JP2005227241A - Ultraviolet irradiation device and ultraviolet irradiation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stabilize the light quantity of an ultraviolet irradiation device, and to predict lifetime of an LED. <P>SOLUTION: This ultraviolet irradiation device is equipped with one or more head parts 120 equipped with one or more semiconductor elements capable of irradiating ultraviolet rays as ultraviolet sources, a controller part 110 equipped with a control part 114 capable of setting an ultraviolet irradiation condition of the head parts 120 and a power source part 112 for supplying a driving signal to the semiconductor element, and a cable part 130 equipped with an electric signal wire for connecting electrically the head part 120 to the controller part 110. The head part 120 is equipped with a light receiving element 152 capable of detecting the light quantity of the ultraviolet ray irradiated from the semiconductor element, and constituted so as to adjust the driving signal so that the ultraviolet irradiation quantity becomes a desired value based on information of the ultraviolet ray quantity detected by the light receiving element 152. Hereby, desired ultraviolet irradiation can be acquired stably by performing feedback control of the irradiation quantity of the ultraviolet ray outputted actually. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ultraviolet irradiation apparatus and an ultraviolet irradiation method for irradiating ultraviolet rays for curing an ultraviolet curable resin used for adhesion of small parts.

Conventionally, in the medical field, UV curable resin is cured in fields such as sterilization, treatment, spectroscopy (luminescence) diagnosis by irradiating ultraviolet rays inside and outside the living body, observation of minerals and deep part of old burial mounds, or assembly work of electronic components. An ultraviolet irradiation device is used for the purpose. Among these, the ultraviolet irradiation device for curing the ultraviolet curable resin is an ultraviolet curable resin widely used from the field of resist film formation and printing to the field of adhesion and fixing of small parts in assembly processes such as optical pickups. It is used for the purpose of irradiating ultraviolet rays. This type of ultraviolet irradiation device includes a controller that is a device body incorporating a power supply circuit and the like, a head that irradiates ultraviolet rays, and a cable that connects them. A conventional ultraviolet irradiation device incorporates a high-pressure mercury lamp, mercury xenon lamp, metal halide lamp, etc. as a UV source in the controller, transmits the UV light from the controller to the head via an optical fiber such as quartz glass, and irradiates the head with the UV light. (See Patent Document 1).
JP-A-10-209492

  In such a lamp-type ultraviolet irradiation device using a high-pressure mercury lamp or the like, since a high-pressure mercury lamp or a mercury xenon lamp is used as an ultraviolet ray source, the amount of heat generation and power consumption is large, and a cooling mechanism is necessary and the device is required. In addition to the increase in size and cost, there are drawbacks such as a large energy consumption due to the constantly lit structure, a long time for rising and falling, and a shortened lamp life. In addition, since the adjustment of the ultraviolet output is performed by a mechanical shutter, fine adjustment is difficult. Furthermore, when the lamp deteriorates, the glass may crack, and there is a danger that the glass tube will burst by the high-pressure gas enclosed in the glass tube. For this reason, it is necessary to replace the lamp after a certain period of time, and in addition to the increase in running cost, it is necessary to regularly check the replacement every day and the like.

  On the other hand, the applicant has developed an ultraviolet irradiation device that uses an ultraviolet light emitting diode (UVLED) as an ultraviolet light source and has an LED provided on the head side instead of a controller of the main body, as a solution to such problems. (Japanese Patent Application No. 2003-158958, Japanese Patent Application No. 2003-425552, etc.). These ultraviolet irradiation devices use UVLEDs, which are semiconductor elements, so that they can be finely adjusted for output, operate at high speed, have long life, high reliability, and can be used with low power consumption. Is obtained. However, although UV LEDs have a significantly longer life than high pressure mercury lamps and mercury xenon lamps, it is inevitable that the output gradually decreases as they are used. When the current-driven UVLED is used for a long period of time, the output value with respect to the input current gradually decreases, so that there is a problem in that the amount of ultraviolet irradiation also decreases. For this reason, a desired ultraviolet ray irradiation amount cannot be obtained with the deterioration of the semiconductor element, and if the deterioration is significant, the element needs to be replaced. However, the progress of degradation of semiconductor elements is extremely slow, and there is no sudden drop in output, and the replacement span is long. Therefore, the actual UV irradiation measurement and element replacement work may be missed. As a result, it may be an obstacle to continued accurate use over a long period of time.

  The present invention has been made to solve such problems, and a main object of the present invention is to provide an ultraviolet irradiation apparatus and an ultraviolet irradiation method that can be used stably over a long period of time. .

  In order to achieve the above object, the ultraviolet irradiation apparatus of the present invention can set one or more head units 120 including one or more semiconductor elements that can irradiate ultraviolet rays as an ultraviolet ray source, and the ultraviolet irradiation conditions of the head unit 120. A controller unit 110 including a control unit 114, a power source unit 112 for supplying a driving signal to the semiconductor element, and a cable unit 130 including an electric signal line for electrically connecting the head unit 120 and the controller unit 110. Is provided. In this ultraviolet irradiation apparatus, the head unit 120 includes a light receiving element 152 capable of detecting the amount of ultraviolet light emitted from the semiconductor element, and the amount of ultraviolet irradiation is determined based on information on the amount of ultraviolet light detected by the light receiving element 152. Is configured to adjust the drive signal so as to be a desired value. As a result, it is possible to stably obtain desired ultraviolet irradiation by feedback controlling the irradiation amount of the actually output ultraviolet light. For example, even when the same drive signal is output due to deterioration of the semiconductor device, the desired UV irradiation amount can be maintained by increasing the drive signal so that the desired UV output can be obtained even when the output UV irradiation amount decreases. it can.

  Further, in the ultraviolet irradiation apparatus, the head unit 120 includes a light receiving element 152 capable of detecting the amount of ultraviolet light emitted from the semiconductor element, and the output of the semiconductor element is based on information on the amount of ultraviolet light detected by the light receiving element 152. The control unit may be configured to issue a warning when a decrease is detected and the output decrease reaches a predetermined value. As a result, the user can be notified that the output of the semiconductor element is decreasing, and the replacement of the semiconductor element can be promoted.

  Further, in the ultraviolet irradiation device, the head unit 120 includes a memory unit 1227 capable of recording a history of ultraviolet output emitted from the semiconductor element. Based on the history information recorded in the memory unit 1227, each head unit 120 includes: Drive corresponding to the correction value by calculating the correction value of the drive signal of the semiconductor element in consideration of the decrease in the ultraviolet output with reference to the characteristic curve indicating the decrease in the element due to the ultraviolet output recorded in advance for each semiconductor element It can also be controlled to increase the signal. As a result, the current main power drop can be predicted based on the actually output ultraviolet ray amount, and the drive signal value is corrected in accordance with this to enable accurate ultraviolet ray irradiation.

  Furthermore, in the ultraviolet irradiation device, the control unit can perform a predetermined calculation based on information on the amount of ultraviolet light detected by the light receiving element 152. As a result, calculations necessary for operations such as adjustment of drive signals and warnings can be performed in the controller unit based on information sent from the light receiving element 152, so that the burden on the head unit side can be reduced and the head unit can be made smaller and simpler. Can contribute to the development.

  On the other hand, in the ultraviolet irradiation device, the head controller 120 may be provided with a head controller 123 for performing a predetermined calculation based on information on the amount of ultraviolet light detected by the light receiving element 152. As a result, the result of performing necessary calculations on each head unit side is sent to the controller unit, so that the processing burden on the controller unit side can be reduced especially when the number of connected head units is large.

  Furthermore, in the ultraviolet irradiation device, the head unit 120 is disposed in the vicinity of the ultraviolet irradiation part of the semiconductor element 150, and a lens unit 1260 for polarizing or condensing the ultraviolet light from the semiconductor element 150 to irradiate the outside. A semiconductor device and a lens portion 1260 are incorporated, and a head main body portion 122 formed in a shape extending in one direction is provided. Ultraviolet rays from the semiconductor element are formed on an end surface perpendicular to the longitudinal direction of the head main body portion 122. The lens unit 1260 to be irradiated can be arranged. With this configuration, it is possible to realize ultraviolet irradiation that is easy to handle as a type that irradiates ultraviolet light from the tip surface of the head portion.

  Furthermore, in the ultraviolet irradiation device, the head unit 120 is disposed in the vicinity of the ultraviolet irradiation part of the semiconductor element 150, and a lens unit 1260 for polarizing or condensing the ultraviolet light from the semiconductor element 150 to irradiate the outside. The semiconductor device and the lens portion 1260 are incorporated, and the head main body portion 122 formed in a shape extending in one direction is provided. Ultraviolet rays from the semiconductor device are provided on the side surface parallel to the longitudinal direction of the head main body portion 122. The lens portion 1260 that is irradiated with can be arranged. With this configuration, it is possible to irradiate ultraviolet rays from the side surface of the head portion, and therefore, it can be suitably used for a usage mode in which ultraviolet rays are irradiated in the lateral direction by being inserted into gaps or the like.

  Furthermore, in the ultraviolet irradiation device, the lens unit 1260 may be attached to the head main body unit 122 in a replaceable manner. With the configuration in which the lens unit can be exchanged, it can be conveniently used by exchanging lenses with different focal lengths according to the purpose of use.

  Furthermore, the ultraviolet irradiation apparatus can arrange | position the light receiving element 152 in the attitude | position which can light-receive a leaked light by the side of a semiconductor element. Thereby, ultraviolet irradiation is detectable, without reducing the effective irradiation amount of the ultraviolet rays irradiated outside.

  Furthermore, the ultraviolet irradiating device may be provided with an openable / closable shutter covering the light receiving element 152 on the front surface of the light receiving element 152 so that the shutter can be opened and closed so that ultraviolet light leakage from the semiconductor element is not exposed when the shutter is closed. Good. With this configuration, the shutter can be closed when not in use to protect the light receiving element from ultraviolet irradiation, and deterioration of the light receiving element due to ultraviolet light can be reduced.

  Furthermore, the ultraviolet irradiation device can be configured such that the light receiving element 152 detects the amount of ultraviolet light emitted from the semiconductor element at a predetermined timing. By not always using the light receiving element, the life of the light receiving element can be extended. In particular, a semiconductor element that is an ultraviolet light source generally has a tendency of gradual deterioration, so that the amount of received light is small and it can be used without any trouble without constantly monitoring the output.

  Furthermore, the ultraviolet irradiation device may be configured such that the opening and closing of the shutter is controlled so as to open the shutter in synchronization with the timing at which the light receiving element 152 receives light. When the light receiving element is not used, the shutter is closed so that the light receiving element is not exposed to ultraviolet irradiation, so that deterioration of the light receiving element due to the ultraviolet light can be reduced.

  Furthermore, in the ultraviolet irradiation device, the timing at which the light receiving element 152 detects the amount of ultraviolet light may be set when the ultraviolet irradiation device is turned on. This makes it possible to check the state of the semiconductor element periodically by checking the amount of ultraviolet rays for each predetermined operation of turning on the power.

  Furthermore, in the ultraviolet irradiation device, the timing at which the light receiving element 152 detects the amount of ultraviolet light can be set to a timing at which a predetermined time interval coincides with the ultraviolet irradiation. Thereby, it is not necessary to irradiate ultraviolet rays only for detection of the light receiving element, and the amount of light can be detected at the same time when the apparatus is used, so that it can be operated efficiently.

  In the ultraviolet irradiation device, the light receiving element 152 is preferably a photodiode. By using a semiconductor element as the light receiving element, the light quantity can be detected with high reliability and stability.

  Furthermore, the ultraviolet irradiation device may be configured such that the controller unit 110 can set individual ultraviolet irradiation conditions for each of the plurality of head units 120. Accordingly, ultraviolet irradiation can be performed independently for each head unit, and drive signal correction and replacement time notification according to the use state of the semiconductor element of each head unit can be performed.

  Furthermore, in the ultraviolet irradiation device, the semiconductor element 150 is preferably an ultraviolet light emitting diode 151. Ultraviolet light-emitting diodes can be driven at high speed with a long lifetime, and are small, low power consumption, reliable and stable.

  On the other hand, the ultraviolet irradiation method of the present invention is an ultraviolet irradiation method in which an ultraviolet curable resin is irradiated with ultraviolet rays and cured by an ultraviolet irradiation device, and is irradiated from a semiconductor element provided in the head unit 120 of the ultraviolet irradiation device. A step of detecting the amount of ultraviolet light by receiving light leaked from the semiconductor element with a light receiving element 152 disposed on the side of the semiconductor element, and converting the detected amount of ultraviolet light from an analog signal to a digital signal to a controller. A step of sending to the control unit of the unit 110, and a step of adjusting the drive signal so that the ultraviolet irradiation amount becomes a desired value in the control unit. As a result, it is possible to stably obtain desired ultraviolet irradiation by feedback controlling the irradiation amount of the actually output ultraviolet light.

  Another ultraviolet irradiation method includes a step of recording a history of ultraviolet output irradiated from a semiconductor element provided in the head unit 120 of the ultraviolet irradiation device in the memory unit 1227 provided in the head unit 120, Based on the recorded history information, with reference to the characteristic curve indicating the decrease in the element due to the ultraviolet output recorded in advance for each semiconductor element of each head unit 120, the drive signal of the semiconductor element considering the decrease in the ultraviolet output Calculating a correction value and controlling to increase the drive signal corresponding to the correction value. As a result, the current main power drop can be predicted based on the actually output ultraviolet ray amount, and the drive signal value is corrected in accordance with this to enable accurate ultraviolet ray irradiation.

