JP2005099154A - Optical switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical switch in which paths of a plurality of incident light beams are arbitrarily switched in a three-dimensional space. <P>SOLUTION: The optical switch is provided with: a first optical member 1a which has a plurality of bank-shaped projected parts 12a extended in parallel on the main face of a flat substrate 11a; and a second optical member 1b which has a plurality of bank-shaped projected parts 12b extended in parallel on the main face of a flat substrate 11b in the direction which is different from the direction in which the projected part 12a of the first optical member 1a is extended, and the other main face is pasted to the other main face of the first optical member 1a. An material for adjusting refractive index enters and leaves a groove part formed between adjacent projected parts 12a and 12b of the first optical member 1a and the second optical member 1b. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical switch that arbitrarily switches the emission direction of a plurality of incident light beams guided by a fiber or a beam.

  With the spread of optical communication, it is necessary to freely switch a plurality of optical lines introduced by a plurality of fibers to another plurality of optical lines, and a device called an optical switch is used as the switching means. Yes. The optical switch is basically intended to bend the traveling direction of light by a reflection mechanism provided in the middle of the light guide.

  A conventional example of an optical switch is shown in FIGS. 16 and 17 show an optical switch in which a large number of micromirrors 101 mounted on a micro biaxial gimbal 100 are formed on a wafer by MEMS (Micro Electro Mechanical Systems) technology and the combination of incident light and outgoing light is changed. ing. This optical switch requires frequent individual calibrations in order to correct variations in the characteristics of the micromirror 101. In addition, since the positions and orientations of the incident and outgoing fibers or optical elements must be strictly determined spatially, it is necessary to build sensors and control devices, which are complicated mechatronically.

As another conventional example of an optical switch, an optical path switching groove in which a matrix-shaped light guide path intersecting on a plane is provided and a refractive index adjusting liquid is sealed at the intersection of the light guide paths is disclosed ( For example, see Patent Document 1.) This optical switch can select whether the light traveling in the light guide path is made to go straight or orthogonal by allowing the refractive index adjusting liquid to enter and exit the optical path switching groove.
JP 2001-142010 (paragraph number “0020”, FIG. 1)

  However, since the conventional optical switch described above limits the light switching direction to a plane, it is difficult to switch the light path in the three-dimensional space. The optical switches shown in FIGS. 6 and 7 can be spatially arranged. However, the dynamic range of the micro biaxial gimbal 100 is not so large, so that the switchable region is limited. It was difficult to switch the light path to the original space.

  In view of the above problems, an object of the present invention is to provide an optical switch that can arbitrarily switch the paths of a plurality of incident light beams in a three-dimensional space.

  In order to achieve the above object, the first feature of the present invention is as follows: (a) a first optical member having a plurality of projecting protrusions on one main surface, and (b) one main surface is a first main surface. A second optical member that is bonded to the other main surface of the first optical member and has a plurality of convex portions extending in a direction different from a direction in which the convex portions of the first optical member extend on the other main surface; (C) It is an optical switch provided with means for allowing a material for adjusting the refractive index to enter and exit from a groove formed between adjacent convex portions of the first optical member and the second optical member. And Here, the “material for adjusting the refractive index” refers to a liquid, gas, or solid having a certain refractive index.

  According to the optical switch according to the first feature, the paths of a plurality of incident light beams can be arbitrarily switched in a three-dimensional space by three-dimensionally overlapping two optical members having different phases.

  In addition, the first optical member and the second optical member of the optical switch according to the first feature may be bonded in a direction in which the extending convex portions are orthogonal to each other. Further, the cross section of the convex portion of the optical switch according to the first feature may be an isosceles triangle whose apex angle is a right angle when the flat substrate is the bottom surface. This optical switch enables total reflection of incident light.

