JP2005289693A - Artificial quartz member, optical element, optical system, projection aligner, and method for selecting artificial quartz member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an artificial quartz member whose transmission properties hardly deteriorate even when it is repeatedly irradiated with high-output, short-pulse laser beam for a long period of time. <P>SOLUTION: An optical element is obtained by using the artificial quartz member characterized in that lowering of the refractive index of a normal light ray 32 or abnormal light ray 33, generated at an irradiated part, is ≤50 ppm when the member is irradiated with 5.0×10<SP>7</SP>pulses of ArF eximer laser beam having a fluence of 500 mJ/cm<SP>2</SP>. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an artificial crystal member, an optical element optical system, a projection exposure apparatus, and an artificial crystal member selection method in an apparatus using a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns as a light source. is there.

For integrated circuit pattern transfer such as IC (Integrated Circuit) and LSI (Large Scale Integration), a reduction projection exposure apparatus (or photolithography apparatus) is mainly used. The projection optical system used in this apparatus is required to have a wide exposure area and a higher resolving power over the entire exposure area as the integrated circuit is highly integrated. In order to improve the resolution of the projection optical system, it is conceivable to shorten the exposure wavelength or increase the numerical aperture (NA) of the projection optical system. With the progress of technologies such as increasing the lens diameter, NA is gradually approaching the design value close to the upper limit of 1. The exposure wavelength is being shortened from a KrF (248 nm) excimer laser, which is currently used mainly as a light source for semiconductor exposure apparatuses, to an ArF (193 nm) excimer laser, which is a deep ultraviolet light source. In order to further increase the integration, a vacuum ultraviolet F ₂ (157 nm) laser or the like is also being studied. In general, high NA and short wavelength are greatly restricted by the size and physical properties of glass materials used.

  Recently, an exposure method in which incident light is polarized by positively using a polarizing optical element has been studied as a technique for further improving the imaging performance without changing the NA or wavelength in a semiconductor exposure apparatus or the like. For example, an unwanted background spectrum associated with an excimer laser narrowed using a polarizing optical element is eliminated (Patent Document 1), or the depth of focus is increased without using a special photomask or process. (Patent Document 2).

  A deflection optical element is an optical element for controlling the deflection state of light. There are a polarizer that obtains linearly polarized light from natural light and elliptically polarized light, a depotorizer for eliminating a specific polarization state, a wave plate (phase difference plate) that converts a polarization state by giving a phase difference between intrinsic polarization light, and the like.

  In order to produce these polarizing optical elements, a transparent crystal material having birefringence is often used instead of an organic substance because it can be used in a wide wavelength range and has a very high accuracy. Quartz is a typical material.

  Examples of the polarizer include a polarizing beam splitter such as a Glan-Thompson prism. When incident on a birefringent optical crystal from a direction other than the optical axis, it is divided into two linear deflections. A linear deflection can be obtained by blocking or excluding either one of the rays.

  The wave plate is an optical element that utilizes a phase difference generated between two intrinsic polarized lights traveling through a birefringent optical crystal. A typical example is a quarter wave plate that converts linearly polarized light into circularly polarized light and circularly polarized light into linearly polarized light.

  In general, it is difficult to make light having a specific polarization state completely unpolarized. Therefore, the depolarizer, for example, generates a phase difference of more than a wavelength between two intrinsic polarized lights, cancels the coherence, or continuously rotates the quarter wave plate, thereby making the polarization property temporal. There are things that can be resolved.

  What is required when these polarizing optical elements are used in laser optical devices is that the transmittance does not deteriorate due to long-term laser irradiation, but the polarizing optical characteristics (size and direction of birefringence) It is also necessary not to change. If density changes occur in these polarizing optical elements due to laser irradiation, induced birefringence occurs due to internal stress in addition to essential birefringence, and the optical characteristics of the polarizing optical element are significantly deteriorated. Therefore, no change in volume is a necessary condition for the polarization optical characteristics of the polarization optical element to remain unchanged.

  Furthermore, in recent years, the use of polarizing optical elements is also being studied in ultra-short pulse laser processing machines (Patent Document 3) other than the semiconductor exposure apparatus described above. Therefore, it is assumed that the polarizing optical element is irradiated with laser light having very strong power over a long period of time. Therefore, there is a strong demand for quartz to investigate what happens under high-energy laser irradiation and how to identify quartz members with high laser resistance.

  On the other hand, there is a diffractive optical element (DOE) as an element that can perform spectroscopic, branching, shaping, or the like of light by drawing a specific pattern with a size of about a used wavelength on a substrate. As an example of the DOE, the diffraction lens changes the diffraction angle when the pattern interval is changed with respect to light having a certain wavelength λ, so that the light can be collected at one point. In this diffractive lens, since the groove interval is about the wavelength, one element can be made very small.

  When such diffractive lenses are two-dimensionally arranged, a microlens array (microfly eye) can be produced. In recent years, this microlens array is a diffractive optical element that is expected to be used as one of homogenizers that homogenize the energy profile of a laser.

  What is required when using these diffractive optical elements in a laser optical device is that the transmittance does not deteriorate due to long-term irradiation, as in the above-described polarizing optical element, but the refractive index and volume change. Equally necessary is not. This is because if a refractive index change occurs in these diffractive optical elements due to irradiation, the diffraction angle may change or the cancellation of the zero-order light may not be as designed in the optical design. Similarly, when the volume changes, the pattern shape and the groove shape change, and the wavefront is disturbed.

