JP2005148321A - Pattern form and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern form in which a pattern having vastly different property has been efficiently formed and a method for manufacturing the same. <P>SOLUTION: The pattern form comprises a substrate, a property changing layer formed on the substrate, containing at least a photocatalyst, fine metal particles and a property imparting agent, and undergoing a change in property due to irradiation with energy, and a property changed pattern obtained by patternwise changing a property of the property changing layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pattern forming body having a pattern with different characteristics on the surface, which can be used for various applications including a color filter, a manufacturing method thereof, and the like.

  Conventionally, various methods for producing a pattern forming body for forming various patterns such as designs, images, characters, and circuits on a substrate have been produced.

  For example, when printing is described as an example, a lithographic printing plate used for lithographic printing, which is a kind of printing method, is a lithographic plate having a pattern composed of an oleophilic part that accepts ink and a part that does not accept printing ink. The lithographic printing plate is used to form an ink image to be printed on the lipophilic portion, and the formed image is transferred to paper or the like for printing. In such printing, a printing plate as a pattern forming body is produced by forming patterns such as characters and figures on the printing plate precursor as described above, and is used by being mounted on a printing press. Many printing plate precursors for offset printing, which are typical planographic printing plates, have been proposed.

  A printing plate for offset printing is produced by a method of exposing and developing through a mask on which a pattern is drawn on the printing plate precursor, or a method of exposing directly by an electrophotographic method and making a plate directly on the printing plate precursor. can do. An electrophotographic offset printing plate precursor is provided with a photoconductive layer mainly composed of photoconductive particles such as zinc oxide and a binder resin on a conductive substrate, and this is exposed as a photoconductor by electrophotography. In this method, an offset original plate, that is, a pattern forming body is obtained by forming a highly lipophilic image on the surface of the photoreceptor and subsequently hydrophilizing the non-image portion by treatment with a desensitizing solution. The hydrophilic portion is immersed in water or the like to make it oleophobic, and the printing ink is received in the oleophilic image portion and transferred to paper or the like. However, in the pattern formation, various post-exposure treatments such as treatment with a desensitizing solution are required.

  There has also been proposed a method for producing a lithographic printing plate precursor using a heat mode recording material capable of forming a pattern composed of a portion having high receptivity to ink and a portion having ink repellency by laser irradiation. Yes. The heat mode recording material does not require a process such as development, and has a feature that a printing plate can be produced simply by forming an image with a laser beam. There were problems in the processing of residues such as solid substances and the printing durability.

  In addition, as a method for forming a high-definition pattern, a photoresist layer coated on a substrate is subjected to pattern exposure, and after the exposure, the photoresist is developed, further etched, or a substance having functionality in the photoresist. There is known a method of manufacturing a pattern forming body by photolithography, such as directly forming a target pattern by exposing a photoresist using a photoresist.

  The formation of high-definition patterns by photolithography is used for the formation of colored patterns for color filters used in liquid crystal display devices, the formation of microlenses, the manufacture of fine electrical circuit boards, the manufacture of chromium masks used for pattern exposure, etc. However, depending on these methods, it is necessary to use a photoresist and develop with a liquid developer after exposure or to perform etching. In addition, when a functional substance is used as a photoresist, there is a problem that it deteriorates due to an alkali solution or the like used during development.

  A high-definition pattern such as a color filter is also formed by printing or the like, but the pattern formed by printing has problems such as positional accuracy, and it is difficult to form a high-precision pattern. .

  Therefore, by forming a layer on the base material using a coating liquid for characteristic change pattern formation containing a photocatalyst and a material whose characteristics change due to the action of the photocatalyst accompanying energy irradiation, and exposing the pattern The present inventors have studied a method for producing a pattern forming body that forms a pattern having changed characteristics (Patent Document 1). According to this method, it is possible to easily form a functional part such as a colored layer using the characteristics of the characteristic change layer.

  However, the above-described pattern forming body changes the characteristics of the portion irradiated with energy by using the action of the photocatalyst to form patterns having different characteristics. It takes a certain amount of time to generate. If this time can be shortened, further efficiency can be achieved.

In order to obtain a functional element with high accuracy, it is preferable to form a large characteristic difference on the pattern forming body. However, such a large characteristic difference is allowed within a predetermined time allowed for efficiency. In order to form it, it is necessary to improve the speed of change in characteristics due to exposure on the surface of the pattern forming body.
JP-A-11-344804

  Therefore, it is desired to provide a pattern forming body in which patterns having greatly different characteristics are efficiently formed, a manufacturing method thereof, and the like.

  The present invention has a base material and a property change layer that is formed on the base material and contains at least a photocatalyst, metal fine particles, and a property-imparting agent, and the property changes upon energy irradiation. There is provided a pattern forming body characterized by having a characteristic change pattern in which the characteristic of the characteristic change layer is changed into a pattern.

  According to the present invention, since the metal fine particles are contained in the characteristic change layer, the sensitivity of the photocatalyst when the characteristic change layer is irradiated with energy can be improved. As a result, the above-mentioned property-imparting agent can be efficiently decomposed or modified by the action of the photocatalyst accompanying energy irradiation, and the above-mentioned property change pattern having a large property difference is formed in a short time. be able to. In the present invention, the color of the characteristic change pattern can be changed by the action of the metal fine particles. Therefore, according to the present invention, when the functional portion is formed on the characteristic change pattern using the characteristic difference of the characteristic change layer, the characteristic change pattern can be easily identified and alignment can be easily performed. Also has the advantage of being able to.

  In the present invention, it is also preferable that the metal fine particles have a particle size in the range of 1 nm to 100 nm. By including the metal fine particles having such a particle size in the characteristic change layer, the sensitivity of the photocatalyst can be improved, and a characteristic change pattern having a large characteristic difference can be formed in a short time. Because.

  Moreover, in the said invention, it is preferable that the said metal fine particle is 1 type, or 2 or more types of substances selected from gold | metal | money, silver, copper, platinum, lead, tin, nickel, cobalt, cadmium, and iron. It is because the sensitivity of the photocatalyst can be improved by containing such a metal in the property change layer.

  In the said invention, it is preferable that the said characteristic provision agent shall be used as a binder of the said characteristic change layer. In the present invention, the metal fine particles can also function as a binder in the property change layer, but the property-imparting agent also functions as a binder, so that the strength of the property change layer can be further increased. This is because it can be expensive.

  Moreover, it is preferable that the said property-imparting agent is organopolysiloxane. This is because the organopolysiloxane can also function as a property-imparting agent and a binder as described above.

Further, the organopolysiloxane is YnSiX _(4-n) (where Y is an alkyl group, a fluoroalkyl group, a vinyl group, an amino group, a phenyl group, a chloroalkyl group, an isocyanate group, or an epoxy group, or these X represents an alkoxyl group or halogen, and n is an integer from 0 to 3.) One or more hydrolyzed condensates or cohydrolytic condensates of silicon compounds represented by An organopolysiloxane that is a product is preferable. This is because by using such an organopolysiloxane, the above-described difference in characteristics can be exhibited more.

  In the above invention, the property imparting agent is a liquid repellency imparting agent having liquid repellency, and the wettability in which the property change layer changes its wettability so that the contact angle with the liquid is reduced by energy irradiation. It can be a change layer. In this case, the region on the characteristic change layer that is not irradiated with energy can be a liquid-repellent region, and the region that is irradiated with energy can be a lyophilic region. For example, the functional part can be easily formed only in the lyophilic region by an ink jet method or the like.

  Moreover, this invention provides the functional element characterized by the functional part being formed on the said characteristic change pattern of one of the pattern formation bodies mentioned above.

  According to the present invention, the functional part can be a functional element that is easily formed by utilizing the difference in characteristics of the characteristic change pattern of the pattern forming body. Further, in the present invention, when the functional part is formed, alignment can be performed using the color difference of the characteristic change pattern, so that the functional part is formed at an accurate position. And a high-quality functional element.

  The present invention also provides a color filter, wherein the functional part of the functional element is a pixel part.

  According to the present invention, the pixel portion can be formed with high definition by, for example, an ink jet method using the characteristic difference or color change of the characteristic change layer, and a high quality color filter. It can be.

  Moreover, this invention provides the electroconductive pattern characterized by the functional part of the said functional element being metal wiring.

  According to the present invention, a high-definition metal wiring can be formed in a target pattern by using, for example, an electrolytic jet method or the like by utilizing the difference in characteristics of the characteristic change layer. A high quality conductive pattern can be obtained.

