JP2005181019A - Scanning optical system inspection device, scanning optical system inspection method, light source control unit, scanning optical system, and image forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light source controller unit and scanning optical system for improving the image quality of an image forming apparatus in an optical system inspection device, which is for receiving light of beam flux at a focus position of the image forming apparatus, detecting synchronization shift and magnification error, and beam position shift between a plurality of the image forming apparatusses, and correcting them. <P>SOLUTION: The inspection device of an optical system for focusing a beam on a specific position has a light source, light source controlling means, beam deviation means, first light reception means of a scanning beam, second light reception means for receiving at an arbitrary position, moving means for moving the second light reception means to an arbitrary position, position detection means of the second light reception means, synchronized signal detection means of the scanning optical system. The first light reception means and the second light reception means start light reception by a common synchronized signal and inspect the characteristic quantities of the beam at the writing position and an arbitrary scanning position by the same scanning. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning optical system inspection apparatus, and more particularly to a rotating polyhedron in inspection and verification of scanning type writing units used in copying machines, printer products, etc., and dot position deviation inspection of light source arrays such as LED arrays. Inspection of synchronization deviation determined based on the rotation speed of the mirror and the light source control clock, and the imaging position of the beam beam at each position in the scanning range due to magnification error of the scanning optical system, etc. The present invention relates to a scanning optical system inspection apparatus intended to reduce generation.

Conventionally, as a method for verifying a beam of a scanning optical system, (1) with a rotating polygon mirror fixed, a stationary beam is scanned, the beam is scanned with a slit, and the amount of light passing through the slit is detected in time series. Thus, there are known a method for measuring the light quantity distribution, and (2) a method for two-dimensionally detecting a beam profile by forming an image on a two-dimensional area sensor.
On the other hand, with the rotating polygon mirror rotated, with the scanning beam as a target, the light source is always turned on, the beam is scanned with the beam, the slit is traversed, and the amount of light that has passed through the slit as in method (1) above A method of detecting the light amount distribution state by detecting the time series in a time series, and a method of detecting the light amount distribution state of the scanning blinking beam with a two-dimensional area sensor while keeping the light source blinking and synchronizing with the scanning cycle. ing. In addition, a method using a line sensor or a method corresponding to the beam diameter in the main / sub scanning direction by giving an angle to the slit is also known.
In the detection when the rotating polyhedral mirrors (1) and (2) are fixed, it is obvious that the position fluctuation of the beam beam due to the synchronization shift cannot be measured. As a verification of the magnification error of the scanning optical system, it is fixed. The angle of the rotating polyhedral mirror must be adjusted with high accuracy. For example, when the axis of the rotating polyhedral mirror is suspended from the bearing by a magnetic force or the like, fixing becomes very difficult. Although it is possible to install a reference mirror for deflecting the beam of light in place of the rotating polyhedral mirror, it can be used exclusively for magnification error detection, and the optical characteristics on the dedicated device can be secured, but the optical characteristics on the product are secured. In addition, further ingenuity is required.
In the slit scanning method according to the above (1), it is considered possible to detect a magnification error by comparing the synchronization signal and the light amount fluctuation of the beam passing through the slit on the time axis, but it is possible to detect only the constantly lit state. Therefore, it is impossible to detect a dot position shift due to a synchronization shift.
In order to detect a beam of light in the entire scanning range of the scanning optical system that is long in the main scanning direction, the inspection apparatus includes a mechanism that moves the inspection optical system in the optical axis direction and a mechanism that moves in the main scanning direction and the sub-scanning direction. To detect the defocus amount of the beam formed on the photosensitive surface of the image forming apparatus, a configuration corresponding to detection in the entire main scanning direction, and a configuration to follow the beam position in the sub-scanning direction. Generally applied.

As the above conventional method, as the scanning optical system adjustment device and the scanning optical system adjustment method, the beam detection unit is moved in the optical axis direction by the provided beam detection unit moving mechanism, and the beam detection unit is fixed at the focus adjustment reference position. Is disclosed (for example, see Patent Document 1). This method detects the beam profile at the focus reference position assumed to be on the surface of the photoconductor, but the relative position between the beam detectors is not secured, so that defects such as scan line bending and magnification error are detected in detail. I can't do it.
Other commonly used techniques include a method of positioning the beam detector using a laser length measuring device and a method of positioning a stage that moves the beam detector using a magnescale or the like. The positions of the CCD linear sensor and the CCD area sensor are not specified. Furthermore, when a plurality of beam detection units are provided, it is difficult to detect the relative positions between the beam detection units.
The scanning beam light quantity distribution measuring method and the measuring apparatus disclosed in the scanning optical system are optimal for detecting the light quantity distribution of the beam light flux at each scanning position, but the beam caused by the magnification error and the synchronization deviation. The beam position deviation is impossible in terms of configuration because the beam beam must be detected at the same scanning time at a plurality of positions simultaneously (for example, see Patent Document 2).
For example, Patent Document 3 discloses a method known as a position adjustment method for an optical scanning device in an image forming apparatus, but it is difficult to secure a relative position between a plurality of installed sensors.
In addition, when multiple area sensors are installed to handle the entire scanning area, the optical element becomes more complicated and the entire scanning area becomes narrower with respect to the smaller beam diameter of the scanning beam due to higher resolution of image products. Need to be inspected. Depending on the quality and assembly accuracy of the optical elements constituting the scanning optical system, it is necessary to detect in detail the relative positions of all dots in the entire scanning area when correcting the influence of magnification error or the like by light source control. Further, the position of the received beam on the area sensor can be detected, but the absolute position relative to the image forming apparatus cannot be detected. Although there is an explanation of inserting the position adjusting device into the image product, it is difficult to adjust the position adjusting device to the position of the scanning optical system slightly different for each product, and the reliability of the detection value is low.

In the scanning optical system adjustment device and the scanning optical system adjustment method, the detection device includes a beam detection unit and a beam detection unit moving mechanism, and is a detection device in a state in which the beam of the scanning optical system is scanned. A method of operating a beam detector moving mechanism to detect a beam position and drive the beam into the field of view of the beam detector consisting of a two-dimensional sensor, and a method of adjusting the focus position using the beam detector moving mechanism are also known. (For example, refer to Patent Document 1).
As a method of adjusting the position of the optical scanning device in the image forming apparatus, each optical scanning has a plurality of area sensors in the scanning area of the image forming apparatus having a plurality of optical scanning devices, and detects a writing start position deviation and a writing end position. A method for correcting beam misalignment between apparatuses is also disclosed (see, for example, Patent Document 3).
As a scanning beam light quantity distribution measuring method and measuring apparatus for a scanning optical system, a two-dimensional area sensor is installed on a stage movable in the main scanning direction, and scanning is performed at each main scanning position of the scanning optical unit while moving on the stage. A method of storing and analyzing the light quantity distribution data of the beam is also disclosed (for example, see Patent Document 2).
JP-A-8-262350 JP 2002-86795 A JP 2000-275555 A

