JP2005128181A - Method of manufacturing aspheric optical element - Google Patents

Method of manufacturing aspheric optical element Download PDF

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Publication number
JP2005128181A
JP2005128181A JP2003362489A JP2003362489A JP2005128181A JP 2005128181 A JP2005128181 A JP 2005128181A JP 2003362489 A JP2003362489 A JP 2003362489A JP 2003362489 A JP2003362489 A JP 2003362489A JP 2005128181 A JP2005128181 A JP 2005128181A
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optical element
substrate
aspherical
resin
manufacturing
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Hiroyuki Sasai
浩行 笹井
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Shimadzu Corp
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method capable of manufacturing an aspheric optical element highly accurate as compared to elements of prior arts at a low cost, with respect to the aspheric optical element manufactured by a resin replica method by using a sphere or a flat plane substrate approximate to the aspheric optical element which is to serve as a master die. <P>SOLUTION: In the manufacturing method, a negative die 23 is prepared by the replica method using resin by using an aspheric substrate 3 having a shape in which the ruggedness is inverted with respect to the aspheric optical element which is highly precisely polished and is to serve as the master die 1. By using the method, a variation in the thickness of the resin layer 2 is reduced as compared to the case that the spherical surface is used for the substrate, and the surface precision is hardly deteriorated even when the curing contraction is caused in the resin layer 2. The replica method of adding the resin layer to the surface of the sphere or flat plane substrate by using the negative die 23 which is thus manufactured permits the manufacture of the aspheric optical element highly accurate as compared to the elements of prior arts at a low cost. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は各種計測装置などに用いられる非球面光学素子の製作法に関するものである。   The present invention relates to a manufacturing method of an aspherical optical element used in various measuring devices.

従来、安価に非球面光学素子を製作するには樹脂によるレプリカ法が用いられた。この方法は、まずマスター型となる高精度に研磨加工された非球面光学素子の表面を剥離剤で処理し、ネガ型母材となる球面もしくは平面基板上に付加した樹脂によりマスター型の反転形状を写し取る方法によりネガ型を製作し、その後、このネガ型を用いて再度球面もしくは平面基板上に付加した樹脂上にネガ型の反転形状を写し取ることによりマスター型と同じ形状の非球面光学素子を製作する方法である。
同じく樹脂によるレプリカ法であるが、所望の非球面光学素子の反転形状のネガ型を直接製造し、この反転形状を球面もしくは平面基板上の樹脂に写し取る方法により非球面光学素子を製作する場合もある。
Conventionally, a resin replica method has been used to manufacture an aspherical optical element at low cost. In this method, the surface of the aspherical optical element polished with high accuracy, which becomes the master mold, is first treated with a release agent, and the master mold is inverted by a resin added on the spherical or flat substrate that becomes the negative matrix. A negative type is manufactured by copying the negative type, and then the negative type is used again to copy the inverted shape of the negative type onto the resin added on the spherical surface or the flat substrate. It is a method of manufacturing.
Similarly, it is a resin replica method, but there is also a case where a negative type of a reverse shape of a desired aspheric optical element is directly manufactured, and an aspheric optical element is manufactured by copying the reverse shape onto a resin on a spherical surface or a flat substrate. is there.

また、高精度を得るために製品の基板そのものを粗い非球面にする方法も提唱されている(例えば、特許文献1参照)。
特開昭63−157103号公報
Also, a method of making a product substrate itself a rough aspherical surface in order to obtain high accuracy has been proposed (see, for example, Patent Document 1).
JP 63-157103 A

