JP2005123300A - Laser medium blower, laser oscillator and laser beam machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser medium blower, a laser oscillator and a laser beam machine capable of effectively cooling oil itself. <P>SOLUTION: The laser oscillator is provided with an air blasting means circulating a laser medium, a first circulation path in which a laser medium is circulated, oil which cools and lubricates the air blasting means and an oil reservoir. In the laser oscillator, a second circulation path which circulates oil is connected to the oil reservoir, and the laser medium blower with a cooling means mounted thereto and a power supply section for discharging and exciting the laser medium are fitted to the second circulation path. In the laser oscillator, a laser oscillating means oscillating and outputting laser beams by supplying the laser medium with energy from the power supply section is provided. In the laser beam machine, the laser oscillator and a condensing means condensing laser beams to a workpiece is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a laser medium blower, a laser oscillation device, and a laser processing machine.

  In recent years, gas laser oscillators and gas laser processing machines have been applied to a wide range of processing, such as cutting, welding / welding, and scribing, from metal materials, resins, and non-metal materials such as wood because of the good quality of the laser beam. It is coming. Compared with gas cutting, plasma cutting, metal cutting, die cutting, etc., gas laser processing has many advantages such as high accuracy, high quality, and low cost due to the need for a die. It is being introduced to the world.

  Under such circumstances, there has been a craving for higher speed machining and an increase in the types of work that can be applied, and in order to achieve this, an increase in the output of the gas laser oscillation device has been desired.

  A conventional laser oscillation device includes a laser medium blower in order to increase the output, and an increase in the air volume of the laser medium blower realizes an increase in laser output (for example, Patent Documents). 1 and 2).

  As the laser medium blower, a device having a rotating body using a motor such as a turbo blower or a roots blower is usually used. However, in order to increase the air volume, it is necessary to increase the rotational speed of the motor. When the rotational speed increases, as shown in Patent Document 1, heat is generated due to iron loss caused by the rotating magnetic field of the motor. When the rotator generates heat, the rotator itself and surrounding components rise in temperature, and damage such as seizure and breakage occurs. In order to prevent these damages, oil is usually used as shown in Patent Document 1. It was cooled by.

  Further, when the cooling oil itself becomes high temperature, the cooling capacity is lowered, and it is difficult to increase the number of rotations of the rotating body. For this reason, as shown in Patent Document 2, in order to efficiently cool the cooling oil, it is common to provide a cooling water channel near the oil reservoir.

  FIG. 14 shows a conventional laser medium blower, 121 is a blower, 101 is an impeller, 102 is a shaft, 103 is a rotor, 104 is a stator, 105 and 106 are bearings, 107 is a housing, 108 is an oil reservoir, 109 Is an oil passage, 110 is a cooling water channel, 111 is a laser medium sucked into the blower 121, and 112 is a laser medium discharged from the blower 121.

The operation of the laser medium blower configured as described above will be described.
A rotor 103 is fixed to the outer periphery of the shaft 102, and a stator 104 is provided on the outer side of the rotor 103. The stator 104 is fixed to the housing 107, and is adjusted so as to have a minute gap between the stator 104 and the rotor 103, and a motor is constituted by both of them.

  A high frequency inverter is connected to the stator 104, and the rotor 103 rotates at a high speed of tens of thousands of RPM by the power supplied from the high frequency inverter. Since the rotor 103 is connected to the impeller 101 via the shaft 102, the impeller 101 also rotates at tens of thousands of RPM. The shaft 102 is supported at its upper and lower portions by bearings 105 and 106, respectively.

  As the impeller 101 rotates, the laser medium 112 is discharged in the lateral direction shown in FIG. 14, exits from the blower 121, and further the laser medium 111 at the upper part of the impeller is sucked into the blower 121.

  Since the shaft 102 rotates at high speed in this way, heat is generated in the bearings 105 and 106 that support the shaft 102. Further, in the motor unit composed of the rotor 103 and the stator 104, heat was also generated due to iron loss due to a rotating magnetic field. When the temperature of these parts rises due to heat generation, it causes damage such as seizure and breakage. Therefore, it is necessary to cool them. Therefore, the oil for cooling the oil reservoir 108 is sucked up through the oil passage 109 in the shaft 102 and is discharged from the upper part of the shaft 102, thereby cooling the bearings 105 and 106, the rotor 103 and the stator 104.