  Further, in the optical switch according to the first feature, the material for adjusting the refractive index is a material having the same refractive index as that of the first optical member and the second optical member, and means for entering and exiting the material includes: You may send the raw material which has the same refractive index into the groove part which advances light straight. The groove portion is previously filled with a material having the same refractive index as that of the first optical member and the second optical member, and the means for entering and exiting the material is provided in the groove portion that totally reflects light in the first optical member. A material having a refractive index smaller than that of the member and the second optical member may be fed. The groove portion is previously filled with a material having a refractive index smaller than that of the first optical member and the second optical member, and the means for entering and exiting the material includes the first optical member in the groove portion for allowing light to travel straight. A material having a refractive index larger than that of the second optical member may be fed. In addition, the groove portion is previously filled with a material having a smaller refractive index than the first optical member and the second optical member, and a material having the same refractive index as the first optical member and the second optical member. The means for entering and exiting the material may switch between straight light reflection and total reflection by moving these materials.

  In addition, at least a partial region of the surface of the convex portion of the optical switch according to the first feature is subjected to a film forming process that becomes hydrophobic with respect to the material for adjusting the refractive index, thereby forming the hydrophobic structure. It is good also as the raw material for adjusting a refractive index not flowing into the groove part corresponding to the convex part in which the film process was performed. Furthermore, the other surface of the convex surface is subjected to a film forming process that becomes hydrophilic with respect to the material for adjusting the refractive index, and corresponds to the convex part subjected to the film forming process that becomes hydrophilic. A material for adjusting the refractive index may be present in the groove.

  Further, the optical switch according to the first feature may further include a partition plate in the groove portion, and the means for entering and exiting the material may feed the material for adjusting the refractive index for each region sandwiched between the partition plates.

  The second feature of the present invention is that (a) a first optical member having a plurality of extending protrusions on one main surface, and (b) one main surface is the other of the first optical member. A second optical member that is bonded to the main surface and has a plurality of convex portions extending in a direction different from the direction in which the convex portions of the first optical member extend on the other main surface; An optical switch comprising a movable member having the same refractive index as that of the first member and the second member pressed against a groove formed between adjacent convex portions of the member and the second optical member. The gist.

  According to the optical switch according to the second feature, the light travels straight in the groove portion where the movable member exists, and the light path reflects and bends in the groove portion where the movable member does not exist. It can be switched arbitrarily in a three-dimensional space.

  The movable member of the optical switch according to the second feature may have a shape that matches the groove.

  The optical switch according to the second feature includes means for allowing a material for adjusting the refractive index to enter and exit from a groove formed between adjacent convex portions of the first optical member and the second optical member. Furthermore, the surface of the movable member is subjected to a film forming process that becomes hydrophilic to the material for adjusting the refractive index, and the convex surface corresponding to the groove portion to which the movable member is pressed has a refractive index. The material for adjusting the thickness may be subjected to a film forming process that becomes hydrophobic.

  According to the present invention, it is possible to provide an optical switch that arbitrarily switches the paths of a plurality of incident light beams in a three-dimensional space.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and ratios of dimensions and the like are different from actual ones. Accordingly, specific dimensions and the like should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

(First embodiment)
As shown in FIG. 1, the optical switch according to the first embodiment includes a first optical member 1a having a plurality of extending bank-shaped convex portions 12a in parallel on one main surface of a planar substrate 11a, One main surface of the planar substrate 11b has a plurality of ridge-shaped convex portions 12b extending in a direction different from the direction in which the convex portions 12a of the first optical member 1a extend, and the other main surface is the first main surface. And a second optical member 1b bonded to the other main surface of the first optical member 1a. A material for adjusting the refractive index enters and leaves the groove formed between the adjacent convex portions 12a and 12b of the first optical member 1a and the second optical member 1b. A typical example of a material for adjusting the refractive index is a commercially available refractive index adjusting liquid. The first optical member 1a and the second optical member 1b are constructed in parallel with a plurality of fine channels through which the refractive index adjusting liquid flows. Moreover, in FIG. 1, the 1st optical member 1a and the 2nd optical member 1b are bonded together in the direction where each convex part orthogonally crosses.

