JP2005277441A - Method of manufacturing semiconductor light emitting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor light-emitting device having less color shading, by suppressing color shading of the semiconductor light-emitting device, constituted combining a blue light emission element and a phosphor. <P>SOLUTION: The semiconductor light-emitting device is of a chip type-semiconductor light-emitting device which comprises a substrate, a blue LED mounted on the substrate, and a phosphor layer made up of a mixture of a yellow fluorescent material particle for sealing the circumference of the blue LED and a raw material. The yellow fluorescent material particle absorbs blue light, emitted by the blue LED and emits fluorescent light, having light emission peak in a wavelength range between 550 nm or longer and 600 nm or shorter, and is a silicate phosphor primarily made of a compound typically shown by the chemical formula (Sr<SB>1-a1-b1-x</SB>Ba<SB>a1</SB>Ca<SB>b1</SB>Eu<SB>x</SB>)<SB>2</SB>SiO<SB>4</SB>(0≤a1≤0.3, 0≤b1≤0.8, 0<x<1). Since the silicate phosphor particle is apt to be dispersed substantially uniformly in resin, satisfactory white light can be obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a semiconductor light emitting device that emits white light by combining a blue light emitting diode (hereinafter referred to as a blue LED) and a yellow phosphor, a light emitting apparatus using the semiconductor light emitting device, and a method for manufacturing the semiconductor light emitting device.

  Conventionally, a blue LED (strictly a blue LED chip) having a main emission peak in a blue wavelength region of a wavelength of 400 nm or more and 530 nm or less and a blue light emitted from the blue LED absorb visible light from green to yellow. 2. Description of the Related Art A semiconductor light-emitting device is known that is formed by combining a phosphor layer containing an inorganic phosphor that emits fluorescence having an emission peak within a wavelength range (approximately 530 nm to 580 nm) (hereinafter simply referred to as “phosphor”) Yes. Hereinafter, in this specification, LED light that excites the phosphor is referred to as “excitation light”, its spectrum is referred to as “excitation light spectrum”, and its intensity peak is referred to as “excitation light peak”.

  Examples of such a semiconductor light emitting device include semiconductor light emitting devices disclosed in Patent Documents 1 to 4 and the like.

Patent Document 1, a gallium nitride-based compound semiconductor and a light emitting layer, a blue LED having an emission peak in a wavelength range of 530nm with 400nm or _{more, (RE 1-x Sm x} ) 3 (Al y Ga 1-y) ₅ O ₁₂ : Ce phosphor (where 0 ≦ x <1, 0 ≦ y ≦ 1, RE is at least one rare earth element selected from Y and Gd) (hereinafter referred to as “YAG phosphor”) A combined semiconductor light emitting device is disclosed.

  The YAG-based phosphor emits highly efficient light emission (yellow light) having a peak near 580 nm under blue light (excitation light) emitted by a blue LED. It is described that the semiconductor light-emitting device becomes a white semiconductor light-emitting device that emits white light by adding color of light emitted by the YAG phosphor.

Patent Document 2 discloses a white semiconductor light emitting device in which a blue or blue-violet LED is combined with one or more phosphors that absorb light emitted from the LED and emit light in the visible range. . As the phosphor, blue, green, yellow, orange, red phosphor and (Y, Gd) ₃ (Al, Ga) ₅ O ₁₂ : Ce, Eu phosphor having (Zn, Cd) S as a phosphor matrix Is disclosed. The (Y, Gd) ₃ (Al, Ga) ₅ O ₁₂ : Ce, Eu phosphor is also a phosphor that is considered to be a YAG-based phosphor in academic terms.

  Patent Document 2 discloses that the emission chromaticity point (x, y) in the CIE chromaticity diagram of the emission color is 0.21 ≦ x ≦ 0.48, 0 due to the additive color of the blue LED and the YAG phosphor. A white semiconductor light-emitting device that is in the range of 19 ≦ y ≦ 0.45 is disclosed.

  Further, Patent Documents 3 and 4 also disclose white semiconductor light emitting devices in which blue LEDs and YAG phosphors are combined. In Japanese Patent Application Laid-Open No. 2000-244021, in order to compensate for the lack of luminous flux in the red region of white light emitted by a white semiconductor light emitting device, not only YAG phosphors but also strontium sulfide (SrS: activated with europium) is used. Eu) A semiconductor light emitting device using a red phosphor is also disclosed.

In the conventional YAG phosphor, depending on the composition, particularly the amount of substitution of Gd (gadlium) atoms with respect to Y (yttrium) atoms constituting the YAG phosphor, the addition amount of Ce ^{3+ serving as} the emission center, and the ambient temperature, It is known that the main emission peak wavelength varies between about 530 nm and 590 nm, and the emission peak wavelength becomes longer as the amount of Gd substitution, the addition amount of Ce ^{3+ serving as} the emission center increases, or the ambient temperature rises. It is known to shift to the wavelength side (for example, see Non-Patent Documents 1 and 2). However, since the Gd atom is heavier than the Y atom, the true specific gravity of the YAG phosphor increases as the substitution amount of the Gd atom increases.

In addition, it is known that the true specific gravity of Y ₃ Al ₅ O ₁₂ : Ce ³⁺ phosphor containing no Gd atom (Ce substitution amount with respect to Y: 0.1 to 2%) is 4.15 to 4.55. The emission peak wavelength at room temperature is near the wavelength range between 530 nm (phosphor with a true specific gravity of 4.15) and 557 nm (phosphor with a true specific gravity of 4.55) (green to yellow wavelength region). (Phosphor Index (Nichia Chemical Co., Ltd.) and Philips catalog excerpt).

  Here, the light color control of the light emitted from the semiconductor light emitting device, particularly the light color of the white light will be briefly described. Until now, the light color has been mainly controlled by the following three methods.

  (1) A method of obtaining a desired light color by changing the output ratio of blue light emitted from a blue LED and yellow light emitted from a YAG phosphor.

  (2) A method of obtaining a desired light color by changing the color tone of blue light emitted by a blue LED.

(3) A method of obtaining a desired light color by changing the composition of the phosphor and the addition amount of Ce ³⁺ emission center and changing the color tone of yellow light emitted by the YAG phosphor.

  As described above, almost all conventional semiconductor light emitting devices that combine blue LEDs and phosphors to obtain mixed light of blue light emitted from blue LEDs and light emitted from phosphors use YAG phosphors as phosphors. ing.

  In the above-mentioned patent publications and published patent publications, a blue LED is conductively mounted on the cup portion provided on the mount lead, and a phosphor layer made of a resin containing a YAG phosphor is provided in the cup. A semiconductor light emitting device having a structure, a blue LED arranged in a housing, and a phosphor layer made of a resin in which a YAG phosphor is incorporated in the housing, and a submount element Describes a semiconductor light emitting device having a structure in which a flip chip type blue LED is encapsulated with a resin package that also serves as a phosphor layer containing a YAG phosphor and is electrically mounted. .

  Such a semiconductor light-emitting device is known as a semiconductor light-emitting device capable of obtaining white light emission, which is in great demand for light-emitting devices such as lighting devices and display devices.

On the other hand, some semiconductor light emitting devices in which a phosphor of an inorganic compound other than a YAG phosphor is combined with an LED have been known. For example, Patent Document 5 discloses Ba ₂ SiO ₄ : Eu ²⁺ phosphor, Sr ₂ SiO ₄ : Eu ²⁺ phosphor, Mg ₂ SiO ₄ : Eu ²⁺ phosphor, (BaSr) ₂ SiO ₄ : Eu ^2. A semiconductor light-emitting device using a silicate phosphor such as a ⁺ phosphor, (BaMg) ₂ SiO ₄ : Eu ²⁺ phosphor is described.

  Moreover, in this patent document 5, it is said that the preferable wavelength range of light emission of LED is 430 nm or less, and especially the range of 400-430 nm is preferable. Also, in the examples described in the publication, a semiconductor light emitting device using an LED that emits light in a wavelength region of 343 to 405 nm is described. Furthermore, in the publication, it is described that not only an application example as a green phosphor for any silicate phosphor but also an organic LED is preferable to an inorganic LED made of an inorganic compound from the viewpoint of luminous efficiency.

  That is, the invention described in Patent Document 5 can be said to be an invention relating to a semiconductor light emitting device formed by combining an LED that emits near-ultraviolet light and a phosphor of an inorganic compound that emits red, green, and blue light.

Here, to describe the silicate phosphor, _{conventionally, (Sr 1-a3-b3} -x Ba a3 Ca b3 Eu x) 2 SiO 4 ( however, a3, b3, x, respectively, 0 ≦ a3 ≦ 1, A silicate phosphor represented by a chemical formula of 0 ≦ b3 ≦ 1, 0 <x <1 is known. This silicate phosphor is a phosphor that has been studied as a phosphor for a fluorescent lamp. By changing the composition of Ba-Sr-Ca, the peak wavelength of emission changes within a range of about 505 nm to 598 nm. It is known that it is a phosphor. Further, the silicate phosphor is also a phosphor exhibiting relatively high-efficiency emission under light irradiation in the range of 170 to 350 nm, which is also disclosed in Non-Patent Document 3 or Non-Patent Document 4, etc. Yes.

  However, there is no description in the literature concerning the silicate phosphor that the silicate phosphor exhibits high-efficiency light emission even in a wavelength region longer than 350 nm, particularly in a blue wavelength region exceeding 430 nm and 500 nm or less. . For this reason, the silicate phosphor is the same as the above-mentioned blue wavelength region, particularly the yellow-green to orange wavelength region of 550 nm to 600 nm or less, especially the YAG phosphor when excited by blue light having a good color purity in the vicinity of 450 to 470 nm. It has not been known so far that it can function as a phosphor emitting yellow light.

  Hereinafter, a semiconductor light emitting device formed by combining a blue LED and a YAG phosphor will be described again. In the above Patent Documents 1, 2, 3, 4 and the like, matters relating to the thickness of the phosphor layer and the manufacturing method in the semiconductor light emitting device are also disclosed.

  For example, in the published patent gazette of the same applicant including Patent Document 1, a mount in which an LED chip is mounted by mixing and dispersing a YAG phosphor in an epoxy resin used as a base material of a phosphor layer It is described that the coating part containing the YAG phosphor is formed on the LED chip by pouring into the cup part provided on the lead or the housing part of the resin casing and curing the epoxy resin (injection method). ing. And these gazettes have the description that the thickness of the coating part containing a YAG type fluorescent substance is 100-400 micrometers.

  Moreover, in the published patent publications of the same applicant including Patent Document 3, a phosphor paste obtained by mixing and dispersing a YAG phosphor in an epoxy resin is applied to the periphery excluding the mounting surface of the LED chip, and the paste is applied. A technique for forming a cured phosphor layer as a package covering an LED is disclosed. In these publications, there is a description that the thickness of the package containing the YAG phosphor, that is, the phosphor layer is 20 to 110 μm. At this time, a photolithography method, a screen printing method, and a transfer method are used as a method of applying the phosphor paste around the LED chip mounting surface.

  FIG. 7 is a cross-sectional view showing an example of a chip-type semiconductor light-emitting device formed by a conventional injection method. As shown in the figure, this conventional semiconductor light emitting device includes a housing 8, a blue LED 1 disposed in the housing 8, a yellow phosphor particle and a resin covering the periphery of the blue LED 1 in the housing 8. And a YAG phosphor layer 3 made of a kneaded product, and an upper coating portion 10 that covers the YAG phosphor layer 3 in the housing 8.

  FIG. 9 is an electron micrograph showing the cross-sectional structure of the coating portion 10 of the semiconductor light emitting device in the state shown in FIG. FIG. 10 is an electron micrograph showing an enlarged view of the vicinity of the housing 8. As far as the experiments by the present inventors are concerned, when the phosphor layer is formed by the above-described injection method, as shown in the electron micrographs of FIGS. In addition, the coating portion is roughly divided into a phosphor layer 3 containing a high density of YAG phosphor and an upper coating layer 10 containing almost no YAG phosphor. The main cause is that the YAG phosphor particles 9 are deposited on the bottom of the coating portion due to gravity due to the specific gravity difference between the YAG phosphor and the resin. That is, the obtained substantial phosphor layer 3 does not have a structure in which the YAG phosphor particles 9 are scattered over the entire epoxy resin (base material), and the YAG phosphor particles 9 are in contact with each other. It is unevenly distributed in the base material, and is deposited in the bottom of the coating part. Here, the scattered state means a state in which the phosphor particles are uniformly and uniformly dispersed in the phosphor layer. The actual thickness of the phosphor layer 3 is 10 to 70 μm, which is thinner than the thickness of the upper coating portion 10.

  Regarding the distribution of YAG-based phosphor particles in the coating portion, for example, in Patent Document 6, “the distribution of the photoluminescence phosphor is the member containing the photoluminescence phosphor, the formation temperature, the viscosity and the photoluminescence phosphor. Various distributions can be realized by adjusting the shape, particle size distribution, etc ... ", and it is possible to form a phosphor layer having a structure in which YAG phosphor particles are uniformly scattered in the base material. Although this has been suggested, this realization with the above injection method using YAG phosphors and the disclosed resins (epoxy resin, urea resin, silicone) is not possible in our follow-up experiment. Met. As a precaution, the semiconductor light emitting device commercialized by the applicant of Patent Document 1 was obtained, and the cross-sectional structure of the phosphor layer was evaluated, but the phosphor layer has YAG phosphor particles in the base material. The phosphor layer as shown in FIG. 9 is not uniformly distributed throughout the whole, that is, the YAG phosphor particles are in contact with each other and are unevenly distributed in the base material. It was formed by depositing on the bottom of the coating part. The substantial thickness of the phosphor layer was about 70 μm as shown in the electron micrograph of FIG.

  Also, in the method of applying a phosphor layer using the above-described photolithography method or transfer method to form a phosphor layer as a package, the YAG phosphor particles are coated on the coating portion by gravity during the phosphor layer formation. Sink at the bottom. Therefore, the obtained substantial phosphor layer is not in a state where the YAG phosphor particles are scattered throughout the base material, and uneven distribution occurs in the distribution of the phosphor particles in the package. In addition, when a phosphor layer as a package is formed by using a screen printing method, the deposition of YAG phosphor particles is relaxed and becomes a state close to a structure scattered throughout the base material. Uneven distribution of particles is still observed. Further, the formed phosphor layer has a low light emission performance.

  As described above, in many conventional semiconductor light-emitting devices, YAG phosphor particles are in contact with each other in the phosphor layer and unevenly distributed in the base material, and uneven distribution of the phosphor particles is recognized in the phosphor layer. There was a tendency to be. Summarizing the phosphor layers of the conventional semiconductor light-emitting devices described above, the phosphor used is a YAG phosphor, and the substantial thickness thereof is 10 to 70 μm, most of which is 10 to 30 μm. The phosphor layer is formed by curing a mixture (dispersion of phosphor) of a YAG phosphor in a resin used as a matrix.

  Next, the relationship between the structure of the phosphor layer of the semiconductor light emitting device and the color unevenness and a conventional method for suppressing color unevenness will be described.

  In a semiconductor light emitting device formed by combining a blue LED and a phosphor, the uneven color of the emitted color has been regarded as a problem, and various efforts have been made to suppress this. Most of them are based on manufacturing know-how, such as optimization of the shape, particle size and particle size distribution of YAG phosphor particles, selection of the base material in which the phosphor is contained, adjustment of the viscosity of the phosphor paste and optimization of drying conditions It is.

On the other hand, not a manufacturing know-how but a specific proposal for fundamentally improving the structure of the phosphor layer and the like has been made. For example, in Patent Document 7, after applying an epoxy resin as an adhesive on an LED chip, YAG phosphor particles are adhered on the adhesive, and further, YAG phosphor adhered excessively by gas blowing. A method is described in which the thickness of the YAG phosphor layer is made uniform by the method of blowing off body particles, and the uneven color of the light emission of the semiconductor light emitting device is suppressed. In Patent Document 3, a phosphor layer (light transmissive wavelength conversion layer) is formed as a package covering the blue LED around the surface excluding the mounting surface of the blue LED. A method is described in which the thickness of the package is made substantially the same in all directions in the light emitting direction, and the thickness of the phosphor layer is made uniform to suppress uneven color. Patent Document 8 also describes a method of polishing and creating the surface of the phosphor layer so as to be parallel to the main light extraction surface.
Japanese Patent No. 2927279 Japanese Patent Laid-Open No. 10-163535 JP 2000-208822 A JP 2000-244021 A JP 2001-143869 A Republished patent WO 98/05078 JP-A-11-31845 JP 2001-177158 A Phosphor Handbook: Ohm R.Mach et and GOMueller: Proceedings of SPIE Vol.3938 (2000) pp.30-41 J. Electrochemical Soc. Vol. 115, No. 11 (1968) pp. 1181-1184 Fluorescent Lamp Phosphors, Kith H. Butler, The Pennsylvania State University Press (1980) pp.270-279

  As described above, in the conventional semiconductor light emitting device, the YAG phosphor particles are coated by gravity during the formation of the phosphor layer due to the use of the YAG phosphor as the yellow phosphor. Therefore, the coating layer is divided into a phosphor layer in which the phosphor particles are in contact with each other and unevenly distributed in the base material, and an upper coating layer containing almost no YAG phosphor. Moreover, even if the YAG phosphor particles are not in contact with each other, the phosphor layer has a large uneven distribution of the phosphor particles in the base material. Although this cause is not necessarily clear, it is caused at least by a specific gravity difference between the phosphor and the base material.

Although slightly different depending on the composition of the phosphor, as described above, the Y ₃ Al ₅ O ₁₂ : Ce ³⁺ phosphor containing no Gd atoms (the amount of Ce substitution with respect to Y: 0.1 to 2%, Although the true specific gravity of the main emission peak wavelength at room temperature: 530 to 557 nm is 4.15 to 4.55, according to the evaluation by the inventors, in order to obtain good yellow light, a part of Y is The measurement result of the true specific gravity of at least the (Y _0.7 Gd _0.28 Ce _0.02 ) ₃ Al ₅ O ₁₂ phosphor (main emission peak wavelength: 565 nm) substituted by Gd is 4.98, and Y ₃ Al ₅ O ₁₂ : All of the phosphors in which part of the Ce ³⁺ phosphor was substituted with Gd were heavier than 4.65 (see FIG. 48).

  The sulfide phosphor having (Zn, Cd) S as a phosphor matrix is a phosphor that can emit yellow light having a main emission peak in a wavelength region of about 560 nm or more by containing Cd (for example, , Phosphor Handbook, edited by Phosphor Society, page 248), and true specific gravity is known to be as light as about 4.13 (see Phosphor Index (Nichia Corporation)). However, not only the light emission efficiency by irradiation with blue light (excitation light) is low, but also contains harmful Cd, so that it is extremely difficult to manufacture, handle and store.

  As described above, the conventional semiconductor light emitting device has a problem in that the phosphor particles are unevenly distributed in the phosphor layer, resulting in uneven light emission and low product yield. This problem of unevenness of light emission is common to conventional semiconductor light emitting devices constructed using YAG phosphors, and a semiconductor light emitting device further using red phosphors to compensate for the shortage of red light It also exists in semiconductor light-emitting devices that further use a green phosphor to increase visibility.

  Further, the conventional semiconductor light emitting device has a defect from another viewpoint. Among conventional semiconductor light emitting devices, those having a phosphor layer in which phosphor particles are in contact and unevenly distributed easily absorb and attenuate the blue light of the blue LED. As a result, the blue light of the LED There is a problem that the luminous flux of white light obtained by adding the yellow light of the YAG phosphor and the yellow light is insufficient.

  The YAG phosphor is irradiated with blue light emitted from the blue LED in the range from 410 nm to 530 nm, and the blue light is converted into yellow light in the range from 550 nm to 600 nm with high conversion efficiency. It is a blue light excitation phosphor to be converted (a phosphor excited by blue light). For this reason, in a conventional white semiconductor light emitting device configured using such a YAG phosphor, since the amount of the YAG phosphor having a high conversion efficiency can be reduced, The actual thickness is 10 to 70 μm, and most practical semiconductor light emitting devices have a thin phosphor layer of 10 to 30 μm. When the size (center particle diameter) of the YAG-based phosphor particles is approximately 5 to 20 μm and the phosphor layer is substantially thin, the thickness of the phosphor layer is substantially equal to several to dozens of particles. Therefore, the influence of slight surface irregularities generated on the surface of the phosphor layer is large, and the light emission unevenness is increased. On the other hand, the phosphor concentration of the YAG phosphor (phosphor weight / (phosphor weight + resin weight)) is lowered from the usual 5 to 10% by weight to less than 5% by weight, and the actual thickness of the phosphor layer. If the thickness is made thicker, the light distribution characteristics of the semiconductor light emitting device will deteriorate.

  Various attempts have been made to suppress such color unevenness, but no sufficient solution has yet been found, and the actual situation is that the yield of semiconductor light-emitting devices is low. It is. In addition to the problem of color unevenness, the emission peak wavelength of the yellow light of the YAG phosphor is limited to a range of about 550 nm to 590 nm. There is also a difficulty in color control that the light color expression range of the semiconductor light emitting device emitting is narrow. This is because the color of light emitted from the semiconductor light emitting device is determined by the addition of blue light emitted from the blue LED and yellow light emitted from the YAG phosphor.

  In addition, in the light emitting device using such a conventional semiconductor light emitting device, there is a problem that color unevenness is likely to occur in the light emitting device, and as a result, the product yield of the light emitting device is low. It was. Further, since the product yield of the semiconductor light emitting device is low, there is a problem that the manufacturing cost of the light emitting device is increased.

  An object of the present invention is to suppress color unevenness of a semiconductor light emitting device formed by combining a blue light emitting element and a phosphor, and to reduce the color unevenness, and particularly to a conventional YAG phosphor and blue light emitting element. It is an object to provide a white semiconductor light-emitting device that exhibits a high luminous flux equivalent to or higher than that of a white semiconductor light-emitting device combining the above and a light-emitting device with a high luminous flux with little color unevenness.

The semiconductor light emitting device of the present invention has a light extraction surface, is provided to cover at least one blue light emitting element that emits blue light from the light extraction surface, and at least the light extraction portion of the blue light emitting element, A semiconductor light emitting device comprising a phosphor layer containing a yellow phosphor that absorbs blue light emitted by a blue light emitting element and emits yellow fluorescence, wherein the yellow phosphor is represented by the following chemical formula: _{sr 1-a1-b1-x} Ba a1 Ca b1 Eu x) 2 SiO 4
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A silicate phosphor composed mainly of at least one compound represented by the formula:

  Here, from the viewpoint of obtaining a semiconductor light emitting device that emits good white light, the blue light emitting element has a wavelength range of more than 430 nm to 500 nm, preferably 440 nm to 490 nm, more preferably 450 nm to 480 nm. A blue light emitting element that emits light having a main light emission peak is desirable. The yellow phosphor is desirably a yellow phosphor that emits fluorescence having a main emission peak in a wavelength region of 550 nm to 600 nm, preferably 560 nm to 590 nm, more preferably 565 nm to 585 nm.

  In addition, the numerical values of a1, b1, and x in the above chemical formula are preferably 0 <0 from the viewpoints of crystal stability against heat of the phosphor, heat resistance of light emission characteristics, light emission intensity of yellow light emission, and light color, respectively. a1 ≦ 0.2, 0 <b1 ≦ 0.7, 0.005 <x <0.1, and more preferably 0 <a1 ≦ 0.15, 0 <b1 ≦ 0.6, 0. 01 <x <0.05, and most preferably 0.01 ≦ a1 ≦ 0.1, 0.001 ≦ b1 ≦ 0.05, and 0.01 <x ≦ 0.02, respectively.

  FIG. 8 is a diagram showing an excitation light spectrum and an emission spectrum of a silicate phosphor and a YAG phosphor. As shown in FIG. 8, the silicate phosphor has an excitation light peak in the vicinity of 250 to 300 nm, absorbs light in a wide wavelength range of 100 to 500 nm, and is 550 to 600 nm of yellow green to yellow to orange. This is a yellow phosphor that emits yellow fluorescent light having an emission peak in the wavelength region of light. Therefore, when combined with the blue light emitting device, it emits light by adding the blue light of the blue light emitting device and the fluorescence of the yellow fluorescent material. It becomes a semiconductor light emitting device.

