JP2005135808A - Organic el display device and its manufacturing method - Google Patents

Organic el display device and its manufacturing method Download PDF

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JP2005135808A
JP2005135808A JP2003372023A JP2003372023A JP2005135808A JP 2005135808 A JP2005135808 A JP 2005135808A JP 2003372023 A JP2003372023 A JP 2003372023A JP 2003372023 A JP2003372023 A JP 2003372023A JP 2005135808 A JP2005135808 A JP 2005135808A
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sealing
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light emitting
organic light
emitting element
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JP4516299B2 (en
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Noriharu Matsudate
法治 松舘
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Japan Display Inc
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Hitachi Displays Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • H10K59/874Passivation; Containers; Encapsulations including getter material or desiccant

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a number of components, manufacturing cost, and a number of manufacturing steps, for achieving high throughput with a low cost, by eliminating necessity of a dehumidifying material to be mounted, and increasing adsorptivity of chemical species (gas component). <P>SOLUTION: The organic EL display comprises a translucent glass substrate SUB1, an organic electroluminescent device ELD formed on the translucent glass substrate 1, a sealing glass substrate SUB2 arranged as opposed to the translucent glass substrate SUB1 with a gap for air-sealing the organic electroluminescent device ELD, and an adsorbent layer ADL formed on an inside surface of the sealing glass substrate SUB2 opposing to the organic electroluminescent device ELD. The adsorbent layer ADL includes an SiO porous layer ADL1 and a diatomaceous earth(or silicic acid earth) ADL2 evenly dispersed in a recess of the SiO porous layer ADL1. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、有機発光素子を用いた有機表示装置及びその製造方法に係り、特に有機発光素子を外部雰囲気から遮蔽する封止基板の内面に吸湿性及び脱酸性機能を有する吸着層を備えた有機EL表示装置及びその製造方法に関するものである。   The present invention relates to an organic display device using an organic light emitting element and a method for manufacturing the same, and more particularly, to an organic display having an adsorbing layer having hygroscopic and deacidifying functions on the inner surface of a sealing substrate that shields the organic light emitting element from an external atmosphere. The present invention relates to an EL display device and a manufacturing method thereof.

表示装置に用いられる電流制御型の発光装置として、エレクトロルミネッセンス(EL)や注入型発光ダイオードを用いたものが知られている。その中でも、有機の蛍光材料を発光層とした電流制御型EL(電荷注入型EL、以下有機発光素子あるいは有機ELとも称する)は、高輝度で大面積、製造コストが安価、且つフルカラー表示を実現可能なディスプレイデバイスとして注目されつつある。   As a current-controlled light-emitting device used for a display device, a device using electroluminescence (EL) or an injection-type light-emitting diode is known. Among them, a current control type EL (charge injection type EL, hereinafter also referred to as an organic light emitting element or organic EL) using an organic fluorescent material as a light emitting layer has a high luminance, a large area, a low manufacturing cost and a full color display. It is attracting attention as a possible display device.

図3は、有機発光素子の一構造例を模式的に説明する要部拡大断面図である。この有機発光素子ELDは、透光性ガラス基板SUB上にITOなどの透明導電膜(薄膜)で形成した陽極ADを備え、この陽極AD上に有機材料の薄膜からなる正孔輸送層HTLと発光層LULと発光制御電極となる陰極KDとを順次積層して構成される。   FIG. 3 is an enlarged cross-sectional view of a main part for schematically explaining one structural example of the organic light emitting device. This organic light emitting device ELD includes an anode AD formed of a transparent conductive film (thin film) such as ITO on a translucent glass substrate SUB, and a hole transport layer HTL made of a thin film of an organic material and light emission on the anode AD. The layer LUL and the cathode KD serving as the light emission control electrode are sequentially stacked.

このように構成される有機発光素子ELDは、陰極KDと陽極ADとの間に所定の電圧を印加することによる正孔輸送層HTLから発光層LULへの正孔の移送で発光層LULが発光し、その発光光Lを基板SUBから出射する。   In the organic light emitting device ELD configured as described above, the light emitting layer LUL emits light by transferring holes from the hole transport layer HTL to the light emitting layer LUL by applying a predetermined voltage between the cathode KD and the anode AD. Then, the emitted light L is emitted from the substrate SUB.

図4は、有機発光素子の他の構造例を模式的に説明する要部拡大断面図である。この有機発光素子ELDでは、上記と同様の透光性ガラス基板SUB上にITOなどの透明導電膜(薄膜)で形成した陽極ADを備え、この陽極AD上に有機材料の薄膜からなる正孔注入層HTLと発光層LULと電子注入層EILと発光制御電極となる陰極KDとを順次積層して構成される。   FIG. 4 is an enlarged cross-sectional view of a main part for schematically explaining another structural example of the organic light emitting device. This organic light emitting device ELD includes an anode AD formed of a transparent conductive film (thin film) such as ITO on a transparent glass substrate SUB similar to the above, and hole injection made of a thin film of an organic material on the anode AD. The layer HTL, the light emitting layer LUL, the electron injection layer EIL, and the cathode KD serving as the light emission control electrode are sequentially stacked.

このように構成される有機発光素子ELDは、陰極KDと陽極ADとの間に所定の電圧を印加することによる正孔注入層HTLから発光層LULへの正孔の移送と、電子注入層EILから注入される電子とで発光層LULを発光させ、その発光光Lを透光性基板SUBから出射する。   The organic light emitting device ELD configured as described above transfers holes from the hole injection layer HTL to the light emitting layer LUL by applying a predetermined voltage between the cathode KD and the anode AD, and the electron injection layer EIL. The light-emitting layer LUL emits light with electrons injected from the light, and the emitted light L is emitted from the translucent substrate SUB.

これらの積層構造の有機発光素子ELDは、発光効率を向上させるために正孔を注入する陽極AD側には正孔注入層HTLを設けたり、電子を注入する陰極KD側には電子注入層EILを設けたりする構成が採られている。   In the organic light emitting device ELD having these laminated structures, a hole injection layer HTL is provided on the anode AD side for injecting holes in order to improve luminous efficiency, or an electron injection layer EIL is provided on the cathode KD side for injecting electrons. The structure which provides is taken.

図5は、この種の有機発光素子ELDを用いた有機EL表示装置の従来の構造例を模式的に説明する要部断面図である。なお、図5では説明を簡単にするために1画素のみを示し、その画素を選択するスイッチング素子及び発光輝度を制御する制御素子等は省略されている。図5に示すようにこの有機発光素子ELDを用いた有機EL表示装置は、主面上に有機発光素子ELDを形成した透光性ガラス基板SUB1と、この有機発光素子ELDを保護する封止ガラス基板SUB2とを対向させ、両基板の周縁部にシール材SEAを塗布し硬化させ、貼り合わせてその内部を外部から隔離して封止される。   FIG. 5 is a cross-sectional view of an essential part for schematically explaining a conventional structural example of an organic EL display device using this type of organic light emitting element ELD. In FIG. 5, only one pixel is shown for the sake of simplicity, and a switching element for selecting the pixel, a control element for controlling light emission luminance, and the like are omitted. As shown in FIG. 5, an organic EL display device using the organic light emitting element ELD includes a translucent glass substrate SUB1 having the organic light emitting element ELD formed on the main surface, and a sealing glass for protecting the organic light emitting element ELD. The substrate SUB2 is made to face, the sealing material SEA is applied to the peripheral portions of both substrates, cured, and bonded together to isolate the inside from the outside and seal.

