JP2005227743A - Light valve, light valve substrate, microlens member used for the same, electro-optic device and electronic appliance - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light valve using a microlens in which brightness in the center portion and in the peripheral portion part of the light valve can be made uniform. <P>SOLUTION: The light valve to be used for a projection type projector has a plurality of light accepting parts arranged in a matrix corresponding to the pixels of an image to be displayed, a light-shielding matrix part 201 having a plurality of openings 201h to introduce the incident light to the respective plurality of light accepting parts, and a microlens part 74 having a plurality of microlenses 74h disposed corresponding to the respective openings 201h. Each microlens 74h is located, in the plane where the microlenses 74h are disposed, offset from the intersection 74hc of the axis passing the center of the opening 201h and the plane toward the outer periphery by an offset amount dhy in accordance with the main angle θhy of the light entering the respective opening 201h. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a light valve, a light valve substrate, a microlens member used therefor, an electro-optical device, and an electronic device, and in particular, a light valve that can make the brightness of the central portion and the peripheral portion of the light valve uniform. The present invention relates to a light valve substrate, a microlens member used therefor, an electro-optical device, and an electronic apparatus.

  2. Description of the Related Art Conventionally, liquid crystal display devices are used not only for display monitor devices but also for projection projector devices and the like as light valves. In particular, in a light valve for a projection type projector device, a TFT (Thin Film Transistor) driving type liquid crystal display device is often used to meet the demand for high definition and large screen display.

The TFT driving type liquid crystal display device is configured so that light is not applied to the TFT or the like by using a light shielding layer for the TFT and the signal wiring. The light shielding layer has a stripe structure or a matrix structure. The latter light blocking matrix structure is particularly called a black matrix. Furthermore, in order to realize a high-definition display, if the number of pixels is increased while keeping the size of the liquid crystal display device as it is, the aperture ratio decreases, so that a microlens is used to increase the light utilization efficiency. This is because light utilization efficiency is improved by condensing light including light in the black matrix region with a microlens (see, for example, Patent Document 1).
JP 2001-141097 A (FIG. 1)

  However, in the conventional liquid crystal panel, one opening of the black matrix is located on the optical axis of one microlens. 17 and 18 are diagrams for explaining the positional relationship between the microlens and the black matrix opening in the conventional liquid crystal panel.

  FIG. 17 is a schematic partial cross-sectional view of a conventional liquid crystal panel. In FIG. 17, components related to the microlens and the black matrix are mainly shown. FIG. 18 is a plan view for explaining the positional relationship between a microlens and a black matrix in a conventional liquid crystal panel.

  The liquid crystal panel 100 includes a counter substrate 101, a TFT substrate 102, and a liquid crystal 103 sandwiched between the counter substrate 101 and the TFT substrate 102.

  As shown in FIG. 17, the counter substrate 101 is provided with a black matrix 104 as a light shielding layer, and the TFT substrate 102 is similarly provided with a black matrix 105 as a light shielding layer. The black matrix 104 has a lattice shape, and each opening 106 is formed by each lattice. The counter substrate 101 includes a group of microlenses 107 formed by forming a resin layer sandwiched between a plurality of depressions provided on one glass substrate and the other glass substrate into a lens shape.

  As shown in FIG. 18, in the liquid crystal panel 100, each micro lens 107 and each aperture 106 of the black matrix 104 are arranged so that the center of each aperture 106 is positioned substantially at the center of the optical axis of each micro lens 107. Configured.

  Accordingly, all the microlenses 107 are provided with the openings 106 on the assumption that light parallel to the optical axis of the microlenses enters, but when the diameter of the lens of the optical system is larger than that of the liquid crystal panel 100. In the peripheral part of the liquid crystal panel 100, the light is not parallel to the optical axis of the microlens 107. In FIG. 17, when a large amount of light in an oblique direction enters the microlens as indicated by an arrow L1, the center of the light collected by the microlens is shifted from the center of the opening 106 of the black matrix 104. Become. For this reason, there has been a problem that the brightness of the central portion and the peripheral portion of the liquid crystal panel becomes uneven.

  Accordingly, an object of the present invention is to provide a light valve, a light valve substrate, a microlens member used therefor, and an electro-optical device that can make the brightness of the central portion and the peripheral portion of the light valve uniform. To do.

  The first light valve according to the present invention includes a plurality of light receiving portions arranged in a matrix corresponding to pixels of an image to be displayed, and is provided corresponding to each of the light receiving portions, and each of the light receiving portions is provided. A light blocking matrix portion having a plurality of openings for introducing incident light, and a micro lens portion having a plurality of microlenses arranged corresponding to each of the openings in a plane substantially parallel to the light blocking matrix portion. Each position of each of the microlenses is an offset amount set based on a main angle of light incident on each of the openings in the plane where the microlenses are arranged, The microlenses are arranged so as to be offset in the outer circumferential direction along the plane from the intersection of the plane passing through the center of the opening corresponding to each of the microlenses and the plane. It is a sign.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central part and the peripheral part of the light valve is uniform.

  In the second light valve, in the first light valve, the offset amount of each microlens is a distance from the light blocking matrix portion to the plane and the opening arranged corresponding to each microlens. It is set based on the main angle of the said light which injects into light.

  According to such a configuration, the offset amount of each microlens is based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. Can be calculated.

  In the first or second light valve, the third light valve has a curved surface formed on at least one of the incident surface and the output surface of each microlens, and the curved surface forms the curved surface. It is arranged in the plane that is offset in the outer circumferential direction along the plane by the offset amount.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central part and the peripheral part of the light valve is uniform.

  The fourth light valve is the first or second light valve, and each microlens is composed of a biconvex microlens formed by arranging two single convex lenses along the incident direction of the light. It is characterized by being.

  According to such a configuration, the degree of freedom in design can be increased by configuring each microlens with a biconvex microlens formed by arranging two single convex lenses along the light incident direction.

  In the fifth light valve, in each of the first to fourth light valves, the position of each of the micro lenses is offset substantially toward the direction of the component in the plane at the main angle. Features.

  The sixth light valve is the first to fifth light valves, and the main angle of the incident light is a centroid angle of the incident angle of the incident light.

  According to these configurations, the incident angle that becomes the center among various incident angles of light incident on the microlens can be set as a main angle.

  The seventh light valve is the first to sixth light valves, and when the microlenses are divided into a plurality of groups from the intersection to the outer peripheral portion, the offset amount in each group is the same. It is characterized by being.

  In the eighth light valve, in the first to seventh light valves, the main angle of the incident light of each of the microlenses is the main light incident on the outermost microlens of the microlens portion. It is an angle determined based on a certain angle.

  Also with these configurations, it is possible to realize a light valve in which the brightness of the central portion and the peripheral portion of the light valve is uniform.

  The ninth light valve is the first to eighth light valves, wherein each microlens has an outer diameter based on a distance from the intersection of the microlenses to the center of the opening. It is characterized in that it is set larger as it goes from the central part to the outer peripheral direction along the plane.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central portion and the peripheral portion of the light valve is more uniform.

