JP2005107408A - Liquid crystal display element and manufacturing method of liquid crystal display element - Google Patents

Liquid crystal display element and manufacturing method of liquid crystal display element Download PDF

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JP2005107408A
JP2005107408A JP2003343628A JP2003343628A JP2005107408A JP 2005107408 A JP2005107408 A JP 2005107408A JP 2003343628 A JP2003343628 A JP 2003343628A JP 2003343628 A JP2003343628 A JP 2003343628A JP 2005107408 A JP2005107408 A JP 2005107408A
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liquid crystal
crystal display
boundary line
display element
outer peripheral
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JP4396208B2 (en
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Yasuhiro Shirasaka
康弘 白坂
Takanori Nakamura
貴紀 中村
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Sony Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal display element whose display defect caused by alignment unevenness generated in the vicinity of a border line of an outer peripheral end of an inorganic vapor deposition film can be suppressed or eliminated without depending on a technique incurring complication of a manufacturing process and to provide the manufacturing method of the liquid crystal display element. <P>SOLUTION: An inorganic alignment layer 3 is provided so as to cover the effective display region 2 of a substrate 1 such as a TFT substrate and a common electrode side substrate. The border line 5 of the outer peripheral end of the inorganic alignment layer 3 is positioned so as to overhang by ≥0.35 [mm] from the border line of an outer peripheral end of an effective display region to its outer side, and so as to retreat by ≥0.10 [mm] from the border line 8 of an inner peripheral end of a sealing material 7 to the inner side effective display region 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、無機配向膜を有して、例えば液晶プロジェクタのライトバルブとして好適に用いられる、液晶表示素子および液晶表示素子の製造方法に関する。   The present invention relates to a liquid crystal display element having an inorganic alignment film and suitably used, for example, as a light valve of a liquid crystal projector, and a method for manufacturing the liquid crystal display element.

いわゆる液晶プロジェクタと呼ばれる投射型液晶表示装置には、従来、TN型(Twisted Nematic type)の液晶表示素子(液晶表示パネル)が用いられているが、そのTN型の液晶表示素子では、有機配向膜が用いられていた。   Conventionally, a TN type (Twisted Nematic type) liquid crystal display element (liquid crystal display panel) is used in a projection type liquid crystal display device called a so-called liquid crystal projector. In the TN type liquid crystal display element, an organic alignment film is used. Was used.

しかし、近年の液晶プロジェクタの高輝度化、コスト削減による小型化などに起因して、ライトバルブに入射する光量がますます強大なものとなって行く傾向にあるため、その光や熱による有機配向膜の劣化・変質が懸念される。このため、近年では特に液晶プロジェクタ用の液晶表示素子に対しては、SiO2 のような無機材料を蒸着してなる無機配向膜を用いることが提案されている(特許文献1、特許文献2、特許文献3、特許文献4参照。)。 However, the amount of light incident on the light valve tends to become stronger due to the recent increase in brightness and cost reduction of liquid crystal projectors. There is concern about deterioration and deterioration of the film. Therefore, in recent years, it has been proposed to use an inorganic alignment film formed by vapor-depositing an inorganic material such as SiO 2 particularly for a liquid crystal display element for a liquid crystal projector (Patent Document 1, Patent Document 2, (See Patent Document 3 and Patent Document 4.)

ところが、無機配向膜は、TN型の液晶との化学的相互作用が弱い傾向にあるので、配向の安定性が低く、未だ実用化に十分な段階には達していない。   However, since the inorganic alignment film tends to have a weak chemical interaction with the TN type liquid crystal, the alignment stability is low and has not yet reached a stage sufficient for practical use.

他方、SiO2 を斜方蒸着してなる膜を無機配向膜として使用すると、垂直配向型であれば安定して配向することが知られている(特許文献5、特許文献6参照。)。しかし、これもポリイミド等の有機垂直配向膜における配向性高分子と液晶分子との分子相互作用による液晶分子配向規制力と比較すると、液晶分子の配向規制力が弱い。 On the other hand, when a film formed by oblique deposition of SiO 2 is used as an inorganic alignment film, it is known that the film is vertically aligned if it is a vertical alignment type (see Patent Documents 5 and 6). However, this also has a weak alignment regulating force for liquid crystal molecules compared to the alignment regulating force for liquid crystal molecules due to molecular interaction between the alignment polymer and the liquid crystal molecules in an organic vertical alignment film such as polyimide.

このため、無機材料を斜方蒸着して配向膜を形成した場合には、液晶セル内に液晶を注入した直後には、液晶層内の液晶分子を十分実用に耐え得るような有効な配向状態(初期配向状態)に規制することができるものの、時間の経過に連れて、例えば紫外線硬化型樹脂接着剤等からなるシール材の影響などに因り、シール材の近傍から液晶分子の配向状態が乱れ始め、やがては液晶分子の初期配向状態を維持できなくなり、延いては表示画面の周辺部から表示品質の悪化が生じるという虞がある。   For this reason, when an alignment layer is formed by oblique deposition of an inorganic material, immediately after the liquid crystal is injected into the liquid crystal cell, an effective alignment state in which the liquid crystal molecules in the liquid crystal layer can sufficiently withstand practical use. Although it can be controlled to (initial alignment state), the alignment state of liquid crystal molecules is disturbed from the vicinity of the sealing material over time due to the influence of the sealing material made of, for example, an ultraviolet curable resin adhesive. Initially, the initial alignment state of the liquid crystal molecules cannot be maintained over time, and the display quality may deteriorate from the periphery of the display screen.

