JP2005190536A - Head support mechanism, head arm assembly, disk drive unit provided with head arm assembly, and method for manufacturing head support mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a disk device equipped with a head support mechanism HAA having high shock resistance and capable of increasing a clearance with respect to a disk surface and a support arm, and a method for manufacturing the head support mechanism. <P>SOLUTION: In the head support mechanism, a support arm 40 and a head slider 44 having a head element are supported by a tip part, a scale-structure suspension is provided to swing in around a load support point 42 as a fulcrum in the direction of intersecting a recording medium surface. The head support mechanism is provided with a load generating means for pressing the head slider 44 toward the recording medium surface, and a weight member 46 to match the gravitational center of the suspension with the load support point 42. A weight beam 48 is formed in the rear end part of the load beam 41 to at least partially overlap the same, and a weight member 46 is disposed in the rear end of the load beam 41 or the weight beam 48. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides a head support mechanism comprising a combination of a suspension and a support arm, and a floating type head slider for supporting a recording and / or reproducing head element such as a thin film magnetic head or an optical head mounted on the head support mechanism. The present invention relates to a head arm assembly (HAA), a disk drive device including the HAA, and a method of manufacturing a head support mechanism.

  In the magnetic disk drive device, a magnetic head slider attached to the tip of the HAA is levitated from the surface of the rotating magnetic disk, and in this state, the thin film magnetic head element mounted on the magnetic head slider is used to mount the magnetic disk on the magnetic disk. Recording and / or reproduction from a magnetic disk is performed.

  The HAA includes a magnetic head slider, a flexure having elasticity that supports the magnetic head slider, a load beam having elasticity that supports the flexure at the tip, and a suspension that includes a base plate that supports the rear end of the load beam, The suspension is mainly provided with a rigid support arm that supports the suspension, and a load in the magnetic disk surface direction of the magnetic head slider is generated in a leaf spring portion provided in the middle of the load beam of the suspension.

  Such a conventional HAA has a cantilever structure that supports the suspension at its rear end. The cantilever structure is excellent in that the load on the magnetic head slider can be stabilized and space can be saved, but has a great problem that the impact resistance is low. In other words, in the cantilever beam structure, the magnetic head slider is mounted at the tip, which is the free end, and therefore when the impact force is applied, the magnetic head slider is subject to the rotational moment due to the mass of the entire beam structure system. Since a rotational moment is added, a slap mode, which is jumping from the magnetic disk surface or hitting the magnetic disk surface, occurs. In particular, this tendency is conspicuous because a low-rigid spring material (stainless steel plate slightly thicker than the flexure) is used for the load beam, which is a beam structure that supports the magnetic head slider.

  A 3.5-inch magnetic disk drive mounted on a computer called a high-end type or desktop-type computer hardly receives an excessive impact force, but a 2.5-inch magnetic disk mounted on a laptop computer. In a drive, there is a high possibility that an excessive impact force is applied. Therefore, such a low impact resistance is a big problem.

  In order to improve the impact resistance of the HAA, a magnetic head slider is provided at one end of a highly rigid arm, and a voice coil motor (VCM) for horizontal rotation is provided at the other end. It is configured to be able to rotate in the radial direction of the disk, and to have a balance structure that can rotate in the direction perpendicular to the magnetic disk surface around the bearing, and further, a leaf spring provided on the bearing is pivoted A head support device has been proposed in which a load is applied to the magnetic head slider by urging the magnetic head slider (for example, Patent Document 1).

  According to the HAA having such a balance structure, since the distance between the VCM and the magnetic head slider is short in the case of a small-diameter magnetic disk device and a single disk, the arm on the VCM side from the bearing section and the magnetic head from the bearing section. It is possible to balance the weight with the arm on the slider side. However, in a magnetic disk drive having a diameter larger than this, such as a 1.8-inch system and a 2.5-inch system, the arm length becomes large, so that the primary bending mode frequency (hereinafter referred to as the primary bending frequency) It is difficult to increase the impact resistance, and it is difficult to ensure sufficient impact resistance. Further, since the balance structure is balanced by the VCM, a magnetic disk device in which a plurality of HAAs are superimposed cannot be configured.

  In order to eliminate the inconvenience described above, it has been proposed by the present inventors to employ a balance structure at the tip of the support arm.

  FIG. 1 is a side view for explaining the schematic configuration of the HAA proposed by the inventors of the present application, and FIG. 2 is a diagram schematically showing the operation of the HAA tip balance structure shown in FIG. It is.

In FIG. 1, 10 is a support arm, 11 is a protrusion that contacts the tip of the support arm 10, that is, a load beam having a tip balance structure with a load support point 12 as a fulcrum, and 13 is a load beam 11 and the support arm 10 A support spring that is connected and biases the load beam 11 via the protrusion 12, 14 is a magnetic head slider supported on the tip of the load beam 11 via the flexure 15, and 16 is a rear end of the load beam 11. A weight member 17 and a load dimple for pressing the magnetic head slider 14 are shown. In this HAA, as shown in FIG. 2, m ₁ is the mass center on the rear end side from the load support point 12, m ₂ is the mass center on the front end side (magnetic head slider 14 side) from the load support point 12, and l ₁ is the mass center. When the distance from the load support point 12 to the center of mass m ₁ and l ₂ are the distance from the load support point 12 to the center of mass m ₂ , the rotational moments before and after the load support point 12 are made equal (m ₁ × l ₁ = m ₂ × l ₂ ). In other words, by attaching the weight member 16, the center of gravity excluding the HAA fixing portion 18 is made to coincide with the load support point 12.

  According to the HAA having such a configuration, since the load beam 11 having a balance structure is provided at the distal end portion of the support arm 10, even if the support arm becomes long, the impact resistance does not deteriorate so much. In addition, since the balance structure is not balanced by the coil portion of the VCM, a magnetic disk device in which a plurality of HAAs are superimposed can be configured.

JP 2002-237160 A

  However, the HAA having a balance structure at the tip of the support arm 10 as shown in FIG. 1 has significant restrictions in terms of the clearance between the weight member 16 and the magnetic disk and the clearance between the load beam 11 and the support arm 10. is there.

