JP2005207473A - Static pressure gas bearing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static pressure gas bearing device capable of precluding contact of a member to be borne with a static pressure gas bearing to such a degree as to generate seizure and provide a limit load sensing device for use in the static pressure gas bearing device. <P>SOLUTION: The static pressure gas bearing device 1 is equipped with a porous static pressure gas bearing 7 having electric conductivity to support a rotary shaft 2 with a gas pressure in a bearing gap 4 on the basis of a high pressure gas jetting out toward a surface 3 to be borne of the rotary shaft 2 from a bearing surface 5 forming the bearing gap 4 in cooperation with the surface 3 to be borne 3, the limit load sensing device 8 connected electrically with the rotary shaft 2 and the porous static pressure gas bearing 7 and sensing that the load applied from the rotary shaft 2 to the gas bearing 7 has attained the limitation on the basis of the electric contact between the two 2 and 7 in the gap 4, a driving means 9 to rotate the rotary shaft 2, and a drive control means 10 to control the rotational drive of the shaft 2 by the driving means 9 on the basis of the sensing result of the sensing device 8. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a static pressure gas bearing device including a limit load detection device that detects a limit of a load applied to a static pressure gas bearing, particularly a porous static pressure gas bearing, from a supported member such as a rotating shaft.

JP-A-6-147225

  As this type of static pressure gas bearing device, for example, only a non-contact displacement sensor is used to detect (detect) a change in the width of a bearing gap (bearing gap) between a rotating shaft as a bearing member and a static pressure gas bearing. A pressurized gas bearing device is proposed in Patent Document 1.

  By the way, in such a static pressure gas bearing device, since the change of the width of the bearing gap is detected only by the non-contact displacement sensor, the non-contact displacement sensor is affected by the environmental change around the non-contact displacement sensor. There is a risk that an error may occur between the detection result of the sensor and the actual change in the width of the bearing gap, and seizure occurs between the bearing surface of the bearing member such as the rotating shaft and the bearing surface of the hydrostatic gas bearing. It is difficult to prevent contact to the extent obtained.

  The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a static pressure capable of preventing contact between a supported member and a static pressure gas bearing that can cause seizure. The object is to provide a gas bearing device.

  The hydrostatic gas bearing device according to the first aspect of the present invention is based on a high-pressure gas ejected from a bearing surface that forms a bearing gap in cooperation with a bearing surface of a conductive bearing member to the bearing surface. A conductive porous hydrostatic gas bearing that supports the bearing member by gas pressure in the bearing gap, and is electrically connected to the bearing member and the porous hydrostatic gas bearing. The fact that the load applied from the bearing member to the porous hydrostatic gas bearing reached the limit based on the electrical contact between the bearing member and the porous hydrostatic gas bearing in the bearing gap due to the relative displacement of the bearing. And a limit load detection device for detection.

  According to the hydrostatic gas bearing device of the first aspect, the bearing member and the porous hydrostatic gas bearing are in contact with each other in the bearing gap due to an unintended overload in the radial direction to the bearing member including the rotating shaft and the like. In this case, as a result of being able to accurately detect this without being affected by surrounding environmental changes, it is possible to prevent contact between the bearing member and the hydrostatic gas bearing to the extent that seizure may occur. it can.

  According to the static pressure gas bearing device of the second aspect of the present invention, in the static pressure gas bearing device of the first aspect, each of the porous static pressure gas bearings has an opening on the bearing surface and a high pressure from the opening. A plurality of pores through which gas is ejected and an opening of the pores are at least partially defined, and the deformable display can be protruded toward the bearing surface by the high-pressure gas ejected from the opening. And a porous body having an extension.

  According to the static pressure gas bearing device of the second aspect, a so-called throttling function can be exhibited by the extended portion with respect to the high-pressure gas ejected from the openings of the plurality of pores, and from the openings of the plurality of pores. As a result of being able to detect the limit of the load load in advance by electrical contact with the bearing surface of the extended portion protruding toward the bearing surface based on the jetted high pressure gas, the bearing to the bearing surface It is possible to avoid the entire contact of the surfaces, and to prevent the contact between the supported member and the static pressure gas bearing to such an extent that seizure can occur.