  The present invention provides an organic EL element, wherein the functional part of the functional element is an organic electroluminescent (hereinafter also referred to as organic EL) layer.

  According to the present invention, the organic EL layer can be formed in a high-definition pattern using the difference in characteristics of the characteristic change layer, and a high-quality organic EL element can be obtained. .

  Furthermore, the present invention provides a biochip substrate, wherein the functional part of the functional element has adhesion to a biological substance.

  ADVANTAGE OF THE INVENTION According to this invention, the functional part which has a biological substance and adhesiveness can be formed in the highly fine pattern shape, and it can be set as the high quality base material for biochips.

  Moreover, this invention provides the coating liquid for pattern formation bodies characterized by including a photocatalyst, a metal microparticle, and a characteristic provision agent.

  According to the present invention, since the metal fine particles are contained together with the photocatalyst, the sensitivity of the photocatalyst can be improved when the pattern forming body is formed by applying the coating liquid for the pattern forming body, The property-imparting agent in the region irradiated with energy can be efficiently decomposed or modified in a short time. At this time, the color of the region irradiated with energy may be changed by the action of the metal fine particles.

  In the said invention, it is preferable that the average particle diameter of the said metal fine particle exists in the range of 1 nm-100 nm. It is because the sensitivity of a photocatalyst can be improved because the average particle diameter of the said metal fine particle exists in the said range.

  Moreover, in the said invention, it is preferable that the said metal fine particle is 1 type, or 2 or more types of substances selected from gold | metal | money, silver, copper, platinum, lead, tin, nickel, cobalt, cadmium, and iron. It is because the sensitivity of the photocatalyst can be improved by containing such a metal in the property change layer.

  Furthermore, in the said invention, it is preferable that the said property-imparting agent is organopolysiloxane. This is because the organopolysiloxane can function as a binder in addition to the function as a property-imparting agent, and the formed layer can be a high-strength layer.

The organopolysiloxane is YnSiX _(4-n) (where Y is an alkyl group, a fluoroalkyl group, a vinyl group, an amino group, a phenyl group, a chloroalkyl group, an isocyanate group, or an epoxy group, or these One or two or more hydrolyzed condensates or cohydrolyzed condensates of a silicon compound represented by: X represents an alkoxyl group or halogen, and n is an integer from 0 to 3. It is preferable that it is organopolysiloxane which is. This is because by using such an organopolysiloxane, the difference in characteristics as described above can be increased.

  Furthermore, in the said invention, the said characteristic imparting agent can be made into the liquid repellency imparting agent which has liquid repellency and is decomposed | disassembled or modified | denatured by the effect | action of the photocatalyst accompanying energy irradiation. As a result, when the layer is formed by applying the pattern forming body coating liquid, the non-energy-irradiated region can be the liquid-repellent region, and the energy-irradiated region can be the lyophilic region. is there.

  Moreover, in the said invention, it is preferable that the said metal fine particle is added as a metal colloid liquid. This is because the metal fine particles can be stably dispersed in the coating liquid for the pattern forming body.

The present invention also includes a coating liquid adjusting step of adjusting a pattern forming body coating liquid by mixing a photocatalyst, a metal colloid liquid, and a property-imparting agent,
On the base material, a coating liquid coating step for coating the pattern forming body coating liquid,
A drying step of drying the coating liquid for the pattern forming body applied by the coating liquid application step to form a characteristic change layer;
And a characteristic change pattern forming step of forming a characteristic change pattern in which the characteristics of the characteristic change layer are changed by irradiating energy to the characteristic change layer.

  In the present invention, since the fine metal particles are contained in the coating liquid for the pattern forming body adjusted by the coating liquid adjusting step, the sensitivity of the photocatalyst is improved when the characteristic change layer is formed. Can do. Thereby, the difference in the characteristics of the characteristic change pattern formed in the characteristic change pattern forming step can be increased in a short time, and the pattern formed body can be manufactured efficiently.

  According to the present invention, the above-mentioned property change agent can be efficiently decomposed or modified by the action of the photocatalyst accompanying energy irradiation, and the property change pattern having a large property difference is formed in a short time. It can be a body. Further, in the present invention, the color of the characteristic change pattern can be changed by the action of the metal fine particles, so that the functional property is obtained by utilizing the characteristic difference of the characteristic change layer on the characteristic change pattern. When the portion is formed, it is possible to easily identify the characteristic change pattern and to easily perform alignment.

The present invention relates to a pattern forming body having a pattern with different characteristics on the surface, which can be used for various applications including a color filter, a method for producing the pattern forming body, and a coating for the pattern forming body used for the pattern forming body. The present invention relates to a liquid and a color filter using the pattern forming body.
Each will be described below.

A. First, the pattern forming body coating solution of the present invention will be described. The pattern forming body coating liquid of the present invention contains a photocatalyst, metal fine particles, and a property-imparting agent.

  The pattern forming body coating liquid of the present invention contains a photocatalyst and a property-imparting agent. Therefore, when the pattern forming body coating liquid is applied to form a layer, it is accompanied by energy irradiation. By the action of the photocatalyst, the property-imparting agent can be decomposed or modified to be used as a layer whose properties change. Here, in the present invention, since the metal fine particles are contained together with the photocatalyst, the sensitivity of the photocatalyst can be improved by the action of the metal fine particles. As a result, the layer formed by applying the pattern forming body coating liquid can be a layer whose characteristics can be changed into a high-definition pattern in a short time, and can be used for various applications. Can be possible.

  In the present invention, when the layer formed by applying the pattern forming body coating liquid is irradiated with energy, the color of the region irradiated with energy is changed by the action of the metal fine particles. Can do. As a result, it is possible to visually recognize a region whose characteristics have been changed by irradiation of energy. For example, when forming a functional part or the like on the layer by utilizing the difference in the characteristics, it is easy to take alignment, etc. Thus, a high-definition functional part can be formed by a simpler process.

  Such a mechanism of action is not necessarily clear, but since the contained metal is fine particles, the metal fine particles are hybridized with the photocatalyst and contained in the layer, thereby improving the sensitivity of the photocatalyst. It is thought that the color changes due to oxidation or reduction by the action of the photocatalyst accompanying the energy irradiation.

  Hereinafter, each material which comprises the coating liquid for pattern formation bodies of this invention is each demonstrated in detail.

1. Metal Fine Particles First, the metal fine particles contained in the pattern forming body coating liquid of the present invention will be described. The metal fine particles contained in the pattern forming body coating liquid of the present invention are not particularly limited as long as the sensitivity of the photocatalyst described later can be improved. Silver, copper, platinum, lead, tin, nickel, cobalt, cadmium, iron, and metals having a smaller ionization tendency than chromium, and the like can be used, and these can be used alone or in combination. It is because the sensitivity of the photocatalyst described later can be improved by containing these metals in the coating liquid for pattern forming body. In the present invention, gold, platinum, silver, or copper having a small ionization tendency is preferable among the above.

  The average particle diameter of the metal fine particles in the pattern forming body coating liquid of the present invention is preferably in the range of 1 nm to 100 nm, more preferably in the range of 5 nm to 50 nm, and particularly preferably in the range of 10 nm to 20 nm. . This is because the sensitivity of the photocatalyst described later can be further improved when the particle diameter is within such a range. Here, in the present invention, it is preferable that the metal fine particles are added as a metal colloid liquid in order to make the metal fine particles have such an average particle diameter in the coating liquid for pattern forming body. . This is because the dispersion stability of the metal fine particles can be improved even in the coating liquid for the pattern forming body. In the case where metal fine particles are added as the metal colloid liquid, the metal fine particles may have an organic component attached to the surface thereof, or may have a surface coated with an organic component. May be.

  In the present invention, when the weight% of the photocatalyst contained in the pattern forming body coating liquid is 1, the weight percentage of the metal fine particles is preferably within the range of 0.0001-10. The metal fine particles are preferably contained in an amount of 0.001% by weight to 1% by weight in the solid content of the pattern forming body coating liquid. It is because the sensitivity of a photocatalyst can be improved by containing the metal fine particle in such a range.

2. Next, the photocatalyst used in the present invention will be described. The photocatalyst used in the present invention is not particularly limited as long as it is excited by energy irradiation and can decompose or modify a property-imparting agent described later. Although the mechanism of action of photocatalyst typified by titanium dioxide as described below is not necessarily clear, carriers generated by light irradiation react directly with nearby compounds or in the presence of oxygen and water. It is considered that the chemical structure of organic matter is changed by the generated active oxygen species. In the present invention, this carrier is considered to act on the property-imparting agent described later.