また、封止ガラス基板SUB2の内面(透光性ガラス基板SUB1の主面と対向する面)には、主として有機発光素子ELDが湿度での劣化を制御するための除湿材DESが取り付けられることが一般的である。この除湿材DESは、封止ガラス基板SUB2の内面に凹部ALCを加工し、この凹部ALC内に接着剤CEMで貼り付け、あるいは凹部ALCの底面に除湿材DESを塗布することで設置される。この種の従来技術に関しては、例えば下記特許文献1を挙げることができる。
特開2001−345175号公報
In addition, a dehumidifying material DES for mainly controlling the deterioration of the organic light emitting element ELD due to humidity may be attached to the inner surface of the sealing glass substrate SUB2 (the surface facing the main surface of the translucent glass substrate SUB1). It is common. The dehumidifying material DES is installed by processing the concave portion ALC on the inner surface of the sealing glass substrate SUB2 and attaching the dehumidifying material DES to the bottom surface of the concave portion ALC. With respect to this type of prior art, for example, the following Patent Document 1 can be cited.
JP 2001-345175 A

このように構成される有機EL表示装置は、有機発光素子を製作する際に有機発光素子ELDの発光部材が空気中の水分やその他酸素等のガス成分によって劣化することから、製作時に有機発光素子ELD内部の除湿を行う目的で除湿材(デシカント)を搭載させることが通常行われている。   In the organic EL display device configured as described above, when the organic light emitting element is manufactured, the light emitting member of the organic light emitting element ELD deteriorates due to moisture in the air or other gas components such as oxygen. In general, a dehumidifying material (desiccant) is mounted for the purpose of dehumidifying the inside of the ELD.

したがって、この種の有機EL表示装置では、図5に断面図で示すように除湿材DESの厚み及び接着剤CEMの厚みを考慮し、封止ガラス基板SUB2の内面にその厚さ方向に深さDが約0.5mm以上の凹部ALCの加工を行う必要がある。実際には接着剤CEMの塗布厚のバラツキ及び除湿材DESの変形を考慮して0.8mm程度の深さの加工が必要となる。このために有機EL表示装置の厚みは、透光性ガラス基板SUB1の板厚+封止ガラス基板SUB2の板厚=2.5mm前後の板厚が必要であった。   Therefore, in this type of organic EL display device, the thickness of the dehumidifying material DES and the thickness of the adhesive CEM are considered as shown in the cross-sectional view of FIG. 5, and the depth in the thickness direction is formed on the inner surface of the sealing glass substrate SUB2. It is necessary to process the recess ALC with D of about 0.5 mm or more. In practice, processing with a depth of about 0.8 mm is required in consideration of variations in the coating thickness of the adhesive CEM and deformation of the dehumidifying material DES. For this reason, the thickness of the organic EL display device needs to have a thickness of the translucent glass substrate SUB1 + the thickness of the sealing glass substrate SUB2 = 2.5 mm.

しかしながら、この種の有機EL表示装置では、封止ガラスSUB2の内面側に除湿材DESを搭載することが必要不可欠であることから、この除湿材DESの搭載に起因する封止ガラス基板SUB2の内面側に凹部ALCを形成する必要性からその加工費の増加,除湿材DES及び接着剤SEAなどの部材点数の増加及びこれらの製造工程数の増加などにより、製作コストが高価となり、低価格,高生産性が得られないという課題があった。   However, in this type of organic EL display device, since it is indispensable to mount the dehumidifying material DES on the inner surface side of the sealing glass SUB2, the inner surface of the sealing glass substrate SUB2 resulting from the mounting of the dehumidifying material DES. Due to the necessity of forming the recess ALC on the side, the processing cost increases, the number of parts such as the dehumidifying material DES and the adhesive SEA, and the number of manufacturing processes increase. There was a problem that productivity could not be obtained.

また、封止ガラス基板SUB2の内面に除湿材DESを搭載する凹部ALCの確保による有機EL表示装置本体の厚みが増加することから、有機EL表示装置としての厚さが増大し、その薄型化が達成できないという課題があった。   In addition, since the thickness of the organic EL display device main body is increased by securing the recess ALC in which the dehumidifying material DES is mounted on the inner surface of the sealing glass substrate SUB2, the thickness of the organic EL display device is increased and the thickness is reduced. There was a problem that could not be achieved.

さらに、現状の除湿材は、接着樹脂材として例えばエチレン・酢酸ビニル共重合体などからなる高分子系樹脂材料中に例えば酸化バリウムなどの乾燥材を分散させて形成されていることから、封止ガラス基板SUB2内の除湿は可能であるが、化学種(ガス)等の除去(吸着固定)が不可能であり、したがって、充分なガス成分の吸着機能が得られないという課題があった。   Furthermore, the current dehumidifying material is formed by dispersing a desiccant such as barium oxide in a polymer resin material made of, for example, ethylene / vinyl acetate copolymer as an adhesive resin material. Although dehumidification in the glass substrate SUB2 is possible, removal of chemical species (gas) or the like (adsorption fixation) is impossible, and thus there is a problem that a sufficient gas component adsorption function cannot be obtained.

したがって、本発明は前述した従来の課題を解決するためになされたものであり、その目的は、封止ガラス基板の内面に吸着材を一体化形成することにより、封止ガラス基板の板厚を薄くさせ、延いては有機EL表示装置本体の薄型化を実現可能とする有機EL表示装置及びその製造方法を提供することにある。   Therefore, the present invention has been made to solve the above-described conventional problems, and its purpose is to integrally form an adsorbent on the inner surface of the sealing glass substrate, thereby reducing the thickness of the sealing glass substrate. An object of the present invention is to provide an organic EL display device that can be thinned and, by extension, capable of realizing a thin organic EL display device body, and a method for manufacturing the same.

また、本発明の他の目的は、封止ガラス基板の内面に吸着材を一体化形成することにより、除湿材の搭載を不要とし、化学種(ガス成分)の吸着性を向上させることにより、部品点数,加工費及び製造工程数を低減させ、低コストで高生産性を実現可能とする有機EL表示装置及びその製造方法を提供することにある。   Another object of the present invention is to integrally form an adsorbent on the inner surface of the sealing glass substrate, thereby eliminating the need for a dehumidifying material and improving the adsorptivity of chemical species (gas components). An object of the present invention is to provide an organic EL display device that can reduce the number of parts, the processing cost, and the number of manufacturing steps, and that can realize high productivity at a low cost, and a manufacturing method thereof.

このような目的を達成するために本発明による有機EL表示装置は、透光性基板と、この透光性基板上に形成された有機発光素子と、透光性基板に間隙を有して対向配置され、かつ有機発光素子を気密封止する封止基板と、この封止基板の有機発光素子と対向する内面に配設された吸着層とを備え、この吸着層は、SiO多孔質層とこのSiO多孔質層内の隙間に保持固定された珪藻土とから構成することにより、その表面が多孔質化された薄膜で形成され、表面積が増大し、湿度及び化学種などが効率良く吸着固定され易くなるので、背景技術の課題が解決される。   In order to achieve such an object, an organic EL display device according to the present invention has a light-transmitting substrate, an organic light-emitting element formed on the light-transmitting substrate, and a light-transmitting substrate with a gap therebetween. And a sealing substrate that hermetically seals the organic light emitting element, and an adsorption layer disposed on the inner surface of the sealing substrate facing the organic light emitting element, the adsorption layer comprising a SiO porous layer, By comprising diatomaceous earth held and fixed in the gaps in this SiO porous layer, the surface is formed with a porous thin film, the surface area is increased, and humidity and chemical species are efficiently adsorbed and fixed. This facilitates the problem of the background art.