  That is, in such a tip balance structure, it is desirable that the load beam 11 be parallel to the disk surface in use in order to obtain the effect of the balance. Accordingly, the apparatus mounting height (Z height) excluding the thickness of the support arm 10 is (the height of the protrusion (pivot dimple) 12 constituting the load support point) + (plate thickness of the load beam 11) + (load dimple). 17 (height) + (plate thickness of flexure 15) + (thickness of magnetic head slider 14). When the dimple is provided on the load beam, the maximum protrusion height is defined within a certain range by the plate thickness. Therefore, when the weight member 16 is attached to the rear end portion of the load beam 11, the weight member 16 and the magnetic disk If the clearance between the weight member 16 and the support arm 10 is not secured, a trade-off relationship occurs in which the clearance between the weight member 16 and the support arm 10 cannot be obtained.

  Further, if the weight member 16 is made thick in order to suppress the displacement of the weight member 16, the clearance is taken away. Conversely, if the weight member 16 is made thin in order to secure the clearance, the entire length of the weight member 16 is taken to balance the moment. Becomes longer, and the displacement in the vertical direction when an impact is applied increases.

  Accordingly, an object of the present invention is to provide a head support mechanism, HAA, a disk device and a head equipped with this HAA, which have excellent impact resistance and can increase the clearance to the disk surface and the support arm at the rear end of the balance structure. It is to provide a manufacturing method of a support mechanism.

  According to the present invention, there is provided a balance structure that can swing in a direction intersecting the recording medium surface with a support arm having high rigidity and a load support point set between the support arms as a fulcrum. A suspension for supporting a head slider having two head elements at the tip, load generating means for generating a load for pressing the head slider toward the recording medium surface via a load support point, and a rear end of the suspension And a weight member for causing the center of gravity of the suspension including the head slider to coincide with the load support point, and the suspension supports the flexure having elasticity to support the head slider. Load beam and weight beam formed so that at least part of it overlaps the rear end of the load beam It comprises a head support mechanism is provided that the weight member is provided at the rear end or wait beam of the load beam. Further, an HAA including the head support mechanism and a head slider having at least one head element mounted on the suspension of the head support mechanism is also provided. Furthermore, a disk device comprising at least one recording medium and at least one HAA as described above is provided.

  The weight beam is formed so as to at least partially overlap the rear end portion of the load beam, and the weight member is provided on the rear end portion of the load beam or the weight beam. Conventionally, it is composed of two members, a load beam and a weight member, but it is composed of three members, a load beam, a weight beam, and a weight member. A weight beam is formed so that the portions overlap. For this reason, when the weight member is provided on the weight beam, both the clearance between the weight member and the disk surface and the clearance between the load beam or weight beam and the support arm can be satisfied. Further, when the weight member is provided at the rear end portion of the load beam, a clearance between the weight member and the disk surface can be secured, and a clearance between the load beam and the support arm similar to the conventional balance structure can be obtained. It becomes possible.

  In this specification, the “front end portion” and the “front end” refer to a side that is a free end during operation, that is, a portion on the side where the head slider is mounted and its end. The “rear end” refers to the opposite portion and its end.

  The load support point is preferably a protrusion provided on the weight beam.

  It is also preferable that the load generating means is formed integrally with the weight beam and includes a leaf spring connected to the support arm.

  The load supporting point is preferably a protrusion provided on the load beam.

  It is also preferable that the load generating means is formed integrally with the load beam and includes a leaf spring connected to the support arm.

  It is preferable that the weight beam is provided on the surface of the load beam on the support arm side. In this case, it is more preferable that the weight member is provided on the surface opposite to the support arm of the weight beam, or is provided on the surface opposite to the support arm of the load beam.

  It is also preferable that the weight beam is provided on the surface of the load beam opposite to the support arm. In this case, it is more preferable that the weight member is provided on the surface of the weight beam on the support arm side.

  It is preferable that the weight beam and the load beam are each constituted by a single plate member and are fixed to each other by welding. In this case, it is preferable that the weight member is constituted by a plate member and is fixed to the weight beam or the load beam by welding, or is constituted by a molded resin.

  It is also preferable that the weight beam and the load beam are constituted by a laminate plate member of a resin layer and a metal layer. In this case, it is more preferable that the weight member is constituted by the laminate plate member.

  It is also preferable to further include horizontal rotation bearing means for supporting the support arm and the suspension so as to be rotatable in a direction parallel to the surface of the recording medium. In this case, it is more preferable that the support arm is fixed to the horizontal rotation bearing means.

  It is also preferable to further include actuator means fixed to the horizontal rotation bearing means and for rotating the support arm and the suspension in a direction parallel to the recording medium surface.

  The disk device is fixed to a plurality of recording media, a plurality of head arm assemblies having a common horizontal rotation bearing means, and a common horizontal rotation bearing means, and the plurality of head arm assemblies are parallel to the surface of the recording medium. It is also preferred to have a single actuator means for rotating in the direction.

  According to the present invention, furthermore, the balance structure that can swing in the direction intersecting the recording medium surface with the load support point set between the support arm having high rigidity and the support arm as a fulcrum is formed. Suspension for supporting a head slider having at least one head element at a tip portion, and load generating means for generating a load for pressing the head slider toward a recording medium surface through a load support point A method of manufacturing a head support mechanism, wherein a weight member for aligning the center of gravity of a suspension with a load support point is formed on the weight beam, and the weight member is formed at the rear end of the load beam on which the load generating means is formed. The weight beam with the weight beam is fixed so that at least a part of the weight beam overlaps, and the load generating means for the load beam to which the weight beam is fixed Manufacturing method of a head supporting mechanism for securing to the support arm is provided.

  The load beam, the weight beam, and the weight member are composed of three members, and the weight beam forming the weight member is fixed so that at least a part of the weight beam overlaps the rear end portion of the load beam. And the clearance between the load beam or weight beam and the support arm can be satisfied.

  In addition, since the weight member is formed on the weight beam and then the weight beam is fixed to the rear end portion of the load beam on which the load generating means is formed, the load beam is handled during the weight member forming process. It will never be. For this reason, when forming the weight member, there is no inconvenience that the quality of the load beam on which the load generating means such as a leaf spring or the load dimple is formed is deteriorated. On the contrary, in the weight member forming process, it is not necessary to consider the handling of the load beam, so that the process can be simplified and the manufacturing cost can be reduced.

  It is preferable to form a pair of protrusions as load support points on the load beam.

  It is also preferable to integrally form a leaf spring as load generating means on the load beam.

  The weight beam is preferably provided on the surface of the load beam on the support arm side. In this case, it is more preferable that the weight member is provided on the surface of the weight beam opposite to the support arm.

  It is also preferable to provide the weight beam on the surface of the load beam opposite to the support arm. In this case, the weight member is more preferably provided on the surface of the weight beam on the support arm side.

