JP2005209911A - Adjusting tool of microwave device and superconducting circuit apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the adjusting tool of a microwave device and a superconducting circuit device capable of adjusting the microwave device while cooling it, and of greatly shortening a time taken for the adjustment work in view of solving the problem in a conventional adjusting method of a microwave device that the device can not be adjusted unless it is once returned to room temperature and much time is required for the adjustment work. <P>SOLUTION: The adjusting tool of a microwave device and the superconducting circuit device are configured such that a hole 52 having a size of covering a distribution range of a plurality of trimming rods (adjusting part) 11 provided on the microwave device 1 is provided in a plate-shaped cover (first cover ) 5b for covering a chamber 4 on which the microwave device 1 is mounted, a movable plate-shaped cover (second cover ) 6 for covering the hole 52 is mounted on the cover 5b, an adjusting driver (adjusting means) 50 is attached to the movable cover 6, and further a movement mechanism is provided for moving the movable cover 6 on the cover 5b. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an adjustment tool and a superconducting circuit device for adjusting the electrical characteristics of an electronic circuit operating in a cryogenic state, and in particular, can adjust the electrical characteristics of the electronic circuit while maintaining a cryogenic state and a reduced pressure state. The present invention relates to a microwave device adjustment tool and a superconducting circuit device capable of improving the efficiency of adjustment work.

  In recent years, in order to improve thermal noise characteristics and use high-temperature superconducting devices in mobile radio systems, a system that operates in a state cooled to a cryogenic temperature by a cryogenic refrigerator has become necessary. An electronic device mounted on such a system needs to operate with stable electrical characteristics in a cryogenic state.

  For example, in filter circuits, filter characteristics vary due to slight differences in dielectric constant and substrate thickness. However, in order to obtain the electrical characteristics within the standard at the stage of manufacturing a minute electronic device, the process margin at the time of manufacture becomes very severe, which leads to a decrease in yield. Therefore, there is a need for a technique for adjusting electrical characteristics after the electronic device is created.

  By the way, in an electronic device (microwave device) handled in a high frequency region such as a microwave band, an adjustment unit that adjusts the frequency characteristics is provided, and the adjustment unit is adjusted so that the electrical characteristics are within the standard. Yield is improved.

  For example, in a high-frequency module (particularly a filter circuit) that operates at room temperature, there is a method of adjusting electrical characteristics such as frequency characteristics by providing a variable capacitor on a transmission line. The variable capacitor uses a change in capacitance due to a change in gap interval. Therefore, attempts have been made to apply such adjustment methods to microwave devices operating at extremely low temperatures.

Here, a method for adjusting the electrical characteristics of the microwave device operating at an extremely low temperature will be described. FIG. 8 is an explanatory diagram showing a schematic configuration and an adjustment method of electrical characteristics of a conventional electronic device.
As shown in FIG. 8, a superconducting circuit device equipped with a microwave device operated at a cryogenic temperature includes a microwave device 1, a cold stage 2, a chamber 4, a lid 5 ', an input RF connector 41, and the like. And the output RF connector 42.

  A microwave device 1 operating at a cryogenic temperature is closely attached to a cold stage 2 provided in a chamber 4, and the cold stage 2 is connected to a refrigerator 8 and cooled to a cryogenic temperature. It has become.

  Further, the chamber 4 which is a container for storing the microwave device 1 has a structure sealed with a lid 5 ′, and the inside of the chamber 4 is depressurized by the evacuation device 9 and is in a state close to a vacuum. Thus, by making the inside of the chamber 4 close to a vacuum, the heat of the outside air is prevented from being conducted to the inside of the chamber 4.

  The microwave device 1 is provided with a variable capacitor (hereinafter referred to as a “trimming rod”) 11 as an adjustment unit for each adjustment point, and by adjusting the trimming rod 11, The electrical characteristics can be adjusted to a desired range.

  The adjustment method of the microwave device mounted on the conventional superconducting circuit device is as follows: (1) the trimming rod 11 is adjusted at room temperature, and (2) the inside of the container is close to vacuum by the vacuum exhaust device 9 (3) Check the electrical characteristics of the microwave device 1 in the cryogenic state, and if it is out of specification, (4) return it to normal temperature and normal pressure, and (5) open the lid 5 ' Then, the trimming rod 11 is adjusted again. This operation was repeated until the desired electrical characteristics were obtained in an extremely low temperature state.

  As a technique for improving the electrical characteristics of the conventional superconducting circuit device, a metal obstacle near the circuit is provided by providing means for holding the superconducting circuit uniformly in the housing case. In some cases, stable electrical characteristics can be obtained by eliminating the influence of electrical characteristics due to (see Patent Document 1).

Japanese Patent Laying-Open No. 2003-101088 (page 2-5, FIG. 3)

  However, in the conventional microwave device adjustment method, if the electrical characteristics at cryogenic temperatures are out of specification, the trimming rod is adjusted after returning to normal temperature and normal pressure, and then the pressure is reduced and cooled again to confirm the characteristics. Cooling and returning to room temperature must be repeated many times, and there is a problem that adjustment work takes a very long time.