このような表示品質悪化を回避するための手法として、光の当たらないシール材の近傍部分には配向規制力の強い有機垂直配向膜を設け、有効表示領域には無機垂直配向膜を設けた構造を有する液晶表示装置などが提案されている(特許文献7参照。)。
特開昭59−188621号公報 特開昭63−172121号公報 特開昭54−46576号公報 特開昭53−84750号公報 特開平5−203958号公報 特開平7−159788号公報 特開2002−214616号公報
As a technique for avoiding such deterioration in display quality, a structure in which an organic vertical alignment film having a strong alignment regulating force is provided in the vicinity of a seal material that is not exposed to light, and an inorganic vertical alignment film is provided in an effective display area There has been proposed a liquid crystal display device or the like (see Patent Document 7).
JP 59-188621 A JP-A-63-172121 JP 54-46576 A JP-A-53-84750 JP-A-5-203958 JP-A-7-159788 JP 2002-214616 A

しかしながら、上述のような手法では、斜方蒸着によって無機配向膜を形成した後に、有機垂直配向膜を印刷またはフォトリソグラフィ法などを用いてパターニングする必要があり、そのような工程の追加で配向膜形成工程が煩雑化してしまうという不都合がある。また、表面状態に対して極めてセンシティブな斜方蒸着膜の表面を汚染し、その近傍の液晶配向状態不良を招くという虞もある。   However, in the method as described above, it is necessary to pattern the organic vertical alignment film by using printing or photolithography after forming the inorganic alignment film by oblique vapor deposition. There is an inconvenience that the forming process becomes complicated. In addition, there is a risk that the surface of the obliquely deposited film that is extremely sensitive to the surface state is contaminated, leading to poor liquid crystal alignment state in the vicinity thereof.

また、無機蒸着膜の外周端境界線(換言すれば、蒸着された部分と蒸着されていない部分の境目)では、無機蒸着膜の表面が不均一になる傾向がある。このため、無機材料を斜方蒸着してなる無機蒸着膜は一般に、その外周端境界線の付近で配向規制力がさらに弱くなり、それに起因して、無機蒸着膜の外周端境界線の付近では配向ムラが生じる確率が高いことを、本発明者らは種々の実験および解析等により確認した。このような無機蒸着膜の外周端境界線の付近で配向ムラが生じると、それに起因して、表示画面の特に周辺部に見苦しい表示欠陥が発生する虞がある。   Further, the surface of the inorganic vapor deposition film tends to be non-uniform at the outer peripheral edge boundary line of the inorganic vapor deposition film (in other words, the boundary between the vapor deposited portion and the non-vapor deposited portion). For this reason, an inorganic vapor deposition film formed by obliquely depositing an inorganic material generally has a weaker orientation regulating force near the outer peripheral edge boundary line, and as a result, near the outer peripheral edge boundary line of the inorganic vapor deposition film. The present inventors have confirmed through various experiments and analyzes that the probability of occurrence of uneven orientation is high. When alignment unevenness occurs in the vicinity of the boundary line of the outer peripheral edge of such an inorganic vapor deposition film, an unsightly display defect may occur in the peripheral portion of the display screen.

本発明はかかる問題点に鑑みてなされたもので、その目的は、上記のような製造工程の煩雑化を招く手法に拠らずとも、無機蒸着膜の外周端境界線の付近で生じていた配向ムラに起因した表示欠陥の発生を抑制ないし解消することを可能とする液晶表示素子および液晶表示素子の製造方法を提供することにある。   The present invention has been made in view of such problems, and the object thereof has occurred in the vicinity of the boundary line of the outer peripheral edge of the inorganic vapor-deposited film, without relying on the above-described technique that complicates the manufacturing process. An object of the present invention is to provide a liquid crystal display element and a method of manufacturing the liquid crystal display element that can suppress or eliminate the occurrence of display defects due to alignment unevenness.

本発明による液晶表示素子は、互いに対向して配置され、シール材にて周囲を封止された一対の基板どうしの間隙に液晶層が挟持され、それら一対の基板のうち少なくとも一方の基板の表面の少なくとも有効表示領域上に無機配向膜を形成してなり、前記無機配向膜は、外周端境界線が前記有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸し、かつ前記シール材の内周端境界線から前記有効表示領域側に0.10[mm]の位置以内であるように設けられている。   In the liquid crystal display element according to the present invention, a liquid crystal layer is sandwiched between a pair of substrates that are arranged to face each other and whose periphery is sealed with a sealing material, and the surface of at least one of the pair of substrates An inorganic alignment film is formed on at least the effective display area of the inorganic alignment film, and the outer peripheral edge boundary line extends from the outer peripheral edge boundary line of the effective display area to the outside thereof by 0.35 [mm] or more, and The seal material is provided so as to be within a position of 0.10 [mm] on the effective display region side from the inner peripheral end boundary line of the seal material.

また、本発明による液晶表示素子の製造方法は、一対の基板のうち少なくとも一方の基板の表面の少なくとも有効表示領域上に無機配向膜を斜方蒸着によって形成し、一対の基板を互いに対向して配置し、それら一対の基板どうしの間隙に液晶層を挟持させ、シール材にて周囲を封止して、液晶表示素子を製造するにあたり、無機配向膜を、その外周端境界線が有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸し、かつ前記シール材の内周端境界線から前記有効表示領域側に0.10[mm]の位置以内となるように形成するものである。   The method of manufacturing a liquid crystal display device according to the present invention includes forming an inorganic alignment film by oblique deposition on at least the effective display region of the surface of at least one of the pair of substrates, and causing the pair of substrates to face each other. In order to manufacture a liquid crystal display element by placing a liquid crystal layer between the pair of substrates and sealing the periphery with a sealing material, the peripheral edge boundary line of the inorganic alignment film is an effective display area. Extending from the outer peripheral edge boundary line to the outside by 0.35 [mm] or more, and from the inner peripheral edge boundary line of the sealing material to the effective display area side within a position of 0.10 [mm]. is there.