  The optical members 1a and 1b are made of a glass material such as quartz, silicon rubber such as polydimethylsiloxane (PDMS), or acrylic resin such as polymethyl methacrylate (PMMA). Further, glass epoxy resin, fluorine resin such as polypropylene (PP) and polytetrafluoroethylene (PTFE) may be used. The optical members 1a and 1b are preferably transparent in order to transmit light.

  As shown in FIG. 2, the cross section of the convex portion 12 is an isosceles triangle having the substrate 11 as a base, and the apex angle is 90 degrees. When the convex portion 12 has such a configuration, total reflection of light becomes possible. Further, the groove width between the convex portions 12 is several μm to several mm, and this groove portion can be used as a fine flow path to fill the refractive index adjusting liquid 2. Since the refractive index adjusting liquid 2 has the same refractive index as that of the optical member 1, as indicated by an arrow in FIG. 2, the light incident in parallel to the substrate 11 travels straight in the groove where the refractive index adjusting liquid 2 exists. On the other hand, in the groove portion where the refractive index adjusting liquid 2 does not exist, the path is bent in a direction orthogonal to the substrate 11 (downward in FIG. 2) due to total reflection.

  Such a change of the light path is performed in each of the first optical member 1a and the second optical member 1b. FIG. 3 shows an example in which the phases of the first optical member 1a and the second optical member 1b are changed and bonded together. In order to explain as a plan view, in FIG. 3, the second optical member 1b is rotated 90 degrees, and both optical members are drawn in the same plane. 3A and 3B, the convex portions of the first optical member 1a and the convex portions of the second optical member 1b are bonded together in a direction orthogonal to each other. In FIG. 3C, the convex portion of the first optical member 1a and the convex portion of the second optical member 1b are bonded together in a direction that forms an angle of 45 degrees. As described above, the convex portions of the first optical member 1a and the convex portions of the second optical member 1b are formed in different directions, so that the path of light incident from a certain direction is not only on a plane but also vertically It can be bent into a three-dimensional space including the direction.

  Also, by changing the angle of the apex of the convex part, the phase relationship between the convex part of the first optical member 1a and the convex part of the second optical member 1b, the pitch between the convex parts, and the shape of the convex part The reflection form can be freely selected. Since the number of reflections between the first optical member 1a and the second optical member 1b can be set arbitrarily, it is possible to reciprocate the light beam between both optical members a plurality of times, or to set the same path or infinite path. . These switching and interruption may be performed by controlling the presence or absence of the refractive index adjusting liquid in the groove. The presence or absence of the refractive index adjusting liquid can be set depending on time.

  FIG. 4 shows an optical switch connected to the input / output ports 3a,. 4 assumes an optical fiber as the input / output ports 3a,..., 3d, but is not limited thereto, and light may be incident by a beam or the like. For convenience of explanation, assuming that the input / output port 3a is the front side, the input / output ports 3a and 3c are connected to the front side and the rear side of the first optical member 1a, and are input to the right side and the left side of the second optical member 1b. Output ports 3b and 3d are connected. The light incident from the input / output ports 3a,..., 3d is a convex portion of the first optical member 1a, a convex portion of the second optical member 1b, a groove portion where the refractive index adjusting liquid of the first optical member 1a is present, The groove portion of the second optical member 1b where the refractive index adjusting liquid is present goes straight, and the groove portion where the refractive index adjusting liquid does not exist is totally reflected on the surface of the convex portion and the course is bent. The refractive index adjusting liquid can be inserted only in a partial region of the groove, and in FIGS. 4 and 5, the refractive index adjusting liquid exists in a region surrounded by a solid line or a dotted line in the groove. It shows that. For example, in FIG. 5, the rightmost groove of the second optical member 1b includes a region where the refractive index adjusting liquid 2a exists and a region where the refractive index adjusting liquid 2b exists. There is no refractive index adjusting liquid between the refractive index adjusting liquid 2a and the refractive index adjusting liquid 2b. 4 and 5, the thick dotted line indicates the path of light.