  According to the ultraviolet irradiation apparatus and the ultraviolet irradiation method of the present invention, accurate ultraviolet irradiation according to the state of the semiconductor element can be performed. This is because the drive signal of the semiconductor element is controlled so that a desired ultraviolet irradiation can be obtained by detecting the amount of ultraviolet irradiation from the semiconductor element by the light receiving element and feedback according to the detected amount. In addition, by detecting the amount of light with the light receiving element, it is possible to realize a function of notifying that the output of the semiconductor element is lowered by a certain level or more, thereby easily grasping the replacement time of the semiconductor element and improving the convenience of maintenance.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below exemplifies an ultraviolet irradiation device and an ultraviolet irradiation method for embodying the technical idea of the present invention, and the present invention includes the following ultraviolet irradiation device and ultraviolet irradiation method. Not specified. Further, in this specification, for easy understanding of the scope of claims, the numbers corresponding to the members shown in the embodiments are referred to as “claims column” and “means for solving the problems”. It is added to the members shown in the column. However, the members shown in the claims are not limited to the members in the embodiments. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  FIG. 1 shows a block diagram of an ultraviolet irradiation apparatus according to Embodiment 1 of the present invention. In the ultraviolet irradiation device 100 shown in this figure, the controller unit 110 and the head unit 120 are connected by a cable unit 130. The head unit 120 incorporates a semiconductor element 150 (here, UVLED 151) which is an ultraviolet ray source that emits ultraviolet rays for curing the ultraviolet curable resin. The controller unit 110 includes a power source unit 112, a control unit 114, and a storage unit 116 for driving the semiconductor element 150 of the head unit 120, and a driving signal (electric signal) of the semiconductor element 150 is transmitted to the head unit via the cable unit 130. 120.

(Stabilization of UV irradiation)
The head unit 120 includes a light receiving element 152, a head control unit 123, and a memory unit 1227 (described later). The light receiving element 152 receives a part of the ultraviolet ray U emitted from the semiconductor element and sends the received signal to the head control unit 123. The head control unit 123 sends this information to the control unit 114 of the controller unit 110, grasps the ultraviolet output output from the semiconductor element, and corrects the drive signal so as to obtain desired ultraviolet irradiation. Thus, accurate ultraviolet irradiation is realized by detecting the actually outputted ultraviolet irradiation value and adjusting the input value (driving signal) based on this value.

  As Embodiment 2 of the present invention, an example of feedback control will be described based on the block diagram of the ultraviolet irradiation apparatus 200 shown in FIG. The control unit 214 calculates a drive signal for a semiconductor element necessary for obtaining a desired output based on the ultraviolet irradiation condition set by a setting unit (described later). The calculated value is converted from a digital signal to an analog signal by the D / A converter 219 and sent to the drive circuit 218. The drive circuit 218 is a circuit for driving a semiconductor element. When the semiconductor element is a UVLED, the drive circuit 218 is configured by a constant current circuit or the like as a drive circuit for current driving the UVLED 251. The drive current supplied from the drive circuit 218 to the head unit 220 via the cable unit 230 is supplied to the UVLED 251 via the head control unit (or directly). A part of the ultraviolet rays emitted from the UV LED 251 is received by the light receiving element 252 installed in the head unit 220 and converted into an analog electric signal by the light receiving circuit 2233. The light receiving circuit 2233 can also be realized by a head controller. The converted electrical signal is sent to the controller unit 210 via the cable unit 230, converted into a digital signal by the A / D conversion unit 2191, and received by the control unit 214. The control unit 214 controls the drive current of the UVLED 251 so that the amount of ultraviolet light from the UVLED 251 is constant. That is, when the output set by the setting unit is less than the drive current, the drive current is increased, and when the output exceeds the set value, the drive current is decreased. As a result, stable ultraviolet irradiation is realized regardless of variations in characteristics among semiconductor elements, deterioration due to use, and the like. Note that the above is an example, and for example, the light receiving circuit can be omitted and the received light signal can be directly captured by the control unit.

(Semiconductor element life prediction)
In addition, by monitoring the output of the semiconductor element with the light receiving element, it is possible to grasp the replacement time of the semiconductor element due to aging and life. For example, when the output value of the semiconductor element falls below a preset output value, the ultraviolet irradiation device issues an alarm and prompts the user to replace the semiconductor element. As a result, the user does not need to record the replacement time or regularly check the output or elapsed time. Therefore, it is possible to carry out replacement work and maintain accurate UV irradiation. Hereinafter, as an embodiment 3 of the present invention, an example of UVLED lifetime prediction will be shown. In the circuit of FIG. 2, ultraviolet light output from the UVLED 251 is detected by the light receiving element 252 and converted into an electric signal by the light receiving circuit 2233. The converted electrical signal is input to an integrator to calculate a feedback amount per unit time. The feedback signal is sent to the controller unit 210, and the drive current corresponding to the feedback signal is increased. On the other hand, the feedback amount is integrated over time, and when the integrated value exceeds a preset specified value, it is determined that the deterioration of the UVLED 251 exceeds the specified value, and a warning is issued. The specified value is set in advance based on the characteristics of the UVLED 251 and the required amount of ultraviolet rays. In particular, when the feedback amount exceeds a certain amount, it falls below the set ultraviolet output, so the time when it becomes difficult to maintain the output is set as the lifetime. The integrator may be an analog circuit or a digital process. When an analog circuit is employed, processing is performed on the head unit 220 side, and the processing result is sent to the controller unit 210 side. The light receiving circuit and the integrator can be realized by the head controller, but may be separate members. On the other hand, when digital processing is performed, the analog signal output from the light receiving circuit 2233 to the controller unit 210 is converted into a digital signal by the A / D conversion unit 2191 and input to the control unit 214. The control unit 214 samples the feedback signal at regular intervals and sequentially adds it to a register, an external memory, or the like. Then, the added value per unit time is compared with a predetermined value set in advance, and it is determined that the service life has been reached when a predetermined value is exceeded. In this way, processing can be performed by a digital counter with an arithmetic element such as a CPU constituting the control unit 214. In this case, since processing on the head unit side can be reduced, the head unit can be simplified and downsized. can get.

(warning)
As a means for alarming when a semiconductor element has reached the end of its life, a method for displaying a message on a display unit (described later) of the controller unit 210, a blinking pattern change or color change, or a dedicated display unit for notifying the replacement time is provided. Visual means such as, or in addition to this, a method of appealing to hearing such as notification by alarm, warning sound, voice guidance, physical notification means by vibration of the head unit 220 including the corresponding semiconductor element, A method of forcibly stopping the operation and not recovering until the replacement is completed can be used as appropriate. In addition, the controller unit 210 can transmit a warning signal to the outside and perform a predetermined operation such as a warning display on the externally connected device. On the other hand, in a configuration in which a plurality of semiconductor elements are provided in one head part, the lifetime can be confirmed for each semiconductor element. For example, when one semiconductor element reaches the end of its life, other semiconductor elements can be driven without replacement. Various aspects such as prompting replacement when all semiconductor elements have reached the end of life or prompting replacement when one or more predetermined number of semiconductor elements have reached the end of their life can be employed as appropriate. In addition to the deterioration due to the lifetime, the output of the semiconductor element may become unstable or may not operate due to poor electrical contact or disconnection. For this reason, it is possible to add a disconnection detection function that monitors the current supply state and issues a warning when the current is not supplied. Alternatively, a malfunction of the drive circuit system can be detected based on the electrical state of the input side terminal and the output side terminal of the drive element such as a semiconductor element. As a result, problems caused by electrical contact can be easily detected, and the installation and maintenance work of the ultraviolet irradiation device can be facilitated.

(Timing for UV monitoring)
In both output stabilization and life detection using the light receiving element described above, the detection of the ultraviolet output can be performed continuously, or can be detected by operating the light receiving element at a predetermined timing. The constant detection method has an advantage that the output is maintained constant by correcting in real time even if the ultraviolet ray amount is lower than the set amount. On the other hand, since deterioration of a semiconductor element generally proceeds slowly, accurate control can be performed without constantly monitoring. Therefore, sufficient ultraviolet irradiation can be realized by monitoring the output at discrete timing rather than continuously. Also, with this method, the driving time of the light receiving element can be shortened, so that the life of the light receiving element can be extended. Furthermore, by protecting the light receiving element from being irradiated when the light receiving element is not used, it is possible to prevent deterioration of the light receiving element due to the ultraviolet light. For example, the light receiving operation is performed every time a predetermined operation such as the timing of UV irradiation trigger input or the timing of UV irradiation is performed when the UV irradiation apparatus is turned on or off. Alternatively, detection can be performed at predetermined time intervals. When detecting at a predetermined time interval, it is possible to monitor the amount of received light by actually irradiating ultraviolet rays at a fixed period, but preferably the period during which the ultraviolet rays are output by using an ultraviolet irradiation device and the fixed period are The amount of received light is detected at the overlapping timing. According to this method, it is not necessary to perform ultraviolet irradiation only for the operation of the light receiving element. Further, in the method of monitoring the ultraviolet output at a constant period, even when the ultraviolet irradiating device is not used, the ultraviolet rays are regularly emitted, and the ultraviolet rays may be output at a timing not intended by the user. Therefore, by taking the AND of the user's usage and the detection timing and performing the detection only when the detection timing and the ultraviolet irradiation match, the ultraviolet output can be confirmed safely and efficiently.

(Prediction from deterioration curve)
The foregoing has described the stabilization of the ultraviolet output using the light receiving element and the replacement time monitoring of the semiconductor element. Next, a method for predicting the degree of deterioration based on the characteristics of deterioration due to the use of a semiconductor element without using a light receiving element will be described. In general, semiconductor devices are somewhat unique in that the actual output decreases depending on the usage time and output, so this characteristic curve is stored in advance, and the usage history of the semiconductor device, that is, usage time and output. Is recorded, and the progress of deterioration can be predicted to some extent by comparing these. According to this, it is possible to correct the drive signal in consideration of the deterioration from the history information and to warn the replacement time without monitoring by the light receiving element. Hereinafter, as a fourth embodiment of the present invention, an example of a prediction method will be described based on the block diagram of the ultraviolet irradiation apparatus shown in FIG. 3 and the graphs of FIGS. 4 and 5. The ultraviolet irradiation device 300 of FIG. 3 includes a memory unit 3227 for each head unit 320. The memory unit 3227 records the driving time of irradiation with ultraviolet rays and the driving current corresponding to the output as history information of actual driving of the UVLED 351 which is one form of the semiconductor element. The deterioration of the UVLED is determined depending on the integrated output obtained by integrating the driving time and the output. A method for calculating the output degradation by calculating the integrated output is shown in FIGS. FIG. 4 is a graph showing a deterioration curve in which the ultraviolet output decreases with the driving time when the driving current is constant, and FIG. 5 is a broken line showing the deterioration curve of the UVLED output when the driving current is constant. Yes. In this example, shows an integrated output M of the drive time t ₁ by the shaded region. This integrated output M indicates that the amount of ultraviolet light when irradiated with ultraviolet light for a driving time t ₁ with a constant driving current is reduced by 20% from the initial 100%. When the drive current is larger than the constant current, the integrated output increases, so that it is approximated to the irradiation for a longer time. Thus, by calculating the position of the graph corresponding to the integrated area, the decrease in output is determined. The driving time and output are recorded in real time in the memory unit 3227 every time the ultraviolet rays are irradiated, and at the same time, the integrated output is calculated. When the decrease in the amount of ultraviolet rays is determined according to the integrated output, the drive current is corrected accordingly and the drive current is increased so as to obtain a predetermined amount of ultraviolet rays. As a result, the amount of ultraviolet rays within a certain range is always maintained.

  A deterioration curve of the UVLED, that is, a graph showing a decrease in the amount of output of the ultraviolet light with respect to the driving time when the driving current is constant is held in the memory unit 3227 in advance. FIG. 4 shows an example of a UVLED deterioration curve. In this example, the deterioration curve when the drive current is 700 mA is indicated by a solid line, and the deterioration curve when the drive current is 500 mA is indicated by a broken line. As described above, since the deterioration curve is almost uniquely determined according to the semiconductor element to be used, the deterioration curve of the semiconductor element to be used is held in the memory unit 3227 and can be obtained by the actual driving time and output. Deterioration can be calculated by referring to the integrated output, and the output value can be maintained at a desired value by increasing the drive current accordingly. When the deterioration further progresses to a predetermined value, it is determined that the replacement time has come, a warning is given, and the user can be prompted to replace. For the details of these output maintenance and warning, the same methods as those in the above-described embodiments and known methods can be adopted as appropriate.

  Note that the process of predicting deterioration from the irradiation history and the deterioration curve recorded in the memory unit 3227 may be performed on the controller unit side as well as on the head unit side. When performing on the controller unit 310 side, the storage unit 316 stores the deterioration curve in advance, and the control unit 314 performs the calculation. When the processing is performed on the head unit 320 side, the deterioration curve is stored in advance in the memory unit 3227 as described above, and the head control unit 323 performs necessary calculations. The memory unit may be integrated with the head control unit. Further, instead of using the degradation curve, it is possible to create a lookup table showing a decrease in output corresponding to the irradiation history of the semiconductor element in advance and refer to this. As described above, while comparing the actual integrated output with the integrated output obtained from a typical deterioration curve, the drive current is automatically increased to correct the output value of the amount of UV light and stabilize the desired UV irradiation. The replacement time is not lost by the replacement time notification function, and accurate ultraviolet irradiation can be maintained over a long period of time.

  Next, the operation of the ultraviolet irradiation device will be described with reference back to FIG. The ultraviolet irradiation device can be switched between a setting mode for setting ultraviolet irradiation conditions and an irradiation mode for actually irradiating ultraviolet rays. The ultraviolet irradiation conditions set by the setting unit (described later) in the setting mode are stored in the storage unit 116. The setting unit sets a plurality of ultraviolet irradiation conditions and stores them in the storage unit 116. In the irradiation mode, the control unit 114 calls a necessary ultraviolet irradiation condition setting from the storage unit 116, and the control unit 114 supplies a driving current from the power supply unit 112 to the head unit 120 according to this setting, and controls the semiconductor element 150 of the head unit 120. To do. The ultraviolet irradiation conditions can be set independently for each head part.