本発明による液晶表示素子または液晶表示素子の製造方法では、無機配向膜を、その外周端境界線が有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸し、かつ、シール材の内周端境界線から前記有効表示領域側に0.10[mm]の位置以内となるように形成されるので、有機配向膜と無機配向膜とを併存させる手法のような製造工程の煩雑化を招く手法に拠らずとも、無機蒸着膜の外周端境界線の付近で生じていた配向ムラに起因した表示欠陥が有効表示領域にまでは及ぶことがなくなる。   In the liquid crystal display element or the method of manufacturing a liquid crystal display element according to the present invention, the inorganic alignment film has an outer peripheral edge boundary line extending from the outer peripheral edge boundary line of the effective display region to the outside by 0.35 [mm] or more, and a seal Since it is formed to be within a position of 0.10 [mm] from the inner peripheral edge boundary line of the material to the effective display region side, the manufacturing process is complicated, such as a method of coexisting an organic alignment film and an inorganic alignment film Even if it does not depend on the technique which invites, the display defect resulting from the orientation nonuniformity which has arisen in the vicinity of the outer peripheral end boundary line of the inorganic vapor deposition film does not reach the effective display area.

なお、上記の無機配向膜は、50[nm]から250[nm]までの範囲内の膜厚に形成してなるものとすることが可能である。また、上記の無機配向膜は、基板の表面を水平方向0度として、40ないし70度の範囲内の角度で、酸化シリコンを斜方蒸着してなるものとすることが可能である。但し上記の数値範囲は望ましい一態様であって、これのみには限定されないことは言うまでもない。   Note that the inorganic alignment film can be formed to have a film thickness within a range from 50 [nm] to 250 [nm]. The inorganic alignment film may be formed by obliquely depositing silicon oxide at an angle in the range of 40 to 70 degrees with the substrate surface set to 0 degrees in the horizontal direction. However, it is needless to say that the above numerical range is a desirable mode and is not limited to this.

また、上記のように、無機配向膜の外周端境界線が、有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸した位置となるように、かつシール材の内周端境界線からそのさらに内側の有効表示領域へと0.10[mm]以上後退した位置となるようにするためには、有効表示領域の外周端境界線とシール材の内周端境界線との間を、少なくとも0.45[mm]以上の距離に設定することが必要である。すなわち、有効表示領域の外周端境界線からシール材までの間の、いわゆる画面周縁部の幅は、少なくとも0.45[mm]以上に設定することが必要である。   In addition, as described above, the outer peripheral edge boundary line of the inorganic alignment film is located at a position extending 0.35 [mm] or more from the outer peripheral edge boundary line of the effective display region to the outside thereof, and the inner peripheral edge of the sealing material In order to achieve a position that is retracted by 0.10 [mm] or more from the boundary line to the inner effective display area, the space between the outer peripheral edge boundary line of the effective display area and the inner peripheral edge boundary line of the sealing material Therefore, it is necessary to set the distance to at least 0.45 [mm] or more. That is, the width of the so-called screen peripheral edge between the boundary line of the effective display area and the sealing material needs to be set to at least 0.45 [mm] or more.

本発明の液晶表示素子および液晶表示素子の製造方法によれば、無機配向膜を、その外周端境界線が有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸した位置に来るように形成したので、有機配向膜と無機配向膜とを併存させる手法のような製造工程の煩雑化を招く手法に拠らずとも、無機蒸着膜の外周端境界線の付近で生じていた配向ムラに起因した表示欠陥が有効表示領域にまでは及ぶことがなくなる。従って、製造工程の煩雑化を招くことなく、無機蒸着膜の外周端境界線の付近で生じていた配向ムラに起因した表示欠陥の発生を抑制ないし解消することができる。   According to the liquid crystal display element and the manufacturing method of the liquid crystal display element of the present invention, the inorganic alignment film is placed at a position where the outer peripheral edge boundary line extends beyond the outer peripheral edge boundary line of the effective display region by 0.35 [mm] or more. Because it was formed so as to come, it was generated near the boundary line of the outer peripheral edge of the inorganic vapor deposition film, without depending on the method of complicating the manufacturing process such as the method of coexisting the organic alignment film and the inorganic alignment film Display defects caused by uneven orientation do not reach the effective display area. Therefore, it is possible to suppress or eliminate the occurrence of display defects due to the alignment unevenness that has occurred in the vicinity of the outer peripheral edge boundary line of the inorganic vapor-deposited film without complicating the manufacturing process.

以下、本発明の実施の形態について図面を参照して詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1は、本発明の一実施の形態に係る液晶表示素子における、有効表示領域の外周端境界線からその外側のシール材が配置された位置までの部分を特に抜き出して表したものである。なお、図示の繁雑化を避けるために、本実施の形態の液晶表示素子における最も特徴的な部分である無機配向膜の外周端境界線付近以外の、例えば有効表示領域内に設けられて各画素を構成するための画素電極などのような、一般的な液晶表示素子と同様の各部位については、その詳細な説明や図示は省略する。   FIG. 1 specifically shows a portion from the outer peripheral edge boundary line of the effective display area to the position where the outer sealing material is disposed in the liquid crystal display element according to the embodiment of the present invention. In order to avoid complication of illustration, each pixel provided in, for example, an effective display area other than the vicinity of the outer peripheral edge boundary line of the inorganic alignment film which is the most characteristic part in the liquid crystal display element of the present embodiment. Detailed descriptions and illustrations of the same parts as those of a general liquid crystal display element, such as a pixel electrode for constituting the display, are omitted.

この液晶表示素子では、基板1の表面の有効表示領域2上に、無機配向膜3が、基板1の表面を水平方向0度として40〜70度の範囲内の角度で、SiO2 (酸化シリコン)を斜方蒸着することによって形成されている。無機配向膜3の膜厚は、例えば100[nm]を中心値として±50[nm]の誤差を許容する、といった設計で、50[nm]から250[nm]までの範囲内の膜厚に形成されている。 In this liquid crystal display device, on the effective display region 2 of the surface of the substrate 1, an inorganic alignment layer 3 is at an angle in the range of 40 to 70 degrees of the surface of the substrate 1 as a horizontal direction 0 °, SiO 2 (silicon dioxide ) By oblique vapor deposition. The thickness of the inorganic alignment film 3 is, for example, designed to allow an error of ± 50 [nm] with a center value of 100 [nm], and within a range from 50 [nm] to 250 [nm]. Is formed.

