JP2005184297A - Method for stabilizing output wave of high frequency oscillator and waveguide converter - Google Patents

Method for stabilizing output wave of high frequency oscillator and waveguide converter Download PDF

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JP2005184297A
JP2005184297A JP2003420522A JP2003420522A JP2005184297A JP 2005184297 A JP2005184297 A JP 2005184297A JP 2003420522 A JP2003420522 A JP 2003420522A JP 2003420522 A JP2003420522 A JP 2003420522A JP 2005184297 A JP2005184297 A JP 2005184297A
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waveguide
frequency oscillator
reference signal
directional coupler
function
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Eiichiro Fujiwara
栄一郎 藤原
Naohiro Tanaka
直浩 田中
Tetsujiro Izumi
哲次郎 泉
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IHI Aerospace Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To stabilize the output wave from a high frequency oscillator while realizing reduction in size and weight of the apparatus. <P>SOLUTION: When the output wave from a high frequency oscillator is stabilized by bringing the high frequency oscillator into oscillation state by feeding a current from a high voltage power supply and injecting a highly stable reference signal into a microwave being inputted from the input end 10 of the high frequency oscillator, a waveguide converter 1 having the function of a directional coupler integrally is employed for injecting the highly stable reference signal from the high frequency oscillator into the microwave through the waveguide converter 1. More specifically, one waveguide 2 and the other waveguide 3 are bonded while intersecting substantially perpendicularly and a waveguide converter 1 interconnecting both waveguides 2 and 3 through interconnection holes 4 provided in both bonding faces 2a and 3a is employed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、高周波発振器から出力されるマイクロ波を安定させるのに利用される高周波発振器の出力波安定化方法及び導波管変換器に関するものである。   The present invention relates to a method for stabilizing an output wave of a high-frequency oscillator and a waveguide converter that are used to stabilize a microwave output from the high-frequency oscillator.

従来、高周波発振器から出力されるマイクロ波を安定させる場合、例えば、高周波発振器毎にサーキュレータ(マグネットにより電波の進行方向を誘導するもの)を接続し、このサーキュレータによって高周波発振器から出力されるマイクロ波に外部から高安定な基準信号を入力することで、出力波の安定化を図るようにしていた。
特開2002−43848号公報 「ミリ波技術の手引きと展開」P.217 REALIZE社
Conventionally, when stabilizing a microwave output from a high-frequency oscillator, for example, a circulator (which induces a traveling direction of a radio wave by a magnet) is connected to each high-frequency oscillator, and the microwave output from the high-frequency oscillator by this circulator The output wave is stabilized by inputting a highly stable reference signal from the outside.
JP 2002-43848 A “Guidelines and Deployment of Millimeter-wave Technology” p. 217 REALIZE

ところが、従来において、高周波発振器からのマイクロ波に基準信号を注入して合成するのに質量の大きいサーキュレータを使用していることから、機器の大型化を招いてしまううえ、温度及びマグネットの影響を無視することができないという問題があった。   However, conventionally, a circulator with a large mass is used to inject and synthesize a reference signal into a microwave from a high-frequency oscillator, resulting in an increase in the size of the device and the influence of temperature and magnets. There was a problem that it could not be ignored.

また、複数の高周波発振器の出力波安定を考えた場合、注入する同期基準信号を分配して、高周波発振器毎に設けたサーキュレータに入力する必要があり、質量の大きいサーキュレータを多数用いる分だけ大型化及び重量の増加を余儀なくされるという問題があった。   Also, when considering the output wave stability of multiple high-frequency oscillators, it is necessary to distribute the synchronization reference signal to be injected and input it to the circulator provided for each high-frequency oscillator. In addition, there is a problem that the weight is forced to increase.

さらに、高周波発振器の出力コネクタから導波管に変換するための変換コネクタが別途必要となり、この変換コネクタを多数用いることによる大型化及び重量の増加も無視できないという問題があり、これらの問題を解決することが従来の課題となっていた。   Furthermore, a separate conversion connector is required to convert the output connector of the high-frequency oscillator to the waveguide, and there is a problem that the increase in size and weight due to the use of a large number of these conversion connectors cannot be ignored. This has been a conventional problem.

