JP2005259792A - Alarm system, substrate processing equipment and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide such a technology as an operator inputs and stores new information, found inherently and empirically about abnormalities occurring in a substrate processing equipment, directly in the equipment without causing any confusion with standard information. <P>SOLUTION: In the substrate processing equipment, standard information concerning abnormality of th equipment is held in fixed information files A201, A202, ... from the time of shipment and its content is not rewritable. On the other hand, an operator can input new information found inherently and empirically depending on the use conditions of the substrate processing equipment 1 directly from an input means 7f. The new information thus inputted is held in rewritable information files B201, B202, ... independent from the fixed information files A201, A202, .... Consequently, confusion between the standard information concerning abnormality of the equipment and the information founded anew can be prevented. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an alarm technique in a substrate processing apparatus that performs predetermined processing on a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disk, etc. (hereinafter simply referred to as “substrate”).

  2. Description of the Related Art Conventionally, some substrate processing apparatuses have previously stored text information in the apparatus describing details of the abnormalities and countermeasures for various abnormalities that may occur in the apparatus. . An operator who handles such a substrate processing apparatus can perform restoration work of the apparatus while reading out such information when an abnormality occurs.

  Such a conventional substrate processing apparatus is described in Patent Document 1 and Patent Document 2, for example.

JP 2003-22200 A Japanese Patent Laid-Open No. 11-15520

  By the way, as the information regarding the abnormality of the apparatus, there is information inherently and empirically found by an operator who handles the apparatus in addition to the standard information stored in the apparatus in advance as described above. For example, it is information such as a coping method according to the actual usage status of the apparatus and past coping results. However, in the conventional apparatus, such new information cannot be directly input to the apparatus by the operator and stored in the apparatus in the same manner as standard information.

  On the other hand, in the case where such new information is stored in the apparatus, considering that the possibility of entering incorrect information cannot be denied, standard information stored in the apparatus in advance is considered. It is necessary to make a clear distinction so that there is no confusion between the two types of information.

  The present invention has been made in view of such circumstances, and regarding an abnormality that may occur in the substrate processing apparatus, the operator directly inputs new information found empirically and stored in the apparatus, And it aims at providing the technique which prevents confusion with standard information.

  In order to solve the above problems, an invention according to claim 1 is an alarm system for a substrate processing apparatus, wherein (a) an input constituting a user interface of the substrate processing apparatus regarding an abnormality that may occur in the substrate processing apparatus Storage means for storing fixed information that cannot be rewritten from the means and variable information that can be rewritten from the input means, and (b) notification means for detecting and notifying the abnormality when an abnormality occurs in the substrate processing apparatus. (C) display means for displaying the fixed information and the variable information, and (d) displaying the fixed information and the variable information on the display means based on a notification from the notification means, and the input Control means for rewriting the variable information based on information inputted from the means.

  The invention according to claim 2 is the alarm system according to claim 1, wherein the display means displays the fixed information and the variable information separately.

  The invention according to claim 3 is the alarm system according to claim 1 or claim 2, wherein the display means displays the fixed information and the variable information simultaneously.

  The invention according to claim 4 is the alarm system according to any one of claims 1 to 3, wherein the storage means stores the fixed information and the variable information as separate files. Features.

  The invention according to claim 5 is the alarm system according to any one of claims 1 to 4, wherein the storage means includes a plurality of the fixed information and the variable information, respectively. The notification means notifies the control means of an error code for identifying the abnormality that has occurred, and the control means rewrites the fixed information and the variable information to be displayed on the display means based on the error code. It is characterized by specifying information.

  A sixth aspect of the present invention is a substrate processing apparatus including the alarm system according to any one of the first to fifth aspects.

  The invention according to claim 7 is a program that, when executed by a computer, causes the computer to function as the control means according to any one of claims 1 to 6.

  According to the first to seventh aspects of the invention, the standard information relating to the abnormality of the substrate processing apparatus can be stored in the storage means as fixed information. On the other hand, new information found empirically and uniquely can be input from the input means by the operator and stored in the storage means as variable information. For this reason, confusion does not arise between the standard information regarding abnormality of the substrate processing apparatus and the new information.

  In particular, according to the invention described in claim 2, the operator can distinguish and recognize whether the displayed information is standard information or information unique to the apparatus. Therefore, the recovery work efficiency when an abnormality occurs is improved.