  The present invention has been made in view of the above circumstances, and can be adjusted in a state in which the microwave device is cooled, and the adjustment device for the microwave device and the superconducting circuit device that can greatly reduce the time required for the adjustment work. The purpose is to provide.

  The present invention for solving the problems of the conventional example described above is that an opening of a container in which a microwave device having a screw-like adjustment unit for adjusting electrical characteristics during operation is stored and cooled to a cryogenic state is stored. A microwave device adjustment tool provided with a lid that seals the container and is adjusted with a driver-like adjustment means that adjusts the adjustment portion, the adjustment means penetrating the lid and attached to the lid, The microwave device adjustment tool is an adjustment means for adjusting the adjustment unit of the microwave device stored in the container in a state where the lid is crowned by the container, and the microwave device is maintained while keeping the inside of the container at a very low temperature. The electrical characteristics can be adjusted, the time required for the adjustment work can be shortened, and the working efficiency can be improved.

  The present invention also includes a container that is cooled to a cryogenic state, a screw-shaped adjustment unit that adjusts electrical characteristics during operation, a microwave device stored in the container, and a crown at the opening of the container. A lid that seals the container, and a driver-like adjusting means that adjusts the adjustment portion of the microwave device that is attached to the lid through the lid and is stored in the container with the lid being crowned by the container; The superconducting circuit device is equipped with the device, and the electrical characteristics of the microwave device can be adjusted while keeping the inside of the container at a very low temperature, reducing the time required for the adjustment and improving the work efficiency. be able to.

  The present invention stores a microwave device having a screw-shaped adjustment unit that adjusts electrical characteristics during operation, is crowned by an opening of a container cooled to a cryogenic state, and is in close contact with the opening. A microwave provided with a first lid provided with a hole at a position covering the adjustment portion of the microwave device when crowned by the part, and a second lid mounted on the first lid and covering the hole A device adjustment tool, which is attached to a second lid through the lid, and the microwave device is accommodated in the container through a hole with the first lid crowned by the container. A microwave device adjustment tool including a driver-like adjustment means for adjusting a portion and a moving mechanism for moving the second lid on the first lid, and combining the first lid and the second lid By sealing the container, keep the inside of the container at a very low temperature. The adjustment operation of the electrical characteristics of the chromo wave device can be performed, and in particular, by adjusting the adjustment unit by moving the second lid so that the adjustment means is directly above the adjustment unit of the microwave device, A wide range of adjustment units can be adjusted in a short time, and the efficiency of adjustment work can be improved.

  According to the present invention, the adjusting means for adjusting the adjusting portion of the micro device is attached to the lid that is crowned by the container in which the microwave device is stored, and the container is mounted with the lid being crowned by the container. Because it is a microwave device adjustment tool that adjusts the adjustment part of the microwave device stored in the inside, it is possible to adjust the electrical characteristics of the microwave device while keeping the inside of the container in a cryogenic state, The time required for adjustment work can be shortened and work efficiency can be improved, and the time required for designing, manufacturing, and adjusting microwave devices that operate at extremely low temperatures can be reduced to reduce the product cost of microwave devices. There is an effect that can be done.

  According to the present invention, a container that is cooled to a cryogenic state, a screw-shaped adjusting unit that adjusts electrical characteristics during operation, a microwave device stored in the container, and a crown on the opening of the container are provided. A lid that seals the container, and a driver-like adjusting means that adjusts the adjustment portion of the microwave device that is attached to the lid through the lid and is stored in the container with the lid being crowned by the container; Because it is a superconducting circuit device equipped with, it is possible to adjust the electrical characteristics of the microwave device while keeping the inside of the container at a very low temperature, shortening the time required for the adjustment work and improving the work efficiency In addition, the time required for designing, manufacturing, and adjusting a superconducting circuit device equipped with a microwave device that operates at a cryogenic temperature can be shortened, and the product cost of the superconducting circuit device can be reduced. Is

  According to the present invention, the first device is provided with a hole at a position where the microwave device is crowned and closely adhered to the opening of the container in which the microwave device is stored, and covers the adjustment portion of the microwave device when crowned by the opening. 1 is a microwave device adjustment tool comprising a first lid and a second lid mounted on the first lid and covering the hole, the second lid penetrating the lid, Provided is a driver-like adjusting means for adjusting the adjusting portion of the microwave device stored in the container through the hole in a state where the one lid is crowned by the container, and the second lid is placed on the first lid. Since the microwave device is provided with a moving mechanism for moving the microwave device, the container is hermetically sealed by combining the first lid and the second lid, and the microwave device is kept in a cryogenic state. The electrical characteristics can be adjusted. By adjusting the adjustment part by moving the second lid so that the position is directly above the adjustment part of the microwave device, a wide range of adjustment parts can be adjusted in a short time, and the efficiency of the adjustment work can be improved. In addition, there is an effect that the time required for designing, manufacturing and adjusting a microwave device operating at an extremely low temperature can be shortened and the product cost of the microwave device can be reduced.