Examples of the photocatalyst used in the present invention include titanium dioxide (TiO ₂ ), zinc oxide (ZnO), tin oxide (SnO ₂ ), strontium titanate (SrTiO ₃ ), tungsten oxide (WO ₃ ), which are known as photo semiconductors. Bismuth oxide (Bi ₂ O ₃ ) and iron oxide (Fe ₂ O ₃ ) can be mentioned, and one or a mixture of two or more selected from these can be used.

  In the present invention, titanium dioxide is particularly preferably used because it has a high band gap energy, is chemically stable, has no toxicity, and is easily available. Titanium dioxide includes an anatase type and a rutile type, and both can be used in the present invention, but anatase type titanium dioxide is preferred. Anatase type titanium dioxide has an excitation wavelength of 380 nm or less.

Examples of such anatase type titanium dioxide include hydrochloric acid peptizer type anatase type titania sol (STS-02 manufactured by Ishihara Sangyo Co., Ltd. (average particle size 7 nm), ST-K01 manufactured by Ishihara Sangyo Co., Ltd.), nitric acid solution An anatase type titania sol (TA-15 manufactured by Nissan Chemical Co., Ltd. (average particle size 12 nm)) and the like can be mentioned.
The smaller the particle size of the photocatalyst, the more effective the photocatalytic reaction occurs. The average particle size is preferably 50 nm or less, and the photocatalyst of 20 nm or less is particularly preferable.

  Further, a visible light responsive type may be used as the titanium oxide. Visible light responsive titanium oxide is also excited by the energy of visible light. Examples of such a visible light responsive method include a method of nitriding titanium oxide.

When titanium oxide (TiO ₂ ) is subjected to nitriding treatment, a new energy level is formed inside the band gap of titanium oxide (TiO ₂ ), and the band gap is narrowed. As a result, the excitation wavelength of titanium oxide (TiO ₂ ) is usually 380 nm, but it can be excited even by visible light having a longer wavelength than the excitation wavelength. As a result, the wavelength in the visible light region of energy irradiation from various light sources can also contribute to the excitation of titanium oxide (TiO ₂ ), so that it is possible to further increase the sensitivity of titanium oxide. .

Here, the nitriding treatment of titanium oxide referred to in the present invention is a treatment for replacing part of the oxygen sites of the titanium oxide (TiO ₂ ) crystal with nitrogen atoms, or between the lattices of the titanium oxide (TiO ₂ ) crystal. A treatment of doping nitrogen atoms or a treatment of arranging nitrogen atoms at the grain boundaries of a polycrystalline aggregate of titanium oxide (TiO ₂ ) crystals.

The method of nitriding titanium oxide (TiO ₂ ) is not particularly limited. For example, crystalline titanium oxide fine particles are doped with nitrogen by heat treatment at 700 ° C. in an ammonia atmosphere, and the nitrogen is doped. Examples thereof include a method of forming a dispersion using fine particles and an inorganic binder, a solvent, or the like.

  Such a photocatalyst is preferably contained in the solid content in the coating solution for a pattern forming body of the present invention in an amount of 0.01% by weight to 50% by weight, especially 0.1% by weight to 10% by weight. Thereby, when energy is irradiated to the layer to which the coating liquid for pattern forming body is applied, the property-imparting agent described later can be decomposed or modified, and the surface properties of the layer can be changed. Because it becomes.

3. Characteristic imparting agent Next, the property imparting agent used for the coating liquid for pattern forming bodies of the present invention will be described. The property-imparting agent used in the pattern forming body coating liquid of the present invention is, for example, decomposed or decomposed by the action of the photocatalyst accompanying energy irradiation when the pattern forming body coating liquid is applied to form a layer. The type or the like is not particularly limited as long as it is modified to change the characteristics of the layer surface and can change the characteristics in this way. For example, it is a material having a liquid repellent functional group, and the wettability of the surface may be changed by decomposing or replacing the functional group of the surface by the action of the photocatalyst accompanying energy irradiation, Further, it may be a molecule having a functional group protected with a photosensitive protective group, which is deprotected by the action of a photocatalyst accompanying energy irradiation and changes its adhesion to cells.

  In the present invention, it is preferable that the property-imparting agent is also used as a binder. In the present invention, depending on the content of the metal fine particles and the like, the metal fine particles can also function as a binder when forming a layer. This is because when a layer is formed by applying a coating solution for a pattern forming body, a higher strength layer can be obtained.

  The property-imparting agent used also as such a binder is not particularly limited as long as it has a main chain that is difficult to be deteriorated and decomposed by the action of the photocatalyst, but an organopolysiloxane is particularly used. preferable. This is because an organopolysiloxane is contained in the pattern forming body coating solution, whereby a layer that causes the above-described property change can be formed.

  Examples of the organopolysiloxane used in the present invention include (a) an organopolysiloxane that exhibits high strength by hydrolyzing and polycondensing chloro or alkoxysilane by sol-gel reaction or the like, and (b) water repellency and water repellency. Mention may be made of organopolysiloxanes such as organopolysiloxanes which are crosslinked with reactive silicones which are excellent in oiliness.

In the case of (a) above, the general formula:
Y _n SiX _(4-n)
(Where Y is an alkyl group, fluoroalkyl group, vinyl group, amino group, phenyl group, chloroalkyl group, isocyanate group, or epoxy group, or an organic group containing these, and X is an alkoxyl group, acetyl group, or Represents halogen, n is an integer from 0 to 3)
It is preferable that it is the organopolysiloxane which is a 1 type, or 2 or more types of hydrolysis condensate or cohydrolysis condensate of the silicon compound shown by these. Here, the alkoxy group represented by X is preferably a methoxy group, an ethoxy group, a propoxy group, or a butoxy group. Moreover, it is preferable that the carbon number of the whole organic group shown by Y exists in the range of 1-20, especially in the range of 5-10.

  Thus, when a layer is formed by applying the pattern forming body coating liquid, for example, when Y having a fluoroalkyl group having liquid repellency is used, the surface is made liquid repellent by Y. This is because Y can be decomposed and made lyophilic by the action of the photocatalyst accompanying energy irradiation. In addition, for example, when Y having an amino group or the like having adhesiveness with a cell is used, the surface can have adhesiveness with the cell by the Y, and is accompanied by energy irradiation. This is because Y can be decomposed by the action of the photocatalyst, and can have no adhesiveness to cells.

  In addition, examples of the reactive silicone (b) include compounds having a skeleton represented by the following general formula.

However, n is an integer of 2 or more, R ^1, R ² are each a substituted or unsubstituted alkyl having 1 to 10 carbon atoms, alkenyl, aryl or cyanoalkyl group, the total molar ratio of 40% or less Vinyl, phenyl and phenyl halide. In addition, it is preferable that R ¹ and R ² are methyl groups because the surface energy is the smallest, and it is preferable that the methyl groups are 60% or more by molar ratio. In addition, the chain end or side chain has at least one reactive group such as a hydroxyl group in the molecular chain.

  Moreover, you may mix the stable organosilicon compound which does not carry out a crosslinking reaction like dimethylpolysiloxane with said organopolysiloxane.

  Such a property-imparting agent is preferably contained in the solid content of the pattern-forming body coating solution in an amount of 0.01 wt% to 50 wt%, particularly about 0.1 wt% to 10 wt%.

  Here, the property-imparting agent used in the present invention is preferably a liquid-repellent agent that has liquid repellency and is decomposed or modified by the action of a photocatalyst accompanying energy irradiation. By using such a liquid repellency-imparting agent, a region to which the pattern forming body coating liquid is applied, a region where energy is not irradiated, a region having liquid repellency, and a region irradiated with energy Can be made into a lyophilic region having a lyophilic property by decomposing or modifying the liquid repellency-imparting agent. This is because it is possible to easily form a functional part by utilizing a difference in wettability between a region irradiated with energy and a region not irradiated with energy. Hereinafter, such a liquid repellency imparting agent will be described.

  As described above, the liquid repellency imparting agent used in the present invention is not particularly limited as long as it has liquid repellency and can be decomposed or modified by the action of a photocatalyst accompanying energy irradiation. For example, when a layer is formed by applying a coating solution for a pattern forming body, the layer may function as a binder as described above, or may not function as a binder. Also good. Moreover, you may mix and use these.