  When such a diffractive optical element is used in a laser optical device, it is assumed that the diffractive optical element is irradiated with laser light having a very strong power for a long period of time. Quartz glass, which is a typical optical member, is known to cause a change in refractive index when irradiated with a high-energy laser, and therefore is not very suitable for a diffractive optical element used in these apparatuses. Therefore, there is a strong demand for a crystal substrate material having high transmittance and high laser resistance, and quartz crystal is attracting attention as one of them.

  There are limited industrially available birefringent crystal materials having high transmittance and high chemical stability in a short wavelength region such as excimer laser. These include magnesium fluoride, sapphire and quartz. Among them, quartz is the most frequently used birefringent crystal material because it is relatively inexpensive and easy to process.

  By the way, since the above-mentioned polarizing optical element has been conventionally used in an optical microscope or the like, laser light having very strong power such as a semiconductor exposure apparatus has not been irradiated for a long time. For this reason, in quartz, which is an optical material suitable for a polarizing optical element or a diffractive optical element, there is almost no information such as resistance to high-energy ultraviolet light such as an excimer laser for a long time. In particular, there is no information other than the induced absorption related to coloring (Patent Document 4).

  Although conventional quartz exhibits satisfactory performance as an optical article for visible light, its optical characteristics often deteriorate when repeatedly irradiated with high-power light at a short wavelength for a long period of time, such as an excimer laser. Regarding coloring, a correlation with a specific impurity has already been found (Patent Document 4).

  On the other hand, as a result of repeating the experiment, the present inventors have found that the transmittance of the crystal deteriorates due to factors other than the generation of internal absorption. While searching for the cause, it was found that it was caused by an increase in scattering loss due to a change in the refractive index (density) of quartz. It was also noticed that such a change in refractive index was influenced by specific impurities and defects contained therein.

The reason for the lowering of the refractive index (volume expansion) of the quartz is considered to be that the irradiated portion of the crystal, which is a crystal, becomes amorphous (amorphous). Such a phenomenon has already been observed by irradiation with high energy radiation such as a neutron beam or an electron beam (Non-Patent Document 1). However, there has been no report to date that an amorphous state has been observed when laser light having an energy density less than the breakdown threshold is irradiated for a long period of time.
Japanese Patent Laid-Open No. 5-47636 Japanese Patent Laid-Open No. 11-354432 JP 2003-211400 A Japanese Patent Application No. 2003-194824 J. et al. P. Bonnet, et al., The amorphization process of neutron-irradiated crystallized quarts studied by Brillouin scattering, “Journal of Non-Crystalline. 19”. 167 p. 199-204.

  The change in the matrix of the optical member caused by a laser pulse with energy smaller than the band gap of the material is presumed to be due to multiphoton absorption. In fact, it is well known that the increase in the refractive index observed in quartz glass irradiated with a KrF (or ArF) excimer laser is mainly due to two-photon absorption. From the analogy, it is estimated that the decrease in the refractive index of the laser irradiated quartz is also due to multiphoton absorption.

  Multiphoton absorption is more likely to occur as the photon density increases in space and time. It is often expressed that the peak value (value obtained by dividing the energy density by the pulse width) is high. In other words, it can be said that laser light having higher energy per unit area and unit time is more likely to cause multiphoton absorption, and the optical member is more severe light. Examples of pulsed laser light that causes multiphoton absorption in quartz include nanosecond lasers such as excimer lasers and YAG lasers, and ultrashort pulse (femtosecond) lasers such as Ti sapphire lasers. An excimer laser is a typical light source of a semiconductor exposure apparatus. In recent years, YAG lasers and ultrashort pulse lasers are attracting attention because they are used in laser processing machines that perform fine processing (drilling, cutting, modification, etc.) of materials.

Wavelength typical excimer laser is _{F 2} is 157 nm, ArF is 193 nm, KrF is 248 nm, the pulse width is approximately about 20 ns (nanoseconds). The wavelength of the YAG laser is 1064 nm, but the wavelength is converted by combining a nonlinear optical member, and is often used for fourth harmonic (266 nm) and fifth harmonic (213 nm). The pulse width is about 10 ns. Ti sapphire lasers have a wavelength of 800 nm and a pulse width of about 100 fs (femtoseconds), but many take a variable system through optical elements.

  For example, in the case of ultrashort pulse light, the pulse width is extremely short even if the wavelength is long, so that the peak value is high and multiphoton absorption occurs. Even in a wide band gap member such as quartz, transition between multi-photon bands occurs in near infrared light. That is, ultrashort pulse light is severe light for an optical element, and deterioration of the optical element is inevitable due to long-term irradiation.

  In view of the above situation, an object of the present invention is to provide a quartz member whose transmission characteristics are not easily deteriorated even when a high-power, short-pulse laser beam is repeatedly irradiated for a long period of time.

  It is another object of the present invention to provide a method for selecting a quartz member whose transmission characteristics are unlikely to deteriorate.

  It is another object of the present invention to provide an optical exposure apparatus provided with a quartz member in which the transmission characteristics hardly deteriorate.

The invention according to claim 1 is an artificial crystal member used for an optical element to be irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and has a fluence of 500 mJ / cm ² . When the ArF excimer laser beam is irradiated with 5.0 × 10 ⁷ pulses, a decrease in the refractive index of ordinary light or extraordinary light generated in the irradiated portion is 50 ppm or less.