Embodiments of the present invention will be described with reference to the drawings.
The microwave device adjustment tool according to the present invention is provided with a through hole in a lid of a sealable container in which a microwave device operating in a cryogenic state is stored, and a driver operable from the outside of the lid is inserted into the through hole. The adjustment unit attached to the microwave device is movably attached to the driver, and the microwave is kept in a decompressed state and a cooled state without opening the lid of the container. The electrical characteristics of the device can be adjusted, and the electrical characteristics of the microwave device can be adjusted efficiently.

  Further, in the superconducting circuit device according to the present invention, the microwave device provided with the adjusting unit for adjusting the electrical characteristics is stored in a sealable container, and the adjusting unit of the microwave device is provided on the lid of the container. This is a superconducting circuit device that can be adjusted by a driver inserted through a through-hole and attached to the lid, and can efficiently adjust the electrical characteristics of the microwave device.

FIG. 1 is a schematic cross-sectional explanatory diagram of a superconducting circuit device according to a first embodiment of the present invention.
As shown in FIG. 1, the superconducting circuit device according to the first embodiment of the present invention includes a microwave device 1, a cold stage 2, a chamber 4, a lid 5a, an input RF connector 41, And an output RF connector 42.

  Among the above components, the cold stage 2, the input RF connector 41, and the output RF connector 42 have the same configuration and operation as the conventional superconducting circuit device shown in FIG. 8, and the cold stage is a refrigerator. 8 is cooled. Both the input RF connector 41 and the output RF connector 42 are high vacuum parts, and do not impair the degree of vacuum in the chamber.

  Further, the microwave device 1 is provided with a trimming rod 11 having a screw portion similar to that of the microwave device of FIG. 8 as an adjustment portion for adjusting electrical characteristics. In FIG. 1, it is provided on the upper surface. In the microwave device of the present invention, the mounting position of the trimming rod 11 is also optimized, which will be described later.

  As a feature of the first microwave device adjustment tool and the superconducting circuit device, a lid 5a crowned on the opening of the chamber 4 is formed in a substantially dome shape, and a cylindrical shaft 51 is formed on the top portion of the dome. It is attached. The shaft 51 is attached so that the attachment angle with respect to the lid 5a is variable within a certain range from a right angle and is rotatable in the circumferential direction. Further, a through hole is provided inside the cylinder of the shaft 51, and an adjustment driver 50 as an adjusting means for adjusting the trimming rod 11 is attached to the through hole so as to be movable up and down.

  The superconducting circuit device shown in FIG. 1 includes a lid 5a, a shaft 51, and an adjustment driver 50, and the microwave device adjustment tool (first adjustment tool) according to the first embodiment. ).

  The connecting portion between the shaft 51 and the lid 5a and the gap between the adjustment driver 50 and the inner wall of the through hole of the shaft 51 through which the adjustment driver 50 penetrates are filled with an extendable member (for example, rubber). It is configured so as to be movable in the axial direction and rotatable in a direction orthogonal to the axis and not to impair the hermeticity in the chamber.

  When the chamber 4 is crowned with a lid 5a, the chamber 4 is almost sealed, and the chamber 4 can be evacuated by connecting a vacuum evacuation device 9 similar to the conventional one to evacuate the chamber 4 to a state close to a vacuum.

  The adjustment driver 50 has a shape in which a tip portion can be inserted into a groove of a thread portion of the trimming rod 11, and adjusts electrical characteristics of the microwave device 1 by rotating the screw portion. The length of the adjustment driver 50 is sufficiently long to reach the trimming rod 11, and the operator adjusts the trimming rod 11 by operating the adjustment driver 50 from the outside of the shaft 51.

  Since the shaft 51 is attached to the top portion of the lid 5a so that the mounting angle is variable and rotatable, the tip of the adjustment driver 50 reaches the threaded portion of the trimming rod 11 within a certain range and is within the range. A plurality of trimming rods 11 can be adjusted.

Furthermore, the lid 5a is formed of a transparent member such as transparent acrylic or pressure-resistant glass so that the operator can easily visually check the position of the trimming rod 11 to be adjusted. Alternatively, the side surface or the top portion of the lid 5a may be partially cut out in a window shape, and a window in which a transparent member is fitted into the cutout portion may be provided. The transparent member is suitably colorless, but may be a light colored transparent member as long as the threaded portion of the trimming rod 11 can be seen well.
Further, even if the lid 5a itself is not formed of a transparent member, a part of the lid 5a or the chamber 4 may be cut out to provide a window made of a transparent member.

As described above, in the first adjustment tool and the superconducting circuit device, the shaft 51 was provided on the lid 5a and the adjustment driver 50 was attached to the shaft 51, so that it was out of specification when the characteristics were checked at extremely low temperatures. Even in this case, the trimming rod 11 can be readjusted without returning to room temperature or opening the lid 5a, and the adjustment operation of the electrical characteristics of the microwave device 1 can be performed efficiently. Is.
In order to adjust the trimming rod 11 in a wider range, the height of the dome of the lid 5a may be increased and the shaft length of the adjustment driver 50 may be increased.

