JP2005147202A - Fluid controller - Google Patents

Fluid controller Download PDF

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JP2005147202A
JP2005147202A JP2003382977A JP2003382977A JP2005147202A JP 2005147202 A JP2005147202 A JP 2005147202A JP 2003382977 A JP2003382977 A JP 2003382977A JP 2003382977 A JP2003382977 A JP 2003382977A JP 2005147202 A JP2005147202 A JP 2005147202A
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diaphragm
peripheral side
fluid controller
holding member
flow path
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Junji Sato
準治 佐藤
Yoshifumi Machii
芳文 町井
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Fujikin Inc
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Fujikin Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid controller with a diaphragm whose fastening degree can be visually, easily and accurately identified without causing the leakage of fluid distributing in a flow path to the outside even when a portion of the diaphragm abutting on the opening edge of a valve box deteriorates. <P>SOLUTION: The fluid controller comprises the valve casing having an inlet flow path and an outlet flow path, a valve body, the diaphragm fixed in the state of being held in a gap between the valve casing and the valve body via a holding member, and an operation mechanism for expanding the diaphragm. The valve casing has an endless sealing protruded portion abutting on the peripheral side face of the holding member for sealing the inlet flow path and the outlet flow path. The holding member enters into a recessed portion encircled by the sealing protruded portion and the lower face of the holding member abuts on the upper face of the diaphragm instead of the upper face of the sealing protruded portion. The upper end on the peripheral side face of the holding member is located above the upper end face of the sealing protruded portion and the peripheral side face of the holding member is provided with an indicator which allows visual identification of the degree of a depth of the peripheral side face entering into the recessed portion. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は流体制御器に係り、その目的はダイアフラムの弁箱の開口縁部と接する部分が裂化した場合であっても流路を流通する流体が外部に漏れることがないとともに、ダイアフラムの締め付け度合いを目視で容易且つ確実に確認することが可能な流体制御器の提供にある。   The present invention relates to a fluid controller, and the purpose thereof is to prevent the fluid flowing through the flow path from leaking to the outside even when the portion of the diaphragm that contacts the opening edge of the valve box is torn, and the degree of tightening of the diaphragm. It is in providing the fluid controller which can confirm easily and reliably visually.

従来の一般的な流体制御器の一例を図4に基づいて説明する。
この制御器(A)は入口流路(C)及び出口流路(D)を有する弁箱(E)と、弁本体(J)と、ダイアフラム(F)と、このダイアフラム(F)を伸縮させる操作機構(G)とからなり、前記ダイアフラム(F)は弁箱(E)の所要位置に形成された開口部(H)上に配設されるとともに前記弁本体(J)の下部に設けられた挟持部材(B)と弁箱(E)とで挟着状態に固定されてなるものであった。
An example of a conventional general fluid controller will be described with reference to FIG.
The controller (A) expands and contracts the valve box (E) having an inlet channel (C) and an outlet channel (D), a valve body (J), a diaphragm (F), and the diaphragm (F). The diaphragm (F) is disposed on an opening (H) formed at a required position of the valve box (E) and is provided below the valve body (J). The clamping member (B) and the valve box (E) are fixed in a clamping state.

しかしながら、上記従来の構造の流体制御器(A)では以下に述べる課題があった。
第一に、入口流路(C)と出口流路(D)とをダイアフラム(F)を介して開閉すると、このダイアフラム(F)の前記弁箱(E)に形成された開口部(H)の開口縁部(I)と接する部分に圧力がかかり、そのためにこれら入口流路(C)と出口流路(D)とをダイアフラム(F)を介して反復継続して開閉しているうちに、ダイアフラム(F)の前記弁箱(E)に形成された開口部(H)の開口縁部(I)と接する部分が裂化し、これによって、入口流路(C)と出口流路(D)とを流通する流体が裂化した部分から外部に漏れてしまう可能性があった。
However, the conventional fluid controller (A) has the following problems.
First, when the inlet channel (C) and the outlet channel (D) are opened and closed via the diaphragm (F), the opening (H) formed in the valve box (E) of the diaphragm (F). Pressure is applied to the portion of the opening that is in contact with the opening edge (I), and therefore the inlet channel (C) and the outlet channel (D) are repeatedly opened and closed through the diaphragm (F). The portion of the diaphragm (F) that is in contact with the opening edge (I) of the opening (H) formed in the valve box (E) is cracked, whereby the inlet channel (C) and the outlet channel (D) ) May leak to the outside from the cracked portion.