The invention according to claim 2 is an artificial crystal member used for an optical element irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and has a fluence of 500 mJ / cm ² . The height of the irradiating portion that expands when irradiated with 5.0 × 10 ⁷ pulses of ArF excimer laser light is 20 nm or less.

The invention according to claim 3 is an artificial crystal member used for an optical element irradiated with pulsed laser light having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and has a fluence of 500 mJ / cm ² . When the ArF excimer laser beam is irradiated with 5.0 × 10 ⁷ pulses, the induced birefringence amount is 90 nm / cm or less.

  The invention according to claim 4 is an artificial quartz member used for an optical element that transmits visible light and light having a shorter wavelength than visible light, and the refractive index homogeneity of ordinary light or extraordinary light is 100 ppm or less. Features.

  According to a fifth aspect of the present invention, an optical element using the artificial quartz member according to any one of the first to fourth aspects has a polarization characteristic.

  The invention according to claim 6 is characterized in that the optical element using the artificial quartz member according to any one of claims 1 to 4 has diffraction characteristics.

The invention according to claim 7 is provided with the optical element according to any one of claims 1 to 6, and the pulse laser beam irradiated to the optical element is a KrF, ArF, or F ₂ laser. It is characterized by.

  The invention according to an eighth aspect is characterized in that the optical element according to any one of the first to sixth aspects is provided, and the pulsed laser light applied to the optical element is a YAG laser.

  A ninth aspect of the invention includes the optical element according to any one of the first to sixth aspects, wherein the pulsed laser light applied to the optical element has a pulse width shorter than about 1 picosecond. It is characterized by.

  A tenth aspect of the present invention includes an illumination optical system that illuminates a mask using a laser beam having a wavelength shorter than 400 nm as a light source, and a projection optical system that projects and exposes a pattern image of the mask onto a substrate to be exposed. The optical element according to any one of claims 1 to 6 is arranged in the illumination optical system or the projection optical system.

The invention according to claim 11 is a method for selecting an artificial quartz crystal member used in an optical system irradiated with pulsed laser light having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and has a fluence of 500 mJ / cm ² . When the ArF excimer laser light having a wavelength of 5.0 × 10 ⁷ pulses is irradiated, the drop in the refractive index of ordinary or extraordinary rays generated in the irradiated portion is 50 ppm or less, the height of the expanding irradiated portion is 20 nm or less, Alternatively, the induced birefringence amount is 90 nm / cm or less.

According to the first aspect of the present invention, there is provided an artificial quartz crystal member used for an optical element irradiated with a pulsed laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and having a fluence of 500 mJ / cm ² . An optical element can be provided by using an artificial crystal member in which a decrease in refractive index of ordinary light or extraordinary light generated in the irradiated portion when irradiated with 5.0 × 10 ⁷ pulses of ArF excimer laser light is 50 ppm or less Therefore, it is possible to provide an optical element whose transmittance does not decrease by 10% or more.

According to the second aspect of the present invention, there is provided an artificial quartz crystal member used for an optical element irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and has a fluence of 500 mJ / cm ² . When an ArF excimer laser beam is irradiated with 5.0 × 10 ⁷ pulses, an optical element can be provided by using an artificial crystal member having a height of an expanding irradiation portion of 20 nm or less, so that the transmittance is 10% or more. An optical element that does not decrease can be provided.

According to invention of Claim 3, it is an artificial quartz crystal member used for the optical element with which a wavelength is shorter than 1600 nm, and a pulse laser beam with a pulse width shorter than 100 ns is irradiated, Comprising: A fluence of 500 mJ / cm ² is used. When an ArF excimer laser beam is irradiated with 5.0 × 10 ⁷ pulses, an optical element can be provided by using an artificial crystal member having an induced birefringence of 90 nm / cm or less, and the transmittance is reduced by 10% or more. An optical element that does not work can be provided.

  According to invention of Claim 4, it is an optical element which permeate | transmits the light of shorter wavelength than visible light or visible light, Comprising: The artificial quartz crystal member whose refractive index homogeneity of an ordinary ray or an extraordinary ray is 100 ppm or less is used Thus, an optical element can be provided, so that a function according to the optical design can be exhibited at any location of the optical element, and unevenness generated by passing through the element can be reduced.

  According to the invention described in claim 5, since the optical element using the artificial crystal member according to any one of claims 1 to 4 has polarization characteristics, a polarization optical element in which the transmittance does not decrease is provided. it can.

  According to the invention described in claim 6, since the optical element using the artificial crystal member according to any one of claims 1 to 4 has a diffraction characteristic, a diffractive optical element in which the transmittance is not lowered is provided. it can.

According to the invention described in claim 7 and claim 8, in addition to the effects of any one of claims 1 to 6, a pulsed laser beam, KrF, ArF, F ₂ laser, or YAG laser Therefore, it is possible to provide an optical system having excellent resistance even when the light source is a high energy pulse laser.

  According to the ninth aspect of the present invention, the pulse laser beam according to any one of the first to sixth aspects has a pulse width shorter than about 1 picosecond, and thus has excellent resistance to the ultrashort pulse laser. An optical system can be provided.

  According to the invention described in claim 10, an illumination optical system that illuminates the mask using a laser beam having a wavelength shorter than 400 nm as a light source, and a projection optical system that projects and exposes a pattern image of the mask onto the substrate to be exposed. Since the optical element according to any one of claims 1 to 6 is arranged in the illumination optical system or the projection optical system, a projection exposure apparatus with excellent durability can be provided.

