head.

  However, since the adjacent track is heated to some extent during recording, a phenomenon (cross erase) in which the thermal fluctuation is accelerated in the adjacent track and the recording magnetic domain is erased may occur. Further, since the medium is heated to some extent even when the head magnetic field disappears immediately after recording, the thermal fluctuation is also accelerated, and the magnetic domain once formed may be lost.

  In order to solve these problems, it is necessary to use a material whose change with respect to the temperature of Ku is as steep as possible near the recording temperature. However, since the temperature change of Ku of CoCr-based and CoPt-based magnetic thin films that are currently being developed is almost linear, the above conditions cannot be satisfied. Therefore, the conventional magnetic recording medium cannot be expected to improve the track density or the linear recording density so much.

  It is also conceivable to increase Va in order to prevent magnetization reversal due to thermal fluctuation. However, if Va is increased by increasing the size of the magnetic particles in the medium plane, high-density recording cannot be achieved. If Va is increased by increasing the thickness of the recording layer, the head magnetic field does not sufficiently reach the lower portion of the recording layer and magnetization reversal does not occur, and high density recording cannot be achieved.

  An object of the present invention is to provide a magnetic recording medium and a magnetic recording apparatus capable of realizing high-density recording exceeding the thermal fluctuation limit.

A magnetic recording medium according to a first aspect of the present invention includes a substrate, a base layer including a magnetic material formed on the substrate, and a switching layer including a non-magnetic material formed on the base layer. And a recording layer having a structure having a plurality of magnetic particles and a non-magnetic wall filling between the magnetic particles formed on the switching layer, wherein the Curie temperature of the base layer is TcB, and the recording layer When Tsw is a temperature at which the base layer starts to exert an exchange coupling interaction, the following condition is satisfied: TcB> Tsw
It is characterized by satisfying.

  The magnetic recording apparatus using the magnetic recording medium according to the first aspect includes the first magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

Using the apparatus according to the first aspect, when the recording temperature to the recording layer is Tw, the Curie temperature of the base layer is TcB, and the temperature at which the recording layer and the base layer start to exert an exchange coupling interaction is Tsw The following conditions: Tw> Tsw and TcB> Tsw
It is preferable to perform heating and magnetic field application so as to satisfy the above.

  A magnetic recording medium according to a second aspect of the present invention includes a substrate, a base layer formed on the substrate and including a material that is nonmagnetic and exhibits a transition to ferromagnetism in a use environment, and the base layer And a recording layer having a structure having a plurality of magnetic particles and a non-magnetic wall filling between the magnetic particles, and a transition temperature Tf from the non-magnetic to the ferromagnetic layer of the base layer is a reproduction temperature. The structure of the base layer is set so as to be higher.

  The magnetic recording apparatus using the magnetic recording medium according to the second aspect includes the second magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

Using the apparatus according to the second aspect, when the recording temperature to the recording layer is Tw and the transition temperature from nonmagnetic to ferromagnetic of the base layer is Tf, the following condition is satisfied: Tw> Tf
It is preferable to perform heating and magnetic field application so as to satisfy the above.

A magnetic recording medium according to a third aspect of the present invention includes a substrate, a base layer including a magnetic material formed on the substrate, a plurality of magnetic particles formed on the base layer, and a space between the magnetic particles. The base layer and the recording layer are laminated so as to have an exchange coupling interaction, and the recording temperature to the recording layer is Tw, When the Curie temperature of the base layer is TcB, the following condition | TcB-Tw | <100K
The structure of the base layer and the recording layer is set so as to satisfy the above condition.

  The magnetic recording apparatus using the magnetic recording medium according to the third aspect includes the third magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

When the apparatus according to the third aspect is used and the recording temperature to the recording layer is Tw and the Curie temperature of the base layer is TcB, the following condition: | TcB−Tw | <100K
It is preferable to perform heating and magnetic field application so as to satisfy the above.

A magnetic recording medium according to a fourth aspect of the present invention includes a substrate, a base layer including a magnetic material formed on the substrate, a switching layer including a magnetic material formed on the base layer, A plurality of magnetic particles formed on the switching layer and a recording layer having a non-magnetic wall filling the magnetic particles, wherein the base layer, the switching layer, and the recording layer are exchange-coupled to each other. When the Curie temperature of the switching layer is TcS and the Curie temperature of the base layer is TcB, the following conditions are satisfied: TcS <TcB
The structure of the base layer, the switching layer, and the recording layer is set so as to satisfy the above.

  The magnetic recording apparatus using the magnetic recording medium according to the fourth aspect includes the fourth magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

Using the apparatus according to the fourth aspect, when the recording temperature to the recording layer is Tw, the Curie temperature of the switching layer is TcS, and the Curie temperature of the base layer is TcB, the following conditions TcS <TcB and 0 < Tw-TcS <100K
It is preferable to perform heating and magnetic field application so as to satisfy the above.

A magnetic recording medium according to a fifth aspect of the present invention includes a substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material formed on the substrate, and a plurality of functional layers formed on the functional layer. Comprising a magnetic particle and a recording layer having a structure having a non-magnetic wall that fills between the magnetic particles, and the functional layer and the recording layer are laminated so as to exert an exchange coupling interaction under a use environment, When the Curie temperature of the recording layer is TcR and the temperature at which the exchange coupling interaction between the functional layer and the recording layer disappears is TcE, the following condition is satisfied: TcR> TcE
The magnetic recording apparatus using the magnetic recording medium according to the fifth aspect is characterized in that the fifth magnetic recording medium, means for heating the magnetic recording medium, and applying a magnetic field to the magnetic recording medium And a means for performing the processing.

Using the apparatus according to the fifth aspect, when the recording temperature to the recording layer is Tw, the Curie temperature of the recording layer is TcR, and the temperature at which the exchange coupling interaction between the functional layer and the recording layer disappears is TcE The following conditions: TcR> TcE and | TcE−Tw | <100K
It is preferable to perform heating and magnetic field application so as to satisfy the above.

A magnetic recording medium according to a sixth aspect of the present invention includes a substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material formed on the substrate, and a plurality of functional layers formed on the functional layer. Comprising a magnetic particle and a recording layer having a structure having a non-magnetic wall that fills between the magnetic particles, and the functional layer and the recording layer are laminated so as to exert an exchange coupling interaction under a use environment, When the Curie temperature of the recording layer is TcR and the temperature at which the exchange coupling interaction between the functional layer and the recording layer disappears is TcE, the following condition is satisfied: TcR <TcE
It is characterized by satisfying.

  The magnetic recording apparatus using the magnetic recording medium according to the sixth aspect includes the sixth magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

A magnetic recording medium according to a seventh aspect of the present invention includes a substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material formed on the substrate, and a magnetic material formed on the functional layer. And a recording layer having a structure having a plurality of magnetic particles and a nonmagnetic wall filling between the magnetic particles formed on the switching layer, the functional layer, the switching layer, and the recording layer. When the layers are stacked so as to exert an exchange coupling interaction under the use environment, the Curie temperature of the recording layer is TcR, and the temperature at which the exchange coupling interaction between the switching layer and the recording layer disappears is TcE. The following conditions: TcR> TcE
It is characterized by satisfying.

  The magnetic recording apparatus using the magnetic recording medium according to the seventh aspect comprises the seventh magnetic recording medium, means for heating the magnetic recording medium, and means for applying a magnetic field to the magnetic recording medium. It is characterized by.

Using the apparatus according to the seventh aspect, when the recording temperature to the recording layer is Tw, the Curie temperature of the recording layer is TcR, and the temperature at which the exchange coupling interaction between the switching layer and the recording layer disappears is TcE The following conditions: TcR> TcE and | TcE−Tw | <100K
It is preferable to perform heating and magnetic field application so as to satisfy the above.

A magnetic recording medium according to an eighth aspect of the present invention includes a substrate, a functional layer including a magnetic material formed on the substrate, a plurality of magnetic particles formed on the functional layer, and the magnetic particles. A recording layer having a structure having a non-magnetic wall filling the gap, and the functional layer and the recording layer are laminated so as to exert a ferromagnetic exchange interaction under a use environment. The magnetic anisotropy energy density Ku _RL is 5 × 10 ⁶ erg / cc or more and is larger than the magnetic anisotropy energy density Ku _{FL of the} functional layer.

  In the magnetic recording medium according to the eighth aspect, as the recording layer, a multilayer in which a magnetic layer and a nonmagnetic layer having a thickness of 2 nm or less containing at least one element selected from the group consisting of Pt and Pd are alternately stacked You may use what has a structure.

  A magnetic recording apparatus using the magnetic recording medium according to the eighth aspect includes the magnetic recording medium according to the eighth aspect and means for applying a magnetic field to the magnetic recording medium. This magnetic recording apparatus does not perform heat-assisted magnetic recording.

  According to the present invention, it is possible to realize a high-density magnetic recording using a material system having a large magnetic anisotropy energy and exceeding the thermal fluctuation limit.

  Hereinafter, the present invention will be described in more detail. First, the configuration of the magnetic recording medium and the magnetic recording apparatus common to each aspect of the present invention will be described.

The schematic structure of the magnetic recording medium according to the present invention will be described. The magnetic recording medium according to each aspect of the present invention has a structure in which various base layers and / or switching layers and / or functional layers are provided between a nonmagnetic substrate and a magnetic recording layer. When performing heat-assisted magnetic recording, a base layer, a switching layer, or a functional layer whose magnetic characteristics change with temperature is used. If necessary, an underlayer for controlling the performance of the recording layer or the like may be provided. If necessary, a protective layer made of carbon, SiO ₂ or the like may be provided on the recording layer.

  The substrate is usually circular (disk) and made of a hard material. As a material for the substrate, metal, glass, ceramics, or the like can be used.

As the recording layer, for example, a recording layer having a structure in which magnetic particles are dispersed in a nonmagnetic material is used. As the magnetic particle material used for the recording layer, a material having a large saturation magnetization Is and a large magnetic anisotropy is suitable. From this viewpoint, an alloy of a magnetic element selected from the group consisting of Co, Fe and Ni and a metal selected from the group consisting of Pt, Sm, Cr, Mn, Bi and Al is used as the magnetic metal material. Is preferred. More preferred are Co-based alloys having a large magnetocrystalline anisotropy, particularly those based on CoPt, SmCo and CoCr, and ordered alloys such as FePt and CoPt. Specifically, Co-Cr, Co-Pt , Co-Cr-Ta, Co-Cr-Pt, Co-Cr-Ta-Pt, etc. _{Fe 50 Pt 50, Fe 50 Pd} 50, Co 3 Pt 1 is cited It is done. Further, as magnetic materials, Tb-Fe, Tb-Fe-Co, Tb-Co, Gd-Tb-Fe-Co, Gd-Dy-Fe-Co, Nd-Fe-Co, Nd-Tb-Fe-Co, etc. Rare earth (RE) -transition metal (TM) alloy, multilayer film of magnetic layer and noble metal layer (Co / Pt, Co / Pd, etc.), semimetal such as PtMnSb, magnetic oxide such as Co ferrite, Ba ferrite, etc. Can also be used. Furthermore, in order to improve the magnetic magnetism of the magnetic material described above, for example, Cr, Nb, V, Ta, Ti, W, Hf, V, In, Si, B, etc., or these elements and oxygen, nitrogen, carbon A compound with at least one element selected from hydrogen may be added. Regarding magnetic anisotropy of magnetic particles, in-plane magnetic anisotropy used in conventional HDDs, perpendicular magnetic anisotropy used in magneto-optical recording, or a mixture of both may be used. .

The method for dividing the magnetic particles with the non-magnetic material is not particularly limited. For example, a method is used in which a nonmagnetic element is added to a magnetic material to form a film, and a nonmagnetic material such as Cr, Ta, B, oxide (such as SiO ₂ ) or nitride is precipitated between the magnetic particles. Also good. Further, a method may be used in which a fine hole is formed in a non-magnetic material using a lithography technique and magnetic particles are embedded in the hole. A method may be used in which a diblock copolymer such as PS-PMMA is self-assembled to remove one polymer, a fine hole is formed in a nonmagnetic material using the other polymer as a mask, and magnetic particles are embedded in the hole. . Moreover, you may use the method processed by particle beam irradiation.

  The thickness of the recording layer is not particularly limited, but is preferably 100 nm or less, more preferably 50 nm or less, and even more preferably 20 nm or less in consideration of high-density recording. However, it is not preferable to make the thickness of the recording layer 0.1 nm or less because it becomes difficult to form a film.

  The underlayer provided as necessary may be magnetic or non-magnetic. The thickness of the underlayer is not particularly limited, but if it is thicker than 500 nm, the production cost increases, which is not preferable.

  The underlayer made of a magnetic material is magnetically coupled to the magnetic domains in the recording layer and the recording / reproducing head through exchange interaction and magnetostatic interaction so that the recording layer can be recorded / reproduced efficiently. It is preferable. For example, when a perpendicular magnetization film is used as the recording layer, high-density recording is possible by using a soft magnetic film as the underlayer and recording with a single pole head. In addition, when an in-plane magnetized film is used as the recording layer, a soft magnetic layer is provided above or below the recording layer, and by applying a magnetic field having a strength that saturates the soft magnetic layer during reproduction, high density recording becomes possible. In addition, the thermal fluctuation resistance is improved.

  The underlayer made of a nonmagnetic material is provided for the purpose of controlling the magnetic structure of the recording layer or the crystal structure of the nonmagnetic material, or for preventing impurities from entering from the substrate. For example, the crystal orientation of the magnetic material can be controlled by using an underlayer having a lattice spacing close to that of the desired crystal orientation of the magnetic material. Further, by using an amorphous underlayer having an appropriate surface energy, the crystallinity or amorphousness of the magnetic or nonmagnetic material of the recording layer can be controlled. A base layer having another function may be provided below the base layer. In this case, since the functions can be shared by the two underlayers, the desired effect can be easily controlled. For example, for the purpose of reducing the crystal grains of the recording layer, a technique is known in which a seed layer having a small particle diameter is provided on a substrate and an underlayer for controlling the crystallinity of the recording layer is provided thereon. In order to prevent entry of impurities from the substrate, it is preferable to use a thin film having a small lattice spacing or a dense base layer.

  Furthermore, the underlayer may have the above-described function. For example, the magnetic underlayer may have a function of controlling the crystallinity of the magnetic material of the recording layer. In this case, since the effect on the recording / reproducing characteristics and the effect on the crystallinity are synergistic, it is preferable to the case of the underlayer having only a single function. Further, as the underlayer, a surface modification layer of the substrate generated by ion plating, doping in an atmospheric gas, neutron beam irradiation, or the like may be used. In this case, the process of depositing the thin film can be omitted, which is preferable for the production of the medium.

  A magnetic recording apparatus for performing heat-assisted magnetic recording according to the present invention has means for heating a magnetic recording medium and means for applying a magnetic field to the magnetic recording medium. On the other hand, the magnetic recording apparatus that does not perform heat-assisted magnetic recording according to the present invention has means for applying a magnetic field to the magnetic recording medium, but does not have means for heating the magnetic recording medium.

  The means for heating the magnetic recording medium may be one that heats the entire surface of the disk uniformly or locally, as long as the portion that reaches the recording temperature is local. In general, in consideration of record retention characteristics (archive characteristics) and power consumption, it is preferable to locally heat a part of the medium and keep most of the medium at a temperature of room temperature or lower. As a heating means capable of high-speed and local heating, a laser, induction heating means, a probe heated with a heating wire or the like, or an electron beam emission probe, which is variably maintained at a distance from the medium surface, can be considered. . In addition, in order to perform more local heating, a system in which laser light is squeezed in the form of a medium with a lens or the like, a system in which laser light is used as near-field light using a microscopic aperture or a solid immersion lens (SIL), a probe Inductive heating method by forming a fine antenna at the tip, Method to sharpen the shape of the medium facing part of the heating probe as much as possible or shorten the distance from the medium surface, Shape of the medium facing part of the electron beam emission probe And a method of sharpening as much as possible. The heating means may be installed on the recording layer side of the medium or on the opposite side.

  The means for applying a magnetic field to the magnetic recording medium may have a magnetic circuit composed of an induction coil and a magnetic pole on the end face of a flying slider as used in a normal HDD, or a permanent magnet may be installed. In addition, a magnetic layer may be added to the medium to generate a temperature distribution or a magnetization distribution by light irradiation to generate an instantaneous or local magnetic field, or a leakage magnetic field generated from the magnetic layer itself that records information is used. May be. When a permanent magnet is installed, a high-speed and high-density magnetic field can be applied by changing the distance from the medium or by miniaturizing the magnet.

  Next, a magnetic recording medium according to the first aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. The magnetic recording medium according to the first aspect includes at least a nonmagnetic substrate, a base layer made of a magnetic material, a switching layer made of a nonmagnetic material, a plurality of magnetic particles, and a nonmagnetic material wall filling between the magnetic particles. And a recording layer having a structure.

  FIG. 1 shows a magnetic recording medium, magnetic field applying means, and heating means according to the first embodiment. The magnetic recording medium of FIG. 1 has a structure in which an underlayer 12, a base layer 13 including a magnetic material, a switching layer 14 including a nonmagnetic material, a recording layer 15, and a protective layer 16 are formed on a substrate 11. A transparent substrate such as glass is used as the substrate 11 of this magnetic recording medium, and a laser 21 is provided as a heating means on the substrate 11 side. A lens (not shown) may be provided between the laser 21 and the substrate 11. A recording head 22 as a magnetic field applying unit is installed on the magnetic recording medium. The medium is rotated and moves from right to left as indicated by an arrow, for example. Fine magnetization reversal can be formed in the recording layer 15 by local heating by the laser 21 and local magnetic field application by the recording head 22. The remaining portion not shown is generally the same as that of a conventional HDD device. The laser 21 may be integrated with the recording head 22 and installed on the magnetic recording medium.

  The switching layer 14 is a nonmagnetic material and has a function of cutting off the exchange coupling interaction between the recording layer 15 and the base layer 13 at room temperature. As will be described later, this layer is called a switching layer in the sense that the exchange coupling interaction between the recording layer and the base layer can be switched between a working state and a working state depending on the temperature. The form of the switching layer 14 is not particularly limited. For example, even if it is not in the form of a continuous thin film, there is a case where the effect of cutting the exchange coupling interaction can be obtained by interfacial substance mixing, interface effect or the like. The film thickness of the switching layer 14 is set to 5 nm or less, for example. The lower limit of the thickness is not particularly limited, but it is not preferable that the thickness is 0.3 nm or less because an interface cannot be substantially formed. The switching layer 14 may have a function of an underlayer and can control the magnetic characteristics of the recording layer 15.

  The base layer 13 is not particularly limited as long as it is a magnetic material. Although the thickness is not particularly limited, it is not preferable that the thickness is 1000 nm or more because it takes a long time to produce, and characteristic deterioration or peeling due to film stress tends to occur. If the thickness is less than 1 nm, it is difficult to form a film, which is not preferable.

  The present inventors examined in detail the temperature dependence of exchange coupling acting between the base layer and the recording layer separated by a thin nonmagnetic material. As a result, it was found that the presence or absence of exchange coupling between the base layer and the recording layer can be adjusted by temperature. Therefore, the nonmagnetic layer is called a switching layer.

