JP2005081279A - Work surface treatment apparatus - Google Patents

Work surface treatment apparatus Download PDF

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JP2005081279A
JP2005081279A JP2003317482A JP2003317482A JP2005081279A JP 2005081279 A JP2005081279 A JP 2005081279A JP 2003317482 A JP2003317482 A JP 2003317482A JP 2003317482 A JP2003317482 A JP 2003317482A JP 2005081279 A JP2005081279 A JP 2005081279A
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cleaning
workpiece
liquid
cleaning liquid
chemical
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Shusaku Todoroki
周作 轟木
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Nippon Paint Plant Engineering Co Ltd
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Nippon Paint Plant Engineering Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a work surface treatment apparatus with which enlargement of the facility is suppressed and the waste amount of a washing solution is suppressed to the minimum in a tact type work surface treatment. <P>SOLUTION: In a first washing part 18 immediately after a chemical conversion treatment part (a chemical solution treatment part)16, a small amount of the washing solution is sprayed by a spray nozzle 28 to a work 12 immediately after the chemical conversion treatment for carrying out pre-washing, and successively, the washing solution is showered by a shower nozzle 30 to the work 12 for main washing after the pre-washing. When pre-washing, a valve MV-3 is closed and a valve MV-4 is opened to discharge only the pre-washing solution. When main washing, the valve MV-3 is opened and the valve MV-4 is closed to turn the main washing solution back to a storage tank 24 to be repeatedly circulated and used for the washing. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、ワーク表面処理装置、特に、薬液でワークの表面処理を行った後にそのワークの洗浄を行うワーク表面処理装置における洗浄液削減の改善に関する。   The present invention relates to an improvement in cleaning liquid reduction in a workpiece surface treatment apparatus, and more particularly, in a workpiece surface treatment apparatus that cleans a workpiece after the workpiece is surface treated with a chemical solution.

従来から機械部品等(以下ワークという)に対して塗装処理を行う場合、実際の塗料の塗布に先立つ前処理工程として、ワークに付着した油脂物質(プレス加工や機械加工等の際に付着するマシン油や防錆油等)を洗い流す脱脂処理やワークの腐食防止や塗装工程における塗料の密着性を増大させる化成処理が行われる。このような脱脂処理や化成処理はそれぞれ専用の薬液がスプレー方式やディップ方式によってワークに塗布され、それぞれの表面処理が行われるが、各処理工程の後には、脱脂剤や過剰に付着した化成処理剤を除去、すなわち洗い流すために洗浄工程が配置される。洗浄方法としては、シャワーノズルを用いてワークに対して洗浄液(通常、所定純度以上の水等)をシャワーリングするシャワーリング方式や洗浄液が満たされた浴槽にワーク全体を浸けて洗浄を行うディップ方式等がある。この洗浄液による洗浄の善し悪しにより塗装工程における塗装品質が大きく左右される。   Conventionally, when painting processing on machine parts (hereinafter referred to as workpieces), as a pre-treatment process prior to the actual application of paint, oil and fat substances adhering to the workpiece (machines that adhere to the workpiece during pressing or machining) A degreasing treatment for washing away oil, rust-preventing oil, etc., a chemical treatment for preventing the corrosion of the workpiece and increasing the adhesion of the paint in the painting process. In such degreasing and chemical conversion treatments, a dedicated chemical solution is applied to the workpiece by a spray method or a dip method, and each surface treatment is performed. However, after each treatment step, a degreasing agent or excessive chemical conversion treatment is applied. A cleaning step is arranged to remove, i.e. wash away, the agent. Cleaning methods include a shower ring method in which a cleaning liquid (usually water of a predetermined purity or higher) is showered on the work using a shower nozzle, and a dip method in which the entire work is immersed in a bath filled with the cleaning liquid. Etc. The quality of the coating in the coating process is greatly affected by the quality of the cleaning with the cleaning liquid.