  In particular, according to the third aspect of the present invention, the operator can visually recognize standard information relating to abnormality of the substrate processing apparatus and new information at a time. Therefore, the efficiency of the recovery work when an abnormality occurs is improved.

  In particular, according to the invention described in claim 4, it is possible to clearly distinguish and manage standard information relating to abnormality of the substrate processing apparatus and new information.

  In particular, according to the fifth aspect of the present invention, standard information and new information can be stored for each abnormality that occurs. In addition, when an abnormality occurs, information according to the abnormality that has occurred can be used.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1. About schematic configuration of substrate processing apparatus>
FIG. 1 is a diagram showing a schematic configuration of a substrate processing apparatus 1 according to the present invention. The substrate processing apparatus 1 is a so-called coater / developer apparatus that performs processing such as resist coating and development on a substrate. The substrate processing apparatus 1 is connected to a separate exposure apparatus 2 or the like, and can continuously perform a plurality of processes such as cleaning, resist coating, exposure, and development on the substrate.

  The substrate processing apparatus 1 is formed by connecting a plurality of processing units. Each processing unit functions as a processing unit that performs predetermined processing on the substrate. Specifically, the substrate processing apparatus 1 includes a cleaning unit 20, a dehydration bake unit 30, a resist coating unit 40, a prebake unit 50, a development unit 60, a post bake unit 70, and an air cooling unit 80.

  The substrate processing apparatus 1 also includes an indexer unit 10 that carries in and out the substrate. A plurality of cassettes 11 containing substrates can be set in the indexer unit 10. The substrate processing apparatus 1 employs a unicassette system, and a substrate taken out from a certain cassette 11 is transferred to each processing unit for processing and then stored in the same cassette 11. The conveyance between the cassette 11 and the cleaning unit 20 or the air cooling unit 80 is performed by the indexer robot 12. The indexer robot 12 includes an arm that can turn while holding a substrate, and is movable along a row of cassettes 11.

  Hereinafter, the outline of the processing units 20, 30, 40, 50, 60, 70, and 80 included in the substrate processing apparatus 1 will be described in order.

  The cleaning unit 20 is a continuous single wafer processing unit, and includes a carry-in unit 21, a cleaning unit 22, a droplet removing unit 23, and a carry-out unit 24. The conveyance of the substrate from the carry-in unit 21 to the carry-out unit 24 is performed by a conveyor (not shown). As the conveyor, a roller conveyor having a low dust generation property is adopted. In the cleaning unit 22, the substrate is cleaned with a brush, ultrasonic waves, high-pressure spray, or the like. Pure water or chemicals are used as the cleaning liquid.

  The dehydration bake unit 30 includes two processing chamber groups 31 and 32. The processing chamber groups 31 and 32 are each configured by stacking a plurality of stationary processing chambers in multiple stages. Examples of the plurality of processing chambers included in the processing chamber groups 31 and 32 include a cooling chamber, an adhesion reinforcement chamber, a heating chamber, and a buffer chamber. In addition, the processing chamber group 31 includes a carry-in chamber and a carry-out chamber. In the carry-in chamber, a conveyor for transporting the substrate from the cleaning unit 20 is connected to the resist coating unit 40 in the carry-out chamber. Conveyors for transporting the substrates are connected to each other. In addition, a turning robot 33 is disposed between the processing chamber group 31 and the processing chamber group 32. The turning robot 33 turns and moves up and down while holding the substrate, and carries the substrate between the plurality of processing chambers. In the dehydration bake unit 30, the substrate transported from the cleaning unit 20 is moved to each processing chamber by the turning robot 33 to perform heat treatment.

  The resist coating unit 40 is a single wafer processing unit, and includes a carry-in unit 41, a spin coater unit 42, a drying unit 43, an edge rinse unit 44, and a carry-out unit 45. The substrate is transferred between the processing units 41 to 45 by the slider 46. The slider 46 slides while placing the substrate thereon, and sequentially transports the substrate between the adjacent processing units. In this resist coating unit 40, the substrate transported from the dehydration bake unit 30 is received by the carry-in unit 41, the resist coating process is performed on the substrate while being transported to each processing unit, and the substrate is transported from the carry-out unit 45 to the prebake unit 50.

