JP2005084022A - Magnetic field generator for sensor testing and sensor inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic field generator for sensor testing which generates a longitudinally long and also uniform magnetic field without enlarging its size. <P>SOLUTION: The magnetic field generator for sensor testing 1 is provided with a 1st magnetic field generating member 11 made from magnetic material containing a slender 1st cavity section 11a, a 2nd magnetic field generating member 12 which is located so as to face the 1st magnetic field generating member 11 with a certain space between and made from magnetic material containing a slender 2nd cavity section 12a, and a coil 15 for generating magnetic field on both the 1st magnetic field generating member 11 and the 2nd magnetic field generating member 12. Additionally, the 1st cavity section 11a and the 2nd cavity section 12a are formed so as to extend in the direction crossing the direction wherein the 1st magnetic field generating member 11 and the 2nd magnetic field generating member 12 are faced with each other (X-direction shown in Fig.). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a magnetic field generator for sensor inspection and a sensor inspection apparatus, and more particularly to a magnetic field generator for sensor inspection and a sensor inspection apparatus used for inspection of a magnetic sensor element.

Conventionally, a Helmholtz coil is known as an inspection apparatus used for investigating the characteristics of a magnetic sensor element (for example, see Non-Patent Document 1). Here, the Helmholtz coil refers to a coil in which two equivalent circular coils are arranged with their central axes aligned and spaced apart by a radius. In this Helmholtz coil, a uniform magnetic field can be obtained on a common central axis of the two coils when the same amount of current is passed through the two coils to generate a magnetic field in the same direction. Conventionally, characteristics of a magnetic sensor element and a magnetic sensor have been investigated using a uniform magnetic field generated by such a Helmholtz coil.
ASTM Designation: A 698-74 “Standard Test Method for Magnificent Shielding in Attenuating Alternating Magnetic Fields”

  However, in the above-described Helmholtz coil, a uniform magnetic field is obtained along the common central axis of two coils arranged at a predetermined interval, so that the uniform magnetic field is perpendicular to the direction in which the two coils face each other. If it is attempted to be generated, it is necessary to increase the outer diameters of the two coils constituting the Helmholtz coil, resulting in a problem that the apparatus becomes large.

  The present invention has been made to solve the above-described problems, and one object of the present invention is to generate a long and uniform magnetic field in the longitudinal direction without increasing the size of the apparatus. To provide a magnetic field generator for sensor inspection and a sensor inspection apparatus.

Means for Solving the Problems and Effects of the Invention

  According to a first aspect of the present invention, there is provided a magnetic field generating device for sensor inspection, which is opposed to a first magnetic field generating member made of a magnetic material having an elongated first hollow portion, with a predetermined interval therebetween. And a magnetic field applied to the first magnetic field generating member and the second magnetic field generating member, the second magnetic field generating member made of a magnetic material having an elongated second hollow portion at a position corresponding to the first hollow portion. A coil for generating. And the elongate 1st cavity part and 2nd cavity part are formed so that it may extend in the direction which cross | intersects the direction where a 1st magnetic field generation member and a 2nd magnetic field generation member oppose.

  In the magnetic field generator for sensor inspection according to the first aspect, as described above, the elongated first cavity portion and the second cavity portion provided in each of the first magnetic field generating member and the second magnetic field generating member, By forming the first magnetic field generating member and the second magnetic field generating member so as to extend in a direction crossing the facing direction, a longitudinal direction is provided in a region between the elongated first cavity portion and the second cavity portion. Long and uniform magnetic field can be generated. Thereby, unlike a conventional Helmholtz coil, a uniform magnetic field that is long in the longitudinal direction can be generated without increasing the size of the apparatus.

  In the magnetic field generator for sensor inspection according to the first aspect, preferably, the first magnetic field generating member and the second magnetic field generating member are made of a Ni—Fe based alloy having a coercive force of 2.0 A / m or less. As described above, when a Ni—Fe alloy having a low coercive force of 2.0 A / m or less is used as a material for the first magnetic field generating member and the second magnetic field generating member, the material remains even when a strong magnetic field is applied. In addition to being hardly affected by magnetization, a uniform magnetic field corresponding to the current flowing through the coil can be generated even with a small magnetic field.