  In the static pressure gas bearing device of the third aspect of the present invention, in the static pressure gas bearing device of the second aspect, the porous body comprises a metal part and an inorganic part exposed on the bearing surface, The spread part consists of a metal part.

  According to the static pressure gas bearing device of the third aspect, for example, a metal portion that is spread when the surface of the porous body facing the bearing surface is ground can be used as it is as the spread portion.

  In the static pressure gas bearing device of the fourth aspect of the present invention, in the static pressure gas bearing device of the third aspect, the metal portion exposed on the bearing surface is divided by the inorganic portion.

  In the static pressure gas bearing device of the fifth aspect of the present invention, in the static pressure gas bearing device of the third or fourth aspect, the metal portion includes at least one of tin, phosphorus, and copper. The inorganic portion includes at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide.

  In the static pressure gas bearing device according to the fifth aspect of the sixth aspect of the present invention, in the static pressure gas bearing device according to the fifth aspect, the metal portion further comprises at least one of nickel, chromium and manganese. Contains.

  In the static pressure gas bearing device according to the seventh aspect of the present invention, in the static pressure gas bearing device according to any one of the second to sixth aspects, the porous static pressure gas bearing includes a backing metal on which a porous body is sintered. Is further provided.

  In the static pressure gas bearing device according to the eighth aspect of the present invention, in the static pressure gas bearing device according to any one of the second to seventh aspects, the limit load detection device is an electrical connection between the bearing surface and the extended portion. Based on such contact, a detection signal indicating that the load applied from the bearing member to the porous hydrostatic gas bearing has reached the limit is generated.

  A static pressure gas bearing device according to a ninth aspect of the present invention controls the gas pressure in the bearing gap based on the detection by the limit load detection device in the static pressure gas bearing device according to any one of the first to eighth aspects. Gas pressure control means is further provided.

  According to the static pressure gas bearing device of the ninth aspect, when the limit load detector detects that the load has reached the limit, the gas pressure control means controls the gas pressure in the bearing gap, and the operation is stopped. It is possible to more effectively prevent contact between the bearing member and the hydrostatic gas bearing to such an extent that seizure can occur without stopping the driving of the bearing member that has a significant effect. .

  In the static pressure gas bearing device of the tenth aspect of the present invention, in the static pressure gas bearing device of the ninth aspect, the gas pressure control means increases the gas pressure in the bearing gap based on the detection by the limit load detection device. Alternatively, the pressure is reduced.

  In the static pressure gas bearing device of the eleventh aspect of the present invention, in the static pressure gas bearing device of the ninth or tenth aspect, the gas pressure control means sets the number of times of detection by the limit load detection device in advance. When the number of times is reached, the gas pressure in the bearing gap is controlled.

  In the static pressure gas bearing device according to the twelfth aspect of the present invention, in the static pressure gas bearing device according to the eleventh aspect, the gas pressure control means is configured so that the number of times of detection by the limit load detection device is within a preset set time. When the set number of times is reached, the gas pressure in the bearing gap is controlled.

  According to the static pressure gas bearing device of the eleventh or twelfth aspect, the useless gas pressure that responds to the electrical contact between the momentarily supported member and the porous static pressure gas bearing is incidental. Control can be avoided.

  A static pressure gas bearing device according to a thirteenth aspect of the present invention is the static pressure gas bearing device according to any one of the first to twelfth aspects, comprising a drive means for driving a bearing member and a limit load detection device. Drive control means for controlling the drive of the bearing member by the drive means based on the detection.

  According to the static pressure gas bearing device of the thirteenth aspect, when the limit load detector detects that the load has reached the limit, the drive control means controls the drive of the bearing member, and seizure occurs. It is possible to more effectively prevent the contact between the supported member and the static pressure gas bearing.

  In the static pressure gas bearing device of the fourteenth aspect of the present invention, in the static pressure gas bearing device of the thirteenth aspect, the drive control means is configured to detect the bearing member by the drive means based on the detection by the limit load detection device. The drive is stopped.