本発明は、上記した従来の課題に着目してなされたもので、機器の小型軽量化を実現しつつ、高周波発振器の出力波を安定させることが可能である高周波発振器の出力波安定化方法及び導波管変換器を提供することを目的としている。   The present invention has been made paying attention to the above-described conventional problems, and can stabilize the output wave of the high-frequency oscillator while realizing the reduction in size and weight of the device, and the output wave stabilization method of the high-frequency oscillator and An object is to provide a waveguide converter.

本発明の高周波発振器の出力波安定化方法は、高電圧電源により高周波発振器に電流を流して発振状態とし、この高周波発振器から出力されるマイクロ波に高安定な基準信号を注入合成して出力波を安定させるに際して、上記高周波発振器から導波管変換器を介して出力されるマイクロ波に高安定な基準信号を注入するのに方向性結合器の機能を一体で有する上記導波管変換器を用いる構成としたことを特徴としており、この高周波発振器の出力波安定化方法の構成を前述した従来の課題を解決するための手段としている。   The method of stabilizing the output wave of the high-frequency oscillator of the present invention is such that a high-voltage power source supplies a current to the high-frequency oscillator to bring it into an oscillation state, and a high-stable reference signal is injected and synthesized into the microwave output from the high-frequency oscillator. The waveguide converter having the function of a directional coupler for injecting a highly stable reference signal into the microwave output from the high-frequency oscillator via the waveguide converter. The configuration of the output wave stabilization method of the high-frequency oscillator is used as a means for solving the above-described conventional problems.

一方、本発明の導波管変換器は、請求項1に記載の高周波発振器の出力波安定化方法において、高周波発振器から出力されるマイクロ波に高安定な基準信号を注入するのに用いられる方向性結合器の機能を有する導波管変換器であって、2本の導波管を備え、一方の導波管と他方の導波管とを互いに略直交させて接合すると共に、双方の接合面に設けた連通孔を介して一方の導波管と他方の導波管とを連通させてある構成としたことを特徴としており、この方向性結合器の機能を有する導波管変換器の構成を前述した従来の課題を解決するための手段としている。   On the other hand, the waveguide converter of the present invention is a direction used for injecting a highly stable reference signal into the microwave output from the high frequency oscillator in the output wave stabilization method of the high frequency oscillator according to claim 1. A waveguide converter having the function of a sexual coupler, comprising two waveguides, one waveguide and the other waveguide being joined substantially orthogonal to each other, and joining the two It is characterized in that one waveguide and the other waveguide are communicated with each other through a communication hole provided on the surface, and the waveguide converter having the function of this directional coupler The configuration is a means for solving the above-described conventional problems.

本発明の請求項3の導波管変換器において、2個の端子を具備し、一方の端子を基準信号入力用とすると共に、他方の端子を隣接する高周波発振器への基準信号出力用として使用する構成とし、請求項4の導波管変換器において、一方の導波管及び他方の導波管はそれぞれ同一の矩形断面を有する角管状を成し、正方形状を成す接合面の対角線上に位置する長孔及びこれと略直交する長孔から成る十字孔を連通孔としている構成とし、請求項5の導波管変換器において、一方の導波管及び他方の導波管はいずれも金属材料又は両導波管の各内部に金属メッキが施してある非金属材料から成っている構成とし、請求項6の導波管変換器において、高周波発振器に一端側を接続させた導波管の他端側を湾曲状反射板で閉塞してある構成としている。   The waveguide converter according to claim 3 of the present invention is provided with two terminals, and one terminal is used for inputting a reference signal and the other terminal is used for outputting a reference signal to an adjacent high-frequency oscillator. 5. The waveguide converter according to claim 4, wherein each of the one waveguide and the other waveguide has a rectangular tube shape having the same rectangular cross section, and is on the diagonal line of the joint surface forming the square shape. 6. A waveguide converter according to claim 5, wherein a cross hole comprising a long hole positioned and a long hole substantially orthogonal to the long hole is used as a communicating hole, and one waveguide and the other waveguide are both made of metal. 7. The waveguide converter according to claim 6, wherein the waveguide is made of a material or a non-metallic material with metal plating inside each of the waveguides, and one end side of the waveguide converter is connected to the high-frequency oscillator. The other end is closed with a curved reflector.