  Further, the shape of the tip of the adjustment driver 50 is set to a size and shape that fits into the thread portion of the trimming rod 11 to be adjusted. For example, the shape may be a star shape in addition to the general shape of a plus driver or minus driver.

  Furthermore, tip portions having various sizes and shapes may be prepared in advance, and the tip portions corresponding to the size and shape of the head of the screw portion of the trimming rod 11 may be replaced with the shaft portion of the adjustment driver 50. . In that case, the tip part which can be replaced is formed in a cylindrical shape with one end opened like a pencil cap, for example, and a driver part which fits the trimming rod 11 is provided at the other end, and gradually narrows toward the driver part. If it forms so, the front-end | tip part which can be replaced | exchanged will be fixed to the axial part of the adjustment driver 50 by friction, and can be fixed.

Next, the configuration of the trimming rod 11 provided in the microwave device 1 will be described with reference to FIG. 2A and 2B are schematic cross-sectional explanatory views of a trimming rod used in the superconducting circuit device of the present invention.
As shown in FIG. 2, the trimming rod 11 is provided with a threaded portion 13 at one end of a dielectric 12 formed in a columnar shape, and the threaded portion 13 houses a cavity inside a housing 14 provided on the outside thereof. It is configured to be movable along the length direction of 14 (up and down in FIG. 2).

  When the trimming rod 11 is disposed on the resonator, the capacitance of the space changes, and the apparent length of the resonator and the coupling coefficient between the resonators change. Thereby, the electrical characteristics of the microwave device 1 can be adjusted.

  In this apparatus, when the trimming rod 11 is arranged on the hairpin resonator, the trimming rod 11 is arranged at the end portion (open end side) where the electric field strength is strongest so that the resonance frequency changes most greatly. The effect of is to maximize.

  According to the microwave device adjustment tool of the first embodiment of the present invention, it is possible to rotate in the circumferential direction on the top portion of the substantially dome-shaped lid 5a crowned by the chamber 4 in which the microwave device is stored. The adjustment tool 50 is provided with an adjustment driver 50 having a shaft 51 that can reach the trimming rod 11 with a shaft 51 that can be freely changed in inclination. However, the trimming rod 11 can be readjusted, and there is an effect that the adjustment operation of the electrical characteristics of the microwave device 1 can be performed efficiently.

  In addition, according to the superconducting circuit device according to the first embodiment of the present invention, the chamber 4 in which the microwave device 1 is mounted can freely rotate in the circumferential direction on the top portion of the substantially dome-shaped lid 5a. The superconducting circuit device is provided with an adjustment tool having an adjustment driver 50 provided with an adjustment driver 50 having a shaft length that can reach the trimming rod 11 provided on the shaft 51. The trimming rod 11 can be readjusted as many times as it is kept, and there is an effect that the adjustment operation of the electrical characteristics of the mounted microwave device 1 can be performed efficiently.

  Also, according to the first microwave device adjustment tool and the superconducting circuit device, the lid 5a is made of a transparent member, or the lid 5a or the chamber 4 is provided with a window made of a transparent member. Therefore, the operator who performs the adjustment operation of the trimming rod 11 can clearly see the trimming rod 11 on the microwave device 1, easily confirm the position, facilitate the adjustment operation, and further improve the work efficiency. There is an effect that can be improved.

  Further, according to the first microwave device adjustment tool and the superconducting circuit device, the connection portion between the lid 5a and the shaft 51 and the connection portion between the shaft 51 and the adjustment driver 50 are made of rubber or the like. Since the members that can be expanded and contracted are used, it is possible to maintain the sealing performance at these connecting portions, and to maintain the reduced pressure state and the cryogenic state in the chamber.

  Furthermore, according to the adjustment tool of the first microwave device, the shape of the threaded portion of the trimming rod 11 can be formed by forming the shape of the tip of the adjustment driver 50 in various ways or by making the adjustment driver 50 variable in the axial direction. And the length from the opening surface of the chamber 4 to the trimming rod 11 can be accommodated, and various microwave devices 1 can be adjusted, and the manufacturing cost and superconductivity of the microwave device adjustment tool can be adjusted. There is an effect that the price of the circuit device can be further reduced.

Next, a microwave device adjustment tool and a superconducting circuit device according to a second embodiment of the present invention will be described.
In the first adjustment tool and the superconducting circuit device, a plurality of trimming rods within a certain range are adjusted by rotating an adjustment driver inserted from one point of the lid around the shaft as a fulcrum. The second adjustment tool and the superconducting circuit device can adjust a wider range of trimming rods assuming a filter having a large number of stages (for example, 10 stages or more).

  A basic configuration of a microwave device adjustment tool (second adjustment tool) and a superconducting circuit device (second superconducting circuit device) according to the second embodiment will be described with reference to FIGS. 3 and 8. To do. FIG. 3 is a schematic explanatory view showing a basic configuration of an adjustment tool for a microwave device according to a second embodiment of the present invention, where (a) is a top view and (b) is a schematic cross-sectional explanatory view.