  In the magnetic field generator for sensor inspection according to the first aspect, preferably, the first magnetic field generating member and the second magnetic field generating member are provided at both longitudinal ends of the first magnetic field generating member and the second magnetic field generating member. A pair of connecting members to be connected is further provided, and the coils are wound around the first magnetic field generating member side and the second magnetic field generating member side of the pair of connecting members so as to be continuous. If comprised in this way, it is easy to make it a longitudinal direction in the area | region between the 1st cavity part of a 1st magnetic field generation member and the 2nd cavity part of a 2nd magnetic field generation member by the connection member by which the coil was wound. Long and uniform magnetic field can be generated.

  In this case, the connecting member is preferably made of a Ni—Fe alloy having a coercive force of 2.0 A / m or less. Thus, if a Ni—Fe alloy having a low coercive force of 2.0 A / m or less is used as the material of the connecting member around which the coil is wound, the influence of the residual magnetization even when a strong magnetic field is applied. It is difficult to receive, and even with a minute magnetic field, it is possible to generate a uniform magnetic field corresponding to the current flowing through the coil.

  In the magnetic field generator for sensor inspection according to the first aspect, preferably, the first cavity and the second cavity have a rectangular shape having a substantially uniform short direction length. If comprised in this way, a uniform magnetic field can be easily generated over the longitudinal direction of a rectangular-shaped 1st cavity part and 2nd cavity part.

  In the magnetic field generator for sensor inspection according to the first aspect, it is preferable that a substantially uniform magnetic field is generated in a space where the elongated first cavity and the second cavity are opposed to each other. If comprised in this way, a uniform magnetic field long in a longitudinal direction can be generated along the elongate 1st cavity part and 2nd cavity part.

  The magnetic field generator for sensor inspection according to the first aspect preferably further includes a magnetic shield member arranged to cover the first magnetic field generating member and the second magnetic field generating member. If comprised in this way, the influence of geomagnetism at the time of a sensor test | inspection can be suppressed with a magnetic shielding member.

  A sensor inspection apparatus according to a second aspect of the present invention is arranged so as to face a first magnetic field generating member made of a magnetic material having an elongated first hollow portion and a first magnetic field generating member at a predetermined interval. And a second magnetic field generating member made of a magnetic material having an elongated second hollow portion at a position corresponding to the first hollow portion, and for generating a magnetic field in the first magnetic field generating member and the second magnetic field generating member. And the elongated first cavity portion and the second cavity portion are formed so as to extend in a direction intersecting the direction in which the first magnetic field generating member and the second magnetic field generating member are opposed to each other. A magnetic field application unit disposed in the sensor, a sensor mounting member capable of mounting a plurality of sensor elements at a predetermined interval, a transport unit for transporting the sensor mounting member to the measurement unit, and a measurement unit To inspect multiple sensor elements And an inspection probe.

  In the sensor inspection apparatus according to the second aspect, as described above, the first and second elongated cavities provided in each of the first magnetic field generating member and the second magnetic field generating member constituting the magnetic field generating unit. By forming the portion so as to extend in a direction intersecting with the direction in which the first magnetic field generating member and the second magnetic field generating member are opposed to each other, a region between the elongated first cavity portion and the second cavity portion is formed. It is possible to generate a uniform magnetic field that is long in the longitudinal direction. Thereby, unlike the conventional Helmholtz coil, a uniform magnetic field that is long in the longitudinal direction can be generated without increasing the size of the magnetic field application unit. In addition, since a magnetic field that is long and uniform in the longitudinal direction can be generated without increasing the size of the magnetic field application unit, the magnetic field application unit can be easily incorporated into an automated line. Thereby, it is easy by further providing an inspection probe, a sensor placement member on which a plurality of sensor elements can be placed at a predetermined interval, and a transport unit for transporting the sensor placement member to the measurement unit. Moreover, since an automated sensor inspection apparatus can be obtained, inspection efficiency can be greatly improved.

  In the sensor inspection apparatus according to the second aspect, preferably, the inspection probe is made of a nonmagnetic and conductive material that is in electrical contact with the sensor element. If comprised in this way, since a test | inspection probe is nonmagnetic, since it can suppress that a test | inspection probe has a bad influence at the time of the test | inspection by the magnetic field application of a sensor element, test | inspection precision can be improved.