  In the static pressure gas bearing device of the fifteenth aspect of the present invention, in the static pressure gas bearing device of the thirteenth or fourteenth aspect, the drive control means sets the number of times of detection by the limit load detection device in advance. When the set number of times is reached, the driving of the bearing member by the driving means is controlled.

  In the static pressure gas bearing device according to the sixteenth aspect of the present invention, in the static pressure gas bearing device according to the fifteenth aspect, the drive control means detects the number of times of detection by the limit load detection device within a preset time. When the set number of times is reached, the driving of the bearing member by the driving means is controlled.

  According to the static pressure gas bearing device of the fifteenth or sixteenth aspect, similar to that of the eleventh or twelfth aspect, an accidental and instantaneous bearing member and porous static pressure gas Control of useless driving of the member to be supported that responds to electrical contact with the bearing can be avoided.

  In the present invention, a detecting means for detecting the width of the bearing gap based on the displacement of the bearing member or a change in the width may be further provided in addition to the limit load detecting device, and based on the detection result of the detecting means. By increasing or decreasing the gas pressure in the bearing gap or controlling the driving of the bearing member, more accurate operation of the bearing member can be realized.

  ADVANTAGE OF THE INVENTION According to this invention, the static pressure gas bearing apparatus which can prevent the contact of the to-be-beared member of the grade which can produce a seizure, and a static pressure gas bearing can be provided beforehand.

  Next, examples of embodiments of the present invention will be described in more detail based on preferred examples shown in the drawings. The present invention is not limited to these examples.

  1 to 4, the hydrostatic gas bearing device 1 of this example is supported by a bearing surface 5 that forms a bearing gap 4 in cooperation with a bearing surface 3 of a rotary shaft 2 as a conductive bearing member. Conductive porous hydrostatic gas bearing 7 that supports rotating shaft 2 by gas pressure in bearing gap 4 based on high-pressure gas (high-pressure air) ejected toward bearing surface 3, and rotating shaft 2 and porous hydrostatic gas bearing. 7 and based on the electrical contact between the rotary shaft 2 and the porous hydrostatic gas bearing 7 in the bearing gap 4 due to the relative displacement of the rotary shaft 2 and the porous hydrostatic gas bearing 7. A limit load detecting device 8 for detecting that the load applied to the porous hydrostatic gas bearing 7 from the rotating shaft 2 has reached a limit, a driving means 9 for driving the rotating shaft 2 and rotating in this example, and a limit Based on the detection by the load detection device 8, the rotation by the driving means 9 is performed. And a drive control unit 10 that controls the rotational driving of the shaft 2.

  The rotating shaft 2 is made of a metal columnar or cylindrical member, and the bearing surface 3 is an outer peripheral surface of the rotating shaft 2. The rotating shaft 2 only needs to have at least the bearing surface 3 to be electrically conductive. For example, a portion other than the outer peripheral surface of the rotating shaft 2 may be formed of a member having no conductivity.

  In this example, the drive means 9 includes an electric motor 11 and a connection mechanism 12 that connects the output rotation shaft of the electric motor 11 and one end of the rotation shaft 2, and is connected by the operation of the electric motor 11. The rotating shaft 2 is rotated via the mechanism 12.

  The porous static pressure gas bearing 7 includes a porous metal sintered body 15 as a porous body, and a back metal 16 on which the porous metal sintered body 15 is fitted.

  The porous metal sintered body 15 has a cylindrical shape, and the cylindrical inner peripheral surface of the porous metal sintered body 15 is configured as a bearing surface (radial bearing surface) 5. The porous metal sintered body 15 has openings 13 on the bearing surface 5 and a plurality of pores 14 in this example from which the high-pressure gas is ejected from the openings 13, and in this example, the pores 14 and the openings 13 of the pores 14. An extended portion 18 that is at least partially defined and deformable so as to be protruded toward the bearing surface 3 by the high-pressure gas ejected from the opening 13 is provided. The extended portion 18 in the bearing surface 5 is made of a member that narrows the opening 13, a member that closes the opening 13, a member that is divided by the inorganic portion 22, or the like. When the high-pressure gas is not supplied from the high-pressure gas supply source (not shown) to the porous static pressure gas bearing 7, the extending portion 18 is not protruding toward the bearing surface 3 or high pressure. It may be in a state where it does not protrude so much toward the bearing surface 3 as compared to when gas is supplied. The protruding length L1 of the extending portion 18 protruding toward the bearing surface 3 based on the ejection of the high-pressure gas from the opening 13 is about 3 μm to 5 μm. The bearing gap 4 has a width L2 of about 10 μm in this example.