Here, the relationship between the composition range of the silicate phosphor, the crystal structure and the emission color, the characteristics of the silicate phosphor emitting yellow light, and the like will be described in more detail as follows. First, when the numerical values of a1 and b1 in the chemical formula of the silicate phosphor are both close to 0, monoclinic silicate phosphors, or orthorhombic and monoclinic systems are used. It becomes easy to become a mixed silicate phosphor. Secondly, when the value of a1 deviates from the most preferable range, and the value of b1 is close to 0, the crystal field around the Eu ²⁺ ion (Crystal Field) becomes weak. Thirdly, when the value of a1 is close to 0 and the value of b1 deviates from the most preferable range, it tends to be a silicate phosphor having a monoclinic crystal structure. Fourthly, when both the numerical value of a1 and the numerical value of b1 deviate from the most preferable range to the larger side, and the numerical value of 1-a1-b1-x is close to 0, the hexagonal crystal structure is obtained. It becomes easy to become a silicate phosphor. Further, in any of the first to fourth cases, the phosphor may have a greenish color and may emit light with a poor yellow color purity. When the numerical value of x deviates from the most preferable range, the luminescence intensity of the silicate phosphor becomes weak because the Eu ²⁺ emission center concentration is low, and the numerical value of x falls from the most preferable range. When shifted to the larger side, not only does the emission intensity weaken due to concentration quenching or self-absorption due to Eu ²⁺ ions, but also temperature quenching occurs where the emission intensity decreases as the ambient temperature of the silicate phosphor increases. There is a fear.

  Further, as can be seen from comparison with the excitation light spectrum of the YAG phosphor shown as an example in FIG. 8, the silicate phosphor has a luminous efficiency under the excitation of blue light within a wavelength range of more than 430 nm and not more than 500 nm. For example, a white semiconductor light emitting that emits white light by adding blue light from a blue light emitting element and yellow light from a yellow phosphor, for example, because it is a low phosphor (e.g., emission intensity half that of a YAG phosphor when excited at 470 nm). When trying to obtain the same light color in the device, the amount of phosphor used is greater when using a silicate phosphor than when using a YAG phosphor, so the thickness of the phosphor layer is relatively Becomes thicker. As a result, the phosphor layer is less affected by the unevenness generated on the surface of the phosphor layer, the thickness variation of the phosphor layer is substantially reduced, and a semiconductor light emitting device with less emission color unevenness is obtained.

  The blue light emitting element is an element selected from a blue light emitting diode, a laser diode, a surface emitting laser diode, a resonant cavity light emitting diode, an inorganic electroluminescence element, and an organic electroluminescence element. From the viewpoint of increasing the output and extending the life of the light emitting element, light emitting diodes, laser diodes, surface emitting laser diodes, resonant resonator diodes, and the like are excellent.

  The Ca composition ratio b1 of the yellow phosphor is more preferably a composition ratio b2 in the range of 0 ≦ b2 ≦ 0.6.

  Here, the numerical value of b2 is preferably 0 <b2 ≦ 0.4 from the viewpoint of the stability of the crystal with respect to the heat of the phosphor, the heat resistance of the light emission characteristics, the light emission intensity of yellow light emission, and the light color. More preferably, 0 <b2 ≦ 0.3, and most preferably 0.001 ≦ b2 ≦ 0.05.

  Silicate phosphors having an orthorhombic crystal structure within the above composition range emit yellow light with high efficiency and good yellow purity under the excitation of the blue light, so that the light emitted from the semiconductor light emitting device is high. Not only a luminous flux but also white light with good white purity is obtained.

  In the semiconductor light emitting device, the blue light emitting element may be a blue inorganic light emitting element of any one of a gallium nitride compound semiconductor, a zinc selenide semiconductor, and a zinc oxide semiconductor. Such a blue inorganic light emitting device, particularly a blue light emitting device having a light emitting layer composed of a gallium nitride compound semiconductor, exhibits high luminous efficiency. Therefore, such a blue inorganic light emitting device, particularly a light emitting composed of a gallium nitride compound semiconductor. When a blue light-emitting element having a layer and the silicate phosphor are combined, a semiconductor light-emitting device that emits light with a high luminous flux can be obtained.

  In the semiconductor light emitting device, the emission chromaticity point (x, y) in the CIE chromaticity diagram of the emission color of light emitted from the semiconductor light emitting device is 0.21 ≦ x ≦ 0.48, 0.19 ≦ y ≦ 0. A range of .45 may be used.

  Since this chromaticity range widely includes white, when the light color emitted by the semiconductor light emitting device is set to this chromaticity range, a white semiconductor light emitting device with much demand is obtained.

  Moreover, you may further provide the red type | system | group fluorescent substance which has a light emission peak in a red type | system | group area | region exceeding wavelength 600nm and 660 nm.

  In this way, the red phosphor compensates for the red light emitting component that cannot be compensated for by the yellow phosphor alone, so that the light emitted from the semiconductor light emitting device contains a large amount of the red light emitting component.

  Further, a green phosphor having an emission peak in a green region having a wavelength of 500 nm or more and less than 550 nm may be provided.

  In this way, the green phosphor compensates for the green light-emitting component with high visibility, which cannot be compensated for by the yellow phosphor alone, so that the light emitted from the semiconductor light-emitting device contains a large amount of the green light-emitting component. The light emitted from the semiconductor light emitting device, particularly white light, becomes white light with high visibility. A red phosphor and a green phosphor may be combined with a yellow phosphor.

Also, the green phosphor is represented by the following chemical formula _{(Sr 1-a3-b3-} x Ba a3 Ca b3 Eu x) 2 SiO 4
(0 ≦ a3 ≦ 1, 0 ≦ b3 ≦ 1, 0 <x <1)
It is preferable that it is a silicate fluorescent substance comprised mainly by the compound represented by these. In this case, the composition and crystal structure of the green phosphor are similar to those of the silicate phosphor that emits yellow light, so that the color unevenness in the semiconductor light emitting device including the green phosphor is relatively small. In addition to the reduced number, it is not necessary to introduce a new technology in the manufacturing process of a semiconductor light emitting device, and the manufacturing process can be performed with a simple process.

  A plurality of silicate phosphors having different compositions that emit yellow light having an emission peak in a wavelength region of 550 nm or more and 600 nm or less may be included in the phosphor layer. This makes it possible to control the light color of white light obtained by adding the blue light emitted by the blue light emitting element and the yellow light emitted by the silicate phosphor.

  The phosphor layer preferably has a light-transmitting resin as a base material, and the yellow phosphor preferably has a structure in which particles are dispersed in the base material.

  When such a phosphor layer is used, the phosphor layer substantially does not contain a light absorption factor or a light scattering factor, so that the light transmittance of the phosphor layer is improved. Therefore, the blue light of the blue light emitting element is hardly absorbed and attenuated, and passes through the phosphor layer or contributes to excitation of the phosphor. In addition, since the phosphor layer is in a state where blue light can irradiate a wider part of the surface of the phosphor particle, the excitation cross-sectional area of the phosphor particle is substantially increased, and the phosphor particle in the phosphor layer is efficiently used. It emits well.

  In addition, in the phosphor layer having a structure in which the phosphor particles are dispersed, the substantial thickness of the phosphor layer is increased, so that the influence on the thickness variation of the phosphor layer is reduced, and uneven light emission caused by the thickness variation of the phosphor layer is reduced. Less. Note that a resin or a similar material can be used as the light-transmitting base material. As the resin, an epoxy resin, an acrylic resin, a polyimide resin, a urea resin, a silicone resin or the like can be used, and an epoxy resin or a silicone resin is particularly preferable.

  However, the phosphor layer may be formed by molding (sintering) the silicate phosphor.

  The blue light emitted from the blue light emitting element preferably passes through the phosphor layer, so that the blue light and the fluorescence emitted from the phosphor are colored to emit white light.

  The semiconductor light emitting device of the present invention can adopt a structure including the following members.

  The first structure further includes a substrate, the blue light emitting element is mounted on the substrate in a flip chip state, and the phosphor layer functions as a sealing resin for sealing the blue light emitting element. This is the structure.

  In that case, the substrate preferably has a Zener diode.

  The second structure may further include a mount lead having a cup portion, the blue light emitting element may be mounted on the cup portion, and the phosphor layer may be provided in the cup.

  The third structure may further include a housing for arranging the blue light emitting element, and the phosphor layer may be provided in the housing.

  By using such a semiconductor light-emitting device, a semiconductor light-emitting device that emits white light with a high luminous flux can be obtained, and can be manufactured by a relatively simple process, resulting in a high product yield.

  Among the semiconductor light emitting devices, the semiconductor light emitting device having the first structure inherently has less color unevenness than the other semiconductor light emitting devices having the second and third structures. The semiconductor light emitting device having the structure is preferable because the color unevenness of the semiconductor light emitting device is further reduced and the product yield is further improved.

  It is preferable that a substantial thickness of a portion of the phosphor layer located on the light extraction surface of the blue light emitting element is in a range of 50 μm to 1000 μm.

  By making the substantial thickness of the phosphor layer in the range of 50 μm or more and 1000 μm or less, more preferably in the range of 100 μm or more and 700 μm or less, the excitation cross-sectional area of the silicate phosphor by blue light is higher than that of the conventional YAG phosphor. Therefore, the emission intensity of yellow light emitted from the silicate phosphor increases, and the semiconductor light emitting device emits white light with a good color tone by adding with the blue light emitted from the blue light emitting element. In addition, as described above, the phosphor layer substantially does not contain a light absorption attenuation factor, and the blue light of the blue light emitting element is transmitted through the phosphor layer without being attenuated or contributes to excitation of the phosphor. However, since the emission intensity of the yellow light emitted by the silicate phosphor increases, the optimum phosphor concentration (weight ratio of resin and phosphor: phosphor weight / (phosphor weight + resin weight)) can be set. Thus, white light with a higher luminous flux than conventional semiconductor light emitting devices using YAG phosphors is emitted.

  Furthermore, compared with the conventional semiconductor light emitting device using a YAG-based phosphor, the thickness of the substantial phosphor layer is significantly increased. Therefore, even if the surface unevenness of the substantial phosphor layer is somewhat large, the phosphor layer The influence of the surface irregularities on the overall thickness is small, and the apparent thickness variation is reduced, so that the unevenness of light emission caused by the thickness variation of the phosphor layer is reduced.

  If the actual thickness of the phosphor layer is less than the above preferred thickness range, the excitation cross-sectional area of the silicate phosphor due to blue light is reduced, and the substantial luminous efficiency of the phosphor is reduced, so that the blue light emitting element emits light. There is a case where a light emission color having a dominant blue taste is obtained and white light having a good color tone cannot be obtained. In some cases, a high luminous flux cannot be obtained. On the other hand, if the substantial thickness is larger than the above thickness range, the excitation cross-sectional area of the silicate phosphor due to blue light increases, and the substantial luminous efficiency of the phosphor increases, but most of the blue light is in the phosphor. Since it is absorbed and converted to yellow light, yellow light emission by the silicate phosphor becomes a dominant yellowish emission color, and white light with good color tone may not be obtained. Further, the phosphor particles are partially contacted with each other, and the blue light of the blue light emitting element is easily absorbed and attenuated, so that a high luminous flux may not be obtained.

  In addition, in a semiconductor light emitting device using a conventional YAG-based phosphor, when the phosphor layer is thick like the semiconductor light emitting device of the present invention, the phosphor concentration condition of the phosphor layer having a general silicate phosphor ( 10 to 80% by weight), since the luminous efficiency of the YAG phosphor under blue light irradiation is extremely high, only a strong yellowish emission color in which light emission by the YAG phosphor is dominant can be obtained. The luminous flux also decreases. In addition, if the phosphor concentration is decreased to secure a desired light color and an attempt is made to make such a thick phosphor layer, the YAG phosphor particles are likely to be unevenly distributed in the base material (resin) of the phosphor layer. As a result, variations in chromaticity and luminance of light emission are large, light distribution characteristics are likely to deteriorate, and only a semiconductor light emitting device having a low product value can be obtained.

  In this specification, an electron microscope having a magnification of 50 to 1000 times is used to clearly show the case where the phosphor particles are biased in the base material using the electron micrographs shown in FIGS. The average thickness at which the presence of the phosphor particles in the base material can be clearly visually observed by cross-sectional observation of the semiconductor light emitting device is defined as “substantial thickness of the phosphor layer”.

  The upper surface of at least the portion of the phosphor layer located on the light extraction surface of the blue light emitting element is preferably flat and substantially parallel to the light extraction surface.

  Most of the blue light-emitting elements are manufactured so that the light extraction surface (particularly the main light extraction surface) is flat because of its simplicity of manufacture. Therefore, when the surface of the phosphor layer is formed parallel to the light extraction surface (particularly the main light extraction surface), the distance from the outer surface of the light extraction surface to the outer surface of the phosphor layer, that is, the phosphor layer The thickness is substantially constant over the entire phosphor layer on the light extraction surface, and the thickness variation of the phosphor layer is further reduced, and the light emission unevenness of the semiconductor light emitting device is reduced.

  A plurality of the at least blue light emitting elements may be provided, and the phosphor layer may be provided so as to cover each light extraction surface of the plurality of blue light emitting elements.

The light-emitting device of the present invention includes at least one blue light-emitting element that emits blue light, and at least one phosphor layer that includes the yellow-based phosphor that absorbs blue light emitted from the blue light-emitting element and emits yellow-based fluorescence. And a supporting member for supporting the blue light emitting element and the phosphor layer, wherein the yellow phosphor has the following chemical formula (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A silicate phosphor composed mainly of at least one compound represented by the formula:

  The semiconductor light emitting device including the blue light emitting element and the phosphor layer of the present invention has little color unevenness, resulting in a high product yield and low cost. Therefore, by configuring a light-emitting device using these semiconductor light-emitting devices, not only the color unevenness of the semiconductor light-emitting device is reduced, but also a semiconductor light-emitting device with a low manufacturing cost is obtained. In addition, such a semiconductor light emitting device emits a light flux that exceeds that of a conventional semiconductor light emitting device using a YAG-based phosphor, so that the light flux of the light emitting device also increases.

  A plurality of the at least one blue light emitting element may be provided, and the phosphor layer may be provided so as to cover the light extraction surfaces of the plurality of blue light emitting elements.

  In the present specification, various display devices using semiconductor light emitting devices (for example, LED information display terminals, LED traffic signal lights, automobile LED stop lamps, LED direction indicator lights, etc.) and various illumination devices (LED indoor / outdoor illumination lights, Car interior LED lights, LED emergency lights, LED surface light sources, etc.) are widely defined as light emitting devices.

  The method for producing a phosphor layer of a semiconductor light emitting device of the present invention includes a blue light emitting element that emits light having a main light emission peak in a wavelength region of more than 430 nm and 500 nm or less, and absorbs blue light emitted from the blue light emitting element to 550 nm. A method for manufacturing a semiconductor light emitting device comprising a phosphor layer containing a yellow phosphor that emits fluorescence having a main emission peak in a wavelength region of 600 nm or less, wherein the true specific gravity is 3.0 or more and 4.65 or less. The yellow phosphor having a main emission peak wavelength within a range of 560 nm to 600 nm and a true specific gravity of 0.8 or more and a true specific gravity of the yellow phosphor or less. A step (a) of covering at least the light extraction surface of the blue light-emitting element with a phosphor paste containing a resin within the range, and curing the phosphor paste Forming the phosphor layer, and in the step (a), Mg, Ca, Sr, Ba, Sc, Y, lanthanoid, Ti, Zr, Hf, V are used as the yellow phosphor. , Nb, Ta, Mo, W, Zn, B, Al, Ga, In, Si, Ge, Sn, and P, and in O, S, Se, F, Cl, and Br In this method, a phosphor containing a compound composed of at least one element selected from the group consisting of at least one element is used. These compounds do not contain an element having a large specific gravity such as Cd.

  Thus, in the method for manufacturing a phosphor layer that forms a phosphor layer by curing a phosphor paste containing a yellow phosphor and a resin, a yellow phosphor having a true specific gravity smaller than that of a YAG phosphor is used. And, since the specific gravity difference between the resin (except for special cases, which usually has a true specific gravity smaller than that of the phosphor) and the phosphor is small, before the phosphor paste is cured or during the curing of the phosphor paste, In the phosphor paste, the phosphor does not easily settle due to gravity, and the phosphor layer formed has a structure in which phosphor particles are dispersed almost uniformly throughout the resin, or It will be close. Further, since a phosphor containing no harmful Cd, preferably an oxide phosphor, is used, manufacturing, handling, storage, management and the like are easy.

   In the step (a), a yellow phosphor having a center particle size in the range of 0.5 μm to 30 μm may be used.

  In this way, a phosphor layer having a strong emission intensity and a structure in which phosphor particles are dispersed can be obtained.

In the step (a), as the yellow phosphor, the following chemical formula (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A silicate phosphor composed mainly of at least one compound represented by the formula:

  However, a1, b1, and x are preferably numerical values that satisfy 0 <a1 ≦ 0.2, 0 ≦ b1 ≦ 0.7, and 0.005 <x <0.1, respectively. A silicate phosphor that has a composition within the above preferred range and emits fluorescence having a main emission peak in a wavelength region of 560 nm or more and 600 nm or less has a true specific gravity generally smaller than that of a YAG-based phosphor. Since it is a yellow phosphor that is in the range of 4.65 or less and emits yellow light emission under blue light excitation, the true specific gravity is 0.8 or more and the true specific gravity of the yellow phosphor or less. When the phosphor layer is formed using the resin (for example, epoxy resin) inside, a phosphor layer having a structure in which the emission intensity is strong and the phosphor particles are dispersed can be realized in the actual process. When the numerical value of a1 is larger than the above preferable range, the larger the numerical value, the larger the true specific gravity of the silicate phosphor, and the phosphor particles easily settle in the phosphor paste. In some cases, a phosphor layer having a structure in which particles are dispersed cannot be obtained. This effect is attributed to the fact that Ba atoms are heavier than Sr atoms.

  Here, the relationship between the composition of the YAG phosphor, the true specific gravity, and the main emission peak wavelength will be briefly described. The true specific gravity of the YAG phosphor greatly varies depending on the composition, in particular, the amount of Gd substitution for Y. A YAG phosphor having a main emission peak in the wavelength region of 560 nm to 600 nm below generally has a large amount of Gd substitution, and as a result, its true specific gravity exceeds 4.55, and 4.60, 4. .65, or even more than 4.7 and heavy.

  Further, the phosphor paste may further include an ultrafine particle having an average primary particle diameter in the range of 1 nm or more and 100 nm or less, and the phosphor paste is cured to be formed. Since the sedimentation rate of the ultrafine particles in the resin is extremely slow and almost 0 (zero), in this way, the ultrafine particles floating in the resin work to inhibit the sedimentation of the yellow phosphor, and as a result As a result, the sedimentation rate of the yellow phosphor becomes slow, and it becomes easy to obtain a phosphor layer having a structure in which phosphor particles are dispersed.

  Further, blue light emitted from the blue light-emitting diode may pass through the phosphor layer so that the blue light and the fluorescence emitted from the phosphor are added to emit white light. As a result, the blue light and the fluorescent light (yellow, red, and green) emitted from the phosphor can be reliably added to obtain white light.

  Furthermore, there are the following methods for suppressing the sedimentation of the phosphor particles during the curing of the phosphor paste.

  The first includes a step (a) of covering the light extraction surface of the blue light emitting element with a phosphor paste made of resin and phosphor particles, and a step (b) of curing the phosphor paste while applying vibration. A method for manufacturing a semiconductor light emitting device.

  Second, a semiconductor including a step (a) of covering a light extraction surface of a blue light emitting element with a phosphor paste made of resin and phosphor particles, and a step (b) of curing the phosphor paste while inverting the phosphor paste. It is a manufacturing method of a light emitting device.

  Third, the step (a) of covering the light extraction surface of the blue light emitting element with a phosphor paste made of resin and phosphor particles and the step (b) of curing the phosphor paste are repeated a plurality of times. A method for manufacturing a semiconductor light emitting device.

  Fourth, the step (a) of covering the light extraction surface of the blue light-emitting element with a phosphor paste made of resin and phosphor particles and having a viscosity in the range of 1 Pa · S to 100 Pa · S; This is a method for manufacturing a semiconductor light emitting device, in which the step (b) of curing the body paste is repeated a plurality of times.

  The fifth includes a step (a) of covering the light extraction surface of the blue light emitting element with a phosphor paste made of resin and phosphor particles, and a step (b) of curing the phosphor paste by ultraviolet irradiation. A method for manufacturing a semiconductor light emitting device.

  Sixth, a semiconductor including a step (a) of covering a light extraction surface of a blue light emitting element with a phosphor paste made of resin and phosphor particles, and a step (b) of curing the phosphor paste while stirring. It is a manufacturing method of a light emitting device.

  As a method for obtaining a semiconductor light emitting device having a structure in which as many phosphor particles as possible are brought close to a blue light emitting element, there are the following methods.

First, at least a light extraction surface of a blue light-emitting element that emits light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm, a phosphor including a base material made of a light-transmitting resin and a yellow phosphor After the step (a) of covering with a first phosphor paste having particles and the step (a), the first phosphor paste includes the first phosphor having at least a light-transmitting resin. A step (b) of covering with a second phosphor paste having a lower concentration of the yellow phosphor than the phosphor paste, and a step (c) of curing the first and second phosphor pastes, In the step (a), the yellow phosphor is a yellow phosphor that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm. Chemical formula ( _{Sr 1-a1-b1-x} Ba a1 Ca b1 Eu x) 2 SiO 4
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
Is a method using a silicate phosphor composed mainly of at least one compound represented by the formula:

Second, the step (a) of attaching phosphor particles containing a yellow phosphor to at least a light extraction surface of a blue light emitting element emitting light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm, and the above After the step (a), the method includes the step (c) of covering at least the light extraction surface of the blue light emitting element with a translucent resin and the step (d) of curing the resin, and the step (b). The yellow phosphor is a yellow phosphor that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm, and has the following chemical formula (Sr _{1 -a1-b1-x} Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
Is a method using a silicate phosphor composed mainly of at least one compound represented by the formula:

  In that case, in the step (a), there is a method in which the yellow phosphor particles are applied to the blue light emitting element. In the step (a), the blue light emitting element is converted into phosphor particles containing a yellow phosphor. There is also a method in which the solvent is volatilized after being immersed in a suspension containing the volatile solvent.

Third, a positively charged substance including a yellow phosphor is attached to the surface of at least a light extraction surface of a blue light emitting element that emits light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm. A step (a) of covering with a phosphor paste having phosphor particles and a translucent resin, and a step (c) of curing the phosphor paste after the step (a). In a), the yellow fluorescent material is a yellow fluorescent material that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm. _{sr 1-a1-b1-x} Ba a1 Ca b1 Eu x) 2 SiO 4
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
Is a method using a silicate phosphor composed mainly of at least one compound represented by the formula:

  By using the production method of the present invention, a phosphor layer having a structure in which phosphor particles are dispersed can be formed. Since such a phosphor layer substantially does not contain a light absorption factor or a light scattering factor, for example, the probability that the phosphor particles are in contact with each other compared with a phosphor layer in which the phosphor particles are in contact with each other. The contact area is significantly reduced even when contact is made, and the light absorption attenuation factor in the phosphor layer is substantially eliminated.

(First embodiment)
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment relating to a semiconductor light emitting device and a method for suppressing color unevenness of the semiconductor light emitting device of the invention will be described with reference to the drawings.

  FIG. 1 is a longitudinal sectional view of a semiconductor light emitting device of a first example which is a relatively representative example in the present embodiment. As shown in the figure, the semiconductor light emitting device of the first example is in a state in which the substrate 4 (submount element) functioning as a Zener diode is electrically connected to the Zener diode in the substrate on the substrate 4. Chip having a mounted flip-chip blue LED 1 and a phosphor layer 3 made of a mixture of yellow phosphor particles 2 and a base material 13 (translucent resin) that seals the periphery of the blue LED 1 Type semiconductor light emitting device. The main light extraction surface of the blue LED 1 faces upward in the state shown in the figure, and the phosphor layer 3 is provided at a position where the blue light emitted from the main light extraction surface passes.

  FIG. 2 is a longitudinal sectional view of a semiconductor light emitting device of the second example in the present embodiment. As shown in the figure, the semiconductor light emitting device of the second example is in a state of being electrically connected to the lead frame 5 by the lead frame 5, the cup 6 provided on the mount lead of the lead frame 5, and the bonding wire. Blue LED 1 mounted in the recess of cup 6, phosphor layer 3 formed in cup 6, which is a mixture of yellow phosphor particles 2 and base material 13 (resin), lead frame 5, phosphor A shell-type semiconductor light emitting device including a layer 3 and a sealing resin 7 for sealing a bonding wire. In addition, the side wall of the recessed part of the cup 6 functions as a reflecting plate that reflects light. The main light extraction surface of the blue LED 1 faces upward in the state shown in the figure, and the phosphor layer 3 is provided at a position where the blue light emitted from the main light extraction surface passes.