  The pre-bake unit 50 includes two processing chamber groups 51 and 52. Each of the processing chamber groups 51 and 52 is configured by stacking a plurality of stationary processing chambers in multiple stages. Examples of the plurality of processing chambers included in the processing chamber groups 51 and 52 include a cooling chamber and a heating chamber. In addition, the processing chamber group 51 includes a loading chamber, and a conveyor for conveying the substrate from the resist coating unit 40 is connected to the loading chamber. Further, a turning robot 53 is disposed between the processing chamber group 51 and the processing chamber group 52. The turning robot 53 turns and moves up and down while holding the substrate, and carries the substrate between the plurality of processing chambers. In the pre-bake unit 50, the substrate transferred from the resist coating unit 40 is moved to each processing chamber by the turning robot 53, and heat treatment is performed.

  The developing unit 60 is a continuous single-wafer processing unit, and includes a carry-in unit 61, a developing unit 62, a water washing unit 63, a drying unit 64, and a carry-out unit 65. The conveyance of the substrate from the carry-in unit 61 to the carry-out unit 65 is performed by a conveyor (not shown). In this developing unit 60, the substrate after exposure processing is received in the carry-in unit 61, the substrate is developed while being conveyed to the developing unit 62, the water washing unit 63, and the drying unit 64, and conveyed from the carry-out unit 65 to the post bake unit 70. To do.

  The post bake unit 70 includes two processing chamber groups 71 and 72. Each of the processing chamber groups 71 and 72 is configured by stacking a plurality of stationary processing chambers in multiple stages. Examples of the processing chambers included in the processing chamber groups 71 and 72 include a cooling chamber, a heating chamber, and a buffer chamber. In addition, the processing chamber group 72 includes a carry-in chamber and a carry-out chamber. In the carry-in chamber, a conveyor for transporting the substrate from the developing unit 60 is provided, and in the carry-out chamber, the substrate is transferred to the air cooling unit 80. Conveyors for conveying are connected to each other. Further, a turning robot 73 is disposed between the processing chamber group 71 and the processing chamber group 72. The turning robot 73 turns and moves up and down while holding the substrate, and carries the substrate between the plurality of processing chambers. In the post-bake unit 70, the substrate transported from the developing unit 60 is moved to each processing chamber by the turning robot 73 to perform heat treatment.

  The air-cooling unit 80 is a processing unit for air-cooling the substrate, and includes a conveyor that conveys the substrate. In the air cooling unit 80, the substrate conveyed from the post bake unit 70 is air cooled while being conveyed by a conveyor, and is conveyed to the indexer unit 10.

  The substrate processing apparatus 1 further includes an interface unit 90. The interface unit 90 is a part for transferring the substrates in order between the substrate processing apparatus 1 and the exposure apparatus 2. The interface unit 90 includes a transport robot that transports the substrate and a buffer (cassette or the like) that adjusts the tact time.

  With the above configuration, the substrate processing apparatus 1 has the indexer unit 10 → the cleaning unit 20 → the dehydration bake unit 30 → the resist coating unit 40 → the prebake unit 50 → the interface unit 90 → the exposure apparatus 2 → the interface unit 90 → the development unit 60 → the post. The substrate is transported in the order of the bake unit 70 → the air cooling unit 80 → the indexer unit 10, and a series of photolithography processes are performed on the substrate.

<2. About the alarm system>
Next, an alarm system of the substrate processing apparatus 1 will be described. FIG. 2 is a block diagram conceptually showing a part constituting the alarm system in the electrical configuration of the substrate processing apparatus 1.

  The plurality of processing units 20, 30, 40, 50, 60, 70, 80 of the substrate processing apparatus 1 are provided with a plurality of sensors 5. The plurality of sensors 5 are respectively arranged at predetermined positions in the processing unit and detect predetermined objects, respectively. Specifically, the sensor 5 detects the operating position of the driving location, the supply amount of the chemical solution, the atmospheric pressure in the processing unit, and the like. Each sensor 5 always performs a detection operation on these objects, and transmits a detection signal to a sequencer 6 described later. A detection signal when the detection target state is normal (hereinafter referred to as a normal signal) is different from a detection signal when the detection target is abnormal (hereinafter referred to as an abnormal signal).