  The first light valve substrate of the present invention is a substrate used for a light valve, and is provided corresponding to each of the light receiving portions arranged in a matrix and each of the light receiving portions. A plurality of light shielding matrix portions having a plurality of openings for introducing incident light into each of the portions, and a plurality of microlenses arranged corresponding to each of the openings in a plane substantially parallel to the light shielding matrix portion. Each of the microlenses has a position that is set based on a main angle of light incident on each of the apertures in a plane where the microlenses are arranged. The amount of the microlens is arranged so as to be offset in the outer circumferential direction along the plane from the intersection of the plane passing through the center of the opening corresponding to each of the microlenses and the plane. And wherein the Rukoto.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central part and the peripheral part of the light valve is uniform.

  The second light valve substrate is the first light valve substrate, and the offset amount of each microlens is arranged corresponding to the distance from the light blocking matrix portion to the plane and to each microlens. And a main angle of the light incident on the opening.

  According to such a configuration, the offset amount of each microlens is based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. Can be calculated.

  In the first or second light valve substrate, the third light valve substrate has a curved surface formed on at least one of the entrance surface and the exit surface of each microlens, and the curved surface is It is characterized by being arranged offset in the outer circumferential direction along the plane by the offset amount in the plane forming the same.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central part and the peripheral part of the light valve is uniform.

  The fourth light valve substrate is the first or second light valve substrate, and each microlens is a biconvex microlens formed by arranging two single convex lenses along the incident direction of the light. It is characterized by comprising.

  According to such a configuration, the degree of freedom in design can be increased by configuring each microlens with a biconvex microlens formed by arranging two single convex lenses along the light incident direction.

  The first microlens member of the present invention is provided corresponding to a plurality of light receiving portions arranged in a matrix, and is a light shield having a plurality of openings for introducing incident light to each of the light receiving portions. A microlens member for use in a light valve having a matrix portion for use, the microlens member having a plurality of microlenses arranged corresponding to each of the openings on a plane substantially parallel to the matrix portion for light shielding. Each of the lenses has an axis passing through the opening corresponding to each of the microlenses and the plane by an offset amount set based on a main angle of light incident on each of the openings of the light blocking matrix section. It is arranged to be offset from the intersection with the outer peripheral direction along the plane.

  According to such a configuration, it is possible to realize a microlens member for realizing a light valve in which the brightness of the central portion and the peripheral portion of the light valve is uniform.

  The second microlens member of the present invention is the first microlens member, wherein the offset amount of each microlens is arranged corresponding to the distance from the light shielding matrix portion to the plane and to each microlens. It is set based on the main angle of the light incident on the aperture.

  According to such a configuration, the offset amount of each microlens is based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. Can be calculated.

  In the first or second microlens member, the third microlens member has a curved surface formed on at least one of the entrance surface and the exit surface of each microlens, and the curved surface In the plane to be formed, the offset amount is arranged to be offset in the outer circumferential direction along the plane.

  According to such a configuration, it is possible to realize a light valve in which the brightness of the central part and the peripheral part of the light valve is uniform.

  The fourth microlens member is the first to third microlens members, and each microlens is composed of a biconvex microlens formed by arranging two single convex lenses along the incident direction of the light. It is characterized by being.

  According to such a configuration, the degree of freedom in design can be increased by configuring each microlens with a biconvex microlens formed by arranging two single convex lenses along the light incident direction.

  In addition, the electro-optical device of the present invention is configured using first to fourth microlens members.

  According to such a configuration, it is possible to realize an electro-optical device in which the brightness of the central portion and the peripheral portion of the light valve is uniform.

  An electronic apparatus according to the present invention is configured using the electro-optical device according to the present invention.

  According to such a configuration, it is possible to realize an electronic device in which the brightness of the central portion and the peripheral portion of the light valve is uniform.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
1 to 9 show a first embodiment of the present invention. FIG. 1 is a plan view of a light valve. In this embodiment, a TFT liquid crystal display device which is one of electro-optical devices is applied to a light valve of a projection type projector which is an example of an electronic device. FIG. 1 shows an element substrate such as a TFT substrate. It is a figure when it sees from the opposing board | substrate side with each component formed above. 2 is a cross-sectional view of the liquid crystal display device after the assembly process is cut at the position of line HH ′ in FIG.

  A liquid crystal display device such as a liquid crystal panel as a light valve is configured by sealing a liquid crystal 50 between an element substrate 10 such as a TFT substrate and a counter substrate 20 as shown in FIGS. On the element substrate 10 which is a light valve substrate, a plurality of transparent pixel electrodes (ITO) 9a constituting a plurality of pixels of an image to be displayed are arranged in a matrix. Further, a cover glass 71 is bonded to the counter substrate 20 which is a light valve substrate by an adhesive which becomes a microlens. A counter electrode (ITO) 21 is provided on the entire surface corresponding to the display area of the cover glass 71.

  The element substrate 10 is made of, for example, a quartz substrate, a glass substrate, or a silicon substrate, and the counter substrate 20 is made of, for example, a glass substrate or a quartz substrate. On the element substrate 10, data lines and scanning lines are provided along the vertical and horizontal boundaries of the pixel electrode 9a. The element substrate 10 is provided with a light shielding film (not shown) as a black matrix, and the light shielding film is provided in a grid pattern corresponding to each pixel along these data lines and scanning lines. ing. This light shielding film prevents reflected light from entering the channel region, source region, and drain region of the TFT.

  On the other hand, the counter substrate 20 is provided with a light shielding film (not shown) as a black matrix in a region facing the data line, the scanning line, and the TFT formation region of the element substrate, that is, in a non-display region of each pixel. Yes. The light shielding film prevents incident light from the counter substrate 20 from entering the channel region, the source region, and the drain region of the TFT. A counter electrode (common electrode) is formed over the entire surface of the counter substrate 20 on the light shielding film. An alignment film made of a polyimide polymer resin is laminated on the surface of the element substrate 10 and the counter substrate 20 on which liquid crystal is sealed, and is rubbed in a predetermined direction.

  A liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. Thereby, the TFT writes the image signal supplied from the data line to the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode, the orientation and order of the molecular assembly of the liquid crystal 50 change, and light is modulated to enable gradation display.

  Specifically, the liquid crystal modulates light and enables gradation display by changing the orientation and order of the molecular assembly according to the voltage level applied to each pixel. In the normally white mode, the transmittance for incident light is reduced according to the voltage applied in units of each pixel, and in the normally black mode, the light is incident according to the voltage applied in units of each pixel. The light transmittance is increased, and light having a contrast corresponding to the image signal is emitted from the electro-optical device as a whole.

  Further, as shown in FIGS. 1 and 2, the counter substrate 20 is provided with a light shielding film 42 as a frame for partitioning the display area. The light shielding film 42 is made of, for example, the same or different light shielding material as the above-described light shielding film.

