JP2005279859A - Machining apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining apparatus which is excellent in positional accuracy and workability, and has a turntable having a relatively small space necessary for piping. <P>SOLUTION: A vacuum chuck 5 is provided on the upper surface of the turntable 1. The vacuum chuck 5 has a plurality of suction openings 6. A plurality of fixed pipes 7 are vertically attached to the lower surface of the turntable 1. A flexible hose 8 is connected to the lower end of the fixed pipe 7 by means of a joint 9. A relay fitting 10 is fixed to a cylindrical cover for covering a shaft. The flexible hose 8 is bound by means of the relay fitting 10 so as to be in parallel with the arrangement of a plurality of joints 9, and is laid so as to be in parallel with each other with a small clearance. Further, the flexible hose 8 is provided so as to be small by means of the relay fitting 10 as far as the looseness exists when the turntable 1 has turned to a maximum. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a processing apparatus provided with a rotary moving body provided with a vacuum chuck for attaching a workpiece and capable of indexing an angle that reciprocates within a predetermined rotation angle range.

  2. Description of the Related Art There is known a processing apparatus that includes a rotary moving body that can place a workpiece and rotate around a vertical axis. There are a wide variety of clamping jigs that can be used to mount the workpiece on the rotating moving body. Generally, electrostatic chucks and vacuum chucks are used for processing equipment that requires automatic replacement and mounting of workpieces. Has been. In addition, various sensors or a nozzle for supplying a pressure fluid such as a cleaning liquid or a processing liquid may be provided on the rotary moving body. In a processing apparatus provided with such a rotationally movable body, piping and wiring connected to the chuck, sensor, or nozzle are required to be provided in a state where the rotationally movable body can rotate.

  A processing apparatus including a rotary moving body (hereinafter referred to as a rotary table) capable of continuously rotating in one direction without limitation on the number of rotations is a chuck or sensor in which piping and wiring are provided on the rotary table. Cannot connect directly to. Therefore, as a means for connecting wiring and piping, a rotary joint (rotary joint) is provided between the rotary table and an X-axis moving body (hereinafter referred to as a processing table) or a base that can reciprocate in the X-axis direction (one horizontal axis direction). Joints) are provided, and wiring and piping are connected by a rotary joint. For example, as shown in Patent Document 1, a rotary joint is typically used in a grinding apparatus equipped with a rotary table.

  In the case of a processing apparatus provided with a θ-axis rotating movable body (hereinafter referred to as a turntable) capable of indexing and reciprocatingly rotating within a predetermined rotation angle range, if the rotatable rotation angle is not large, the chuck is used as it is. It is possible to connect piping and wiring directly to the sensor. However, when the rotation angle is increased, the length of the piping and wiring becomes longer, and the wiring and piping are greatly loosened, which may interfere with the work and hinder the movement of the turntable. For this reason, rotary joints are often used to make the piping and wiring around the table compact.

  As a processing apparatus provided with a turntable, a cutting apparatus called a dicing apparatus that cuts a semiconductor wafer into a lattice shape with a rotating blade is known. In addition, there is a cutting device called a sawing device or the like that cuts and divides a package module in which a large number of surface-mounted thin IC packages are formed on a substrate into a lattice shape. For example, Patent Document 2 is referred to for the configuration of the dicing apparatus. This type of cutting apparatus has a turntable mounted on a processing table as an advantageous configuration for cutting or cutting a workpiece into a lattice shape. In addition, since the workpiece is exclusively thin electronic component material, the workpiece is not affected electrically, so that the workpiece can be automatically replaced and can be used for precise machining. In general, a vacuum chuck is used for mounting.

  The rotary joint has a sliding contact part including a seal, etc. In the case of a turntable of a cutting machine that processes precision electronic parts, the frictional resistance of the rotary joint has a considerable influence on the positioning accuracy required. give. Also, even a turntable that performs only 20 to 30 turning operations per hour is not as large as a rotary moving body such as a rotary table that continuously rotates, but it has a sliding part. It is inevitable that fluid leaks from the rotary joint or causes poor electrical contact due to deterioration over time.

  The turntable of such a cutting device is required to be positioned by indexing with a precise resolution of, for example, 1 / 100,000 degree or more. Therefore, the disadvantages of the rotary joint described above become a problem. In recent years, with this type of cutting apparatus, since processing with higher accuracy is required, wiring and piping that do not depend on a rotary joint are desired.