第二に、このような流体制御器では、ダイアフラムの締め付けはトルクレンチを使用して行われるのが一般的であるが、ダイアフラムは素材がゴム等の弾性体であるために測定トルクが安定せず、適度な圧力で均一にダイアフラムを締め付けることが難しかった。
また、トルクレンチを使用した締め付けでは、流体制御器の組み立ての際に、ダイアフラムを入れ忘れたり、寸法や種類が違ったダイアフラムや他の部品を使用したり、ダイアフラムの取り付け部分に異物が噛み込んだりした場合でも、測定されたトルク値が適正な値であれば適正な締め付けが得られていると判断されることから、実際には適正な製品が得られていなくてもこれを把握することができないという問題があった。
Secondly, in such a fluid controller, the diaphragm is generally tightened using a torque wrench. However, since the diaphragm is made of an elastic material such as rubber, the measurement torque is stabilized. Therefore, it was difficult to tighten the diaphragm uniformly with moderate pressure.
Also, when tightening with a torque wrench, when assembling the fluid controller, forgetting to insert the diaphragm, using diaphragms or other parts with different dimensions and types, or foreign objects getting stuck in the diaphragm mounting part. Even if the measured torque value is an appropriate value, it is judged that the proper tightening has been obtained, so it is possible to grasp this even if the proper product is not actually obtained. There was a problem that I could not.

上記したような従来の流体制御器の問題点に鑑みて、ダイアフラムの弁箱の開口縁部と接する部分が裂化した場合であっても入口流路及び出口流路を流通する流体が外部に漏れることのないようにした流体制御器が提案されている(特許文献1参照)。   In view of the problems of the conventional fluid controller as described above, even if the portion of the diaphragm that contacts the opening edge of the valve box is torn, the fluid flowing through the inlet channel and the outlet channel leaks to the outside. There has been proposed a fluid controller that prevents this (see Patent Document 1).

特開平6−272771号公報Japanese Unexamined Patent Publication No. Hei 6-272777

しかしながら、上記特許文献1記載の発明は、上述した従来の流体制御器がもつ問題点のうち、単に前者の問題点を解決することを可能にしたに過ぎず、後者の問題点については何ら具体的な解決手段を開示若しくは示唆するものではなかった。   However, the invention described in Patent Document 1 merely allows the former problem to be solved among the problems of the conventional fluid controller described above, and the latter problem is not specific. It did not disclose or suggest a practical solution.

本発明はかかる実情に鑑みてなされたものであって、ダイアフラムの弁箱の開口縁部と接する部分が裂化した場合であっても流路を流通する流体が外部に漏れることがなく、同時にダイアフラムの締め付け度合いを目視で容易且つ確実に確認することを可能とする流体制御器を提供せんとするものである。   The present invention has been made in view of such circumstances, and even when the portion of the diaphragm that contacts the opening edge of the valve box is cracked, the fluid flowing through the flow path does not leak to the outside, and at the same time, the diaphragm It is an object of the present invention to provide a fluid controller capable of easily and surely confirming the degree of tightening of the material.

