JP2005223893A - Frequency adjusting method for piezoelectric vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a frequency adjusting method for a piezoelectric vibrator which suppresses costs of facility investment in an apparatus suppressed while improving throughput related to frequency adjustment of the piezoelectric vibrator. <P>SOLUTION: The frequency adjusting method for a piezoelectric vibrator is performed by radiating ion beams. A radiation area of ion beams radiated from one ion beam radiation source (ion gun 10) which performs frequency adjustment upon piezoelectric vibrators 17 carried in a specific direction while being aligned and arranged, is utilized in said method to simultaneously adjust frequencies of a plurality of proximate piezoelectric vibrators 17. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a frequency adjustment method for a piezoelectric vibrator, and more particularly, to a frequency adjustment method for performing frequency adjustment to increase the frequency of the piezoelectric vibrator by scraping the surface of a piezoelectric vibrating piece (electrode) with an ion beam.

  A method for adjusting the frequency of a piezoelectric vibrator by an ion beam (ion etching) has been known for several decades. However, these methods have been put into practical use only in recent years. As a method of adjusting the frequency of the piezoelectric vibrator by the ion beam, for example, the one shown in FIG. 8 is known. The apparatus shown in FIG. 8 includes an ion gun 1 that is an ion beam irradiation source, a tray 4 that holds a piezoelectric vibrator 5 and can be slid in a specified direction by a tray moving means 9, and the ion gun 1. A mask 3 having a slit disposed between the tray 4 and narrowing down to irradiate the irradiated ion beam to the electrode (piezoelectric vibrating piece) 7 of the piezoelectric vibrator 5; and the ion gun 1 and the mask 3 is provided with a shutter 2 for preventing the piezoelectric vibrator 5 from being exposed to an ion beam after the frequency of the piezoelectric vibrator 5 is adjusted.

  The tray 4 includes a recess into which the package 6 including the piezoelectric vibrating piece 7 can be fitted, and an opening having a size corresponding to the piezoelectric vibrating piece 7 is provided at the bottom of the recess. Is fitted into the recess, the piezoelectric vibrating reed 7 is viewed through the opening to the outside.

In such an apparatus, the ion beam irradiated from the ion gun 1 passes through the slit of the mask 3 and is irradiated to a predetermined portion (piezoelectric vibrating piece 7) of the piezoelectric vibrator 5, and the irradiated piezoelectric vibrator 5 has a frequency. Is adjusted to the specified value. However, in the frequency adjustment method using such an apparatus, it takes a long time to adjust the frequency of one piezoelectric vibrator (about 9 seconds), and improvement in throughput cannot be expected. FIG. 9 shows changes in the frequency of the piezoelectric vibrator by frequency adjustment and the distribution of the piezoelectric vibrator for each frequency. In FIG. 9, the vertical axis indicates the frequency of the piezoelectric vibrator, and the horizontal axis indicates the number (distribution) of the piezoelectric vibrators. In such a graph, f _{0 on} the vertical axis indicates the target frequency after adjustment, the graph indicated by the solid line indicates the frequency distribution of the piezoelectric vibrator before frequency adjustment, and the graph indicated by the alternate long and short dash line indicates the piezoelectric vibration after frequency adjustment. The frequency distribution of the child is shown. The frequency adjustment of the piezoelectric vibrator as described above is performed in a vacuum chamber (not shown).

Therefore, in recent years, a method as described in Patent Document 1 has been proposed. According to Patent Document 1, a circular arc portion of an ion gun having a track-shaped opening is closed, and an ion beam is irradiated from a straight parallel portion (two locations). These piezoelectric vibrators are arranged. According to this apparatus, the frequency is preliminarily adjusted by the ion beam irradiated from the ion beam irradiation port provided in one linear portion of the track shape. Thereafter, the piezoelectric vibrator is fed in a specified direction, and the main adjustment of the frequency is performed by the ion beam irradiated from the ion beam irradiation port provided in the other straight line portion.
JP 2003-298374 A

  According to the method described in Patent Document 1, since the frequency adjustment time of the piezoelectric vibrator formed at each ion beam irradiation port is shortened, the throughput in frequency adjustment of the piezoelectric vibrator is improved. However, this method is wasteful in the use of energy because the ion beam irradiated from the arc portion is intentionally cut. Further, since the throughput is improved by substantially increasing the number of ion beam irradiation sources, it is necessary to provide a plurality of expensive ion beam generation sources (ion guns) in order to eliminate the waste of energy. Therefore, the capital investment cost is increased.