  However, many of the processing apparatuses having a turntable such as this type of cutting apparatus require a rotation speed of about one rotation (360 degrees) at most. Therefore, it does not necessarily mean that the wiring and piping must be based on the rotary joint. However, it should be considered that at least the wiring and piping are arranged so as not to interfere with the rotating body. In this regard, for example, as shown in Patent Document 3, a configuration of a turntable in which wiring and piping are spirally arranged on a rotating shaft is known. Such wiring and piping methods are also used for wiring of a device having a turning means such as a robot device as disclosed in Patent Document 4. In addition, when the table does not rotate, for example, even when the table moves up and down, as shown in, for example, Patent Document 5, it is widely practiced to wind and arrange the pipes and wirings. ing.

Japanese Patent Laid-Open No. 10-15795 Japanese Patent No. 3294254 Japanese Patent Laid-Open No. 2002-300766 JP 2003-170384 A JP-A-8-264626

  By the way, in the case of a processing apparatus configured to attach a workpiece with a vacuum chuck, such as the above-described cutting apparatus, a portion corresponding to the processing progress of the workpiece to be attached is different when the size of the workpiece to be attached is different. For example, when it is desired to fix the workpiece, a specific suction opening of the vacuum chuck is closed to partially operate the chuck. Since this operation is performed manually before processing, a vacuum chuck having a configuration capable of changing and controlling the region in which the vacuum chuck operates is considered for the purpose of automation or improvement of work efficiency. Specifically, a plurality of suction openings are connected by separate pipes so that evacuation at each suction opening can be selected by a vacuum source.

  Therefore, it is necessary to provide the same number of flexible hoses (exhaust ducts) as the number of regions in which the vacuum chuck can be selectively operated. At this time, since it is a condition that the precise turning operation of the turntable is not hindered, piping such as a flexible hose and wiring such as a cable need to be provided with a margin, and are reinforced firmly. Cannot be established. On the other hand, it is difficult to effectively arrange multiple flexible hoses by simply removing the slack by simply winding the pipes and wires to the turntable around the shaft. There is a risk of entanglement with the shaft or each other, or rubbing and damage when it is loosened or relaxed.

  Furthermore, the length when the pipe or wiring is fully extended is not to prevent the turntable from rotating within an effective rotation angle due to a pipe being caught or the table being damaged as a result. It is necessary to leave a margin. For this reason, there is an increased risk of tangling or damaging piping and wiring, and an unexpected space is required below the turntable. Therefore, the current situation is that it is difficult to adopt a vacuum chuck having a configuration that can selectively change and control the operating region. In addition, when multiple piping and wiring are required other than the vacuum chuck piping, piping can be used with the conventional method even if there are problems such as aging deterioration and poor positioning accuracy for the same reason. And wiring is done.

  In view of the above problems, an object of the present invention is to provide a processing apparatus having a turntable that has excellent positioning accuracy, good workability, and a relatively small space required for piping.

  The processing apparatus of the present invention is provided with a vacuum chuck 5 for attaching a workpiece, and includes a turntable (θ-axis rotating movable body) 1 capable of indexing and reciprocatingly rotating within a predetermined rotation angle range. In FIG. 2, a plurality of fixed pipes 7 that are vertically fixed to the turntable 1 and are connected to the suction opening 6 of the vacuum chuck 5 and have different lengths are connected to the lower ends of the plurality of fixed pipes 7 by joints 9, respectively. When a plurality of flexible hoses 8 provided in multiple stages and a structure that does not rotate with respect to the turntable 1, for example, a cylindrical cover 12 that covers the shaft 11 or the processing table 2, and the turntable 1 rotates to the maximum A relay fitting 10 for bundling the plurality of flexible hoses 8 so that the slack of the plurality of flexible hoses 8 is as small as possible; The it becomes provided. Preferably, the region where the vacuum chuck 5 operates can be selectively changed and controlled. In addition, the code | symbol is attached | subjected for convenience of explanation, and does not limit invention to embodiment.

  In the processing apparatus of the present invention, a flexible hose is connected to the lower ends of a plurality of fixed pipes having different lengths connected to a suction opening of a vacuum chuck in a multi-stage in the vertical direction, and does not rotate when the turntable rotates. It is comprised so that it may bundle with a fixture. Further, the plurality of flexible hoses are in the most relaxed state when the turntable rotates to the maximum.

  Therefore, first, since it can be directly piped to the turntable by the flexible hose, there is no frictional resistance that hinders the rotation of the turntable. Therefore, the turntable can be smoothly rotated, and the rotational positioning accuracy is excellent. As a result, there is an effect that excellent machining accuracy can be maintained.

