JP2005111329A - Washing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing apparatus capable of altering the distance of a solvent jet nozzle and the surface of an article to be washed corresponding to a change in plate thickness. <P>SOLUTION: In the washing apparatus constituted so that at least two solvent jet nozzles are supported by a support member and moved to the surface of the article to be washed at the time of washing but allowed to retreat from the article to be washed at the time of non-washing, at least one of the solvent jet nozzles can be moved in the direction vertical to the surface of the article to be washed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a cleaning apparatus for cleaning and removing fine particles and organic substances on the surface of a medium of a hard disk, a silicon wafer or the like.

  For glass plates that process hard disk media, silicon wafers, or liquid crystal displays, etc., the surface irregularities are minimized, and the surface is thoroughly cleaned so that fine particles and organic substances do not remain due to microprocessing. Must be.

  The following is a prior art document for cleaning the surface of such a silicon wafer.

Japanese Patent Laid-Open No. 2003-1208

FIG. 4 is a configuration diagram of the cleaning apparatus described in the above publication. In the figure, 11 is a cylinder which CO ₂ has been placed as a solvent, CO ₂ therein is divided into a gas portion 112 of the liquid portion 111 and the pressure _{P 0} of the temperature T. Reference numeral 12 denotes a heater for keeping the cylinder 11 at a constant temperature.

13 is a conduit for extracting gaseous CO ₂ to the outside. 14 is a pressure gauge installed in the middle of the conduit 13 and measures the pressure in the conduit 13. This pressure is the same as the pressure P ₀ of the gas portion 112. A valve 15 is attached to the conduit 13. Reference numeral 16 is a line filter, and 17 is an air operated valve, both of which are attached to the conduit 13. Further, the CO ₂ cylinder 11, the line filter 16, and the air operated valve 17 are attached in the order shown.

A hard disk medium 19 is an object to be cleaned and is rotated by a spindle 20. Reference numeral 18 denotes a nozzle which is attached to the object to be cleaned 19 by a predetermined gap d. The nozzle 18 is a double pipe, and gas CO ₂ guided by the conduit 13 is passed through the inner pipe, and N ₂ gas is passed through the outer pipe. Reference numeral 21 denotes an infrared heater that heats the object 19 to be cleaned. Reference numeral 22 denotes a purge pipe for injecting N ₂ gas.

In FIG. 4, the pressure in the conduit 13 is measured by the pressure gauge 14, and the heater 12 is controlled so that this pressure becomes constant. Since CO ₂ liquid and gas coexist in the cylinder 11, the pressure P ₀ of the gas portion 112 is a saturated vapor pressure at the temperature T of the liquid portion 111. Since there is a one-to-one relationship between the liquid temperature and the saturated vapor pressure, the saturated vapor pressure, that is, the pressure in the conduit 13 can be controlled by controlling the temperature of the liquid portion 111 with the heater 12. For example, when the liquid temperature is controlled to 22 ° C., the saturated vapor pressure becomes 6.0 MPa.

According to such a configuration, the solvent (CO ₂ ) gas is passed through the line filter to remove particles such as dust, and is ejected from the nozzle to be converted into solid particles or liquid droplets and ejected onto the object to be cleaned Particles or organics can be washed. Further, since the solvent can be made into solid particles or droplets by controlling the gap between the nozzle and the object to be cleaned, the optimum solvent state can be selected according to the degree of contamination.

FIG. 5 is a main part configuration diagram showing another example of such a cleaning apparatus. In the figure, part A surrounded by a two-dot chain line is a warming room, and although not shown in the figure, heat exchange with the outside is prevented by using a heat insulating material. A heater block 4, a filter 3, and a support member 2 are stored in this warm room. Reference numeral 1 denotes a pipe for injecting N ₂ gas. One end is closed and the other end is fixed to the support member 2.

A branch hole 2a is formed in the support member 2, and the other ends of the two pipes 1 are airtightly fixed to both ends of the branch hole. A pipe 3a connected to the outlet of the filter 3 is connected to a predetermined portion of the branch hole 2a. A pipe 4 a for introducing N ₂ gas is connected to the inlet of the heater block 4, and a pipe 4 b connected to the inlet of the filter 3 is connected to the outlet.

The pipe 4a for introducing the N ₂ gas is formed as N ₂ gas flows from the two-way, from the entrance of one of the continuously introducing pipe 6a flows is N ₂ gas constantly low flow, the other injection A relatively large volume of N ₂ gas flows from the hour introduction pipe 6b through the air operated valve 5 during cleaning.