  It is preferable that the weight beam and the load beam are each formed by a single plate member and are fixed to each other by welding. In this case, it is more preferable that the weight member is formed by a plate member, and the weight member is fixed to the weight beam by welding, or is formed by molded resin.

  According to the present invention, it is possible to satisfy both the clearance between the weight member and the disk surface and the clearance between the load beam or the weight beam and the support arm.

  FIG. 3 is a plan view schematically showing a configuration of a main part of the magnetic disk drive device according to the embodiment of the present invention, and FIG. 4 is a side view showing the HAA attached to the magnetic disk drive device of FIG. FIG. 5 is a side view showing a comparison between the conventional HAA and the HAA of the present embodiment.

  In FIG. 3, reference numeral 30 denotes a magnetic disk having a diameter of about 1 inch that rotates around an axis 31, and 32 denotes a magnetic head slider that faces the surface of the magnetic disk 30 via a support arm 33 and a load beam 34. HAA and 36 having a VCM coil portion 35 attached to the rear end portion thereof are bearing housings for rotating the support arm 33 of the HAA 32 in parallel (horizontal direction) with the surface of the magnetic disk 30.

  The VCM is composed of a coil portion 35 and a yoke portion (not shown), and one or more HAA 32 stacked in the axial direction of the bearing housing 36 are rotated in parallel with the surface of the magnetic disk 30 around this axis. Thus, the seek operation of the magnetic head slider attached to the tip end portion is performed.

  As shown in FIG. 4, the HAA 32 in the present embodiment includes a support arm 40 (33) having a very high rigidity, a load beam 41 (34), and a rear end portion on the surface of the load beam 41 on the support arm 40 side. A suspension mainly composed of a weight beam 48, a flexure 45, and a wiring member (not shown), the tip of which is overlapped and fixed, a magnetic head slider 44 mounted on the tip of the suspension, and a load. A leaf spring 43 for generating and a weight member 46 fixed to the rear end portion on the surface opposite to the support arm of the weight beam 48 and for balancing the rotational moment are provided.

  The suspension, the magnetic head slider 44, and the weight member 46 have a tip balance structure that swings in a direction substantially perpendicular to the magnetic disk surface with a load support point 42 formed of a pair of protrusions as a fulcrum. The suspension is connected to the support arm 40 by a leaf spring 43. The suspension is not connected to the support arm 40 or other members except for the leaf spring 43 and the protrusion 42, and is in a so-called floating state. Yes.

  The support arm 40 is made of a very rigid member, for example, a thick stainless steel plate having a thickness of about 150 to 250 μm.

  In the present embodiment, the load beam 41 is made of a single metal plate, such as a stainless steel plate (for example, SUS304TA) having a thickness higher than that of the flexure 45, for example, about 30 to 50 μm. A load dimple (protrusion) 47 for applying a load to the magnetic head slider 43 via a flexure 45 is formed at the tip of the load beam 41.

  In this embodiment, the flexure 45 is formed of a single metal plate such as an elastic stainless steel plate (eg, SUS304TA) having a thickness of about 20 to 30 μm. A soft tongue is formed at the tip of the flexure 45, and the magnetic head slider 44 is flexibly supported by this tongue to stabilize the flying posture. In the present embodiment, the flexure 45 is fixed on the load beam 41 by, for example, laser beam welding.

  On the flexure 45, although not shown, a trace conductor and connection pads for a thin film magnetic head element are formed as wiring members. The trace conductors and connection pads may be directly laminated on the surface of the flexure 45, or a flexible printed circuit (FPC) formed by laminating a trace conductor on a resin layer may be adhered to the surface of the flexure 45. good.

  In the present embodiment, the magnetic head slider 44 is formed with one thin film magnetic head element including a write head element and a magnetoresistive effect (MR) read head element.

  In this embodiment, the weight beam 48 is formed of a single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 30 to 50 μm. The weight beam 48 has a front end portion which is a rear end portion of the load beam 41 and is superposed on a surface on the support arm 40 side and is fixed by, for example, laser beam welding. Furthermore, in the present embodiment, the weight beam 48 is integrally formed with a leaf spring 43 and a load support point 42 made up of a pair of protrusions. More specifically, the leaf spring 43 is formed by cutting out the same plate member as the weight beam 48 or welding another member to the weight beam 48. The leaf spring 43 is bent at the rear end portion of the weight beam 48 and has a free end extending forward. The weight beam 48 and the load beam 41 are connected to the support arm 40 by fixing the free end of the leaf spring 43 to the back side of the support arm 40 by laser beam welding or the like. The load support point 42 formed of a pair of protrusions is formed on the same plate member as the weight beam 48 by dimple processing by pressing.

  The position, shape, and weight of the weight member 46 are determined so that the center of gravity of the suspension including the magnetic head slider 44 coincides with the load support point. In this embodiment, the weight member 46 is the rear end portion of the weight beam 48. A single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 150 μm is fixed to the surface opposite to the support arm 40 by, for example, laser beam welding.

  As shown in FIG. 5A, in the conventional HAA having a tip balance structure, the suspension is mainly composed of a single load beam 11 and a flexure 15, and a weight member 16 is directly attached to the load beam 11. Therefore, the weight member 16 protrudes from the load beam by the thickness of the plate. For this reason, the clearance B with the surface of the magnetic disk 19 is lost. If the thickness of the weight member is reduced, the clearance of this part can be obtained. However, in order to balance the moment, it is necessary to lengthen the entire length of the weight member, which increases the displacement of the weight member when subjected to an impact. Therefore, the clearance B with the magnetic disk 19 is also taken away. On the other hand, the clearance A with the support arm 10 is determined by the height of the projection (pivot dimple) 12 constituting the load support point, but this projection 12 is formed by dimple processing by pressing the load beam 11. Since the maximum protrusion height that can be formed is limited by the thickness of the load beam, it is difficult to increase the height.