  FIG. 2 schematically shows the temperature dependence of the exchange coupling interaction strength (magnetic field conversion) Hexg acting between the recording layer and the base layer and the distance Lexg over which the exchange coupling extends from the recording layer interface toward the base layer. Show. In this figure, tsw is the thickness of the switching layer, Tsw is tsw = Lexg, the temperature at which the recording layer and the base layer begin to have an exchange coupling interaction, Ta is the room temperature, and Tw is the recording temperature (ie, locally heated). TcB is the Curie temperature of the base layer. In consideration of an in-vehicle HDD, Tw is set to 100 ° C. or higher so that the recording magnetization does not re-invert even in an automobile room that can reach a temperature of about 80 ° C. As shown in FIG. 2, when the temperature of the recording layer becomes higher than Tsw, the distance Lexg that the exchange coupling reaches becomes larger than the thickness tsw of the switching layer so that the exchange coupling interaction works between the base layer and the recording layer. Become. The inventors of the present invention have found that it is possible to increase the density of magnetic recording, which has been difficult due to thermal fluctuation, by utilizing this fact. Details thereof will be described below.

  As described above, when the magnetic anisotropy energy Ku of the magnetic particles is increased in order to overcome the thermal fluctuation limit, the recording coercivity Hcw increases. However, since the magnetic anisotropy energy has a characteristic of decreasing with temperature, if the medium is heated during recording, Hcw can be lowered to such an extent that recording can be performed with the current head. This is the basic concept of thermally assisted magnetic recording. However, in the heat-assisted magnetic recording that has been studied conventionally, there are problems of thermal fluctuation deterioration and cross erase immediately after recording. This is because thermal fluctuation deterioration is more likely to occur because the medium is heated immediately after recording. That is, even if the reversed magnetic domain can be formed by the head magnetic field, recording cannot be performed if the magnetic domain collapses due to thermal fluctuation immediately after the head passes and the magnetic field is not applied. In addition, since the temperature distribution is always generated by the heating means, adjacent tracks are simultaneously heated during the recording operation, and even if Ku and Va are adjusted so as not to cause thermal fluctuation at room temperature, the thermal fluctuation phenomenon is accelerated by the temperature rise. Deterioration occurs.

  Hereinafter, it will be described that according to the first aspect, these problems can be solved. The degree of thermal fluctuation is determined by the ratio between the magnitude of magnetic anisotropy energy (= Ku × Va) and the thermal fluctuation energy, and the smaller the KuVa, the easier the reinversion of the above magnetic domains. The inventors of the present invention newly introduced an amount of magnetic anisotropy energy density Kuw at the time of recording and paid attention to its temperature dependence. The value of Ku itself is an essential physical quantity of the magnetic material, not an amount that changes depending on how the magnetic field changes. In general, Ku is often used by a magnetization reversal process such as VSM, and is calculated from a physical quantity such as Hc estimated at that time. This estimation is influenced by thermal fluctuations, and is particularly significant for materials having a low KuVa. However, it is difficult to accurately estimate this effect. Therefore, a method of deriving Ku using Hc estimated as having no thermal fluctuation is often used. When this method is used, the value of Ku changes depending on the reversal speed of the magnetic field. For convenience of explanation here, Ku estimated in this way is Kuw. This Kuw is approximately proportional to the recording coercivity Hcw that opposes the high-speed magnetic field change during the recording operation.

  In the first aspect, the structure of the magnetic recording medium is adjusted so that the temperature dependence of Lexg and Hexg shown in FIG. 2 is satisfied, and heating and magnetic field application are performed. FIG. 3 shows the temperature dependence of Kuw, Va and KuwVa of the magnetic recording medium.

  As shown in FIG. 3, when the medium temperature exceeds Tsw, the recording layer and the base layer are exchange-coupled, so that the size Va of the magnetization reversal unit increases sharply, and KuwVa increases accordingly. Therefore, KuwVa can have a sufficiently large value even in the vicinity of the recording temperature Tw so as not to cause magnetization re-inversion. On the other hand, the coercive force Hcw at this time remains small and can be recorded easily. Therefore, even if heat-assisted magnetic recording is performed, magnetization re-inversion due to thermal fluctuation does not occur, and high-density magnetic recording can be achieved. Moreover, cross erase can also be suppressed. That is, in the adjacent track, when the temperature rise is small, the decrease in KuVa is small so that the thermal fluctuation does not occur. When the temperature rise is large, the thermal fluctuation does not deteriorate due to the effect of increasing Va.

  The above description is based on the assumption that the Curie temperature TcB of the base layer is higher than the recording temperature Tw, but TcB may be lower than Tw. FIG. 4 shows the temperature dependence of Kuw, Va and KuwVa of the magnetic recording medium when TcB <Tw. As shown in FIG. 4, KuwVa once increases due to an increase in Va at a temperature higher than Tsw, but KuwVa becomes smaller again at a temperature higher than TcB. Recording is performed in a state where KuwVa is very small. However, since Va becomes large in the cooling process immediately after recording, re-magnetization is suppressed. The action of suppressing cross erase is the same as described above. In this case, since Va at the time of recording is small, there is an advantage that recording resolution can be improved and higher density recording can be performed. However, there is a drawback that the margin for adjusting the recording temperature with respect to TcB is narrow. Therefore, the relationship between TcB and Tw may be set according to the requirements of the system using the medium.

  In the magnetic recording medium of the first aspect, a ferrimagnetic material can be suitably used as the base layer. If the base layer is a ferrimagnetic material, the magnetization can be made substantially zero at room temperature or an arbitrary temperature, and a signal from the base layer is not detected as noise during reproduction, which is preferable. Further, when an amorphous rare earth-transition metal (RE-TM) alloy is used as the ferrimagnetic material, the recording layer and the base layer can be exchange-coupled without depending on variations in the magnetic particle size of the recording layer because it is amorphous. Therefore, it is preferable. Also, RE-TM alloy is preferable because the value of magnetization at room temperature can be easily controlled by the ratio of the rare earth and the transition metal, and the design and manufacture become easy. In addition, RE-TM alloys used for magneto-optical recording media, such as TbFeCo, GdTbFeCo, DyTbFeCo, and the like are also preferable because the Curie temperature can be easily controlled by the ratio of Fe to Co.

  In the first aspect, it is preferable that the length d [nm] of the portion of the nonmagnetic material separating the magnetic particles in the recording layer is larger than ½ of the thickness tsw of the switching layer. In this case, when the medium temperature becomes higher than Tsw and Lexg becomes large, exchange coupling does not work between the magnetic particles, so that a magnetic transition with little transition noise can be made. However, if the distance between the magnetic particles becomes too large, the amount of magnetization decreases and the signal becomes small. The relationship between the magnetic particle distance and the switching layer thickness is preferably set according to the requirements of the system of the magnetic recording apparatus.

  Next, a magnetic recording medium according to a second aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. The magnetic recording medium according to the second aspect includes at least a nonmagnetic substrate, a base layer containing a material that is nonmagnetic and exhibits a transition to ferromagnetism in a use environment, a plurality of magnetic particles, and a gap between the magnetic particles. And a recording layer having a structure having a non-magnetic wall.

  FIG. 5 schematically shows a magnetic recording medium, magnetic field applying means, and heating means according to the second embodiment of the present invention. The magnetic recording medium of FIG. 5 includes a base layer 13 on a substrate 11, a base layer 13 containing a material that is nonmagnetic in a use environment (usually room temperature) and exhibits a transition to ferromagnetism when heated, recording The layer 15 and the protective layer 16 are formed. A laser 21 as a heating unit is installed on the substrate side of the magnetic recording medium, and a recording head 22 as a magnetic field applying unit is installed on the magnetic recording medium. The laser 21 may be integrated with the recording head 22 and installed on the magnetic recording medium.

  In the magnetic recording medium according to the second aspect, the conditions to be satisfied by each layer other than the base layer 13 are the same as those of the magnetic recording medium according to the first aspect.

  In the magnetic recording medium according to the second aspect, the material of the base layer 13 is not particularly limited as long as it is nonmagnetic at room temperature and exhibits a transition to ferromagnetism when heated. The thickness of the base layer 13 is not particularly limited, but it is not preferable that the thickness is 1000 nm or more because it takes a long time to produce the film and characteristic deterioration or peeling due to film stress tends to occur. On the other hand, when the thickness is 1 nm or less, it is difficult to form a film, which is not preferable.

  In the range investigated by the present inventors, no single material was found that was non-magnetic at room temperature and exhibited a transition to ferromagnetism when heated. It was found that can be expressed. For example, a thin film having a structure having a plurality of magnetic particles having a size exhibiting superparamagnetism at room temperature and a nonmagnetic material wall filling between the magnetic particles can be mentioned. In such a thin film, if the spacing between the ferromagnetic particles is set to be smaller than Lexg as shown in FIG. 2 at a high temperature (but lower than the Curie temperature), Lexg is a temperature. You can take advantage of growing with. Since the base layer made of such a thin film has a small ferromagnetic particle at room temperature, the magnetic anisotropy energy is completely smaller than the thermal fluctuation energy and is paramagnetic as a whole. However, the temperature rises and Lexg is a magnetic particle. When the distance is larger than the interval, ferromagnetism appears due to the effect of increasing the activation volume (Va).

  The operation of the magnetic recording medium using such a base layer can be explained in the same manner as in the case of the magnetic recording medium of the first aspect having a laminated structure of base layer / switching layer / recording layer. That is, in FIG. 2 to FIG. 4, the described explanation can be applied if Tsw is replaced with Tf (the transition temperature from paramagnetic to ferromagnetic in the base layer). Other conditions such as the recording method are the same as the method according to the first aspect.

  In the magnetic recording medium according to the second aspect, when the recording temperature to the recording layer is Tw and the transition temperature from the nonmagnetic state to the ferromagnetism is Tf, the base layer and the recording layer satisfy Tw> Tf. The layer structure is adjusted. Also in this case, it is preferable to set Tw to 100 ° C. or higher in consideration of the in-vehicle HDD. The average interval between the magnetic particles forming the base layer is preferably 5 nm or less. If the interval is larger than 5 nm, Lexg does not increase so that sufficient exchange coupling occurs at a temperature equal to or lower than the Curie temperature. On the other hand, it is not preferable that the distance is smaller than 0.5 nm because a substantially continuous film is formed.

  The material used for the base layer in the magnetic recording medium according to the second aspect will be described more specifically. The material of the magnetic particles is not particularly limited, but it is preferable to use a ferromagnetic material used for the recording layer in view of ease of production. The non-magnetic material is not particularly limited, but an amorphous material that can easily form a base material structure surrounding the magnetic particles is preferable. Examples of such nonmagnetic materials include substances represented by general formula MG. Here, M is at least one selected from the group consisting of Si, Al, Zr, Ti, In, Sn and B, and G is at least one selected from the group consisting of oxygen, nitrogen and carbon. Specifically, Si-O, Al-O, Zr-O, Ti-O, Si-N, Al-N, Zr-N, Ti-N, BN, Si-C, Ti-C, B -C, SiAl-ON, Si-ON, AlTi-OC, In-Sn-O and the like are preferable. Also suitable are carbon allotropes, specifically diamond, amorphous carbon, and diamond-like carbon.

  Note that a material corresponding to the base layer in the second magnetic recording medium can also be used as the switching layer in the magnetic recording medium of the first aspect having a laminated structure of base layer / switching layer / recording layer.

  Next, a magnetic recording medium according to a third aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. The magnetic recording medium according to the third aspect includes at least a non-magnetic substrate, a base layer containing a magnetic material, and a recording layer having a structure having a plurality of magnetic particles and a non-magnetic material wall filling between the magnetic particles. The base layer and the recording layer are laminated so as to exert an exchange coupling interaction.

  The magnetic recording medium according to the third aspect has the same stacked structure as the magnetic recording medium according to the second aspect shown in FIG.

  The magnetic anisotropy of the recording layer may be perpendicular or in-plane with respect to the film surface. The thickness of the recording layer is the same as that described in relation to the magnetic recording medium of the first aspect.

  The base layer is not particularly limited as long as it is a magnetic material. The magnetic anisotropy of the base layer may be in-plane direction or perpendicular direction. However, a base layer exhibiting perpendicular magnetic anisotropy is preferable because a large change in Ku is easily obtained. The thickness of the base layer is the same as that described in connection with the magnetic recording medium of the first aspect.

  In order to cause the base layer and the recording layer to have an exchange coupling interaction, a method of continuously forming these layers without breaking the vacuum is used. Theoretically, exchange interaction extends even if there is an interval of about 1 nm, and therefore a nonmagnetic layer or a surface modified layer may exist between the base layer and the recording layer. In addition, since the exchange coupling force can be controlled by inserting another magnetic layer between the base layer and the recording layer, a plurality of magnetic layers may exist between the base layer and the recording layer.

  Since the magnetic recording medium according to the third aspect focuses on the Curie temperature of the base layer, this point will be described. The Curie temperature Tc of the magnetic material can be examined by the temperature dependence of the magnetization M or the coercive force Hc. However, when magnetic properties are measured by VSM or the like, the measurement takes time, and it is necessary to keep the heating state for about 10 minutes at the shortest. In addition to this, since the time for raising the temperature cannot be shortened, the measurement is held in a heated state for about one hour. In the case of a thin film magnetic material, an irreversible fine structure change occurs due to holding at a high temperature for a long time, and the magnetic characteristics may not be accurately evaluated. In the case of an amorphous rare earth-transition metal alloy used as a magneto-optical recording medium, such a change is relatively difficult to occur. However, in the CoCrPt-based magnetic alloy used as the HDD medium, a change in the microstructure may occur at about 200 ° C. However, even in this case, Tc can be estimated by extrapolating the change in magnetic characteristics from room temperature or lower to the temperature at which the structural change occurs to the high temperature side. Tc of the base layer in the magnetic recording medium according to the third aspect may be any temperature at which Ku is substantially small, and at that temperature, for example, the values of M and Hc are about 1/5 or less of the room temperature. Preferably, it should be about 1/20 or less.

FIG. 6 shows the temperature dependence of the magnetic anisotropy KuR of the recording layer and the magnetic anisotropy KuB of the base layer in the magnetic recording medium according to the third embodiment. Since the recording layer and the base layer are exchange-coupled, the magnetic anisotropy as a whole changes as indicated by Ku ^{total in the} figure (the size of Ku shown in the figure is not quantitative). That is, if the recording layer and the base layer have a volume of the magnetization reversal unit that is not subject to thermal fluctuation, Ku ^total represents a weighted average value according to the magnetic characteristics of both. For example, when the magnetic particles in the recording layer are small and subjected to a certain amount of thermal fluctuation, Ku ^total becomes a value larger than the weighted average value due to the increase in the magnetization reversal unit volume. When the temperature rises and reaches the Curie temperature TcB of the base layer, the base layer loses its magnetism and the above exchange coupling effect is lost. At this point, Ku ^total decreases rapidly. If the recording layer has a volume of the magnetization reversal unit that is not affected by thermal fluctuation even at this temperature, Ku ^total is reduced to the Ku value of the original single recording layer. If the recording layer is affected by thermal fluctuation, Ku ^total further decreases. In any case, in the vicinity of TcB, an abrupt change in Ku that cannot be obtained with a single recording layer can be obtained. In addition, Ku ^total has a large value at a temperature slightly lower than TcB due to the action of exchange coupling.

By utilizing the above-described method of changing Ku ^total and setting the difference between the Curie temperature TcB of the base layer and the recording temperature Tw to be small, the problem of cross erase and magnetic domain disappearance immediately after recording, which was a problem in thermally assisted magnetic recording Can be solved. That is, even if there is a temperature rise as shown by Tnext in FIG. 6 in a track adjacent to the recording track, for example, Ku ^total is sufficiently large and recording deterioration due to thermal fluctuation does not occur. Also, since Ku ^total is large even at relatively high temperatures, the recovery speed of Ku ^total immediately after recording is fast. For this reason, deterioration of thermal fluctuation after recording can be suppressed.

  As a result of conducting recording experiments on the magnetic recording medium according to the third aspect under various conditions, the inventors have found that the above-described operations and effects occur when the condition of | TcB−Tw | <100K is satisfied. confirmed. Further, in order to provide a wide margin, allow for the manufacturing conditions of the medium and the apparatus, and perform higher density recording, | TcB−Tw | <50K is more preferable, and | TcB−Tw | <20K is more preferable. preferable.

  The above description is based on the assumption that the Curie temperature TcB of the base layer is lower than the recording temperature Tw, but TcB may be higher than Tw. This is because KuB is very small in the vicinity of the Curie temperature, and the same action and effect as described above can be obtained. In FIG. 6, the Curie temperature TcR of the recording layer is higher than Tw. However, TcR <Tw may be satisfied. This is because, even when the recording layer has lost magnetization, magnetization rises during application of the recording magnetic field from the head, and thus recording (magnetization reversal) becomes possible. TcR, TcB and Tw are appropriately set according to the requirements of the system and the medium material used.

  Next, a magnetic recording medium according to a fourth aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. A magnetic recording medium according to a fourth aspect has a structure having at least a substrate, a base layer containing a magnetic material, a switching layer containing a magnetic material, a plurality of magnetic particles and a non-magnetic material wall filling between the magnetic particles. The base layer, the switching layer, and the recording layer are laminated so as to exert an exchange coupling interaction.

  The magnetic recording medium according to the fourth aspect has the same laminated structure as the magnetic recording medium according to the first aspect shown in FIG. However, in the magnetic recording medium according to the fourth aspect, a recording layer that is substantially perpendicularly magnetized at room temperature is used, and the functions of the base layer and the switching layer are the same as those of the magnetic recording medium according to the first aspect. Is different. The magnetic recording medium according to the fourth aspect has a structure in which a switching layer is interposed between the base layer and the recording layer of the magnetic recording medium according to the third aspect. The Curie temperature TcS of the switching layer is set lower than the Curie temperature TcB of the base layer. The requirements for the exchange coupling interaction among the recording layer, the switching layer, and the base layer are the same as those described in relation to the magnetic recording medium according to the third aspect.

FIG. 7 shows the temperature dependence of the magnetic anisotropy KuR of the recording layer, the magnetic anisotropy KuS of the switching layer, and the magnetic anisotropy KuB of the base layer in the magnetic recording medium according to the fourth embodiment. Since the recording layer, the switching layer, and the base layer are exchange coupled, the overall magnetic anisotropy changes as indicated by Ku ^{total in the} drawing (the size of Ku shown in the figure is not quantitative). That is, if the recording layer, the switching layer, and the base layer have a volume of the magnetization reversal unit that does not receive thermal fluctuation, Ku ^total is a weighted average value according to the magnetic characteristics of the three layers. Show. For example, when the magnetic particles in the recording layer are small and subjected to a certain amount of thermal fluctuation, Ku ^total becomes a value larger than the weighted average value due to the increase in the magnetization reversal unit volume. When the temperature rises and reaches the Curie temperature TcS of the switching layer, the switching layer loses its magnetism and the exchange coupling between the recording layer and the base layer disappears. At this point, Ku ^total decreases rapidly. Even at this temperature, if the recording layer has a magnetization reversal unit volume that is not affected by thermal fluctuations, Ku ^total is reduced to the Ku value of the original single recording layer. If the recording layer is affected by thermal fluctuation, Ku ^total further decreases. In any case, in the vicinity of TcS, an abrupt Ku change that cannot be obtained with a single recording layer can be obtained. In addition, Ku ^total has a large value due to the action of exchange coupling at a temperature slightly lower than TcS.