  In addition, the input / output ports 3a,..., 3d shown in FIGS. 4 and 5 have, for example, input / output ports 3a and 3c connected to the first optical member 1a as output-only ports, and are connected to the second optical member 1b. The connected input / output ports 3b and 3d may be input-only ports.

  Next, the details of the path of the incident light will be described with reference to FIG. In FIG. 5, the light incident from the input / output port 3e goes straight through the second optical member 1b and reaches the convex portion. Since the refractive index adjusting liquid does not exist in the groove adjacent to the convex portion, the light is bent upward. Then, the light reaches the convex portion of the first optical member 1a, travels forward in the groove portion where the refractive index adjusting liquid exists, and reaches the input / output port 3j. Similarly, the light incident from the input / output port 3f goes straight through the second optical member 1b, is bent upward in the groove where no refractive index adjusting liquid is present, and goes straight through the first optical member 1a in the rearward direction. To the input / output port 3h. The light incident from the input / output port 3i travels straight through the second optical member 1b, is bent upward in the groove where no refractive index adjusting liquid is present, and travels straight through the first optical member 1a in the rear direction. The input / output port 3g is reached.

  The arrangement pitch of the input / output ports described with reference to FIGS. 4 and 5 can be arbitrarily determined. In the optical switch according to the embodiment of the present invention, the arrangement of the input / output ports 3a,. There is no limit to the density. That is, the density can be increased without limit according to the specifications of the input / output ports 3a,. When the input / output ports have a high density, the groove portion may be divided to reduce the optical influence of the adjacent ports.

  In the above description, the path of the light is controlled by whether or not the groove for linearly propagating the light is filled with the refractive index adjusting liquid having the same refractive index as that of the optical member. The material may be filled with a refractive index adjusting liquid having the same refractive index as in the above, and a material (liquid, gas, or solid) having a refractive index smaller than that of the optical member may be sent from an external mechanism only to a portion requiring total reflection. . Or conversely, the groove portion may be filled with a material having a refractive index smaller than that of the optical member in advance, and a material having a refractive index larger than that of the optical member may be fed only into the groove portion to be moved straight. According to this configuration, a material having a small refractive index and a material having a large refractive index are mixed in the groove where light is desired to travel straight, and have the same refractive index as that of the optical member. In addition, a material having a refractive index smaller than that of the optical member and a material having the same refractive index as the optical member are prepared in the groove portion in advance, and the linear movement and total reflection of light are switched by sliding them. Anyway.

  According to the optical switch according to the first embodiment, it is possible to set the straight traveling direction of light in a plane and the reflection direction in a three-dimensional space. Further, since two optical members are provided, the degree of freedom of the path through which reflected light can be taken can be increased. That is, if the input / output port pitch is the same as that of the conventional product, the number of input / output ports can be doubled. Further, the density can be increased without limit according to the specifications of the input / output ports, and there is no limit to the number of combinations of the light incident direction and the light emitting direction.

  In addition, when the input port is connected to one optical member and the output port is connected to the other optical member, the input port and the output port are not on the same plane, and thus are affected by each other. Nothing will happen. For this reason, the arrangement pitch can be freely increased, and an unprecedented high density can be achieved.

  In addition, the optical switch according to the first embodiment can be miniaturized by a technique of building a fine flow path in the substrate. The conventional optical switch shown in FIG. 6 and FIG. 7 is also greatly affected by vibration due to its structure, but the optical switch according to the first embodiment does not have such a problem.

(Second Embodiment)
In the second embodiment of the present invention, the sealing members 5a and 5b covering the side surfaces having the convex portions 12a and 12b of the first optical member 1a and the second optical member 1b described in the first embodiment. An optical switch having the following will be described. In addition, in the optical switch according to the second embodiment, the surface of the convex portions 12a and 12b is subjected to a film forming process that becomes hydrophobic or hydrophilic with respect to the refractive index adjusting liquid, and is filled with the refractive index adjusting liquid. Adjust. Furthermore, a means for flowing in and out the refractive index adjusting liquid is provided inside or outside the sealing member 15.