請求項1に係る発明は、入口流路と出口流路を有してなる弁箱と、弁本体と、この弁箱と弁本体の間隙に挟持部材を介して挟着状態に固定されてなるダイアフラムと、このダイアフラムを伸縮させる操作機構とからなる流体制御器であって、前記弁箱には前記挟持部材の周側面に当接して前記入口流路、出口流路内を封止する無端状の封止突部が形成され、該封止突部により囲まれた凹部に前記挟持部材が入り込んでなるとともに、該挟持部材の下面は封止突部の上面に当接することなくダイアフラムの上面に当接し、前記挟持部材の周側面の上端部は前記封止突部の上端面より上方に位置しており、前記挟持部材の周側面には該周側面が前記凹部に入り込んだ深さの程度を目視確認できるインジケーターが設けられてなることを特徴とする流体制御器に関する。
請求項2に係る発明は、前記インジケーターが目盛り線からなることを特徴とする請求項1記載の流体制御器に関する。
請求項3に係る発明は、前記インジケーターが複数の異なる色の層からなることを特徴とする請求項1記載の流体制御器に関する。
The invention according to claim 1 is fixed to a valve box having an inlet channel and an outlet channel, a valve body, and a sandwiched state between the valve box and the valve body via a clamping member. A fluid controller comprising a diaphragm and an operation mechanism for expanding and contracting the diaphragm, wherein the valve box abuts against a peripheral side surface of the clamping member and seals the inlet and outlet channels. The sandwiching member is inserted into a recess surrounded by the sealing projection, and the bottom surface of the sandwiching member is not in contact with the top surface of the sealing projection. The upper end portion of the peripheral side surface of the clamping member is positioned above the upper end surface of the sealing projection, and the peripheral side surface of the clamping member has a depth that the peripheral side surface enters the recess. It is provided with an indicator that can visually check Body controller on.
The invention according to claim 2 relates to the fluid controller according to claim 1, wherein the indicator includes a scale line.
The invention according to claim 3 relates to the fluid controller according to claim 1, wherein the indicator comprises a plurality of layers of different colors.

以上詳述した如く、本発明に係る流体制御器によれば、ダイアフラムの弁箱の開口縁部と接する部分が裂化した場合であっても流路を流通する流体が外部に漏れることがないとともに、ダイアフラムの締め付け度合いを目視で容易且つ正確に確認することができるため、常にダイアフラムの締め付け圧を適正範囲に調整維持することが可能となる。   As described above in detail, according to the fluid controller according to the present invention, the fluid flowing through the flow path does not leak to the outside even when the portion of the diaphragm that contacts the opening edge of the valve box is torn. Since the degree of tightening of the diaphragm can be easily and accurately confirmed visually, the tightening pressure of the diaphragm can always be adjusted and maintained within an appropriate range.

以下、本発明に係る流体制御器の好適な実施形態について、図面を参照しつつ説明する。
図1はこの発明に係る流体制御器の一実施例を示す断面説明図、図2は図1示の流体制御器におけるダイアフラムの挟着部分を示す断面説明図、図3は図1示の流体制御器におけるインジケーター部分を拡大抽出して示す図である。
Hereinafter, preferred embodiments of a fluid controller according to the present invention will be described with reference to the drawings.
1 is a cross-sectional explanatory view showing an embodiment of a fluid controller according to the present invention, FIG. 2 is a cross-sectional explanatory view showing a sandwiching portion of a diaphragm in the fluid controller shown in FIG. 1, and FIG. 3 is a fluid shown in FIG. It is a figure which expands and shows the indicator part in a controller.

(1)は流体制御器であって、この流体制御器(1)は弁箱(19)と、弁本体(2)と、ダイアフラム(6)と、挟持部材(7)と、コンプレッサー(12)と、ステム(13)と、アクチュエーターキャップ(8)と、スプリング(9)とからなる。   (1) is a fluid controller, and the fluid controller (1) includes a valve box (19), a valve body (2), a diaphragm (6), a clamping member (7), and a compressor (12). And a stem (13), an actuator cap (8), and a spring (9).