  It is an object of the present invention to provide a method for adjusting the frequency of a piezoelectric vibrator that can reduce the capital investment cost for the apparatus while improving the throughput related to the frequency adjustment of the piezoelectric vibrator.

  In order to achieve the above object, a frequency adjustment method for a piezoelectric vibrator according to the present invention is a frequency adjustment method for a piezoelectric vibrator that adjusts the frequency of the piezoelectric vibrator by irradiating a piezoelectric vibrating piece with a beam of charged particles. After irradiating the other piezoelectric vibrator other than the piezoelectric vibrator being subjected to the final adjustment, which is the final frequency adjustment, and performing a preliminary adjustment of the frequency of the other piezoelectric vibrator The main adjustment of the frequency of the other piezoelectric vibrator is performed.

  By such a method, a beam having a wide radiation angle that has been cut with a mask or the like can be used effectively. Further, by performing frequency adjustment in the order of preliminary adjustment and main adjustment, the ion beam irradiation time spent in each process can be shortened, and the frequency adjustment throughput of the piezoelectric vibrator can be improved. In addition, capital investment can be reduced.

  Further, in the frequency adjustment method of the piezoelectric vibrator, the frequency adjustment includes a final adjustment that is a final frequency adjustment and a preliminary adjustment in the preceding stage, and the preliminary adjustment is arranged at the final adjustment position. It is preferable to perform the irradiation by irradiating the other piezoelectric vibrator located just before the main adjustment position with the same beam as that emitted from the fixed position to the piezoelectric vibrator.

  Accordingly, in addition to the above-described effects, the beam can be irradiated from a fixed position, and only the piezoelectric vibrator that requires frequency adjustment can be moved in a specified direction. In addition, since the preliminary adjustment is performed only on the piezoelectric vibrator that performs the main adjustment, the control becomes easier as compared with the case where the preliminary adjustment of a plurality of piezoelectric vibrators is performed simultaneously.

  In order to achieve the above object, a frequency adjustment method for a piezoelectric vibrator according to the present invention is a frequency adjustment method for a piezoelectric vibrator that adjusts the frequency of the piezoelectric vibrator by irradiating a piezoelectric vibrating piece with a charged particle beam. If the frequency of the piezoelectric vibrator that performs frequency adjustment is measured in advance and the measured frequency is smaller than a predetermined frequency, the beam that is being subjected to the main adjustment as the final frequency adjustment is After irradiating other piezoelectric vibrators other than the piezoelectric vibrator being adjusted and preliminarily adjusting the frequency of the other piezoelectric vibrator, the main adjustment of the frequency of the other piezoelectric vibrator was performed and measured. If the frequency is equal to or higher than a predetermined frequency, the main adjustment of the frequency of the other piezoelectric vibrator may be performed without performing the preliminary adjustment.

  According to such a method, it is possible to effectively use a beam having a wide radiation angle that has been cut with a mask or the like until now. Further, by performing frequency adjustment in the order of preliminary adjustment and main adjustment, the ion beam irradiation time spent in each process can be shortened, and the frequency adjustment throughput of the piezoelectric vibrator can be improved. In addition, considering the fact that the frequency of the piezoelectric vibrator before the preliminary adjustment is largely different individually, as described above, the frequency of the piezoelectric vibrator is measured in advance and a frequency higher than a predetermined frequency is set. By not performing the preliminary adjustment of the piezoelectric vibrator having, it is not possible to exceed the final (specified) target frequency adjustment value due to the preliminary adjustment.