A scanning optical system constituting an image forming apparatus mounted on an electrophotographic image product shapes a beam emitted from a light source such as an LD (laser diode) by a collimator lens or the like, and converts it into a scanning beam by a rotating polyhedral mirror or the like. The modulated and modulated beam is scanned into an optical element such as an fθ lens, a cylindrical lens, or a mirror, is processed into a desired beam diameter and beam profile, and forms an image on the surface of the photoreceptor. An electrostatic latent image is formed from the light quantity distribution state of the beam formed on the surface of the photoreceptor, and then an image is formed by an image forming process.
In such a scanning optical system, the blinking of the light source is synchronized from the scanning timing of the rotating polyhedral mirror or the like, and if there is a variation in the synchronization, a dot position shift occurs, causing problems such as a reduction in image quality. In addition, degradation in image quality is also caused by a magnification error caused by the optical elements of the scanning optical system. Further, in an apparatus in which the image forming process is performed at a plurality of positions such as a color image product, an image at each position is displayed. Dot position shifts that occur during the formation process cause image quality degradation such as color shifts.
The characteristics of the beam flux emitted from the scanning optical system are manifested as the final results of electrical factors in the light source control, optical factors in the optical element, mechanical factors of the unit, etc. It is necessary to measure the factors separately.
The scanning optical system has a unique structure that is generally long in the main scanning direction and short in the sub-scanning direction, and in order to ensure high image quality, it is necessary to ensure the quality of the beam flux throughout the main scanning direction. . Therefore, measurement in the entire main scanning direction is necessary, and the positioning accuracy of the measuring device at each position is important.
The present invention has been made in consideration of the above-described situation, and a plurality of light receiving means in which the positional relationship between beam beams at the imaging position of the image forming apparatus assuming the surface of the photosensitive member is clarified. Provides an optical system inspection device and an optical system inspection method for detecting and correcting synchronization deviations, magnification errors, and beam position deviations between a plurality of image forming apparatuses. It is an object of the present invention to provide a light source control device, a scanning optical system, and an image forming apparatus for improving the quality of an image that is the final output of the apparatus.
More specifically, the object of the present invention is to provide a beam beam position shift caused by optical factors such as a magnification error of a scanning optical system and a scan line curve, and a synchronization position shift, which are causes of image dot position shift and color shift. It is an object to provide a scanning optical system inspection device that can detect, inspect, and inspect beam beam positional deviation due to the above.
An object of the present invention is to detect a beam light beam position between any two points or a plurality of positions in the entire scanning area in the scanning optical system, and to generate a beam light beam due to optical factors such as magnification error and scanning line bending in the entire scanning area. It is an object of the present invention to provide a scanning optical system inspection apparatus that can detect and inspect a position deviation and a beam beam position deviation caused by a synchronization position deviation separately.

The object of the present invention is to detect a focal point position of the scanning optical system, detect a beam light beam position between any two points or a plurality of positions in the scanning optical system in the scanning optical system, It is an object of the present invention to provide a scanning optical system inspection apparatus capable of separating and detecting and inspecting beam beam position deviation due to optical factors such as scanning line bending and beam beam position deviation due to synchronization position deviation.
An object of the present invention is to remove a detection position error between a plurality of light receiving means associated with the movement of the light receiving means on the basis of the position of a light beam emitted from a light source provided outside, and to scan the entire scanning optical system. The beam beam position between any two points or a plurality of positions is detected, and the beam beam position shift due to optical factors such as magnification error and scan line bending in the entire scanning area, and beam beam position shift due to synchronization position shift Another object of the present invention is to provide a scanning optical system inspection apparatus that can detect, inspect, and inspect the mechanical detection position deviation due to the undulation in the height direction of the moving means that moves the light receiving means.
The object of the present invention is to compare the temporal change in the amount of scanning beam light for the synchronization detection signal with the amount of positional deviation of the beam beam detected from the scanning optical system inspection device. The scanning optical system inspection apparatus is characterized in that the beam beam position shift amount due to the synchronization position shift amount can be predicted.
The object of the sixth aspect is to store the synchronization position shift by storing the temporal change of the scanning beam light amount for the synchronization detection signal and the beam beam position shift amount detected from the scanning optical system inspection device as a reference table in the storage means. It is an object to provide a scanning optical system inspection apparatus capable of correcting a beam writing position from a quantity.
The object of the present invention is to control the blinking of the light source by lighting a predetermined pattern, and to receive the scanning beam beam at an arbitrary position in the writing position and the entire scanning area, thereby shifting the beam beam position shift due to the synchronization position shift at the writing position. And a scanning optical system inspection method for separately detecting and inspecting beam beam position deviations caused by optical factors such as magnification error and scanning line bending from a plurality of scanning beam beam positions. It is.

An object of the present invention is to provide a beam beam position shift caused by a synchronization position shift between any two points or a plurality of positions, and a beam beam position shift caused by optical factors such as a magnification error and scanning line bending. It is an object to provide a scanning optical system inspection method capable of separating, detecting, and inspecting.
The purpose of claim 9 is to detect the synchronization position shift amount due to the temporal variation of the amount of scanning beam light used for the synchronization detection signal and the writing position shift amount of the beam of the beam in claims 7 to 8, and thereby associate the synchronization position shift. It is an object to provide a scanning optical system inspection method capable of deriving a beam writing position from a quantity.
The object of the tenth aspect is to cause dot position misalignment or color misregistration in an image forming apparatus (hereinafter referred to as an exposure station) that performs an image forming process at a plurality of positions as applied to a color image product or the like. The relative position of the beam beam detected at each exposure station is determined based on the position of the beam beam emitted from the external reference light source. Scanning optical system that can detect and inspect separately the beam beam position shift due to the synchronization position shift and the beam beam position shift due to optical factors such as magnification error and scanning line bending by removing the position shift It is to provide an inspection device.

The object of the present invention is that there are a plurality of exposure stations, and in order to detect the relative positional relationship of the beam beams at each exposure station, a reference emitted from the position of the light receiving means that detected the beam beam at one exposure station. If the positioning beam beam emitted from the light source is acquired by the light receiving means of another exposure station and the position of the positioning beam beam is detected, the relative position between one exposure station and the other exposure station is acquired and corrected. It is in the point where it becomes possible.
Even if the light receiving means of one exposure station moves, the positioning beam also moves to the same position, so it is possible to acquire and correct the relative position between the light receiving means at each position, and between each exposure station. It is an object of the present invention to provide a scanning optical system inspection device that can detect and correct a positional deviation of a beam and accurately correct a positional deviation of the beam and thereby improve an image quality.
An object of the present invention is to provide a light source control device that can correct a beam light beam position shift caused by a synchronization position shift and control blinking of the light source.
An object of a thirteenth aspect is to provide a scanning optical system having the light source control device according to the twelfth aspect and capable of scanning a beam light beam in which a beam light beam position shift due to a synchronization position shift is corrected. .
The object of the fourteenth aspect is to provide a light source that serves as a relative position reference for a plurality of light receiving means for detecting a beam of light, and to improve the relative position accuracy of the beam of light detected by the plurality of light receiving means. It is to provide an optical system.
An object of a fifteenth aspect is to provide an image forming apparatus having the scanning optical system according to the thirteenth to fourteenth aspects and capable of reducing dot position deviation and color deviation.