マスター型となる光学素子の非球面形状と近似の球面もしくは平面基板を用いて樹脂によるレプリカ法により非球面光学素子を製作する場合、型と基板間の形状の差が大きくなると、樹脂の硬化収縮により、製作された非球面光学素子の精度が得難くなる。このとき精度のずれの概算値は、形状の差に硬化収縮率を掛けたものになる。例えば、形状の差が30μmで、硬化収縮率が2%の樹脂を用いた場合、硬化収縮のみで30×2÷100=0.6μmも精度が悪化してしまう。この精度が悪化したものをネガ型として用い、もう一度レプリカ法により反転形状をとるので製品の面精度は一層悪化する。   When an aspherical optical element is manufactured by the resin replica method using a spherical or flat substrate that approximates the aspherical shape of the optical element that becomes the master mold, the resin shrinks when the shape difference between the mold and the substrate increases. This makes it difficult to obtain the accuracy of the manufactured aspherical optical element. At this time, the approximate value of the deviation in accuracy is obtained by multiplying the difference in shape by the curing shrinkage rate. For example, when a resin having a shape difference of 30 μm and a cure shrinkage rate of 2% is used, the accuracy deteriorates by 30 × 2 ÷ 100 = 0.6 μm only by cure shrinkage. Since this negative precision type is used as a negative mold and the inverted shape is taken again by the replica method, the surface accuracy of the product is further deteriorated.

これを解決するために前記特許文献1に記されているように製品の基板そのものを粗い非球面にした場合は、いかに粗い非球面とはいえ平面や球面に比較すると製造工程が複雑化することは避けられず、全ての製品に非球面基板を用いることはコストの面で得策ではない。   In order to solve this problem, when the product substrate itself is made into a rough aspherical surface as described in Patent Document 1, the manufacturing process becomes complicated compared to a flat or spherical surface even though it is a rough aspherical surface. Inevitably, using an aspherical substrate for all products is not a good idea in terms of cost.

本発明は、このような事情に鑑みてなされたものであり、マスター型となる非球面光学素子と近似の球面もしくは平面基板を用いて、安価により高精度な非球面光学素子を製作する方法を提供することを目的とする。   The present invention has been made in view of such circumstances, and a method for manufacturing an aspheric optical element with high accuracy at a low cost by using a master aspheric optical element and an approximate spherical or flat substrate. The purpose is to provide.

上記課題を解決するために、本発明方法では、マスター型となる高精度に研磨加工された非球面光学素子に対して凹凸反転した形状をもつ非球面形状の基板を用いて樹脂によるレプリカ法によりネガ型を作成するようにした。このようにすることで、マスター型と基板との間の樹脂厚さの差が球面を基板に用いた場合よりも少なくなり、樹脂に硬化収縮があっても面精度が悪化しにくくなる。   In order to solve the above problems, in the method of the present invention, a replica method using a resin using an aspherical substrate having a shape that is concave and convex with respect to an aspherical optical element polished with high accuracy to be a master mold. The negative type was made. By doing so, the difference in the resin thickness between the master mold and the substrate becomes smaller than when a spherical surface is used for the substrate, and even if the resin is cured and contracted, the surface accuracy is hardly deteriorated.

上記のように、本発明により製作されるネガ型の基板は非球面形状であって加工コストはやや高くなるが、一度レプリカ法によりネガ型を作成してしまえば何度も繰り返し利用できるために、製品の基板そのものを非球面にした従来法に比べて格段に安く非球面光学素子を製作することができる。
即ち、本発明になる製作法は、より高精度な非球面光学素子を低コストで量産できるという優れた効果を有する。
As described above, the negative type substrate manufactured according to the present invention has an aspherical shape and the processing cost is slightly high. However, once the negative type is created by the replica method, it can be used over and over again. Compared with the conventional method in which the product substrate itself is aspherical, an aspherical optical element can be manufactured at a much lower price.
That is, the manufacturing method according to the present invention has an excellent effect that a more accurate aspherical optical element can be mass-produced at low cost.