  Here, having liquid repellency means that the functional part forming coating applied to form a functional part with this layer when the pattern forming body coating solution is applied to form a layer. It means that the wettability with the working liquid can be lowered. Specifically, in a region where energy is not irradiated, the contact angle with respect to the functional part forming coating solution is preferably 30 ° or more, more preferably 40 ° or more, and particularly preferably 50 ° or more. . If the contact angle with the functional part-forming coating solution is small in a region where energy is not irradiated, the liquid repellency is not sufficient and the functional part-forming coating solution may remain. It is.

On the other hand, when energy is irradiated, it is preferable that the wettability with the functional part forming coating liquid can be improved. Specifically, it is preferable that the contact angle with respect to the functional part-forming coating solution is 20 ° or less, particularly 10 ° or less. If the contact angle with the coating solution for forming the functional part in the part irradiated with energy is high, the spread of the coating liquid for forming the functional part in this part may be inferior, such as lack of a functional part. This is because problems may arise.
In addition, the contact angle with the functional part forming coating liquid here refers to the contact angle between the layer coated with the pattern forming body coating liquid and the functional part forming coating liquid (contact angle measuring device ( It was measured using a Kyowa Interface Science Co., Ltd. CA-Z type) (after dropping a droplet from a microsyringe and 30 seconds later), and the result was obtained or the result was graphed.

  Here, among the liquid repellency imparting agents used in the present invention, those having no function as a binder have a liquid repellency functional group, and when a pattern forming body coating liquid is applied In addition, surfactants or the like that are oriented on the surface and exhibit liquid repellency can be mentioned. Examples of such surfactants include NIKKOL BL, BC, BO, and BB series manufactured by Nikko Chemicals Co., Ltd. Hydrocarbon, DUON FON, ZONL FSN, FSO, Asahi Glass Co., Ltd. Surflon S-141, 145, Dainippon Ink & Chemicals Co., Ltd. Megafac F-141, 144, Neos Co., Ltd. 200, F251, Daikin Industries, Ltd. Unidyne DS-401, 402, 3M Corporation, Fluorad FC-170, 176, etc. Surfactant etc. can be mentioned. Cationic surfactants, anionic surfactants, and amphoteric surfactants can also be used.

  Such a liquid repellency imparting agent having no function as a binder is 0.01 wt% to 10 wt%, particularly 0.1 wt% to 1 wt% in the solid content of the coating liquid for pattern forming body. It is preferable to be contained to the extent.

  On the other hand, as the liquid repellency imparting agent having a function as a binder, organopolysiloxane as described above can be used. In particular, when an organopolysiloxane having a fluoroalkyl group is used, since the layer before energy irradiation can be made particularly high in liquid repellency, when high liquid repellency is required, It is preferable to use an organopolysiloxane having these fluoroalkyl groups. Specific examples of such organopolysiloxanes include one or two or more hydrolyzed condensates and cohydrolyzed condensates of fluoroalkylsilane, which are generally known as fluorine-based silane coupling agents. For example, what is described in JP2003-195029A can be used.

  The liquid repellency imparting agent having such a function as a binder is about 0.01 wt% to 50 wt%, particularly about 0.1 wt% to 10 wt% in the solid content of the coating liquid for pattern forming body. It is preferable to contain.

4). Pattern Forming Body Coating Liquid The pattern forming body coating liquid of the present invention is not particularly limited as long as it contains the above-described metal fine particles, photocatalyst, and property-imparting agent. Depending on the case, it may be appropriate to have additives and the like.

  For example, polyvinyl alcohol, unsaturated polyester, acrylic resin, polyethylene, diallyl phthalate, ethylene propylene diene monomer, epoxy resin, phenol resin, polyurethane, melamine resin, polycarbonate, polyvinyl chloride, polyamide, polyimide, styrene butadiene rubber, chloroprene rubber, polypropylene , Oligomers such as polybutylene, polystyrene, polyvinyl acetate, polyester, polybutadiene, polybenzimidazole, polyacrylonitrile, epichlorohydrin, polysulfide, polyisoprene, polymers, and the like can also be contained.

  Moreover, the coating liquid for pattern forming bodies of this invention may contain a various solvent etc. as needed. When a layer containing a photocatalyst is formed using a solvent having a high boiling point, the sensitivity of the photocatalyst may decrease.In the present invention, the above-described metal fine particles are contained, and in such a case, Also, the sensitivity can be improved.

  Here, the manufacturing method of the pattern forming body coating liquid of the present invention is not particularly limited as long as it is a method capable of manufacturing the pattern forming body coating liquid. In this case, as described above, the metal fine particles are preferably added as a metal colloid solution. Thereby, the metal fine particles can be stably dispersed without agglomeration in the pattern forming body coating liquid, and the layer is formed by applying the pattern forming body coating liquid. This is because the sensitivity of the photocatalyst can be stably improved. Examples of a method for producing a coating solution for a pattern forming body using such a metal colloid solution include a method in which a metal colloid solution is added and mixed in a solution in which the photocatalyst and the property-imparting agent are mixed. Can be mentioned.

  The metal colloid liquid used in the present invention is preferably composed of a solid component mainly composed of particles composed of a metal component and an organic component, and a solvent. This is because the dispersion stability of the particles in the solution is high, and the metal colloid particles can hardly aggregate.

  In the present invention, the photocatalyst is also preferably used in the form of a sol solution such as the above-described titanium oxide sol solution. This is because the photocatalyst can also be stably dispersed in the coating liquid for pattern forming body.

B. Next, the pattern forming body of the present invention will be described. The pattern-forming body of the present invention comprises a base material, and a property change layer that is formed on the base material and contains at least a photocatalyst, metal fine particles, and a property-imparting agent, and the property changes upon energy irradiation. The characteristic change layer has a characteristic change pattern in which the characteristic of the characteristic change layer is changed into a pattern.

  For example, as shown in FIG. 1, the pattern forming body of the present invention includes a base material 1, a characteristic change layer 2 formed on the base material 1, and a characteristic change pattern 3 in which the characteristics of the characteristic change layer 2 are changed. It has.

  According to the present invention, since the photocatalyst and the property-imparting agent are contained in the property-changing layer, the property-imparting agent is decomposed or modified by the action of the photocatalyst by irradiating the property-changing layer with energy. The characteristic change pattern in which the characteristic has changed can be easily formed. Here, in the present invention, since the metal fine particles are contained in the property change layer, the sensitivity of the photocatalyst can be improved, and a property change pattern having a large property difference is formed efficiently in a short time. Pattern forming body.

Furthermore, since the metal fine particles are contained in the characteristic change layer used in the present invention, the color of the region irradiated with energy can be changed by the action of the metal fine particles. As a result, it is possible to easily distinguish the characteristic change pattern in which the characteristic of the characteristic change layer has changed from other regions, and to facilitate alignment when forming the functional portion on the characteristic change pattern. It can be taken. Therefore, according to this invention, it can be set as the pattern formation body which can form a high-definition functional part by a simpler process.
Hereinafter, each configuration of the pattern forming body of the present invention will be described in detail.

1. Characteristic Change Layer First, the characteristic change layer used in the pattern forming body of the present invention will be described. The property changing layer used in the pattern forming body of the present invention is formed on a base material to be described later, and contains at least a photocatalyst, metal fine particles, and a property-imparting agent. The type of change is not particularly limited. In the present invention, the change in the properties of the property change layer is determined by the property-imparting agent. By using a material having a liquid repellent functional group as a characteristic imparting agent, for example, by decomposing or substituting the functional group on the surface by the action of a photocatalyst accompanying energy irradiation, It may be a wettability changing layer that changes wettability, and a molecule having a functional group protected by a photosensitive protective group is used as a property-imparting agent, and it is deprotected by the action of a photocatalyst accompanying energy irradiation and adheres to cells. It is good also as a cell adhesiveness change layer etc. in which property changes.

  In the present invention, organopolysiloxane is preferably used as a property-imparting agent in the property-changing layer. Depending on the content of the metal fine particles, etc., the metal fine particles can also function as a binder when forming a layer, but the organopolysiloxane has not only the above properties but also a binder. This is because the characteristic change layer can be a higher strength layer.