  The controller unit 110 is provided with a head unit connection unit 160 for connecting the head unit 120. In the example of FIG. 1, only one head unit is connected, but a plurality of head unit connection units 160 can be provided so that a plurality of head units can be connected to one controller unit. Each of the plurality of head unit connection units 160 is assigned a unique channel number, and is distinguished from other head unit connection units by the channel number. The head unit 120 may be provided with an identification unit capable of displaying identification information for identifying each head unit 120 for each channel. The identification information displays information on the channel number, so that the user understands the channel number assigned to each head unit, thereby distinguishing the plurality of head units from each other. The identification information can be displayed not only by directly displaying the channel number but also by using a plurality of lighting combinations or lighting patterns. Therefore, the display here includes not only display of numbers and character information but also information display by lighting. The lighting includes a continuous lighting display and a lighting display with blinking and strength. When the head unit 120 is identified, the UV irradiation apparatus is instructed to execute the identification operation from the setting unit of the controller unit 110. When the identification operation is instructed, the control unit 114 of the controller unit 110 generates an identification signal and sends it to the head unit 120 side. When the head unit 120 receives the identification signal, the head unit 120 displays identification information on the identification unit. The user can recognize the channel number by looking at the identification information displayed on the identification unit of the head unit 120, and can distinguish the head unit 120 based on the channel number. An identification part is a member which performs the display for showing identification information, and is provided with a lighting part. The lighting part is composed of a light emitting element, and for example, a light bulb or a semiconductor light emitting element can be used. An LED is preferably used.

(Semiconductor element)
A semiconductor light emitting device such as a light emitting diode (LED) or a semiconductor laser (LD) can be used as the semiconductor device which is an ultraviolet ray source. These semiconductor elements have excellent features such as small size, high efficiency, low calorific value, long life and resistance to mechanical vibration compared to mercury xenon lamps and the like, and can be used ideally. In this embodiment, an ultraviolet light emitting diode (UVLED) that directly irradiates ultraviolet light is used as a semiconductor element. In the UVLED, for example, a nitride compound semiconductor represented by the general formula In _x Al _y Ga _1-xy N (0 ≦ x, 0 ≦ y, x + y ≦ 1) is used for the active layer (light emitting layer). Things are available. In addition, a double hetero structure, a single quantum well structure (SQW), a multiple quantum well structure (MQW), or the like can be appropriately employed for the light emitting layer. Needless to say, the present invention is not limited to the UVLED that directly irradiates ultraviolet rays, and a configuration that converts the irradiation light of the LEDs into ultraviolet light by using, for example, a wavelength conversion element or the like can be appropriately employed. The UVLED is turned on only when necessary, in other words, it is not always turned on, thereby suppressing power consumption and extending the life of the UVLED. As the wavelength of ultraviolet light output from the semiconductor element, near ultraviolet light having a wavelength of 300 to 400 nm, for example, a wavelength of 380 nm or 365 nm, can be used, and the wavelength is determined according to the ultraviolet curable resin used.

(UV curable resin)
As the ultraviolet curable resin, any resin that cures when irradiated with ultraviolet rays can be used. For example, an epoxy resin including an alicyclic epoxy resin and a glycidyl group-containing epoxy resin, an ultraviolet-activated cationic polymerization catalyst, or a cationic polymerization inhibitor. Including resins can be used. After applying such an ultraviolet curable resin composition to the surface of the object, ultraviolet rays are irradiated to form a cured film of the ultraviolet curable resin composition.

(Cable section 130)
As the cable unit 130, a wire harness in which a power line and a signal line are bundled is used. Since this cable part 130 is a simple electric signal line that does not include an optical path such as an optical fiber, the cable part 130 is not subject to the restriction of the total length due to the limitation of the bending angle or the light attenuation, and is used in the conventional ultraviolet irradiation device. It can be made thinner and lighter than the flexible cable that has been used, has high flexibility and is extremely easy to handle. Moreover, there is no restriction on the total length, and the length can be increased. For this reason, when different ultraviolet irradiation conditions are set and used for a plurality of head units 120, the cable can be extended and connected to one ultraviolet irradiation device, so that the system design and arrangement can be flexibly supported.

(Head 120)
Next, the external appearance of the head part 120 is shown in FIGS. 6A is a front view of the head unit 120, and FIG. 6B is a partial cross-sectional view showing the internal structure. 7 to 9 are exploded views of the head unit 120, FIG. 7 is an exploded perspective view seen from above, FIG. 8 is an exploded perspective view seen from the lower side opposite to FIG. 7, and FIG. The perspective view which shows the state which connected 8 connection connectors 1231 and 1244, respectively is shown, respectively. The head portion 120 shown in these drawings includes a head main body portion 122 having a cable portion 130 connected to the proximal end side, a cooling block 124 detachably coupled to the distal end side thereof, and a detachably coupled to the distal end side thereof. An interchangeable lens holder 126 is provided. The head main body 122 has a size that can be gripped by the user, and includes a hollow box-shaped case in which case members 1221 and 1222 that are vertically divided and a base end member 1223 are combined as shown in FIG. A substrate 1224 is accommodated in the housing. A cable connector 1225 to which the cable portion 130 is connected is attached to the base end member 1223, and the cable portion 130 and the substrate 1224 are electrically connected via the cable connector 1225.

  The substrate 1224 includes electronic components for controlling the drive by supplying the drive current received from the cable unit 130 to the UVLED 150. On the substrate 1224, an indicator LED 1226 is mounted as an indicator for displaying the ON / OFF state of ultraviolet irradiation. In the example of FIG. 7, two indicator LEDs 1226 are arranged to increase the amount of light. However, it goes without saying that one LED may be used by using a light quantity required for the indicator or a high-brightness LED. Moreover, it can also be set as 3 or more LED.

Various electronic components for receiving a drive signal generated by the control unit 114 of the controller unit 110 and supplying a drive current to the UVLED 150, a memory unit 1227, an adjustment circuit 1228, and the like are mounted on the substrate 1224. . The memory unit 1227 stores the operating time of the head unit 120 and is used for recording the initial characteristics of the UVLED 150, and an E ² PROM that is a nonvolatile memory can be suitably used.

(UVLED150 adjustment work)
A semiconductor element such as the UVLED 150 has good linearity of output with respect to the drive current, but the output tends to decrease with use time as described above. In addition to the automatic adjustment of the output using the light receiving element and the irradiation history described above, the fluctuation of the output due to deterioration with time can be adjusted manually in the fifth embodiment. The drive current is manually adjusted for each head unit 120 by an adjustment circuit 1228 such as a semi-fixed resistor (current adjustment trimmer) as shown in FIG. In the example of FIG. 6B, the semi-fixed resistor constituting the adjustment circuit 1228 is configured to be mounted on a substrate in the head unit 120 and cannot be adjusted from the outside. The situation where the drive current is changed is avoided. However, it is also possible to employ a configuration that allows adjustment of the drive current from the outside. For example, the resistance value can be adjusted with a specially shaped tool, or a small hole is opened in the case of the head portion 120 so that the resistance value can be adjusted from the hole. Alternatively, the controller portion 110 or the head portion can be adjusted. For example, a method of allowing the adjustment function of the adjustment circuit 1228 to be called by a specific operation, such as a long press of an individual setting switch provided at 120, can be employed.

  In order to perform such adjustment of the drive current periodically, every time the usage time of each head unit 120 reaches a certain time, a report is made to the user to prompt the user to adjust the drive current. The memory unit 1227 provided in each head unit 120 updates and stores the integrated value of the driving time of the UVLED 150, that is, the driving integrated time. The control unit 114 of the controller unit 110 controls driving of the UVLED 150 of the head unit 120 via a D / A conversion unit, a drive circuit, and the like, and writes an integrated value of the driving time in the memory unit 1227 of the head unit 120. This writing (update storage) is performed every predetermined time (for example, every minute). Then, when the drive integration time read from the memory unit 1227 reaches a predetermined adjustment time, the control unit 114 outputs a notification so that the UVLED 150 is adjusted. As the notification output, for example, blinking display of LED, buzzer sound, etc. are used. Alternatively, when the controller unit 110 is provided with a display capable of displaying a message, a message prompting the adjustment work of the UVLED 150 may be displayed using the display. The user grasps that the time required for adjustment work has been reached based on the notification output, and performs current correction using the adjustment circuit 1228 as described above. For example, in consideration of a decrease in output with respect to a reference drive current, adjustment is made so that the drive current increases. Further, when the drive integration time reaches the lifetime of the UVLED 150, a notification output that prompts replacement of the UVLED 150 may be performed.

  Further, the memory unit 1227 stores data relating to the initial characteristics of the UVLED 150 and can be used for adjusting the drive current. In general, there is an individual difference (variation) in the initial luminance of the UVLED 150, and therefore an initial luminance adjustment circuit 1228 is usually required in the drive circuit on the head portion 120 side of the UVLED 150. For the initial luminance adjustment circuit, a semi-fixed resistor or the like is used. For example, the adjustment circuit 1228 shown in FIG. Then, it is necessary to perform initial adjustment by an initial luminance adjustment circuit in each head unit 120 so that the ultraviolet irradiation power becomes a predetermined value for each head unit 120.

  In the ultraviolet irradiation apparatus of the fifth embodiment, the initial luminance adjustment circuit as described above is stored in the memory unit 1227 by storing the initial characteristic data regarding the initial luminance measured in advance of the UVLED 150 mounted on each head unit 120. And the initial adjustment work using this becomes unnecessary. That is, the control unit 114 reads the initial characteristic data from the memory unit 1227 and determines an appropriate basic drive current (more precisely, a digital value corresponding to the initial characteristic data) according to the initial characteristic data.

  The digital value corresponding to the drive current output from the control unit 114 is converted into an analog voltage by the D / A conversion unit and is given to the drive circuit. The drive circuit drives the UVLED 150 of the head unit 120 with a drive current corresponding to the applied analog voltage. In addition, since this drive current can be increased / decreased adjusted by the setting part, this can adjust the ultraviolet irradiation output.

  As described above, by providing the memory unit 1227 on the head unit 120 side, accurate adjustment according to the characteristics of the UVLED 150 provided in the head unit 120 can be realized. For example, when the channel of the head connection unit 160 that is one form of the head connection unit of the controller unit 110 to which the head unit 120 is connected is uniquely fixed, a memory unit may be provided on the controller unit 110 side as described above. Adjustment is possible. This is because the memory unit on the controller unit 110 side can store drive integration time and initial characteristic data for each channel. However, when the channel to which the head unit 120 is connected is changed, the above method cannot be used, and the user side always stores the connection destination UV irradiation device and its channel number for each head unit 120 by some means. It takes a lot of time and is not easy to use. Therefore, by providing the memory unit 1227 on the head unit 120 side as described above, even if the head unit 120 is connected to any channel number of any ultraviolet irradiation device, accurate driving according to the characteristics of the head unit 120 is performed. Current adjustment is realized and usability is improved.

(Cooling block 124)
In addition, since the UVLED 150 that emits ultraviolet rays tends to generate more heat than the LED that emits normal visible light, it is preferable to provide a heat dissipation mechanism in the head unit 120 so that it can be used stably for a long period of time. In the example shown in FIGS. 6 to 9, the UVLED 150 is connected to the cooling block 124. The cooling block 124 functions as a heat sink that cools heat generated during operation of the UVLED 150, and is made of a metal having good thermal conductivity such as aluminum. The UVLED 150 is fixed in close contact with the front end surface of the cooling block 124. FIG. 10 is a diagram illustrating a state in which the UVLED 150 is closely fixed to the front end surface of the cooling block 124. As shown in this figure, the UVLED 150 is fixed to the front end surface of the cooling block 124 by three fixing screws 1241.

(Lens holder 126)
The lens holder 126 houses one or a plurality of optical system lenses 1261 for condensing ultraviolet rays emitted from the UVLED 150. FIG. 11 is an exploded view showing an example of the lens holder 126 and its internal structure. In this example, the first lens 1261A and the second lens 1261B are fixed inside the lens holder 126 by a spacer 1262 and a lens fixing cap 1263 with two lenses. Although a single lens can be used, the lens size tends to increase with a single lens because of the refractive index. Therefore, in the fifth embodiment, the size of the lens itself is reduced by using two optical system lenses 1261 and irradiating ultraviolet rays from the UVLED 150 to the outside with the first lens 1261A and the second lens 1261B. As a result, the lens holder 126 and the head unit 120 can be reduced in size.

  FIG. 12 is a diagram illustrating an example of a method for fixing the cooling block 124 and the lens holder 126. In this example, the cooling block 124 and the lens holder 126 are fixed to each other by three fixing screws 1242. Further, by preparing and replacing a plurality of types of lens holders 126 having different combined focal lengths of the lenses, the tip of the head unit 120 and the ultraviolet irradiation target (ultraviolet curable resin) can be used while using the same head unit 120. It is possible to cope with the case where the distance from the adhesive fixing part) changes.

  Returning to FIG. 7, a method of fixing the cooling block 124 and the head main body 122 will be described. After the cooling block 124 and the lens holder 126 are fixed as described above, the upper case member 1221 and the lower case member 1222 constituting the head main body 122 are aligned with each other, and the distal end portion protrudes from the proximal side of the cooling block 124. The parts 1243 are sandwiched between the cooling blocks 124 with fixing screws 1229. Further, the base end member 1223 is fixed to the base end surfaces of the upper case member 1221 and the lower case member 1222 using a fixing screw 1230.

  As shown in FIGS. 8 and 9, the cooling block 124 including the cable connector 1225 and the UVLED 150 is electrically connected to the substrate via connection connectors 1231 and 1244, respectively. As a result, the UVLED 150 receives power supply from the controller unit 110 via the cable unit 130 and is driven and controlled. Thus, it has the advantage that it is easy to disassemble each part and to perform maintenance work, such as replacement and repair, by connecting each block that requires electrical connection via a connection connector. In particular, the head unit 120 shown in the figure has a structure in which a head main body unit 122, a cooling block 124, and a lens holder 126 are coupled in order, so that the head unit 120 can be easily divided for each unit and has excellent maintainability.

  Further, as shown in FIGS. 8 and 9, the lower case member 1222 has a through hole 1232 that is a screw hole for fixing the head portion 120 to a holder or the like. As shown in FIG. 7, a protective plate 1245 is provided on the lower case member 1221 so that the tip of the screw does not damage the substrate 1224 or the mounted components on the substrate when the head portion 120 is fixed by screwing screws or the like. It is fixed and blocks between the through hole 1232 and the substrate 1224.