  The sensor inspection apparatus according to the second aspect preferably further includes a magnetic shield member arranged to cover the magnetic field generation unit. If comprised in this way, the influence of geomagnetism at the time of a test | inspection of a sensor element can be suppressed with a magnetic shielding member.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view showing a magnetic field generator for sensor inspection according to an embodiment of the present invention. FIG. 2 is a schematic view for explaining the winding direction of the coil of the magnetic field generator for sensor inspection according to the embodiment shown in FIG. 3 is a plan view of the magnetic field generator shown in FIG. 1, FIG. 4 is a front view of FIG. 3, and FIG. 5 is a right side view of FIG.

  With reference to FIGS. 1-5, the magnetic field generator 1 for a sensor test | inspection by this embodiment WHEREIN: The 1st magnetic field generation member 11 and the 2nd magnetic field generation member 12 of rectangular shape (elongated shape) are mutually predetermined spacing. It arrange | positions so that it may oppose on both sides. The first magnetic field generating member 11 is provided with a rectangular (elongated) first cavity portion 11a, and the second magnetic field generating member 12 has a first cavity portion at a position corresponding to the first cavity portion 11a. A second cavity portion 12a having the same rectangular shape (elongated shape) as 11a is provided. That is, the rectangular first cavity portion 11a and second cavity portion 12a provided in each of the first magnetic field generating member 11 and the second magnetic field generating member 12 are the first magnetic field generating member 11 and the second magnetic field generating member 12. Are formed so as to extend in a direction (X direction in FIG. 1) orthogonal to a direction (Y direction in FIG. 1) facing each other.

  The first magnetic field generating member 11 and the second magnetic field generating member 12 are made of a Ni—Fe based alloy. The Ni-Fe alloy has a composition of permalloy (for example, 78Ni-5Mo-4Cu-Fe having a high saturation magnetic flux density of about 0.4 kA / m or more and a low coercive force of about 2.0 A / m or less. It is preferable to use Sumitomo Special Metals PC-2). As described above, by using a magnetic material having a high saturation magnetic flux density of about 0.4 kA / m or more, a predetermined magnetic field can be obtained with a small amount of material. In addition, by using a magnetic material with a low coercive force of about 2.0 A / m or less, even when a strong magnetic field is applied, it is not easily affected by residual magnetization, and even with a small magnetic field, it is uniform according to the current flowing through the coil. A magnetic field can be generated.

  A connecting member 13 for connecting the first magnetic field generating member 11 and the second magnetic field generating member 12 to both ends in the longitudinal direction (X direction in FIG. 1) of the first magnetic field generating member 11 and the second magnetic field generating member 12. And 14 are attached. Similarly to the first magnetic field generating member 11 and the second magnetic field generating member 12, the connecting members 13 and 14 have a high saturation magnetic flux density of about 0.4 kA / m or more and a low coercive force of about 2.0 A / m or less. Permalloy (for example, PC-2 manufactured by Sumitomo Special Metals Co., Ltd. having a composition of 78Ni-5Mo-4Cu-Fe). As shown in FIGS. 1 and 2, the coupling members 13 and 14 are wound so that the coils 15 facing each other across the magnetic field generation space have the same winding direction. When the coil 15 is wound around the connecting members 13 and 14 in such a winding direction, when a current is passed through the coil 15, the first cavity portion 11 a of the first magnetic field generating member 11 and the second magnetic field generating member 12. A uniform magnetic field is generated in a region between the second cavity 12a. In addition, as the coil 15, what insulation-coated copper wire (for example, Hitachi Cable 2 type PEW) is used. Here, the magnetic field generating members 11 and 12 and the connecting members 13 and 14 are preferably integrally formed by wire cutting or pressing. By integrally molding in this way, there is no magnetic gap, which is preferable as a magnetic field generator.

  In the present embodiment, as described above, the rectangular first cavity portion 11a and second cavity portion 12a provided in each of the first magnetic field generating member 11 and the second magnetic field generating member 12 are replaced with the first magnetic field generating member. 11 and the second magnetic field generating member 12 are formed so as to extend in a direction orthogonal to the facing direction, and the coil 15 is wound around the connecting members 13 and 14 as shown in FIG. A uniform magnetic field that is long in the longitudinal direction (X direction in FIG. 1) can be generated in the region between the portion 11a and the second cavity portion 12a. Thereby, unlike the conventional Helmholtz coil, it is possible to generate a uniform magnetic field that is long in the longitudinal direction (X direction in FIG. 1) without increasing the size of the magnetic field generator 1.

