JP2005084288A - Method for manufacturing reflective mirror, reflective mirror, discharge lamp with reflective mirror, lighting system, and projector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a reflective mirror having high heat resistance, the reflective mirror manufactured by the method, a discharge lamp with the reflective mirror, a lighting system provided with the reflective mirror, and a projector provided with the same. <P>SOLUTION: The method for manufacturing the reflective mirror, arranged to approach a light-emitting part of a light-emitting tube having the light-emitting part comprises a process (S1) for forming the reflective mirror body performing press molding for a mixture of powder of a high-purity alumina and an adhesive; a process (S2) for heat-treating the reflective mirror body in a temperature range of the temperature or lower, obtaining crystal growth of a degree easy to polish the inner surface of the reflective mirror body at the temperature growing crystal of alumina up to size of 2 times or more of peak wavelength of infrared rays emitted from the light-emitting tube; a process (S3) for making a mirror face by polishing the inner face of the heat-treated reflective mirror body; and a process (S4) for forming a dielectric multi-layer film reflecting visible light on the inner surface of the reflective mirror making the mirror face. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention includes a method of manufacturing a reflecting mirror used in combination with a discharge lamp, for example, in a projector, a reflecting mirror manufactured by this method, a discharge lamp with a reflecting mirror, an illumination device including the reflecting mirror, and the same It relates to a projector.

  2. Description of the Related Art Conventionally, an illumination device used in a projector has a discharge lamp having a light emitting portion having a pair of electrodes on the inside and sealing portions formed at both ends of the light emitting portion, and light emitted from the discharge lamp in a predetermined direction. And a reflecting mirror facing toward the In this type of lighting device, in order to effectively use the light that has been used as stray light even though it is emitted from the discharge lamp, an auxiliary is provided at a position facing the reflecting mirror across the discharge lamp. A second reflecting mirror is provided (for example, see Patent Document 1).

JP-A-8-31382 (2nd page, FIG. 1)

  In the above prior art, the second reflecting mirror is arranged away from the outer surface of the light emitting part, and the outer diameter of the second reflecting mirror is also large. However, if the outer diameter of the second reflecting mirror is large, the second reflecting mirror itself blocks a lot of light that is reflected by the first reflecting mirror and travels toward the second reflecting mirror. It is preferable that the outer diameter of the reflecting mirror 2 is reduced and attached so as to be surrounded in the vicinity of the light emitting portion. However, high heat resistance is required if it is to be mounted close to the periphery of the light emitting section.

  The present invention has been made in view of such a point, and a manufacturing method of a reflecting mirror having high heat resistance, a reflecting mirror manufactured by this method, a discharge lamp with a reflecting mirror, an illumination device including the reflecting mirror, and the same An object of the present invention is to provide a projector provided with the projector.

A manufacturing method of a reflecting mirror according to the present invention is a manufacturing method of a reflecting mirror arranged close to a light emitting part of a discharge lamp having a light emitting part, and press-molding a mixture of high-purity alumina powder and an adhesive Forming a reflecting mirror body, and a temperature at which the reflecting mirror body grows a crystal of alumina up to a size more than twice the peak wavelength of infrared rays emitted from a discharge lamp, and the inside of the reflecting mirror body A step of heat-treating within a temperature range equal to or lower than a temperature at which crystal growth to an extent that facilitates surface polishing is obtained, a step of polishing the inner surface of the heat-treated reflector body to make a mirror surface, and a mirror-like reflector Forming a dielectric multilayer film that reflects visible light on the inner surface of the main body. Thereby, a reflective mirror with high heat resistance can be manufactured.
Moreover, the manufacturing method of the reflective mirror which concerns on this invention sets the temperature of the said heat processing to 1200 to 1800 degreeC. Thereby, a reflecting mirror that can withstand a temperature of at least about 1100 ° C. can be obtained.