  In the magnetic recording medium of the fourth aspect, by setting the difference between the Curie temperature TcS of the switching layer and the recording temperature Tw to be small, the problems of cross erase and magnetic domain disappearance immediately after recording, which were problems in heat-assisted magnetic recording, are solved. Solvable. The operation is the same as that described with reference to FIG. 6 in connection with the magnetic recording medium of the third aspect. However, it is necessary to satisfy Tw> TcS. This is because as long as the magnetic properties of the switching layer remain, the exchange coupling between the recording layer and the base layer exists and Ku cannot be rapidly reduced. If TcB> TcS is not satisfied, Ku does not change rapidly when the medium temperature reaches TcS. Although the relationship between TcB and TcR is arbitrary, it is preferable that TcB> TcR in order to increase the manufacturing margin of the medium or to ensure the margin of the recording condition.

  As a result of conducting a recording experiment on the magnetic recording medium of the fourth aspect under various conditions, the inventors confirmed that the above-described actions and effects occur when the condition of 0 <Tw−TcS <100K is satisfied. did. Also, in order to provide a wide margin, allow for the manufacturing conditions of the medium and the apparatus, and perform higher density recording, 0 <Tw−TcS <50K is more preferable, and 0 <Tw−TcS <20K is further preferable. preferable.

  In the magnetic recording medium according to the fourth aspect, the switching layer is preferably an amorphous rare earth (RE) -transition metal (TM) alloy thin film. RE is at least one selected from the group consisting of Tb, Gd, Ho, Nd, and Dy, and TM is at least one selected from the group consisting of Fe, Co, and Ni. Amorphous rare earth-transition metal alloy thin films are widely used in magneto-optical recording media and have the advantage that a perpendicular magnetization film having a squareness ratio of 1 can be easily obtained. Further, the temperature dependence of the saturation magnetization Ms and the coercive force Hc can be controlled by the ratio of RE and TM, and the exchange coupling state (such as the reversal magnetic field of each layer at a certain temperature) between the base layer and the recording layer can be easily controlled. Further, an alloy containing at least Fe and Co as TM has an advantage that the Curie temperature can be arbitrarily set depending on the amount of Fe with respect to Co, and the switching temperature can be easily controlled.

  In the magnetic recording media according to the third and fourth aspects, the base layer is preferably an amorphous rare earth (RE) -transition metal (TM) alloy thin film. In this case, the same effect as described above can be obtained.

  In the magnetic recording medium according to the third aspect, it is preferable that the base layer has a structure having a plurality of magnetic particles and a non-magnetic material wall filling between the magnetic particles. Since such a base layer has the same fine structure as that of the recording layer, advantages such as improvement in crystallinity of the recording layer and ease of control of morphology can be obtained. Depending on the manufacturing method, the crystal grain sizes of the base layer and the recording layer can be made substantially the same. In this case, ON / OFF of the exchange coupling force from the base layer at the magnetization transition position can be switched with a resolution corresponding to one to several particles, thereby enabling higher density recording. .

  FIG. 8 shows a recording operation in the magnetic recording medium having the above structure. This diagram schematically shows the reversal of magnetization in the recording layer 15 and the base layer 13. 51 is a magnetic particle, the arrow in it shows the direction of magnetization, and the magnitude | size of the arrow shows the magnitude | size of magnetization typically. 52 is a nonmagnetic material between magnetic particles. FIG. 48 shows a plan view of the recording layer 15. As shown in this figure, the magnetic particles 51 are dispersed in the nonmagnetic material 52 on the surface of the recording layer 15. As an initial state, the magnetization of all the magnetic particles 51 is set downward. Thermally assisted magnetic recording is performed on this medium to form a magnetization transition at the position indicated by the arrow 53. The medium is moving from right to left in the figure. Therefore, the magnetic particles on the right side of the arrow 53 are inverted. Time advances in the order of (a) → (f) in FIG. 8, and recording is performed.

(A) shows a state where the medium temperature T is room temperature Ta. Here, for example, a case will be described in which recording is performed by continuously irradiating laser light focused on two particles and generating an upward magnetic field on a magnetic head arranged corresponding to the irradiation position of the laser light. In (b), the medium temperature T of the heated portion exceeds the Curie temperature TcB of the base layer 13, but is slightly lower than the recording temperature Tw. Magnetization has disappeared in the base layer 13. In the recording layer 15, the magnetization and the recording coercive force are reduced due to a decrease in Ku, but the magnetization is not lost and recording is not yet possible. (C) is a state immediately after the medium temperature T reaches the recording temperature Tw and the head magnetic field is applied. The Ku of the recording layer 15 is further reduced, and the recording coercive force is lowered to such an extent that it can be recorded with the head magnetic field, so that the magnetization of the recording layer 15 is reversed upward. At this point, a magnetization transition is formed at the position of the arrow 53. If the base layer 13 is not present, thermal fluctuation occurs in the slow cooling process after the laser beam passes, and the magnetization once reversed is reversed again or the magnetization transition is fluctuated. However, as shown in (d), the magnetization of the base layer 13 occurs immediately after recording when the medium temperature T of the heated portion becomes lower than TcB. At this time, the magnetization of the base layer 13 is directed upward by the exchange magnetic field from the recording layer 15. At the same time, Ku ^total and the activation volume Va as the whole film increase rapidly, so that the thermal fluctuation phenomenon does not occur at this point. (E) is a state in which the cooling has further progressed and the medium temperature T is considerably lower than TcB. Since the size of the magnetic crystal grains of the base layer 13 is approximately the same as that of the recording layer 15, the magnetization transition position hardly moves and the magnetization remains stable at room temperature. (F) is the state after recording. As described above, the magnetization transition is formed with a resolution about the size of the magnetic particles in the recording layer 15 and the base layer 13.

  In the above description, TcB <Tw <TcR is described for the sake of convenience. However, as described above, the relationship is not limited to this. Further, the size and arrangement of the magnetic particles of the recording layer 15 and the base layer 13 do not have to have the relationship as shown in FIG.

  In the magnetic recording medium according to the fourth aspect, it is preferable that in addition to the base layer, the switching layer also has a structure having a plurality of magnetic particles and a non-magnetic material wall filling between the magnetic particles. Even in this case, the above-mentioned actions and effects can be obtained.

  Next, a magnetic recording medium according to a fifth aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. The magnetic recording medium according to the fifth aspect has a structure having at least a nonmagnetic substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material, a plurality of magnetic particles, and a nonmagnetic material wall filling between the magnetic particles. The functional layer and the recording layer are laminated so as to exert an exchange coupling interaction under a use environment (usually room temperature).

  FIG. 9 schematically shows a magnetic recording medium, magnetic field applying means, and heating means according to the fifth aspect of the present invention. The magnetic recording medium of FIG. 9 has a structure in which a base layer 62, a functional layer 63 including an antiferromagnetic material or a ferrimagnetic material, a recording layer 64, and a protective layer 65 are formed on a substrate 61. A laser 21 as a heating unit is installed on the substrate side of the magnetic recording medium, and a recording head 22 as a magnetic field applying unit is installed on the magnetic recording medium. The laser 21 may be integrated with the recording head 22 and installed on the magnetic recording medium.

  The functional layer 63 is not particularly limited as long as it exhibits antiferromagnetism or ferrimagnetism. The functional layer 63 may have in-plane magnetic anisotropy, perpendicular magnetic anisotropy, or a mixture of both. The thickness of the functional layer 63 is not particularly limited. However, if the thickness exceeds 1000 nm, it takes a long time to produce, and it is not preferable because characteristic deterioration or peeling due to film stress tends to occur. If the thickness of the functional layer 63 is less than 0.1 nm, it is not preferable because a film cannot be formed substantially.

As the functional layer exhibiting antiferromagnetism, an antiferromagnetic thin film having a Neel temperature higher than room temperature can be used. Specifically, Mn—Ni, Mn—Pd, Mn—Pt, Cr—Pd, Cu—Mn, Au—Mn, Au—Cr, Cr—Mn, Cr—Re, Cr—Ru, Fe—Mn, Co -Mn, Fe-Ni-Mn, Co-Mn-Fe, Ir-Mn, etc. are mentioned. Further, ordered alloys, specifically, AuMn, ZnMn, FeRh, FeRhIr, Au ₂ Mn, Au ₅ Mn ₁₂ , Au ₄ Cr, NiMn, PdMn, PtMn, PtCr, PtMn ₃ , RhMn _{3 and the} like can be used. . In addition to these, Mn ₃ Pt—N, CrMnPt, PdPtMn, NiO, CoO, or the like can also be used.

As the functional layer exhibiting ferrimagnetism, a thin film of ferrimagnetic material can be used. Specifically, Tb-Fe, Tb-Fe-Co, Tb-Co, Gd-Tb-Fe-Co, Gd-Dy-Fe-Co, Nd-Fe-Co, Nd-Tb-Fe-Co, etc. Examples include amorphous rare earth (RE) -transition metal (TM) alloy thin films and ordered alloys such as CrPt ₃ .

  Further, as will be described in detail later, a multilayer film exhibiting antiferromagnetism or ferrimagnetism can be used as the functional layer. For example, a magnetic layer (Co, Ni, Fe or an alloy thereof) and a non-magnetic layer (for example, Ru, Re, Rh, Ir, Tc, Au, Ag, Cu, Mn, Si, Cr or an alloy thereof, or these In which the thickness of the nonmagnetic layer is less than 5 nm, and preferably less than 1 nm. It is known that such a multilayer film acts as an antiferromagnetic material as a whole because an exchange coupling interaction acts in the antiferromagnetic direction between magnetic materials. In addition, it is known that such a multilayer film behaves as a ferrimagnetic material when the thickness and moment of each magnetic layer are different.

  In order to cause the functional layer 63 and the recording layer 64 to have an exchange coupling interaction, in a general medium manufacturing process such as sputtering, a method of continuously forming these layers without breaking the vacuum is used. It is done. Theoretically, even if the functional layer 63 and the recording layer 64 are separated from each other by several nanometers, exchange interaction takes place. Therefore, a nonmagnetic layer or a surface modification layer exists between the functional layer 63 and the recording layer 64. May be. In addition, since the exchange coupling force can be controlled by inserting another magnetic layer between the functional layer 63 and the recording layer 64, a plurality of magnetic layers exist between the functional layer 63 and the recording layer 64. Also good.

  The temperature TcE at which the exchange coupling interaction between the functional layer 63 and the recording layer 64 is eliminated can be examined by the temperature dependence of the hysteresis loop using VSM or the like.

  When the functional layer 63 exhibits ferrimagnetism, the magnetization from the functional layer 63 can be detected by VSM. At a temperature lower than TcE, the hysteresis loop apparently shows a single-stage loop or a multi-stage loop like the magnetic characteristics of the single-layer magnetic layer. In the case where a multi-stage loop is shown, when the minor loop is examined at each stage, the minor loop shifts from the point of the applied magnetic field H = 0 to the direction of the H axis. This shift is due to exchange coupling between the functional layer 63 and the recording layer 64, and the shift amount is the exchange magnetic field Hexg. At a temperature higher than TcE, the hysteresis loop is multistage except when the coercive force of the functional layer 63 and the recording layer 64 is the same. However, unlike the case of the temperature below TcE, no shift in the H-axis direction is observed even when the minor loop is examined. This is because the loop is a simple superposition of each layer. Therefore, when the temperature dependency of the coercive force is examined, a discontinuous change is observed before and after TcE, so that TcE can be estimated.

  When the functional layer 63 exhibits antiferromagnetism, a multistage hysteresis loop does not appear. When the functional layer 63 has a relatively large magnetic anisotropy, a shift in the H-axis direction of the hysteresis loop similar to the above multi-stage occurs at a temperature lower than TcE, and Hexg can be estimated. If Hexg is plotted against temperature, TcE can be estimated by actually measuring or extrapolating the temperature at which Hexg = 0. When the magnetic layer 63 has a small magnetic anisotropy, the functional layer 63 undergoes magnetization reversal at the same time as the recording layer 64 at a temperature equal to or lower than TcE, and a characteristic hysteresis loop cannot be obtained. However, the presence of the functional layer 63 causes magnetization reversal at a temperature lower than TcE by a magnetic field smaller than the coercive force inherent to the recording layer 64, and at a temperature higher than TcE, a magnetic field equal to the coercive force of the recording layer 64 single layer. Magnetization is reversed. Therefore, when the temperature dependency of the coercive force is examined, a discontinuous change is observed before and after TcE, so that TcE can be estimated.

  However, it is not always necessary to know the value of TcE accurately. In the magnetic recording medium according to the fifth aspect, if the value of Hexg is about 1/20 of the value at room temperature, it can be considered that it effectively exceeds TcE. Further, similarly to the evaluation of the Curie temperature Tc of the recording layer 64, TcE may be estimated by extrapolating the result of the low temperature measurement to the high temperature side.

  FIG. 10 shows a recording operation in the magnetic recording medium according to the fifth aspect. This diagram schematically shows the reversal of magnetization in the functional layer 63 and the recording layer 64. 71 in the recording layer 64 is a magnetic particle, the arrow in the recording layer 64 represents the direction of magnetization, and the size of the arrow schematically represents the magnitude of magnetization. Reference numeral 72 denotes a nonmagnetic material between the magnetic particles. In this figure, the functional layer 63 also has a structure composed of magnetic particles and a non-magnetic material that divides the functional layer 63 in the same manner as the recording layer 64. This is for the convenience of explanation. Therefore, the functional layer 63 may have other forms such as a continuous film or a (three-dimensional) granular structure. In this figure, for the sake of simplicity, a perpendicular magnetic recording medium will be described as an example. However, the description here can be applied to an in-plane medium or an intermediate medium between a vertical medium and an in-plane medium.

  In the initial state, the magnetizations of the magnetic particles 71 of the recording layer 64 are all set downward. On the other hand, the magnetization of the functional layer 63 is set in the direction opposite to that of the recording layer 64. These indicate the portions of the spin of the functional layer 63 that are antiferromagnetically coupled to the spin of the recording layer 64. For example, when the functional layer 63 and the recording layer 64 are ferromagnetically coupled and the functional layer 63 exhibits ferrimagnetism, the arrow of the functional layer 63 indicates a minor spin direction (for example, the functional layer 63 is an amorphous rare earth-transition metal alloy). In this case, the spin direction of the rare earth element). In the case of a substance having a structure in which the functional layer 63 and the recording layer 64 are antiferromagnetically coupled, the functional layer 63 exhibits antiferromagnetism, and the spin direction is reversed for each atomic layer in the film thickness direction. This is the spin direction of the atomic layer closest to the recording layer 64.

  Thermally assisted magnetic recording is performed on this medium. That is, a magnetic field having an upward spin is formed by applying a magnetic field upward from the recording head while heating a range indicated by 74 in FIG. The magnetization transition is formed at the position indicated by 73. The medium is moving from right to left in the figure. Therefore, the magnetic particles on the right side of the arrow 73 are inverted. Time advances in the order of (a) → (f) in FIG. 10, and recording is performed.

(A) shows a state where the medium temperature T is room temperature Ta. (B) is a state where the medium temperature T of the heated portion is higher than room temperature but lower than the temperature TcE at which exchange coupling disappears. In this state, the magnetization of both the functional layer 63 and the recording layer 64 decreases due to a decrease in Ku. (C) is a state in which the medium temperature T of the heated portion has reached TcE. In order to show that the exchange coupling between the functional layer 63 and the recording layer 64 has disappeared, it is illustrated that the magnetization of the functional layer 63 has disappeared, but the magnetic moment of the functional layer 63 does not necessarily have to disappear. For example, when the gap between the functional layer 63 and the recording layer 64 is longer than the interatomic distance of the functional layer 63 (or the distance between moments that are antiferromagnetically coupled), the coupling between the moments in the functional layer 63 is The interlayer coupling between the functional layer 63 and the recording layer 64 is broken at a temperature lower than that at which it breaks. In this case, both the functional layer 63 and the recording layer 64 have magnetization (moment), but no exchange coupling interaction occurs between them. In addition, there is some exchange coupling interaction, but there is a state that can be regarded as no interaction in practical use. For example, when the recording magnetic field and the coercive force of the recording layer 64 are on the order of 100 Oe, this degree of exchange coupling force can be ignored if the exchange coupling force Hexg is on the order of 0.1 Oe. (D) shows a state in which the medium temperature T in the heated portion reaches the recording temperature Tw and an upward magnetic field is applied by the recording head. The recording coercivity (generally proportional to Ku) of the recording layer 64 decreases, and as a result, the magnetization of the recording layer 64 reverses upward. At this point, a magnetization transition is formed at a position 73 in FIG. If the functional layer 63 is not present, thermal fluctuation occurs in the slow cooling process after the laser beam passes, and the magnetization once reversed is reversed again or the magnetization transition is fluctuated. However, as shown in (e), the exchange coupling interaction between the functional layer 63 and the recording layer 64 is restored when the medium temperature T of the heated portion becomes lower than TcE immediately after recording. At this time, the magnetization of the functional layer 63 is directed downward by the exchange magnetic field from the recording layer 64. At this time, since the volume Va of the magnetization reversal unit becomes the total volume of the recording layer 64 and the functional layer 63, the thermal fluctuation stability index KuV / k _B T increases rapidly, and the thermal fluctuation phenomenon can be kept low. . Further, the magnetization transition position hardly moves even when the cooling progresses. (F) is the state after recording. As described above, a magnetization transition is formed with a resolution about the size of the magnetic particles of the recording layer 64.

FIG. 11 schematically shows changes in the magnetic anisotropy energy density Ku and the volume reversal unit volume Va with respect to the temperature in the above recording process. In this figure, KuR is the magnetic anisotropy energy density of the recording layer, KuF is the magnetic anisotropy energy density of the functional layer, and KuVa | ^total is the apparent KuVA of the entire medium. As shown in this figure, KuVa | ^total also shows a rapid change due to the discontinuous and rapid change of Va before and after TcE.

With the above operation, the problems of cross erase and magnetic domain disappearance immediately after recording, which are problems in heat-assisted magnetic recording, can be solved. That is, even if there is a temperature rise in the track adjacent to the recording track, for example, as shown by Tnext in FIG. 11, KuVa | ^total is sufficiently large so that recording deterioration due to thermal fluctuation does not occur. Further, KuVa | ^total rapidly increases immediately after recording, so that thermal fluctuation deterioration after recording can be suppressed.

  As a result of performing recording experiments on the exchange coupling bilayer film under various conditions, the present inventors have found that the above-mentioned actions and effects can be obtained if the condition | TcE−Tw | <100K is satisfied. confirmed. Further, in order to provide a wide margin, allow for the manufacturing conditions of the medium and the apparatus, and perform higher density recording, | TcB−Tw | <50K is more preferable, and | TcB−Tw | <20K is more preferable. preferable.

  The magnetic recording process described with reference to FIG. 10 can also occur when the functional layer exhibits ferromagnetism. However, if the total magnetization of the functional layer is large, a large leakage magnetic field is generated, which hinders improvement in recording density, which is not preferable. For example, in the case of in-plane magnetic recording, a large demagnetizing field is generated by the magnetization transition, and the expansion of the transition occurs. In the case of perpendicular magnetic recording, the demagnetizing field at the central portion of the recording magnetic domain is increased, a reverse magnetic domain is generated, and the medium noise is increased.

  Next, a magnetic recording medium according to a sixth aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. A magnetic recording medium according to a sixth aspect has a structure having at least a nonmagnetic substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material, a plurality of magnetic particles, and a nonmagnetic material wall filling between the magnetic particles. The functional layer and the recording layer are laminated so as to exert an exchange coupling interaction under a use environment (usually room temperature). Therefore, the structure of the magnetic recording medium according to the sixth aspect is the same as that of the magnetic recording medium according to the fifth aspect described with reference to FIG. 9, except that the Curie temperature TcR of the recording layer is smaller than TcE. This is different from the magnetic recording medium according to the fifth aspect.