  On the other hand, as shown in FIG. 5B, in the HAA of this embodiment, at least one weight beam 48, which is a member different from the load beam 41, is placed on the surface of the rear end portion of the load beam 41 on the support arm 40 side. The parts are fixed so as to overlap. The weight beam 48 is provided with a leaf spring 43 and a load support point 42 composed of a pair of protrusions. In addition, the weight member 46 is fixed to the rear end portion of the weight beam 48 on the surface opposite to the support beam 40. Since the weight beam 48 is formed with the projections constituting the load support point 42, the Z-height increases by the weight beam 48, but the thickness of the weight beam 48 is kept as it is (according to the press). It is possible to increase the rigidity of the load beam 41 alone by increasing the thickness of the load beam 41 (in a state where the projection 42 having a sufficient height can be formed by dimple processing). Since the weight beam 48 is fixed to the surface of the load beam 41 on the support arm 40 side and the weight member 46 is fixed to the surface of the weight beam 48 opposite to the support beam 40, the weight member 46 is attached to the load beam 41. Only the thickness obtained by subtracting the plate thickness protrudes from the surface of the load beam 41, and a clearance B between the weight member 46 and the surface of the magnetic disk 49 is ensured. The clearance A on the support arm 40 side is also secured by an amount corresponding to the height of the protrusion 42. As a result, it is possible to obtain design freedom and high rigidity.

  According to the present embodiment, the tip balance structure is configured such that the suspension and magnetic head slider 44 on the front end side and the suspension and weight member 46 on the rear end side are balanced with the load supporting point as a fulcrum. Therefore, there is no need to balance the VCM for each HAA. Therefore, it is possible to simply provide a configuration in which a plurality of HAAs are superimposed and driven by one VCM.

  FIG. 6 is a side view showing an HAA according to another embodiment of the present invention.

  As shown in the figure, the HAA according to the present embodiment has a support arm 60 having a very high rigidity, a load beam 61, and a rear end portion of the load beam 61 on the surface of the support arm 60 over the entire length thereof. A suspension mainly composed of a weight beam 68, a flexure 65, and a wiring member (not shown) which are superposed and fixed, a magnetic head slider 64 mounted on the tip of the suspension, and a plate for generating a load The spring 63 is fixed to a rear end portion on the surface opposite to the support arm of the load beam 61, and includes a weight member 66 for balancing the rotational moment.

  The suspension, the magnetic head slider 64, and the weight member 66 have a tip balance structure that swings in a direction substantially perpendicular to the magnetic disk surface with a load support point 62 formed of a pair of protrusions as a fulcrum. The suspension is connected to the support arm 60 by a leaf spring 63, and is in a so-called floating state that is not connected to the support arm 60 or other members except for the leaf spring 63 and the protrusion 62. Yes.

  The support arm 60 is made of a very rigid member, for example, a thick stainless steel plate having a thickness of about 150 to 250 μm.

  In this embodiment, the load beam 61 is made of a single metal plate, such as a stainless steel plate (for example, SUS304TA) having a thickness higher than that of the flexure 65, for example, about 30 to 50 μm. A load dimple (projection) 67 for applying a load to the magnetic head slider 63 via the flexure 65 is formed at the tip of the load beam 61.

  In this embodiment, the flexure 65 is formed of a single metal plate such as an elastic stainless steel plate (for example, SUS304TA) having a thickness of about 20 to 30 μm. A soft tongue is formed at the tip of the flexure 65, and the magnetic head slider 64 is flexibly supported by this tongue to stabilize the flying posture. In the present embodiment, the flexure 65 is fixed on the load beam 61 by, for example, laser beam welding.

  On the flexure 65, although not shown, a trace conductor and connection pads for a thin film magnetic head element are formed as wiring members. The trace conductors and connection pads may be directly laminated on the surface of the flexure 65, or FPC formed by laminating the trace conductor on the resin layer may be bonded to the surface of the flexure 65.

  In the present embodiment, the magnetic head slider 64 is formed with one thin film magnetic head element including a write head element and an MR read head element.

  In this embodiment, the weight beam 68 is made of a single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 30 to 50 μm. The weight beam 68 is fixed by, for example, laser beam welding so as to overlap the rear end portion of the load beam 61 and the surface on the support arm 60 side over the entire length thereof. Further, in the present embodiment, the weight beam 68 is integrally formed with a leaf spring 63 and a load support point 62 composed of a pair of protrusions. More specifically, the leaf spring 63 is formed by cutting out the same plate member as the weight beam 68 or welding another member to the weight beam 68. The leaf spring 63 is bent at the rear end portion of the weight beam 68 and has a free end extending forward. The weight beam 68 and the load beam 61 are connected to the support arm 60 by fixing the free end of the leaf spring 63 to the back side of the support arm 60 by laser beam welding or the like. The load support point 62 formed of a pair of protrusions is formed on the same plate member as the weight beam 68 by dimple processing by pressing.

  The position, shape, and weight of the weight member 66 are determined so that the center of gravity of the suspension including the magnetic head slider 64 coincides with the load support point. In this embodiment, the weight member 66 is the rear end portion of the load beam 61. A single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 100 μm is fixed to the surface opposite to the support arm 60 by, for example, laser beam welding.

  As described above, in the HAA of the present embodiment, the weight beam 68 which is a member different from the load beam 61 is fixed so as to be superimposed on the support arm 60 side surface of the rear end portion of the load beam 61. The weight beam 68 is provided with a leaf spring 63 and a load support point 62 composed of a pair of protrusions. In addition, the weight member 66 is fixed to the rear end portion of the load beam 61 and the surface opposite to the support beam 60. Since the weight beam 68 is formed with the projections constituting the load support point 62, the Z-height increases by the weight beam 68, but the weight beam 68 is kept in its thickness (according to the press). It is possible to increase the rigidity of the load beam 61 by increasing the plate thickness of the load beam 61 (in a state where the projection 62 having a sufficient height can be formed by dimple processing). Since the weight beam 68 is fixed to the surface of the load beam 61 on the support arm 60 side, and the weight member 66 is fixed to the surface of the load beam 61 opposite to the support beam 60, the weight member 66 has the entire thickness. Will protrude from the surface of the load beam 61. However, since the load beam 61 is also extended to the rear end of the weight member 66, the weight of that portion is added, so that the thickness of the weight member 66 is reduced. Can do. Therefore, a clearance B between the weight member 66 and the surface of the magnetic disk is secured. The clearance A on the support arm 60 side is also secured by an amount corresponding to the height of the protrusion 62. As a result, it is possible to obtain design freedom and high rigidity. Further, since the load beam 61 is extended to the rear end of the weight member 66, the rigidity of the rear end portion is increased, and the displacement can be reduced.

  The configuration other than the HAA in this embodiment is the same as that in the embodiment of FIG.

