JP2005240689A - Pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the size of a peripheral pump while suppressing the drive force of rotors by increasing a compression performance and an exhaust performance. <P>SOLUTION: This pump P comprises a vortex stator 71 having the vortex rotors 101 and 102 having a plurality of ring-shaped vortex flow cascades 112 and 116 formed of vortex blades 111 and 113 disposed in a ring shape at the end face of a rotor body 104 and disposed along a plurality of concentric circles and a plurality of ring-shaped flow passages 76 to 79 formed correspondingly to the ring-shaped vortex cascades 112 and 116, and the plurality of ring-shaped vortex cascades. The ring-shaped vortex cascades comprise the ring-shaped vortex cascade 112 having the vortex blades 111 having a rather high compression performance and a high drive resistance and the ring-shaped vortex cascade 116 having the voltex cascades 113 having a lower compression performance and a small drive resistance. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a pump that compresses and discharges gas, and more particularly, to a pump that discharges gas by generating and compressing a vortex by a vortex blade and a ring-shaped flow path.
The pump of the present invention can be suitably used for a dry vacuum pump in which the exhaust port pressure is atmospheric pressure.

In a conventional pump that compresses and exhausts gas, a rotor having a ring-shaped vortex cascade having a plurality of vortex blades formed in a ring shape, and a plurality formed corresponding to the ring-shaped vortex cascade There is a vortex pump that compresses and discharges gas by generating a vortex between the vortex blades and the gas in the ring channel.
The following technique is known as the vortex pump.
(J01) Technology described in Patent Document 1 (Japanese Patent No. 3045418) Patent Document 1 describes a ring-shaped step formed in a step shape on the outer peripheral surface of a conical rotor body, and an outer peripheral corner of each ring-shaped step. A vortex rotor having a vortex cascade composed of a plurality of vortex blades (corner vortex blades) formed in the section, a ring-shaped step formed in a step shape on the conical inner peripheral surface of the stator body, and the ring shape A vortex pump having a vortex stator having a ring-shaped channel (vortex groove) formed in a step is described. All of the vortex blades of the vortex pump described in Patent Document 1 are composed of corner vortex blades.

(J02) Technology described in Patent Document 2 (Patent No. 2557495) Patent Document 2 includes a vortex rotor having only a corner vortex blade similar to Patent Document 1, and a vortex stator in which a ring-shaped channel is formed. A vortex pump is described. Further, instead of the corner vortex blades, there is also described a vortex rotor having only protruding vortex blades formed so as to protrude toward the ring-shaped flow path at the corners of the outer periphery of each ring-shaped step. Furthermore, a composite vacuum pump is also described in which a centrifugal pump (turbomolecular pump) is arranged upstream of the vortex pump in the gas transfer direction.

(J03) Technology described in Patent Document 3 (Japanese Patent Laid-Open No. 10-89285) Patent Document 3 includes a disk-shaped stator in which a plurality of concentric ring-shaped channels are formed, and the ring-shaped channel. There is described an eddy current pump having a rotor in which a ring-shaped vortex blade row composed only of projecting vortex blades formed so as to protrude is formed in a plurality of stages corresponding to the concentric ring-shaped flow path. Patent Document 3 describes a composite vacuum pump in which a Holweck type molecular absorption pump is arranged on the upstream side in the gas transfer direction of the vortex pump.

(J04) Technology described in Patent Document 4 (Japanese Patent Laid-Open No. 10-288192) In Patent Document 4, an outer peripheral portion of a ring-shaped groove formed in a ring shape on the inner peripheral surface of a cylindrical stator body is formed. A vortex pump having a stator having vortex grooves, and a rotor in which angular vortex blades similar to those in Patent Document 1 are formed on the outer periphery of a plurality of disc-like rotor bodies arranged corresponding to the ring-shaped grooves. Is described. Patent Document 4 describes a composite vacuum pump in which a thread groove type pump is arranged on the upstream side in the gas transfer direction of the vortex pump.

Japanese Patent No. 3045418 (FIGS. 1 and 2) Japanese Patent No. 2557495 (FIGS. 1, 3, and 5) Japanese Patent Laid-Open No. 10-89285 (FIGS. 1 and 6) JP 10-288192 A (paragraph number “0017”, FIGS. 3 and 9)

  In the techniques (J01) to (J04) described in Patent Documents 1 to 4, the vortex blades are constituted by one type of vortex blades such as corner vortex blades or projecting vortex blades. The corner vortex blades used in Patent Documents 1, 2, and 4 have relatively low compression performance. Therefore, in order to increase the gas compression ratio and increase the degree of vacuum that can be exhausted, the number of blade rows (number of stages) must be increased, and there is a problem that the pump is increased in size. On the other hand, the protruding vortex blade described in Patent Document 3 has a relatively high compression performance as compared with the corner vortex blade, but has a characteristic that a driving force required for rotationally driving the vortex rotor is increased. . Therefore, in the case where the rotor is constituted only by the protruding vortex blades, there is a problem that it is necessary to use a large motor that is expensive and consumes a large amount of power. That is, there is a problem that the cost of the pump (manufacturing cost and cost during use) increases.

Further, as in the technique (J04) described in Patent Document 4, when the rotor and the stator have a cylindrical structure, the eddy current pump becomes longer in the rotation axis direction, and the eddy current pump becomes larger. There is a problem. Further, when manufacturing the rotor and the stator, it is necessary to divide at least the stator, and there is a problem that the assembling work becomes complicated, and the component accuracy, the assembly accuracy, the balance correction, and the like become severe.
As in the techniques (J01) and (J02) described in Patent Documents 1 and 2, when a stepped rotor is used, parts can be easily manufactured and assembled. However, because of the cylindrical structure, the vortex pump is still used. It becomes longer in the axial direction and the eddy current pump becomes larger.

  Moreover, when using a disk-shaped rotor like the technique of the said patent document 3, there exists a problem that the outer diameter of a rotor becomes large according to the stage number of a cascade. And when the outer diameter of a rotor becomes large, the stress which generate | occur | produces in the bearing part of a rotor rotating shaft at the time of rotor rotation drive will become large. In addition, in the disk-shaped rotor described in Patent Document 3, the gas is compressed most in the ring-shaped gas flow path on the center side (inner peripheral side) of the lower surface of the rotor, and the pressure on the upper surface of the rotor is high. A large load is applied due to a pressure difference between the vacuum region (low pressure region). Due to the load due to this pressure difference, a large load (axial load) acts in the axial direction on the bearing of the rotary shaft of the rotor. As a result, there is a problem that the life of the bearing of the rotating shaft of the rotor is shortened due to the stress, the axial load, or the like, and the life of the parts such as the bearing is shortened due to repeated load.

In view of the above-described circumstances, the present invention has the following description contents (O01) and (O02) as technical problems.
(O01) To reduce the size of the vortex pump while improving the compression / exhaust performance and suppressing the driving force of the rotor.
(O02) To provide a long-life pump with improved manufacturability and assembly.

(Invention)
Next, the present invention that has solved the above problems will be described. In order to facilitate the correspondence between the elements of the present invention and elements of specific examples (examples) of the embodiments described later, Add the code enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described later is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(First invention)
In order to solve the above technical problem, the pump (P, P ′, P ″) of the first invention is characterized by comprising the following structural requirements (A01) to (A04).
(A01) A housing (2, 72) that rotatably supports a rotating shaft (1) to be rotated,
(A02) A disk-shaped rotor body (104) fixed to the rotating shaft (1) and supported rotatably with respect to the housing (2, 72), and a radius at the end surface of the rotor body (104) Vortex rotors (101, 102) each having a plurality of ring-shaped vortex blade rows (112, 116) composed of a plurality of vortex blades (111, 113) arranged at predetermined intervals along a plurality of different concentric circles ),
(A03) The stator body (73) is supported on the housing (2, 72) so as not to rotate, and the stator body (73) is formed to correspond to the plurality of ring-shaped vortex cascades (112, 116). A plurality of ring-shaped flow paths (76 to 79), and compresses the gas by generating a vortex flow in the ring-shaped flow paths (76 to 79) when the vortex rotor (101, 102) rotates. The vortex stator (71) to be discharged,
(A04) The ring-shaped vortex blade row (112) configured by the vortex blade (111) having a relatively high gas compression performance and a large driving resistance when the vortex rotor (101, 102) is rotationally driven. ) And the ring-shaped vortex cascade (116) formed by the vortex cascade (113) having a relatively low compression performance and a small driving resistance. 116).

(Operation of the first invention)
In the pump (P, P ′, P ″) according to the first aspect of the present invention having the above-described structural requirements (A01) to (A04), the rotor main body (104) of the vortex rotor (101, 102) is the housing (2, 72). A plurality of concentric circles having different radii are arranged at predetermined intervals on the end surface of the disc-shaped rotor main body (104). A plurality of ring-shaped vortex blade rows (112, 116) constituted by vortex blades (111, 113) are arranged.

  An eddy current stator (71) having a stator body (73) non-rotatably supported by the housing (2, 72) has a plurality of ring-shaped vortex cascades (112, 116) formed in correspondence with the plurality of ring-shaped vortex cascades (112, 116). A ring-shaped channel (76 to 79). Therefore, when the vortex rotor (101, 102) rotates, a vortex is generated in the ring-shaped flow path (76 to 79), and the gas is compressed and discharged. In the present specification and claims, the expression “supported non-rotatably” not only refers to the case where the stator body formed separately from the housing is supported by the housing but also the housing (72). And the stator body (73) are integrally formed, and the stator body (73) is configured to be non-rotatable with respect to the housing (72).

  The plurality of ring-shaped vortex blade rows (112, 116) have a relatively high gas compression performance and have a large driving resistance when the vortex rotor (101, 102) is rotationally driven (for example, the vortex blades (for example, The ring-shaped vortex blade row (112) configured by the protruding vortex blade (111)) and the vortex blade (eg, the stepped portion vortex blade (the stepped portion vortex blade) having a relatively low compression performance and a small driving resistance) 113)), and the ring-shaped vortex cascade (116).

  Therefore, the pumps (P, P ′, P ″) of the first invention make use of the characteristics of the vortex blade (111) having a high compression performance (gas compression performance) and the vortex blade (113) having a small driving force. The gas compression performance can be obtained, that is, the drive resistance is suppressed as compared with the case where all the ring-shaped vortex blade rows are composed of only the ring-shaped vortex blade row (112) of the vortex blade (111) having a large drive resistance. Therefore, it is not necessary to use a large motor (M) that is required when the vortex blades (111) having a large driving resistance are used, and the cost and power consumption (energy saving) are reduced. it can.

  Further, if all the ring-shaped vortex cascades are configured only by the ring-shaped vortex cascade (116) of the vortex cascade (113) having a relatively low compression performance, a large number of stages are required to compress the gas. It was. However, in the pumps (P, P ′, P ″) of the first invention, even if the number of stages is reduced by combining with the ring-shaped vortex blade row (112) of the vortex blade (111) having relatively high compression performance. Therefore, the pump (P, P ′, P ″) of the first invention can reduce the number of stages, so that the outer diameter of the rotor can be reduced and the pump (P, P ′) can be obtained. , P ″) can be reduced in size.