  FIG. 3 is a longitudinal sectional view of a semiconductor light emitting device of the third example in the present embodiment. As shown in the figure, the semiconductor light emitting device of the third example includes a resin-made casing 8 having a recess and integrally molded, a blue LED 1 disposed in the recess of the casing 8, and a bottom surface of the recess. The external connection terminals 51 and 52 that pass through the side of the housing 8 and are taken out to the outside, bonding wires that connect the external connection terminals 51 and 52 and the pad electrode of the blue LED 1, and the interior of the housing 8 And a phosphor layer 3 made of a mixture of yellow phosphor particles 2 and a resin. In addition, the side wall of the recessed part of the housing | casing 8 functions as a reflecting plate which reflects light. The main light extraction surface of the blue LED 1 faces upward in the state shown in the figure, and the phosphor layer 3 is provided at a position where the blue light emitted from the main light extraction surface passes.

  In the semiconductor light emitting devices of the first to third examples shown in FIGS. 1 to 3, the blue LED 1 is an LED that emits light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm, and a yellow phosphor. The particle 2 is a phosphor that absorbs blue light emitted by the blue LED 1 and emits fluorescence having a main emission peak in a wavelength region of 550 nm or more and 600 nm or less, and the phosphor layer 3 is a fluorescence including yellow phosphor particles 2. It is a body layer.

  The blue light emitting element in the present invention is an element selected from a laser diode, a surface emitting laser diode, an inorganic electroluminescent element, and an organic electroluminescent element in addition to the blue LED (blue light emitting diode) in the present embodiment. From the viewpoint of increasing the output and extending the life of the element, light emitting diodes, laser diodes, surface emitting laser diodes, and the like are superior.

  The semiconductor light emitting device according to the present invention includes a blue LED 1 and a phosphor layer including yellow phosphor particles 2 that absorb blue light emitted from the blue LED 1 and emit fluorescence having a light emission peak in a wavelength region of 550 nm to 600 nm. 3 in which a part of the light emitted from the blue LED 1 excites the yellow phosphor particles 2 contained in the phosphor layer 3 and has a wavelength different from that of the blue LED light. Fluorescence is generated, and the fluorescence generated by the yellow phosphor and the blue LED light output without contributing to the excitation of the yellow phosphor are mixed to enable white light emission.

Here, the yellow phosphor particles 2 have the following chemical formula (1)
_{(Sr 1-a1-b1-} x Ba a1 Ca b1 Eu x) 2 SiO 4 (1)
A silicate phosphor mainly composed of a compound represented by However, in the chemical formula (1), a1, b1, and x are numerical values in the ranges of 0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, and 0 <x <1, respectively.

  The silicate phosphor can take orthorhombic, monoclinic and hexagonal crystal structures as will be described in detail later using experimental data. Any yellow phosphor that absorbs blue light emitted from the LED 1 and emits fluorescence having a main emission peak in a wavelength region of 550 nm to 600 nm may be used. The crystal structure of the silicate phosphor is orthorhombic and simple. Either an orthorhombic system or a hexagonal system may be used.

As far as the inventors' experiments are concerned, such a yellow phosphor has an orthorhombic crystal structure represented by the following chemical formula (2).
_{(Sr 1-a1-b2-} x Ba a1 Ca b2 Eu x) 2 SiO 4 (2)
It is limited to the silicate fluorescent substance which mainly has the compound represented by these. In the chemical formula (2), a1, b2, and x are numerical values that satisfy 0 ≦ a1 ≦ 0.3, 0 ≦ b2 ≦ 0.6, and 0 <x <1, respectively. a1, b2, and x are preferably numerical values satisfying 0 <a1 ≦ 0.2, 0 <b2 ≦ 0.4, and 0.005 <x <0.1, respectively. It is more preferable that a1, b2, and x are values satisfying 0 <a1 ≦ 0.15, 0 <b2 ≦ 0.3, and 0.01 <x <0.05, respectively. a1, b2, and x are most preferably values satisfying 0.01 ≦ a1 ≦ 0.1, 0.001 ≦ b2 ≦ 0.05, and 0.01 <x ≦ 0.02, respectively.

As described above, the composition of the numerical value of a1 and b2 in chemical formula (2) is smaller than the above range, the crystal structure of the silicate phosphor becomes unstable, and easily includes a monoclinic crystal structure, The light emission characteristics vary depending on the operating temperature. On the other hand, with a composition with a numerical value larger than the range, even if the crystal structure is orthorhombic, the light emission is greenish and does not become a good yellow phosphor, but a green phosphor. Even when combined with a blue LED, it does not become a white semiconductor light emitting device with good light color. In addition, the composition with a numerical value of Eu addition amount x smaller than the above range has a low light emission intensity, and the composition with a large numerical value has a weak light emission intensity due to concentration quenching or self-absorption caused by Eu ²⁺ ions. The problem of temperature quenching, in which the emission intensity decreases with the rise, becomes significant. As described above, the yellow phosphor used in the present invention is superior in the color purity of yellow light emitted from the silicate phosphor, and is capable of providing a semiconductor light emitting device that emits white light with good light color. Silicate phosphors having a crystalline structure are preferred. In addition, for the purpose of stabilizing the crystal structure of the silicate phosphor or increasing the emission intensity, part of Sr, Ba, and Ca can be replaced with Mg or Zn.

Furthermore, for the purpose of controlling the emission color of the silicate phosphor, a part of Si can be replaced with Ge. That is, in the semiconductor light emitting device of the present invention, the yellow phosphor used has the following chemical formula (3)
_{(Sr 1-a1-b1-} x Ba a1 Ca b1 Eu x) 2 Si 1-z Ge z O 4 (3)
A semiconductor light emitting device that is a silicate phosphor mainly composed of a compound represented by the formula: However, a1, b1, x, and z are 0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1, 0 ≦ z <1, respectively (preferably 0 ≦ z ≦ 0.2). ). When a part of Si is replaced with Ge, the emission intensity tends to decrease greatly. However, at least when the Ge substitution amount is 20 atomic% or more, the main emission peak shifts to the short wavelength side, and the greenish emission is obtained. Be able to get. However, from the viewpoint of maintaining the emission intensity, the smaller the Ge substitution amount z, the better. The numerical value of z is preferably kept within a range not exceeding 0.2.

  In addition, for the purpose of compensating the red component of light emission of the semiconductor light emitting device, for example, blue light of a blue LED or yellow light emitted by a silicate phosphor is absorbed, and a main emission peak is displayed in a red region having a wavelength exceeding 600 nm and not exceeding 660 nm. In order to further increase the luminous flux, for example, it absorbs blue light of a blue LED and has a main emission peak in a green region having a wavelength of 500 nm or more and less than 550 nm and having high visibility. A green phosphor may be further used.

  The material of such a red phosphor or green phosphor is not particularly limited to the material used in the present embodiment, and may be a phosphor made of an inorganic compound or an organic compound. It may be a phosphor.

  Further, the method of using such red phosphors and green phosphors is not particularly limited to the method of the present embodiment. If the semiconductor light emitting device further includes these phosphors (fluorescent substances). Good. These phosphors may be included in the phosphor layer or may be arranged separately from the phosphor layer. It suffices if the blue light is absorbed to emit red or green light, and the blue light may pass at least through the phosphor layer.

Examples of the red phosphor include, for example, a CaS: Eu ²⁺ phosphor and a SrS: Eu ²⁺ phosphor known as a cathodoluminescence material or an electroluminescence material, for example, Japanese Patent Laid-Open No. 11-246510, Examples thereof include a rare earth complex disclosed in Japanese Utility Model Laid-Open No. 2000-63682, a resin composition containing the rare earth complex, and a LiEuW ₂ O ₈ phosphor disclosed in Japanese Patent Application Laid-Open No. 2001-267632.

  When such a red phosphor is used, the intensity of the red light-emitting component of the semiconductor light-emitting device, particularly the semiconductor light-emitting device that emits white light, is increased, and as a result, a special color rendering index representing red fidelity in the field of illumination. R9 described in JIS Z 8726-1990 and the color gamut area ratio Ga described in JIS Z 8726-1990 can be increased, and a semiconductor light emitting device that emits a light color with a large index. Can be provided.

Examples of the green phosphor include, for example, SrGa ₂ S ₄ : Eu ²⁺ phosphor known as a cathodoluminescence material or an electroluminescence material, and a fluorescence having an emission peak in a wavelength region of 500 nm to 600 nm. Chemical formula (4)
(Sr _1-a3-b3-x Ba _a3 Ca _b3 Eu _x ) ₂ SiO ₄ (4)
There is a silicate phosphor mainly composed of a compound represented by:

  However, a3, b3, and x are numerical values satisfying 0 ≦ a3 ≦ 1, 0 ≦ b3 ≦ 1, and 0 <x <1, respectively.

The above _{(Sr 1-a3-b3-} x Ba a3 Ca b3 Eu x) 2 SiO 4 silicate phosphor, in the above-mentioned silicate phosphor that emits yellow light emitting fluorescent composition and crystal structure is different only Is the body. For this reason, it has the physical property similar to the various physical properties of the silicate fluorescent substance of yellowish light emission. Therefore, the use of the green light-emitting silicate phosphor in combination with the yellow light-emitting silicate phosphor is more preferable not only in terms of characteristics of the semiconductor light-emitting device but also in terms of manufacturing.

  In order to provide a semiconductor light emitting device that emits a desired light color, a plurality of silicate phosphors that emit yellow light having an emission peak in a wavelength region of 550 nm or more and 600 nm or less and that have different compositions are fluorescent. It can also be included in the body layer. Since the silicate phosphor is a phosphor that can emit light that covers a wide range of the yellow wavelength range by changing the composition, a blue LED can be obtained by using a combination of two or more types of the silicate phosphor. It is possible to widen the color expression range of the semiconductor light-emitting device, particularly the semiconductor light-emitting device that emits white light, which is determined by the addition of blue light emitted and yellow light emitted by the silicate phosphor.

Further, from the viewpoint of controlling the light color of light emitted from the semiconductor light emitting device, particularly the light color of white light, the compound represented by the chemical formula (4) is mainly used, and the yellow phosphor is composed of It is effective to further include at least one kind of silicate phosphor which is different in surface in the phosphor layer. This silicate phosphor is a phosphor that emits light under blue light excitation in the composition of all the numerical ranges of a3 and b3. Further, by changing the composition of the phosphor, a wide wavelength of about 505 to 598 nm. It is a phosphor capable of changing the emission peak wavelength within the range. When such a phosphor is further included in the phosphor layer, the light color of the light emitted from the semiconductor light emitting device is blue light emitted from the blue LED, yellow light of the silicate phosphor emitting yellow light, and ( Sr _1-a3-b3-x Ba _a3 Ca _b3 Eu _x ) Addition of at least one light of blue-green, green, yellow and orange emitted from ₂ SiO ₄ silicate phosphor, that is, add at least 3 colors Since the light color is colored, it is possible to widen the control range of the light color of the light emitted from the semiconductor light emitting device.

  Moreover, in order to supplement the red component of the light emission of the semiconductor light emitting device, the substrate containing Cr and the blue LED may be combined in the semiconductor light emitting device described in any of FIGS. By using blue light emitted from the blue LED, red light can be emitted from a Cr-containing substrate that can be converted to a longer wavelength. Thereby, white light with high color rendering property can be emitted by the mixed light of blue light from the blue LED, yellow light from the silicate phosphor, and red light from the Cr-containing substrate. That is, it goes without saying that the present invention is applicable to any type of semiconductor light emitting device of flip chip type, shell type or chip type type.

  The silicate phosphor is sufficient if the center particle size is 0.1 μm or more and 100 μm or less in the particle size distribution evaluation by a laser diffraction / scattering particle size distribution analyzer (for example, LMS-30: Seishin Enterprise Co., Ltd.) For reasons such as ease of phosphor synthesis, availability, and ease of formation of the phosphor layer, it is preferably 0.5 μm to 30 μm, particularly preferably 1 μm to 20 μm, and more preferably 2 μm to 10 μm. The particle size distribution should not include particles less than 0.01 μm and more than 1000 μm, but for the same reason as the center particle size, preferably a silicate having a distribution approximating a normal distribution within the range of 1 μm to 50 μm A phosphor is preferred.

  Such a silicate phosphor can be produced, for example, by the synthesis method described in the above-mentioned document (J. Electrochemical Soc. Vol. 115, No. 11 (1968) pp. 1181-1184). The manufacturing method of the silicate phosphor in the semiconductor light emitting device of this embodiment will be described later, and the characteristics of the silicate phosphor will be described in more detail below.

  FIG. 8 is a diagram showing an example of an excitation light spectrum (referring to a spectrum of light excited by the silicate phosphor) and an emission spectrum of the orthorhombic silicate phosphor used in the present embodiment. FIG. 8 also shows an example of an excitation light spectrum and an emission spectrum of a YAG phosphor for comparison.

  As can be seen from FIG. 8, the YAG phosphor has excitation light peaks at three locations of 100 nm to 300 nm, 300 nm to 370 nm, and 370 nm to 550 nm, and absorbs light in each of these narrow wavelength ranges. The silicate phosphor has an excitation light peak in the vicinity of 250 to 300 nm, whereas the phosphor emits yellowish fluorescence having an emission peak in the yellow-green to yellow wavelength region of 550 to 580 nm. A yellow system that absorbs light within a wide wavelength range of 100 to 500 nm and emits yellowish fluorescence having an emission peak in a wavelength range of yellow green to yellow to orange of 550 to 600 nm (an example is shown in FIG. 8) It is a phosphor. In addition, the emission intensity of silicate phosphors under irradiation of blue light (excitation light) exceeding 430 nm and not more than 500 nm is generally low, which is 100 to 30% of that of YAG phosphors. It can also be seen that at a light wavelength of 470 nm, the emission intensity is half (50%) of the YAG phosphor.

  In addition, if a1, b1, b2, x in the above formula (1) or (2) is a silicate phosphor having a composition within a predetermined numerical range, excitation and emission spectra are shown in FIG. It is similar to the spectrum.

  Next, features of the phosphor layer using the silicate phosphor will be described.

  The silicate phosphor has an excitation light peak in the vicinity of 250 to 300 nm and absorbs light in a wide wavelength range of 100 to 500 nm, as shown in FIG. 8 as an example of the excitation light spectrum and emission spectrum. , A yellow phosphor emitting yellow fluorescence having a light emission peak in the yellow to green wavelength range of 550 to 600 nm. When combined with a blue LED, the blue light of the blue LED and the yellow phosphor It becomes a semiconductor light emitting device that emits light due to the addition of fluorescence.

  In addition, as can be seen by comparing the excitation light spectra of the silicate phosphor and the YAG phosphor shown as an example in FIG. 8, the silicate phosphor is blue light (excitation light within a wavelength range of more than 430 nm and 500 nm or less. ), The internal quantum efficiency is relatively high, but the reflectivity of blue excitation light is high, so the external quantum efficiency is low, and the phosphor has a low so-called light emission efficiency (external quantum efficiency). For example, only 470 nm of excitation light emits only half the intensity of YAG phosphor. Therefore, for example, when trying to obtain the same light color in a white semiconductor light emitting device that emits white light by adding blue light of a blue LED and yellow light of a yellow phosphor, rather than using a YAG phosphor, When the silicate phosphor is used, the amount of the phosphor used is increased, so that the phosphor layer is relatively thick. As a result, the phosphor layer is less affected by the unevenness generated on the surface of the phosphor layer, and the thickness variation of the phosphor layer is substantially reduced, so that a semiconductor light emitting device with little emission color unevenness can be obtained.

  Furthermore, when the phosphor layer is formed using the silicate phosphor and the resin, the distribution of the phosphor particles in the phosphor layer is less uneven than in the case of the phosphor layer using the conventional YAG phosphor. Become. When a semiconductor light emitting device is configured using a YAG-based phosphor, the phosphor particles are in contact with each other, and as described above, as a result, the intensity of white light is low. The trouble that becomes. The problem that the strength is lowered due to such a cause is not a problem that occurs only when a YAG-based phosphor is used, but a problem that is commonly recognized in semiconductor light-emitting devices having a phosphor layer in which phosphor particles are in contact with each other. It is.

  On the other hand, when the phosphor layer formation conditions are selected as in the semiconductor light-emitting device of this embodiment, a phosphor layer in which phosphor particles are dispersed relatively uniformly is formed, so that the semiconductor light-emitting device has less uneven color emission. Can be obtained. In addition, when the silicate phosphor according to the present embodiment is used, the reason why the uneven distribution of the phosphor particles in the phosphor layer is reduced is not fully elucidated although it is currently being investigated. However, it is certain that at least the specific gravity difference between the phosphor and the resin is smaller than the specific gravity difference between the YAG phosphor and the resin.

  Hereinafter, the phosphor layer in the semiconductor light emitting device of the present embodiment has a structure (scattered dot structure) in which phosphor particles are dispersed relatively uniformly throughout the base material. Description will be given with reference to FIG.

  In the phosphor layer 3 shown in FIGS. 1 to 3, the yellow phosphor particles 2 absorb the blue light emitted by the blue LED and have a main emission peak in the wavelength region of 550 nm to 600 nm as described above. And a silicate phosphor. The base material 13 is a resin having translucency, such as an epoxy resin, an acrylic resin, a polyimide resin, a urea resin, or a silicone resin.

  In the semiconductor light emitting device of the present invention, the phosphor layer 3 may further contain a phosphor other than the yellow phosphor, or may contain a substance other than the phosphor. Moreover, multiple types of the above-mentioned yellow phosphors may be included.

  In the semiconductor light emitting device of the present embodiment, if the phosphor layer 3 has a structure in which the yellow phosphor particles 2 are dispersed in the base material 13 as shown in FIGS. The size and shape of the system phosphor particles 2 are not particularly limited. When the silicate phosphor particles are used as the phosphor particles in the phosphor layer, when the phosphor particles having a center particle diameter of 0.5 μm or more and 30 μm or less are used, the phosphor layer is as shown in FIGS. It has been demonstrated that a structure in which various phosphor particles are dispersed is obtained.

  Note that the smaller the size of the yellow phosphor particles 2, the more easily the phosphor layer 3 is dispersed. However, since the small phosphor particles have a large specific surface area, the proportion of the particle surface where many lattice defects are present increases with respect to the volume of the phosphor particles, so that the emission intensity of the phosphor layer 3 decreases. On the other hand, when the size of the phosphor particles is large, the yellow phosphor particles 2 are likely to settle by gravity during the formation of the phosphor layer 3, and the phosphor layer 3 is less likely to have a structure in which the phosphor particles are dispersed. . From such a viewpoint, the center particle diameter of the yellow phosphor is preferably within the above range (the center particle diameter is 0.5 μm to 30 μm), preferably 1 μm to 25 μm, more preferably 3 μm or more. The range is 20 μm or less.

  Further, the material of the base material 13 is not limited to the material described in the present embodiment as long as the phosphor layer 3 has a structure in which phosphor particles are dispersed as shown in FIGS. Alternatively, a material other than resin may be used as long as it is a light-transmitting material. Even when the base material 13 is a resin, the type of resin and the true specific gravity are not particularly limited to those of the present embodiment.

  When the base material 13 is a resin, the closer the true specific gravity of the resin is to the true specific gravity of the yellow phosphor particles 2, the more easily the phosphor layer 3 has a structure in which the phosphor particles are dispersed. . As will be described later, since the true specific gravity of the resin is generally smaller than the true specific gravity of the yellow phosphor particles 2, the true specific gravity of the resin does not exceed the true specific gravity of the yellow phosphor particles 2. The larger it is, the better.

  When the true specific gravity of the resin is small, the yellow phosphor particles 2 are likely to settle due to gravity during the formation of the phosphor layer 3, and the phosphor layer 3 is less likely to have a structure in which the phosphor particles are dispersed. From this point of view, the true specific gravity of the resin should be 0.8 or more and less than or equal to the true specific gravity of the phosphor particles, preferably 1.0 or more and less than or equal to the true specific gravity of the phosphor particles, more preferably The range is 1.5 or more and less than the true specific gravity of the phosphor particles.

  According to the Plastic Data Handbook (Hito Ito, Industrial Research Committee) and the Non-Metal Material Data Book (Japan Standards Association), the true specific gravity of epoxy resin is 1.0 to 2.1 and the true specific gravity of acrylic resin is 1.0 to 1.4, the true specific gravity of the polyimide resin is 1.3 to 1.5, the true specific gravity of the urea resin is about 1.5, and the true specific gravity of the silicone resin is 1.7 to 2. 0 or less.

  In the example of the semiconductor light emitting device shown in FIG. 1 to FIG. 3, the phosphor layer 3 uses a mixture of phosphor particles and a resin (matrix), but instead, a phosphor material is molded. Then, the phosphor layer may be formed (sintered).

-General manufacturing method-
An example of a specific method for manufacturing the semiconductor light emitting device of the present invention will be described in detail later. First, an outline of a method for manufacturing the phosphor layer 3 having a structure in which phosphor particles are dispersed and a preferred embodiment will be described. To do.

  In the phosphor layer 3 having a structure in which phosphor particles are dispersed, the yellow phosphor particles 2 having the true specific gravity within the predetermined range are dispersed in the base material 13 having the true specific gravity within the predetermined range. The phosphor paste can be manufactured by placing the phosphor paste at a predetermined position of the semiconductor light emitting device by a method such as injection or coating, and curing the phosphor paste.

  The phosphor paste can be produced, for example, by kneading the yellow phosphor particles 2 and a base material 13 such as resin, which are weighed so as to have a predetermined phosphor concentration. Various methods can be used for kneading the two, and examples include kneading using a mortar, kneading using a stirrer, kneading using a roller, and the like.

  When kneading the two, the preferred weight ratio (phosphor concentration) of the yellow phosphor particles 2 to the base material 13 is in the range of 10 wt% to 80 wt%, more preferably 20 wt% to 60 wt%. It is in the range of weight percent or less. When the phosphor concentration is lower than this range, the phosphor layer 3 is weak in light emission of the yellow phosphor, and the semiconductor light emitting device configured using the phosphor layer 3 emits light with strong blue. Thus, it becomes difficult to obtain white light having a good color tone. On the other hand, when the phosphor concentration is higher than this range, the phosphor layer 3 emits strong yellow phosphor, and the semiconductor light-emitting device configured using the phosphor layer 3 has strong yellow light. It becomes difficult to obtain white light with good color tone.

  In the method for producing the phosphor layer of the present invention, the curing method of the phosphor paste is not limited to a specific method. The base material 13 may be cured by using a material that is cured by two-component mixing so that two-component mixed curing occurs in the phosphor paste, or by heating the phosphor paste using a thermosetting material. It may be cured or may be cured by light irradiation using a photocuring material. The phosphor layer 3 can be obtained by any phosphor paste curing method.

  In order to form the phosphor layer 3 having a structure in which the phosphor particles are dispersed, it is preferable to suppress the sedimentation rate of the yellow phosphor particles 2 in the base material 13.

Hereinafter, for reference, the sedimentation rate of the phosphor particles that settle in the solvent will be briefly described. According to Stokes' law, a sphere of radius r (unit: m) density ρ ₂ that settles in a fluid of density ρ ₁ viscosity η (= viscosity, unit: Pa · s or P (poise)). The sedimentation velocity u (m / s) of the object is expressed by the following formula (5)
u = {2 × r ² × (ρ ₂ −ρ ₁ ) × g} / (9 × η) (5)
It is represented by However, in Formula (5), g is a gravitational acceleration (unit: m * s ^<-2> ).

  Therefore, the sedimentation rate of the phosphor particles that settle in the resin as a solvent is qualitatively slower as the center particle size of the phosphor particles is smaller, and the smaller the specific gravity difference between the phosphor particles and the resin is, The higher the viscosity of the resin, the slower.

From the above Stokes law, the following means 1. ~ 4. As a result, the sedimentation rate of the yellow phosphor 3 in the resin can be reduced.
1. Use light phosphor particles with small true specific gravity.
2. Use a resin with a large true specific gravity.
3. Phosphor particles having a small center particle diameter are used.
4). Use a resin with high viscosity.
However, the above method 1. Each of ˜4 has various restrictions such as a restriction from the manufacturing process, a restriction from the cost, and a restriction from the light emission performance of the phosphor layer.