  According to the present embodiment, the tip balance structure is configured such that the suspension and magnetic head slider 64 on the front end side and the suspension and weight member 66 on the rear end side are balanced with the load support point as a fulcrum. Therefore, there is no need to balance the VCM for each HAA. Therefore, it is possible to simply provide a configuration in which a plurality of HAAs are superimposed and driven by one VCM.

  In the present embodiment, the load beam 61, the weight beam 68, and the weight member 66 are each constituted by separate plate members, and these are fixed to each other, but the load beam having the same structure as the present embodiment, The weight beam and the weight member may be formed by processing a laminate plate member of a resin layer and a plurality of metal layers. Also in this case, the load beam can have an optimum thickness different from that of the weight beam and the weight member because of the balance between rigidity and weight.

  FIG. 7 is a side view showing an HAA according to still another embodiment of the present invention.

  As shown in the figure, the HAA according to the present embodiment has a support arm 70 having a very high rigidity, a load beam 71, and a tip end portion of the load beam 71 superimposed on a rear end portion of the load beam 71 on the support arm 70 side. A suspension mainly composed of a weight beam 78, a flexure 75, and a wiring member (not shown), a magnetic head slider 74 attached to the tip of the suspension, and a leaf spring for generating a load. 73 and a weight member 76 which is fixed to the rear end portion on the surface opposite to the support arm of the weight beam 78 and for balancing the rotational moment.

  The suspension, the magnetic head slider 74, and the weight member 76 have a tip balance structure that swings in a direction substantially perpendicular to the surface of the magnetic disk with a load support point 72 formed of a pair of protrusions as a fulcrum. The suspension is connected to the support arm 70 by a leaf spring 73 and is in a so-called floating state that is not connected to the support arm 70 or other members except for the leaf spring 73 and the protrusion 72. Yes.

  The support arm 70 is made of a very rigid member, for example, a thick stainless steel plate having a thickness of about 150 to 250 μm.

  In the present embodiment, the load beam 71 is made of a single metal plate, such as a stainless steel plate (for example, SUS304TA) having a thickness higher than that of the flexure 75, for example, about 30 to 50 μm. A load dimple (projection) 77 for applying a load to the magnetic head slider 73 via the flexure 75 is formed at the tip of the load beam 71. The load beam 71 is further integrally formed with a leaf spring 73 at its rear end. More specifically, the leaf spring 73 is formed by cutting out the same plate member as the load beam 71 or welding another member to the load beam 71. The leaf spring 73 is bent at the rear end portion of the load beam 71 and has a free end extending forward. The load beam 71 and the weight beam 78 are connected to the support arm 70 by fixing the free end of the leaf spring 73 to the back side of the support arm 70 by laser beam welding or the like.

  In this embodiment, the flexure 75 is formed of a single metal plate such as an elastic stainless steel plate (for example, SUS304TA) having a thickness of about 20 to 30 μm. A soft tongue is formed at the tip of the flexure 75, and the magnetic head slider 74 is flexibly supported by this tongue to stabilize the flying posture. In the present embodiment, the flexure 75 is fixed on the load beam 71 by, for example, laser beam welding.

  On the flexure 75, although not shown, a trace conductor and connection pads for a thin film magnetic head element are formed as wiring members. The trace conductors, connection pads, and the like may be directly laminated on the surface of the flexure 75, or an FPC formed by laminating a trace conductor on a resin layer may be bonded to the surface of the flexure 75.

  In the present embodiment, the magnetic head slider 74 is formed with one thin film magnetic head element including a write head element and an MR read head element.

  In this embodiment, the weight beam 78 is formed of a single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 30 to 50 μm. The weight beam 78 has a front end portion which is a rear end portion of the load beam 71 and is superposed on a surface on the support arm 70 side, and is fixed by, for example, laser beam welding. Further, in the present embodiment, the weight beam 78 is integrally formed with a load support point 72 formed of a pair of protrusions. More specifically, the load support point 72 formed of a pair of protrusions is formed on the same plate member as the weight beam 78 by dimple processing by pressing.

  The position, shape, and weight of the weight member 76 are determined so that the center of gravity of the suspension including the magnetic head slider 74 coincides with the load support point. In this embodiment, the weight member 76 is the rear end of the weight beam 78. A single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 150 μm is fixed to the surface opposite to the support arm 70 by, for example, laser beam welding.

  As described above, in the HAA of the present embodiment, the weight beam 78, which is a member different from the load beam 71, is fixed so that at least a part of the weight beam 78 overlaps the surface of the rear end portion of the load beam 71 on the support arm 70 side. ing. The weight beam 78 is provided with a load support point 72 composed of a pair of protrusions, and the load beam 71 is provided with a leaf spring 73. Further, the weight member 76 is fixed to the rear end portion of the weight beam 78 and the surface opposite to the support beam 70. Since the protrusions constituting the load support point 72 are formed on the weight beam 78 and the leaf spring 73 is formed on the load beam 71, the height of the load support point 72 relative to the leaf spring 73 is the same as the weight beam 78. Accordingly, the pushing force of the load support point 72 can be increased. According to the structure of the present embodiment, the Z-height increases by the weight beam 78, but the thickness of the weight beam 78 is kept as it is (therefore, the dimple processing by the press has a sufficient height). It is also possible to increase the rigidity of the load beam 71 by increasing the thickness of the load beam 71 (in a state where the protrusion 72 can be formed). Since the weight beam 78 is fixed to the surface of the load beam 71 on the support arm 70 side and the weight member 76 is fixed to the surface of the weight beam 78 opposite to the support beam 70, the weight member 76 is attached to the load beam 71. Only the thickness obtained by subtracting the plate thickness protrudes from the surface of the load beam 71, and the clearance B between the weight member 76 and the surface of the magnetic disk is secured. The clearance A on the support arm 70 side is also secured by an amount corresponding to the height of the protrusion 72. As a result, it is possible to obtain design freedom and high rigidity.

  The configuration other than the HAA in this embodiment is the same as that in the embodiment of FIG.

  In addition, according to the present embodiment, the tip balance structure is configured such that the suspension and magnetic head slider 74 on the front end side and the suspension and weight member 76 on the rear end side balance with the load support point as a fulcrum. Therefore, there is no need to balance the VCM for each HAA. Therefore, it is possible to simply provide a configuration in which a plurality of HAAs are superimposed and driven by one VCM.

  FIG. 8 is a side view showing an HAA according to still another embodiment of the present invention.