以下、本発明の実施の形態を図1及び図2に従って説明する。
図1はマスター型1からネガ型23を製作する過程を示したもので、先ず、マスター型1となる高精度に研磨加工された非球面光学素子表面を剥離剤で処理をしておく。次に、図1Aのように10μm以下の精度で作成した非球面基板3とマスター型1との間に樹脂層2を挟み、熱または光6により樹脂層2を硬化させる。これにより樹脂層2の表面にマスター型1の反転形状が写し取られると共に樹脂層2と非球面基板3とは接合されてネガ型23となる。
樹脂層2が硬化した後に、図1Bのようにマスター型1からネガ型23を分離する。
Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 shows a process of manufacturing a negative mold 23 from a master mold 1. First, the surface of an aspherical optical element that has been polished with high accuracy to be the master mold 1 is treated with a release agent. Next, as shown in FIG. 1A, the resin layer 2 is sandwiched between the aspherical substrate 3 and the master mold 1 that are formed with an accuracy of 10 μm or less, and the resin layer 2 is cured by heat or light 6. As a result, the inverted shape of the master mold 1 is copied onto the surface of the resin layer 2 and the resin layer 2 and the aspherical substrate 3 are joined to form a negative mold 23.
After the resin layer 2 is cured, the negative mold 23 is separated from the master mold 1 as shown in FIG. 1B.

上記において、ネガ型23の母材として用いる非球面基板3の形状のマスター型1の非球面とのずれを10μm以下にすることで実用上十分な精度を得ることができる。ネガ型23の母材をこの程度の精度で加工することは、各種加工機を用いることにより容易に達成できる。   In the above, by setting the deviation of the shape of the aspherical substrate 3 used as the base material of the negative mold 23 from the aspherical surface of the master mold 1 to 10 μm or less, it is possible to obtain practically sufficient accuracy. Processing the base material of the negative mold 23 with such accuracy can be easily achieved by using various processing machines.

図2は、上記により製作されたネガ型23を用いて製品となる非球面光学素子45を製作する過程を示したもので、この過程は基本的に従来と同じである。
即ち、このネガ型23の表面を前記マスター型1の場合と同じように剥離剤で処理をした後、図2Aのように球面もしくは平面基板5とこのネガ型23との間に樹脂層4を挟み、熱または光6により樹脂層4を硬化させる。硬化することにより接合された樹脂層4と球面もしくは平面基板5とが合わさったものが本発明により製作される非球面光学素子45となる。樹脂層4が硬化した後に、図2Bのようにネガ型23から非球面光学素子45を分離する。
このようにして、球面もしくは平面基板5の表面に樹脂層4を付加することにより非球面光学素子45を製作する。
FIG. 2 shows a process of manufacturing an aspherical optical element 45 as a product using the negative mold 23 manufactured as described above, and this process is basically the same as the conventional process.
That is, after the surface of the negative mold 23 is treated with a release agent as in the case of the master mold 1, the resin layer 4 is formed between the spherical or flat substrate 5 and the negative mold 23 as shown in FIG. 2A. The resin layer 4 is cured by sandwiching, heat or light 6. A combination of the cured resin layer 4 and the spherical surface or the flat substrate 5 is an aspherical optical element 45 manufactured according to the present invention. After the resin layer 4 is cured, the aspherical optical element 45 is separated from the negative mold 23 as shown in FIG. 2B.
Thus, the aspherical optical element 45 is manufactured by adding the resin layer 4 to the spherical surface or the surface of the flat substrate 5.