  As shown in FIG. 6, the optical switch according to the second embodiment includes a first optical member 1a having a plurality of extending bank-shaped convex portions 12a in parallel on one main surface of the flat substrate 11a, One main surface of the flat substrate 11b has a plurality of bank-shaped convex portions 12b extending in a direction different from the direction in which the convex portions 12a of the first optical member 1a extend, and the other main surface is the first main surface. 2nd optical member 1b bonded together by the other main surface of 1 optical member 1a, and sealing member 5a, 5b which covers the main surface which has convex part 12a, 12b is provided. A material for adjusting the refractive index enters and exits the grooves 13a and 13b formed between the adjacent convex portions 12a and 12b of the first optical member 1a and the second optical member 1b. The material for adjusting the refractive index, the direction in which the first optical member 1a and the second optical member 1b are bonded, the material of the first optical member 1a and the second optical member 1b, etc. Since it is the same as that of embodiment, description is abbreviate | omitted here.

  Next, a method for adjusting the refractive index of the groove portion 13 by performing a film forming process that becomes hydrophobic with respect to the refractive index adjusting liquid 2 on the surface of the convex portion 12 will be described with reference to FIGS. 7 and 8.

  FIG. 7 is a view showing an example of the refractive index adjusting liquid 2 inflow / outflow means and the groove 13 subjected to the liquid repellent treatment in the optical switch according to the second embodiment. Above the groove 13, nozzle groups (not shown) for discharging the refractive index adjusting liquid 2 are arranged in parallel at an appropriate interval, and are provided above the region where light conduction is desired. The refractive index adjusting liquid 2 is discharged from the nozzle. The nozzle may be provided in the sealing member 5 or may be provided outside the sealing member 5. When the nozzle is provided outside the sealing member 5, a through hole is provided in the sealing member 5, and the refractive index adjusting liquid is introduced into the groove portion 13 through the through hole. When it is desired to block light conduction, the refractive index adjusting liquid 2 stored in the groove 13 may be sucked through the nozzle. In general, in a flow path that handles a microfluidic fluid, fluid flow into an unintended region is remarkable due to the action of capillary action. In the second embodiment, in order to prevent this, a film forming process that becomes lyophobic with respect to the refractive index adjusting liquid 2 between portions that do not contribute to the optical switch of the groove 13, particularly between adjacent regions. Is given. For example, as shown in FIG. 7, a liquid repellent film is generated. As a result, the refractive index adjusting liquid does not enter the adjacent region and can exist in an independent state. In the lyophobic treatment, a lyophobic film may be formed as a film, or lyophobic may be applied with a nozzle or the like.

  FIG. 8 shows an AA cross section and a BB cross section in FIG. The AA cross section is filled with the refractive index adjusting liquid 2, and the liquid repellent film is formed on the surface of the convex portion 12 in the BB cross section, so that the refractive index adjusting liquid 2 does not exist. Therefore, as indicated by an arrow in FIG. 8, the light incident from the lower side of the substrate 11 is totally reflected by the convex portion 12 and goes straight in the groove portion where the refractive index adjusting liquid 2 exists. Then, the light is totally reflected at the groove where the refractive index adjusting liquid 2 does not exist, and the path is bent downward with respect to the substrate 11.

  Next, a method for adjusting the refractive index of the groove using a movable member will be described with reference to FIGS.

  In FIG. 9, the movable member 10 a that matches the shape of the groove is attached from the outside to an area where light conduction is required. The drive mechanism of the movable member 10 a may be provided in the sealing member 5 or may be provided outside the sealing member 5. The movable member 10a is movable in the vertical direction in FIG. Since the movable member 10a has a refractive index equivalent to that of the substrate 11 of the optical switch, light is conducted only in a region where the movable member 10a exists in a state where the movable member 10a matches. Therefore, as indicated by arrows in FIG. 9, the light incident parallel to the substrate 11 travels straight in the groove portion where the movable member 10 a exists, and is totally reflected in the groove portion where the movable member 10 a does not exist and is reflected by the substrate 11. The course is bent downward.