In order to solve the above problems, the invention described in claim 1 includes a light source, a light source control unit that controls the blinking of the light source to emit a beam beam, a beam beam deflection unit that deflects and scans the beam beam, A scanning optical system inspection apparatus having an optical element that forms an image of the deflected and scanned beam beam at a predetermined position, and a first light receiving means for receiving the beam beam at the scanned beam beam writing position; A second or a plurality of light receiving means for receiving a beam beam at an arbitrary scanning imaging position; a moving means for moving the second or the plurality of light receiving means to an arbitrary scanning imaging position; and the second or Same as the light receiving position detecting means for detecting the positions of the plurality of light receiving means, the synchronization signal detecting means for detecting the synchronization signal of the scanning optical system, the first light receiving means and the second or the plurality of light receiving means. For scanning occasions Synchronization signal output means for outputting a synchronizing signal, and the first light receiving means and the second light receiving means or the plurality of light receiving means start receiving light by a common synchronizing signal, and at the same scanning opportunity, the writing position And a scanning optical system inspection apparatus that inspects the feature amount of the beam at any other scanning position.
According to a second aspect of the present invention, in the first aspect, the first light receiving unit includes a second moving unit that moves the first light receiving unit to an arbitrary scanning imaging position that does not interfere with the second or plurality of light receiving units. The scanning optical system inspection apparatus described above is characterized.
According to a third aspect of the present invention, the first light receiving means and the second or plural light receiving means, or the first light receiving means, the second or plural light receiving means, and the 3. A third moving means for moving the first light receiving means and the moving means for moving the second light receiving means or the plurality of light receiving means to an arbitrary scanning image forming position perpendicularly to the scanning direction of the beam. Alternatively, the scanning optical system inspection apparatus described in 2 is characterized.
According to a fourth aspect of the present invention, there is provided a second light source having an optical axis fixed in parallel to a scanning direction of the beam light beam, a beam light beam emitted from the second light source, and the first light receiving unit and the light receiving unit. Beam beam optical path changing means for branching and reflecting the optical path of the beam so as to be incident on the second or plural light receiving means, and the first light receiving means and the second or plural light receiving means The relative position of the light beam received by the first light receiving means and the relative position of the light beam received by the second light receiving means or the plurality of light receiving means are detected. The scanning optical system inspection device described in 1) is characterized.

According to a fifth aspect of the present invention, the synchronization signal detection unit includes a third light receiving unit and an acquired light amount processing unit that time-divides a light amount change acquired by the third light receiving unit. 5. The scanning optical system inspection apparatus according to claim 1, wherein a synchronization deviation due to fluctuation is compared with a beam position of a beam, and a predicted value is derived.
According to a sixth aspect of the present invention, the light amount time change data acquired by the synchronization signal detection, the writing position and the scanning acquired by the first light receiving means and the second or plural light receiving means. 6. The scanning optical system inspection apparatus according to claim 1, further comprising storage means for storing position data of a beam beam at a position.
According to a seventh aspect of the present invention, in the scanning optical system, a procedure for controlling blinking of the light source at a predetermined frequency and a procedure for arbitrarily changing the position of the second or plural light receiving means within a scanning range. And a procedure for receiving the beam light beam at the writing position in the scanning range of the scanning optical system and the second position or a plurality of positions different from the writing position at the same scanning opportunity, and the beam light beam by the first light receiving means. And a scanning optical system inspection method comprising a procedure for detecting the writing position of the light beam and a procedure for detecting the beam light beam position at the position of the second or plurality of light receiving means.
According to an eighth aspect of the present invention, in the scanning optical system, the procedure for controlling the blinking of the light source at a predetermined frequency, the position of the first light receiving means, and the position of the second light receiving means or the plurality of light receiving means are provided. The procedure of arbitrarily changing so as not to interfere within the scanning range, and the beam flux at the first position in the scanning range of the scanning optical system and the second light beam or a plurality of positions different from the first position are the same. It is characterized by a scanning optical system inspection method comprising a procedure of receiving light at a scanning opportunity and a procedure of detecting a beam beam position at the first position and a beam beam position at the second position or a plurality of positions.
According to the ninth aspect of the present invention, the procedure for detecting the synchronization signal of the scanning optical system, the procedure for acquiring the time change data of the previous synchronization signal, and the beam light beam position at the writing position of the scanning optical system are acquired. And a scanning optical system inspection method for detecting the beam writing start position due to the synchronization position shift from the time change data of the synchronization signal.

The invention according to claim 10 is the scanning optical system, wherein the scanning optical system includes a plurality of the light sources, and deflects a plurality of beam beams emitted from the plurality of light sources, and a plurality of optical beams. A scanning optical system that scans and forms an image at a plurality of imaging positions by an element, or a scanning optical system that has a plurality of scanning optical systems and that constitutes an image forming apparatus having a plurality of scanning and imaging positions. An optical system inspection apparatus, wherein a plurality of the scanning optical system inspection apparatuses according to claim 1 are set at respective scanning and imaging positions, and an optical axis is set to be perpendicular to a scanning direction of each scanning imaging position. A third light source fixed in such a manner that the light beam emitted from the third light source is incident on each first light receiving means of the scanning optical system inspection apparatus applied to each scanning imaging position. Of beam luminous flux A second beam light beam path changing means for branching and reflecting the path, a fourth light source having an optical path in parallel with the third light source, and a beam light beam emitted from the fourth light source, respectively. Third or plural beam beam optical path changing means for branching and reflecting the optical path of the beam luminous flux so as to be incident on the second or plural light receiving means of each of the scanning optical system inspection devices applied to the image position The scanning optical system inspection device according to claim 1, comprising:
According to an eleventh aspect of the present invention, in the scanning optical system inspection apparatus, the second or plural light receiving devices of the fourth optical source according to the tenth aspect are applied to the respective scanning image forming positions. 11. The scanning optical system inspection apparatus according to claim 10, wherein the fourth light source is also moved to the same position when the second light receiving means or the plurality of light receiving means is moved.
The invention according to claim 12 has the storage means according to claim 6, and the beam beam position shift caused by the synchronization shift and the beam beam position acquired by the scanning optical system inspection method according to claims 7 to 9. The light source control device controls the light source by correcting the deviation amount.
The invention according to claim 13 is characterized by a scanning optical system having the light source control device according to claim 12.
According to a fourteenth aspect of the present invention, a scan having the second light source according to the fourth aspect, or the second light source according to the fourth aspect and the third and fourth light sources according to the tenth aspect. Features an optical system.
According to a fifteenth aspect of the invention, there is provided an image forming apparatus having the scanning optical system according to the thirteenth to fourteenth aspects.