一方の面が回転対称非球面であるガラスレンズの製作法について説明する。
まず、マスター型となる高精度に研磨加工された非球面レンズを用意する。このレンズの非球面側の面にUV硬化樹脂との剥離性をもつ物質をディップ法や蒸着法などにより積層する。この時表面を保護するために剥離層とマスターとの間に保護層を設けてもよい。
次に、NC旋盤によりマスター型の非球面と凹凸が反転した形状の非球面基板を製作する。この時非球面基板の表面形状は、マスター型の非球面との形状のずれを10μm以下に仕上げるが、必ずしも鏡面に仕上がっている必要はない。
非球面基板表面にUV硬化樹脂を滴下し、マスター型で挟み込み、UV光を照射して樹脂を硬化させ、その後、マスター型と非球面基板を分離する。非球面基板表面はUV硬化樹脂により、マスター型の表面が面粗さも含めて反転転写される。この非球面基板全体をネガ型として使用するので、その表面にマスター型と同様に剥離層を設ける。
別途、一般的な研磨法により非球面と近似の球面にしてあるガラス基板を製作しておき、ネガ型表面に滴下したUV硬化樹脂をこの球面ガラス基板で挟み込み、UV光を照射し樹脂を硬化させる。その後、樹脂層が接合された球面ガラス基板からネガ型を分離すればマスター型と同形の非球面レンズが得られる。
両面が非球面の場合は、同様の工程を両面に対して行うことで対応できる。
A method for manufacturing a glass lens in which one surface is a rotationally symmetric aspheric surface will be described.
First, an aspheric lens that is polished with high accuracy to be a master mold is prepared. A substance having releasability from the UV curable resin is laminated on the aspherical surface of the lens by dipping or vapor deposition. At this time, a protective layer may be provided between the release layer and the master in order to protect the surface.
Next, a master-type aspherical surface and an aspherical substrate having a shape in which the irregularities are reversed are manufactured by an NC lathe. At this time, the surface shape of the aspherical substrate is finished to a deviation of 10 μm or less from the master type aspherical surface, but it is not necessarily finished to a mirror surface.
A UV curable resin is dropped on the surface of the aspherical substrate, sandwiched by a master mold, and irradiated with UV light to cure the resin, and then the master mold and the aspherical substrate are separated. The surface of the aspherical substrate is reversely transferred to the surface of the master mold including the surface roughness by UV curable resin. Since the entire aspherical substrate is used as a negative type, a release layer is provided on the surface in the same manner as the master type.
Separately, a glass substrate having a spherical surface approximate to an aspherical surface is manufactured by a general polishing method, and the UV curable resin dropped on the negative surface is sandwiched between the spherical glass substrates, and the resin is cured by irradiating UV light. Let Thereafter, if the negative mold is separated from the spherical glass substrate to which the resin layer is bonded, an aspherical lens having the same shape as the master mold can be obtained.
When both surfaces are aspherical surfaces, the same process can be performed on both surfaces.

次に軸外楕円面鏡の製作法について説明する。
マスター型となる高精度に研磨加工された軸外楕円面鏡を用意し、マスター型の表面に金を蒸着し剥離層とする。次に、NC研削機によりマスター型の軸外楕円面と凹凸が反転した形状の軸外楕円面基板を製作する。
軸外楕円面基板表面に熱硬化樹脂を滴下し、マスター型の軸外楕円面で挟み込み加熱し、樹脂を硬化させる。その後、マスター型と軸外楕円面基板を分離する。軸外楕円面基板表面は熱硬化樹脂により、マスター型の表面が面粗さも含めて反転転写される。この軸外楕円面基板全体をネガ型として使用するため、その表面に金を蒸著し剥離層を設けておく。
続いて、軸外楕円面鏡の基板となる金属材料を機械加工により軸外楕円面と近似の球面形状にしておく。
ネガ型表面に熱硬化樹脂を滴下し、上記球面金属基板で挟み込み加熱し、樹脂を硬化させる。その後、ネガ型と球面金属基板を分離する。分離後の球面金属基板表面の熱硬化樹脂上にアルミや金を蒸着することにより、軸外楕円面鏡を製作する。
Next, a method for manufacturing an off-axis elliptical mirror will be described.
An off-axis ellipsoidal mirror polished with high accuracy to be a master mold is prepared, and gold is deposited on the surface of the master mold to form a release layer. Next, an off-axis elliptical substrate having an inverted shape of the master-type off-axis elliptical surface and the irregularity is manufactured by an NC grinder.
A thermosetting resin is dropped on the surface of the off-axis elliptical substrate, and is sandwiched and heated by the master type off-axis elliptical surface to cure the resin. Thereafter, the master mold and the off-axis elliptical substrate are separated. The surface of the off-axis elliptical substrate is reversely transferred to the surface of the master mold including the surface roughness by a thermosetting resin. In order to use the entire off-axis elliptical substrate as a negative type, gold is evaporated on the surface and a release layer is provided.
Subsequently, the metal material that becomes the substrate of the off-axis ellipsoidal mirror is made into a spherical shape approximate to the off-axis ellipsoid by machining.
A thermosetting resin is dropped on the negative surface, sandwiched between the spherical metal substrates and heated to cure the resin. Thereafter, the negative type and the spherical metal substrate are separated. An off-axis ellipsoidal mirror is manufactured by evaporating aluminum or gold on the thermosetting resin on the surface of the spherical metal substrate after separation.