According to the eleventh aspect of the present invention, there is provided a method for selecting an artificial quartz crystal member used in an optical system that is irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, which is 500 mJ / cm ^2. When irradiation with 5.0 × 10 ⁷ pulses of ArF excimer laser light having a fluence of ≦ 5, the decrease in the refractive index of ordinary rays or extraordinary rays generated in the irradiated portion is 50 ppm or less, and the height of the expanding irradiated portion is 20 nm. Since the amount of induced birefringence is 90 nm / cm or less, an artificial quartz member having excellent resistance to a high energy pulse laser such as an excimer laser, a YAG laser, or an ultrashort pulse laser can be selected.

  By investigating the cause of the deterioration of the optical characteristics of quartz when the high-power short pulse light is repeatedly irradiated for a long period of time, the present inventors have found that the deterioration of the optical characteristics is not limited to the generation of internal absorption. The inventors have found that this is due to an increase in scattering loss due to a change in the refractive index (density), leading to the present invention.

Embodiments of the present invention will be described below.
Embodiment 1 of the Invention

  Hereinafter, Embodiment 1 of the present invention will be described with reference to FIG. 1 and FIG.

  FIG. 1 is a schematic diagram of a polarizing optical element according to Embodiment 1 of the present invention. FIG. 1 shows a polarizing beam splitter such as a Glan-Thompson prism as an example of a polarizer. When incident on a birefringent optical crystal from a direction other than the optical axis 31, it is divided into two linear deflections of an ordinary ray 32 and an extraordinary ray 33. A linear deflection can be obtained by blocking or excluding either one of the rays.

  FIG. 2 is a schematic diagram of a diffractive optical element (DOE) according to an embodiment of the present invention. FIG. 2A shows a front view of a diffractive lens as an example of the DOE, and FIG. 2B shows a plan view of the diffractive lens. As is well known, light is diffracted at a wavelength λ that satisfies the following diffraction conditions.

  2nd × sin θ = mλ (m = 1, 2,...)

  Here, n is a refractive index, d is a pattern interval, θ is a diffraction angle, and m is a diffraction order (generally using 1 o'clock light). Since the diffraction angle changes when the pattern interval d is changed for light of a certain wavelength λ, the light can be collected at one point. This is called a diffractive lens. In the diffractive lens, the interval between the grooves is about a wavelength, so that one element can be made very small.

  Next, a method for measuring an artificial quartz member used for the above-described optical element will be described.

  Quartz ingots were produced by hydrothermal synthesis. The hydrothermal synthesis method is a method of growing in a high-pressure and high-temperature autoclave in which crystal scraps and an alkaline solution are suspended at the bottom and a crystal seed crystal is suspended at the top. A 35 mmφ × 5 mm or 35 mmφ × 15 mm thick block was cut out from the region excluding the seed crystal of the synthesized Z-plate quartz crystal. The 30φ plane was perpendicular to the Z axis. A 1 mm-thick disk from the 35 mmφ × 5 mm thick block and a 10 mm thick disc from the 35 mmφ × 15 mm thick block were finely ground and polished to obtain a sample having a final shape of 30 mmφ × 1 mm or 30 mmφ × 10 mm thick.

  A commercially available double beam spectrophotometer was used for optical transmission measurement in the near infrared-ultraviolet region. A halogen lamp is used as a light source in the near-infrared region, and a deuterium lamp is used as a light source in the ultraviolet region, and the light split by the diffraction grating is separated into two rays of reference light and measurement light. Both separated light beams are introduced into a sample chamber purged with nitrogen gas. There is nothing on the sample stage on the reference light side, and a quartz sample of 30 mmφ × 1 mm is placed on the sample stage on the measurement light side. The reference light and measurement light that have passed through the sample chamber are collected by an integrating sphere and detected by a photomultiplier. The ratio between the reference light intensity and the measurement light intensity was defined as the transmittance.

  A commercially available single beam spectrophotometer was used for optical transmission measurement in the vacuum ultraviolet region. Using a deuterium lamp as a light source, light split by a diffraction grating is introduced into a sample chamber that is evacuated by a turbo molecular pump. The intensity of light transmitted through the sample chamber is detected by a photomultiplier, and the spectrum is recorded in a computer. First, a blank spectrum is first measured with nothing on the sample stage. Thereafter, a quartz sample of 30 mmφ × 1 mm is placed on the sample stage, and the intensity of light passing through the sample is measured. The intensity ratio of the light that passed through the blank and the sample was defined as the transmittance of the sample.

  The internal refractive index homogeneity of the quartz sample was measured with a commercially available Fizeau interferometer. A He—Ne laser beam having a wavelength of 633 nm is used as a light source, and becomes parallel light after passing through a diverging lens, a beam splitter, and a collimator lens, and reaches a plane mirror called a reference plate that is polished with high accuracy. Place the test object between the lens and the reference plate. The reflected light from the surface of the test object and the reflected light from the reference surface return to the original optical path, interfere with each other, and are guided to the image sensor (CCD camera) by the beam splitter, thereby obtaining an interference fringe image. The interference fringe image is image-analyzed by the fringe scanning method and recorded as a phase difference distribution, that is, a homogeneity of the internal refractive index.

