JP2005207974A - Compound sensor for detecting angular velocity and acceleration - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compound sensor for detecting angular velocity and acceleration, capable of accurately detecting the angular velocity and the acceleration, wherever its rotating center may be located on an XY plane which is parallel to a substrate. <P>SOLUTION: The compound sensor for detecting the angular velocity and the acceleration is equipped with a processing circuit 40, which processes output signals from a first acceleration detecting sensor 21, a second acceleration detecting sensor 22 and a third acceleration detecting sensor 23, thereby detecting the acceleration, and by calculating the output signals, the angular velocity is obtained. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a composite sensor for detecting angular velocity and acceleration used for detecting the behavior of a vehicle body, particularly in a vehicle body control device for a vehicle.

  This type of conventional composite sensor for detecting angular velocity and acceleration has a configuration as shown in FIGS.

  FIG. 14 is a perspective view of a composite sensor for detecting angular velocity and acceleration using two conventional acceleration detecting means, and FIG. 15 is a cross-sectional view of the composite sensor for detecting angular velocity and acceleration.

  14 and 15, reference numeral 1 denotes a substantially rectangular substrate, on which a rotation center of the combined angular velocity / acceleration sensor is provided. Reference numeral 2 denotes first acceleration detection means, and this first acceleration detection means 2 is erected on the upper surface of the substrate 1 and has a first output electrode 3 on one surface as shown in FIG. And a first ceramic member 5 having a conductive layer 4 on the other surface. The first acceleration detecting means 2 is provided with a second ceramic member 6. One surface of the second ceramic member 6 is fixed to the conductive layer 4 and the second output is provided on the other surface. An electrode 7 is provided. Further, as shown in FIG. 14, a weight member 8 is provided above the first acceleration detecting means 2, and the weight member 8 includes the first output electrode 3, the first ceramic member 5, the conductive member. The layer 4, the second ceramic member 6, and the second output electrode 7 are fixed to the upper surface. Reference numeral 9 denotes second acceleration detection means, and the second acceleration detection means 9 is provided on the upper surface of the substrate 1 so as to be substantially parallel to the first acceleration detection means 2, and the first acceleration detection means 2. In the same manner, the first output electrode 3, the conductive layer 4, the first ceramic member 5, the second ceramic member 6, the second output electrode 7, and the weight member 8 are included.

  Next, the operation of the conventional composite sensor for detecting angular velocity and acceleration configured as described above will be described.

  The rotation center of the composite sensor for detecting angular velocity and acceleration is set to a position of 15 mm in the −X direction from the center of the X-ray-like first acceleration detecting means 2 of the substrate 1, and in this state, the first acceleration detecting means 2 14 and 15 acts on the second acceleration detecting means 9 and the second acceleration detecting means 9, and the first ceramic member 5 and the second acceleration detecting means 9 in the first acceleration detecting means 2 and the second acceleration detecting means 9 are applied. When the ceramic member 6 bends in the Y direction, each first output electrode 3 extends and the second output electrode 7 contracts. Due to the piezoelectric characteristics of each ceramic member, the first output electrode 3 and the first output electrode 3 An output voltage is obtained between the two output electrodes 7. In this case, since the second acceleration detection means 9 is farther from the center of rotation than the first acceleration detection means 2, the amount of bending in the Y direction is large, and the first output electrode 3 and the first output electrode 3 The output voltage generated between the two output electrodes 7 is large, and the difference between the output voltages from the first acceleration detecting means 2 and the second acceleration detecting means 9 is calculated, whereby the angular velocity and the acceleration are calculated. The angular velocity applied to the detection composite sensor was detected.

As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP-A-9-280867

  However, in the above conventional configuration, the angular velocity is detected on the assumption that the center of rotation is on the X axis as shown in FIG. 14 and at one point. For example, the angular velocity applied to the automobile is as follows. When the center of rotation fluctuates and exists somewhere on the XY plane parallel to the substrate 1, there is a problem that the angular velocity cannot be detected.

  SUMMARY OF THE INVENTION The present invention solves the above-described conventional problems, and an object of the present invention is to provide a composite sensor for detecting angular velocity and acceleration that can accurately detect the angular velocity wherever the center of rotation is on the XY plane parallel to the substrate. It is.

  In order to achieve the above object, the present invention has the following configuration.

  The invention according to claim 1 of the present invention particularly detects at least three acceleration detection means and output signals from the three acceleration detection means to detect acceleration and outputs from the three acceleration detection means. And a processing circuit that obtains an angular velocity by calculating a signal. According to this configuration, each acceleration detection means detects by an arithmetic process by a processing circuit that processes output signals from three acceleration detection means. By separating the measured acceleration into centrifugal acceleration and angular velocity, the angular velocity is calculated after calculating the rotational center of the angular velocity and the rotational radius of each acceleration detecting means, so the rotational center is parallel to the substrate. Even if it is not known where on the plane, the angular velocity can be accurately detected.