  Further, in the frequency adjustment method of the piezoelectric vibrator, the beam irradiation time for measuring the frequency of the piezoelectric vibrator for frequency adjustment in advance and adjusting the measured frequency to a specified frequency by the beam irradiated at the time of preliminary adjustment. It is also desirable to perform preliminary adjustment only for the predetermined beam irradiation time, and then perform this adjustment.

  By adjusting the frequency by such a method, the frequency distribution of the individual piezoelectric vibrators can be converged in a certain range at the time of preliminary adjustment. For this reason, at the time of this adjustment, the frequency of each piezoelectric vibrator can be focused at a high rate to the target frequency.

Further, in each step of the preliminary adjustment of the frequency and the main adjustment, in order to adjust the piezoelectric vibrator to a predetermined frequency, it is preferable to control the beam irradiation time for each step using a mask.
By adopting such a method, it is possible to prevent the surface of the piezoelectric vibrating piece from being scraped too much (adjusting the frequency of the piezoelectric vibrator) during the preliminary adjustment of the frequency.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In addition, the form shown below is a part in embodiment of this invention, and this invention shall include the various form, unless the principal part of invention is changed.

  FIG. 1 is a diagram showing a first embodiment according to a frequency adjusting method of a piezoelectric vibrator of the present invention. In this embodiment, the tray 16 that can hold the piezoelectric vibrator 17, the tray moving means 26 that enables the tray 16 to slide in a specified direction, and the piezoelectric vibrating piece 20 of the piezoelectric vibrator 17 that is held on the tray. A device having a basic configuration of an ion gun 10 that irradiates a charged particle beam (ion beam) is used.

  In the piezoelectric vibrator 17, the package 18 including the piezoelectric vibrating piece 20 is a box-like body, and the external electrode terminal 19 connected to the electrode terminal of the piezoelectric vibrating piece 20 provided inside is connected to the bottom of the package 18. I prepare for the outer surface. Note that a lid is not provided on the upper portion of the package 18 so that the ion beam is irradiated onto the piezoelectric vibrating piece 20.

  The tray 16 is provided with a recess into which the package 18 can be fitted. The bottom of the recess corresponds to a portion irradiated with the ion beam of the piezoelectric vibrating piece 20 (for example, the piezoelectric vibrating piece 20). Has an opening (in the shape of an ellipse).

The package 18 is fitted into the recess of the tray 16 configured as described above so that the upper portion of the package 18 faces the bottom surface of the recess. As a result, the piezoelectric vibrating reed 20 is viewed through the opening at the bottom of the recess.
The ion gun 10 emits an ion beam in a fan shape, and generally its energy characteristics are higher at a radiation center and lower at a region having a wider radiation angle.

  A mask 14 is provided between the ion gun 10 and the tray 16 for adjusting the ion beam emitted from the ion gun 10 so as to be irradiated to a target range. The mask 14 of the present embodiment is set so that the ion beam is irradiated onto the piezoelectric vibrator 17 that has been transported to the irradiation position a and the irradiation position b. When such a mask 14 is used, the irradiation position “a” immediately above the ion beam irradiation source is a position for performing the main adjustment of the frequency, and the irradiation position “b” with the radiation angle is used for the preliminary adjustment of the frequency. It is a position to do. In the case of this embodiment, the conveyance direction of the piezoelectric vibrator 17 is the left side in the figure, and the mask 14 is not irradiated with the ion beam on the piezoelectric vibrator 17 conveyed to the position after the irradiation position a. It is configured.

A shutter (mask) 12 is provided between the mask 14 and the ion gun 10 to shield the ion beam and adjust the irradiation time of the ion beam for each process.
Further, in the frequency adjustment device for a piezoelectric vibrator having the above-described configuration, when the main adjustment of the frequency of the piezoelectric vibrator 17 is performed at the irradiation position a, the frequency measurement by a network analyzer or the like is performed via the electrode pad 22 that can be contacted and separated. It is preferable to adjust the frequency while measuring the frequency sequentially by the device 24.