  The surface shape of the quartz was measured with a microscope having a commercially available Fizeau interferometer. Although the basic measurement principle is the same, in the measurement of the surface shape, the reference plate is flat glass that transmits He-Ne, and the test object is placed behind the reference plate. An interference fringe image is obtained from the reflected light from the reference surface and the reflected light from the surface of the test object. Similarly, the image is analyzed by the fringe scanning method and recorded as a phase difference distribution, that is, a surface shape.

  The impurity content contained in the sample was quantitatively evaluated by an ICP mass spectrometer.

Next, the present inventors obtain various grades of quartz ore from several companies, make the above samples, and repeatedly irradiate them with ArF excimer laser (wavelength 193 nm, pulse width ˜30 ns) for a long time. Changes were measured. The sample was irradiated in an aluminum chamber purged with nitrogen gas. ArF excimer laser was irradiated as a 1 mmφ spot perpendicular to the sample surface by passing the aperture and lens. At this time, the fluence of the excimer laser was 500 mJ / cm ² on the sample surface. During irradiation, the in-situ transmittance of the sample was measured by a beam splitter and photodiode placed before and after the sample. When irradiation was performed up to 5.0 × 10 ⁷ pulses, some regularity was found although the transition of transmittance varied depending on the sample.

First, the sample is slightly decreased by a few percent from immediately after the start of irradiation to 5.0 × 10 ⁶ pulses and is saturated. At this time, black smoke-like coloring is observed in the sample. As a result of analyzing this behavior, it was found to follow a first-order reaction. That is, there is a precursor with a center of contact, and the photochemical reaction changes it to a color center. Therefore, it is concluded that the cause of this transmittance deterioration is induction of internal absorption due to defects.

On the other hand, it was observed that when the number of irradiation pulses reached 2.0 × 10 ⁷ pulses, the deterioration of the transmittance was linear and not saturated. A clear correlation could not be found between the slope of the linear transmittance deterioration and the color density. However, a clear correlation was found between the refractive index homogeneity and the slope of transmittance degradation. In other words, the refractive index decreases as the sample has a larger inclination. Further, when the surface shape was measured, the refractive index lowering portion protruded, and it was found that the refractive index decrease was caused by the density change.

  Further, when the amount of birefringence was measured, it was found that there was a correlation with the height of the protruding portion. This is thought to be due to the occurrence of internal stress due to the volume change of the crystal material due to the bulge and birefringence was induced.

  It is not well known that this protruding portion causes a density (refractive index) change without a phase change by laser light irradiated with an energy density of the crystal material below the fracture threshold. In addition to the generation of internal defects, it can be said that a new index for evaluating the deterioration of the optical characteristics of quartz has been found. Further, since this density change does not saturate in long-term irradiation, it may have a stronger influence on the transmittance deterioration than the generation of the colored center, and is an evaluation item to be noted more carefully.

That is, the present invention uses an artificial crystal member that suppresses the height of the irradiating portion when the ArF excimer laser beam having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, Provided is an optical element having no deterioration in transmittance.

Further, when an ArF excimer laser beam having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, an optical material with no deterioration in transmittance can be obtained by using an artificial crystal member that suppresses the amount of induced birefringence. An element is provided.

  Alternatively, an artificial quartz member used for an optical element that transmits visible light and light having a wavelength shorter than that of visible light, and using an artificial quartz member that suppresses refractive index homogeneity of ordinary rays or extraordinary rays can reduce transmittance. An optical element without deterioration is provided.

Alternatively, by using the above-described artificial crystal member for an optical element having polarization characteristics as shown in FIG. 1, an optical element with little deterioration in transmittance can be provided.
[Embodiment 2 of the Invention]

  The second embodiment of the present invention will be described below with reference to FIG.

FIG. 3 is a schematic diagram of a projection exposure apparatus according to Embodiment 2 of the present invention. For example, UV light of 250 nm or less such as KrF excimer laser, ArF excimer laser, F ₂ laser, etc. is irradiated from the light source 1, passes through the illumination optical system 4 and projection optical system 16 composed of various optical elements, and the circuit pattern of the mask 14. Is an apparatus for transferring the exposure shape to an object to be exposed 20 such as a wafer.

  In this projection exposure apparatus, the ultraviolet light emitted from the light source 1 is converted into a parallel light beam in a light beam shaping optical system 3 in which a plurality of lenses 2 are arranged, polarized by a mirror 4a, and then a homogenizer 5 of the illumination optical system 4. Incident.

  In the homogenizer 5, the light is first incident on the diffractive optical element 6, converted into a divergent light beam having a ring-shaped cross section, converted into a substantially parallel light beam via a plurality of zoom lenses 7, and incident on the micro fly's eye 8. The The micro fly's eye 8 is an optical element composed of minute lenses having a regular hexagonal shape that are densely arranged in a large number of vertical and horizontal directions. A single ring is formed on the rear focal plane of each micro lens based on an incident light beam. To form a light source.

  Light beams from a large number of light sources formed on the rear focal plane of the micro fly's eye 8 irradiate the fly's eye lens 11 through the zoom lens 9 in a superimposed manner. The fly-eye lens 11 is configured by arranging a large number of lens elements having convex surfaces on the incident surface side and the emission side in a dense and vertical and horizontal manner, and the exposure area formed in the shape of the illumination field of the mask 14 and the wafer shape. It has a rectangular cross section similar to the shape, and a ring-shaped substantial surface light source is formed on the rear focal plane of the fly-eye lens 11.