  In general, it is difficult to make solid parts completely match each other in a microstructure. Therefore, the surface of the movable member 10b is subjected to a film forming process that becomes lyophilic with respect to the refractive index adjusting liquid 2, so that the surface of the convex portion 12 of the substrate 11 becomes lyophobic with respect to the refractive index adjusting liquid 2. Such a film forming process is performed. For example, as shown in FIG. 10, the lyophilic film 7 is generated on the surface of the movable member 10b, and the lyophobic film 6 is generated on the surface of the convex portion 12. Then, the refractive index adjusting liquid 2 is attached to the surface of the movable member 10b where the lyophilic film 7 is generated. If such a process is performed, the refractive index adjusting liquid 2 can be stored in the gap when the movable member 10b approaches the surface of the convex portion 12, so that the solid parts are optically completely separated from each other. Matched state (right side of FIG. 10). Further, when the movable member 10b is separated, the liquid repellent film 6 is formed on the surface of the convex portion 12, so that the refractive index adjusting liquid 2 adheres to the surface of the movable member 10b and inhibits reflection on the substrate 11. No (left side of FIG. 10). Therefore, as indicated by the arrows in FIG. 10, the light incident parallel to the substrate 11 travels straight in the groove where the movable member 10 b and the refractive index adjusting liquid 2 exist, and the movable member 10 b and the refractive index adjusting liquid 2 do not exist. In the groove portion, the path is bent downward with respect to the substrate 11 by total reflection. In the affinity treatment, the lyophobic film 6 or the lyophilic film 7 may be formed as a film, or the lyophobic or lyophilic liquid may be applied with a nozzle or the like.

  9 and 10, the movable members 10a and 10b that match the shape of the groove are attached, but it is also possible to use a movable member 10c having a shape different from the shape of the groove. For example, as shown in FIG. 11, the lyophilic film 7 is generated on the surface of the cylindrical movable member 10c, and the refractive index adjusting liquid 2 having a certain volume is adhered (left side in FIG. 11). When the movable member 10c approaches the surface of the convex portion 12, the refractive index adjusting liquid 2 can be stored in the gap, so that the solid parts are optically in a completely matched state (right side in FIG. 11). . Therefore, as indicated by the arrows in FIG. 11, the light incident parallel to the substrate 11 travels straight in the groove where the movable member 10 c and the refractive index adjusting liquid 2 exist, and the movable member 10 c and the refractive index adjusting liquid 2 do not exist. In the groove portion, the path is bent downward with respect to the substrate 11 by total reflection.

  Next, a method of adjusting the refractive index of the groove part by filling the refractive index adjusting liquid 2 in the groove part in advance and introducing the adjusting fluid 21 will be described with reference to FIG.

  In FIG. 12, the entire groove is deeply submerged in the refractive index adjusting liquid 2. Above the groove 13, nozzle groups for discharging the adjustment fluid 21 introduced from the fluid transfer means 20 are arranged side by side at an appropriate interval. As the adjusting fluid 21, a fluid that does not mix or dissolve with the refractive index adjusting liquid 2 and has a refractive index smaller than that of the refractive index adjusting liquid 2 is used. The adjustment fluid 21 is not in a completely discharged state, and one end thereof remains on the tip of the nozzle. Therefore, by adjusting the pressure in the nozzle, the adjustment fluid 21 can flow in and out without interruption with respect to the groove. When the adjusting fluid 21 is not present in the groove, the groove is filled with the refractive index adjusting liquid 2, so that light can pass through the groove (right side in FIG. 12), and when the adjusting fluid 21 is present in the groove, the refractive index is adjusted. Since the liquid 2 is excluded, light cannot pass through the groove (left side in FIG. 12). Therefore, as indicated by the arrows in FIG. 12, the light incident parallel to the substrate 11 travels straight in the groove where the refractive index adjusting liquid 2 exists, and is totally reflected in the groove where the adjusting fluid 21 exists and is reflected on the substrate 11. On the other hand, the course is bent downward.