  A sealing material 41 that encloses liquid crystal in a region outside the light shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is disposed so as to substantially match the contour shape of the counter substrate 20 and fixes the element substrate 10 and the counter substrate 20 to each other.

  The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and the liquid crystal 50 is dropped inside the sealing material 41 at the time of manufacturing, so that the liquid crystal 50 is placed on the liquid crystal display device with the counter substrate 20 and the element substrate. The sealing material 41 may be dropped between the element substrate 10 and a part of one side of the element substrate 10 may be removed, and the liquid crystal 50 may be placed in the gap between the bonded element substrate 10 and the counter substrate 20. A liquid crystal injection port for injection may be formed, and after the liquid crystal is injected from the liquid crystal injection port, the liquid crystal injection port may be sealed with a sealing material.

  A data line driving circuit 61 and a plurality of mounting terminals 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side, A scanning line driving circuit 63 is provided for each. On the remaining side of the element substrate 10, a plurality of wirings 64 are provided for connecting between the scanning line driving circuits 63 provided on both sides of the screen display area. In addition, a conductive material 65 for electrically connecting the element substrate 10 and the counter substrate 20 is provided in at least one corner of the counter substrate 20.

  As shown in FIG. 2, the counter substrate 20 has a plurality of aspherical recesses 20a formed on the exit surface side. A cover glass 71 is attached to the counter substrate 20 on the light exit surface side through an adhesive, and a microlens portion 74 is formed by a layer made of the adhesive. Since the refractive index of the adhesive forming the microlens portion 74 is higher than the refractive index of the counter substrate 20, the incident light is condensed on the pixel electrode 9a. Accordingly, each convex portion of the adhesive corresponding to each recess 20a constitutes each microlens (one-convex microlens) of the microlens portion 74. Here, the microlens member 74, which is a member made of a layer of a cured adhesive, or a member including the cover glass 71 and the microlens portion 74 is a microlens member.

  Here, a projection type color display device using the light valve having the above configuration will be described. The projection type color display device is a projection type projector as an electronic apparatus. Here, an example of the overall configuration, particularly an optical configuration will be described. FIG. 3 is a diagram for explaining the projection type color display device.

  As shown in FIG. 3, a liquid crystal projector 1100, which is an example of a projection type color display device, prepares three liquid crystal modules including a liquid crystal device having a drive circuit mounted on a TFT array substrate, and each has a light valve 100R for RGB. , 100G and 100B. In the liquid crystal projector 1100, when projection light is emitted from a lamp unit 1102 of a white light source such as a metal halide lamp, the light components R, G, and R corresponding to the three primary colors of RGB are obtained by three mirrors 1106 and two dichroic mirrors 1108. The light is divided into B and led to the light valves 100R, 100G and 100B corresponding to the respective colors. In this case, in particular, in order to prevent light loss due to a long optical path, the B light comes from the incident lens 1122, the relay lens 1123, and the lens 1124 which is the exit lens (hereinafter also referred to as the entrance lens because it is also the entrance lens to the light valve 100B). It is guided through a relay lens system 1121. The light components corresponding to the three primary colors modulated by the light valves 100R, 100G, and 100B are synthesized again by the dichroic prism 1112 and then projected as a color image on the screen 1120 via the projection lens 1114.

  Next, the positional relationship between the microlens of the light valve described above and the black matrix that is the light blocking matrix portion will be described. FIG. 4 is a diagram for explaining the positional relationship among the microlens unit 74, the black matrix unit 201, and the incident lens 1124. The microlens unit 74 and the black matrix unit 201 are provided on the counter substrate 20. The black matrix portion 201 has a lattice shape, and each opening is formed by each lattice. Each opening of the black matrix portion 201 is an opening for introducing incident light to each of the pixel electrodes 9a as the light receiving portion. The plurality of pixel electrodes 9a constitute a part of an image display unit for displaying an image, and are arranged in a matrix corresponding to the pixels of the image to be displayed.

  As shown in FIG. 3, since the lamp unit 1102 or the incident lens 1124 is larger than the light valve, the microlens around the microlens portion 74 of the light valve shown in FIG. More light from the periphery of the incident lens 1124 is received.

  In FIG. 4, the positional relationship between the incident lens 1124 and the black matrix portion 201 of the light valve is described. However, the positional relationship between the lamp unit 1102 and the black matrix portion 201 of the light valve is the same. A description of the positional relationship of the light valve with the black matrix portion 201 is omitted.

  As shown in FIG. 4, the incident lens 1124 and the light valve are provided such that the optical axis L2 of the incident lens 1124 and the center of the light valve are substantially coincident. Therefore, the most light from the direction of the optical axis L2 that is the center of the incident lens 1124 is incident on the microlens 74c of the microlens unit 74 that is located at the approximate center of the light valve. On the other hand, a large amount of light from the peripheral portion of the incident lens 1124 is incident on the microlens 74 p located in the peripheral portion of the microlens portion 74.

  More specifically, the main angle of light incident on the micro lens 74 c at the center of the micro lens portion 74 is 0 degrees because it is parallel to the optical axis L 2 of the incident lens 1124. The main angle of light incident on the microlens 74h located at a position shifted from the microlens 74c at the center of the microlens portion 74 is not parallel to the optical axis L2 of the incident lens 1124, but in the direction of the optical axis L2 of the incident lens 1124. On the other hand, the angle is three-dimensionally shifted by a predetermined angle. FIG. 4 shows only the angle θhy when projected onto a plane orthogonal to the plane Ta arranged substantially parallel to the plane on which the black matrix portion 201 is formed. As will be described later, this plane Ta is a plane that connects the vertices of a plurality of microlenses, and in the following, this plane Ta is referred to as a “microlens plane Ta”.

  The main angle of the incident light is an angle in the direction in which the amount of light incident on the microlens is the largest, and is, for example, a centroid angle of the incident angle of the light incident on the microlens.

  The center-of-gravity angle as the main angle is an average of the sum of products of the incident angles and the light amounts at the incident angles at all incident angles in the three-dimensional direction of light incident from the incident lens 1124 to the microlens 74h. Is an angle. This center-of-gravity angle is an angle that becomes the center of the light amount among various incident angles of light incident on the microlens. Specifically, the barycentric angle is an angle that satisfies the following expression.