(Light receiving element 152)
As the light receiving element 152, a photodetector (photodetector) can be used. For example, a photodiode or a phototransistor can be used. The light receiving element 152 is disposed at a position where it can receive ultraviolet leakage light output from the semiconductor element. By utilizing the leaked light, the ultraviolet light output can be detected by the light receiving element 152 without impairing the amount of the ultraviolet light output to the outside. The light receiving element 152 is preferably disposed on the side of the semiconductor element in a position and posture where leakage light can be detected. In the example of FIG. 1, the light receiving element 152 is positioned between the UVLED 151 and the lens unit 1260 and is disposed in a posture facing the optical axis of ultraviolet rays. Examples of arrangement of the light receiving elements of the ultraviolet irradiation devices according to Embodiments 6 to 9 are shown in FIGS. 13 to 16, respectively. In these examples, a sectional view of a portion provided with a UVLED and a lens portion of a head portion, which is a portion to which ultraviolet rays are output, is shown.

  In the ultraviolet irradiation apparatus according to the sixth embodiment shown in FIG. 13, the side surface of the optical axis is set substantially perpendicular to the optical axis so as to receive leakage light leaking in a direction perpendicular to the optical axis of the ultraviolet light output from the UVLED 1351. The light receiving element 352 is arranged so as to face the surface. Specifically, a light receiving window 1327 is formed in which a part of the side surface of a cylindrical lens holder 1326 covering the UV irradiation direction of the UVLED 1351 disposed on the head substrate portion 1354 is opened, and is aligned with the light receiving window 1327. The light receiving element 352 is disposed outside the lens holder 1326. In the head unit 120 shown in FIG. 13, the inner wall surface of the lens holder 1326 is blackened so that ultraviolet rays do not leak from the lens holder 1326. Further, inside the lens holder 1326, as a lens portion, a stray light cut aperture 1364 for cutting stray light in order from the side closer to the UVLED 1351, an optical lens 1361 for projecting light, a reflected light cut filter 1365 for cutting reflected light, and the like. Is provided. Due to the stray light cut aperture 1364, ultraviolet light is scattered in the space between the aperture and the UVLED 1351, and leakage light can be taken out from the light receiving window 1327 opened to the side. The optical system lens uses two lenses, a first lens and a second lens.

  Further, in the light receiving element of the ultraviolet irradiation device according to the seventh embodiment shown in FIG. 14, the light receiving element 452 is disposed not inside the lens holder 1426 but inside. Specifically, a light receiving window 1427 is opened to the side of the bottom surface on which the UVLED 1451 is provided, and a light receiving element 452 is arranged substantially in parallel with the UVLED 1451 so that leakage light from the UVLED 1451 can be received therefrom. In this manner, by arranging the light receiving element 452 on the back surface of the UVLED 1451, the portion protruding from the lens holder 1426 can be reduced, which can contribute to the reduction in the diameter of the head portion. In addition, the component similar to the said FIG. 13 is employable as a component and arrangement | positioning of a lens part.

(Side view type)
13 and 14, the head main body portion is arranged on the end surface in the longitudinal direction so that the longitudinal direction of the head main body portions 1322 and 1422 constituting the main body of the head portions 1320 and 1420 and the optical axis of the ultraviolet output substantially coincide with each other. Shows a straight type with a lens part. On the other hand, in the ultraviolet irradiation device according to the eighth embodiment shown in FIG. 15, the lens is arranged on the side surface parallel to the longitudinal direction of the head main body portion 1522 so that the longitudinal direction of the head main body portion 1522 and the optical axis of the ultraviolet output are substantially orthogonal. It is a side view type with parts. The type that outputs ultraviolet rays from the side rather than the end face of the head portion can be suitably used in a usage mode in which the irradiation space is narrow, such as inserting into a gap or the like to emit ultraviolet rays laterally. Also in this type, the light receiving element 552 can be arranged facing the circumferential direction of the optical axis of the UVLED 1551. That is, the light receiving window 1527 is opened on the side wall of the cylindrical lens holder 1526, and the light receiving element 552 is arranged so as to coincide with the light receiving window 1527. Thereby, the leakage light leaking to the side of the optical axis is detected by the light receiving element 552, and feedback control can be realized. In addition, the component similar to FIG. 13, FIG. 14 can be employ | adopted for the component components and arrangement | positioning of a lens part.

  Furthermore, the light receiving element can be integrated with the UVLED. In the ultraviolet irradiation apparatus according to Embodiment 9 shown in FIG. 16, an example is shown in which a UVLED package 1651 in which chips of light receiving elements 652 are arranged in a package on which UVLED chips 16511 are mounted is shown. By using the chip-shaped light receiving element 652 and arranging it in parallel with the UVLED chip 16511 as shown in the plan view of FIG. 16A, the inside of the UVLED package 1651 is not provided in the head main body portion 1622 separately. Thus, it is possible to detect ultraviolet light, and it is not necessary to provide a light receiving window or the like in the lens holder 1626, which can contribute to simplification and miniaturization of the head portion as shown in the sectional view of FIG. In addition, the example in which the UVLED is used as the semiconductor element has been described above. However, when a semiconductor laser (LD) is used as the semiconductor element, a light receiving element is disposed on the light extraction surface side of the resonance surface to detect leakage light. Alternatively, a light receiving element may be arranged on the reflective surface side to detect leakage light. Further, in both the UVLED and UVLD examples, the light receiving element does not necessarily need to use leakage light, and may be configured to receive ultraviolet rays irradiated from the head unit to the outside when a sufficient ultraviolet ray amount can be secured. it can. In this case, the light receiving element is not limited to a mode in which the light receiving element is built in the head part, and a position where the light receiving element can be received as ultraviolet light by using the light receiving element as a member independent of the head part, You may arrange in.

(Shutter)
In the examples of FIGS. 13 to 15, a shutter that can be opened and closed can be provided in the light receiving window. In the figure, the positions of the shutters 1328, 1428, and 1528 are indicated by broken lines. By closing the shutter, the light receiving windows 1327, 1427, and 1527 are closed, and the leakage light of ultraviolet light is not irradiated to the light receiving element, so that the ultraviolet light is irradiated when the light receiving element is not used and deterioration due to ultraviolet light is suppressed. it can. In particular, since a semiconductor element such as a UVLED deteriorates gradually unlike a high-pressure mercury lamp or the like, it is not necessary to constantly monitor the output. Therefore, it is sufficient to detect the ultraviolet light at a predetermined timing, and when the light is not used, the light receiving element is cut off from the ultraviolet light, whereby deterioration due to the ultraviolet light can be reduced and the life of the light receiving element can be extended. The opening and closing of the shutter can be performed in synchronization with the timing of ultraviolet light detection by the light receiving element. For example, the light receiving circuit or the head control unit controls the opening and closing of the shutter, opens the shutter in synchronization with the timing of ultraviolet light detection, and closes the shutter after the detection is completed. The shutter can be a mechanically opened / closed aperture or a sliding lid.

(Details of side view type)
Next, a side view type structure as an ultraviolet irradiation apparatus according to Embodiment 10 of the present invention will be described with reference to FIGS. FIG. 17 is a perspective view from the direction in which the lens portion can be seen in the side view type head portion 1720, and FIG. 18 is a perspective view as seen from the opposite surface of FIG. The head portion 1720 shown in these drawings is in the shape of a prism as in FIG. 6 and the like, and the mounting position of the lens portion 1760, which is an ultraviolet irradiation portion, is provided not on the end surface in the longitudinal direction of the head main body portion 1722 but on the side surface end. . In this example, a side-view lens mounting portion 1727 formed in the same shape is provided as a separate member at the tip of the head main body 1722 so as to extend the prismatic head main body 1722. 19 to 22 show details of the lens unit 1760. FIG. FIG. 19 is an exploded perspective view of the side view lens mounting portion 1727, and FIG. 20 is an exploded perspective view showing a state in which the side view lens mounting portion 1727 of FIG. 21 is an exploded perspective view in which the lens holder 1726 is added except for the UVLED 1751 and the head substrate portion 1754 from FIG. 20, and FIG. 22 is a cross-sectional view showing the lens holder 1726 in FIG.

  As shown in these drawings, the side view lens mounting portion 1727 is divided into a right case member 1727A and a left case member 1727B, and a head substrate portion 1754 is accommodated therein and fixed with screws at three positions. Is done. The head substrate 1754 has a substantially U-shaped cross section, and a UVLED 1751 is placed and fixed on the U-shaped bottom surface. The head substrate portion 1754 and the left case member 1727B are in contact with each other in a heat conductive state and function as a heat dissipation plate for the UVLED 1751. Further, as shown in FIG. 19, a protrusion 1754A for fixing to the head main body 1722 and screws is provided at the rear end of the head substrate 1754. The upper case member 1722A and the lower case member 1722B of the head main body 1722 are overlapped so that the protruding portion 1754A is sandwiched from the left and right, and screwed in the screw holes of the protruding portion 1754A. Fixed to the main body 1722. 17 to 19, the joint surface of the upper case member 1722A and the lower case member 1722B of the head main body 1722, and the joint surface of the right case member 1727A and the left case member 1727B of the side view lens mounting portion 1727. The mechanical strength is increased by rotating 90 °. The head substrate portion 1754 is provided with three screw holes for fixing the right case member 1727A and the left case member 1727B of the side view lens mounting portion 1727, respectively, and the upper case member 1722A and the lower case of the head main body portion 1722. Two screw holes for fixing with the member 1722B are formed on the left and right sides of the projecting portion 1754A.

  The lens holder 1726 is inserted and fixed in a cylindrical lens holder insertion portion 1727C provided on the inner surface of the right case member 1727A. The lens holder insertion portion 1727C is positioned so that the optical axis of the UVLED 1751 coincides with the optical axis of the lens portion set in the lens holder 1726 with the lens holder 1726 inserted therein. In the lens holder 1726, as shown in the cross-sectional view of FIG. 22, a hollow cylindrical inner holder 1726A is inserted from below into an outer holder 1726B that is also hollow cylindrical and has an inner diameter slightly larger than the outer diameter of the inner holder 1726A. In the meantime, the optical system lens 1761 is held. The inner holder 1726A and the outer holder 1726B are formed with a step portion for holding the optical system lens 1761. In the example shown in the exploded view of FIG. 19, the optical system lens 1761 is composed of two lenses. The lens holder 1726 can be attached to and detached from the lens holder insertion portion 1727C of the side view lens mounting portion 1727, and the lens portion can be easily replaced depending on the application. In the above example, the light receiving element is not shown. However, in the embodiment in which the light receiving element is added as shown in FIGS. 1 and 2, it is possible to add the light receiving element in the vicinity of or inside the UVLED. Needless to say.

(Narrow diameter)
Further, as an eleventh embodiment of the present invention, an example in which the outer diameter of the ultraviolet output portion of the head portion is reduced is shown in FIGS. The head main body 2322 shown in these drawings has a lens holder 2326 portion that protrudes from the head main body portion 2322 and has a small outer diameter, and is used in a small size such that an ultraviolet light output portion is inserted into a small hole. Can be suitably used in a mode in which the head portion is required. In the example shown in the perspective view of FIG. 23, the tip of the prism-shaped head main body 2322 is a protruding portion 2322C that protrudes in a slightly smaller prismatic shape, and a lens holder 2326 having a smaller diameter is inserted into the end surface. . FIG. 24 is an exploded view showing a state in which the upper case member 2322A of the head main body 2322 is removed, and FIG. 25 is an exploded perspective view in which each member is further exploded. As shown in these drawings, a mounting member that constitutes the lower case member 2322B of the head main body portion 2322, a UVLED 2351, a head substrate portion 2354, a lens holder 2326, and a UVLED holder 2355 are provided. The lens holder 2326 holds an optical system lens and the like inside. The lens holder 2326 is detachably attached to the head unit 120 and can be easily replaced with a lens holder having a lens according to the purpose. The UVLED 2351 uses a package type having a substantially square bottom surface in the examples of FIGS. 26 and 27, and is irradiated with ultraviolet rays having a predetermined wavelength from a UVLED chip incorporated in the package. Here, a UVLED chip having a center peak wavelength of 365 nm was used. An electrode 2356 is formed on the back surface of the UVLED 2351, that is, the surface in contact with the head substrate portion 2354. A stud 2357 is soldered to the electrode 2356 and wired as a lead. Further, a heat radiation land 2358 is formed on the side surface of the UVLED 2351. The head substrate 2354 is integrally fixed with one surface in electrical contact with the back surface of the UVLED 2351 as shown in FIG. 26, and the other surface is in thermal conduction with the UVLED 2351 as shown in FIGS. Touched. The UVLED holder 2355 functions as a heat sink that dissipates the UVLED 2351. The lower case member 2322B, which is a mounting member, is designed to have a size and shape that allows the UVLED holder 2355 and the like to be inserted and held therein, and the UVLED 2351, the head substrate portion 2354, and the UVLED holder 2355 are set in the lower case member 2322B. Positioned with Thereby, the optical axis of the UV output of the UVLED 2351 coincides with the optical axis of the lens portion of the lens holder 2326, and the head substrate portion 2354 to which the UVLED 2351 is fixed comes into contact with the UVLED holder 2355 in a state of heat conduction, and the heat generation of the UVLED 2351 is generated. Heat is radiated through the UVLED holder 2355. In this example, the straight type in which the optical axis of the ultraviolet ray and the longitudinal direction of the head main body portion are substantially coincident has been described. However, the above-mentioned reduced diameter structure can be applied to a side view type that outputs ultraviolet rays from the side surface of the head main body portion. Needless to say.

(Controller unit 110)
Next, as a twelfth embodiment of the present invention, a controller unit used in the ultraviolet irradiation device will be described with reference to the front view of FIG. In this example, a four-channel controller unit 110 to which four head units 120 can be connected is shown. The number of head units 120 that can be connected is determined by the number of channels, but it goes without saying that the number of channels can be 3 or less, or 5 or more. The controller unit 110 shown in this figure is provided with a display unit 142 and an operation panel 144 as a setting unit 140 for individually setting the ultraviolet irradiation conditions of the UVLED 150 on the front panel. In FIG. 28, the display unit 142 is arranged at the upper part of the front panel, and the operation panel 144 is arranged therebelow.