弁箱(19)には入口流路(3)及び出口流路(4)と、これら入口流路(3)及び出口流路(4)の中間に位置するシール座(13)が設けられており、この弁箱(19)の所要位置には開口部(5)が形成されている。また、弁箱(19)には図2に示すように、前記挟持部材(7)の周側面(10)と当接する無端状の封止突部(11)が形成されている。   The valve box (19) is provided with an inlet channel (3) and an outlet channel (4), and a seal seat (13) positioned between the inlet channel (3) and the outlet channel (4). An opening (5) is formed at a required position of the valve box (19). Moreover, as shown in FIG. 2, the valve box (19) is formed with an endless sealing projection (11) that comes into contact with the peripheral side surface (10) of the clamping member (7).

弁箱(19)の所要位置に形成された開口部(5)の上方に位置して方形シート状のダイアフラム(6)が配設される。
この発明において、ダイアフラム(6)としては特に限定されず、耐熱、耐寒性や屈曲性、腐食性などに優れた従来より公知の天然ゴム、ニトリルゴム、スチレンゴム、ブタジエン・イソブチレン合成ゴム、ポリクロロプレンゴム、ブチルゴム、フッ素ゴム、シリコンゴム、ポリウレタンゴムなどのゴム製又はポリ四弗化エチレン(PTFE)等の合成樹脂製のものが好適に使用される。
A rectangular sheet-like diaphragm (6) is disposed above the opening (5) formed at a required position of the valve box (19).
In the present invention, the diaphragm (6) is not particularly limited, and conventionally known natural rubber, nitrile rubber, styrene rubber, butadiene / isobutylene synthetic rubber, polychloroprene having excellent heat resistance, cold resistance, flexibility, and corrosivity. Those made of rubber such as rubber, butyl rubber, fluorine rubber, silicon rubber and polyurethane rubber or synthetic resin such as polytetrafluoroethylene (PTFE) are preferably used.

コンプレッサー(12)は軸方向に連結ボルト(18)と連結されており、この連結ボルト(18)の先端部はダイアフラム(6)中央の埋設部(15)内に埋設されている。   The compressor (12) is connected to the connecting bolt (18) in the axial direction, and the tip of the connecting bolt (18) is embedded in the embedded portion (15) in the center of the diaphragm (6).

弁箱(19)と弁本体(2)との間隙には、挟持部材(7)を介してダイアフラム(6)が挟着状態に固定される。この際に、弁箱(19)に形成された封止突部(11)が前記挟持部材(7)の周側面(10)に当接される。
尚、弁箱(19)に形成された封止突部(11)は、挟持部材(7)の周側面(10)の全体には当接せず、周側面(10)の少なくとも上端部分は封止突部(11)から露出するように構成される。
In the gap between the valve box (19) and the valve body (2), the diaphragm (6) is fixed in a pinched state via a pinching member (7). At this time, the sealing projection (11) formed on the valve box (19) is brought into contact with the peripheral side surface (10) of the clamping member (7).
The sealing protrusion (11) formed on the valve box (19) does not contact the entire peripheral side surface (10) of the clamping member (7), and at least the upper end portion of the peripheral side surface (10) It is comprised so that it may expose from a sealing protrusion (11).

すなわち、本発明に係る流体制御器(1)では、封止突部(11)により囲まれた弁箱(19)の凹部(20)に挟持部材(7)が入り込んでいるとともに、該挟持部材(7)の下面は封止突部(11)の上面に当接することなくダイアフラム(6)の上面に当接し、挟持部材(7)の周側面の上端部は封止突部(11)の上端面より上方に位置している。   That is, in the fluid controller (1) according to the present invention, the clamping member (7) enters the recess (20) of the valve box (19) surrounded by the sealing protrusion (11), and the clamping member The lower surface of (7) contacts the upper surface of the diaphragm (6) without contacting the upper surface of the sealing projection (11), and the upper end of the peripheral side surface of the clamping member (7) is the sealing projection (11). It is located above the upper end surface.

そして、挟持部材(7)の周側面(10)には、該周側面が前記凹部(20)に入り込んだ深さの程度を目視確認できるインジケーター(21)が全周に亘って設けられている。   The peripheral side surface (10) of the clamping member (7) is provided with an indicator (21) that can visually check the depth of the depth at which the peripheral side surface enters the recess (20). .