  According to the second aspect of the present invention, in particular, the first acceleration detecting means, the second acceleration detecting means, and the third acceleration detecting means provided on the upper surface of the circuit board are not positioned on the same straight line. According to this configuration, since the acceleration output signals having different directions are detected from the first acceleration detecting means, the second acceleration detecting means, and the third acceleration detecting means, the rotation center of the angular velocity is determined. Thus, the angular velocity can be obtained regardless of where the center of rotation is on a plane parallel to the circuit board.

  In the invention according to claim 3 of the present invention, in particular, each of the first acceleration detecting means, the second acceleration detecting means and the third acceleration detecting means detects acceleration in a biaxial direction parallel to the circuit board. This configuration is composed of acceleration detection means. According to this configuration, it is possible to calculate the angular velocity by separating the acceleration output vector detected from each acceleration detection means by the X-axis component and the Y-axis component. The angular velocity can be detected regardless of the direction of the acceleration vector applied to the acceleration detecting means.

  The invention according to claim 4 of the present invention is particularly provided with an arithmetic processing circuit for calculating the angular velocity and the rotation center of the angular velocity acting on the acceleration detecting composite sensor by the output signals of at least three acceleration detecting means. According to this configuration, each of the acceleration outputs can be separated into the centrifugal acceleration and the acceleration other than the centrifugal acceleration by performing the feedback calculation by the arithmetic processing circuit. This has the effect of being able to determine the center of rotation.

  The invention according to claim 5 of the present invention particularly comprises an angular velocity detecting means and at least three acceleration detecting means. According to this configuration, the acceleration signal detected from each acceleration detecting means is used. By comparing the angular velocity obtained by the arithmetic processing with the angular velocity output signal detected from the angular velocity detecting means, there is an effect that failure diagnosis of each acceleration detecting means and angular velocity detecting means can be performed. .

  According to the sixth aspect of the present invention, in particular, the angular velocity detection means and the at least three acceleration detection means are provided on the same plane, the angular velocity detection axis detected from the angular velocity detection means, and at least three. The angular velocity detection axis obtained by calculation processing from the respective acceleration outputs detected by the two acceleration detection means is coaxial, and according to this configuration, the angular velocity detection means and at least three acceleration detection means This has the effect of improving the angular velocity detection accuracy when performing the fault diagnosis.

  As described above, the angular velocity and acceleration detection composite sensor of the present invention detects at least three acceleration detection means and the output signals from the three acceleration detection means to detect acceleration, and from the three acceleration detection means. And a processing circuit that obtains an angular velocity by calculating the output signal of the output signal. By the arithmetic processing by this processing circuit, the acceleration detected from each acceleration detecting means is separated into centrifugal acceleration and angular velocity. Since the angular velocity is calculated after calculating the rotational center of the angular velocity and the rotation radius of each acceleration detection means, the angular velocity can be accurately detected even if it is unknown where the rotational center is on a plane parallel to the substrate. It has the effect of being able to do it.

(Embodiment 1)
Hereinafter, the invention described in the first to fourth aspects of the present invention will be described using the first embodiment.

  1 is an exploded perspective view of a composite sensor for detecting angular velocity and acceleration according to Embodiment 1 of the present invention, FIG. 2 is a side sectional view of acceleration detecting means in the composite sensor for detecting angular velocity and acceleration, and FIG. It is a top view of the fixed electrode of the acceleration detection means in the composite sensor for detection.

  1 to 3, 21 is a first acceleration detecting means, 22 is a second acceleration detecting means, 23 is a third acceleration detecting means, and these acceleration detecting means 21 to 23 are as shown in FIG. The flexible substrate 24, the working body 25, the pedestal 26, and the support substrate 27 are arranged, and the working body 25 and the support substrate 27 are arranged at a predetermined interval at positions parallel to each other. A hole 29 is formed in the upper portion of the flexible substrate 24 so that the flexible portion 28 is flexible. The lower surface of the action portion 30 of the flexible substrate 24 and the upper surface of the action body 25 are It is joined. The pedestal 26 is provided so as to surround the periphery of the action body 25, and the upper surface of the pedestal 26 is joined to the lower surface of the fixing portion 31 of the flexible substrate 24. Is bonded to the upper surface of the support substrate 27. A displacement electrode 32 is formed on the lower surface of the working body 25 as an electrode for detecting the action of acceleration, and the upper surface of the support substrate 27 facing the working body 25 is shown in FIG. The first X direction acceleration detection fixed electrode 33, the first Y direction acceleration detection fixed electrode 34, the second X direction acceleration detection fixed electrode 35, the second Y direction acceleration detection fixed electrode 36, and the Z direction acceleration detection. A fixed electrode 37 is formed, and a bonding pad 38 is formed at an end portion of the support substrate 27. The bonding pad 38 includes a first X-direction acceleration detecting fixed electrode 33, a first Y The direction acceleration detection fixed electrode 34, the second X direction acceleration detection fixed electrode 35, the second Y direction acceleration detection fixed electrode 36, and the Z direction acceleration detection fixed electrode 37 are electrically connected. .