無機配向膜3は、外周端境界線5が、有効表示領域2の外周端境界線6からその外側へと、例えば0.50[mm]のような、0.35[mm]以上の距離に亘って延伸させた(ずらせて余裕を持たせた)位置にあり、かつシール材7の内周端境界線8からそのさらに内側の有効表示領域2へと0.10[mm]以上後退した位置にあるように、設けられている。従って、有効表示領域2の外周端境界線とシール材7の内周端境界線8との間の画面周縁部のスペースは、例えば0.50[mm]のような、少なくとも0.45[mm]以上の大きさ(幅)に設定される。   The inorganic alignment film 3 has an outer peripheral edge boundary line 5 at a distance of 0.35 [mm] or more, for example, 0.50 [mm], from the outer peripheral edge boundary line 6 of the effective display region 2 to the outside thereof. A position that is extended over a distance (given a margin), and a position that is receded by 0.10 [mm] or more from the inner peripheral end boundary 8 of the sealing material 7 to the inner effective display area 2 Is provided. Therefore, the space at the peripheral edge of the screen between the outer peripheral end boundary line of the effective display area 2 and the inner peripheral end boundary line 8 of the sealing material 7 is at least 0.45 [mm], for example, 0.50 [mm]. ] The above size (width) is set.

このような無機配向膜3が形成された2枚で一対の基板1を、互いに対向して配置し、シール材7にて基板1の周囲を封止すると共に貼着し、その2枚の基板1どうしの間隙に液晶層(図示省略)を挟持して、この液晶表示素子の主要部は構成されている。   A pair of substrates 1 are arranged so as to face each other, and the periphery of the substrate 1 is sealed with a sealing material 7 and adhered, and the two substrates are formed. A liquid crystal layer (not shown) is sandwiched between one gap, and the main part of the liquid crystal display element is configured.

このように、無機配向膜3を、その外周端境界線5が有効表示領域2の外周端境界線6からその外側へと0.35[mm]以上延伸した位置に来るように形成することで、有機配向膜と無機配向膜とを併存させる手法(図示省略)のような製造工程の煩雑化を招く手法に拠らずとも、無機配向膜3の外周端境界線5の付近で生じていた配向ムラに起因した表示欠陥が有効表示領域2にまで及ぶことを回避することができる。そしてその結果、従来は無機配向膜3の外周端境界線5の付近で生じていた配向ムラに起因した表示欠陥の発生を抑制ないし解消することが可能となる。   In this way, the inorganic alignment film 3 is formed such that the outer peripheral edge boundary line 5 comes to a position extending from the outer peripheral edge boundary line 6 of the effective display region 2 to the outside by 0.35 [mm] or more. Even if it does not depend on a method that causes complication of the manufacturing process such as a method of coexisting an organic alignment film and an inorganic alignment film (not shown), it occurred in the vicinity of the outer peripheral edge boundary 5 of the inorganic alignment film 3. It is possible to avoid the display defect due to the alignment unevenness reaching the effective display area 2. As a result, it is possible to suppress or eliminate the occurrence of display defects caused by the alignment unevenness that has conventionally occurred in the vicinity of the outer peripheral edge boundary line 5 of the inorganic alignment film 3.

しかも、無機配向膜3を、その外周端境界線5がシール材7の内周端境界線8からそのさらに内側の有効表示領域2へと0.10[mm]以上後退するように設けているので、無機配向膜3とシール材7との間に0.10[mm]以上の距離が設けられることとなり、その結果、無機配向膜3とシール材7との間での化学的な干渉等を防ぐことができ、延いてはその部分での液晶層の劣化やそれに起因した表示欠陥の発生を抑制ないしは解消することができる。   In addition, the inorganic alignment film 3 is provided such that the outer peripheral edge boundary line 5 thereof recedes from the inner peripheral edge boundary line 8 of the sealing material 7 to the effective display region 2 further inside by 0.10 [mm] or more. Therefore, a distance of 0.10 [mm] or more is provided between the inorganic alignment film 3 and the sealing material 7, and as a result, chemical interference between the inorganic alignment film 3 and the sealing material 7 or the like. As a result, it is possible to suppress or eliminate the deterioration of the liquid crystal layer at that portion and the occurrence of display defects due to the deterioration.

次に、本実施の形態に係る液晶表示素子およびその製造方法の実施例について説明する。   Next, examples of the liquid crystal display element and the manufacturing method thereof according to the present embodiment will be described.

まず、無機配向膜3の斜方蒸着を行う際に、シール材7からの汚染を回避するために、およびシール材7の塗布部分の付近に無機配向膜3が蒸着されないように、シール材7の塗布部分から有効表示領域2に向けて0.10[mm]ほど張り出す大きさの金属マスク9を使用した。そして蒸着対象である基板1の表面に損傷や汚染を与えてしまうこと防ぐために、基板1の表面から法線方向にわずかに高さΔdだけ金属マスク9を浮かせた状態で、斜方蒸着を行った。   First, when performing oblique vapor deposition of the inorganic alignment film 3, the sealing material 7 is used to avoid contamination from the sealing material 7 and so that the inorganic alignment film 3 is not deposited near the application portion of the sealing material 7. A metal mask 9 having a size of 0.10 [mm] projecting from the coated portion toward the effective display area 2 was used. In order to prevent damage or contamination to the surface of the substrate 1 to be deposited, oblique deposition is performed with the metal mask 9 slightly lifted by a height Δd in the normal direction from the surface of the substrate 1. It was.