Formula 1

上式において、Ｉ（θ、φ）は、マイクロレンズ平面Ｔａ内の単位面積あたりに単位立体角から入射する光量を示す。式（１）において、φは、極座標におけるブラックマトリクス部の平面内の角度であり、θは、その平面の法線方向に向かう角度である。すなわち、式（１）におけるａ）を満たすθｉと、ｂ）を満たすφｋによって、上述した重心的な角度が規定される。従って、マイクロレンズ部７４の中心部のマイクロレンズ７４ｃは、入射光をほぼその光軸Ｌ２上に集光するが、マイクロレンズ部７４の中心部のマイクロレンズ７４ｃからずれた位置にあるマイクロレンズ７４ｈにおいては重心的な角度θｉ及びφｋが０でないため、後述するように、入射光はブラックマトリクス部２０１の開口の位置する平面上において、開口の中心からオフセット量ｄｈｘ及びｄｈｙだけずれて集光してしまう。

In the above formula, I (θ, φ) represents the amount of light incident from the unit solid angle per unit area in the microlens plane Ta. In Expression (1), φ is an angle in the plane of the black matrix portion in polar coordinates, and θ is an angle toward the normal direction of the plane. That is, the above-described center-of-gravity angle is defined by θi that satisfies a) in Equation (1) and φk that satisfies b). Accordingly, the microlens 74c at the center of the microlens portion 74 condenses incident light substantially on the optical axis L2, but the microlens 74h at a position shifted from the microlens 74c at the center of the microlens portion 74. Since the center-of-gravity angles θi and φk are not 0 in FIG. 5, the incident light is condensed by offset amounts dhx and dhy from the center of the opening on the plane where the opening of the black matrix portion 201 is located, as will be described later. End up.

  FIG. 5 is a diagram for explaining offset amounts dhx and dhy in the positional relationship between the microlens unit 74 and the black matrix unit 201. As shown in FIG. 5, when the distance between the microlens plane Ta in contact with the apex of the microlens 74h and the film thickness center of the black matrix portion 201 forming the opening 201h corresponding to the microlens 74h is D, the offset amount dhx and dhy are expressed by the following equation (2). FIG. 5 shows only the offset amount dhy.

dhx = D · tan θhx
dhy = D · tan θhy ··· Equation (2)
Thus, the offset amounts dhx and dhy can be obtained from the distance D and the main angles θhx and θhy of the light incident on the microlens 74h. When the distance D is constant, the offset amounts dhx and dhy can be calculated from the angles θhx and θhy.

  As shown in FIG. 6, on the element substrate, the black matrix portion 201 includes a so-called vertical light shielding film 201V and a horizontal light shielding film 201H so that the data lines and the scanning lines also serve as the light shielding film. When formed at different depth positions on the substrate, the distance D described above may be different between the light shielding film 201V in the vertical direction and the light shielding film 201H in the horizontal direction. FIG. 6 is a diagram for explaining the case where the vertical light shielding film 201V and the horizontal light shielding film 201H are formed at different depth positions on the substrate. In that case, the distance between the microlens plane Ta that the apex of the microlens 74h is in contact with the film thickness center of the light shielding film 201V that forms the opening 201hv corresponding to the microlens 74h is Dx, and the light shielding film that forms the opening 201hH When the distance from the center of the film thickness of 201H is Dy, the offset amounts dhx and dhy are expressed by the following equation (2A) as the following equation (2A).

dhy = Dx · tan θhx
dhx = Dy · tan θhy (2A)
Therefore, the light blocking matrix portion (black matrix portion 201) in the present invention includes a plurality of light blocking films having different depths in the cross-sectional direction of the substrate of the light valve. Also in this case, when the distances Dx and Dy are constant, the offset amounts dhx and dhy can be calculated from the angles θhx and θhy.

  Conventionally, one microlens of the microlens portion 74 has a corresponding opening 201h of the black matrix portion 201 in a plane (microlens plane Ta) where a plurality of microlenses are arranged, as indicated by a broken line in FIG. The axis Lh parallel to the optical axis L2 of the incident lens 1124 and the optical axis of the micro lens 74h passing through the center of the microlens 74h are arranged so as to coincide with each other.

  On the other hand, in the present embodiment, as shown by the solid line in FIG. 5, the microlens 74h passes through the center of the opening 201h corresponding to the microlens 74h in the microlens plane Ta, and the optical axis of the incident lens 1124. From the intersection 74hc between the axis Lh parallel to L2 and the microlens plane Ta, along the microlens plane Ta, from the center of the microlens part 74 to the outer peripheral direction, only the offset amount dh, specifically dhx and dhy They are displaced, ie offset. As a result, the most light from the microlens 74h enters the corresponding opening 201h of the microlens 74h.

  In other words, conventionally, the microlens 74h of the microlens unit 74 has an axis parallel to the optical axis L2 of the incident lens 1124 in which the optical axis of the microlens 74h passes through the center of the opening 201h corresponding to the microlens 74h. It was arranged in the microlens plane Ta so as to match. Therefore, the amount of incident light that is deviated from the center of the opening 201 h of the black matrix unit 201 by an offset amount dh, that is, the offset position and is incident on the corresponding opening of the black matrix unit 201 is The amount of light collected by the microlens 74c at the center was reduced compared to the amount of light collected.

  Therefore, in the present embodiment, each microlens of the microlens portion 74 is directed from the center of the microlens portion 74 to the outer peripheral portion within the microlens plane Ta, that is, each microlens has a major angle. The offset amount dh, specifically, dhx and dhy are shifted in the opposite direction substantially toward the component direction in the microlens plane Ta, that is, offset. By offsetting each microlens by dhx in the X-axis direction and dhy in the Y-axis direction, the amount of light incident on each opening of the black matrix portion 201 corresponding to each microlens is changed to a microlens at the center of the microlens portion 74. The amount of light condensed by 74c can be made substantially the same.

  Therefore, the plurality of microlenses are arranged in the microlens plane Ta so that the offset amount increases radially from the central portion to the outer peripheral portion of the microlens portion 74, that is, from the central portion to the outer peripheral portion. ing.

  FIG. 7 explains the arrangement of the microlens taking into account the center-of-gravity angle of the incident light described above, taking the case of a 7 × 7 two-dimensional matrix microlens with a small number of pixels as an example to simplify the explanation. It is a schematic diagram for. In FIG. 7, the arrangement of the conventional microlens is indicated by a broken line, and the arrangement of the microlens taking the above-described angle of gravity of the incident light into consideration is indicated by a solid line. Since the actual offset amount of each microlens is extremely small, the offset amount is exaggerated and enlarged in FIG.

  In the plurality of conventional microlenses shown by the broken lines, the center of each opening of the black matrix portion 201 and the optical axis of each corresponding microlens coincide with each other in the central portion and the peripheral portion of the microlens portion 74. Had been placed. On the other hand, in the case of the present embodiment, the plurality of microlenses have corresponding openings in the microlens plane Ta according to the center-of-gravity angles θi and φk of the incident angles of light incident on each microlens 74h. The offset amount dh, specifically, dhx and dhy are shifted from the intersection 74hc between the central axis of 201h and the microlens plane Ta.