また、本発明による他の有機EL表示装置は、透光性基板と、この透光性基板上に形成された有機発光素子と、透光性基板に間隙を有して対向配置され、かつ有機発光素子を気密封止する封止基板と、この封止基板の有機発光素子と対向する内面に形成された吸着層とを備え、この吸着層は、金属アルコキシド薄片積層とこの金属アルコキシド薄片積層内の隙間に保持固定された珪藻土とから構成することにより、その表面が多孔質化された薄膜で形成され、表面積を増大させ、湿度及び化学種などが効率良く吸着固定され易くなるので、背景技術の課題が解決される。   In addition, another organic EL display device according to the present invention includes a translucent substrate, an organic light emitting element formed on the translucent substrate, and a transparent substrate disposed with a gap therebetween. A sealing substrate for hermetically sealing the light emitting element and an adsorption layer formed on the inner surface of the sealing substrate facing the organic light emitting element are provided. The adsorption layer includes a metal alkoxide laminating layer and a metal alkoxide laminating layer. Because the surface is formed of a porous thin film, the surface area is increased, and humidity and chemical species are easily adsorbed and fixed easily. The problem is solved.

また、本発明による有機EL表示装置の製造方法は、透光性基板と、この透光性基板上に形成された有機発光素子と、透光性基板に間隙を有して対向配置され、かつ有機発光素子を気密封止する封止基板と、この封止基板の有機発光素子と対向する内面に形成された吸着層とを備えた有機EL表示装置の製造方法において、透光性基板上に少なくとも有機材料からなる発光層を有する有機発光素子を形成する工程と、有機発光素子が形成された透光性基板と吸着層が形成された封止基板とを当該有機発光素子と吸着層とが対向配置するように両基板を気密封止する封止工程とを有し、有機発光素子を形成する工程と、両基板を気密封止する工程との間に封止基板の内面にSiO2を斜方蒸着させてSiO多孔質層を形成し、このSiO多孔質層内の隙間に珪藻土を分散させて接着させる吸着層形成工程を含むことにより、その表面が多孔質化された薄膜状の吸着層が形成され、背景技術の課題が解決される。 In addition, the method of manufacturing an organic EL display device according to the present invention includes a translucent substrate, an organic light emitting element formed on the translucent substrate, a translucent substrate disposed with a gap therebetween, and In a method for manufacturing an organic EL display device, comprising: a sealing substrate for hermetically sealing an organic light emitting element; and an adsorption layer formed on an inner surface of the sealing substrate facing the organic light emitting element. A step of forming an organic light-emitting element having a light-emitting layer made of at least an organic material; a light-transmitting substrate on which the organic light-emitting element is formed; and a sealing substrate on which an adsorption layer is formed. A sealing step of hermetically sealing the two substrates so as to face each other, and SiO 2 is formed on the inner surface of the sealing substrate between the step of forming the organic light emitting element and the step of hermetically sealing the two substrates. The SiO porous layer is formed by oblique vapor deposition. By including an adsorption layer forming step of adhering by dispersing the diatomaceous earth in the gap of the inner, the surface is a thin film-like adsorption layer made porous is formed, drawbacks of the related art is solved.

また、本発明による他の有機EL表示装置の製造方法は、透光性基板と、この透光性基板上に形成された有機発光素子と、透光性基板に間隙を有して対向配置され、かつ有機発光素子を気密封止する封止基板と、この封止基板の有機発光素子と対向する内面に形成された吸着層とを備えた有機EL表示装置の製造方法において、透光性基板上に少なくとも有機材料からなる発光層を有する有機発光素子を形成する工程と、有機発光素子が形成された透光性基板と吸着層が形成された封止基板とを当該有機発光素子と吸着層とが対向配置するように両基板を気密封止する封止工程とを有し、有機発光素子を形成する工程と、両基板を気密封止する工程との間に封止基板の内面に金属アルコキシドを塗布し、乾燥させて金属アルコキシド薄片積層を形成し、この金属アルコキシド薄片積層内の隙間に珪藻土を分散させて接着させる吸着層形成工程を含むことにより、その表面が多孔質化された薄膜状の吸着層が形成され、背景技術が解決される。
また、上述した本発明による有機EL表示装置及びその製造方法において、珪藻土に代えて珪酸土を用い、または珪藻土と珪酸土との混合物を用いても良い。
In addition, another method for manufacturing an organic EL display device according to the present invention includes a translucent substrate, an organic light emitting element formed on the translucent substrate, and a translucent substrate facing each other with a gap. In the method for manufacturing an organic EL display device comprising: a sealing substrate for hermetically sealing the organic light emitting element; and an adsorption layer formed on an inner surface of the sealing substrate facing the organic light emitting element. A step of forming an organic light-emitting element having a light-emitting layer made of at least an organic material thereon, a light-transmitting substrate on which the organic light-emitting element is formed, and a sealing substrate on which an adsorption layer is formed include the organic light-emitting element and the adsorption layer And a sealing step for hermetically sealing the two substrates so as to face each other, and a metal is formed on the inner surface of the sealing substrate between the step of forming the organic light emitting element and the step of hermetically sealing the two substrates. Apply alkoxide and dry to stack metal alkoxide flakes By forming and forming an adsorption layer forming step in which diatomaceous earth is dispersed and adhered to the gaps in the metal alkoxide flake stack, a thin-film adsorption layer whose surface is made porous is formed, and the background art is solved. The
Moreover, in the organic EL display device and the manufacturing method thereof according to the present invention described above, silicate earth may be used instead of diatomaceous earth, or a mixture of diatomaceous earth and silicate earth may be used.

なお、本発明は、上記各構成及び後述する実施の形態に記載される構成に限定されるものではなく、本発明の技術思想を逸脱することなく、種々の変更が可能であることは言うまでもない。   It should be noted that the present invention is not limited to the above-described configurations and the configurations described in the embodiments described later, and it goes without saying that various modifications can be made without departing from the technical idea of the present invention. .

本発明による有機EL表示装置によれば、その表面が多孔質化され、表面積が増大された吸着層が形成されるので、空気中に水分及びガス成分などが吸着され易くなり、現状の除湿材では除去が困難であった化学種(ガス)などを容易に且つ確実に吸着固定させて除去させることができる。また、封止基板の内面に吸着材を一体化形成することにより、封止基板の板厚を薄くさせ、惹いては有機EL表示装置本体の薄型化が実現可能となるなどの極めて優れた効果が得られる。   According to the organic EL display device of the present invention, an adsorption layer having a porous surface and an increased surface area is formed, so that moisture, gas components, and the like are easily adsorbed in the air. Then, it is possible to easily and reliably adsorb and remove chemical species (gas) that have been difficult to remove. In addition, by forming the adsorbent integrally on the inner surface of the sealing substrate, the thickness of the sealing substrate can be reduced, and the organic EL display device can be made thinner. Is obtained.

また、本発明による有機EL表示装置の製造方法によれば、封止基板の内面に一体化させて吸着層を形成することができるので、封止基板に除湿材を搭載する凹部の加工費及び除湿材,接着剤などの部品並びにそれらの製造工程などが不要となるので、コストダウンが可能となり、低価格で生産性の高い有機EL表示装置を提供できるなどの極めて優れた効果が得られる。   Further, according to the method of manufacturing the organic EL display device according to the present invention, the adsorption layer can be formed integrally with the inner surface of the sealing substrate, so that the processing cost of the recess for mounting the dehumidifying material on the sealing substrate and Since parts such as a dehumidifying material and an adhesive and a manufacturing process thereof are not necessary, the cost can be reduced, and an extremely excellent effect such as providing an organic EL display device with low cost and high productivity can be obtained.