但しこのとき、無機配向膜3の外周端境界線5を、有効表示領域2の外周端境界線6からその外側へと0.35[mm]以上の距離に亘って張り出させる(延伸しした位置まで設ける、あるいはカバレージエリアに余裕を持たせる)のではなくて、敢えて比較のために、金属マスク9を用いて、図3に示したような蒸着プロセスを行って無機配向膜3の張り出しの大きさ(距離)を、敢えて0.35[mm]未満の0.10[mm]という小さなものにして、図5に示したような基板を作製し、さらにそれを用いた液晶表示素子を作製した。また、このような無機配向膜3の張り出しを0.35[mm]未満の複数種類の距離に設定した複数の基板1を作製し、さらにそれらを用いて液晶表示素子をそれぞれ作製して、その表示欠陥の発生の有無を確認した。   However, at this time, the outer peripheral edge boundary line 5 of the inorganic alignment film 3 is projected from the outer peripheral edge boundary line 6 of the effective display region 2 to the outside thereof over a distance of 0.35 [mm] (stretched). For the purpose of comparison, the metal mask 9 is used to carry out the vapor deposition process as shown in FIG. A substrate as shown in FIG. 5 is manufactured with a size (distance) as small as 0.10 [mm] less than 0.35 [mm], and a liquid crystal display device using the substrate is manufactured. did. Further, a plurality of substrates 1 in which the overhanging of the inorganic alignment film 3 is set to a plurality of types of distances less than 0.35 [mm] are manufactured, and further, liquid crystal display elements are respectively manufactured using them. The presence or absence of display defects was confirmed.

さらに具体的には、このときの斜方蒸着プロセスは、蒸着槽を限りなく真空な状態にすることで、可能な限りSiO2 以外の分子をパージした状態にしておき、槽内下部に蒸着源であるSiO2 の固体を設置し、それを蒸発させることで、槽内上部に取り付けた基板1(すなわちTFT側基板または対向側基板)の表面を、水平方向を0°として40°〜70°の範囲で傾けながら、50〜250[nm]の膜厚となるように無機配向膜3を形成した。 More specifically, in this oblique deposition process, the deposition tank is kept in a vacuum state as much as possible so that molecules other than SiO 2 are purged as much as possible. set up of the SiO 2 solid is, by evaporating it, the surface of the substrate mounted on the tank in the upper 1 (i.e. TFT side substrate or the counter substrate), 40 ° to 70 ° in the horizontal direction as 0 ° The inorganic alignment film 3 was formed so as to have a film thickness of 50 to 250 [nm] while being tilted within the range.

その無機配向膜3を形成してなる基板1を組み込んで液晶表示素子を完成し、それを駆動して画像表示を行い、その表示品質(表示欠陥の有無等)を確認した。   The substrate 1 formed with the inorganic alignment film 3 was incorporated to complete a liquid crystal display element, which was driven to display an image, and the display quality (the presence or absence of display defects, etc.) was confirmed.

その結果、シール材7に起因した配向ムラや表示欠陥は発生しなかったが、蒸着角度、膜厚によらず、図2の平面図に斜交線(網線)を付して模式的に示したように、有効表示領域2の外周端境界線6に近い部分に、配向乱れに因る表示ムラ21が発生した。   As a result, no alignment unevenness or display defect due to the sealing material 7 occurred. However, regardless of the deposition angle and film thickness, the plan view of FIG. As shown, the display unevenness 21 due to the alignment disorder occurred in the portion of the effective display area 2 near the outer peripheral edge boundary line 6.

そこで、今度は、無機配向膜3の外周端境界線5の張り出し(延伸)の距離を0.35[mm]以上にして複数例の基板1を作製し、それらを各々組み込んだ液晶表示素子を作製し、それらについて表示欠陥の発生の有無を確認した。   Therefore, this time, a plurality of examples of substrates 1 are manufactured by setting the distance of the extension (stretching) of the outer peripheral end boundary line 5 of the inorganic alignment film 3 to 0.35 [mm] or more, and liquid crystal display elements each incorporating them are prepared. They were produced and checked for the presence or absence of display defects.

このとき、液晶表示素子の基板1上に、シール材7を塗布する部分を金属マスク9でマスキングした(覆った)状態で斜方蒸着を行って無機配向膜3を形成するという手法については、上記と同様であるが、マスキングが蒸着膜の外周端部分付近に不安定な影を作ってしまう要因となることなどに起因して、あるいはシール材7の化学的な干渉等に起因して、無機配向膜3に着膜ムラが発生して表示品質を損なう要因となる虞もある。そこで、そのような着膜ムラ等が生じることを防ぐために、図4に示したように、金属マスク9の有効表示領域2側に部分的に傾斜角αのテーパを付けるようにした。   At this time, on the substrate 1 of the liquid crystal display element, the method of forming the inorganic alignment film 3 by performing oblique vapor deposition in a state where the portion to which the sealing material 7 is applied is masked (covered) with the metal mask 9. Same as above, but masking causes an unstable shadow in the vicinity of the outer peripheral end portion of the deposited film, or due to chemical interference of the sealing material 7, etc. There is also a possibility that unevenness of the film is generated in the inorganic alignment film 3 and the display quality is deteriorated. Therefore, in order to prevent such uneven deposition, etc., as shown in FIG. 4, a taper having an inclination angle α is partially provided on the effective display region 2 side of the metal mask 9.