  In the apparatus having such a configuration, when the frequency of the piezoelectric vibrator 17 is adjusted, first, a plurality of piezoelectric vibrators 17 are arranged on the tray 16. When the piezoelectric vibrator 17 arranged on the tray 16 is sequentially conveyed from the right side to the left side of the drawing by the tray movable means 26 at the arrangement width interval of the piezoelectric vibrator 17, the frequency adjustment of the piezoelectric vibrator 17 provided therein is adjusted. Is made.

When the piezoelectric vibrator 17 is transported, the shutter 12 is slid to the position indicated by the broken line so that the ion beam is not irradiated onto the piezoelectric vibrator 17.
When the piezoelectric vibrator 17 sent out first reaches the irradiation position b, the shutter 12 is opened, and an ion beam is irradiated onto the piezoelectric vibrating piece 20 of the piezoelectric vibrator 17 for a specified time (for example, 3 to 4 seconds). Make preliminary adjustments. After irradiating the ion beam for a specified time, the shutter 12 is closed, and the tray 16 is moved to the left by the arrangement width of the piezoelectric vibrator 17 (hereinafter referred to as process width). Thereafter, the shutter 12 is opened again, and an ion beam is applied to the piezoelectric vibrating piece 20 of the piezoelectric vibrator 17 conveyed to the irradiation position a and the piezoelectric vibrating piece 20 of the piezoelectric vibrator 17 newly transferred to the irradiation position b. Irradiate. Thereby, the piezoelectric vibrator 17 transported to the irradiation position a is subjected to the main adjustment of the frequency, and the piezoelectric vibrator 17 transported to the irradiation position b is subjected to the frequency preliminary adjustment. Thereafter, the shutter 12 is closed, and the tray 16 is moved again by one process width. By adjusting the frequency of the piezoelectric vibrator 17 in such a process, the frequency adjustment is divided into two processes of the preliminary adjustment and the main adjustment, and the ion beam irradiation time per process is shortened. Thereby, the throughput can be improved. In addition, there is only one ion beam irradiation source, and the energy band (band with a wide radiation angle) that has not been used in the past is used for frequency pre-adjustment. Capital investment can be reduced.

  The main adjustment of the frequency of the piezoelectric vibrator 17 is performed while the frequency measuring device 24 sequentially measures the frequency. The frequency adjustment of the piezoelectric vibrator 17 transported to the irradiation position b where the frequency is preliminarily adjusted accompanies the ion beam irradiation time to the piezoelectric vibrator performing the main adjustment. For this reason, in the piezoelectric vibrator 17 conveyed to the irradiation position b, the piezoelectric vibrating piece 20 may be exposed to the ion beam for a specified time or more. Therefore, depending on the individual (piezoelectric vibrator), there is a possibility that a predetermined target frequency is reached before the frequency is actually adjusted. In order to prevent this, the shutter 12 may be appropriately closed so that the ion beam is not irradiated for a predetermined time or longer at the irradiation position b.

FIG. 2 shows a frequency change and a frequency distribution for each process of the piezoelectric vibrator 17. In FIG. 2, the vertical axis indicates the frequency of the piezoelectric vibrator 17, and the horizontal axis indicates the number of piezoelectric vibrators (frequency distribution) for each frequency. In this graph, f ₀ indicates the target frequency after frequency adjustment, the graph indicated by the solid line indicates the frequency and distribution of the piezoelectric vibrator 17 before frequency adjustment, and the graph indicated by the broken line indicates the piezoelectric vibrator after preliminary adjustment. 17 shows the frequency and distribution, and the graph shown by the alternate long and short dash line shows the frequency and distribution of the piezoelectric vibrator 17 after this adjustment. 2 that the frequency adjustment of the piezoelectric vibrator 17 is performed in stages. Moreover, since the distribution before adjustment and the distribution after frequency adjustment are not different from those in the prior art, it can be seen that the processing time for each process is shortened by interposing preliminary adjustment between them.