ところで、洗浄工程において、常時新水(未使用の洗浄液)を使用し、1回の洗浄でその洗浄液を廃棄した場合、洗浄液の消費量は膨大な量になると共に、廃棄コストも増加する。そのため、通常、脱脂工程や化成処理工程の後の洗浄工程は、2工程以上設けると共に、各洗浄工程では、使用した洗浄液の循環利用を行っている。つまり、一度用いた洗浄液を回収し、再度使用している。この場合、後段の洗浄工程に進むに連れて薬液は稀釈されるので、洗浄工程の段数が多いほど洗浄効果が増大する。しかし、洗浄液の再利用の回数増加に伴い、洗浄液中の薬液の割合が増加する。そのため、最後段の洗浄工程のみに所定量の新水を供給し、そこでオーバーフローした洗浄液(供給した新水の量に相当する量)を前段の洗浄工程に供給し、さらにそこでオーバーフローした洗浄液を前段の洗浄工程に供給することを繰り返している。そして、薬液処理工程(脱脂工程や化成処理工程)の直後の洗浄工程でオーバーフローした洗浄液のみを廃棄している。このように、薬液処理工程の直後の洗浄工程から順に薬液含有量の少ない洗浄液で段階的に洗浄を行うことにより洗浄液の廃棄量を低減しつつ、ワーク洗浄効率を向上している。この場合、最後段の洗浄工程における洗浄液濃度が薬液処理工程の直後の洗浄液濃度の例えば1/1000になるように新水の供給が行われている。また、さらに、効率的な薬液除去を行い、後続の洗浄工程における処理を軽減する目的で、薬液処理後のワークにエアブローを施し、ワークに付着した薬液をある程度吹き飛ばして液切りを行い、その後、洗浄処理を行うことにより、薬液除去効率を向上させようとする提案がある(例えば、特許文献1)。   By the way, when fresh water (unused cleaning liquid) is always used in the cleaning process and the cleaning liquid is discarded by one cleaning, the consumption of the cleaning liquid becomes enormous and the disposal cost also increases. Therefore, usually, two or more cleaning steps after the degreasing step and the chemical conversion treatment step are provided, and in each cleaning step, the used cleaning liquid is circulated. That is, the cleaning liquid that has been used once is collected and used again. In this case, since the chemical solution is diluted as the process proceeds to the subsequent cleaning step, the cleaning effect increases as the number of cleaning steps increases. However, as the number of times the cleaning liquid is reused, the ratio of the chemical liquid in the cleaning liquid increases. Therefore, a predetermined amount of fresh water is supplied only to the last cleaning step, and the overflowed cleaning solution (the amount corresponding to the amount of supplied fresh water) is supplied to the previous cleaning step, and the overflowed cleaning solution is further supplied to the previous step. It is repeatedly supplied to the cleaning process. And only the washing | cleaning liquid which overflowed in the washing | cleaning process immediately after a chemical | medical solution processing process (a degreasing process or a chemical conversion treatment process) is discarded. In this way, workpiece cleaning efficiency is improved while reducing the waste amount of the cleaning liquid by performing the cleaning step by step with the cleaning liquid having the small chemical content in order from the cleaning process immediately after the chemical processing process. In this case, fresh water is supplied so that the concentration of the cleaning liquid in the final cleaning process is, for example, 1/1000 of the cleaning liquid concentration immediately after the chemical processing process. In addition, for the purpose of efficiently removing the chemical solution and reducing the processing in the subsequent cleaning process, air blow is applied to the workpiece after the chemical solution treatment, and the chemical solution attached to the workpiece is blown off to a certain extent, and then drained. There is a proposal to improve the chemical removal efficiency by performing a cleaning process (for example, Patent Document 1).

特開平8−218188号公報JP-A-8-218188

ワークの表面処理を行う場合、処理対象となるワークが大量生産の場合、ワークを高速コンベアー等で搬送しながら連続的に処理を順次行う連続処理方式が採用される。連続処理方式の場合ワークは連続したトンネル状のブース内を搬送されるため、ブースの全長を必要ゾーン数に適宜分割することにより前述したような液切り等、洗浄工程での処理を軽減するための工程を容易に形成することができる。また、各処理ゾーンは相互の干渉を防止する必要があるため予めある程度処理工程間に空間が保たれている。そのため、その空間部分を利用して液切りゾーン等を形成することもできる。一方、少量生産の場合、各処理工程における処理時間の調節が容易なタクト方式が採用されている。タクト方式の場合、個別の処理ブースが準備され、オーバーヘッドコンベア等により吊り下げられたワークは、各処理ブースの位置で停止し、降下することにより処理ブースに投入される。すなわち、ワークに対して間欠的な処理が施される。   When performing the surface treatment of the workpiece, when the workpiece to be processed is mass-produced, a continuous processing method is adopted in which the workpiece is sequentially processed while being conveyed by a high-speed conveyor or the like. In the case of the continuous processing method, since the work is transported in a continuous tunnel-shaped booth, the processing in the washing process such as liquid draining as described above is reduced by appropriately dividing the entire length of the booth into the required number of zones. This process can be easily formed. In addition, since it is necessary to prevent mutual interference between the processing zones, a space is maintained in advance between the processing steps to some extent. Therefore, a liquid draining zone or the like can be formed using the space portion. On the other hand, in the case of small-scale production, a tact method is adopted in which the processing time in each processing step can be easily adjusted. In the case of the tact method, individual processing booths are prepared, and the work suspended by an overhead conveyor or the like stops at the position of each processing booth and is dropped into the processing booth. That is, intermittent processing is performed on the workpiece.