  The inventors of the present application conducted the following comparative experiment in order to confirm the effect of the above-described embodiment. That is, the magnetic field generator 1 according to the present embodiment shown in FIG. 1 and the conventional Helmholtz coil (comparative example) are actually manufactured, and the magnetic field distribution (opposite direction (Y direction in FIG. 1)) and longitudinal direction (FIG. 1) are produced. The X direction)) was measured.

First, as the magnetic field generator 1 manufactured along this embodiment, the 1st magnetic field generation member 11, the 2nd magnetic field generation member 12, and the connection members 13 and 14 are made of permalloy (78Ni-5Mo-4Cu-Fe). A copper wire formed by Sumitomo Special Metals PC-2) having a composition and insulated with polyurethane as the coil 15 was used. Further, the coil 15 was wound around the four locations of the connecting members 13 and 14 shown in FIG. The outer diameter of the magnetic field generator according to the present embodiment is 60 mm (Y direction in FIG. 1) × 120 mm (Z direction in FIG. 1) × 240 mm (X direction in FIG. 1) (including the yoke), and the volume is 0. 0.002 m ² . Moreover, the length of the X direction of the 1st cavity part 11a and the 2nd cavity part 12a was 220 mm. That is, the first cavity portion 11a and the second cavity portion 12a are formed so as to extend in the X direction from the position of 10 mm to the position of 230 mm from one end of the first magnetic field generating member 11 and the second magnetic field generating member 12. . In addition, the length of the Z direction (refer FIG. 1) of the 1st cavity part 11a and the 2nd cavity part 12a was 20 mm.

On the other hand, as a Helmholtz coil according to the comparative example, an ASTM-compliant Helmholtz coil (1/4 model) was produced. As the coil, a copper wire insulated with polyurethane was used. The number of turns of the coil was 60 turns on one side. The outer diameter of the Helmholtz coil according to this comparative example was φ300 mm (coil outer diameter) × 150 mm (interval between two coils), and the volume was 0.011 m ² .

  The results of measuring the magnetic field distribution of the Helmholtz coil according to the magnetic field generator 1 according to the present embodiment and the comparative example manufactured as described above are shown in FIGS. First, FIG. 6 shows a magnetic field distribution in a direction (Y direction in FIG. 1) in which the first magnetic field generating member 11 and the second magnetic field generating member 12 of the magnetic field generator according to the present embodiment are opposed to each other. FIG. 6 shows the first magnetic field generating member 11 at positions 40 mm, 120 mm and 200 mm from one end in the longitudinal direction (X direction in FIG. 1) of the first magnetic field generating member 11 and the second magnetic field generating member 12. And the magnetic field distribution of the direction (Y direction of FIG. 1) which the 2nd magnetic field generation member 12 opposes is shown. As shown in FIG. 6, in the direction in which the first magnetic field generating member 11 and the second magnetic field generating member 12 face each other (the Y direction in FIG. 1), a uniform magnetic field can be obtained within a range of ± 10 mm from the center of the facing direction. I understand. In this case, since the interval between the first magnetic field generating member 11 and the second magnetic field generating member 12 is 60 mm, the direction in which the first magnetic field generating member 11 and the second magnetic field generating member 12 face each other (Y in FIG. 1). In the direction), it was found that a uniform magnetic field was generated in a 20 mm region with respect to a total length of 60 mm.

  FIG. 7 shows a magnetic field distribution in the longitudinal direction (X direction in FIG. 1) of the magnetic field generator according to the present embodiment. Further, FIG. 7 shows the magnetic field distribution at the longitudinal position along the X direction at three positions, that is, the central position in the Y direction in FIG. 1 and a position ± 10 mm from the central position. As shown in FIG. 7, in the magnetic field generator according to the present embodiment, a uniform magnetic field can be obtained in a region having a length of 180 mm from 30 mm to 210 mm, which is a position in the longitudinal direction (X direction in FIG. 1). found. Moreover, a uniform magnetic field region having a length of 180 mm in the longitudinal direction (X direction in FIG. 1) can be obtained not only at the central position in the facing direction (Y direction in FIG. 1) but also at a position ± 10 mm from the central position. It turned out to be possible. Therefore, it was found that the magnetic field generator according to the present embodiment can obtain a uniform magnetic field in the longitudinal direction having a length of 180 mm with respect to the total length of 240 mm in the longitudinal direction (X direction in FIG. 1).