  In the present invention, among the above, the liquid repellency imparting agent having liquid repellency is contained, and the surface of the liquid repellency imparting agent is decomposed or modified by the action of the photocatalyst accompanying energy irradiation. It is preferable to use a wettability changing layer that lowers the contact angle with the liquid. This makes it possible to easily form a liquid-repellent region that has not been irradiated with energy and a lyophilic region that has been irradiated with energy. This difference in wettability makes it easy to function by, for example, an inkjet method. This is because the sex part can be formed.

  Here, having liquid repellency means that the wettability with a functional part forming coating liquid or the like applied when forming a functional part on a characteristic change pattern to be described later is low. Specifically, it is preferable that the contact angle of the wettability changing layer before energy irradiation with respect to the functional part forming coating liquid is 30 ° or more, especially 40 ° or more, and particularly 50 ° or more. . This is because when the contact angle with the liquid is small, the liquid repellency is not sufficient, and the functional part forming coating liquid may remain.

On the other hand, in the region where the wettability changing layer is irradiated with energy, it is preferable that the wettability with the functional part forming coating liquid is good. Specifically, the layer is preferably such that the contact angle with respect to the applied functional part-forming coating solution is 20 ° or less, particularly 10 ° or less. If the contact angle with the liquid in the part irradiated with energy is high, the spread of the coating liquid for forming the functional part in this part may be inferior, and problems such as lack of the functional part may occur. Because.
In addition, the contact angle with the functional part forming coating liquid here is measured by the method described above.

  Here, the method for forming the characteristic change layer as described above is not particularly limited as long as it is a method capable of forming the characteristic change layer. For example, the above-mentioned “A. It can be formed by applying the pattern forming body coating liquid described in “Coating liquid” onto a substrate which will be described later, followed by baking. The coating at this time can be performed by a known coating method such as spin coating, spray coating, dip coating, roll coating, or bead coating. Moreover, as a method of drying the pattern formation body coating liquid by baking etc., it can carry out using a hotplate, an infrared heater, oven, etc., for example. The thickness of the characteristic change layer is preferably in the range of 0.05 to 10 μm.

Further, when the number of metal atoms contained in the photocatalyst in the characteristic change layer is 1, the number of metal atoms contained in the metal fine particles is within a range of 0.0001-10. preferable. This is because the metal fine particles can exhibit functions such as improving the sensitivity of the photocatalyst and changing the color of the region irradiated with energy. Measurement of the number of metal atoms of the metal fine particles with respect to the number of metal atoms contained in the photocatalyst can be performed by XPS or the like.
Here, the photocatalyst, the metal fine particles, and the property-imparting agent contained in the property-changing layer used in the present invention are the same as those described in the above-mentioned “A. Pattern forming body coating solution”. Explanation here is omitted.

2. Characteristic Change Pattern Next, the characteristic change pattern of the present invention will be described. The characteristic change pattern in the present invention is a change in the characteristic of the characteristic change layer.

  In the present invention, by forming this characteristic change pattern on the pattern forming body, it is easy to use the difference in characteristics between the area where the characteristic of the characteristic change layer has changed and the area where the characteristic has not changed. It is possible to form a functional part or the like. In the present invention, since the metal fine particles are contained in the characteristic change layer, the color of the characteristic change pattern, which is a region irradiated with energy, can be changed. Thereby, for example, when the functional part is formed on the pattern formed body of the present invention, since the characteristic change pattern can be easily identified, alignment can be easily taken, and a higher-definition functional part can be formed. It is. Note that the change in the color of the characteristic change pattern depends on the type of metal fine particles and the like, but it can be restored to the original color within a few days.

  For example, as shown in FIG. 2A, such a characteristic change pattern is obtained by irradiating the characteristic change layer 2 with energy 5 using, for example, a photomask 4 or the like, thereby providing a characteristic imparting agent in the region irradiated with energy. 2 can be decomposed or modified to form a characteristic change pattern 3 with changed characteristics on the characteristic change layer 2 as shown in FIG.

  Here, the method for forming a characteristic change pattern in the present invention is not particularly limited as long as it is a method of irradiating energy capable of changing the characteristic of the characteristic change layer. The energy irradiation (exposure) in the present invention is a concept including irradiation of any energy ray capable of changing the characteristics of the surface of the property change layer, and is not limited to irradiation with visible light.

  Usually, the wavelength of light used for such energy irradiation is set in the range of 400 nm or less, preferably in the range of 380 nm or less. This is because, as described above, the preferred photocatalyst used in the characteristic change layer is titanium dioxide, and light having the above-described wavelength is preferable as energy for activating the photocatalytic action by the titanium dioxide.

  Examples of light sources that can be used for such energy irradiation include mercury lamps, metal halide lamps, xenon lamps, excimer lamps, and various other light sources. In addition to the method of performing pattern irradiation using a light mask using a light source as described above, it is also possible to use a method of drawing and irradiating in a pattern using a laser such as excimer or YAG.

In addition, the irradiation amount of energy at the time of energy irradiation is an irradiation amount necessary to change the characteristics of the surface of the characteristic change layer by the action of the photocatalyst in the characteristic change layer.
At this time, it is preferable in that the energy can be increased by heating the characteristic change layer while heating, and the characteristic can be changed efficiently. Specifically, it is preferable to heat within a range of 30 ° C to 80 ° C.

  In the energy irradiation direction in the present invention, when the base material to be described later is transparent, pattern energy irradiation or laser drawing irradiation through a photomask may be performed from any direction on the base material side and the property change layer side. . On the other hand, when the substrate is opaque, it is necessary to irradiate energy from the property changing layer side. For example, when a light-shielding portion is formed on the substrate, it is necessary to irradiate energy from the substrate side.

3. Next, the substrate used in the present invention will be described. The base material used in the present invention is not particularly limited as long as the above-described property change layer can be formed, and is appropriately selected depending on the use and type of the pattern forming body. Moreover, transparency and flexibility are also selected as appropriate.

  In the present invention, an anchor layer may be formed on the base material in order to improve the adhesion between the base material surface and the property change layer. Examples of such an anchor layer include silane-based and titanium-based coupling agents.

4). Next, the pattern forming body of the present invention will be described. The pattern formed body of the present invention is particularly limited as long as the characteristic change layer is formed on the above-described base material and the characteristic change pattern in which the characteristic change layer has changed is formed. Instead, for example, a light shielding portion or the like may be formed on the base material as necessary.

  When such a light-shielding part is formed, the light-shielding part is provided by irradiating energy from the base material side without using a mask or laser drawing when forming the characteristic change pattern. It is possible to change the characteristics of the surface of the characteristic change layer that is not formed. Therefore, since alignment with a photomask or the like is unnecessary, a simple process can be achieved, and an expensive apparatus necessary for drawing irradiation is unnecessary, which is advantageous in terms of cost. Has the advantage.

  As the formation position of such a light-shielding portion, when a light-shielding portion is formed on a base material and a characteristic change layer is formed thereon, that is, between the base material and the characteristic change layer, In some cases, it is formed in a pattern on the surface on which the characteristic change layer is not formed.

  The method for forming such a light-shielding part is not particularly limited, and is appropriately selected and used depending on the characteristics of the surface where the light-shielding part is formed, the shielding property against the required energy, and the like.

  For example, it may be formed by forming a metal thin film of chromium or the like having a thickness of about 1000 to 2000 mm by a sputtering method, a vacuum deposition method, or the like, and patterning the thin film. As this patterning method, a normal patterning method such as sputtering can be used.

  Alternatively, a method may be used in which a layer containing light-shielding particles such as carbon fine particles, metal oxides, inorganic pigments, and organic pigments in a resin binder is formed in a pattern. As the resin binder to be used, polyimide resin, acrylic resin, epoxy resin, polyacrylamide, polyvinyl alcohol, gelatin, casein, cellulose, or a mixture of one or more kinds, photosensitive resin, or O / A W emulsion type resin composition, for example, an emulsion of a reactive silicone can be used. The thickness of such a resin light-shielding portion can be set within a range of 0.5 to 10 μm. As a method for patterning such a resin light shielding portion, a generally used method such as a photolithography method or a printing method can be used.

  When a light shielding part is formed between the base material and the characteristic change layer, a primer layer may be formed between the characteristic change layer and the light shielding part. The action / function of this primer layer is not always clear, but by forming the primer layer, impurities from the light shielding part and the opening existing between the light shielding parts, which are factors that inhibit the characteristic change of the characteristic change layer In particular, it is considered to exhibit a function of preventing the diffusion of impurities and impurities generated when the light shielding portion is patterned. Therefore, by forming the primer layer, the characteristics of the characteristic change layer can be changed with high sensitivity, and as a result, a high resolution pattern can be obtained.