  Three acceleration detection means having such a structure are prepared, and the first acceleration detection means 21, the second acceleration detection means 22, and the third acceleration detection means 23 are provided on the upper surface of the circuit board 39, and the circuit board 39 is provided. A processing circuit 40 made of electronic components is provided on the upper surface of the first and second processing circuits 40. The processing circuit 40 is electrically connected to the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23. Yes. Also, a digital output relay terminal insertion hole 41 for electrically taking out the digital output obtained by A / D converting the acceleration output signal by the processing circuit 40 from the upper surface to the lower surface of the circuit board 39, a power source (not shown), and processing. A power supply relay terminal insertion hole 42 for electrically connecting the circuit 40 and a GND relay terminal insertion hole 43 for electrically connecting a GND (not shown) and the processing circuit 40 are provided. . Reference numeral 44 denotes a metal shield case, which includes a storage portion 45 and a lid 48 provided with a biasing means 47 for closing the opening 46 in the storage portion 45. In addition, a circuit board 39 provided with the first acceleration detecting means 21, the second acceleration detecting means 22, the third acceleration detecting means 23, and the processing circuit 40 is accommodated in the accommodating portion 45 of the shield case 44, and the digital output The relay terminal 49, the power supply relay terminal 50, and the GND relay terminal 51 are provided so as to penetrate from the inside to the outside. One end of the digital output relay terminal 49 in the shield case 44 is electrically connected to the digital output relay terminal insertion hole 41 provided in the circuit board 39, and one end of the power supply relay terminal 50 is provided in the circuit board 39. The terminal insertion hole 42 is electrically connected, and one end of the GND relay terminal 51 is electrically connected to a GND relay terminal insertion hole 43 provided on the circuit board 39.

  52 is a bottomed cylindrical protective case made of resin, provided with a storage part 53, a protective cover 55 made of resin for closing the opening 54 in the storage part 53, and protruding outward from the side surface. The connector part 56 and the attachment part 57 are comprised. One end of a digital output connector terminal 58, a power connector terminal 59, and a GND connector terminal 60 is provided inside the connector portion 56, and the other ends thereof are provided in the protective case 52 within the first acceleration detecting means 21, The second acceleration detection means 22 and the third acceleration detection means 23 are electrically connected.

  Next, the assembly method for the angular velocity and acceleration detection composite sensor according to Embodiment 1 of the present invention configured as described above will be described with reference to the drawings.

  FIG. 4 is a side sectional view showing one step of the method of manufacturing the acceleration detecting means used in Embodiment 1 of the present invention.

  First, three semiconductor substrates are prepared, the flexible substrate 24 is formed by the first substrate 62 as shown in FIG. 4A, and the second substrate 63 as shown in FIG. 4B. Thus, the action body 25 and the pedestal 26 are formed, and as shown in FIG. 4C, the support substrate 27 is formed by the third substrate 64. The flexible portion 28 is formed by forming the hole 29 on the lower surface of the first substrate 62 by mechanical cutting or chemical etching.

  Next, a shallow groove 65 is formed on the upper surface of the second substrate 63, and a deep groove 66 is formed therearound. Further, on the lower surface of the second substrate 63, a shallow groove 67 is formed in a square region, a deep groove 68 is formed around the shallow groove 67, and the displacement electrode 32 is formed at the place where the shallow groove 67 is formed.

  Next, the first X-direction acceleration detection fixed electrode 33, the first Y-direction acceleration detection fixed electrode 34, the second X-direction acceleration detection fixed electrode 35, and the second Y-direction acceleration are formed on the upper surface of the third substrate 64. A detection fixed electrode 36 and a Z-direction acceleration detection fixed electrode 37 are formed.

  Further, since the support substrate 27 formed by the third substrate 64 can be the circuit substrate 39 of FIG. 1, the upper and lower surfaces of the third substrate 64 are necessary for signal processing of acceleration output. Wiring (not shown) is formed in advance.

  Next, the upper surface of the second substrate 63 is bonded to the lower surface of the first substrate 62, and a slit is formed at a position indicated by an arrow A in FIG. 4 by a dicing blade or chemical etching, so that the second substrate 63 is operated. The body 25 and the base 26 are separated.

  Next, the upper surface of the third substrate 64 is bonded to the lower surface of the second substrate 63, and necessary wiring is performed on the displacement electrode 32. Then, a slit is made so as to reach the bottom of the groove 68 at a position indicated by an arrow B in FIG. 4 by a dicing blade or chemical etching, and unnecessary portions of the first substrate 62 and the second substrate 63 are removed, The first acceleration detection means 21, the second acceleration detection means 22, and the third acceleration detection means 23 are simultaneously formed on the upper surface of the circuit board 39.