And since cooling capability will fall if cooling oil itself becomes high temperature, it has set it as the structure which provided the cooling water channel 110 in the oil reservoir 108 vicinity, and suppressed the temperature rise of cooling oil.
JP-A-7-219661 JP-A-7-221964

  However, the conventional laser medium blower has a problem that the efficiency of the method for suppressing the temperature rise of the cooling oil is poor.

  The conventional laser medium blower shown in FIG. 14 employs a configuration in which a cooling water channel 110 is provided in the vicinity of the oil reservoir 108 in order to prevent the temperature of the cooling oil from rising. In the case of this configuration, it is impossible to cool the entire oil reservoir 108, and only the cooling oil remaining in the portion close to the cooling water channel 110 can be cooled. In addition, the cooling oil existing in the oil reservoir 108 is not agitated, and the conventional cooling method is inefficient because the temperature distribution is uneven.

  As described in the background art, the laser medium blower is used in a gas laser oscillation device. The gas laser oscillation device is requested by the market to increase its output in order to broaden its convenience and applications. To increase the output, the air volume of the laser medium sent from the laser medium blower can be increased. It was essential.

  In general, in the case of a carbon dioxide laser, about 20% of the electric energy injected into the laser medium is converted into laser light, and the remaining energy is consumed as the temperature of the gas serving as the medium increases.

  For this reason, in order to obtain a laser beam with a higher output, it is only necessary to increase the electric energy to be injected. In order to emit laser light, laser oscillation is required, but in order to perform laser oscillation, the laser medium must be in an inversion distribution state. However, when the temperature of the laser medium exceeds about 500 K (Kelvin), the inversion distribution state collapses, and laser oscillation cannot be performed. In order to prevent this, the laser medium is forcibly circulated in the apparatus by the blower 121, and the laser medium is cooled by passing through a heat exchanger disposed in the middle.

In addition, since the temperature rise of the laser medium can be suppressed by increasing the passage speed of the laser medium in the discharge space into which the electric energy is injected, it is possible to increase the output of the laser. Furthermore, by increasing the laser medium passage speed in the discharge space, it is possible to increase the molecular weight of the laser medium component that passes per unit time. Increasing the air volume of the medium was an effective means for increasing the laser output.

  However, if the air volume of the laser medium blower is to be increased, the rotational speed of the impeller 101 must be increased. Then, heat generation in the blower 121 increases, and the bearings 105 and 106, the rotor 103, the stator 104, and the like are configured. There was a problem that parts were damaged. In order to solve this, conventionally, the cooling oil was used to cool these components, and the cooling oil itself was also cooled by the cooling water channel 110. However, the efficiency is poor and the temperature of the cooling oil can be sufficiently reduced. It was difficult to increase the rotational speed of the impeller more. For this reason, the air volume of the laser medium blower cannot be increased, and as a result, it is difficult to increase the output of the gas laser oscillator more than before.

  The present invention has been made in view of such a point, and an object thereof is to provide a laser medium blower, a laser oscillation device, and a laser processing machine that can cool cooling oil itself more effectively.

  In order to achieve the above object, a laser medium blower of the present invention includes a blower for circulating a laser medium, a first circulation path for circulating the laser medium, an oil for cooling and lubricating the blower, and an oil The oil reservoir is connected to a second circulation path for circulating the oil, and cooling means is provided in the second circulation path.

  With this configuration, the cooling oil is forcibly passed through the heat exchanger by the oil circulation device, and the temperature of the cooling oil can be lowered efficiently.

The laser oscillation device of the present invention includes the laser medium blower described above and a power supply unit for discharging and exciting the laser medium, and oscillates laser light by supplying energy from the power supply unit to the laser medium. And laser oscillation means for outputting.

  With this configuration, it is possible to increase the output of the laser without increasing the size and cost.