  In the method for producing the phosphor layer of the present invention, the main specific wavelength range of light emission and the true specific gravity of the yellow phosphor particles 2 and the true specific gravity of the resin that limit the elements included are limited within a predetermined range. As a preferred form, the center particle diameter of the yellow phosphor is further limited within a predetermined range, and as a more preferred form, the type and composition of the yellow phosphor are restricted.

  First, the yellow phosphor particles 2 do not contain Cd (cadmium), and the main emission peak wavelength of light emission at room temperature is in the range of 560 nm to 600 nm, preferably more than 560 nm and 600 nm or less, more preferably 565 nm. Thus, the phosphor is in the range of 600 nm or less. Next, the true specific gravity of the yellow phosphor particles 2 is in the range of 3.0 to 4.65, preferably in the range of 3.0 to 4.60, more preferably in the range of 3.0 to 4. The range is less than 55, and the true specific gravity of the resin is 0.8 or more and less than or equal to the true specific gravity of the yellow phosphor, preferably 1.0 or more and less than or equal to the true specific gravity of the yellow phosphor, more preferably Is limited to a range not less than 1.5 and not more than the true specific gravity of the yellow phosphor.

  As can be seen from Stokes' law shown in the equation (5), when this is done, the specific gravity difference between the yellow phosphor particles 2 and the resin is reduced, and the sedimentation rate of the phosphor particles in the resin is slowed down. The phosphor layer having a structure in which the phosphor particles are dispersed can be easily manufactured.

  In particular, yellow phosphors not containing Cd include Mg, Ca, Sr, Ba, Sc, Y, lanthanoids, Ti, Zr, Hf, V, Nb, Ta, Mo, W, Zn, B, Al, and Ga. , In, Si, Ge, Sn, P, and a compound composed of at least one element selected from O, S, Se, F, Cl, Br, and There is a phosphor that does. These elements are also relatively less harmful.

  The reason why the main peak wavelength of the yellow phosphor particles 2 is limited to the range of 560 nm to 600 nm is to obtain white light with a preferable color tone. The reason for limiting the true specific gravity of the resin within the above range and the reason for limiting the resin to phosphors not containing Cd are as already described.

  In the method for producing a light emitting layer of a semiconductor light emitting device according to the present invention, basically, the type of yellow phosphor particles 2 is not particularly limited, and does not include Cd, and the main light emission peak of light emission at room temperature. Any yellow phosphor particles 2 having a wavelength in the range of 560 nm to 600 nm and a true specific gravity in the range of 3.0 to 4.65 may be used. The yellow phosphor particles 2 may or may not be the silicate phosphor particles described above.

  On the other hand, in the conventional semiconductor light emitting device, the phosphor particles do not contain harmful substances, emit yellow light under blue light excitation, and fall within the true specific gravity range described in the present embodiment. The light yellow phosphor particles 2 are not used, and the phosphor layer must be manufactured using a yellow light-emitting YAG phosphor having a large true specific gravity. The true specific gravity of the yellow light-emitting YAG phosphor particles is in the range of more than 4.65 and less than or equal to about 4.98, and the emission spectrum of the yellow YAG phosphor particles shifts to the longer wavelength side as the true specific gravity increases. Therefore, in the conventional light emitting device, it is difficult to obtain excellent characteristics as in the light emitting device of the present embodiment.

  In a preferred embodiment according to the present invention, the center particle diameter of the yellow phosphor particles 2 is in the range of 0.5 μm to 30 μm, preferably 1 μm to 25 μm, more preferably 3 μm to 20 μm. Limited to. In addition, as a preferable form, the reason for limiting the center particle diameter of the yellow phosphor particles 2 is as described above.

In a more preferred form, the yellow phosphor particles 2 are represented by the compound represented by the chemical formula (1) described above, that is, (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO _4. A silicate phosphor composed mainly of a compound is used. Since the true specific gravity of the silicate phosphor varies slightly depending on the composition, it is easy to obtain yellow phosphor particles 2 having a true specific gravity in the range of 3.0 to 4.65. It is possible to easily produce a phosphor layer having a structure in which particles are dispersed. The specific gravity of the silicate phosphor composed mainly of the compound represented by the chemical formula (1) increases as the Ba substitution amount increases, and decreases as the Ca substitution amount increases.

Here, the true specific gravity of the phosphor will be supplementarily described. In the measurement of the true density of the phosphor by the constant volume expansion method by the He gas displacement method using a multi-volume density meter 1305 manufactured by Micromeritex, YAG phosphor ((Y _0.7 Gd _0.28 Ce _0.02 ) ₃ Al ₅ O ₁₂ : Main emission peak wavelength 565 nm), silicate phosphor ((Ba _0.05 Sr _0.93 Eu _0.02 ) ₂ SiO ₄ : main emission peak wavelength 575 nm), silicate phosphor (Ba _0.24 ) having a different Sr in terms of composition. The true specific gravity of Sr _0.74 Eu _0.02 ) ₂ SiO ₄ : main emission peak wavelength 559 nm) is 4.98, 4.53, and 4.67 (measurement accuracy ± 1%), respectively. As an example, when describing a phosphor that emits light having a main emission peak near 565 nm, it was found that the true specific gravity of the silicate phosphor is about 10% smaller than that of the YAG phosphor.

FIG. 48 is a diagram showing the relationship between the true specific gravity of the YAG phosphor and the silicate phosphor and the main emission peak wavelength. As can be seen from FIG. 48, a phosphor that emits yellow light having a main emission peak in a wavelength region of 560 nm to 600 nm, particularly a wavelength region of 565 nm to 600 nm, and has a true specific gravity of 4.65 or less. The YAG phosphor cannot be obtained or is difficult to obtain even if it can be obtained. In contrast, compound of Formula (1), i.e. _{(Sr 1-a1-b1-} x Ba a1 Ca b1 Eu x) composed silicate phosphor mainly a compound represented by ₂ SiO ₄ Then, it is possible to easily obtain a phosphor having a main light emission peak in a wavelength region of 560 nm to 600 nm, particularly in a wavelength region of 565 nm to 600 nm and having a true specific gravity of 4.65 or less. it can.

  Next, the viscosity of the resin or phosphor paste will be described. The manufacturing method of the phosphor layer of the semiconductor light emitting device according to the present invention is not particularly limited to the manufacturing method as described later. However, as described above, if the viscosity of the resin or phosphor paste is too low, the phosphor particles settle out by gravity, and a structure in which the phosphor particles are dispersed in the resin cannot be obtained. On the other hand, the viscosity of the resin is too high. If it is high, the semiconductor light emitting device is disadvantageously handled in the manufacturing process. In consideration of such points, the viscosity of the resin or phosphor is 0.01 Pa · s or more and 10 Pa · s or less, preferably 0.03 Pa · s or more and 3 Pa · s or less, more preferably, The range is 0.1 Pa · s or more and 1 Pa · s or less. However, the viscosity of the liquid fluid such as resin and phosphor paste varies depending on the temperature and pressure, and decreases as the temperature increases, and increases as the pressure increases, so it is difficult to specify simply. It is only necessary that the viscosity of the resin or phosphor paste can be adjusted to the above range by adjusting the conditions including the pressure and temperature.

  In the method for producing a phosphor layer of a semiconductor light emitting device according to the present invention, the average particle size of the primary particles in the phosphor paste is further in the range of 1 nm to 100 nm, preferably 3 nm to 50 nm. The phosphor paste may be cured and formed while including ultrafine particles within the range.

  As can be seen from the above formula (5), the sedimentation rate in the phosphor paste of ultrafine particles having a very small particle radius is extremely low. Therefore, when such ultrafine particles are included in the phosphor paste, the ultrafine particles that settle very slowly act to inhibit the precipitation of the yellow phosphor particles 2. As a result, by adding ultrafine particles to the phosphor paste, the sedimentation rate of the yellow phosphor particles 2 in the phosphor paste is reduced, and the phosphor layer 3 having a structure in which the phosphor particles are dispersed in the resin. It becomes easy to obtain.

  Such ultrafine particles include, for example, silicon dioxide powder known by the trade name Aerosil (Degussa: Germany). However, the ultrafine particle material that can be added to the phosphor paste is not limited to silicon dioxide, and may be any ultrafine particle material having an average primary particle diameter in the range of 1 nm to 100 nm. Examples of ultrafine particle materials other than silicon dioxide include aluminum oxide.

  Note that ultrafine particles having a particle size of about 5 nm or less cannot be measured with a laser diffraction / scattering type particle size distribution measuring instrument as described above. Therefore, the particle diameter (diameter) of each ultrafine particle is measured based on the observation image obtained by electron microscope observation, and the average value is defined as the average diameter of the primary particles.

  As described above, the phosphor layer 3 having a structure in which phosphor particles are dispersed can be formed by using the method for producing a phosphor layer of the semiconductor light emitting device, and the structure in which phosphor particles are dispersed is formed. The semiconductor light emitting device having the phosphor layer has the following effects and can exhibit remarkable effects.

  That is, since such a phosphor layer substantially does not contain a light absorption factor or a light scattering factor, for example, the phosphor particles are in contact with each other as compared with a phosphor layer in which the phosphor particles are in contact with each other. The contact area is greatly reduced even if contacted, and the light absorption attenuation factor in the phosphor layer is substantially not included. For this reason, the light transmittance of the phosphor layer is improved, and the blue light of the blue LED is not absorbed and attenuated, but is transmitted through the phosphor layer or contributes to excitation of the phosphor. In addition, since the phosphor layer is configured such that the entire surface of the phosphor particles can be irradiated with blue light, the excitation cross-sectional area of the phosphor particles is substantially increased, and the phosphor particles in the phosphor layer emit light efficiently. It will be. Note that blue light that irradiates the phosphor particles but does not contribute to excitation of the phosphor is reflected on the surface of the phosphor particles and emitted as blue light to the outside of the phosphor layer. When the same kind of blue LED is used, the output of blue light emitted by the blue LED is constant, so in a white semiconductor light-emitting device that obtains white light by adding blue light from a blue LED and yellow light from a yellow phosphor, If the light absorption attenuation factor in the body layer is small, even if the phosphor layer uses a phosphor material with low emission efficiency (external quantum efficiency) under excitation of blue light, the phosphor layer has high internal quantum efficiency. If there is, it becomes possible to emit a high luminous flux.

  When the surface area of the phosphor layer of the semiconductor light emitting device (the area of the uppermost surface of the phosphor layer 3 in the semiconductor light emitting device shown in FIGS. 1 to 3) is the same, the same volume of fluorescence as that of the semiconductor light emitting device of the present embodiment is used. Compared to a conventional phosphor layer using phosphor particles (see phosphor layer 3 in FIG. 7) in which many phosphor particles are in contact with each other, phosphor particles are contained in the resin as in this embodiment. In the phosphor layer having a dispersed structure (see, for example, the phosphor layer 3 shown in FIG. 2), the substantial thickness of the phosphor layer also increases. Therefore, in the semiconductor light emitting device of the present embodiment, even when the surface irregularities of the phosphor layer 3 become somewhat large, the ratio of the irregularities on the surface of the phosphor layer 3 contributing to the thickness variation of the phosphor layer 3 is reduced. In addition, unevenness in light emission caused by a variation in the thickness of the phosphor layer 3 is also reduced.

(Second Embodiment)
Next, an embodiment of a light emitting device of the present invention will be described with reference to the drawings. In the present specification, various display devices using semiconductor light emitting devices (for example, LED information display terminals, LED traffic signal lights, automobile LED stop lamps, LED direction indicator lights, etc.) and various illumination devices (LED indoor / outdoor illumination lights, Car interior LED lights, LED emergency lights, LED surface light sources, etc.) are widely defined as light emitting devices.

  4 to 6 are perspective views showing examples of the light emitting device according to the second embodiment of the present invention. FIG. 4 is a perspective view schematically showing a configuration of a stand-type illumination device that is the light emitting device of the first example of the present invention.

  As shown in FIG. 4, the light emitting device of the first example includes an illumination unit in which a large number of semiconductor light emitting devices 11 of the present invention are arranged as described in the first embodiment, and a switch for lighting the semiconductor light emitting device 11. When the switch 12 is turned on, the semiconductor light emitting device 11 is energized and emits light (not shown).

  Note that the illumination device illustrated in FIG. 4 is merely a preferable example of the light-emitting device, and the light-emitting device according to the present invention is not limited to this example. The light-emitting device of the present invention is preferably configured using the semiconductor light-emitting device 11 of the present invention as disclosed in the first embodiment, for example. However, the light-emitting device of the present invention may be a combination of the white semiconductor light-emitting device according to the first embodiment and LEDs that emit light such as blue, green, yellow, and red. Further, the color, size, number, and shape of the light emitting portion of the light emitted from the semiconductor light emitting device 11 are not particularly limited to specific ones. Further, it may be a semiconductor laser emission type illumination device that converges light from a semiconductor light emitting device and emits a laser. Thereby, not only is the field of view excellent as a lighting device, but the intensity of the light can also be improved.

  In the lighting device of the first example, a preferable color temperature is in a range of 2000K to 12000K, preferably in a range of 3000K to 10,000K, and more preferably in a range of 3500K to 8000K. The lighting device as the light emitting device is not limited to the color temperature in this range.

  FIG. 5 is a perspective view schematically showing a configuration of an image display device which is a light emitting device of a second example of the present invention.

  As shown in FIG. 5, the image display apparatus of the second example includes a display unit in which a large number of semiconductor light emitting devices 11 of the present invention as described in the first embodiment are arranged in a matrix. The entire size of the image display device can be manufactured arbitrarily, but the width is in the range of 1 cm to 10 m, the height is in the range of 1 cm to 10 m, and the depth is in the range of 5 mm to 5 m. It is preferable. Further, the number of the semiconductor light emitting devices 11 can be selected according to the dimensions of the image display device.

  This image display device, which is an example of a light emitting device, is preferably configured using the semiconductor light emitting device 11 described in the first embodiment, similarly to the lighting device of the first example. However, in addition to the semiconductor light emitting device of the present invention, for example, an LED that emits light such as blue, green, yellow, and red and a phosphor layer may be combined. Further, the color, size, number, and shape of the light emitting portion of the light emitted from the semiconductor light emitting device 11 and the arrangement shape of the semiconductor light emitting device 11 are not particularly limited to specific ones. Furthermore, the external shape is not particularly limited.

  FIG. 6 is a perspective view schematically showing a configuration of a pattern display device which is a light emitting device of a third example of the present invention.

  As shown in FIG. 6, the pattern display device of the third example has the semiconductor light emitting device 11 of the present invention as described in the first embodiment, which has a light emitting / non-lighting of each pixel up to 0-9. A display unit is arranged so that an arbitrary number can be displayed.

  However, the pattern displayed by the pattern display device is not limited to the numbers shown in FIG. 6, and may display kanji, katakana, alphabets, Greek characters, and the like. Even when the pattern display device displays numbers, the size, number, shape of pixels, etc. of the semiconductor light emitting device 11 are not limited to the structure shown in FIG.

  This pattern display device, which is an example of a light emitting device, is preferably configured using the semiconductor light emitting device 11 described in the first embodiment, similarly to the lighting device of the first example. However, in addition to the semiconductor light emitting device of the present invention, for example, an LED that emits light such as blue, green, yellow, and red and a phosphor layer may be combined. Further, the color, size, number, and shape of the light emitting portion of the light emitted from the semiconductor light emitting device 11 and the arrangement shape of the semiconductor light emitting device 11 are not particularly limited to specific ones. Furthermore, the external shape is not particularly limited.

  In the light emitting device as shown in FIGS. 4 to 6, when the light emitting device is configured using a plurality of semiconductor light emitting devices 11 using only one type of LED chip, the same drive voltage or There is an advantage that each semiconductor light emitting device can be operated with an injection current. In that case, the variation in characteristics of the light-emitting device due to external factors such as ambient temperature can be made almost the same, and the light emission device's light emission intensity and color tone change rate with respect to voltage change and temperature change can be reduced and light emission can be reduced. The advantage that the circuit configuration of the apparatus can be simplified can also be obtained.

  In addition, when a light-emitting device is configured using a semiconductor light-emitting device with a substantially flat pixel surface, a light-emitting device with a substantially flat light-emitting surface, such as a display device with a flat display surface or a lighting device that emits light, can be obtained. It is possible to provide an image display device having excellent image quality and a lighting device with excellent design.

  When the light emitting device according to the present invention is, for example, a lighting device or a display device, the light emitting device with suppressed color unevenness can be obtained by using the semiconductor light emitting device having the structure as in the first embodiment. . The semiconductor light emitting device of the first embodiment has less color unevenness, and as a result, the product yield is high and the cost is low. Therefore, by configuring the light emitting device using the semiconductor light emitting device of the first embodiment, not only the color unevenness as the light emitting device is reduced, but also a light emitting device with a low manufacturing cost can be obtained. In addition, since the semiconductor light emitting device of the first embodiment emits a light beam that surpasses the conventional semiconductor light emitting device using the YAG phosphor, the light beam of the entire light emitting device is also improved.

  In the present specification, various display devices using semiconductor light emitting devices (for example, LED information display terminals, LED traffic signal lights, automobile LED stop lamps, LED direction indicator lights, etc.) and various illumination devices (LED indoor / outdoor illumination lights, Car interior LED lights, LED emergency lights, LED surface light sources, etc.) are widely defined as light emitting devices.

(Embodiment related to manufacturing method of semiconductor light emitting device)
Manufacturing Method of Silicate Phosphor The manufacturing method of the silicate phosphor used in the semiconductor light emitting device of the present invention is not limited to the manufacturing method described below, but the silicate phosphor is, for example, by the following method Can be manufactured.

Silicate phosphors are, for example,
First treatment: Weighing and blending phosphor raw materials Second treatment: Mixing phosphor raw materials Third treatment: Firing of mixed phosphor raw materials Fourth treatment: Post-treatment (disintegration, classification, washing) , Drying, etc.)
It can be obtained through each process. Hereinafter, the contents of each process will be described in more detail.

First treatment: Weighing and blending phosphor materials First, the phosphor materials are weighed and blended. As the phosphor material, various powders such as various alkaline earth metal compounds, silicon compounds, and europium compounds can be used. Examples of the alkaline earth metal compound include alkaline earth metal carbonates (strontium carbonate, barium carbonate, calcium carbonate), nitrates (strontium nitrate, barium nitrate, calcium nitrate), hydroxides (strontium hydroxide). , Barium hydroxide, calcium hydroxide), oxides (strontium oxide, barium oxide, calcium oxide), sulfates (strontium sulfate, barium sulfate, calcium sulfate), oxalate (strontium oxalate, barium oxalate, calcium oxalate), etc. is there. Halides (strontium chloride, barium chloride, calcium chloride, strontium fluoride, barium fluoride, calcium fluoride, strontium bromide, barium bromide, calcium bromide, etc.) can also be used. An example of the silicon compound is an oxide such as silicon dioxide or silicon monoxide, but a non-oxide such as silicon nitride may be used depending on conditions. For the purpose of enhancing the reactivity between the phosphor raw materials, it is preferable to use ultra-fine powder silicon dioxide such as ultra-fine powder silica manufactured by Degussa (Germany) known by the trade name “Aerosil”. Examples of the europium compound include europium oxide, europium fluoride, and europium chloride. In addition, germanium compounds, such as a germanium oxide, can be used as a germanium raw material regarding the phosphor containing germanium mentioned above.

  In the first treatment, these alkaline earth metal compound, silicon compound, and europium compound are added so that the alkaline earth metal element, silicon, europium element, and the like have a desired element ratio in the phosphor. Weigh and mix.

  For the purpose of increasing the reactivity between the phosphor materials, a flux (flux) may be mixed with the phosphor material, or a temporarily fired product or a primary fired product of the phosphor material. As the flux, various halides and boron compounds can be used. Examples of the halide include strontium fluoride, barium fluoride, calcium fluoride, europium fluoride, ammonium fluoride, lithium fluoride, sodium fluoride, potassium fluoride, strontium chloride, barium chloride, calcium chloride, europium chloride, Examples of the boron compound include boric acid, boron oxide, strontium borate, barium borate, and calcium borate. The number of moles of the compound used as the flux with respect to 1 mole of the phosphor is in the range of 0.0001 to 1 mole, and usually in the range of 0.001 to 0.3 mole.

Second treatment: Mixing of phosphor materials Next, the phosphor materials of a predetermined molar ratio or weight ratio weighed and prepared in the first process are mixed to obtain a mixed phosphor material. Various methods can be used for mixing the phosphor materials. For example, mixing with a mortar, mixing with a ball mill, mixing with a V-shaped mixer, mixing with a cross rotary mixer, mixing with a jet mill, mixing with a stirrer, and the like, these mixing methods are well-known techniques. In addition, as a mixing method, dry mixing in which only the phosphor raw material is mixed without using any solvent, or the phosphor raw material is introduced into a solvent such as water or an organic solvent, and this is dispersed in the solvent and mixed. Wet mixing can be used. As the organic solvent, ethanol, methanol or the like can be used. When the wet mixing is performed, generally, the mixed phosphor material is filtered from a suspension composed of the phosphor material and a solvent using, for example, a Buchner filter, and then using a dryer or the like. The mixed phosphor material after filtration is dried at a temperature of about 60 to 200 ° C. for several hours to several tens of hours to obtain a mixed phosphor material.

Third treatment: Firing of mixed phosphor raw material Next, the mixed phosphor raw material is fired by the following procedure. A heating device such as an electric furnace or a gas furnace is used for firing. The kind of the heating device is not particularly limited, and any material can be used as long as the mixed phosphor material can be fired in a desired atmosphere at a desired temperature for a desired time. As an example of using an electric furnace as a heating device, a tubular atmosphere furnace, an atmosphere control box furnace, a belt conveyor furnace, a roller hearth furnace, a tray pusher continuous furnace, and the like can be used. In general, the mixed phosphor material is put into a firing container such as a crucible or a boat. In some cases, the firing container is covered and heated together with the firing container, but only the mixed phosphor material is used without using the firing container. You may bake. As the firing container, a material made of platinum, quartz, alumina, zirconia, magnesia, silicon carbide, silicon nitride, porcelain, carbon, or the like can be used. In some cases, these are used in combination.

  When the firing temperature is in the range of 800 ° C. or higher and 1600 ° C. or lower, the silicate phosphor can be manufactured. When the firing temperature is higher than this temperature range, the phosphor particles are sintered or melted, making it difficult to obtain a powdered silicate phosphor. On the other hand, the firing temperature is lower than this temperature range. In some cases, it is difficult to obtain high light emission from the phosphor. However, in order to obtain a powdery silicate phosphor exhibiting higher luminous efficiency, the firing temperature is preferably in the range of 1000 ° C. to 1500 ° C., more preferably in the range of 1100 ° C. to 1450 ° C., More preferably, it is the range of 1200 degreeC or more and 1400 degreeC or less.

  In addition, the firing time is sufficient if it is in the range of 10 minutes or more and 1000 hours or less, but from the viewpoint of improving the production efficiency and improving the quality of the phosphor, the preferred firing time is in the range of 30 minutes to 500 hours, More preferably, it is the range of 1 hour or more and 100 hours or less. The number of firings is not particularly limited, but from the viewpoint of increasing the production efficiency of the phosphor, a small number is desirable, and there is no need to finish it once.

The firing atmosphere can be arbitrarily selected from air, reduced pressure atmosphere, vacuum atmosphere, inert gas atmosphere, nitrogen atmosphere, oxidizing atmosphere, reducing atmosphere, and the like. However, since it is necessary to form Eu ²⁺ ions in the phosphor as emission centers, at least in the atmosphere in which Eu ²⁺ ions can be formed in the phosphor at the final stage or near the final stage of firing. There is a need to fire. For this atmosphere, a reduced atmosphere with a mixed gas of nitrogen and hydrogen or carbon monoxide, especially a mixed gas atmosphere of nitrogen and hydrogen, because the equipment is simple and inexpensive and the handling of gas and materials is easy. It is preferable to use it. The description will be limited to the nitrogen / hydrogen mixed gas atmosphere. From the viewpoints of ensuring the minimum reducing power and ensuring the safety of the gas, the hydrogen concentration ranges from 0.1% to 10%. The range of 1% or more and 5% or less is good. For the purpose of enhancing the reaction between the mixed phosphors, it may be pre-baked in the air at 400 ° C. to 1400 ° C. in advance.

Fourth treatment: post-treatment of the fired product Finally, the fired product (phosphor) obtained by the firing is post-treated to obtain a silicate phosphor. The post-processing mainly includes a crushing step (referring to a step of loosening and powdering), a classification step, a washing step, and a drying step.