  A plurality of processing units 20, 30, 40, 50, 60, 70, 80 are provided with sequencers 6, respectively. The sequencer 6 is electrically connected to a plurality of sensors 5 provided in the same processing unit, and can receive detection signals from these sensors 5. The sequencer 6 is designed so as to make a binary determination as to whether the detection signal is a “normal signal” or an “abnormal signal” when receiving a detection signal from each sensor 5. When it is determined that the signal is an “abnormal signal”, the circuit is designed to output a new electric signal determined based on the signal. Since this new electric signal indicates an identification number (code) for the abnormal signal, it is hereinafter referred to as an error code. The error code output from the sequencer 6 is sent to the computer 7 described later.

  That is, the sensor 5 and the sequencer 6 function as notification means for detecting and identifying the abnormality and notifying the computer 7 when an abnormality occurs in each part of the processing unit.

  The substrate processing apparatus 1 includes one computer 7 common to the processing units. The computer 7 includes a CPU 7a, a ROM 7b, a RAM 7c, a hard disk 7d, and the like. Of these, the CPU 7a functions as the control means of the present invention, and the hard disk 7d functions as the storage means of the present invention. The hard disk 7d stores an alarm program 901, an alarm definition file 902, fixed information files A201, A202,... And variable information files B201, B202,.

  The computer 7 and each sequencer 6 are communicably connected via a network such as a LAN. For example, as shown in FIG. 2, a plurality of sequencers 6 and a computer 7 are connected to a common bus cable 8 so that data can be transmitted and received via the bus cable 8. The computer 7 also includes display means 7e for displaying information on a screen such as a CRT display, and input means 7f for operating and inputting information with a keyboard, mouse or the like.

  Here, the alarm program 901, alarm definition file 902, fixed information files A201, A202,..., Variable information files B201, B202,.

  The alarm program 901 operates the CPU 7a to receive signals input from the sequencer 6 and the input means 7f, update the related file based on those signals, and display predetermined information on the display means 7e. It is a program to let you.

  As shown in FIG. 3, the alarm definition file 902 defines alarm contents for each combination of processing unit and error code. That is, in the alarm definition file 902, one alarm is defined for each combination of processing unit and error code. The error code is a number that is uniquely determined based on the electrical signal received from the sequencer 6, and the processing unit indicates the processing unit to which the source sequencer 6 belongs. The contents of the alarm defined in the alarm definition file 902 are an abnormality occurrence location (occurrence location in the processing unit), an alarm name, a risk level, and the like. Also, in the alarm definition file 902, corresponding fixed information files A201, A202,... And variable information files B201, B202,. It should be noted that some signals separate from the error code may be transmitted from each processing unit to the computer 7. Of the contents of the alarm, for example, the degree of danger may be defined based on a signal separate from the error code.

  The plurality of fixed information files A201, A202,... Are files corresponding to the designation of the alarm definition file 902, respectively. As shown in FIG. 4, the fixed information files A201, A202,... Are files that include standard information (such as a standard coping method) regarding abnormality as text data. The fixed information files A201, A202,... Are read-only files, and their contents cannot be rewritten by an operation input from the input means 7f.

  The plurality of variable information files B201, B202,... Are files corresponding to the designation of the alarm definition file 902, respectively. As shown in FIG. 5, the variable information files B201, B202,... Are files for additionally having information newly found regarding an abnormality. The variable information files B201, B202,... Are readable and writable files, and the contents can be rewritten by an operation input from the input means 7f.

  The alarm system of the substrate processing apparatus 1 is configured by electrically connecting the sensor 5, the sequencer 6, the computer 7 and the like as described above. Such an alarm system may be a system that functions as a part of the substrate processing apparatus 1, but may be a separate system that is used by being connected to the substrate processing apparatus 1.

<3. About alarm action>
The substrate processing apparatus 1 performs an alarm operation using the above configuration. Hereinafter, the alarm operation of the substrate processing apparatus 1 will be described with reference to the flowchart of FIG. In FIG. 6, the operation in the processing unit is shown on the left side of the broken line, and the operation in the computer 7 is shown on the right side. The operation in the computer 7 is realized by the CPU 7a operating in accordance with the alarm program 901.