  A laser processing machine according to the present invention includes the above-described laser oscillation device and a condensing unit that condenses the laser light onto a workpiece.

  With this configuration, since the output of the laser can be increased, a wider variety of workpieces can be processed with the same size and cost as the conventional one.

  As described above, the present invention can increase the cooling capacity of the bearings 105 and 106, the rotor 103, and the stator 104 constituting the laser medium blower by the cooling oil by efficiently lowering the temperature of the cooling oil. Since the impeller 101 can be rotated at a higher speed than before, it is possible to increase the air volume of the laser medium and increase the output of the gas laser oscillation device.

  Hereinafter, Embodiment 1 of the present invention will be described with reference to FIG.

(Embodiment 1)
FIG. 1 shows a laser medium blower according to Embodiment 1 of the present invention, wherein 1 is an impeller, 2 is a shaft, 3 is a rotor, 4 is a stator, 5 and 6 are bearings, 7 is a housing, and 8 is an oil reservoir. , 9 is an oil passage, 10 is a cooling water passage, 11 is a laser medium sucked into the blower, 12 is a laser medium discharged from the blower, 13 is an oil pipe connected to the oil reservoir 8, and 14 is an oil circulation. Reference numeral 15 denotes an oil cooling device.

The operation of the laser medium blower configured as described above will be described.
A rotor 3 is fixed to the outer periphery of the shaft 2, and a stator 4 is provided on the outer side of the rotor 3. The stator 4 is fixed to the housing 7, and is adjusted so as to have a minute gap between the stator 4 and the rotor 3, and a motor is constituted by both of them.

  A high frequency inverter is connected to the stator 4, and the rotor 3 rotates at a high speed of several tens of thousands of RPM by the power supplied from the high frequency inverter. Since the rotor 3 is connected to the impeller 1 via the shaft 2, the impeller 1 also rotates at tens of thousands of RPM. The shaft 2 is supported at its upper and lower portions by bearings 5 and 6, respectively.

  By rotating the impeller 1, the laser medium 12 is discharged in the lateral direction in FIG. 1, goes out from the blower, and the laser medium 11 at the upper part of the impeller is sucked into the blower.

  Since the shaft 2 rotates at a high speed in this way, heat is generated in the bearings 5 and 6 that support it. Moreover, in the motor part comprised by the rotor 3 and the stator 4, there also exists heat_generation | fever by iron loss etc. by a rotating magnetic field. When the temperature of these parts rises due to heat generation, it causes damage such as seizure and breakage. Therefore, it is necessary to cool them. Therefore, the oil for cooling the oil reservoir 8 is sucked up through the oil passage 9 in the shaft 2 and discharged from the upper part of the shaft 2, thereby cooling the bearings 5 and 6, the rotor 3 and the stator 4. Since the cooling capacity decreases when the cooling oil itself becomes high temperature, the cooling water passage 10 is provided in the vicinity of the oil reservoir 8 to suppress the temperature rise of the cooling oil.

  In the present invention, the oil pipe 13 is connected to the oil reservoir 8, and the oil for cooling the oil reservoir 8 passes through the oil circulation device 14 and the oil heat exchanger 15 through the oil pipe 13. As described above, according to the embodiment of the present invention, the oil present in the oil reservoir 8 is forcibly passed through the oil heat exchanger 15, so that the oil temperature can be efficiently reduced.

(Embodiment 2)
Hereinafter, Embodiment 2 of the present invention will be described with reference to FIG.

  Since reference numerals 1 to 15 in the figure are the same as those in the first embodiment, description thereof is omitted.

In the first embodiment, the pressure inside the laser medium blower is normally in a vacuum state of about 50 to 200 Torr. This is because, in a gas laser oscillation device, in order to emit laser light, electric energy is injected into the laser medium and the laser medium is discharged. However, in order to stabilize the discharge, it is necessary to lower the pressure in the discharge space. Therefore, the cooling oil circulation path composed of the oil pipe 13, the oil circulation device 14, and the oil heat exchanger 15 connected to the oil reservoir 8 of the laser medium blower is necessary to maintain a vacuum state. It has a high degree of sealing. As an example, it is conceivable to use an O-ring 16 at the connecting portion of the oil pipe 13, the oil circulation device 14, and the oil heat exchanger 15.