According to the present invention, by using the mechanism of claim 1, the second or the plurality of the second light beam and the plurality of light beams are detected at the same scanning opportunity as the first light receiving unit with reference to the writing position of the beam light beam detected by the first light receiving unit. From the relative distance from the beam position detected by the light receiving means, optical effects such as magnification error and scanning line bending, which could not be realized by a single light receiving means, are not affected by the beam position deviation caused by the synchronization position deviation. It becomes possible to detect the beam light beam position by the factor.
By using the mechanism according to claim 2, the second or the plurality of beam light flux positions at arbitrary positions in the scanning area detected by the first light receiving means are used as a reference at the same scanning opportunity as the first light receiving means. From the relative distance from the beam position detected by the light receiving means, the magnification error in any section in the scanning area, which was not affected by the beam position deviation due to the synchronization position deviation, which could not be realized with only a single light receiving means. And beam beam position can be detected by optical factors such as scanning line bending.
By using the mechanism according to the third aspect, in addition to the effects of the second to third aspects, it is possible to detect and inspect the imaging state of the scanning beam emitted from the scanning optical system.
By using the mechanism according to claim 4, the relative position of the light receiving surface is detected between the first light receiving means and the second light receiving means or the plurality of light receiving means. In addition, it is possible to detect the position of the light beam of the scanning optical system and to calibrate a plurality of light receiving means by removing the mechanical position shift accompanying the movement of the light receiving means.
By using the mechanism of claim 5, a change in the scanning beam light amount for the synchronization detection signal is detected, a synchronization ON / OFF timing shift is detected, and the amount of the beam light beam positional shift is compared, thereby synchronizing from the light amount change. It is possible to predict the beam beam positional deviation amount due to the positional deviation amount, and thereafter, it is possible to adjust the light emission timing of the light source from the predicted positional deviation amount.
By using the mechanism of claim 6, in addition to the function and effect of claim 5, the synchronization position deviation amount and the beam beam position deviation amount are tabulated and stored so that when the synchronization position deviation is detected, the light source The light emission timing adjustment can be executed in a short time.

By using the mechanism of claim 7, the light emission timing of the light source can be separately monitored by a PD or the like built in the light source, so the periodicity of the blinking operation of the light source can be guaranteed, and from the periodicity of the blinking operation By detecting the difference from the periodicity of the blinking position on the assumption that the scanning beam beam is also periodically positioned, the beam beam position due to optical factors such as magnification error of the scanning optical system and scan line bending The amount of deviation can be detected. At this time, if the beam light beam position is detected at a plurality of locations and the difference from the periodicity is derived from the obtained relative distance, the influence of the synchronization position shift can be removed.
By using the mechanism of claim 8, in addition to claim 7, the beam beam position due to optical factors such as a magnification error of the scanning optical system and scanning line bending between any two points or a plurality of positions in the scanning area. The amount of deviation can be detected.
By using the mechanism according to the ninth aspect, it is possible to detect the write position of the beam light beam corresponding to the synchronization position shift by simultaneously detecting the amount of scanning beam light for the synchronization detection signal and the fluctuation of the beam light beam position.

By using the mechanism according to claim 10, in an image forming apparatus or an image product having a plurality of exposure stations, by having a light source that serves as a reference for determining the relative position of the light receiving means that detects the beam light beam position at each exposure station, Relative positioning of each light receiving means can be ensured between exposure stations, and even a slight misalignment can be received within each exposure station by detecting the beam misalignment amount and detecting and correcting the beam flux emitted from the reference light source. It becomes possible to detect the position of the light beam between the exposure stations, and it is possible to reduce dot position shift and color shift and improve image quality.
By using the mechanism according to the eleventh aspect, a plurality of reference light sources are required when an external reference light source is provided without detecting a reference light source externally and when detecting the position of the beam light beam in the entire scanning region. However, since the function of a plurality of reference light sources can be achieved by a single reference light source, the operational effect of claim 10 can be realized with a simpler configuration.
By using the mechanism according to claim 12, the synchronization position shift correction amount is held from the light amount data giving the synchronization detection signal, so that when the synchronization position shift is detected, the beam position corresponding to the beam beam position where the synchronization position shift is corrected is supported. It is possible to control blinking of the light source at the timing.
By using the mechanism according to claim 13, the beam beam position shift due to the synchronization position shift is corrected, the beam beam beam can be irradiated to a desired position, and the image dot position shift and color shift are reduced to improve the image quality. Is possible.
By using the mechanism according to claim 14, it is possible to have a light source for determining the relative reference position of the light receiving means for detecting the beam position of the beam, and to have a unique reference position. Even if the mechanical positions of parts and units are different, it is not necessary to adjust the inspection apparatus for each inspection object, and the scanning optical system, the image forming apparatus having the scanning optical system, and the maintenance of the image product can be easily performed. It becomes possible to do.
By using the mechanism according to claim 15, dot position shift and color shift of the image forming apparatus due to optical factors such as magnification error and electrical factors such as synchronous position shift are reduced, and image quality as a final output is improved. It becomes possible.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a digital copying machine according to an embodiment of the present invention. This configuration is a copying machine 100 as an image processing apparatus, and a contact glass 206 is provided on the upper surface of the copying machine 100. In addition, an automatic document feeder (hereinafter simply referred to as ADF) 201 is provided on the upper side of the copying machine 100, and this ADF 1 is connected to the copying machine 100 via a hinge or the like (not shown) so as to open and close the contact glass 206. Has been. The ADF 1 separates documents one by one from a document tray 202 serving as a document placement table on which a document bundle composed of a plurality of documents can be placed, and the document bundle placed on the document tray 202 toward the contact glass 206. The separation / conveying means that conveys the original and the document conveyed toward the contact glass 206 by the separation / conveying means are conveyed / stopped to a reading position on the contact glass 206, and the copy disposed below the contact glass 206 The document that has been read by the reading means 50 (known exposure lamp 51, mirrors 52, 55, 56, lens 53, CCD 54, etc.) of the machine 100 is carried out from the contact glass 206. The paper feed motor is driven by an output signal from the controller, and when the paper feed start signal is input from the copying machine 100, the controller drives the paper feed motor forward / reversely. When the paper feed motor is driven to rotate forward, the feed roller 3 rotates in the clockwise direction so that the uppermost original is fed from the original bundle and conveyed toward the contact glass 206. When the leading edge of the document is detected by the document set detection sensor 207, the controller rotates the paper feed motor in reverse based on the output signal from the document set detection sensor 207. This prevents subsequent documents from entering and prevents separation.

