JP2005243904A - 照明光学装置、露光装置及び露光方法 - Google Patents

照明光学装置、露光装置及び露光方法 Download PDF

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Publication number
JP2005243904A
JP2005243904A JP2004051442A JP2004051442A JP2005243904A JP 2005243904 A JP2005243904 A JP 2005243904A JP 2004051442 A JP2004051442 A JP 2004051442A JP 2004051442 A JP2004051442 A JP 2004051442A JP 2005243904 A JP2005243904 A JP 2005243904A
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Japan
Prior art keywords
optical
prism
illumination
light
illumination optical
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JP2004051442A
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Japanese (ja)
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JP2005243904A5 (enrdf_load_stackoverflow
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Hiroyuki Hirota
弘之 廣田
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Nikon Corp
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Nikon Corp
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Publication of JP2005243904A5 publication Critical patent/JP2005243904A5/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004051442A 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法 Pending JP2005243904A (ja)

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JP2004051442A JP2005243904A (ja) 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法

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JP2004051442A JP2005243904A (ja) 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法

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JP2005243904A true JP2005243904A (ja) 2005-09-08
JP2005243904A5 JP2005243904A5 (enrdf_load_stackoverflow) 2008-03-21

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043458A1 (ja) * 2004-10-19 2006-04-27 Nikon Corporation 照明光学装置、露光装置、および露光方法
CN102221785A (zh) * 2010-04-14 2011-10-19 上海微电子装备有限公司 一种使用汞灯光源的光刻照明装置
WO2011152523A1 (ja) * 2010-06-03 2011-12-08 株式会社ニコン 顕微鏡装置
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US10281632B2 (en) 2003-11-20 2019-05-07 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10241417B2 (en) 2004-02-06 2019-03-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10234770B2 (en) 2004-02-06 2019-03-19 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
JP2006120675A (ja) * 2004-10-19 2006-05-11 Nikon Corp 照明光学装置、露光装置、および露光方法
WO2006043458A1 (ja) * 2004-10-19 2006-04-27 Nikon Corporation 照明光学装置、露光装置、および露光方法
US8004658B2 (en) 2004-10-19 2011-08-23 Nikon Corporation Lighting optical device, exposure system, and exposure method
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
CN102221785A (zh) * 2010-04-14 2011-10-19 上海微电子装备有限公司 一种使用汞灯光源的光刻照明装置
WO2011152523A1 (ja) * 2010-06-03 2011-12-08 株式会社ニコン 顕微鏡装置
US8773758B2 (en) 2010-06-03 2014-07-08 Nikon Corporation Microscope apparatus with an imaging system including an astigmatic difference changing device
EP2579084A4 (en) * 2010-06-03 2017-04-12 Nikon Corporation Microscope device
JP5459399B2 (ja) * 2010-06-03 2014-04-02 株式会社ニコン 顕微鏡装置

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