以下、本発明の具体的な実施の形態について、実施例の図面を参照して詳細に説明する。   Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings of the examples.

図1(a),(b),(c)は、本発明による有機EL表示装置の一実施例による構成を模式的に説明する要部断面図であり、図1(a)では説明を簡単にするため、1画素のみを示している。また、前述した図と同一部分には同一符号を付し、その説明は省略する。図1(a)において、有機EL表示装置ELDDは、互いに平行に上下に重ねて対向配置された透光性ガラス基板SUB1及び対向面に加工された凹部ALCを有する封止ガラス基板SUB2と、透光性ガラス基板SUB1上に例えば図4に示したように陽極AD,正孔輸送層HTL,発光層LUL,電子注入層EIL,陰極KDが順次積層形成された有機発光素子ELDと、封止ガラス基板SUB2の凹部ALC内に被着形成されたSiO多孔質層及び珪藻土を分散し、接着させた吸着層ADLと、有機発光素子ELDの周囲を取り囲むように両基板の最外周を接着固定するシール材SEAとから構成されている。   FIGS. 1A, 1B, and 1C are cross-sectional views schematically illustrating a configuration of an organic EL display device according to an embodiment of the present invention. FIG. Therefore, only one pixel is shown. Also, the same parts as those in the above-mentioned drawings are denoted by the same reference numerals, and the description thereof is omitted. In FIG. 1 (a), an organic EL display device ELDD includes a light-transmitting glass substrate SUB1 and a sealing glass substrate SUB2 having a recessed portion ALC processed on the opposite surface, and a transparent glass substrate SUB1 arranged in parallel with each other. An organic light emitting device ELD in which an anode AD, a hole transport layer HTL, a light emitting layer LUL, an electron injection layer EIL, and a cathode KD are sequentially laminated on the optical glass substrate SUB1, for example, as shown in FIG. A seal that adheres and fixes the outermost peripheries of both substrates so as to surround the periphery of the organic light emitting device ELD, with the adsorbed layer ADL dispersed and adhered to the porous SiO layer and diatomaceous earth deposited in the recess ALC of the substrate SUB2 It is comprised from material SEA.

このように構成される有機EL表示装置において、封止ガラス基板SUB2の凹部ALCの内面に形成される吸着層ADLは、図1(b)に要部拡大断面図で示すように封止ガラス基板SUB2の凹部ALCの底面にSiO2を斜方蒸着法により成膜されたSiO蒸着膜からなり、その表面が多孔質化された多孔質層ADL1が一体的に形成され、その表面が粗面化されて形成されている。また、この粗面化されたSiO多孔質層ADL1内には図1(c)に要部拡大断面図で示すように微粉末状に粉砕した珪藻土(軽石)ADL2が均一に分散させて接着され、SiO多孔質層ADL1内の隙間に物理的に吸着されて保持固定されている。なお、この吸着層ADLの層厚は、0.5μm〜5μmの範囲で形成されている。 In the organic EL display device configured as described above, the adsorption layer ADL formed on the inner surface of the recess ALC of the sealing glass substrate SUB2 is the sealing glass substrate as shown in the enlarged cross-sectional view of the main part in FIG. becomes a SiO 2 to SUB2 bottom surface of the recess ALC from SiO deposited film formed by oblique evaporation method, the surface porous layer ADL1 made porous is formed integrally with, the surface roughening Has been formed. Further, in this roughened SiO porous layer ADL1, diatomaceous earth (pumice) ADL2 pulverized into a fine powder is uniformly dispersed and adhered as shown in the enlarged sectional view of the main part in FIG. The SiO porous layer ADL1 is physically adsorbed and held and fixed in the gap. In addition, the layer thickness of this adsorption layer ADL is formed in the range of 0.5 micrometer-5 micrometers.

この吸着層ADLは、除湿,脱ガス構造体としての機能を十分に得るのに必要な0.5μm〜5μmの範囲の層厚で形成されるので、封止ガラス基板SUB2の凹部ALCの加工深さDは10μm(0.01mm)以下あれば十分であり、このため、現状に比較して約0.8mm(加工量)以上の素子厚を低減させることができる。   Since this adsorption layer ADL is formed with a layer thickness in the range of 0.5 μm to 5 μm necessary for obtaining sufficient functions as a dehumidifying and degassing structure, the processing depth of the recess ALC of the sealing glass substrate SUB2 It is sufficient that the thickness D is 10 μm (0.01 mm) or less. For this reason, an element thickness of about 0.8 mm (processing amount) or more can be reduced as compared with the current state.

このような構成において、封止ガラス基板SUB2の凹部ALC内に多孔質化されたSiO蒸着層ADL1と珪藻土ADL2とからなる吸着層ADLを一体的に形成したことにより、この吸着層ADLは表面積が大幅に増大し、可逆的な水分,化学種(ガス)成分の吸着性を示すので、現状の除湿材では除去が困難であった空気中の湿度及びガス成分を物理的に吸着固定させ、その除去が極めて容易となる。   In such a configuration, the adsorption layer ADL formed of the porous SiO vapor deposition layer ADL1 and the diatomaceous earth ADL2 in the recess ALC of the sealing glass substrate SUB2 is integrally formed, so that the adsorption layer ADL has a surface area. Since it greatly increases and shows reversible moisture and chemical species (gas) component adsorption properties, the moisture and gas components in the air that were difficult to remove with the current dehumidifiers are physically adsorbed and fixed. Removal is extremely easy.

また、このような構成において、吸着層ADLを0.5μm〜5μmの範囲の厚さで封止ガラス基板SUB2の凹部ALC内に一体化されて形成でき、これに加えて充分な湿度及びガス成分の除去効果が得られるので、封止ガラス基板SUB2の板厚及び凹部ALCの加工量の深さを低減することが可能となり、素子厚をさらに薄くできるので、延いては有機EL表示装置を薄型化が実現可能となる。   Further, in such a configuration, the adsorption layer ADL can be integrally formed in the recess ALC of the sealing glass substrate SUB2 with a thickness in the range of 0.5 μm to 5 μm, and in addition, sufficient humidity and gas components As a result, it is possible to reduce the thickness of the sealing glass substrate SUB2 and the depth of the processed portion of the recess ALC, and further reduce the element thickness, thereby reducing the thickness of the organic EL display device. Can be realized.

なお、前述した実施例においては、吸着層ADLを構成する多孔質層ADL1を斜方蒸着膜で形成した場合について説明したが、本発明はこれに限定されるものではなく、凹部ALCの内面に全面ベタ蒸着膜で形成してもその表面が多孔質となり、珪藻土ADL2が充分に分散,接着され、保持固定されるので、前述とほぼ同等の効果が得られる。また、珪藻土ADL2を珪酸土(例えばゼオライト)または珪藻土ADL2と珪酸土との混合物に置き換えても同様の効果が得られる。   In the above-described embodiment, the case where the porous layer ADL1 constituting the adsorption layer ADL is formed of an oblique vapor deposition film has been described. However, the present invention is not limited to this, and the inner surface of the recess ALC is formed. Even if the entire surface is formed of a solid vapor-deposited film, the surface becomes porous, and diatomaceous earth ADL2 is sufficiently dispersed, adhered, and held and fixed, so that the same effect as described above can be obtained. The same effect can be obtained by replacing diatomaceous earth ADL2 with silicate earth (for example, zeolite) or a mixture of diatomaceous earth ADL2 and silicate earth.