  The microwave device adjustment tool according to the second embodiment is crowned by the opening of the chamber 4 in which the microwave device as shown in FIG. 8 is housed (the chamber is not shown). A hole on the cover on the plate that covers the opening of 4 is sized so as to cover the distribution range of the trimming rod to be adjusted. A lid is provided, and an adjustment driver is provided on the movable lid. When the movable lid moves, the trimming rod installed under the hole can be adjusted by the adjustment driver.

The second adjustment tool will be described with reference to FIG.
As shown in FIG. 3 (a), the second adjustment tool mainly includes a lid 5b that can be sealed by being crowned by an opening of a chamber (not shown) in which the microwave device is accommodated, and the lid 5b. And a movable lid 6 provided to overlap each other. The lid 5 b corresponds to a “first lid” in claim 3, and the movable lid 6 corresponds to a “second lid” in claim 3. A combination of the lid 5b and the movable lid 6 corresponds to the “lid” in claims 1 and 2.

  Further, a hole 52 is drilled in the approximate center of the lid 5b. The hole 52 is formed in a size that covers a distribution range in which a trimming rod of a microwave device (not shown) is installed when the lid 5b is crowned on a chamber (not shown). That is, the size of the hole 52 is wider than the adjustment portion of the microwave device installed in the container.

  In addition, a through hole is provided in the approximate center of the movable lid 6, and an adjustment driver 50 that adjusts the trimming rod is attached through the through hole. An elastic member such as rubber that keeps confidentiality is attached to the inner wall of the through hole as in the conventional case, and the adjustment driver 50 can move in the axial direction and can rotate in the direction perpendicular to the axis, In addition, the hermeticity in the chamber is not impaired.

The movable lid 6 is movable independently in the X direction and the Y direction on the lid 5b. A mechanism for moving the movable lid 6 will be described later.
The movable range (movable range) of the movable lid 6 is about ± 5 centimeters in the X and Y directions from the center of the hole 52. Even when the movable range is moved to the maximum, the movable lid 6 opens the hole 52. This is a movable range in which the part can be completely covered, and the size of the entire movable lid 6 is set so as to sufficiently cover the hole 52.

  Further, a rubber O-ring 53 is attached around the hole 52. By providing the O-ring 53, when the movable lid 6 is moved, the movable lid 6 moves easily. As shown in FIG. 3B, when the pressure in the chamber is reduced, the lid 5b and the movable lid around the hole 52 are provided. 6 can be sufficiently sealed, and the reduced pressure state in the chamber can be maintained.

  Further, the lid 5b and the movable lid 6 are formed of a plate-like transparent acrylic plate or a tempered glass plate so that the operator can easily see the trimming rod 11 to be adjusted as in the case of the first adjustment tool. I have to. In particular, the surfaces that are in contact with each other are formed as smooth flat surfaces, reduce the friction when the movable lid 6 moves on the lid 5b, and sufficiently close when the pressure is reduced to impair the sealing in the chamber. I am trying not to.

  Then, as shown in FIG. 3B, the operator moves the movable lid 6 so that the adjustment driver 50 comes directly above the trimming rod, and the microwave is generated at the tip of the adjustment driver 50. The device's trimming rod is adjusted.

  In the second adjustment tool, since the movable lid 6 can be moved directly above the trimming rod 11, there is no shaft for changing the angle of the adjustment driver 50 unlike the first adjustment tool. It is attached perpendicular to the surface of the movable lid 6. However, if a shaft is provided as in the first adjustment tool, it is possible to reach the trimming rod 11 that is somewhat outside from directly below the hole 52, and a wider range of adjustment of the trimming rod 11 is possible. This is effective for adjusting the filter. Moreover, the hole 52 can be made somewhat small, and the airtightness in a container can be improved.

Next, the adjustment tool and superconducting circuit device of the second microwave device will be specifically described with reference to FIG. FIG. 4 is a top view of the superconducting circuit device (or microwave device adjustment tool) according to the second embodiment. In the second superconducting circuit device, since the lid 5b is larger than the size of the chamber, the chamber is hidden behind the lid 5b in FIG. 4 and is not shown, but the conventional chamber 4 shown in FIG. Is the same.
Further, since the portion shown in FIG. 4 is a portion corresponding to the adjustment tool of the second microwave device, the second adjustment tool will be described first.

  As shown in FIG. 4, the second microwave device adjustment tool mainly includes a lid 5b crowned at an upper opening of a chamber in which the microwave device is housed, and a movable lid mounted on the top of the lid 5b. 6, fixed support plates 25, 26, 27, 28 fixed to the four sides of the lid 5 b, and the four sides of the movable lid 6 provided inside the lid 5 b from the fixed support plates 25, 26, 27, 28. The movable support plates 21, 22, 23, and 24 that press the button are configured.

As described with reference to FIG. 3, a hole 52 is perforated at a substantially central portion of the lid 5 b, and a rubber O-ring 53 is provided around the hole 52.
Further, an adjustment driver 50 is attached to substantially the center of the movable lid 6 so as to be movable up and down and rotatable in a direction perpendicular to the axis. Similar to the first adjustment tool, the shape and size of the tip of the driver 50 can be formed in an arbitrary shape in the second adjustment tool, and the tip can be replaced.