  In the present invention, the primer layer prevents the impurities present in the openings formed between the light shielding portions as well as the light shielding portions from affecting the action of the photocatalyst. Therefore, the primer layer includes the openings. It is preferable that it is formed over the entire light shielding portion.

  The primer layer in the present invention is not particularly limited as long as the primer layer is formed so that the light-shielding portion and the characteristic change layer do not contact each other.

The material constituting the primer layer is not particularly limited, but an inorganic material that is not easily decomposed by the action of the photocatalyst is preferable. Specific examples include amorphous silica. When such amorphous silica is used, the precursor of the amorphous silica is represented by the general formula SiX ₄ and X is a silicon compound such as halogen, methoxy group, ethoxy group, or acetyl group, Silanol which is a hydrolyzate thereof or polysiloxane having an average molecular weight of 3000 or less is preferable.

  The thickness of the primer layer is preferably in the range of 0.001 μm to 1 μm, particularly preferably in the range of 0.001 μm to 0.1 μm.

C. Functional Element Next, the functional element of the present invention will be described. In the functional element of the present invention, a functional part is formed on the characteristic change pattern of the pattern forming body described above.

  According to the present invention, since the functional part is formed by utilizing the difference in the characteristic of the characteristic change pattern of the pattern forming body, the functional part can be formed with high definition, and a high-quality functional element. It can be. In the present invention, since the color of the characteristic change pattern is changed, it is possible to visually recognize the area where the characteristic has changed and the area where the characteristic has not changed, and alignment when forming the functional portion. Therefore, the functional part can be efficiently formed by a simpler process.

  Here, the term “functionality” means optical (light selective absorption, reflectivity, polarization, light selective transmission, nonlinear optical property, luminescence such as fluorescence or phosphorescence, photochromic property, etc.), magnetic (hard magnetism, soft magnetism, etc.). , Non-magnetic, magnetically permeable, etc.), electrical / electronic (conductive, insulating, piezoelectric, pyroelectric, dielectric, etc.), chemical (adsorptive, desorbable, catalytic, water-absorbing, ionic conductivity) , Redox, electrochemical properties, electrochromic, etc.), mechanical (wear resistance, etc.), thermal (heat transfer, heat insulation, infrared radiation, etc.), biofunctional (biocompatibility, antithrombotic, etc.) ) Means various functions.

  As described above, the functional part forming coating liquid for forming the functional part in the present invention varies greatly depending on the function of the functional element, the method of forming the functional element, etc. A composition that is not diluted with a solvent typified by a monomer or the like, a liquid composition diluted with a solvent, or the like can be used. Moreover, as a functional part formation coating liquid, since a pattern can be formed in a short time so that a viscosity is low, it is especially preferable. However, in the case of a liquid composition diluted with a solvent, it is desirable that the solvent has low volatility because an increase in viscosity and a change in surface tension occur due to volatilization of the solvent during pattern formation.

  The functional part forming coating solution used in the present invention may be a functional part by being attached to the characteristic change pattern or the like, and may be arranged on the characteristic change pattern. After that, the functional part may be processed with a medicine or processed with ultraviolet rays, heat, or the like. In this case, when the functional part forming coating solution contains a component that is effective with ultraviolet rays, heat, electron beam, etc., the functional part can be formed quickly by performing a curing treatment. To preferred.

  In the present invention, as the method for forming the functional part, means such as dip coating, roll coating, blade coating, spin coating and the like, nozzle discharging means including a method using an inkjet, electric field jet, dispenser, etc. Is preferably used. This is because by using these methods, the functional portion can be formed uniformly and with high definition.

  Here, in the present invention, among the functional elements described above, in particular, a color filter in which a functional portion described later is a pixel portion, a conductive pattern in which the functional portion is a metal wiring, and a functional portion that adheres to a biological material. It is preferable that it is an organic EL element whose biofunctional base material and functional part are organic EL layers. This is because the functional portion of these functional elements can be easily formed by utilizing the above-described difference in characteristics of the pattern forming body.

D. Next, the color filter of the present invention will be described. The color filter of the present invention is characterized in that the functional part of the functional element described above is a pixel part.
According to the present invention, when the characteristic change layer is, for example, a wettability change layer, a pixel portion can be easily formed by utilizing the difference in surface wettability by an inkjet method or the like, and a high-definition pixel The part can be formed. In the present invention, since the color of the characteristic change pattern can be changed, the position where the pixel portion is formed can be easily identified, and alignment can be easily performed. Therefore, it is possible to obtain a high-quality color filter in which a high-definition pixel portion is formed with high manufacturing efficiency.
In addition, about the material of each member of a color filter in this invention, a manufacturing method, etc., since it is the same as that of the thing in a general color filter, description here is abbreviate | omitted.

E. Next, the conductive pattern of the present invention will be described. The conductive pattern of the present invention is characterized in that the functional part of the functional element described above is a metal wiring. According to the present invention, the metal wiring is made a conductive pattern in which a high-definition metal wiring is formed by applying a metal paste or the like along the above-described characteristic change pattern using, for example, an electric field jet method or the like. be able to. Further, in the present invention, since the color of the characteristic change pattern described above can be changed, it is easy to identify the position where the metal wiring is formed, and a high-definition metal wiring can be formed. Thus, a high-quality conductive pattern can be obtained.

In the present invention, since the metal wiring is formed on the characteristic change layer, the electric resistance of the characteristic change layer is 1 × 10 ⁸ Ω · cm to 1 × 10 ¹⁸ Ω · cm, and in particular, 1 × 10 ^12. It is preferable to be in the range of Ω · cm to 1 × 10 ¹⁸ Ω · cm. This is because an excellent conductive pattern can be obtained.
Here, since the material, manufacturing method, and the like of each member of the conductive pattern in the present invention are the same as those in a general conductive pattern, description thereof is omitted here.

F. Organic EL Element Next, the organic EL element of the present invention will be described. The organic EL element of the present invention is characterized in that the functional part in the functional element described above is an organic EL layer. According to the present invention, since the functional part is an organic EL layer, the organic EL layer can be easily applied separately using the above-described characteristic change pattern, and a high-definition organic An EL element can be manufactured. In addition, since the color of the characteristic change layer can be changed to a desired pattern at the time of coating, the organic EL layer can be formed with higher definition.

In the present invention, metal fine particles are contained in the characteristic change layer. Therefore, for example, even when the characteristic change layer is formed on the substrate having the first electrode layer formed on the surface, the characteristic change layer can pass holes and the like, This makes it possible to establish conduction between the organic EL layer formed using the characteristic change pattern and the first electrode layer. The organic EL element of the present invention can be obtained by forming a second electrode layer on the organic EL layer.
In addition, about the material of each member of the organic EL element in this invention, a manufacturing method, etc., since it is the same as that in a general organic EL element, description here is abbreviate | omitted.

G. Next, the biochip substrate in the present invention will be described. The base material for a biochip of the present invention is characterized in that the functional part in the functional element described above has adhesion to a biological substance. In the present invention, it can be obtained, for example, by adhering a biological substance and a material having adhesiveness on the above-described characteristic change pattern.

  A biochip can be obtained by immobilizing a biological substance on such a biochip substrate. On such a biochip surface, the functional thin film functions as an immobilization layer, and biological substances such as DNA and proteins are immobilized thereon and used for various purposes.

  As such a biological material immobilization technique, an immobilization technique that has been actively studied in research and development of a bioreactor in which an enzyme is immobilized on an insoluble carrier can be applied. The technical contents are detailed in, for example, edited by Ichiro Chibata, “Immobilized Enzyme”, Kodansha Scientific, 1975, and references thereof.

  In some cases, an electrical reading method is used for the biochip. In such a case, it is necessary to form electrodes on the surface of the biochip substrate. In this case, the electrode may be formed by the method described in the above-described conductive pattern column, or may be formed by a general photoresist method or the like.

Here, in the present invention, a molecule having a functional group protected with a photosensitive protective group is used as a property-imparting agent for the property-changing layer, and the molecule is deprotected by the action of a photocatalyst accompanying energy irradiation and adhered to cells. It is also possible to make a biochip by adhering cells in a pattern having adhesiveness with the cells.
In addition, about the material of each member of the biochip board | substrate in this invention, a manufacturing method, etc., since it is the same as that of the thing in a general biochip board | substrate, description here is abbreviate | omitted.