8 is a rod-like CO ₂ solvent spray nozzle, which is composed of a metal block having a large heat capacity, for example, a length of 50 mm and a side of about 15 mm. One end is fixed to the support member 2 and the other end is, for example, about 0.3 mm. No. 8 'is formed. Although two solvent injection nozzles 8 are not shown in the drawing, they are attached with an object to be cleaned 19 interposed therebetween, and both surfaces are cleaned simultaneously.

The support member 2, the filter 3, the heater block 4, the CO ₂ injection means 8 and the pipe 1 in the warming room A surrounded by the two-dot chain line are driven as a unit. When the object to be cleaned 19 is cleaned, the chamber A moves in the direction of arrow B and seeks the object to be cleaned. Then, the CO ₂ is injected from the injection holes 8a against the object to be cleaned in accordance with the seek. The air operated valve is opened in synchronization with the timing of CO ₂ injection, and a large flow of N ₂ gas is ejected from the introduction pipe 6b during injection.

When cleaning is completed, the greenhouse A is withdrawn in the direction of the arrow B in order to attach and remove the object to be cleaned. Even when the pipe 1 is retracted, a small flow rate of N ₂ gas heated to a predetermined temperature is ejected through the introduction pipe 6a → the heater block 4 → the filter 3 → the support member 2 and the pipe 1 itself is predetermined. Maintaining temperature.

By the way, in the conventional cleaning apparatus, two rod-like CO ₂ solvent spray nozzles 8 are fixed to the support member 2 with the object to be cleaned 19 interposed therebetween.
FIG. 6 shows a state in which such a solvent injection nozzle 8 is fixed. In the figure, the two solvent spray nozzles 8 and 8 are fixed to the support member 2 by welding or the like with a spacer 9 slightly thicker (for example, 1.0 mm) than the thickness of the article 19 to be cleaned.

During cleaning, the support member is finely adjusted so that the ejection holes 8 ′ of the two nozzles are equidistant from the surface of the object to be cleaned 19.
Such a configuration is suitable when the object to be cleaned has a constant thickness and is produced in large quantities.

  However, various sizes of media are required and the thickness is not constant, and the plate thickness and size of the object to be cleaned are frequently changed when the brand is changed.

  Accordingly, an object of the present invention is to provide a cleaning apparatus that can change the distance between the solvent spray nozzle and the surface of the object to be cleaned in accordance with the change in the plate thickness.

In order to solve such a problem, the invention according to claim 1 of the present invention,
At least two solvent spray nozzles are supported by a support member and moved onto the object to be cleaned at the time of cleaning, and retracted from the object to be cleaned at the time of non-cleaning. At least one of them is configured to be movable in a direction perpendicular to the surface of the object to be cleaned. Can respond to changes in plate thickness.

In the present invention, the temperature control means is provided in the solvent injection nozzle to control the temperature above the dew point of the solvent. The temperature of CO ₂ can be controlled more accurately.

  According to the third aspect of the present invention, a wedge-shaped slope is provided in the longitudinal direction corresponding to the surface of the object to be cleaned. The sprayed dry ice does not bounce between the solvent spray nozzles and smooth cleaning is possible.

  The invention according to claim 4 of the present invention uses a micrometer as means for moving the surface of the object to be cleaned in the vertical direction. Fine adjustment is easy.

  As is clear from the above description, the following effects can be expected according to the present invention. In the cleaning apparatus configured such that two solvent spray nozzles are supported by a support member and move onto the object to be cleaned at the time of cleaning, and retract from the object to be cleaned at the time of non-cleaning, the solvent spray nozzle is By being configured to be movable in the vertical direction with respect to the surface of the object to be cleaned, it is possible to cope with changes in the plate thickness by allowing the solvent spray nozzles to move independently.

In addition, since the temperature control means is provided in the solvent injection nozzle so as to control the temperature above the dew point of the solvent, the temperature of CO ₂ can be controlled more accurately.
Moreover, since the wedge-shaped inclination is provided in the longitudinal direction corresponding to the surface of the object to be cleaned, the sprayed dry ice does not bounce between the metal blocks and can be cleaned smoothly.

  Furthermore, by using a micrometer as the means for moving in the vertical direction, it is possible to realize a cleaning apparatus that can easily make fine adjustments.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1A and FIG. 1B are main part configuration diagrams showing an example of an embodiment of the cleaning apparatus of the present invention. FIG. 1A is a front view and FIG. 1B is a plan view. The same elements as those in the conventional example shown in FIG. Further, since the configuration and operation other than the vertical movement mechanism of the solvent injection nozzle are the same, the illustration and description here are omitted.