Further, as a feature of the second adjustment tool, a moving mechanism for moving the movable lid 6 independently in the X direction and the Y direction is provided.
The moving mechanism for moving the movable lid 6 in the X direction includes X-axis fixed support plates 25 and 26 fixed to two sides of the lid 5b, a plurality of operation shafts 20a penetrating the fixed support plate 25, and an operation shaft 20a. The X-axis movable support plate 21 fixed to the distal end of the movable cover 6 side, the plurality of operation shafts 20b penetrating the fixed support plate 26, and the X fixed to the distal end of the operation shaft 20b on the movable lid 6 side. The shaft movable support plate 22 is configured.

  The X-axis fixed support plate 25 is provided with a through hole larger than the diameter of the operation shaft 20a. The operation shaft 20a penetrates the inside of the through hole and freely moves in the X-axis direction (right or left in FIG. 4). It is possible. Similarly, the X-axis fixed support plate 26 is also provided with a through hole so that the operation shaft 20b can be freely moved in the X direction.

The moving mechanism for moving the movable lid 6 in the Y direction penetrates the Y-axis fixed support plates 27 and 28 fixed to the two sides of the lid 5b and the Y-axis fixed support plate 27, similarly to the X-direction moving mechanism. A plurality of operation shafts 20c, a Y-axis movable support plate 23 fixed to the tip of the operation shaft 20c on the moving lid 6 side, a plurality of operation shafts 20d penetrating the Y-axis fixed support plate 28, and the operation shaft 20d. And a Y-axis movable support plate 24 fixed to the tip of the movable lid 6 side.
The operation shaft 20c or 20d passes through the through hole of the Y-axis fixed support plate 27 or 28, and can freely move in the Y direction.

  Therefore, the movable lid 6 is in contact with the upper surface of the lid 5b and is held between the four movable support plates 22, 23, 24, and 25 from four directions. Here, the movable lid 6 is removable.

Next, a method for moving the movable lid 6 will be described.
For example, when the operator pushes the operation shaft 20a from the outside of the lid 5b, the X-axis movable support plate 21 moves in the positive direction of the X-axis (right in FIG. 4) according to the movement of the operation shaft 20a. Thus, the movable lid 6 slides and moves to the right or left on the lid 5b. And according to the movement of the movable lid 6, the X-axis movable support plate 22 also moves to the right. That is, with respect to movement in the X direction, the operation cover 20a is moved by pressing the operation shaft 20a when moving in the positive direction and by pressing the operation shaft 20b when moving in the negative direction. 20b or 20a is moved in conjunction with each other.
In the example of FIG. 4, a state in which the operation shaft 20 b is pushed and the movable lid 6 is moved in the negative direction of the X axis is shown.

  The same applies to the movement in the Y direction. When the operator pushes the operation shaft 20c, the Y-axis movable support plate 23 moves in the positive direction of the Y-axis, and when the operator pushes the operation shaft 20d, the Y-axis movable support plate 24 moves to the Y-axis. By moving in the negative direction of the shaft, the movable lid 6 and the opposing operation shaft 20 are moved in the respective directions.

Next, a second superconducting circuit device and a method for adjusting its electrical characteristics will be described with reference to FIG. FIG. 5 is a schematic explanatory view showing a cross section taken along line AA ′ of FIG.
As shown in FIG. 5, the second superconducting circuit device is provided in the chamber 4, the cold stage 2 provided in the chamber 4, the microwave device 1 mounted on the cold stage 2, and the chamber 4. The input RF connector 41 and the output RF connector 42, and the second adjustment tool described with reference to FIG. A plurality of trimming rods 11 are provided on the upper surface of the microwave device 1.

  Among these components, the configuration inside the chamber 4 except for the second adjustment tool corresponding to the lid portion is the same as that of the conventional superconducting circuit device shown in FIG. 2 is cooled to a cryogenic state by the refrigerator 8 and depressurized to a state close to a vacuum by the vacuum exhaust device 9.

  In the second adjustment tool, the movable lid 6 completely covers the hole 52 provided in the lid 5b, and the O-ring 53 is provided around the hole 52 in the lid 5b. When the adjustment tool is crowned on the opening of the chamber 4, the inside of the chamber 4 is almost sealed, and when evacuated by the vacuum exhaust device 9, the pressure can be reduced to a state close to a vacuum.

A method for adjusting electrical characteristics in the second superconducting circuit device will be described.
First, the height of the tip of the adjustment driver 50 is adjusted. Since the adjustment driver 50 is movably attached to the movable lid 6 in the axial direction, when the second adjustment tool including the lid 5b is crowned at the opening of the chamber 4, the micro driver on the cold stage 2 is placed. The length is set so as not to hit the trimming rod 11 of the wave device 1.

Then, the second adjustment tool is put on the chamber 4 in which the microwave device 1 whose characteristics have been adjusted at room temperature and normal pressure is mounted, the cold stage is cooled and the inside of the chamber 4 is evacuated, and then the microwave in a cryogenic state is obtained. The electrical characteristics of device 1 are examined.
The inspection of the electrical characteristics (frequency characteristics in the case of a filter circuit) of the microwave device 1 is measured between the input RF connector 41 and the output RF connector 42.