(Operation panel 144)
The operation panel 144 constituting the setting unit 140 is provided with <,>, ∧, ∨ switches 144A, 144B, 144C, and 144D, an escape switch 144E, and an enter switch 144F, which are selection switches for up, down, left, and right. The user operates these switches and sets the ultraviolet irradiation conditions of the UVLED 150 according to a predetermined procedure. Note that the operation panel 144 is not limited to this example, and various input devices such as a cross key, a numeric keypad, and a jog dial can be used. The operation panel may be a touch panel integrated with the display unit. Various switches provided on the operation panel 144 can be used in common for the operation of each head unit 120, and can be set by switching the channel to which each head unit 120 is connected.

  Note that the switches of the setting unit 140 need not be fixed on the controller unit 110, and may be provided as separate members from the controller unit 110. For example, a configuration in which switches are provided in a setting unit separate from the controller unit 110, such as a console, a remote controller, and a foot switch, and these are connected to the controller unit 110 by wire or wirelessly and operated is also within the scope of the present invention. . Further, as will be described later, settings and operations may be performed from an external connection device connected to the ultraviolet irradiation device.

  Further, in this specification, the setting unit includes an aspect that is used other than at the time of setting the ultraviolet irradiation condition. For example, the setting unit includes an irradiation switch that is used when the ultraviolet irradiation device is operated. For example, when a foot switch is connected as the irradiation switch to the controller unit 110, an ON / OFF input delay can be set to prevent chattering due to disturbance. The on-timing (delay setting) and off-timing (delay setting) of ultraviolet rays can be set individually or collectively using the setting unit.

(Display unit 142)
The display unit 142 constituting the setting unit 140 includes a 7-segment display using LEDs and a liquid crystal display. The user performs a setting operation while displaying and confirming the ultraviolet irradiation conditions such as the output of ultraviolet rays and the irradiation time set on the operation panel 144 on the display unit 142. The display unit 142 switches and displays the setting conditions of each head unit 120 on one screen. Further, as will be described later, a plurality of display units can be provided for each head unit 120 individually. The ultraviolet output is set and displayed by a relative intensity value, for example, a drive duty factor of the UVLED 150, but may be displayed by an absolute output value (mW or the like). Note that the display unit 142 can be configured by a liquid crystal or an organic EL to enable graphical display such as icon display. Further, color display may be possible.

  In addition, a channel display lamp 145 is provided for each channel below the display unit 142. Thereby, the channel currently selected and displayed on the display unit 142 can be distinguished. In the illustrated example, four channel display lamps 145 of 1 to 4 channels are provided. Further, an ultraviolet irradiation lamp 146 is disposed adjacent to these channel display lamps 145. The ultraviolet irradiation lamp 146 functions as a pilot lamp indicating that the ultraviolet rays are emitted (emission) from any of the head units 120, and is configured by, for example, an LED. That is, when the LED of the ultraviolet irradiation lamp 146 is lit, the user is notified that ultraviolet rays are being irradiated.

  A power switch 147 and a batch irradiation switch 148 are provided below the operation panel 144. The power switch 147 is a switch for turning on / off the power of the ultraviolet irradiation device. For example, by adopting a key switch as the power switch 147, it is possible to avoid a situation where the switch is unexpectedly turned on.

(Batch irradiation switch 148)
When the batch irradiation switch 148 is pressed, ultraviolet rays can be independently emitted from all the head units 120 in accordance with the respective ultraviolet irradiation conditions set in advance for each head unit 120 by the setting unit 140.

(Head connection part 160)
Furthermore, a head connection unit 160, an individual irradiation lamp 170, and an individual irradiation switch 180 are provided for each head unit 120 at the lower portion of the front panel. In FIG. 28, the head connecting portion 160 arranged vertically on the left side is a connector for connecting the cable of the head portion 120 and constitutes the head connecting portion. As described above, the controller unit 110 in FIG. 28 is provided with the 4-channel head connection unit 160 so that the four head units 120 can be connected. Of course, it is not necessary to use all the channels, and it is needless to say that only any of these channels can be used according to the use conditions.

(Individual irradiation lamp 170)
In addition, an individual irradiation lamp 170 is disposed adjacent to the right side of each head connection unit 160. The individual irradiation lamp 170 is a lamp for indicating that ultraviolet rays are irradiated from the UVLED 150 of the head unit 120 connected to each channel. Thereby, the user can confirm which head unit 120 is currently irradiated with ultraviolet rays. An LED or the like can also be used for the individual irradiation lamp 170. When the batch irradiation switch 148 is pressed, all the individual irradiation lamps 170 are turned on.

(Individual irradiation switch 180)
Furthermore, an individual irradiation switch 180 is arranged on the right side of the individual irradiation lamp 170. The individual irradiation switch 180 is a switch for individually turning on / off the ultraviolet output of the head unit 120 connected to each channel. By providing the individual irradiation switch 180 for each channel, the ultraviolet output of the head unit 120 connected to each channel can be individually operated. In particular, by providing the dedicated switch, each operation can be performed with a small number of operations (for example, only by pressing a button). Since the output of the head unit 120 can be turned ON / OFF, an ultraviolet irradiation device can be used more conveniently. However, it is also possible to configure the operation panel 144 to turn on / off each channel without providing an individual irradiation switch.

  As described above, the layout arrangement of the setting unit 140 has been described based on FIG. 28, but it goes without saying that these arrangements can be arbitrarily changed. For example, in the example of FIG. 28, a plurality of channels are arranged vertically, and the head connection unit 160, the individual irradiation lamp 170, and the individual irradiation switch 180 for each channel are arranged in the horizontal direction. However, as another embodiment, Channels can be arranged in the horizontal direction, and a head connection portion, individual irradiation lamp, individual irradiation switch, and the like for each channel can be arranged in the vertical direction. In the above-described embodiment, the irradiation lamp and the irradiation switch are provided separately. However, if a switch with a backlight that lights in the on state is used, these can be integrated into one member.

  As shown in FIG. 1, the controller unit 110 includes a power supply unit 112 and a control unit 114. The commercial power supplied from the AC inlet is supplied to the power supply unit 112 via the line filter, the fuse and the power switch 147, and the direct current stabilization voltage generated by the power supply unit 112 is supplied to the control unit 114. The control unit 114 can be realized by a gate array such as a microprocessor (MPU), a CPU, an LSI, an FPGA, or an ASIC. The control unit 114 includes a memory, and controls the intensity of near-ultraviolet rays from each head unit 120, irradiation timing, and the like according to a program stored in advance and a user's setting operation. A terminal block board and a communication connector are connected to the control unit 114, and an external control device such as a computer or a PLC (programmable logic controller) can be connected to the controller unit 110 using these interfaces. . As will be described later, the externally connected device can be used for setting ultraviolet irradiation conditions and for ON / OFF operation of the ultraviolet irradiation apparatus. That is, the setting unit 140 provided in the controller unit 110 of the ultraviolet irradiation device can be used for setting and operation, and the ultraviolet irradiation device can be turned on / off by a trigger input from an external device.

  For example, four head connection units 160 are connected to the control unit 114 in one controller unit 110, and each head unit 120 is connected to the control unit 114 of the controller unit 110 via these head connection units 160. And the control part 114 gives the electric signal for drive control of UVLED150 of each head part 120 to each head part 120, and controls the intensity | strength of near ultraviolet rays from each head part 120, and irradiation timing. Further, a front panel substrate is connected to the control unit 114. A display panel and various switches constituting the display unit 142 and the setting unit 140 provided on the front panel of the controller unit 110 are mounted on the front panel substrate. The user can individually set the intensity of near ultraviolet rays, the irradiation timing, and the like of the four head units 120 using the display unit 142 and the setting unit 140.

[Mode switching]
As described above, the ultraviolet irradiation device according to each embodiment of the present invention can be switched between the setting mode for setting the ultraviolet irradiation condition and the irradiation mode for irradiating ultraviolet rays by the control unit. For switching between the setting mode and the irradiation mode, a dedicated changeover switch can be provided, or a combination of specific switches or a long press can be used. In the present embodiment, the setting mode and the irradiation mode are switched between each other by long-pressing the escape switch 144E (for example, 3 seconds or more) in the operation panel 144 shown in FIG.

[Irradiation mode]
Details of the irradiation mode will be described below. First, in the present embodiment, in the irradiation mode of the ultraviolet irradiation device, a batch irradiation mode in which ultraviolet rays are irradiated from all the head units 120 and an individual irradiation mode in which ultraviolet rays are irradiated from one head unit 120 are provided. Yes. As described above, when the batch irradiation switch 148 is operated, the batch irradiation mode is executed, and when the individual irradiation switch 180 is operated, the individual irradiation mode is executed.

  Further, each irradiation mode can be distinguished into an automatic mode and a manual mode. The automatic mode is a mode in which the irradiation output and the irradiation time can be changed in accordance with preset ultraviolet irradiation conditions. That is, when the irradiation start command is received in the automatic mode, irradiation is started with the irradiation pattern registered for each head unit 120 in advance, and ultraviolet irradiation is automatically stopped after completion. On the other hand, the manual mode is a mode for switching ON / OFF of ultraviolet irradiation at a designated timing. That is, when an irradiation start command is received, irradiation is continued at a constant output until an irradiation stop command is received. Output is started when the irradiation switch is turned on, and is finished when the irradiation switch is turned off. As will be described later, the ultraviolet output value can be changed even in the manual mode.

  The ultraviolet irradiation start and stop commands in the irradiation mode are realized by the trigger input from the irradiation switch or terminal block 164 provided in the controller unit 110 as described above. In the present embodiment, the irradiation mode is executed when the irradiation switch is pressed once, and is interrupted or stopped when the irradiation switch is pressed again. In the case of interruption, the irradiation mode is resumed by maintaining the pause state and pressing the switch again.

[Manual irradiation mode]
The ultraviolet irradiation device can store a plurality of ultraviolet irradiation conditions set by the setting unit 140 in the storage unit 116. Further, the operation mode can be stored for each ultraviolet irradiation condition setting. In the manual mode, the ultraviolet output value can be stored for each head unit 120. Accordingly, in the individual manual irradiation mode, it is possible to irradiate each of the plurality of head units 120 with different ultraviolet output. Further, in the collective manual irradiation mode, different heads 120 can simultaneously start different ultraviolet outputs, and can simultaneously end irradiation. Moreover, since irradiation permission / non-permission can be set for each head unit 120, even if the head unit 120 is connected to the ultraviolet irradiation device, irradiation can be performed only from the desired head unit 120. In the conventional ultraviolet irradiation device, all the heads connected to the same device are output with the same output and timing, so as long as the head is connected to the device, the output is always generated along with the output of other heads. Could not stop. On the other hand, in this embodiment, since each head unit 120 is independent, there is an advantage that permission / non-permission of ultraviolet irradiation can be easily set.

[Automatic irradiation mode]
Also in the automatic mode, the irradiation pattern can be stored for each head. Therefore, in the batch automatic irradiation mode, irradiation can be started simultaneously with different irradiation patterns by the plurality of head units 120, and irradiation can be ended at different timings. As described above, such an operation cannot be realized by the conventional ultraviolet irradiation apparatus. In particular, it was impossible to stop at different irradiation patterns and different timings for each head. However, according to the present embodiment, it is possible to output each head unit 120 independently with different outputs and timings, and extremely high flexibility. High UV irradiation is realized. As described above, since irradiation permission / non-permission can be set for each head unit 120, even if the head unit 120 is connected to the ultraviolet irradiation device, irradiation can be performed only from the desired head unit 120. Furthermore, if irradiation start commands can be input for each head unit, ultraviolet irradiation can be started at different timings for each head unit. For example, it is only necessary to provide as many individual irradiation switches as the number of head units, or to prepare terminal block trigger inputs for the number of head units.

  To summarize the operation modes described above, in the batch automatic irradiation mode, ultraviolet irradiation is performed on all the head units 120 under ultraviolet irradiation conditions such as ultraviolet output and irradiation time preset for each head unit 120. When the batch irradiation switch is pressed, ultraviolet irradiation is started from each head unit 120, and ultraviolet irradiation is performed independently at various different outputs and times. Note that the end of ultraviolet irradiation differs for each head unit 120 according to each setting, and automatically ends for each head unit 120 when the setting is completed.

  In the collective manual irradiation mode, when executed, all the head units 120 output ultraviolet rays at a constant value. When the batch irradiation switch is pressed, ultraviolet irradiation is started from each head unit 120, and when the batch irradiation switch is pressed again, ultraviolet irradiation of each head unit 120 is stopped. Even in this case, the ultraviolet output value can be changed for each head.

  Further, when the individual manual irradiation mode is executed in each head unit 120, ultraviolet light is output from the head unit 120 at a constant value. Even in this case, the ultraviolet output value for each head can be changed.

[Individual automatic irradiation mode]
The individual automatic irradiation mode is a mode in which ultraviolet irradiation conditions are set for each head unit 120. The function corresponding to the individual automatic irradiation mode can be substantially realized by using the collective automatic irradiation mode even if not provided. That is, by irradiating only specific UVLEDs and not irradiating other UVLEDs, by setting the ultraviolet irradiation conditions such as the irradiation time and output of the specific UVLEDs, the UVLEDs are executed when the batch automatic irradiation mode is executed. Only can automatically perform UV irradiation with a set pattern. However, in this case, only specific UVLEDs can be irradiated with ultraviolet rays, and in order for other UVLEDs to perform operations corresponding to the individual automatic irradiation modes, it is necessary to be able to execute a plurality of batch automatic irradiation modes in parallel. There is. On the other hand, it is possible to set the batch automatic irradiation mode so as to operate a plurality of UVLEDs. However, when the operation timing for each UVLED changes, it becomes difficult to cope with it. On the other hand, since it may be more convenient for some users to set and execute automatic irradiation for each head unit, an individual automatic irradiation mode can be provided separately.

[Setting method of UV irradiation conditions]
Next, a method for setting ultraviolet irradiation conditions will be described with reference to FIG. Here, in order to obtain a pattern in which the ultraviolet rays irradiated from each head unit 120 change stepwise with time as shown in FIG. 30B, a plurality of rectangular waves as shown in FIG. As an example, consider an example in which individual rectangular wave conditions are set. Here, each rectangular wave shown in FIG. 30, that is, a set of ultraviolet irradiation conditions composed of a combination of a constant irradiation output and irradiation time is referred to as a step here.