本発明の高周波発振器の出力波安定化方法では、上記した構成としているので、機器の大型化及び重量の増加を招くことなく、高周波発振器の出力波の安定化を実現することが可能であるという非常に優れた効果がもたらされる。   In the method for stabilizing the output wave of the high-frequency oscillator of the present invention, since it has the above-described configuration, it is possible to realize stabilization of the output wave of the high-frequency oscillator without causing an increase in size and weight of the device. A very good effect is brought about.

また、本発明の導波管変換器では、上記した構成としていることから、高周波発振器の出力波の安定化を図るにあたって、機器の小型化及び重量の低減を実現することが可能であるという非常に優れた効果がもたらされる。   In addition, since the waveguide converter of the present invention has the above-described configuration, it is possible to realize downsizing and weight reduction of the device when stabilizing the output wave of the high-frequency oscillator. Has an excellent effect.

本発明の請求項3の導波管変換器では、上記した構成としているため、複数の高周波発振器の出力波を安定化させることができ、本発明の請求項4の導波管変換器では、上記した構成としているので、高周波発振器から出力されるマイクロ波に対する高安定な基準信号の注入を効率良く行うことができ、本発明の請求項5の導波管変換器では、上記した構成としたから、機器のより一層の軽量化を実現することが可能であり、本発明の請求項6の導波管変換器では、上記した構成としているため、通過周波数の広帯域化が可能となって、高周波発振器の変動に伴う出力マイクロ波の劣化を低減することができるという非常に優れた効果がもたらされる。   Since the waveguide converter according to claim 3 of the present invention has the above-described configuration, the output waves of a plurality of high-frequency oscillators can be stabilized. In the waveguide converter according to claim 4 of the present invention, Since it has the above-described configuration, it is possible to efficiently inject a highly stable reference signal to the microwave output from the high-frequency oscillator, and the waveguide converter according to claim 5 of the present invention has the above-described configuration. Therefore, it is possible to further reduce the weight of the device, and since the waveguide converter according to claim 6 of the present invention has the above-described configuration, the pass frequency can be widened. A very excellent effect is obtained that the degradation of the output microwave accompanying the fluctuation of the high-frequency oscillator can be reduced.

本発明において、重量増の要因であるサーキュレータを排し、導波管変換器に方向性結合器の機能を持たせて高安定な基準信号の注入同期を行うことで、小型軽量化を実現した。   In the present invention, the circulator, which is the cause of weight increase, is eliminated, and the waveguide converter has the function of a directional coupler to perform injection locking of a highly stable reference signal, thereby realizing a reduction in size and weight. .

以下、本発明を図面に基づいて説明する。   Hereinafter, the present invention will be described with reference to the drawings.

図1〜図3は本発明に係わる方向性結合器の機能を有する導波管変換器の一実施例を示しており、図1に示すように、この導波管変換器1は、2本の導波管2,3を備えており、高周波発振器入力端10に一端側を接続させた一方の導波管2と他方の導波管3とを互いに略直交させて接合すると共に、双方の接合面2a,3aに設けた連通孔4を介して一方の導波管2と他方の導波管3とを連通させて成っている。   1 to 3 show an embodiment of a waveguide converter having the function of a directional coupler according to the present invention. As shown in FIG. And one waveguide 2 whose one end is connected to the high-frequency oscillator input end 10 and the other waveguide 3 are joined substantially orthogonally to each other. One waveguide 2 and the other waveguide 3 are communicated with each other through a communication hole 4 provided in the joint surfaces 2a and 3a.

この場合、一方の導波管2及び他方の導波管3はいずれも非金属材料から成り、両導波管2,3の各内部には金属メッキが施してあって、それぞれ同一の矩形断面を有する角管状を成している。そして、連通孔4は、正方形状を成す接合面2a,3aの対角線上に位置する長孔4a及びこれと略直交する長孔4bから成る十字孔をとして形成してあり、この実施例では、接合面2a,3aに2個の連通孔4,4を配置している。なお、連通孔4の個数及び大きさで結合の度合いが決定される。なお、一方の導波管2及び他方の導波管3をいずれも金属材料から成るものとしても差し支えない。   In this case, the one waveguide 2 and the other waveguide 3 are both made of a non-metallic material, and the inside of each of the waveguides 2 and 3 is metal-plated and has the same rectangular cross section. It has a rectangular tube shape. The communication hole 4 is formed as a cross hole composed of a long hole 4a located on a diagonal line of the joining surfaces 2a and 3a having a square shape and a long hole 4b substantially orthogonal thereto, and in this embodiment, Two communication holes 4 and 4 are arranged on the joint surfaces 2a and 3a. The degree of coupling is determined by the number and size of the communication holes 4. Note that both the one waveguide 2 and the other waveguide 3 may be made of a metal material.