  In the pulverization step, the phosphor immediately after firing (aggregate of particles) obtained by the firing is crushed into particles. Various methods can be used for crushing the fired product. Examples include crushing with a mortar, ball milling, crushing with a V-shaped mixer, crushing with a cross rotary mixer, crushing with a jet mill, crusher, motor grinder, vibrating cup mill, disc There are crushing by mill, rotor speed mill, cutting mill, hammer mill. In addition, as a pulverization method, a dry pulverization in which a baked product is crushed without using any solvent, or a wet type in which a baked product is introduced into a solvent such as water or an organic solvent, and this is crushed in the above solvent. Crushing can be used. As the organic solvent, ethanol, methanol and the like can be used.

  In the classification step, the aggregate of phosphor particles obtained by the above-mentioned crushing is made into a particle aggregate having a predetermined particle size distribution. Various methods can be used for classification, but examples include classification by sieving and classification using the precipitation phenomenon of phosphor particles in a solvent such as water or alcohol. In the classification with a sieve, silicate fluorescence having a center particle diameter within the above range (the range described in the first embodiment) suitable for application to a semiconductor light-emitting device when classified using a sieve of about 50 to 1000 mesh. You can get a body. As the classification method, dry classification using no solvent at all, or wet classification in which a pulverized product is introduced into a solvent such as water or an organic solvent and classified together with the solvent can be used. In order to obtain a sharp particle size distribution, a plurality of classification methods may be used.

  In the washing step, mainly residual flux components contained in the fired product after the firing and fine particles mixed in the product during the crushing or classification step are removed. Various methods can be used for washing, but examples include washing with acid, washing with alkali, washing with water such as distilled water or pure water, washing with an organic solvent such as ethanol or methanol, etc. The phosphor particles after crushing or classification are washed using a solvent appropriately selected according to the type and composition of the phosphor material. Note that the crushing or classification process may be wet, and these processes may also serve as a cleaning process. Further, depending on the type of phosphor to be manufactured, the cleaning step may be omitted.

  In the drying process, the aggregate of phosphor particles obtained through the crushing process, classification process, and washing process is heated, and a solvent such as water or organic solvent contained in a large or small amount is evaporated and dried to obtain a final product. Alternatively, an aggregate of phosphor particles close to the final product is obtained. Although various methods can be used for drying, for example, drying by a constant temperature dryer or a vacuum dryer. In addition, when using a constant temperature dryer, it is made to dry for about 30 minutes-100 hours at the temperature in the range of about 60-300 degreeC. Further, depending on the type of phosphor to be manufactured, the drying step may be omitted together with the cleaning step.

  Note that the combination method, order, number of times, etc. of the above-described crushing step, classification step, washing step, and drying step can be determined flexibly according to the type and purpose of the phosphor.

-Specific example of manufacturing method of silicate phosphor-
Hereinafter, a specific example of a method for producing a silicate phosphor will be described using experimental data with the effect of flux.

FIG. 11 is a diagram showing the emission intensity after the primary firing (main emission peak intensity) and the emission intensity after the secondary firing (main emission peak intensity) as a function of the primary firing temperature. The emission intensity after the primary firing shown in the figure is that phosphor raw material prepared to have a phosphor composition of (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ is prepared in a reducing atmosphere (nitrogen-hydrogen mixed gas) from room temperature to 1400 ° C. ) Is the data of the primary fired product obtained by firing (primary firing) for 2 hours. The light emission intensity after the secondary firing shown in the figure is as follows. Barium chloride (BaCl ₂ ) as a flux is added to the primary fired product as (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ silicate phosphor: BaCl _2. = 1 mol: Data of a secondary baked product obtained by weighing and adding to a ratio of 0.1 mol, sufficiently mixing, and firing (secondary firing) in a reducing atmosphere at 1400 ° C for 2 hours. The light emission intensity of the primary fired product shown in the figure is shown for reference. The silicate phosphor can thus be manufactured through the firing procedure of primary firing (however, it can be omitted), flux addition / mixing, and secondary firing.

From the X-ray diffraction pattern of the primary fired product, the primary fired product fired at a primary firing temperature of at least 800 ° C. has an orthorhombic crystal structure (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO _4. The presence of silicate phosphors has been confirmed. Further, the primary fired product obtained by firing at a primary firing temperature of 1000 ° C., 1200 ° C., and 1400 ° C. is a silicate phosphor having an orthorhombic crystal structure and an almost single crystal phase. I have also confirmed that.

Further, from the X-ray diffraction pattern of the secondary fired product, all the secondary fired products have an orthorhombic crystal structure (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ silicate regardless of the primary firing temperature. It is confirmed that it is a phosphor. That is, FIG. 11 shows that a silicate phosphor can be obtained by primary firing at 800 to 1400 ° C. without using a flux, and flux is applied to the primary fired product fired at a temperature of room temperature (no primary firing) to 1400 ° C. Is added and mixed and re-baked (secondary baking), it is shown that a silicate phosphor having a higher emission intensity (about 1.4 to 1.6 times the case where no flux is used) can be obtained.

-First Specific Example of Manufacturing Method of Semiconductor Light-Emitting Device-
Next, specific examples of the method for manufacturing a semiconductor light emitting device of the present invention will be described with reference to the drawings. As a first specific example, a manufacturing method and a manufacturing apparatus of a white light emitting semiconductor light emitting device by a transfer method will be described. 12A to 12D are cross-sectional views showing the manufacturing steps of the semiconductor light emitting device in the first specific example.

  First, a blue light emitting semiconductor chip 101 that is a blue LED shown in FIG. The blue light emitting semiconductor chip 101 is a blue LED having an emission spectrum peak in a range of 450 nm to 560 nm using, for example, GaN, and has an anode 101a and a cathode 101b on the main surface.

  Then, in the step shown in FIG. 12B, the blue light emitting semiconductor chip 101 is mounted and fixed on the Zener diode 102 by a flip chip connection method. At this time, the blue light emitting semiconductor element 101 and the Zener diode 102 are electrically connected to each other. Specifically, the anode 101a of the blue light emitting semiconductor chip 101 and the cathode 102b of the Zener diode are electrically connected to each other, and the cathode 101b of the blue light emitting semiconductor chip 101 and the anode 102a of the Zener diode 102 are electrically connected to each other. To do.

  Next, in the step shown in FIG. 12C, the Zener diode 102 to which the blue light emitting semiconductor chip 101 is fixed is mounted on the substrate 103 and fixed. At this time, the Zener diode 102 is fixed on the substrate 103 using an adhesive material such as silver paste on the substrate 103. The adhesive material at this time may be another adhesive material such as solder.

  Thereafter, the anode 102 a of the Zener diode 102 is connected to a predetermined electrode terminal 104 provided on the substrate 103. In the present embodiment, the anode 102 a is connected to the electrode terminal 104 using a gold wire 105 for this connection. As a result, the cathode 101 b of the blue light emitting semiconductor chip 101 is electrically connected to the electrode terminal 104 of the substrate 103. The cathode 102b of the Zener diode 102 may be connected to the electrode terminal 104 provided on the substrate 103, or the anode 102a and the cathode 102b of the Zener diode 102 may be connected to individual electrode terminals 104 provided on the substrate 103. May be.

  Next, in the step shown in FIG. 12D, a resin having phosphor particles is formed so that light emitted from the blue light emitting semiconductor chip 101 (blue LED) passes. Specifically, the substrate 103 is placed in a predetermined mold 107 and a sealing resin is poured into the mold 107. In general, a number of semiconductor light emitting devices that emit white light are formed at once using a sealing device having a number of molds 107. Here, as the sealing resin, a resin in which phosphor particles 108 are dispersed in an epoxy resin 106 is used. Thereafter, the semiconductor light emitting device that emits white light is separated from the mold 107. As the epoxy resin, NTT 8506 epoxy resin manufactured by Nitto Denko Corporation was used. Thereafter, the epoxy resin is cured.

  FIGS. 13A and 13B are a top view and a cross-sectional view, respectively, of the semiconductor light emitting device formed by the manufacturing process of the first specific example in order. However, in FIG. 13A, the epoxy resin 106 and the phosphor particles 108 are handled as transparent bodies. As shown in FIGS. 13A and 13B, a blue light emitting semiconductor chip (blue LED 101) mounted on a substrate 103 via a Zener diode 102, and phosphor particles (yellow phosphor) in an epoxy resin 106 are used. Thus, a semiconductor light emitting device having a phosphor layer 109 in which particles 108 are relatively uniformly dispersed is obtained.

  As described above, as a method for manufacturing a white light-emitting semiconductor device by the transfer method, the step of connecting the blue LED 101 which is a blue light-emitting element to the Zener diode 102 (substrate), and the phosphor particles 108 so that the light emitted from the blue LED 101 passes therethrough. And a step of providing the resin 106.

  More specifically, as shown in FIG. 49, a step of connecting a blue LED as a blue light emitting element to each zener diode on a wafer 109 having a plurality of zener diodes 102, and light emitted from the blue LED pass. The step of providing a resin having a phosphor on the substrate and the step of separating the Zener diodes are performed.

  With such a manufacturing method, a blue LED, a Zener diode (substrate) electrically connected to the blue LED, and a fluorescent material in which phosphor particles provided so that light emitted from the blue LED passes through the resin are dispersed. A white light emitting semiconductor light emitting device having a body layer can be manufactured.

  In addition, it is also possible to manufacture a white light emitting semiconductor light emitting device without a Zener diode and having a blue LED and a phosphor layer in which phosphor particles are dispersed in a resin so that light emitted from the blue LED can pass through. .

  Note that examples of the material constituting the blue LED in this specific example include a gallium nitride compound semiconductor, a zinc selenide semiconductor, and a zinc oxide semiconductor. As the phosphor material, the phosphor described in the first embodiment can be used, and it is particularly preferable to select a silicate phosphor.

-Second specific example of manufacturing method of semiconductor light emitting device-
As a second specific example, a method and apparatus for manufacturing a bullet-type white light emitting semiconductor light emitting device will be described. 14A to 14C are cross-sectional views showing the first half of the manufacturing process of the semiconductor light emitting device in the second specific example. FIGS. 15A and 15B are cross-sectional views showing the latter half of the manufacturing process of the semiconductor light emitting device in the second specific example.

  First, in the step shown in FIG. 14A, the blue LED 101 is mounted and fixed on the base 110 (lead frame). The stand 110 has a recess 111 for arranging the blue light emitting semiconductor element 101, a terminal 112 connected to the recess 111, and a terminal 113 not connected to the recess 111. Actually, the terminal 112 and the terminal 113 are connected on the opposite side of the recess 111 with the same metal as the terminal in order to prevent the terminals from separating, but this connection is cut in a later step. Further, the terminal 112 may not be connected to the recess 111. Here, as shown in FIG. 14A, the blue LED 101 is disposed on the bottom surface of the recess 111 and fixed to the terminal 112 using an adhesive material such as silver paste. The adhesive material at this time may be another adhesive material such as solder.

  Thereafter, in the step shown in FIG. 14B, the anode and the cathode of the blue LED 101 and the terminals 112c and 113 are electrically connected by the gold wires 114, respectively.

  Next, in the step shown in FIG. 14C, the mixture of the phosphor particles 116 and the resin 115 is poured into the concave portion 111 of the base 110 into the concave portion 111. Here, an epoxy resin is used as the resin 115, and the phosphor particles 116 are dispersed in the epoxy resin. Then, this epoxy resin is cured under the conditions of a heating temperature of 115 ° C. and a heating time of 12 hours, or a heating temperature of 120 ° C. and a heating time of 5 hours. Thereby, the phosphor layer 119 in which the phosphor particles 116 are dispersed in the resin 115 is formed. In the second specific example, an epoxy resin manufactured by Fine Polymers was used as the epoxy resin. As the resin 115 poured into the recess 111, a resin material that does not need to be cured by heat, for example, an epoxy resin that is cured by ultraviolet irradiation (YL6663 manufactured by Yuka Cell) or a resin material that is cured by a curing agent is used. Softening of the resin 115 during heating can be suppressed. Therefore, it is possible to prevent the phenomenon that the phosphor particles 116 are promoted to settle due to the softening of the resin 115 before the resin 115 is cured. Therefore, by using a resin material that does not require curing by heat, the dispersibility of the phosphor 116 in the resin 115 can be made more uniform.

  Thereafter, in the step shown in FIG. 15A, the table 110 is inverted and arranged in a predetermined mold 117, and a resin 118 for sealing is poured into the mold 117. Here, an epoxy resin was used as the resin 118 for sealing. As the resin 118 for sealing, it is desirable to use an epoxy resin that is cured by heat from the viewpoint of the reliability of the white light emitting device. However, it is also possible to use a resin that is not cured by heat.

  Thereafter, by curing the resin, a shell-shaped white light emitting semiconductor light emitting device as shown in FIG. 15B is obtained. That is, a bullet-type semiconductor light emitting device that has the phosphor layer 119 in which the phosphor particles 116 are dispersed in the resin 115 and emits white light having a good color tone as described in the first embodiment can be obtained.

  Here, the base 110 on which the blue LED 101 is installed may have a concave cross section. Accordingly, the base 110 includes an installation portion 112a (here, the bottom surface of the recess) for grounding the blue LED, a side portion 112b surrounding the installation portion 112a, and terminals 112c and 113, and the installation portion 112a and the side portion 112b. And a structure in which a phosphor layer can be provided in the space (recessed portion 111). The shape of the concave portion 111 may be any of a cylinder, a polygonal column, a cone having a bottom opened, a polygonal pyramid, a truncated cone having a top or bottom opened, and a polygonal frustum.

  Thus, the external light extraction efficiency of the entire semiconductor light emitting device can be improved by adopting a configuration in which the side portion 112b reflects the light emitted by the blue LED 101 installed on the installation portion 112a (bottom surface).

  Further, it is desirable that the resin 115 in which the phosphor particles 116 are dispersed is filled to a position lower than the height of the side portion of the recess 111, that is, the phosphor layer 119 does not reach the upper end of the recess 111. This is because the shape of the recess 111 is common to any of a cylinder, a polygonal column, a cone, a polygonal pyramid, a truncated cone, and a polygonal truncated cone. As a result, when a plurality of white light emitting semiconductor light emitting devices are provided and the light emitted from each of the semiconductor light emitting devices is used, blue light emitted from one semiconductor light emitting device and a semiconductor light emitting device adjacent thereto is emitted. However, the problem of exciting the phosphor particles in the resin of the other semiconductor light emitting device and causing crosstalk can be solved. In particular, the blue light emitted from the blue light emitting semiconductor element and the yellow light emitted from the phosphor excited by the blue light have a structure in which blue light is emitted to the outside. Although the problem of such crosstalk becomes serious, such crosstalk can be eliminated by the fact that the phosphor layer 119 is lower than the height of the side portion 112b of the recess 111.

  As described above, in the method for manufacturing the semiconductor light emitting device in the second specific example, the phosphor particles 116 are passed so that the step (or means) of grounding the blue LED 101 to the installation portion 112a and the light emitted from the blue LED pass through. And a process (or means) for forming a phosphor layer 119 made of a mixture of resin and resin 115.

More specifically, in the step (or means) of providing the resin, the recess 111 formed between the installation portion 112a and the side portion 112b

A manufacturing method (or manufacturing apparatus) including a step (or means) of providing. More specifically, a step (or means) for providing the blue light emitting diode in the installation portion, a step (or means) for providing a first resin having a phosphor so that light emitted from the blue light emitting diode passes, And a step (or means) of providing a second resin that does not have a phosphor so that light emitted from the blue light emitting diode passes therethrough. Here, it is desirable to select a resin that is not cured by heat as the first resin and a resin that is cured by heat as the second resin.

  Note that as a material constituting the blue LED, a gallium nitride compound semiconductor, a zinc selenide semiconductor, or a zinc oxide semiconductor can be used. As the phosphor material, the material described in the first embodiment can be used, and it is particularly desirable to select a silicate phosphor.

  In this specific example, an epoxy resin is used as the resin 125, but another resin such as a silicon resin may be used.

  Moreover, although the electrical connection between the anode and cathode of the blue LED and each terminal is performed by a gold wire, the wire may be any material that can be electrically connected. For example, an aluminum wire or the like may be used.

-Third specific example of manufacturing method of semiconductor light emitting device-
As a third specific example, a manufacturing method and a manufacturing apparatus of a side-view type white light emitting semiconductor light emitting device will be described. 16A to 16C are cross-sectional views showing the first half of the manufacturing process of the semiconductor light emitting device in the third specific example.

  First, in the step shown in FIG. 16A, the blue LED 101 is mounted on the housing 120 and fixed. The housing 120 includes a base portion 120 for arranging the blue LED 101, a side portion 121, and external connection terminals 122 that are taken out from the bottom surface of the recess 128 through the side portion 121 of the housing 120, 123. Here, as shown in FIG. 16A, the blue LED 101 is installed on the bottom surface of the recess 128 and is fixed using an adhesive material such as silver paste. The adhesive material at this time may be another adhesive material such as solder.

  Thereafter, in the step shown in FIG. 16B, the anode and the cathode of the blue LED 101 and the terminals 122 and 123 are electrically connected by the gold wires 124, respectively.

  Next, in the step shown in FIG. 16C, the mixture of the resin 125 and the phosphor particles 126 is poured into the recess 128 of the housing 120. In this specific example, an epoxy resin is used as the resin 125, and the phosphor particles 126 are dispersed in the epoxy resin. Then, this epoxy resin is cured under the conditions of a heating temperature of 115 ° C. and a heating time of 12 hours, or a heating temperature of 120 ° C. and a heating time of 5 hours. Thereby, the phosphor layer 119 in which the phosphor particles 116 are dispersed in the resin 115 is formed. In the second specific example, an epoxy resin manufactured by Fine Polymers was used as the epoxy resin. In addition, as the resin 125 poured into the recess 128, a resin material that does not need to be cured by heat, for example, an epoxy resin that is cured by ultraviolet irradiation (YL6663 manufactured by Yuka Cell) or a resin material that is cured by a curing agent is used. Softening of the resin 125 during heating can be suppressed. Therefore, it is possible to prevent the phenomenon that the sedimentation of the phosphor particles 126 is promoted due to the softening of the resin 125 before the resin 125 is cured. Therefore, by using a resin material that does not require curing by heat, the dispersibility of the phosphor 126 in the resin 125 can be made more uniform.

  Thereafter, by curing the resin, a side-view type white light emitting semiconductor light emitting device as shown in FIG. 16C is obtained. That is, a bullet-type semiconductor light emitting device that has the phosphor layer 129 in which the phosphor particles 126 are dispersed in the resin 125 and emits white light with good color tone as described in the first embodiment can be obtained.

  Here, the casing 120 in which the blue LED 101 is installed may have a concave cross section. Therefore, the housing 120 includes a base 120 for grounding the blue LED, a side 121 surrounding the recess 128 on the base 120, and external connection terminals 122 and 123, and includes the base 120 and the side 121. The phosphor layer can be provided in the space (recessed portion 128). The shape of the recess 128 may be any of a cylinder, a polygonal column, a cone having a bottom opened, a polygonal pyramid, a truncated cone having a top or bottom opened, and a polygonal frustum.

  Thus, the external light extraction efficiency of the entire semiconductor light emitting device can be improved by employing the configuration in which the side portion 121 functions as a reflecting plate that reflects the light emitted from the blue LED 101 installed on the base portion 120.

  Further, it is desirable that the resin 125 in which the phosphor particles 126 are dispersed is filled to a position lower than the height of the side portion 121 (side wall of the recess), that is, the phosphor layer 129 does not reach the upper end of the recess 111. This is because the shape of the recess 128 is common to any of a cylinder, a polygonal column, a cone, a polygonal pyramid, a truncated cone, a polygonal truncated cone, and the like. As a result, when a plurality of white light emitting semiconductor light emitting devices are provided and the light emitted from each of the semiconductor light emitting devices is used, blue light emitted from one semiconductor light emitting device and a semiconductor light emitting device adjacent thereto is emitted. However, the problem of exciting the phosphor particles in the resin of the other semiconductor light emitting device and causing crosstalk can be solved. In particular, the blue light emitted from the blue light emitting semiconductor element and the yellow light emitted from the phosphor excited by the blue light have a structure in which blue light is emitted to the outside. However, since the phosphor layer 129 is lower than the height of the side portion 121, such crosstalk can be eliminated.

  As described above, the method for manufacturing a semiconductor light emitting device in the second specific example includes the step of installing the blue LED 101 (blue light emitting element) on the base 120 and the phosphor particles 116 so that the light emitted from the blue LED passes through. And a step of forming a phosphor layer 119 made of a mixture of resin and resin 115.

  More specifically, the step of installing the blue light emitting element at the base, the step of providing the phosphor layer so that the light emitted from the blue light emitting element passes, and the fluorescence so that the light emitted from the blue light emitting diode can pass therethrough. And a step of providing a permeable resin not having a body. Here, it is desirable to select a resin that is not cured by heat as the resin constituting the phosphor layer, and a resin that is cured by heat as the resin not having the phosphor.

  Note that as a material constituting the blue LED, a gallium nitride compound semiconductor, a zinc selenide semiconductor, or a zinc oxide semiconductor can be used. As the phosphor material, the material described in the first embodiment can be used, and it is particularly desirable to select a silicate phosphor.

  In this specific example, an epoxy resin is used as the resin 125, but another resin such as a silicon resin may be used.

  Moreover, although the electrical connection between the anode and cathode of the blue LED and each terminal is performed by a gold wire, the wire may be any material that can be electrically connected. For example, an aluminum wire or the like may be used.

  Here, in the manufacturing process of the semiconductor light emitting device according to each of the above specific examples, it is desirable that the phosphor particles are dispersed as uniformly as possible in the resin. Therefore, a specific example for uniformly dispersing the phosphor particles in the resin in the manufacturing process of the semiconductor light emitting device will be described below.

-First specific example for uniformly dispersing phosphor particles-
In the first specific example, a method and apparatus for applying vibration during curing of a resin will be described. FIGS. 17A and 17B are plan views showing two methods of applying ultrasonic vibration in the manufacturing process of the semiconductor light emitting device. That is, as shown in FIG. 17A, while the mold 107 is installed in the ultrasonic vibration layer 130 (manufactured by KAIJODENKI) and the resin 106 is cured, the resin is applied to the entire mold 107 by vibration. The phosphor particles 108 can be uniformly dispersed in 106. Moreover, as shown in FIG. 17B, vibration may be directly applied to the mold 107 by vibration applying means 131 (such as an ultrasonic horn). For example, since the specific gravity difference between the resin 106 and the phosphor particles 108 is large, as shown in FIG. 21B, even if the phosphor particles 108 are settled at the bottom of the resin 106 in the phosphor layer 109, As shown in FIGS. 17A and 17B, when the mold 107 is vibrated, the phosphor particles 108 and the resin 106 vibrate, and as shown in FIG. Will be uniformly dispersed.

  18A and 18B are plan views respectively showing two methods of applying ultrasonic vibration in a first specific example (a method for manufacturing a shell-type semiconductor light-emitting device) of a method for manufacturing a semiconductor light-emitting device. FIG. 15B shows a state when ultrasonic vibration is applied in the step shown in FIG. That is, as shown in FIG. 18A, while the mold 117 is placed in the ultrasonic vibration layer 130 (manufactured by KAIJODENKI) and the resin 115 is cured, the resin is applied to the entire mold 117 by vibration. The phosphor particles 116 can be uniformly dispersed in 115. Further, as shown in FIG. 18B, vibration may be directly applied to the mold 117 by the vibration applying means 131 (such as an ultrasonic horn). For example, since the specific gravity difference between the resin 115 and the phosphor particles 116 is large, as shown in FIG. 21A, even if the phosphor particles 116 settle on the bottom of the resin 115 in the phosphor layer 119, As shown in FIGS. 18A and 18B, when the mold 117 is vibrated, the phosphor particles 116 and the resin 115 vibrate, and as shown in FIG. Will be uniformly dispersed.

  Similarly, in the step shown in FIG. 16C of the third specific example of the method for manufacturing a semiconductor light emitting device (method for manufacturing a side view type semiconductor light emitting device), the ultrasonic vibration device 130 or the ultrasonic wave adding means 131 is used. can do. Even in this case, for example, because the specific gravity difference between the resin 125 and the phosphor particles 126 is large, even if the phosphor particles 126 settle on the bottom of the resin 125 in the phosphor layer 129, the phosphor particles 126 and By vibrating the resin 125, the phosphor particles 126 are uniformly dispersed in the resin 125.