The manufacturing method of a reflecting mirror according to the present invention is a manufacturing method of a reflecting mirror arranged close to a light emitting part of a discharge lamp having a light emitting part, and is press-molded into a mixture of quartz powder and an adhesive Forming a reflecting mirror body, heat-treating the reflecting mirror body at a temperature at which quartz crystals are grown to a size of ½ or less of the peak wavelength of infrared rays emitted from a discharge lamp, and heat treatment The method includes a step of polishing the inner surface of the reflecting mirror main body to make a mirror surface, and a step of forming a dielectric multilayer film that reflects visible light on the inner surface of the mirror reflecting reflecting mirror main body. Thereby, a reflective mirror with high heat resistance can be manufactured.
Moreover, the manufacturing method of the reflective mirror which concerns on this invention sets the temperature of the said heat processing to 1600 degrees C or less. This makes it possible to obtain a reflecting mirror that can withstand a temperature of about 1200 ° C. to 1300 ° C., and to suppress a crystal growth to a minimum and obtain a reflecting mirror with a small surface roughness.

Moreover, the manufacturing method of the reflecting mirror according to the present invention is a manufacturing method of the reflecting mirror disposed close to the light emitting part of the discharge lamp having the light emitting part, and after melting the glass containing alumina silica at a high temperature, A step of forming a reflector body by hot press molding, and a temperature at which the reflector body grows to a size of alumina silica crystals up to a size of ½ or less of the peak wavelength of infrared rays emitted from a discharge lamp, and reflecting Visible light is applied to the inner surface of the mirror body that has been heat-treated within the temperature range above the mirror's operating temperature, the inner surface of the mirror body that has been heat-treated and polished to a mirror surface And a step of forming a reflective dielectric multilayer film. Thereby, a reflective mirror with high heat resistance can be manufactured.
Moreover, the manufacturing method of the reflective mirror which concerns on this invention sets the temperature of the said heat processing to 800 to 1200 degreeC. This makes it possible to obtain a reflecting mirror that can withstand a temperature of about 800 ° C.

  The reflecting mirror according to the present invention is manufactured by the reflecting mirror manufacturing method described above. Thereby, a reflective mirror with high heat resistance can be obtained.

  A discharge lamp with a reflector according to the present invention includes a discharge lamp and a reflector that is disposed in the vicinity of a light emitting portion of the discharge lamp and reflects light from the discharge lamp. It is manufactured by the manufacturing method of a mirror. Since this reflector-equipped discharge lamp includes a highly heat-resistant reflector, the reflector is prevented from cracking due to heat and can be used stably.

  An illuminating device according to the present invention is disposed in the vicinity of a discharge lamp, a first reflecting mirror that reflects light from the discharge lamp and directs it forward, and a front portion of the light emitting portion of the discharge lamp, and the light from the discharge lamp. And a second reflecting mirror for reflecting the first reflecting mirror to the first reflecting mirror side, and the second reflecting mirror is manufactured by any one of the above-described reflecting mirror manufacturing methods. Since this illuminating device is provided with the 2nd reflective mirror which has high heat resistance, the crack by the heat | fever of a 2nd reflective mirror is prevented, and it is possible to utilize light stably stably.

  A projector according to the present invention includes the above-described illumination device. According to this, it is possible to obtain a projector capable of improving the light utilization efficiency and obtaining a bright projection screen.

Embodiment 1 FIG.
First, prior to describing the manufacturing method of the reflecting mirror according to the first embodiment of the present invention, an illuminating device including the reflecting mirror manufactured by this manufacturing method will be described.

FIG. 1 is a view showing an illuminating device including a reflecting mirror manufactured by a reflecting mirror manufacturing method according to each embodiment of the present invention.
The illuminating device 100 is disposed close to the discharge lamp 10, the first reflecting mirror 20 that reflects the light emitted from the discharge lamp 10 and directs it forward, and the front portion of the light emitting unit 11. And a second reflecting mirror 30 that reflects light toward the first reflecting mirror 20. In addition, the manufacturing method of the reflective mirror of this invention explained in full detail below concerns on the manufacturing method of the 2nd reflective mirror 30. FIG.