  Next, the processing circuit 40 is fixed to the upper surface of the circuit board 39, the circuit board 39 and the processing circuit 40 are electrically connected, and the digital output terminal insertion hole 41, the power supply relay terminal are provided from the upper surface to the lower surface of the circuit board 39. The insertion hole 42 and the GND relay terminal insertion hole 43 are formed.

  Next, after inserting the digital output relay terminal 49, the power supply relay terminal 50, and the GND relay terminal 51 so as to protrude upward and downward from the inner bottom surface to the outer bottom surface in the storage portion 45 of the shield case 44, the digital output relay is performed. The circuit board 39 is shielded so that one end of the terminal 49, the power supply relay terminal 50 and the GND relay terminal 51 is inserted into the digital output terminal insertion hole 41, the power supply relay terminal insertion hole 42 and the GND relay terminal insertion hole 43 in the circuit board 39. It is stored in the storage part 45 of the case 44.

  Next, a notch is formed around the lid 48 made of a thin plate and bent to form the biasing means 47 made of an elastic protrusion, and then the four pieces of the lid 48 are bent.

  Next, the opening 46 of the shield case 44 is covered with the lid 48, and the lid 48 is elastically attached to the opening 46 in the shield case 44 by the biasing means 47 provided in the vertical portion of the lid 48.

  Next, the other end of the digital output relay terminal 49, the power supply relay terminal 50, and the GND relay terminal 51 of the shield case 44 is inserted into a through hole (not shown) of the protection case 52 from above, The shield case 44 is stored in the storage portion 53.

  Next, after connecting the digital output relay terminal 49 to the digital output connector terminal 58, the power supply relay terminal 50 to the power connector terminal 59, and the GND relay terminal 51 to the GND connector terminal 60, soldering is performed from the lower surface of the protective case 52. To do.

  Finally, the opening 54 in the protective case 52 is closed with a protective lid 55.

  Next, the operation of the composite sensor for detecting angular velocity and acceleration according to Embodiment 1 of the present invention constructed and assembled as described above will be described with reference to the drawings.

  FIG. 5 is a schematic diagram showing a state in which the angular velocity and acceleration are applied to the angular velocity and acceleration detecting composite sensor provided on the vehicle body when the vehicle body is in a circular motion in the first embodiment of the present invention. FIG. 7 is a flowchart showing a method for calculating the angular velocity, the center of rotation, and the radius of rotation using the composite sensor for detecting angular velocity and acceleration, and FIG. 7 acts on three acceleration detecting means in the angular velocity calculation of the composite sensor for detecting angular velocity and acceleration. FIG. 8 is a schematic diagram illustrating a state in which a virtual vector is combined with an acceleration vector, and FIG. 8 is a schematic diagram illustrating a state in which a combined acceleration vector and a centrifugal acceleration vector acting on the three acceleration detection means of the composite sensor for detecting angular velocity and acceleration are matched. FIG. 9 is a block diagram showing a configuration for calculating the angular velocity, the rotation center, and the rotation radius using the same angular velocity and acceleration detection composite sensor. A click view.

  When acceleration acts on the acceleration detection means, an external force acts on the action body 25 in the first acceleration detection means 21, the second acceleration detection means 22, and the third acceleration detection means 23, and this external force is applied to the flexible substrate 24. When the moment force is generated on the flexible substrate 24, the flexible substrate 24 is bent, and the displacement electrode 32, the first X-direction acceleration detection fixed electrode 33, the first Y-direction acceleration detection fixed electrode 34, and the second X-direction. The intervals between the acceleration detection fixed electrode 35, the second Y-direction acceleration detection fixed electrode 36, and the Z-direction acceleration detection fixed electrode 37 change. The capacitance C of the capacitive element at this time is determined by C = ε × S / d, where S is the electrode area, d is the electrode interval, and ε is the dielectric constant, and the magnitude of the force applied based on the degree of change. The direction of the applied force can be recognized based on the change pattern of each capacitance. As shown in FIG. 3, when the X, Y, and Z axes are determined, acceleration in the X-axis direction is detected by the first X-direction acceleration detection fixed electrode 33 and the second X-direction acceleration detection fixed electrode. The acceleration in the Y-axis direction is detected based on the change in capacitance between the first electrode 35 and the displacement electrode 32, and the first Y-direction acceleration detection fixed electrode 34 and the second Y-direction acceleration detection fixed electrode 36 are displaced. This is performed based on a change in capacitance with the electrode 32. The acceleration in the Z-axis direction is based on the change in capacitance between the Z-direction acceleration detection fixed electrode 37 and the displacement electrode 32, and the change in capacitance with respect to each axis is converted to C / V or C / f. By amplifying the output obtained in this manner, the acceleration for each axis can be detected.