  As shown in the figure, the HAA according to the present embodiment has a support arm 80 having a very high rigidity, a load beam 81, and a tip of the load beam 81 at the rear end on the surface opposite to the support arm 80. In order to generate a load, a suspension mainly composed of a weight beam 88, a flexure 85, and a wiring member (not shown), which are overlapped and fixed to each other, and a magnetic head slider 84 mounted on the tip of the suspension The plate spring 83 and a weight member 86 fixed to the rear end portion on the surface of the weight beam 88 on the support arm side are provided to balance the rotational moment.

  The suspension, the magnetic head slider 84, and the weight member 86 have a tip balance structure that swings in a direction substantially perpendicular to the magnetic disk surface with a load support point 82 formed of a pair of protrusions as a fulcrum. The suspension is connected to the support arm 80 by a leaf spring 83, and is not connected to the support arm 80 or other members except for the leaf spring 83 and the protrusion 82, and is in a so-called floating state. Yes.

  The support arm 80 is made of a very rigid member, for example, a thick stainless steel plate having a thickness of about 150 to 250 μm.

  In the present embodiment, the load beam 81 is made of a single metal plate, such as a stainless steel plate (for example, SUS304TA) having a thickness higher than that of the flexure 85, for example, about 30 to 50 μm. A load dimple (projection) 87 for applying a load to the magnetic head slider 83 through the flexure 85 is formed at the tip of the load beam 81. Further, in the present embodiment, the load beam 81 is integrally formed with a leaf spring 83 and a load support point 82 composed of a pair of protrusions. More specifically, the leaf spring 83 is formed by cutting out the same plate member as the load beam 81 or welding another member to the load beam 81. The leaf spring 83 is bent at the rear end portion of the load beam 81 and has a free end extending forward. The load beam 81 and the weight beam 88 are connected to the support arm 80 by fixing the free end of the leaf spring 83 to the back side of the support arm 80 by laser beam welding or the like. The load support point 82 formed of a pair of protrusions is formed on the same plate member as the load beam 81 by dimple processing by pressing.

  In this embodiment, the flexure 85 is formed of a single metal plate such as an elastic stainless steel plate (for example, SUS304TA) having a thickness of about 20 to 30 μm. A soft tongue is formed at the tip of the flexure 85, and the magnetic head slider 84 is flexibly supported by this tongue to stabilize the flying posture. In the present embodiment, the flexure 85 is fixed on the load beam 81 by, for example, laser beam welding.

  On the flexure 85, although not shown, a trace conductor and connection pads for a thin film magnetic head element are formed as wiring members. The trace conductors and connection pads may be directly laminated on the surface of the flexure 85, or FPC formed by laminating the trace conductor on the resin layer may be bonded to the surface of the flexure 85.

  In this embodiment, the magnetic head slider 84 is formed with one thin film magnetic head element including a write head element and an MR read head element.

  In this embodiment, the weight beam 88 is made of a single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 30 to 50 μm. The weight beam 88 has a front end portion which is a rear end portion of the load beam 81 and is superposed on a surface opposite to the support arm 80 and is fixed by, for example, laser beam welding.

  The position, shape, and weight of the weight member 86 are determined so that the center of gravity of the suspension including the magnetic head slider 84 coincides with the load support point. In this embodiment, the weight member 86 is the rear end portion of the weight beam 88. A single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 100 μm is fixed to the surface on the support arm 80 side by, for example, laser beam welding.

  Thus, in the HAA of the present embodiment, the weight beam 88, which is a member different from the load beam 81, is at least partially overlapped on the surface opposite to the support arm 80 at the rear end of the load beam 81. It is stuck to. The weight member 86 is fixed to a rear end portion of the weight beam 88 and a surface on the support beam 80 side. On the other hand, a leaf spring 83 and a load support point 82 composed of a pair of protrusions are provided on the load beam 81. Since the weight beam 88 serves to reinforce the periphery of the leaf spring 83 and the load support point 82 of the load beam 81 and to connect the weight member 86 to the load beam 81, it is not necessary to increase the thickness of the plate. For this reason, even if the weight beam 88 is fixed to the surface of the load beam 81 opposite to the support arm 80, the amount of protrusion from the surface of the load beam 81 is small, and the clearance between the weight beam 88 and the surface of the magnetic disk is small. B is secured. On the other hand, the clearance A on the support arm 80 side also protrudes from the surface of the load beam 81 only by the thickness of the weight member 86 minus the thickness of the load beam 81, so that the weight member is directly fixed to the load beam. This is advantageous compared to As a result, a certain degree of design freedom can be obtained.

  The configuration other than the HAA in this embodiment is the same as that in the embodiment of FIG.

  According to the present embodiment, the tip balance structure is configured such that the suspension and magnetic head slider 84 on the front end side and the suspension and weight member 86 on the rear end side are balanced with the load support point as a fulcrum. Therefore, there is no need to balance the VCM for each HAA. Therefore, it is possible to simply provide a configuration in which a plurality of HAAs are superimposed and driven by one VCM.

  FIG. 9 is a side view showing a HAA in still another embodiment of the present invention, FIG. 10 is an exploded perspective view showing a part of the HAA in the embodiment of FIG. 9, and FIG. 11 is in the embodiment of FIG. It is the disassembled perspective view which looked at a part of HAA from the direction different from FIG.

  As shown in these drawings, the HAA according to the present embodiment has a support arm 90 having a very high rigidity, a load beam 91, and a rear end portion of the load beam 91 on the surface opposite to the support arm 90. A suspension mainly composed of a weight beam 98, a flexure 95, and a wiring member (not shown) on which the front ends are fixed and superposed, a magnetic head slider 94 mounted on the front end of the suspension, and a load are generated. And a weight member 96 provided at the rear end of the weight beam 98 for balancing the rotational moment.

  The suspension, the magnetic head slider 94, and the weight member 96 have a tip balance structure that swings in a direction substantially perpendicular to the magnetic disk surface with a load support point 92 formed by a pair of protrusions as a fulcrum. The suspension is connected to the support arm 90 by a leaf spring 93, and is in a so-called floating state that is not connected to the support arm 90 or other members except for the leaf spring 93 and the protrusion 92. Yes.

  The support arm 90 is made of a very rigid member, for example, a thick stainless steel plate of about 150 to 250 μm.

