JP2005158455A - Electronic emission apparatus and apparatus including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a size, a thickness and weight, and reduce cost by improving processing efficiency and simplifying a constitution. <P>SOLUTION: An electronic emission apparatus comprises a cold electron emitting element 1 having a face-like electron emitting portion, and a window 2 arranged oppositely to the front of the electron emitting surface of this cold electron emitting element 1, and provides an acceleration means for accelerating electrons emitted from the electron emitting portion to emit them from the window 2 to the outside. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an electron emission device that emits electrons to the outside and a device including the same.

  FIG. 4 is a block diagram of a conventional electron emission device (electron beam irradiation device). In FIG. 4, the electron emission device includes a main body 100 formed in a bottomed cylindrical shape having a window portion, and electrons (heat) disposed on the bottom side in the main body 100 and having energy of about 0.1 eV or less. Electron), a high acceleration voltage generator 102 that accelerates electrons from the hot filament 101 toward the window, and a scanner 103 that scans the electrons accelerated by the high acceleration voltage generator 102. And a plate-like window foil 104 that closes the window portion in front of the scanner 103. In order to prevent the hot filament 101 from being disconnected or deteriorated due to oxidation or the like, and to suppress normal discharge in the high acceleration voltage generator 102 and to enable normal operation, the inside of the main body 100 is provided with this window. The foil 104 is closed and kept in a high vacuum state.

  In the electron emission device configured as described above, by supplying a current to the hot filament 101, the hot filament 101 is heated to a high temperature, and the hot electrons are emitted from the surface. The thermoelectrons receive energy by an electric field from a high acceleration voltage generator 102 that generates a high voltage and generates a high potential difference in the traveling direction of the electrons, and pass through the window foil 104 and radiate outside.

  Thus, if the object to be processed is arranged in front of the window foil 104 on the outside, electrons can be emitted to the object to be processed even if the outside is an environment under normal atmospheric pressure.

It has been proposed to use the electrons emitted from the electron emission device as described above for sterilization (see Patent Document 1, Non-Patent Document 1, etc.). For example, in Patent Document 1, a feed raw material is moved while being fluidized and continuously supplied, and the feed raw material is irradiated with an electron beam accelerated at an acceleration voltage of 1 to 10 MeV at an absorbed dose of 2.5 to 30 kGy. As a result, the feed material electron beam can be easily sterilized at a low temperature without causing deterioration in quality such as discoloration of the feed material and destruction of nutrients, and a large amount of feed material can be sterilized continuously. A sterilization method is disclosed.
JP-A-8-308508 Kosuke Nishikori, et al., “Utilization of ultraviolet rays and electron beams for sterilization”, Journal of the Illuminating Society of Japan, Vol. 81, No. 7 (July 1997)

  However, in the electron emission device as shown in FIG. 4, since the hot filament serving as the electron emitting portion is a dot or a line, the emitted electrons are a dot or a line. There is a problem that processing efficiency is low.

  Although it is possible to sequentially process a large surface workpiece by a scanner and its control unit, in order to make the emitted electrons planar in order to increase the processing efficiency, a plurality of hot filaments must be arranged, Since a special structure and material for high vacuum are required for the main body in order to maintain the inside of the main body in a high vacuum state, the configuration of the entire apparatus is complicated, large, heavy, and expensive.

  The high accelerating voltage generator increases the axial depth of the main unit, making it difficult to reduce the thickness and size of the device, reducing the degree of design freedom, and increasing the size and weight of the device to generate high voltage. And the cost increases. Furthermore, the vertical dimension must be ensured for the scanner, and the vertical dimension of the main body also increases.

  When high-energy electron beams are generated by accelerating electrons with high energy, high-energy radiation such as X-rays is generated by colliding with the material, and the irradiated object is activated. The device requires a complicated structure to prevent it, which is large, heavy and expensive. In addition, special management such as notification to the Science and Technology Agency and the appointment of the chief of radiation handling is required in accordance with regulations of the law (Nuclear Law, Occupational Safety and Health Law, etc.).

  In addition, since the electron energy to be radiated is high, it may affect or may affect the parts (for example, base materials, packaging materials, etc.) that do not want to be altered by the processing. Things are limited.

  Since electrons are scattered by the window foil of the window part and lost, the cooling means of the window part to be heated is required due to the loss, and the power consumption increases, so the structure becomes complicated and the maintenance cost increases. There is.