H. Next, the manufacturing method of the pattern formation body of this invention is demonstrated.
The method for producing a pattern forming body of the present invention comprises a coating liquid adjusting step of adjusting a pattern forming body coating liquid by mixing a photocatalyst, a metal colloid liquid, and a property-imparting agent,
On the base material, a coating liquid coating step for coating the pattern forming body coating liquid,
A drying step of drying the coating liquid for the pattern forming body applied by the coating liquid application step to form a characteristic change layer;
A characteristic change pattern forming step of irradiating the characteristic change layer with energy to form a characteristic change pattern in which the characteristic of the characteristic change layer is changed.

  In the present invention, since the coating liquid for the pattern forming body containing the metal colloid liquid is prepared by the coating liquid adjusting step, the metal fine particles are contained in the characteristic change layer coated with the coating liquid for the pattern forming body. Is supposed to be contained. When this characteristic change layer is irradiated with energy in the characteristic change pattern forming step, the sensitivity of the photocatalyst can be improved by the action of the metal fine particles, and it is efficiently contained in the characteristic change layer in a short time. The property-imparting agent can be decomposed or modified. Therefore, according to the present invention, a pattern forming body on which a characteristic change pattern having a large characteristic difference is formed can be efficiently manufactured in a short time. Furthermore, according to the present invention, the color of the characteristic change pattern may be changed by the action of the metal fine particles. Hereinafter, each process of the manufacturing method of the pattern formation body of this invention is demonstrated in detail.

1. Coating liquid adjustment process First, the coating liquid adjustment process in the manufacturing method of the pattern formation body of this invention is demonstrated. The coating liquid adjusting step in the present invention is a step of adjusting the pattern forming body coating liquid by mixing a photocatalyst, a metal colloid liquid, and a property-imparting agent. The photocatalyst, the metal colloid liquid, and the characteristics The method and the like are not particularly limited as long as they can be stably mixed and adjusted with the imparting agent.

  Here, the metal colloid liquid used in the present invention is preferably composed of a solid content mainly composed of particles composed of a metal component and an organic component, and a solvent. This is because the dispersion stability of the particles in the solution is high, and the metal colloid particles can hardly aggregate.

In the present invention, the photocatalyst is also preferably used in the form of a sol, such as a titanium oxide sol. This is because the photocatalyst can also be stably dispersed in the coating liquid for pattern forming body.
The type and amount of the colloidal metal solution, photocatalyst, and property-imparting agent used in this step are the same as those described in the section “A. Pattern Forming Body Coating Solution” described above. Detailed explanation here is omitted.

  Moreover, in the pattern formation body coating liquid adjusted by this process, a solvent, an additive, etc. may be contained as needed other than the said material, for example. According to the present invention, for example, in the characteristic change pattern forming step described later, metal fine particles are contained in the pattern forming body coating liquid even when a high-boiling solvent or the like that reduces the sensitivity of the photocatalyst is used. Therefore, since the sensitivity of the photocatalyst can be improved, there is an advantage that the range of selection of materials is widened.

2. Next, the coating liquid application process in the manufacturing method of the pattern formation body of this invention is demonstrated. This step is a step of applying the pattern forming body coating liquid adjusted in the coating liquid adjusting step onto a substrate or the like.

The application of the pattern forming body coating liquid in this step is not particularly limited as long as it is a method capable of applying the pattern forming body coating liquid. Examples thereof include a method of applying a coating method, a slit coating method, a bead coating method, a spray coating method, a dip coating method, or a combination of a slit coating method and a spin coating method. This is because a characteristic change layer having a large area can be formed and a uniform characteristic change layer can be formed.
Further, according to the present invention, since the fine metal particles are contained in the pattern forming body coating liquid, for example, a high boiling point solvent can be used as described above. There is also an advantage that the range of selection of equipment for applying the working liquid is widened.

3. Next, the drying process in the manufacturing method of the pattern formation body of this invention is demonstrated. The drying process in the present invention is a process of drying the pattern forming body coating liquid applied in the above-described coating liquid coating process to form a characteristic change layer.

  In this step, the method is not particularly limited as long as it is a method capable of forming the characteristic change layer by drying or curing the pattern forming coating solution. For example, a hot plate, an infrared heater, an oven, or the like Can be used.

  In the present invention, it is particularly preferable to carry out the drying step by heating so that the pattern forming body coating solution is within the range of 50 ° C to 400 ° C, particularly 100 ° C to 300 ° C. This is because the sensitivity of the photocatalyst can be further improved by the action of the metal fine particles in the characteristic change layer.

4). Characteristic Change Pattern Forming Step Next, the characteristic change pattern forming step in the method for producing a pattern forming body of the present invention will be described. The step of forming a characteristic change pattern in the method for producing a pattern formed body of the present invention is a step of forming a characteristic change pattern having a changed characteristic on the characteristic change layer by irradiating the characteristic change layer with energy in a pattern. It is.

  In this step, since the property change layer contains fine metal particles in the layer, the sensitivity of the photocatalyst to energy irradiation can be improved, and the property-imparting agent can be decomposed or modified in a short time. Therefore, the pattern forming body can be manufactured with high manufacturing efficiency. In addition, since the color of the region irradiated with energy changes due to the action of the metal fine particles, when forming a functional part on the characteristic change pattern, it becomes easy to take alignment and the like, and a high-definition functional element Thus, it is possible to manufacture a pattern-formed body that can form the film.

  Here, the energy irradiation method in this step is not particularly limited as long as it is a method capable of changing the characteristics of the characteristic change layer into a target pattern.

  In addition, since the kind of energy irradiated by this process, the irradiation method, and the like are the same as those described in the section of the characteristic change pattern of “B. Pattern formation body” described above, the description here is omitted. To do.

5). Others The method for producing a pattern forming body of the present invention includes, in addition to the above-described steps, for example, a step of filtering a pattern forming body coating solution and a step of forming a light-shielding portion as necessary. May be. Since such a process is generally the same as the method used when manufacturing the pattern forming body, a detailed description thereof is omitted here.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

  Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples.

  [Example 1]

<Method for adjusting coating liquid for pattern forming body>
A liquid repellency-imparting agent is prepared by stirring 1.5 g of fluoroalkylsilane (TSL8233 GE Toshiba Silicone), 5.0 g of tetramethoxysilane (TSL8114 GE Toshiba Silicone), and 3 g of 0.1N hydrochloric acid at room temperature for 24 hours. did.
Next, titania sol (STS-01 manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%. 5 g of a silver colloid aqueous dispersion (average particle size: 20 nm, silver solid content: 0.3 wt%) was added to 45 g of this diluted solution, followed by stirring for 10 minutes.
To this liquid, 0.3 g of a liquid repellency-imparting agent was added and stirred for 10 minutes to obtain a pattern forming body coating liquid.

<Pattern formation method>
The pattern forming body coating liquid was applied on a glass substrate and then dried at 200 ° C. to form a characteristic change layer having a thickness of 0.15 μm.
The contact angle of this characteristic change layer with water was measured and found to be 95 °. Next, exposure using an ultrahigh pressure mercury lamp (365 nm, 30 mW / cm ² ) resulted in a water contact angle of 10 ° or less in 20 seconds.

[Comparative Example 1]
A liquid repellency imparting agent was prepared in the same manner as in Example 1.
Next, titania sol (STS-01 manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%.
To this solution, 0.3 g of a liquid repellency imparting agent and 5 g of water were added and stirred for 10 minutes to obtain a coating solution for a pattern forming body.
A characteristic change layer was formed on the glass substrate in the same manner as in Example 1, and the contact angle of this characteristic change layer with water was measured to be 97 °. Next, exposure using an ultrahigh pressure mercury lamp (365 nm, 30 mW / cm ² ) revealed that the contact angle with water was 64 ° in 20 seconds, and the contact angle with water was 10 ° or less in 45 seconds.

[Example 2]
A liquid repellency imparting agent was prepared in the same manner as in Example 1.
Next, titania sol (STS-01 manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%. To 45 g of this diluted solution, 5 g of a silver water dispersion (average particle size: 150 nm, silver solid content: 0.3 wt%) was added and stirred for 10 minutes.
To this liquid, 0.3 g of a liquid repellency-imparting agent was added and stirred for 10 minutes to obtain a pattern forming body coating liquid.
The characteristic change layer was formed on the glass substrate in the same manner as in Example 1, and the contact angle of this characteristic change layer with water was measured to be 80 °. Next, when it exposed using the ultra high pressure mercury lamp (365 nm 30mW / cm < ² >), the contact angle with water became 10 degrees or less in 35 seconds.
In this dispersion, silver was precipitated after 24 hours.