  FIG. 12 shows a recording operation in the magnetic recording medium according to the sixth aspect. The symbols in FIG. 12 represent the same meaning as the symbols in FIG.

(A) shows a state where the medium temperature T is room temperature Ta. (B) is a state where the medium temperature T of the heated portion is higher than room temperature but lower than the recording temperature Tw. In this state, the magnetization of both the functional layer 63 and the recording layer 64 decreases due to a decrease in Ku. (C) is a state in which the medium temperature T of the heated portion is slightly lower than Tw. The Ku of the recording layer 64 is greatly reduced, and the recording layer 64 is large enough to be recorded with a head magnetic field. Even at this time, the exchange coupling between the functional layer 63 and the recording layer 64 exists. (D) shows a state in which the medium temperature T in the heated portion reaches the recording temperature Tw and an upward magnetic field is applied by the recording head. The magnetization of the recording layer 64 is reversed upward, and the magnetization of the exchange-coupled functional layer 63 is also reversed at the same time. At this point, a magnetization transition is formed at a position 73 in FIG. If the functional layer 63 is not present, thermal fluctuation occurs in the slow cooling process after the laser beam passes, and the magnetization once reversed is reversed again or the magnetization transition is fluctuated. However, since the volume Va of the magnetization reversal unit is the total volume of the recording layer 64 and the functional layer 63, the thermal fluctuation stability index KuV / k _B T is sufficiently large, and the thermal fluctuation phenomenon can be suppressed low. Further, the magnetization transition position hardly moves even when the cooling progresses. (E) is the state after recording. As described above, a magnetization transition is formed with a resolution about the size of the magnetic particles of the recording layer 64.

  With the above operation, the problems of cross erase and magnetic domain disappearance immediately after recording, which are problems in the heat-assisted magnetic recording, can be solved as in the magnetic recording apparatus of the fifth aspect.

  The above operations and effects can be obtained only by satisfying the condition of TcR <TcE. Accordingly, there is no particular limitation on the recording temperature Tw, and Tw may be set according to the capability of the recording head. For example, when the writing capability of the head is inferior, Tw may be set near TcR (for example, within 30K), but the thermal fluctuation increases. On the other hand, in the case of a relatively low density magnetic recording apparatus in which the head writing capability is high or Ku at room temperature does not need to be so large, Tw may be set to a temperature several hundred K lower than TcR. May be able to record. In such a case, the influence of thermal fluctuation acceleration is reduced, which is preferable.

  Next, a magnetic recording medium according to a seventh aspect of the present invention, a magnetic recording apparatus using the medium, and a magnetic recording method for the medium will be described. A magnetic recording medium according to a seventh aspect includes at least a nonmagnetic substrate, a functional layer including an antiferromagnetic material or a ferrimagnetic material, a switching layer including a magnetic material, a plurality of magnetic particles, and a gap between the magnetic particles. The functional layer, the switching layer, and the recording layer are laminated so as to exert an exchange coupling interaction under a use environment (usually room temperature).

  FIG. 13 schematically shows a magnetic recording medium, magnetic field applying means, and heating means according to the seventh aspect of the present invention. In the magnetic recording medium of FIG. 13, an underlayer 62, a functional layer 63 including an antiferromagnetic material or a ferrimagnetic material, a switching layer 66 including a magnetic material, a recording layer 64, and a protective layer 65 are formed on a substrate 61. It has a structure. A laser 21 as a heating unit is installed on the substrate side of the magnetic recording medium, and a recording head 22 as a magnetic field applying unit is installed on the magnetic recording medium. The laser 21 may be integrated with the recording head 22 and installed on the magnetic recording medium.

  The requirements to be satisfied by members other than the switching layer 66 are the same as described above. The switching layer 66 is involved only in ON / OFF of the exchange coupling between the functional layer 63 and the recording layer 64. The thickness of the switching layer 66 is not particularly limited, but may be 1 nm or more in order to reliably cut the exchange coupling between the functional layer 63 and the recording layer 64. The upper limit of the thickness is not particularly limited, but it is preferably thinner from the viewpoint of cost, and is 50 nm or less, preferably 10 nm or less, more preferably 5 nm or less.

  FIG. 14 shows a recording operation in the magnetic recording medium according to the seventh aspect. As shown in FIG. 14, a switching layer 66 is sandwiched between the functional layer 63 and the recording layer 64. The other symbols in FIG. 14 have the same meaning as the symbols in FIG.

(A) shows a state where the medium temperature T is room temperature Ta. In this figure, the moment of the switching layer 66 is ferromagnetically coupled to the recording layer 64 and antiferromagnetically coupled to the functional layer 63, but any combination of couplings may be used. If the exchange coupling between the functional layer 63 and the recording layer 64 is maintained, the direction of the magnetic anisotropy of the switching layer 66 is also arbitrary. (B) shows a state in which the medium temperature T in the heated portion is higher than room temperature but lower than the temperature TcE at which exchange coupling between the switching layer 66 and the recording layer 64 is eliminated. In this state, the magnetization of all of the functional layer 63, the switching layer 66, and the recording layer 64 decreases due to a decrease in Ku. (C) is a state in which the medium temperature T of the heated portion has reached TcE. In order to show that the exchange coupling between the switching layer 66 and the recording layer 64 has disappeared, the switching layer 66 is illustrated as having no magnetization, but the magnetic moment of the switching layer 66 does not necessarily have to disappear. For example, if the gap between the switching layer 66 and the recording layer 64 is longer than the interatomic distance of the switching layer 66 (or the distance between the antiferromagnetic coupling moments), the coupling between the moments in the switching layer 66 is The interlayer coupling between the switching layer 66 and the recording layer 64 is broken at a temperature lower than that at which it breaks. In this case, both the switching layer 66 and the recording layer 64 have magnetization (moment), but no exchange coupling interaction occurs between them. In addition, there is some exchange coupling interaction, but there is a state that can be regarded as no interaction in practical use. For example, when the recording magnetic field and the coercive force of the recording layer 64 are on the order of 100 Oe, this degree of exchange coupling force can be ignored if the exchange coupling force Hexg is on the order of 0.1 Oe. (D) shows a state in which the medium temperature T in the heated portion reaches the recording temperature Tw and an upward magnetic field is applied by the recording head. The recording coercivity (generally proportional to Ku) of the recording layer 64 decreases, and as a result, the magnetization of the recording layer 64 reverses upward. At this point, a magnetization transition is formed at a position 73 in FIG. If the switching layer 66 and the functional layer 63 are not provided, thermal fluctuation occurs in the slow cooling process after the laser beam passes, and the magnetization once reversed is re-inverted or the magnetization transition is fluctuated. However, as shown in (e), the exchange coupling interaction between the recording layer 64 and the switching layer 66 and further the functional layer 63 is restored when the medium temperature T of the heated portion becomes lower than TcE immediately after recording. . At this time, due to the exchange magnetic field from the recording layer 64, the magnetization of the switching layer 66 is directed upward, and the magnetization of the functional layer 63 is directed downward. At this time, since the volume Va of the magnetization reversal unit becomes the total volume of the recording layer 64, the switching layer 66, and the functional layer 63, the thermal fluctuation stability index KuV / k _B T increases rapidly, and the thermal fluctuation phenomenon is kept low. be able to. Further, the magnetization transition position hardly moves even when the cooling progresses. (F) is the state after recording. As described above, a magnetization transition is formed with a resolution about the size of the magnetic particles of the recording layer 64.

FIG. 15 schematically shows changes in the magnetic anisotropy energy density Ku and the volume reversal unit volume Va with respect to the temperature in the above recording process. In this figure, KuS is the magnetic anisotropic energy density of the switching layer, and the other symbols are the same as in FIG. As shown in this figure, KuVa | ^total also shows a rapid change due to the discontinuous and rapid change of Va before and after TcE.

Although the layer structure is more complicated in FIG. 13 than in FIG. 9, it is preferable because the magnetic characteristics of the functional layer 63 can be arbitrarily set and the degree of freedom in material selection is increased. In addition, the change width of Va, that is, the change width of KuVa | ^total can be increased, and heat-assisted magnetic recording with higher stability is possible.

With the above operation, the problems of cross erase and magnetic domain disappearance immediately after recording, which are problems in heat-assisted magnetic recording, can be solved. That is, even if there is a temperature rise as shown by Tnext in FIG. 15, for example, in the track adjacent to the recording track, KuVa | ^total is sufficiently large and recording deterioration due to thermal fluctuation does not occur. Further, KuVa | ^total rapidly increases immediately after recording, so that thermal fluctuation deterioration after recording can be suppressed.

  As a result of performing recording experiments on the exchange coupling bilayer film under various conditions, the present inventors have found that the above-mentioned actions and effects can be obtained if the condition | TcE−Tw | <100K is satisfied. confirmed. Also, in order to provide a wide margin, allow for the manufacturing conditions of the medium and the apparatus, and perform higher density recording, | TcB−Tw | <50K is more preferable, and | TcB−Tw | <20K is more preferable. preferable.

  The magnetic recording process described with reference to FIG. 14 can also occur when the functional layer exhibits ferromagnetism. However, if the total magnetization of the functional layer is large, a large leakage magnetic field is generated, which hinders improvement in recording density, which is not preferable. For example, in the case of in-plane magnetic recording, a large demagnetizing field is generated by the magnetization transition, and the expansion of the transition occurs. In the case of perpendicular magnetic recording, the demagnetizing field at the central portion of the recording magnetic domain is increased, a reverse magnetic domain is generated, and the medium noise is increased.

  As described above, it is known that anti-ferromagnetic coupling occurs between magnetic layers in a multilayer film in which magnetic layers are laminated with an interval of several nanometers or less. In the magnetic recording media of the fifth to seventh aspects, Such a multilayer film can be employed as the functional layer. The magnetic layer may be a continuous film of a magnetic material or a composite film of a magnetic material and other materials. When a magnetic layer having a large magnetic anisotropy is used, an antiferromagnetic film having a large anisotropy is obtained, and when a magnetic layer having a small magnetic anisotropy is used, an antiferromagnetic film having a small anisotropy is obtained.

  In the recording process described with reference to FIGS. 10, 12, and 14, after the recording layer is inverted, the functional layer is also inverted accordingly. Therefore, it can be said that a smaller reversal magnetic field (coercivity) of the functional layer is preferable. However, even a functional layer having a large magnetic anisotropy and a large anisotropic magnetic field Hk (generally proportional to the coercive force Hc) can be used for the reasons described below.

Assume that the two layers A and B are exchange-coupled. Here, t _A : film thickness of the A layer, Ms _A : saturation magnetization of the A layer, Hc _A : coercivity of the A layer, t _B : film thickness of the B layer, Ms _B : saturation magnetization of the B layer, Hc _B : B layer coercive force, σ _w : Interfacial domain wall energy density. Further, it is assumed that Hc _A > Hc _B , that is, the A layer has a larger magnetic anisotropy than the B layer. At this time, the reversal magnetic fields Hr _A and Hr _B of the A layer and the B layer are respectively expressed by the following equations.

Hr _A = Hc _A -σ _w / 2 / Ms _A / t _A
Hr _B = Hc _B + σ _w / 2 / Ms _B / t _B
Hr _A = Hr _B (when an interface domain wall cannot be formed).

That is, the reversal magnetic field is a value distributed between Hc _A and Hc _{B at} a ratio determined by the magnitude relationship between Ms _A t _A and Ms _B t _B. Therefore, even a functional film having large anisotropy can exhibit desired properties by adjusting the value of Mst in consideration of the recording layer.

  The magnetic layer included in the multilayer film is made of Co, Ni, Fe, or an alloy thereof, and may be the same or different. A multilayer film including magnetic layers having different magnetization values has a difference magnetization as a whole and exhibits ferrimagnetism. The thickness of the magnetic layer is not particularly limited, but it is not preferable to make it thinner than 0.2 nm because it becomes difficult to form a film. On the other hand, if the thickness of the magnetic layer exceeds 100 nm, the medium cost increases, which is not preferable.

  The nonmagnetic layer included in the multilayer film is not particularly limited, but at least selected from Ru, Re, Rh, Ir, Tc, Au, Ag, Cu, Mn, Si, Cr, or an alloy thereof, or an oxide thereof. One type is preferably used. The thickness of the nonmagnetic layer is an important parameter strongly related to whether or not the multilayer film causes antiferromagnetic coupling and the strength of coupling. However, since the antiferromagnetic coupling in the multilayer film is also affected by the material, the microstructure, the film formation state, and the state of the ferromagnetic layer, the preferred thickness of the nonmagnetic layer cannot be clearly defined. If the thickness of the nonmagnetic layer is greater than 5 nm, the coupling between the magnetic layers becomes extremely weak, which is not practical. The thickness of the nonmagnetic layer is preferably thinner than 1 nm.

An example of a functional layer having a multilayer structure will be described with reference to FIGS.
A functional layer 83 shown in FIG. 16 is composed of one unit of a magnetic layer 81 and a nonmagnetic layer 82, and a recording layer 64 is formed on the functional layer 83. In the case of FIG. 16, by appropriately designing the nonmagnetic layer 82, the magnetic layer 81 and the recording layer 64 can be antiferromagnetically coupled. In this case, the functional layer 83 is combined with a part of the recording layer 64 and exhibits ferrimagnetism.

  A functional layer 84 shown in FIG. 17 is a unit in which a unit of a magnetic layer 81 and a nonmagnetic layer 82 (corresponding to the functional layer 83 in FIG. 16) is repeatedly laminated a plurality of times. Is formed. In the case of FIG. 17, the functional layer 84 itself in which the units of the magnetic layer 81 and the nonmagnetic layer 82 are laminated a plurality of times can be regarded as an antiferromagnetic material or a ferrimagnetic material. The number of lamination of the units of the magnetic layer 81 and the nonmagnetic layer 82 is not particularly limited, but if it exceeds 30 times, only the manufacturing cost is increased.

  The functional layer 83 shown in FIG. 18 is composed of one unit of a magnetic layer 81 and a nonmagnetic layer 82. On the functional layer 85, the recording layer 64 is formed without the nonmagnetic layer 82 with the same magnetic layer 81 as that forming the unit interposed therebetween. In the case of FIG. 18, since the recording layer 64 and the magnetic layer 81 in contact therewith are ferromagnetically coupled, the magnetic layer 81 can be regarded as a part of the recording layer 64. In this case, the coupling between the functional layer 83 and the recording layer 64 is a coupling between the magnetic layers 81 forming the stacked unit. Therefore, although the number of layers is increased as compared with the case of FIG. 16, there is an advantage that the design and manufacturing conditions are easier than those of FIG.

  A functional layer 84 shown in FIG. 19 is formed by repeatedly laminating units of a magnetic layer 81 and a nonmagnetic layer 82, and a recording layer 64 is formed on the functional layer 84 with the magnetic layer 81 interposed therebetween. . In the case of FIG. 19, the requirements to be satisfied by the functional layer 84 are the same as those in the case of FIG.

  The functional layer shown in FIG. 20 includes a first functional layer 84 in which laminated units of a magnetic layer 81 and a nonmagnetic layer 82 are repeatedly laminated, and a second functional layer 91 including an antiferromagnetic material or a ferrimagnetic material. The first functional layer 84 and the second functional layer 91 are stacked so as to exert exchange coupling at room temperature. In FIG. 20, the second functional layer 91, the first functional layer 84, and the recording layer 64 are formed in this order. However, the first functional layer 84, the second functional layer 91, and the recording layer 64 may be formed in this order. .

  As described above, when it is desired to increase the magnetic anisotropy energy in the functional layer having a multilayer structure, it is conceivable to use a magnetic layer having a large anisotropy. However, as shown in FIG. Exchange coupling with the second functional layer 91 may be used. The requirements to be satisfied by the antiferromagnetic material forming the second functional layer 91 are the same as the requirements described in relation to the functional layer. For example, an antiferromagnetic material such as NiO has anisotropy in a certain crystal axis direction. Therefore, if the crystal axis can be oriented in an arbitrary direction, a functional layer having an anisotropic axis in that direction can be obtained.

In the magnetic recording apparatus that performs thermally-assisted magnetic recording according to each of the above aspects, the magnetic field is applied under the condition that the distance between the magnetic recording medium and the means for applying the magnetic field to the magnetic recording medium is less than 100 nm. The magnetic recording apparatus according to the present invention has an advantage over the conventional HDD apparatus when it has a high linear density, for example, a recording density of 100 Gb / in ² . In order to obtain such a resolution of density, the distance from the recording medium is preferably smaller than 100 nm. More preferably, the distance is 50 nm or less, more preferably 30 nm or less.

  Next, a magnetic recording medium according to an eighth aspect of the present invention and a magnetic recording apparatus using the medium will be described.

  A magnetic recording medium according to an eighth aspect includes at least a non-magnetic substrate, a functional layer containing a magnetic material, a plurality of magnetic particles formed on the functional layer, and a non-magnetic material wall filling between the magnetic particles. And a recording layer having a structure.

  The recording layer has a multilayer structure in which a magnetic layer and a nonmagnetic layer (including at least one element selected from the group consisting of Pt and Pd and having a thickness of 2 nm or less) are alternately stacked. But you can.

  FIG. 21 shows a magnetic recording medium and magnetic field applying means according to the eighth aspect. The magnetic recording medium in FIG. 21 has a structure in which a base layer 102, a functional layer 103 including a magnetic material, a recording layer 104, and a protective layer 105 are formed on a substrate 101. A recording head 22 as a magnetic field applying unit is installed on the magnetic recording medium.

The functional layer 103 and the recording layer 104 are laminated so as to exert a ferromagnetic exchange interaction under the use environment. Further, the magnetic anisotropy energy density Ku _RL of the recording layer 104 is 5 × 10 ⁶ erg / cc or more, which is larger than the magnetic anisotropy energy density Ku _FL of the functional layer 103.

  The functional layer 103 may be ferromagnetic, antiferromagnetic, or ferrimagnetic. The functional layer 63 may have in-plane magnetic anisotropy, perpendicular magnetic anisotropy, or a mixture of both. The thickness of the functional layer 103 is not particularly limited, but if it exceeds 1000 nm, it takes a long time to produce, and it is not preferable because characteristic deterioration and peeling due to film stress are likely to occur. An attempt to make the thickness of the functional layer 103 less than 0.1 nm is not preferable because a film cannot be formed substantially.

  As the functional layer exhibiting ferromagnetism, the same layer as the recording layer can be used. However, when the functional layer is not used for information recording, the magnitude of magnetic anisotropy and magnetization may be smaller than that of the recording layer, and the range of selection of materials is large. Further, the functional layer exhibiting ferromagnetism may not have a structure composed of magnetic particles and a nonmagnetic material surrounding the magnetic particles.

  As the functional layer exhibiting antiferromagnetism, an antiferromagnetic thin film having a Neel temperature higher than room temperature can be used. As the functional layer exhibiting ferrimagnetism, a thin film of ferrimagnetic material can be used. A multilayer film exhibiting antiferromagnetism or ferrimagnetism can also be used as the functional layer. Examples of the material of the functional layer exhibiting antiferromagnetism or ferrimagnetism are the same as those described in relation to the functional layer 63 of the magnetic recording medium according to the fifth aspect shown in FIG.