  Furthermore, since a hot filament is used, it takes time to reach a high temperature, electron emission cannot be instantaneously generated, and pulse driving becomes difficult.

  The present invention has been made in view of the above circumstances, and includes an electron emission device and a device including the electron emission device that can be reduced in size, thickness, weight, and cost by improving processing efficiency and simplifying the configuration. The purpose is to provide.

  An electron emission device according to claim 1 for solving the above-described problem is a cold electron-emitting device having a planar electron-emitting portion and a front-facing electron-emitting surface of the electron-emitting portion of the cold electron-emitting device. And an accelerating means for accelerating electrons emitted from the electron emission portion and radiating the electrons from the window portion to the outside.

  In this configuration, since the electron emission portion is planar, the processing efficiency is higher than when the electron sources are arranged in a plurality of planes, and the simplification of the configuration enables reduction in size, thickness, and weight. Thus, the cost can be reduced.

  According to a second aspect of the present invention, in the electron emission device according to the first aspect, the cold electron-emitting device is provided as the electron-emitting portion on a nanocrystalline silicon layer and on the front and back sides of the nanocrystalline silicon layer, respectively. The accelerating means includes a power source connected between the front surface electrode and the back surface electrode and applying a positive voltage to the front surface electrode. This structure includes a power source that is connected between the front electrode and the back electrode and applies a positive voltage to the front electrode, so that electrons can be accelerated to the front electrode side in the nanocrystalline silicon layer and passed through the front electrode side. Therefore, the electrons emitted from the electron emission portion can be accelerated and radiated to the outside from the window portion with a simple structure that can be reduced in size, thickness, weight, and cost.

  According to a third aspect of the present invention, in the electron emission device according to the first or second aspect, an anode electrode is provided on the window portion side, and the acceleration means is emitted from the electron emission portion with respect to the anode electrode. And a power source for applying a voltage for pulling and accelerating the electrons. In this configuration, electrons from the electron emission portion can be further pulled and accelerated toward the window side and emitted to the outside.

  According to a fourth aspect of the present invention, in the electron emission device according to the third aspect, the window portion includes the anode electrode, and the anode electrode is formed in a grid shape or a mesh shape. In this configuration, the configuration can be simplified by including the anode electrode in the window portion. In addition, since the anode electrode is formed in a grid shape or mesh shape, electrons can be prevented from being scattered and lost by a conventional window foil, so that heating due to the loss can be avoided, and cooling means for the window portion can be avoided. In addition to being unnecessary, since power consumption is reduced, the structure can be simplified and the maintenance cost can be reduced.

  According to a fifth aspect of the present invention, in the electron emission device according to any one of the first to fourth aspects, the cold electron emission element is integrally provided between the cold electron emission element and the window portion. An insulating layer is provided, and a plurality of holes are formed in the insulating layer. In this configuration, electrons from the electron emission portion can be emitted to the outside through the window portion, the manufacturing process of the cold electron emission element is simplified, and the structure can be further reduced in thickness.

  A sixth aspect of the present invention is a reforming device, a sterilizing device, an insecticidal device, or an ionizing device including the electron emission device according to any one of the first to fifth aspects, wherein the acceleration means , Accelerating the electrons emitted from the electron emitting portion to apply energy of 1 eV to 50 KeV. With this configuration, it is possible to emit electrons having an energy of 1 eV to 50 KeV, which has been difficult with conventional thermal electron emission devices.

  A seventh aspect of the invention is a reforming device, a sterilizing device, an insecticidal device, or an ionizing device including the electron emission device according to any one of the first to fifth aspects, wherein the acceleration means , Accelerating electrons emitted from the electron emitting portion to impart energy in the ultraviolet region. In this configuration, an effect similar to that of ultraviolet rays can be expected by applying energy in the ultraviolet region.

  The invention according to claim 8 is any one of a reforming device, a sterilizing device, an insecticidal device, or an ionizing device including the electron emission device according to any one of claims 1 to 5, wherein the accelerating means is , Accelerating electrons emitted from the electron emission portion to impart energy in the ionization region. In this configuration, electrons having energy in the ionization region can be emitted.

  According to the present invention, it is possible to increase the processing efficiency and reduce the size, thickness, weight, and cost by simplifying the configuration.

(Embodiment 1)
FIG. 1 is a configuration diagram of an electron emission device according to Embodiment 1 of the present invention, FIG. 2 is a diagram showing a cross-sectional structure example of a cold electron emission element in the electron emission device, and FIG. 3 is an emission electron energy of the cold electron emission device It is a figure which shows distribution.

