JP2005214931A

JP2005214931A - Fine-particulate analyzer

Info

Publication number: JP2005214931A
Application number: JP2004025586A
Authority: JP
Inventors: Kazuo Takeuchi; 内一夫武; Yoshiki Okada; 田芳樹岡; Jiyunsuke Yabugen; 元淳輔藪
Original assignee: WYCKOFF KAGAKU KK
Current assignee: WYCKOFF KAGAKU KK
Priority date: 2004-02-02
Filing date: 2004-02-02
Publication date: 2005-08-11
Anticipated expiration: 2024-02-02
Also published as: JP4286678B2

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fine-particulate analyzer capable of measuring a particle size distribution of fine particulates having a wide distribution from a nano-meter size to a submicron size suspended in a gas phase, and the change along with a lapse of time in a number concentration about the specified particle size of fine particulate while classifying in two kinds of particle size ranges, at the same time and in a real time. <P>SOLUTION: In this fine-particulate analyzer, the first measuring area 2 is formed between a common electrode part 4 and the center electrode 5, in a differential type electric mobility measuring instrument 1, the second measuring area 3 is formed between the common electrode part 4 and a conductive sleeve 20, the charged fine particulates are led into a sample gas introducing hole 27 through a sample gas introducing tube 26, one portion thereof is taken in the first measuring area 2 via a sample gas introducing slit 10, the remainder thereof is taken in the second measuring area 3 from a sample gas introducing flow passage 31, and the taken-in charged particulates are classified under respective measuring conditions. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、気相中に浮遊する微粒子を分析する微粒子分析装置に係り、とりわけ、気相中に浮遊するナノメータ・サイズからサブミクロンメータ・サイズまでの幅広い分布を有する微粒子の粒径分布（粒径と個数濃度との関係）及び特定の粒径サイズの微粒子についての個数濃度の経時変化を２種類の粒径範囲に分けて同時にかつリアルタイムに測定することができる微粒子分析装置に関する。 The present invention relates to a particle analyzer for analyzing fine particles suspended in a gas phase, and in particular, a particle size distribution (particle size) of fine particles having a wide distribution ranging from a nanometer size to a submicrometer size suspended in a gas phase. The present invention relates to a fine particle analyzer capable of dividing a time-dependent change in the number concentration of fine particles having a specific particle size into two types of particle size ranges and simultaneously measuring them in real time.

近年、自動車の排気ガス中に含まれる浮遊粒子状物質（ＳＰＭ：Suspended Particulate Matter）の問題が注目されている。特に、ディーゼル車の比率が大きいヨーロッパにおいては、ディーゼルエンジンから排出されるナノメータ・サイズの微粒子が人体に及ぼす影響に関する研究がクローズアップされており、自動車が実際に市中を走行する際の走行パターンの下で排出される微粒子の挙動をリアルタイムに測定する研究が進められている。また、日本及び米国においても、数年後を目途に微粒子の個数濃度を基準とした規制を検討するとの動きもある。 In recent years, attention has been paid to the problem of suspended particulate matter (SPM) contained in automobile exhaust gas. Especially in Europe, where the proportion of diesel vehicles is large, research on the effects of nanometer-sized particles emitted from diesel engines on the human body has been highlighted, and the driving pattern when a car actually travels in the city Research is underway to measure the behavior of particulates discharged under the conditions in real time. In Japan and the United States, there are also moves to consider regulations based on the number concentration of fine particles in the next few years.

このような微粒子を対象とした従来の分析方法としては、(1)一定時間あたりの排出ガス中の微粒子をフィルタ等に捕集して重量を測定する重量測定法、(2)微粒子にレーザー光線等を照射して散乱光強度や透過率等から微粒子の粒径分布（粒径と個数濃度との関係）を求める光学的手法、(3)ガス中に浮遊する帯電微粒子の電場中での電気移動度が粒径に依存する性質を利用して微粒子の粒径を測定する微分型電気移動度測定法（特許文献１〜４参照）、といった方法が用いられている。 Conventional analysis methods for such fine particles include (1) a gravimetric method of collecting fine particles in exhaust gas per fixed time on a filter and measuring the weight, and (2) a laser beam etc. on the fine particles. Optical method to obtain particle size distribution (relationship between particle size and number concentration) from scattered light intensity and transmittance, etc., and (3) Electric transfer of charged fine particles floating in gas in electric field A method such as a differential electric mobility measurement method (see Patent Documents 1 to 4) that measures the particle size of fine particles by utilizing the property that the degree depends on the particle size is used.

しかしながら、上述した従来の分析方法のうち、上記(1)の重量測定法では、測定のために長時間を要し、フィルタの濾過効率によって捕集される粒子量が異なってしまう、という問題がある。また、上記(2)の光学的手法では、散乱光強度等が微粒子の粒径の６乗に比例するので、微粒子の大きさがナノメータ・サイズの領域になると、正確な粒径分布を求めることが困難になる、という問題がある。なお、一般に用いられているパーティクルカウンタはいずれも、粒径がサブミクロンメータ・サイズ以上の比較的大きな微粒子を対象とするものであって、自動車の排気ガスや大気中に浮遊するナノメータ・サイズの微粒子をリアルタイムに分析することは不可能であった。 However, among the conventional analysis methods described above, the weight measurement method (1) requires a long time for measurement, and the amount of particles collected varies depending on the filtration efficiency of the filter. is there. In the optical method (2), the intensity of scattered light is proportional to the sixth power of the particle size of the fine particles, so when the fine particle size is in the nanometer size region, an accurate particle size distribution is obtained. There is a problem that it becomes difficult. Note that all commonly used particle counters are intended for relatively large particles with a particle size of sub-micrometer size or larger, and have a nanometer size that floats in the exhaust gas of automobiles or in the atmosphere. It was impossible to analyze fine particles in real time.

これに対し、上記(3)の微分型電気移動度測定法は、現在のところ、ナノメータ・サイズの微粒子の粒径分布をその場観察することが可能な唯一の装置であるが、微粒子の粒径分布を求めるために数分間の時間を要するので、自動車が走行しているときのような、変化が著しいモードで排出される排気ガス中の微粒子の粒径分布をリアルタイムに分析することは困難であった。また、複数の粒径サイズの微粒子の粒径分布を同時に測定することも困難であった。 On the other hand, the differential electromobility measurement method (3) is currently the only device capable of in-situ observation of the particle size distribution of nanometer-sized fine particles. Since it takes several minutes to determine the size distribution, it is difficult to analyze in real time the particle size distribution in the exhaust gas that is exhausted in a mode where the change is significant, such as when a car is running. Met. Further, it is difficult to simultaneously measure the particle size distribution of fine particles having a plurality of particle sizes.

なお、このような問題を解決するため、複数の微分型電気移動度測定器を並列に設置して測定する方法をとることも可能であるが、この場合には、各微分型電気移動度測定器に対してサンプルガスを均一に分配することが難しいので測定精度が低下しやすい、という問題があり、また、装置が大型化するので測定可能な場所が限定されてしまう、という問題もある。
特開平１１−２６４７９０号公報特開２０００−４６７２０号公報特開２０００−２７９８９３号公報特開２００１−２３９１８１号公報 In addition, in order to solve such a problem, it is possible to take a method in which a plurality of differential type electric mobility measuring devices are installed in parallel, but in this case, each differential type electric mobility measuring device is used. There is a problem that it is difficult to uniformly distribute the sample gas to the vessel, so that the measurement accuracy is likely to be lowered, and there is also a problem that the place where measurement can be performed is limited because the apparatus is enlarged.
JP 11-264790 A JP 2000-46720 A JP 2000-279893 A JP 2001-239181 A

本発明はこのような点を考慮してなされたものであり、気相中に浮遊するナノメータ・サイズからサブミクロンメータ・サイズまでの幅広い分布を有する微粒子の粒径分布（粒径と個数濃度との関係）及び特定の粒径サイズの微粒子についての個数濃度の経時変化を２種類の粒径範囲に分けて同時にかつリアルタイムに測定することができる微粒子分析装置を提供することを目的とする。 The present invention has been made in consideration of such points, and the particle size distribution (particle size and number concentration) of fine particles having a wide distribution from nanometer size to submicrometer size floating in the gas phase. It is an object of the present invention to provide a fine particle analyzer that can measure the time-dependent change in the number concentration of fine particles having a specific particle size into two particle size ranges and simultaneously and in real time.