すなわち、蒸着源に近い側の有効表示領域2の外周端境界線6から被蒸着領域(換言すれば無機配向膜3)の外周端境界線5までの間の距離Leは、シール材7の内周端境界線8から有効表示領域2の外周端境界線6までの距離をLaとし、基板1の表面からの法線方向での金属マスク9の高さをΔd 、厚さをΔT 、金属マスク9の張り出しの距離をLo、基板1の水平方向からの傾き(換言すれば、蒸着の角度)をφとすると、Le=La −{( Δd+ΔT)/Tanφ+Lo}なる計算式で表すことができる。この式に基づけば、金属マスク9の有効表示領域2寄りの部分に傾斜角αのテーパを付けるなどして、金属マスク9の実効的なΔT を減らすことで、有効表示領域2の外周端境界線6から無機配向膜3の外周端境界線5までの間の距離Leを、さらに大きくすることができる。   That is, the distance Le between the outer peripheral edge boundary line 6 of the effective display area 2 on the side close to the vapor deposition source and the outer peripheral edge boundary line 5 of the deposition target area (in other words, the inorganic alignment film 3) is within the sealing material 7. The distance from the peripheral boundary 8 to the peripheral boundary 6 of the effective display area 2 is La, the height of the metal mask 9 in the normal direction from the surface of the substrate 1 is Δd, the thickness is ΔT, and the metal mask 9 is represented by the following equation: Le = La − {(Δd + ΔT) / Tanφ + Lo} where Lo is the overhang distance 9 and the horizontal tilt of the substrate 1 (in other words, the deposition angle) is φ. it can. Based on this equation, the outer peripheral boundary of the effective display area 2 is reduced by reducing the effective ΔT of the metal mask 9 by, for example, tapering a portion of the metal mask 9 near the effective display area 2 with an inclination angle α. The distance Le from the line 6 to the outer peripheral end boundary line 5 of the inorganic alignment film 3 can be further increased.

そこで、このような傾斜角αのテーパを設けて、無機配向膜3の外周端境界線5を有効表示領域2の外周端境界線6からその外側へとLe=0.35[mm]以上の距離に亘って張り出して設けることができるようにした金属マスク9を、基板1の法線方向に高さΔd だけ浮かした状態とし、その他の条件は上記と同様にして斜方蒸着を行って、無機配向膜3をその外周端境界線5が有効表示領域2の外周端境界線6からその外側へと0.35 [mm]以上の距離に亘って張り出すように設けてなる基板1を作製した。そしてその基板1を組み込んだ液晶表示素子を完成し、それを駆動して表示欠陥の発生の有無を確認した。その結果、表示ムラの発生は、全く視認されなかった。   Therefore, by providing such a taper of the inclination angle α, the outer peripheral edge boundary line 5 of the inorganic alignment film 3 is extended from the outer peripheral edge boundary line 6 of the effective display region 2 to the outside thereof by Le = 0.35 [mm] or more. The metal mask 9 that can be provided over a distance is floated in the normal direction of the substrate 1 by a height Δd, and other conditions are oblique deposition as described above, A substrate 1 is produced in which an inorganic alignment film 3 is provided so that its outer peripheral edge boundary line 5 protrudes from the outer peripheral edge boundary line 6 of the effective display region 2 to the outside thereof over a distance of 0.35 [mm] or more. did. Then, a liquid crystal display element incorporating the substrate 1 was completed, and it was driven to check whether or not display defects occurred. As a result, the occurrence of display unevenness was not visually recognized at all.

以上の実験の結果を纏めると、有効表示領域2の外周端境界線6と無機配向膜3の外周端境界線5との間の距離と、液晶表示素子の検査に極めて熟練した検査員の目視によって確認される表示ムラのレベルとの関係は、図6に示したように、0.35[mm]を境として、それ以上の距離であれば、実質的に目視では全く問題のない、表示ムラが視認されない、良品として評価される表示品質レベルとなり、例えば0.10[mm]のように、0.35[mm]未満であると、表示品質レベルを損なうような表示ムラが発生する、ということが明らかとなった。   Summarizing the results of the above experiment, the distance between the outer peripheral edge boundary line 6 of the effective display region 2 and the outer peripheral edge boundary line 5 of the inorganic alignment film 3 and the visual inspection of an inspector who is extremely skilled in the inspection of liquid crystal display elements. As shown in FIG. 6, the relationship with the level of display unevenness confirmed by the display is substantially visually insignificant if the distance is longer than 0.35 [mm]. The display quality level is evaluated as a non-defective product that is not visually recognized. For example, when it is less than 0.35 [mm], such as 0.10 [mm], display unevenness that impairs the display quality level occurs. It became clear that.

ここで、無機配向膜3の膜厚は、上記のように100[nm](50〜150[nm])といったオーダー(桁または数値の規模)であるが、有効表示領域2の外周端境界線6と無機配向膜3の外周端境界線5との間の望ましい距離は、0.35[mm]以上であるから、そのオーダーは、無機配向膜3の膜厚の3500倍ということになる。液晶層に含まれている液晶分子や無機配向膜3の膜厚のオーダー(100[nm]程度)から推測すると、有効表示領域2の外周端境界線6と無機配向膜3の外周端境界線5との間の望ましい距離のオーダーも、[nm]か[μm]程度であるのように想像されるが、実際には、上記の実施例で説明したように、液晶分子(図示省略)や無機配向膜3の膜厚のオーダーからは予期できないような、[mm]オーダー(または100[μm]オーダー)としなければならないことが判明した。   Here, the film thickness of the inorganic alignment film 3 is in the order of 100 [nm] (50 to 150 [nm]) (digit or numerical scale) as described above. 6 is not less than 0.35 [mm], and the order is 3500 times the film thickness of the inorganic alignment film 3. Assuming from the order of the thickness of the liquid crystal molecules contained in the liquid crystal layer and the inorganic alignment film 3 (about 100 [nm]), the outer peripheral edge boundary line 6 of the effective display region 2 and the outer peripheral edge boundary line of the inorganic alignment film 3 Although the order of the desired distance between the two is also assumed to be about [nm] or [μm], in practice, as described in the above embodiment, liquid crystal molecules (not shown) and It has been found that the order of [mm] (or 100 [μm]), which cannot be expected from the order of the thickness of the inorganic alignment film 3, must be obtained.

また、上記の無機配向膜3の外周端境界線5と有効表示領域2の外周端境界線6との間の距離(0.35[mm]以上)は、表示画面全体の対角寸法の大小に対応して変更する必要性は少ない。すなわち、どのような大きさの表示画面を有する液晶表示素子であっても、上記のような0.35[mm]以上とすればよい。   The distance (0.35 [mm] or more) between the outer peripheral edge boundary line 5 of the inorganic alignment film 3 and the outer peripheral edge boundary line 6 of the effective display region 2 is the size of the diagonal dimension of the entire display screen. There is little need to change in response to. That is, the liquid crystal display element having a display screen of any size may be set to 0.35 [mm] or more as described above.