[Example 3]
<Method for adjusting coating liquid for pattern forming body>
A liquid repellency-imparting agent is prepared by stirring 1.5 g of fluoroalkylsilane (TSL8233 GE Toshiba Silicone), 5.0 g of tetramethoxysilane (TSL8114 GE Toshiba Silicone), and 3 g of 0.1N hydrochloric acid at room temperature for 24 hours. did.
Next, the titanium oxide inorganic coating agent (STK-03, manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%. 5 g of an aqueous colloidal gold dispersion (average particle size: 20 nm, gold solid content: 0.7 wt%) was added to 45 g of this diluted solution, followed by stirring for 10 minutes.
To this solution, 0.15 g of a liquid repellency-imparting agent was added and stirred for 10 minutes to obtain a coating solution for a pattern forming body.

<Pattern formation method>
The pattern forming body coating liquid was applied on a glass substrate and then dried at 200 ° C. to form a characteristic change layer having a thickness of 0.15 μm.
It was 94 degrees when the contact angle of water of this characteristic change layer was measured. Next, exposure using an ultra-high pressure mercury lamp (365 nm, 30 mW / cm ² ) resulted in a contact angle with water of 10 ° or less in 17 seconds.
When the transmittance at a wavelength of 420 nm was measured, the unexposed area was 95% and the exposed area was 80%.

[Comparative Example 2]
A liquid repellency imparting agent was produced in the same manner as in Example 2.
Next, the titanium oxide inorganic coating agent (STK-03, manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%.
To this solution, 0.15 g of a liquid repellency imparting agent and 5 g of water were added and stirred for 10 minutes to obtain a coating solution for a pattern forming body.
A characteristic change layer was formed on the glass substrate in the same manner as in Example 2, and the contact angle of this characteristic change layer with water was measured to be 94 °. Next, exposure using an ultrahigh pressure mercury lamp (365 nm 30 mW / cm ² ) revealed that the contact angle with water was 66 ° in 20 seconds, and the contact angle with water was 10 ° or less in 48 seconds.

[Example 4]
In the same manner as in Example 2, a property change layer was obtained on a glass substrate. Next, exposure was performed for 17 seconds using a super high pressure mercury lamp (365 nm, 30 mW / cm ² ) through a photomask (20 μm line, 80 μm space), thereby obtaining a wettability pattern in accordance with the photomask.
At this time, when the contact angle with the red pigment dispersed thermosetting resin composition for color filters was measured, the unexposed area was 60 ° and the exposed area was 10 ° or less.
By discharging the red pigment dispersed thermosetting resin composition by the ink jet method to the site where the wettability was changed, the wettability spread to the site where the wettability was changed. Green and blue pigment dispersed thermosetting resin compositions were similarly discharged and heated at 200 ° C. for 30 minutes to obtain a color filter.

[Example 5]
<Method for adjusting coating liquid for pattern forming body>
γ-aminopropyltriethoxysilane (TSL8331 GE manufactured by Toshiba Silicone) 1.5 g, tetramethoxysilane (TSL8114 GE manufactured by Toshiba Silicone) 5.0 g, and 0.1 N hydrochloric acid 3 g were stirred at room temperature for 24 hours to give a property-imparting agent. Produced.
Next, titania sol (STS-01 manufactured by Ishihara Sangyo) was diluted with a mixed solution of water and isopropanol (weight ratio 1: 1) so that the TiO ₂ concentration became 0.5 wt%. 5 g of a silver colloid aqueous dispersion (average particle size: 20 nm, silver solid content: 0.3 wt%) was added to 45 g of this diluted solution, followed by stirring for 10 minutes.
To this liquid, 0.3 g of a liquid repellency-imparting agent was added and stirred for 10 minutes to obtain a pattern forming body coating liquid.

<Pattern formation method>
The pattern forming body coating liquid was applied on a glass substrate and then dried at 200 ° C. to form a characteristic change layer having a thickness of 0.15 μm.
This characteristic change layer is exposed to a high pressure mercury lamp (365 nm, 30 mW / cm ² ) through a photomask (50 μm line and space) for 30 seconds, thereby providing a pattern forming body having no amino group similar to the photomask. Got.

It is a schematic sectional drawing which shows an example of the pattern formation body of this invention. It is explanatory drawing which shows an example of the formation method of the characteristic change pattern of the pattern formation body of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base material 2 ... Characteristic change layer 3 ... Characteristic change pattern

Claims (20)

  A base material, and a property change layer that is formed on the base material and contains at least a photocatalyst, metal fine particles, and a property-imparting agent, and the property is changed by energy irradiation, and the property change layer is the property change layer A pattern forming body characterized by having a characteristic change pattern in which the characteristic of the pattern is changed into a pattern.   The pattern forming body according to claim 1, wherein a particle diameter of the metal fine particles is in a range of 1 nm to 100 nm.   The metal fine particles are one or two or more substances selected from gold, silver, copper, platinum, lead, tin, nickel, cobalt, cadmium, and iron. 2. The pattern forming body according to 2.   The pattern forming body according to any one of claims 1 to 3, wherein the property imparting agent is used as a binder of the property change layer.   The pattern forming body according to any one of claims 1 to 4, wherein the property-imparting agent is an organopolysiloxane. The organopolysiloxane is YnSiX _(4-n) (where Y is an alkyl group, a fluoroalkyl group, a vinyl group, an amino group, a phenyl group, a chloroalkyl group, an isocyanate group, or an epoxy group, or an organic containing them. X is an alkoxyl group or halogen, n is an integer from 0 to 3, and one or more hydrolytic condensates or cohydrolytic condensates of silicon compounds The pattern forming body according to claim 5, which is an organopolysiloxane.   The property-imparting agent is a liquid-repellent property-imparting agent having liquid repellency, and the property-changing layer is a wettability-changing layer whose wettability changes so that a contact angle with a liquid is reduced by energy irradiation. The pattern forming body according to any one of claims 1 to 6, wherein:   A functional element, wherein a functional part is formed on the characteristic change pattern of the pattern forming body according to any one of claims 1 to 7.   The color filter, wherein the functional part of the functional element according to claim 8 is a pixel part.   9. The conductive pattern according to claim 8, wherein the functional part of the functional element is a metal wiring.   The organic electroluminescent element, wherein the functional part of the functional element according to claim 8 is an organic electroluminescent layer.   The biochip substrate, wherein the functional part of the functional element according to claim 8 has adhesion to a biological substance.   A pattern forming body coating solution comprising a photocatalyst, metal fine particles, and a property-imparting agent.   14. The pattern forming body coating solution according to claim 13, wherein an average particle diameter of the metal fine particles is within a range of 1 nm to 100 nm.   The metal fine particles are one or more substances selected from gold, silver, copper, platinum, lead, tin, nickel, cobalt, cadmium, and iron. The coating liquid for pattern formation bodies as described in 14.   The pattern forming body coating solution according to any one of claims 13 to 15, wherein the property-imparting agent is an organopolysiloxane. The organopolysiloxane is YnSiX _(4-n) (where Y is an alkyl group, a fluoroalkyl group, a vinyl group, an amino group, a phenyl group, a chloroalkyl group, an isocyanate group, or an epoxy group, or an organic containing them. X is an alkoxyl group or halogen, n is an integer from 0 to 3, and one or more hydrolytic condensates or cohydrolytic condensates of silicon compounds The pattern forming body coating solution according to claim 16, which is an organopolysiloxane.   18. The liquid-repellent imparting agent having liquid repellency and being decomposed or modified by the action of a photocatalyst accompanying energy irradiation. The coating liquid for pattern formation bodies of Claim.   The pattern forming body coating solution according to any one of claims 13 to 18, wherein the metal fine particles are added as a metal colloid solution. A coating liquid adjusting step of adjusting a coating liquid for pattern forming body by mixing a photocatalyst, a metal colloid liquid, and a property-imparting agent;
On the base material, a coating liquid application step of applying the pattern forming body coating liquid,
A drying step of drying the coating liquid for the pattern forming body applied by the coating liquid application step to form a characteristic change layer;
And a characteristic change pattern forming step of irradiating the characteristic change layer with energy to form a characteristic change pattern in which the characteristic of the characteristic change layer is changed.

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