  The computer 7 displays the first window 210 as shown in FIG. 7 on the display means 7e in advance (step S0). The first window 210 is a window for displaying the main part of the alarm for the abnormality that has occurred. The main part of the alarm is information such as the occurrence date and time, the processing unit, the occurrence location, the error code, the alarm name, and the risk level. The first window 210 displays these pieces of information in a table format, and displays the main part related to one alarm in one line (record). Therefore, when no abnormality has occurred, only one frame is displayed in the window 210, and only the frame is displayed. The first window 210 may be always displayed on the screen of the display means 7e, but may be hidden in another window when no abnormality has occurred.

  When the substrate processing apparatus 1 starts a substrate processing operation, the plurality of sensors 5 perform a detection operation for each target (step S1) and transmit a detection signal to the sequencer 6 (step S2). Thereafter, the sensor 5 repeats this detection operation (step S1) and detection signal transmission (step S2).

  The sequencer 6 receives the detection signal transmitted from the sensor (step S3). The sequencer 6 determines whether the received detection signal is a normal signal or an abnormal signal (step S4), and if it is an abnormal signal, transmits an error code corresponding to the abnormal signal to the computer 7 (step S5).

  The computer 7 receives the error code transmitted from the sequencer 6 (step S6). Next, the computer 7 compares the received error code with the processing unit to which the sequencer 6 of the transmission source belongs to the alarm definition file 902, and specifies an alarm to be generated (step S7).

  Then, the computer 7 displays the main part of the identified alarm on the first window 210 (step S8). The contents of the main part are as described above, but the date and time when the error code was received are displayed in the occurrence date and time column, and the processing unit to which the transmission source sequencer 6 belongs is displayed in the processing unit column. . Further, since each information of the occurrence location, the alarm name, and the risk level is uniquely defined in the alarm definition file 902, the information is displayed. It should be noted that some signals separate from the error code may be transmitted from each processing unit to the computer 7. Of the contents of the main part, for example, in the risk column, the contents of the signal separate from the error code may be displayed as they are. Thus, each time the computer 7 receives an error code, one line of information is additionally displayed in the first window 210.

  When an abnormality occurs in the substrate processing apparatus 1, an abnormality signal may be simultaneously generated at a plurality of related locations. At that time, information on a plurality of lines is additionally displayed at a time in the first window 210. As long as an abnormality that prevents the substrate processing from continuing is occurring, the substrate processing apparatus 1 stops the substrate processing operation and waits for a recovery operation by the operator.

  The operator of the substrate processing apparatus 1 recognizes that an abnormality has occurred by looking at the display of one or more lines of information in the first window 210 of the display means 7e. If it is desired to obtain more detailed information about a specific alarm, a row related to the alarm is selected (step S9). This selection operation may be accepted by, for example, double-clicking on the row in which the main part of the alarm is displayed in the first window 210.

  When accepting the selection of the alarm, the computer 7 displays a second window 220 as shown in FIG. 8 on the display means 7e (step S10). The second window 220 is a window that displays a detailed portion of the alarm for each abnormality that has occurred. In the second window 220, a substantial part other than the frame is vertically divided into two. The upper half of the second window 220 is a fixed display portion 221 in which display contents cannot be rewritten by an operation input from the input means 7f. The fixed display portion 221 displays the contents of the fixed information file of the alarm selected in step S9 in accordance with the specification of the alarm definition file 902. On the other hand, the lower half of the second window 220 is a variable display portion 222 that can rewrite display contents by an operation input from the input means 7f. The variable display portion 222 displays the contents of the variable information file of the alarm selected in step S9 in accordance with the designation of the alarm definition file 902.

  The operator performs recovery work while referring to the detailed portion of the alarm displayed in the second window 220. That is, the information displayed in the second window 220 supports the restoration work by the operator in terms of knowledge.

  Further, when the operator finds new information during the recovery operation, the operator can add the information to the variable display portion 222 (step S11). Specifically, the addition of this new information is accepted by an operation input from the input means 7f. In this operation input, the cursor may be placed on the variable display portion 222 of the second window 220 so that it can be directly input, or an input window may be displayed separately.

  The added new information is stored in the corresponding variable information files B201, B202,. The new information is displayed on the variable display portion 222 the next time the second window 220 is displayed for the same alarm. That is, new information found during the recovery work can be displayed and used during the next recovery work.