  As described above, the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 for detecting acceleration are arranged on a plane parallel to the floor surface of the vehicle body 69 of the automobile as shown in FIG. These are arranged at a predetermined interval so as not to be on the same straight line. Considering the state in which the vehicle body 69 is moving circularly at an angular velocity ω, the acceleration acting on each of the first acceleration detection means 21, the second acceleration detection means 22 and the third acceleration detection means 23 It is considered that this is the sum of the centrifugal acceleration generated by the circular motion 69 and the acceleration in the longitudinal direction of the vehicle body 69. At this time, since the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 are fixed to the vehicle body 69, all of the longitudinal accelerations acting on each acceleration detecting means are all. Will be equal. The acceleration output vector acting on the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 at this time is expressed as (Equation 1).

  The acceleration output vectors acting on the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 are the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means. The first acceleration detection means 21 and the second acceleration detection means 22 are arranged on the plane parallel to the floor surface of the vehicle body 69 at predetermined intervals so as not to be collinear with each other. In addition, a difference occurs in the radius of rotation in the third acceleration detecting means 23 and a difference also occurs in the acting centrifugal acceleration, so that different vectors are output. Further, if the fact that the straight line passing through the starting point of the centrifugal acceleration vector intersects at one point of the center of rotation due to the inclination of the centrifugal acceleration vector acting on the acceleration detecting means is used, the acceleration output vector can be obtained by using feedback calculation. Can be separated into a centrifugal acceleration vector and an acceleration vector other than the centrifugal acceleration. Then, by obtaining the centrifugal acceleration vector, the position of the rotation center and the rotation radius of each acceleration detecting means are obtained, and as a result, the angular velocity is obtained. FIG. 6 is a flowchart for explaining a method of calculating the angular velocity using the acceleration outputs from the three acceleration detecting means. Hereinafter, this angular velocity calculating method will be described.

  First, as shown in FIG. 6, in step 70, acceleration output vectors detected from the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 are read. At this time, the acceleration output vectors detected from the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 are read with the magnitudes of the accelerations of the X-axis component and the Y-axis component. Therefore, it is necessary to set the coordinate axes of the X axis and the Y axis when performing the calculation in advance. The coordinate axis may be determined in any way as long as it is on a plane parallel to the floor surface of the vehicle body 69. For example, the X axis is changed from the first acceleration detection means 21 to the second acceleration detection means as shown in FIG. The Y-axis perpendicular to the X-axis is determined as a direction in which the third acceleration detection means 23 is located from a straight line connecting the first acceleration detection means 21 and the second acceleration detection means 22. Then, the composite sensor for detecting angular velocity and acceleration has the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting capable of detecting the two axes on the X axis and the Y axis determined as described above. It is attached to the vehicle body 69 so that the detection axis of the means 23 is aligned.

  Next, in step 71, a virtual vector is determined. This virtual vector is a vector virtually determined in the calculation for estimating an acceleration vector other than the centrifugal acceleration included in the acceleration output vector read from each acceleration detecting means.

  Next, in step 72, an operation for synthesizing each acceleration output vector read in step 70 and the virtual vector determined in step 71 is performed. This composite vector is expressed as (Equation 2). FIG. 7 is a schematic diagram showing a state in which the acceleration output vector and the virtual vector are combined.

  Next, in step 73, as shown in FIG. 7, three straight lines having the gradient of the combined vector calculated in step 71 and passing through the starting point of the combined vector are obtained. The number of straight lines is expressed as (Equation 3).

  These three straight lines are parallel to each other because the directions of acceleration output vectors acting on the respective acceleration detecting means do not coincide with each other when acceleration other than centrifugal acceleration is applied to the vehicle body 69. It intersects at three intersections as shown in FIG. The coordinates of these three intersections are calculated by the number of consecutive cubes of the number of three straight lines calculated by (Equation 3). However, as an exception, when the two acceleration detecting means and the rotation center are arranged on the same straight line, the three straight lines intersect at two points, and the number of intersections is two. Then, the area and outer periphery of the triangle having the three intersections as vertices are calculated. The area and outer periphery of a triangle having the three intersections as vertices can be expressed as (Equation 4) and (Equation 5).

Next, in step 74, the triangle area obtained in step 73 is compared with the threshold value ε ₁ and the outer periphery is compared with the threshold value ε ₂ to determine whether the triangle area and outer periphery are equal to or less than the threshold value. . When the area and outer circumference of the triangle are both 0, the three straight lines obtained in (Equation 3) intersect at one point of the rotation center as shown in FIG. 8, and the resultant vector becomes the centrifugal acceleration vector. This is the time when they are equal, and when the acceleration vector other than the centrifugal acceleration is equal to the inverse vector of the virtual vector. At this time, the centrifugal acceleration vector and the acceleration vector other than the centrifugal acceleration vector can be expressed as (Equation 6).