  An annular recess 30 is formed in the outer peripheral surface 29 of the porous metal sintered body 15, and the annular recess 30 covered by the inner peripheral surface 31 of the back metal 16 is formed into pores of the porous metal sintered body 15. An annular supply path 32 for supplying high-pressure gas to 14 is formed.

  The porous metal sintered body 15 includes a conductive metal portion 21 and an inorganic portion 22. The metal portion 21 exposed at the bearing surface 5 is divided by the inorganic portion 22 exposed at the bearing surface 5. The extending portion 18 includes a metal portion 21 exposed at the bearing surface 4.

  In this example, the metal portion 21 is made of tin, phosphorus, copper, and nickel. However, the metal portion 21 may include, for example, at least one of tin, phosphorus, and copper, and tin, phosphorus, and copper. In addition to at least one of the above, at least one of nickel, chromium, and manganese may be further included.

  In this example, the inorganic portion 22 is made of graphite. For example, the inorganic portion 22 includes at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide. Also good.

  The back metal 16 is made of a metal rigid cylindrical body in which the porous metal sintered body 15 is fitted, and has a through-hole 33 that communicates with the annular supply path 32 and is threaded. A gas supply plug is attached to the through hole 33. Since the inner peripheral surface 31 of the back metal 16 is in close contact with the outer peripheral surface 29 of the porous metal sintered body 15, the openings in the outer peripheral surface 29 of the pores 14 are sealed.

  In the porous static pressure gas bearing 7, the high-pressure gas supplied to the through-hole 33 is supplied to the annular supply path 32, and the high-pressure gas supplied to the annular supply path 32 is the pore 14 of the porous metal sintered body 15. Through the opening 13 to form a high-pressure gas film in the bearing gap 4 between the bearing surface 5 and the bearing surface 3, and the porous hydrostatic gas bearing 7 The rotary shaft 2 having the above is rotatably supported via a high-pressure gas film in the radial direction.

  The limit load detection device 8 detects an electrical contact (short circuit) as shown in FIG. 4 between the bearing surface 3 and the extended portion 18, and the porous static pressure gas bearing 7 is detected from the rotary shaft 2 by this detection. A detection signal indicating that the applied load has reached the limit is generated, and this detection signal is sent to the drive control means 10.

  The drive control means 10 is embodied by, for example, a microcomputer or the like, and controls the rotational drive of the rotary shaft 2 by the drive means 9 when receiving a detection signal from the limit load detection device 8.

  The drive control means 10 may be configured to control the operation of the electric motor 11 so as to reduce the rotational speed per unit time of the rotary shaft 2 based on the detection signal from the limit load detection device 8. The operation of the electric motor 11 may be controlled so as to stop the rotation of the rotary shaft 2 based on detection by the limit load detection device 8.

  The drive control means 10 controls the rotational drive of the rotating shaft 2 by the drive means 9 when the number of detection signals from the limit load detection device 8 reaches the set number within a preset set time. However, without providing such a set time, when the number of detection signals from the limit load detection device 8 reaches a preset set number, the rotation drive of the rotary shaft 2 by the drive means 9 is controlled. It may be.

  In the static pressure gas bearing device 1, for example, when the rotary shaft 2 is rotatably supported by the gas pressure in the bearing gap 4, the rotary shaft 2 is displaced in the radial direction by an overload in the radial direction, so that the extended portion When 18 is in electrical contact with the bearing surface 3 prior to the portion of the bearing surface 5 other than the extended portion 18, a detection signal is generated by the limit load detection device 8, and the drive control means is based on the generated detection signal. Control by 10 is performed.