これは、一般に、どのような大きさの画面を有する液晶表示素子であっても、図2に模式的に示したように表示画面の周辺部に配向不良に起因した表示ムラ21のような表示欠陥が発生していると、その表示ムラ21の存在自体が顕著に目立って視認されてしまうので、その表示欠陥が表示品質を著しく低下させる主要因になる。従って、表示品質の向上のためには、表示画面の大きさには関係なしに、無機配向膜3の外周端境界線5の付近の配向不良が有効表示領域2の特に周辺部の表示品質に対して悪影響を及ぼすことを防ぐことが必要となるからである。そしてそのためには、上記のような本実施の形態または本実施例で説明したような手法が有効なものであるからである。   In general, even if a liquid crystal display element has a screen of any size, as shown schematically in FIG. 2, a display such as a display unevenness 21 caused by an alignment defect is provided at the periphery of the display screen. If a defect has occurred, the presence of the display unevenness 21 will be noticeably conspicuous, and the display defect will be the main factor that significantly reduces the display quality. Therefore, in order to improve the display quality, an alignment defect near the outer peripheral edge boundary 5 of the inorganic alignment film 3 causes the display quality of the effective display region 2 particularly in the peripheral portion regardless of the size of the display screen. This is because it is necessary to prevent adverse effects on the environment. For that purpose, the method as described in the present embodiment or the present example is effective.

なお、上記実施の形態の液晶表示素子は、例えば液晶プロジェクタのライトバルブとして用いられる透過型の液晶表示パネルなどに好適に利用可能である。   In addition, the liquid crystal display element of the said embodiment can be utilized suitably for the transmissive | pervious liquid crystal display panel etc. which are used, for example as a light valve of a liquid crystal projector.

また、上記のような金属マスク9を用いることの他にも、基板1の全面に無機膜を蒸着した後、シール材7を塗布する予定の部分の無機膜を例えばエッチング法などによって取り除いて、所定の平面形状の無機配向膜3を形成することなども可能である。   In addition to using the metal mask 9 as described above, after depositing an inorganic film on the entire surface of the substrate 1, the portion of the inorganic film to be coated with the sealing material 7 is removed by, for example, an etching method, It is also possible to form an inorganic alignment film 3 having a predetermined planar shape.

本発明は、例えば液晶プロジェクタのライトバルブとして用いられる透過型の液晶表示パネルなどに好適な無機配向膜を有する液晶表示素子およびその製造方法として用いることができる。   The present invention can be used as a liquid crystal display element having an inorganic alignment film suitable for, for example, a transmissive liquid crystal display panel used as a light valve of a liquid crystal projector and a method for manufacturing the same.

本発明の一実施の形態に係る液晶表示素子における、基板上の有効表示領域の外周端境界線からその外側のシール材が配置された位置までの部分を特に抜き出して表した図である。It is the figure which extracted especially the part from the outer peripheral edge boundary line of the effective display area on a board | substrate to the position where the sealing material of the outer side is arrange | positioned in the liquid crystal display element which concerns on one embodiment of this invention. 有効表示領域の外周端境界線に近い部分に配向乱れに因る表示ムラが発生した状態を模式的に表した図である。It is the figure which represented typically the state which the display nonuniformity resulting from orientation disorder generate | occur | produced in the part near the outer periphery end boundary line of an effective display area. 無機配向膜の外周端境界線を、有効表示領域の外周端境界線からその外側へと0.35[mm]未満の距離に亘ってしか張り出させないようにした場合の蒸着プロセスの一例を表した図である。An example of a vapor deposition process in the case where the outer peripheral edge boundary line of the inorganic alignment film is allowed to protrude from the outer peripheral edge boundary line of the effective display region to the outside thereof only over a distance of less than 0.35 [mm] is shown. FIG. 金属マスクの有効表示領域側に、部分的に傾斜角αのテーパを付けることで0.35[mm]以上の距離に亘る無機配向膜の張り出しを設けるようにした場合の蒸着プロセスの一例を表した図である。An example of a vapor deposition process in the case where an overhang of an inorganic alignment film over a distance of 0.35 [mm] or more is provided by partially tapering an inclination angle α on the effective display region side of the metal mask. FIG. 無機配向膜の外周端境界線を、有効表示領域の外周端境界線からその外側へと0.35[mm]未満の距離に亘ってしか張り出させないようにした基板の一例を表した図である。It is the figure showing an example of the board | substrate which made the outer peripheral edge boundary line of an inorganic alignment film protrude only from the outer peripheral edge boundary line of an effective display area to the outer side over the distance of less than 0.35 [mm]. is there. 有効表示領域の外周端境界線と無機配向膜の外周端境界線との間の距離と、液晶表示素子の検査に極めて熟練した検査員の目視によって確認される表示ムラのレベルとの対応関係を、纏めてグラフ化して表した図である。Correspondence between the distance between the outer peripheral edge boundary line of the effective display area and the outer peripheral edge boundary line of the inorganic alignment film and the level of display unevenness confirmed by the visual inspection of an inspector who is extremely skilled in the inspection of liquid crystal display elements It is the figure which put together and represented the graph.