  Thereafter, the light flux in which the deviation of the light flux is corrected by the homogenizer 5 and the unevenness of the ultraviolet energy density is reduced is subjected to the light condensing action of the condenser lens 12, and then a predetermined pattern is formed via the mirror 13. The mask 14 is uniformly irradiated in a superimposed manner. Thereafter, an exposure shape such as a circuit pattern of the mask 14 is transferred to an object to be exposed 20 such as a wafer via a projection optical system 16 having a large number of lenses 15.

  In the present invention, artificial quartz members can be used as various optical elements of such a projection exposure apparatus. In particular, since the artificial quartz member has a strong birefringence, it is desirable to use it as an optical element that can be used even if it has a birefringence.

  More specifically, it can be used as an optical element constituting an optical integrator such as the homogenizer 5 of the projection exposure apparatus. As an optical element constituting this optical integrator, in the projection exposure apparatus of Embodiment 2 of the present invention, a microarray lens such as a micro fly's eye 8 composed of a diffractive optical element such as a homogenizer 5 and a plurality of extremely small lens elements. , Fly eye lens 11 and the like.

When the ArF excimer laser beam having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, the optical element described in the first embodiment of the present invention is arranged in the illumination optical system 4 to shorten the length. Since the optical element capable of suppressing the deterioration of the transmittance characteristics even if it is repeatedly irradiated with high-power laser light with a wavelength for a long period of time, a projection exposure apparatus with excellent durability can be provided.

Although not used in the projection exposure apparatus according to the second embodiment of the present invention, it can also be used in a rod-shaped internal reflection type optical element such as a kaleidoscope.
Embodiment 3 of the Invention

  Embodiment 3 of the present invention will be described below with reference to FIG.

  FIG. 4 is a schematic diagram of a laser processing machine using an illumination optical system according to Embodiment 3 of the present invention. For example, a YAG laser (wavelength: 1024 nm) is irradiated from a light source 1 with an ultrashort pulse laser beam having a pulse width shorter than about 1 picosecond, and is expanded by a zoom expander 21 including various optical elements. Subdividing at 22, superimposing them at the same location, making the laser beam uniform and irradiating the object to be processed 23 to perform processing.

  It goes without saying that the present invention is effective for a laser processing machine using an ultrashort pulse laser as shown in Patent Document 3.

  The wavelength of the laser is converted by combining a YAG laser with a non-linear optical member, and is often used as a fourth harmonic (266 nm) or a fifth harmonic (213 nm). The pulse width is about 10 ns. Ti sapphire lasers have a wavelength of 800 nm and a pulse width of about 100 fs (femtoseconds), but many take a variable system through optical elements.

In the present invention, it is assumed that the workpiece 23 is irradiated with a laser beam of 1600 nm or less and a pulse width of 100 ns or less. This is a wavelength and a pulse width at which multiphoton absorption can occur in a crystal when assuming an extremely standard density of 10 j / cm ² of a laser used in a laser processing machine.

When the ArF excimer laser beam having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, the optical element described in the first embodiment of the present invention is arranged in the illumination optical system 4 to shorten the length. Since it is equipped with an optical element that can suppress the deterioration of transmittance characteristics even if it is repeatedly irradiated with high-power laser light at a wavelength for a long period of time, a laser processing machine with excellent durability can be provided.

Examples according to embodiments of the present invention will be described below.
[Example 1]

ArF excimer laser was irradiated with 5.0 × 10 ⁷ pulses at 500 mJ / cm ² to various prepared quartz samples (30 mmφ × 1 mm). FIG. 5 shows a typical in-situ transmittance behavior diagram (% / mm) at 193 nm. The transmittance behavior of sample a and sample e was shown.

Sample e is saturated with a slight decrease of 0.5% from immediately after the start of irradiation to 5.0 × 10 ⁶ pulses. At this time, black smoke-like coloring is observed in the sample. It is observed that when the number of irradiation pulses reaches 2.0 × 10 ⁷ pulses, the deterioration of the transmittance which is linear and does not saturate starts. There is no clear correlation between the slope of the linear transmittance deterioration and the color density. However, when the refractive index homogeneity of the irradiated sample was measured, it was found that the irradiated portion had a lower refractive index.

Sample a is saturated with a slight decrease of 0.5% from immediately after the start of irradiation to 5.0 × 10 ⁶ pulses. At this time, black smoke-like coloring is observed in the sample. This is the same as the sample e. However, it was found that even when the number of irradiation pulses reached 2.0 × 10 ⁷ pulses and further increased to 5.0 × 10 ⁷ pulses or more, the transmittance a was not deteriorated in the sample a.

  FIG. 6 shows a correlation diagram between the slope of transmittance deterioration and the decrease in refractive index. The marks a to e correspond to the sample numbers. Although not shown in FIG. 5, the decrease in the inclination of the samples b to d increases in the order of the sample b, the sample c, and the sample d. It can be seen that samples a to e have a very good linear correlation. Therefore, the cause of the linear transmittance deterioration observed in FIG. 5 was attributed to the lowering of the refractive index of quartz.

Further, in the sample e like the sample e, the slope of the transmittance deterioration is larger than 1.0 × 10 ⁻⁷ (−% / mm / p) in the sample having a low refractive index amount larger than 50 ppm. That is, it is estimated that the long-term laser irradiation exceeding 1.0 × 10 ⁹ pulses causes the transmittance deterioration to be 10% or more, so that it cannot be actually used in an exposure apparatus or the like.