  As a result, the compression performance and the exhaust performance can be improved and the rotational driving force of the vortex rotors (101, 102) can be improved as compared with the case of the prior art in which all ring-shaped vortex cascades are constituted by only one type of vortex blade. The pumps (P, P ′, P ″) can be reduced in size while reducing the outer diameter of the vortex rotor (101, 102), so that the rotating shaft (101, 102) is driven when the vortex rotor (101, 102) is driven. The force (stress etc.) applied to the bearings (P4, 36) of 1) can be reduced, and the life of the pumps (P, P ′, P ″) can be extended.

(Second invention)
In order to solve the above technical problem, the pump (P, P ′, P ″) of the second invention has the following structural requirements (A01) to (A03), (A07), (A08). And
(A01) A housing (2, 72) that rotatably supports a rotating shaft (1) to be rotated,
(A02) A disk-shaped rotor body (104) fixed to the rotating shaft (1) and supported rotatably with respect to the housing (2, 72), and a radius at the end surface of the rotor body (104) Vortex rotors (101, 102) each having a plurality of ring-shaped vortex blade rows (112, 116) composed of a plurality of vortex blades (111, 113) arranged at predetermined intervals along a plurality of different concentric circles ),
(A03) The stator body (73) is supported on the housing (2, 72) so as not to rotate, and the stator body (73) is formed to correspond to the plurality of ring-shaped vortex cascades (112, 116). A plurality of ring-shaped flow paths (76 to 79), and compresses the gas by generating a vortex flow in the ring-shaped flow paths (76 to 79) when the vortex rotor (101, 102) rotates. The vortex stator (71) to be discharged,
(A07) The ring-shaped flow paths (76 to 79) formed on the front and back both end faces of the stator body (73),
(A08) A pair of the vortex rotors (101, 102) disposed opposite to the front and back end faces of the stator body (73).

(Operation of the second invention)
In the pump (P, P ′, P ″) according to the second aspect of the present invention having the structural requirements (A01) to (A03), (A07), (A08), the rotor body (104) of the vortex rotor (101, 102) Is fixed to the rotary shaft (1) rotatably supported by the housing (2, 72) The end surface of the disc-shaped rotor body (104) is predetermined along a plurality of concentric circles having different radii. A plurality of ring-shaped vortex blade rows (112, 116) each having a plurality of vortex blades (111, 113) arranged at intervals of.

An eddy current stator (71) having a stator body (73) non-rotatably supported by the housing (2, 72) has a plurality of ring-shaped vortex cascades (112, 116) formed in correspondence with the plurality of ring-shaped vortex cascades (112, 116). A ring-shaped channel (76 to 79). Therefore, when the vortex rotor (101, 102) rotates, a vortex is generated in the ring-shaped flow path (76 to 79), and the gas is compressed and discharged.
The ring-shaped flow paths (76 to 79) are formed on both front and back end faces of the stator body (73). And the said eddy current rotor (101,102) is arrange | positioned facing the front and back both end surfaces of the said stator main body (73).

  Therefore, in the pumps (P, P ′, P ″) of the second invention, it is not necessary to divide the vortex stator (71), and the vortex rotors (101, 102) are opposed to the front and back end faces of the vortex stator (71). ) Can assemble the pump (P, P ′, P ″), so that it is not elongated in the axial direction, and the productivity and assembly of the pump (P, P ′, P ″) can be improved. it can.

  Moreover, since the ring-shaped flow path (76-79) is formed in the front and back both end surfaces of a vortex stator (71), the gas transfer direction downstream end and back surface of the ring-shaped flow path (76a-79a) on the surface side, for example When the flow path (88) that connects the upstream side end of the ring-shaped flow paths (76b to 79b) in the gas transfer direction is formed, the ring-shaped flow paths (76 to 79) are formed only on one side; In comparison, the overall length of the ring-shaped channel (76 to 79) is more than doubled, and the compression performance of the transferred gas is increased. Therefore, even if the outer diameter of the vortex rotor (101, 102) is reduced to about 1/2 compared with the case where the ring-shaped flow paths (76 to 79) are formed only on one side, the compression / exhaust performance is equal or better. Is obtained.

  As a result, the outer diameters of the vortex rotors (101, 102) and the vortex stator (71) can be reduced while improving the compression performance and the exhaust performance, so that the pumps (P, P ′, P ″) can be reduced in size. Since the outer diameter of the vortex rotor (101, 102) can be reduced, the force (stress, etc.) applied to the bearing (P4, 36) of the rotating shaft (1) of the vortex rotor (101, 102) can be reduced, and the pump (P, P ′, P ″) can be extended in life.

  Conversely, the ring-shaped flow paths (76a to 79a) on the front surface side and the ring-shaped flow paths (76b to 79b) on the back surface side are not connected, and the ring-shaped flow paths (76 to 79) on the front surface side and the back surface side are not connected. When the upstream end in the gas transfer direction is connected to the intake port (2a, 74), the gas can be exhausted from both the front and back end surfaces of the vortex stator (71), so that ring-shaped flow paths (76 to 79) are formed only on one side. Exhaust performance can be improved compared with the case where it exists. That is, as compared with the conventional eddy current pumps (P, P ′, P ″), even if the outer diameter of the eddy current stator (71) is made smaller, it is possible to provide the same or better exhaust performance. The pumps (P, P ′, P ″) can be reduced in size while improving the performance. And since the outer diameter of a vortex rotor (101,102) can be made small, the force which acts on a bearing (P4,36) etc. can be suppressed, and pump (P, P ', P ") can be prolonged. Can do.

  In the pumps (P, P ′, P ″) of the second invention, the vortex rotors (101, 102) are respectively stator bodies (73) by the pressure of the gas compressed in the ring-shaped flow paths (76-79). This force acts as an axial load on the bearings (P4, 36) that support the rotating shaft (1) to which the pair of vortex rotors (101, 102) are fixed. In the pump (P, P ′, P ″) according to the second aspect of the invention, each vortex rotor (101, 102) is arranged to face both front and back end faces of the stator body (73), and therefore each vortex rotor (101, 102). The direction of the force received by () is reversed, the force acting on the rotating shaft (1) is canceled, and the axial load is reduced. As a result, since the axial load acting on the bearing (P4, 36) can be reduced, the life of the bearing (P4, 36) can be extended, and the life of the pump (P, P ', P ") can be extended. In the pumps (P, P ′, P ″) with high displacement and high displacement, the effect of extending the life by reducing the axial load is great.

(Embodiment 1)
The pump (P, P ′, P ″) according to the first embodiment of the present invention is the following pump (P, P ′, P ″) according to the first aspect of the present invention having the above-described structural requirements (A01) to (A04). (5), (A05), (A06).
(A05) Projected from the end face of the rotor body (104) into the ring-shaped flow path (76), and formed by a projecting vortex blade (111) having a relatively high compression performance and a large driving resistance. The ring-shaped vortex cascade (112) having the vortex blade (111), the ring-shaped stepped portion (107 to 109) formed in a ring shape on the end surface of the rotor body (104), and the ring-shaped stepped portion ( 107-109), the ring-shaped vortex blade row (116) having the vortex blade (113) composed of the stepped vortex blade (113) having a relatively small compression performance and a small driving resistance. A plurality of said ring-shaped swirl cascades (112, 116),
(A06) The ring-shaped vortex blade row (112) having the protruding vortex blade (111) on the outer peripheral side and the upstream side in the gas transfer direction of the plurality of ring-shaped vortex blade rows (112, 116) arranged concentrically. ), And the vortex rotor (101, 102) in which the ring-shaped vortex blade row (116) having the stepped vortex blade (113) is arranged on the inner peripheral side and the downstream side in the gas transfer direction.

(Operation of Form 1 of the Invention)
In the pump (P, P ′, P ″) according to the first embodiment of the present invention having the structural requirements (A05) and (A06), the outer peripheral side of the ring-shaped vortex cascade (112, 116) and the upstream side in the gas transfer direction The ring-shaped vortex blade row (112) having a protruding vortex blade (111) having a relatively high compression performance and a large driving resistance is disposed on the inner peripheral side and the downstream side in the gas transfer direction. The ring-shaped vortex blade row (116) having the stepped vortex blade (113) having a relatively low compression performance and a small driving resistance is disposed.

  Therefore, by arranging the ring-shaped vortex blade row (112) of the protruding vortex blade (111) having a high peripheral speed and high compression performance on the outer peripheral side, the gas compressibility (compression performance) on the outer peripheral side can be efficiently increased. it can. Since the compression speed is difficult to improve because the peripheral speed is low, the step force vortex blade (113) that requires less driving force is arranged on the inner peripheral side, which tends to affect the rotational driving force, so that the driving force is effectively reduced. Can be suppressed. In addition, the more gas molecules there are, that is, the higher the gas pressure, the easier the vortex flow is generated, so the gas compressed by the protruding vortex blade (111) on the upstream side (outer peripheral side) in the gas transfer direction When further compression is performed by the stepped part vortex blade (113) on the downstream side (inner peripheral side), the compression performance of the stepped part vortex blade (113) on the inner peripheral side is efficiently increased. As a result, the driving force can be effectively reduced while maintaining the compression performance. Therefore, the pumps (P, P ′, P ″) can be reduced in size while maintaining the compression performance and the exhaust performance, and it is possible to use a motor (M) with low cost and low power consumption.

(Embodiment 2)
The pump (P, P ′, P ″) according to the second aspect of the present invention is the pump (P, P ′, P ″) according to the first aspect or the first aspect of the present invention. (A08) is provided.
(A07) The ring-shaped flow paths (76 to 79) formed on the front and back both end faces of the stator body (73),
(A08) A pair of the vortex rotors (101, 102) disposed opposite to the front and back end faces of the stator body (73).

(Operation of Embodiment 2)
In the pump (P, P ′, P ″) according to the second embodiment of the present invention having the structural requirements (A07) and (A08), the ring-shaped flow paths (76 to 79) are the front and back of the stator body (73). The vortex rotors (101, 102) are disposed opposite the front and back end surfaces of the stator body (73).
Therefore, it is not necessary to divide the eddy current stator (71), and the pumps (P, P ′, P ″) are arranged by arranging the eddy current rotors (101, 102) so as to face both the front and rear end faces of the eddy current stator (71). Therefore, it is possible to improve the manufacturability and assemblability of the pumps (P, P ′, P ″).

  Moreover, since the ring-shaped flow path (76-79) is formed in the front and back both end surfaces of a vortex stator (71), the gas transfer direction downstream end and back surface of the ring-shaped flow path (76a-79a) on the surface side, for example When the flow path (88) that connects the upstream side end of the ring-shaped flow paths (76b to 79b) in the gas transfer direction is formed, the ring-shaped flow paths (76 to 79) are formed only on one side; In comparison, the overall length of the ring-shaped channel (76 to 79) is more than doubled, and the compression performance of the transferred gas is increased. Therefore, even if the outer diameter of the vortex rotor (101, 102) is reduced to about 1/2 compared with the case where the ring-shaped flow paths (76 to 79) are formed only on one side, the compression / exhaust performance is equal or better. Is obtained.

  As a result, the outer diameters of the vortex rotors (101, 102) and the vortex stator (71) can be reduced while improving the compression performance and the exhaust performance, so that the pumps (P, P ′, P ″) can be reduced in size. Since the outer diameter of the vortex rotor (101, 102) can be reduced, the force (stress, etc.) applied to the bearing (P4, 36) of the rotating shaft (1) of the vortex rotor (101, 102) can be reduced, and the pump (P, P ′, P ″) can be extended in life.