  As shown in FIG. 1, the electron emission device of Embodiment 1 is disposed so as to oppose a cold electron emission element 1 having a planar electron emission portion and an electron emission surface front of the electron emission portion of the cold electron emission element 1. And an accelerating means including a DC power source 3 for accelerating the electrons emitted from the electron emitting portion and radiating the electrons from the window portion 2 to the outside.

  The cold electron emission element 1 is an electron such as a ballistic electron surface emission type (hereinafter referred to as “BSD type”), MIM (Metal Insulator Metal) type, or MIS (Metal Insulator Semiconductor) type based on porous (nanocrystalline) Si. In the first embodiment, for example, it is assumed that it is a BSD type electron source. Since these electron sources can be used even at a low degree of vacuum, it is not necessary to use the window foil 104 shown in FIG. 4, and the voltage of the electron energy can be reduced. In particular, a BSD type electron source can be used even under atmospheric pressure.

  FIG. 2 is a basic cross-sectional structure diagram of the cold electron-emitting device 1, and includes a silicon substrate 10, an electron emission portion provided on the silicon substrate 10, and a DC power source 19 included in the acceleration means. The electron emission portion includes a porous polysilicon layer (nanocrystalline silicon layer) 11 provided on the surface of the silicon substrate 10, and a front electrode 12 and a back electrode 13 formed on the front surface and the back surface of the silicon substrate 10, respectively. It has a cross-sectional structure. In the cold electron-emitting device 1 having such a configuration, the positive and negative ends of the DC power source 19 are connected to the front electrode 12 and the back electrode 13, respectively, so that electrons are accelerated in the porous polysilicon layer 11 to the front electrode 12 side. Therefore, the electrons emitted from the electron emission portion can be accelerated and emitted from the window portion 2 to the outside.

  The voltage of the DC power supply 19 is set to be equal to or higher than the voltage (about 10V) at which the emission current starts to be observed as the current flowing between the front surface electrode 12 and the back surface electrode 13 increases in response to this voltage increase. Here, in FIG. 3, A is the distribution characteristic of the emitted electron energy when the voltage of the DC power supply 19 is 12V, B is the distribution characteristic of the emitted electron energy when it is 14V, and C is 16V. The distribution characteristics of energy are shown. From FIG. 3, it can be seen that the energy of electrons radiated from the window portion 2 can also be increased or decreased by adjusting the output voltage of the DC power supply 19. As for responsiveness, since electrons can be emitted instantaneously, pulse driving is also possible.

  Returning to FIG. 1, the window 2 is not limited to the window foil 104 due to the characteristics of the cold electron-emitting device 1. For example, the window 2 may be a window hole, but in the first embodiment, a grid shape ( It is assumed that the anode electrode is formed in a line shape or a mesh shape. In the case of a mesh shape, the hole shape may be a circle, an ellipse, a rectangle, or the like, and the arrangement may be a vertical / horizontal arrangement or a staggered arrangement. In this way, by configuring the window portion 2, it is possible to prevent loss due to scattering of electrons in the window foil 104, so that heating due to the loss can be avoided, and no cooling means for the window portion is required, and consumption is also reduced. Since the power is reduced, the structure can be simplified and the maintenance cost can be reduced.

  The direct current power source 3 applies a voltage for pulling and accelerating electrons emitted from the electron emission portion of the cold electron emission device 1 to the window portion 2, and the surface electrode of the window portion 2 and the cold electron emission device 1. 12 are connected to both positive and negative ends. In this configuration, by adjusting the voltage of the DC power source 3, electrons emitted from the electron emission unit can be accelerated and given desired energy. By determining, the voltage level (including the negative voltage level) at which the energy can be applied is set.

  For example, if the energy of the electrons emitted from the electron emission portion of the cold electron emission element 1 is zero, the voltage emitted from the window portion 2 can be reduced by adjusting the voltage of the DC power supply 3 to 1V. An energy of 1 eV can be applied. Actually, as shown in FIG. 3, the energy of the electrons emitted from the electron emission portion of the cold electron emitter 1 increases in proportion to the voltage of the DC power supply 19, for example, the voltage of the DC power supply 19. Is in the range of 10 to 20 V, it has energy of several eV to tens of eV higher than that of conventional thermoelectrons. The voltage will be adjusted. Therefore, in the first embodiment, when viewed from the whole electron emission device, the increase / decrease control of the energy of the emitted electrons is performed mainly by adjusting the voltage of the DC power supply 3.