本発明は、気相中に浮遊する微粒子を分析する微粒子分析装置において、外部から気密に保たれた筐体と、前記筐体内に配置された中心電極部と、前記筐体内にて前記中心電極部を取り囲むように当該中心電極部と同心軸上に配置され、前記中心電極部との間に第１測定領域を形成するコモン電極部と、前記筐体内にて前記コモン電極部を取り囲むように当該コモン電極部と同心軸上に配置され、前記コモン電極部との間に第２測定領域を形成する外側電極部と、前記コモン電極部に近接した位置から前記第１測定領域及び前記第２測定領域へ向けて帯電微粒子を導入する微粒子導入部と、前記微粒子導入部により導入された帯電微粒子を前記第１測定領域内及び前記第２測定領域内にて一定の方向へ移動させるように前記筐体内にシースガスを導入するシースガス導入部と、前記コモン電極部を基準にして前記コモン電極部と前記中心電極部との間及び前記コモン電極部と前記外側電極部との間に電圧を印加する電源とを備え、前記中心電極部及び前記外側電極部にはそれぞれ、前記第１測定領域内及び前記第２測定領域内を所定の距離だけ移動した帯電微粒子を外部へ取り出すための第１導出スリット及び第２導出スリットが形成され、前記電源により前記コモン電極部と前記中心電極部との間に電位差を生じさせた状態で、前記コモン電極部に近接した位置からシースガスと共に導入される帯電微粒子を前記第１測定領域内にて前記コモン電極部側から前記中心電極部側へ移動させると共に、前記電源により前記コモン電極部と前記外側電極部との間に電位差を生じさせた状態で、前記コモン電極部に近接した位置からシースガスと共に導入される帯電微粒子を前記第２測定領域内にて前記コモン電極部側から前記外側電極部側へ移動させ、前記中心電極部及び前記外側電極部にそれぞれ形成された前記第１導出スリット及び前記第２導出スリットから特定の粒径サイズの帯電微粒子を外部へ取り出すことを特徴とする微粒子分析装置を提供する。 The present invention relates to a fine particle analyzer for analyzing fine particles floating in a gas phase, a case kept airtight from the outside, a center electrode portion disposed in the case, and the center electrode in the case A common electrode part that is arranged on a concentric axis with the central electrode part so as to surround the central electrode part, and forms a first measurement region between the central electrode part, and so as to surround the common electrode part in the housing An outer electrode portion that is arranged on a concentric axis with the common electrode portion and forms a second measurement region between the common electrode portion, and the first measurement region and the second electrode from a position close to the common electrode portion A fine particle introducing portion for introducing charged fine particles toward the measurement region, and the charged fine particles introduced by the fine particle introduction portion so as to move in a certain direction within the first measurement region and the second measurement region. Sheath gas inside the housing And a power source that applies a voltage between the common electrode portion and the central electrode portion and between the common electrode portion and the outer electrode portion with respect to the common electrode portion. A first lead-out slit and a second lead-out for taking out the charged fine particles moved by a predetermined distance in the first measurement region and the second measurement region, respectively, in the center electrode portion and the outer electrode portion, respectively. In the state where a slit is formed and a potential difference is generated between the common electrode portion and the central electrode portion by the power source, charged fine particles introduced together with a sheath gas from a position close to the common electrode portion are measured in the first measurement. In the region, the electrode is moved from the common electrode portion side to the central electrode portion side, and a potential difference is generated between the common electrode portion and the outer electrode portion by the power source. The charged fine particles introduced together with the sheath gas from a position close to the common electrode portion are moved from the common electrode portion side to the outer electrode portion side in the second measurement region, and the central electrode portion and the outer electrode are moved. There is provided a fine particle analyzer characterized in that charged fine particles having a specific particle size are taken out from the first lead slit and the second lead slit respectively formed in the section.

なお、本発明において、前記微粒子導入部は、前記コモン電極部の外側に位置する導入孔に帯電微粒子を導入する導入管と、前記コモン電極部に形成された導入スリットであって前記導入孔に取り込まれた帯電微粒子を前記第１測定領域内に取り込むための導入スリットと、前記コモン電極部の外面とガイドとにより形成されたサンプルガス導入流路であって前記導入孔に取り込まれた帯電微粒子を前記第２測定領域内に取り込むためのサンプルガス導入流路とを有することが好ましい。 In the present invention, the fine particle introduction portion is an introduction tube for introducing charged fine particles into an introduction hole located outside the common electrode portion, and an introduction slit formed in the common electrode portion, and is formed in the introduction hole. A charged fine particle that is a sample gas introduction flow path formed by an introduction slit for taking in the charged charged fine particles into the first measurement region, an outer surface of the common electrode portion, and a guide, and is taken into the introduction hole. It is preferable to have a sample gas introduction flow path for taking the gas into the second measurement region.

また、本発明においては、前記中心電極部及び前記外側電極部にそれぞれ形成された前記第１導出スリット及び前記第２導出スリットに連通して設けられ、当該各導出スリットから取り出された特定の粒径サイズの帯電微粒子の個数濃度を測定する微粒子個数濃度計数器をさらに備えることが好ましい。 Further, in the present invention, the specific particles that are provided in communication with the first lead-out slit and the second lead-out slit formed in the center electrode portion and the outer electrode portion, respectively, and are taken out from the lead-out slits. It is preferable to further include a fine particle number concentration counter for measuring the number concentration of charged fine particles having a diameter size.

ここで、前記中心電極部に形成された前記第１導出スリットは、前記中心電極部に連結された電気絶縁体からなる絶縁体ロッドを介して外部に連通しており、前記第１導出スリットに連通して設けられた前記微粒子個数濃度計数器はファラデーカップ及び電流増幅器を有し、このうち少なくとも前記ファラデーカップが前記絶縁体ロッドの内部空間内に配置されていることが好ましい。また、前記第１導出スリットに連通して設けられた前記微粒子個数濃度計数器のうち前記ファラデーカップ及び前記電流増幅器が共に前記絶縁体ロッドの内部空間内に配置されていてもよい。また、前記外側電極部に形成された前記第２導出スリットは、前記外側電極部に連結された電気絶縁体からなるハウジング部を介して外部に連通しており、前記第２導出スリットに連通して設けられた前記微粒子個数濃度計数器はファラデーカップ及び電流増幅器を有し、このうち少なくとも前記ファラデーカップが前記ハウジング部の内部空間内に配置されていることが好ましい。また、前記第１導出スリットに連通して設けられた前記微粒子個数濃度計数器のうち前記ファラデーカップ及び前記電流増幅器が共に前記ハウジング部の内部空間内に配置されていることが好ましい。 Here, the first lead-out slit formed in the center electrode portion communicates with the outside through an insulator rod made of an electric insulator connected to the center electrode portion, and the first lead-out slit is connected to the first lead-out slit. The particulate number concentration counter provided in communication has a Faraday cup and a current amplifier, and at least the Faraday cup is preferably disposed in the internal space of the insulator rod. Further, the Faraday cup and the current amplifier of the fine particle number concentration counter provided in communication with the first lead-out slit may be both disposed in the internal space of the insulator rod. In addition, the second lead-out slit formed in the outer electrode portion communicates with the outside via a housing portion made of an electrical insulator connected to the outer electrode portion, and communicates with the second lead-out slit. Preferably, the fine particle number concentration counter provided has a Faraday cup and a current amplifier, and at least the Faraday cup is preferably disposed in the internal space of the housing portion. In the fine particle number concentration counter provided in communication with the first lead-out slit, it is preferable that both the Faraday cup and the current amplifier are disposed in the internal space of the housing portion.

さらに、本発明においては、前記シースガス導入部により前記筐体内に導入されたシースガスを前記筐体の外部へ取り出すと共に当該シースガスを前記シースガス導入部により再度導入するシースガス循環部をさらに備えることが好ましい。 Furthermore, in the present invention, it is preferable to further include a sheath gas circulation part that takes out the sheath gas introduced into the casing by the sheath gas introduction part to the outside of the casing and introduces the sheath gas again by the sheath gas introduction part.

本発明によれば、互いに同心軸上に配置された三重円筒構造のコモン電極部、中心電極部及び外側電極部を備え、コモン電極部と中心電極部との間（第１測定領域）及びコモン電極部と外側電極部との間（第２測定領域）に電位差を生じさせた状態で、コモン電極部４に近接した位置からシースガスとともに導入された帯電微粒子を第１測定領域及び第２測定領域のそれぞれにおいて特定の測定条件の下で分級するようにしている。このため、中心電極部及び外側電極部に印加される電圧を段階的にスキャンすれば、外部から導入された気相中に浮遊する幅広い分布を有するナノメータ・サイズからサブミクロンメータ・サイズの帯電微粒子の粒径分布（粒径と個数濃度との関係）を２種類の粒径範囲に分けて１台の装置で同時に測定することができる。またこの場合、中心電極部及び外側電極部に印加される電圧を所望の粒径サイズの帯電微粒子を取り出すのに必要とされる電圧に固定することも可能であり、この場合には、特定の粒径サイズの帯電微粒子についての個数濃度の経時変化を２種類の粒径範囲に分けて１台の装置で同時にかつリアルタイムに測定することができる。 According to the present invention, a common electrode portion having a triple cylindrical structure, a center electrode portion, and an outer electrode portion, which are arranged on concentric axes, are provided between the common electrode portion and the center electrode portion (first measurement region) and the common electrode portion. The charged fine particles introduced together with the sheath gas from a position close to the common electrode portion 4 in a state in which a potential difference is generated between the electrode portion and the outer electrode portion (second measurement region) are the first measurement region and the second measurement region. Each is classified under specific measurement conditions. For this reason, if the voltage applied to the center electrode portion and the outer electrode portion is scanned stepwise, the charged fine particles having a wide distribution floating in the gas phase introduced from the outside to a nanometer size to a submicrometer size The particle size distribution (the relationship between the particle size and the number concentration) can be divided into two particle size ranges and simultaneously measured with one apparatus. In this case, it is also possible to fix the voltage applied to the center electrode portion and the outer electrode portion to a voltage required to take out charged fine particles having a desired particle size. The change with time in the number concentration of charged fine particles having a particle size can be divided into two particle size ranges and measured simultaneously and in real time with one apparatus.

BEST MODE FOR CARRYING OUT THE INVENTION

以下、図面を参照して本発明の実施の形態について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第１の実施の形態
まず、図１により、本発明による微粒子分析装置の第１の実施の形態について説明する。 First Embodiment First, a first embodiment of a particle analyzer according to the present invention will be described with reference to FIG.

図１に示すように、本発明の第１の実施の形態に係る微粒子分析装置１００は、気相中に浮遊する微粒子を分析するものであり、同心軸上に２つの測定領域２、３が配列された三重円筒構造の微分型電気移動度測定器１を備えている。 As shown in FIG. 1, the particle analyzer 100 according to the first embodiment of the present invention analyzes particles suspended in a gas phase, and has two measurement regions 2 and 3 on a concentric axis. A differential electric mobility measuring instrument 1 having an array of triple cylinder structures is provided.

すなわち、微分型電気移動度測定器１は、円筒状の中心電極部５と、中心電極部５を取り囲むように当該中心電極部５と同心軸上に配置された円筒状のコモン電極部４と、コモン電極部４を取り囲むように当該コモン電極部４と同心軸上に配置された円筒状の導電性スリーブ（外側電極部）２０とを備えている。なお、以上において、中心電極部５、コモン電極部４及び導電性スリーブ２０は、ハウジング部６、カバー部７、サンプルガス導入部８及びベース部９からなる筐体１ａ内に配置され、外部から気密に保たれている。また、このような筐体１ａ内において、コモン電極部４と中心電極部５との間に第１測定領域２が形成され、コモン電極部４と外導電性スリーブ２０との間に第２測定領域３が形成されている。 That is, the differential electric mobility measuring instrument 1 includes a cylindrical central electrode portion 5, and a cylindrical common electrode portion 4 disposed on a concentric axis with the central electrode portion 5 so as to surround the central electrode portion 5. The common electrode portion 4 is provided with a cylindrical conductive sleeve (outer electrode portion) 20 disposed on the concentric axis so as to surround the common electrode portion 4. In the above, the center electrode portion 5, the common electrode portion 4, and the conductive sleeve 20 are disposed in the housing 1a including the housing portion 6, the cover portion 7, the sample gas introduction portion 8, and the base portion 9, and are externally provided. It is kept airtight. Further, in such a case 1a, the first measurement region 2 is formed between the common electrode portion 4 and the center electrode portion 5, and the second measurement is performed between the common electrode portion 4 and the outer conductive sleeve 20. Region 3 is formed.

ここで、図１に示す微分型電気移動度測定器１において、自動車の排気ガス等の大気（気相）中に浮遊している微粒子（エアロゾル）は、アメリシウム２４１等の放射線源から照射されるα線やコロナ放電器によって生成されたコロナイオン等によって予め荷電された後、サンプルガス導入部８のサンプルガス導入管２６を経由してコモン電極部４の外側に位置するサンプルガス導入孔２７に取り込まれる。その後、サンプルガス導入孔２７に取り込まれた帯電微粒子の一部は、コモン電極部４の上流部に形成された環状のサンプルガス導入スリット１０を介して第１測定領域２へ取り込まれ、一方、帯電微粒子の残りは、コモン電極部４の上流部に位置する外面とガイド３２とにより形成されるサンプルガス導入流路３１から第２測定領域３に取り込まれる。そして、このようにして取り込まれた帯電微粒子は、後述するような原理及び作用に従い、第１測定領域２及び第２測定領域３において、それぞれの測定条件の下で分級される。なおここで、サンプルガス導入管２６、サンプルガス導入孔２７、コモン電極部４に形成されたサンプルガス導入スリット１０及びガイド３２等により、コモン電極部４に近接した位置から第１測定領域２及び第２測定領域３へ向けて帯電微粒子を導入する微粒子導入部が構成されている。 Here, in the differential electric mobility measuring instrument 1 shown in FIG. 1, fine particles (aerosol) suspended in the atmosphere (gas phase) such as automobile exhaust gas are irradiated from a radiation source such as americium 241. After being charged in advance by alpha rays, corona ions generated by a corona discharger or the like, the sample gas introduction hole 27 located outside the common electrode portion 4 is passed through the sample gas introduction tube 26 of the sample gas introduction portion 8. It is captured. Thereafter, a part of the charged fine particles taken into the sample gas introduction hole 27 is taken into the first measurement region 2 via the annular sample gas introduction slit 10 formed in the upstream portion of the common electrode portion 4, The remaining charged fine particles are taken into the second measurement region 3 from the sample gas introduction channel 31 formed by the outer surface located upstream of the common electrode portion 4 and the guide 32. The charged fine particles taken in this way are classified under the respective measurement conditions in the first measurement region 2 and the second measurement region 3 in accordance with the principle and action described below. Here, the first measurement region 2 and the sample gas introduction pipe 26, the sample gas introduction hole 27, the sample gas introduction slit 10 formed in the common electrode portion 4, the guide 32, and the like from the position close to the common electrode portion 4 and the like. A fine particle introduction part for introducing charged fine particles toward the second measurement region 3 is configured.

より具体的には、図１に示す微分型電気移動度測定器１において、コモン電極部４の上流部に形成された環状のサンプルガス導入スリット１０を介して第１測定領域２に取り込まれた帯電微粒子の一部は、カバー部７に設けられた第１シースガス供給管２４から供給されて第１ラミナー２５により層流化されたシースガス中に流入して、シースガスと共に下流方向へ移動する。なおここで、第１シースガス供給管２４及び第１ラミナー２５により、導入された帯電微粒子を第１測定領域２内にて一定の方向へ移動させるように筐体１ａ内にシースガスを導入するシースガス導入部が構成されている。このとき、電圧可変の第１直流電源３８から、第１コネクタ２１及び中心電極部５の一端部の中心軸上に設けられた端子１４を経由して中心電極部５に電圧が印加されており、アースに接続されたコモン電極部４と中心電極部５との間に電位差を生じさせると、両電極間に形成される電場の影響を受けて帯電微粒子が電気移動度に応じた速度でコモン電極部４側から中心電極部５側に引き寄せられる。これにより、第１直流電源３８により印加された電圧に相当する粒径サイズの帯電微粒子のみが中心電極部５に設けられた環状の第１分級ガス導出スリット（第１導出スリット）１２に到達する。 More specifically, in the differential electric mobility measuring instrument 1 shown in FIG. 1, it is taken into the first measurement region 2 through an annular sample gas introduction slit 10 formed in the upstream portion of the common electrode portion 4. A part of the charged fine particles flows into the sheath gas supplied from the first sheath gas supply pipe 24 provided in the cover portion 7 and laminarized by the first laminator 25, and moves in the downstream direction together with the sheath gas. Here, the sheath gas introduction for introducing the sheath gas into the housing 1a by the first sheath gas supply pipe 24 and the first laminator 25 so that the introduced charged fine particles are moved in the first measurement region 2 in a certain direction. The part is composed. At this time, a voltage is applied to the center electrode portion 5 from the first variable voltage direct-current power supply 38 via the first connector 21 and the terminal 14 provided on the central axis of one end of the center electrode portion 5. When a potential difference is generated between the common electrode portion 4 and the central electrode portion 5 connected to the ground, the charged fine particles are common at a speed corresponding to the electric mobility under the influence of the electric field formed between the two electrodes. It is drawn from the electrode part 4 side to the center electrode part 5 side. As a result, only charged fine particles having a particle size corresponding to the voltage applied by the first DC power supply 38 reach the annular first classified gas outlet slit (first outlet slit) 12 provided in the center electrode portion 5. .

このときの第１測定領域２における帯電微粒子の電気移動度Ｚｐ１は、次式（１）により算出される。 The electric mobility Zp1 of the charged fine particles in the first measurement region 2 at this time is calculated by the following equation (1).

Ｚｐ１＝Ｑｃ１・ｌｎ（ｒ２／ｒ１）／（２π・Ｖ１・Ｌ１） … （１）
上式（１）において、Ｑｃ１は第１測定領域２に供給されたシースガスの流量、ｒ１は中心電極部５の外径、ｒ２はコモン電極部４の内径、Ｖ１は中心電極部５とアースに接続されたコモン電極４との間の電位差、Ｌ１はサンプルガス導入スリット１０と第１分級ガス導出スリット１２との間の距離である。 Zp1 = Qc1 · ln (r2 / r1) / (2π · V1 · L1) (1)
In the above equation (1), Qc1 is the flow rate of the sheath gas supplied to the first measurement region 2, r1 is the outer diameter of the center electrode part 5, r2 is the inner diameter of the common electrode part 4, and V1 is connected to the center electrode part 5 and the ground. A potential difference between the connected common electrode 4 and L1 is a distance between the sample gas introduction slit 10 and the first classified gas extraction slit 12.

また、帯電微粒子の電気移動度Ｚｐ１と粒径Ｄｐ１との間には次式（２）の関係が成り立つ。 Further, the relationship of the following equation (2) is established between the electric mobility Zp1 and the particle size Dp1 of the charged fine particles.

Ｚｐ１＝ｎ１・ｅ・Ｃｃ１／（３π・μ１・Ｄｐ１） … （２）
上式（２）において、ｎ１は帯電微粒子の荷電量、ｅは電気素量、Ｃｃ１はカニンガム補正係数、μ１は第１測定領域２に供給されたシースガスの粘性係数である。 Zp1 = n1 · e · Cc1 / (3π · μ1 · Dp1) (2)
In the above equation (2), n1 is the charge amount of the charged fine particles, e is the elementary charge amount, Cc1 is the Cunningham correction coefficient, and μ1 is the viscosity coefficient of the sheath gas supplied to the first measurement region 2.

ここで、上式（１）及び（２）に則って、中心電極部５に印加される電圧Ｖ１を段階的にスキャンすれば、第１分級ガス導出スリット１２に到達する帯電微粒子の粒径サイズＤｐ１を変化させることが可能となる。中心電極部５の第１分級ガス導出スリット１２に到達した特定の粒径サイズＤｐ１の帯電微粒子は、中心電極部５の他端部の中心軸上に設けられた第１分級ガス導出孔１３から、電気絶縁体からなる絶縁体ロッド１６に設けられた微粒子導出流路１５を経由して、ベース部９に設けられた第１分級ガス排出管３３から外部へ取り出される。ここで、第１分級ガス排出管３３には、第１分級ガス導出スリット１２、第１分級ガス導出孔１３及び微粒子導出流路１５に連通した別置きの第１微粒子個数濃度計数器４２や第１凝縮核計数器４４が設けられており、分級された特定の粒径サイズＤｐ１の帯電微粒子の個数濃度を測定することができるようになっている。なお、第１微粒子個数濃度計数器４２は、第１ファラデーカップ３４、第１電流増幅器３５及び第１エレクトロメータ３９を有している。 Here, in accordance with the above formulas (1) and (2), if the voltage V1 applied to the center electrode portion 5 is scanned stepwise, the particle size of the charged fine particles that reach the first classified gas derivation slit 12 It becomes possible to change Dp1. The charged fine particles having a specific particle size Dp1 reaching the first classified gas outlet slit 12 of the central electrode portion 5 are from a first classified gas outlet hole 13 provided on the central axis of the other end portion of the central electrode portion 5. Then, it is taken out from the first classified gas discharge pipe 33 provided in the base portion 9 through the fine particle outlet flow path 15 provided in the insulator rod 16 made of an electric insulator. Here, the first classified gas discharge pipe 33 includes a first particle number concentration counter 42 and a separate first particle number concentration counter 42 that communicate with the first classified gas outlet slit 12, the first classified gas outlet hole 13, and the particle outlet passage 15. A one-condensation nucleus counter 44 is provided so that the number concentration of classified fine particles having a specific particle size Dp1 can be measured. The first particulate number concentration counter 42 includes a first Faraday cup 34, a first current amplifier 35, and a first electrometer 39.

なお、第１測定領域２において、第１分級ガス導出スリット１２から取り出された帯電微粒子（及びそれを共に移動するガス）以外の帯電微粒子（及びそれと共に移動するガス）は、コモン電極部４の下流部に位置する第１余剰ガス排出管１１から外部へ排出される。 In the first measurement region 2, the charged fine particles (and the gas that moves together) other than the charged fine particles (and the gas that moves together) taken out from the first classified gas outlet slit 12 The first surplus gas discharge pipe 11 located in the downstream part is discharged to the outside.

一方、コモン電極部４の上流部に位置する外面とガイド３２とにより形成されるサンプルガス導入流路３１を介して第２測定領域３へ取り込まれた帯電微粒子の残り（サンプルガス導入部８のサンプルガス導入管２６から導入された全帯電微粒子の量から第１測定領域２へ分配された帯電微粒子の量を差し引いた量の帯電微粒子）は、サンプルガス導入部８に設けられた第２シースガス供給管２８から供給されて環状のシースガス供給孔２９を経由して第２ラミナー３０により層流化されたシースガス中に流入して、シースガスと共に下流方向へ移動する。なおここで、第２シースガス供給管２８、シースガス供給孔２９及び第２ラミナー３０により、導入された帯電微粒子を第２測定領域３内にて一定の方向へ移動させるように筐体１ａ内にシースガスを導入するシースガス導入部が構成されている。このとき、電圧可変の第２直流電源４０から、第２コネクタ２３を経由してハウジング部６の内面に挿入された導電性スリーブ２０に電圧が印加されており、アースに接続されたコモン電極４と導電性スリーブ２０との間に電位差を生じさせると、両電極間に形成される電場の影響を受けて帯電微粒子が電気移動度に応じた速度でコモン電極部４側から導電性スリーブ２０側に引き寄せられる。これにより、第２直流電源４０により印加された電圧に相当する粒径サイズの帯電微粒子のみが導電性スリーブ２０形成された環状の第２分級ガス導出スリット（第２導出スリット）１７に到達する。なお、図１において、導電性スリーブ２０のうち第２分級ガス導出スリットを挟んで上流側の部分と下流側の部分とは、互いに近接する環状の端部においてその円周上の３点で電気的に接続されており、導電性スリーブ２０の上流側の部分に第２コネクタ２３を経由して電圧を印加すれば導電性スリーブ２０の下流側の部分にも同一の電圧がかかるようになっている。 On the other hand, the remaining charged fine particles taken into the second measurement region 3 via the sample gas introduction channel 31 formed by the outer surface located at the upstream portion of the common electrode portion 4 and the guide 32 (of the sample gas introduction portion 8). The amount of charged fine particles obtained by subtracting the amount of charged fine particles distributed to the first measurement region 2 from the amount of all charged fine particles introduced from the sample gas introduction pipe 26 is the second sheath gas provided in the sample gas introduction unit 8. It flows into the sheath gas supplied from the supply pipe 28 and laminarized by the second laminator 30 via the annular sheath gas supply hole 29 and moves downstream together with the sheath gas. Here, the sheath gas is introduced into the housing 1a so that the introduced charged fine particles are moved in the second measurement region 3 in a certain direction by the second sheath gas supply pipe 28, the sheath gas supply hole 29, and the second laminator 30. A sheath gas introduction part for introducing the gas is configured. At this time, a voltage is applied from the variable voltage second DC power source 40 to the conductive sleeve 20 inserted into the inner surface of the housing portion 6 via the second connector 23, and the common electrode 4 connected to the ground. When a potential difference is generated between the conductive sleeve 20 and the conductive sleeve 20, the charged fine particles are affected by the electric field formed between the two electrodes at a speed corresponding to the electric mobility from the common electrode portion 4 side to the conductive sleeve 20 side. Be drawn to. As a result, only charged fine particles having a particle size corresponding to the voltage applied by the second DC power supply 40 reach the annular second classified gas outlet slit (second outlet slit) 17 formed with the conductive sleeve 20. In FIG. 1, the upstream portion and the downstream portion of the conductive sleeve 20 across the second classified gas lead-out slit are electrically connected at three points on the circumference at the annular end portions close to each other. If a voltage is applied to the upstream portion of the conductive sleeve 20 via the second connector 23, the same voltage is applied to the downstream portion of the conductive sleeve 20 as well. Yes.

このときの第２測定領域３における帯電微粒子の電気移動度Ｚｐ２は、次式（３）により算出される。 The electric mobility Zp2 of the charged fine particles in the second measurement region 3 at this time is calculated by the following equation (3).

Ｚｐ２＝Ｑｃ２・ｌｎ（ｒ４／ｒ３）／（２π・Ｖ２・Ｌ２） … （３）
上式（３）において、Ｑｃ２は第２測定領域３に供給されたシースガスの流量、ｒ３はコモン電極部４の外径、ｒ４はハウジング部６の内面に挿入された導電性スリーブ２０の内径、Ｖ２は導電性スリーブ２０とアースに接続されたコモン電極部４との間の電位差、Ｌ２はサンプルガス導入流路３１を形成するガイド３２の先端部と第２分級ガス導出スリット１７との間の距離である。 Zp2 = Qc2 · ln (r4 / r3) / (2π · V2 · L2) (3)
In the above equation (3), Qc2 is the flow rate of the sheath gas supplied to the second measurement region 3, r3 is the outer diameter of the common electrode part 4, r4 is the inner diameter of the conductive sleeve 20 inserted into the inner surface of the housing part 6, V2 is a potential difference between the conductive sleeve 20 and the common electrode portion 4 connected to the ground, and L2 is between the tip of the guide 32 forming the sample gas introduction channel 31 and the second classified gas outlet slit 17. Distance.

また、帯電微粒子の電気移動度Ｚｐ２と粒径Ｄｐ２との間には次式（４）の関係が成り立つ。 Further, the relationship of the following equation (4) is established between the electric mobility Zp2 and the particle size Dp2 of the charged fine particles.

Ｚｐ２＝ｎ２・ｅ・Ｃｃ２／（３π・μ２・Ｄｐ２）………（４）
上式（４）において、ｎ２は帯電微粒子の荷電量、ｅは電気素量、Ｃｃ２はカニンガム補正係数、μ２は第２測定領域３に供給されたシースガスの粘性係数である。 Zp2 = n2 · e · Cc2 / (3π · μ2 · Dp2) (4)
In the above equation (4), n2 is the charge amount of the charged fine particles, e is the elementary charge amount, Cc2 is the Cunningham correction coefficient, and μ2 is the viscosity coefficient of the sheath gas supplied to the second measurement region 3.

ここで、上式（３）及び（４）に則って、導電性スリーブ２０に印加される電圧Ｖ２を段階的にスキャンすれば、第２分級ガス導出スリット１７に到達する帯電微粒子の粒径サイズＤｐ２を変化させることが可能となる。導電性スリーブ２０の第２分級ガス導出スリット１７に到達した特定の粒径サイズＤｐ２の帯電微粒子は、ハウジング部６の内部空間を経由して、ハウジング部６に設けられた第２分級ガス排出管１８から外部へ取り出される。ここで、第２分級ガス排出管１８には、第２分級ガス導出スリット１７に連通した別置きの第２微粒子個数濃度計数器４３や第２凝縮核計数器４５が設けられており、分級された特定の粒径サイズＤｐ２の帯電微粒子の個数濃度を測定することができるようになっている。なお、第２微粒子個数濃度計数器４３は、第２ファラデーカップ３６、第２電流増幅器３７及び第２エレクトロメータ４１を有している。 Here, if the voltage V2 applied to the conductive sleeve 20 is scanned stepwise in accordance with the above formulas (3) and (4), the particle size of the charged fine particles reaching the second classified gas extraction slit 17 It becomes possible to change Dp2. The charged fine particles having a specific particle size Dp2 reaching the second classified gas outlet slit 17 of the conductive sleeve 20 pass through the internal space of the housing part 6 and are provided in the second classified gas discharge pipe provided in the housing part 6. 18 is taken out from the outside. Here, the second classified gas discharge pipe 18 is provided with a separate second fine particle number concentration counter 43 and a second condensation nucleus counter 45 communicating with the second classified gas outlet slit 17 for classification. The number concentration of charged fine particles having a specific particle size Dp2 can be measured. The second fine particle number concentration counter 43 includes a second Faraday cup 36, a second current amplifier 37, and a second electrometer 41.

なお、第２測定領域３において、第２分級ガス導出スリット１７から取り出された帯電微粒子（及びそれと共に移動するガス）以外の帯電微粒子（及びそれと共に移動するガス）は、導電性スリーブ２０の下流部に位置する第２余剰ガス排出管２２から外部へ排出される。 In the second measurement region 3, the charged fine particles (and the gas that moves together with them) other than the charged fine particles (and the gas that moves together with them) taken out from the second classified gas outlet slit 17 are downstream of the conductive sleeve 20. The second surplus gas discharge pipe 22 located in the section is discharged to the outside.

このように本発明の第１の実施の形態によれば、互いに同心軸上に配置された三重円筒構造のコモン電極部４、中心電極部５及び導電性スリーブ２０を備え、アースに接続されたコモン電極部４と中心電極部５との間（第１測定領域２）及びコモン電極部４と導電性スリーブ２０との間（第２測定領域３）に電位差を生じさせた状態で、コモン電極部４に近接した位置からシースガスとともに導入された帯電微粒子を第１測定領域２及び第２測定領域３のそれぞれにおいて特定の測定条件の下で分級するようにしている。このため、中心電極部５及び導電性スリーブ２０に印加される電圧Ｖ１、Ｖ２を段階的にスキャンすれば、外部から導入された気相中に浮遊する幅広い分布を有するナノメータ・サイズからサブミクロンメータ・サイズの帯電微粒子の粒径分布（粒径と個数濃度との関係）を２種類の粒径範囲（例えば１０ｎｍ付近と１００〜２００ｎｍ付近）に分けて１台の装置で同時に測定することができる。またこの場合、中心電極部５及び導電性スリーブ２０に印加される電圧Ｖ１、Ｖ２を所望の粒径サイズの帯電微粒子を取り出すのに必要とされる電圧に固定することも可能であり、この場合には、特定の粒径サイズＤｐ１、Ｄｐ２の帯電微粒子についての個数濃度の経時変化を２種類の粒径範囲（例えば１０ｎｍ付近と１００〜２００ｎｍ付近）に分けて１台の装置で同時にかつリアルタイムに測定することができる。 As described above, according to the first embodiment of the present invention, the common electrode portion 4 having the triple cylindrical structure, the central electrode portion 5 and the conductive sleeve 20 arranged on the concentric axes are provided and connected to the ground. In a state where a potential difference is generated between the common electrode portion 4 and the central electrode portion 5 (first measurement region 2) and between the common electrode portion 4 and the conductive sleeve 20 (second measurement region 3), the common electrode The charged fine particles introduced together with the sheath gas from a position close to the unit 4 are classified under specific measurement conditions in each of the first measurement region 2 and the second measurement region 3. For this reason, if the voltages V1 and V2 applied to the central electrode portion 5 and the conductive sleeve 20 are scanned stepwise, the nanometer size and the submicron meter having a wide distribution floating in the gas phase introduced from the outside. The particle size distribution (the relationship between the particle size and the number concentration) of the charged fine particles of size can be divided into two types of particle size ranges (for example, around 10 nm and around 100 to 200 nm) and measured simultaneously with one apparatus. . In this case, it is also possible to fix the voltages V1 and V2 applied to the center electrode portion 5 and the conductive sleeve 20 to a voltage required for taking out charged fine particles having a desired particle size. In this method, the time-dependent change in the number concentration of the charged fine particles having the specific particle size Dp1, Dp2 is divided into two particle size ranges (for example, around 10 nm and around 100-200 nm) simultaneously and in real time with one apparatus. Can be measured.

また、本発明の第１の実施の形態によれば、帯電微粒子の個数濃度を測定するための測定器である第１微粒子個数濃度計数器４２及び第２微粒子個数濃度計数器４３、又は、第１凝縮核計数器４４及び第２凝縮核計数器４５を、微分型電気移動度測定器１とは別置きの態様で設置するようにしているので、測定器の温度依存特性にかかわらず、微粒子分析装置１００の本体である微分型電気移動度測定器１を高温又は低温の条件下で作動させることが可能となり、高温又は低温の気相中に浮遊する微粒子の粒径分布（粒径と個数濃度との関係）及び特定の粒径サイズの微粒子の個数濃度の経時変化を気相の温度を変化させることなく測定することができる。 In addition, according to the first embodiment of the present invention, the first fine particle number concentration counter 42 and the second fine particle number concentration counter 43 which are measuring devices for measuring the number concentration of charged fine particles, Since the 1 condensation nucleus counter 44 and the second condensation nucleus counter 45 are installed separately from the differential type electric mobility measuring device 1, the fine particles can be obtained regardless of the temperature-dependent characteristics of the measuring device. The differential electric mobility measuring instrument 1 which is the main body of the analyzer 100 can be operated under high or low temperature conditions, and the particle size distribution (particle size and number of particles) floating in the high or low temperature gas phase. The relationship with the concentration) and the change over time in the number concentration of fine particles having a specific particle size can be measured without changing the temperature of the gas phase.

なお、上述した第１の実施の形態においては、帯電微粒子を導入するための微粒子導入部の構成として、サンプルガス導入管２６を介してコモン電極部４の外側に位置するサンプルガス導入孔２７に取り込まれた帯電微粒子の一部を、コモン電極部４の上流部に形成された環状のサンプルガス導入スリット１０を介して第１測定領域２へ取り込むと共に、帯電微粒子の残りを、コモン電極部４の上流部に位置する外面とガイド３２とにより形成されるサンプルガス導入流路３１から第２測定領域３に取り込む構成をとっている。しかしながら、微粒子導入部の構成は、コモン電極部４に近接した位置から第１測定領域２及び第２測定領域３へ向けて帯電微粒子を導入することができるものであればよく、これに限らず、例えば、コモン電極部４の内側に位置するサンプルガス導入孔に取り込まれた帯電微粒子を所定の導入スリット及び導入流路を介して第１測定領域２及び第２測定領域３へ分配する構成や、中空状のコモン電極部４の内部に位置するサンプルガス導入孔に取り込まれた帯電微粒子を所定の導入スリットを介して第１測定領域２及び第２測定領域３へ分配する構成であってもよい。 In the first embodiment described above, the configuration of the particulate introduction part for introducing charged particulates is provided in the sample gas introduction hole 27 located outside the common electrode part 4 via the sample gas introduction pipe 26. A part of the charged charged fine particles is taken into the first measurement region 2 through the annular sample gas introduction slit 10 formed in the upstream part of the common electrode part 4 and the remaining charged fine particles are taken into the common electrode part 4. A configuration is adopted in which the sample gas is introduced into the second measurement region 3 from the sample gas introduction channel 31 formed by the outer surface located in the upstream portion of the gas and the guide 32. However, the configuration of the fine particle introduction unit is not limited to this as long as it can introduce charged fine particles from the position close to the common electrode unit 4 toward the first measurement region 2 and the second measurement region 3. For example, a configuration in which charged fine particles taken into a sample gas introduction hole located inside the common electrode portion 4 are distributed to the first measurement region 2 and the second measurement region 3 via a predetermined introduction slit and introduction flow path, Even if the charged fine particles taken into the sample gas introduction hole located inside the hollow common electrode portion 4 are distributed to the first measurement region 2 and the second measurement region 3 through a predetermined introduction slit. Good.

第２の実施の形態
次に、図２により、本発明の第２の実施の形態について説明する。なお、本発明の第２の実施の形態は、帯電微粒子の個数濃度を測定するための測定器の一部が微分型電気移動度測定器に組み込まれている点を除いて、他は図１に示す第１の実施の形態と略同一である。本発明の第２の実施の形態において、図１に示す第１の実施の形態と同一部分には同一符号を付して詳細な説明は省略する。 Second Embodiment Next, the second embodiment of the present invention will be described with reference to FIG. The second embodiment of the present invention is the same as that of FIG. 1 except that a part of a measuring device for measuring the number concentration of charged fine particles is incorporated in the differential electric mobility measuring device. This is substantially the same as the first embodiment shown in FIG. In the second embodiment of the present invention, the same parts as those in the first embodiment shown in FIG.

図２に示すように、本発明の第２の実施の形態においては、第１微粒子個数濃度計数器４２を構成する第１ファラデーカップ３４及びそれに電気的に接続された第１電流増幅器３５が、微分型電気移動度測定器１のうち中心電極部５の第１分級ガス導出スリット１２及び第１分級ガス導出孔１３に連通した絶縁体ロッド１６の内部空間（微粒子導出孔１５）内に配置されている。これにより、中心電極部５に形成された第１分級ガス導出スリット１２に到達した特定の粒径サイズＤｐ１の帯電微粒子は、中心電極部５の第１分級ガス導出孔１３を経由して絶縁体ロッド１６の内部空間（微粒子導出孔１５）内に配置された第１ファラデーカップ３４に到達して、当該特定の粒径サイズＤｐ１の帯電微粒子が持つ電荷が放出される。そして、このような電荷の放出に伴って発生したフェムト・アンペア（１０^−１５アンペア）オーダーの微弱電流は、第１電流増幅器３５によって増幅されると共に電圧信号に変換され、最終的に、微分型電気移動度測定器１の外部に設置された第１エレクトロメータ３９により当該特定の粒径サイズＤｐ１の帯電微粒子の個数濃度が測定される。なお、図２に示す微分型電気移動度測定器１において、第１ファラデーカップ３４に導入されて電荷が放出された後の微粒子（及びそれと共に移動するガス）は、ベース部９に設けられた第１分級ガス排出管３３から外部へ排出される。 As shown in FIG. 2, in the second embodiment of the present invention, the first Faraday cup 34 constituting the first fine particle number concentration counter 42 and the first current amplifier 35 electrically connected thereto are In the differential electric mobility measuring instrument 1, it is disposed in the internal space (fine particle outlet hole 15) of the insulator rod 16 communicating with the first classified gas outlet slit 12 and the first classified gas outlet hole 13 of the center electrode portion 5. ing. As a result, the charged fine particles having a specific particle size Dp1 that have reached the first classified gas outlet slit 12 formed in the center electrode portion 5 are passed through the first classified gas outlet hole 13 of the center electrode portion 5 to be an insulator. The electric charge of the charged fine particles having the specific particle size Dp1 is released by reaching the first Faraday cup 34 disposed in the internal space (fine particle outlet hole 15) of the rod 16. Then, the weak current of the femto ampere (10 ⁻¹⁵ ampere) order generated along with the discharge of the electric charge is amplified by the first current amplifier 35 and converted into a voltage signal. The number concentration of the charged fine particles having the specific particle size Dp1 is measured by a first electrometer 39 installed outside the electric mobility measuring device 1. In the differential electric mobility measuring instrument 1 shown in FIG. 2, the fine particles (and the gas that moves together with the fine particles after being introduced into the first Faraday cup 34 and discharged) are provided in the base portion 9. The gas is discharged from the first classified gas discharge pipe 33 to the outside.

一方、第２微粒子個数濃度計数器４３を構成する第２ファラデーカップ３６及びそれに電気的に接続された第２電流増幅器３７は、微分型電気移動度測定器１のうち導電性スリーブ２０の第２分級ガス導出スリット１７に連通したハウジング部６の内部空間内に配置されている。これにより、導電性スリーブ２０に形成された第２分級ガス導出スリット１７に到達した特定の粒径サイズＤｐ２の帯電微粒子は、ハウジング部６の内部空間内に配置された第２ファラデーカップ３６に到達して、当該特定の粒径サイズＤｐ２の帯電微粒子が持つ電荷が放出される。そして、このような電荷の放出に伴って発生したフェムト・アンペア（１０^−１５アンペア）オーダーの微弱電流は、第２電流増幅器３７によって増幅されると共に電圧信号に変換され、最終的に、微分型電気移動度測定器１の外部に設置された第２エレクトロメータ４１により当該特定の粒径サイズＤｐ２の帯電微粒子の個数濃度が測定される。なお、図２に示す微分型電気移動度測定器１において、第２ファラデーカップ３６に導入されて電荷を放出された後の微粒子（及びそれと共に移動するガス）は、ハウジング部６に設けられた第２分級ガス排出管１８から外部へ排出される。 On the other hand, the second Faraday cup 36 constituting the second fine particle number concentration counter 43 and the second current amplifier 37 electrically connected to the second Faraday cup 36 are the second of the conductive sleeve 20 of the differential electric mobility measuring instrument 1. It arrange | positions in the internal space of the housing part 6 connected to the classification gas derivation | leading-out slit 17. FIG. As a result, the charged fine particles having a specific particle size Dp2 that have reached the second classified gas lead-out slit 17 formed in the conductive sleeve 20 reach the second Faraday cup 36 disposed in the internal space of the housing portion 6. Then, the electric charge possessed by the charged fine particles having the specific particle size Dp2 is released. Then, the weak current of the femto ampere (10 ⁻¹⁵ ampere) order generated with the discharge of the electric charge is amplified by the second current amplifier 37 and converted into a voltage signal. The number concentration of the charged fine particles having the specific particle size Dp2 is measured by the second electrometer 41 installed outside the electric mobility measuring instrument 1. In the differential electric mobility measuring instrument 1 shown in FIG. 2, the fine particles (and the gas that moves together with the fine particles after being introduced into the second Faraday cup 36 and discharged) are provided in the housing portion 6. It is discharged from the second classified gas discharge pipe 18 to the outside.

このように本発明の第２の実施の形態によれば、微分型電気移動度測定器１の第１測定領域２（コモン電極部４と中心電極部５との間に形成された領域）及び第２測定領域３（コモン電極部４と導電性スリーブ２０との間に形成された領域）においてそれぞれ分級された帯電微粒子が取り出される第１分級ガス導出スリット１２及び第２分級ガス導出スリット１７の直後に、帯電微粒子の帯電量を測定するための第１ファラデーカップ３４及び第２ファラデーカップ３６を設けるようにしているので、帯電微粒子の帯電量の測定を時間遅れのない状態で行うことができる。このため、外部から導入された気相中に浮遊する幅広い分布を有するナノメータ・サイズからサブミクロンメータ・サイズの帯電微粒子の粒径分布（粒径と個数濃度との関係）及び特定の粒径サイズの微粒子についての個数濃度の経時変化をよりリアルタイムに（より高精度に）測定することができる。 As described above, according to the second embodiment of the present invention, the first measurement region 2 (region formed between the common electrode portion 4 and the center electrode portion 5) of the differential electric mobility measuring instrument 1 and The first classified gas outlet slit 12 and the second classified gas outlet slit 17 from which charged fine particles classified in the second measurement region 3 (region formed between the common electrode portion 4 and the conductive sleeve 20) are taken out, respectively. Immediately after that, since the first Faraday cup 34 and the second Faraday cup 36 for measuring the charge amount of the charged fine particles are provided, the charge amount of the charged fine particles can be measured without a time delay. . For this reason, the particle size distribution (relationship between particle size and number concentration) of charged fine particles of nanometer size to submicrometer size with a wide distribution floating in the gas phase introduced from the outside and a specific particle size The change with time in the number concentration of the fine particles can be measured in real time (with higher accuracy).

また、本発明の第２の実施の形態によれば、第１ファラデーカップ３４及び第２ファラデーカップ３６における電荷の放出に伴って発生した電流を増幅して電圧信号に変換するための第１電流増幅器３５及び第２電流増幅器３７を、第１ファラデーカップ３４及び第２ファラデーカップ３６と共に、絶縁体ロッド１６の内部空間（微粒子導出孔１５）内及びハウジング部６の内部空間内に設けるようにしているので、微分型電気移動度測定器１の外部で発生するノイズの影響を抑えて第１電流増幅器３５及び第２電流増幅器３７における測定精度を向上させることができる。 Further, according to the second embodiment of the present invention, the first current for amplifying the current generated with the discharge of the charges in the first Faraday cup 34 and the second Faraday cup 36 and converting it into a voltage signal. The amplifier 35 and the second current amplifier 37 are provided together with the first Faraday cup 34 and the second Faraday cup 36 in the internal space (fine particle outlet hole 15) of the insulator rod 16 and the internal space of the housing portion 6. Therefore, the measurement accuracy in the first current amplifier 35 and the second current amplifier 37 can be improved by suppressing the influence of noise generated outside the differential electric mobility measuring instrument 1.

なお、上述した第２の実施の形態においては、第１微粒子個数濃度計数器４２及び第２微粒子個数濃度計数器４３を構成する第１ファラデーカップ３４及び第２ファラデーカップ３６だけでなく、第１電流増幅器３５及び第２電流増幅器３７をも微分型電気移動度測定器１内に設けているが、これに限らず、第１ファラデーカップ３４及び第２ファラデーカップ３６のみを微分型電気移動度測定器１内に設けるようにしてもよい。 In the second embodiment described above, not only the first Faraday cup 34 and the second Faraday cup 36 constituting the first particle number concentration counter 42 and the second particle number concentration counter 43, but also the first The current amplifier 35 and the second current amplifier 37 are also provided in the differential electric mobility measuring instrument 1, but not limited thereto, only the first Faraday cup 34 and the second Faraday cup 36 are measured for the differential electric mobility. It may be provided in the vessel 1.

また、上述した第１及び第２の実施の形態においては、微分型電気移動度測定器１に導入された帯電微粒子（エアロゾル）及びシースガスが最終的に第１分級ガス排出管３３、第２分級ガス排出管１８、第１余剰ガス排出管１１及び第２余剰ガス排出管２２を介して外部へ取り出されるように構成されているが、このようにして取り出されるシースガスを再度シースガスとして利用することも可能である。 In the first and second embodiments described above, the charged fine particles (aerosol) and the sheath gas introduced into the differential electric mobility measuring device 1 are finally converted into the first classified gas discharge pipe 33 and the second classified gas. The gas exhaust pipe 18, the first surplus gas exhaust pipe 11, and the second surplus gas exhaust pipe 22 are configured to be taken out to the outside, but the sheath gas taken out in this way can be used again as the sheath gas. Is possible.

すなわち、図３に示すように、微粒子分析装置１００の微分型電気移動度測定器１の外部にシースガス循環部１１０を設け、第１シースガス供給管２４及び第２シースガス供給管２８を介して微分型電気移動度測定器１の筐体１ａ内に導入されたシースガスを、第１分級ガス排出管３３、第２分級ガス排出管１８、第１余剰ガス排出管１１及び第２余剰ガス排出管２２を介して筐体１ａの外部へ取り出すと共に、この取り出されたシースガスを第１シースガス供給管２４及び第２シースガス供給管２８を介して筐体１ａ内に再度導入するように構成するとよい。 That is, as shown in FIG. 3, a sheath gas circulation unit 110 is provided outside the differential type electric mobility measuring instrument 1 of the particle analyzer 100, and the differential type is provided via the first sheath gas supply pipe 24 and the second sheath gas supply pipe 28. The sheath gas introduced into the housing 1a of the electric mobility measuring instrument 1 is passed through the first classified gas discharge pipe 33, the second classified gas discharge pipe 18, the first surplus gas discharge pipe 11, and the second surplus gas discharge pipe 22. It is good to comprise so that the taken-out sheath gas may be reintroduced in the case 1a via the first sheath gas supply pipe 24 and the second sheath gas supply pipe 28.

より具体的には、図３に示す微粒子分析装置１００において、微分型電気移動度測定器１のコモン電極４と中心電極５との間に形成される第１測定領域２には、第１シースガス供給管２４、第１余剰ガス排出管１１、第１分級ガス排出管３３及び第１コネクタ２１が設けられている。そして、第１シースガス供給管２４には第１圧力計４６と第１シースガス流量調節器４７の入ロ部とが連通して設けられており、第１余剰ガス排出管１１には第１余剰ガス流量計４８と第１余剰ガス流量調整弁４９の入ロ部とが連通して設けられている。また、第１分級ガス排出管３３には第１微粒子個数濃度計数器４２の第１ファラデーカップ３４が連通して設けられており、さらに、第１ファラデーカップ３４には第１電流増幅器３５及び第１エレクトロメータ３９が接続されている。さらに、中心電極５の一端部に設けられた端子１４と電気的に接続されている第１コネクタ２１には電圧可変の第１直流電源３８が接続されている。 More specifically, in the particle analyzer 100 shown in FIG. 3, the first sheath gas is provided in the first measurement region 2 formed between the common electrode 4 and the center electrode 5 of the differential electric mobility measuring instrument 1. A supply pipe 24, a first surplus gas discharge pipe 11, a first classified gas discharge pipe 33, and a first connector 21 are provided. The first sheath gas supply pipe 24 is provided with a first pressure gauge 46 and an inlet portion of the first sheath gas flow controller 47, and the first surplus gas discharge pipe 11 has a first surplus gas. A flow meter 48 and an inlet portion of the first surplus gas flow rate adjustment valve 49 are provided in communication with each other. In addition, a first Faraday cup 34 of a first particulate number concentration counter 42 is provided in communication with the first classified gas discharge pipe 33. Further, the first Faraday cup 34 includes a first current amplifier 35 and a first current amplifier 35. One electrometer 39 is connected. Further, a variable voltage first DC power supply 38 is connected to the first connector 21 electrically connected to the terminal 14 provided at one end of the center electrode 5.

ここで、第１微粒子個数濃度計数器４２の第１ファラデーカップ３４には、電荷が放出された後の微粒子（及びそれと共に移動するガス）を排出するための第１サンプルガス排出管５０が設けられており、さらに、第１サンプルガス排出管５０には第１サンプルガス流量調節器５１の入ロ部が連通して設けられている。 Here, the first Faraday cup 34 of the first fine particle number concentration counter 42 is provided with a first sample gas discharge pipe 50 for discharging the fine particles (and the gas that moves together) after the discharge of the charges. Further, the first sample gas discharge pipe 50 is provided with an inlet portion of the first sample gas flow rate controller 51 in communication therewith.

一方、微分型電気移動度測定器１のコモン電極４とハウジング６との間に形成される第２電気移動度測定部３には、第２シースガス供給管２８、第２余剰ガス排出管２２、第２分級ガス排出管１８及び第２コネクタ２３が設けられている。そして、第２シースガス供給管２８には第２圧力計５２と第２シースガス流量調節器５３の入ロ部とが連通して設けられており、第２余剰ガス排出管２２には第２余剰ガス流量計５４と第２余剰ガス流量調整弁５５の入ロ部とが連通して設けられている。また、第２分級ガス排出管１８には第２微粒子個数濃度計数器４３の第２ファラデーカップ３６が連通して設けられており、さらに、第２ファラデーカップ３６には第２電流増幅器３７及び第２エレクトロメータ４１が接続されている。さらに、ハウジング部６の内面に挿入された導電性スリーブ２０と電気的に接続されている第２コネクタ２３には電圧可変の第２直流電源４０が接続されている。 On the other hand, the second electric mobility measuring unit 3 formed between the common electrode 4 and the housing 6 of the differential electric mobility measuring instrument 1 includes a second sheath gas supply pipe 28, a second surplus gas discharge pipe 22, A second classified gas discharge pipe 18 and a second connector 23 are provided. The second sheath gas supply pipe 28 is provided with a second pressure gauge 52 and an inlet portion of the second sheath gas flow rate regulator 53 in communication with each other, and the second surplus gas discharge pipe 22 has a second surplus gas. The flow meter 54 and the inlet portion of the second surplus gas flow rate adjustment valve 55 are provided in communication with each other. A second Faraday cup 36 of the second fine particle number concentration counter 43 is provided in communication with the second classified gas discharge pipe 18, and further, the second Faraday cup 36 includes a second current amplifier 37 and a second current amplifier 37. Two electrometers 41 are connected. Further, a variable voltage second DC power source 40 is connected to the second connector 23 electrically connected to the conductive sleeve 20 inserted in the inner surface of the housing portion 6.

ここで、第２微粒子個数濃度計数器４３の第２ファラデーカップ３６には、電荷が放出された後の微粒子（及びそれと共に移動するガス）を排出するための第２サンプルガス排出管５６が設けられており、さらに、第２サンプルガス排出管５６には第２サンプルガス流量調節器５７の入ロ部が連通して設けられている。 Here, the second Faraday cup 36 of the second fine particle number concentration counter 43 is provided with a second sample gas discharge pipe 56 for discharging the fine particles (and the gas moving therewith) after the charges are released. Further, the second sample gas discharge pipe 56 is provided with an inlet portion of a second sample gas flow rate controller 57 in communication therewith.

さらに、サンプルガス導入部８に設けられたサンプルガス導入管２６にはアメリシウム２４１等の放射線源やコロナ放電器等を収納した荷電装置５８と、サンプルガス流量調整弁５９の一端部とが連通して設けられている。 Further, a charging device 58 containing a radiation source such as americium 241, a corona discharger, and the like and one end of the sample gas flow rate adjusting valve 59 communicate with the sample gas introduction pipe 26 provided in the sample gas introduction unit 8. Is provided.

さらにまた、第１エレクトロメータ３９、第２エレクトロメータ４１、第１直流電源３８及び第２直流電源４０には、測定データの取り込み及び保存、微分型電気移動度測定器１への印加電圧の制御、及び測定データの解析及びデータ表示を目的として制御コンピュータ６０が接続されている。 Furthermore, the first electrometer 39, the second electrometer 41, the first DC power supply 38, and the second DC power supply 40 are used to capture and store measurement data and control the voltage applied to the differential electric mobility measuring instrument 1. A control computer 60 is connected for the purpose of analyzing measurement data and displaying data.

なお、第１余剰ガス流量調整弁４９、第２余剰ガス流量調整弁５５、第１サンプルガス流量調節器５１及び第２サンプルガス流量調節器５７のそれぞれの出ロ部には、第３圧力計６１を備えたサージタンク６２の一端部が配管で接続されている。また、サージタンク６２の他端部（出口部）と第１シースガス流量調節器４７及び第２シースガス流量調節器５３のそれぞれの入ロ部とが、循環ガス流量調整弁６３、循環ポンプ６４、冷却器６５及びステンレススチール製のフィルタ６６を経由して配管で接続されている。なお、サージタンク６２の出ロ部には、サンプルガス流量調整弁６７が上流側に設けられた真空ポンプ６８が接続されている。 Note that a third pressure gauge is provided at the outlet of each of the first surplus gas flow rate adjustment valve 49, the second surplus gas flow rate adjustment valve 55, the first sample gas flow rate regulator 51, and the second sample gas flow rate regulator 57. One end of a surge tank 62 having 61 is connected by piping. In addition, the other end portion (exit portion) of the surge tank 62 and the inlet portions of the first sheath gas flow rate regulator 47 and the second sheath gas flow rate regulator 53 are connected to the circulation gas flow rate adjustment valve 63, the circulation pump 64, and the cooling. The pipe 65 is connected via a pipe 65 and a stainless steel filter 66. A vacuum pump 68 provided with a sample gas flow rate adjusting valve 67 on the upstream side is connected to the outlet portion of the surge tank 62.

また、循環ポンプ６４には、バイパス流量調整弁６９が設けられたバイパスライン７０が設けられており、冷却器６５とフィルタ６６との間の配管には、温度計７１とシースガス補助供給弁７２とが設けられたシースガス補助供給管７３が接続されている。 In addition, the circulation pump 64 is provided with a bypass line 70 provided with a bypass flow rate adjusting valve 69, and a thermometer 71, a sheath gas auxiliary supply valve 72, and a pipe between the cooler 65 and the filter 66 are provided. The sheath gas auxiliary supply pipe 73 provided with is connected.

ここで、このような構成からなる微粒子分析装置１００における各部でのガスの流量の配分は次式（５）〜（９）により表される。 Here, the distribution of the gas flow rate at each part in the particle analyzer 100 having such a configuration is expressed by the following equations (5) to (9).

Ｑａ＝Ｑａ１＋Ｑａ２………………（５）
Ｑｓｈ＝Ｑｓｈ１＋Ｑｓｈ２………（６）
Ｑｅｘ＝Ｑｅｘ１＋Ｑｅｘ２………（７）
Ｑｓ＝Ｑｓ１＋Ｑｓ２………………（８）
Ｑａ＋Ｑｓｈ＝Ｑｅｘ＋Ｑｓ………（９）
上式（９）〜（１３）において、Ｑａはサンプルガス導入管２６を流れるガスの流量、Ｑａ１は第１測定領域２へ取り込まれるサンプルガスの流量、Ｑａ２は第２測定領域３へ取り込まれるサンプルガスの流量、Ｑｓｈはシースガス供給管７４を流れるガスの流量、Ｑｓｈ１は第１測定領域２へ供給されるシースガスの流量、Ｑｓｈ２は第２測定領域３へ供給されるシースガスの流量、Ｑｅｘは余剰ガス排出管７５を流れるガスの流量、Ｑｅｘ１は第１測定領域２から排出される余剰ガスの流量、Ｑｅｘ２は第２測定領域３から排出される余剰ガスの流量、Ｑｓはサンプルガス排出管７６を流れるガスの流量、Ｑｓ１は第１ファラデーカップ３４から排出されるサンプルガスの流量、Ｑｓ２は第２ファラデーカップ３６から排出されるサンプルガスの流量である。 Qa = Qa1 + Qa2 (5)
Qsh = Qsh1 + Qsh2 (6)
Qex = Qex1 + Qex2 (7)
Qs = Qs1 + Qs2 (8)
Qa + Qsh = Qex + Qs (9)
In the above formulas (9) to (13), Qa is the flow rate of the gas flowing through the sample gas introduction pipe 26, Qa1 is the flow rate of the sample gas taken into the first measurement region 2, and Qa2 is the sample taken into the second measurement region 3. The flow rate of gas, Qsh is the flow rate of gas flowing through the sheath gas supply pipe 74, Qsh1 is the flow rate of sheath gas supplied to the first measurement region 2, Qsh2 is the flow rate of sheath gas supplied to the second measurement region 3, and Qex is surplus gas. The flow rate of the gas flowing through the discharge pipe 75, Qex1 is the flow rate of excess gas discharged from the first measurement region 2, Qex2 is the flow rate of excess gas discharged from the second measurement region 3, and Qs flows through the sample gas discharge tube 76. The flow rate of the gas, Qs1 is the flow rate of the sample gas discharged from the first Faraday cup 34, and Qs2 is the sump discharged from the second Faraday cup 36. Is the flow rate of the gas.

このように本発明の第３の実施の形態によれば、微分型電気移動度測定器１の外部に設けられたシースガス循環部１１０により、微分型電気移動度測定器１の第１測定領域２内及び第２測定領域３内に導入されたシースガスを帯電微粒子（エアロゾル）から分離して外部へ取り出すと共に、この取り出されたシースガスを第１シースガス供給管２４及び第２シースガス供給管２８を介して筐体１ａ内に再度導入するようにしているので、シースガスを再利用する閉鎖循環方式を採用することが可能となり、コンパクトで安価な可搬式の微粒子分析装置１００を得ることができる。 As described above, according to the third embodiment of the present invention, the first measurement region 2 of the differential electric mobility measuring device 1 is provided by the sheath gas circulation unit 110 provided outside the differential electric mobility measuring device 1. The sheath gas introduced into the inside and the second measurement region 3 is separated from the charged fine particles (aerosol) and taken out to the outside, and the taken-out sheath gas is passed through the first sheath gas supply pipe 24 and the second sheath gas supply pipe 28. Since it is introduced again into the housing 1a, it is possible to adopt a closed circulation system that reuses the sheath gas, and a compact and inexpensive portable particle analyzer 100 can be obtained.

本発明による微粒子分析装置の第１の実施の形態を示す縦断面図。1 is a longitudinal sectional view showing a first embodiment of a particle analyzer according to the present invention. 本発明による微粒子分析装置の第２の実施の形態を示す縦断面図。The longitudinal cross-sectional view which shows 2nd Embodiment of the fine particle analyzer by this invention. 図１及び図２に示す微粒子分析装置においてシースガスを循環させて用いる態様を説明するための図。The figure for demonstrating the aspect which circulates and uses sheath gas in the fine particle analyzer shown in FIG.1 and FIG.2.

Explanation of symbols

１００微粒子分析装置
１微分型電気移動度測定器
１ａ筐体
２第１測定領域
３第２測定領域
４コモン電極部
５中心電極部
６ハウジング部
７カバー部
８サンプルガス導入部
９ベース部
１０サンプルガス導入スリット
１１第１余剰ガス排出管
１２第１分級ガス導出スリット
１３第１分級ガス導出流路
１４端子
１５微粒子導出流路
１６絶縁体ロッド
１７第２分級ガス導出スリット
１８第２分級ガス排出管
２０導電性スリーブ（外側電極部）
２１第１コネクタ
２２第２余剰ガス排出管
２３第２コネクタ
２４第１シースガス供給管
２５第１ラミナー
２６サンプルガス導入管
２７サンプルガス導入孔
２８第２シースガス供給管
２９シースガス供給孔
３０第２ラミナー
３１サンプルガス導入流路
３２ガイド
３３第１分級ガス排出管
３４第１ファラデーカップ
３５第１電流増幅器
３６第２ファラデーカップ
３７第２電流増幅器
３８第１直流電源
３９第１エレクトロメータ
４０第２直流電源
４１第２エレクトロメータ
４２第１微粒子個数濃度計数器
４３第２微粒子個数濃度計数器
４４第１凝縮核計数器
４５第２凝縮核計数器
４６第１圧力計
４７第１シースガス流量調節器
４８第１余剰ガス流量計
４９第１余剰ガス流量調整弁
５０第１サンプルガス排出管
５１第１サンプルガス流量調節器
５２第２圧力計
５３第２シースガス流量調節器
５４第２余剰ガス流量計
５５第２余剰ガス流量調整弁
５６第２サンプルガス排出管
５７第２サンプルガス流量調整器
５８荷電装置
５９サンプルガス流量調整弁
６０制御コンピュータ
６１第３圧力計
６２サージタンク
６３循環ガス流量調整弁
６４循環ポンプ
６５冷却器
６６フィルタ
６７サンプルガス流量調整弁
６８真空ポンプ
６９バイパス流量調整弁
７０バイパスライン
７１温度計
７２シースガス補助供給弁
７３シースガス補助供給管
７４シースガス供給管
７５余剰ガス排出管
７６サンプルガス排出管 DESCRIPTION OF SYMBOLS 100 Fine particle analyzer 1 Differential type electric mobility measuring device 1a Case 2 1st measurement area 3 2nd measurement area 4 Common electrode part 5 Center electrode part 6 Housing part 7 Cover part 8 Sample gas introduction part 9 Base part 10 Sample gas Introduction slit 11 First surplus gas discharge pipe 12 First classified gas outlet slit 13 First classified gas outlet passage 14 Terminal 15 Fine particle outlet passage 16 Insulator rod 17 Second classified gas outlet slit 18 Second classified gas outlet pipe 20 Conductive sleeve (outer electrode part)
21 1st connector 22 2nd surplus gas discharge pipe 23 2nd connector 24 1st sheath gas supply pipe 25 1st laminar 26 sample gas introduction pipe 27 sample gas introduction hole 28 2nd sheath gas supply pipe 29 sheath gas supply hole 30 2nd laminator 31 Sample gas introduction flow path 32 Guide 33 First classified gas discharge pipe 34 First Faraday cup 35 First current amplifier 36 Second Faraday cup 37 Second current amplifier 38 First DC power supply 39 First electrometer 40 Second DC power supply 41 Second electrometer 42 First particle number concentration counter 43 Second particle number concentration counter 44 First condensation nucleus counter 45 Second condensation nucleus counter 46 First pressure gauge 47 First sheath gas flow controller 48 First surplus Gas flow meter 49 First surplus gas flow adjustment valve 50 First sample gas discharge pipe 51 First sample Gas flow controller 52 Second pressure gauge 53 Second sheath gas flow controller 54 Second surplus gas flow meter 55 Second surplus gas flow control valve 56 Second sample gas discharge pipe 57 Second sample gas flow controller 58 Charging device 59 Sample gas flow rate adjustment valve 60 Control computer 61 Third pressure gauge 62 Surge tank 63 Circulation gas flow rate adjustment valve 64 Circulation pump 65 Cooler 66 Filter 67 Sample gas flow rate adjustment valve 68 Vacuum pump 69 Bypass flow rate adjustment valve 70 Bypass line 71 Thermometer 72 Sheath gas auxiliary supply valve 73 Sheath gas auxiliary supply pipe 74 Sheath gas supply pipe 75 Surplus gas discharge pipe 76 Sample gas discharge pipe

Claims

In a particle analyzer that analyzes particles floating in the gas phase,
A case kept airtight from the outside,
A central electrode portion disposed in the housing;
A common electrode part disposed on the concentric axis with the central electrode part so as to surround the central electrode part in the housing, and forming a first measurement region between the central electrode part;
An outer electrode part disposed on the concentric axis with the common electrode part so as to surround the common electrode part in the housing, and forming a second measurement region between the common electrode part;
A fine particle introduction part for introducing charged fine particles from a position close to the common electrode part toward the first measurement region and the second measurement region;
A sheath gas introduction part for introducing a sheath gas into the housing so as to move the charged fine particles introduced by the fine particle introduction part in a fixed direction in the first measurement region and the second measurement region;
A power source that applies a voltage between the common electrode portion and the central electrode portion and between the common electrode portion and the outer electrode portion with respect to the common electrode portion;
A first derivation slit and a second derivation slit for taking out the charged fine particles moved in the first measurement region and the second measurement region by a predetermined distance in the center electrode portion and the outer electrode portion, respectively. Formed,
In a state where a potential difference is generated between the common electrode portion and the central electrode portion by the power source, charged fine particles introduced together with a sheath gas from a position close to the common electrode portion in the first measurement region. While moving from the common electrode part side to the central electrode part side and with the sheath gas from a position close to the common electrode part in a state where a potential difference is generated between the common electrode part and the outer electrode part by the power source The charged fine particles to be introduced are moved from the common electrode portion side to the outer electrode portion side in the second measurement region, and the first lead slits formed in the center electrode portion and the outer electrode portion, respectively, A fine particle analyzer characterized in that charged fine particles having a specific particle size are taken out from the second lead-out slit.

The fine particle introduction portion includes an introduction tube for introducing charged fine particles into an introduction hole located outside the common electrode portion, and an introduction slit formed in the common electrode portion, and the charged fine particles taken into the introduction hole. A sample gas introduction flow path formed by an introduction slit for taking in the first measurement area, an outer surface of the common electrode portion and a guide, and charged fine particles taken into the introduction hole are introduced into the second measurement area. The fine particle analyzer according to claim 1, further comprising a sample gas introduction channel for taking in the sample gas.

The number of charged fine particles having a specific particle size, which are provided in communication with the first lead slit and the second lead slit formed in the center electrode part and the outer electrode part, respectively, and are taken out from the lead slits. The fine particle analyzer according to claim 1 or 2, further comprising a fine particle number concentration counter for measuring the concentration.

The first lead slit formed in the center electrode portion communicates with the outside through an insulator rod made of an electrical insulator connected to the center electrode portion,
The fine particle number concentration counter provided in communication with the first lead-out slit has a Faraday cup and a current amplifier, and at least the Faraday cup is disposed in the internal space of the insulator rod. The fine particle analyzer according to claim 3, characterized in that it is characterized by

The Faraday cup and the current amplifier of the fine particle number concentration counter provided in communication with the first lead-out slit are both disposed in an internal space of the insulator rod. 4. The fine particle analyzer according to 4.

The second lead-out slit formed in the outer electrode portion communicates with the outside through a housing portion made of an electrical insulator connected to the outer electrode portion,
The fine particle number concentration counter provided in communication with the second lead-out slit has a Faraday cup and a current amplifier, and at least the Faraday cup is disposed in the internal space of the housing portion. The microparticle analyzer according to claim 5.

The Faraday cup and the current amplifier of the fine particle number concentration counter provided in communication with the first lead-out slit are both disposed in an internal space of the housing part. The fine particle analyzer described in 1.

2. The apparatus according to claim 1, further comprising a sheath gas circulation section that takes out the sheath gas introduced into the casing by the sheath gas introduction section to the outside of the casing and introduces the sheath gas again by the sheath gas introduction section. The fine particle analyzer according to any one of claims 7 to 9.