  As a result, each acceleration output vector can be separated into a centrifugal acceleration vector and an acceleration vector other than the centrifugal acceleration.

When determining whether or not the area of the triangle and the outer circumference become 0 when the first acceleration detection means 21, the second acceleration detection means 22 and the third acceleration detection means 23 are actually provided in the vehicle body 69. Since it is necessary to consider the error of the acceleration output vector detected from the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23, sufficiently small threshold values ε ₁ and ε ₂ is determined, and the area and circumference of the triangle are compared with the threshold values ε ₁ and ε ₂ . When the area of the triangle is smaller than the threshold value ε ₁ and the outer periphery of the triangle satisfies the condition smaller than the threshold value ε ₂ , the process proceeds to the next step 75. If this condition is not satisfied, the process returns to step 71, and the X-axis component and Y-axis component of the virtual vector are increased or decreased so that the area and outer circumference of the triangle are reduced when determining the virtual vector in step 71. Similarly, the calculation from step 72 to step 74 is performed, and this acceleration separation calculation is repeated until the condition at step 74 is satisfied.

  Next, in step 75, the coordinates of the rotation center are calculated. When the condition of step 74 is satisfied, the three straight lines in (Equation 3) intersect at one point, that is, when the coordinates of the three intersections are equal to the rotation center. By calculating, the coordinates of the rotation center are obtained.

  Next, in step 76, the rotation radius in each acceleration detecting means is calculated. Here, using the coordinates of the center of rotation obtained in step 75 and the coordinates of each acceleration detection means, the rotation radius in each acceleration detection means is calculated by (Equation 7). The rotation radius output as the angular velocity and acceleration detection composite sensor may be obtained by calculating the rotation radius at the center of gravity of the vehicle body 69.

  Finally, in step 77, the angular velocity is calculated. The angular velocity is obtained by calculating by (Equation 8) using the centrifugal acceleration in each acceleration detecting means and the rotation radius in each acceleration detecting means obtained in step 76.

  By using the calculation method from the above steps 70 to 77, the rotation center, the rotation radius, and the angular velocity can be obtained from the acceleration outputs of the three acceleration detecting means.

  Next, the configuration in which the rotation center, the rotation radius, and the angular velocity are obtained from the first acceleration detection means 21, the second acceleration detection means 22, and the third acceleration detection means 23 using the above arithmetic processing method is shown in the block of FIG. Shown in the figure.

  The change in capacitance caused by the action of acceleration in the first acceleration detection means 21, the second acceleration detection means 22, and the third acceleration detection means 23 is converted into an output voltage by the C / V conversion circuit 78 and amplified. The output voltage is amplified by the circuit 79, and the three acceleration outputs thus amplified are input to the arithmetic processing circuit 80. Further, the arithmetic processing circuit calculates the coordinates of the first acceleration detecting means 21, the second acceleration detecting means 22, and the third acceleration detecting means 23 and the coordinates of the center of gravity of the vehicle body 69 that have been previously input to the coordinate storage device 81. Then, the calculation processing circuit 80 calculates the rotation center, the rotation radius, and the angular velocity according to the procedure shown in the flowchart of FIG. 6 and outputs them. The acceleration output as the combined sensor for detecting the angular velocity and acceleration at this time is obtained by calculating the rotation radius at the coordinates of the center of gravity of the vehicle body 69, or one of the three acceleration detection means is used as the center of gravity of the vehicle body 69. The acceleration detected from the acceleration detection means provided at the center of gravity of the vehicle body 69 is output.

(Embodiment 2)
Hereinafter, the configuration of the composite sensor for detecting angular velocity and acceleration according to Embodiment 2 of the present invention will be described with reference to the drawings.

  FIG. 10 is an exploded perspective view of a composite sensor for detecting angular velocity and acceleration provided with three acceleration detecting means according to the second embodiment of the present invention.

  The angular velocity and acceleration detection composite sensor shown in FIG. 10 includes a first acceleration detection means 21 and a second acceleration detection means 22 which are provided in the angular velocity and acceleration detection composite sensor shown in FIG. Instead of the third acceleration detecting means 23, the first acceleration detecting means 91, the second acceleration detecting means 92, and the third acceleration detecting means 93 are provided by using an acceleration detecting means having an IC structure. Is. The acceleration detecting means is provided with a movable electrode plate (not shown) and a fixed electrode plate (not shown) inside, and at one end of the movable electrode plate (not shown) and the fixed electrode plate (not shown). The X-axis acceleration output terminal 94, the Y-axis acceleration output terminal 95, the power supply terminal 96, and the GND terminal 97 that are electrically connected are provided so as to protrude outward. Then, the first acceleration detection means 91, the second acceleration detection means 92, and the third acceleration detection means 93 are fixed to the lower surface of the circuit board 39 and soldered, and the first acceleration is applied to the upper surface of the circuit board 39. A processing circuit 40 for processing the X-axis acceleration output signal and the Y-axis acceleration output signal from the detection means 91, the second acceleration detection means 92, and the third acceleration detection means 93 is provided, and an X-axis acceleration output terminal 94 is provided. And the Y-axis acceleration output terminal 95 are electrically connected to the processing circuit 40, the power terminal 96 and the power relay terminal 50 are electrically connected, and the GND terminal 97 and the GND relay terminal 51 are electrically connected. doing.