また、前述した実施例においては、吸着層ADLを構成する多孔質層ADL1の形成金属としてSiOを用いた場合について説明したが、本発明はこれに限定されるものではなく、SiN,TiNなどを用いても前述と全く同様の効果が得られる。   In the above-described embodiment, the case where SiO is used as the metal forming the porous layer ADL1 constituting the adsorption layer ADL has been described. However, the present invention is not limited to this, and SiN, TiN, and the like are used. Even if used, the same effect as described above can be obtained.

次に上記実施例1で説明した有機EL表示装置の製造方法の一実施例について図1(a),(b),(c)を参照して説明する。なお、透光性ガラス基板SUB1上に形成する有機発光素子ELDの形成工程は省略する。図1(a)に示すようにまず、有機発光素子ELDを形成した透光性ガラス基板SUB1を用意しておく。   Next, an embodiment of the method for manufacturing the organic EL display device described in the first embodiment will be described with reference to FIGS. 1 (a), (b), and (c). In addition, the formation process of the organic light emitting element ELD formed on the translucent glass substrate SUB1 is omitted. As shown in FIG. 1A, first, a translucent glass substrate SUB1 on which an organic light emitting element ELD is formed is prepared.

次に、主要部に凹部ALCが形成された封止ガラス基板SUB2を充分に洗浄し、乾燥させた後、この凹部ALCの底面にSiO2を斜方蒸着法により成膜させて図1(b)に要部拡大断面図で示すように表面が多孔質化されたSiO多孔質層ADL1を一体的に形成する。引き続きこのSiO多孔質層ADL1内の隙間に図1(c)に要部拡大断面図で示すように微粉末状に粉砕した珪藻土(軽石)ADL2を均一に分散させて接着させ、SiO蒸着層ADL1内の隙間に物理的に吸着されて保持固定された吸着層ADLが形成される。珪藻土ADL2に代えて珪酸土(例えばゼオライト)や珪藻土ADL2と珪酸土との混合物を用いても良い。いずれの場合もこの吸着層ADLは、0.5μm〜5μmの範囲の厚さで形成されている。 Next, the sealing glass substrate SUB2 in which the concave portion ALC is formed in the main portion is sufficiently washed and dried, and then SiO 2 is formed on the bottom surface of the concave portion ALC by the oblique deposition method. ), An SiO porous layer ADL1 having a porous surface is integrally formed as shown in the enlarged sectional view of the main part. Subsequently, diatomaceous earth (pumice) ADL2 pulverized into a fine powder as shown in an enlarged cross-sectional view in FIG. 1C is uniformly dispersed and adhered to the gap in the SiO porous layer ADL1, and the SiO deposited layer ADL1 is adhered. An adsorption layer ADL that is physically adsorbed and held and fixed in the inner gap is formed. Instead of diatomaceous earth ADL2, silicate earth (for example, zeolite) or a mixture of diatomaceous earth ADL2 and silicate earth may be used. In any case, the adsorption layer ADL is formed with a thickness in the range of 0.5 μm to 5 μm.

なお、封止ガラス基板SUB2の内面にSiO多孔質層ADL1を形成する場合、後工程において、透光性ガラス基板SUB1と封止ガラス基板SUB2と貼り合わせて封止する際にSiO多孔質層ADL1がシール材SEAの塗布領域に存在すると、その封止能力や接着能力に支障をきたすので、封止ガラス基板SUB2の外周部にはSiO多孔質層ADL1が形成されないようにマスキング処理などの対策を施す必要がある。   In the case where the SiO porous layer ADL1 is formed on the inner surface of the sealing glass substrate SUB2, the SiO porous layer ADL1 is bonded to the translucent glass substrate SUB1 and the sealing glass substrate SUB2 and sealed in a later step. Is present in the application area of the sealing material SEA, the sealing ability and adhesion ability are hindered. Therefore, measures such as masking treatment should be taken so that the SiO porous layer ADL1 is not formed on the outer peripheral portion of the sealing glass substrate SUB2. It is necessary to apply.

次に吸着層ADLが形成された封止ガラス基板SUB2を充分な真空または加熱脱水処理を行った後、吸着層ADLを形成した封止ガラス基板SUB2の外周部(凹部ALCの開口端)にエポキシ樹脂等のシール材SEAをディスペンサーなどにより塗布し、有機発光素子ELDを形成した透光性ガラス基板SUB1と、吸着層ADLを形成した封止ガラス基板SUB2とを有機発光素子ELDと吸着層ADLとが対向するようにして所定の間隔を有して重ね合わせ、シール材SEAを硬化させて封止し、有機EL表示装置ELDDを完成する。なお、この硬化処理は、シール材SEAに添加する硬化成分に応じて熱硬化でも良く、紫外線硬化でも良い。   Next, after sufficient vacuum or heat dehydration treatment is performed on the sealing glass substrate SUB2 on which the adsorption layer ADL is formed, epoxy is applied to the outer peripheral portion (opening end of the recess ALC) of the sealing glass substrate SUB2 on which the adsorption layer ADL is formed. A light-transmitting glass substrate SUB1 on which an organic light-emitting element ELD is formed by applying a sealing material SEA such as resin with a dispenser or the like, and a sealing glass substrate SUB2 on which an adsorption layer ADL is formed are combined with the organic light-emitting element ELD and the adsorption layer ADL. Are stacked so as to face each other with a predetermined interval, and the sealing material SEA is cured and sealed to complete the organic EL display device ELDD. This curing process may be thermal curing or ultraviolet curing depending on the curing component added to the sealing material SEA.

これらの封止工程は、空気中の湿度及びガス成分を制御した乾燥窒素などの不活性ガス雰囲気中で行い、有機EL表示装置ELDDの内部空間内に含まれる湿度及びガス成分量を所定値以下に制御している。   These sealing steps are performed in an inert gas atmosphere such as dry nitrogen in which the humidity and gas components in the air are controlled, and the humidity and gas component amounts contained in the internal space of the organic EL display device ELDD are below a predetermined value. Is controlling.

このような方法によれば、封止ガラス基板SUB2の凹部ALC底面に一体化させて吸着層ADLを容易に形成できるので、封止ガラス基板SUB2に除湿材を搭載する凹部の加工費及び除湿材,接着剤などの部品並びにそれらの製造工程などが不要となるので、歩留まりが向上するとともに、コストダウンが可能となり、低価格で生産性の高い有機EL表示装置ELDDが実現可能となる。   According to such a method, since the adsorption layer ADL can be easily formed by integrating with the bottom surface of the recess ALC of the sealing glass substrate SUB2, the processing cost and the dehumidification material of the recess for mounting the dehumidifying material on the sealing glass substrate SUB2 , Parts such as adhesives and manufacturing processes thereof are not required, so that the yield is improved, the cost can be reduced, and an organic EL display device ELDD with low cost and high productivity can be realized.