[Rectangular wave irradiation pattern]
FIG. 29 shows an overview of a setting method when the head unit 120 includes one UVLED 150. In FIG. 29, first, in step 1001, the number of the head unit 120 is selected. As described above, in the present embodiment, four head units 120 are connected to channels 1 to 4, and the channel to be set is selected here. Next, in step 1002, a step number is selected. Steps are set in order from 1, and in this embodiment, up to 20 steps can be set in one ultraviolet irradiation condition setting. Next, an ultraviolet irradiation time is set in step 1003 for the selected step. Here, the number of seconds is specified. Furthermore, in step 1004, an ultraviolet irradiation output is designated. Here, the duty ratio is set. In step 1005, the setting is temporarily saved, and the process returns to the step number selection step, and loops until the setting is completed for all necessary steps. When the ultraviolet irradiation pattern as shown in FIG. 30 is set in this way, the ultraviolet irradiation condition setting is stored.

  Note that the order of the above steps can be changed as appropriate. For example, the irradiation time may be set after setting the irradiation output first.

  A flowchart showing the above steps in more detail is shown in FIG. First, in step 1201, an ultraviolet irradiation condition setting number (setting number) is selected. In the present embodiment, 20 ultraviolet irradiation condition settings from no0 to no19 can be recorded. Next, in step 1202, an irradiation mode is selected. There are three irradiation modes, U0 to U2, and designates a batch manual irradiation mode, an individual manual irradiation mode, and a batch automatic irradiation mode. In the present embodiment, a mode corresponding to the individual automatic irradiation mode is not adopted. Next, in step 1203, the channel number to which the head unit 120 for setting the ultraviolet irradiation condition is connected is selected. Here, four channel numbers CH1 to CH4 are selected.

  Next, in step 1204, it is set whether or not to permit ultraviolet output to the head unit 120 connected to the selected channel number. By making it possible to set permission / non-permission of ultraviolet irradiation for each head unit 120, it is possible to use the head unit 120 without outputting ultraviolet light from all the head units 120 connected in the conventional manner. If the output is permitted, the process proceeds to step 1205. If not permitted, it is determined in step 1204-1 whether or not all the head units 120 have been set. If not yet, the process returns to step 1203 to determine another head unit. The setting of 120 is continued, and when the setting of all the head units 120 is completed, the process jumps to step 1211.

  In addition, when providing several UVLED so that it may mention later, permission / non-permission of ultraviolet irradiation can also be set for every UVLED.

  Next, in step 1205, it is determined whether or not the irradiation mode selected in step 1202 is the automatic mode. In the case of the automatic mode, a step number is selected in the next step 1206. Up to 20 step numbers can be set from S0 to S19. If it is not the automatic mode, it is unnecessary to select a step number, and the process jumps to step 1207. In step 1207, the irradiation time is set. Enter the number of seconds here. Next, in step 1208, the irradiation output is set. Here, the duty ratio is input. Next, in step 1209, it is determined whether or not all necessary step numbers have been set. If not, the process returns to step 1206 to repeat the setting of the next step number. If completed, the process proceeds to step 1210 to determine whether or not the setting of all head units 120 has been completed. If not, the process returns to step 1203 to repeat the setting of other head units 120. If completed, the process proceeds to step 1211 and the above setting is stored in the storage unit 116 and the process ends.

[Hierarchy menu]
Next, display switching in the display unit 142 provided in the controller unit 110 will be described. In this embodiment, a hierarchical menu method is adopted. FIG. 32 shows an example of a hierarchical menu. As shown in this figure, the ultraviolet irradiation apparatus can be switched between an irradiation mode and a setting mode, and various menu items can be selected in each mode. Also, various setting items may exist for the selected menu item, and each item is set down to each layer as shown in the downward direction in FIG.

[Display in irradiation mode]
Next, a display example of the display unit 142 in the irradiation mode will be described based on FIG. In the irradiation mode, as shown in FIG. 33, items such as a setting number display during operation, current timer value display, current irradiation power value display, and cumulative irradiation time display are switched and displayed. Items are switched by the left and right <,> switches 144A, 144B. Further, when the escape switch 144E is pressed for a long time while displaying the highest hierarchy, the mode between the irradiation mode and the setting mode is changed as described above. On the other hand, when the escape switch 144E is pressed for a long time from a layer other than the highest layer, a transition is made to the highest layer of that mode.

(Setting number display during operation)
The setting number display during operation indicates the setting number currently selected. In this example, J0 is selected. Up to 20 settings can be stored as setting numbers from no0 to J19, and an arbitrary setting number is selected from these. As shown in FIG. 33, a channel display lamp 145 provided below the display unit 142 displays the head unit 120 for which irradiation is set for the currently displayed set number. Accordingly, the user can easily grasp which head unit 120 is irradiated with ultraviolet rays at the setting number being selected. In this example, it is shown that the UVLED 150 operates in all the head portions 120 of the channels 1 to 4.

  In this embodiment, the setting number is changed in the setting mode as will be described later. However, the setting number may be changed in the irradiation mode. For example, a method of moving to the setting number selection menu by pressing the enter switch 144F from the screen of FIG. 33 or a method of changing the setting number by pressing the ∧ / ∨ switches 144C and 144D from the screen of FIG. it can.

(Current timer value display)
The current timer value display indicates the ultraviolet irradiation time. In the example of the figure, it is shown that the head unit 120 connected to the channel 1 is set to irradiate for 12 seconds. When executing the setting of the ultraviolet irradiation condition of the set number, the remaining irradiation time is displayed in seconds from the set irradiation time in a countdown manner, and the user can easily know the remaining time. When displaying a channel for which the irradiation time is not set, it is displayed as --- when stopped, and the elapsed time is displayed in seconds in a count-up manner when executed. Thereby, the user can confirm how much irradiation time has passed now. As described above, by automatically switching the time display method between countdown and countup depending on whether or not the irradiation time is set, the user can know whether or not the irradiation time is set, as well as the elapsed time and remaining time. It can be used conveniently for grasping the situation when the ultraviolet curable resin is adhered. Moreover, the display unit of time can employ | adopt suitably the display in the ratio of the number of powder, the number of hours, or a progress condition other than the number of seconds.

  In the example of FIG. 33, the irradiation time of channel 1 is displayed, but when the ∧ and ∨ switches 144C and 144D are pressed in this state, the information can be switched to other channel information. Thus, in the present embodiment, the <,> switches 144A, 144B are used for menu switching, and the ∧ and ∨ switches 144C, 144D are used for selection and change of item values, respectively. In the example of FIG. 33, when the ∧ switch 144C is pressed, the channels are switched in the order of channel 2 → 3 → 4 → 1. At the same time, the lighting of the channel display lamp 145 is switched to the corresponding channel, and it is possible to determine which item the currently displayed item (in this case, the irradiation time) is information of the head unit 120 connected to. If information on channels for which irradiation is not set is displayed, “---” is displayed on the display unit 142.

  Note that, without performing these switch operations, the information on the set channels may be automatically switched and sequentially displayed.

(Current irradiation power value display)
The current irradiation power value display displays the output value of ultraviolet irradiation. In this example, the relative intensity is displayed by the drive duty ratio of the UVLED of channel 1, but display in other units such as a percentage display where the maximum output is 100 and an output wattage can also be appropriately employed. In this case as well, information on other channels can be switched and displayed by pressing the ∧ and ∨ switches 144C and 144D.

(Cumulative irradiation time display)
The cumulative irradiation time display displays the cumulative value of the ultraviolet irradiation time, that is, the total usage time of the UVLED. As a result, it is possible to grasp how long the UVLED is used, grasp the lifetime, and obtain a guideline for adjusting the drive current. In this case as well, information on other channels can be switched and displayed with the ∧ and ∨ switches 144C and 144D. In FIG. 33, “h” and “H” are separately used to distinguish the units, “h” indicates × 10 hours and “H” indicates × 100 hours. In this way, the meaning of the unit is given by using the capital letter and the small letter of the symbol, and a large amount of information can be displayed on a small display screen.

  The display example of the display unit 142 in the irradiation mode has been described above. Of course, it goes without saying that other display items can be added or only arbitrary items can be displayed.

  In the example of FIG. 32, in the irradiation mode, the menu items basically function as switching of the display unit 142, and thus no further hierarchical structure is provided. Of course, it goes without saying that the display items may be switched in a hierarchical structure.

[Setting mode]
Next, details of a method for setting the ultraviolet irradiation condition in the setting mode will be described with reference to FIGS. 34 and 35. FIG. As shown in FIG. 34, in the setting mode, the four items of the setting number menu during operation, the setting edit menu, the communication condition menu, and the other condition menu are switched by the <,> switches 144A and 144B. Selection of the menu is executed by pressing the enter switch 144F, and the mode can be shifted to the setting mode of the selected item. If the escape switch 144E is pressed, it is possible to return to a higher hierarchy.

  Of course, a plurality of items may be combined or other items may be added. For example, the communication condition menu and the other condition menu may be combined into one, or the edit setting menu may be divided into two.

(Setting number menu during operation)
The setting number menu during operation selects a setting number for setting the ultraviolet irradiation condition used in the irradiation mode. Here, a desired setting number is selected by the ∧ and ∨ switches 144C and 144D from among the ultraviolet irradiation condition settings that have been set and stored. After selection, when the enter switch 144F is pressed, “End” is displayed on the display unit 142, the selected setting number is saved, and the setting number menu is returned to during operation.

  In this embodiment, a setting number menu during operation and a setting editing menu described later are provided separately, but these may be integrated. In this case, the number selected in the previous setting operation is held, and it is handled that the setting of this number is selected in the irradiation mode.

(Settings edit menu)
The setting edit menu is a menu for setting ultraviolet irradiation conditions. Details of the setting edit menu are shown in FIG. Major items included in the setting edit menu include a setting screen for selecting an edit setting number and selecting an irradiation mode. When the setting on each setting screen is completed and the enter switch 144F is pressed, the next setting screen is displayed.

(Edit setting number selection)
First, in the edit setting number selection, a setting number is selected. In the present embodiment, a maximum of 20 settings from no0 to 19 can be stored as described above. Of course, more or less numbers can be set.

(Irradiation mode selection)
Next, an irradiation mode is selected for the selected setting number. As described above, there are three irradiation modes U0 to U2, that is, one of the batch manual irradiation mode, the individual manual irradiation mode, and the batch automatic irradiation mode. When the irradiation mode is selected and the enter switch 144F is pressed, “End” is displayed on the display unit 142, the above settings are temporarily stored, and the process proceeds to editing channel selection.

  In the edit channel selection, the channel number to which the head unit 120 to be set is connected is selected from CH1 to CH4. Next, the process proceeds to output permission selection, and it is selected whether or not to permit ultraviolet output for the head unit 120 of the channel number selected above. “On” is displayed on the display unit 142 when it is permitted, and “off” is displayed when it is not permitted. When the enter switch 144F is pressed in this state, the process proceeds to a step number selection screen or a step number selection disabled display according to the irradiation mode selected on the irradiation mode selection screen.

(Detailed settings for batch automatic irradiation mode)
When the batch automatic irradiation mode is selected on the irradiation mode selection screen, the process proceeds to the step number selection screen and the step number is selected. As described above, a maximum of 20 step numbers from S0 to S19 can be set, and a necessary number is set in order. When the step number is selected, the irradiation time setting screen is displayed and the ultraviolet irradiation time is input. Next, the irradiation output is similarly input. These input values are increased or decreased by the で and ∨ switches 144C and 144D. For the convenience of input, the previous set value can be copied and input as a default value, or high-speed increase / decrease can be enabled by long press. When the above settings are completed, the enter switch 144F is pressed to temporarily save the settings and return to the step number selection screen. At this time, a value obtained by incrementing the set step number by 1 is input as a default value. When all the step numbers have been set, pressing the escape switch 144E returns to the edit setting number selection screen.

(Detailed settings for batch manual irradiation mode and individual manual irradiation mode)
On the other hand, when the batch manual irradiation mode or individual manual irradiation mode is selected on the irradiation mode selection screen, the output is a constant value, and the step that makes the output variable cannot be selected. Proceed to At this time, “s .---” is displayed on the display unit 142 to indicate that the step number cannot be selected. Since the irradiation time is not set in the manual irradiation mode, the irradiation output setting screen is displayed when the enter switch 144F is pressed in this state. After setting the output with the duty ratio in the same manner as described above, when the enter switch 144F is pressed, the setting is saved and the screen returns to the edit channel number selection screen. As described above, the ultraviolet irradiation condition is set in the edit setting menu.

(Communication condition menu)
In the communication condition menu, communication conditions for connecting the ultraviolet irradiation device and the external connection device with the RS-232C interface are set. In the example of FIG. 34, baud rate selection, stop bit / parity selection, and delimiter / checksum selection can be set from the communication condition menu. When the setting on each setting screen is completed and the enter switch 144F is pressed, the next setting screen is displayed. First, in the baud rate selection, selection is made with the ∧ and ∨ switches 144C and 144D from preset options of 1200 bps, 2400 bps, 4800 bps, 9600 bps, 1920 bps, and 38400 bps, and the enter switch 144F decides. In the display unit 142, the number of display digits is saved by displaying in x100 such as “b.384”. Note that a baud rate value other than the above can be set as long as it is compatible with hardware. In the stop bit / parity selection, 1 or 2 for the stop bit, no parity, even number, and odd number can be selected. In the example of the figure, these combinations are presented as options in advance, and stop bit 1 and no parity (display “y.1n” on the display unit 142), stop bit 1 and parity even (“y.1E”), stop bit 1 · Parity odd number (“y.1o”), Stop bit 2 · No parity (“y.2n”), Stop bit 2 · Parity even number (“y.2E”), Stop bit 2 · Parity odd number (“y.1E”) 2o ") is selected with the ∧ and ∨ switches 144C and 144D, and determined with the enter switch 144F. Similarly, in delimiter / checksum selection, CR or ETX can be selected as a delimiter, and checksum can be selected. In the example shown in the figure, these combinations include a delimiter CR and no checksum (display “d.C0” on the display unit 142), a delimiter CR and a checksum (“d.C1”), a delimiter ETX and no checksum (“ d.E0 "), and delimiter ETX / with checksum (" d.E1 ") are selected by the ∧ and ∨ switches 144C and 144D and determined by the enter switch 144F.