  Next, a second embodiment according to the frequency adjustment method of the piezoelectric vibrator of the present invention will be described with reference to FIG. The present embodiment is a specific form for preventing the ion beam from being irradiated to the piezoelectric vibrating piece 20 of the piezoelectric vibrator 17 at the irradiation position b for a specified time or longer as described in the first embodiment. Therefore, it basically has the same form as the first embodiment.

More specifically, when the preliminary adjustment of the piezoelectric vibrator 17 is performed at the irradiation position b, a frequency at which the frequency distribution of the piezoelectric vibrator 17 is to be focused is determined in advance (for example, f ₁ : see FIG. 4). Then, before the piezoelectric vibrator is transported to the irradiation position b, the frequency of the piezoelectric vibrator transported to the irradiation position b is measured in advance using a frequency measuring device (other than 24: not shown). Here, when the value of the frequency measured in the previous stage of the irradiation position b is larger than the f1 (for example, when it is fa: see FIG. 4), the frequency pre-adjustment for the piezoelectric vibrator 17 is performed. Not performed. There is a possibility that the target frequency after the final adjustment may be exceeded by performing the preliminary adjustment. Even if the preliminary adjustment is not performed, the ion beam irradiation time longer than the predetermined time is not required at the final adjustment, and the throughput is increased. This is because there is no risk of adverse effects.

When the frequency of the piezoelectric vibrator 17 is measured before the irradiation position b, there is usually a frequency deviation for each piezoelectric vibrator such as fb and fc as shown in FIG. In such a case, the frequency of the piezoelectric vibrator 17 having the frequencies of fb and fc is converged to a predetermined frequency value by preliminary adjustment, so that the frequency adjustment at the time of performing this adjustment can be made with higher accuracy. Can be. Therefore, when performing preliminary adjustment, a target frequency f ₁ for converging the frequency of the piezoelectric vibrator is determined in advance, and an ion beam irradiation time for adjusting the frequency to the f ₁ is calculated. The ion beam irradiation time required to change the frequency value of fb or fc to f ₁ may be calculated from the relationship between the ion beam irradiation time pair and the frequency change amount. Naturally, the energy characteristics of the ion beam must be calculated in consideration of what is irradiated at the irradiation position b.

  When adjusting the ion beam irradiation time at the irradiation position b and when not performing preliminary adjustment, the shutter 12 is adjusted to a half-closed state as shown in FIG. What is necessary is just to irradiate only the piezoelectric vibrator 17 arrange | positioned in the irradiation position a with an ion beam.

Hereinafter, an embodiment in which the ion beam is not irradiated at the irradiation position b and the ion beam irradiation time is adjusted will be described.
The individual frequencies of the piezoelectric vibrators 17 held on the tray 16 are measured in advance by a frequency adjuster (not shown) before the irradiation position b. At this stage, the measured frequency is compared with the frequency f ₁ that is the target value of the frequency after the preliminary adjustment.

If the frequency (measured frequency) of the piezoelectric vibrator 17 is f ₁ or more when compared, the frequency pre-adjustment for the corresponding piezoelectric vibrator 17 is not performed. For this reason, when the corresponding piezoelectric vibrator 17 is conveyed to the irradiation position b, the shutter 16 is semi-closed so that the ion vibrator is not irradiated with the piezoelectric vibrator 17.

On the other hand, the frequency of the piezoelectric vibrator 17 when the contrast is, when was a low fb and fc than f _1, the individual irradiation time of the ion beam required to change the frequency to f ₁ To calculate. The piezoelectric vibrator transported to the irradiation position b is irradiated with an ion beam simultaneously with the piezoelectric vibrator that performs the main adjustment. Thereafter, when the ion beam irradiation time at the time of preliminary adjustment for each piezoelectric vibrator calculated as described above has elapsed, the shutter 16 is semi-closed and the piezoelectric vibrator 17 conveyed to the irradiation position b is moved to the piezoelectric vibrator 17. Control is performed so that the ion beam is not irradiated.