  The discharge lamp 10 is made of quartz glass or the like, has a pair of tungsten electrodes 12a and 12b inside, and has a central light emitting portion 11 configured to be filled with mercury and a rare gas, and sealing on both sides of the light emitting portion 11. It consists of parts 13a and 13b. Metal foils 14a and 14b made of molybdenum connected to the electrodes 12a and 12b are sealed in the sealing portions 13a and 13b, and lead wires 15a and 15b connected to the outside are provided on the metal foils 14a and 14b, respectively. It has been. Note that the connection destinations of the lead wires 15a and 15b are connected to, for example, connection terminals to the outside provided in a lighting device fixture or the like (not shown). In addition to the mercury lamp using mercury and rare gas as described above, the discharge lamp 10 uses a metal halide lamp using metal halide in addition to mercury and rare gas, and a xenon lamp using xenon gas. it can.

  In the illumination optical system including the discharge lamp 10, the first reflecting mirror 20 is a reflecting element disposed on the rear side of the light emitting unit 11, and a through hole 21 for fixing the discharge lamp 10 is provided at the center thereof. I have. The discharge lamp 10 is inserted into the through hole 21 of the first reflecting mirror 20 so that the axis of the discharge lamp 10 and the axis of the first reflecting mirror 20 coincide with each other, and is fixed by an inorganic adhesive 22 such as cement. Is retained. The reflecting surface of the first reflecting mirror 20 has a shape such as a spheroid or a rotating paraboloid. Note that the center of the light emitting portion 11 of the discharge lamp 10 (the center between the electrodes 12a and 12b) is usually located at or near the first focal point when the first reflecting mirror 20 has a spheroidal shape, When the one reflecting mirror 20 is a paraboloid of revolution, it is located at or near the focal point.

  The second reflecting mirror 30 includes a concave surface portion 31 having a reflective surface on the inner side and surrounding the front half of the light emitting portion 11 of the discharge lamp 10, and a mounting support portion 32 extending outward from the central portion of the concave surface portion 31. And inserted into the mounting support portion 32 so that the axis of the sealing portion 13b of the discharge lamp 10 coincides with the axis of the second reflecting mirror 30, and is fixed by an inorganic adhesive 33 such as cement. Yes.

  Next, a manufacturing method of the reflecting mirror according to Embodiment 1 of the present invention will be described with reference to FIGS. As described above, the reflecting mirror manufactured by the method described in detail below corresponds to the second reflecting mirror 30, but is simply described as the reflecting mirror 30.

FIG. 2 is a flowchart showing a flow of the manufacturing method of the reflecting mirror according to the first embodiment of the present invention, and FIG. 3 is an explanatory diagram of the manufacturing method of the reflecting mirror according to the first embodiment of the present invention.
First, as shown in FIGS. 3A and 3B, a mixture 34 (hereinafter referred to as a material) in which 99.9% or more of high-purity alumina powder and an adhesive (binder) are combined, A reflecting mirror main body 35 including a concave surface portion 31 having a desired concave surface shape and an attachment support portion 32 as shown in FIG. 3C is formed by press molding with the lower die 41 (S1). As this concave surface shape, as described above, for example, a spheroidal surface or a parabolic surface is used. And as shown in FIG.3 (d), the front-end | tip of the attachment support part 32 of the reflector main body 35 is cut | disconnected, and the through-hole which can insert the sealing part 13b of the discharge lamp 10 is formed.

  Next, the reflecting mirror body 35 is heat-treated (S2) to grow an alumina crystal inside. Specifically, this heat treatment is performed at 1200 ° C. to 1800 ° C. in a baking furnace. By baking at 1200 ° C. to 1800 ° C., the binder evaporates, and crystals of alumina grow, making it possible to obtain the reflector body 35 having a low thermal expansion coefficient and a high thermal conductivity. .