符号の説明Explanation of symbols

1…基板、2…有効表示領域、3…無機配向膜、5…無機配向膜の外周端境界線、6… 有効表示領域の外周端境界線、7…シール材、8…シール材の内周端境界線、9…金属マスク



DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 2 ... Effective display area, 3 ... Inorganic alignment film, 5 ... Outer peripheral edge boundary line of inorganic alignment film, 6 ... Outer peripheral edge boundary line of effective display area, 7 ... Seal material, 8 ... Inner circumference of seal material Edge border, 9 ... metal mask



Claims (8)

互いに対向して配置され、シール材にて周囲を封止された一対の基板どうしの間隙に液晶層が挟持され、前記一対の基板のうち少なくとも一方の基板の表面の少なくとも有効表示領域上に無機配向膜を形成してなる液晶表示素子であって、
前記無機配向膜は、外周端境界線が前記有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸し、かつ前記シール材の内周端境界線から前記有効表示領域側に0.10[mm]の位置以内であるように設けられている
ことを特徴とする液晶表示素子。
A liquid crystal layer is sandwiched between a pair of substrates that are arranged to face each other and are sealed with a sealing material, and are inorganic on at least an effective display area on the surface of at least one of the pair of substrates. A liquid crystal display element formed by forming an alignment film,
The inorganic alignment film has an outer peripheral end boundary line extending from the outer peripheral end boundary line of the effective display region to the outside by 0.35 [mm] or more, and from the inner peripheral end boundary line of the sealing material to the effective display region side. It is provided so that it may be within the position of 0.10 [mm]. The liquid crystal display element characterized by the above-mentioned.
前記無機配向膜は、50[nm]ないし250[nm]の範囲内の膜厚に形成してなるものである
ことを特徴とする請求項1記載の液晶表示素子。
The liquid crystal display element according to claim 1, wherein the inorganic alignment film is formed to have a film thickness within a range of 50 [nm] to 250 [nm].
前記無機配向膜は、前記基板の表面を水平方向0度として、40ないし70度の範囲内の角度で、酸化シリコンを斜方蒸着してなるものである
ことを特徴とする請求項1記載の液晶表示素子。
2. The inorganic alignment film is formed by obliquely depositing silicon oxide at an angle in a range of 40 to 70 degrees with the surface of the substrate being set to 0 degrees in the horizontal direction. Liquid crystal display element.
前記有効表示領域の外周端境界線と前記シール材の内周端境界線との間が、0.45[mm]以上の距離に設定されており、最外形,シール材太さおよび有効表示領域の大きさから制約されている
ことを特徴とする請求項1記載の液晶表示素子。
The distance between the outer peripheral edge boundary line of the effective display area and the inner peripheral edge boundary line of the seal material is set to a distance of 0.45 [mm] or more, and the outermost shape, the thickness of the seal material, and the size of the effective display area The liquid crystal display element according to claim 1, wherein the liquid crystal display element is restricted.
一対の基板のうち少なくとも一方の基板の表面の少なくとも有効表示領域上に無機配向膜を斜方蒸着によって形成し、前記一対の基板を互いに対向して配置し、前記一対の基板どうしの間隙に液晶層を挟持させ、シール材にて周囲を封止して、液晶表示素子を製造するにあたり、
前記無機配向膜の外周端境界線が前記有効表示領域の外周端境界線からその外側へと0.35[mm]以上延伸し、前記シール材の内周端境界線から前記有効表示領域側に0.10[mm]の位置以内になるように形成する
ことを特徴とする液晶表示素子の製造方法。
An inorganic alignment film is formed by oblique vapor deposition on at least the effective display area of the surface of at least one of the pair of substrates, the pair of substrates are disposed to face each other, and a liquid crystal is disposed in a gap between the pair of substrates. In manufacturing a liquid crystal display element by sandwiching the layers and sealing the periphery with a sealing material,
The outer peripheral end boundary line of the inorganic alignment film extends 0.35 [mm] or more from the outer peripheral end boundary line of the effective display region to the outside thereof, and the effective display region side from the inner peripheral end boundary line of the seal material is 0.10 [ mm]]. A manufacturing method of a liquid crystal display element,
前記無機配向膜を、50[nm]ないし250[nm]の範囲内の膜厚に形成する
ことを特徴とする請求項5記載の液晶表示素子の製造方法。
The method for manufacturing a liquid crystal display element according to claim 5, wherein the inorganic alignment film is formed to have a film thickness within a range of 50 [nm] to 250 [nm].
前記無機配向膜を、前記基板の表面を水平方向0度として40ないし70度の範囲内の角度で、酸化シリコンを斜方蒸着して形成する
ことを特徴とする請求項5記載の液晶表示素子の製造方法。
6. The liquid crystal display element according to claim 5, wherein the inorganic alignment film is formed by obliquely depositing silicon oxide at an angle in a range of 40 to 70 degrees with the surface of the substrate being set at 0 degrees in the horizontal direction. Manufacturing method.
前記有効表示領域の外周端境界線と前記シール材の内周端境界線との間を、0.45[mm]以上の距離に設定し、最外形、シール材太さおよび有効表示領域の大きさから制約される位置以内に設定する
ことを特徴とする請求項5記載の液晶表示素子の製造方法。
The distance between the outer peripheral edge boundary line of the effective display area and the inner peripheral edge boundary line of the seal material is set to a distance of 0.45 [mm] or more, from the outermost shape, the seal material thickness, and the size of the effective display area. The liquid crystal display element manufacturing method according to claim 5, wherein the liquid crystal display element is set within a restricted position.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219688A (en) * 2017-07-31 2017-09-29 厦门天马微电子有限公司 Display panel and display device
US10001675B2 (en) 2013-02-25 2018-06-19 Seiko Epson Corporation Liquid crystal device, method of manufacturing liquid crystal device, and electronic apparatus
CN113156712A (en) * 2021-04-06 2021-07-23 Tcl华星光电技术有限公司 Liquid crystal display panel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10001675B2 (en) 2013-02-25 2018-06-19 Seiko Epson Corporation Liquid crystal device, method of manufacturing liquid crystal device, and electronic apparatus
CN107219688A (en) * 2017-07-31 2017-09-29 厦门天马微电子有限公司 Display panel and display device
CN107219688B (en) * 2017-07-31 2020-05-15 厦门天马微电子有限公司 Display panel and display device
CN113156712A (en) * 2021-04-06 2021-07-23 Tcl华星光电技术有限公司 Liquid crystal display panel

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