JP2005220777A - Vane rotary vacuum pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem on a vane rotary vacuum pump wherein a seal component is mounted on a shaft between a pump part and a drive part for preventing the leakage of gas from the drive part to the pump part, resulting in increased size and cost of the pump. <P>SOLUTION: A rolling bearing 152 is constructed of a gas seal type and an inner ring 153 of the rolling bearing 152 is pressed into a motor shaft 222. An outer ring 154 of the rolling bearing 152 and an end plate 151 are fixed together with a seal member 155. As mentioned above, a pump mechanism part and a drive motor part are sealed with the rolling bearing as a boundary, and so gas inflow from the side of the drive motor part is prevented even when pressure drops on the side of the pump mechanism part. Thus, the size of the vacuum pump is reduced without using an expensive sealing component. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vacuum pump.

A conventional vane rotary vacuum pump of this type will be described with reference to FIGS. FIG. 5 is a cross-sectional view of a conventional vane rotary vacuum pump, and FIG. 6 is a cross-sectional view taken along line AA in FIG. A vacuum pump is generally composed of a pump mechanism section and a drive section (prime mover) such as a motor. The pump mechanism section houses an eccentric rotor 2 in a cylinder 1, and the rotor 2 has a cylinder. A plurality of vanes 4 that slide on the inner peripheral surface 3 of the air supply chamber 1 are slidably provided in the radial direction, and the gas in the air supply chamber 6 surrounded by the cylinder 1, the rotor 2, the vane 4, and the end plate 5 is supplied. Then, the rotor 2 rotates from the drive unit through the shaft 7 to suck in from the intake port and discharge to the discharge port. The shaft 7 is supported by a bearing 8. An oil seal 9 is provided on the end plate 5 and the shaft 7 to prevent oil and gas from leaking between the drive section and the pump mechanism section. The oil seal 9 seals while sliding in contact with the rotating shaft 7.
Japanese Utility Model Publication No. 56-83688

  However, the conventional configuration has problems that the size of the vacuum pump is increased and the cost is increased by attaching the oil seal.

  An object of the present invention is to solve the above-described conventional problems and to provide a vane rotary vacuum pump that is small and inexpensive.

  In order to solve the conventional problems, the vane rotary type vacuum pump of the present invention includes a cylinder having a pump mechanism portion and a drive motor portion arranged side by side and having a cylindrical inner surface, and is eccentric from the central axis in the cylinder. A cylindrical rotor having a plurality of vane grooves, a rotating shaft that rotates integrally with the rotor, and a plate made of a self-lubricating material that is slidably inserted into the plurality of vane grooves An end plate attached to an end surface of the cylinder on the side of the drive motor so as to sandwich the rotor and the vane, and a front plate attached to an end surface opposite to the side of the drive motor The pump mechanism is configured to form a plurality of pump spaces in the pump mechanism, and the rotary shaft is a rolling bearing attached to the end plate. The vane rotary vacuum pump is supported by the rotary motor, and the volume of the pump space is changed by driving the rotary shaft with the drive motor unit, wherein the rolling bearing is of a gas seal type, and the rolling The inner ring of the bearing and the rotating shaft are sealed by press-fitting, and the outer ring of the rolling bearing and the end plate are sealed by a seal member, and without using expensive seal parts, the pump mechanism unit and the drive motor unit The gas pump can be prevented from leaking from the drive motor section to the pump mechanism section, and the vacuum pump can be miniaturized.

  The vane rotary type vacuum pump of the present invention seals the pump mechanism part and the drive motor part without using expensive seal parts, can prevent gas leakage from the drive motor part to the pump mechanism part, and is small in size. An inexpensive vane rotary vacuum pump can be provided.