Hereinafter, as in the first embodiment, the piezoelectric vibrator 17 is transported to the irradiation position a, and this adjustment is performed in order to adjust the frequency of each piezoelectric vibrator 17 to the final target frequency f ₀ .
Since the frequency adjustment method as described above is adjusted so that the frequency of the piezoelectric vibrator is converged to the specified frequency f ₁ in the preliminary adjustment stage, it is possible to accurately adjust the target frequency when performing this adjustment. It becomes possible. For this reason, as shown in FIG. 4, the number distribution (frequency distribution) of the piezoelectric vibrators is converged around the target frequency f ₀ as compared with the first embodiment.

  Next, a third embodiment according to the frequency adjustment method of the piezoelectric vibrator of the present invention will be described with reference to FIG. The feature of this embodiment is that the irradiation range of the ion beam to the piezoelectric vibrator 17 is widened as compared with the first and second embodiments. In this embodiment, in addition to the piezoelectric vibrator 17 that performs the main adjustment of the frequency, the front two lots (irradiation position b, irradiation position c) are also irradiated with the ion beam in the transport direction (first irradiation). In the first and second embodiments, only the lot immediately before the piezoelectric vibrator that performs this adjustment is irradiated with the ion beam). For this reason, the irradiation position c is a place where the primary preliminary adjustment of the frequency is performed, and the irradiation position b is a place where the secondary preliminary adjustment of the frequency is performed. As a method of expanding the ion beam irradiation range, the distance between the ion beam irradiation source and the piezoelectric vibrator 17 may be set longer than that in the first embodiment. Of course, it is sufficient to use an ion gun with a wide ion beam radiation angle, but the former is effective in terms of reducing capital investment. Since other configurations are the same as those of the first embodiment, the same reference numerals are given and detailed descriptions thereof are omitted.

  In the frequency adjustment method of the piezoelectric vibrator as in the third embodiment, the number of piezoelectric vibrators 17 capable of performing the frequency adjustment at the same time is increased by increasing the irradiation range of the ion beam, and the primary preliminary adjustment and the secondary preliminary adjustment. By performing the adjustment and the main adjustment, it is possible to shorten the time for applying the ion beam in each step, and it is possible to further improve the throughput as compared with the first and second embodiments.

  FIG. 6 shows the frequency change of the piezoelectric vibrator 17 by the frequency adjustment in this embodiment and the distribution of the piezoelectric vibrator 17 for each frequency. The configuration of the graph is substantially the same as that of the first embodiment, except that secondary preliminary adjustment indicated by a two-dot chain line is performed.

  Next, a fourth embodiment according to the frequency adjustment method of the piezoelectric vibrator of the present invention will be described with reference to FIG. The present embodiment is similar to the third embodiment in that an ion beam can be irradiated to the three piezoelectric vibrators 17. The difference between the third embodiment and this embodiment is that a slit is provided in the mask (first mask) 14 at intervals of the piezoelectric vibrators 17 and an ion beam is irradiated from there. The second mask 14a movable by the second mask moving means 15 is provided in the vicinity of the mask 14, and the slit can be individually closed so that the ion beam irradiation time can be adjusted. Since other configurations are the same as those of the first to third embodiments, those having the same functions are denoted by the same reference numerals and detailed description thereof is omitted.

  In the present embodiment, the second mask 14a shown in FIG. 7 has a single structure. However, the second mask 14a may be divided into a plurality of parts and specify a closed region for each slit of the first mask 14. In carrying out the present invention, the number of piezoelectric vibrators that perform preliminary adjustment simultaneously according to the irradiation angle of the ion beam may be further increased. In the embodiment, the ion gun is fixed and the means for conveying the piezoelectric vibrator is adopted. However, in carrying out the present invention, the ion gun may be moved, or both may be moved relatively. Anyway.