  In the magnetic recording medium of the eighth aspect, the functional layer 103 and the recording layer 104 are laminated so as to exert a ferromagnetic exchange interaction under the use environment. In order to make the functional layer 103 and the recording layer 104 have an exchange coupling interaction, a method of continuously forming these layers without breaking the vacuum is used in a general medium manufacturing process such as sputtering. It is done.

  A substantial nonmagnetic layer may exist between the functional layer and the recording layer as long as the thickness is 5 nm or less. A substantially non-magnetic material is a material that is non-magnetic when present alone, but also exhibits a property that magnetism is induced in the interface or film when laminated with the magnetic material (for example, Cr, Mn, Pd , Pt, etc.). In the case where the material is not a substantially non-magnetic material, the gap is not particularly limited as long as the ferromagnetic exchange interaction has the effect of the present invention. The exchange coupling force can also be controlled by inserting another magnetic layer between the functional layer and the recording layer. Therefore, a plurality of magnetic layers and nonmagnetic layers may exist between the functional layer and the recording layer. The gap between the functional layer and the recording layer need not be in the form of a film, but may be a defect, a void, a partial oxide film / particle, or a surface modified portion.

Hereinafter, the magnetic recording medium according to the eighth aspect will be described in more detail.
FIG. 22 schematically shows the direction of the moment (spin) S by extracting only the functional layer 103 and the recording layer 104 of FIG. Here, in order to facilitate understanding, a case where the functional layer 103 and the recording layer 104 are perpendicular magnetization films is shown. The ferromagnetic exchange coupling interaction means an exchange coupling interaction that has the lowest energy and becomes stable when the spin directions are the same as shown in FIG.

  Many studies have already been made on the magnetization reversal (hysteresis loop) of the exchange-coupled bilayer film as shown in FIG. For example, Japanese Journal of Applied Physics, Vol.20, No.11, 1981, pp. In 2089-2095, magnetization reversal is analyzed for two layers of exchange-coupled perpendicular magnetization films. This document discloses that the shape of the hysteresis loop changes according to the exchange coupling energy surface density σ and the magnetic characteristics of each layer.

Here, consider an exchange coupling bilayer film composed of two layers (layer 1 and layer 2) shown in FIG. As shown in this figure, the magnetic anisotropy energy density, saturation magnetization, and film thickness of each layer are expressed as Ku ₁ , Ms ₁ , t ₁ for layer ₁ and Ku ₂ , Ms ₂ , t ₂ for layer ₂ , respectively. . In the magnetic recording medium of the eighth aspect, Ku ₁ > Ku ₂ is satisfied.

  Now, assuming that Ms of each layer is the same, in an ideal system, the coercive force Hc = 2 Ku · Ms is larger in the layer 1 than in the layer 2. At this time, the exchange coupling energy has the effect of aligning the spins of each layer. The effect is equivalent to that an exchange magnetic field Hw = σ / 2Mst is applied to each layer. Here, if Hc of each layer is larger than Hw, a state (metastable state) in which the spins of both layers face each other and become stable in energy occurs.

Such a medium exhibits a hysteresis loop as shown in FIG. When the hysteresis loop as shown in FIG. 24 is obtained, according to the theory of the exchange-coupled bilayer film disclosed above, the magnetization change points H _R1 and H _R2 are analyzed according to the following equations (1) and (2). Can be obtained.
H _R1 = Hc ₁ −Hw ₁ = Hc ₁ −σ / 2Ms ₁ t ₁ (1)
H _R2 = Hc ₂ + Hw ₂ = Hc ₂ + σ / 2Ms ₂ t ₂ (2)
That is, the layer 1 having a large coercive force is subjected to an action of lowering the coercive force than the layer 2 having a small coercive force, and conversely, the layer 2 is subjected to an action of increasing the coercive force from the layer 1 via σ.

On the other hand, when Hc ₁ <Hw ₁ , the layer 2 also reverses simultaneously with the layer 2 because the exchange force is large when the layer 2 attempts to reverse the magnetization with a magnetic field corresponding to H _R2 in FIG. Such a medium exhibits a hysteresis loop similar to that of a normal single layer film as shown in FIG. In this case, the reversal magnetic field H _R3 is obtained by the following equation (3).
H _R3 = (Ms ₂ t ₂ Hc ₂ + Ms ₁ t ₁ Hc ₁ ) / (Ms ₂ t ₂ + Ms ₁ t ₁ ) (3)
This reversal magnetic field H _R3 has an intermediate value between Hc ₁ and Hc ₂ . That is, the coercivity of the two-layer film in which the high Ku layer and the low Ku layer are ferromagnetically exchange-coupled is lower than the coercivity of the high Ku single film.

  Using the above theory, the present inventors reduced the coercive force to a level that can be recorded by a current magnetic head by ferromagnetically coupling a high Ku layer having high thermal fluctuation resistance with a low Ku layer. Found that there is a possibility. Although the above theory itself is well known, the idea of applying this theory to the problem of thermal fluctuation of a magnetic recording medium has not been known so far. However, considering from the common sense of conventional magnetic recording media, it is expected that when the total coercivity of the exchange-coupled bilayer film is lowered, the magnetic anisotropy energy against thermal fluctuation is also lowered.

  On the other hand, as a result of repeated investigations by the present inventors, in the exchange-coupled bilayer film, the magnetic anisotropy energy as resistance to thermal fluctuation, that is, the physical quantity represented by KuV in the single-layer magnetic film is decreased. Rather, it was found to increase. In addition, the inventors have found that the effect becomes larger particularly in the situation where the layer 1 and the layer 2 are simultaneously reversed, thereby completing the present invention. Hereinafter, this point will be described in more detail.

Here, the energy potential in the layer 1 in the exchange coupling bilayer film shown in FIG. 23 is considered. Here, a perpendicular magnetization film is assumed. The depth of this energy potential corresponds to the energy that the magnetic recording medium having the recording layer 1 as the recording layer opposes the thermal fluctuation energy k _B T. At the “top” of the energy potential valley, the energy is highest immediately before the layer 1 is inverted. At this time, as shown in FIG. 26, only the spin of the layer 1 is directed in the film surface direction by an external force. When the spin of the layer 1 is directed in the film surface direction, the spin of the layer 2 is also rotated by an angle θ by exchange coupling. This angle θ is obtained as follows.

The total energy (area density) σ ₂ of the layer 2 is expressed by the following equation (4).

σ ₂ = t ₂ Ku ₂ sin ² θ−σ cos (90−θ) (4)
Find θ that minimizes σ ₂ . Solving dσ ₂ / dθ = 0,
sin θ = σ / (2t ₂ Ku ₂ ) σ / (2t ₂ Ku ₂ ) <1 or θ = 90 ° σ / (2t ₂ Ku ₂ )> 1. Therefore, the total energy of layer 2 is σ / (2t2Ku2) <1,
σ ₂ = −σ ² / (4t ₂ Ku ₂ ) (5)
It is. On the other hand, in the lowest energy state shown in FIG. 22, the total energy of the layer 2 is calculated by substituting θ = 0 into the equation (4). Σ ₂ = −σ (6)
It becomes. The value of ((5)-(6)) is the potential necessary for transition from the state of FIG. 22 to the state of FIG. Therefore, the potential of layer 2 is σ−σ ² / (4t ₂ Ku ₂ ) (7)
It becomes.

Since the potential σ _ECDL of the entire bilayer film is the sum of the equation (7) and the potential t ₁ Ku ₁ due to the magnetic anisotropy energy of the layer 1,
σ _ECDL = t ₁ Ku ₁ + σ−σ ² / (4t ₂ Ku ₂ ) (8)
It becomes. On the other hand, when σ / (2t ₂ Ku ₂ )> 1, the potential of the entire bilayer film is substituted by θ = 90 °,
σ _ECDL = t ₁ Ku ₁ + t ₂ Ku ₂ (9)
It becomes.

In the magnetic recording medium, the magnetic film is composed of cylindrical magnetic particles extending in the film thickness direction. In this case, the energy surface density is the amount of energy when multiplied by the bottom area s of the magnetic particles. That is, σ _ECDL × s is a physical quantity that opposes thermal fluctuation energy corresponding to KuV.

Therefore, when the layer 1 and the layer 2 are reversed at the same time, Ku ₁ V ₁ + Ku ₂ V ₂ , that is, the sum of KuV of the two layers becomes the thermal fluctuation resistance as expressed by the equation (9). In addition, in a medium showing a two-stage hysteresis loop as shown in FIG. 24, Ku ₁ V ₁ + (σ−σ ² / (4t ₂ Ku ₂ )) s is heat fluctuation resistant. In any case, the amount of energy is larger than Ku ₁ V _{1, and} it can be seen that the thermal coupling resistance is improved in the exchange coupling bilayer film. In addition, it can be seen that the thermal fluctuation resistance is further improved when the layer 1 and the layer 2 are simultaneously reversed. The above knowledge has not been known at all and has been clarified for the first time by the present inventors.

The magnetic recording medium according to the eighth aspect of the present invention uses a recording layer having a magnetic anisotropy energy density Ku _RL of 5 × 10 ⁶ erg / cc or more and a magnetic anisotropy energy density Ku _FL smaller than Ku _RL. And ferromagnetic exchange coupling with a functional layer having Although the recording layer having the high magnetic anisotropy energy density Ku _RL as described above has a sufficient resistance to thermal fluctuation, recording with the current magnetic head is difficult in the case of the recording layer alone. However, by using a two-layer film in which the recording layer and the functional layer are ferromagnetically exchange-coupled, the overall coercive force can be reduced, and a magnetic recording medium that can be recorded with an existing magnetic head can be obtained. Here, if Ku _FL of the functional layer is larger than Ku _{RL of the} recording layer, the entire coercive force does not decrease, so that recording by the current magnetic head cannot be performed.

  The difference between KuFL and KuRL is not particularly limited. If the difference between the two is small, the overall Hc reduction effect is small, but a large KuV can be obtained even if the thickness of the functional layer is reduced. On the other hand, if the difference between the two is large, the effect of reducing Hc is large, but it is difficult to obtain the condition for simultaneous inversion unless the thickness of the functional layer is increased. Therefore, the difference between the two is determined according to the system using the medium. In general use, the value of KuRL / KuFL is preferably 3 or more, more preferably 5 or more, and even more preferably 10 or more.

  In the magnetic recording medium according to the eighth aspect of the present invention, the recording layer has a structure in which fine magnetic particles are divided by a non-magnetic material, and high-density recording is performed so that the magnetic particles do not interact with each other. It is possible. On the other hand, the form of the functional layer is not particularly limited. When the functional layer has a multi-particle structure having the same morphology as the recording layer, recording can be performed using the functional layer as a part of the recording layer, and there is an advantage that a large output can be obtained. Further, there is an advantage that the crystallinity and fine structure of the recording layer can be easily controlled when forming the underlayer, the functional layer, and the recording layer.

  When the functional layer has a multi-particle structure but the size of the magnetic particles is smaller than the recording layer, the functional layer has a multi-particle structure but the gap between the magnetic particles is not large enough to completely block exchange coupling, or the function When the layer is a magnetic thin film that is magnetically continuous in the plane, a domain wall is formed in the functional layer, a magnetic discontinuity occurs at the interface between the functional layer and the recording layer, or the function A domain wall is formed at the interface between the recording layer and the recording layer. In this case, the magnetic stability (resistance to thermal fluctuation) is reduced. However, the degree of decrease in thermal fluctuation resistance at this time depends on Ku of the functional layer. Since the Ku of the recording layer is several times to 10 times the Ku of the functional layer, the influence of the Ku of the functional layer is small in the entire magnetic recording medium. Conversely, the structural continuity between the functional layer and the recording layer may provide an advantage of increasing the effect of increasing the activation volume V of the recording layer. Therefore, the microstructure of the functional layer is determined depending on the requirements of the system using the medium.

  Next, the results of examining the coercivity of the exchange-coupled bilayer film by simulation will be described. The above equations (1) to (3) are approximate equations that do not consider the moment gradient in each layer. Further, equation (4) is a value obtained by simply taking the difference in energy before and after inversion, and is an approximate equation when the exchange coupling energy is infinite. A realistic solution is to adopt a so-called Energy Minimum method in which the moments of the recording layer and the functional layer are rotated little by little to find a condition where the energy is most stable.

  A magnetic recording medium having the structure shown in FIG. The recording layer and the functional layer are ferromagnetic exchange coupled. For example, when the recording layer and the functional layer are perpendicular magnetization films, the spin directions of the respective layers are as shown in FIG. As shown in FIG. 26, a reversal magnetic field was calculated by applying a magnetic field in the reversal direction to the two-layer film that was ferromagnetically exchange-coupled and calculating the angle θ at which the energy was minimized. FIG. 27 shows the result.

In FIG. 27, the upper limit of Hc is represented by a broken line of Hc _RL -Hw _RL , and the lower limit of Hc is represented by a broken line of Hc _FL + Hw _FL . Ku _RL : Ku of the recording layer, Ku _FL : Ku of the functional layer, Hc _RL : Hc of the recording layer, Hc _FL : Hc of the functional layer, Hw _RL : Exchange magnetic field felt by the recording layer, Hw _FL : of the functional layer Feeling exchange magnetic field, σ: exchange coupling energy (surface density dimension), H _R3 : reversal magnetic field calculated by equation (3), t _RL : film thickness of recording layer, t _FL : film thickness of functional layer. The parameters used for the calculation are Ku _RL : 10 ⁷ erg / cc, Ku _FL : 10 ⁶ erg / cc, t _RL : 10 nm, Ms (Ms _RL ) of the recording layer: 500 emu / cc, Ms of the functional layer (Ms _FL ): 500 emu / cc (hence Hc _RL : 40 kOe, Hc _FL : 4 kOe), σ: 5 erg / cm ² . The white circle plot is the reversal magnetic field of the recording layer portion, the black circle is the reversal magnetic field of the functional layer portion, and the region where both overlap each other means that the two layers are simultaneously reversed.

As is clear from FIG. 27, it was found that the exchange coupling double-layer film is inverted by a magnetic field smaller than the reversal magnetic field H _R3 obtained by the equation (3). This is an effect that cannot be predicted from the conventional theory. In the conventional theory, in the large t _FL shows a two-stage loop divided into the Hc _RL -hw _RL and Hc _RL + Hw _RL, and Hc _RL = Hw _RL indicated by the vertical solid line in the figure to reduce the t _FL It is expected that a reversal magnetic field H _R3 curve will be obtained when the film thickness _reaches a certain value. However, the simulation results differ from the above prediction, and the transition to simultaneous inversion occurs in a region where t _FL is thinner than the thickness where Hc _RL = Hw _RL, and the transition from the two-stage loop to the simultaneous inversion is slow. . This is probably due to energy relaxation due to the moment tilt of each layer. Such behavior is first revealed by simulation. FIG. 27 shows that the coercivity of the entire exchange coupling bilayer film can be reduced to about 16 kOe even though the recording layer has a high Ku (coercivity: 40 kOe) of 10 ⁷ erg / cc.

Further, FIG. 28 to FIG. 33 showing the results of the same calculation by changing the magnetic characteristics of each layer are shown. Also in these figures, the upper limit of Hc is represented by a broken line Hc _RL -Hw _RL , and the lower limit of Hc is represented by a broken line Hc _FL + Hw _FL .

  FIG. 28 shows the result when the saturation magnetization of the functional layer is changed. As is apparent from FIG. 28, it can be seen that increasing the saturation magnetization of the functional layer can reduce the thickness of the functional layer that can provide the effect of reducing the coercive force, and can further reduce the coercive force. However, as the saturation magnetization increases, the demagnetizing field increases, which causes problems such as a decrease in recording resolution in the case of an in-plane medium and an increase in noise due to the generation of a reverse magnetic domain in the case of a perpendicular medium. Therefore, the value of the saturation magnetization of the functional layer is determined by system requirements.

  FIG. 29 shows the result when the saturation magnetization of the recording layer is changed. As can be seen from FIG. 29, the coercive force reduction effect increases as the saturation magnetization of the recording layer increases. However, since the film thickness of the functional layer that can obtain the coercive force reduction effect is increased, there is a problem that the manufacturing cost is increased. Therefore, the value of the saturation magnetization of the recording layer is determined by system requirements.

  FIG. 30 shows the result when the magnetic layer is changed in magnetic anisotropy energy. As is clear from FIG. 30, it can be seen that the smaller the magnetic anisotropy energy density of the functional layer, the greater the coercive force reduction effect. It can also be seen that the thickness of the functional layer that provides the coercive force reduction effect does not change much. However, since the overall thermal fluctuation resistance KuV is not so large, there is a problem that the degree of improvement in thermal fluctuation resistance is small. Therefore, how much value the magnetic anisotropy energy of the functional layer is determined by the requirements of the system.

  FIG. 31 shows the results when the magnetic anisotropic energy density of the recording layer is changed. As is clear from FIG. 31, the coercive force is reduced regardless of the magnetic anisotropy energy of the recording layer. Therefore, it is possible to select a recording layer having the largest Ku and the highest thermal stability in accordance with the specification value required by the system. Further, there is an advantage that the larger the magnetic anisotropy energy density of the recording layer, the smaller the thickness of the functional layer that can obtain the coercive force reduction effect. However, since the overall coercive force increases, the Ku of the recording layer cannot be increased without limitation. Therefore, the value of the magnetic anisotropy energy density of the recording layer is determined by system requirements.

  FIG. 32 shows the results when the exchange coupling energy surface density is changed. As is apparent from FIG. 32, it can be seen that the effect of reducing the coercive force increases as the exchange coupling energy surface density increases. However, since the film thickness of the functional layer capable of obtaining the coercive force reduction effect is increased, there is a problem that the manufacturing cost is increased. Therefore, the value of the exchange coupling energy surface density is determined by system requirements.

  FIG. 33 shows the result when the film thickness of the recording layer is changed. As is apparent from FIG. 33, it can be seen that the smaller the film thickness of the recording layer, the greater the coercivity reducing effect. However, since the film thickness of the functional layer capable of obtaining the coercive force reduction effect is increased, there is a problem that the manufacturing cost is increased. Therefore, how much the film thickness of the recording layer is determined is determined by system requirements.

In the above calculation, the coercive force reduction effect was obtained only when Ku of the functional layer was smaller than Ku of the recording layer. In order to obtain the effect of reducing the coercive force in this way, it is necessary that the magnetic anisotropic energy density Ku _FL of the functional layer is smaller than the magnetic anisotropic energy density Ku _{RL of the} recording layer.

The knowledge obtained above may be equivalent to the result of a magnetic layer having a film thickness of only t _RL + t _FL by averaging Ku of the recording layer and Ku of the functional layer. In order to verify this, detailed analysis is necessary, and analysis is impossible at present. However, even with this assumption, the magnetic recording medium of the eighth aspect has the advantages described below.

  (1) It is generally difficult to obtain a material having an arbitrary Ku. This is because the magnetic recording medium needs to control the grain size and crystallinity, but these controls strongly depend on the material. On the other hand, the magnetic recording medium of the eighth aspect uses a high Ku material and a low Ku material that can reliably control the magnetic characteristics, and controls the film thickness, exchange coupling energy, and saturation magnetization of each layer (for example, by dilution with an additive element of the material). Arbitrary KuV and reversal magnetic field can be obtained by adjusting parameters such as

  (2) In general, in a multi-particle magnetic recording medium, the particle size tends to increase as the film thickness of the same material increases. This is thought to be due to stress relaxation or stress generation due to an increase in film thickness. On the other hand, in the magnetic recording medium of the eighth aspect, since the recording layer is formed before the grains become coarse as the functional layer grows, stress relaxation or stress generation can be suppressed. The coarsening of the particle size can be prevented. This effect can be increased by laminating the functional layer / recording layer a plurality of times and effectively reducing the thickness of each layer.