  The rotary shaft 2 is moved by the gas pressure in the bearing gap 4 based on the high-pressure gas ejected from the bearing surface 5 that forms the bearing gap 4 in cooperation with the bearing surface 3 of the conductive rotary shaft 2 toward the bearing surface 3. The conductive porous hydrostatic gas bearing 7 to be supported is electrically connected to the rotating shaft 2 and the porous hydrostatic gas bearing 7, and the relative displacement of the rotating shaft 2 and the porous hydrostatic gas bearing 7 is supported. The limit for detecting that the load applied to the porous hydrostatic gas bearing 7 from the rotating shaft 2 has reached the limit based on the electrical contact between the rotating shaft 2 and the porous hydrostatic gas bearing 7 in the bearing gap 4 According to the above hydrostatic gas bearing device 1 including the load detection device 8, an unintended excessive load in the radial direction is generated on the rotary shaft 2, and the rotary shaft 2 and the porous hydrostatic gas bearing 7 are the bearings. When they are in electrical contact with each other in the gap 4, This can be accurately detected without being affected by changes in the boundary, etc., thus preventing contact between the rotary shaft 2 and the porous hydrostatic gas bearing 7 to the extent that seizure can occur. Can do.

  According to the static pressure gas bearing device 1, the porous static pressure gas bearing 7 has the openings 13 on the bearing surface 5 and a large number of pores 14 through which high-pressure gas is ejected from the openings 13. 14 and at least partially defining an opening 13, and a porous portion 18 having a deformable extending portion 18 that can be deformed so as to protrude toward the bearing surface 3 by a high-pressure gas ejected from the opening 13. Since the sintered metal 15 is provided, the extending portion 18 can exhibit a so-called throttling function with respect to the high-pressure gas ejected from the openings 13 of the plurality of pores 14, and the plurality of pores The limit of the load load can be detected in advance by electrical contact with the bearing surface 3 of the extended portion 18 projecting toward the bearing surface 5 based on the high-pressure gas ejected from the opening 13 of the 14. As a result, the overall contact of the bearing surface 3 with the bearing surface 5 Avoiding possible, it is possible to Thus, further prevent effectively advance the contact between the rotating shaft 2 and the porous hydrostatic gas bearing 7 to the extent that may cause seizure.

  According to the hydrostatic gas bearing device 1, the porous metal sintered body 15 includes the metal portion 21 and the inorganic portion 22 exposed at the bearing surface 5, and the extending portion 18 is formed from the metal portion 21. For this purpose, for example, the opening 13 is at least partially defined in the metal portion 21 that is spread when the surface (inner peripheral surface) of the porous metal sintered body 15 facing the bearing surface 3 is ground. It can comprise as it is as the extending part 18 which can receive and project | project the high pressure gas ejected from the opening 13 while being formed.

  According to the static pressure gas bearing device 1, when the limit load detection device 8 detects that the load has reached the limit, the drive control means 9 controls the rotational drive of the rotary shaft 2, resulting in seizure. Contact between the rotating shaft 2 and the static pressure gas bearing 7 to the extent that can be obtained can be more effectively prevented.

  The static pressure gas bearing device 1 is a microcomputer that controls the gas pressure in the bearing gap 4 to be increased or decreased based on detection by the limit load detection device 8 instead of or in addition to the drive control means 10. The gas pressure control means (not shown) may comprise a bearing clearance when the number of times of detection by the limit load detection device 8 reaches a preset number of times. The gas pressure in the bearing gap 4 may be controlled when the number of detections by the limit load detection device 8 reaches the set number within a preset set time. You may come to do. In the case where such a gas pressure control means is provided, the rotary shaft 2 and the static shaft 2 can be seized without causing the rotation of the rotary shaft 2 to have a significant influence such as work stoppage. Contact with the pressurized gas bearing 7 can be further effectively prevented.

  In addition to the above-described configuration, the static pressure gas bearing device 1 may further include detection means (not shown) for detecting the width L2 of the bearing gap 4 or a change in the width L2. May further include means for increasing or decreasing the gas pressure in the bearing gap 4 based on detection by the detection means. The detection means may be composed of, for example, a non-contact sensor such as an optical type, a capacitance type, or an eddy current type.

  In the above-described hydrostatic gas bearing device 1, the rotary shaft 2 is configured to be supported in the radial direction, but instead of this, the hydrostatic gas bearing device is configured to support the rotary shaft 2 in the thrustal direction. May be.