  The composite sensor for detecting angular velocity and acceleration having such a configuration operates in the same manner as in the first embodiment of the present invention. As long as the acceleration detecting means can detect biaxial and triaxial acceleration, the same operation is performed even if the acceleration detecting means other than the acceleration detecting means used in the first and second embodiments of the present invention is used. It is possible.

(Embodiment 3)
In the following, the third aspect of the present invention will be described with reference to the fifth and sixth aspects of the present invention.

  FIG. 11 is an exploded perspective view of the angular velocity and acceleration detection combined sensor provided with the angular velocity detection means and the three acceleration detection means according to the third embodiment of the present invention, and FIG. 12 shows the angular velocity and the acceleration sensor according to the third embodiment of the present invention. It is a perspective view of the vibrating body provided in the angular velocity detection means used with the composite sensor for acceleration detection.

  The combined angular velocity and acceleration detection sensor shown in FIG. 11 has a configuration in which the angular velocity detection means 101 is newly provided in the combined angular velocity and acceleration detection sensor shown in FIG. As shown in FIG. 12, the angular velocity detecting means 101 includes a vibrating body 102 formed of a tuning fork in which single crystal quartz thin plates having different crystal axes are bonded to each other, a case 103 for housing the vibrating body 102, and a case 103 It is comprised with the lid | cover 104 which obstruct | occludes an opening part. Drive electrodes 105 are provided on the front and back surfaces of the vibrating body 102 in the angular velocity detection means 101, and detection electrodes 106 are provided on the outer side surface and the inner side surface. Further, the case 103 in the angular velocity detecting means 101 accommodates the vibrating body 102 inside and has an opening (not shown) on the upper surface. In addition, an angular velocity output terminal 107, a power supply terminal 108, and a GND terminal 109 are provided so that the lid 104 in the angular velocity detecting means 101 penetrates from the upper surface to the lower surface, and one end of the angular velocity output terminal 107 in the lid 104 is connected to the vibrating body 102. The power supply terminal 108 and the GND terminal 109 are electrically connected to the drive electrode 105 of the vibrating body 102. The angular velocity detecting means 101 is fixed to the lower surface of the circuit board 39, and the angular velocity output terminal 107, the power supply terminal 108, and the GND terminal 109 of the angular velocity detecting means 101 are inserted into the terminal insertion hole 110 provided from the upper surface to the lower surface of the circuit board 39. doing. The angular velocity output terminal 107, the power supply terminal 108, and the GND terminal 109 in the angular velocity detecting means 101 are electrically connected to the processing circuit 40.

  Next, the operation of the composite sensor for detecting angular velocity and acceleration according to Embodiment 3 of the present invention having the above-described configuration will be described with reference to the drawings.

  FIG. 13 is a block diagram showing a configuration for performing failure diagnosis of the angular velocity detecting means and the three acceleration detecting means in the third embodiment of the present invention.

  The angular velocity detecting means 101 applies a voltage to the drive electrode 105 of the vibrating body 102 to cause the vibrating body 102 to bend and vibrate. The angular velocity detecting means 101 rotates at an angular velocity ω around the central axis in the longitudinal direction of the vibrating body 102. Then, when the mass is m and the initial velocity is v, a Coriolis force of F = 2mv × ω is generated in the vibrating body 102. By this Coriolis force, an angular velocity is detected by converting an output signal composed of electric charges generated at the detection electrode 106 into an output voltage by the processing circuit 40 in the circuit board 39.

  By comparing the angular velocity detected by the angular velocity detecting means 101 with the above operation and the angular velocities obtained from the three acceleration detecting means, a failure diagnosis of the angular velocity detecting means and the three acceleration detecting means can be performed. . In FIG. 13, the angular velocity output from the angular velocity detecting means 101 and the acceleration detecting means from the first acceleration detecting means 21, the second acceleration detecting means 22, and the third acceleration detecting means 23 in the arithmetic processing unit 80. The angular velocity output obtained by the calculation method of FIG. 6 from the acceleration output is input to the angular velocity comparison device 111, and when the difference between the two angular velocities is smaller than the threshold value, the angular velocity detecting means 101, the first acceleration detecting means 21, the second It is determined that the acceleration detection means 22 and the third acceleration detection means 23 are operating correctly, and the angular velocity from the angular velocity detection means 101 and the acceleration, rotation radius, and rotation center from the arithmetic processing unit 80 are output. . Further, when the difference between the two angular velocities is equal to or greater than the threshold value, any of the angular velocity detecting means 101, the first acceleration detecting means 21, the second acceleration detecting means 22 and the third acceleration detecting means 23 is abnormal. The determination is made and an abnormality determination is output.