Further, when the document set detection sensor 207 detects the trailing edge of the document, the controller counts the rotation pulse of the conveyor belt motor from this detection point, and when the rotation pulse reaches a predetermined value, the controller By stopping the driving and stopping the feeding belt 204, the document is stopped at the reading position of the contact glass 206. Also, when the trailing edge of the document is detected by the document set detection sensor 207, the controller drives the paper feed motor again, separates the subsequent document as described above, and conveys it toward the contact glass 206. When the pulse of the paper feed motor from the time when the original is detected by the original set detection sensor 207 reaches a predetermined pulse, the paper feed motor is stopped and the next original is put on standby. When the original stops at the reading position of the contact glass 206, the original is read and exposed by the copying machine 100. When this reading and exposure are completed, a signal is input from the copier 100 to the controller. When this signal is input, the controller drives the conveyor belt motor to rotate forward, and the document is transferred from the contact glass 206 by the conveyor belt 216. It is carried out to the discharge roller 5.
As described above, a document bundle placed on the document tray 202 in the ADF 201 with the image surface of the document facing up is pressed from the top document to the contact glass 206 when the print key on the operation unit is pressed. It is fed to a predetermined position. The fed original is read by the reading unit 50 from the image data of the original on the contact glass 206, and is then discharged to the discharge port A (discharge port at the time of reverse document discharge) by the feeding belt 204 and the reverse driving roller. Further, when it is detected that there is a next document on the document tray 202, it is fed onto the contact glass 206 in the same manner as the previous document.
The transfer sheets stacked on the first tray 208, the second tray 209, and the third tray 210 are fed by the first sheet feeding unit 211, the second sheet feeding unit 212, and the third sheet feeding unit 213, respectively, and are conveyed vertically. The unit 214 is transported to a position where it abuts on the photoreceptor 215. The image data read by the reading unit 50 is written on the photosensitive member 215 by the laser from the writing unit 57, and a toner image is formed by passing through the developing unit 227. Then, the toner image on the photosensitive member 215 is transferred while the transfer paper is conveyed by the conveying belt 216 at the same speed as the rotation of the photosensitive member 215. Thereafter, the image is fixed by the fixing unit 217 and conveyed to the paper discharge unit 218. The transfer paper conveyed to the paper discharge unit 218 is discharged to the paper discharge tray 219 when the staple mode is not performed.

For example, as shown in FIG. 2, in general, in a scanning optical system in an image forming apparatus, a beam flux emitted from an LD (laser diode) unit 2 that is a light source is deflected and scanned by the rotation of a polygon mirror 1, and an fθ lens is scanned. 3 is formed so that an image is formed at an imaging position 4 that is assumed to be a photoconductor position of the product, and a desired beam diameter, beam light amount, and the like can be obtained at the imaging position 4. ing.
Further, the beam flux emitted from the LD unit 2 in FIG. 2 is ON / OFF controlled by the light source control circuit 5, and scanning is performed while the beam flux blinks at the imaging position 4. Control of the beam light flux by the light source control circuit 5 and the light emission start timing are determined based on the synchronization signal generated with the scanning beam light flux incidence on the synchronization detection PD 6 in FIG. 2 as a trigger.
When the light quantity of the beam beam incident on the synchronization detection PD 6 in FIG. 2 fluctuates as shown in FIG. 3, the synchronization shift becomes the time Δt in FIG. 4, and the writing position of the beam beam is a distance in the main scanning direction as shown in FIG. It fluctuates by L, and the dot position of the entire scanning area is shifted. At this time, L is derived as follows at an ideal imaging position of the scanning optical system.
When the rotational speed r [rpm] of the rotating polygon mirror, the printing width d [m], the number of surfaces n [surface] of the rotating polygon mirror, and the ratio of the scanning width effective for printing are u [%]
Time required for one rotation of the rotary polygon mirror 60 / r [sec]
Time for scanning one surface of the rotary polygon mirror 60 / r / n [sec]
Distance d / (u / 100) [m] scanned by one surface of the rotary polygon mirror
The speed v at which the scanning beam scans the image plane is:
{D / (u / 100)} / (60 / r / n) [m / sec] (a)
It moves in the main scanning direction at a speed v derived by the equation (a).
The beam flux position due to synchronization shift is
L = v × Δt (b)
Will only fluctuate.

When the scanning beam is received at the imaging position of the scanning optical system, the method of receiving the light at a predetermined position in the scanning area and then receiving it at another position due to the fluctuation of the beam position due to the synchronization position shift is 2 An error is included in the relative position of the beam flux detected between the points.
Therefore, as shown in FIG. 5, the magnifying lenses 8, 8a, the CCD area sensors 9, 9a, and the CCD area sensor 9a, which are focused on the imaging position 4a of the scanning beam emitted from the scanning optical system 7, are mainly used. A beam luminous flux receiving system comprising the moving stage 10 moving in the scanning direction is constructed. When enlarging and receiving the image of the beam beam, the magnifying lenses 8 and 8a are required. However, if the resolution is satisfied by light reception at the same magnification, the magnifying lens is not necessary, and the CCD area sensors 9 and 9a It is also possible to receive light directly with a CCD element.
In the scanning optical system 7, a synchronizing signal is generated by the synchronizing signal generation circuit 11 when the scanning beam is incident on the synchronizing detection PD 6a installed outside the optical system effective for image formation, and the same is applied to the CCD area sensors 9 and 9a. A synchronization signal is output at the scanning opportunity and used as a shutter trigger signal for the CCD area sensors 9 and 9a. The shutter trigger signal is supplied to the CCD area sensors 9 and 9a at the same time, and by adjusting the shutter opening time, it becomes possible to receive light beams at a plurality of different locations in the scanning area at the same scanning opportunity.
FIG. 7 shows an image received by the CCD area sensor 9a at the same scanning opportunity when the beam beam 12 received by the CCD area sensor 9 changes to the beam beam 12a as shown in FIG. By detecting the position of the CCD area sensor 9a included in the moving stage 10 of FIG. 5 using a magnet scale (not shown) or the like, the distance from the CCD area sensor 9 and the positions 12 and 13 of the beam flux, or 12a and 13a, It is possible to detect the inter-dot distances at a plurality of positions in the scanning area of the scanning optical system from the position in the image plane. Here, since the positions of the beam beams detected by the two CCD area sensors to be compared are affected by the synchronization position shift, they are canceled out, and the detected inter-dot distance is not affected by the synchronization position shift.
Since the positions of the beam beams 12 and 12a detected by the CCD area sensor 9 are the writing position, it is determined whether or not the positions of the beam beams 13 and 13a detected by the CCD area sensor 9a are at target positions on the scanning area. It can be applied as data for making decisions. The setting of the target position can be derived from the parameters applied when deriving the above formula (a), the light source control clock and the lighting timing. This can be done by setting a monitoring device or by monitoring the amount of light with a PD generally provided in the LD light source.