  Conversely, the ring-shaped flow paths (76a to 79a) on the front surface side and the ring-shaped flow paths (76b to 79b) on the back surface side are not connected, and the ring-shaped flow paths (76 to 79) on the front surface side and the back surface side are not connected. When the upstream end in the gas transfer direction is connected to the intake port (2a, 74), the gas can be exhausted from both the front and back end surfaces of the vortex stator (71), so that ring-shaped flow paths (76 to 79) are formed only on one side. Exhaust performance can be improved compared with the case where it exists. That is, as compared with the conventional eddy current pumps (P, P ′, P ″), even if the outer diameter of the eddy current stator (71) is made smaller, it is possible to provide the same or better exhaust performance. The pumps (P, P ′, P ″) can be reduced in size while improving the performance. And since the outer diameter of a vortex rotor (101,102) can be made small, the force which acts on a bearing (P4,36) etc. can be suppressed, and pump (P, P ', P ") can be prolonged. Can do.

  Further, in the pumps (P, P ′, P ″) according to the second embodiment of the present invention, the vortex rotors (101, 102) are respectively fixed to the stator main body (101) by the pressure of the gas compressed in the ring-shaped flow paths (76 to 79). 73), which acts as an axial load on the bearings (P4, 36) that support the rotating shaft (1) to which the pair of vortex rotors (101, 102) are fixed. In the pump (P, P ′, P ″) according to the second aspect of the invention, each vortex rotor (101, 102) is arranged opposite to the front and back end faces of the stator body (73). The direction of the force received by 102) is reversed, the force acting on the rotating shaft (1) is offset, and the axial load is reduced. As a result, since the axial load acting on the bearing (P4, 36) can be reduced, the life of the bearing (P4, 36) can be extended and the life of the pump (P, P ′, P ″) can be extended. In the large displacement / high-speed rotation pumps (P, P ′, P ″) having a large stress and axial load acting on (P4, 36), the effect of extending the life by reducing the axial load is great.

(Embodiment 3)
The pump (P, P ′, P ″) according to the third embodiment of the present invention has the following structural requirements (A09) in the pump (P, P ′, P ″) according to the second invention or the second embodiment of the present invention. It is characterized by having.
(A09) The downstream end in the gas transfer direction of the ring-shaped flow path (76a, 77b, 78a, 79b) formed on either the front surface or the back surface of the stator body (73); and the stator body (73) The eddy current stator having a communication flow path (88) connecting the upstream end in the gas transfer direction of the ring-shaped flow paths (76b, 77a, 78b, 79a) formed on either the front surface or the back surface of 71).

(Operation of Form 3 of the Invention)
In the pump (P, P ′, P ″) according to the third embodiment of the present invention having the structural requirement (A09), the vortex stator (71) includes either the front surface or the back surface of the stator body (73). The ring-shaped flow formed on the other side of the front surface or the back surface of the stator main body (73) and the downstream end of the ring-shaped flow path (76a, 77b, 78a, 79b) formed in the gas transfer direction A communication flow path (88) that connects the upstream ends of the passages (76b, 77a, 78b, 79a) in the gas transfer direction is provided.

  Therefore, in the pump (P, P ′, P ″) according to the third aspect of the present invention, the downstream end in the gas transfer direction of the ring-shaped flow path (76a, 77b, 78a, 79b) on one side and the ring-shaped flow path on the other side. (76b, 77a, 78b, 79a) Since the connecting flow path (88) connecting the upstream end in the gas transfer direction is provided, a vortex stator in which a ring-shaped flow path is formed only on one side with the same outer diameter Compared with the above case, the overall length of the ring-shaped flow passages (76 to 79) is more than twice, so that the compression performance can be improved, so the outer diameter of the vortex rotor (101, 102) can be reduced. In addition, it is possible to obtain compression performance and exhaust performance equal to or higher than those in the case where the ring-shaped flow paths (76 to 79) are formed only on one side, and as a result, the vortex rotor (101) while improving the compression performance and exhaust performance. 102) and vortex stay (71) Since the possible miniaturization, the pump (P, P ', P ") can be miniaturized. Further, since the outer diameter of the vortex rotor (101, 102) can be reduced, the force acting on the bearing (P4, 36) of the rotating shaft (1) can be reduced, and the pumps (P, P ′, P ″). ) Can be extended.

(Embodiment 4)
The pump (P, P ′, P ″) according to the fourth aspect of the present invention is the pump (P, P ′, P) according to any one of the first, second, and first to third aspects of the present invention. ″) Includes the following constituent element (A010).
(A010) A pump cooling mechanism (93) disposed inside the stator body (73).

(Operation of Embodiment 4)
In the pump (P, P ′, P ″) according to the fourth aspect of the present invention having the above-described structural requirement (A010), the pump cooling mechanism (93) is disposed inside the stator body (73). 71) can be directly cooled by the pump cooling mechanism (93), so that the cooling efficiency is increased, and the gas transferred through the ring-shaped channel (76 to 79) is transferred to the wall surface of the ring-shaped channel (76 to 79). Therefore, the volume of the gas can be reduced, and the exhaust performance can be improved.

(Embodiment 5)
The pump (P, P ′, P ″) according to the fifth embodiment of the present invention is the pump (P, P ′, P) according to any one of the first invention, the second invention, and the first to fourth embodiments. ″) Includes the following constituent elements (A011).
(A011) A thread groove pump (SP) disposed on the upstream side in the gas transfer direction of the intake port (74) formed at the upstream end in the gas transfer direction of the ring-shaped channel (76 to 79).

(Operation of Embodiment 5)
In the pump (P, P ′, P ″) according to the fifth aspect of the invention having the above-described structural requirement (A011), a thread groove type pump (SP) is disposed upstream of the intake port (74) in the gas transfer direction. Therefore, the degree of vacuum that can be evacuated can be increased by the composite pump (P, P ′, P ″) combined with the thread groove type pump (SP).

(Embodiment 6)
The pump (P, P ′, P ″) according to the sixth embodiment of the present invention is the pump (P, P ′, P) according to any one of the first invention, the second invention, and the first to fifth embodiments. ″) Includes the following constituent elements (A012).
(A012) A turbo-molecular pump (TMP) disposed on the upstream side in the gas transfer direction of the intake port (74) formed at the upstream end in the gas transfer direction of the ring-shaped channel (76 to 79).

(Operation of Embodiment 6)
In the pump (P, P ′, P ″) according to the sixth aspect of the present invention having the structural requirement (A012), a turbo molecular pump (TMP) is disposed upstream of the intake port (74) in the gas transfer direction. Therefore, the degree of vacuum that can be evacuated by the combined pump (P, P ′, P ″) combined with the turbo molecular pump (TMP) can be increased.

The pump of the present invention described above has the following effects (E01) to (E05).
(E01) The vortex pump can be reduced in size while improving the compression performance and the exhaust performance and suppressing the driving force of the rotor.
(E02) Manufacturability and assemblability can be improved and a long-life pump can be provided.
(E03) By providing a communication channel that connects the ring-shaped channel formed on one side of the stator and the ring-shaped channel formed on the other side, the total length of the channel can be increased. The outer diameter can be reduced while improving the compression performance.
(E04) The pump cooling mechanism for cooling the vortex stator can cool the transferred gas and reduce the volume, so that the exhaust performance can be enhanced.
(E05) By disposing a vacuum pump upstream in the gas transfer direction, the degree of vacuum that can be evacuated can be increased.

Next, specific examples (examples) of the embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples.
In order to facilitate understanding of the following description, in the drawings, the vertical direction is the Z-axis direction, and the directions indicated by the arrows Z and -Z or the sides indicated are the upper, lower, upper, and lower sides, respectively. To do.

FIG. 1 is a cross-sectional explanatory view of a composite vacuum pump according to a first embodiment of the present invention, and is a cross-sectional explanatory view illustrating a gas channel and a cooling water channel of the composite vacuum pump.
FIG. 2 is a cross-sectional explanatory view of the composite vacuum pump according to the first embodiment of the present invention, and is a cross-sectional explanatory view illustrating a grease supply path and a purge gas path to the bearing.
1 and 2, a composite vacuum pump P as a pump according to the first embodiment of the present invention includes a composite turbo molecular pump part P1 on the upper side (+ Z side, upstream in the gas transfer direction) and a composite turbo molecular pump. A vortex pump portion P2 connected by a bolt to the lower side of the portion P1 (−Z side, vortex side in the gas transfer direction), and a lower bearing support member P3 connected by a bolt to the lower side of the vortex pump P2. ing. The composite vacuum pump P has a rotating shaft 1 that is rotatably supported by a bearing P4 of the lower bearing support member P3 and penetrates the composite turbomolecular pump part P1 and the vortex pump part P2. Have.

(Description of the combined turbo molecular pump)
1 and 2, the composite turbomolecular pump part P1 has a cylindrical housing 2 having a pump inlet 2a formed at the upper end. A cylindrical inner housing 3 is provided inside the housing 2. The inner housing 3 includes a stationary blade support member 3a disposed in an upper portion (+ Z side portion, upstream portion in the gas transfer direction) and a screw groove disposed in a lower portion (−Z side portion, downstream portion in the gas transfer direction). Type pump inner housing 3b. The stationary blade support member 3a supports a plurality of stationary blades 4 protruding inward.

  Inside the inner housing 3, there is disposed a composite turbo molecular pump rotor 6 that is fixed to the upper end portion of the rotating shaft 1 with a bolt and is driven to rotate integrally with the rotating shaft 1. The composite turbomolecular pump rotor 6 includes an upper moving blade support portion 6a and a thread groove type pump rotor portion 6b corresponding to the stationary blade support member 3a and the thread groove type pump inner housing 3b of the inner housing 3. Have. A plurality of moving blades 7 arranged so as to enter between the stationary blades 4 are supported on the moving blade support portion (turbo molecular pump rotor portion) 6a.

  A plurality of spiral threads 8 are formed on the outer peripheral surface of the thread groove type pump rotor portion 6b. The thickness of the thread 8 is different from that of a normal thread groove type pump, and the upstream side in the gas transfer direction (+ Z direction) is thin as in the case of the screw groove type pump described in Japanese Patent Laid-Open No. 2001-24887. It is comprised so that it may become thick as it goes to the direction downstream side. Moreover, the radius of the thread groove type pump rotor portion 6b is configured to be rapidly reduced on the upstream side in the gas transfer direction. The thickness and radius of the screw thread 8 can be formed in the same manner as in a normal thread groove type pump.

  A thread groove type pump stator 11 is arranged on the inner side (rotation shaft 1 side) of the composite turbo molecular pump rotor 6. The thread groove type pump stator 11 has a disk-shaped thread groove type pump stator flange portion 11a and a stator body 11b in which a connecting channel 12 penetrating in the vertical direction is formed. The pump stator flange portion 11a is fixedly supported by bolts 13 on a composite turbomolecular pump base member (described later). A plurality of spiral threads 14 are formed on the outer peripheral surface of the thread groove type pump stator 11 so as to protrude toward the inner peripheral surface of the composite turbomolecular pump rotor 6.

  The stationary blade support member 3a, the stationary blade 4, the moving blade support portion (turbo molecular pump rotor portion) 6a, the moving blade 7 and the like constitute a turbo molecular pump TMP. Further, the thread groove type pump SP is formed by the thread groove type pump inner housing 3b, the thread groove type pump rotor portion 6b, the thread 8, the composite turbo molecular pump rotor 6, the thread groove type pump stator 11, the thread 14 and the like. It is configured. The turbo molecular pump TMP and the thread groove type pump SP constitute a composite turbo molecular pump FP.