  Here, regarding the heat treatment temperature, as the heat treatment temperature is increased, the crystal grows and the scattering at the crystal grain boundary is reduced, so that the transparency of the reflector body 35 is increased, and thereby the heat absorption rate. Is known to be low. However, when the firing temperature is high, crystals grow greatly, and it becomes difficult to polish the inner surface of the reflector main body 35, which is a manufacturing process described later. Therefore, it is preferable that the heat treatment temperature is determined based on these balances. In addition, the crystal size of the alumina crystal that suppresses scattering of infrared rays (peak wavelength: 3 μm) emitted from the light emitting part 11 of the quartz tube at about 1000 ° C., that is, a size that is at least twice the peak wavelength of infrared rays (3 μm). In this case, Mie scattering at the infrared crystal grain boundary is suppressed to some extent. Therefore, since infrared rays are well transmitted through the reflecting mirror 30, it is possible to prevent heat generation due to absorption of scattered infrared rays. As described above, the heat treatment temperature is a temperature at which alumina crystals are grown to a size more than twice the peak wavelength (3 μm) of infrared rays emitted from the light emitting section 11 and the inner surface of the reflector body can be easily polished. It is set within a temperature range below a temperature at which a certain degree of crystal growth is obtained, and in this example, it is set to 1200 ° C. to 1800 ° C.

  Then, as shown in FIG. 3 (e), the polishing member 50 having the elastic body 51 at the tip is supplied to the inner surface of the reflecting mirror body 35 while supplying an abrasive (not shown) to the inner surface of the reflecting mirror body 35. The inner surface is mirror-polished by being pressed against and rotated and the crystal grains on the inner surface are made finer to be mirror-finished (S3). In FIG. 3E, the thickness of the reflecting mirror body 35 is thinner than that in the case of FIG. 3D. This is because the binder is evaporated during firing and the volume is reduced. It is to do.

Then, a heat-resistant dielectric multilayer reflective film (not shown) formed by laminating, for example, Ta ₂ O ₅ and SiO ₂ is formed on the inner surface of the reflecting mirror main body 35 by vapor deposition to form a reflecting mirror (second reflecting mirror). ) 30 is obtained (S4). This dielectric multilayer reflective film reflects only visible light out of light emitted from the discharge lamp 10 of the illumination device 100 in which the reflecting mirror 30 is incorporated, and allows passage of ultraviolet rays and infrared rays that are unnecessary for illumination.

  As described above, according to the first embodiment, by performing heat treatment at a high temperature of 1200 ° C. to 1800 ° C., it is possible to obtain the highly heat-resistant reflecting mirror 30 that can withstand high temperatures. In addition, since it is normal to use at the temperature about 100 degreeC lower than the heat processing temperature, the reflective mirror 30 which can endure the temperature of about 1100 degreeC at least can be obtained. Therefore, the reflecting mirror 30 manufactured by this manufacturing method can be disposed close to the light emitting unit 11. Therefore, the illumination device 100 including the reflecting mirror 30 contributes to the effective use of light without being cracked by heat even when the light emitted from the light emitting unit 11 is received.

  In this example, 99.9% or more of high-purity alumina is used. By using high-purity alumina, the infrared transmittance increases, so that the temperature increase of the reflecting mirror 30 can be prevented, and as a result In addition, a highly heat-resistant reflecting mirror 30 can be obtained. In addition, since alumina has high thermal conductivity, local heat concentration does not occur, and there is an effect that cracking of the reflecting mirror 30 can be prevented.

  In addition, since heat treatment is performed after molding by the upper mold 40 and the lower mold 41, the inner surface shape of the reflecting mirror 30 can be improved in light utilization efficiency such as an aspherical shape such as a spheroid shape and a parabolic surface shape, and a free-form surface. It is possible to easily achieve a high shape.

Embodiment 2. FIG.
The second embodiment uses a quartz powder instead of the high-purity alumina powder in the manufacturing method of the first embodiment, and other parts related to the manufacturing process are basically the same as those of the first embodiment. Is almost the same. That is, first, a reflector body is formed by press-molding a mixture of quartz powder and an adhesive. Then, the reflecting mirror body is heat-treated. This heat treatment temperature is different from that in the first embodiment. In the second embodiment, the temperature is set to a temperature for growing to a size equal to or less than ½ of the peak wavelength (3 μm) of infrared rays emitted from the light emitting unit 11. Heat treatment is performed as follows. By performing heat treatment at this temperature, quartz crystals grow and a reflecting mirror body made of quartz crystals can be obtained. After that, exactly the same as in the first embodiment, the inner surface of the heat-treated reflecting mirror body is polished and mirror-finished, and then a dielectric multilayer film that reflects visible light is formed on the inner surface of the reflecting mirror body To do.