For example, in the configuration and operation described above, as shown in FIG. 8, the moving stage 10b that moves the magnifying lens 8b and the CCD area sensor 9b in the main scanning direction, and the magnifying lens 8c and the CCD area sensor 9c in the main scanning direction. With the moving stage 10a that moves, the beam light beam is received at the same scanning opportunity at any plurality of positions on the scanning area of the scanning optical system, and the relative position at the plurality of positions can be detected by removing the influence of the synchronization positional deviation. To do. At this time, the positions of the CCD area sensors at a plurality of positions are included in the moving stages 10a and 10b, and can be detected by a magnet scale (not shown), and at the same time, mechanical interference can be prevented. In addition, as a common example, a method of detecting the relative positions of a plurality of CCD area sensors by installing a laser length measuring device or the like outside to prevent interference is useful.
For example, in the configuration and operation described above, as shown in FIG. 9, the magnifying lenses 8d and 8e, the CCD area sensors 9d and 9e, and the moving stage 10c that moves the CCD area sensors 9d and 9e are fixed to the base 14. The moving stage 15 moves in the direction orthogonal to the beam scanning direction of the base 14 scanning optical system along the guides 16 and 16a.
Since the light receiving element is a CCD area sensor, it is possible to detect the two-dimensional light amount distribution of the beam light beam. By moving the entire inspection system in the optical axis direction of the scanning optical system by the moving stage 15, the beam of the scanning optical system can be detected. The imaging state of the light beam can be detected.
Here, a feature quantity such as the beam diameter can be obtained from the light quantity distribution state of the detected beam and the magnification error can be measured from the beam position at the same time. The position in the optical axis direction of the scanning optical system that satisfies the conditions can be determined.

For example, in the above-described configuration operation, as shown in FIG. 10, an LD light source 17 is installed outside, and a collimating lens 18 is fixed as necessary to obtain parallel light. Adjustment is required so that the optical axis of the LD light source 17 is parallel to the main scanning direction. Adjustment is possible by installing a pinhole, a CCD area sensor, or the like on the moving stage 10d, moving on the moving stage 10d, and detecting the position of the light beam from the LD light source 17.
The beam flux emitted from the LD light source 17 is branched by the beam splitter 19, one beam flux is received by the CCD area sensor 9f, the other is reflected by the mirror 19a, and received by the CCD area sensor 9g. When the CCD area sensor 9g moves to the CCD area sensor 9h in the figure, the beam beam transmitted through the beam splitter 19 is reflected by the mirror 19b and received by the CCD area sensor 9h.
When there is no undulation in the height direction of the moving stage 10d, the light beam receiving screen from the LD light source 17 by the CCD area sensor is at the same height as shown in FIGS. 11 (i) and (ii). When there is a undulation in the height direction, a displacement L1 occurs in the height of the light beam receiving position from the LD light source 17, as shown in FIG. 11 (iii).
By correcting the displacement L1 from the detection value, it is possible to detect the scanning line bending and the scanning line inclination of the scanning optical system with high accuracy. Here, when the installation position of the beam splitter 19 and the mirrors 19a and 19b does not optically affect the beam flux emitted from the scanning optical system, the mirrors 19a and 19b are replaced with the beam splitter, and the LD light source 17 is replaced. The beam flux emitted from the scanning optical system may be made equal in height, but in general, the position deviation of the beam flux from the scanning optical system in the main scanning direction and the imaging position deviation in the optical axis direction are Therefore, as shown in FIG. 12, the LD light source is shifted in the height direction with the beam beam from the scanning optical system within the range allowed by the opening of the magnifying lens 8f, and is turned back by the beam splitter or mirror 19c. A configuration for receiving light at 9i is preferable.

For example, in the configuration and operation of claims 1 to 4, when the amount of scanning beam incident on the synchronization detection PD 6 shown in FIG. It is acquired as the detection value shown in FIG. If the time difference until the amount of light necessary for the threshold th for generating the synchronization signal reaches Δt, the amount of synchronization positional deviation can be derived from the equation (b) described in the configuration / operation of claim 1, and therefore the threshold th is unknown. Even in this case, it is possible to derive the threshold th by calculating Δt backward from the beam beam position deviation amount and the mathematical expression (b) and feeding back to the light quantity fluctuation.
Using the threshold th, the amount of synchronization position deviation is derived from the light amount fluctuation of the beam beam incident on the synchronization detection PD 6, and it is possible to adjust the light emission timing of the light source using L as the correction amount from Equation (b). Become.
For example, a memory (not shown) is mounted on the light source control circuit 5 in FIG. 2 and a table of Δt and L is stored, or parameters applied to derive the equations (b) and (b) are stored. deep. As shown in FIG. 12, the flow of light source control derives a lighting pattern of a beam beam from image data, and when there is a synchronization shift Δt, the phase of the lighting pattern writing timing is shifted.
Since the time change of the synchronization signal detected by the synchronization detection PD 6 shown in FIG. 2 becomes the time change of the light amount crossing the synchronization detection PD 6, it is obtained as shown in FIG. 3, and the time change of the light amount is numerically converted by AD conversion. It can be obtained as data. When the signal detected by the synchronization detection PD 6 has a change in intensity, the synchronization signal is shifted by Δt depending on the synchronization detection threshold th. The beam beam position deviation amount can be derived from the mathematical formula (b) based on the design value or the like. However, in the mathematical formula, v changes strictly according to the imaging position of the scanning optical system as v1 and v2 shown in FIG. Then, the acquisition of the synchronization signal and the acquisition of the beam position are repeated a plurality of times to determine v, and v × Δt is corrected as the amount of synchronization position deviation.

For example, as shown in FIG. 15, a single polygon mirror 1d deflects and scans light emitted from a plurality of LD units 2b, 2c, 2d and 2e, passes through fθ lenses 3b, 3c, 3d and 3e, The optical path is bent by mirrors 21, 21a, 21b, 21c, 21d, 21e, 21f, 21g, 21h, 21i, and 21j to be connected to image forming positions 4b, 4c, 4d, and 4e on the photosensitive members 22, 22a, 22b, and 22c. The scanning optical system for imaging or the scanning optical system of the form shown in FIG. 2 corresponds to each of the photosensitive members 22d, 22e, 22f, and 22g as in the scanning optical systems 7a, 7b, 7c, and 7d shown in FIG. When a beam beam is imaged at each of the imaging positions 4f, 4g, 4h, and 4i, the beam beam position shift and dot position shift due to magnification error, synchronization shift, etc. in each scanning optical system Similarly, the relative positional deviation of the light beam flux between the scanning optical system, reduces the image quality such as dot positional deviation or color shift of an output image. For this reason, it is necessary to accurately detect the relative position of the beam of light in each scanning optical system and to correct any deviation.
Therefore, as shown in FIG. 17, CCD area sensors 9j, 9l, 9n, and 9p that receive beam beams at the writing positions of the scanning optical systems 7e, 7f, 7g, and 7h, and beam beam reception at arbitrary scanning positions. This is an inspection device comprising CCD area sensors 9k, 9m, 9o, 9q to be moved, and moving stages 10e, 10f, 10g, 10h that move the CCD area sensors 9k, 9m, 9o, 9q to arbitrary positions. A beam flux that forms an image at the position to be obtained is acquired. FIG. 18 shows a view of the inspection optical systems for the scanning optical systems 7e, 7f, 7g, and 7h in FIG. 17 as viewed from the direction of the arrow α. The reference light sources 17a, 17b, 17c, and 17d are fixed to the outside, and the beam beams emitted from the reference light sources 17a, 17b, 17c, and 17d are reflected and transmitted by the beam splitters 19d, 19f, 19h, and 19j, and the reflected light is reflected. Light is received by the CCD area sensors 9j, 9l, 9n, and 9p, and the transmitted light is reflected by the mirrors 19e, 19g, 19i, and 19k and received by the CCD area sensors 9k, 9m, 9o, and 9q. Accordingly, the constituent operation of claim 4 can be realized in each inspection apparatus.
Further, in order to detect and correct the relative positional deviation of the beam beam between the respective scanning optical systems, the reference light sources 17e and 17f are fixed so as to have an optical axis perpendicular to the scanning direction of the scanning optical system. The beam flux emitted from 17e is reflected by beam splitters 19l, 19n, 19p, and 19r and received by CCD area sensors 9j, 9l, 9n, and 9p, respectively. Further, the beam flux emitted from the reference light source 17f is reflected by the beam splitters 19m, 19o, 19q, and 19s and received by the CCD area sensors 9k, 9m, 9o, and 9q, respectively, and the beam flux position of the reference light source is detected. As a result, the displacement in the main scanning direction of the scanning optical system in the CCD area sensors 9j, 9l, 9n, 9p and in the CCD area sensors 9k, 9m, 9o, 9q is detected, and the relative position between the CCD area sensors is detected. By correcting the deviation, the position of the beam light beam of the scanning optical system and the relative beam light beam position between the scanning optical systems can be accurately detected.