(Embodiment 3)
Hereinafter, Embodiment 3 of the present invention will be described with reference to FIG.

  FIG. 3 is a detailed view of the oil circulation device 14 according to the first embodiment. 17 is a drive unit, 18 is a pump unit, 19 is an oil path in the oil circulation device 14, 20 is a housing of the oil circulation device 14, 21 is cooling oil that flows into the oil circulation device 14, 22 is cooling oil that flows out, Reference numeral 23 denotes a drive shaft that connects the pump portion 18 and the drive portion 17, and 24 denotes a seal portion between the drive shaft and the oil path 19.

  The cooling oil 21 that has flowed in through the oil pipe 13 enters the oil path 19. At this time, the pump unit 18 is connected to the drive unit 17 via the drive shaft 23, and the cooling oil 22 flows out as the pump unit 18 rotates. At this time, since the inside of the oil path 19 of the cooling oil 21 is in a vacuum state as described in the second embodiment, the seal portion 24 is required between the drive portion 17 and the oil passage 19. As the material of the seal portion 24, a resin material such as an O-ring or Teflon (registered trademark) is generally used.

  In the above description, the seal portion 24 is provided in the middle of the drive shaft 23, but the drive portion 17 is installed in a sealed space having the same pressure as the oil path 19, A seal portion may be provided in a drawing port portion such as a signal line to maintain a vacuum state.

(Embodiment 4)
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIG.

  FIG. 4 shows another detailed view of the oil circulation device 14 of the first embodiment. Reference numeral 25 denotes a rotating magnet connected to the pump unit 18, 26 denotes a driving magnet connected to the driving unit 17, 27 denotes a room in which the rotating magnet 25 is accommodated, and 28 denotes a rotating shaft connecting the rotating magnet 25 and the pump unit 18. , 29 indicate bearings that support the rotating shaft.

  As described in the second embodiment, since the oil path 19 is in a vacuum state, the pump unit 18 and the drive unit 17 in the oil circulation device 14 are not contacted by using a magnet in order to maintain the vacuum. It is also possible to do. The driving magnet 17 is rotated by the driving unit 17, and the rotating magnet 25 in a vacuum state without contact is rotated. The rotating magnet 25 rotates the pump unit 18 via the rotating shaft 28 to circulate cooling oil.

(Embodiment 5)
Hereinafter, a fifth embodiment of the present invention will be described with reference to FIG.

  FIG. 5 shows a first detailed view of the oil heat exchanger 15 of the first embodiment. 13 is an oil pipe, 15 is a heat exchanger body, 30 is inflow into the heat exchanger 15, 31 is refrigerant flowing out of the heat exchanger 15, 32 is a refrigerant passage inside the heat exchanger 15, and 33 is inside the heat exchanger 15. The oil passage is shown.

  The oil passage 33 and the refrigerant passage 32 are respectively connected so as to be close to each other, and absorb the temperature of the cooling oil by the refrigerant through the partition wall of the heat exchanger body 15. Therefore, the material of the heat exchanger body needs to be excellent in thermal conductivity.

If the type of refrigerant is oil, cheap aluminum can be used as the material, but using water as the refrigerant is usually advantageous in terms of total cost and maintainability, but in that case the material is aluminum. Then, it will corrode with water. Therefore, when water is used as the refrigerant, copper is used as a material that achieves both corrosion resistance and thermal conductivity.

(Embodiment 6)
Hereinafter, Embodiment 6 of the present invention will be described with reference to FIG.

  FIG. 6 shows a second detailed view of the oil heat exchanger 15 of the first embodiment. As in the fifth embodiment, the oil passage 33 is piped inside the heat exchanger 15, but here, a plurality of pipes are connected in parallel. As a result, the pipe resistance of the oil passage 33 can be reduced, the oil flow rate can be increased, and a larger amount of oil can be cooled, so that the heat exchange capability can be improved.