図2(a),(b),(c)は、本発明による有機EL表示装置の他の実施例による構成を模式的に説明する要部断面図であり、図2(a)では説明を簡単にするため、1画素のみを示している。また、前述した図と同一部分には同一符号を付し、その説明は省略する。図2(a)において、図1と異なる点は、有機EL表示装置ELDDが互いに平行に上下に重ねて対向配置された透光性ガラス基板SUB1と平板状の封止ガラス基板SUB2とから構成されている。   2 (a), 2 (b), and 2 (c) are cross-sectional views of relevant parts for schematically explaining the configuration of another embodiment of the organic EL display device according to the present invention, and FIG. For simplicity, only one pixel is shown. Also, the same parts as those in the above-mentioned drawings are denoted by the same reference numerals, and the description thereof is omitted. 2A is different from FIG. 1 in that an organic EL display device ELDD is composed of a translucent glass substrate SUB1 and a flat sealing glass substrate SUB2 which are arranged to face each other in parallel. ing.

また、この封止ガラス基板SUB2の有機発光素子ELDと対向する内面には、金属アルコキシド薄片積層ADL3とこの金属アルコキシド薄片積層ADL3内の隙間に均一に分散,接着されて保持固定された珪藻土ADL2とから構成される吸着層ADL´が形成されている。   Further, on the inner surface of the sealing glass substrate SUB2 facing the organic light emitting element ELD, there is a metal alkoxide flake laminate ADL3 and a diatomaceous earth ADL2 that is uniformly dispersed and bonded and held and fixed in a gap in the metal alkoxide flake laminate ADL3. An adsorption layer ADL ′ composed of is formed.

この金属アルコキシド薄片積層ADL3は、図2(b)に要部拡大断面図で示すように封止ガラス基板SUB2の内面にSiO2が主成分の一つに含まれる金属アルコキシドを塗布し、乾燥させた金属アルコキシド薄片積層ADL3が一体的に形成され、その表面が粗面化されて形成されている。また、この金属アルコキシド薄片積層ADL3内の隙間には図2(c)に要部拡大断面図で示すように微粉末状に粉砕した珪藻土(軽石)ADL2を均一に分散させて接着され、金属アルコキシド薄片積層ADL3内の隙間に物理的に吸着されて保持固定されて形成されている。珪藻土ADL2は、珪酸土(例えばゼオライト)または珪藻土ADL2と珪酸土との混合物に置き換えても良く、いずれの場合もこの吸着層ADL´は、除湿,脱ガス構造体としての機能を十分に得るのに必要な0.5μm〜5μmの範囲の層厚で形成されている。 This metal alkoxide laminar laminate ADL3 is coated with a metal alkoxide containing SiO 2 as one of the main components on the inner surface of the sealing glass substrate SUB2, as shown in FIG. The metal alkoxide laminar laminate ADL3 is integrally formed, and the surface thereof is roughened. Further, diatomaceous earth (pumice) ADL2 pulverized into a fine powder is uniformly dispersed and bonded to the gap in the metal alkoxide laminar laminate ADL3 as shown in the enlarged cross-sectional view of the main part in FIG. It is formed by being physically adsorbed and held and fixed in the gaps in the laminar laminate ADL3. The diatomaceous earth ADL2 may be replaced with silicate earth (for example, zeolite) or a mixture of diatomaceous earth ADL2 and silicate earth, and in any case, this adsorption layer ADL ′ sufficiently obtains a function as a dehumidifying and degassing structure. It is formed with a layer thickness in the range of 0.5 μm to 5 μm required for the above.

また、この吸着層ADL´が形成された封止ガラス基板SUB2は、有機発光素子ELDが形成された透光性ガラス基板SUB1上に吸着層ADL´と有機発光素子ELDとを対向させて有機発光素子ELDの周囲を取り囲むように両基板の最外周にスペーサSPを分散させたシール材SEAにより接着固定されて封止されている。   In addition, the sealing glass substrate SUB2 on which the adsorption layer ADL ′ is formed is an organic light emitting device by making the adsorption layer ADL ′ and the organic light emitting element ELD face each other on the translucent glass substrate SUB1 on which the organic light emitting element ELD is formed. The element ELD is bonded and fixed by a sealing material SEA in which spacers SP are dispersed on the outermost periphery of both substrates so as to surround the periphery of the element ELD.

このように構成された有機EL表示装置においても、封止ガラス基板SUB2の内面に金属アルコキシド薄片積層ADL3とこの金属アルコキシド薄片積層ADL3の隙間に保持固定させた珪藻土(またはその代替物)ADL2とから構成される吸着層ADL´を一体的に形成したことにより、前述と同様にこの吸着層ADL´は表面積が大幅に増大し、可逆的な水分,化学種(ガス)成分の吸着性を示すので、空気中の湿度及び現状の除湿材では除去が困難であったガス成分を物理的に吸着固定させ、その除去が極めて容易となる。   Also in the organic EL display device configured in this way, from the inner surface of the sealing glass substrate SUB2, the metal alkoxide flake laminate ADL3 and diatomaceous earth (or its substitute) ADL2 held and fixed in the gap between the metal alkoxide flake laminate ADL3 Since the adsorbing layer ADL ′ is integrally formed, the adsorbing layer ADL ′ has a surface area greatly increased as described above, and exhibits reversible moisture and chemical (gas) component adsorption. In addition, it is possible to physically adsorb and fix a gas component that has been difficult to remove with the humidity in the air and the current dehumidifying material, and the removal thereof becomes extremely easy.

また、このような構成において、封止ガラス基板SUB2上に形成された吸着層ADL´の層厚は、約10μm以下であり、封止ガラス基板SUB2を透光性ガラス基板SUB1と接着固定するシール材SEA内に混入するスペーサSPの粒径Dが約30μm±5μmであることから、吸着層ADL´の層厚の約3倍であるため、封止ガラス基板SUB2に凹部を加工しない全くの平板状ガラス基板を用いての製作が可能となる。   In such a configuration, the adsorption layer ADL ′ formed on the sealing glass substrate SUB2 has a thickness of about 10 μm or less, and a seal that bonds and fixes the sealing glass substrate SUB2 to the translucent glass substrate SUB1. Since the particle diameter D of the spacer SP mixed in the material SEA is about 30 μm ± 5 μm, it is about three times the layer thickness of the adsorption layer ADL ′, so that a flat plate that does not process a recess in the sealing glass substrate SUB2 Fabrication using a glass substrate is possible.

このような構成においても、吸着層ADL´の層厚を0.5μm〜5μmの範囲で封止ガラス基板SUB2の内面に一体化されて形成でき、これに加えて充分な湿度及びガス成分の除去効果が得られるので、凹部の加工が不要となるとともに、封止ガラス基板SUB2の板厚を低減させ、素子厚を薄くできるので、延いては有機EL表示装置を薄型化が実現可能となる。   Even in such a configuration, the adsorption layer ADL ′ can be formed integrally with the inner surface of the sealing glass substrate SUB2 in the range of 0.5 μm to 5 μm, and in addition, sufficient humidity and gas components can be removed. Since the effect can be obtained, the processing of the concave portion is not necessary, and the thickness of the sealing glass substrate SUB2 can be reduced and the element thickness can be reduced. Accordingly, the organic EL display device can be reduced in thickness.

次に上記実施例3で説明した有機EL表示装置の製造方法の一実施例について図2(a),(b),(c)を参照して説明する。なお、前述した実施例2で説明した形成工程の同一部分は同一符号を付し、重複する説明は省略してある。   Next, one embodiment of the method for manufacturing the organic EL display device described in the third embodiment will be described with reference to FIGS. 2 (a), (b), and (c). In addition, the same part of the formation process demonstrated in Example 2 mentioned above attaches | subjects the same code | symbol, and the overlapping description is abbreviate | omitted.