  Next, a method of adjusting the refractive index of the groove by applying a film forming process that becomes hydrophobic or hydrophilic to the refractive index adjusting liquid 2 on the surface of the convex portion will be described with reference to FIG.

  In FIG. 13, a lyophilic region 25 is formed by performing a lyophilic film forming process on the convex surface, while a lyophobic region 26 is formed by performing a lyophobic film forming process. To do. Thereafter, the refractive index adjusting liquid 2 is poured into the groove. The refractive index adjusting liquid 2 is filled in the lyophilic area 25 and is not filled in the lyophobic area 26. Further, the excess refractive index adjusting liquid 2 filled in the lyophilic region 25 is discharged to the outside through a through hole provided in the sealing member 5. Thus, in a stable state after the refractive index adjusting liquid 2 flows in, light is conducted according to the arrangement pattern of the lyophilic area 25 and the lyophobic area 26.

  Next, a method of providing a partition plate in the groove and adjusting the refractive index of the groove will be described with reference to FIG.

  14 and 15 are examples in which the partition plate 30 is provided in the groove portion 13 into which the refractive index adjusting liquid 2 or the like that has been continuous in the above example flows in and out. The inflow and outflow of the fluid is completed only in a local region between the partitions, and can be handled independently of the adjacent region, so that it is possible to eliminate the mutual influence. In FIG. 14, the partition plate 30 is integrated with the sealing member 5, but the partition plate 30 may be provided separately from the sealing member 5.

  FIG. 15 shows an AA cross section and a BB cross section in FIG. The refractive index adjusting liquid 2 is filled in the AA cross section, the partition plate 30 is present in the BB cross section, and the refractive index adjusting liquid 2 is not present. Therefore, as indicated by an arrow in FIG. 15, the light incident from the lower side of the substrate 11 is totally reflected by the convex part 12 and goes straight in the groove part where the refractive index adjusting liquid 2 exists. Then, the light is totally reflected at the groove where the partition plate 30 exists, and the path is bent downward with respect to the substrate 11.

(Other embodiments)
Although the present invention has been described according to the above-described embodiments, it should not be understood that the descriptions and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples, and operational techniques will be apparent to those skilled in the art.

  For example, the shape and the apex angle of the convex portion 12 of the optical switch according to the embodiment of the present invention are not limited to those shown in FIG. Further, the shape, the apex angle, the pitch, and the like of the convex portion 12 may be different between the first optical member 1a and the second optical member 1b.

  Moreover, you may use together about the method of adjusting the refractive index of the groove part demonstrated in FIGS. That is, it is possible to perform the familiarity process on the surface of the convex portion and further divide the familiarity area with the partition plate.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

1 is a perspective view of an optical switch according to a first embodiment. It is an expanded sectional view of the optical switch concerning a 1st embodiment. It is an example of the reflection path | route of the light in the optical switch which concerns on 1st Embodiment. It is a perspective view of the state where the refractive index adjustment liquid of the optical switch concerning a 1st embodiment was filled up. It is the figure which expanded a part of FIG. It is a perspective view of the optical switch which concerns on 2nd Embodiment. It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 1). It is AA and BB sectional drawing of FIG. It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 2). It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 3). It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 4). It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 5). It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 6). It is a schematic diagram which shows the method to adjust the refractive index of the groove part of the optical switch which concerns on 2nd Embodiment (the 7). It is AA and BB sectional drawing of FIG. It is a figure explaining the conventional optical switch. It is the figure which expanded the biaxial gimbal part of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical member 1a 1st optical member 1b 2nd optical member 2, 2a, 2b Refractive index adjustment liquid 3a, ..., 3j, 103 Input / output port 5a, 5b Sealing member 6 Liquid repellent film 7 Lipophilic film 10a, 10b, 10c Movable member 11, 11a, 11b Substrate 12, 12a, 12b Convex part 13, 13a, 13b Groove part 20 Fluid transfer means 21 Adjusting fluid 25 Lipophilic area 26 Liquid-reduced area 30 Partition plate 100 Biaxial gimbal 101 Micro mirror repellent water