  In FIG. 7, in particular, 15 microlenses at a conventional position on the right side are indicated by numbers (1 to 15), and the X-axis direction and the Y-axis direction calculated by Expression (2) or Expression (2A) are shown. The fifteen microlenses according to the present embodiment when they are moved by the offset amounts dhx and dhy are indicated by N numbers (N1 to N15). The microlens 74c at the center of the microlens portion 74 has a center-of-gravity angle of 0, so that the position of the microlens 74c does not change between the conventional and the present embodiment. However, for example, the microlens (1) at a position shifted by 1 in the X-axis direction and 1 in the Y-axis direction is provided at the position N1. In FIG. 7, the microlens (1) at the position N1 has an offset amount d1x in the X-axis direction and an offset amount d1y in the Y-axis direction. Similarly, the microlens (14) at a position shifted by 3 in the X-axis direction and -2 in the Y-axis direction is provided at the position of N14. In FIG. 7, the micro lens at the position N14 has an offset amount d14x in the X-axis direction and an offset amount d14y in the Y-axis direction.

  As described above, the position of each microlens of the plurality of microlenses is determined from the intersection of the central axis of the corresponding opening and the microlens plane Ta within the microlens plane Ta, and the incident angle of light incident on each microlens. The brightness of the central portion and the peripheral portion of the light valve can be made uniform by disposing them by an offset amount corresponding to the center-of-gravity angle.

  In the embodiment described above, the center axis of the corresponding opening and the microlens plane in the microlens plane Ta for each microlens according to the barycentric angle of the incident angle of light incident on each microlens. Although it is arranged to be shifted by an offset amount dh from the intersection with Ta, a plurality of microlenses may be divided into a plurality of predetermined groups and shifted by a fixed offset amount for each group.

  FIG. 8 is a diagram for explaining a case where a plurality of microlenses are grouped for each predetermined group and shifted by a certain offset amount. FIG. 8 shows a plurality of microlenses of the microlens portion 74, a group of a plurality of microlenses at the center (hereinafter referred to as a center group) 301 and a group of a plurality of microlenses around the group (hereinafter referred to as a first periphery). 302), a group of microlenses around the first surrounding group 302 (hereinafter referred to as a second surrounding group) 303, and a group of microlenses around the second surrounding group (hereinafter referred to as a group). It is a figure showing the case where it groups to 304 (it is called the 3rd circumference group).

  For example, for the plurality of microlenses in the center group 301, the offset amount is 0, and for the plurality of microlenses in the kth surrounding group, the offset amount is light incident on the plurality of microlenses included in the kth surrounding group. An offset amount of the average value of the center-of-gravity angles of the incident angles. Here, k is any number from 1 to 3. That is, the offset amount is the same in each group.

  In this way, even when a plurality of microlenses are grouped and shifted by a fixed offset amount for each group, the brightness of the central portion and the peripheral portion of the light valve can be made substantially uniform.

  In FIG. 8, a plurality of microlenses around the center group including the center group are divided into three surrounding groups, and the plurality of microlenses are divided into four groups, but the number of groups is limited to four. It may be 5 or more.

  Furthermore, in the above description, an axis passing through the center of the opening corresponding to each of the plurality of microlenses and the microlens plane Ta are offset by an amount corresponding to the main angle θh of light incident on each of the plurality of openings. However, the main angle θh of each microlens may be set based on the F value of the incident lens 1124.

  Specifically, the main angle θhmax of light incident on the microlens located on the outermost periphery of the microlens portion 74 is determined by the following equation in the atmosphere.

sin θhmax = 1 / (2F) Equation (3)
Here, F is the F value of the incident lens 1124. Θhmax satisfying this expression (3) is a main angle of light incident on the microlens located on the outermost periphery of the microlens portion 74. When there are m microlenses between the microlens located at the outermost periphery of the microlens portion 74 and the microlens located at the center, the main angle θh of each of the m microlenses is: It is determined based on an angle θu obtained by dividing θhmax by m. h is an integer from 1 to m, and θh is determined by the following equation.

θh = h · θu (4)
Alternatively, for the sake of design convenience, from dhmax = Dtan (θhmax), based on the offset amount du obtained by dividing dhmax by m,
dh = h · du Expression (4A)
Even so, the position of the microlens corresponding to each opening can be set to an approximately appropriate position.

  Thus, the main angle of the incident light may be determined based on the main angle of the light incident on the outermost microlens. For example, when the F value is 2, the offset amount dh is in the following range.

    0 ≦ dh ≦ 0.26D (5)

  As described above, the main angle of each microlens may be determined based on the main angle θhmax of light incident on the microlens located on the outermost periphery of the microlens portion 74.

  Furthermore, the main angle θh of the light incident on each microlens of the microlens unit 74 may be determined by actually measuring. For example, a light valve is actually mounted on a projection type color display device such as the liquid crystal projector shown in FIG. 3, and the main angle θh of light incident on each microlens of the microlens unit 74 is actually measured. Based on the measurement result, the main angle of light incident on each microlens of the microlens unit 74 may be determined.

  Further, in the above description, the plurality of microlenses are arranged so that the offset amount increases radially from the center of the microlens portion 74 toward the outer peripheral portion. As shown in FIG. 9, it may be changed in accordance with the distance LCh from the intersection 74 hc of the microlens to the center of the opening of the black matrix portion 201. For example, in FIG. 9, when the outer diameter LAh of the microlens 74h is changed in accordance with the distance LCh, the distance LCh gradually increases from the center of the microlens 74 toward the outer periphery. The outer diameter LAh is gradually increased from the central part of the microlens part 74 toward the outer peripheral part. As a result, the amount of incident light becomes more uniform at the center and the outer periphery of the black matrix portion 201.

(Second Embodiment)
10 to 16 show a second embodiment of the present invention. Note that the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  In the first embodiment described above, the case where the present invention is applied to the microlens portion 74 including a plurality of single-convex microlenses has been described. However, in the present embodiment, the microlens unit 74 includes a plurality of biconvex microlenses. A case where the present invention is applied to the microlens portion 740 thus described will be described.

  As shown in FIG. 10, an aspherical recess 71a is formed on the incident surface of the cover glass 71 facing the plurality of recesses 20a formed on the exit surface side of the counter substrate 20, and the counter substrate 20 and the cover are covered. Convex-curved surfaces are formed on both the entrance surface 740a side and the exit surface 740b side of the microlens portion 740 formed between the glass 71 and the recesses 20a and 71a.

  Since the biconvex microlens is formed by combining two single-convex lenses, the degree of freedom in design can be increased and aberrations (particularly spherical aberration) can be reduced as compared with single-convex microlenses. .

  Furthermore, in this embodiment, the positional relationship between the convex curved surface on the incident surface 740a side and the convex curved surface on the output surface 740b side of each biconvex microlens is set to the incident angle of light for each biconvex microlens. By changing it accordingly, the light transmittance of the biconvex microlenses arranged on the outer peripheral side of the microlens portion 740 can be further improved, and the brightness of the screen 1120 can be made more uniform.

  Since the convex curved surface on the incident surface 740a side has the same configuration as the lens surface of the microlens shown in the first embodiment, each micro shown in the first embodiment will be described below. The same reference numerals (74c, 74h, 74p) are assigned to the convex curved surfaces on the incident surface 740a side corresponding to the lenses 74c, 74h, 74p to simplify the description.