まず、平板状に形成された封止ガラス基板SUB2を充分に洗浄し、乾燥させた後、この封止ガラス基板SUB2の内面にSiO2が主成分の一つに含まれる金属アルコキシドを塗布し、金属アルコキシドゾルゲル膜を形成した後、室温で乾燥させるゾルゲル法により図2(b)に要部拡大断面図で示すようにフレーク状素片を多数積層させた金属アルコキシド薄片積層ADL3を一体的に形成する。この場合、この金属アルコキシド薄片層ADL3はその表面が粗面化されて形成されている。 First, after sufficiently washing and drying the sealing glass substrate SUB2 formed in a flat plate shape, a metal alkoxide containing SiO 2 as one of the main components is applied to the inner surface of the sealing glass substrate SUB2, After forming the metal alkoxide sol-gel film, the metal alkoxide laminar laminate ADL3 is integrally formed by laminating a large number of flake-like pieces as shown in the enlarged cross-sectional view of the main part in FIG. To do. In this case, the metal alkoxide flake layer ADL3 is formed by roughening the surface.

なお、封止ガラス基板SUB2の内面に金属アルコキシド薄片積層ADL3を形成する場合、後工程において、透光性ガラス基板SUB1と封止ガラス基板SUB2と貼り合わせて封止する際に金属アルコキシド薄片積層ADL3がシール材SEAの塗布領域に存在すると、その封止能力や接着能力に支障をきたすので、封止ガラス基板SUB2の外周部には金属アルコキシド薄片積層ADL3が形成されないようにマスキング処理などの対策を施す必要がある。   In addition, when forming the metal alkoxide thin-layer laminate ADL3 on the inner surface of the sealing glass substrate SUB2, when the pasting and sealing the light-transmitting glass substrate SUB1 and the sealing glass substrate SUB2 in the subsequent step, the metal alkoxide thin-layer stack ADL3 is performed. Is present in the application area of the sealing material SEA, the sealing ability and adhesion ability are hindered. Therefore, measures such as masking treatment should be taken so that the metal alkoxide laminar laminate ADL3 is not formed on the outer peripheral portion of the sealing glass substrate SUB2. It is necessary to apply.

引き続きこの金属アルコキシド薄片積層層ADL3の隙間内に図2(c)に要部拡大断面図で示すように微粉末状に粉砕した珪藻土ADL2を均一に分散させて接着させ、金属アルコキシド薄片積層ADL3内の隙間(各フレーク状素片の隙間)に物理的に吸着させて保持固定されて吸着層ADL´を形成する。珪藻土ADL2は珪酸土(例えばゼオライト)または珪藻土ADL2と珪酸土との混合物で代替しても良く、いずれの場合もこの吸着層ADL´は、除湿,脱ガス構造体としての機能を十分に得るのに必要な0.5μm〜5μmの範囲の層厚で形成されている。   Subsequently, diatomaceous earth ADL2 pulverized into a fine powder form is uniformly dispersed and adhered in the gap between the metal alkoxide laminar laminate layers ADL3 as shown in the enlarged cross-sectional view of the main part in FIG. The adsorbed layer ADL ′ is formed by being physically adsorbed and held in the gaps (gap between the flake-like pieces). Diatomaceous earth ADL2 may be replaced with silicate earth (eg, zeolite) or a mixture of diatomaceous earth ADL2 and siliceous earth, and in any case, this adsorbing layer ADL 'can sufficiently function as a dehumidifying and degassing structure. It is formed with a layer thickness in the range of 0.5 μm to 5 μm required for the above.

次に吸着層ADL´を形成した封止ガラス基板SUB2を充分な真空または加熱脱水処理を行った後、吸着層ADL´を形成した封止ガラス基板SUB2の外周部にスペーサSPを混入させたエポキシ樹脂等のシール材SEAをディスペンサーなどにより塗布し、予め用意されている有機発光素子ELDを形成した透光性ガラス基板SUB1と、吸着層ADLを形成した封止ガラス基板SUB2とを有機発光素子ELDと吸着層ADLとが対向するようにして所定の間隔を有して重ね合わせ、シール材SEAを硬化させて封止し、有機EL表示装置ELDDを完成する。なお、この場合も、硬化処理は、シール材SEAに添加する硬化成分に応じて熱硬化でも良く、紫外線硬化でも良い。   Next, the sealing glass substrate SUB2 on which the adsorption layer ADL ′ is formed is subjected to sufficient vacuum or heat dehydration treatment, and then an epoxy in which the spacer SP is mixed into the outer peripheral portion of the sealing glass substrate SUB2 on which the adsorption layer ADL ′ is formed. A sealing material SEA such as resin is applied with a dispenser or the like, and a light-transmitting glass substrate SUB1 on which an organic light-emitting element ELD is prepared in advance and a sealing glass substrate SUB2 on which an adsorption layer ADL is formed are combined with the organic light-emitting element ELD. And the adsorbing layer ADL are opposed to each other with a predetermined interval, and the sealing material SEA is cured and sealed to complete the organic EL display device ELDD. In this case as well, the curing treatment may be heat curing or ultraviolet curing depending on the curing component added to the sealing material SEA.

これらの封止工程は、空気中の湿度及びガス成分を制御した乾燥窒素などの不活性ガス雰囲気中で行い、有機EL表示装置ELDDの内部空間内に含まれる湿度及びガス成分量を所定値以下に制御している。   These sealing steps are performed in an inert gas atmosphere such as dry nitrogen in which the humidity and gas components in the air are controlled, and the humidity and gas component amounts contained in the internal space of the organic EL display device ELDD are below a predetermined value. Is controlling.

このような方法においても、封止ガラス基板SUB2の内面に一体化させて吸着層ADL´を容易に形成できるので、封止ガラス基板SUB2に除湿材を搭載する凹部の加工費及び除湿材,接着剤などの部品並びにそれらの製造工程などが全く不要となるので、歩留まりが向上するとともに、コストダウンが可能となり、低価格で生産性の高い有機EL表示装置ELDDが実現可能となる。   Even in such a method, since the adsorption layer ADL ′ can be easily formed by being integrated with the inner surface of the sealing glass substrate SUB2, the processing cost and the dehumidifying material, bonding of the recess for mounting the dehumidifying material on the sealing glass substrate SUB2 Since parts such as the agent and the manufacturing process thereof are completely unnecessary, the yield is improved, the cost can be reduced, and the organic EL display device ELDD with low cost and high productivity can be realized.

また、前述した実施例については、有機EL表示装置として空気中の水分やガス成分に敏感な真空を必要としない高分子有機EL表示装置に適用した場合について説明したが、本発明はこれに限定されるものではなく、低分子有機EL表示装置に適用しても前述と同様の効果が得られる。また、冷蔵庫などの保管ケースの内壁に前述した実施例の技術を適用できることは勿論である。   In the above-described embodiment, the case where the organic EL display device is applied to a polymer organic EL display device that does not require a vacuum sensitive to moisture and gas components in the air has been described. However, the present invention is not limited thereto. However, the same effects as described above can be obtained even when applied to a low-molecular organic EL display device. Of course, the techniques of the above-described embodiments can be applied to the inner wall of a storage case such as a refrigerator.

本発明による有機EL表示装置の一実施例による構成を模式的に説明する要部断面図である。It is principal part sectional drawing which illustrates typically the structure by one Example of the organic electroluminescent display apparatus by this invention. 本発明による有機EL表示装置の他の実施例による構成を模式的に説明する要部断面である。It is a principal part cross section which illustrates typically the structure by the other Example of the organic electroluminescent display apparatus by this invention. 有機EL表示素子の一構成例を模式的に説明する断面図である。It is sectional drawing which illustrates typically the example of 1 structure of an organic EL display element. 有機EL表示素子の他の構成例を模式的に説明する断面図である。It is sectional drawing which illustrates the other structural example of an organic electroluminescent display element typically. 従来の有機EL表示装置の構成を示す要部断面図である。It is principal part sectional drawing which shows the structure of the conventional organic electroluminescence display.