(Other condition menu)
In the other condition menu, input contact selection and lighting alarm time editing can be set. Input contact selection sets a delay time to prevent chattering, such as when a foot switch is connected. In the lighting alarm time editing, a time for warning due to UVLED deterioration is set. The configuration of the hierarchical menu described above is an example, and other configurations can be adopted as appropriate. For example, the switch in the horizontal direction is used for selecting the menu and the switch in the vertical direction is used for setting the selected item, but it goes without saying that the horizontal direction and the vertical direction may be interchanged.

[Embodiment 13]
In addition to the configuration in which the setting unit is shared as in the twelfth embodiment, an individual setting switch 290 and an individual display unit 292 may be provided for each head unit. FIG. 36 shows a front view of controller unit 210 of the ultraviolet irradiation apparatus according to Embodiment 13 of the present invention. The individual setting switch 290 shown in this figure is used for setting the ultraviolet output irradiated from each head unit and increasing / decreasing the irradiation time, and an up / down switch or the like can be used. In this embodiment, the ultraviolet irradiation conditions for each channel can be set by the individual setting switch 290, and the ultraviolet irradiation conditions can also be set by using the operation panel 244. In addition, the common operation panel can be omitted, and the setting can be made only with the individual setting switch 290. The individual display unit 292 can use a 7-segment display or the like, and displays the set output and irradiation time. Further, only the individual setting switch 290 or only the individual display unit 292 may be provided for each channel.

[Embodiment 14]
Further, the individual setting switch and the individual irradiation switch for adjusting the ultraviolet output of each head unit can be provided in the head unit 120 instead of the controller unit 110. 37 to 38 show the head unit 320 of the ultraviolet irradiation apparatus according to Embodiment 14 of the present invention. As shown in these drawings, the head unit 320 is provided with an individual irradiation switch 380 for turning on / off the ultraviolet irradiation from the UVLED 351 and an individual setting switch 390 for adjusting the output level of the ultraviolet ray. The individual setting switch 390 can use an up / down switch composed of two push switches. As shown in FIGS. 37B and 38, these switches are mounted on a substrate. Other members can use the same configuration as that of FIG. This configuration allows the user to adjust the output by hand when the user holds and uses the head unit 320 by hand, and can be suitably used in such a mode. Although not shown, individual display units such as a 7-segment display can be provided in the head unit. Alternatively, only the individual setting switch or the individual irradiation switch may be provided in the head portion, and the remaining members may be provided on the controller portion side.

[Embodiment 15]
In each of the above-described embodiments, a mode (straight type) in which the cable portion and the ultraviolet irradiation direction are substantially linear along the longitudinal direction of the head main body portion. On the other hand, the head unit 420 of the ultraviolet irradiation apparatus according to the fifteenth embodiment of the present invention shown in FIG. 39 has an angle shape in which the irradiation direction of the ultraviolet rays from the UVLED 451 is substantially orthogonal to the longitudinal direction of the head unit 420. Of type. FIG. 39 is a plan view and a cross-sectional view of the head portion 420, and FIG. 40 is a perspective view showing an example of a method for supporting the head portion 420. As shown in these drawings, the head main body 422 and the lens holder 426 are coupled in an angle shape via a cooling block 424 to form an angle-shaped head portion 420.

  As shown in FIG. 40, in the angle type head unit 420 according to the fifteenth embodiment, a holder 4202 that holds the head main body 422 is provided, so that the head unit 420 can be fixed. In this case, there is room in the space above the head portion 420. That is, it is suitable when it is difficult to secure a sufficient space above the head part 420 due to the equipment when fixing the head part 420 to the equipment. Moreover, it is excellent in visibility when observing an object (location) to be irradiated with ultraviolet rays through the head part 420 from above.

  On the other hand, FIG. 41 shows an example of a method of supporting the straight type head unit 120 in the above-described embodiment. In the example of FIG. 41A, the head unit 120 is fixed by gripping the pole member 1201 fixed to the back surface of the head main body unit 122 at a substantially right angle by the holder 1202. In the example of FIG. 41B, two fixing holes 120 formed on the back surface of the head main body 122 are directly screwed to the fixing object H such as a wall surface with a fixing screw 1203. In either case, a space for the cable portion 130 is required above the head portion 120. In the case of the angle type head portion 120 of the fifteenth embodiment shown in FIGS. 39 and 40, the cable portion 130 extends to the side, so that there is no problem even if there is no allowance in the space above the head portion 420.

[Embodiment 16]
In each of the above embodiments, each head unit includes one UVLED as shown in FIG. However, a plurality of semiconductor elements can be provided in the head portion 520. By using a plurality of semiconductor elements, it becomes possible to adjust the irradiation amount of ultraviolet rays as necessary. As an ultraviolet irradiation device according to the sixteenth embodiment of the present invention, FIG. 42 shows a head unit 520 including a plurality of UVLEDs 551. FIG. 42A shows an example in which twelve UVLEDs 551A are arranged substantially uniformly on the bottom surface of a cylindrical cooling block. FIG. 42B shows an example in which 3 rows × 3 columns = 9 UV LEDs 551B are arranged in a substantially square cooling block. Of course, the UVLEDs 551 may be arranged in one or two rows, or in four or more rows. FIG. 42C shows an example in which 2 rows × 3 columns = 6 UV LEDs 551C are arranged in a substantially rectangular cooling block extending in one direction. In the structure of this example, a plurality of UV LEDs 551C arranged in the longitudinal direction can be cured by irradiating the resin applied to the elongated region with ultraviolet rays at a time.

  Of course, the number of UVLEDs, the arrangement pattern, and other than these can be used as appropriate. By simultaneously turning on and using a plurality of UVLEDs, the amount of ultraviolet rays can be increased and the output can be increased. In addition, by turning on only specific UVLEDs among other UVLEDs, turning off other UVLEDs, and alternately switching the operating UVLEDs, long life of each element is avoided by avoiding continuous use of specific UVLEDs. The replacement time of the UVLED can be extended.

  Further, not only when a plurality of UVLEDs having the same characteristics are provided, UVLEDs having different characteristics may be provided in the same head portion. For example, by switching and using UVLEDs having different wavelengths, the wavelength of ultraviolet rays that can be irradiated from the same head unit can be changed. When UVLEDs having different characteristics are used, a drive current or the like corresponding to each UVLED is set in advance on the head unit side. Furthermore, it goes without saying that UVLEDs having different characteristics between the head portions can be provided in each head portion.

  In the case where a plurality of semiconductor elements are provided in the head portion 520, it is necessary to distinguish the elements to be turned on from others, and therefore element identification information such as an individual ID number is assigned to each semiconductor element. When setting the ultraviolet irradiation condition, element identification information indicating which element is turned on is also set. When a plurality of semiconductor elements are turned on, the settings may be copied so that the same settings can be easily made on the semiconductor elements. When all the elements are turned on, “all” can be designated as the element identification information. For example, “A” is input on the setting screen. Thereby, the trouble of setting the same ultraviolet irradiation condition for each element can be saved. Needless to say, it is also possible to irradiate ultraviolet rays by changing the current value with a plurality of semiconductor elements.

  Next, an ultraviolet irradiation condition setting method when the head unit 520 includes a plurality of UVLEDs 551 will be described with reference to FIG. 43, the head part 520 number selection step in step 2401 and the step number selection step in step 2402 are the same as steps 1001 and 1002 in FIG. 29 described above. Next, in step 2402-1, the number of the UVLED 551 to be operated is selected. As described above, a unique ID number is assigned in advance to the plurality of UV LEDs 551 provided in the head unit 520, and the number of the UV LED 551 to be driven is selected. The following steps are the same as steps 1003, 1004, and 1005 in FIG. In addition, the ultraviolet irradiation conditions set in one head unit can be copied to another head unit. In this case, the copy setting screen is displayed on the transition screen, and the head number of the copy source and the head number of the copy destination are designated. It is also possible to copy the conditions set in one head unit to all the head units. For example, “A” indicating all is designated instead of the number assigned to the head unit as the copy destination. Alternatively, conditions set in one head unit can be stored and recalled for use.

[Embodiment 17]
In addition, the setting of the ultraviolet irradiation conditions can be performed by selecting a preset irradiation pattern in addition to the method of designating a set of irradiation time and irradiation output as described above. For example, a method of selecting a functional irradiation pattern or a constant of the selected function can be input. For these settings, in addition to a method of specifying and selecting function numbers and constants numerically, a method of graphically displaying and selecting a graph figure can be adopted. Further, in the former selection method using numerical values, the set function may be confirmed by a graph figure. In order to enable such graph display, a display unit 142 capable of graphic display is prepared.

[Functional irradiation pattern]
FIG. 44 is a graph showing an example showing three patterns for displaying ultraviolet irradiation time and irradiation output as a function. Even in the pattern shown in this figure, the embodiment of the present invention can irradiate ultraviolet rays. In the example of FIG. 44, three types F1 to F3 are shown as examples of functions.

F1: P = at + c
F2: P = a * (1-EXP (−b * t)) + c
F3: P = a * (EXP (b * t) -1) + c
(A, b, c are constants set according to conditions)

  In addition to these, an n-order function can also be used. After selecting one of the above functions, the irradiation pattern is determined by setting constants a, b, and c. The constant is set according to the usage conditions of the ultraviolet irradiation device. In the functions F1 to F3 illustrated in FIG. 44, the following values are set as constants that are set when the irradiation output of ultraviolet rays is increased to 70% in an irradiation time of 10 seconds.

F1: P = 7t (a = 7, c = 0)
F2: P = 70 * (1-EXP (−0.5 * t)) (a = 70, b = 0.5, c = 0)
F3: P = 10 * (EXP (0.21 * t) -1) (a = 10, b = 0.21, c = 0)

  The procedure for setting the ultraviolet irradiation condition with the irradiation pattern as shown in FIG. 44 will be described with reference to FIG. First, the process of selecting the head number in step 2601 and selecting the step number in process 2602 is the same as in FIG. Next, in step 2602-1, a function number is selected. Here, as the options of the function F, the above-described F0 to F3 can be selected. Note that F = 0 is a step-like function for inputting the irradiation time and the irradiation output in the same manner as described above. If F = 0 is selected in step 2602-1, the irradiation time is input in step 2603, the irradiation output is input in step 2604, and the setting is stored in step 2605. If F = 1 is selected in step 2602-1, constant a is input in step 2603-1, constant b is input in step 2604-1, and settings are saved in step 2605. If F = 2 or 3 is selected in step 2602-1, constant a is input in step 2603-2, constants b and c are input in step 2604-2, and settings are saved in step 2605.

  In addition to the above, as a method of setting the irradiation pattern, for example, after selecting the irradiation pattern waveform, input the irradiation time and automatically calculate and set the function constant, and the total irradiation amount and heat amount of ultraviolet rays The method of setting in can be used as appropriate.

  In the conventional ultraviolet irradiation device, the output is changed by passing a mechanical shutter to a high-pressure mercury lamp or the like used as an ultraviolet ray source, so that the minimum resolution of the ultraviolet output becomes coarse and becomes a discrete change for fine adjustment. It was impossible to change the output along the waveform pattern. On the other hand, according to the present embodiment using a semiconductor element having a high linearity with respect to the drive current, an almost continuous output change is realized by adjusting the input current. Since the output can be changed with good linearity in accordance with the drive current, it is possible to deal with the pattern as described above. Needless to say, the approximation between the ultraviolet output and the continuous waveform depends on the resolution of the A / D converter.

[Embodiment 18]
In each of the above embodiments, the setting of the ultraviolet irradiation condition is performed by the setting unit of the controller unit. However, the setting of ultraviolet irradiation conditions can also be performed by a device externally connected to the ultraviolet irradiation apparatus. For example, as an eighteenth embodiment of the present invention, as shown in FIG. 46, the controller 710 of the ultraviolet irradiation device 700 is connected to an external connection device 7101 such as a computer or PLC, and the ultraviolet irradiation set on the external connection device 7101 side. Settings are made by transferring the conditions to the controller unit 110.

  The ultraviolet irradiation device 700 includes an interface for connecting to the external connection device 7101. The interface is connected to the control unit 714 of the controller unit 710, and the control unit 714 exchanges electrical signals with the external connection device 7101 and performs data communication. The connection between the external connection device 7101 and the ultraviolet irradiation device 700 is via a serial connection such as RS-232x, RS-422, USB or IEEE1394, a parallel connection, or a network such as 10BASE-T, 100BASE-TX, 1000BASE-T. Can be connected electrically to communicate. The connection is not limited to a physical connection using a wire, but may be a wireless connection using a wireless LAN such as IEEE802.11x or OFDM, a radio wave such as Bluetooth, infrared light, optical communication, or the like. Furthermore, setting information can be stored and read via a recording medium. As the recording medium, a memory card, magnetic disk, optical disk, magneto-optical disk, semiconductor memory, or the like can be used.

  The ultraviolet irradiation device and the ultraviolet irradiation method of the present invention can be suitably used for bonding with an ultraviolet curable resin in an assembly operation of an electronic component such as a pickup. It can also be used for applications such as semiconductor steppers, optical cleaning devices, and optical drying devices.