本発明の非球面光学素子の製作法は、上述の実施例にのみ限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加えることにより広範囲の利用可能性がある。   The manufacturing method of the aspherical optical element of the present invention is not limited to the above-described embodiments, and can be used in a wide range by adding various modifications without departing from the gist of the present invention.

本発明において非球面マスター型からネガ型を製作する過程を示す断面図。Sectional drawing which shows the process in which a negative type | mold is manufactured from an aspherical master type | mold in this invention. 本発明においてネガ型から製品となる非球面光学素子を製作する過程を示す断面図。Sectional drawing which shows the process in which the aspherical optical element used as a product is manufactured from a negative type in this invention.

符号の説明Explanation of symbols

1 マスター型
2 樹脂層
3 非球面基板
4 樹脂層
5 球面もしくは平面基板
6 熱または光
23 ネガ型
45 非球面光学素子
DESCRIPTION OF SYMBOLS 1 Master type | mold 2 Resin layer 3 Aspherical board | substrate 4 Resin layer 5 Spherical surface or planar board | substrate 6 Heat or light 23 Negative type 45 Aspherical optical element

Claims (2)

少なくとも1面が球面もしくは平面である基板表面に樹脂層を付加してレプリカ法により非球面光学素子を製作する製作法であって、マスター型となる研磨加工された非球面光学素子に対して凹凸反転した形状をもつ非球面基板をネガ型母材として用いて樹脂によるレプリカ法によりネガ型を作成し、このネガ型を用いて樹脂によるレプリカ法により非球面光学素子を製作する製作法。 A manufacturing method in which an aspherical optical element is manufactured by a replica method by adding a resin layer to a substrate surface having at least one surface that is spherical or flat, and is uneven with respect to a polished aspherical optical element that becomes a master mold A manufacturing method in which an aspherical substrate having an inverted shape is used as a negative base material to create a negative mold by a resin replica method, and an aspheric optical element is manufactured by using this negative mold by a resin replica method. マスター型となる非球面との形状のずれを10μm以下にした非球面基板を前記ネガ型母材として用いる請求項1に記載の非球面光学素子の製作法。 2. The method of manufacturing an aspherical optical element according to claim 1, wherein an aspherical substrate having a shape deviation of 10 [mu] m or less from the master type aspherical surface is used as the negative base material.
JP2003362489A 2003-10-22 2003-10-22 Method of manufacturing aspheric optical element Pending JP2005128181A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100422786C (en) * 2006-12-01 2008-10-01 苏州大学 Manufacturing method of aspheric optical element
JP2009126036A (en) * 2007-11-22 2009-06-11 Alps Electric Co Ltd Manufacturing process of lens substrate
JP2011232677A (en) * 2010-04-30 2011-11-17 Shimadzu Corp Replica aspherical optical element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100422786C (en) * 2006-12-01 2008-10-01 苏州大学 Manufacturing method of aspheric optical element
JP2009126036A (en) * 2007-11-22 2009-06-11 Alps Electric Co Ltd Manufacturing process of lens substrate
JP2011232677A (en) * 2010-04-30 2011-11-17 Shimadzu Corp Replica aspherical optical element

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