It is a figure which shows 1st Embodiment which concerns on the frequency adjustment method of the piezoelectric vibrator of this invention. It is a figure which shows the change of the frequency and number distribution of the piezoelectric vibrator adjusted by 1st Embodiment. It is a figure which shows 2nd Embodiment which concerns on the frequency adjustment method of the piezoelectric vibrator of this invention. It is a figure which shows the change of the frequency and number distribution of the piezoelectric vibrator adjusted by 2nd Embodiment. It is a figure which shows 3rd Embodiment which concerns on the frequency adjustment method of the piezoelectric vibrator of this invention. It is a figure which shows the change of the frequency and number distribution of the piezoelectric vibrator adjusted by 3rd Embodiment. It is a figure which shows 4th Embodiment which concerns on the frequency adjustment method of the piezoelectric vibrator of this invention. It is a figure which shows the frequency adjustment method of the conventional piezoelectric vibrator. It is a figure which shows the change of the frequency and number distribution of the conventional piezoelectric vibrator.

Explanation of symbols

  10 ......... Ion gun, 12 ......... Shutter, 14 ......... Mask, 16 ......... Tray, 17 ......... Piezoelectric vibrator, 18 ......... Package, 19 ......... External electrode terminal, 20 ......... Piezoelectric vibrating piece, 22... Electrode pad, 24... Frequency measuring device, 26.

Claims (5)

  In the frequency adjustment method of the piezoelectric vibrator that adjusts the frequency of the piezoelectric vibrator by irradiating the piezoelectric vibrating piece with a beam of charged particles, the beam that is being subjected to the main adjustment, which is the final frequency adjustment, Piezoelectric vibrations characterized in that after the other piezoelectric vibrators other than the piezoelectric vibrator are irradiated and the frequency of the other piezoelectric vibrators is preliminarily adjusted, the frequency of the other piezoelectric vibrators is fully adjusted. Child frequency adjustment method.   The frequency adjustment includes a final adjustment, which is a final frequency adjustment, and a preliminary adjustment in the preceding stage, and the preliminary adjustment is applied from a fixed position to the piezoelectric vibrator arranged at the final adjustment position. 2. The method of adjusting a frequency of a piezoelectric vibrator according to claim 1, wherein the same piezoelectric beam is irradiated to another piezoelectric vibrator positioned immediately before the main adjustment position.   In a frequency adjustment method for a piezoelectric vibrator that adjusts the frequency of a piezoelectric vibrator by irradiating a piezoelectric vibrating piece with a charged particle beam, the frequency of the piezoelectric vibrator that performs frequency adjustment is measured in advance, and the measured frequency is determined in advance. If the frequency is smaller than the predetermined frequency, the beam that is being subjected to the final adjustment, which is the final frequency adjustment, is irradiated to another piezoelectric vibrator other than the piezoelectric vibrator that is undergoing the final adjustment, and the other piezoelectric vibrator After performing the preliminary adjustment of the frequency, the main adjustment of the frequency of the other piezoelectric vibrator is performed. When the measured frequency is equal to or higher than a predetermined frequency, the other adjustment is not performed without performing the preliminary adjustment. A method for adjusting the frequency of a piezoelectric vibrator, wherein the main adjustment of the frequency of the piezoelectric vibrator is performed.   The frequency of the piezoelectric vibrator for frequency adjustment is measured in advance, a beam irradiation time for adjusting the measured frequency to a specified frequency by the beam irradiated at the time of preliminary adjustment is determined, and only the predetermined beam irradiation time is reserved. The frequency adjustment method for a piezoelectric vibrator according to claim 3, wherein the adjustment is performed and then the main adjustment is performed.   The beam irradiation time is controlled for each step by a mask in each step of the preliminary adjustment of the frequency and the main adjustment in order to adjust the piezoelectric vibrator to a predetermined frequency. Item 5. The method for adjusting the frequency of the piezoelectric vibrator according to any one of Items 4 to 5.

Images