また、高周波発振器入力端10に一端側を接続させた一方の導波管2の他端側を湾曲状反射板5で閉塞してあり、他方の導波管3に設けた2個の端子6,7のうちの一方の端子6を基準信号入力用とすると共に、他方の端子7を隣接する高周波発振器への基準信号出力用として使用するようにしている。なお、当然のことながら、反射板5を直線状としても勿論動作する。   Further, the other end side of one waveguide 2 whose one end is connected to the high-frequency oscillator input end 10 is closed with a curved reflector 5, and two terminals 6 provided on the other waveguide 3. , 7 is used for inputting a reference signal, and the other terminal 7 is used for outputting a reference signal to an adjacent high-frequency oscillator. Needless to say, the reflector 5 operates as a straight line.

そこで、高周波発振器を高周波発振器入力端10に接続した時の高周波発振器のフリーラン時におけるスペクトラム波形(図4に示す)と、上記導波管変換器1を用いて高周波発振器入力端10に入力するマイクロ波に高安定な基準信号を注入した場合のスペクトラム波形(図5に示す)とを比較したところ、両図の各波形から明らかなように、この実施例における導波管変換器1を用いた基準信号の注入によって、出力波の安定化が図られていることが立証できた。   Therefore, a spectrum waveform (shown in FIG. 4) at the time of free-running of the high frequency oscillator when the high frequency oscillator is connected to the high frequency oscillator input end 10 and the waveguide converter 1 are used for input to the high frequency oscillator input end 10. When the spectrum waveform (shown in FIG. 5) when a highly stable reference signal is injected into the microwave is compared, as is apparent from the waveforms in both figures, the waveguide converter 1 in this embodiment is used. It was proved that the output wave was stabilized by the injection of the reference signal.

上記した方向性結合器の機能を有する導波管変換器1では、一方の導波管2と他方の導波管3とを互いに略直交させて接合し、双方の接合面2a,3aに設けた連通孔4を介して両導波管2,3を連通させているので、高周波発振器入力端10からの入力波の安定化を図るにあたって、機器の小型化及び重量の低減を実現することが可能である。   In the waveguide converter 1 having the function of the directional coupler described above, one waveguide 2 and the other waveguide 3 are joined so as to be substantially orthogonal to each other, and provided on both joining surfaces 2a and 3a. Since the waveguides 2 and 3 are communicated with each other through the communication hole 4, it is possible to reduce the size and weight of the device when stabilizing the input wave from the high-frequency oscillator input end 10. Is possible.

また、上記した方向性結合器の機能を有する導波管変換器1では、他方の導波管3の2個の端子6,7のうちの一方の端子6を基準信号入力用とし、他方の端子7を隣接する高周波発振器への基準信号出力用として使用するようにしているので、複数の高周波発振器の出力波を安定化させることができ、上記した導波管変換器1では、連通孔4を十字孔をとして形成しているので、高周波発振器入力端10から入力されたマイクロ波に対する高安定な基準信号の注入を効率良く行うことができる。   In the waveguide converter 1 having the function of the directional coupler described above, one terminal 6 of the two terminals 6 and 7 of the other waveguide 3 is used for reference signal input, and the other Since the terminal 7 is used for outputting the reference signal to the adjacent high-frequency oscillator, the output waves of the plurality of high-frequency oscillators can be stabilized. In the waveguide converter 1 described above, the communication hole 4 Is formed as a cross hole, so that a highly stable reference signal can be efficiently injected into the microwave input from the high-frequency oscillator input terminal 10.