(Embodiment 7)
Hereinafter, Embodiment 7 of the present invention will be described with reference to FIG.

  FIG. 7 shows a third detailed view of the oil heat exchanger 15 of the first embodiment. Reference numeral 34 denotes an uneven projection provided on the surface of the oil passage 33 in the heat exchanger 15. The heat exchange capacity between the cooling oil and the refrigerant is proportional to the contact area of the oil with the wall surface of the oil passage 33. Therefore, by providing the uneven projection 34, the contact area can be increased and the heat exchange capability can be improved. The concavo-convex protrusion 34 can be manufactured by mechanical cutting, but can also be manufactured by processing such as shot blasting for easier manufacturing.

(Embodiment 8)
Hereinafter, an eighth embodiment of the present invention will be described with reference to FIGS.

  FIG. 8 shows a fourth detailed view of the oil heat exchanger 15 of the first embodiment. 33 is an oil passage, and 35 is a groove provided on the surface of the oil passage. As in the seventh embodiment, it is necessary to increase the contact area between the oil and the wall surface of the oil passage 33 in order to improve the heat exchange capability. For this purpose, a groove 35 is provided in the oil passage 33. FIG. 9 is a cross-sectional view thereof, and in the eighth embodiment, a groove 35 is provided in the oil traveling direction. Although a groove can be provided in a direction perpendicular to the oil traveling direction, since oil may accumulate in the groove, the direction of the groove is preferably the oil traveling direction.

(Embodiment 9)
The following describes Embodiment 9 of the present invention with reference to FIG.

  FIG. 9 shows a fifth detailed view of the oil heat exchanger 15 of the first embodiment. 33 is an oil passage, and 36 is a protrusion provided in the oil passage 33. Although the uneven protrusion 34 in the seventh embodiment is intended to increase the contact area between the oil and the oil passage 33, the protrusion 36 turbulently flows the oil flowing through the oil passage 33. It is aimed.

  Normally, fluid such as oil is laminar at a flow velocity below a threshold determined by the Reynolds number, so that only oil flowing in the vicinity of the wall surface of the oil passage 33 is cooled, and cooling efficiency Is bad. Therefore, a projection 36 is provided in the oil passage 33 in order to make the oil flow turbulent. When oil flows in the vicinity of the protrusion 36, a vortex is generated in the flow, whereby turbulence can be promoted and cooling efficiency can be improved.

(Embodiment 10)
Hereinafter, a tenth embodiment of the present invention will be described with reference to FIG.

  FIG. 10 shows a sixth detailed view of the oil heat exchanger 15 of the first embodiment. 33 is an oil passage, 37 is a sphere disposed in the oil passage 33, 38 is cooling oil turbulent by the sphere 33 and flows in the oil passage 33, and 39 is a sphere 37 that flows out of the oil heat exchanger 15. It shows the flow stop that is trying not to.

  As in the ninth embodiment, it is necessary to make the cooling oil flow turbulent in order to improve the cooling efficiency, and a sphere 33 is arranged in the oil passage 33 as a means for realizing it. The cooling oil 38 flowing in the vicinity of the sphere 33 can be turbulent by the sphere 33.

(Embodiment 11)
Hereinafter, an eleventh embodiment of the present invention will be described with reference to FIG.
Reference numeral 13 denotes an oil pipe, 14 denotes an oil circulation device, 15 denotes an oil cooling device, and the like, except for the reference numeral 40, is the same as in the first embodiment, and a description thereof will be omitted. A filter 40 removes impurities mixed in the cooling oil.

  According to the configuration of the first embodiment, it is possible to forcibly circulate the cooling oil in the laser medium blower 40. By arranging the filter 41 in the middle of the circulation path, dust contained in the oil Impurities such as can be removed with high accuracy.

  Conventionally, there has been an example in which a groove or the like for removing the impurity is provided in the oil reservoir 8 inside the laser medium blower main body, but in that case, the efficiency is poor because it can be removed only when the impurity comes near the groove. In addition, when impurities accumulate in the groove, there is also a problem that the part becomes a source of impurities, and in order to prevent it, the laser medium blower body must be replaced, maintenance performance, Work efficiency was bad.