  In the first invention, a pump mechanism portion and a drive motor portion are arranged side by side, a cylinder having a cylindrical inner surface, and a cylindrical shape having a plurality of vane grooves arranged in an eccentric manner from the central axis in the cylinder. The rotor, a rotating shaft that rotates integrally with the rotor, and a plate-like vane that is slidably inserted into the plurality of vane grooves and is made of a self-lubricating material. The pump mechanism portion is configured by an end plate attached to an end surface of the cylinder on the side of the drive motor portion so as to be sandwiched and a front plate attached to an end surface opposite to the side of the drive motor portion. A plurality of pump spaces are formed in the mechanism portion, the rotating shaft is supported by a rolling bearing attached to the end plate, and the rotating shaft is driven by the drive motor portion. And the volume of the pump space is changed by the vane rotary type vacuum pump, the rolling bearing is of a gas seal type, and the inner ring of the rolling bearing and the rotating shaft are sealed by press-fitting, By sealing the outer ring of the rolling bearing and the end plate with a seal member, the gap between the pump mechanism and the drive motor is sealed, and gas leakage from the drive motor to the pump mechanism is prevented. In addition, the vacuum pump can be miniaturized.

  In particular, the second invention seals and fixes the outer ring and the end plate of the rolling bearing by disposing the seal member of the first invention between the outer periphery of the outer ring of the rolling bearing and the end plate. I can do it.

  In the third aspect of the invention, in particular, the contact area between the end face of the rolling bearing and the end plate is reduced by disposing the seal member of the first invention between the end face of the outer ring of the rolling bearing and the end plate. The sealing performance of the sealing member can be improved.

  In the fourth aspect of the present invention, in particular, by using the seal member of any one of the first to third aspects as an anaerobic curable liquid adhesive, it is possible to improve the assemblability of incorporating the rolling bearing into the end plate.

  In the fifth aspect of the invention, in particular, by using the sealing member of the second aspect of the invention as an elastic sealing material, the clearance between the outer periphery of the rolling bearing and the end plate can be increased, and the assemblability is improved.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.

(Embodiment 1)
1 is a cross-sectional view of a vane rotary type vacuum pump according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view taken along line BB in FIG.

  1 and 2, the vane rotary type vacuum pump includes a pump mechanism unit 100, a drive motor unit 200, and a cooling circuit unit 300.

The pump mechanism unit 100 includes a cylinder 111 having a cylindrical inner wall, a cylindrical rotor 121, a vane 131 made of a self-lubricating material, and a front plate 141 and an end plate that sandwich them to form a plurality of pump spaces 161. 151. The rotor 121 is arranged in a state of being eccentric from the central axis of the cylinder 111, and the vane 131 is slidably fitted in a plurality of grooves 122 provided in the direction of the central axis of the rotor 121. A front plate 141 and an end plate 151 are disposed in close contact with each other to form a pump space 161. A central shaft of the rotor 121 is provided with a mechanical shaft 123. By rotating the mechanical shaft 123, the rotor 121 is also rotated as a unit, and the vane 131 is moved inside the groove 122 accordingly. . During operation, the tip of the vane 131 rotates while sliding on the inner wall of the cylinder 111, so that the pump space 161 is partitioned, and suction, compression, and discharge are repeated to perform the pump function.

  The drive motor unit 200 includes a stator 211, a motor rotor 221, and a motor casing 231. The stator 211 is sandwiched between the end plate 151 and the motor casing 231 from both sides, and includes a motor rotor 221 therein. A motor shaft 222 is provided on the central axis of the motor rotor 221, and both ends thereof are supported by a rolling bearing 152 and a rolling bearing 232. Further, the motor shaft 222 and the mechanical shaft 123 are an integral rotary shaft, and the rotation of the motor rotor 221 directly becomes the rotation of the rotor 121, so that no power transmission loss occurs.

  The cooling circuit unit 300 includes a cooling fan 311 and an air guide 321. A cooling fan 311 is attached to the end of the motor shaft 222 opposite to the pump mechanism, and the air fan 321 is surrounded by an air guide 321 to prevent wind from being dispersed. A plurality of through holes (not shown) are provided on the end surface of the motor casing 231 in the axial direction, and the drive motor unit 200 is cooled by forming a wind circuit.

  FIG. 3 is an enlarged view of a main part of the vane rotary type vacuum pump according to the first embodiment of the present invention, in which the vicinity of the rolling bearing 152 in FIG. 1 is enlarged.