  If the measurement result of the electrical characteristics is out of the standard, the operator moves the operation shaft 20 so that the tip of the adjustment driver 50 is directly above the trimming rod 11 and moves the movable lid 6. The position is adjusted, and when it comes directly above, the adjustment driver 50 is pushed in to match the height direction, the tip is fitted to the threaded portion of the trimming rod 11, and the threaded portion is rotated in a desired direction. When the adjustment for one trimming rod 11 is completed, the adjustment driver 50 is removed from the threaded trimming rod 11 and the moving lid 6 is moved to the position of the next trimming rod 11. This operation is performed for each trimming rod 11 that needs to be adjusted.

  In this way, in the second superconducting circuit device, it is not necessary to open the lid 5b when adjusting the trimming rod 11, so that the trimming rod 11 is adjusted while maintaining the vacuum state and the cryogenic state in the chamber 4. The time required for the adjustment work of the superconducting circuit device can be greatly shortened.

  When the necessary trimming rod 11 is adjusted, the electrical characteristics of the microwave device 1 are measured again, and the adjustment is repeated until it falls within the standard. In this way, the electrical characteristics of the microwave device 1 in the second superconducting circuit device are adjusted.

When the adjustment is completed, remove only the movable lid 6 from the adjustment driver 50, fix the adjustment driver 50 so that it does not move, crown the product lid, perform cooling and exhaustion again, and check the characteristics. The product can be shipped after confirming that it is within the standard.
Although the movable lid 6 can be removed here, it may be structured so as not to be removed. In this case, the adjustment driver 50 is fixed with the movable lid 6 and the adjustment driver 50 attached, so that the product can be removed. It comes to have a lid.

  According to the microwave device adjustment tool of the second embodiment of the present invention, the plate-shaped lid 5b crowned on the chamber 4 on which the microwave device 1 is mounted is provided on the microwave device 1. A hole 52 having a size that covers the distribution range of the plurality of trimming rods 11 is provided, a plate-shaped moving lid 6 that covers the hole 52 is mounted on the lid 5b, and the adjustment driver 50 is movable in the axial direction. 6 and an adjustment tool provided with a moving mechanism for moving the movable lid 6 independently in the X and Y directions on the lid 5b, so that the adjustment driver 50 is positioned directly above the trimming rod 11. The trimming rod 11 can be adjusted by the adjustment driver 50 after the movable lid 6 is moved so that the pressure is reduced and the poles in the chamber 4 remain covered with the lid. Electrical characteristics of microwave devices 1 while maintaining the temperature condition can be adjusted, there is an effect that can be efficiently performed in a short time adjustment of the electrical properties of microwave devices.

  Moreover, according to the superconducting circuit device according to the second embodiment, the hole 52 having a size covering the distribution range of the plurality of trimming rods 11 provided on the microwave device 1 in the plate-like lid 5b. A plate-shaped moving lid 6 covering the hole 52 is provided on the lid 5b, an adjustment driver 50 is movably attached to the moving lid 6 in the axial direction, and the moving lid 6 is further moved in the X direction on the lid 5b. Since the superconducting circuit device is crowned by the chamber 4 on which the microwave device 1 is mounted, the adjustment tool having a moving mechanism that moves the Y-direction independently in the Y direction, so that the decompressed and cryogenic state in the chamber 4 is maintained. As a result, the electrical characteristics of the microwave device 1 can be adjusted, and the adjustment work can be efficiently performed in a short time.

  Further, according to the second adjustment tool, the lid 5b and the movable lid 6 are formed in a plate shape, so that the superconducting circuit device can be reduced in size, thickness and weight when the chamber 4 is crowned. In particular, since it does not protrude in the height direction, the trimming rod 11 can be adjusted by the adjustment driver 50 from a close distance, and the adjustment accuracy can be improved compared to the first adjustment tool. .

  Further, according to the second adjustment tool, since the O-ring 53 is provided around the hole 52 of the lid 5b, the movable lid 6 can be easily moved on the lid 5b when the movable lid 6 is moved, and at the time of decompression. The gap between the lid 5b around the hole 52 and the movable lid 6 is eliminated, the hermeticity is improved, and the reduced pressure state (vacuum degree) and the low temperature state in the chamber 4 can be maintained.

  Further, in the first and second adjustment tools and the superconducting circuit device described above, the length of the adjustment driver 50 itself is not changed, and the height adjustment is performed by pushing the cover 5a or the cover 5b. However, the length of the adjustment driver 50 itself may be changed.

Such an example will be described with reference to FIG. FIG. 6 is an explanatory diagram showing a second adjustment tool and a superconducting circuit device configured to change the length of the adjustment driver 50.
As shown in FIG. 6A, in this adjustment tool and superconducting circuit device, the adjustment driver 50 is provided with a length adjustment structure. Accordingly, the length of the adjustment driver 50 is adjusted to some extent in advance, and the height direction is adjusted according to the trimming rod 11 as described above after crowning the chamber 4.