  In the above simulation, the demagnetizing field is not considered. This means that the simulation assumes an in-plane medium, but the simulation can also be applied to a vertical medium. When the demagnetizing field coefficient is N, the demagnetizing field is expressed by N × 4Ms. In the case of a perpendicular medium, N = 1 if it is a continuous magnetic film, but in the case of a practical multi-particle medium, it is difficult to determine the value of N. However, in any case, since the demagnetizing field acts in the direction of reducing Ku, the above simulation is appropriate for a perpendicular medium if Ku is taken into consideration including the demagnetizing field. In general, when evaluating Ku of a medium, Ku is obtained in a form including a demagnetizing field unique to the medium. For this reason, the same effect can be obtained by using effective Ku that is practically obtained instead of pure Ku as Ku in the above simulation.

From the results of FIGS. 28 to 33, the preferable ranges of the respective parameters can be estimated as follows. Here, the basic parameters are Ku _RL = 10 ⁷ erg / cc, Ku _FL = 10 ⁶ erg / cc, t _RL = 10 nm, Ms _RL = 500 emu / cc, Ms _FL = 500 emu / cc, σ _FL = 5 erg / cc cm ² . For example, consider the case where Ms _RL , Ku _RL , σ _FL or t _RL is adjusted. At this time, if the thickness t _{FL of the} functional layer is set between the white circle plot and the black circle plot shown in FIGS. 34 (A) to (D), good characteristics can be obtained. The range of t _FL shown in these figures cannot be predicted by the conventional theory, and a large coercive force reduction effect can be obtained. Needless to say, the Ku at this time may be an effective Ku considering the demagnetizing field, as described above. Of course, if the influence of the demagnetizing field is small in terms of design or system, an intrinsic Ku value may be used.

In the magnetic recording medium according to the eighth aspect, the recording layer may be made of a magnetic artificial lattice. The magnetic artificial lattice is obtained by laminating a ferromagnetic thin film such as Co several times to several tens times through a nonmagnetic layer (Pd or Pt), and obtains a magnetic anisotropy energy of 10 ⁷ erg / cc or more. And the anisotropic axis is known to be perpendicular to the film surface. By using this material as the recording layer, the same effect as that of the magnetic recording medium according to the eighth aspect can be obtained. The condition for obtaining a magnetic anisotropy energy of 10 ⁷ erg / cc or more is that the nonmagnetic layer is Pt, Pd or an alloy containing these elements as a main component and the thickness is 2 nm or less. .

  In the magnetic recording medium according to the eighth aspect, when the functional layer and the recording layer are perpendicularly magnetized films, if they are laminated so as to cause exchange coupling interaction, the anisotropic axes are aligned, so that exchange coupling energy is obtained. Can be increased. In the magnetic recording medium according to the eighth aspect, the higher the exchange coupling energy, the greater the coercive force reduction effect. Therefore, a higher Ku material can be used for the recording layer. Note that it is not necessary that both the recording layer and the functional layer be a complete perpendicular magnetization film having no in-plane hysteresis. Of course, a perfect perpendicular magnetization film is preferable, but the effect of increasing the exchange coupling energy can be obtained under the condition that the residual magnetization is substantially also in the perpendicular component.

  In the magnetic recording medium of the eighth aspect, a multilayer film in which recording layers and functional layers are alternately laminated may be used. In particular, if there is a functional layer / recording layer / functional layer region, the exchange magnetic field acting on the recording layer is doubled as compared with the case of the two-layer film. This is equivalent to a two-fold increase in exchange coupling energy, and can increase the effect of reducing Hc of the high Ku material. Note that a plurality of such regions may exist in the magnetic recording medium.

  In the magnetic recording medium according to the eighth aspect, when the functional layer includes a plurality of magnetic layers and the plurality of magnetic layers have a portion laminated so as to be exchange-coupled in the antiferromagnetic direction, the effective The saturation magnetization can be reduced and, in some cases, completely zero. In this case, the amount of magnetization of the entire magnetic recording medium can be reduced. For this reason, in the case of an in-plane medium, a reduction in recording resolution due to a demagnetizing field can be suppressed. In the case of a perpendicular medium, an effect of suppressing an increase in medium noise due to the occurrence of a reverse magnetic domain can be obtained. As such a functional layer, those having the materials and structures described above can be used.

  In the magnetic recording medium of the eighth aspect, a magnetic material selected from the group consisting of Fe—Pt, Fe—Pd, Co—Pt, and Co—Pd, to which 50 at% or less of Cu is added, is used as the recording layer. It is preferable to use a magnetic material selected from the group consisting of Fe—Pt, Fe—Pd, Co—Pt, and Co—Pd, to which no functional layer or 50 at% or less of Ag and / or Al is added as the functional layer. .

  Ordered phase alloys such as Fe—Pt, Fe—Pd, Co—Pt, and Co—Pd are high Ku magnetic materials. In these ordered phase alloys, the highest Ku is obtained when the composition ratio of the magnetic metal and the noble metal is approximately 1: 1, but high Ku is obtained even in the range of 1: 3 to 3: 1. These ordered phases cannot be obtained as-deposited by sputtering, but are formed by annealing. Generally, the annealing temperature at this time is set to 500 to 600 ° C., but it has been found that the annealing temperature can be reduced by using an appropriate additive element. The most effective additive element for reducing the annealing temperature is Cu, and additive elements such as Ag and Al cannot provide the effect of reducing the annealing temperature. Therefore, a regular phase alloy to which 50 at% or less of Cu is added is used as the recording layer, and an ordered phase alloy to which no additive or 50 at% or less of Ag and / or Al is added is used as the functional layer. However, if the functional layer is set in a region where the functional layer is not regularized, Ku of only the recording layer can be increased. Further, since the functional layer and the recording layer are made of the same material, the crystal orientation and the grain size can be easily controlled not only for the functional layer but also for the recording layer by adjusting the underlayer and the process.

(Example 1)
A magnetic recording medium according to the first embodiment having the structure shown in FIG. 1 was produced. On a 2.5-inch diameter glass substrate, an underlayer made of SiN with a thickness of 50 nm, a base layer made of Tb _0.19 (Fe _0.75 Co _0.25 ) with a thickness of 25 nm, a switching layer made of SiN with a thickness of 2 nm, a thickness A recording layer made of 20 nm CoPtCr—O and a protective layer made of C having a thickness of 3 nm were sequentially laminated by a sputtering method, and then a lubricant was applied.

  At this time, the SiN underlayer was subjected to a sputter etching process of RF 100 W for 1 minute, and then the base layer was laminated without breaking the vacuum. As a result, the floating oxygen at the SiN underlayer and the base layer and its interface can be removed, and the weather resistance of the base layer can be improved. The magnetic properties of the base layer alone indicate that the coercive force Hc at room temperature exceeds the VSM measurement limit (15 kOe), which is a so-called compensation composition. The Curie temperature of the base layer was 350 ° C.

  When the fine structure of the recording layer was examined by TEM, a columnar magnetic crystal particle (about 7 nm in diameter) made of CoPtCr was divided at a 2 nm interval by a nonmagnetic material containing amorphous Co—O and a small amount of Cr. It was. The magnetic properties of the recording layer alone had an easy axis in the perpendicular direction, and the coercive force Hc at room temperature measured by VSM was 4.5 kOe. From the results of static evaluation such as ΔM method and MFM measurement of fine magnetic domains, it was confirmed that there was almost no exchange coupling interaction between magnetic particles.

  The temperature dependence of the magnetic characteristics in the state where the base layer / switching layer / recording layer was laminated was examined. From room temperature to 150 ° C., magnetic characteristics as schematically shown in FIG. 35 were exhibited. That is, the base layer and the recording layer are not exchange coupled, exhibit hysteresis independently, and the Hc of each layer is different as indicated by HcB and HcR. However, the hysteresis division as shown in FIG. 35 did not occur from around 150 ° C., and HcB and HcR coincided. This seems to be because the exchange coupling interaction began to work on both layers from 150 ° C. In the case of this laminated film, the exchange force Hexg cannot be directly examined from the hysteresis loop unless interfacial domain walls are formed between the layers. In addition, the change of Lexg cannot be known directly. Therefore, by performing time waiting measurement of the VSM while changing the temperature, the temperature change of the activation moment VIsB is examined, and an attempt is made to estimate the temperature dependence of the activation volume (= magnetization reversal unit volume Va). It was. As a result, Va shows a temperature change similar to that schematically shown in FIG. 3, and the temperature Tsw at which exchange coupling starts to act is estimated to be 150 ° C., as estimated from the change of the hysteresis loop.

  The dynamic characteristics of the above magnetic recording medium were evaluated by an HDD recording / reproducing evaluation apparatus. The rotational speed of the recording medium was 4500 rpm. A recording head having a recording gap of 200 nm was used, and a reproducing head having a GMR element and a reproducing gap of 110 nm was used. The magnetic spacing was estimated to be 10 nm from the flying height and the thickness of the lubricant. On the other hand, a laser having a wavelength of 633 nm and an external low flying lens were disposed on the back surface of the substrate. The laser beam is focused on the base layer / switching layer / recording layer portion by designing the SIL lens on both the external low flying lens and the substrate. The diameter of the laser spot was adjusted so as to be about 500 nm by FWHM, and the sample was locally heated. At this time, the head was driven by a precise piezo element, and the light irradiation position was matched with the gap position of the recording head.

  First, magnetic recording was attempted without irradiating a laser beam. It was found that the reproduced signal was mostly noisy and sufficient recording was not possible. This is a natural result as judged from the coercive force of the recording layer and the recording capability of the recording head.

  Next, recording was performed while irradiating a laser. By another experiment and simulation, the relationship between the irradiation power and the temperature rise of the medium was obtained in advance, and the medium temperature dependence of the CN ratio (CNR) of the reproduction signal was examined from the laser power to be irradiated.

  FIG. 36 schematically shows the result of single frequency recording at 400 kfci. Recording was possible even when the medium temperature was Tsw or less. Initially, the result was that the CNR increased as the medium temperature increased. This is because the recording medium can be recorded even by the magnetic field generated by the head due to the decrease in Hc due to the increase in the medium temperature. However, the SN ratio was low, and the CNR began to decrease as the medium temperature was further increased. As described above, this is presumed to be because the magnetization is re-inverted due to the acceleration of the thermal fluctuation caused by the heating of the medium while the coercive force is lowered and the magnetization inversion of the medium is facilitated. However, the CNR began to increase again after exceeding Tsw, and the maximum CNR could be obtained at a temperature lower than the Curie temperature TcB = 250 ° C. of the base layer. As described above, it seems that Va is increased due to the exchange coupling action between the base layer and the recording layer, so that magnetization re-inversion does not occur. The dependency on the recording frequency was examined with the optimum recording temperature (power) thus obtained. The frequency dependence curve has the same characteristics as those of a normal magnetic recording system, and it was confirmed that recording was possible up to 1000 kfci, reflecting the high Ku characteristics of the recording layer.

(Comparative Example 1)
A magnetic recording medium was manufactured in the same manner as in Example 1 except that the thickness of the SiN switching layer was 6 nm. The result of performing dynamic characteristic evaluation similar to that in Example 1 is schematically shown in FIG. In FIG. 37, the CNR did not increase as in FIG. 36, and the CNR decreased with the medium temperature. This is presumed to be due to the fact that exchange coupling did not occur between the base layer and the recording layer, so that magnetization re-inversion occurred due to acceleration of thermal fluctuation caused by heating of the medium.

(Example 2)
A magnetic recording medium was manufactured in the same manner as in Example 1 except that the thickness tsw of the SiN switching layer was changed from 0.5 to 6 nm. When Tsw of these magnetic recording media was examined, the result shown in FIG. 38 was obtained. When tsw is 1 nm or less, exchange coupling occurs at room temperature and Va becomes large. However, as long as it has a recording resolution required by the system, it can be used as a magnetic recording medium according to the present invention. Thus, the lower limit of tsw varies depending on the system design and requirements of the magnetic recording medium. In the vicinity of tsw = 6 nm, evaluation of Tsw becomes difficult. This is because Tsw becomes a high temperature and the recording layer undergoes a structural change and cannot be measured well by static evaluation using VSM. Therefore, Tw was estimated from the recording characteristics. When tsw exceeds 6 nm, a temperature much higher than 500 ° C. is required as Tw. This is not preferable in view of power consumption and heat generation of the magnetic recording apparatus.

(Example 3)
A magnetic recording medium having the structure schematically shown in FIG. 1 was produced. On a 2.5-inch glass substrate, a base layer made of 5 nm NiAl / 50 nm Cr, a base layer made of 75 nm FeCr, a switching layer made of 1.5 nm Ru, and a recording layer made of 20 nm CoPt—SiO ₂ A protective layer made of 3 nm carbon was sequentially laminated by sputtering, and then a lubricant was applied to produce a magnetic recording medium. CoPt—SiO ₂ is a so-called granular medium and has a fine structure in which CoPt magnetic particles are dispersed in a SiO ₂ base material. The volume ratio of CoPt to SiO ₂ was 45 vol%. Such a medium can be produced, for example, by using a composite target or by forming a film while applying a bias to the substrate by simultaneous sputtering of CoPt and SiO ₂ . The FeCr base layer showed ferromagnetism by magnetic property evaluation with a single layer.

When the fine structure of the recording layer was examined using TEM, columnar magnetic crystal particles (diameter of about 6 nm) made of CoPt were divided in an amorphous SiO ₂ base material. The magnetic properties were that the axis of easy magnetization was perpendicular and the coercivity Hc measured with VSM at room temperature was 6 kOe. The distance between the magnetic particles (the length of the nonmagnetic material portion interposed between the magnetic particles) was 2 nm. From the results of static evaluation such as ΔM method and MFM measurement of fine magnetic domains, it was confirmed that there was almost no exchange coupling interaction between magnetic particles. The base layer has a polycrystalline structure similar to that of the recording layer. Due to the effect of the NiAl / Cr underlayer, the crystal grain size is as small as 7 nm. The morphology of the crystal grains is almost retained in the recording layer via the Ru switching layer. The magnetic properties of this base layer at room temperature were Hc of 1 kOe and a Curie temperature of 150 ° C. As a result of performing the same evaluation as in Example 1, Tsw was 120 ° C.

  The same recording / reproduction evaluation as in Example 1 was performed on the above magnetic recording medium. The specifications of the evaluation apparatus are the same as those in the first embodiment. The result of 400 kfci single frequency recording was similar to that schematically shown in FIG. However, from the simulation results, a sufficiently large CNR could be obtained even at 200 ° C. where Tw exceeds TcB. This is presumably because the magnetization re-inversion does not occur due to the effect of increasing Va by the exchange coupling action between the base layer and the recording layer during the cooling process after recording. The recording frequency dependency was compared between Tw = 200 ° C. and 140 ° C. by changing the recording temperature (power). The value of the frequency at which the output becomes 1/2 with respect to DC was larger under the condition of Tw = 200 ° C. This is presumably because the recording resolution was improved by reducing Va during recording.

Example 4
Example 3 is the same as Example 3 except that the thickness of the Ru switching layer was changed and the recording layer having a different volume ratio of CoPr and SiO ₂ was formed by changing the ratio of the input power of the CoPt target and the SiO ₂ target at the time of producing the recording layer. Thus, a magnetic recording medium was produced. The distance of the SiO ₂ nonmagnetic part that divides the CoPt magnetic particles was determined from TEM observation of each sample. In this way, samples with different ratios of the distance d [nm] and tsw of the nonmagnetic portion that magnetically divides the magnetic particles were prepared, and the media noise was compared in the 100 kfci signal recorded with the optimum laser power. . The result is schematically shown in FIG. In FIG. 39, the vertical axis represents noise power of an arbitrary scale, and the horizontal axis represents tsw / d. As shown in this figure, a sudden increase in the medium noise was observed at tsw / d = 2. This is because, before Lexg increases due to heating of the medium and the recording layer and the base layer exchange-couple, the magnetic particles in the recording layer exchange-couple to form a large magnetic cluster, and the magnetization transition is greatly disturbed. This seems to be because it became medium noise.

  The increase in medium noise is not observed from tsw / d = 1, whereas the average coupling position between the magnetic particles is “point” contact, whereas that between the recording layer and the base layer is “surface” contact. This is considered to be because the exchange coupling is more strongly generated between the recording layer and the base layer for the same increase in Lexg. In addition, as described above, the morphology of the base layer, the switching layer, and the recording layer is almost maintained, and the interface between the layers is very steep and the condition close to surface contact can be realized. It is done.

(Example 5)
A magnetic recording medium according to the second embodiment having the structure shown in FIG. 5 was produced. On a 2.5-inch glass substrate, a base layer made of 5 nm NiAl / 50 nm Cr, a base layer made of 75 nm Co—SiO ₂ granular film, a recording layer made of 20 nm CoPt—SiO ₂ , and 3 nm carbon The protective layers to be formed were sequentially laminated by a sputtering method, and then a lubricant was applied to produce a magnetic recording medium.

The recording layer was adjusted to have the same structure as in Example 3. In the Co—SiO ₂ granular film as the base layer, the volume ratio of Co to SiO ₂ was 50 vol%. Further, by adjusting the substrate bias power, the average diameter of the Co particles was set to 3.5 nm. This Co volume exhibits superparamagnetism due to thermal fluctuations at room temperature. As a result of examining the temperature change of the magnetic characteristics of Co—SiO ₂ alone, it was found that the magnetic properties became ferromagnetic at 130 ° C. or higher (Tf = 130 ° C.). The reason for this is that when Lexg increases with temperature and becomes larger than the interval between Co particles, the Co particles are exchange-coupled to increase the activation volume, and the magnetic anisotropy energy becomes larger than the thermal fluctuation energy and becomes ferromagnetic. This is to convert into

  In this case, if tsw = Tf = 130 ° C. in FIG. 3, a magnetic recording medium having the same effect as in Example 3 can be obtained without a switching layer. That is, when the medium is heated to Tsw or more, the base layer becomes ferromagnetic, and at the same time, Va of the magnetic particles in the recording layer that are exchange-coupled increases as shown in FIG. For this reason, magnetization reversal can be suppressed. In this case, the magnitude relationship between the recording temperature of the base layer and Tw is not particularly limited as described above.

  The same recording / reproduction evaluation as in Example 1 was performed on the above magnetic recording medium. The specifications of the evaluation apparatus are the same as those in the first embodiment. The result of single-frequency recording at 400 kfci was similar to that schematically shown in FIG. When the recording frequency dependency was examined at the optimum recording temperature (power), it was confirmed that recording was possible up to 1000 kfci.

(Example 6)
A magnetic recording medium according to the third aspect having the structure shown in FIG. 5 was produced. An underlayer made of 50 nm SiN, a base layer made of 25 nm Tb _0.18 (Fe _0.9 Co _0.1 ), and a recording layer made of 20 nm (Co _0.75 Pt _0.2 Cr _0.05 ) -O on a 2.5 inch diameter glass substrate. A protective layer made of 3 nm carbon was sequentially laminated by sputtering, and then a lubricant was applied.

  At this time, the SiN underlayer was subjected to a sputter etching process of RF 100 W for 1 minute, and then the base layer was laminated without breaking the vacuum. As a result, the floating oxygen at the SiN underlayer and the base layer and their interfaces can be removed, and the weather resistance of the base layer alone can be improved. The magnetic properties of the base layer alone were a coercive force Hc at room temperature of 5 kOe and a Curie temperature of 200 ° C.