この場合、処理ブースは、各処理毎に形成されているため、前述したような液切り等、洗浄工程での処理を軽減するための工程を薬液処理工程の直後の洗浄工程で行おうとした場合、排除した薬液が洗浄工程と同一の領域に入るため、そこの洗浄工程における薬液含有量が増大し、結果的に、洗浄工程で使用する洗浄液の薬液による汚染度が増加し所望の洗浄効果を得られなくなる。一方、液切り用の新たなブースを新設すると、塗装処理装置全体の規模が大型化したり、設備コストの増加等を招いてしまうという問題が生じる。もちろん、洗浄工程の数を増加すれば、個々の洗浄工程における洗浄負荷は軽減されるが、設備規模が増大する。   In this case, since the processing booth is formed for each processing, when the process for reducing the processing in the cleaning process such as draining as described above is performed in the cleaning process immediately after the chemical processing process. Since the excluded chemical enters the same area as the cleaning process, the chemical content in the cleaning process increases, and as a result, the degree of contamination of the cleaning liquid used in the cleaning process increases with the desired cleaning effect. It can no longer be obtained. On the other hand, when a new booth for liquid draining is newly established, there arises a problem that the scale of the entire coating processing apparatus is increased, and the equipment cost is increased. Of course, increasing the number of cleaning steps reduces the cleaning load in each cleaning step, but increases the equipment scale.

そこで、本発明の目的は、タクト方式のワーク表面処理装置において、設備の大型化を抑制しつつ、洗浄液の廃棄量を最小限に抑えることのできるワーク表面処理装置を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide a work surface treatment apparatus capable of minimizing the amount of cleaning liquid discarded while suppressing an increase in equipment size in a tact type work surface treatment apparatus.

本発明によれば、薬液処理部の直後の洗浄部において、前洗浄と本洗浄の2種類の洗浄が行われる。そして、前洗浄に使用した洗浄液のみが廃棄され、本洗浄で使用した洗浄液は、回収し再度前洗浄または本洗浄に用いる。   According to the present invention, two types of cleaning, pre-cleaning and main cleaning, are performed in the cleaning unit immediately after the chemical solution processing unit. Then, only the cleaning liquid used for the pre-cleaning is discarded, and the cleaning liquid used for the main cleaning is recovered and used again for the pre-cleaning or the main cleaning.

本発明の一態様によれば、搬送されてくるワークに対し、処理工程毎に間欠的に表面処理を行うタクト方式の処理装置であって、前記ワークに対し薬液による表面処理を行う薬液処理部と、前記薬液処理部の次段以降に設けられ、薬液処理後のワークに洗浄液を付与し前記ワークに付着した液を置換除去する洗浄部と、を含むワーク表面処理装置において、前記洗浄部は複数段形成され、最後段の洗浄部には当該最後段の洗浄部で使用する洗浄液の濃度を所定値以下に維持する新水を供給する新水供給手段が設けられ、各洗浄部には、前記新水の供給によりオーバーフローした洗浄液を順次前段の洗浄部に戻し供給する戻し供給手段が設けられ、前記薬液処理部の直後の洗浄部には、洗浄液を薬液処理後のワークに供給し、ワークの前洗浄を行う前洗浄手段と、前洗浄後のワークに対し洗浄液を供給し本洗浄を行う本洗浄手段と、前記前洗浄に使用した洗浄液と本洗浄で使用した洗浄液を分別し、前洗浄で使用した洗浄液を排出し、本洗浄で使用した洗浄液を当該洗浄部で循環再利用するために分離する液分離手段と、を含む。   According to one aspect of the present invention, there is a tact-type processing apparatus that intermittently performs surface treatment for each work process on a conveyed workpiece, and a chemical treatment unit that performs surface treatment with a chemical on the workpiece. And a cleaning unit that is provided at a subsequent stage of the chemical processing unit and that applies a cleaning liquid to the workpiece after the chemical processing and replaces and removes the liquid adhering to the workpiece. A plurality of stages are formed, and the last cleaning section is provided with fresh water supply means for supplying fresh water to maintain the concentration of the cleaning liquid used in the last cleaning section below a predetermined value. Return supply means is provided for sequentially supplying the cleaning liquid overflowed by the supply of the fresh water back to the preceding cleaning section. The cleaning section immediately after the chemical processing section supplies the cleaning liquid to the workpiece after the chemical processing, Before cleaning The pre-cleaning means, the main cleaning means for supplying the cleaning liquid to the pre-cleaned workpiece and performing the main cleaning, the cleaning liquid used for the pre-cleaning and the cleaning liquid used for the main cleaning are separated, and the cleaning liquid used for the pre-cleaning And a liquid separation means for separating the cleaning liquid used in the main cleaning in order to circulate and reuse it in the cleaning section.