  As shown in FIG. 6B, the length of the adjusting driver 50 is adjusted by fitting a cylindrical tip 50b to a thin columnar shaft 50a and fastening it with friction or screws at an appropriate place. On the contrary, a thin columnar tip 50b 'is fitted inside the cylindrical shaft 50a' and the plate-like or columnar shaft 50c and the tip 50d are partially overlapped. It is conceivable to slide the screw and fasten it with an appropriate screw.

  In this way, by making the length of the adjustment driver 50 adjustable, more various microwave devices can be adjusted.

  Further, in the second microwave device adjustment tool and the superconducting circuit device, the operator pushes the operating shaft 20 of the moving mechanism that moves the moving lid 6 with the hand to move the moving lid 6. In order to enable fine adjustment, a knurled handle may be provided in each of the X direction and the Y direction. FIG. 7 is an explanatory view showing a second adjustment tool and a superconducting circuit device having a knurled handle.

  As shown in FIG. 7, a knurled handle 29 for adjusting the position of the operating shaft 20a is provided for movement in the X direction, and a knurled handle 30 for adjusting the position of the operating shaft 20c is provided for moving in the Y direction. .

  As described above, the microwave device adjustment tool and the superconducting circuit device are provided with a knurling handle in each of the moving mechanism for moving the movable lid 6 in the X direction and the moving mechanism for moving the movable lid 6 in the Y direction. The amount of movement of the movable lid 6 can be finely adjusted, and the adjustment accuracy of the electrical characteristics can be improved.

  INDUSTRIAL APPLICABILITY The present invention is suitable for a microwave device adjustment tool and a superconducting circuit device that can adjust the electrical characteristics of a microwave device while maintaining a cryogenic state and a reduced pressure state, and can improve the efficiency of adjustment work. .

1 is a schematic cross-sectional explanatory diagram of a superconducting circuit device according to a first embodiment of the present invention. (A) (b) is a schematic cross section explanatory drawing of the trimming rod used for the superconducting circuit device of the present invention. It is a schematic explanatory drawing which shows the basic composition of the adjustment tool of the microwave device which concerns on the 2nd Embodiment of this invention, (a) is a top view, (b) is a schematic cross section explanatory drawing. It is a top view of a superconducting circuit device (or a microwave device adjustment tool) according to a second embodiment. FIG. 5 is a schematic explanatory diagram illustrating a cross section taken along line AA ′ of FIG. 4. It is explanatory drawing which shows the 2nd adjustment tool and the superconducting circuit device which were the structure which changes the length of the adjustment driver. It is explanatory drawing which shows the 2nd adjustment tool and superconducting circuit apparatus provided with the knurled handle. It is explanatory drawing which shows schematic structure and the adjustment method of the electrical property of the conventional electronic device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Microwave device, 2 ... Cold stage, 4 ... Chamber, 5 ... Cover, 6 ... Moving lid, 8 ... Refrigerator, 9 ... Vacuum exhaust apparatus, 10 ..., 11 ... Trimming rod, 12 ... Dielectric, 13 ... Screw part, 14 ... Housing, 15 ..., 16 ..., 17 ..., 18 ..., 19 ..., 20 ... Operation shaft, 21, 22 ... X-axis movable support plate, 23, 24 ... Y-axis movable support plate, 25, 26 ... X-axis fixed support plate, 27, 28 ... Y-axis fixed support plate, 29, 30 ... Knurled handle, 41 ... RF connector for input, 42 ... RF connector for output, 50 ... Adjusting driver, 51 ... Shaft, 52 ... Hole, 53 ... O-ring

Claims (3)

A microwave device having a screw-like adjustment unit that adjusts electrical characteristics during operation is stored, and a lid that is crowned by an opening of a container cooled to a cryogenic state and seals the container;
A microwave device adjustment tool comprising a driver-like adjustment means for adjusting the adjustment unit,
The adjustment means is an adjustment means that is attached to the lid through the lid, and that adjusts the adjustment portion of the microwave device stored in the container in a state where the lid is crowned by the container. Features a microwave device adjustment tool. A container cooled to a cryogenic state;
A microwave device stored in the container, including a screw-shaped adjustment unit that adjusts electrical characteristics during operation;
A lid that is crowned by the opening of the container and seals the container;
A driver-like adjusting means that is attached to the lid through the lid, and that adjusts the adjustment portion of the microwave device stored in the container in a state where the lid is crowned by the container. A superconducting circuit device. A microwave device having a screw-shaped adjustment unit that adjusts electrical characteristics during operation is stored, crowned by an opening of a container cooled to a cryogenic state, closely attached to the opening, and in the opening A microwave provided with a first lid having a hole at a position covering the adjustment portion of the microwave device when crowned, and a second lid mounted on the first lid and covering the hole A device adjustment tool,
Adjusting the adjustment unit of the microwave device that is attached to the second lid through the lid, and is stored in the container through the hole in a state where the first lid is crowned by the container. A driver-like adjustment means;
A microwave device adjustment tool comprising: a moving mechanism for moving the second lid on the first lid.

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