  In this embodiment, the load beam 91 is made of a single metal plate, such as a stainless steel plate (for example, SUS304TA) having a thickness higher than that of the flexure 95, for example, about 30 to 50 μm. A load dimple (projection) 97 for applying a load to the magnetic head slider 93 via the flexure 95 is formed at the tip of the load beam 91. Furthermore, in the present embodiment, the load beam 91 is integrally formed with a leaf spring 93 and a load support point 92 made up of a pair of protrusions. More specifically, the leaf spring 93 is formed by cutting out the same plate member as the load beam 91 or welding another member to the load beam 91. The leaf spring 93 is bent at the rear end portion of the load beam 91 and has a free end extending forward. The load beam 91 and the weight beam 98 are connected to the support arm 90 by fixing the free end of the leaf spring 93 to the back side of the support arm 90 by laser beam welding or the like. The load supporting point 92 formed of a pair of protrusions is formed on the same plate member as the load beam 91 by dimple processing by pressing.

  In this embodiment, the flexure 95 is formed of a single metal plate such as an elastic stainless steel plate (for example, SUS304TA) having a thickness of about 20 to 30 μm. A soft tongue is formed at the tip of the flexure 95, and the magnetic head slider 94 is flexibly supported by this tongue to stabilize the flying posture. In the present embodiment, the flexure 95 is fixed on the load beam 91 by, for example, laser beam welding.

  On the flexure 95, although not shown, a trace conductor and connection pads for a thin film magnetic head element are formed as wiring members. The trace conductors and connection pads may be directly laminated on the surface of the flexure 95, or FPC formed by laminating the trace conductor on the resin layer may be bonded to the surface of the flexure 95.

  In this embodiment, the magnetic head slider 94 is formed with one thin film magnetic head element including a write head element and an MR read head element.

  In this embodiment, the weight beam 98 is formed of a single metal plate such as a stainless steel plate (for example, SUS304TA) having a thickness of about 30 to 50 μm. The weight beam 98 has a front end portion which is a rear end portion of the load beam 91 and is superposed on a surface opposite to the support arm 90 to be fixed by, for example, laser beam welding.

  The position, shape and weight of the weight member 96 are determined so that the center of gravity of the suspension including the magnetic head slider 94 coincides with the load support point. In this embodiment, resin is applied to the rear end of the weight beam 98. It is integrally formed by molding.

  Thus, in the HAA of the present embodiment, the weight beam 98, which is a member different from the load beam 91, is at least partially overlapped on the surface opposite to the support arm 90 at the rear end portion of the load beam 91. It is stuck to. The weight member 96 is formed of a resin mold formed at the rear end portion of the weight beam 98. A leaf spring 93 and a load support point 92 made up of a pair of protrusions are provided on the load beam 91. Since the weight beam 98 is also extended to the vicinity of the rear end of the weight member 96 which is a resin mold, the corresponding weight is added, so that the plate thickness of the weight member 96 can be reduced. Therefore, a clearance B between the weight member 96 and the surface of the magnetic disk is secured. On the other hand, the clearance A on the support arm 90 side is also sufficiently secured because the weight member 96 protrudes from the surface of the load beam 91 only by the thickness obtained by subtracting the plate thickness of the load beam 91. As a result, a certain degree of design freedom can be obtained.

  Particularly advantageous in the present embodiment is that the load beam 91 on which the leaf spring 93 as the load generating means is formed and the weight beam 98 on which the weight member 96 is formed are separate members that are independent from each other. After that, it is only necessary to fix them to each other. That is, in the case of an HAA having this kind of tip balance structure, the most serious problem is fluctuation of the weight member. However, if the weight member is formed of a resin mold, it is possible to achieve both bending rigidity and balancing. Will be convenient. However, according to the configuration in which the resin is directly molded at the rear end portion of the load beam as in the prior art, due to restrictions in manufacturing the suspension, the mold processing is performed on the load beam in which leaf springs and load support points are formed in advance. This has to be done, and it is necessary to satisfy strict standards such as the flatness and pressing method of the mold of the mold, which greatly increases the cost. In many cases, the mold processing is performed by a mold processor who has little experience in handling the suspension, so there is a possibility that quality degradation of the load beam may occur at this stage. On the other hand, if the load beam 91 and the weight beam 98 are separate members as in this embodiment, a weight member 96 made of a resin mold is formed on the weight beam 98, and then the load generating means 93 is formed. Since the weight beam 98 can be fixed to the rear end portion of the load beam 91, the load beam 91 is not handled during the resin molding process. Therefore, when the weight member 96 is formed, there is no inconvenience that the quality of the load beam 91 on which the load generating means 93 such as a leaf spring or the load supporting point 92 is formed is deteriorated. On the contrary, in the process of forming the weight member 96, it is not necessary to consider the handling of the load beam 91, so that the process can be simplified and the manufacturing cost can be reduced.

  The above-mentioned restrictions in manufacturing suspensions are that suspensions are usually manufactured in a plurality of series in order to improve product quality and shorten tact time, and individually provide leaf springs and load support point projections. It means not forming in the separated state.

  The configuration other than the HAA in this embodiment is the same as that in the embodiment of FIG.

  According to the present embodiment, the tip balance structure is configured such that the suspension and magnetic head slider 94 on the front end side and the suspension and weight member 96 on the rear end side balance with the load supporting point as a fulcrum. Therefore, there is no need to balance the VCM for each HAA. Therefore, it is possible to simply provide a configuration in which a plurality of HAAs are superimposed and driven by one VCM.

  In the HAA having the tip balance structure in which the weight beam is provided with a leaf spring and a load support point as shown in FIGS. 4 and 6, the load beam is resin-molded to increase the rigidity and the laminate material is used. Even when the load beam is etched, if the weight beam and the load beam are processed as separate members and then fixed to each other, the quality of the weight beam will not be degraded, and the load beam molding and etching process will be simplified. The manufacturing cost can be reduced.

  In the embodiment described above, one magnetic disk and one or more HAAs are provided in the magnetic disk device, but a plurality of magnetic disks and a plurality of HAAs may be provided. In this case, a plurality of HAAs will be attached to a common bearing housing and driven to rotate horizontally by one VCM.

  As described above, the present invention has been described using the HAA and the magnetic disk device provided with the thin film magnetic head element. However, the present invention is not limited to such an HAA and the magnetic disk device, but other than the thin film magnetic head element. It is apparent that the present invention can also be applied to HAA and disk devices having a head element such as an optical head element.

  All the embodiments described above are illustrative of the present invention and are not intended to be limiting, and the present invention can be implemented in other various modifications and changes. Therefore, the scope of the present invention is defined only by the claims and their equivalents.