この構成によれば、薬液処理直後で高濃度の薬液が付着したワークは、まず前洗浄で、付着した高濃度の薬液が置換除去される。そして、前洗浄の結果、汚染度が増加した洗浄液のみを廃棄する。一方、本洗浄は、前洗浄の結果、薬液の付着度が低下したワークに対して行うので、本洗浄後の薬液は薬液の含有量が低下する。その結果、本洗浄に使用した洗浄液を洗浄に再利用することができる。すなわち、前洗浄後の洗浄液を分別し廃棄することにより洗浄液の廃棄量を最小限に抑えつつ、同一の洗浄部において、2段階の洗浄が可能となり、後続する洗浄工程での処理を軽減することができる。また、新たな工程を設ける必要がなく、設備に大型化を抑制することができる。   According to this configuration, a workpiece to which a high-concentration chemical solution is attached immediately after the chemical-solution treatment is first subjected to pre-cleaning to replace and remove the attached high-concentration chemical solution. Then, only the cleaning liquid whose pollution degree has increased as a result of the pre-cleaning is discarded. On the other hand, since the main cleaning is performed on the workpiece having the chemical solution lowered as a result of the pre-cleaning, the chemical solution content of the chemical solution after the main cleaning decreases. As a result, the cleaning liquid used for the main cleaning can be reused for cleaning. That is, by separating and discarding the cleaning liquid after the pre-cleaning, it is possible to perform two-stage cleaning in the same cleaning section while minimizing the amount of cleaning liquid discarded, and to reduce the processing in the subsequent cleaning process. Can do. Further, there is no need to provide a new process, and the equipment can be prevented from being enlarged.

なお、前記前洗浄手段はスプレー形式で行うことが可能であり、本洗浄手段はスプレーまたはシャワー形式で行うことが可能である。このように、スプレーまたはシャワーのタイミング切り換えにより前洗浄と本洗浄と分離を容易に行うことができる。   The pre-cleaning means can be performed in a spray form, and the main cleaning means can be performed in a spray or shower form. Thus, pre-cleaning, main cleaning, and separation can be easily performed by switching the timing of spraying or showering.

また、前記液分離手段は、前洗浄後の洗浄液と本洗浄後の洗浄液の排水経路を切り換える切換バルブとすることができる。   Further, the liquid separation means can be a switching valve that switches a drain path between the cleaning liquid after the pre-cleaning and the cleaning liquid after the main cleaning.

この場合、同一の洗浄部の下部に貯留された前洗浄後の洗浄液と、本洗浄後の洗浄液とを容易に分離することができる。   In this case, the cleaning liquid after the pre-cleaning stored in the lower part of the same cleaning section and the cleaning liquid after the main cleaning can be easily separated.

また、前記切換バルブは、前洗浄完了後所定時間経過してから排水経路の切り換え動作を行うことが望ましい。   Further, it is preferable that the switching valve performs the drainage path switching operation after a predetermined time has elapsed after completion of the pre-cleaning.

この場合、前洗浄に使用した洗浄液の分別を確実に行うことができる。   In this case, the cleaning liquid used for the pre-cleaning can be reliably separated.