Therefore, when the ArF excimer laser beam having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, the decrease in the refractive index of the ordinary ray or extraordinary ray generated in the irradiated portion is 50 ppm or less. By using the artificial crystal member of ~ d, it is possible to provide an optical element having a transmittance deterioration of 10% or less.
[Example 2]

ArF excimer laser was irradiated with 5.0 × 10 ⁷ pulses at 500 mJ / cm ² to various prepared quartz samples (30 mmφ × 1 mm). As described above, when the refractive index homogeneity of the irradiated sample was measured, the irradiated portion had a low refractive index. When the surface shape of the low refractive index region was evaluated, it was found that the low refractive index region protruded.

  FIG. 7 shows the correlation between the slope of transmittance deterioration and the height of protrusion (convex amount). It can be seen that there is a linear correlation as shown in FIG. Therefore, lowering the refractive index of the crystal shown in FIG. 6 resulted in lower density.

Further, in the sample such as the sample e, the slope of the transmittance deterioration is larger than 1.0 × 10 ⁻⁷ (−% / mm / pulse) in the sample having a convex amount larger than 15 nm. In other words, the long-term laser irradiation exceeding 1.0 × 10 ⁹ pulses causes the transmittance deterioration to be 10% or more, so it is presumed that it cannot be actually used in a projection exposure apparatus or the like. .

Therefore, when the ArF excimer laser light having a fluence of 500 mJ / cm ² is irradiated with 5.0 × 10 ⁷ pulses, the artificial quartz crystal member of samples a to d whose height of the expanding irradiation part is 20 nm or less is used. Accordingly, it is possible to provide an optical element having a transmittance deterioration of 10% or less.
[Example 3]

ArF excimer laser was irradiated with 5.0 × 10 ⁷ pulses at 500 mJ / cm ² to various prepared quartz samples (30 mmφ × 1 mm). When the amount of birefringence of quartz was measured by the following method, it was found that birefringence was induced in the irradiated part.

  The amount of birefringence induced was measured by the crossed Nicols-sensitive color method. A dark field is created by placing two polarizing plates at right angles, and a document is placed between them. The phase difference caused by the birefringence inherent in the sample is visually observed through a sensitive color plate capable of converting from reddish brown to indigo color. The phase difference (nm) is estimated by comparing the color between the rotating disk strain standard and the sample. The induced birefringence (nm / cm) is evaluated by dividing the phase difference by the thickness of the sample.

  FIG. 8 shows the correlation between the slope of transmittance deterioration and the amount of induced birefringence. It can be seen that there is a linear correlation as shown in FIG. Therefore, the volume change due to the protrusion (convex amount) of the quartz crystal shown in FIG. 7 generates stress in the quartz crystal, resulting in this induced birefringence.

Further, in the sample such as sample e, the induced birefringence amount is larger than 90 nm / cm, and the slope of transmittance deterioration is larger than 1.0 × 10 ⁻⁷ (−% / mm / pulse). That is, it is estimated that the long-term laser irradiation exceeding 1.0 × 10 ⁹ pulses causes the transmittance deterioration to be 10% or more, so that it cannot be actually used in an exposure apparatus or the like.

Therefore, when using ArF excimer laser light having a fluence of 500 mJ / cm ² and irradiating 5.0 × 10 ⁷ pulses, the artificial crystal member of samples a to d whose induced birefringence is 90 nm / cm or less is used. Thus, an optical element having a transmittance deterioration of 10% or less can be provided.
[Example 4]

The refractive index homogeneity of various prepared quartz samples (30 mmφ × 1 mm) was measured before laser irradiation. A sample in which strong heterogeneity was observed was irradiated with 5.0 × 10 ⁷ pulses of ArF excimer laser at 500 mJ / cm ² . The irradiated area was strongly colored and a strong reduction in refractive index was induced. The coloring could be confirmed by visual inspection, and it looked like black-gray smoke. The slope of the transmittance deterioration of such a sample was larger than 1.0 × 10 ⁻⁷ (−% / mm / pulse), and the laser resistance was generally poor.

  One of the causes of strong heterogeneity is impurity concentration distribution and dislocation. In other words, a sample with strong heterogeneity has poor crystallinity, and there is a high possibility that the cause of coloring is inherent. Therefore, when a laser beam is irradiated on quartz having strong inhomogeneity, the deterioration of the transmittance appears clearly due to coloring or lowering the refractive index.

Accordingly, an artificial quartz crystal member used for an optical element that transmits visible light and light having a wavelength shorter than that of visible light, and using an artificial quartz crystal having an ordinary ray or extraordinary ray refractive index homogeneity of 100 ppm or less, allows transmittance. An optical element with little deterioration can be provided.
[Example 5]

4. A non-defective crystal selected by the method of Examples 1 to 3 described above is subjected to KrF excimer laser (wavelength 248 nm, pulse width ˜30 ns) or F ₂ laser (wavelength 157 nm, pulse width ˜30 ns) at 500 mJ / cm ² . When 0 × 10 ⁷ pulses were irradiated, the slope of transmittance deterioration was all smaller than 1.0 × 10 ⁻⁷ (−% / mm / pulse).
[Example 6]

The non-defective crystal selected by the method of Examples 1 to 3 described above was irradiated with 5.0 × 10 ⁷ pulses of Nd: YAG laser high wavelength (wavelength 266 nm, pulse width 10 ns) at 300 mJ / cm ^2. The slopes of rate degradation were all smaller than 1.0 × 10 ⁻⁷ (−% / mm / pulse).
[Example 7]