  Therefore, when the combined turbo molecular pump rotor 6 rotates, the gas sucked from the pump intake port 2a is transferred (conveyed) from above to below while being compressed by the moving blade 7 and the stationary blade 4 of the turbo molecular pump TMP. Thus, the screw groove type pump SP is transferred to the upstream end in the gas transfer direction. The gas is further transferred from above to below while being further compressed by the thread groove type pump SP thread 8. And the gas conveyed to the lower end part of the thread groove type pump inner housing 3b is sent to the inner peripheral surface of the composite turbomolecular pump rotor 6 and the thread groove type pump stator 11 by the thread 14 of the thread groove pump SP. It is transported upward while being compressed between the outer peripheral surface and transported downward through the connecting flow path 12.

FIG. 3 is a perspective view for explaining the cooling water passage and the gas passage of the base member of the composite turbo molecular pump unit.
FIG. 4 is a plan view for explaining the cooling water passage and the purge gas passage of the base member of the composite turbo molecular pump section. 3 and 4, the illustration of the grease supply path is omitted. Further, in FIG. 4, illustration of member shapes and the like other than the cooling water passage and the gas passage is omitted.

  In FIG. 1, a composite turbomolecular pump base member 21 is connected to the lower end of the housing 2 by a plurality of connecting bolts 22. 1 to 4, the composite turbomolecular pump base member 21 has a base member main body 23. The base member main body 23 includes a disk-shaped disk portion 24 and a cylindrical portion 26 that is integrally formed at the center of the disk portion 24. In FIG. 1 to FIG. 4, a gas flow channel groove 27 connected to the connection flow channel 12 is formed on the upper surface of the disc portion 24, and the outer end portion of the gas flow channel groove 27 is formed downward. A composite turbo molecular pump exhaust port 28 penetrating therethrough is formed. 1 and 3, a positioning portion 24 a for positioning the housing 2 is formed on the outer peripheral portion of the disc portion 24, and an upper bearing support member positioning portion 26 a is formed on the upper surface of the cylindrical portion 26. Has been. In FIG. 1, an exhaust motor M (see FIG. 1) that rotationally drives the rotary shaft 1 is fixedly supported by a motor support member 29 inside the cylindrical portion 26.

  A cylindrical upper bearing support member 31 is fixedly supported on the upper surface of the cylindrical portion 26 of the base member main body 23. The upper bearing support member 31 includes a flange portion 33 fixed to the base member main body 23 with bolts 32, and an upper bearing support member main body 34 formed integrally with the flange portion 33. In FIG. 1, a bearing 36 that supports the upper end portion of the rotary shaft 1 rotatably is supported at the upper end portion of the inner peripheral surface of the upper bearing support member main body 34.

  In FIG. 1, a plurality of labyrinth seals 37 formed of ring-shaped grooves are formed on the inner peripheral surface of the upper bearing support member main body 34. The labyrinth seal 37 seals the gas between the rotating shaft 1 and the inner peripheral surface of the upper bearing support member main body 34 in the axial direction (from a high pressure to a low pressure) so as not to flow backward. The labyrinth seal 37 includes a rotating member (such as a rotor) and a fixing member (such as a stator) between the base member main body 23 and the rotary shaft 1 or between the base member main body 23 and a rotor (described later) of the vortex pump P2. It is formed in the part which needs to be sealed between.

  1 and 2, a cover 41 is fixedly supported on the upper surface of the upper bearing support member 31 by bolts 42. A gas discharge port 43 is formed in the cover 41. Further, in FIG. 1, a waste grease storage chamber 41 a is formed on the lower surface on the inner peripheral side of the cover 41 to store waste grease that has been deteriorated by being used for lubricating the bearing 36. A rotor positioning member 44 fixed to the rotary shaft 1 is disposed between the cover 41 and the composite turbo molecular pump rotor 6.

  3 and 4, a cooling water supply passage 51, a cooling water discharge passage 52, and a gas supply passage 53 extending from the outer periphery to the inside are formed in the disc portion 24 of the base member main body 23. External pipe connection joints are installed at the outer peripheral ends of the water supply path 51, the cooling water discharge path 52, and the gas supply path 53 (see FIGS. 1 and 4).

  A motor that is formed in the cylindrical portion 26 so as to penetrate in the vertical direction and in which cooling water that removes heat generated by the exhaust motor M, heat generated by the compression of the gas, and heat generated by the screw groove type pump stator 11 flows. Eight cooling water channels 54 are formed at equal intervals in the circumferential direction. Of the eight motor cooling water channels 54, one motor cooling water channel 54 a is connected to the cooling water supply channel 51 and is adjacent to the motor cooling water channel 54 a connected to the cooling water supply channel 51. 54 b is connected to the cooling water discharge path 52. At the lower end of the other motor cooling water channel 54c, an arc-shaped connection water channel 56 that connects the motor cooling water channel 54c adjacent in the circumferential direction is formed. And the upper end of the said motor cooling water channel 54 (54a, 54b and 54c) is connected with the radial water channel 57 formed radially from the outer side to the inner side. The radial water channel 57 is closed at the top by the lower surface of the upper bearing support member 31.

  3 and 4, the upper bearing support member main body 34 of the upper bearing support member 31 is formed with eight vertical through water passages 58 penetrating in the vertical direction. The lower end (−Z end) of each of the upper and lower through water channels 58 is connected to the inner end of each radial water channel 57. An upper end (+ Z end) of the upper and lower through water channel 58 connects the upper and lower through water channels 58 adjacent to each other in the circumferential direction, and an arc bearing bearing water channel through which cooling water for removing heat generated in the bearing 36 flows. 59 is formed.

Therefore, as shown in FIG. 4, the cooling water supplied by a cooling water supply device (not shown) is supplied from the cooling water supply path 51 to remove heat generated by the exhaust motor M or the like in the motor cooling water path 54a. However, it flows to the bearing cooling water channel 59 via the radial cooling water channel 57 and the vertical through water channel 58, and heat generated in the bearing 36 and the like is removed. The cooling water in the bearing cooling water passage 59 that has absorbed the heat flows to the lower motor cooling water passage 54c through the upper and lower through water passages 58 and the radial cooling water passage 57 adjacent to each other in the circumferential direction, and again removes the heat of the exhaust motor M. By repeating these steps, the cooling water is discharged from the cooling water discharge passage 52 after making one round in the circumferential direction while removing heat generated by the exhaust motor M, the bearing 36, and the like.
A composite turbomolecular pump cooling water passage W (see FIGS. 1 and 4) is constituted by the water passages denoted by the reference numerals 51, 52, and 54 to 59.

  2 to 4, the cylindrical portion 26 has a connecting gas passage 62 connected to the gas supply passage 53 at the lower end and connected to a radial gas passage 61 formed radially on the upper surface of the cylindrical portion 26 at the upper end. Is formed. The upper bearing support member body 34 is formed with a gas discharge path 63 connected to the radial gas path 61 at the lower end. The gas discharge path 63 includes a lower discharge path 63 a that supplies gas below the bearing 36, and an upper discharge path 63 b that supplies gas to the gas discharge port 43 of the cover 41.

In FIG. 2, a lower gas supply path 64 that extends downward from the gas supply path 53 and passes through the inside of the vortex stator (described later) and the lower bearing support member P3 and supplies gas to the vicinity of the upper portion of the bearing P4 is also provided. ing.
A purge gas passage GS is configured by the gas supply passage 53, the connecting gas passage 62, the radial gas passage 61, the gas discharge passage 63, the lower gas supply passage 64, and the like.

  Therefore, the gas supplied by a gas supply device (not shown) is supplied to the inside from the gas supply path 53 and discharged to the vicinity of the upper and lower sides of the bearing 36 (see FIG. 2) via the gas paths 61 to 63. Similarly, gas is also discharged to the vicinity of the upper portion of the bearing P4 through the lower gas passage 64. When exhaust is performed by the composite turbo molecular pump FP and the degree of vacuum of the ring-shaped flow path (described later) on the intake port 2a side or the outer peripheral side of the vortex pump is increased, the grease used for lubrication by the bearing 36 is increased. Oil is sucked to the vacuum side through the gap between the rotating member and the fixed member.

Therefore, in the pump P according to the first embodiment, gas is supplied to the vicinity of the bearings P4 and 36, and the atmospheric pressure of the grease (pressure around the grease) is kept high, thereby preventing the evaporation / suction of the grease oil. . In Example 1, nitrogen gas is used as the gas. However, the supplied gas is not limited to nitrogen gas and can be changed as appropriate.
In FIGS. 1 and 2, the composite turbo molecular pump cooling water passage W, the purge gas passage GS and the like are passages necessary for forming with a tool, and the composite turbo molecular pump cooling water passage W and the purging gas passage GS are purged. A sealing plug 66 is attached to a passage that does not constitute the gas passage GS.

(Explanation of vortex pump)
(Vortex stator)
FIG. 5 is an illustration of the eddy current pump portion of the composite vacuum pump of the first embodiment, FIG. 5A is a sectional view taken along the line VA-VA of FIG. 5B, and FIG.
FIG. 6 is an explanatory view of a vortex stator of the vortex pump, FIG. 6A is a plan view, and FIG. 6B is a sectional view taken along the line VIB-VIB in FIG. 6A.

  1, 5, and 6, the vortex pump portion P <b> 2 includes a disc-shaped vortex stator 71 fixedly supported by the lower bearing support member P <b> 3. The eddy current stator 71 includes an outer vortex housing portion 72 and an inner vortex stator body 73 formed integrally with the vortex housing portion 72. On the upper end surface of the vortex housing portion 72, a vortex pump intake port 74 communicating with the composite turbo molecular pump exhaust port 28 of the base member body 23 is formed.

  1, 5, and 6, an upper first ring-shaped channel 76 a, an upper second ring-shaped channel 77 a, an upper third ring-shaped channel 78 a, The upper fourth ring-shaped channel 79a is formed concentrically with different radii. The lower ring surface of the vortex housing portion 72 has a lower first ring-shaped channel 76b, a lower second ring-shaped channel 77b, a lower side formed symmetrically with the upper ring-shaped channels 76a to 79a. A third ring-shaped channel 78b and a lower fourth ring-shaped channel 79b (see FIGS. 1, 5B, and 6) are formed.

  In FIG. 6A, arc-shaped channel cut portions 76c to 79c are formed in the ring-shaped channels 76 to 79, and the ring-shaped channels 76 to 79 are not endless ring-shaped. Therefore, with respect to the gas transferred in the clockwise direction in FIG. 6A, the upstream end and the downstream end in the gas transfer direction are set at both ends in the circumferential direction of the flow path cut portions 76c to 79c. Note that a vortex blade passage groove 76d through which a projecting vortex blade, which will be described later, passes is formed in the outermost flow path cut-off portion 76c.

  The first ring-shaped channels 76a and 76b and the second ring-shaped channels 77a and 77b are partitioned by first channel partitions 81a and 81b. Similarly, between the second ring-shaped channels 77a and 77b and the third ring-shaped channels 78a and 78b and between the third ring-shaped channels 78a and 78b and the fourth ring-shaped channels 79a and 79b, It is partitioned off by two flow path partition portions 82a and 82b and third flow path partition portions 83a and 83b. The labyrinth seal 37 is formed on the front end face (upper end face or lower end face) of each flow path partition member 81-83. The labyrinth seals 37 prevent the gas from flowing back from the high pressure inner ring side flow channel to the low pressure outer ring side flow channel.