  On the other hand, in the Helmholtz coil according to the comparative example, as shown in FIG. 8, a uniform magnetic field can be obtained over almost the entire region in the common central axis direction (opposite direction) where the two coils face each other. Understand. Specifically, in the common central axis direction (opposite direction) where the two coils face each other, the total length of the device (the interval between the two coils) is 150 mm, whereas a uniform magnetic field of 150 mm can be obtained. . On the other hand, in the Helmholtz coil according to the comparative example, as shown in FIG. 9, in the longitudinal direction (direction orthogonal to the direction in which the two coils oppose), a uniform magnetic field can be obtained only within a range of ± 40 mm from the center position. I understand. Specifically, in the Helmholtz coil according to the comparative example, in the longitudinal direction, the total length of the device (outer diameter of the device) was 300 mm, whereas the uniform magnetic field was only 80 mm.

  As described above, when the magnetic field generator 1 according to the present embodiment is compared with the generation region of the uniform magnetic field in the longitudinal direction of the Helmholtz coil according to the comparative example, in the present embodiment, 180 mm (75%) with respect to the total length of 240 mm in the longitudinal direction. ) In the longitudinal direction was obtained, whereas in the comparative example, only a uniform magnetic field in the longitudinal direction of 80 mm (about 27%) was obtained with respect to the total length of 300 mm in the longitudinal direction. Therefore, in the magnetic field generator 1 according to the present embodiment, it was confirmed that unlike the conventional Helmholtz coil, it is possible to generate a long and uniform magnetic field in the longitudinal direction without increasing the size of the device. .

  FIG. 10 is a schematic diagram showing an overall configuration of a sensor inspection apparatus using the magnetic field generator 1 according to the present embodiment shown in FIG. 1 as a magnetic field application unit. FIG. 11 is a schematic diagram illustrating a measurement unit of the sensor inspection apparatus illustrated in FIG. Next, the configuration of the sensor inspection apparatus 50 including the magnetic field generator 1 according to the present embodiment will be described with reference to FIGS. 10 and 11. The sensor inspection apparatus 50 includes a magnetic field application unit including the magnetic field generation apparatus 1 according to the present embodiment, a line control unit 51, a characteristic inspection control unit 52, a magnetic field generation unit 53, an MPX (multiplex) 54, and an inspection. A unit 55, a transport line 56, a magnetic shield member 57, a data storage unit 58, and a display 59 are included.

  The line control unit 51 is a unit that controls the entire manufacturing line including the inspection device for the magnetic sensor element (flux gate type magnetic sensor element) 100. The characteristic inspection control unit 52 waits for an inspection standby OK signal from the line control unit 51 and performs a measurement sequence of the magnetic sensor element 100. The magnetic field generation unit 53 applies a constant direct current to the magnetic field generator 1 in accordance with a control signal from the characteristic inspection control unit 52. The MPX (multiplex) 54 is a device that performs time division according to a control signal from the characteristic inspection control unit 52. The inspection unit 55 includes a pulse counter that measures the signal waveform of the magnetic sensor element 100. The conveyance line 56 is composed of a conveyor. The magnetic shield member 57 is made of permalloy and is formed so as to cover the entire magnetic field generator 1. The magnetic shield member 57 is provided to suppress the influence of geomagnetism. The data storage unit 58 is a device that stores a certain amount of measurement data and machining data obtained by the characteristic inspection control unit 52, and is assumed to be a hard disk drive (HDD) of a personal computer, for example. The display 59 is provided for displaying measurement data and the like.