-Second specific example for uniformly dispersing phosphor particles-
In the second specific example, a method and apparatus for inverting the mold upside down during the curing of the resin will be described. FIGS. 19A and 19B are plan views showing a method of turning the mold upside down during the manufacturing process of the semiconductor light emitting device, and showing a state when the mold is turned upside down. That is, as shown in FIG. 19A, using a reversing means having a rotating shaft 141 and a drive motor (not shown) for rotating the rotating shaft 141, the rotating shaft 141 is attached to the mold 107, and the resin 106 is removed. While being cured, the entire mold 107 is repeatedly turned upside down between the normal position shown in FIG. 19A and the reverse position shown in FIG. Can be dispersed. For example, since the specific gravity difference between the resin 106 and the phosphor particles 108 is large, as shown in FIG. 21B, even if the phosphor particles 108 are settled at the bottom of the resin 106 in the phosphor layer 109, As shown in FIGS. 19 (a) and 19 (b), when the mold 107 is turned upside down, the phosphor particles 106 and the resin 106 are moved, and as shown in FIG. 108 is uniformly dispersed.

Here, the greater the number of times the mold 107 is inverted, the better the dispersibility of the phosphor particles 108 in the resin 106. In addition, since about 90% of the entire resin is cured in the first hour, it is desirable to turn the mold 107, that is, the resin 106 upside down within this hour.
20A and 20B show a state when the mold is turned upside down in the process shown in FIG. 15A during the manufacturing process according to the second specific example of the semiconductor light emitting device. That is, as shown in FIG. 20A, a reversing means having a rotating shaft 141 and a drive motor (not shown) for rotating the rotating shaft 141 is used, the rotating shaft 141 is attached to the mold 117, and the resin 115 is removed. While being cured, the entire mold 117 is repeatedly turned upside down between the normal position shown in FIG. 20A and the reverse position shown in FIG. Can be dispersed. For example, since the specific gravity difference between the resin 115 and the phosphor particles 116 is large, as shown in FIG. 21A, even if the phosphor particles 116 settle on the bottom of the resin 115 in the phosphor layer 119, As shown in FIGS. 18 (a) and 18 (b), when the mold 117 is turned upside down, the phosphor particles 116 and the resin 115 are moved, and as shown in FIG. 116 is uniformly dispersed.

Also in this case, the greater the number of times the mold 117 is inverted, the better the dispersibility of the phosphor particles 116 in the resin 115. Also, since about 90% of the resin is cured in the first hour, it is desirable to turn the mold 117, that is, the resin 115 upside down within this hour.
Similarly, the reversing means can be used in the step shown in FIG. 16C of the third specific example of the method for manufacturing a semiconductor light-emitting device (method for manufacturing a side-view type semiconductor light-emitting device). Even in this case, for example, because the specific gravity difference between the resin 125 and the phosphor particles 126 is large, even if the phosphor particles 126 settle on the bottom of the resin 125 in the phosphor layer 129, the phosphor particles 126 and By reversing the resin 125 upside down, the phosphor particles 126 are uniformly dispersed in the resin 125.

-Third specific example for uniformly dispersing phosphor particles-
In the third specific example, a method will be described in which the curing process after filling the resin into the recesses and the mold is performed in a plurality of times.

  In this specific example, for example, in the step shown in FIG. 12D of the first specific example (transfer method) of the method for manufacturing a semiconductor light emitting device, the resin 107 containing the phosphor particles 108 is formed into a mold 107 by 1/3 of the total amount. The resin 106 is cured by setting the heating time to 5 hours and the heating temperature to 120 ° C. By repeating this process three times, the phosphor layer 109 is formed on the mold 107.

  Thus, by filling and curing the resin in a plurality of times, the phosphor particles 108 do not settle at the bottom of the resin 106 in the phosphor layer 109 as shown in FIG. The phosphor particles 108 are relatively uniformly dispersed in 106.

  Similarly, the step shown in FIG. 14C of the second specific example of the method for manufacturing a semiconductor light emitting device (the method for manufacturing a shell-type semiconductor light emitting device), or the third specific example of the method for manufacturing the semiconductor light emitting device (side In the process shown in FIG. 16C of the manufacturing method of the view type semiconductor light emitting device, the phosphor particles are relatively uniformly dispersed in the resin by filling and curing the resin in the mold or the recesses a plurality of times. It becomes like this.

  Here, the dispersibility of the phosphor particles in the resin becomes better as the number of times of filling and curing the resin in the mold and the concave portion is increased. However, if the number of times is increased, the manufacturing time becomes longer, so the number of times is preferably 5 times or less, and most preferably about 3 times.

-Fourth specific example for uniformly dispersing phosphor particles-
In the fourth specific example, a method of using a high-viscosity resin when forming the phosphor layer will be described.

  In this specific example, for example, in the manufacturing process of the semiconductor light emitting device (for example, the process shown in FIG. 17C), the resin 106 containing the phosphor particles 108 is made to have a high viscosity so that the fluorescence during the curing of the resin 106 occurs. The body particles 108 can be prevented from settling. In this specific example, the viscosity of the resin 106 is set so that the phosphor particles 108 do not settle. The viscosity is preferably in the range of 1 Pa · S to 100 Pa · S.

  In this way, by using a high-viscosity resin, the phosphor particles 108 do not settle on the bottom of the resin 106 in the phosphor layer 109 as shown in FIG. 108 becomes relatively uniformly dispersed.

  Similarly, the step shown in FIG. 14C of the second specific example of the method for manufacturing a semiconductor light emitting device (the method for manufacturing a shell-type semiconductor light emitting device), or the third specific example of the method for manufacturing the semiconductor light emitting device (side In the process shown in FIG. 16C of the manufacturing method of the view type semiconductor light emitting device, phosphor particles are relatively uniformly dispersed in the resin by using a high-viscosity resin.

-Fifth specific example for uniformly dispersing phosphor particles-
In the fifth specific example, a method of using a resin that does not require heating for curing when forming the phosphor layer will be described.

  In this specific example, for example, in a manufacturing process of a semiconductor light emitting device (for example, the process shown in FIG. 12D), a resin curable by ultraviolet rays (YL6663 manufactured by Yuka Cell Co., Ltd.) Hereinafter, it is referred to as an ultraviolet curable resin). Hereinafter, the resin 106 is a resin that is cured by a resin curing agent, and hereinafter referred to as a two-component cured resin. ) May be used.

  As a result, in the resin that is cured by heat, there is a time when the viscosity of the resin is lowered before curing, so that the phosphor particles 108 are slightly settled, whereas the ultraviolet curing type that does not cure by heat. It has been found that when a resin or a two-component curable resin is used, the phosphor particles 108 are relatively uniformly dispersed in the resin 106.

  Similarly, the step shown in FIG. 14C of the second specific example of the method for manufacturing a semiconductor light emitting device (the method for manufacturing a shell-type semiconductor light emitting device), or the third specific example of the method for manufacturing the semiconductor light emitting device (side In the process shown in FIG. 16C of the manufacturing method of the view type semiconductor light emitting device), the phosphor particles are relatively uniform in the resin by using an ultraviolet curable resin or a two-component curable resin that is not cured by heat. To be distributed.

  And the following effects can be acquired by providing the process or means to disperse | distribute fluorescent substance particles in resin more uniformly like the said 1st-5th specific example. By uniformly dispersing the phosphor particles, particularly in the longitudinal direction in the resin, compared to the case where the phosphor particles are biased, the blue light emitted by the blue LED (the emission spectrum between 450 nm and 560 nm). The light having a peak) can be extracted outside without being excessively confined in the phosphor particles present in a biased manner, and appropriate white light can be obtained.

  Further, the fluorescence itself emitted from the phosphor particles can be taken out outside without being excessively contained in the phosphor particles present in a biased manner.

  Further, when the phosphor particles are unevenly present in the resin, the blue color is the same as that when the phosphor has settled on the substrate 103 as shown in FIGS. 21 (a) and 21 (c). When an LED is used, a white light emitting semiconductor element having the same color temperature can be formed even with a phosphor amount as small as about 10%, and the luminance and intensity can be increased at the same color temperature.

  In addition, although the process or means of the above-mentioned first to fifth specific examples can obtain an effect by itself, a further synergistic effect can be obtained by performing two or more.

-Specific examples of phosphor layer stirring-
FIG. 22 is a cross-sectional view showing a preferred specific example of a phosphor paste discharging apparatus used when a phosphor paste containing a silicate phosphor is poured into a cavity of a semiconductor light emitting device. In FIG. 22, 200 is a raw material tank, 201 is a head, CA is a cavity of a semiconductor light emitting device, 204 is a pump, 205 is a dispersion nozzle, 206 is a phosphor paste, 207 is a phosphor particle contained in the phosphor paste 206, 208 is a resin in the phosphor paste 206. The head 201 includes, for example, a tank chamber 202 that stores the phosphor paste 206 that has moved from the raw material tank 200, a nozzle 203 that ejects the phosphor paste 206 into the cavity CA, and a metal sphere S that is disposed in the tank chamber 202. It has. The phosphor paste stored in the raw material tank 200 is supplied to the tank chamber 202 by pressurization of the circulation pump 204 and is continuously ejected from the nozzle 203 into the cavity CA.

  In the phosphor paste 206 stored in the raw material tank 200 or the tank chamber 202, the phosphor particles 207 tend to aggregate with the passage of time, and aggregates of the phosphor particles 207 tend to be formed. When aggregates of the phosphor particles 207 are formed, the nozzle 203 is clogged, or the concentration of the phosphor particles 207 in the phosphor paste 206 to be ejected changes, and the phosphor in the cavity CA. It may be difficult to disperse the particles 207 uniformly. Therefore, in the phosphor paste discharging apparatus of this specific example, the phosphor paste 207 stored in the raw material tank 200 and the tank chamber 202 is agitated to suppress the formation of aggregates of the phosphor particles 207. Yes. In the example shown in FIG. 22, the metal sphere S is contained in the raw material tank 200 and the tank chamber 202, and the phosphor paste 207 can be stirred by moving the metal sphere S in the tank by magnetic force. . Thereby, aggregation of the fluorescent substance in the raw material tank 200 and the tank chamber 202 is suppressed.

  Note that the method of stirring the phosphor paste 207 in the raw material tank 200 and the tank chamber 202 is not limited to the method using the metal sphere S as shown in FIG. 22, and the concentration distribution of the phosphor paste 207 inside the tank chamber or the like. Any method can be employed as long as it is a method that suppresses the change in the number of lines as much as possible. For example, the tank chamber 202 may be vibrated, or the tank chamber 202 may be simply provided with a stirring member. Further, by installing a filter in the raw material tank 200 and supplying the phosphor paste 206 into the raw material tank 200 through the filter, the aggregates can be disassembled.

  Furthermore, the phosphor paste discharge device of this example is provided with a dispersion nozzle 205 for controlling the flow rate of the phosphor paste 206. When the phosphor paste 206 passes through the dispersion nozzle 205, the aggregates of the phosphor particles 207 in the phosphor paste 206 are subdivided by the jet flow, and the aggregation is unraveled. If the neck diameter of the dispersion nozzle 205 is set so as to match the nozzle diameter of the head 202, the aggregates in the phosphor paste 206 aggregated in the raw material tank 200 or in the supply path on the way are appropriately unwound. It is loosened and the ejection from the nozzle 203 is stabilized. By suppressing aggregation of the phosphor on the head 202 via the dispersion nozzle 205, it is possible not only to prevent clogging of the nozzle 203 but also to facilitate the uniform dispersion of the phosphor particles 207 in the cavity CA. Note that the dispersion nozzle 205 is not necessarily provided, and may be appropriately provided according to the viscosity of the silicate phosphor.

-Phosphor layer charging-
The cause of the deposition of the YAG phosphor has been caused by the large difference in specific gravity between the phosphor and the base material, but it is considered that the YAG phosphor is positively charged as another cause. . In other words, if the resin as the base material is the same positively charged, they generally repel each other, so that the YAG phosphor is deposited.

On the other hand, the fact that the formula _{Sr 1-a1-b1-x} Ba a1 Ca b1 Eu x) formed by mainly the compound represented by ₂ SiO ₄ silicate phosphor is not deposited on the same resin, deposited with the charging Therefore, since the silicate phosphor particles are negatively charged opposite to the resin and are attracted to each other, the silicate phosphor particles are dispersed throughout the resin. It is thought that. Such positively charged resins include epoxy resins and silicon resins.

  As described above, as a means for improving the dispersibility of the YAG phosphor particles, a method of coating the phosphor particles with an oxide or the like that is negatively charged can be considered.

  The method of coating the surface of the phosphor particles with oxide or fluoride is to first mix and stir the suspension of phosphor paste and the suspension of the required oxide or fluoride coating particles, and then suction filter And after baking at 125 degreeC or more, it bakes at 350 degreeC. A small amount of resin, organic silane, water glass or the like may be added to improve the adhesion between the phosphor, oxide and fluoride.

Further, as a method for coating the surface of the phosphor particles in a film shape, there is a method using hydrolysis of an organometallic compound. As a result, the surface of the phosphor particles can be coated with SiO ₂ , which is an oxide that is easily negatively charged. In the case of forming an Al ₂ O ₃ film is a phosphor using Al (OC ₂ H _{5) 3} is an alkoxide of aluminum, which was mixed and stirred in alcoholic solution, Al ₂ fluorescent surface Coat O ₃ .

  Thus, by attaching or coating a member made of a material whose charging polarity is opposite to the charging polarity of the resin on the surface of the phosphor particles, a member charged to a polarity opposite to the charging polarity of the resin is attached or coated. The present inventors have found that resin molecules surround the phosphor particles so that aggregation of the phosphor particles is suppressed and sedimentation of the phosphor particles is prevented. In both cases of YAG phosphor particles and silicate phosphor particles, if a member that charges at least the resin in which the phosphor particles are dispersed and the phosphor particles are respectively charged with opposite polarities, it is remarkable as in the past. The present inventors have found that no settling of phosphor particles occurs.

  Here, if the amount of the negatively charged oxide or fluoride coating on the surface of the phosphor particles is too small, the effect is small, and if it is too large, the generated light may be absorbed and the brightness may be lowered. There is. Therefore, the preferred range of the coating amount of the negatively charged oxide or fluoride on the surface of the phosphor particles is 0.05% to 2.0% with respect to the weight of the phosphor particles. It is obtained as knowledge from various experiments conducted by the researchers.

Thus, in a further aspect of the present invention has a configuration having a YAG-based phosphor obtained by coating or depositing a SiO ₂ in an epoxy resin. That is, a structure in which a negatively charged oxide, a YAG phosphor with a fluoride attached or coated in an epoxy resin and a method for producing such a structure are used. More specifically, a negatively charged oxide, a structure having a YAG phosphor with a fluoride adhered or coated in an epoxy resin which is a negatively charged resin, and a method of manufacturing such a structure Further, by adopting a configuration in which the light emission of the blue LED passes through the epoxy resin and a method for manufacturing such a configuration, the phosphor particles are uniform as shown in FIGS. 21 (c) and 21 (d). It is possible to provide a semiconductor light emitting device that emits white light dispersed in the light.

-Examples of silicate phosphors for semiconductor light emitting devices-
Hereinafter, examples according to the semiconductor light emitting device of the present invention will be described.

Example of procedure for producing silicate phosphor First, silicate phosphor particles having a composition emitting yellow light were produced. Each powder of barium carbonate (BaCO ₃ ), strontium carbonate (SrCO ₃ ), europium oxide (Eu ₂ O ₃ ), and silicon dioxide (SiO ₂ ) is used as a phosphor material, and calcium chloride (CaCl ₂ ) is used as a flux. It was. The purity of the phosphor material was 99.9% or more, and the phosphor material had a central particle diameter in the range of 10 nm to 5 μm. In addition, about each raw material, in order to eliminate the measurement error by adsorption gas, the weight change before and behind the heating in about 900 degreeC air | atmosphere was investigated beforehand, and this was grasped | ascertained.

  After weighing 9.9 g of powdered barium carbonate, 138.0 g of strontium carbonate, 2.6 g of europium oxide, 30.7 g of silicon dioxide, and 1.7 g of calcium chloride using an electronic balance, these powders were measured in an automatic mortar. Mix well to obtain a mixed phosphor raw material powder. Thereafter, the mixed phosphor raw material powder is charged into an alumina boat and disposed at a predetermined position in a tubular atmosphere furnace using alumina as a furnace core tube, followed by firing. The firing conditions are a heating temperature of 1400 ° C., an atmosphere of 5% hydrogen and 95% nitrogen, and a heating time of 2 hours.

  After confirming that the inside of the furnace tube was cooled to room temperature, the fired product (silicate phosphor) was taken out and subjected to post-treatment such as crushing, washing, classification and drying. As described above, a silicate phosphor having an orthorhombic crystal structure and emitting yellow light was obtained.

  Hereinafter, the result of evaluating the properties of the obtained silicate phosphor in advance will be described. Here, crystal structure of silicate phosphor particles by X-ray diffraction method, particle size distribution and central particle size of silicate phosphor particles by laser diffraction / scattering type particle size distribution analyzer, and ICP emission spectroscopy are used. Thus, the composition of the silicate phosphor, the excitation light spectrum and emission spectrum of the silicate phosphor, and the reflection spectrum of blue excitation light and the emission spectrum of the phosphor excited by blue light were evaluated.

FIG. 23 shows the result of X-ray diffraction analysis performed on the silicate phosphor, and is an X-ray diffraction pattern diagram showing the relationship between the diffraction angle and the X-ray diffraction intensity. The X-ray diffraction pattern shown in FIG. 23 is the same as the X-ray diffraction pattern (see FIG. 27B) of an orthorhombic Sr ₂ SiO ₄ compound described later. This indicates that the silicate phosphor according to the example is a (Sr, Ba, Eu) ₂ SiO ₄ phosphor having a single crystal phase and an orthorhombic crystal structure.

  FIG. 24 is a diagram showing a particle size distribution of a silicate phosphor by an X-ray diffraction method. As shown in the figure, the particle diameters of the silicate phosphor particles according to the examples are distributed within the range of about 3 μm to 30 μm, and the phosphor particle group having a center particle diameter of 11.5 μm. It is shown that this is a phosphor. As a result of observation by an electron microscope, one particle of the silicate phosphor was formed by agglomerating several primary particles having a rounded shape. The surface of the primary particles was relatively smooth although some roughness was observed.

Next, the composition of this silicate phosphor was evaluated using ICP emission spectroscopy. As a result, the composition of the silicate phosphor was (Ca _0.015 Sr _0.92 Ba _0.05 Eu _0.015 ) Si _0.99 O _x , which almost coincided with the composition ratio of the silicate phosphor at the time of preparation.

   Next, the excitation light spectrum and emission spectrum of the silicate phosphor were evaluated. This result has already been shown in FIG. For comparison, FIG. 8 shows an excitation light spectrum and an emission spectrum of YAG phosphor particles. As shown in FIG. 8, the silicate phosphor according to this example has an excitation light peak in the vicinity of 250 to 300 nm, absorbs light in a wide wavelength range of 100 to 500 nm, and has an emission peak at 569 nm. It shows that it is a yellow fluorescent substance. The chromaticity (x, y) in the CIE chromaticity coordinates of yellow light emitted from the silicate phosphor was (0.484, 0.506), respectively.

  FIG. 25 is a diagram showing the result of integrating and evaluating the light emission of the silicate phosphor using an integrating sphere. Here, the silicate phosphor obtained by the above treatment was irradiated with excitation blue light having a wavelength of 470 nm, and the reflection spectrum of the blue excitation light and the emission spectrum of the phosphor excited by the blue light were evaluated. The blue light of 470 nm was obtained by passing the light from the Xe lamp through a monochromator. For comparison, FIG. 25 also shows the reflection spectrum and emission spectrum intensity of the YAG phosphor. In FIG. 25, the emission peak at 470 nm is due to excitation light (blue light). FIG. 25 shows that this silicate phosphor has the property of reflecting blue light three times more easily than the YAG phosphor, and that this silicate phosphor is excited by blue light compared to the YAG phosphor. It is shown that the intensity of emitted light is weak and about half that of the YAG phosphor.

-Various characteristics of silicate phosphors-
Hereinafter, the characteristics of the silicate phosphor produced by the above procedure will be described in detail. FIG. 53 is a table showing typical compositions and characteristics of silicate phosphors for reference. The composition shown in FIG. 53 is basically a composition quantitatively evaluated by ICP emission spectrometry or a composition that can be estimated from the results of the quantitative analysis described above.

  First, the relationship between the composition of the silicate phosphor and the crystal structure will be described. In the following description, the Eu concentration (= Eu / (Sr + Ba + Ca + Eu) is defined as a typical 2 atomic% (that is, Eu concentration = 0.02) is 2 hours in a reducing atmosphere at 1400 ° C. It is about the silicate fluorescent substance obtained by baking.

  As described above, the silicate phosphor can have at least three crystal structures of orthorhombic, monoclinic and hexagonal depending on the composition. These various crystal structures will be described with reference to FIGS. 26 (a) to 30 (b).

FIGS. 26 (a) and (b) show, in order, X-ray analysis patterns of (Sr _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known monoclinic Sr ₂ SiO ₄ compound that do not contain Ca and Ba at all. FIG. FIGS. 27 (a) and 27 (b) show, in order, that Ca is not contained at all and Ba is substituted in an amount of 5 atomic% (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ phosphor and a known orthorhombic Sr. FIG. ₂ is an X-ray analysis pattern diagram of ₂ SiO ₄ compound. 28 (a) and 28 (b) show, in order, respective X-ray analysis patterns of (Ba _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known orthorhombic Ba ₂ SiO ₄ compound that do not contain Ca and Sr at all. FIG. FIGS. 29 (a) and 29 (b) are respectively (Ca _0.38 Ba _0.60 Eu _0.02 ) ₂ SiO ₄ phosphor and known hexagonal Ba _0.3 Ca _0.7 containing 38 and 60 atomic% of Ca and Ba, respectively. it is the respective X-ray diffraction patterns diagram of SiO ₄ compound. 30 (a) and 30 (b) show, in order, respective X-ray analysis patterns of (Ca _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known monoclinic Ca ₂ SiO ₄ compound that do not contain Sr and Ba at all. FIG.

  Here, each X-ray analysis pattern diagram is data measured under normal temperature and normal pressure conditions. FIG. 26 (b), FIG. 27 (b), FIG. 28 (b), FIG. 29 (b), and FIG. 30 (b) are each made known by a JCPDS (Joint Committee on Powder Diffraction Standards) card. The compound number is shown in each figure. By comparing each of the X-ray diffraction patterns of FIGS. 26 (a) to 30 (a) and FIGS. 26 (b) to 30 (b), the crystal structure of the phosphor prepared in this example is monoclinic. It can be seen that the crystal system, orthorhombic system, orthorhombic system, hexagonal system, and monoclinic system.

The relationship between the composition of the silicate phosphor and the main crystal structure is as shown in FIG. The (Sr, Ba) ₂ SiO ₄ : Eu ²⁺ phosphor and the (Ca, Sr) ₂ SiO ₄ : Eu ²⁺ phosphor can take monoclinic and orthorhombic crystal structures. The (Ca, Ba) ₂ SiO ₄ : Eu ²⁺ phosphor can have orthorhombic, hexagonal and monoclinic crystal structures. The crystal structure of the (Sr, Ba, Ca) ₂ SiO ₄ : Eu ²⁺ phosphor having an Sr substitution amount (= Sr / (Sr + Ba + Ca + Eu) of at least 50 atomic% or more is orthorhombic.

A material that should be particularly noted in terms of crystal structure is (S _r1-a1-x Ba _a1 Eu _x ) ₂ SiO ₄ phosphor. A pure (Sr _1-x Eu _x ) ₂ SiO ₄ phosphor containing no Ba has a monoclinic crystal structure at least within the Eu concentration range of 0 ≦ x ≦ 0.1. By adding Ba at an amount of Ba substitution (= Ba / (Sr + Ba + Ca + Eu)) of about 1 atomic% or more, the (S _r1-a1-x Ba _a1 Eu _x ) ₂ SiO ₄ phosphor has at least an Eu concentration of 0. Within the range of ≦ x ≦ 0.3, an orthorhombic crystal structure is obtained (see FIG. 53).