  In the eleventh embodiment, since the filter 40 for removing impurities is provided on the oil circulation path, it is only necessary to periodically replace this filter 40, and the cost and time for replacing the waste laser medium blower body are wasted. Can be suppressed.

  As the structure of these filters, it is possible to use a metal mesh made of a metal material such as stainless steel, but there is another method in which impurities are collected in a pocket by centrifugation or the like.

(Embodiment 12)
Hereinafter, Embodiment 12 of the present invention will be described with reference to FIG.

  FIG. 13 shows the configuration of the gas laser oscillation device. In FIG. 13, 51 is a blower, 52 is a discharge tube, and 53 and 54 are electrodes installed in the vicinity of the discharge tube 52. 55 is a high voltage power source connected to the electrodes 53 and 54, and 56 is a discharge space. 57 is a total reflection mirror, 58 is a partial transmission mirror, 59 is a heat exchanger, 60 is a laser beam extracted from the partial transmission mirror 58, 61 is a laser gas pipe, 62 is a laser gas, 63 is a vacuum pump, 64 is a laser gas cylinder, 65 Is a flow regulator.

The operation of the gas laser oscillation apparatus configured as described above will be described. The laser gas piping 61 is passed by the blower 51 to forcibly circulate the laser gas 62 in the discharge tube 52. The electrodes 53 and 54 are installed inside the laser gas circulation system in the vicinity of the discharge tube 52. At this time, a high voltage is applied to the discharge space 56 from the electrodes 53 and 54 connected to the high voltage power supply 55, so Generate a discharge. Since the laser gas 62 is compressed and discharged from the blower 51 and has a high temperature, the laser gas 62 is cooled by a heat exchanger 59 disposed on the downstream side of the blower 51. The laser gas 62 after passing through the discharge space 56 is similarly cooled because the discharge energy is applied and the temperature becomes high.

  The laser gas 62 excited by the glow discharge oscillates and is amplified while the laser beam reciprocates between the total reflection mirror 57 and the partial reflection mirror 58 and enters a resonance state. From this resonance state, a part of the laser beam between the total reflection mirror 57 and the partial transmission mirror 58 is extracted from the partial transmission mirror 58 to the outside of the resonator as a laser beam 60, and this laser beam 60 is used for processing such as metal cutting and welding. Used.

  A part of the laser gas 62 is taken out by the vacuum pump 63 to the outside of the laser oscillator and discarded. A new laser gas having the same amount as the discarded laser gas is supplied from the cylinder 64 to the inside of the laser oscillation device through the flow rate regulator 65 to keep the internal pressure constant. The internal pressure of the laser oscillation device is controlled so that the laser gas 62 has a constant pressure in the discharge space 66 in order to stabilize the glow discharge of the discharge tube 52.

  In the gas laser oscillation device having such a configuration, it is indispensable to increase the output of the laser beam 60 in order to expand the application range to other uses. One of the most effective methods for increasing the output is to increase the air volume of the blower 51. For this purpose, the rotational speed of the blower 51 is increased or the size and capacity of the blower 51 itself are increased. Or a plurality of blowers 51 are provided. Increasing the size of the blower 51 or providing a plurality of units leads to an increase in size and cost of the gas laser oscillation device itself, and there are many practical problems.

  In the twelfth embodiment of the present invention, the cooling oil cooling efficiency of the blower 51 can be increased to increase the upper limit value of the rotational speed, and the laser beam 60 can be obtained without increasing the size and cost of the gas laser oscillation device. Can achieve higher output.

  Similarly, a laser processing machine equipped with the gas laser oscillation device can increase the output of the laser, so that a wider variety of workpieces can be processed with the same size and cost as the conventional one.

  The laser medium blower of the present invention can improve the oil cooling capacity and efficiently cool the components of the blower. Therefore, the rotation speed of the blower can be increased, the air volume can be increased, and the laser output can be increased. This is useful for processing such as cutting of thick workpieces and cutting of high reflectivity workpieces, which are difficult to process with this laser output.