なお、前記前洗浄で使用する洗浄液量と当該洗浄部に戻し供給される後段の洗浄部の洗浄液量とが略一致していることが望ましい。   In addition, it is desirable that the amount of the cleaning liquid used in the pre-cleaning and the amount of the cleaning liquid in the subsequent cleaning unit to be supplied back to the cleaning unit are substantially the same.

この場合、薬液処理後の洗浄部の洗浄液の汚染度を所定値に維持することが可能であり、洗浄部の洗浄能力の維持を容易に行うことができる。   In this case, it is possible to maintain the degree of contamination of the cleaning liquid in the cleaning section after the chemical liquid treatment at a predetermined value, and the cleaning performance of the cleaning section can be easily maintained.

この発明によれば、タクト方式のワーク表面処理装置において、薬液処理後の洗浄部において、前洗浄と本洗浄を行う。前洗浄を行うことで、本洗浄及び後続する洗浄の負荷を軽減し効率的な洗浄処理を行うことができる。また、前洗浄後の薬液濃度の高い洗浄液のみを排出するので洗浄液の排出量の軽減、すなわち新水の供給量の軽減を行うことができる。また、前洗浄と本洗浄とを分別して行うことにより同一の洗浄部の使用が可能になり設備規模の増大を伴うことなく、良好な洗浄処理を行うことができる。   According to this invention, in the tact-type workpiece surface treatment apparatus, pre-cleaning and main cleaning are performed in the cleaning section after the chemical solution processing. By performing the pre-cleaning, it is possible to reduce the load of the main cleaning and the subsequent cleaning and perform an efficient cleaning process. Further, since only the cleaning liquid having a high chemical concentration after the pre-cleaning is discharged, the discharge amount of the cleaning liquid can be reduced, that is, the supply amount of fresh water can be reduced. In addition, by performing the pre-cleaning and the main cleaning separately, it is possible to use the same cleaning unit, and it is possible to perform a good cleaning process without increasing the equipment scale.

以下、本発明を実施するための好適な形態(以下、実施形態という)を図面に基づき説明する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments (hereinafter referred to as embodiments) for carrying out the invention will be described with reference to the drawings.

図1は、本実施形態のワークの表面処理装置10の構成概念図である。本実施形態において、ワークとは、例えばプレス加工や機械加工等で形成され、塗装処理を必要とする部品であり、塗装処理のための前処理、例えば、ワークに付着した油脂物質(プレス加工や機械加工等の際に付着するマシン油や防錆油等)を洗い流す脱脂処理やワークの腐食防止や塗装工程における塗料の密着性を増大させる目的で化成処理を必要とする機械部品、その他、脱脂処理や化成処理等の前処理を必要とする塗装部品であれば、材質、形状等任意である。   FIG. 1 is a conceptual diagram of a configuration of a workpiece surface treatment apparatus 10 according to the present embodiment. In the present embodiment, the workpiece is a part that is formed by, for example, pressing or machining and requires a coating process, and pre-processing for the coating process, for example, an oil or fat substance (press processing or Degreasing that removes machine oil and rust preventive oil adhering during machining, etc., machine parts that require chemical conversion to prevent corrosion of the workpiece and increase the adhesion of the paint in the painting process, etc. As long as it is a painted part that requires pretreatment such as treatment or chemical conversion treatment, the material, shape, etc. are arbitrary.