  An upstream end in the gas transfer direction of the upper first ring-shaped flow path 76a and the vortex pump intake port 74 are connected by an intake path 86 formed to be inclined along the rotation direction of a vortex rotor (described later). The outer end of the intake passage 86 is sealed (sealed) by a seal member (sealing plug) 87 (see FIG. 1). Between the downstream end in the gas transfer direction of the upper first ring-shaped channel 76a and the lower first ring-shaped channel 76b, the first ring-shaped channel 76b is inclined along the rotor rotation direction and penetrates the vortex stator body 73 in the vertical direction. It is connected by one communication channel 88a. In FIG. 7, between the downstream end of the lower first ring-shaped channel 76b in the gas transfer direction and the upstream end of the lower second ring-shaped channel 77b penetrates the lower first channel partition member 81b. It is connected by the formed first inner transition flow path 89a. And between the downstream end of the said lower 2nd ring-shaped flow path 77b and the upper 2nd ring-shaped flow path 77a, it inclines along a rotor rotational direction, and penetrates the eddy current stator main body 73 to an up-down direction. The two communication channels 88b are connected.

  Similarly, the second second passage partitioning member 82a passes through the upper second ring-shaped flow passage 77a between the downstream end in the gas transfer direction and the upper third ring-shaped flow passage 78a in the gas transfer direction upstream end. A third communication channel 88c is connected between the downstream end in the gas transfer direction of the upper third ring-shaped channel 78a and the upstream end in the gas transfer direction of the lower third ring-shaped channel 78b. Connected by. Then, the downstream end in the gas transfer direction of the lower third ring-shaped flow path 78b and the upstream end in the gas transfer direction of the lower fourth ring-shaped flow path 79b are connected by the third inner transition flow path 89c. The downstream end of the side fourth ring-shaped channel 79b in the gas transfer direction and the upstream end of the upper fourth ring-shaped channel 79a in the gas transfer direction are connected by a fourth communication channel 88d. The downstream end of the fourth upper ring-shaped flow path 79a in the gas transfer direction is connected to an exhaust passage 91 that penetrates the vortex stator body 73 and the vortex housing portion 72 from the inside toward the outside. An exhaust port 92 is formed at the downstream end.

FIG. 7 is an explanatory diagram of the order in which gas flows through each gas flow path of the vortex stator.
Therefore, the gas flowing in from the vortex pump intake port 74 during the rotation of the vortex rotor flows through the flow paths 76 to 89 in the order shown in (1) to (8) of FIG.
The vortex flow paths (76 to 91) of the vortex stator of the first embodiment are configured by the flow paths indicated by the reference numerals 76 to 91.

  In FIG. 1, a stator cooling water passage 93 (eddy current pump cooling mechanism) for removing heat generated from the compressed gas, frictional heat at the time of driving the rotor, and the like is provided in the vortex stator 71. The stator cooling water passage 93 includes a stator cooling water supply pipe 93a extending in the radial direction (radial direction) of the vortex stator 71, an arc-shaped pipe (not shown) extending from an inner end of the stator cooling water supply pipe 93a, and the arc shape. And a stator cooling water discharge pipe (not shown) connected to the other pipe. Cooling water is supplied from the outside to each stator cooling water supply pipe 93a.

The lower bearing support member P3 is also connected to the lower bearing support member cooling water supply path 94a for supplying cooling water and the lower bearing support member cooling water supply path 94a to remove frictional heat and the like when the rotor is driven. A lower bearing support member cooling water path 94 (lower bearing support member cooling mechanism) having a plurality of arc-shaped lower bearing support member cooling water paths 94b is disposed.
The structure for cooling the vortex stator 71 and the like is not limited to the structure using the cooling water passages (cooling mechanisms) 93 and 94 and the cooling water, and various conventionally known cooling mechanisms can be used. The shape can also be changed.

(Vortex rotor)
In FIG. 1, a pair of upper and lower vortex rotors 101, 102 are arranged opposite to the upper and lower end faces of the vortex stator body 73. The vortex rotors 101 and 102 are fixed to the rotary shaft 1, and the upper vortex rotor 101 and the lower vortex rotor 102 are inserted between the upper vortex rotor 101 and the lower vortex rotor 102 and rotated in the vertical direction. Positioning is performed by positioning spacers 103 fixed to the shaft 1.

8A and 8B are explanatory views of the rotor of the eddy current pump, FIG. 8A is a longitudinal cross-sectional explanatory view, FIG. 8B is a view seen from VIIIB-VIIIB in FIG. 8A, and FIG. 8C is a view seen from VIIIC-VIIIC in FIG. .
1, 5, and 8, the vortex rotors 101 and 102 include a disc-shaped rotor main body 104 and one end surface (lower surface or upper surface) of the rotor main body 104 toward the first ring-shaped flow path 76 side. A ring-shaped blade support portion 106 formed to protrude, a first ring-shaped stepped portion 107 formed on the inner peripheral side of the blade support portion 106 and concentrically protruding to the ring-shaped flow passages 77 to 79 side, A two-ring-shaped stepped portion 108 and a third ring-shaped stepped portion 109 are provided.

FIG. 9 is an explanatory view of a protruding vortex wing, FIG. 9A is a plan view of the main part, and FIG. 9B is a perspective view of the main part.
8 and 9, the blade support portion 106 supports a protruding vortex blade (vortex blade) 111 that protrudes into the first ring-shaped channels 76a and 76b. As shown in FIG. 8, a plurality of projecting vortex blades 111 are supported in a ring shape on a ring-shaped blade support portion 106, and a plurality of projecting vortex blades 111 arranged in a ring shape project the eddy current cascade. A (ring-shaped swirl cascade) 112 is configured. As shown in FIG. 9B, each protruding vortex blade 111 has an arc-shaped concave surface 111 a having an arc-shaped cross section, and is arranged so that the circumferential concave surface 111 a faces the downstream side in the rotational direction of the vortex rotors 101 and 102. . Since the principle of vortex generation and gas compression / transfer by the protruding vortex blade 111 is conventionally known (for example, see Patent Document 3), detailed description thereof is omitted.

  According to the experiment and research by the present inventors, the shape of the protruding vortex blade 111 (cross-sectional area and blade thickness with respect to the flow path), the interval at which the protruding vortex blade 111 is disposed, the number of the protruding vortex blades 111, the protruding vortex blade 111 The condition that the position to arrange is optimal. That is, (the cross-sectional area of the first ring-shaped flow passage 76 / the cross-sectional area of each protruding vortex blade) is set to 10 to 11, and the protruding vortex blades 111 arranged adjacent to each other along the blade support portion 106 are arranged. It is desirable to set the interval (blade interval) t1 = 2.7 mm to 3 mm. When the blade thickness of one protruding vortex blade 111 is t2, (blade interval t1 / blade thickness t2) = 1.8-2, (blade outer diameter (distance from the rotation center to the outer peripheral edge of the vortex blade)) / Number of vortex blades) = 1.33 to 1.44 is desirable.

FIG. 10 is an explanatory diagram of a stepped portion vortex wing, FIG. 10A is a plan view of a relevant part, and FIG.
8 and 10, the first ring-shaped stepped portion 107, the second ring-shaped stepped portion 108, and the third ring-shaped stepped portion 109 have stepped portion vortex blades (vortex blades) along the radial direction of the stepped portions. A plurality of 113 is formed. Then, as shown in FIG. 10B, a vortex groove 114 having an arc-shaped cross section is formed between the stepped portion vortex blades 113. A plurality of stepped portion vortex blades 113 arranged in a ring form a stepped portion vortex blade row (ring-shaped vortex blade row) 116. Since the principle of vortex generation and gas compression / transfer by the stepped portion vortex blade 113 and the vortex groove 114 is conventionally known (see, for example, Patent Document 1 and Patent Document 2), detailed description thereof is omitted.

  According to the experiments and research of the present inventors, the size of the stepped portion vortex blade 113 and the vortex groove 114 (cross-sectional area and blade thickness with respect to the flow path), the interval at which the stepped portion vortex blade 113 is disposed, the stepped portion vortex blade 113. And the conditions under which the positions where the stepped portion vortex blades 113 are arranged are optimal. That is, (the cross-sectional area of each ring-shaped flow channel 77 to 79 / the cross-sectional area of each vortex groove) = 1.5 to 2, and the ring-shaped stepped portions 107 to 109 are arranged adjacent to each other in the circumferential direction. It is desirable to set the interval between the stepped portion vortex blades 113 (blade interval) t1 ′ = 6.8 mm to 7.8 mm. When the blade thickness of each stepped portion vortex blade 113 is t2 ′, (blade interval t1 ′ / blade thickness t2 ′) = 4.6 to 5.2, (vortex groove outer diameter (vortex groove 114 from rotation center) It is desirable to set (distance to the outer peripheral edge of the stepped portion vortex blade 113) / number of vortex blades) = 2.6-3.

  The vortex stator body 73, the vortex rotors 101 and 102, etc. constitute an eddy current pump KP. The composite vacuum pump P according to the first embodiment is configured by the vortex pump KP, the composite turbo molecular pump FP, and the like.

(Description of grease supply device)
In FIG. 2, the eddy current stator 71 and the lower bearing support member P3 are formed with a lower grease supply path G1 that extends through the vortex stator 71 and the lower bearing support member P3 to the lower bearing P4. . The lower grease supply path G1 has a grease discharge port G1a for supplying grease to the lower bearing P4, and a grease supply port G1b for supplying grease into the grease supply path G1. Similarly, the eddy current stator 71, the base member main body 23, and the upper bearing support member main body 34 are formed with an upper grease supply path G2 that extends through the inside of each member (71, 23, 34) to the upper bearing 36. Has been. The upper grease supply path G2 also has a grease discharge port G2a and a grease supply port 2b (see FIG. 11 described later).

FIG. 11 is an explanatory cross-sectional view of the grease supply device.
2 and 11, a grease supply device GP for supplying grease to the bearings P4 and 36 is arranged on a side portion of the vortex stator 71. The grease supply device GP includes a grease container 121 in which a flange portion 121a for fixing and supporting the vortex stator 71 with bolts (not shown) is formed. The grease accommodating container 121 includes a first grease accommodating portion 122 that accommodates grease for lubricating the lower bearing P4, a second grease accommodating portion 123 that accommodates grease for lubricating the upper bearing 36, and the first grease. Between the storage part 122 and the 2nd grease storage part 123, it has the thread groove 124 formed penetrating in the up-down direction (Z-axis direction).

  A first grease supply port 126 and a first grease supply port 126 communicated with the grease supply ports G1b and G2b of the lower grease supply path G1 and the upper grease supply path G2, respectively, at the upper end portions (+ Z end portions) of the respective grease storage portions 122 and 123. A 2 grease supply port 127 is formed. As shown in FIG. 11, check valves 128, 128 are disposed at the respective grease supply ports 126, 127, and prevent the grease from flowing back to the grease accommodating portions 122, 123, and bearings P 4, When the degree of vacuum on the 36th side becomes high, the grease in the grease accommodating portions 122 and 123 is prevented from being sucked into the grease supply paths G1 and G2. In addition, an O-ring 129 for preventing the grease from leaking is disposed on the outer periphery of each of the grease supply ports 126 and 127.