Arranged in an illumination optical system of an exposure apparatus including an illumination optical system that illuminates a mask using ArF excimer laser light as a light source, and a projection optical system that projects and exposes a pattern image of the mask onto an exposure substrate (resist) A non-defective crystal selected by the method of Example 1 or 2 described above was used for a homogenizer (diffractive optical element) substrate. The exposure apparatus maintained good imaging performance on the resist up to a pulse number of 1.0 × 10 ⁹ . On the other hand, when the defective crystal selected by the method of Examples 1 to 3 described above was used for the homogenizer substrate, the illuminance on the resist was reduced by about 70% when 1.0 × 10 ⁹ pulses were irradiated. A significant decrease in contrast of the pattern was observed. When the crystal homogenizer used was taken out and observed, a strong cloudiness was observed in the irradiated part. This white turbidity was confirmed to be a deterioration of refractive index homogeneity by measurement with an interferometer.

  According to the present invention, a crystal having excellent resistance to a high energy pulse laser such as an excimer laser, a YAG laser, or an ultrashort pulse laser can be selected. In addition, when an optical element that is used for these beams with a selected crystal, such as a wave plate or a polarizing beam splitter, is produced, a good element that maintains optical characteristics over a long period of time can be provided. Further, when the selected crystal is used in an exposure apparatus, a processing apparatus, or the like, it is possible to provide an element that does not deteriorate the performance of the apparatus over a long period of time.

It is the schematic of the polarizing optical element which concerns on Embodiment 1 of this invention. 1 is a schematic diagram of a diffractive optical element according to Embodiment 1 of the present invention. It is the schematic of the projection exposure apparatus which concerns on Embodiment 2 of this invention. It is the schematic of the laser beam machine which concerns on Embodiment 3 of this invention. It is a figure which shows the degradation behavior of the typical transmittance | permeability in wavelength 193nm observed in situ which concerns on Embodiment 1 of this invention. It is a figure which shows the correlation of the inclination of the transmittance | permeability degradation which concerns on the same Embodiment 1, and refractive index fall. It is a figure which shows the correlation of the inclination of the transmittance | permeability degradation which concerns on the same Embodiment 1, and a convex amount. It is a figure which shows the correlation of the inclination of the transmittance | permeability degradation based on the Embodiment 1, and induced birefringence.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 3 Light beam shaping optical system 4 Illumination optical system 5 Homogenizer 6 Diffractive optical element (artificial crystal member)
8 Micro fly eye (artificial quartz)
11 Fly eye (artificial quartz)
14 mask 16 projection optical system 20 object to be exposed 21 zoom expander 22 fly eye lens 23 object to be processed 31 optical axis 32 ordinary ray 33 extraordinary ray

Claims (11)

An artificial quartz member used for an optical element that is irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and an ArF excimer laser beam having a fluence of 500 mJ / cm ² is 5.0 × An artificial quartz crystal member characterized in that a decrease in refractive index of ordinary light or extraordinary light generated in an irradiated part when irradiated with 10 ⁷ pulses is 50 ppm or less. An artificial quartz member used for an optical element that is irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and an ArF excimer laser beam having a fluence of 500 mJ / cm ² is 5.0 × An artificial quartz crystal member characterized in that the height of an irradiation part that expands when irradiated with 10 ⁷ pulses is 20 nm or less. An artificial quartz member used for an optical element that is irradiated with a pulse laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, and an ArF excimer laser beam having a fluence of 500 mJ / cm ² is 5.0 × when ¹⁰⁷ pulse irradiation, artificial quartz member, wherein the induced birefringence amount is less 90 nm / cm. An artificial crystal member for use in an optical element that transmits visible light and light having a shorter wavelength than visible light, wherein the refractive index homogeneity of ordinary light or extraordinary light is 100 ppm or less. An optical element using the artificial quartz member according to claim 1 has a polarization characteristic. An optical element using the artificial quartz member according to claim 1 has a diffraction characteristic. An optical system comprising the optical element according to claim 1, wherein the pulsed laser light applied to the optical element is a KrF, ArF, or F ₂ laser. An optical system comprising the optical element according to any one of claims 1 to 6, wherein the pulsed laser light applied to the optical element is a YAG laser. An optical system comprising the optical element according to any one of claims 1 to 6, wherein the pulsed laser light applied to the optical element has a pulse width shorter than about 1 picosecond. An illumination optical system that illuminates a mask using laser light having a wavelength shorter than 400 nm as a light source, and a projection optical system that projects and exposes a pattern image of the mask onto an exposure substrate, and in the illumination optical system or the projection A projection exposure apparatus comprising the optical element according to any one of claims 1 to 6 disposed in an optical system. A method for selecting an artificial quartz crystal member for use in an optical system that is irradiated with a pulsed laser beam having a wavelength shorter than 1600 nm and a pulse width shorter than 100 ns, which uses ArF excimer laser light having a fluence of 500 mJ / cm ² as 5 when .0 × 10 ⁷ pulses irradiation, decrease in the refractive index of the ordinary ray or the extraordinary ray generated in the irradiation unit is 50ppm or less, the height of the irradiation unit for expansion 20nm or less, or induced birefringence amount 90 nm / cm A method for selecting an artificial quartz crystal member, characterized by:

Images