It is a block diagram which shows the ultraviolet irradiation device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the ultraviolet irradiation device which concerns on Embodiment 2 and 3 of this invention. It is a block diagram which shows the ultraviolet irradiation device which concerns on Embodiment 4 of this invention. It is a graph of the degradation curve of UVLED which shows the relationship between drive time and ultraviolet-ray output when drive current is constant. It is a graph which shows a mode that output degradation is calculated from the integration output and the degradation curve of UVLED. It is the front view and sectional drawing which show the detail of the head part of the ultraviolet irradiation device which concerns on Embodiment 5 of this invention. It is the disassembled perspective view which looked at the head part of the ultraviolet irradiation device concerning Embodiment 5 from the upper part. It is the disassembled perspective view which looked at the head part of the ultraviolet irradiation device concerning Embodiment 5 from the lower part. It is a perspective view which shows the state which each connected the connector of FIG. It is a figure which shows a mode that UVLED is contact | adhered and fixed to the front end surface of a cooling block. It is an exploded view showing an example of the lens holder and its internal structure. It is a figure which shows the example of the fixing method of a cooling block and a lens holder. It is sectional drawing which shows the ultraviolet irradiation part of the head part of the ultraviolet irradiation device which concerns on Embodiment 6 of this invention. It is sectional drawing which shows the ultraviolet irradiation part of the head part of the ultraviolet irradiation device concerning Embodiment 7 of this invention. It is sectional drawing which shows the ultraviolet irradiation part of the head part of the ultraviolet irradiation device which concerns on Embodiment 8 of this invention. It is the top view of UVLED of the head part of the ultraviolet irradiation device which concerns on Embodiment 9 of this invention, and sectional drawing which shows an ultraviolet irradiation part. It is the perspective view which looked at the head part of the ultraviolet irradiation device concerning Embodiment 10 of this invention from the direction which can see an ultraviolet irradiation part. It is the perspective view which looked at the head part of FIG. 17 from the opposite side. It is a disassembled perspective view which shows the side view lens mounting part of the head part of FIG. It is a disassembled perspective view which shows the state which cut | disconnected the side view lens mounting part of FIG. 19 in the vertical direction except a lens part. It is a disassembled perspective view which shows the state which added the lens holder except UVLED and the head board | substrate part from FIG. It is sectional drawing which shows the lens holder of FIG. It is a perspective view which shows the head main-body part of the ultraviolet irradiation device concerning Embodiment 11 of this invention. FIG. 24 is an exploded view showing a state where the upper case member of the head main body portion of FIG. 23 is removed. It is a disassembled perspective view which shows the state which decomposed | disassembled the head main-body part of FIG. It is a disassembled perspective view which shows UVLED of FIG. 25 and a head board | substrate part. It is a perspective view which shows the state which joined UVLED and the head board | substrate part of FIG. It is a front view which shows the example of arrangement | positioning of the display part and setting part which were provided in the front panel of the controller part of the ultraviolet irradiation device concerning Embodiment 12 of this invention. It is a flowchart which shows the setting method of ultraviolet irradiation conditions with the ultraviolet irradiation device which concerns on Embodiment 12 of this invention. It is a graph which shows a mode that the irradiation pattern of an ultraviolet-ray changes in step shape. It is a flowchart which shows the setting method of the ultraviolet irradiation condition of FIG. 29 in detail. It is a state transition diagram which shows an example of the hierarchy menu used for an ultraviolet irradiation device. It is a state transition diagram which shows an example of the hierarchy menu in irradiation mode. It is a state transition diagram which shows an example of the hierarchy menu in setting mode. It is a state transition diagram which shows the detail of the setting edit menu in setting mode. It is a front view of the controller part of the ultraviolet irradiation device concerning Embodiment 13 of this invention. It is the front view and sectional drawing which show the head part of the ultraviolet irradiation device concerning Embodiment 14 of this invention. It is a disassembled perspective view which shows the head part of FIG. It is the top view and side sectional drawing which show the head part of the ultraviolet irradiation device which concerns on Embodiment 15 of this invention. It is a perspective view which shows the head part of FIG. It is a perspective view which shows the example of the support method of a straight type head part. It is a bottom view which shows the head part of the ultraviolet irradiation device which concerns on Embodiment 16 of this invention. It is a flowchart which shows the setting method of the ultraviolet irradiation condition in the ultraviolet irradiation device which concerns on Embodiment 16 of this invention. It is a graph which shows the ultraviolet irradiation pattern made into the function form in the setting method of the ultraviolet irradiation condition which concerns on Embodiment 17 of this invention. It is a flowchart which shows the procedure which sets the ultraviolet irradiation conditions which concern on Embodiment 17 of this invention. It is a block diagram of the ultraviolet irradiation device concerning Embodiment 18 of the present invention.

Explanation of symbols

100, 200, 300, 700 ... UV irradiation device 110, 210, 310, 710 ... Controller unit 112 ... Power supply unit 114, 214, 314, 714 ... Control unit 116, 316 ... Storage unit 218 ... Drive circuit 219 ... D / A Conversion unit 2191 ... A / D conversion unit 120, 220, 320, 420, 520, 1320, 1420, 1720 ... Head unit 1201 ... Pole member 1202, 4202 ... Holder 1203 ... Fixing screws 122, 1322, 1422, 1522, 1622, 1722, 2322, 422 ... Head body parts 1221, 1722A, 2322A ... Upper case members 1222, 1722B, 2322B ... Lower case member 2322C ... Projection part 1223 ... Base end member 1224 ... Board 1225 ... Cable connector 1226 ... Indicator LED
1227, 3227 ... Memory unit 1228 ... Adjustment circuit 1229 ... Fixing screw 1230 ... Fixing screw 123, 323 ... Head controller 1231 ... Connection connector 1232 ... Through hole 124, 424 ... Cooling block 1241 ... Fixing screw 1242 ... Fixing screw 1243 ... Base End projection 1244 ... Connector connector 1245 ... Protective plates 126, 1326, 1426, 1526, 1626, 1726, 2326, 426 ... Lens holder 1726A ... Inner holder 1726B ... Outside holder 1727 ... Side view lens mounting part 1727A ... Right case member 1727B ... Left case member 1727C ... Lens holder insertion portion 1327, 1427, 1527 ... Light receiving window 1328, 1428, 1528 ... Shutter 2355 ... UVLED holder 2356 ... Electrode 2357 ... Stud 2358 ... Run 1260, 1760 ... lens portions 1261, 1361, 1761 ... optical system lens 1261A ... first lens 1261B ... second lens 1262 ... spacer 1263 ... lens fixing cap 1364 ... stray light cut aperture 1365 ... reflected light cut filters 130, 230 ... cable part 140 ... setting part 142 ... display parts 144, 244 ... operation panels 144A, 144B, 144C, 144D ... <,>, ∧, ∨ switch 144E ... escape switch 144F ... enter switch 145 ... channel display lamp 146 ... UV irradiation Lamp 147 ... Power switch 148 ... Batch irradiation switch 150 ... Semiconductor elements 151, 251, 351, 451, 551, 551A, 551B, 551C, 1351, 1451, 1551, 1651, 1751, 2351 UVLED
1651 ... UVLED package 16511 ... UVLED chips 152, 352, 452, 552, 652 ... light receiving elements 1354, 1754, 2354 ... head substrate 1754A ... projection 2233 ... light receiving circuit 160 ... head connection 170 ... individual irradiation lamps 180,380 ... individual irradiation switch 290, 390 ... individual setting switch 292 ... individual display unit 7101 ... external connection device U ... ultraviolet ray H ... fixed object

Claims (19)

One or more heads (120) including one or more semiconductor elements capable of irradiating ultraviolet rays as an ultraviolet ray source;
A controller unit (110) including a control unit (114) capable of setting ultraviolet irradiation conditions of the head unit (120), and a power supply unit (112) for supplying a drive signal to the semiconductor element;
A cable part (130) comprising an electric signal line for electrically connecting the head part (120) and the controller part (110);
An ultraviolet irradiation device comprising:
The head portion (120) includes a light receiving element (152) capable of detecting the amount of ultraviolet light emitted from the semiconductor element,
An ultraviolet irradiating device configured to adjust a drive signal based on information on an ultraviolet light amount detected by the light receiving element (152) so that the ultraviolet irradiation amount becomes a desired value. One or more heads (120) including one or more semiconductor elements capable of irradiating ultraviolet rays as an ultraviolet ray source;
A controller unit (110) including a control unit (114) capable of setting ultraviolet irradiation conditions of the head unit (120), and a power supply unit (112) for supplying a drive signal to the semiconductor element;
A cable part (130) comprising an electric signal line for electrically connecting the head part (120) and the controller part (110);
An ultraviolet irradiation device comprising:
The head portion (120) includes a light receiving element (152) capable of detecting the amount of ultraviolet light emitted from the semiconductor element,
Based on the information on the amount of ultraviolet light detected by the light receiving element (152), a decrease in the output of the semiconductor element is detected, and the controller is configured to issue a warning when the decrease in output reaches a predetermined value. An ultraviolet irradiation device. One or more heads (120) including one or more semiconductor elements capable of irradiating ultraviolet rays as an ultraviolet ray source;
A controller unit (110) including a control unit (114) capable of setting ultraviolet irradiation conditions of the head unit (120), and a power supply unit (112) for supplying a drive signal to the semiconductor element;
A cable part (130) comprising an electric signal line for electrically connecting the head part (120) and the controller part (110);
An ultraviolet irradiation device comprising:
The head unit (120) includes a memory unit (1227) capable of recording a history of ultraviolet output emitted from the semiconductor element,
Based on the history information recorded in the memory unit (1227), referring to the characteristic curve indicating the degradation of the element accompanying the ultraviolet output recorded in advance for each semiconductor element of each head unit (120), the decrease in the ultraviolet output An ultraviolet irradiation apparatus characterized by calculating a correction value of a driving signal of a semiconductor element in consideration of the above and controlling to increase a driving signal corresponding to the correction value.   The ultraviolet irradiation device according to any one of claims 1 to 3, wherein the control unit performs a predetermined calculation based on information on an amount of ultraviolet light detected by the light receiving element (152). Irradiation device.   The ultraviolet irradiation device according to any one of claims 1 to 3, wherein the head unit (120) performs a predetermined calculation based on information on an amount of ultraviolet light detected by the light receiving element (152). An ultraviolet irradiation device comprising a head controller (123). It is an ultraviolet irradiation device in any one of Claim 1 to 5, Comprising: The said head part (120) is,
A lens part (1260) for irradiating the ultraviolet light from the semiconductor element (150) disposed near the ultraviolet irradiation part of the semiconductor element (150) to be polarized or condensed and radiated to the outside;
Built-in the semiconductor element and the lens portion (1260), a head body portion (122) formed in a shape extended in one direction,
And a lens portion (1260) that is irradiated with ultraviolet rays from the semiconductor element is disposed on an end surface perpendicular to the longitudinal direction of the head main body portion (122). It is an ultraviolet irradiation device in any one of Claim 1 to 5, Comprising: The said head part (120) is,
A lens part (1260) for irradiating the ultraviolet light from the semiconductor element (150) disposed near the ultraviolet irradiation part of the semiconductor element (150) to be polarized or condensed and radiated to the outside;
Built-in the semiconductor element and the lens portion (1260), a head body portion (122) formed in a shape extended in one direction,
And a lens portion (1260) that is irradiated with ultraviolet rays from the semiconductor element is disposed on a side surface parallel to the longitudinal direction of the head body portion (122).   8. The ultraviolet irradiation device according to claim 6, wherein the lens portion (1260) is replaceably attached to the head main body portion (122). The ultraviolet irradiation device according to any one of claims 1 to 8,
The ultraviolet light irradiation apparatus, wherein the light receiving element (152) is arranged in a posture capable of receiving leakage light on a side of the semiconductor element. The ultraviolet irradiation device according to any one of claims 1 to 9,
An openable / closable shutter is provided on the front surface of the light receiving element (152) so as to cover the light receiving element (152), and the shutter can be opened and closed so that ultraviolet light leakage from the semiconductor element is not exposed when the shutter is closed. An ultraviolet irradiation device characterized by that. The ultraviolet irradiation device according to any one of claims 1 to 10,
The ultraviolet light irradiation device, wherein the light receiving element (152) is configured to detect the amount of ultraviolet light emitted from the semiconductor element at a predetermined timing. The ultraviolet irradiation device according to claim 10 or 11,
The ultraviolet irradiation apparatus, wherein opening and closing of the shutter is controlled to open the shutter in synchronization with a timing at which the light receiving element (152) receives light. The ultraviolet irradiation device according to claim 11 or 12,
The ultraviolet ray irradiation device, wherein the light receiving element (152) detects the amount of ultraviolet ray light when the ultraviolet ray irradiation device is turned on. The ultraviolet irradiation device according to claim 11 or 12,
The ultraviolet ray irradiation apparatus characterized in that the timing at which the light receiving element (152) detects the amount of ultraviolet rays is a timing at which a predetermined time interval coincides with the ultraviolet ray irradiation. The ultraviolet irradiation device according to any one of claims 1 to 14,
The ultraviolet irradiation device, wherein the light receiving element (152) is a photodiode. The ultraviolet irradiation device according to any one of claims 1 to 15,
The controller unit (110) is configured to be capable of setting individual UV irradiation conditions for each of the plurality of head units (120). The ultraviolet irradiation device according to claim 1,
An ultraviolet irradiation apparatus, wherein the semiconductor element (150) is an ultraviolet light emitting diode (151). An ultraviolet irradiation method in which an ultraviolet curable resin is irradiated with ultraviolet rays and cured by an ultraviolet irradiation device,
The amount of ultraviolet light emitted from the semiconductor element provided in the head part (120) of the ultraviolet irradiation device is received by the light receiving element (152) disposed on the side of the semiconductor element to receive light leaked from the semiconductor element. Detecting with
Converting the detected ultraviolet light quantity from an analog signal to a digital signal and sending it to the controller of the controller unit (110);
Adjusting the drive signal so that the amount of ultraviolet irradiation becomes a desired value in the control unit;
The ultraviolet irradiation method characterized by having. An ultraviolet irradiation method in which an ultraviolet curable resin is irradiated with ultraviolet rays and cured by an ultraviolet irradiation device,
A step of recording a history of ultraviolet output irradiated from a semiconductor element provided in the head unit (120) of the ultraviolet irradiation device in a memory unit (1227) provided in the head unit (120),
Based on the history information recorded in the memory unit (1227), referring to the characteristic curve indicating the degradation of the element accompanying the ultraviolet output recorded in advance for each semiconductor element of each head unit (120), the decrease in the ultraviolet output Calculating a correction value of the drive signal of the semiconductor element in consideration of, and controlling to increase the drive signal corresponding to the correction value;
The ultraviolet irradiation method characterized by having.