FIG. 18 shows a case where the CCD area sensor 9m is largely displaced in the main scanning direction from the CCD area sensors 9k, 9o, 9q. First, position detecting means such as a magnescale attached to the moving stage is shown. By performing rough positioning of the detection system and correcting the relative positioning based on the position of the light beam from the reference light source, it is possible to correct unclear conditions such as individual position differences between the CCD camera housing and the CCD element. It becomes.
In the above description of this item, it is described that the reference light source is fixed to the outside. However, the reference light sources 17a, 17b, 17c, and 17d may be fixed to the respective scanning optical system inspection devices, and a plurality of reference light sources 17e are scanned. Of the optical system inspection apparatuses, one scanning optical system inspection apparatus, for example, a CCD area sensor 9j in FIG. 18 may be fixed. Thereby, there is no need to fix the reference light source for each product, and the versatility of the inspection apparatus is improved.
The reference light source 17f may be fixed at a position to be detected in the main scanning direction. However, as described in the next claim, the reference light source 17f is fixed to the CCD area sensor 9k in FIG. It is possible to detect and correct the relative positional deviation of each scanning optical system inspection apparatus at an arbitrary position in the direction.

For example, by moving the reference light source 17f of FIG. 18 attached to the CCD area sensor 9k, the relative position shift of each scanning optical system inspection device is detected and corrected at an arbitrary position in the main scanning direction of the scanning optical system. As a result, it is possible to detect and correct beam beam position deviation and dot position deviation between the scanning optical systems.
Further, by fixing the reference light source 17e to the scanning optical system instead of the inspection device, it is guaranteed as a unique reference position, and it is possible to correct a positional deviation when the inspection device is attached or detached.
For example, a memory (not shown) is mounted on the light source control circuit 5 in FIG. 2 and a table of Δt and L is stored, or parameters applied to derive the equations (b) and (b) are stored. deep. As shown in FIG. 14, the light source control flow derives the lighting pattern of the beam beam from the image data, and when there is a synchronization shift Δt, the phase of the lighting pattern writing timing is shifted. For example, a scanning optical system in which a memory is mounted on the light source control circuit 5 in FIG.
For example, it is a scanning optical system in which the reference light sources 17a, 17b, 17c, 17d, 17e, and 17f shown in FIG. 18 are fixed, and each CCD area sensor of the scanning optical system inspection apparatus emits light at the time of beam beam detection. The relative position can be detected.
Furthermore, as compared with the case where the reference light source is fixed to the inspection apparatus, the position of these reference light sources is a position unique to the scanning optical system, and is not affected by the position shift of the inspection apparatus that occurs at every inspection and detection. An image forming apparatus including a system and a photoconductor.

1 is a schematic configuration diagram of a digital copying machine according to an embodiment of the present invention. It is an optical system schematic explanatory drawing which shows the basic composition of the scanning optical system inspection apparatus of this invention. It is explanatory drawing which shows the relationship between incident light quantity fluctuation | variation and a synchronization shift | offset | difference time by the synchronous detection of the apparatus of this invention. It is a figure of the example of the dot position shift by the beam light beam fluctuation | variation in the apparatus of this invention. It is the schematic which shows the structure of the beam light beam receiving system with respect to the scanning beam of this invention. It is a figure which shows the example of the fluctuation | variation of the light reception beam light beam in this invention. It is a figure which shows the example of the fluctuation | variation of the beam light beam received with the sensor different from the above of this invention. It is a block diagram of the apparatus which can receive and detect the influence of a synchronous position shift by light-receiving a light beam in the same scanning in multiple positions of this invention. It is a block diagram of the apparatus which can detect the two-dimensional light quantity distribution of a beam light beam by the apparatus which moves perpendicularly | vertically with the scanning direction of this invention. It is a block diagram of the apparatus which can detect the scanning line bending of a scanning optical system, and scanning line inclination with high precision using the beam splitter of this invention. It is a figure of the light beam which shows the example which can detect the scanning line bending of the scanning optical system of this invention, and a scanning line inclination with high precision. It is explanatory drawing of the optical system for avoiding the influence of the imaging position shift to the main scanning direction of the light beam from the scanning optical system of this invention, and an optical axis direction. It is a flowchart of the light source control of the scanning optical system inspection apparatus of this invention. It is explanatory drawing regarding the scanning speed at the time of the beam light beam position shift amount calculation in the apparatus of this invention. It is a block diagram in the case of deflect | deviating and scanning several LD unit emitted light with the single polygon mirror of this invention. 1 is a schematic diagram of an example of a copying machine that requires accurate detection of the relative position of a beam of light with an inspection apparatus of the present invention. It is the perspective view which installed the inspection apparatus of this invention in the position which the photoreceptor is assumed. It is explanatory drawing when the area sensor of the inspection apparatus of this invention has produced large position shift in the main scanning direction.