Claims (13)

A first optical member having a plurality of extending protrusions on one main surface;
One main surface is bonded to the other main surface of the first optical member, and a plurality of convex portions extending on the other main surface in a direction different from the direction in which the convex portion of the first optical member extends. A second optical member having
An optical switch comprising: means for allowing a material for adjusting a refractive index to enter and exit from a groove formed between the adjacent convex portions of the first optical member and the second optical member. .   2. The optical switch according to claim 1, wherein the first optical member and the second optical member are bonded to each other in a direction in which extending protrusions are orthogonal to each other.   3. The optical switch according to claim 1, wherein a cross section of the convex portion is an isosceles triangle having a vertical angle of a right angle when the planar substrate is a bottom surface. 4. The material for adjusting the refractive index is a material having the same refractive index as the first optical member and the second optical member,
The optical switch according to any one of claims 1 to 3, wherein the means for entering and exiting the material feeds the material having the same refractive index into a groove portion that advances light straight. The groove portion is previously filled with a material having the same refractive index as the first optical member and the second optical member,
The means for entering and exiting the material feeds a material having a refractive index lower than that of the first optical member and the second optical member into the groove portion that totally reflects light. The optical switch according to item 1. The groove portion is previously filled with a material having a refractive index smaller than that of the first optical member and the second optical member,
The means for entering and exiting the material feeds a material having a refractive index larger than that of the first optical member and the second optical member into a groove portion that advances light straight. The optical switch according to item 1. The groove portion is previously filled with a material having a smaller refractive index than the first optical member and the second optical member, and a material having the same refractive index as that of the first optical member and the second optical member. Has been
The optical switch according to any one of claims 1 to 3, wherein the means for entering and exiting the material switches between straight travel and total reflection of light by moving these materials. At least a part of the surface of the convex portion is subjected to a film forming process that becomes hydrophobic with respect to the material for adjusting the refractive index,
4. The optical switch according to claim 1, wherein a material for adjusting the refractive index does not flow into a groove corresponding to the convex portion subjected to the film forming process to be hydrophobic. In the other region of the convex surface, a film forming process is performed that becomes hydrophilic to the material for adjusting the refractive index,
The optical switch according to claim 8, wherein a material for adjusting the refractive index is present in a groove corresponding to the convex portion subjected to the film forming process to be hydrophilic. Further comprising a partition plate in the groove,
The optical switch according to claim 1, wherein the means for entering and exiting the material feeds the material for adjusting the refractive index for each region sandwiched between the partition plates. A first optical member having a plurality of extending protrusions on one main surface;
One main surface is bonded to the other main surface of the first optical member, and a plurality of convex portions extending on the other main surface in a direction different from the direction in which the convex portion of the first optical member extends. A second optical member having
A movable member having the same refractive index as that of the first member and the second member, pressed against a groove formed between the adjacent convex portions of the first optical member and the second optical member. An optical switch comprising:   The optical switch according to claim 11, wherein the movable member has a shape that matches the groove. Means for allowing a material for adjusting a refractive index to enter and exit from a groove formed between the convex portions adjacent to each other of the first optical member and the second optical member;
The surface of the movable member is subjected to a film forming process that becomes hydrophilic with respect to the material for adjusting the refractive index,
The convex surface corresponding to the groove portion to which the movable member is pressed is subjected to a film forming process that becomes hydrophobic with respect to the material for adjusting the refractive index. The optical switch as described in.

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