  FIG. 11 corresponds to FIG. 4 of the first embodiment. As described in the first embodiment, the incident lens 1124 and the light valve are provided so that the optical axis L2 of the incident lens 1124 and the center of the light valve substantially coincide with each other. The most light from the direction of the optical axis L2, which is the center of the incident lens 1124, is incident on the convex curved surface 740c on the exit surface 740b side, which is located substantially at the center of the bulb. On the other hand, a large amount of light from the peripheral portion of the incident lens 1124 is incident on the convex curved surface 740p located in the peripheral portion of the microlens portion 740. The configuration of the convex curved surfaces 74c, 74h, and 74p on the incident surface 740a side is the same as the lens surfaces of the microlenses 74c, 74h, and 74p of the first embodiment, and a description thereof will be omitted.

  On the other hand, the main angle of light incident on the convex curved surface 740h in the peripheral portion on the exit surface 740b side is an angle that is three-dimensionally shifted from the direction of the optical axis L2 of the incident lens 1124 by a predetermined angle. FIG. 11 shows only the angle θhy when projected onto a plane orthogonal to the microlens plane Ta. The center-of-gravity angle as the main angle is the sum of the products of the incident angles and the light amounts at the incident angles at all incident angles in the three-dimensional direction of light incident on the convex curved surface 740h from the incident lens 1124. The average angle. This center-of-gravity angle is an angle that becomes the center of the light amount among various incident angles of light incident on the microlens, and can be obtained from the above-described equation (1).

  The convex curved surface 740c at the central portion on the emission surface 740b side condenses incident light substantially on the optical axis L2, but is a convex curved surface at a position shifted from the convex curved surface 740c at the central portion of the microlens portion 740. Since the center-of-gravity angles θi and φk are not 0 at 740h, as shown in FIG. 12, the incident light is shifted from the center of the opening by offset amounts shx and shy on the plane where the opening of the black matrix portion 201 is located. Focused.

  The offset amounts shx and shy in the positional relationship between the microlens unit 740 and the black matrix unit 201 will be described with reference to FIG. FIG. 12 corresponds to FIG. 5 of the first embodiment. Further, since the method of obtaining the offset amounts shx and shy of the convex curved surface 74h on the incident surface 740a side is the same as in the first embodiment, the description thereof is omitted.

  A plane Tb (hereinafter referred to as “exit-side microlens plane”) Tb connecting the apexes of the convex curved surfaces formed on the emission surface 740b has a positional relationship substantially parallel to the black matrix portion 201, and is convex When the distance between the emission side microlens plane Tb in contact with the apex of the surface 740h and the film thickness center of the black matrix portion 201 forming the opening 201h corresponding to the convex curved surface 740h is S, the offset amounts shx and shy are It can be represented by the following formula (2 ′). FIG. 12 shows only the offset amount shy.

shx = S · tan θhx
shy = S · tan θhy ··· Equation (2 ')
Also in this case, the offset amounts shx and shy can be obtained from the distance S and the main angles θhx and θhy of the light incident on the microlens 74h. When the distance S is constant, the offset amounts shx and shy can be calculated from the angles θhx and θhy.

  As shown in FIG. 6A of the first embodiment, on the element substrate, the light shielding film forming the black matrix portion 201 serves as both the data line and the scanning line, and the light shielding film 201V in the vertical direction. And the light shielding film 201H in the horizontal direction intersect on the substrate, so that the distance S described above may be different between the light shielding film 201V in the vertical direction and the light shielding film 201H in the horizontal direction. is there.

  As shown in FIG. 13, when the vertical light shielding film 201V and the horizontal light shielding film 201H are formed at different depth positions on the substrate, the apex of the convex curved surface 740h on the emission surface 740b side contacts. When the distance between the exit surface side microlens plane Tb and the film thickness center of the light shielding film 201V that forms the corresponding opening 201h is Sx, and the distance between the film thickness center of the light shielding film 201H that forms the opening 201hH is Sy The offset amounts shx and shy can be obtained from the following equation (2A ′).

shy = Dx · tan θhx
shx = Dy · tan θhy ··· Formula (2A ′)
Conventionally, in the biconvex microlens, one convex curved surface on the exit surface 740b side passes through the center of the corresponding opening 201h of the black matrix portion 201 in the exit side microlens plane Tb as shown in FIG. The axis Lh parallel to the optical axis L2 of the incident lens 1124 (see FIG. 11) and the optical axis of the convex curved surface 740h on the exit surface 740b side are arranged to coincide with each other.

  On the other hand, in the present embodiment, as shown by the solid line in FIG. 12, the convex curved surface 740h on the exit surface 740b side is the opening 201h corresponding to the convex curved surface 740h in the exit-side microlens plane Tb. From the intersection 740hc of the axis Lh parallel to the optical axis L2 of the incident lens 1124 and the exit-side microlens plane Tb passing through the center, from the center of the microlens portion 740 to the outer peripheral direction along the exit-side microlens plane Tb. , The offset amount sh, specifically, a position moved by shx and shy. As a result, the light emitted from the convex curved surface 740h on the emission side 740b side is most incident on the corresponding opening 201h of the convex curved surface 740h.

  On the other hand, in the conventional biconvex microlens, the optical axis of the convex curved surface 740h on the exit surface 740b side passes through the center of the opening 201h corresponding to the convex curved surface 740h and is parallel to the optical axis L2 of the incident lens 1124. Since it is arranged so as to coincide with the axis, the incident light is condensed at a position shifted by the offset amount sh from the center of the opening 201h of the black matrix portion 201, and the amount of light incident on the corresponding opening of the black matrix portion 201 is The amount of light collected by the convex curved surface 740c at the center on the exit surface 740b side was smaller than the amount of light collected.

  In the present embodiment, the convex curved surfaces formed on the entrance surface 740a side and the exit surface 740b side of the microlens unit 740 are arranged on the entrance side microlens plane Ta and the exit side microlens plane Tb. Offset amounts dh, sh from the center of 740 toward the outer peripheral direction, that is, substantially toward the component directions of the incident-side microlens plane Ta and the emission-side microlens plane Tb at the major angles of the biconvex microlenses. Specifically, the dhx, shx, and dhy, shy are arranged to be shifted in reverse.

  The convex curved surfaces respectively formed on the incident surface 740a and the exit surface 740b are dsx, shx in the X-axis direction and dsy, shy in the Y-axis direction along the incident-side microlens plane Ta and the exit-side microlens plane Tb. The amount of light incident on each opening of the black matrix portion 201 corresponding to each biconvex microlens is made substantially the same as the amount of light collected by the biconvex microlens at the center of the microlens portion 740. The brightness of the screen 1120 (see FIG. 3) can be made more uniform.

  FIG. 14 is a perspective view schematically showing the positional relationship between the convex curved surfaces of the biconvex microlenses formed on the entrance surface 740a and the exit surface 740b of the microlens portion 740, particularly on the right side. The numbers (N1 to N15) given to the convex curved surface on the incident surface 740a side are given corresponding to the microlens shown in FIG. 7 of the first embodiment, and the configuration is the same. Therefore, explanation is omitted.