  Here, in this embodiment, the sensor mounting member 21 capable of mounting a plurality of magnetic sensor elements 100 to be inspected is set on the transport line 56. The sensor placement member 21 is transported to the measurement unit by the transport line 56. A plurality of inspection probes 22 are installed above the measurement unit so as to be movable in the vertical direction. The inspection probe 22 is in electrical contact with the magnetic sensor element 100, and is made of a nonmagnetic and conductive material (for example, a Cu-based material).

  In the inspection method by the inspection apparatus of the present embodiment, the characteristic inspection control unit 52 waits for the inspection standby OK signal from the line control unit 51 and performs the following measurement sequence. Specifically, as shown in FIG. 11, the magnetic sensor 100 to be inspected is arranged on the sensor mounting member 21 with a predetermined interval. In this case, the magnetic sensor element 100 is disposed so that the magnetic sensitive axis direction and the magnetic field application direction are parallel to each other. Then, the sensor mounting member 21 is placed on the transport line 56 and transported to the measurement unit. When the sensor mounting member 21 is transported within the uniform magnetic field generation region of the magnetic field generator 1, the transport line 56 is stopped. In this state, the characteristic of the magnetic sensor element 100 is measured by lowering the inspection probe 22 and bringing the inspection probe 22 into contact with each magnetic sensor element 100. When measuring the characteristics of the magnetic sensor element 100, the output (voltage, etc.) of the magnetic sensor element 100 is measured in a state where there is no magnetic field and in a state where a magnetic field is applied. The characteristics may be measured by polarity reversal or change in magnetic field application amount. Alternatively, the probe may be fixedly installed, and after the sensor placement member has moved to the measurement unit, the sensor placement member may be pushed up toward the probe.

  Since the characteristic is measured by one inspection unit 55, it is measured in a time division manner using an MPX (multiplex) 54. The quality of the magnetic sensor element 100 is determined based on the obtained measurement data.

  In this embodiment, as described above, the magnetic field generator 1 capable of generating a magnetic field that is long and uniform in the longitudinal direction (X direction in FIG. 1) without increasing the size of the apparatus is provided in the sensor inspection apparatus 50. By using it, the magnetic field generator 1 can be easily incorporated into an automated line. Thereby, inspection efficiency can be improved significantly.

  In the present embodiment, the inspection probe 22 shown in FIG. 11 is made of a nonmagnetic and conductive material, so that the inspection probe 22 is nonmagnetic. It is possible to suppress adverse effects during inspection. Thereby, inspection accuracy can be improved.

  In the present embodiment, by providing the magnetic shield member 57 made of permalloy so as to surround the magnetic field generator 1, it is possible to suppress the influence of geomagnetism when the magnetic sensor element 100 is inspected.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

  For example, in the said embodiment, the 1st magnetic field generation member 11, the 2nd magnetic field generation member 12, and the connection members 13 and 14 of the magnetic field generator 1 are the Sumitomo which has the composition of 78Ni-5Mo-4Cu-Fe which is an example of a permalloy. Although an example formed by PC-2 manufactured by Special Metal Co., Ltd. has been shown, the present invention is not limited to this, and any material having a saturation magnetic flux density of 0.4 kA / m or more and a coercive force of 2.0 A / m or less. For example, another permalloy made of a Ni—Fe alloy may be used. For example, Sumitomo Special Metals Co., Ltd. having a composition of 80Ni—Fe, Sumitomo Special Metals Co., Ltd., PC-17, Sumitomo Special Metals Co., Ltd. having a composition of 80Ni-5Mo—Fe, Sumitomo Special Metals Co., Ltd. having a composition of 38Ni-8Cr—Fe PD-3, 5 manufactured, etc. can be used.

  Moreover, in the said embodiment, although the example which measures the fluxgate type | mold magnetic sensor element as an example of the sensor of this invention with the sensor test | inspection apparatus was shown, this invention is not limited to this, The sensor test | inspection apparatus of this invention is The present invention can be applied not only to sensor elements but also to inspection of ICs incorporating sensor elements. It can also be used for inspection of sensors such as Hall elements, MR elements, and MI elements.