  In FIG. 11, pistons (grease pushing members) 131 and 132 are fitted in the respective grease accommodating portions 122 and 123. Caps 133 and 133 for pushing grease upward are fixed to the upper ends of the pistons 131 and 132 with screws. In addition, O-rings 134 and 134 for preventing the grease from leaking out between the grease accommodating portions 122 and 123 and the pistons 131 and 132 are disposed on the outer peripheral surfaces of the pistons 131 and 132. Note that a lubricating member 135 for reducing friction when the pistons 131 and 132 move is provided at the lower end portions of the inner peripheral surfaces of the grease accommodating portions 122 and 123.

  A connecting member 136 is disposed at the lower end (−Z end) of the pistons 131 and 132. The connecting member 136 is screwed to the lower ends of the pistons 131 and 132. A motor support bracket 136 a that is curved downward is attached to the connecting member 136. A grease supply motor MG is fixedly supported on the lower surface of the motor support bracket 136a. The grease supply motor MG has a rotating shaft 137, and the rotating shaft 137 has a substantially half-moon shaped cross-section with a part of a cylinder cut out.

  In FIG. 11, a screw (screw thread forming member) 138 is screwed into the screw groove 124 of the grease container 121, and the rotating shaft 137 of the grease supply motor MG is connected to the screw head 138a of the screw 138. Has been. The screw head 138a is formed with a rotation stopper mounting hole 138b, and the rotation stopper mounting hole 138b is mounted with a rotation stopper 138c. The rotation stopper 138c is engaged with a notch portion of the rotation shaft 137, and the rotation shaft 137 and the screw 138 are integrally rotatable. The upper end surface (+ Z end surface) of the screw head 138a is in contact with the connecting member 136, and the contact portion of the connecting member 136 has a low friction member 136b for reducing friction when the screw 138 rotates. Is arranged.

Therefore, when the grease supply motor MG is driven, the rotating shaft 137 and the screw 138 rotate and move upward along the screw groove 124 into which the screw 138 is screwed. As the screw 138 and the rotating shaft 137 move, the pistons 131 and 132 integrally move upward, and the grease accommodated in the grease accommodating portions 122 and 123 passes from the grease supply ports 126 and 127 to the grease supply path G1. Supplied to G2.
An automatic grease supply member 139 is configured by the screw groove 124, the screw 138, the grease supply motor MG, and the like.
Therefore, it is possible to easily replenish the grease as compared with the case where the operator manually replenishes the grease using a syringe or the like, and the replenishment amount is controlled by controlling the rotation amount of the grease supply motor MG. It can be adjusted easily and accurately.

(Description of Control Unit of Composite Vacuum Pump P of Example 1)
FIG. 12 is a block diagram (function block diagram) illustrating each function provided in the control unit of the composite vacuum pump according to the first embodiment.
In FIG. 12, the controller C of the composite vacuum pump P includes an I / O (input / output interface) that performs input / output of signals to / from the outside and adjustment of the input / output signal level, programs and data for performing necessary processing. ROM (read-only memory) in which data are stored, RAM (random access memory) for temporarily storing necessary data, and CPU (central processing unit) that performs processing in accordance with programs stored in the ROM And a microcomputer having a clock oscillator or the like, and various functions can be realized by executing a program stored in the ROM or the like.

(Signal input element connected to the controller C)
The controller C receives signals from a control panel (console panel) CP and other signal input elements.
The control panel CP includes a power switch SW1 which is a main power source of the composite vacuum pump P, an exhaust switch SW2 for starting / stopping exhaust of the composite vacuum pump P, and the like. Then, the detection signal is input to the controller C.

(Control element connected to the controller C)
The controller C is connected to an exhaust motor drive circuit D1, a grease supply motor drive circuit D2, a cooling water supply device drive circuit D3, a gas supply device drive circuit D4, a power supply circuit (not shown), and other control elements. The operation control signal is output.
The exhaust motor drive circuit D1 drives the rotary shaft 1 to rotate at a predetermined rotational speed (for example, 10,000 revolutions per minute) via the exhaust motor M.

The grease supply motor drive circuit D2 moves the pistons 131 and 132 via the grease supply motor MG.
The cooling water supply device drive circuit D3 includes a cooling water supply device (not shown) for the composite turbomolecular pump cooling water channel W, a stator cooling water channel (pump cooling mechanism) 93, a lower bearing support member cooling water channel 94 ( A cooling water supply device for supplying cooling water to the lower bearing support member cooling mechanism) is operated.
The gas supply device drive circuit D4 operates a gas supply device (not shown).

(Function of the controller C)
The controller C has a function (control means) for executing a process according to an output signal from each signal output element and outputting a control signal to each control element. The function (control means) of the controller C will be described next.
C1: Exhaust motor rotation control means The exhaust motor rotation control means C1 controls the rotational drive of the exhaust motor M via the exhaust motor drive circuit.

C2: Grease supply motor control means The grease supply motor control means C2 includes an exhaust motor driving time count timer TM1, a grease supply start determination time storage means C2A, a grease supply start determination means C2B, and a grease supply motor rotation amount storage means C2C. And have. The grease supply motor control means C2 controls the drive of the grease supply motor MG via the grease supply motor drive circuit D2.
TM1: Exhaust motor drive time count timer The exhaust motor drive time count timer TM1 counts a count value (integrated value) t1 of the time when the exhaust motor M is driven to rotate in response to the on / off of the exhaust switch SW1. The count value t1 is stored in a non-volatile memory and is stored even if the power switch SW1 of the composite vacuum pump P is turned off unless reset (initialized).

C2A: Grease supply start determination time storage means The grease supply start determination time storage means C2A stores a grease supply start determination time ta that is a threshold for determining whether or not it is time to start grease supply.
C2B: Grease supply start determining means Whether the grease supply start determining means C2B has reached the time to start supplying grease based on the count value t1 of the exhaust motor drive time count timer TM1 and the grease supply start determining time ta Determine whether or not.

C2C: Grease supply motor rotation amount storage means The grease supply motor rotation amount storage means C2C stores the rotation amount (grease supply motor rotation amount) that the grease supply motor MG rotates when supplying grease. The rotation amount of the grease supply motor MG corresponding to the set supply amount of grease supplied at a time is set as the rotation amount.
C3: Cooling water supply device control means The cooling water supply device control means C3 is a cooling water supply device (not shown) for supplying cooling water to the cooling water passages W, 93, 94 via the cooling water supply device drive circuit D3. ) Etc. are controlled. The cooling water supply device control means C3 of the first embodiment performs control to open the valve of the cooling water supply device to supply water when the exhaust switch SW2 is turned on and close the valve when the exhaust switch SW2 is turned off. . In the first embodiment, the supply of the cooling water is automatically started when the exhaust by the pump P is started. For example, the cooling water passages W, 93 and 94 are connected to the taps of the water supply, and the operator plugs them. It is also possible to configure such that water supply is started manually by opening the hole.

C4: Gas supply device control means The gas supply device control means C4 controls the operation of the gas supply device (not shown) via the gas supply device drive circuit D4. The gas supply device control means C4 of the first embodiment opens a valve of the gas supply device to supply a predetermined amount of gas when the exhaust switch SW2 is turned on, and closes the valve when the exhaust switch SW2 is turned off. To control. In the first embodiment, gas supply is automatically performed at the start of exhaust. However, it is also possible for the operator to manually supply gas by opening and closing a valve. In the first embodiment, a predetermined amount of gas is supplied. However, for example, the gas supply amount can be controlled to increase in accordance with a decrease in the atmospheric pressure of the grease.

(Explanation of flowchart)
(Description of main flowchart)
FIG. 13 is a flowchart of the grease supply process of the composite vacuum pump according to the first embodiment of the present invention.
Processing of each ST (step) in the flowchart of FIG. 13 is performed according to a program stored in the ROM or hard disk of the controller C. Further, this process is executed in parallel with other various processes (exhaust motor rotation control process and the like) of the composite vacuum pump P.
The flowchart shown in FIG. 13 is started when the power switch SW1 of the composite vacuum pump P is turned on.

In ST1 of FIG. 13, it is determined whether or not the exhaust switch SW2 of the control panel CP is turned on. If yes (Y), the process proceeds to ST2, and if no (N), ST1 is repeated.
In ST2, time measurement (time counting) by the exhaust motor drive time count timer TM1 is started (restarted). Then, the process proceeds to ST3.
In ST3, it is determined whether or not the exhaust switch SW2 is turned off. If yes (Y), the process proceeds to ST4, and, if no (N), the process proceeds to ST5.
In ST4, since the exhaust is finished, the time measurement by the exhaust motor drive time count timer TM1 is finished (interrupted). Then, the process returns to ST1.

In ST5, it is determined whether or not the count value t1 of the exhaust motor drive time count timer TM1 is equal to or longer than the grease supply start determination time ta. If yes (Y), the process proceeds to ST6, and, if no (N), the process returns to ST3.
In ST6, the following processes (1) and (2) are executed, and the process returns to ST3.
(1) Reset the count value t1 of the exhaust motor drive time count timer TM1.
(2) The grease supply motor MG is rotationally driven by the amount of grease supply motor rotation.

(Operation of Example 1)
In the composite vacuum pump P of Example 1 having the above-described configuration, when the rotary shaft 1 is rotationally driven by the exhaust motor M, the turbo molecular pump rotor portion 6a, the thread groove type pump rotor portion 6b, the vortex rotors 101 and 102, and the like are provided. Rotation drive. Then, the gas in the vacuum chamber communicating with the pump inlet 2a is transferred downward while being compressed by the moving blade 7 and the stationary blade 4 in the turbo molecular pump TMP, and further by the thread 8 of the thread groove type pump SP. Compressed and transported downward. Then, it is transported upward while being compressed between the composite turbomolecular pump rotor 6 and the thread groove pump stator 11 by the thread 14 of the thread groove pump SP, and finally the composite turbomolecular pump exhaust port. 28. The gas transferred to the composite turbo molecular pump exhaust port 28 flows in from the vortex pump intake port 74, is transferred while being sequentially compressed in the vortex flow channel (76 to 91), and is exhausted from the exhaust port 92.

  In the composite vacuum pump P according to the first embodiment, the vortex rotors 101 and 102 include the vortex blade row 112 of the protruding vortex blade 111 having high gas compressibility and the vortex blade of the stepped portion vortex blade 113 that requires a small driving force. A row 116 is arranged. Therefore, for example, as compared with the case where only the vortex blade row 112 of the protruding vortex blade 111 is configured (in the case of Patent Document 3 or the like), the driving force when the vortex rotors 101 and 102 are rotationally driven can be reduced. A small and low power consumption exhaust motor M can be used. Further, for example, as compared with a case where only the vortex blade row 116 of the stepped portion vortex blade 113 is configured (in the case of Patent Documents 1 and 2, etc.), the outer diameter of the vortex rotors 101 and 102 is increased without increasing the number of stages. Gas compression performance can be enhanced. Therefore, the composite vacuum pump P of Example 1 can be reduced in size and energy saving while improving the compression performance and the like. Further, since the eddy current rotors 101 and 102 can be reduced in size while improving the compression performance and the like, a force (stress, axial load, etc.) acting on the bearings (bearings P4 and 36) of the rotary shaft 1 by driving the eddy current rotors 101 and 102 is obtained. Can be reduced. As a result, the life of members such as the bearings P4 and 36 can be extended.