処理対象のワーク12は、オーバーヘッドタイプのコンベア14に吊り下げられ、複数配列された各処理工程を間欠的に移動することができる。すなわち、図1において矢印で示すように、ワーク12は、各処理工程間をコンベア14の軌道に沿った移動と、各処理工程の直上位置において、停止し上下移動を行うことが可能である。図1の場合、一例として、化成処理部(薬液処理部)16の後段に、第1洗浄部18、第2洗浄部20、第3洗浄部22の3段の洗浄部が配置されている。そして、ワーク12はコンベア14の昇降機構(不図示)により化成処理部16、第1洗浄部18、第2洗浄部20、第3洗浄部22の処理槽に降下し、その中で所定の処理が行われる。例えば、化成処理部16の場合、処理槽内には、薬液として化成処理剤が満たされ、ワーク12を所定時間浸漬することによりワーク12の表面に防錆膜等が形成される。また、第1洗浄部18では、ワーク12が中空ブース18a内に降下した後洗浄水供給装置による洗浄が行われ、洗浄後滴下した洗浄液は別途設けられた貯留タンク24に送られる。第2洗浄部20、第3洗浄部22では、化成処理部16と同様に槽内に洗浄液(例えば、水)が満たされ、ワーク12が所定時間浸漬されたり、洗浄液内で任意の方向に振動させられることにより、ワーク12の表面に付着した液(薬液や、前段の洗浄で使用された洗浄液)を置換除去される。   The workpiece 12 to be processed is suspended on an overhead type conveyor 14 and can move intermittently through a plurality of processing steps. That is, as shown by the arrows in FIG. 1, the workpiece 12 can move between the processing steps along the path of the conveyor 14 and stop and move up and down at a position immediately above each processing step. In the case of FIG. 1, as an example, a three-stage cleaning unit including a first cleaning unit 18, a second cleaning unit 20, and a third cleaning unit 22 is disposed in the subsequent stage of the chemical conversion processing unit (chemical solution processing unit) 16. Then, the workpiece 12 is lowered to the treatment tanks of the chemical conversion processing unit 16, the first cleaning unit 18, the second cleaning unit 20, and the third cleaning unit 22 by an elevating mechanism (not shown) of the conveyor 14, and predetermined processing is performed therein. Is done. For example, in the case of the chemical conversion treatment unit 16, the chemical conversion treatment agent is filled in the treatment tank as a chemical solution, and a rust prevention film or the like is formed on the surface of the work 12 by immersing the work 12 for a predetermined time. Moreover, in the 1st washing | cleaning part 18, after the workpiece | work 12 descend | falls in the hollow booth 18a, washing | cleaning by a washing water supply apparatus is performed, and the washing | cleaning liquid dripped after washing | cleaning is sent to the storage tank 24 provided separately. In the 2nd washing | cleaning part 20 and the 3rd washing | cleaning part 22, the washing | cleaning liquid (for example, water) is satisfy | filled in the tank similarly to the chemical conversion treatment part 16, and the workpiece | work 12 is immersed for a predetermined time, or it vibrates in arbitrary directions in a washing | cleaning liquid. As a result, the liquid adhering to the surface of the workpiece 12 (chemical solution or cleaning liquid used in the previous cleaning) is replaced and removed.

なお、洗浄部の段数は任意であり、必要に応じてさらに段数を増やしてもよし、2段としてもよい。例えば、薬液処理部が脱脂処理の場合、洗浄部は通常2段で構成される。   Note that the number of stages of the cleaning unit is arbitrary, and the number of stages may be further increased as necessary, or may be two. For example, when the chemical solution processing unit is a degreasing process, the cleaning unit is usually configured in two stages.

ところで、薬液処理を行ったワーク12の洗浄を行う場合、各洗浄部には薬液が順次持ち出される。その結果、貯留タンク24及び第2洗浄部20及び第3洗浄部22の薬液濃度は増加し、洗浄効率が低下する。そこで、本実施形態においては、最後段の第3洗浄部22に新水供給部26から常時新水を供給している。ここで、新水とは、所定純度以上の洗浄液(例えば、未使用の水)である。第3洗浄部22には、新水の供給により槽内の洗浄液が所定量を超えたらオーバーフローするように、スロット22aが形成されている。そして、オーバーフローした洗浄液はその前段、つまり第2洗浄部20に戻し供給されるようになっている。同様に、第2洗浄部20にはスロット20aが形成され、第3洗浄部22からの戻し供給によりオーバーフローした洗浄液は、スロット20aを介して第1洗浄部18に接続された貯留タンク24に戻し供給されるようになっている。なお、第1洗浄部18の貯留タンク24からは、後述する前洗浄で使用される所定量の洗浄液が排出されるので、貯留タンク24がオーバーフローすることはない。ただし、何らかの原因により、第2洗浄部20から貯留タンク24に供給される洗浄液の量が前洗浄で使用するために貯留タンク24から持ち出される量より多くなってしまった場合、洗浄液が貯留タンク24から意図せずに溢れてしまう。そこで、貯留タンク24においても第2洗浄部20のスロット20aと同様なスロットを設け、貯留タンク24の洗浄液が所定量をオーバーした場合、そのオーバーフロー分を確実に排水処理経路に導けるようにしておくことが望ましい。   By the way, when washing | cleaning the workpiece | work 12 which performed the chemical | medical solution process, a chemical | medical solution is sequentially taken out to each washing | cleaning part. As a result, the chemical concentrations of the storage tank 24, the second cleaning unit 20, and the third cleaning unit 22 increase, and the cleaning efficiency decreases. Therefore, in the present embodiment, fresh water is constantly supplied from the fresh water supply unit 26 to the third cleaning unit 22 at the last stage. Here, the fresh water is a cleaning liquid (for example, unused water) having a predetermined purity or higher. The third cleaning unit 22 is formed with a slot 22a so as to overflow when the cleaning liquid in the tank exceeds a predetermined amount due to the supply of fresh water. Then, the overflowing cleaning liquid is supplied back to the previous stage, that is, the second cleaning section 20. Similarly, a slot 20a is formed in the second cleaning unit 20, and the cleaning liquid overflowed by the return supply from the third cleaning unit 22 is returned to the storage tank 24 connected to the first cleaning unit 18 through the slot 20a. It comes to be supplied. In addition, since the predetermined amount of washing | cleaning liquid used by the pre-cleaning mentioned later is discharged | emitted from the storage tank 24 of the 1st washing | cleaning part 18, the storage tank 24 does not overflow. However, if for some reason the amount of cleaning liquid supplied from the second cleaning unit 20 to the storage tank 24 becomes larger than the amount taken out of the storage tank 24 for use in pre-cleaning, the cleaning liquid is stored in the storage tank 24. Will overflow unintentionally. Therefore, the storage tank 24 is also provided with a slot similar to the slot 20a of the second cleaning unit 20 so that when the cleaning liquid in the storage tank 24 exceeds a predetermined amount, the overflow can be reliably guided to the waste water treatment path. It is desirable.

