JP2005083271A5 - - Google Patents
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- Publication number
- JP2005083271A5 JP2005083271A5 JP2003317102A JP2003317102A JP2005083271A5 JP 2005083271 A5 JP2005083271 A5 JP 2005083271A5 JP 2003317102 A JP2003317102 A JP 2003317102A JP 2003317102 A JP2003317102 A JP 2003317102A JP 2005083271 A5 JP2005083271 A5 JP 2005083271A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003317102A JP2005083271A (en) | 2003-09-09 | 2003-09-09 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003317102A JP2005083271A (en) | 2003-09-09 | 2003-09-09 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005083271A JP2005083271A (en) | 2005-03-31 |
| JP2005083271A5 true JP2005083271A5 (en) | 2006-10-12 |
Family
ID=34416794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003317102A Pending JP2005083271A (en) | 2003-09-09 | 2003-09-09 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005083271A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5263820B2 (en) * | 2008-07-10 | 2013-08-14 | 常広 武田 | Pump device |
| WO2014045438A1 (en) * | 2012-09-24 | 2014-03-27 | 株式会社島津製作所 | Turbomolecular pump |
| DE102013203421A1 (en) * | 2013-02-28 | 2014-08-28 | Pfeiffer Vacuum Gmbh | vacuum pump |
| JP6375631B2 (en) * | 2014-02-05 | 2018-08-22 | 株式会社島津製作所 | Turbo molecular pump |
| JP7138167B2 (en) * | 2018-05-30 | 2022-09-15 | エドワーズ株式会社 | Vacuum pump and its cooling parts |
| JP2020023949A (en) * | 2018-08-08 | 2020-02-13 | エドワーズ株式会社 | Vacuum pump, cylindrical portion used in vacuum pump, and base portion |
| JP7306845B2 (en) * | 2019-03-26 | 2023-07-11 | エドワーズ株式会社 | Vacuum pumps and vacuum pump components |
| GB2600476B (en) * | 2020-11-02 | 2023-02-08 | Edwards Korea Ltd | Thermal management system |
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2003
- 2003-09-09 JP JP2003317102A patent/JP2005083271A/en active Pending