インジケーター(21)の形態は、特に限定されるものではないが、例えば図3に示した形態を例示することができる。
図3(a)(b)は、インジケーター(21)を互いに平行な複数本の水平方向の目盛り線とした構成を示しており、(a)は2本の目盛り線を設けた場合、(b)は3本の目盛り線を設けた場合をそれぞれ示している。尚、目盛り線の数は特に限定されず、1本或いは4本以上としてもよい。
(a)の場合、ダイアフラムの締め付け圧が適切な範囲にある場合に、上方の目盛り線(21a)と下方の目盛り線(21b)の間に封止突部(11)の上面が位置するように設定しておくことで、目視により一目で締め付け圧が適切な範囲にあるか否かを判断することが可能となる。
(b)の場合、(a)の目盛り線に加えて、最適な締め付け圧を表す中間目盛り線(21c)を上方の目盛り線(21a)と下方の目盛り線(21b)の間に示すことにより、より適切な締め付け圧でダイアフラムを締め付けることが可能となる。
Although the form of an indicator (21) is not specifically limited, For example, the form shown in FIG. 3 can be illustrated.
FIGS. 3A and 3B show a configuration in which the indicator (21) has a plurality of horizontal scale lines parallel to each other. FIG. 3A shows a case where two scale lines are provided (b) ) Shows a case where three scale lines are provided. The number of scale lines is not particularly limited, and may be one or four or more.
In the case of (a), the upper surface of the sealing projection (11) is positioned between the upper graduation line (21a) and the lower graduation line (21b) when the diaphragm clamping pressure is in an appropriate range. By setting it to, it becomes possible to determine whether or not the tightening pressure is in an appropriate range at a glance by visual observation.
In the case of (b), in addition to the scale line of (a), an intermediate scale line (21c) representing the optimum tightening pressure is shown between the upper scale line (21a) and the lower scale line (21b). The diaphragm can be tightened with a more appropriate tightening pressure.

図3(c)は、インジケーター(21)を互いに平行に水平方向に配された複数の異なる色の層から形成した構成を示しており、図示例は色層を3層とした場合を示している。尚、色層の数は特に限定されず、2層或いは4層以上としてもよい。
この場合、封止突部(11)の上面の位置が、ダイアフラムの締め付け圧が過大となる場合に上方層(21d)、締め付け圧が適切な範囲にある場合に中間層(21e)、締め付け圧が不足する場合に下方層(21f)に位置するように設定しておくことで、目視により一目で締め付け圧が適切な範囲にあるか否かを判断することが可能となる。
FIG. 3 (c) shows a configuration in which the indicator (21) is formed from a plurality of layers of different colors arranged in parallel to each other in the horizontal direction, and the illustrated example shows a case where the color layers are three layers. Yes. The number of color layers is not particularly limited, and may be two layers or four or more layers.
In this case, the position of the upper surface of the sealing protrusion (11) is such that the upper layer (21d) when the diaphragm clamping pressure is excessive, the intermediate layer (21e) when the clamping pressure is in an appropriate range, and the clamping pressure. By setting the position so as to be positioned in the lower layer (21f) when there is a shortage, it is possible to determine at a glance whether the tightening pressure is within an appropriate range.