  By manufacturing in this way, the reflective mirror 30 having high heat resistance can be obtained as in the first embodiment. In this example, the reflective mirror 30 that can withstand about 1200 ° C. to 1300 ° C. can be obtained. At the same time, the crystal growth can be suppressed to the minimum, and the reflecting mirror 30 having a small surface roughness can be obtained. In addition, by setting the crystal size to ½ or less of the infrared peak wavelength (3 μm), Rayleigh scattering at the crystal grain boundary can be suppressed. For this reason, it is possible to prevent infrared rays from being scattered at the crystal grain boundaries and absorbed into the quartz as heat, thereby suppressing a temperature rise.

Embodiment 3 FIG.
Embodiment 3 is obtained so as to constitute the reflecting mirror 30 by the X-Al ₂ O ₃ -SiO ₂ based crystallized glass. X− is, for example, LiO ₃ .

First, a compound of alumina silica (X—Al ₂ O ₃ —SiO ₂ ) is mixed with glass, dissolved at a high temperature, and then subjected to hot press molding, for example, a reflecting mirror having an inner surface of a spheroid or a paraboloid of revolution. Form the body. And this reflector main body is heat-processed, and the crystal | crystallization of an internal alumina silica is made to grow. As in the first embodiment, the heat treatment temperature is a temperature at which growth is performed to a size of ½ or less of the peak wavelength (3 μm) of infrared rays emitted from the discharge lamp 10 and is equal to or higher than the use temperature of the reflector body. It is set within the temperature range, and in this example, the temperature is set to 800 ° C to 1200 ° C. By performing heat treatment at a temperature within this range, the binder evaporates, and crystals of alumina silica grow, making it possible to obtain a reflector body having a low thermal expansion coefficient and a high thermal conductivity. . Note that, if the high temperature state after the heat treatment is continued, crystallization proceeds and compositional deformation occurs, so that the heat treatment is gradually cooled.

Here, X-Al ₂ O ₃ —SiO ₂ -based crystallized glass has a negative expansion coefficient and alumina has a positive expansion coefficient, so they cancel each other and have a low thermal expansion coefficient. It is a material. Specifically, it has a low coefficient of thermal expansion of about 10 × 10 ⁻⁷ / ° C. or less. In this way, a reflector having a low coefficient of thermal expansion is obtained, and therefore, even when it is disposed close to the light emitting portion 11 of the discharge lamp 10, it is caused by distortion caused by a temperature difference between the inner surface side that is high temperature and the outer surface side that is low temperature. It becomes possible to prevent damage.

  According to the manufacturing method of the third embodiment, a highly heat-resistant reflecting mirror having a heat-resistant temperature of about 800 ° C. can be obtained. Further, the manufacturing method of the third embodiment has an advantage that it is easier to manufacture than the first and second embodiments because it is not necessary to combine the binder.

  The reflecting mirror 30 manufactured by the method of the first to third embodiments is usually attached to the discharge lamp 10 in advance to constitute a discharge lamp with a reflecting mirror, and is further attached integrally with the first reflecting mirror 20. The lighting device 100 is formed. Since the discharge lamp with a reflecting mirror includes the reflecting mirror 30 having high heat resistance, the reflecting mirror 30 is prevented from cracking due to heat and can be used stably. Therefore, the illuminating device 100 provided with this reflector discharge lamp can use light stably stably.

  Next, an optical system of a projector in which the illumination device 100 configured as described above is incorporated will be described.

FIG. 4 is a diagram showing an optical system of the projector.
The projector 1000 includes an illumination optical system 300 that includes the illumination device 100 and a unit that adjusts light emitted from the illumination device 100 to predetermined light, a dichroic mirror 382, 386, a reflective mirror 372, 384, and the like. System 380, incident side lens 392, relay lens 396, relay optical system 390 having reflection mirrors 394, 398, field lenses 400, 402, 404 corresponding to each color light, and liquid crystal panels 410R, 410G as light modulation devices, 410B, a cross dichroic prism 420 which is a color light combining optical system, and a projection lens 600 are provided.