Explanation of symbols

1, 1a, 1b Polygon mirror 2, 2a, 2b, 2c, 2d, 2e LD unit 3, 3a, 3b, 3c, 3d, 3e fθ lens 4, 4a, 4b, 4c, 4d, 4e, 4f, 4g, 4h Scanning imaging position 5, 5a Light source control circuit 6, 6a PD for synchronous detection
7, 7a, 7b, 7c, 7d, 8e, 7f, 7g, 7h Scanning optical system 8, 8a, 8b, 8c, 8d, 8e, 8f Magnifying lens 9, 9a, 9b, 9c, 9d, 9e, 9f, 9g , 9h, 9i, 9j, 9k, 9l, 9m, 9n, 9o, 9p, 9q CCD area sensor 10, 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h Moving stage 11 Synchronization signal generating circuit 12, 12a , 12b Writing position beam light beam acquisition image 13, 13a, 13b, 13c Beam light beam acquisition image at an arbitrary position in the main scanning direction 14 Base 15 Moving stage 16, 16a Guide 17, 17a, 17b, 17c, 17d, 17e, 17f Reference Light source 18 Collimating lens 19, 19a, 19b, 19c, 19d, 19e, 19f, 19g, 19h, 19i, 9j, 19k, 19l, 19m, 19n, 19o, 19p, 19q, 19r, 19s Beam splitters and mirrors 20, 20a, 20b Light beam receiving positions from reference light sources 21, 21a, 21b, 21c, 21d, 21e, 21f, 21g, 21h, 21i, 21j Folding mirror 22, 22a, 22b, 22c, 22d, 22e, 22f, 22g

Claims (15)

  A light source, a light source control means for controlling the blinking of the light source to emit a beam light beam, a beam light beam deflecting means for deflecting and scanning the beam light beam, and an optical element for imaging the deflected and scanned beam light beam at a predetermined position A scanning optical system inspection apparatus comprising: a first light receiving means for receiving a beam light beam at a scanned beam light beam writing position; and a second or a plurality of light receiving light beams at an arbitrary scanning imaging position. A light receiving means, a moving means for moving the second light receiving means or the plurality of light receiving means to an arbitrary scanning imaging position, a light receiving position detecting means for detecting the position of the second light receiving means or the plurality of light receiving means, and the scanning Synchronization signal detection means for detecting a synchronization signal of the optical system; and synchronization signal output means for outputting a synchronization signal generated at the same scanning opportunity to the first light receiving means and the second light receiving means or the plurality of light receiving means. , The first light receiving means and the second light receiving means or the plurality of light receiving means start receiving light by a common synchronization signal, and inspect the feature amount of the beam at the writing position and any other scanning position at the same scanning opportunity. A scanning optical system inspection apparatus.   The scanning optical system inspection according to claim 1, further comprising a second moving unit that moves the first light receiving unit to an arbitrary scanning imaging position that does not interfere with the second light receiving unit or the plurality of light receiving units. apparatus.   The first light receiving means and the second light receiving means or the plurality of light receiving means, or the first light receiving means, the second light receiving means, the plurality of light receiving means, the first light receiving means, the second light receiving means, 3. A scanning optical system according to claim 1, further comprising a third moving means for moving a plurality of light receiving means to move to a desired scanning image forming position perpendicularly to the scanning direction of the beam. System inspection equipment.   A second light source having an optical axis fixed in parallel with the beam light beam scanning direction and a beam light beam emitted from the second light source are incident on the first light receiving means and the second light receiving means or the plurality of light receiving means. A beam light beam path changing means for branching and reflecting the light path of the beam light beam, and detecting a relative position between the first light receiving means and the second light receiving means or the plurality of light receiving means. 4. The scanning optical system according to claim 1, wherein the position of the beam light beam received by the means and the relative position of the beam light beam received by the second or plurality of light receiving means are detected. 5. Inspection device.   The synchronization signal detection means comprises the third light receiving means and an acquired light quantity processing means for time-dividing a light quantity change acquired by the third light receiving means, and compares the synchronization deviation due to the light quantity fluctuation with the beam beam position. 5. The scanning optical system inspection apparatus according to claim 1, wherein a predicted value is derived.   A storage for storing light amount time change data acquired by the synchronization signal detection and position data of the beam light flux at the writing position and the scanning position acquired by the first light receiving means and the second light receiving means or the plurality of light receiving means. 6. The scanning optical system inspection apparatus according to claim 1, further comprising: means.   In the scanning optical system, a procedure for controlling blinking of the light source at a predetermined frequency, a procedure for arbitrarily changing the position of the second or plural light receiving means within a scanning range, and a writing position in the scanning range of the scanning optical system A procedure for receiving a beam beam at a second position or a plurality of positions different from the writing position at the same scanning opportunity, a procedure for detecting a writing position of the beam beam by the first light receiving means, A scanning optical system inspection method comprising: detecting a beam beam position at the position of two or a plurality of light receiving means;   In the scanning optical system, the procedure for controlling the blinking of the light source at a predetermined frequency and the position of the first light receiving means and the position of the second or plural light receiving means are arbitrarily changed so as not to interfere within the scanning range. A first position in the scanning range of the scanning optical system, a procedure for receiving beam beams at a second position or a plurality of positions different from the first position at the same scanning opportunity, and the first And a step of detecting the beam light beam position at the second position and the beam light beam position at the second position or a plurality of positions.   The procedure for detecting the synchronization signal of the scanning optical system, the procedure for acquiring the time change data of the previous synchronization signal, the procedure for acquiring the beam position at the writing position of the scanning optical system, and the above three procedures are repeated a plurality of times. A scanning optical system inspection method comprising: detecting a beam light beam writing position due to a synchronization position shift from time change data of a synchronization signal.   In the scanning optical system, a plurality of light sources are provided, and scanning is performed to a plurality of imaging positions by one or a plurality of beam flux deflecting means for deflecting a plurality of beam beams emitted from the plurality of light sources and a plurality of optical elements. A scanning optical system for imaging, or a scanning optical system inspection device applied to a scanning optical system that constitutes an image forming apparatus having a plurality of scanning optical systems and having a plurality of scanning and imaging positions. A third light source in which a plurality of scanning optical system inspection devices according to claim 1 are set at an imaging position, and an optical axis is fixed to be perpendicular to a scanning direction of each scanning imaging position; A second light beam for branching and reflecting the optical path of the light beam so that the light beam emitted from the three light sources is incident on the first light receiving means of each of the scanning optical system inspection devices applied to the respective scanning imaging positions. Second beam A bundle optical path changing means, a fourth light source having an optical path parallel to the third light source, and a beam optical beam emitted from the fourth light source applied to each scanning imaging position of the scanning optical system inspection apparatus 3. A third or a plurality of beam light beam path changing means for branching and reflecting an optical path of a beam light beam so as to enter each of the second or plural light receiving means. The scanning optical system inspection device according to any one of claims 6 to 6.   The fourth light source according to claim 10 is fixed to the second or plurality of light receiving means of one of the scanning optical system inspection devices applied to each scanning imaging position, and the second or plurality of light receiving units are fixed. 11. The scanning optical system inspection apparatus according to claim 10, wherein when the light receiving means moves, the attached fourth light source also moves to the same position.   The light source is controlled by correcting the beam beam position shift caused by the synchronization shift and the beam beam position shift amount acquired by the scanning optical system inspection method according to claim 7. A light source control device.   A scanning optical system comprising the light source control device according to claim 12.   A scanning optical system comprising the second light source according to claim 4, or the second light source according to claim 4 and the third and fourth light sources according to claim 10.   An image forming apparatus comprising the scanning optical system according to claim 13.

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