FIGS. 31A and _31B show (Sr _0.84 Ba _0.14 Eu _0.02 ) ₂ (Si _0.8 Ge _0.2 ) O ₄ phosphor in which a part of Si is substituted with Ge, and a known orthorhombic Sr ₂ SiO. _It is each X-ray analysis pattern figure of ₄ compounds. FIGS. 31A and 31B are shown for reference. Since the patterns in both the figures match, a part of Si is replaced by Ge (Sr _0.84 Ba _0.14 Eu _0.02 ) ₂ ( It can be seen that the crystal structure of the Si _0.8 Ge _0.2 ) O ₄ phosphor is orthorhombic. Although the experimental data is omitted, the crystal structure of the (Sr _0.84 Ba _0.14 Eu _0.02 ) ₂ (Si _0.8 Ge _0.2 ) O ₄ phosphor in which a part of Si is substituted with Ge is expressed by Ge substitution amount (= Ge / (Si + Ge)) is orthorhombic with a total substitution range of 0-100 atomic%.

  Next, the relationship between the composition of the silicate phosphor of this example and the light emission characteristics will be described. In the following description, the Eu concentration (= Eu / (Sr + Ba + Ca + Eu)) is set to a typical 2 atom%, and the silicate phosphor obtained by firing for 2 hours in a reducing atmosphere at 1400 ° C. Is the case.

FIG. 32 is an emission spectrum diagram of (Sr _0.98-a3 Ba _a3 Eu _0.02 ) ₂ SiO ₄ phosphors having different Ba substitution amounts (a3). Figure 33 shows the emission spectrum of different _{(Cab3Sr 0.93-b3 Ba 0.05 Eu} 0.02) 2 SiO 4 phosphor of Ca substitution amount comprises 5 atomic% of Ba in the substitution amount (b3). FIG. 34 is an emission spectrum diagram of (Ca _b3 Ba _0.98-b3 Eu _0.02 ) ₂ SiO ₄ phosphors having different Ca substitution amounts (b3). 32 to 34 are diagrams shown for reference.

FIG. 35 is an emission spectrum diagram of a (Ca _0.19 Sr _0.55 Ba _0.24 Eu _0.02 ) ₂ SiO ₄ phosphor having a Ca substitution amount (b3) of 19 atomic% and a Ba substitution amount (a3) of 24 atomic%. The data shown in the figure is a summary of the results measured under excitation by ultraviolet light having a wavelength of 254 nm for the convenience of experiments.

  In addition, when the emission spectra under excitation with blue light and under excitation with ultraviolet light having a wavelength of 254 nm were compared, although they were the evaluation results of some samples, they were almost similar.

Further, although the excitation light spectrum of each silicate phosphor is omitted, the (Sr _{1 -a 3 -b 3 -x} Ba a ₃ Ca _{b 3} Eu _x ) ₂ SiO ₄ silicate phosphor according to the present invention has a degree of difference. However, in the entire composition range, at least the main emission peak wavelength is 470 nm, and it is a phosphor that can be confirmed by visual inspection that it can emit blue-green to green to yellow to orange emission under excitation with blue light, Its main emission peak wavelength is in the range of 505 nm to 598 nm.

_{Incidentally, (Sr 1-a3-b3} -x Ba a3 Ca b3 Eu x) Of ₂ SiO ₄ silicate phosphor, especially in which the ratio of Sr is large, it observed relatively high luminous efficiency under excitation with blue light It is done.

FIG. 36 is a diagram showing the Ba substitution amount (a3) dependence of the main emission peak wavelength in the (Sr _0.98-a3 Ba _a3 Eu _0.02 ) ₂ SiO ₄ phosphor (silicate phosphor). The relationship between the Ba substitution amount (a3) and the main emission peak wavelength in the (Sr _0.98-a3 Ba _a3 Eu _0.02 ) ₂ SiO ₄ phosphor is also shown in FIG. As can be seen from these, when the Ba substitution amount of this silicate phosphor is 0 atomic% or more and less than 0.3 atomic%, the main emission peak wavelength is in the vicinity of 535 to 545 nm. While the emitted light is green, the main emission peak wavelength is in the yellow region of 550 nm to 600 nm at least in the range where the Ba substitution amount is 0.3 atomic% or more and 24 atomic% or less. The light emitted from the phosphor is yellow light. In consideration of experimental errors and the influence of impurities, such as characteristics under special conditions such as high temperature environments, silicate phosphors with a Ba substitution amount in the range of 0 atomic% to 30 atomic% are yellow. It can be inferred that the system light can be emitted.

FIG. 37 is a diagram showing the Ca substitution amount (b3) dependence of the main emission peak wavelength in the (Ca _b3 Sr _0.93-b3 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ phosphor (silicate phosphor). As shown in the figure, the main emission peak wavelength of the silicate phosphor is in the yellow region of 550 nm to 600 nm in the range where the Ca substitution amount is 0 atomic% or more and 57 atomic% or less. The emitted light of the silicate phosphor having an amount in the range of about 70 atomic% or less is yellow light. In consideration of experimental errors, etc., a silicate phosphor ((Ca _b3 Sr _0.93-b3 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ fluorescence in which the Ca substitution amount is in the range of 0 atomic% to 80 atomic%. It can be inferred that the body) can emit yellowish light.

FIG. 38 is a diagram showing the Ca substitution amount (b3) dependence of the main emission peak wavelength in the (Ca _b3 Ba _0.98-b3 Eu _0.02 ) ₂ SiO ₄ phosphor (silicate phosphor). As shown in the figure, over the entire composition range of (Ca _b3 Ba _0.98-b3 Eu _0.02 ) ₂ SiO ₄ phosphor, the main emission peak wavelength is in the green region of 500 nm or more and less than 550 nm, and (Ca _b3 Ba _0.98-b3 Eu _0.02 ) _{2 The} light emitted by the SiO ₄ phosphor is not yellow light but green light.

The main emission peak wavelength of _{(Ca 0.19 Sr 0.55 Ba 0.24 Eu} 0.02) 2 SiO 4 phosphor, as can be seen from the emission spectrum shown in FIG. 35, is in the following yellow range 600nm at 50nm or more, (Ca _0.19 Sr _0.55 Ba _0.24 Eu _0.02 ) _{2 The} emission of SiO ₄ is yellow light.

  As described above, yellow light is obtained from a silicate phosphor having a limited composition range. The composition range is such that the Ba substitution amount (a3) is in the range of 0 ≦ a3 ≦ 0.3, and the Ca substitution amount (b3 ) Is in the range of 0 ≦ b3 ≦ 0.8. Preferably, the Ba substitution amount (a3) is in the range of 0 <a3 ≦ 0.2, and the Ca substitution amount (b3) is in the range of 0 <b3 ≦ 0.7. As can be seen from FIG. 53, the crystal structure of the silicate phosphor within this composition range is all orthorhombic.

FIG. 39 is a diagram showing an emission spectrum of a (Sr _0.84 Ba _0.14 Eu _0.02 ) ₂ (Si _0.8 Ge _0.2 ) O ₄ phosphor in which a part of Si is substituted with Ge for reference. As shown in the figure, this phosphor is also a phosphor that can emit light under excitation by blue light, and its emission intensity greatly decreases as the Ge substitution amount (= Ge / (Si + Ge)) increases, but at least Ge In the substitution range where the substitution amount is 20 atom% to 100 atom%, it is yellow-green (main emission peak wavelength: about 550 nm).

Next, the relationship between the Eu ²⁺ emission center concentration (= Eu / (Sr + Ba + Ca + Eu): agreement with Eu concentration) of the silicate phosphor, the crystal structure and the emission characteristics will be described. In the following description, the composition is (Sr _1-x Eu _x ) ₂ SiO ₄ or (Sr _0.95-x Ba _0.05 Eu _x ) ₂ SiO ₄ and obtained by firing for 2 hours in a reducing atmosphere at 1400 ° C. In the case of the obtained silicate phosphor.

FIG. 40 is a diagram showing emission spectra of (Sr _1-x Eu _x ) ₂ SiO ₄ phosphors having various Eu concentrations (x) for reference. FIG. 41 is a diagram showing an emission spectrum of the (Sr _0.95-x Ba _0.05 Eu _x ) ₂ SiO ₄ phosphor for reference. The data shown in FIGS. 40 and 41 are obtained as a result of measurement under excitation with ultraviolet light having a wavelength of 254 nm. The crystal structure of these phosphors will be briefly described. According to the evaluation result of the X-ray diffraction pattern, at least Eu concentration (x) is in the range of 0 ≦ x ≦ 0.1 (Sr _1−x Eu _x ) ₂ SiO ₄ The crystal structure of the phosphor is monoclinic. In addition, at least Eu concentration (x) is in the range of 0 ≦ x ≦ 0.3 (Sr _0.95-x Ba _0.05 Eux) ₂ SiO ₄ phosphor, and at least x = 0.3 (Sr _1-x Eu _x The crystal structure with ₂ SiO ₄ phosphor is orthorhombic.

FIG. 42 is a diagram showing the Eu concentration dependence of the main emission peak wavelength of the (Sr _1-x Eu _x ) ₂ SiO ₄ phosphor and the (Sr _0.95-x Ba _0.05 Eux) ₂ SiO ₄ phosphor. As shown in the figure, there is a correlation between the crystal structure of the silicate phosphor already described and the emission color. That is, the main emission peak of a (Sr _1-x Eu _x ) ₂ SiO ₄ phosphor having a monoclinic crystal structure and at least Eu concentration (x) in the range of 0.001 ≦ x ≦ 0.1. While the wavelength is in the green region of 500 nm or more and less than 550 nm, it has an orthorhombic crystal structure and at least Eu concentration (x) is in the range of 0.001 ≦ x ≦ 0.3 (Sr _0.95- the main emission peak wavelength of the _x Ba _0.05 Eux) ₂ SiO ₄ phosphor, x = 0.3 and _{(Sr 1-x Eu x)} 2 SiO 4 phosphor, in the following the yellow region 600nm with 550nm or more.

  As can be seen from the above experimental data, yellow light emission observed under ultraviolet excitation at 254 nm or blue light is emitted only by an orthorhombic silicate phosphor having a limited composition as described above. It is.

  From the above experimental results, the appropriate range of each element of the silicate phosphor for exhibiting the effects of the invention is as follows.

Ba
Since the yellow wavelength is in the range of 550 nm to 600 nm, the condition for obtaining the yellow wavelength from this compound from FIG. 32 is that the Ba substitution amount is in the range of the composition ratio of 0.0 to 0.3. Understand. The experimental result of the compound with the Ba substitution amount of 0.3 in the composition ratio is not shown in FIG. 32, but the experimental result of the compound with the composition ratio b of 0.24 and the composition ratio b of 0.43. From the experimental results of the compound, it can be easily estimated that a yellow wavelength can be obtained even in a compound having a composition ratio b of 0.3.

  Further, FIG. 36 shows that the condition for obtaining a yellow wavelength from this compound is that the Ba substitution amount is 0 to 30 atomic%. The experimental results of the compound with the Ba substitution amount of 30 atomic% are not shown in FIG. 36, but the experimental results of the compound with the Ba substitution amount of 24 atomic% and the experiment of the compound with the Ba substitution amount of 43 atomic% are shown. From the results, it can be presumed that a yellow wavelength can be obtained even in a compound having a Ba substitution amount of 30 atomic%.

Ca
FIG. 33 shows that the optimum condition for obtaining a yellow wavelength from this compound is that the Ca substitution amount is 0.0 to 0.6 in terms of composition ratio. In addition, although the experimental result of the compound whose Ca composition ratio is 0.7 is not shown, the experimental result of the compound whose Ca substitution amount is 0.57 in composition ratio, and the compound whose substitution amount is 0.76 in composition ratio From these experimental results, it can be inferred that a yellow wavelength can be obtained even in a compound having a Ca substitution amount of 0.7 in the composition ratio. Moreover, although it is estimated from the experimental results that the emission peak wavelength of the compound having a Ca substitution amount of 0.8 in the composition ratio deviates from the yellow wavelength, considering that the experimental error is included, the Ca substitution amount is In addition to the compounds in the range of 0.0 to 0.6 in terms of composition ratio, the composition ratio 0.0 to 0.8 including the composition ratios 0.7 and 0.8 is a compound for obtaining a yellow wavelength. It can be considered as a condition of the composition ratio.

  In addition, FIG. 37 shows that the condition for obtaining a yellow wavelength from this compound is that the Ca substitution amount is 0 to 80 atomic%. In addition, although the experimental result of 70 atomic% of Ca substitution is not shown, the amount of Ca substitution is 70 atomic% from the experimental result of 57 atomic% of Ca substitution and the experimental result of 76 atomic% of Ca substitution. In this case, it can be estimated that a yellow wavelength can be obtained. Further, in the experimental results, the emission peak wavelength when the Ca substitution amount is 80 atomic% is out of the yellow wavelength, but is included in the optimum value in consideration of the experimental error.

Sr
34 and 38, it can be seen that a compound containing no Sr does not emit yellow light.

Crystal Structure From FIG. 42, it can be seen that when the crystal structure is monoclinic, yellow is not obtained regardless of the amount of Eu substitution, and when the crystal structure is orthorhombic, a yellow wavelength is obtained regardless of the amount of Eu substitution. I understand.

Eu
From FIG. 43, it is understood that when the crystal structure is orthorhombic, a yellow wavelength is obtained regardless of the Eu substitution amount, but the Eu substitution amount is preferably 10% or less in consideration of the height of the emission peak.

The relationship between Eu concentration and emission intensity (main emission peak intensity (height)) is as shown in FIG. In either case of the (Sr _1-x Eu _x ) ₂ SiO ₄ phosphor and the (Sr _0.95-x Ba _0.05 Eu _x ) ₂ SiO ₄ phosphor, the emission intensity increases as the Eu concentration increases, and Eu After the concentration reaches a maximum in the vicinity of 1 to 1.5 atomic%, the same tendency is exhibited in that the emission intensity gradually decreases. A preferable Eu concentration (composition ratio x) in terms of emission intensity, emission spectrum shape, chromaticity, etc., as shown in FIGS. 43, 41 and 53, is more preferably in the range of 0.005 <x ≦ 0.1. Is in the range of 0.01 <x ≦ 0.05, most preferably in the range of 0.01 <x ≦ 0.02.

Here, Sr ₂ SiO ₄ : Eu ²⁺ silicate phosphor and (BaSr) ₂ SiO ₄ : Eu described in JP-A-2001-143869 as green phosphors described in the section of the prior art. Reference is made to ²⁺ phosphors.

As explained using the experimental data, as long as the present inventors conducted experiments, Sr ₂ SiO ₄ : Eu ²⁺ phosphors are orthorhombic ( A phosphor that can have two crystal phases of orthorhombic and monoclinic (Monoclinic), and at least a practically used Eu ²⁺ emission center addition amount (= Eu atom) Number / (number of Sr atoms + number of Eu atoms): x) within the range of 0.01 <x <0.05, orthorhombic Sr ₂ iO ₄ : Eu ²⁺ (α′-Sr ₂ SiO ₄ : Eu ²⁺ ) is a yellow phosphor emitting yellow light having a main emission peak in the vicinity of a wavelength of 560 to 575 nm. Monoclinic Sr ₂ SiO ₄ : Eu ²⁺ (β-Sr ₂ SiO ₄ : Eu ²⁺ ) is a green firefly emitting green light having a main emission peak in the vicinity of a wavelength of 535 to 545 nm. It is a light body (see FIGS. 42 and 53).

The Eu composition ratio (= Eu / (Sr + Eu) atomic ratio) is practically 0.001 or more and 0.3 or less in terms of emission intensity (that is, 0.1 atomic% or more and 30 atomic% or less). Range), particularly within the range of 0.003 or more and 0.03 or less, it has been found by the inventors' experiments that the main emission peak wavelength hardly changes. Therefore, the Sr ₂ SiO ₄ : Eu ²⁺ green phosphor described in JP-A-2001-143869 can be regarded as a monoclinic Sr ₂ SiO ₄ : Eu ²⁺ phosphor.

It is already known that the crystal structure of the Sr ₂ SiO ₄ compound can be orthorhombic and monoclinic with Ba contained in a small amount (for example, G. PIEPER et al., Journal of The American Ceramic Society, Vol.55, No.12 (1972) pp.619-622). In addition, it is known that the crystal structure of the monoclinic Sr ₂ SiO ₄ compound reversibly changes to the orthorhombic system at a temperature of about 383 K (for example, M. Catti et al., Acta Cryst., B39 (1983) pp.674-679).

Further, a compound having a Ba impurity atom content (Ba / (Sr + Ba) atom ratio: hereinafter referred to as Ba content) of about 1% or more with respect to Sr atoms, that is, (Sr _0.99 Ba _0.01 ) ₂ SiO ₄ : Eu ^{2 A} compound having a Ba content higher than ⁺ becomes a phosphor having an orthorhombic crystal structure, and the main emission peak wavelength changes from around 575 nm to around 505 nm as the Ba content increases (FIG. 32, FIG. 36, FIG. 53). In consideration of measurement errors in the experiment, from FIG. 32, FIG. 36 and FIG. 53, a silicate phosphor mainly composed of a compound represented by at least the chemical formula (Sr _0.98-a3 Ba _a3 Eu _0.02 ) ₂ SiO ₄ (however, , A3 is a numerical value satisfying 0 ≦ a3 ≦ 0.98), a chemical formula (Sr _0.98-a3 Ba _a3 Eu _0.02 ) ₂ SiO ₄ silicate phosphor having a composition range of 0.01 ≦ a3 ≦ 0.3 A yellow phosphor having a main emission peak in a wavelength range of 550 nm to 600 nm, and a silicate phosphor having a composition range of 0.3 <a3 ≦ 0.98 are mainly in a range of 550 nm to less than 550 nm. It can be seen that this is a green phosphor having an emission peak.

When the Eu concentration is within the range of 0.001 to 0.3, particularly in the range of 0.003 to 0.03 as a practical composition ratio in terms of light emission intensity, the main emission peak wavelength is almost the same. It has been found by another experiment by the inventors that it does not change. Therefore, the (BaSr) ₂ SiO ₄ : Eu ²⁺ green phosphor described in the above-mentioned Japanese Patent Application Laid-Open No. 2001-143869 has a composition range of (Sr _1-a3-x Ba at least 0.3 <a3 ≦ 0.98). _a3 Eu _x ) ₂ SiO ₄ silicate phosphor (where x is a numerical value satisfying 0.001 ≦ x ≦ 0.3).

Finally, a silicate phosphor ((Ca _0.015 Sr _0.92 Ba _0.05 Eu _0.015 ) ₂ SiO ₄ phosphor) having an orthorhombic crystal structure, emitting yellow light, and having an optimized Eu concentration, and a YAG system A comparison result of light emission characteristics with the phosphor (Y _0.7 Gd _0.28 Ce _0.02 ) ₃ Al ₅ O ₁₂ will be described.

-Comparison of luminance characteristics between YAG phosphor and silicate phosphor-
First, differences in luminance characteristics between a semiconductor light emitting device using a YAG phosphor and a semiconductor light emitting element using a silicate phosphor will be described.

  FIG. 54 is a table showing experimental data obtained for the luminance characteristics of a semiconductor light emitting device using a YAG phosphor and a semiconductor light emitting device using a silicate phosphor. In FIG. 54, for each sample, the main phosphor material type, weight%, luminance, total luminous flux, total radiant flux, and chromaticity are shown.

  In FIG. 54, it is shown that the weight percentage of the YAG phosphor (samples D and E) can obtain a yellowish color in a smaller amount than the silicate phosphor (other samples). . Specifically, when obtaining light near chromaticity (0.35, 0.35), the phosphor weight% of the YAG phosphor is 7.4% (sample D) and 9.8% (sample E). On the other hand, for example, in samples A, B, and C using silicate phosphors, the phosphor weight is about 50%, but the luminous flux in this case is not lowered. From this, the conversion efficiency for converting blue light emitted from 410 nm to 530 nm and blue light into yellow light in the range of 550 nm to 600 nm is more effective for YAG phosphors than for silicate phosphors. Is low. That is, since the conversion efficiency of the YAG phosphor is high, only a small amount of phosphor can be used in the phosphor layer in order to obtain yellow light with an appropriate intensity. As a result, the phosphor particles are likely to be unevenly distributed in the base material. On the other hand, in the case of a silicate phosphor, the amount of the phosphor used in the semiconductor light emitting device is increased, and a phosphor layer having a substantial thickness can be formed in the semiconductor light emitting device. As a result, the thixotropy of the phosphor paste is improved (that is, the thixotropy index is in an appropriate range), and it is difficult to be unevenly distributed in the base material of the phosphor layer, and the phosphor particles are uniformly dispersed and scattered. It is considered that the state is maintained and the occurrence of uneven color can be suppressed.

  In addition, the samples F, G, H, I, J, and K were used to measure the influence on luminance, chromaticity, total luminous flux, and total radiant flux change by changing the weight percent of the silicate phosphor.

  FIG. 44 is a diagram showing the relationship between the phosphor concentration and the luminance. FIG. 45 is a diagram showing the relationship between the phosphor concentration and the total luminous flux. FIG. 46 is a diagram showing the relationship between the phosphor concentration and the total radiant flux. FIG. 47 is a diagram showing the relationship between phosphor concentration and chromaticity (x value). 44 to 47 are diagrams showing the results based on the data of FIG. 54, and each figure shows each measured value in each case where the phosphor is 30 wt%, 40 wt%, and 50 wt%. It is shown. First, the luminance, the total luminous flux, and the total radiant flux tend to decrease as the weight ratio of the phosphor increases. On the other hand, in the case of chromaticity, as the weight ratio of the phosphor is increased, the chromaticity (x value) increases and the yellowness tends to increase. From this, it can be said that the weight ratio of the phosphor is preferably larger than at least 30%. Furthermore, the weight ratio of the phosphor is more preferably in the range of 30% to 50%.

-Addition of thixotropic agent-
Next, ultrathin silicon dioxide (trade name “Aerosil” Degussa (Germany)) such as ultrafine powder silica is added to the silicate phosphor of the semiconductor light emitting device to increase the thixotropy index (here, the thixotropy index) The effect when it is inserted as a function) will be described.

  FIG. 55 is a table showing various characteristics of a sample in which ultrafine powder silicon dioxide such as ultrafine powder silica is inserted as a thixotropic agent in a silicate phosphor of a semiconductor light emitting device.

  The data shown in FIG. 55 includes a sample 1 containing only 30% by weight of a silicate phosphor, a sample 2 having a silicate phosphor of about 30% by weight and an aerosil concentration of 0.57%, and a silicate phosphor. This was obtained as a result of an experiment using a total of three types of samples, including about 3 wt% and sample 3 having an aerosil concentration of 1.11%. FIG. 55 shows the results of luminance, total luminous flux, and total radiant flux for each sample when the chromaticity (x, y) is near (0.3, 0.3). Comparison between sample 2 and sample 3 shows that not only the luminance is increased, but also the luminous flux and radiant flux are increased as the concentration of Aerosil increases.

  In addition, the standard deviation is shown for each attribute for each sample of luminance, chromaticity (x value), total luminous flux, and total radiant flux. All the standard deviations corresponding to sample 3 are the smallest among the three samples and are the most reliable. Certainly, the magnitude of chromaticity is slightly different for reference, but the brightness, light speed, and radiant flux of sample 1 are large, but the standard deviation is large among the samples and is not reliable. Is done.

  From the above, it is presumed that the more Aerosil is added, not only the luminance, the speed of light, and the radiant flux are increased, but also the reliability is improved. This is because the thixotropy of the silicate phosphor paste is increased by Aerosil, and the viscosity of the phosphor paste is set appropriately. Specifically, when inserting a silicate phosphor paste into a semiconductor light emitting device, it is potted smoothly while maintaining an appropriate viscosity, so that the silicate phosphor particles are dispersed relatively uniformly in the phosphor paste. Will come to do. After entering the cavity of the light emitting device, the viscosity changes higher than that during potting, so that the silicate phosphor particles do not settle and are maintained in a relatively uniformly dispersed state in the base material. As a result, it is understood that the color unevenness like the YAG phosphor is suppressed, and the luminance, the speed of light, and the reliability are improved.

(Third embodiment)
In the present embodiment, a method for forming a thin phosphor layer will be described. This embodiment has the formula _{(Sr 1-a1-b1-} x Ba a1 Ca b1 Eu x) 2 SiO 4 (a1, b1, x , respectively, 0 ≦ a1 ≦ 0.3,0 ≦ b1 ≦ 0.8 (More ideally, 0 ≦ b1 ≦ 0.6) and a numerical value in the range of 0 <x <1), which emits light having an emission peak in a wavelength region of 550 nm to 600 nm. As shown in FIG. 1, FIG. 2 and FIG. 3, the phosphor layer is thinned and the light transmission is reduced by reducing the thickness of the light-transmitting diode, thereby reducing the attenuation of light. Is. For example, there is a method for forming a semiconductor light emitting device in which the substantial thickness of the portion of the phosphor layer located on the light extraction surface of the blue light emitting element is in the range of 50 μm to 1000 μm.