  When the fine structure of the recording layer was examined by TEM, a columnar magnetic crystal particle (about 7 nm in diameter) made of CoPtCr was divided at a 2 nm interval by a nonmagnetic material containing amorphous Co—O and a small amount of Cr. It was. The magnetic properties of the recording layer alone have an easy axis in the perpendicular direction, and the coercivity Hc at room temperature measured by VSM was estimated to be 4.5 kOe. From the results of static evaluation such as ΔM method and MFM measurement of fine magnetic domains, it was confirmed that there was almost no exchange coupling interaction between magnetic particles. Although the Curie temperature could not be identified due to the change in the film structure, it was estimated to be approximately 250 ° C. by extrapolation from the temperature change up to 200 ° C. In this recording layer, it is considered that the influence of thermal fluctuation is increased due to the small particle size of the magnetic particles.

  The dynamic characteristics of the above magnetic recording medium were evaluated by an HDD recording / reproducing evaluation apparatus. The rotational speed of the recording medium was 4500 rpm. A recording head having a recording gap of 200 nm was used, and a reproducing head having a GMR element and a reproducing gap of 110 nm was used. The magnetic spacing was estimated to be 10 nm from the flying height and the thickness of the lubricant. On the other hand, a laser having a wavelength of 633 nm and an external low flying lens were disposed on the back surface of the substrate. The laser beam is focused on the base layer / switching layer / recording layer portion by designing the SIL lens on both the external low flying lens and the substrate. The diameter of the laser spot was adjusted so as to be about 500 nm by FWHM, and the sample was locally heated. At this time, the head was driven by a precise piezo element, and the light irradiation position was matched with the gap position of the recording head.

  First, magnetic recording was attempted without irradiating a laser beam. It was found that the reproduced signal was mostly noisy and sufficient recording was not possible. This is a natural result as judged from the coercive force of the recording layer and the recording capability of the recording head.

  Next, recording was performed while irradiating a laser beam. By another experiment and simulation, the relationship between the irradiation power and the temperature rise of the medium was obtained in advance, and the medium temperature dependence of the CN ratio (CNR) of the reproduction signal was examined from the laser power to be irradiated.

  FIG. 40 shows the result of recording at a single frequency of 400 kfci. From this figure, it can be seen that recording is possible in the range of Tw = 100 to 300.degree. The CNR at the recordable limit is as low as about 10 dB and cannot be used in an actual HDD system, but is a sufficient value for confirming the principle of the recording method according to the present invention. Also, it is possible to improve the CNR by lowering the recording frequency or adjusting the magnetic characteristics of the recording layer.

  A similar experiment was performed using samples with varying Fe: Co ratios in the base layer. The result is shown in FIG. In this figure, the horizontal axis is the absolute value (K) of TcB-Tw, and the vertical axis is the maximum CNR obtained under that condition. From this figure, if | TcB−Tw | <100K, a CNR of about 20 dB can be expected, and if it is less than 50K, a CNR of 40 to 50 dB is obtained, and if it is less than 30K, a CNR of 50 to 60 dB is obtained. As apparent from FIG. 41, if | TcB−Tw | <100K, similar recording can be performed under the condition of TcB> Tw. Further, from the experiment of FIG. 40 in which Tw was changed, it was found that recording was possible in the same manner even when TcB <Tw.

The composition of the base layer was changed to Tb _0.22 (Fe _0.9 Co _0.1 ). This base layer has the same Curie temperature as described above, but has a so-called RE-rich composition and a compensation temperature in the vicinity of 100.degree. Even when this base layer was used, the same recording characteristics as in FIG. 40 were obtained.

A medium having a base layer of 50 nm vanadium and a base layer of 30 nm (Co _0.8 Pt _0.2 ) —SiO ₂ was prepared, and a similar recording test was performed. As a result of cross-sectional TEM observation, the base layer has a structure in which columnar magnetic crystal particles (diameter: about 10 nm) made of CoPt are divided by nonmagnetic portions made of amorphous SiO ₂ . In addition, the magnetic particles in the recording layer were generally grown on the CoPt particles. The result with this medium was similar to that of FIG. 40, but the CNR increased by 3-5 dB as a result of the decrease in medium noise. This seems to be due to the fact that the change in magnetization transition after recording is small, and therefore jitter is reduced.

ZnO of 50nm underlayer, base layer 10nm of _{(Co 0.75 Pt 0.2 Cr 0.05)} -SiO 2 / 1nm of Rh / 10nm of (Co _0.75 Pt _0.2 Cr _0.05) to produce a multilayer film and then medium -SiO _2, A similar recording test was conducted. As a result of cross-sectional TEM observation, the base layer had a structure in which columnar magnetic crystal particles (diameter of about 7 nm) made of CoPtCr were separated by nonmagnetic portions made of amorphous SiO ₂ . Further, the magnetic particles had a columnar structure almost continuous up to the recording layer. The result with this medium was similar to that of FIG. 40, but the CNR increased by 5-7 dB as a result of the decrease in medium noise. This seems to be due to the fact that the change in magnetization transition after recording is small, and therefore jitter is reduced.

(Example 7)
A magnetic recording medium according to the fourth embodiment having the structure shown in FIG. 1 was produced. On a glass substrate having a diameter of 2.5 inches, a base layer made of 50 nm SiN, a base layer made of 25 nm Tb _0.18 (Fe _0.75 Co _0.25 ), and a 10 nm (Gd _0.5 Tb _0.5 ) _0.18 (Fe _0.98 Co _0.02 ) A switching layer, a recording layer made of 20 nm (Fe _0.49 Pt _0.49 Ta _0.02 ) -SiN, and a protective layer made of 3 nm carbon were sequentially laminated by sputtering, and then a lubricant was applied.

  At this time, the SiN underlayer was subjected to a sputter etching process of RF 100 W for 1 minute, and then the base layer was laminated without breaking the vacuum. As a result, the floating oxygen at the SiN underlayer and the base layer and their interfaces can be removed, and the weather resistance of the base layer alone can be improved. The magnetic properties of the base layer alone were a coercive force Hc at room temperature of 5.5 kOe and a Curie temperature of 400 ° C. The magnetic characteristics of the switching layer alone were a coercive force Hc at room temperature of 3 kOe and a Curie temperature of 150 ° C.

  When the fine structure of the recording layer was examined by TEM, magnetic crystal particles (diameter of about 6 nm) mostly composed of FePt ordered phases were separated by nonmagnetic material composed of amorphous SiN at intervals of 2 nm. . The magnetic characteristics of the recording layer alone have an easy axis in the perpendicular direction, and the coercivity Hc at room temperature measured by VSM was estimated to be 8 kOe. From the results of static evaluation such as ΔM method and MFM measurement of fine magnetic domains, it was confirmed that there was almost no exchange coupling interaction between magnetic particles. Although the Curie temperature could not be identified due to the change in the film structure, it was estimated to be approximately 300 ° C. by extrapolating from the temperature change up to 200 ° C.

  The same dynamic characteristic evaluation as in Example 6 was performed on this medium. FIG. 42 shows the result of examining the relationship between Tw and CNR by changing the laser irradiation power. Although the same result as that of FIG. 40 is obtained, CNR shows a low value when Tw <TcS due to a significant increase in noise. The reason seems to be that the three layers of the recording layer / switching layer / base layer are exchange-coupled and the entire Ku or recording coercive force is not in a state where sufficient recording can be performed. From FIG. 42, it can be seen that recording is possible in the range of Tw = 150 to 250.degree. The CNR at the recordable limit is as low as about 10 dB and cannot be used in an actual HDD system, but is a sufficient value for confirming the principle of the recording method according to the present invention. Also, it is possible to improve the CNR by lowering the recording frequency or adjusting the magnetic characteristics of the recording layer.

  A similar experiment was performed using samples with varying Fe: Co ratios in the base layer. The result is shown in FIG. In this figure, the horizontal axis is the value of Tw−TcS (K), and the vertical axis is the maximum CNR obtained under that condition. The case of Tw <TcS has not been investigated. From this figure, if Tw−TcS <100K, a CNR of about 20 dB can be expected, and if it is less than 50K, a CNR of 40 to 50 dB is obtained, and if it is less than 30K, a CNR of 50 to 60 dB is obtained.

The composition of the base layer was changed to Tb _0.22 (Fe _0.9 Co _0.1 ). This base layer has the same Curie temperature as described above, but has a so-called RE-rich composition and a compensation temperature in the vicinity of 100.degree. Even with this base layer, the same recording characteristics as in FIG. 42 were obtained.

The composition of the switching layer was changed to (Gd _0.5 Tb _0.5 ) _0.22 (Fe _0.98 Co _0.02 ). This switching layer has the same Curie temperature as described above, but has a so-called RE-rich composition and a compensation temperature in the vicinity of 100.degree. Even with this switching layer, the same recording characteristics as in FIG. 42 were obtained.

  These results are due to the fact that the RE composition of the base layer and the switching layer is irrelevant in principle because the action of the magnetic recording medium of this embodiment is due to the exchange coupling of the base layer and the recording layer via the switching layer.

A medium having a base layer of 50 nm of Cr and a base layer of 30 nm of (Co _0.8 Pt _0.2 ) —SiO ₂ was prepared, and a similar recording test was performed. When the base layer was formed, 200 W RF power was applied to the substrate, and RF bias sputtering was performed. As a result of cross-sectional TEM observation, the base layer has a structure in which columnar magnetic crystal particles (diameter: about 10 nm) made of CoPt are divided by nonmagnetic portions made of amorphous SiO ₂ . Since the switching layer is amorphous RE-TM, the continuity of crystallinity between the base layer and the recording layer was not observed. With this medium, the same results as in FIG. 42 were obtained.

The switching layer was 10 nm ((Co _0.8 Pt _0.2 ) Cr _0.14 ) —SiO ₂ . This switching layer had the same composition as the base layer, but the Curie temperature decreased to 130 ° C. by adding Cr. No RF bias was applied during the formation of the base layer. As a result of cross-sectional TEM observation, it was confirmed that a part of the base layer—the base layer—the switching layer—the recording layer and the crystal grain boundary (diameter: about 5 nm) were continuous. Even when this medium was used, the same recording characteristics as in FIG. 42 were obtained, but the CNR increased by about 5 dB as a result of the reduction in medium noise. This seems to be due to the fact that the change in magnetization transition after recording is small, and therefore jitter is reduced. This medium was also evaluated for CNR by 600 kfci. As a result, although there was a decrease in CNR of about 5 dB, the same result as in FIG. 42 was obtained. This is presumably because the transition position of the recording layer did not change during the recording operation due to the increase in the number of particles in the base layer, and high-density recording could be achieved.

  In this example, the combination of (base layer, switching layer) was (RE-TM, RE-TM), (multiparticle film-RE-TM), and (multiparticle film, multiparticle film). In view of the operating principle and operation of the magnetic recording medium of this embodiment, it is obvious that the same effect can be obtained by combining (RE-TM, multi-particle film).

(Example 8)
A magnetic recording medium according to the fifth aspect having the structure shown in FIG. 9 was produced. On a 2.5 inch glass substrate, an underlayer made of 50 nm Cr, a functional layer made of 25 nm IrMn antiferromagnetic material, a recording layer made of 20 nm CoPtCr—O, and a protective layer made of 3 nm carbon were sequentially sputtered. Then, a magnetic recording medium was manufactured by applying a lubricant and then applying a lubricant.

  When the fine structure of the recording layer was examined by TEM, columnar magnetic crystal particles (diameter: about 7 nm) made of CoPtCr were separated by a non-magnetic material made of amorphous Co—O and a small amount of Cr. . The magnetic properties of the recording layer alone have an easy axis in the in-plane direction, and the coercivity Hc at room temperature measured by VSM is estimated to be about 5 kOe. Although the Curie temperature could not be accurately identified due to the plastic change of the film structure, it was estimated to be approximately 300 ° C. when extrapolated from the temperature dependence up to 200 ° C. It seems that the influence of thermal fluctuation is increased due to the small particle size of the magnetic particles. As a result of measuring the MH loop of the sample in which the functional layer and the recording layer were laminated by VSM, TcE was about 200 ° C.

  The dynamic characteristics of the above magnetic recording medium were evaluated by an HDD recording / reproducing evaluation apparatus. The rotational speed of the recording medium was 4500 rpm. A recording head having a recording gap of 200 nm was used, and a reproducing head having a GMR element and a reproducing gap of 110 nm was used. The magnetic spacing was estimated to be 30 nm from the flying height and the lubricant thickness. On the other hand, a laser having a wavelength of 633 nm and an external low flying lens were disposed on the back surface of the substrate. The SIL lens is designed so that both the external low floating lens and the substrate are designed so that the laser beam is focused on the functional layer / recording layer. The diameter of the laser spot was adjusted so as to be about 500 nm by FWHM, and the sample was locally heated. At this time, the head was driven by a precise piezo element, and the light irradiation position was matched with the gap position of the recording head.

  First, magnetic recording was attempted without irradiating a laser beam. It was found that the reproduced signal was mostly noisy and sufficient recording was not possible. This is a natural result as judged from the coercive force of the recording layer and the recording capability of the recording head.

  Next, recording was performed while irradiating a laser. By another experiment and simulation, the laser power was changed in advance to determine the temperature rise of the medium, and the relationship between the laser power and the recording temperature Tw was examined. The relationship between the recording temperature Tw and the CN ratio (CNR) of the reproduction signal was examined by reproducing after recording while changing the laser power.

  FIG. 44 schematically shows the result of single frequency recording at 400 kfci. As shown in FIG. 44, it was found that recording was possible in the range of Tw = 100 ° C. to 300 ° C. The CNR under the recordable limit condition is too low at about 10 dB, so that it cannot be used in an actual HDD system, but is sufficient for confirming the principle of magnetic recording according to the fifth aspect. Further, it is possible to improve the CNR by lowering the recording frequency or adjusting the magnetic characteristics of the medium.

  Next, a magnetic recording medium having a structure similar to that shown in FIG. 9 was prepared using functional layers made of various materials formed under various film forming conditions. Specifically, FeMn (TcE: 130 to 180 ° C.), IrMn (TcE: 150 to 250 ° C.), and CrMnPt (TcE: 230 to 420 ° C.) were used as the functional layer material. Experiments similar to the above were performed using these magnetic recording media. The results are summarized in FIG. The horizontal axis in FIG. 45 is the absolute value (K) of TcE-Tw, and the vertical axis is the maximum CNR obtained under that condition. From this figure, it can be seen that if the value of | TcE−Tw | is less than 100K, the CNR is about 20 dB, if it is less than 50K, about 30 dB, and if it is less than 30K, about 40 dB is obtained. As is apparent from FIG. 45, if | TcE−Tw | <100K, recording is possible under the condition of TcE> Tw. Also, from FIG. 44, recording is possible even under the condition of TcE <Tw.

Example 9
A magnetic recording medium according to the sixth aspect having the structure schematically shown in FIG. 9 was produced. A soft magnetic underlayer made of 50 nm FeTaC, a 5 nm Ti blocking layer, a 10 nm Pt underlayer, a 18.8 nm laminated functional layer, a 15 nm laminated recording layer, and a 3 nm carbon on a 2.5-inch glass substrate. The protective layers to be formed were sequentially laminated by a sputtering method, and then a lubricant was applied to produce a magnetic recording medium.

  As schematically shown in FIG. 17, the multilayer functional layer has a structure in which a unit of [Co2 nm / Ru0.8 nm] is repeated seven times. Each Co layer of the multilayer functional layer is antiferromagnetically coupled. The functional layer alone exhibits ferrimagnetism having the magnetization of the Co1 layer. Further, the functional layer and the recording layer exhibit antiferromagnetic coupling.

  The laminated recording layer has a structure in which a unit of [Co 0.3 nm / Pd 1.8 nm] is repeated seven times. When the fine structure of the recording layer was examined by TEM, the Co magnetic crystal particles (diameter of about 7 nm) were separated by an amorphous nonmagnetic material assumed to be CoO. The magnetic characteristics of the recording layer alone had an easy axis in the perpendicular direction, and the coercive force Hc at room temperature measured by VSM was about 8 kOe. From the measurement by VSM, the Curie temperature TcR of the recording layer was estimated to be approximately 300 ° C.

  As a result of measuring the MH loop of the sample in which the functional layer and the recording layer were laminated by VSM, it was found that TcE was higher than the Curie temperature of the recording layer.

  The same recording / reproduction evaluation as in Example 8 was performed on the above magnetic recording medium. The relationship between the recording temperature Tw and the CN ratio (CNR) of the reproduction signal was examined by reproducing after recording while changing the laser power. As a result, the tendency similar to FIG. 39 was shown. However, no relationship was found between the recording temperature Tw at which the CNR shows a peak and TcR or TcE. This result is considered to be simply due to the following combination. [A] The higher the temperature, the lower the coercivity of the recording layer, so that the recording ability is relatively increased and the CNR is increased. [B] The thermal fluctuation is accelerated and the CNR is lowered as the temperature is raised.

(Example 10)
A magnetic recording medium according to the seventh aspect having the structure schematically shown in FIG. 13 was produced. On a glass substrate having a diameter of 2.5 inches, an underlayer made of 50 nm Cr, a second functional layer made of 15 nm FeMn antiferromagnetic material, a first functional layer having a laminated structure of 18.8 nm, 10 nm (Gd _A switching layer made of _0.5 Dy _0.5 ) _0.22 (Fe _0.98 Co _0.02 ), a recording layer made of 17 nm CoCrPtTaB, and a protective layer made of C having a thickness of 3 nm were sequentially laminated by a sputtering method, and then a lubricant was applied.

  As schematically shown in FIG. 17, the first functional layer has a structure in which a unit of [Co2 nm / Ru0.8 nm] is repeated seven times. Each Co layer of the first functional layer is antiferromagnetically coupled. The first functional layer alone exhibits ferrimagnetism having the magnetization of the Co1 layer. Further, the first functional layer and the recording layer exhibit antiferromagnetic coupling. Since the first functional layer is exchange coupled with the second functional layer, the anisotropy is in the in-plane direction. In this sample, the shift amount of the hysteresis loop was 300 Oe.

  The switching layer is an amorphous in-plane magnetized film. The Curie temperature of this layer alone was 150 ° C.

  When the microstructure of the recording layer was examined by TEM, columnar magnetic crystal particles (diameter: about 7 nm) made of CoPtCr were separated by a non-magnetic material assumed to contain amorphous Co, B, and Cr. It was. The magnetic characteristics of the recording layer alone have an easy axis in the in-plane direction, and the coercive force Hc at room temperature measured by VSM is estimated to be about 6 kOe. The Curie temperature could not be accurately identified due to the plastic change of the film structure, but when extrapolated from the temperature dependence up to 200 ° C., it was estimated to be approximately 350 ° C.

  As a result of measuring the MH loop of the sample in which the functional layer, the switching layer, and the recording layer were laminated by VSM, TcE was about 150 ° C.