It is the perspective view which showed the magnetic field generator by one Embodiment of this invention. It is the schematic for demonstrating the winding direction of the coil of the magnetic field generator by one Embodiment shown in FIG. It is a top view of the magnetic field generator by one Embodiment shown in FIG. It is a front view of the magnetic field generator by one Embodiment shown in FIG. It is a right view of the magnetic field generator by one Embodiment shown in FIG. It is the figure which showed the magnetic field distribution of the opposing direction (Y direction) of the magnetic field generator by one Embodiment of this invention. It is the figure which showed the magnetic field distribution of the longitudinal direction (X direction) of the magnetic field generator by one Embodiment of this invention. It is the figure which showed the magnetic field distribution of the central axis direction (opposite direction) of the Helmholtz coil by a comparative example. It is the figure which showed the magnetic field distribution of the longitudinal direction of the Helmholtz coil by a comparative example. It is the schematic which showed the whole structure of the sensor test | inspection apparatus using the magnetic field generator shown in FIG. It is the schematic which showed the measurement part of the sensor test | inspection apparatus shown in FIG.

Explanation of symbols

1 Magnetic field generator (magnetic field generator for sensor inspection)
DESCRIPTION OF SYMBOLS 11 1st magnetic field generation member 11a 1st cavity part 12 2nd magnetic field generation member 12a 2nd cavity part 13, 14 Connection member 15 Coil 21 Sensor mounting member 22 Inspection probe 50 Sensor inspection apparatus 51 Line control unit 52 Characteristic inspection control unit 53 Magnetic field generation unit 54 MPX (multiplex)
55 Inspection unit 56 Transport line 57 Magnetic shield member 58 Data storage unit 59 Display

Claims (10)

A first magnetic field generating member made of a magnetic material having an elongated first cavity,
A second magnetic field generating member made of a magnetic material, which is disposed so as to face the first magnetic field generating member at a predetermined interval and has an elongated second cavity at a position corresponding to the first cavity. When,
A coil for generating a magnetic field in the first magnetic field generating member and the second magnetic field generating member,
The elongated first and second cavities are formed so as to extend in a direction crossing a direction in which the first magnetic field generating member and the second magnetic field generating member are opposed to each other. apparatus.   2. The magnetic field generator for sensor inspection according to claim 1, wherein the first magnetic field generating member and the second magnetic field generating member are made of a Ni—Fe alloy having a coercive force of 2.0 A / m or less. A pair of connecting members provided at both longitudinal ends of the first magnetic field generating member and the second magnetic field generating member and connecting the first magnetic field generating member and the second magnetic field generating member;
The magnetic field generator for sensor inspection according to claim 1 or 2, wherein the coil is wound around the pair of connecting members on the first magnetic field generating member side and the second magnetic field generating member side so as to be continuous. .   The magnetic field generator for sensor inspection according to claim 3, wherein the connecting member is made of a Ni—Fe-based alloy having a coercive force of 2.0 A / m or less.   The magnetic field generator for sensor inspection according to any one of claims 1 to 4, wherein the first cavity part and the second cavity part have a rectangular shape having a substantially uniform short direction length.   The magnetic field generator for sensor inspection according to any one of claims 1 to 5, wherein a substantially uniform magnetic field is generated in a space where the elongated first cavity and the second cavity are opposed to each other.   The magnetic field generator for sensor inspection according to any one of claims 1 to 6, further comprising a magnetic shield member arranged so as to cover the first magnetic field generating member and the second magnetic field generating member. A first magnetic field generating member made of a magnetic material having an elongated first cavity portion is disposed so as to face the first magnetic field generating member with a predetermined interval, and corresponds to the first cavity portion. Including a second magnetic field generating member made of a magnetic material having an elongated second cavity at a position, the first magnetic field generating member and a coil for generating a magnetic field in the second magnetic field generating member, The first cavity portion and the second cavity portion are formed so as to extend in a direction intersecting with a direction in which the first magnetic field generating member and the second magnetic field generating member are opposed to each other. And
A sensor placement member capable of placing a plurality of sensor elements at a predetermined interval;
A transport unit for transporting the sensor mounting member to the measurement unit;
A sensor inspection apparatus, comprising: an inspection probe that is disposed in the measurement unit and inspects the plurality of sensor elements.   The sensor inspection apparatus according to claim 8, wherein the inspection probe is made of a nonmagnetic and conductive material that is in electrical contact with the sensor element.   The sensor test | inspection apparatus of Claim 8 or 9 further provided with the magnetic shielding member arrange | positioned so that the said magnetic field application part may be covered.

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