  Here, a specific example in the case of mainly adjusting the voltage of the DC power source 3 will be described. If the voltage of the DC power source 3 is mainly adjusted so that the energy of emitted electrons to the outside is less than 10 MeV, for example, Can be prevented from being activated. If the voltage of the DC power supply 3 is mainly adjusted so that it is less than 1 MeV, it will not be subject to regulations such as the Atomic Energy Act, and special management such as notification to the Science and Technology Agency and appointment of radiation manager It becomes unnecessary. If the voltage of the DC power supply 3 is mainly adjusted so as to be 300 KeV or less, X-rays that require complicated protective measures can be prevented from being generated. Thus, if it is the structure which mainly adjusts the voltage of the DC power supply 3, a structure will become simple and it will become possible to reduce in size, weight, and cost. In addition, when the place of use is domestic, there is no regulation by laws such as the Industrial Safety and Health Act. If it is set as the structure which adjusts the voltage of the DC power supply 3, a more desirable electron emission apparatus can be provided.

  Next, the operation of the electron emission apparatus having the above configuration will be described. If both the positive and negative ends of the DC power source 19 are connected to the front electrode 12 and the back electrode 13, respectively, and both the positive and negative ends of the DC power source 3 are connected to the window electrode 2 and the surface electrode 12 of the cold electron emission element 1, respectively, With the voltage of 19, the electrons are accelerated to the surface electrode 12 side in the porous polysilicon layer 11 and pass through the surface electrode 12 side. As a result, electrons are emitted in front of the surface electrode 12 of the cold electron emitter 1.

  The electrons emitted in front of the surface electrode 12 are pulled and accelerated to the window portion 2 side by the voltage of the DC power source 3, and energy corresponding to the voltage of the DC power source 3 is mainly applied to the outside through the window portion 2. Radiates to. Thus, if an object to be processed such as a solid, liquid, gas, or living thing is disposed in front of the window portion 2 on the outside, even if the outside is an environment under normal atmospheric pressure, Since electrons can be emitted, for example, properties of the object to be processed or surface modification (curing, polymerization, decomposition, crosslinking, oxidation, various chemical reactions such as excitation, ionization, ionization, surface tension, surface energy, wettability Adhesion, absorption rate, refractive index, crystal structure change, physical change such as defect occurrence, sterilization / disinfection / disinfection (including virus, mold, pollen), insecticidal, germination and aging, maturation due to DNA damage, etc. Including biological effects such as inhibition).

  As described above, according to the first embodiment, the electron emission portion of the cold electron emission element 1 (not only BSD but also MIM, MIS, etc.) has a planar shape. Thus, the processing of objects to be processed can be performed in a large area at a time, and the processing efficiency can be increased, and the simplification of the configuration can reduce the size, the thickness, and the weight, thereby reducing the cost.

  Further, since the cold electron emission element 1 (not only BSD but also MIM, MIS, etc.) can be used even at a low vacuum, it is not necessary to use the window foil 104, and an expensive vacuum exhaust device is not required. Since a special structure and material for maintaining a high vacuum are not required, the configuration is simplified, and the size, weight, and cost can be reduced. In particular, BSD can be used even under atmospheric pressure. In addition, the voltage of the electron energy can be reduced, and in this case, the high acceleration voltage generator 102 is not necessary, so that the size, thickness, and weight can be reduced, and the degree of freedom in design is improved.

  Further, the window portion 2 is a grid-like or mesh-like anode electrode, and the DC power supply 3 pulls and accelerates the electrons emitted from the electron emission portion of the cold electron emission element 1 with respect to the window portion 2. Therefore, the electrons from the electron emission portion can be traction-accelerated to the window portion 2 side and radiated to the outside. Further, the structure can be simplified and the maintenance cost can be reduced.

  In the first embodiment, the DC power source 3 is provided. However, even if the DC power source 3 is not provided, the positive and negative ends of the DC power source 19 are connected to the front electrode 12 and the back electrode 13, respectively. As described above, since electrons at the time of emission from the electron emission portion of the cold electron emission element 1 can have high energy of several eV to several tens eV, electrons can be emitted from the window portion 2 to the outside. . Thereby, the configuration can be simplified and the cost can be reduced. In short, the accelerating means of the invention described in claim 1 is not limited to the DC power source 19 and the DC power source 3 but may be only the DC power source 19.