  As shown in the figure, the convex curved surface on the incident surface 740a side and the convex curved surface on the output surface 740b side formed in each biconvex microlens are such that the optical axis passing through them is the biconvex microlens. It is arranged in a state where it matches the centroidal angle of the incident angle of the light incident on. Therefore, the biconvex curved surfaces corresponding to each other formed on the incident surface 740a side and the exit surface 740b side of each biconvex microlens are centered on the convex curved surfaces 74c and 740c located at the center of the microlens portion 740. From there, it is arranged radially so that the offset amount gradually increases as it goes to the outer periphery.

  Next, with reference to FIG. 15, the arrangement of the convex curved surface on the exit surface 740b side in consideration of the barycentric angle of incident light will be described in more detail. The arrangement of the convex curved surface on the incident surface 740a side is the same as that shown in FIG.

  FIG. 15 is a diagram corresponding to FIG. 7 showing the arrangement of convex curved surfaces of the incident surface 740a, and shows the emission surface 740b of FIG. 14 in plan view. In the figure, a bi-convex microlens of a 7 × 7 two-dimensional matrix with a small number of pixels is shown for the sake of simplicity. In addition, the arrangement of the convex curved surface of the conventional biconvex microlens is indicated by a broken line, and the arrangement of the convex curved surface in consideration of the centroid angle of the incident light described above is indicated by a solid line. Further, since the actual offset amount of each convex curved surface is extremely small, the offset amount is exaggerated and enlarged in the drawing.

  A plurality of conventional convex curved surfaces indicated by broken lines are arranged so that the center of each opening of the black matrix portion 201 coincides with the optical axis of each corresponding microlens in both the central portion and the peripheral portion of the emission surface 740b. Has been. On the other hand, each convex curved surface according to the present embodiment has a corresponding opening 201h in the exit surface 740b according to the barycentric angles θi and φk of the incident angles of the light incident on each convex curved surface 740b. It is disposed at a position moved by an offset amount sh, specifically, shx and shy from the intersection 740hc between the central axis and the exit surface 740b.

  Fifteen convex curved surfaces at conventional positions on the right side are shown with numbers (1 to 15), and offset amounts in the X-axis direction and the Y-axis direction calculated by the equation (2 ′) or the equation (2A ′) The fifteen convex curved surfaces according to the present embodiment when moved by shx and shy are shown with n numbers (n1 to n15).

  The convex curved surface 740c at the center of the emission surface 740b has a center-of-gravity angle with respect to the optical axis L2 (see FIGS. 11 and 14), and thus is formed at the same position as in the prior art. On the other hand, for example, the convex curved portion (1) at a position shifted by 1 in the X-axis direction and 1 in the Y-axis direction is provided at the position of n1. In FIG. 15, the offset amount in the X-axis direction of the convex curved surface (1) at the position n1 is indicated by s1x, and the offset amount in the Y-axis direction is indicated by s1y. Similarly, the convex curved surface (14) at a position shifted by 3 in the X-axis direction and -2 in the Y-axis direction is provided at the position n14. In FIG. 15, the convex curved surface (14) at the position n14 indicates the offset amount in the X-axis direction by s14x and the offset amount in the Y-axis direction by s14y.

  In this way, the positions of the pair of convex curved surfaces corresponding to each other of the plurality of biconvex microlenses in the incident side microlens plane Ta and the output side microlens plane Tb, The convex curved surface on the incident surface 740a side is arranged by being shifted from the intersection of the surface 740a and the output surface 740b by an offset amount corresponding to the center of gravity of the incident angle of light incident on each biconvex microlens. Since the transmitted light is incident at an ideal angle with respect to the convex curved surface on the exit surface 740b side, the utilization efficiency of the microlens is improved. As a result, in particular, the light transmittance of the biconvex microlenses arranged on the outer peripheral side of the microlens portion 740 is further improved, and the brightness of the central portion and the peripheral portion of the light valve is made uniform. The illuminance can be made more uniform.

  In addition, according to the center-of-gravity angle of the incident angle of light incident on each biconvex microlens, for each biconvex microlens, in the incident side microlens plane Ta where the biconvex microlens is positioned and on the exit side microlens plane Within Tb, the offsets dh and sh are shifted from the intersection between the center axis of the corresponding opening and the pair of convex curved surfaces, but a plurality of biconvex microlenses are arranged in a predetermined plurality of groups. In other words, each group may be shifted by a certain offset amount. Since the aspect in this case is the same as that of FIG. 8 of 1st Embodiment, description is abbreviate | omitted.

  Furthermore, as in the aspect shown in the first embodiment, the main angle θh in the pair of convex curved surfaces constituting the biconvex microlens may be set based on the F value of the incident lens 1124.

  Furthermore, the main angle θh of the light incident on each biconvex microlens of the microlens unit 740 may be determined by actually measuring.

  In the above description, the plurality of microlenses are arranged so that the offset amount increases radially from the center of the microlens portion 74 toward the outer peripheral portion. The outer diameters LAh and LAi of the convex curved surfaces 74h and 740h of FIG. 16 correspond to the distances LCh and LCi from the intersections 74hc and 740hc of the convex curved surfaces 74h and 740h to the center of the opening of the black matrix portion 201, as shown in FIG. May be changed. That is, in FIG. 16, by changing both the outer diameter LAh of the convex curved surface 74h on the incident surface 740a side and the outer diameter LAi of the convex curved surface 740h on the outgoing surface 740b side according to the distances LCh and LCi, Since the distance LCh gradually increases from the central portion of the lens portion 74 toward the outer peripheral portion, the outer diameters LAh and LAi of the convex curved surfaces 74h and 740h of the biconvex microlenses are increased from the central portion of the microlens portion 74 to the outer periphery. It becomes gradually larger as heading to the department. As a result, the amount of incident light can be made more uniform in the central portion and the outer peripheral portion of the black matrix portion 201.

  In each of the embodiments described above, the example is described based on the positional relationship between the black matrix portion 201 provided on the counter substrate and the microlens portions 74 and 740. However, the black matrix portion provided on the TFT substrate The same applies to the case where the positional relationship with the microlens portion is used as a reference. This is because when the distance between the black matrix portion provided on the TFT substrate and the black matrix portion provided on the counter substrate is short, substantially the same effect can be obtained with any of them as a reference.

  Furthermore, even in the middle position of the two black matrices of the black matrix portion provided on the TFT substrate and the black matrix portion provided on the counter substrate, or the positional relationship between these apparent positions and the microlens portion. It is the same.

  Although the present invention has been described in the case of a TFT liquid crystal display device, the present invention is similarly applied to an active matrix liquid crystal display device including a TFD (thin film diode) as a switching element and a passive matrix liquid crystal display device. Is possible. In addition to liquid crystal display panels, electroluminescence devices, organic electroluminescence devices, plasma display devices, electrophoretic display devices, devices using electroluminescent elements (Field Emission Display and Surface-Conduction Electron-Emission Display, etc.), DLP The present invention can be similarly applied to various electro-optical devices such as (Digital Light Processing: alias DMD (Digital micromirror Device)).