Configuration diagram of laser medium blower in Embodiment 1 of the present invention Configuration diagram of another laser medium blower in the second embodiment Detailed configuration diagram of oil circulation device in embodiment 3 Detailed configuration diagram of another first oil circulation device in the fourth embodiment Detailed configuration diagram of first oil heat exchanger in the fifth embodiment Detailed configuration diagram of second oil heat exchanger in the sixth embodiment Detailed configuration diagram of third oil heat exchanger according to Embodiment 7 Detailed configuration diagram of fourth oil heat exchanger in the eighth embodiment Sectional drawing in Embodiment 8 Detailed block diagram of the fifth oil heat exchanger in the ninth embodiment Detailed configuration diagram of sixth oil heat exchanger in the tenth embodiment Configuration diagram of another laser medium blower in Embodiment 11 Configuration diagram of gas laser oscillation device in Embodiment 12 Configuration diagram of conventional laser medium blower

Explanation of symbols

1 impeller 2 shaft 3 rotor 4 stator 5 bearing 6 bearing 7 housing 8 oil reservoir 9, 33 oil passage 10 cooling water passage 11 suction side laser medium 12 discharge side laser medium 13 oil piping 14 oil circulation device 15 oil cooling device 16 O Ring 17 Drive portion 18 Pump portion 19 Oil path 21 Inflow side cooling oil 22 Outflow side cooling oil 23 Drive shaft 24 Seal portion 25 Rotating magnet 26 Drive magnet 30 Inflow refrigerant 31 Outflow refrigerant 32 Refrigerant passage 34 Concave protrusion 35 Groove 36 Protrusion 37 Ball 38 Cooling oil flow 39 Flow stop 40 Filter 51 Blower 52 Discharge tube 53, 54 Electrode 55 High voltage power supply 56 Discharge space 57 Total reflection mirror 58 Partial transmission mirror 59 Heat exchanger 60 Laser beam 61 Laser gas pipe 62 Laser gas 63 Vacuum pump 64 Laser Gas cylinder 65 Flow regulator

Claims (15)

Blower means for circulating the laser medium, a first circulation path through which the laser medium circulates, oil for cooling and lubricating the blower means, and an oil reservoir, wherein the oil reservoir circulates the oil. The laser medium blower is connected to the second circulation path, and the second circulation path is provided with cooling means. The laser medium blower according to claim 1, wherein the cooling means is a heat exchanger. The laser medium blower according to claim 1 or 2, wherein the second circulation path is in a sealed vacuum state. The pump part for circulating oil and a power part for driving the pump part are arranged in the second circulation path, and the pump part and the power part are not in contact with each other. Laser medium blower. The laser medium blower according to claim 4, wherein the pump unit and the power unit are not in contact with each other by a magnet pump using magnetic force. The laser medium blower according to any one of claims 2 to 5, wherein the heat exchanger is made of copper or a copper alloy. The laser medium blower according to claim 2, wherein the heat exchanger has an oil passage provided therein and at least two or more passages in parallel. The laser medium blower according to claim 2, wherein the heat exchanger has an uneven projection on an oil passage wall surface provided in the heat exchanger. The laser medium blower according to claim 2, wherein the heat exchanger has a groove in an oil passage wall surface provided in the heat exchanger. The laser medium blower according to claim 2, wherein the heat exchanger has means for turbulently flowing the oil in an oil passage provided therein. The laser medium blower according to claim 10, wherein the turbulent flow means is a spherical member. 3. The laser medium blower according to claim 1, further comprising a filter that removes foreign matters contained in the oil. The laser medium blower according to claim 12, wherein the filter has a mesh shape. A laser medium blower according to any one of claims 1 to 13, and a power supply unit for discharging and exciting the laser medium, wherein energy is supplied from the power supply unit to the laser medium to oscillate laser light. A laser oscillation device having laser oscillation means for outputting. A laser processing machine comprising: the laser oscillation device according to claim 14; and a condensing unit that condenses the laser light onto a workpiece.

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