  Hereinafter, each example of the manufacturing method will be described.

-First example of manufacturing method-
50A to 50C are cross-sectional views illustrating the manufacturing steps in the first example of the manufacturing method of the present embodiment.

  First, in the step shown in FIG. 50A, a substrate 303 and a light emitting diode 302 (for example, a blue LED) mounted on the substrate 303 are installed in the cavity of the mold 301. Then, a first phosphor paste 307 mainly composed of a base material 310 made of a light-transmitting resin and phosphor particles 311 containing a yellow phosphor is injected from the container 305 into the mold 301. At this time, the phosphor paste 307 is injected to a position higher than the upper surface of the light emitting diode 302. The main light extraction surface of the light emitting diode 302 is a surface facing upward as shown in FIG.

  Next, in the step shown in FIG. 50B, a second phosphor paste 308 having a concentration of phosphor particles 311 lower than that of the first phosphor paste 307 is injected from the container 306 into the mold 301.

  Next, when the resin is cured in the step shown in FIG. 50C, the phosphor particles 311 are formed in a region of the base material 310 in the vicinity of the light emitting diode 302, particularly in a region located above the main light extraction surface. Are densely dispersed, while the phosphor particles 311 are roughly dispersed in the base material 320 away from the light emitting diode 302. Thereafter, the semiconductor light emitting device is removed from the mold 301.

  As described above, a white semiconductor light-emitting device with less color unevenness in which phosphor particles 311 are densely present in a region of the base material 310 at least above the light extraction surface of the light-emitting diode 302 is formed. Can do. Further, by incorporating such a semiconductor light emitting device into the light emitting device shown in FIGS. 4 to 6, a white light emitting device in which color unevenness is suppressed can be manufactured.

-Second example of manufacturing method-
51A to 51C are cross-sectional views illustrating manufacturing steps in the second example of the manufacturing method of the present embodiment.

  First, in the step shown in FIG. 51A, a substrate 403 and a light emitting diode 402 (for example, a blue LED) mounted on the substrate 403 are installed in the cavity of the mold 401. Then, the phosphor particles 411 containing the yellow phosphor are sprinkled on the vicinity of the light emitting diode 402 in the mold 401, particularly on the main light extraction surface. The main light extraction surface of the light emitting diode 402 is a surface facing upward as shown in FIG.

  Next, in the step shown in FIG. 51 (b), a phosphor paste 408 mainly composed of a base material 410 made of a light-transmitting resin and a small amount of phosphor particles 411 containing a yellow phosphor, Injection into the mold 401 from the container 405.

  Next, when the resin is cured in the step shown in FIG. 51 (c), phosphor particles 411 are formed in a region in the base material 410 in the vicinity of the light emitting diode 402, particularly in a region located above the main light extraction surface. Are densely dispersed, while the phosphor particles 411 are roughly dispersed in a portion away from the light emitting diode 3402. Thereafter, the semiconductor light emitting device is taken out from the mold 401.

  As described above, it is possible to form a semiconductor light emitting device with less color unevenness in which phosphor particles 411 are densely present in a region of the base material 410 located at least above the light extraction surface of the light emitting diode 402. it can. In addition, by incorporating such a semiconductor light emitting device into the light emitting device shown in FIGS. 4 to 6, a light emitting device with less color unevenness can be manufactured.

-Third example of manufacturing method-
FIGS. 52A to 52D are cross-sectional views illustrating manufacturing steps in the third example of the manufacturing method of the present embodiment.

  First, in the step shown in FIG. 52A, a substrate 503 and a light emitting diode 502 (for example, a blue LED) mounted on the substrate 503 are installed in the cavity of the mold 501. Then, a suspension 507 containing the volatile solvent 510 and the phosphor particles 511 containing a yellow phosphor as main components is injected from the container 505 into the mold 501. At this time, the suspension 507 is injected to a position higher than the upper surface of the light emitting diode 502. The main light extraction surface of the light emitting diode 502 is a surface facing upward as shown in FIG.

  Next, in the step shown in FIG. 52B, the volatile solvent 510 in the suspension 507 is evaporated by heating or decompression.

  Next, in the step shown in FIG. 52 (c), a phosphor paste 508 whose main components are a base material 512 made of a resin having translucency and a small amount of phosphor particles 511 containing a yellow phosphor, Inject into the mold 501 from the container 506.

  Next, when the resin is cured in the step shown in FIG. 52 (c), phosphor particles 511 are formed in a region in the base material 512 in the vicinity of the light emitting diode 502, particularly in a region located above the main light extraction surface. Are densely dispersed, while the phosphor particles 511 are roughly dispersed in a portion away from the light emitting diode 502. Thereafter, the semiconductor light emitting device is removed from the mold 501.

  As described above, a white semiconductor light-emitting device with less color unevenness in which phosphor particles 411 are densely present in a region of the base material 410 located at least above the light extraction surface of the light-emitting diode 402 is formed. Can do. Further, by incorporating such a semiconductor light emitting device into the light emitting device shown in FIGS. 4 to 6, a white light emitting device with little color unevenness can be manufactured.

-Fourth example of manufacturing method-
The reason why the YAG phosphor is deposited is that it is caused by the difference in specific gravity between the phosphor and the base material. The other reason may be that the YAG phosphor is positively charged. In other words, if the resin as the base material is the same positively charged, they generally repel each other, so that the YAG phosphor is deposited.

On the other hand, deposition facts and the charging of formula _{Sr 1-a1-b1-x} Ba a1 Ca b1 Eu x) formed by mainly the compound represented by ₂ SiO ₄ silicate phosphor particles are not deposited on the same resin In view of this relationship, the charging property of the resin is positive while the charging property of the phosphor particles is negative and the two are attracting each other. It is thought that it contributes to disperse | distributing so that it may distribute substantially uniformly. Such positively charged resins include epoxy resins and silicon resins.

  From the above, as a means for depositing the silicate phosphor, a method of coating the phosphor particles with a positively charged oxide or the like can be considered.

  As a method for coating the surface of the phosphor with oxide or fluoride, for example, there are the following methods. First, a suspension containing phosphor particles and necessary oxide or fluoride coating particles is mixed and stirred, and then suction filtered. Then, the residue remaining without being filtered is dried at 125 ° C. or higher and then baked at 350 ° C. At this time, a small amount of resin, organic silane, water glass or the like may be added in order to improve the adhesive force between the phosphor particles and the oxide or fluoride.

There is also a method using hydrolysis of an organometallic compound for coating into a film. For example, when forming an Al ₂ O ₃ film, the phosphor is made of Al (OC ₂ H ₅ ) ₃ which is an alkoxide of aluminum, and this is mixed and stirred in an alcohol solution, so that Al ₂ is formed on the phosphor surface. Coat O ₃ .

  If the amount of the positively charged oxide or fluoride coating on the surface of the phosphor particles is too small, the effect is small, and if it is too large, the generated light is absorbed, and the luminance is lowered. As a result of the experiment, the preferable range obtained is 0.05% to 2.0% with respect to the weight of the phosphor.

  As described above, it is possible to form a white semiconductor light-emitting device with less color unevenness in which phosphor particles are densely present in a region of the base material located at least above the light extraction surface of the light-emitting diode. Further, by incorporating such a semiconductor light emitting device into the light emitting device shown in FIGS. 4 to 6, a white light emitting device with little color unevenness can be manufactured.

  With the manufacturing method according to the third embodiment, it is possible to obtain a semiconductor light emitting device in which the substantial thickness of the portion of the phosphor layer located on the light extraction surface of the blue light emitting element is in the range of 50 μm to 1000 μm.

(Other embodiments)
In each of the above embodiments, a case where a single blue LED, which is a blue light emitting element, is described in the semiconductor light emitting device, but the semiconductor light emitting device of the present invention is not limited to such an embodiment.

  FIG. 56 is a cross-sectional view showing a structure of a semiconductor light emitting device including a plurality of blue LEDs. As shown in the figure, this semiconductor light emitting device includes a plurality of blue LEDs 601 arranged on a substrate 604, and a phosphor transmitter 03 that covers each main light extraction surface (upper surface in the state shown in FIG. 56) of each blue LED 601. And. The phosphor layer 603 includes yellow phosphor phosphor particles 602 having the composition described in the above embodiments, and a resin 613 serving as a base material in which the phosphor particles 602 are dispersed. As the material of the resin 613, the material described in the above embodiments can be used, and a Zener diode may be mounted on the substrate 604.

  With this structure, the emission intensity of a semiconductor light emitting device that emits white light can be improved, or the emission intensity can be adjusted by the number of blue LEDs 601 to be mounted.

  Moreover, in embodiment regarding the said light-emitting device, although the example which has arrange | positioned many semiconductor light-emitting devices provided with one blue LED and one fluorescent substance layer was demonstrated, the light-emitting device of this invention is limited to this embodiment. It is not something.

  FIG. 57 is a cross-sectional view showing the structure of a light emitting device including a large number of blue LEDs and a single phosphor layer. As shown in the drawing, the light emitting device includes a large number of blue LEDs 651 (blue light emitting elements) supported by a support member 654 and a single phosphor layer 653 disposed on the entire surface of each blue LED 651. Yes. The phosphor layer 653 includes two glass substrates, a resin 663 that is a base material filled between the two glass substrates, and phosphor particles 652 that are dispersed in the resin 663. The phosphor layer 653 is supported by the support member 654 at the peripheral edge thereof. The phosphor particles 652 are made of a yellow phosphor having the composition described in the above embodiments. As the material of the resin 613, those described in the above embodiments can be used.

  According to the structure shown in FIG. 57, only one phosphor layer 653 is required for a large number of blue LEDs 651, so that the manufacturing cost can be reduced and the manufacturing process can be simplified.

  The semiconductor light emitting device of the present invention includes various display devices (for example, LED information display terminals, LED traffic signal lights, automobile LED stop lamps, LED direction indicator lights, etc.) and various illumination devices (LED indoor / outdoor illumination lights, interior LED lights, LED Emergency light, LED surface light source, etc.) are widely defined as light emitting devices. It is particularly suitable for those using white light.

It is a longitudinal cross-sectional view of the semiconductor light-emitting device of the 1st example in the 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the semiconductor light-emitting device of the 2nd example in the 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the 3rd example semiconductor light-emitting device in the 1st Embodiment of this invention. It is a perspective view which shows roughly the structure of the stand type illuminating device which is a light-emitting device of the 1st example in the 2nd Embodiment of this invention. It is a perspective view which shows roughly the structure of the image display apparatus which is a light-emitting device of the 2nd example in the 2nd Embodiment of this invention. It is a perspective view which shows roughly the structure of the pattern display apparatus which is a light-emitting device of the 3rd example in the 2nd Embodiment of this invention. It is sectional drawing which shows an example of the chip type semiconductor light-emitting device formed by the conventional injection method. It is a figure which shows the excitation light spectrum and emission spectrum of a silicate fluorescent substance and a YAG type | system | group fluorescent substance. It is an electron micrograph figure which shows the cross-section of the coating part of the semiconductor light-emitting device of the state shown in FIG. It is an electron microscope photograph figure which shows the enlarged view of a housing | casing vicinity. It is a figure which shows the light emission intensity (primary light emission peak intensity) after the primary baking of silicate fluorescent substance, and the light emission intensity (main light emission peak intensity) after secondary baking as a function of primary baking temperature. (A)-(d) is sectional drawing which shows the manufacturing process of the semiconductor light-emitting device in a 1st specific example. (A), (b) is the top view and sectional drawing of the semiconductor light-emitting device formed by the manufacturing process of the 1st specific example, respectively. (A)-(c) is sectional drawing which shows the first half part among the manufacturing processes of the semiconductor light-emitting device in a 2nd specific example. (A), (b) is sectional drawing which shows the latter half part in the manufacturing process of the semiconductor light-emitting device in a 2nd specific example. (A)-(c) is sectional drawing which shows the first half part among the manufacturing processes of the semiconductor light-emitting device in a 3rd example. (A), (b) is a top view which respectively shows two methods to apply the ultrasonic vibration in the 1st specific example of the manufacturing method of a semiconductor light-emitting device. (A), (b) is a top view which respectively shows two methods to apply the ultrasonic vibration in the 1st specific example of the manufacturing method of a semiconductor light-emitting device. (A), (b) is a top view which shows the method to invert the type | mold in the 1st specific example (transfer construction method) of the manufacturing method of a semiconductor light-emitting device. (A), (b) has shown the state at the time of flipping up and down in the process shown to Fig.15 (a) in the manufacturing process which concerns on the 2nd specific example of a semiconductor light-emitting device. (A)-(d) is sectional drawing for comparing the white light-emitting device in which the conventional fluorescent substance settled, and the white light-emitting device in which fluorescent substance was disperse | distributed uniformly to resin. It is sectional drawing which shows the preferable specific example of a fluorescent substance paste discharge apparatus. It is an X-ray diffraction pattern figure which shows the result of the X-ray diffraction analysis performed with respect to the silicate fluorescent substance, and shows the relationship between a diffraction angle and X-ray diffraction intensity. It is a figure which shows the particle size distribution of the silicate fluorescent substance by a particle size distribution measuring device. It is a figure which shows the result of integrating and evaluating about light emission of a silicate fluorescent substance using an integrating sphere. (A) and (b) are X-ray analysis pattern diagrams of (Sr _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known monoclinic Sr ₂ SiO ₄ compound, respectively, which do not contain Ca and Ba, respectively. is there. (A) and (b) are, in order, not containing Ca at all and containing 5 atomic% of Ba as a substitution amount (Sr _0.93 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ phosphor and a known orthorhombic Sr ₂ SiO. _It is each X-ray analysis pattern figure of ₄ compounds. (A) and (b) are X-ray analysis pattern diagrams of (Ba _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known orthorhombic Ba ₂ SiO ₄ compound, respectively, which do not contain Ca and Sr at all. is there. (A) and (b) respectively contain Ca and Ba in an amount of 38 atomic% and 60 atomic%, respectively (Ca _0.38 Ba _0.60 Eu _0.02 ) ₂ SiO ₄ phosphor and a known hexagonal Ba _0.3 Ca _0.7 SiO _4. It is each X-ray-analysis pattern figure of a compound. (A) and (b) are X-ray analysis pattern diagrams of (Ca _0.98 Eu _0.02 ) ₂ SiO ₄ phosphor and a known monoclinic Ca ₂ SiO ₄ compound, respectively, which do not contain Sr and Ba at all. is there. (A), (b) is a (Sr _0.84 Ba _0.14 Eu _0.02 ) ₂ (Si _0.8 Ge _0.2 ) O ₄ phosphor in which a part of Si is substituted with Ge, and a known orthorhombic Sr ₂ SiO ₄ compound. It is each X-ray-analysis pattern figure of these. An emission spectrum of different _{(Sr 0.98-a3 Ba a3 Eu} 0.02) 2 SiO 4 phosphor of Ba substitution amount (a3). It is a light emission spectrum diagram of (Ca _b3 Sr _0.93-b3 Ba _0.05 Eu _0.02 ) ₂ SiO ₄ phosphor containing 5 atomic% Ba as a substitution amount and different in Ca substitution amount (b3). An emission spectrum of different _{(Ca b3 Ba 0.98-b3 Eu} 0.02) 2 SiO 4 phosphor of Ca substitution amount (b3). FIG. 5 is an emission spectrum diagram of a (Ca _0.19 Sr _0.55 Ba _0.24 Eu _0.02 ) ₂ SiO ₄ phosphor having a Ca substitution amount (b3) of 19 atomic% and a Ba substitution amount (a3) of 24 atomic%. _{(Sr 0.98-a3 Ba a3 Eu} 0.02) 2 SiO 4 phosphor Ba substitution amount of the main emission peak wavelength in the (silicate phosphor) (a3) is a diagram showing the dependence. _{(Ca b3 Sr 0.93-b3 Ba} 0.05 Eu 0.02) 2 SiO 4 phosphor Ca substitution amount of the main emission peak wavelength in the (silicate phosphor) (b3) is a diagram showing the dependence. _{(Ca b3 Ba 0.98-b3 Eu} 0.02) 2 SiO 4 phosphor Ca substitution amount of the main emission peak wavelength in the (silicate phosphor) (b3) is a diagram showing the dependence. Some of the Si is a diagram showing for reference the emission spectra of substituted with _{Ge (Sr 0.84 Ba 0.14 Eu 0.02} ) 2 (Si 0.8 Ge 0.2) O 4 phosphor. Eu concentration (x) is a diagram showing for reference the emission spectrum of a variety of different _{(Sr 1-x Eu x)} 2 SiO 4 phosphor. The emission spectra of _{(Sr 0.95-x Ba 0.05 Eu} x) 2 SiO 4 phosphor is a diagram showing for reference. And _{(Sr 1-x Eu x)} 2 SiO 4 phosphor, a diagram illustrating a main emission peak wavelength and the Eu concentration dependence of the _{(Sr 0.95-x Ba 0.05 Eux} ) 2 SiO 4 phosphor. It is a figure which shows the example of the relationship between the light emission characteristic of fluorescent substance, and the light emission center density | concentration. It is a figure which shows the relationship between fluorescent substance weight% and a brightness | luminance. It is a figure which shows the relationship between a fluorescent substance density | concentration and a total luminous flux. It is a figure which shows the relationship between a fluorescent substance density | concentration and a total radiant flux. It is a figure which shows the relationship between fluorescent substance density | concentration and chromaticity (x value). It is a figure which shows the relationship between the true specific gravity of a YAG type | system | group fluorescent substance and a silicate fluorescent substance, and the main light emission peak wavelength. It is a top view which shows the state of the wafer which has multiple zener diodes at the time of connecting blue LED to each zener diode. (A)-(c) is sectional drawing which shows the manufacturing process in the 1st example of the manufacturing method of 3rd Embodiment. (A)-(c) is sectional drawing which shows the manufacturing process in the 2nd example of the manufacturing method of 3rd Embodiment. (A)-(d) is sectional drawing which shows the manufacturing process in the 3rd example of the manufacturing method of 3rd Embodiment. It is a figure which shows the typical composition and characteristic of a silicate fluorescent substance as a table | surface for reference. It is a figure which shows as a table | surface the experimental data performed about the luminance characteristic of the semiconductor light-emitting device using YAG fluorescent substance, and the semiconductor light-emitting device using silicate fluorescent substance. FIG. 3 is a table showing various characteristics of a sample in which ultrafine powder silicon dioxide such as ultrafine powder silica is inserted as a thixotropic agent into a silicate phosphor of a semiconductor light emitting device. It is sectional drawing which shows the structure of the semiconductor light-emitting device provided with several blue LED. It is sectional drawing which shows the structure of the light-emitting device provided with many blue LED and a single fluorescent substance layer.

Claims (15)

A blue light emitting element emitting light having a main light emission peak in a wavelength region of more than 430 nm and 500 nm or less, and absorbing blue light emitted by the blue light emitting element and emitting fluorescence having a main light emission peak in a wavelength region of 550 nm to 600 nm. A method for manufacturing a semiconductor light emitting device comprising a phosphor layer containing a yellow phosphor,
The above-mentioned yellow phosphor having a true specific gravity in the range of 3.0 to 4.65 and a main emission peak wavelength of light emission at room temperature in the range of 560 to 600 nm, and the true specific gravity of 0. A step (a) of covering at least the light extraction surface of the blue light emitting element with a phosphor paste containing a resin in a range of 8 or more and not more than the true specific gravity of the yellow phosphor;
A step (b) of forming the phosphor layer by curing the phosphor paste,
In the step (a), as the yellow phosphor,
Mg, Ca, Sr, Ba, Sc, Y, lanthanoid, Ti, Zr, Hf, V, Nb, Ta, Mo, W, Zn, B, Al, Ga, In, Si, Ge, Sn, P A semiconductor light emitting device using a phosphor based on a compound composed of at least one element selected and at least one element selected from O, S, Se, F, Cl, and Br Manufacturing method. In the manufacturing method of the semiconductor light-emitting device of Claim 1,
In the step (a), a yellow phosphor having a center particle diameter in the range of 0.5 μm or more and 30 μm or less is used as the yellow phosphor. In the manufacturing method of the semiconductor light-emitting device of Claim 1 or 2,
In the step (a), as the yellow phosphor, the following chemical formula (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A method for producing a semiconductor light-emitting device, comprising using a silicate phosphor composed mainly of at least one compound represented by the formula: In the manufacturing method of any one semiconductor light-emitting device in Claims 1-3,
In the step (a), the phosphor paste further includes ultrafine particles having an average primary particle diameter in the range of 1 nm to 100 nm in the phosphor paste. Covering the light extraction surface of the blue light-emitting element with a phosphor paste comprising a resin and phosphor particles;
And (b) curing the phosphor paste while applying vibration. Covering the light extraction surface of the blue light-emitting element with a phosphor paste comprising a resin and phosphor particles;
And (b) a step of curing the phosphor paste while inverting it. Covering the light extraction surface of the blue light-emitting element with a phosphor paste comprising a resin and phosphor particles;
A method of manufacturing a semiconductor light emitting device, wherein the step (b) of curing the phosphor paste is repeated a plurality of times. A step (a) of covering the light extraction surface of the blue light emitting element with a phosphor paste composed of a resin and phosphor particles and having a viscosity of 1 Pa · S or more and 100 Pa · S or less;
A method of manufacturing a semiconductor light emitting device, wherein the step (b) of curing the phosphor paste is repeated a plurality of times. Covering the light extraction surface of the blue light-emitting element with a phosphor paste comprising a resin and phosphor particles;
A method for producing a semiconductor light emitting device, comprising: a step (b) of curing the phosphor paste by ultraviolet irradiation. Covering the light extraction surface of the blue light-emitting element with a phosphor paste comprising a resin and phosphor particles;
And a step (b) of curing the phosphor paste with stirring. At least a light extraction surface of a blue light-emitting element that emits light having a main emission peak in a wavelength region of more than 430 nm and less than 500 nm has a base material made of a light-transmitting resin and phosphor particles containing a yellow phosphor. A step (a) of covering with a first phosphor paste;
After the step (a), the first phosphor paste is a second fluorescent material having at least a light-transmitting resin and having a lower concentration of the yellow phosphor than the first phosphor paste. A step (b) of covering with a body paste;
Curing the first and second phosphor pastes (c),
In the step (a), the yellow phosphor is a yellow phosphor that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm. (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A method for producing a semiconductor light-emitting device, comprising using a silicate phosphor composed mainly of at least one compound represented by the formula: A step (a) of attaching phosphor particles containing a yellow phosphor to at least a light extraction surface of a blue light emitting element emitting light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm;
After the step (a), a step (c) of covering at least the light extraction surface of the blue light emitting element with a translucent resin;
Curing the resin (d),
In the step (b), the yellow phosphor is a yellow phosphor that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm. (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A method for producing a semiconductor light-emitting device, comprising using a silicate phosphor composed mainly of at least one compound represented by the formula: In the manufacturing method of the semiconductor light-emitting device of Claim 12,
In the step (a), the yellow phosphor particles are dropped on the blue light emitting element. In the manufacturing method of the semiconductor light-emitting device of Claim 12,
In the step (a), the blue light-emitting element is immersed in a suspension containing phosphor particles containing a yellow phosphor and a volatile solvent, and then the solvent is volatilized. Manufacturing method. At least the light extraction surface of a blue light emitting device emitting light having a main emission peak in a wavelength region of more than 430 nm and not more than 500 nm is a phosphor particle including a yellow phosphor and a positively charged substance attached to the surface. A step (a) of covering with a phosphor paste having a translucent resin;
After the step (a), the step of curing the phosphor paste (c),
In the step (a), the yellow phosphor is a yellow phosphor that absorbs light emitted from the blue light emitting element and emits light having a main emission peak in a wavelength region of 550 nm to 600 nm. (Sr _1-a1-b1-x Ba _a1 Ca _b1 Eu _x ) ₂ SiO ₄
(0 ≦ a1 ≦ 0.3, 0 ≦ b1 ≦ 0.8, 0 <x <1)
A method for producing a semiconductor light-emitting device, comprising using a silicate phosphor composed mainly of at least one compound represented by the formula: