JP2005214223A - Diaphragm and mechanical seal using diaphragm - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mechanical seal with improved close adhesion property of sliding faces of sliding members, for elongating a service life of a diaphragm. <P>SOLUTION: The diaphragm 48 has two-layer structure of an inside diaphragm 48A and an outside diaphragm 48B. The inside diaphragm 48A is made of fluorocarbon resin, and the outside diaphragm 48B is made of anticorrosion rubber. The inside diaphragm 48A and outside diaphragm 48B are respectively left in a free condition. By making full use of an elastic force of the anticorrosion rubber constituting the outside diaphragm 48B, a pressing force for pressing a fixed side sliding member 50 to a rotation side sliding member 56 side is enhanced to improve the close adhesion property of the sliding faces of the fixed side sliding member 50 and the rotation side sliding member 56. Since the inside diaphragm 48A located inside an etching treatment tank 10 is made from the fluorocarbon resin, the corrosion of the diaphragm 48 is prevented to elongate the service life of the diaphragm. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a diaphragm used for a rotating shaft disposed in a processing tank in which a chemical solution is stored, and a mechanical seal using the diaphragm.

  A metal plate for a printing plate, for example, an aluminum thin plate (hereinafter referred to as “web”) is subjected to a surface roughening treatment and undergoes treatment steps such as a coating step and a drying step, and then becomes a photosensitive planographic printing plate.

  By the way, in a processing process, there is a thing which sprays a processing liquid on a web in the state of spraying in a processing tank, a conveyance roll which conveys a web is arranged in a processing tank, and a shaft part of a conveyance roll is processed. It protrudes outward from a shaft hole that penetrates the side wall of the tank and is pivotally supported.

  For example, as shown in FIG. 5, a diaphragm 102 is fixed to the shaft hole 100 of the processing tank 112, and a fixed-side sliding member 104 is provided on the diaphragm 102. On the other hand, a rotating side sliding member 108 is attached to the shaft portion 106 so as to face the fixed side sliding member 104.

  The rotation-side sliding member 108 is in surface contact with the stationary-side sliding member 104 that has been subjected to surface pressure to the outside of the processing tank 112 by the diaphragm 102 in a watertight state. It slides and rotates with respect to the moving member 104.

  In such a mechanical seal 110, there is no problem such as wear when the processing liquid is stored in the processing tank 112, but in the case of a processing tank in a sprayed state or a dry state, the rotating side sliding member 108 and the fixed side If the material of the sliding member 104 is silicon carbide (SIC), the sliding contact 104 is in close contact (licking) due to friction, and the life of the mechanical seal 110 is shortened.

  For this reason, in Patent Document 1, the inside of the treatment tank 112 is in a use environment state such as a sprayed state or a dry state by combining different materials in the rotating side sliding member 108 and the stationary side sliding member 104. However, the wear of the rotating side sliding member 108 and the stationary side sliding member 104 is small, and the life of the mechanical seal 110 is extended.

  However, although the life of the mechanical seal 110 can be extended by Patent Document 1, it is not mentioned in terms of improving the adhesion of the sliding surfaces of the rotating side sliding member 108 and the stationary side sliding member 104. .

  For example, in a diaphragm used for a mechanical seal of an acid or alkali chemical solution, rubber having a high corrosion resistance (Viton rubber, EPDM, etc.) is used as the material of the diaphragm, but the corrosion resistance is low compared to a fluororesin such as Teflon (registered trademark) Diaphragm life is greatly shortened.

  However, in the case of Teflon (registered trademark), the elastic force, the repulsive force, and the tolerance for the misalignment and eccentricity of the transport roll and the processing tank are extremely small with respect to the rubber. Adhesiveness of the sliding surface of the side sliding member 104 is lowered, causing liquid leakage.

  In addition, there is a corrosion-resistant rubber coated with Teflon (registered trademark) as a diaphragm that has both the corrosion resistance of Teflon (registered trademark) and the elasticity of rubber, but in the case of coating, the Teflon (registered trademark) layer is thin, Invisible scratches and pinholes may cause the chemical to penetrate into the interior and cause the rubber to corrode.

On the other hand, as a method of making Teflon (registered trademark) thicker than coating, there is a method in which a Teflon (registered trademark) sheet and rubber are bonded together, but in addition to the hardness of Teflon (registered trademark), the thickness of the diaphragm increases. As a result, the elastic force (repulsive force) of the rubber is offset, and the adhesion of the sliding surfaces of the rotation-side sliding member 108 and the stationary-side sliding member 104 is lowered.
JP 2000-250939 A

  In view of the above facts, an object of the present invention is to provide a mechanical seal that improves the lifetime of the diaphragm and the adhesion of the sliding surface of the sliding member.

  The invention according to claim 1 is a diaphragm in which a disk-shaped rubber sheet in which a through-hole through which a rotating shaft passes is formed in the center, and a through-hole through which the rotating shaft passes are formed in the center. It is characterized by having a disk-shaped corrosion-resistant sheet to be superposed, and an adhesive for bonding the rubber sheet and the outer peripheral edge of the corrosion-resistant sheet.

  In the first aspect of the present invention, the disk-shaped corrosion-resistant sheet is superimposed on the disk-shaped rubber sheet, and the outer peripheral edge and the inner peripheral edge of the rubber sheet and the corrosion-resistant sheet are bonded with an adhesive. That is, since the rubber sheet and the corrosion-resistant sheet are not bonded to each other except the outer peripheral edge and the inner peripheral edge, they are in a free state.

  For this reason, the rubber sheet and the corrosion-resistant sheet can be moved independently from each other, and the elastic force of the rubber sheet can be fully utilized. Further, by superposing the corrosion resistant sheet on the rubber sheet, the corrosion resistance of the diaphragm can be improved and the life can be extended.

  According to a second aspect of the present invention, in the diaphragm according to the first aspect, a hollow portion is provided in a non-bonded portion of the rubber sheet and the corrosion-resistant sheet.

  In invention of Claim 2, by providing a hollow part in the non-adhesion part of a rubber sheet and a corrosion-resistant sheet, it can be moved in an independent state without causing the other to follow when the rubber sheet or the corrosion-resistant sheet is moved. it can.

  According to a third aspect of the present invention, in the diaphragm according to the first or second aspect, the corrosion-resistant sheet is polytetrafluoroethylene.

  In the invention according to claim 3, the corrosion-resistant sheet is formed of polytetrafluoroethylene. Polytetrafluoroethylene includes, for example, Teflon (registered trademark), and has high corrosion resistance against chemicals, so that it is difficult to corrode even when used in a state immersed in the chemicals. However, in order to utilize the elastic force of the rubber sheet, it is better that the thickness of Teflon (registered trademark) is thin.

  According to a fourth aspect of the present invention, in the mechanical seal, a rotation-side sliding member that is attached to a rotation shaft that passes through the shaft hole of the treatment tank in which the chemical solution is stored and rotates together with the rotation shaft; A fixed-side sliding member disposed so as to be in surface contact with the moving member, and formed in a disk shape, an inner peripheral edge is fixed to the fixed-side sliding member, and an outer peripheral edge is fixed to the treatment tank, A diaphragm that seals the shaft hole and presses the stationary-side sliding member toward the rotating-side sliding member by a liquid pressure of a chemical stored in the processing tank, and the diaphragm includes the rotating shaft A disc-shaped rubber sheet in which a through-hole penetrating through is formed in the center, a disc-shaped corrosion-resistant sheet formed in the center of the through-hole through which the rotation shaft passes, and superimposed on the rubber sheet, and the rubber sheet Of the corrosion-resistant sheet It is characterized with the adhesive bonding the periphery and inner periphery, in that it is configured.

  In a fourth aspect of the present invention, a rotation-side sliding member is attached to a rotation shaft that passes through a shaft hole formed in a treatment tank in which a chemical solution is stored, and rotates together with the rotation shaft. The fixed-side sliding member is disposed so as to be in surface contact with the rotating-side sliding member. An inner peripheral edge of a diaphragm formed in a disk shape is fixed to the fixed-side sliding member, and an outer peripheral edge of the diaphragm is fixed to the processing tank, seals the shaft hole, and is stored in the processing tank. The stationary sliding member is pressed toward the rotating sliding member by the liquid pressure of the chemical solution.

  This diaphragm is made by stacking a disk-shaped rubber sheet and a disk-shaped corrosion-resistant sheet, and only the outer peripheral edge and inner peripheral edge of the rubber sheet and the corrosion-resistant sheet are bonded to each other. By making the corrosion-resistant sheet free, the elastic force of the rubber sheet can be fully utilized, and the pressing force for pressing the fixed-side sliding member toward the rotating-side sliding member can be improved.

  As a result, it is possible to improve the adhesion between the sliding surfaces of the fixed-side sliding member and the rotating-side sliding member, and to utilize the elastic force of the rubber sheet, the rotating-side sliding due to the misalignment and eccentricity of the rotating shaft. The followability to the positional deviation of the moving member can be improved. Furthermore, by using a corrosion-resistant sheet, the diaphragm can be prevented from being corroded and the life of the diaphragm can be extended.

  According to a fifth aspect of the present invention, in the mechanical seal of the fourth aspect, the rotating shaft and the side wall of the processing tank are in a state of being orthogonal to each other in the horizontal direction and the vertical direction.

  In the invention according to claim 5, the rotating shaft and the side wall of the processing tank are in a state of being orthogonal to each other in the horizontal direction and the vertical direction, so that the rotating side is fixed to the rotating side from the fixed side sliding member in the circumferential direction of the diaphragm. Sealing performance can be ensured by preventing variation in the pressing force toward the sliding member.

  According to a sixth aspect of the present invention, in the mechanical seal according to the fourth or fifth aspect, the outer peripheral surface of the rotating shaft is smooth.

  According to the sixth aspect of the present invention, the outer peripheral surface of the rotating shaft is smoothed so that no liquid leaks from the rotating shaft while the rotating side sliding member is mounted.

  Since the present invention is configured as described above, in the invention according to claim 1, the rubber sheet and the corrosion-resistant sheet can be moved independently from each other, and the elastic force of the rubber sheet can be fully utilized. . Further, by superposing the corrosion resistant sheet on the rubber sheet, the corrosion resistance of the diaphragm can be improved and the life can be extended.

  In invention of Claim 2, by providing a hollow part in the non-adhesion part of a rubber sheet and a corrosion-resistant sheet, it can be moved in an independent state without causing the other to follow when the rubber sheet or the corrosion-resistant sheet is moved. it can.

  In invention of Claim 3, since the corrosion resistance with respect to a chemical | medical solution is high, even if it uses it in the state immersed in a chemical | medical solution, it is hard to corrode.

  In invention of Claim 4, fully utilizing the elastic force of a rubber sheet, the pressing force which presses a fixed side sliding member to the rotation side sliding member side can be improved. As a result, it is possible to improve the adhesion between the sliding surfaces of the fixed-side sliding member and the rotating-side sliding member, and to utilize the elastic force of the rubber sheet, the rotating-side sliding due to the misalignment and eccentricity of the rotating shaft. The followability with respect to the displacement of the moving member can be improved. Furthermore, by using a corrosion-resistant sheet, the diaphragm can be prevented from being corroded and the life of the diaphragm can be extended.

  In the invention according to claim 5, the rotating shaft and the side wall of the processing tank are in a state of being orthogonal to each other in the horizontal direction and the vertical direction, so that the rotating side is fixed to the rotating side from the fixed side sliding member in the circumferential direction of the diaphragm. Sealing performance can be ensured by preventing variation in the pressing force toward the sliding member.

  According to the sixth aspect of the present invention, the outer peripheral surface of the rotating shaft is smoothed so that no liquid leaks from the rotating shaft while the rotating side sliding member is mounted.

  Hereinafter, taking the chemical etching process shown in FIG. 1 as an example, a mechanical seal according to an embodiment of the present invention will be described.

  In the chemical etching process, the web W is conveyed in the etching treatment tank 10 by the conveyance roll 12 provided in the etching treatment tank 10. In the etching treatment tank 10, an etchant mainly containing sodium hydroxide stored in the liquid preparation tank 18 is fed into the spray 20 through the introduction pipe 16 by the liquid feed pump 14, and the spray 20 extends in the width direction of the web W. The etchant is sprayed evenly across. And when the web W leaves the etching processing tank 10, the surface of the web W is wiped with the nip roll 22 to prevent the etching solution from being taken out.

  The web W is usually an aluminum plate that is lightweight and excellent in surface treatment, workability, and corrosion resistance. As the aluminum plate, JIS1050 material, JIS1100 material, Al-Mn alloy, Al-Mn-Mg alloy, or the like is used.

  As shown in FIGS. 2 and 3, the shaft portion 24 of the transport roll 12 protrudes outward through a shaft hole 26 formed in the side wall 10 </ b> A of the etching processing tank 10, and the side wall 10 </ b> A of the etching processing tank 10. The bearing 36 is supported by a pedestal 36 disposed outside and rotatably supported by a bearing 38 having a built-in bearing.

  Further, the shaft portion 24 of the transport roll 12 is connected to a drive shaft 32 of a motor 30 set on a gantry 28 disposed beside the gantry 36 via a coupling 34. A driving force is applied to the transport roll 12.

  On the other hand, a flange 40 is provided at a peripheral portion of the shaft hole 26 so as to be orthogonal to the side wall 10 </ b> A of the etching processing tank 10, and from the side wall 10 </ b> A of the processing tank 10 below the peripheral portion of the shaft hole 26. The protruding amount on one end side of the flange 40 protruding outward is increased, and the receiving plate 42 is configured together with the standing wall 41 erected on one end portion of the flange 40 to receive the etching solution leaked from the etching processing tank 10. Yes. A drainage pipe 44 is connected to the bottom surface of the tray 42 so that the etching solution that has fallen on the tray 42 is drained.

  A disk-shaped fixing member 46 is fixed to the other end side of the flange 40. An outer peripheral edge of a disk-shaped diaphragm 48 is fixed to the fixing member 46 via a plurality of bolts 49, and is in a watertight state with the etching tank 10 via a seal member (not shown). ing.

  Here, the diaphragm 48 is curved toward the outside of the side wall 10 </ b> A of the etching treatment tank 10, and a surface pressure toward the outside of the side wall 10 </ b> A of the etching treatment tank 10 is generated.

  A disk-shaped stationary sliding member 50 made of Teflon (registered trademark) or glass-filled Teflon (registered trademark) is fixed to the inner peripheral edge of the diaphragm 48 via a plurality of bolts 52. It is in a watertight state with the diaphragm 48 via a sealing member that does not. This fixed-side sliding member 50 receives a surface pressure to the outside of the etching treatment tank 10 by the diaphragm 48.

  On the other hand, the outer peripheral surface of the shaft portion 24 of the transport roll 12 is smooth, and a disc-shaped fixing fitting 54 is fitted on the shaft portion 24. The end surface of the fixing metal 54 located on the etching processing tank 10 side faces the fixed-side sliding member 50, and the rotating-side sliding member 56 has substantially the same outer diameter and inner diameter as the fixed-side sliding member 50. However, it is fixed via a plurality of bolts 58 and is in a watertight state with the fixing bracket 54 via a seal member (not shown). The rotation-side sliding member 56 is in surface contact with the fixed-side sliding member 50 that has been subjected to surface pressure to the outside of the etching tank 10 by the diaphragm 48 while maintaining a watertight state.

  As described above, the diaphragm 48 seals the shaft hole 26 formed in the side wall 10 </ b> A of the etching processing tank 10, and the shaft portion 24 of the transport roll 12 can be rotated. At this time, the shaft portion 24 of the transport roll 12 and the side wall 10A of the etching treatment tank 10 are disposed so as to be orthogonal to each other in the horizontal direction and the vertical direction.

  By the way, as shown in FIG. 3, the diaphragm 48 has a two-layer structure of an inner diaphragm 48A located inside the etching treatment tank 10 and an outer diaphragm 48B located outside the etching treatment tank 10, The outer and inner diameters of the inner diaphragm 48A and the outer diaphragm 48B are substantially the same.

  The inner diaphragm 48A is made of a fluororesin such as Teflon (registered trademark) containing glass (note that it is not always necessary to knead the glass) and has a wall thickness of 0.1 to 3 mm. On the other hand, the outer diaphragm 48B is made of a corrosion-resistant rubber such as Viton rubber, EPDM, or neoprene rubber, and has a thickness of 2 to 10 mm.

  The inner diaphragm 48 </ b> A and the outer diaphragm 48 </ b> B are overlapped, and the outer peripheral edge and the inner peripheral edge are bonded by the adhesive 60. In addition to the outer peripheral edge portion and the inner peripheral edge portion, the inner diaphragm 48A and the outer diaphragm 48B are non-bonded portions, and a hollow portion 48C is provided.

  Next, the operation of the mechanical seal according to the embodiment of the present invention will be described.

  As shown in FIG. 3, the diaphragm 48 has a two-layer structure of an inner diaphragm 48A located inside the etching treatment tank 10 and an outer diaphragm 48B located outside the etching treatment tank 10, and the inner diaphragm 48A is made of glass. The outer diaphragm 48B is made of a corrosion-resistant rubber such as Viton rubber. A hollow portion 48C is provided between the inner diaphragm 48A and the outer diaphragm 48B.

  Since the inner diaphragm 48A is located inside the etching treatment tank 10, the inner diaphragm 48A is formed of glass-filled Teflon (registered trademark), whereby the corrosion resistance of the diaphragm 48 can be improved and the life can be extended.

  On the other hand, the outer diaphragm 48B is formed of rubber such as Viton rubber, and the hollow part 48C is provided between the inner diaphragm 48A and the outer diaphragm 48B, so that the other diaphragm 48A or the outer diaphragm 48B can follow the other. They can move independently of each other.

  For this reason, the pressing force for pressing the fixed-side sliding member 50 toward the rotation-side sliding member 56 can be improved by fully utilizing the elastic force of the Viton rubber (outer diaphragm 48B). However, in order to take advantage of the elastic force of Viton rubber (outer diaphragm 48B), it is preferable that the thickness of Teflon (registered trademark) is thin, so that the thickness is preferably 0.1 to 3 mm.

  Thus, by making full use of the elastic force of the Viton rubber (outer diaphragm 48B), not only the adhesion of the sliding surfaces of the stationary sliding member 50 and the rotating sliding member 56 is improved, The followability to the positional deviation of the rotation side sliding member 56 due to the eccentricity and eccentricity of the shaft portion 24 can also be improved.

  That is, the inner diaphragm 48A and the outer diaphragm 48B are overlapped, and the hollow portion 48C is provided between the inner diaphragm 48A and the outer diaphragm 48B, thereby obtaining the diaphragm 48 having both the corrosion resistance of Teflon (registered trademark) and the elastic force of rubber. Thus, the corrosion of the diaphragm 48 can be prevented, the life of the diaphragm 48 can be extended, and the adhesion between the sliding surfaces of the stationary sliding member 50 and the rotating sliding member 56 can be improved.

  Further, the shaft 24 of the transport roll 12 and the side wall 10A of the etching tank 10 are orthogonally crossed in the horizontal and vertical directions while the shaft 24 of the transport roll 12 is rotatably supported via the diaphragm 48. As a result, the sealing force can be ensured by preventing variation in the pressing force from the fixed-side sliding member 50 to the rotating-side sliding member 56 in the circumferential direction of the diaphragm 48. Can do.

  Furthermore, the outer peripheral surface of the shaft portion 24 of the transport roll 12 is smoothed so that liquid leakage does not occur from the shaft portion 24 in a state where the rotation-side sliding member 56 is mounted.

  Here, the outer diameter and the inner diameter of the inner diaphragm 48A and the outer diaphragm 48B are substantially the same, but the diaphragm 48 has a two-layer structure, and the inner diaphragm 48A and the outer diaphragm 48B may be in a free state. Therefore, it is not limited to this.

  For example, as shown in FIG. 4, the outer diameter of the outer diaphragm 64B constituting the diaphragm 64 is made smaller than the outer diameter of the inner diaphragm 64A, and the inner diameter of the outer diaphragm 64B is made smaller than the inner diameter of the inner diaphragm 64A. Also make it bigger. Then, only the outer peripheral edge portion and the inner peripheral edge portion of the outer diaphragm 64B are fixed to the fixing member 46 and the fixed side sliding member 50, respectively, and the outer peripheral edge portion and the inner peripheral edge portion of the inner diaphragm 64A are fixed to the outer peripheral edge side and inner side of the outer diaphragm 64B. Adhere to the peripheral side. In this case, since the outer diaphragm 64B does not come into contact with the etching solution in the etching treatment tank 10 (see FIG. 3), the outer diaphragm 64B may be formed of rubber having no corrosion resistance.