  In the composite vacuum pump P of the first embodiment, the vortex cascade 112 of the protruding vortex blade 111 is disposed on the outermost periphery, and the vortex cascade 116 of the stepped vortex blade 113 is disposed in three stages on the inner periphery side. Yes. Accordingly, the gas compression performance on the outer peripheral side can be efficiently enhanced by the ring-shaped vortex blade row 112 of the protruding vortex blade 111 having a high peripheral speed and high compression performance because it is arranged on the outer peripheral side. The ring-shaped vortex blade row 116 of the stepped portion vortex blade 113 is disposed on the inner peripheral side, which is less likely to improve the compression performance because the peripheral speed is slow, but the driving force is less likely to affect the rotational driving force of the motor. Thus, the rotational driving force can be effectively suppressed. As a result, it is possible to use a motor that does not have a large driving force, and the composite vacuum pump P can be reduced in size, cost, and power consumption.

  Furthermore, in the composite vacuum pump P of Example 1, ring-shaped flow paths 76 to 79 are formed on the upper and lower end faces (both front and rear end faces) of the vortex stator main body 73, and the vortex flows corresponding to the ring-shaped flow paths. The vortex rotors 101 and 102 are arranged above and below the stator body 73 so as to face each other. Therefore, when the composite vacuum pump P is manufactured, it is not necessary to divide and manufacture the vortex stator main body 73 and the vortex rotors 101 and 102 can be assembled from above and below. Therefore, the manufacturability and assembly of the vortex pump KP can be improved.

  Further, in the composite vacuum pump P of the first embodiment, the gas flowing in from the vortex pump intake port 74 is, as shown in FIG. 7, the intake path 86 → the upper first ring-shaped flow path 76a → the first communication flow path 88a. → lower first ring-shaped channel 76b → first inner transition channel 89a → the lower second ring-shaped channel 77b → second communication channel 88b → upper second ring-shaped channel 77a → second inner transition Channel 89b → Upper third ring-shaped channel 78a → Third communication channel 88c → Lower third ring-shaped channel 78b → Third inner transition channel 89c → Lower fourth ring-shaped channel 79b → Fourth The air passes through the communication flow path 88d → the fourth upper ring-shaped flow path 79a → the exhaust path 91 and is exhausted from the exhaust port 92. Therefore, since it passes through the ring-shaped channels 76 to 79 formed on the upper and lower end surfaces of the vortex stator body 73, compared to the case where the ring-shaped channel is formed only on the front surface or the back surface with the same outer diameter, The length of the flow path is doubled or more, and the compression performance is increased. Therefore, even if the outer diameters of the vortex stator main body 73 and the vortex rotors 101 and 102 are reduced to about ½ compared to the case where the ring-shaped flow path is formed only on one side, the compression performance and the exhaust performance equal to or higher than that. Can be obtained. Therefore, the outer diameters of the vortex stator main body 73 and the vortex rotors 101 and 102 can be reduced while improving the gas compression performance and exhaust performance. As a result, the eddy current pump KP and the composite vacuum pump P can be reduced in size.

  Further, since the vortex rotors 101 and 102 arranged to be opposed to the upper and lower sides of the vortex stator 71 are rotationally driven, the upper surface of the upper vortex rotor 101 and the lower surfaces of the composite turbo molecular pump base member 21 and the motor support member 29 are There is a narrow gap between the lower vortex rotor 102 and the lower bearing support member P3. In this gap (portion where the labyrinth seal 37 is disposed), the gas in the outermost upper first ring-shaped flow path 76a or the lower first ring-shaped flow path 76b leaks and flows, so the pressure in this gap is The pressure is approximately the same as or lower than the pressure in the first ring-shaped flow paths 76a and 76b. In the upper vortex rotor 101, the gas is compressed in the inner circumferential ring-shaped flow path and the pressure becomes higher. Therefore, the upper surface of the vortex rotor 101 below the pressure of the outermost first ring-shaped flow path 76a and the pressure A pressure difference is generated between the lower surface of the vortex rotor 101 having a high value.

As a result, a force from the lower (high pressure) to the upper (low pressure) acts on the upper vortex rotor 101, and a force from the upper (high pressure) to the lower (low pressure) acts on the lower vortex rotor 102. Although this force acts on the bearings P4 and 36 of the rotating shaft 1, the direction of the force acting on the upper vortex rotor 101 and the direction of the force acting on the lower vortex rotor 102 are opposite to each other. A load (axial load) acting in the axial direction in the bearings 36 and P4 is canceled out.
Therefore, the conventional technology (see Patent Document 3, etc.) has a problem that the bearing life is shortened due to the axial load and the repeated load. However, in the composite vacuum pump P of the first embodiment, the forces acting on the bearings 36 and P4 are offset. Thus, the life of the bearings 36 and P4 can be extended.

  In the composite vacuum pump P of the first embodiment, in the vortex stator main body 73, the ring-shaped flow paths 76b, 78b on the lower surface side from the ring-shaped flow paths 76a, 78a on the upper surface side, or the ring-shaped flow path 77b on the lower surface side. 79b, the gas passes through the communication channels 88a to 88d when the gas is transferred to the ring-shaped channels 77a and 79a on the upper surface side. In conventional eddy current pumps (see Patent Documents 1 to 4), a stator having a step-like flow path in which gas is sequentially transferred from an upper ring-shaped flow path to a lower ring-shaped flow path, Since the stator to which the gas is transferred to the side is used, there is a problem that the gas flows backward (gas leakage or return) from the gap between the stator and the rotor between the adjacent flow paths. However, in the vortex stator main body 73 of the first embodiment, gas does not flow backward in the communication flow paths 88a to 88d, so that the possibility of reverse flow is reduced as compared with the prior art when viewed in the entire flow path. Can do.

Further, since the outer diameter can be reduced, it is possible to use the exhaust motor M having a small rotational driving force, and it is possible to reduce the load applied to the bearings (bearings) P4 and 36 during the rotational driving. As a result, the eddy current pump KP and the composite vacuum pump P can be extended in life.
Further, in the composite vacuum pump P of the first embodiment, heat generated from the gas compressed in the ring-shaped flow paths 76 to 79 by the cooling water flowing through the stator cooling water passage (pump cooling mechanism) 93, the vortex rotor 101, Friction heat and the like due to friction between the vortex blades 111 and 113 and the gas during the 102 rotation drive can be removed, and the vortex stator body 73 can be directly cooled. As a result, it is possible to prevent the exhaust performance from changing due to a change in dimensions due to thermal expansion of members such as the vortex stator main body 73 and the vortex rotors 101 and 102. Further, since the vortex stator main body 73 is cooled, the gas transferred through the ring-shaped channels 76 to 79 can be cooled via the wall surfaces of the ring-shaped channels 76 to 79. When the gas is cooled, the volume of the gas is reduced, so that the exhaust efficiency is increased and the exhaust performance can be improved.

  In the composite vacuum pump P according to the first embodiment, the screw groove type pump SP having high compression / exhaust performance in the medium vacuum region is arranged on the upstream side in the gas transfer direction of the vortex pump KP, and further on the upstream side in the gas transfer direction. In addition, a turbo molecular pump TMP having high compression / exhaust performance in a high vacuum region is arranged. Therefore, the gas is compressed by the turbo molecular pump TMP to the middle vacuum region where the exhaust performance of the thread groove pump SP is high, and the gas is compressed by the thread groove pump SP to the low vacuum region where the compression performance of the vortex pump KP is high. It is also possible to compress and exhaust the gas to about atmospheric pressure by the vortex pump KP. As a result, it is possible to evacuate the vacuum chamber (vacuum chamber) communicating with the intake port 2a to the high vacuum region by the composite vacuum pump P of the first embodiment without requiring another pump (previous pump, back pump). it can.

(Modification of Example 1)
In the vortex pump KP of the first embodiment, the gas is transferred by the ring-shaped flow paths 76 to 79 of the vortex stator body 73 in the order of the upper surface side → the lower surface side → the lower surface side → the upper surface side →. Since the protruding vortex blades 111 having high gas compression performance are arranged in the flow paths 76a and 76b, the gas compression performance in the upper first ring-shaped flow paths 76a and 76b is improved. Therefore, the difference (pressure difference) between the gas pressure in the adjacent upper first ring-shaped channel 76a and the gas pressure in the upper second ring-shaped channel 77a becomes large. As a result, the possibility that exhaust gas may return from the labyrinth seal 37 portion of the first flow path partition member 81a may increase, and the upper second ring passes through the gap between the first flow path partition portion 81a and the vortex rotor 101. The gas may return (reversely flow) from the annular channel 77a side to the upper first ring-shaped channel 76a.

FIG. 14 is an explanatory diagram of the order in which gas flows through the gas flow paths of the vortex stator according to the modification of the first embodiment, and corresponds to FIG.
Therefore, in the vortex pump KP of the modified example of the first embodiment, the configurations of the vortex stator main body 73 and the vortex rotors 101 and 102 are changed so that the gas is transferred in the order shown in FIG. That is, the upper second ring-shaped channel 77a is omitted, and gas is transferred from the lower second ring-shaped channel 77b to the lower third ring-shaped channel 78b via the second inner transition channel 89b ′. It is configured. Along with this, the downstream side flow path becomes the lower third ring-shaped flow path 78b → the third communication flow path 88c → the upper third ring-shaped flow path 78a → the third inner transition flow path 89c → the upper fourth ring shape. The flow path 79 a is changed to the fourth communication flow path 88 d → the lower fourth ring-shaped flow path 79 b → the exhaust path 91.

  Therefore, the distance between the upper first ring-shaped channel 76a and the upper third ring-shaped channel 78a is larger than the distance between the upper first ring-shaped channel 76a and the upper second ring-shaped channel 77a. ing. Therefore, by arranging a large number of labyrinth seals 37 in the gaps between them, the occurrence of backflow can be reduced as compared with the case of the first embodiment.

FIG. 15 is an explanatory diagram of the composite vacuum pump according to the second embodiment of the present invention, and corresponds to FIG. 1 according to the first embodiment.
In the description of the second embodiment, components corresponding to those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
The second embodiment is different from the first embodiment in the following points, but is configured in the same manner as the first embodiment in other points.
In the composite vacuum pump P ′ of the second embodiment, the turbo molecular pump TMP (the stationary blade 4, the moving blade 7, etc.) of the first embodiment is omitted.

(Operation of Example 2)
In the composite vacuum pump P ′ of the second embodiment having the above-described configuration, the turbo molecular pump TMP is omitted, so that the compression / exhaust performance in the high vacuum region is lower than that of the composite vacuum pump P of the first embodiment. doing. In other words, if there is no need to evacuate to the high vacuum range depending on the user's needs and usage environment, and it is only necessary to evacuate to the middle vacuum range, the turbo molecular pump TMP can be omitted to reduce manufacturing costs and maintenance costs. Can do. Regarding the other vortex pump KP portion, the composite vacuum pump P ′ of the second embodiment has the same effects as the composite vacuum pump P of the first embodiment.

FIG. 16 is an explanatory diagram of a composite vacuum pump according to a third embodiment of the present invention, and corresponds to FIG. 1 according to the first embodiment.
In the description of the third embodiment, components corresponding to those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
The third embodiment is different from the first and second embodiments in the following points, but is configured in the same manner as the first and second embodiments in other points.
In the pump P ″ of the third embodiment, the turbo molecular pump TMP (the stationary blade 4, the moving blade 7, etc.) and the thread groove type pump SP (the screw threads 8, 14, etc.) of the first embodiment are omitted.