It is a side view for demonstrating the schematic structure of HAA proposed by this inventor. It is a figure which represents typically the operation | movement of the front-end | tip part balance structure of HAA shown in FIG. 1 is a plan view schematically showing a configuration of a main part of a magnetic disk drive device according to an embodiment of the present invention. FIG. 4 is a side view showing a HAA attached to the magnetic disk drive device of FIG. 3. It is a side view which compares and shows the conventional HAA and the HAA of FIG. It is a side view which shows HAA in other embodiment of this invention. It is a side view which shows HAA in further another embodiment of this invention. It is a side view which shows HAA in further another embodiment of this invention. It is a side view which shows HAA in further another embodiment of this invention. It is a disassembled perspective view which shows a part of HAA in embodiment of FIG. It is the disassembled perspective view which looked at a part of HAA in embodiment of FIG. 9 from the direction different from FIG.

Explanation of symbols

10, 33, 40, 60, 70, 80, 90 Support arm 11, 34, 41, 61, 71, 81, 91 Load beam 12, 42, 62, 72, 82, 92 Load support point 13, 43, 63, 73, 83, 93 Leaf springs 14, 44, 64, 74, 84, 94 Magnetic head sliders 15, 45, 65, 75, 85, 95 Flexures 16, 46, 66, 76, 86, 96 Weight members 17, 47, 67, 77, 87, 97 Load dimple 18 Fixed point 19, 49 Magnetic disk 48, 68, 78, 88, 98 Weight beam 31 Axis 32 HAA
35 VCM coil 36 Bearing housing

Claims (31)

  It has a highly rigid support arm and a balance structure that can swing in a direction intersecting the recording medium surface with a load support point set between the support arm as a fulcrum, and has at least one head element A suspension for supporting the head slider at the tip, load generating means for generating a load for pressing the head slider toward the recording medium surface via the load support point, and a rear end of the suspension And a weight member for causing the center of gravity of the suspension including the head slider to coincide with the load supporting point, and the suspension has a flexure having elasticity for supporting the head slider, The load beam that supports the flexure and at least a portion of the load beam overlaps the rear end of the load beam. Formed has a weight-beam, the head supporting mechanism, wherein the weight member is provided on the rear portion or the weight beam of the load beam.   The head support mechanism according to claim 1, wherein the load support point is a protrusion provided on the weight beam.   3. The head support mechanism according to claim 1, wherein the load generation unit is formed integrally with the weight beam, and includes a leaf spring connected to the support arm.   The head support mechanism according to claim 1, wherein the load support point is a protrusion provided on the load beam.   5. The head support mechanism according to claim 1, wherein the load generation unit is formed integrally with the load beam and includes a leaf spring connected to the support arm.   6. The head support mechanism according to claim 1, wherein the weight beam is provided on a surface of the load beam on the support arm side.   The head support mechanism according to claim 6, wherein the weight member is provided on a surface of the weight beam opposite to the support arm.   The head support mechanism according to claim 6, wherein the weight member is provided on a surface of the load beam opposite to the support arm.   6. The head support mechanism according to claim 1, wherein the weight beam is provided on a surface of the load beam opposite to the support arm. 7.   The head support mechanism according to claim 9, wherein the weight member is provided on a surface of the weight beam on the support arm side.   11. The head support mechanism according to claim 1, wherein the weight beam and the load beam are each constituted by a single plate member and are fixed to each other by welding.   The head support mechanism according to claim 11, wherein the weight member is formed of a plate member and is fixed to the weight beam or the load beam by welding.   The head support mechanism according to claim 11, wherein the weight member is made of a molded resin.   The head support mechanism according to any one of claims 1 to 10, wherein the weight beam and the load beam are configured by a laminate plate member of a resin layer and a metal layer.   15. The head support mechanism according to claim 14, wherein the weight member is constituted by the laminate plate member.   The head according to any one of claims 1 to 15, further comprising horizontal rotation bearing means for rotatably supporting the support arm and the suspension in a direction parallel to the surface of the recording medium. Support mechanism.   The head support mechanism according to claim 16, wherein the support arm is fixed to the horizontal rotation bearing means.   18. The actuator according to claim 16, further comprising actuator means fixed to the horizontal rotation bearing means and for rotating the support arm and the suspension in a direction parallel to the surface of the recording medium. The head support mechanism described.   19. A head arm comprising: the head support mechanism according to claim 1; and a head slider having at least one head element mounted on the suspension of the head support mechanism. assembly.   A disk device comprising at least one recording medium and at least one head arm assembly according to claim 19.   A plurality of recording media, the plurality of head arm assemblies in which the horizontal rotation bearing means is common, and the common horizontal rotation bearing means are fixed, and the plurality of head arm assemblies are parallel to the surface of the recording medium. 21. The disk device according to claim 20, further comprising a single actuator means for rotating in any direction. It has a highly rigid support arm and a balance structure that can swing in a direction intersecting the surface of the recording medium with a load support point set between the support arm as a fulcrum, and has at least one head element A head support mechanism comprising: a suspension for supporting a head slider at a tip portion; and a load generating means for generating a load for pressing the head slider toward the recording medium surface through the load support point. A manufacturing method comprising:
A weight member for making the center of gravity of the suspension coincide with the load support point is fixed to the weight beam,
The weight beam to which the weight member is fixed is fixed to the rear end portion of the load beam on which the load generating means is formed, so that at least a part of the weight beam overlaps,
A method of manufacturing a head support mechanism, wherein the load generating means of the load beam to which the weight beam is fixed is fixed to the support arm.   The manufacturing method according to claim 22, wherein a pair of protrusions are formed as the load support points on the load beam.   The manufacturing method according to claim 22 or 23, wherein a leaf spring as the load generating means is formed integrally with the load beam.   The manufacturing method according to any one of claims 22 to 24, wherein the weight beam is provided on a surface of the load beam on the support arm side.   The manufacturing method according to claim 25, wherein the weight member is provided on a surface of the weight beam opposite to the support arm.   The manufacturing method according to any one of claims 22 to 24, wherein the weight beam is provided on a surface of the load beam opposite to the support arm.   28. The manufacturing method according to claim 27, wherein the weight member is provided on a surface of the weight beam on the support arm side.   The manufacturing method according to any one of claims 22 to 28, wherein the weight beam and the load beam are each formed by a single plate member and are fixed to each other by welding.   30. The manufacturing method according to claim 29, wherein the weight member is formed of a plate member, and the weight member is fixed to the weight beam by welding. 30. The manufacturing method according to claim 29, wherein the weight member is formed of a molded resin.

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