  In the first embodiment, the window portion 2 has an integrated configuration including a grid-like or mesh-like anode electrode. However, the present invention is not limited to this, and an anode electrode is provided in the vicinity of the window portion 2 separately from the window portion 2, for example. Although a configuration may be used, it is preferable to configure the window unit 2 integrally because the configuration is simple.

  Further, as a modification of the first embodiment, since the cold electron emission element 1 can be pulse-driven, when an object to be processed is detected by the sensor by combining the electron emission device and the sensor, for example, a switch Both the positive and negative ends of the DC power supply 19 are connected to the front electrode 12 and the back electrode 13 via the elements, respectively, and the positive and negative ends of the DC power supply 3 are connected to the window portion 2 and the surface electrode 12 of the cold electron emitter 1 respectively. You may do it. Thereby, electrons can be emitted when necessary, and power consumption can be reduced. In addition to the configuration in which the presence or absence of the object to be processed is detected by the sensor, the amount, state, position, posture, type, etc. of the object to be processed are discriminated, and the switch element is switched on / off based on the information. In addition, by controlling the energy, irradiation amount, irradiation time, irradiation direction, etc. given to the emitted electrons, it is possible to perform processing under optimal conditions, improve processing reliability, and reduce unnecessary processing and power consumption. Become.

(Embodiment 2)
The electron emission device according to the second embodiment of the present invention is different from the first embodiment in that a plurality of holes having a shape corresponding to the grid-like or mesh-like window portion 2 are formed, and the cold electron-emitting device 1 and the window It has the insulating layer interposed integrally between the parts 2, It is characterized by the above-mentioned. As a forming method, a semiconductor, a MEMS technology, or the like can be used.

  In such a configuration, electrons from the electron emission portion of the cold electron emission device 1 can be emitted to the outside through the window portion 2, and the manufacturing process of the cold electron emission device 1 is simplified and the structure is also improved. Further reduction in thickness is possible.

(Embodiment 3)
The third embodiment according to the present invention is any one of a reforming device, a sterilizing device, an insecticidal device, and an ionizing device including the electron emission device of the first or second embodiment, and includes a DC power source 3 and a DC power source 19. In addition, by adjusting at least the voltage of the DC power source 3, the electrons emitted from the electron emission portion of the cold electron emission element 1 are accelerated to give energy of 1 eV to 50 KeV.

  Here, in the thermal electron emission device as shown in FIG. 4, it is difficult to emit electrons having energy of 50 KeV or less. However, according to the electron emission device of the first or second embodiment, the energy of 1 eV is used. Therefore, by adjusting the voltage of the DC power supply 3 at least, the electrons from the electron emission portion of the cold electron emission device 1 are accelerated to give energy of 1 eV to 50 KeV. Is possible.

  According to this configuration, it is possible to emit electrons having an energy of 1 eV to 50 KeV, which has been difficult with the conventional thermal electron emission device. As a result, various chemical reactions such as curing, polymerization, decomposition, crosslinking, oxidation, excitation, ionization and ionization, surface tension and surface energy, leakage, adhesion, absorption rate, refractive index, crystal structure change, defect generation, etc. Effects such as sterilization, sterilization and sterilization (including viruses, molds and pollen) due to physical changes, DNA damage, etc., biological effects such as insecticidal, germination and aging, suppression of maturation (hereinafter referred to as “primary effect”) In addition to the removal of harmful substances, deodorization, and removal of dust and tobacco smoke (hereinafter referred to as “secondary effect”), a reformer using an electron beam, which has been difficult until now, Application of sterilizers, insecticides, and ionizers to general consumer applications is possible. Specifically, the primary effect and the secondary effect are as follows: air purifier, air conditioner, humidifier, dehumidifier, clothes dryer, dish dryer, hand washing dryer, fan heater, cleaner, refrigerator, storage, cupboard , Shoe boxes, toilets, water purifiers, washing machines, freezers, ice machines, insecticides, etc.

  In addition, since the electron energy to be radiated is low, there is no influence on a portion (for example, a base material or a packaging material) that the processing object is not desired to be altered by the processing, and the processing object that can be processed is limited. Absent.

(Embodiment 4)
Embodiment 4 according to the present invention is any one of a reforming device, a sterilizing device, an insecticidal device, or an ionizing device including the electron emitting device of Embodiment 1 or 2, and adjusting the voltage of the DC power supply 19. Thus, electrons emitted from the electron emission portion of the cold electron emission element 1 are accelerated to apply energy in the ultraviolet region (4 to 8 eV).