さらに、上記した導波管変換器1では、非金属材料から成る一方の導波管2及び他方の導波管3の各内部に金属メッキを施しているので、機器のより一層の軽量化を実現することが可能であり、加えて、上記した導波管変換器1では、高周波発振器入力端10に一端側を接続させた一方の導波管2の他端側を湾曲状反射板5で閉塞しているので、通過周波数の広帯域化が可能となって、高周波発振器入力端10に入力する信号の変動に伴う出力マイクロ波の劣化を低減することができる。   Furthermore, in the waveguide converter 1 described above, the metal plating is applied to the inside of each of the one waveguide 2 and the other waveguide 3 made of a non-metallic material. In addition, in the above-described waveguide converter 1, the other end side of one waveguide 2 whose one end side is connected to the high-frequency oscillator input end 10 is connected to the curved reflector 5. Since it is blocked, it is possible to widen the pass frequency, and it is possible to reduce the deterioration of the output microwave due to the fluctuation of the signal input to the high-frequency oscillator input terminal 10.

本発明の高周波発振器の出力波安定化方法及び導波管変換器では、機器の大型化及び重量の増加を招くことなく、高周波発振器の出力波の安定化を実現することが可能であることから、宇宙における太陽発電システムに用いたり、極地や被災地における観測機器への電力送電に用いたり、高密度プラズマ発生装置における周波数安定化回路やレーダの安定化回路に用いたりすることができる。   In the output wave stabilization method and the waveguide converter of the high frequency oscillator of the present invention, it is possible to achieve stabilization of the output wave of the high frequency oscillator without causing an increase in size and weight of the device. It can be used for solar power generation systems in space, for power transmission to observation equipment in polar regions and disaster areas, and for frequency stabilization circuits and radar stabilization circuits in high-density plasma generators.

本発明の導波管変換器の一実施例を示す平面説明図である。(実施例1)It is plane explanatory drawing which shows one Example of the waveguide converter of this invention. (Example 1) 図1における導波管変換器の正面説明図である。(実施例1)It is front explanatory drawing of the waveguide converter in FIG. (Example 1) 図1における導波管変換器の側面説明図である。(実施例1)It is side surface explanatory drawing of the waveguide converter in FIG. (Example 1) 高周波発振器のフリーラン時におけるスペクトラム波形を示すグラフである。It is a graph which shows the spectrum waveform at the time of the free run of a high frequency oscillator. 本発明の導波管変換器を用いて高周波発振器から出力されるマイクロ波に高安定な基準信号を注入した場合のスペクトラム波形を示すグラフである。It is a graph which shows a spectrum waveform at the time of inject | pouring a highly stable reference signal into the microwave output from a high frequency oscillator using the waveguide converter of this invention.

符号の説明Explanation of symbols

1 方向性結合器の機能を有する導波管変換器
2 一方の導波管
2a,3a 接合面
3 他方の導波管
4 連通孔
5 湾曲状反射板
6 基準信号入力用
7 基準信号出力用
10 高周波発振器入力端
DESCRIPTION OF SYMBOLS 1 Waveguide converter which has a function of a directional coupler 2 One waveguide 2a, 3a Joint surface 3 The other waveguide 4 Communication hole 5 Curved reflecting plate 6 For reference signal input 7 For reference signal output 10 High frequency oscillator input

Claims (6)