  In this substrate processing apparatus, standard information regarding the abnormality of the apparatus is provided in the fixed information files A201, A202,... From the time of shipment, and the contents cannot be rewritten. On the other hand, the operator can directly input new information, which is inherently and empirically found according to the usage status of the substrate processing apparatus 1, from the input means 7f. And the inputted new information can be held in rewritable variable information files B201, B202,... That are separate from the fixed information files A201, A202,. For this reason, confusion does not arise between the standard information regarding the abnormality of the apparatus and the newly found information.

  In the substrate processing apparatus 1, both pieces of information are visually distinguished and displayed when these pieces of information are displayed. For this reason, the operator can recognize whether the displayed information is standard information or information unique to the apparatus, and the efficiency of the recovery work is improved. In the above example, the standard information and the newly found information are displayed separately on the upper and lower sides of the second window 220, but the way of distinction on display is not limited to this. For example, it may be displayed separately on the left and right of the second window 220, or may be displayed separately depending on the difference in display color and character modification.

  Further, in the substrate processing apparatus 1, this standard information and newly found information are displayed on the second window 220 at the same time. For this reason, the operator can view both pieces of information at the same time, and the efficiency of the restoration work is further improved.

<4. Other>
The contents of the fixed information files A201, A202,... And the variable information files B201, B202,. For example, you may make it include the image and program which are useful for recovery work.

  The contents of the plurality of fixed information files A201, A202,... May be included in one file. Similarly, the contents of a plurality of variable information files B201, B202,... May be included in one file.

  The contents of the fixed information files A201, A202,... May be any configuration that cannot be rewritten from the input means 7f as the user interface of the substrate processing apparatus 1. Therefore, for example, if an administrator password is input, the contents may be rewritten from the physically same keyboard.

  The type and number of processing units of the substrate processing apparatus according to the present invention are not limited to the above examples. In addition, the indexer unit 10 and the interface unit 90 may be regarded as processing units, and a plurality of sensors 5 and a sequencer 6 may be arranged in the same manner as other processing units.

  Further, the present invention is not limited to the coater / developer apparatus described above, and the present invention can be applied to a general substrate processing apparatus that performs a predetermined process on a substrate.

It is the figure which showed schematic structure of the substrate processing apparatus which concerns on this invention. It is the block diagram which showed notionally the part which comprises an alarm system among the electrical structures of a substrate processing apparatus. It is the figure which showed the example of the alarm definition file. It is the figure which showed the example of the fixed information file. It is the figure which showed the example of the variable information file. 5 is a flowchart showing an alarm operation. It is the figure which showed the example of the 1st window. It is the figure which showed the example of the 2nd window.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 5 Sensor 6 Sequencer 7 Computer 7a CPU
7d hard disk 7e display means 20, 30, 40, 50, 60, 70, 80 processing unit 210 first window 220 second window 221 fixed display part 222 variable display part 901 alarm program 902 alarm definition file A201, A202, ... fixed information File B201, B202, ... Variable information file

Claims (7)

An alarm system for a substrate processing apparatus,
(a) Storage means for storing fixed information that cannot be rewritten from input means constituting a user interface of the substrate processing apparatus and variable information that can be rewritten from the input means with respect to abnormalities that may occur in the substrate processing apparatus When,
(b) When an abnormality occurs in the substrate processing apparatus, notification means for detecting and notifying the abnormality;
(c) display means for displaying the fixed information and the variable information;
(d) control means for displaying the fixed information and the variable information on the display means based on the notification from the notification means, and rewriting the variable information based on information input from the input means;
An alarm system characterized by comprising: The alarm system according to claim 1,
The alarm system characterized in that the display means displays the fixed information and the variable information separately. The alarm system according to claim 1 or 2, wherein
The alarm system characterized in that the display means displays the fixed information and the variable information simultaneously. The alarm system according to any one of claims 1 to 3,
The storage unit stores the fixed information and the variable information as separate files. The alarm system according to any one of claims 1 to 4, wherein
The storage means has a plurality of the fixed information and the variable information, respectively.
The notifying means notifies the control means of an error code for identifying an abnormality that has occurred;
The control unit specifies the fixed information and the variable information to be displayed on the display unit and the variable information to be rewritten based on the error code.   A substrate processing apparatus comprising the alarm system according to claim 1.   A program that, when executed by a computer, causes the computer to function as the control means according to any one of claims 1 to 6.

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