  In the figure, reference numeral 2a denotes a support member, and 8a denotes a solvent injection nozzle that is movably attached to the support member. Reference numeral 30 denotes a micrometer as fine driving means supported by the fixed member 31. When the rotating portion 30a is turned, the tip shaft 30b moves in the direction of arrow D in units of microns.

Reference numeral 32 denotes a fulcrum member. When the shaft 30b moves in the arrow D direction, the transmission member 34 is moved in the arrow E direction via the pin 33a. Reference numeral 34 denotes a moving member, which moves together with the transmission member 33 in the direction of arrow C perpendicular to the surface of the object 19 to be cleaned. Note that the two opposing solvent injection nozzles are confronted with a spring or the like that is expanded to a distance that can accommodate the maximum thickness of the object to be cleaned.

  In the above-described configuration, when cleaning the object 19 to be cleaned, the solvent injection nozzle 8a attached to the support member 2a is moved onto the object to be cleaned by a driving device (not shown), and the solvent injection nozzle 8a and the surface of the object to be cleaned are Adjust the gap.

  In that case, the rotation part 30a of the micrometer 30 is rotated to advance the drive shaft 30b, and the fulcrum member 32 is rotated. Then, the pin 33a and the moving member fixed to the pin 33a are moved in the direction in which the arrow C contracts.

FIG. 2 is a cross-sectional view (a), a side view (b), and a bottom view (c) showing an example of the embodiment of the solvent injection nozzle 8a. In the figure, 8f is a CO ₂ flow path through which CO _{2 as a} solvent flows. Reference numeral 8e denotes a temperature control means, which is omitted in the drawing, but includes a heater, a temperature sensor, and a temperature control circuit. Further, the surface facing the object to be cleaned is chamfered except for the portion of the ejection hole to form a relief portion 10.

3A to 3C show the flow of CO ₂ when CO ₂ is injected using the solvent injection nozzle 8a shown in FIG. 2, wherein (a) is a front view, (b) is a side view, c) is a perspective view. According to these drawings, it can be seen that CO ₂ (dry ice) ejected from the ejection hole 8a ′ flows in the direction of the arrow and smoothly flows without rebounding from the solvent ejection nozzle 8a.

  The foregoing description of the present invention has only shown certain preferred embodiments for purposes of illustration and illustration. Accordingly, it will be apparent to those skilled in the art that the present invention can be modified and modified in many ways without departing from the essence thereof. For example, in this embodiment, a micrometer is provided on the front and back surfaces of the object to be cleaned, and both solvent spray nozzles are driven. However, only one drive may be performed by the micrometer. The scope of the present invention defined by the description in the appended claims is intended to include modifications and variations within the scope.

It is a principal part block diagram which shows an example of embodiment of this invention. It is a figure which shows an example of embodiment of the solvent injection nozzle of this invention. It is a diagram showing the flow of CO ₂ using a solvent injection nozzle of the present invention It is a block diagram which shows a prior art example. It is a block diagram which shows a prior art example. It is explanatory drawing which shows the adjustment method of the conventional solvent injection nozzle.

Explanation of symbols

1 pipe 2,2a supporting member 3 filter 4 the heater block 5 Air operated valve 6 _{N 2} inlet 8,8a solvent injection nozzle 8a 'jetting holes 8c, 8f CO ₂ passage 8d _{N 2} flow path 8e temperature control means 9 wedge portion DESCRIPTION OF SYMBOLS 10 Escape part 30 Micrometer 31 Fixed member 32 Support point member 33 Transmission member 34 Moving member

Claims (4)

  At least two solvent spray nozzles are supported by a support member and moved onto the object to be cleaned at the time of cleaning, and retracted from the object to be cleaned at the time of non-cleaning. At least one of the cleaning apparatuses is configured to be movable in a direction perpendicular to the surface of the object to be cleaned.   The cleaning apparatus according to claim 1, wherein a temperature control unit is provided in the solvent injection nozzle.   The cleaning apparatus according to claim 1 or 2, wherein the solvent spray nozzle is formed in a rod shape and has a wedge-shaped inclination in a longitudinal direction corresponding to a surface of the object to be cleaned. 4. The cleaning apparatus according to claim 1, wherein a micrometer is used as means for moving the surface of the object to be cleaned in the vertical direction.

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