  The present invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the scope of the present invention.

The top view of the light valve concerning 1st Embodiment of this invention. Sectional drawing when it cut | disconnects in the position of the HH 'line of FIG. FIG. 3 is an explanatory diagram of a projection type color display device. FIG. 3 is an explanatory diagram showing a positional relationship among an incident lens, a microlens portion, and a black matrix portion. Explanatory drawing which shows the amount of offsets similarly. FIG. 3 is an explanatory view showing a state where two light shielding films are at different depth positions on the substrate. FIG. 6 is a schematic diagram showing a 7 × 7 two-dimensional matrix microlens with a small number of pixels. FIG. 4 is an explanatory diagram when a plurality of microlenses are grouped for each predetermined group. Explanatory drawing which shows the state which changed the outer diameter of the microlens. Sectional drawing equivalent to FIG. 2 concerning 2nd Embodiment of this invention. FIG. 6 is an explanatory diagram showing the positional relationship among the incident lens, the biconvex microlens portion, and the black matrix portion. Explanatory drawing which shows the amount of offsets similarly. The schematic sectional drawing which shows the case where two light-shielding films | membranes exist in a different depth position on a board | substrate. The perspective view which shows typically the biconvex microlens of a 7x7 two-dimensional matrix with few pixels. The schematic diagram which shows the arrangement | sequence of the convex curved surface formed in the output surface side of a biconvex micro lens similarly. Explanatory drawing which shows the state which changed the outer diameter of the biconvex micro lens similarly. The typical fragmentary sectional view of the conventional liquid crystal panel. The top view which shows the positional relationship of the microlens and black matrix in the conventional liquid crystal panel.

Explanation of symbols

  10 element substrate, 20 counter substrate, 50 liquid crystal, 71 cover glass, 74,740 microlens part, 74c, 74h, 74p microlens (convex curved surface), 74hc, 740hc intersection, 100B, 100G, 100R light valve, 101 facing Substrate, 201 Black matrix part, 740a Incident surface, 740b Outgoing surface, 740c, 740h, 740p Convex curved surface, 1100 Liquid crystal projector, L2 Optical axis, LAh, LAi Outer diameter, dh (dhx, dhy), sh (shx, shy ), Du Offset amount, Ta, Tb Micro lens plane, θhmax, θhy Major angles, θi, φk Center of gravity

Claims (19)

A plurality of light receiving portions arranged in a matrix corresponding to the pixels of the image to be displayed;
A light blocking matrix portion provided corresponding to each light receiving portion and having a plurality of openings for introducing incident light to each of the light receiving portions;
A microlens portion having a plurality of microlenses arranged corresponding to each of the openings in a plane substantially parallel to the light blocking matrix portion,
The respective positions of the respective microlenses are set to the respective microlenses by an offset amount set based on a main angle of light incident on each of the respective openings in the plane in which the respective microlenses are arranged. A light valve, wherein the light valve is arranged offset from an intersection of an axis passing through the center of the opening corresponding to each of the openings and the plane along the plane in the outer circumferential direction. The offset amount of each microlens is set based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. The light valve according to claim 1, wherein: A curved surface is formed on at least one of the entrance surface and the exit surface of each microlens, and the curved surface is offset in the outer circumferential direction along the plane by the offset amount in the plane forming the curved surface. The light valve according to claim 1, wherein the light valve is disposed as a single valve. 3. The light valve according to claim 1, wherein each microlens includes a biconvex microlens formed by arranging two single convex lenses along an incident direction of the light. 5. The light valve according to claim 1, wherein the position of each of the microlenses is offset substantially toward the direction of the component in the plane at the main angle. 6. The light valve according to claim 1, wherein the main angle of the incident light is a centroid angle of the incident angle of the incident light. The said offset amount in each group is the same when each said microlens is divided into a some group toward the said outer peripheral part from the said intersection, The Claim 1 characterized by the above-mentioned. Light bulb. The main angle of the incident light of each of the microlenses is an angle determined based on the main angle of the light incident on the outermost microlens of the microlens portion. Item 8. The light valve according to any one of Items 1 to 7. The outer diameter of each microlens is set to be larger from the center of the microlens portion toward the outer periphery along the plane based on the distance from the intersection of the microlenses to the center of the opening. The light valve according to claim 1, wherein the light valve is a light valve. A substrate used for a light valve,
A plurality of light receiving portions arranged in a matrix, and
A light blocking matrix portion provided corresponding to each light receiving portion and having a plurality of openings for introducing incident light to each of the light receiving portions;
A microlens portion having a plurality of microlenses arranged corresponding to each of the openings in a plane substantially parallel to the light blocking matrix portion,
The respective positions of the respective microlenses are offset by an offset amount set based on a main angle of light incident on each of the respective apertures in a plane where the respective microlenses are arranged. A light valve substrate, wherein the light valve substrate is disposed offset from an intersection of an axis passing through the center of the opening corresponding to each of the openings and the plane in the outer circumferential direction along the plane. The offset amount of each microlens is set based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. The light valve substrate according to claim 10, wherein: A curved surface is formed on at least one of the entrance surface and the exit surface of each microlens, and the curved surface is offset in the outer circumferential direction along the plane by the offset amount in the plane forming the curved surface. 12. The light valve substrate according to claim 10 or 11, wherein the light valve substrate is arranged in the same manner. 12. The light valve substrate according to claim 10, wherein each of the microlenses is a biconvex microlens formed by arranging two single convex lenses along the incident direction of the light. . A microlens member used in a light valve having a light blocking matrix portion provided with a plurality of openings for introducing incident light to each of the light receiving portions provided corresponding to the plurality of light receiving portions arranged in a matrix. Because
A plurality of microlenses arranged corresponding to each of the openings on a plane substantially parallel to the light blocking matrix portion;
Each of the micro lenses has an axis passing through the opening corresponding to each of the micro lenses by an offset amount set based on a main angle of light incident on each of the openings of the light blocking matrix unit. A microlens member, wherein the microlens member is disposed so as to be offset in an outer peripheral direction along the plane from an intersection of the plane and the plane. The offset amount of each microlens is set based on the distance from the light blocking matrix portion to the plane and the main angle of the light incident on the opening arranged corresponding to each microlens. 15. The microlens member according to claim 14, wherein the microlens member is formed. A curved surface is formed on at least one of the entrance surface and the exit surface of each microlens, and the curved surface is offset in the outer circumferential direction along the plane by the offset amount in the plane forming the curved surface. The microlens member according to claim 14, wherein the microlens member is disposed as a single lens. 16. The microlens member according to claim 14, wherein each microlens is composed of a biconvex microlens formed by arranging two single convex lenses along the incident direction of the light. An electro-optical device comprising the microlens member according to claim 14. An electronic apparatus comprising the electro-optical device according to claim 18.

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