(Operation of Example 3)
In the pump P ″ of the third embodiment having the above-described configuration, the turbo molecular pump TMP and the thread groove type pump SP are omitted. Therefore, compared to the composite vacuum pump P of the first embodiment, a high vacuum region and a medium vacuum region. In other words, when it is sufficient to evacuate to a low vacuum range due to user needs, etc., or when it is desired to evacuate to a pressure lower than atmospheric pressure (that is, a normal pump, not a vacuum pump). In the case of use as a pump), the manufacturing cost and maintenance cost can be reduced by omitting the turbo molecular pump TMP and the thread groove type pump SP. P ″ has the same effects as the composite vacuum pump P of the first embodiment. In the pump P ″ of the third embodiment, the composite turbo molecular pump part P1 is further omitted, and the length of the rotary shaft 1 is adjusted to be short so that the vortex pump inlet (inlet) 74 is directly exhausted. It is also possible to connect to the exhaust chamber (or vacuum chamber).

As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. Modification examples (H01) to (H09) of the present invention are exemplified below.
(H01) In each of the embodiments described above, the vortex stator body 73 is formed with four stages of ring-shaped flow paths 76 to 79, but the number of stages can be changed as appropriate.
(H02) In each of the above embodiments, only the portion corresponding to the first ring-shaped flow path 76 is configured by the vortex blade row 112 of the protruding vortex blade 111, but not only the outermost periphery but also several stages on the outer periphery side, for example, It is also possible to provide the swirl blade row 112 of the protruding swirl blade 111 at portions corresponding to the first ring-shaped flow channel 76 and the second ring-shaped flow channel 77.

(H03) In each of the above-described embodiments, the thread groove type pump SP and the turbo molecular pump TMP are arranged on the upstream side in the gas transfer direction of the vortex pump KP. However, the present invention is not limited to these pumps, and an arbitrary pump such as a centrifugal pump or a cryopump. It is also possible to combine these pumps. Since the vortex pump KP is a dry pump, it is preferable that the pump connected to the upstream side is also a dry pump.
(H04) In each of the above-described embodiments, the bearings P4 and P36 are rolling bearings that are lubricated with grease. However, the bearings P4 and 36 can be changed to conventionally known bearings such as magnetic bearings.

(H05) In each of the above-described embodiments, a known grease automatic supply device can be used instead of the grease automatic supply member 139. Further, the present invention is not limited to automatic supply. For example, an operator manually replenishes grease using a syringe or the like, omits the grease supply motor MG, and manually rotates the screw 138 to supply grease. It is also possible to use a supply member.
(H06) In each of the above-described embodiments, two types of vortex blades, ie, the projecting vortex blade 111 and the stepped portion vortex blade 113, are used as the vortex blades. Can do. For example, instead of the stepped portion vortex blade 113, a turbulent cascade of turbine blade-shaped vortex blades (a turbine blade having a short radial length (see vortex blades, moving blade 7)) is fixed to a ring-shaped stepped portion. It is also possible to use a combination of three or more types of vortex blades.

(H07) In each of the above embodiments, the depth and cross-sectional shape of the ring-shaped channels 76 to 79 and the size and shape of the vortex blades 111 and 113 may be appropriately changed to change the compression performance of each stage. Is possible. Therefore, for example, it is possible to arrange the stepped portion vortex blade having high compression performance by adjusting the shape or the like on the outer peripheral side, and to arrange the projecting vortex blade whose driving resistance is adjusted to be small on the inner peripheral side.
(H08) In each of the above embodiments, the ring-shaped flow paths 76 to 79 are connected in the order of upper side → lower side → lower side → upper side →..., But the order of connection can be changed as appropriate. For example, the upper ring-shaped flow paths 76a to 79a are sequentially connected from the outer peripheral side to the inner peripheral side, and the lower ring-shaped flow paths 76b to 79b are sequentially connected from the outer peripheral side to the inner peripheral side. The gas compressed in the flow paths 76a to 79a may be further compressed in the lower ring-shaped flow paths 76b to 79b.
(H09) In the first and second embodiments, the composite turbo molecular pump exhaust port 28 is directly connected to the vortex pump intake port 74, but it can also be connected through a pipe or the like.

FIG. 1 is an explanatory cross-sectional view of a composite vacuum pump according to a first embodiment of the present invention. FIG. 2 is a cross-sectional explanatory view of the composite vacuum pump according to the first embodiment of the present invention, and is a cross-sectional explanatory view illustrating a grease supply path and a purge gas supply path to the bearing. FIG. 3 is a perspective view for explaining the cooling water passage and the gas passage of the base member of the composite turbo molecular pump unit. FIG. 4 is a plan view for explaining the cooling water passage and the purge gas passage of the base member of the composite turbo molecular pump section. FIG. 5 is an illustration of the eddy current pump portion of the composite vacuum pump of the first embodiment, FIG. 5A is a sectional view taken along the line VA-VA of FIG. 5B, and FIG. FIG. 6 is an explanatory view of a vortex stator of the vortex pump, FIG. 6A is a plan view, and FIG. 6B is a sectional view taken along the line VIB-VIB in FIG. 6A. FIG. 7 is an explanatory diagram of the order in which gas flows through each gas flow path of the vortex stator. 8A and 8B are explanatory views of the rotor of the eddy current pump, FIG. 8A is a longitudinal cross-sectional explanatory view, FIG. 8B is a view seen from VIIIB-VIIIB in FIG. 8A, and FIG. 8C is a view seen from VIIIC-VIIIC in FIG. . FIG. 9 is an explanatory view of a protruding vortex wing, FIG. 9A is a plan view of a main part, and FIG. FIG. 10 is an explanatory diagram of a stepped portion vortex wing, FIG. 10A is a plan view of a main part, and FIG. 10B is a perspective view of a main part. FIG. 11 is an explanatory cross-sectional view of the grease supply device. FIG. 12 is a block diagram (function block diagram) illustrating each function provided in the control unit of the composite vacuum pump according to the first embodiment. FIG. 13 is a flowchart of the grease supply process of the composite vacuum pump according to the first embodiment of the present invention. FIG. 14 is an explanatory diagram of the order in which gas flows through the gas flow paths of the vortex stator according to the modification of the first embodiment, and corresponds to FIG. FIG. 15 is an explanatory diagram of the composite vacuum pump according to the second embodiment of the present invention, and corresponds to FIG. 1 according to the first embodiment. FIG. 16 is an explanatory diagram of a composite vacuum pump according to a third embodiment of the present invention, and corresponds to FIG. 1 according to the first embodiment.

Explanation of symbols

1 ... rotating shaft,
2, 72 ... housing,
2a, 74 ... intake port,
92 ... exhaust port,
71 ... Eddy current stator,
73 ... Stator body,
76-79, 76a, 76b, 77a, 77b, 78a, 78b, 79a, 79b ... ring-shaped flow path,
88 ... Communication channel,
93 ... pump cooling water channel,
101, 102 ... vortex rotor,
104 ... rotor body,
107-109 ... ring-shaped step part,
111 ... Projecting swirl wing,
111, 113 ... vortex wings,
112, 116 ... Ring-shaped swirl cascade,
113 ... Stepped part vortex wing,
P, P ', P "... pump,
SP ... thread groove type pump,
TMP ... Turbo molecular pump.

Claims (8)

A pump comprising the following structural requirements (A01) to (A04);
(A01) A housing that rotatably supports a rotary shaft that is driven to rotate;
(A02) A disc-shaped rotor body fixed to the rotating shaft and rotatably supported with respect to the housing, and arranged at predetermined intervals along a plurality of concentric circles having different radii on the end surface of the rotor body. A plurality of ring-shaped vortex blade rows composed of a plurality of vortex blades, and a vortex rotor,
(A03) having a stator body that is non-rotatably supported by the housing, and a plurality of ring-shaped passages formed in the stator body corresponding to the plurality of ring-shaped vortex blade rows, and rotating the vortex rotor An eddy current stator that compresses and discharges gas by generating eddy currents in the ring-shaped flow path sometimes,
(A04) The ring-shaped vortex blade row composed of the vortex blades having a shape with a relatively high gas compression performance and a large driving resistance when rotating the vortex rotor, and the compression performance is relatively low and The plurality of ring-shaped vortex blade rows having the ring-shaped vortex blade row composed of the vortex blades having a small drive resistance. The pump according to claim 1, comprising the following constituent elements (A05) and (A06):
(A05) The ring-shaped vortex flow having the vortex blade formed by protruding vortex blades that protrude from the end face of the rotor main body into the ring-shaped flow path and have a relatively high compression performance and a large driving resistance. It is formed of a blade row, a ring-shaped stepped portion formed in a ring shape on the end surface of the rotor body, and a stepped portion vortex blade having a relatively small compression performance and a small driving resistance. A plurality of the ring-shaped vortex blade rows having the ring-shaped vortex blade row having the vortex blades;
(A06) The ring-shaped vortex blade row having the protruding vortex blades is arranged on the outer peripheral side and the gas transfer direction upstream side of the plurality of ring-shaped vortex blade rows arranged concentrically, and the inner peripheral side and the gas transfer The vortex rotor in which the ring-shaped vortex blade row having the stepped portion vortex blade is arranged on the downstream side in the direction. The pump according to claim 1 or 2, comprising the following constituent elements (A07) and (A08):
(A07) The ring-shaped flow path formed on both front and back end surfaces of the stator body,
(A08) A pair of the vortex rotors disposed so as to be opposed to the front and back end faces of the stator body. A pump characterized by comprising the following structural requirements (A01) to (A03), (A07), (A08),
(A01) A housing that rotatably supports a rotary shaft that is driven to rotate;
(A02) A disc-shaped rotor body fixed to the rotating shaft and rotatably supported with respect to the housing, and arranged at predetermined intervals along a plurality of concentric circles having different radii on the end surface of the rotor body. A plurality of ring-shaped vortex blade rows composed of a plurality of vortex blades, and a vortex rotor,
(A03) having a stator body that is non-rotatably supported by the housing, and a plurality of ring-shaped passages formed in the stator body corresponding to the plurality of ring-shaped vortex blade rows, and rotating the vortex rotor An eddy current stator that compresses and discharges gas by generating eddy currents in the ring-shaped flow path sometimes,
(A07) The ring-shaped flow path formed on both front and back end surfaces of the stator body,
(A08) A pair of the vortex rotors disposed so as to be opposed to the front and back end faces of the stator body. The pump according to claim 3 or 4, comprising the following constituent elements (A09):
(A09) The downstream end in the gas transfer direction of the ring-shaped flow path formed on either one of the front and back surfaces of the stator body, and the ring shape formed on the other surface side of the front and back surfaces of the stator body The said eddy current stator which has a connecting flow path which connects the gas transfer direction upstream end of a flow path. The pump according to any one of claims 1 to 5, comprising the following constituent elements (A010):
(A010) A pump cooling mechanism disposed inside the stator body. The pump according to any one of claims 1 to 6, comprising the following constituent elements (A011):
(A011) A thread groove type pump disposed on the upstream side in the gas transfer direction of the intake port formed at the upstream end of the ring-shaped channel in the gas transfer direction. The pump according to any one of claims 1 to 7, comprising the following constituent elements (A012):
(A012) A turbo molecular pump disposed on the upstream side in the gas transfer direction of the intake port formed at the upstream end in the gas transfer direction of the ring-shaped channel.

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