高電圧電源により高周波発振器に電流を流して発振状態とし、この高周波発振器から出力されるマイクロ波に高安定な基準信号を注入合成して出力波を安定させるに際して、上記高周波発振器から導波管変換器を介して出力されるマイクロ波に高安定な基準信号を注入するのに方向性結合器の機能を一体で有する上記導波管変換器を用いることを特徴とする高周波発振器の出力波安定化方法。   When a high-voltage power supply is used to cause a high-frequency oscillator to oscillate and a microwave is output from this high-frequency oscillator, a highly stable reference signal is injected and synthesized to stabilize the output wave. Stabilization of the output wave of a high-frequency oscillator characterized by using the above-mentioned waveguide converter having the function of a directional coupler to inject a highly stable reference signal into a microwave output via a transformer Method. 請求項1に記載の高周波発振器の出力波安定化方法において、高周波発振器から出力されるマイクロ波に高安定な基準信号を注入するのに用いられる方向性結合器の機能を有する導波管変換器であって、2本の導波管を備え、一方の導波管と他方の導波管とを互いに略直交させて接合すると共に、双方の接合面に設けた連通孔を介して一方の導波管と他方の導波管とを連通させてあることを特徴とする方向性結合器の機能を有する導波管変換器。   2. A method of stabilizing an output wave of a high-frequency oscillator according to claim 1, wherein the waveguide converter has a function of a directional coupler used to inject a highly stable reference signal into a microwave output from the high-frequency oscillator. And having two waveguides, one waveguide and the other waveguide are joined substantially orthogonal to each other, and one of the waveguides is connected via a communication hole provided in both joint surfaces. 1. A waveguide converter having a function of a directional coupler, characterized in that a wave tube communicates with the other waveguide. 2個の端子を具備し、一方の端子を基準信号入力用とすると共に、他方の端子を隣接する高周波発振器への基準信号出力用として使用する請求項2に記載の方向性結合器の機能を有する導波管変換器。   The function of the directional coupler according to claim 2, comprising two terminals, wherein one terminal is used for inputting a reference signal and the other terminal is used for outputting a reference signal to an adjacent high-frequency oscillator. Having a waveguide converter. 一方の導波管及び他方の導波管はそれぞれ同一の矩形断面を有する角管状を成し、正方形状を成す接合面の対角線上に位置する長孔及びこれと略直交する長孔から成る十字孔を連通孔としている請求項2又は3に記載の方向性結合器の機能を有する導波管変換器。   One waveguide and the other waveguide each have a rectangular tube shape having the same rectangular cross section, and a cross formed by a long hole located on a diagonal line of a joining surface forming a square shape and a long hole substantially orthogonal to the long hole. 4. A waveguide converter having a function of a directional coupler according to claim 2, wherein the hole is a communication hole. 一方の導波管及び他方の導波管はいずれも金属材料又は両導波管の各内部に金属メッキが施してある非金属材料から成っている請求項2〜4のいずれか1つの項に記載の方向性結合器の機能を有する導波管変換器。   Either one of the waveguides and the other waveguide are made of a metal material or a non-metal material in which metal plating is applied to the inside of each of the waveguides. A waveguide converter having the function of the described directional coupler. 高周波発振器に一端側を接続させた導波管の他端側を湾曲状反射板で閉塞してある請求項2〜5のいずれか1つの項に記載の方向性結合器の機能を有する導波管変換器。   The waveguide having the function of a directional coupler according to any one of claims 2 to 5, wherein the other end of the waveguide having one end connected to a high-frequency oscillator is closed with a curved reflector. Tube converter.
JP2003420522A 2003-12-18 2003-12-18 Method for stabilizing output wave of high frequency oscillator and waveguide converter Pending JP2005184297A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150007940A1 (en) * 2012-02-23 2015-01-08 Tokyo Electron Limited Plasma processing device and high-frequency generator
CN109638403A (en) * 2019-01-15 2019-04-16 电子科技大学 A kind of bimodulus compact crosses mould directional coupler

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889873U (en) * 1981-12-14 1983-06-17 古河電気工業株式会社 Cross-shaped directional coupler
JPH06132710A (en) * 1992-10-15 1994-05-13 Micro Denshi Kk Directional coupler
JP2002344214A (en) * 2001-05-15 2002-11-29 Murata Mfg Co Ltd Directional coupler and transmitter/receiver
JP2005176214A (en) * 2003-12-15 2005-06-30 Ihi Aerospace Co Ltd Microwave power transmission device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889873U (en) * 1981-12-14 1983-06-17 古河電気工業株式会社 Cross-shaped directional coupler
JPH06132710A (en) * 1992-10-15 1994-05-13 Micro Denshi Kk Directional coupler
JP2002344214A (en) * 2001-05-15 2002-11-29 Murata Mfg Co Ltd Directional coupler and transmitter/receiver
JP2005176214A (en) * 2003-12-15 2005-06-30 Ihi Aerospace Co Ltd Microwave power transmission device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150007940A1 (en) * 2012-02-23 2015-01-08 Tokyo Electron Limited Plasma processing device and high-frequency generator
US10510513B2 (en) * 2012-02-23 2019-12-17 Tokyo Electron Limited Plasma processing device and high-frequency generator
CN109638403A (en) * 2019-01-15 2019-04-16 电子科技大学 A kind of bimodulus compact crosses mould directional coupler

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