  Moreover, although this embodiment demonstrated the diaphragm 48 which comprises the mechanical seal 62 used for the etching processing tank 10, it is not restricted to the etching processing tank 10. FIG. For this reason, for example, the inner diaphragm 48A is formed of glass-filled Teflon (registered trademark) as a corrosion-resistant sheet. However, the inner diaphragm 48A may be formed of vinyl chloride or polypropylene by a chemical stored in the processing tank. is there.

  In addition, here, the diaphragm 48 has a two-layer structure of the inner diaphragm 48A and the outer diaphragm 48B. However, the diaphragm 48 is not limited to this as long as the elastic force of the outer diaphragm 48B can be effectively utilized. For example, an interference member such as a sponge may be provided in the hollow portion 48C of the inner diaphragm 48A and the outer diaphragm 48B.

  Further, here, the hollow portion 48C is provided between the inner diaphragm 48A and the outer diaphragm 48B. However, it is sufficient that the inner diaphragm 48A and the outer diaphragm 48B are not bonded to each other except the outer peripheral edge and the inner peripheral edge. Therefore, the hollow portion 48C is not necessarily provided between the inner diaphragm 48A and the outer diaphragm 48B, and the inner diaphragm 48A and the outer diaphragm 48B may be in contact with each other.

It is the schematic which shows the chemical etching processing apparatus with which the mechanical seal which concerns on this form was applied. It is a schematic sectional drawing which shows the mechanical seal which concerns on this form. It is a schematic sectional drawing which shows the diaphragm which comprises the mechanical seal which concerns on this form. It is a schematic sectional drawing which shows the modification of the diaphragm which comprises the mechanical seal which concerns on this form. It is a schematic sectional drawing which shows the conventional mechanical seal.

Explanation of symbols

48 Diaphragm 48B Outer Diaphragm (Rubber Sheet)
48C Hollow part 48A Inner diaphragm (corrosion resistant sheet)
50 Fixed-side sliding member 56 Rotating-side sliding member 60 Adhesive 62 Mechanical seal 64 Diaphragm 64B Outer diaphragm (rubber sheet)
64A Inner diaphragm (corrosion resistant sheet)

Claims (6)

A disc-shaped rubber sheet in which a through-hole through which the rotating shaft passes is formed in the center;
A through hole through which the rotating shaft passes is formed in the center, and a disk-shaped corrosion-resistant sheet that is superimposed on the rubber sheet;
An adhesive that bonds the outer peripheral edge and inner peripheral edge of the rubber sheet and the corrosion-resistant sheet;
The diaphragm characterized by having.   The diaphragm according to claim 1, wherein a hollow portion is provided in a non-bonded portion between the rubber sheet and the corrosion-resistant sheet.   The diaphragm according to claim 1 or 2, wherein the corrosion-resistant sheet is polytetrafluoroethylene. A rotating side sliding member that is mounted on a rotating shaft that passes through the shaft hole of the treatment tank in which the chemical solution is stored and rotates together with the rotating shaft;
A fixed sliding member disposed so as to be in surface contact with the rotating sliding member;
Formed in a disc shape, the inner peripheral edge is fixed to the fixed-side sliding member, the outer peripheral edge is fixed to the processing tank, the shaft hole is sealed, and the liquid of the chemical solution stored in the processing tank A diaphragm for pressing the fixed-side sliding member toward the rotating-side sliding member by pressure;
With
The diaphragm is
A disc-shaped rubber sheet in which a through hole through which the rotating shaft passes is formed in the center;
A through hole through which the rotating shaft passes is formed in the center, and a disk-shaped corrosion-resistant sheet that is superimposed on the rubber sheet;
An adhesive that bonds the outer peripheral edge and inner peripheral edge of the rubber sheet and the corrosion-resistant sheet;
A mechanical seal characterized by comprising.   The mechanical seal according to claim 4, wherein the rotating shaft and the side wall of the processing tank are in a state of being orthogonal to each other in a horizontal direction and a vertical direction.   The mechanical seal according to claim 4 or 5, wherein an outer peripheral surface of the rotating shaft is smooth.

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