このように構成されてなる流体制御器(1)の使用状態を説明する。
入口流路(3)と出口流路(4)とを閉鎖する場合は、スプリング(9)によってステム(14)の下に固定されているコンプレッサー(12)を下降させるとダイアフラム(6)は周縁部を挟持部材(7)の先端部により締め付け挟持され、弁箱(19)のシール座(13)へ圧接されて入口流路(3)と出口流路(4)とが閉鎖される。
また、インレットポート(16)よりエアー通路(17)を介してエアーを導入すると、ステム(14)の下に固定されているコンプレッサー(12)が上昇され、ダイアフラム(6)がシール座(13)より離間されて入口流路(3)と出口流路(4)とが開放される。
図示例では流体制御器(1)により入口流路(3)と出口流路(4)とが閉鎖された状態を示している。
A use state of the fluid controller (1) configured as described above will be described.
When closing the inlet channel (3) and the outlet channel (4), the diaphragm (6) is moved to the periphery by lowering the compressor (12) fixed under the stem (14) by the spring (9). The portion is clamped and clamped by the tip of the clamping member (7), and is pressed against the seal seat (13) of the valve box (19) to close the inlet channel (3) and the outlet channel (4).
Further, when air is introduced from the inlet port (16) through the air passage (17), the compressor (12) fixed under the stem (14) is raised, and the diaphragm (6) is moved to the seal seat (13). The inlet channel (3) and the outlet channel (4) are opened further apart.
In the illustrated example, the inlet channel (3) and the outlet channel (4) are closed by the fluid controller (1).

尚、本発明においては、入口流路(3)と出口流路(4)との開閉を手動操作で行うような構成としてもよい。
尚、本実施例ではダイアフラム(6)を伸縮させる操作機構を上述したように構成しているが、本発明はこの操作機構に限られるものではなく、他の操作機構であっても良い。
In the present invention, the inlet channel (3) and the outlet channel (4) may be manually opened and closed.
In the present embodiment, the operation mechanism for expanding and contracting the diaphragm (6) is configured as described above. However, the present invention is not limited to this operation mechanism, and other operation mechanisms may be used.

このように、弁箱(19)と弁本体(2)の間隙に挟持部材(7)を介してダイアフラム(6)を挟着状態に固定するとともに、弁箱(19)に形成された無端状の封止突部(11)を挟持部材(7)の周側面(10)に当接するようにしたので、入口流路(3)と出口流路(4)とをダイアフラム(6)を介して反復継続して開閉しているうちに、ダイアフラム(6)の弁箱(19)に形成された開口部(5)の開口縁部(19)と接する部分が裂化した場合であっても、封止突部(11)によって入口流路(3)、出口流路(4)内を封止することができ、入口流路(3)及び出口流路(4)とを流通する流体が外部に漏れることがない。   In this way, the diaphragm (6) is fixed to the gap between the valve box (19) and the valve body (2) via the clamping member (7), and the endless shape formed on the valve box (19) is also provided. Since the sealing projection (11) is in contact with the peripheral side surface (10) of the clamping member (7), the inlet channel (3) and the outlet channel (4) are connected via the diaphragm (6). Even when the opening (5) formed in the valve box (19) of the diaphragm (6) is in contact with the opening edge (19) while being repeatedly opened and closed, The inside of the inlet channel (3) and the outlet channel (4) can be sealed by the stop projection (11), and the fluid flowing through the inlet channel (3) and the outlet channel (4) is externally There is no leakage.

また、封止突部(11)により囲まれた凹部に挟持部材(7)が入り込んでいるとともに、該挟持部材(7)の下面は封止突部(11)の上面に当接することなくダイアフラム(6)の上面に当接しているので、弁本体(2)の弁箱(19)に対する位置決めを容易に且つ精度良く行うことが可能となる。また、ダイアフラム(6)に対する締め付け調整(増し締め)を行うことも可能となる。   In addition, the holding member (7) is inserted into the recess surrounded by the sealing protrusion (11), and the lower surface of the holding member (7) is not in contact with the upper surface of the sealing protrusion (11). Since it is in contact with the upper surface of (6), it is possible to easily and accurately position the valve body (2) with respect to the valve box (19). It is also possible to perform tightening adjustment (reinforcement) on the diaphragm (6).

さらに、挟持部材(7)の周側面(10)の上端部が封止突部(11)の上端面より上方に位置しているとともに、挟持部材(7)の周側面には該周側面が凹部(20)に入り込んだ深さの程度を目視確認できるインジケーター(21)が全周に亘って設けられているため、ダイアフラム(6)の締め付け度合いや片締めになっていないかを上方から目視で容易且つ正確に確認することができる。   Further, the upper end portion of the peripheral side surface (10) of the clamping member (7) is located above the upper end surface of the sealing projection (11), and the peripheral side surface of the peripheral surface of the clamping member (7) is An indicator (21) that can visually check the depth of the recess (20) is provided over the entire circumference, so that the degree of tightening of the diaphragm (6) and whether or not it is tightened can be visually observed from above. Can be confirmed easily and accurately.