It is explanatory drawing of the example of embodiment of this invention. It is a perspective explanatory view mainly of the porous static pressure gas bearing of the example shown in FIG. It is a partially expanded explanatory view of the example shown in FIG. FIG. 2 is a partially enlarged operation explanatory view of the example shown in FIG. 1.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Static pressure gas bearing apparatus 2 Rotating shaft 3 Bearing surface 4 Bearing clearance 5 Bearing surface 7 Porous static pressure gas bearing 8 Limit load detection apparatus 9 Driving means 10 Control means 13 Opening 14 Fine hole 18 Extending part

Claims (17)

  Conductive porous material that supports the bearing member by the gas pressure in the bearing gap based on the high-pressure gas ejected from the bearing surface to the bearing surface in cooperation with the bearing surface of the conductive bearing member. The hydrostatic gas bearing is electrically connected to the bearing member and the porous hydrostatic gas bearing, and the bearing member and the porosity in the bearing gap due to the relative displacement of the bearing member and the porous hydrostatic gas bearing. A static pressure gas comprising a limit load detection device for detecting that the load applied to the porous static pressure gas bearing from the bearing member has reached a limit based on electrical contact with the high quality static pressure gas bearing Bearing device.   The porous hydrostatic gas bearing has openings on the bearing surface, and a plurality of pores through which high-pressure gas is ejected from the openings, and at least partially defines the openings of the pores. The hydrostatic gas bearing device according to claim 1, further comprising a porous body having a deformable extending portion that can be protruded toward the bearing surface by the high-pressure gas ejected from the opening. .   The static pressure gas bearing device according to claim 2, wherein the porous body includes a metal portion and an inorganic portion exposed on the bearing surface, and the extending portion is formed of a metal portion.   The hydrostatic gas bearing device according to claim 3, wherein the metal portion exposed on the bearing surface is divided by an inorganic portion.   The metal portion includes at least one of tin, phosphorus, and copper, and the inorganic portion includes at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide. The hydrostatic gas bearing device according to claim 3 or 4, comprising one.   The hydrostatic gas bearing device according to claim 5, wherein the metal portion further includes at least one of nickel, chromium, and manganese.   The hydrostatic gas bearing device according to any one of claims 2 to 6, wherein the porous hydrostatic gas bearing further includes a back metal in which the porous body is sintered.   The limit load detection device generates a detection signal indicating that the load applied to the porous hydrostatic gas bearing from the bearing member has reached the limit based on the electrical contact between the bearing surface and the extended portion. The static pressure gas bearing device according to any one of claims 2 to 7.   The static pressure gas bearing device according to any one of claims 1 to 8, further comprising gas pressure control means for controlling the gas pressure in the bearing gap based on detection by the limit load detection device.   The static pressure gas bearing device according to claim 9, wherein the gas pressure control means increases or decreases the gas pressure in the bearing gap based on detection by the limit load detection device.   The static pressure gas according to claim 9 or 10, wherein the gas pressure control means controls the gas pressure in the bearing gap when the number of times of detection by the limit load detection device reaches a preset number of times. Bearing device.   12. The static pressure according to claim 11, wherein the gas pressure control means controls the gas pressure in the bearing gap when the number of times of detection by the limit load detection device reaches the set number within a preset set time. Pressure gas bearing device.   The drive means which drives a to-be-beared member, and the drive control means which controls the drive of the to-be-beared member by a drive means based on the detection by a limit load detection apparatus are further provided. The static pressure gas bearing device described in 1.   14. The static pressure gas bearing device according to claim 13, wherein the drive control means stops driving of the bearing member by the drive means based on detection by the limit load detection device.   15. The static control according to claim 13, wherein the drive control means controls the drive of the bearing member by the drive means when the number of times of detection by the limit load detecting device reaches a preset number of times. Pressure gas bearing device.   The drive control means controls the drive of the bearing member by the drive means when the number of times of detection by the limit load detection device reaches the set number of times within a preset set time. Static pressure gas bearing device.   The porous static pressure gas bearing of the static pressure gas bearing apparatus as described in any one of Claims 1-16.

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