  Here, the rolling bearing 152 is formed of a gas seal type. Further, the inner ring 153 of the rolling bearing 152 is press-fitted into the motor shaft 222 and is in close contact therewith. Further, an anaerobic curing type liquid adhesive is interposed as a seal member 155 between the outer periphery of the outer ring 154 of the rolling bearing 152 and the end plate 151, whereby the outer ring and the end plate can be sealed. And the end plate can be fixed.

  Moreover, the assembly of the rolling bearing 152 and the end plate 151 can be facilitated by using the seal member 155 as an anaerobic curable liquid adhesive. Further, by using the sealing member 155 as an elastic sealing material, the gap between the outer periphery of the rolling bearing 152 and the end plate 151 can be increased, and the assemblability is improved.

(Embodiment 2)
FIG. 4 is an enlarged view of a main part of the vane rotary type vacuum pump according to the second embodiment of the present invention, in which the vicinity of the rolling bearing 152 in FIG. 1 is enlarged.

  Here, the rolling bearing 152 is formed of a gas seal type. Further, the inner ring 153 of the rolling bearing 152 is press-fitted into the motor shaft 222 and is in close contact therewith. Further, a seal member 155 is interposed between the end surface of the outer ring 154 of the rolling bearing 152 on the pump mechanism unit 100 side and the end plate 151. This enables the outer ring and the end plate to be sealed with a small number of seal members. This has the same effect as the first embodiment.

  As described above, the vane rotary vacuum pump according to the present invention can be easily sealed between the pump mechanism and the drive motor, and therefore can be applied to applications such as pumps other than the vacuum pump.

Sectional drawing of the vane rotary type vacuum pump in Embodiment 1 of this invention BB sectional view in FIG. The principal part enlarged view of the vane rotary type vacuum pump in Embodiment 1 of this invention The principal part enlarged view of the vane rotary type vacuum pump in Embodiment 1 of this invention Cross section of a conventional vane rotary vacuum pump AA sectional view in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cylinder 2 Rotor 3 Inner peripheral surface 4 Vane 5 End plate 6 Air supply chamber 7 Shaft 8 Bearing 9 Oil seal 100 Pump mechanism part 111 Cylinder 121 Rotor 122 Groove 123 Mechanical shaft 131 Vane 141 Front plate 151 End plate 152 Rolling bearing 161 Pump Space 200 Drive motor section 211 Stator 221 Motor rotor 222 Motor shaft 231 Motor casing 232 Rolling bearing 300 Cooling circuit section 311 Cooling fan 321 Air guide

Claims (5)

A cylinder having a pump mechanism portion and a drive motor portion arranged side by side and having a cylindrical inner surface, a cylindrical rotor having a plurality of vane grooves arranged in an eccentric manner from the central axis in the cylinder, and the rotor A rotary shaft that rotates integrally with the plate, and a plate-like vane that is slidably inserted into the plurality of vane grooves and is made of a self-lubricating material. The pump mechanism portion is constituted by an end plate attached to the end surface on the drive motor portion side and a front plate attached to the end surface opposite to the drive motor portion side, and a plurality of pump spaces are provided in the pump mechanism portion. The rotation shaft is supported by a rolling bearing attached to the end plate, and the rotation shaft is driven by the drive motor unit to Vane rotary type vacuum pump in which the volume of the bearing space is changed, wherein the rolling bearing is of a gas seal type, the inner ring of the rolling bearing and the rotating shaft are sealed by press fitting, and the rolling bearing A vane rotary vacuum pump in which the outer ring and the end plate are sealed with a seal member. The vane rotary vacuum pump according to claim 1, wherein the seal member is disposed between the outer periphery of the outer ring of the rolling bearing and the end plate. The vane rotary vacuum pump according to claim 1 or 2, wherein the seal member is disposed between an end face of the outer ring of the rolling bearing and the end plate. The vane rotary type vacuum pump according to any one of claims 1 to 3, wherein the seal member is an anaerobic curable adhesive. The vane rotary vacuum pump according to any one of claims 1 to 3, wherein the sealing member is an elastic sealing material.

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