本発明に係る流体制御器の一実施例を示す断面説明図である。It is a section explanatory view showing one example of a fluid controller concerning the present invention. 図1示のダイアフラムの挟着部分を示す断面説明図である。FIG. 2 is an explanatory cross-sectional view showing a sandwiched portion of the diaphragm shown in FIG. 1. 図1示の流体制御器におけるインジケーター部分を拡大抽出して示す図である。It is a figure which expands and shows the indicator part in the fluid controller of FIG. 従来の流体制御器を示す断面説明図である。It is sectional explanatory drawing which shows the conventional fluid controller.

符号の説明Explanation of symbols

1 流体制御器
2 弁本体
3 入口流路
4 出口流路
6 ダイアフラム
7 挟持部材
10 周側面
11 封止突部
19 弁箱
20 凹部
21 インジケーター
DESCRIPTION OF SYMBOLS 1 Fluid controller 2 Valve body 3 Inlet flow path 4 Outlet flow path 6 Diaphragm 7 Holding member 10 Peripheral side surface 11 Sealing protrusion 19 Valve box 20 Recessed part 21 Indicator

Claims (3)

入口流路と出口流路を有してなる弁箱と、弁本体と、この弁箱と弁本体の間隙に挟持部材を介して挟着状態に固定されてなるダイアフラムと、このダイアフラムを伸縮させる操作機構とからなる流体制御器であって、前記弁箱には前記挟持部材の周側面に当接して前記入口流路、出口流路内を封止する無端状の封止突部が形成され、該封止突部により囲まれた凹部に前記挟持部材が入り込んでなるとともに、該挟持部材の下面は封止突部の上面に当接することなくダイアフラムの上面に当接し、前記挟持部材の周側面の上端部は前記封止突部の上端面より上方に位置しており、前記挟持部材の周側面には該周側面が前記凹部に入り込んだ深さの程度を目視確認できるインジケーターが設けられてなることを特徴とする流体制御器。 A valve box having an inlet channel and an outlet channel, a valve body, a diaphragm fixed in a sandwiched state via a clamping member in a gap between the valve box and the valve body, and expanding and contracting the diaphragm The valve box is formed with an endless sealing protrusion that contacts the peripheral side surface of the clamping member and seals the inlet channel and the outlet channel. The sandwiching member enters the recess surrounded by the sealing projection, and the bottom surface of the sandwiching member abuts on the top surface of the diaphragm without contacting the top surface of the sealing projection, and the periphery of the sandwiching member The upper end portion of the side surface is located above the upper end surface of the sealing projection, and the peripheral side surface of the clamping member is provided with an indicator that allows visual confirmation of the degree of depth of the peripheral side surface entering the recess. A fluid controller characterized by comprising 前記インジケーターが目盛り線からなることを特徴とする請求項1記載の流体制御器。 The fluid controller according to claim 1, wherein the indicator is a scale line. 前記インジケーターが複数の異なる色の層からなることを特徴とする請求項1記載の流体制御器。 The fluid controller according to claim 1, wherein the indicator includes a plurality of layers of different colors.
JP2003382977A 2003-11-12 2003-11-12 Fluid controller Pending JP2005147202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003382977A JP2005147202A (en) 2003-11-12 2003-11-12 Fluid controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003382977A JP2005147202A (en) 2003-11-12 2003-11-12 Fluid controller

Publications (1)

Publication Number Publication Date
JP2005147202A true JP2005147202A (en) 2005-06-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003382977A Pending JP2005147202A (en) 2003-11-12 2003-11-12 Fluid controller

Country Status (1)

Country Link
JP (1) JP2005147202A (en)

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