  Next, the operation of the projector 1000 having the above configuration will be described. First, the emitted light from the rear side of the light emitting unit 11 of the discharge lamp 10 is reflected by the first reflecting mirror 20 and travels forward of the lighting device 100. Further, the outgoing light from the front side of the center of the light emitting unit 11 is reflected by the second reflecting mirror 30 and returns to the first reflecting mirror 20, and then reflected by the first reflecting mirror 20 and heads forward of the illumination device 100. .

  The light exiting the illumination device 100 enters the concave lens 310, where the traveling direction of the light is adjusted substantially parallel to the optical axis of the illumination optical system 300, and then each small lens 321 of the first lens array 320 constituting the integrator lens. Is incident on. The first lens array 320 divides incident light into a plurality of partial light beams corresponding to the number of small lenses 321. Each partial light beam exiting the first lens array 320 is incident on a second lens array 340 constituting an integrator lens having small lenses 341 respectively corresponding to the small lenses 321. Then, the emitted light from the second lens array 340 is condensed in the vicinity of the corresponding polarization separation film (not shown) of the polarization conversion element array 360. At this time, light is adjusted by a light shielding plate (not shown) so that light is incident only on a portion corresponding to the polarization separation film in the incident light to the polarization conversion element array 360.

  In the polarization conversion element array 360, the light beam incident thereon is converted into the same type of linearly polarized light. The plurality of partial light beams whose polarization directions are aligned by the polarization conversion element array 360 enters the superimposing lens 370, where each partial light beam that irradiates the liquid crystal panels 410R, 410G, and 410B has a weight on the corresponding panel surface. It is adjusted so that it fits.

  The color light separation optical system 380 includes first and second dichroic mirrors 382 and 386, and separates the light emitted from the illumination optical system 300 and reflected by the reflection mirror 372 into three color lights of red, green, and blue. It has a function to do. The first dichroic mirror 382 transmits the red light component of the light emitted from the superimposing lens 370 and reflects the blue light component and the green light component. The red light transmitted through the first dichroic mirror 382 is reflected by the reflection mirror 384, passes through the field lens 400, and reaches the liquid crystal panel 410R for red light. The field lens 400 converts each partial light beam emitted from the superimposing lens 370 into a light beam parallel to the central axis (principal ray). The field lenses 402 and 404 provided in front of the other liquid crystal panels 410G and 410B operate in the same manner.

  Further, of the blue light and green light reflected by the first dichroic mirror 382, the green light is reflected by the second dichroic mirror 386 and reaches the green light liquid crystal panel 410 </ b> G through the field lens 402. On the other hand, the blue light passes through the second dichroic mirror 386, passes through the relay optical system 390, that is, the incident side lens 392, the reflection mirror 394, the relay lens 396, and the reflection mirror 398, and further passes through the field lens 404. The light reaches the light liquid crystal panel 410B. The reason why the relay optical system 390 is used for blue light is to prevent a decrease in light use efficiency due to light divergence or the like because the optical path length of blue light is longer than the optical path length of other color lights. is there. That is, this is to transmit the partial light beam incident on the incident side lens 392 to the field lens 404 as it is. The relay optical system 390 is configured to pass blue light out of the three color lights, but may be configured to pass other color light such as red light.

  The three liquid crystal panels 410R, 410G, and 410B modulate each incident color light according to given image information to form an image of each color light. A polarizing plate is usually provided on the light incident surface side and the light emitting surface side of the three liquid crystal panels 410R, 410G, and 410B.

  The three colors of modulated light emitted from each of the liquid crystal panels 410R, 410G, and 410B enter a cross dichroic prism 420 having a function as a color light combining optical system that combines these modulated lights to form a color image. In the cross dichroic prism 420, a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in an approximately X shape at the interface of four right-angle prisms. These dielectric multilayer films combine the three colors of red, green, and blue modulated light to form combined light for projecting a color image. The synthesized light synthesized by the cross dichroic prism 420 finally enters the projection lens 600 and is projected and displayed as a color image on the screen.

  In the projector 1000 configured as described above, the reflecting mirror 30 manufactured by the manufacturing method of the present invention is used. Therefore, the projector 1000 can be disposed in the vicinity of the light emitting unit 11, thereby improving the light utilization efficiency. Thus, it becomes possible to obtain a projector capable of obtaining a bright projection screen.