  Secondly, even if there are a plurality of flexible hoses, the wiring of the flexible hoses and sensors does not get entangled with the shaft or entangle with each other, and there is almost no possibility of damaging the piping, wiring and turntable. Further, unlike the rotary joint, there is no member that makes sliding contact when the turntable rotates. For this reason, the turntable and its peripheral members have a long life, are excellent in economic efficiency, and have an effect of improving workability by greatly reducing maintenance work.

  Thirdly, it is not necessary to lengthen the flexible hose more than necessary, piping and wiring are compactly integrated, and the space required under the turntable can be kept to a minimum. Therefore, the freedom degree of design and installation of the processing apparatus which has several piping and wiring is improved. As a result, the utilization of many processing apparatuses that require a turntable is further improved.

  FIG. 1 is a plan view showing a preferred embodiment of a turntable equipped with a vacuum chuck capable of selectively changing and controlling an operating region. FIG. 2 is a side view of the turntable viewed from the direction A in FIG. FIG. 3 is an overall configuration diagram of a cutting device that divides a CSP (Chip Size Package) package module into a lattice shape as an example of the processing device of the present invention on which the turntable shown in FIGS. 1 and 2 is mounted. is there.

  The turntable 1 is mounted on the processing table 2 as shown in FIG. The turntable 1 is driven by a direct drive system in which a direct current motor 3 such as a brushless DC motor is directly connected. The DC motor 3 has a stopping performance of 0.0005 degrees. The turntable 1 is provided with a rotation scale (not shown). The rotation scale detects the rotation angle position with a resolution of 720,000 divisions, and the DC motor 3 is feedback-controlled based on the detection position of the rotation scale. Therefore, the turntable 1 can be positioned at 0.005 degrees.

  In the cutting apparatus shown in FIG. 3, a spindle 4 with a rotating blade for cutting a workpiece in the X-axis direction has a horizontal one-axis direction (Y-axis direction) and a vertical direction (Z-axis direction) perpendicular to the X-axis direction. Can be moved relative to each other. Since it is for cutting a workpiece into a lattice shape, the turntable 1 only needs to be able to turn so that the cutting direction can be changed by 90 degrees. Therefore, the turntable 1 according to the embodiment is provided so as to be capable of reciprocating rotation within a range of 0 to 100 degrees including a width for adjusting (alignment) a positioning error within a range of a minute rotation angle.

  A vacuum chuck 5 capable of attaching and fixing a workpiece such as a thin plate or a film-like electronic component material is provided on the upper surface of the turntable 1. As shown in FIG. 1, the vacuum chuck 5 has a plurality of suction openings 6 for sucking and attaching and fixing a workpiece. The suction opening 6 is connected to a plurality of conduits (not shown) formed in the turntable 1. The plurality of pipelines are provided independently so as to penetrate the turntable 1 and do not cross each other. The vacuum chuck 5 according to the embodiment is provided with four suction openings 61 to 64. Therefore, the vacuum chuck 5 is divided into four regions for attaching and fixing the workpiece.

  As shown in FIG. 2, the plurality of fixed tubes 7 are attached to the lower surface of the turntable 1 perpendicular to the table surface. The plurality of fixed tubes 7 are provided in alignment along an arc having the same radius around the rotation axis of the turntable 1. The same number of fixed tubes 7 as the suction openings 6 are provided. Each of the fixed tubes 71 to 74 is separately connected to the suction openings 61 to 64 through the conduits (not shown).

  The flexible hose 8 is connected to the lower end of the fixed pipe 7 by a joint 9. The plurality of fixed tubes 71 to 74 have different lengths by a distance slightly longer than the outer diameter of the flexible hose 8. And the flexible hoses 81-84 are separately attached to the joints 91-94 provided in the lower end of the fixed pipes 71-74, respectively. The flexible hoses 81 to 84 are provided so as to be parallel to each other in a step shape with a slight gap in the vertical direction. In addition, the wiring of sensors (not shown) is provided along any of the plurality of flexible hoses 8.

  The relay fixture 10 is fixed to a structure (member) that does not rotate with respect to the turntable 1, for example, a cylindrical cover 12 that covers the shaft 11 or the upper surface of the processing table 2. The relay fixture 10 has substantially the same width (height) as the width in the vertical direction when the plurality of flexible hoses 81 to 84 are provided in alignment, and the flexible hose 81 is parallel to the arrangement of the plurality of joints 9. Bundle ~ 84. Therefore, the flexible hoses 8 arranged in multiple stages in the vertical direction by the joint 9 are arranged so as to be routed in parallel with each other with a slight gap by the relay fitting 10. Therefore, the flexible hose 8 does not entangle with each other.

