JP2005197444A5 - - Google Patents
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- Publication number
- JP2005197444A5 JP2005197444A5 JP2004001942A JP2004001942A JP2005197444A5 JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5 JP 2004001942 A JP2004001942 A JP 2004001942A JP 2004001942 A JP2004001942 A JP 2004001942A JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004001942A JP4435580B2 (en) | 2004-01-07 | 2004-01-07 | Pressurized water jetting apparatus and substrate cleaning apparatus using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004001942A JP4435580B2 (en) | 2004-01-07 | 2004-01-07 | Pressurized water jetting apparatus and substrate cleaning apparatus using the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005197444A JP2005197444A (en) | 2005-07-21 |
| JP2005197444A5 true JP2005197444A5 (en) | 2006-12-07 |
| JP4435580B2 JP4435580B2 (en) | 2010-03-17 |
Family
ID=34817311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004001942A Expired - Lifetime JP4435580B2 (en) | 2004-01-07 | 2004-01-07 | Pressurized water jetting apparatus and substrate cleaning apparatus using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4435580B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4753757B2 (en) * | 2006-03-15 | 2011-08-24 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and substrate processing method |
| JP4592643B2 (en) * | 2006-05-24 | 2010-12-01 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP2010064035A (en) * | 2008-09-12 | 2010-03-25 | Asahi Sunac Corp | Electrostatic ejection apparatus |
| JP5400995B2 (en) * | 2009-09-05 | 2014-01-29 | 旭サナック株式会社 | Electrostatic painting spray gun |
| JP5894021B2 (en) * | 2012-06-26 | 2016-03-23 | 旭サナック株式会社 | Charge amount measurement method for spray droplets, charge amount measurement device, and charge amount control device for spray droplets using them |
| KR101856769B1 (en) * | 2016-09-30 | 2018-06-19 | 세메스 주식회사 | Apparatus and Method for injecting clean solution |
| JP2021064729A (en) * | 2019-10-16 | 2021-04-22 | 旭サナック株式会社 | Liquid injection device and liquid injection method |
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2004
- 2004-01-07 JP JP2004001942A patent/JP4435580B2/en not_active Expired - Lifetime