  The same recording / reproduction evaluation as in Example 8 was performed on the above magnetic recording medium. The relationship between the recording temperature Tw and the CN ratio (CNR) of the reproduction signal was examined by reproducing after recording while changing the laser power. The result is shown in FIG. A large CNR was obtained in a region that generally satisfies T> TcE. The reason for this is considered that the exchange coupling between the functional layer and the recording layer is effectively cut in the region exceeding the Curie temperature of the switching layer. However, even at a temperature 100K lower than TcE, the CNR was about 10 dB, but recording was possible. Therefore, it was found that recording was possible in the range of Tw = 150 ° C. to 250 ° C. Since the CNR under the recordable limit condition is too low at about 10 dB, it cannot be used in an actual HDD system, but is sufficient for confirming the principle of magnetic recording according to the seventh aspect. Further, it is possible to improve the CNR by lowering the recording frequency or adjusting the magnetic characteristics of the medium. In particular, since the influence of thermal fluctuation is small in the region of Tw <TcE, it is considered that the conditions are suitable for a system that can tolerate a low CNR or a system with severe environmental conditions.

  Next, magnetic recording media having a structure as shown in FIG. 13 were prepared using switching layers having various Fe: Co composition ratios. Since these switching layers have different Curie temperatures, TcE can be changed. Experiments similar to the above were performed using these magnetic recording media. The results are summarized in FIG. The horizontal axis in FIG. 47 is the value of Tw−TcE (K), and the vertical axis is the maximum CNR obtained under the conditions. The case of Tw <TcE has not been investigated. From this figure, it can be seen that CNR of about 20 dB is obtained when Tw-TcE is less than 100K, about 40 to 50 dB is obtained when it is less than 50K, and about 50 to 60 dB is obtained when it is less than 30K.

(Example 11)
A magnetic recording medium having the structure shown in FIG. 21 was produced. After depositing a seed layer made of Ti with a thickness of 5 nm and an underlayer made of Ru with a thickness of 50 nm on a 3.5-inch glass substrate, a functional layer made of Co ₇₈ Cr ₁₉ Pt ₃ with a thickness of 15 nm is obtained. A recording layer made of (Fe ₅₅ Pt ₄₅ ) Cu _{10 having} a thickness of ₁₀ nm and a protective layer made of carbon having a thickness of 3 nm were laminated by sputtering, and a lubricant was further applied. The substrate was heated to 250 ° C. during sputtering.

The recording layer has remanent magnetization in the perpendicular component, but exhibits magnetic characteristics having magnetic anisotropy distribution in a three-dimensional random direction. The Ku _{RL of the} FePtCu recording layer was 3 × 10 ⁷ erg / cc. This is because the Fe ₅₀ Pt ₅₀ ordered phase was formed in the recording layer by heating the substrate during sputtering. Ku _FL of CoCrPt functional layer was 2 × 10 ⁶ erg / cc.

Since the coercive force exceeds 15 kOe with the FePtCu recording layer alone, it is difficult to perform recording. However, in the medium of this example, since the CoCrPt functional layer and the FePtCu recording layer are ferromagnetic exchange coupled, the overall coercive force is 8 kOe, and sufficient recording was possible even with a normal magnetic head. This medium exhibited a one-stage hysteresis loop as shown in FIG. The diameter of the magnetic particles in the recording layer was about 6 nm. The KuV / k _B T of this medium was about 200, and the thermal stability was sufficient.

  The value of the above coercive force was smaller than the value obtained from the calculation. The reason may be the influence of demagnetizing field, random distribution of magnetic anisotropy, formation of initial layer, intergranular interaction, influence of impurities in the film, and the like. However, based on the calculation, it was possible to obtain a magnetic recording medium having high thermal stability and low coercive force by using a recording layer material having high Ku.

(Example 12)
An in-plane magnetic recording medium having the structure shown in FIG. 21 was produced. After depositing a 5 nm thick NiAl seed layer and a 50 nm thick CrMo underlayer on a 3.5 inch glass substrate, a 10 nm thick Co ₈₃ Cr ₁₂ Ta ₈ functional layer, thickness A recording layer made of Co ₇₄ Cr ₂₂ Ta _{4 with} a thickness of 15 nm and a protective layer made of carbon with a thickness of 3 nm were laminated by sputtering, and a lubricant was applied. Both the functional layer and the recording layer were in-plane magnetization films, and a longitudinal recording medium was obtained.

Ku _RL of Co ₇₄ Cr ₂₂ Ta ₄ recording layer is ^{3 × 10 7 erg / cc,} Ku FL of Co ₈₃ Cr ₁₂ Ta ₈ functional layer was 1 × 10 ⁶ erg / cc.

The Co ₇₄ Cr ₂₂ Ta ₄ recording layer alone has a large coercive force of 8 kOe and cannot be recorded with a normal longitudinal magnetic head. However, in the medium of this example, the Co ₇₄ Cr ₂₂ Ta ₄ recording layer and the Co ₈₃ Cr ₁₂ Ta ₈ functional layer are ferromagnetically exchange coupled, so the overall coercive force is 4 kOe, and even with a normal magnetic head Recording was possible enough. This medium exhibited a one-stage hysteresis loop as shown in FIG. The diameter of the magnetic particles in the recording layer was about 8 nm. The KuV / k _B T of this medium was about 150, and the thermal stability was sufficient.

(Example 13)
A perpendicular magnetic recording medium having the structure shown in FIG. 21 was produced. After depositing an underlayer made of Cr with a thickness of 50 nm on a 2.5-inch glass substrate, a functional layer made of Co ₇₇ Cr ₂₀ Ta _{3 with} a thickness of 15 nm, (Co ₈₀ Pt ₂₀ ) − with a thickness of 15 nm A recording layer made of (SiO ₂ ) and a protective layer made of carbon having a thickness of 3 nm were laminated by sputtering, and a lubricant was further applied. An RF bias was applied to the substrate when forming the recording layer.

The recording layer was a so-called granular medium in which high Ku CoPt magnetic particles were dispersed in a SiO ₂ base material, and the volume ratio of CoPt and SiO ₂ was 50:50. Both the recording layer and the functional layer were perpendicular magnetization films showing large remanent magnetization in the perpendicular direction.

The Ku _RL of the (Co ₈₀ Pt ₂₀ )-(SiO ₂ ) recording layer was 7 × 10 ⁶ erg / cc, and the Ku _FL of the Co ₇₇ Cr ₂₀ Ta ₃ functional layer was 6 × 10 ⁵ erg / cc.

The (Co ₈₀ Pt ₂₀ )-(SiO ₂ ) recording layer alone had a large coercive force of 6 kOe, making recording difficult. However, in the medium of this example, since the (Co ₈₀ Pt ₂₀ )-(SiO ₂ ) recording layer and the Co ₇₇ Cr ₂₀ Ta ₃ functional layer are ferromagnetic exchange coupled, the overall coercive force is 3 kOe, Recording was possible even with a normal magnetic head. Because of the exchange coupling between the perpendicular magnetization films, the exchange coupling energy is large, and a larger coercive force reduction effect was obtained. This medium exhibited a one-stage hysteresis loop as shown in FIG. The diameter of the magnetic particles in the recording layer was about 10 nm. The KuV / k _B T of this medium was about 200, and the thermal stability was sufficient.

(Example 14)
In the same manner as in Example 11, a Co ₇₈ Cr ₁₉ Pt ₃ functional layer having a thickness of 8 nm, a (Fe ₅₅ Pt ₄₅ ) Cu ₁₀ recording layer having a thickness of ₁₀ nm, and a Co ₇₈ Cr ₁₉ Pt ₃ functional layer having a thickness of 7 nm are used. A magnetic recording medium having a three-layer structure was produced.

  In this magnetic recording medium, the overall coercive force was 5 kOe, and the coercive force could be further reduced as compared with Example 11.

(Example 15)
A magnetic recording medium having the structure shown in FIG. 21 and having a recording layer made of a magnetic artificial lattice was produced. After depositing an underlayer made of Cr with a thickness of 50 nm on a 2.5-inch glass substrate, a functional layer made of Co ₇₇ Cr ₂₀ Ta ₃ with a thickness of 15 nm, [Co (0.3 nm) with a thickness of 10 nm / Pd (0.7 nm)] A functional layer made of ₁₀ and a protective layer 3 nm made of carbon having a thickness of 3 nm were laminated by sputtering, and a lubricant was further applied.

Both the recording layer and the functional layer were perpendicular magnetization films showing large remanent magnetization in the perpendicular direction. The recording layer was a magnetic artificial lattice in which the period of Co (0.3 nm) / Pd (0.7 nm) was repeated 10 times, and Ku _RL was 1 × 10 ⁷ erg / cc. Further, Ku _FL of Co ₇₇ Cr ₂₀ Ta ₃ functional layer was 6 × 10 ⁵ erg / cc.

The magnetic artificial lattice recording layer alone has a large coercive force of 9 kOe, making recording difficult. However, in the medium of this example, the magnetic artificial lattice recording layer and the Co ₇₇ Cr ₂₀ Ta ₃ functional layer are ferromagnetically exchange-coupled, so that the total coercive force is 4 kOe, and even a normal magnetic head can record sufficiently. Was possible. This medium exhibited a one-stage hysteresis loop as shown in FIG.

Next, a magnetic layer having the same structure as described above except that an underlayer made of Pt having a thickness of 30 nm and a functional layer made of a magnetic artificial lattice of [Co (0.7 nm) / Pd (0.7 nm)] ₈ were used. A recording medium was produced.

  This magnetic recording medium had higher perpendicular orientation than the above magnetic recording medium, less disturbance of magnetization transition, and higher density recording was possible. This is probably because the functional layer and the recording layer have the same morphology, and thus the crystallinity control and particle size control by the Pt underlayer extend not only to the functional layer but also to the recording layer. In addition, since both the functional layer and the recording layer can be formed using a Co target and a Pd target, the manufacturing cost can be reduced.

  With this magnetic recording medium, the overall coercive force was 3 kOe, and a larger coercive force reduction effect was obtained than with the above medium.

(Example 16)
A magnetic recording medium similar to that in Example 11 was produced except that Co ₇₈ Cr ₁₉ Pt ₃ (8 nm) / Ru (0.8 nm) / Co ₇₈ Cr ₁₉ Pt ₃ (3 nm) was used as the functional layer. This functional layer is a so-called laminated ferri film in which two magnetic layers sandwiching the Ru layer are antiferromagnetically coupled. Among the functional layers, the Co ₇₈ Cr ₁₉ Pt ₃ layer on the recording layer side and the recording layer are ferromagnetic exchange coupled.

  With this magnetic recording medium, the overall coercive force was 6 kOe, and the coercive force reduction effect was greater than in Example 11. This result qualitatively matches the calculation result of FIG. When this magnetic recording medium was used, magnetic recording with higher resolution (high density) than that in Example 11 could be performed. This is considered to be because the amount of magnetic moment of the functional layer was effectively reduced.

(Example 17)
A magnetic recording medium having the structure shown in FIG. 21 was produced. 2.5-inch glass substrate, after depositing the underlayer of a thickness of 50 nm MgO, the thickness of 8nm (Fe ₅₅ Pt ₄₅₎ functional layer made of Al _10, having a thickness of 10nm (Fe ₅₅ Pt ₄₅ ) A recording layer made of Cu ₁₀ and a protective layer made of carbon having a thickness of 3 nm were laminated by sputtering, and a lubricant was applied. The substrate was heated to 250 ° C. during sputtering.

By using MgO as the underlayer and heating the substrate during sputtering, unlike the case of Example 11, both the recording layer and the functional layer became a perpendicular magnetization film exhibiting a large residual magnetization in the perpendicular direction. An Fe ₅₀ Pt ₅₀ ordered phase is formed in the recording layer, but no ordered phase is formed in the functional layer. This is due to the difference that the additive element to the recording layer is Cu and the additive element to the functional layer is Al. The recording layer Ku _RL was 3 × 10 ⁷ erg / cc, and the functional layer Ku _FL was 5 × 10 ⁵ erg / cc.

  Since the coercive force exceeds 15 kOe with the FePtCu recording layer alone, it is difficult to perform recording. However, in the medium of this example, since the FePtAl functional layer and the FePtCu recording layer are ferromagnetic exchange coupled, the overall coercive force is 5 kOe, and recording can be sufficiently performed with a normal magnetic head. Because of the exchange coupling between the perpendicular magnetization films, the exchange coupling energy is large, and a larger coercive force reduction effect was obtained. This medium exhibited a one-stage hysteresis loop as shown in FIG.

1 is a schematic diagram of a magnetic recording apparatus according to an embodiment of the present invention. The figure which shows the temperature dependence of distance Lexg and exchange force Hexg which exchange coupling interaction reaches in the magnetic recording medium which concerns on a 1st aspect. The figure which shows the change with respect to the temperature of the magnetic anisotropy energy Kuw, the activation volume Va, and KuwVa at the time of recording in the magnetic recording medium which concerns on a 1st aspect. The figure which shows the change with respect to the temperature of the magnetic anisotropy energy Kuw, the activation volume Va, and KuwVa at the time of recording in the magnetic recording medium which concerns on a 1st aspect. FIG. 6 is a schematic diagram of a magnetic recording apparatus according to another aspect of the present invention. The figure which shows the temperature dependence of the magnetic anisotropic energy density Ku of each layer in the magnetic recording medium which concerns on a 3rd aspect. The figure which shows the temperature dependence of the magnetic anisotropic energy density Ku of each layer in the magnetic recording medium which concerns on a 4th aspect. The figure which shows a mode that the magnetization of the recording layer and base layer which form the magnetic recording medium which concerns on a 4th aspect changes according to medium temperature. FIG. 10 is a schematic diagram of a magnetic recording apparatus according to yet another aspect of the present invention. The figure which shows a mode that the magnetization of the functional layer and recording layer which form the magnetic recording medium which concerns on a 5th aspect changes according to medium temperature. The figure which shows the change with respect to the temperature of the magnetic anisotropy energy Ku and the activation volume Va at the time of recording in the magnetic recording medium which concerns on a 5th aspect. The figure which shows a mode that the magnetization of the functional layer and recording layer which form the magnetic recording medium which concerns on a 6th aspect changes according to medium temperature. FIG. 10 is a schematic diagram of a magnetic recording apparatus according to yet another aspect of the present invention. The figure which shows a mode that the magnetization of the functional layer which forms the magnetic recording medium which concerns on a 7th aspect, a switching layer, and a recording layer changes according to medium temperature. The figure which shows the change with respect to the temperature of the magnetic anisotropy energy Ku and the activation volume Va at the time of recording in the magnetic recording medium which concerns on a 7th aspect. Sectional drawing which shows the structure of the functional layer which concerns on one Embodiment of this invention. Sectional drawing which shows the structure of the functional layer which concerns on other embodiment of this invention. Sectional drawing which shows the structure of the functional layer which concerns on other embodiment of this invention. Sectional drawing which shows the structure of the functional layer which concerns on other embodiment of this invention. Sectional drawing which shows the structure of the functional layer which concerns on other embodiment of this invention. FIG. 10 is a schematic diagram of a magnetic recording apparatus according to yet another aspect of the present invention. The figure which shows the functional layer and recording layer of the magnetic recording medium of FIG. The schematic diagram of an exchange coupling bilayer membrane. The figure which shows an example of the hysteresis loop of an exchange coupling bilayer film. The figure which shows the other example of the hysteresis loop of an exchange coupling bilayer film. The figure which shows the physical quantity used for the energy calculation of each layer of an exchange coupling bilayer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the calculation result of the reversal magnetic field of an exchange coupling double layer film. The figure which shows the preferable range of the magnetic characteristic of the magnetic layer which comprises the magnetic recording medium based on this invention. FIG. 3 is a diagram showing magnetic characteristics at room temperature of the magnetic recording medium of Example 1. FIG. 3 is a diagram showing the recording temperature dependence of CNR for the magnetic recording medium of Example 1. The figure which shows the recording temperature dependence of CNR about the magnetic recording medium of the comparative example 1. FIG. FIG. 10 is a diagram showing the relationship between the temperature Tsw at which exchange coupling between the base layer and the recording layer starts and the thickness tsw of the switching layer in the magnetic recording medium of Example 2. The figure which shows the change of the medium noise power with respect to tsw / d about the magnetic recording medium of Example 4. FIG. FIG. 10 is a diagram showing the recording temperature dependence of CNR for the magnetic recording medium of Example 6. FIG. 10 is a diagram showing a change in CNR with respect to | TcB−Tw | for the magnetic recording medium of Example 6. FIG. 10 is a diagram showing the recording temperature dependence of CNR for the magnetic recording medium of Example 7. The figure which shows the change with respect to Tw-TcS of CNR about the magnetic recording medium of Example 7. FIG. FIG. 10 is a diagram showing the recording temperature dependence of CNR for the magnetic recording medium of Example 8. FIG. 10 is a diagram showing a change in CNR with respect to | TcE−Tw | for the magnetic recording medium of Example 8. FIG. 10 is a diagram showing the recording temperature dependence of CNR for the magnetic recording medium of Example 10. The figure which shows the change with respect to Tw-TcE of CNR about the magnetic recording medium of Example 10. FIG. 1 is a plan view of a recording layer of a magnetic recording medium according to an embodiment of the present invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Board | substrate, 12 ... Underlayer, 13 ... Base layer, 14 ... Switching layer, 15 ... Recording layer, 16 ... Protective layer, 21 ... Laser, 22 ... Recording head, 31 ... Magnetic particle, 32 ... Nonmagnetic material, 61 DESCRIPTION OF SYMBOLS ... Substrate, 62 ... Underlayer, 63 ... Functional layer, 64 ... Recording layer, 65 ... Protective layer, 66 ... Switching layer, 71 ... Magnetic particle, 72 ... Nonmagnetic material, 81 ... Magnetic layer, 82 ... Nonmagnetic layer, 83, 84 ... functional layer, 91 ... second functional layer, 101 ... substrate, 102 ... underlayer, 103 ... functional layer, 104 ... recording layer, 105 ... protective layer.

Claims (6)

A substrate, a base layer including a magnetic material formed on the substrate, a switching layer including a magnetic material formed on the base layer, a plurality of magnetic particles formed on the switching layer, and Comprising a recording layer having a structure having a non-magnetic wall filling between the magnetic particles, and the base layer, the switching layer, and the recording layer are laminated so as to exert an exchange coupling interaction,
When the Curie temperature of the switching layer is TcS and the Curie temperature of the base layer is TcB, the following condition is satisfied: TcS <TcB
A structure of the base layer, the switching layer, and the recording layer is set so as to satisfy   The magnetic recording medium according to claim 1, wherein the switching layer and the base layer include an amorphous rare earth-transition metal alloy.   3. The magnetic recording medium according to claim 1, wherein the switching layer and the base layer have a structure having a plurality of magnetic particles and a non-magnetic material wall filling between the magnetic particles. Comprising: a magnetic recording medium; means for heating the magnetic recording medium; and means for applying a magnetic field to the magnetic recording medium,
The magnetic recording medium includes a substrate, a base layer including a magnetic body formed on the substrate, a switching layer including a magnetic body formed on the base layer, and a plurality of layers formed on the switching layer. And a recording layer having a structure having a nonmagnetic wall filling between the magnetic particles, and the base layer, the switching layer, and the recording layer are laminated so as to exert an exchange coupling interaction, When the Curie temperature of the switching layer is TcS and the Curie temperature of the base layer is TcB, the following condition is satisfied: TcS <TcB
A structure of the base layer, the switching layer, and the recording layer is set so as to satisfy the above condition. When the recording temperature on the recording layer is Tw, the following condition is satisfied: 0 <Tw−TcS <100K
The magnetic recording apparatus according to claim 4, wherein:   5. The magnetic recording apparatus according to claim 4, wherein a distance between the magnetic recording medium and a means for applying a magnetic field to the magnetic recording medium is set to be smaller than 100 nm.

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