  The composite sensor for detecting angular velocity and acceleration according to the present invention has an effect of accurately detecting the angular velocity even when it is not known where the center of rotation is on a plane parallel to the substrate. It is useful as a composite sensor for detecting angular velocity and acceleration used to detect the behavior of the sensor.

1 is an exploded perspective view of an angular velocity and acceleration detection composite sensor provided with three acceleration detection means in Embodiment 1 of the present invention. Side sectional view showing the structure of acceleration detecting means used in the composite sensor for detecting angular velocity and acceleration Top view of support substrate in acceleration detecting means used in composite sensor for detecting angular velocity and acceleration (A) (b) (c) Manufacturing process diagram of acceleration detecting means in composite sensor for detecting same angular velocity and acceleration Schematic diagram showing the state in which angular velocity and acceleration are acting on the vehicle body on which the composite sensor for detecting angular velocity and acceleration is installed. Flow chart showing a method for calculating angular velocity, rotational center and rotational radius using the same angular velocity and acceleration detecting composite sensor The schematic diagram which shows the state which combined the virtual vector with the acceleration vector which acts on three acceleration detection means in the angular velocity calculation of the composite sensor for the same angular velocity and acceleration detection Schematic diagram showing a state where the centrifugal acceleration vector acting on the three acceleration detecting means of the composite sensor for detecting the angular velocity and acceleration coincides with the combined vector The block diagram which shows the structure which calculates an angular velocity, a rotation center, and a rotation radius using the composite sensor for the same angular velocity and acceleration detection The disassembled perspective view of the composite sensor for angular velocity and acceleration detection in Embodiment 2 of this invention The disassembled perspective view of the composite sensor for angular velocity and acceleration detection in Embodiment 3 of this invention Perspective view of vibrating body in composite sensor for detecting angular velocity and acceleration The block diagram which shows the structure which performs a failure diagnosis of the angular velocity detection means and three acceleration detection means in the composite sensor for the same angular velocity and acceleration detection A perspective view of a conventional sensor for detecting angular velocity and acceleration Sectional view of composite sensor for detecting angular velocity and acceleration

Explanation of symbols

21, 91 First acceleration detection means 22, 92 Second acceleration detection means 23, 93 Third acceleration detection means 39 Circuit board 40 Processing circuit 80 Arithmetic processing circuit

Claims (6)

And at least three acceleration detection means; and a processing circuit that detects an acceleration by processing output signals from the three acceleration detection means and calculates an angular velocity by calculating an output signal from the three acceleration detection means. Combined sensor for detecting angular velocity and acceleration. A circuit board, first acceleration detecting means provided on the upper surface of the circuit board, and second acceleration detecting means provided on the upper surface of the circuit board and provided at a position different from the first acceleration detecting means; Third acceleration detection means provided on the upper surface of the circuit board and provided at a position different from the first acceleration detection means and the second acceleration detection means, the first acceleration detection means, and the second acceleration detection And a processing circuit for processing a signal from the third acceleration detecting means so that the first acceleration detecting means, the second acceleration detecting means and the third acceleration detecting means are not located on the same straight line. Combined sensor for detecting angular velocity and acceleration. 3. The angular velocity and acceleration according to claim 2, wherein each of the first acceleration detecting means, the second acceleration detecting means, and the third acceleration detecting means is constituted by an acceleration detecting means for detecting an acceleration in a biaxial direction parallel to the circuit board. Composite sensor for detection. 2. The angular velocity and acceleration detection composite sensor according to claim 1, wherein the processing circuit is provided with an arithmetic processing circuit for calculating a rotation center of the angular velocity acting on the angular velocity and acceleration detection composite sensor based on output signals of at least three acceleration detection means. An angular velocity detecting means, at least three acceleration detecting means, and a processing circuit for processing an output signal from the three acceleration detecting means and calculating an angular velocity by calculating an output signal from the three acceleration detecting means. Provided composite sensor for angular velocity and acceleration detection. An angular velocity detection unit and at least three acceleration detection units are provided on the same plane, and an angular velocity detection axis detected by the angular velocity detection unit and an angular velocity detection axis detected by at least three acceleration detection units are provided. 6. The composite sensor for detecting angular velocity and acceleration according to claim 5, wherein the sensor is configured to be coaxial.

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