符号の説明Explanation of symbols

SUB1・・・透光性ガラス基板、SUB2・・・封止ガラス基板、ELD・・・有機発光素子、SEA・・・シール材、ELDD・・・有機EL表示装置、ADL・・・吸着層、ADL´・・・吸着層、ADL1・・・SiO多孔質層、ADL2・・・珪藻土、ADL3・・・金属アルコキシド薄片積層、SP・・・スペーサ。
SUB1 ... translucent glass substrate, SUB2 ... sealing glass substrate, ELD ... organic light emitting element, SEA ... sealing material, ELDD ... organic EL display device, ADL ... adsorption layer, ADL '... adsorption layer, ADL1 ... SiO porous layer, ADL2 ... diatomaceous earth, ADL3 ... metal alkoxide flake stack, SP ... spacer.

Claims (4)

透光性基板と、
前記透光性基板上に形成された有機発光素子と、
前記透光性基板に間隙を有して対向配置され、かつ前記有機発光素子を気密封止する封止基板と、
前記封止基板の前記有機発光素子と対向する内面に形成された吸着層と、
を備え、
前記吸着層は、SiO多孔質層と前記SiO多孔質層内の隙間に保持固定された珪藻土または珪酸土とからなることを特徴とする有機EL表示装置。
A translucent substrate;
An organic light emitting device formed on the translucent substrate;
A sealing substrate disposed opposite to the light-transmitting substrate with a gap and hermetically sealing the organic light-emitting element;
An adsorption layer formed on the inner surface of the sealing substrate facing the organic light emitting element;
With
The organic EL display device, wherein the adsorption layer is composed of a SiO porous layer and diatomaceous earth or silicate earth held and fixed in a gap in the SiO porous layer.
透光性基板と、
前記透光性基板上に形成された有機発光素子と、
前記透光性基板に間隙を有して対向配置され、かつ前記有機発光素子を気密封止する封止基板と、
前記封止基板の前記有機発光素子と対向する内面に形成された吸着層と、
を備え、
前記吸着層は、金属アルコキシド薄片積層と前記金属アルコキシド薄片積層内の隙間に保持固定された珪藻土または珪酸土とからなることを特徴とする有機EL表示装置。
A translucent substrate;
An organic light emitting device formed on the translucent substrate;
A sealing substrate disposed opposite to the light-transmitting substrate with a gap and hermetically sealing the organic light-emitting element;
An adsorption layer formed on the inner surface of the sealing substrate facing the organic light emitting element;
With
2. The organic EL display device according to claim 1, wherein the adsorption layer is made of a metal alkoxide flake stack and diatomaceous earth or silicate earth held and fixed in a gap in the metal alkoxide flake stack.
透光性基板と、
前記透光性基板上に形成された有機発光素子と、
前記透光性基板に間隙を有して対向配置され、かつ前記有機発光素子を気密封止する封止基板と、
前記封止基板の前記有機発光素子と対向する内面に形成された吸着層と、
を備えた有機EL表示装置の製造方法において、
前記透光性基板上に少なくとも有機材料からなる発光層を有する有機発光素子を形成する工程と、
前記有機発光素子が形成された透光性基板と前記吸着層が形成された封止基板とを前記有機発光素子と前記吸着層とが対向配置するように両基板を気密封止する封止工程と、
を有し、
前記有機発光素子を形成する工程と、前記両基板を気密封止する工程との間に前記封止基板の内面にSiO2を斜方蒸着させてSiO多孔質層を形成し、前記SiO多孔質層内の隙間に珪藻土または珪酸土を分散させて接着させる吸着層形成工程を含むことを特徴とする有機EL表示装置の製造方法。
A translucent substrate;
An organic light emitting device formed on the translucent substrate;
A sealing substrate disposed opposite to the light-transmitting substrate with a gap and hermetically sealing the organic light-emitting element;
An adsorption layer formed on the inner surface of the sealing substrate facing the organic light emitting element;
In a manufacturing method of an organic EL display device comprising:
Forming an organic light emitting element having a light emitting layer made of at least an organic material on the translucent substrate;
A sealing step of hermetically sealing the transparent substrate on which the organic light emitting element is formed and the sealing substrate on which the adsorption layer is formed so that the organic light emitting element and the adsorption layer are disposed to face each other. When,
Have
Between the step of forming the organic light emitting element and the step of hermetically sealing the two substrates, SiO 2 is obliquely deposited on the inner surface of the sealing substrate to form a SiO porous layer, and the SiO porous layer A method for producing an organic EL display device, comprising an adsorption layer forming step of dispersing and adhering diatomaceous earth or silicate earth in a gap in a layer.
透光性基板と、
前記透光性基板上に形成された有機発光素子と、
前記透光性基板に間隙を有して対向配置され、かつ前記有機発光素子を気密封止する封止基板と、
前記封止基板の前記有機発光素子と対向する内面に形成された吸着層と、
を備えた有機EL表示装置の製造方法において、
前記透光性基板上に少なくとも有機材料からなる発光層を有する有機発光素子を形成する工程と、
前記有機発光素子が形成された透光性基板と前記吸着層が形成された封止基板とを当該有機発光素子と吸着層とが対向配置するように両基板を気密封止する封止工程と、
を有し、
前記有機発光素子を形成する工程と、前記両基板を気密封止する工程との間に前記封止基板の内面に金属アルコキシドを塗布し、乾燥させて金属アルコキシド薄片積層を形成し、前記金属アルコキシド薄片積層内の隙間に珪藻土または珪酸土を分散させて接着させる吸着層形成工程を含むことを特徴とする有機EL表示装置の製造方法。
A translucent substrate;
An organic light emitting device formed on the translucent substrate;
A sealing substrate disposed opposite to the light-transmitting substrate with a gap and hermetically sealing the organic light-emitting element;
An adsorption layer formed on the inner surface of the sealing substrate facing the organic light emitting element;
In a manufacturing method of an organic EL display device comprising:
Forming an organic light emitting element having a light emitting layer made of at least an organic material on the translucent substrate;
A sealing step of hermetically sealing the transparent substrate on which the organic light emitting element is formed and the sealing substrate on which the adsorption layer is formed so that the organic light emitting element and the adsorption layer are opposed to each other; ,
Have
Between the step of forming the organic light emitting element and the step of hermetically sealing the two substrates, a metal alkoxide is applied to the inner surface of the sealing substrate and dried to form a metal alkoxide flake stack, and the metal alkoxide A method for producing an organic EL display device, comprising an adsorption layer forming step of dispersing and adhering diatomaceous earth or silicate earth in a gap in a laminar stack.
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JPH09202615A (en) * 1995-11-24 1997-08-05 Noritake Co Ltd Zeolite membrane and its production
JPH10275679A (en) * 1997-03-31 1998-10-13 Toyota Central Res & Dev Lab Inc Organic el element
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Publication number Priority date Publication date Assignee Title
JPS61107902A (en) * 1984-10-30 1986-05-26 Hiroshi Suzuki Composite substance having zeolite, layer-utilized compound or crystal lattice-utilized compound in micropores of porous support and manufacture of composite substance
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