  Moreover, the relay fixture 10 bundles the plurality of flexible hoses 8 so that the slack of the plurality of flexible hoses 8 is minimized as the turntable 1 rotates to the maximum. As shown in FIG. 1, for example, when the maximum rotation angle of the turntable 1 is 100 degrees and the rotation angle of the turntable 1 is 0 degrees and is in the initial position, the flexible hose 8 is indicated by a solid line. In the most relaxed state B. When the turntable turns to 100 degrees, as shown in FIG. 1, the flexible hose 8 is in the most strained state C indicated by the one-dot chain line. Therefore, the flexible hose 8 is routed in a minimum space, and does not get entangled with the shaft 11 or damage the turntable 1 or the processing table 2.

  Since the flexible hose 8 is provided by being shifted in parallel in multiple stages in the vertical direction so as not to be entangled with each other, the positions of the fixed pipes 7 and the joints 9 in the horizontal direction and the joints 9 and the relay fittings 10 are provided. The distance between is different. Therefore, the lengths of the flexible hoses 81 to 84 from the joints 9 to the relay fitting 10 are also different. In the case of the configuration shown in FIG. 2, the flexible hose 81 connected to the fixed pipe 71 by the joint 91 located closest to the relay fitting 10 is shortest and is fixed by the joint 94 located farthest from the relay fitting 10. The flexible hose 84 connected to the tube 74 is the longest. Therefore, the position of the relay attachment 10 where the slack of the flexible hose 8 becomes as small as possible when the turntable 1 rotates to the maximum is determined based on the longest flexible hose 84 among the plurality of flexible hoses 8. .

  Each flexible hose 81 to 84 is led to the outside via the relay fitting 10. A control valve such as an electromagnetic valve that can be switched by a control signal from a control device (not shown) is connected to each flexible hose 81-84. Therefore, the region in which the vacuum chuck 6 operates can be selectively changed and controlled by switching the control valve. By operating the control device, for example, when the workpiece is a large thin plate, the vacuum chuck 5 is suction-fixed and securely fixed and fixed in the four regions. In the case of a small workpiece, the suction opening 6 in a selectively required area is used, and the manual operation for closing the suction opening 6 in an area that should not be operated is eliminated.

  Although the embodiment described above has been described with respect to a processing apparatus having a vacuum chuck capable of selectively changing and controlling the operating region, the present invention is not limited thereto, and the present invention requires a plurality of other pipes. It can be applied to processing equipment. For example, it is used for a processing apparatus that requires piping for a cleaning liquid and a vacuum chuck, or a processing apparatus that requires piping for supplying a processing liquid for selectively operating a plurality of nozzles. Further, in order to effectively use the effects of the present invention, the embodiment described above is modified in design, and each member is replaced or modified by combining with other known devices. Is possible.

  The present invention is applied to a processing apparatus including a turntable that requires a plurality of pipes. The present invention provides a processing apparatus provided with a turntable that has no frictional resistance when the turntable rotates, and does not allow a plurality of pipes and wirings to be entangled with each other or entangled with each other.

It is a top view of the turntable of the processing apparatus of this invention. It is the side view of a turntable seen from the A direction of FIG. It is a side view of the cutting device which is an example of the processing apparatus carrying the turntable shown by FIG. 1 and FIG.

Explanation of symbols

1 Turntable (θ-axis rotating moving body)
5 Vacuum chuck 6 Suction opening 8 Flexible hose 10 Relay fitting

Claims (2)

  In a processing apparatus provided with a vacuum chuck for attaching a workpiece and having a rotationally movable body capable of indexing and reciprocatingly rotating within a range of a predetermined rotational angle, the vacuum chuck is vertically attached and fixed to the rotationally movable body. A plurality of fixed pipes having different lengths connected to the suction openings, a plurality of flexible hoses connected to lower ends of the plurality of fixed pipes and provided in multiple stages in the vertical direction, and not rotating with respect to the rotary moving body And a relay attachment for bundling the plurality of flexible hoses so that the slack of the plurality of flexible hoses is reduced as much as possible when the rotary moving body is rotated to the maximum. The processing apparatus according to claim 1, wherein an area in which the vacuum chuck operates can be selectively changed and controlled.

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