  In the above-described embodiment, a projector using a transmissive liquid crystal panel has been described as an example. However, the present invention can also be applied to a projector using a reflective liquid crystal panel. Here, “transmission type” means that a light modulation device such as a liquid crystal panel is a type that transmits light, and “reflection type” means that it is a type that reflects light. I mean. The light modulation device is not limited to a liquid crystal panel, and may be a device using a micromirror, for example. Furthermore, the present invention can be applied to a front projection projector that performs projection from an observation direction and a rear projection projector that performs projection from the opposite side to the observation direction.

The figure which shows the illuminating device to which the manufacturing method of this invention was applied. 3 is a flowchart showing a flow of a manufacturing method of the reflecting mirror according to the first embodiment. Explanatory drawing of the manufacturing method of the reflective mirror of Embodiment 1. FIG. The figure which shows the optical system of a projector.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 discharge lamp, 11 light emission part, 20 1st reflective mirror, 30 2nd reflective mirror, 100 illuminating device, 1000 projector.

Claims (10)

A manufacturing method of a reflecting mirror disposed close to the light emitting part of a discharge lamp having a light emitting part,
Forming a reflector body by subjecting a mixture of high-purity alumina powder and adhesive to press molding;
A crystal having a temperature at which the alumina crystal grows to a size of at least twice the peak wavelength of infrared rays emitted from the discharge lamp, and the inner surface of the reflector body is easily polished. Heat-treating within a temperature range below the temperature at which growth is obtained;
Polishing the inner surface of the heat-treated reflecting mirror body to make a mirror surface;
Forming a dielectric multilayer film that reflects visible light on an inner surface of the mirror-finished reflecting mirror body.   The method of manufacturing a reflecting mirror according to claim 1, wherein a temperature of the heat treatment is set to 1200 to 1800 ° C. A manufacturing method of a reflecting mirror disposed close to the light emitting part of a discharge lamp having a light emitting part,
Forming a reflector body by subjecting a mixture of quartz powder and adhesive to press molding;
Heat-treating the reflecting mirror body at a temperature at which quartz crystals are grown to a size of ½ or less of the peak wavelength of infrared rays emitted from the discharge lamp;
Polishing the inner surface of the heat-treated reflecting mirror body to make a mirror surface;
Forming a dielectric multilayer film that reflects visible light on an inner surface of the mirror-finished reflecting mirror body.   The method of manufacturing a reflecting mirror according to claim 3, wherein a temperature of the heat treatment is 1600 ° C. or less. A manufacturing method of a reflecting mirror disposed close to the light emitting part of a discharge lamp having a light emitting part,
After melting glass containing alumina silica at high temperature, forming a reflector body by hot press molding,
The temperature of the reflector body is a temperature at which alumina silica crystals are grown to a size of ½ or less of the peak wavelength of infrared rays emitted from the discharge lamp, and the temperature range is not less than the operating temperature of the reflector body. Heat-treating with,
Polishing the inner surface of the heat-treated reflecting mirror body to make a mirror surface;
Forming a dielectric multilayer film that reflects visible light on an inner surface of the mirror-finished reflecting mirror body.   6. The method of manufacturing a reflecting mirror according to claim 5, wherein a temperature of the heat treatment is set to 800 ° C. to 1200 ° C.   A reflecting mirror manufactured by the reflecting mirror manufacturing method according to claim 1.   7. The apparatus according to claim 1, further comprising: the discharge lamp; and a reflecting mirror that is disposed in proximity to the light emitting unit of the discharge lamp and reflects light from the discharge lamp. A reflector-equipped discharge lamp, which is manufactured by the method for manufacturing a reflector.   The discharge lamp, a first reflecting mirror that reflects light from the discharge lamp and directs it forward, and a front side portion of the light emitting portion of the discharge lamp are disposed in proximity to each other, and the light from the discharge lamp is A second reflecting mirror that reflects toward the reflecting mirror, and the second reflecting mirror is manufactured by the method for manufacturing a reflecting mirror according to any one of claims 1 to 6. Lighting device. A projector comprising the illumination device according to claim 9.

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