  Here, the energy required for excitation of atoms and molecules is 4 eV, and the bond energy between atoms is 4 to 8 eV. Therefore, by emitting electrons having these energies to the outside, excitation of atoms and molecules, Bonds can be broken, and the properties or surface of the workpiece can be modified.

  According to this configuration, since only the DC power supply 19 is required, it is not necessary to provide the DC power supply 3, and the configuration can be simplified. Further, by radiating electrons having energy in the ultraviolet region including the region of excitation energy and binding energy from the window portion 2 to the outside, the same effect as that of ultraviolet rays can be expected.

(Embodiment 5)
The fifth embodiment according to the present invention is any one of a reforming device, a sterilizing device, an insecticidal device, or an ionizing device including the electron emission device of the first or second embodiment, and the voltage of the direct current power source 3 and the direct current power source 19. Is adjusted to accelerate electrons emitted from the electron emitting portion of the cold electron-emitting device 1 and apply energy (20 to 100 eV) in the ionization region.

  According to this configuration, since the ionization energy is several tens to 100 eV, by radiating electrons having that energy to the outside, ionization of atoms and molecules can be caused and the surface can be modified.

  Note that, when electrons having an energy lower than the ionization energy are radiated, the negative ions can be generated by attaching the electrons to the object, and the effect of the negative ions can be expected.

  Above ionization energy, positive ions are basically generated, but it is preferable in terms of increasing the processing efficiency because the electron multiplication effect by secondary electrons generated in proportion to the energy and the effect thereof can be expected. .

  In the above embodiment, it has been described that the electrons that have passed through the window portion 2 are emitted to the object to be processed. However, the object to be processed is arranged between the cold electron emitting device 1 and the window portion 2, and electrons are supplied to this. You may make it radiate | emit.

  Further, if the electron emission is performed with an energy of 4 eV or more corresponding to the ultraviolet energy region or the ionization energy region, a modification effect can be obtained.

It is a block diagram of the electron emission apparatus of Embodiment 1 by this invention. It is a figure which shows the example of a cross-section of the cold electron emission element in the electron emission apparatus. It is a figure which shows the emission electron energy distribution of the cold electron emission element. It is a block diagram of the conventional electron emission apparatus (electron beam irradiation apparatus).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cold electron emission element 2 Window part 3,19 DC power supply

Claims (8)

  A cold electron emission device having a planar electron emission portion, and a window portion arranged in front of the electron emission surface of the electron emission portion of the cold electron emission device to accelerate electrons emitted from the electron emission portion An accelerating means for radiating outside from the window is provided.   The cold electron-emitting device has a cross-sectional structure including a nanocrystalline silicon layer and a surface electrode and a back electrode provided on the front and back sides of the nanocrystalline silicon layer as the electron emitting portion, and the accelerating means 2. The electron emission apparatus according to claim 1, further comprising a power source connected between the front electrode and the back electrode to apply a positive voltage to the front electrode.   The anode part is provided on the window part side, and the acceleration means includes a power source for applying a voltage for pulling and accelerating electrons emitted from the electron emission part to the anode electrode. 3. The electron emission device according to 1 or 2.   4. The electron emission device according to claim 3, wherein the window portion includes the anode electrode, and the anode electrode is formed in a grid shape or a mesh shape.   The cold electron-emitting device has an insulating layer that is integrally interposed between the cold electron-emitting device and the window portion, and a plurality of holes are formed in the insulating layer. The electron emission device according to any one of claims 1 to 4.   6. A reforming device, a sterilizing device, an insecticidal device, or an ionizing device, comprising the electron emitting device according to claim 1, wherein the accelerating means is emitted from the electron emitting unit. An apparatus for accelerating electrons and applying energy of 1 eV to 50 KeV.   6. A reforming device, a sterilizing device, an insecticidal device, or an ionizing device, comprising the electron emitting device according to claim 1, wherein the accelerating means is emitted from the electron emitting unit. A device characterized by accelerating electrons and applying energy in the ultraviolet region.   6. A reforming device, a sterilizing device, an insecticidal device, or an ionizing device, comprising the electron emitting device according to claim 1, wherein the accelerating means is emitted from the electron emitting unit. A device characterized by accelerating electrons to give energy in an ionization region.

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