このように、最後段の洗浄部に新水を供給し、オーバーフローした洗浄液を順次前段側に戻し供給することにより、戻し供給を受けた洗浄部の洗浄液は、より新水に近い洗浄液により稀釈され、所定濃度以下に維持されることとなる。   In this way, by supplying fresh water to the last-stage cleaning unit and sequentially supplying the overflowed cleaning liquid back to the previous stage side, the cleaning liquid in the cleaning unit that has received the supply back is diluted with a cleaning liquid closer to fresh water. Therefore, the concentration is maintained below a predetermined concentration.

一方、第1洗浄部18は、中空ブース18aの内部に、2種類の洗浄液供給装置が配置されている。一方は中空ブース18aに投入された直後のワーク12に対して貯留タンク24からの洗浄液を供給する前洗浄用のスプレーノズル28であり、他方は、スプレーノズル28による前洗浄の完了後のワーク12に再度貯留タンク24からの洗浄液を供給する本洗浄用のシャワーノズル30である。スプレーノズル28に対する洗浄液の供給はバルブMV−1の開閉制御により行い、シャワーノズル30に対する洗浄液の供給はバルブMV−2の開閉制御により行う。   On the other hand, as for the 1st washing | cleaning part 18, two types of washing | cleaning liquid supply apparatuses are arrange | positioned inside the hollow booth 18a. One is a pre-cleaning spray nozzle 28 for supplying the cleaning liquid from the storage tank 24 to the work 12 immediately after being put into the hollow booth 18a, and the other is the work 12 after completion of the pre-cleaning by the spray nozzle 28. This is a main cleaning shower nozzle 30 for supplying the cleaning liquid from the storage tank 24 again. The supply of the cleaning liquid to the spray nozzle 28 is performed by opening / closing control of the valve MV-1, and the supply of the cleaning liquid to the shower nozzle 30 is performed by opening / closing control of the valve MV-2.

また、中空ブース18aの底面は図1に示すように一方向に傾斜しており、スプレーノズル28による前洗浄または、シャワーノズル30による本洗浄で使用された洗浄液が配管32に自然に流れ込むようになっている。配管32に流れ込んだ使用済み洗浄水は、バルブMV−3の開閉制御により貯留タンク24に戻され循環再利用されるものと、バルブMV−4の開閉制御により排水処理のために排出されるものとに分別される。   The bottom surface of the hollow booth 18a is inclined in one direction as shown in FIG. 1, so that the cleaning liquid used in the pre-cleaning by the spray nozzle 28 or the main cleaning by the shower nozzle 30 flows into the pipe 32 naturally. It has become. The used washing water that has flowed into the pipe 32 is returned to the storage tank 24 by the opening / closing control of the valve MV-3, and is recycled for waste water treatment by the opening / closing control of the valve MV-4. And are separated.

すなわち、薬液処理(図1の場合化成処理)が行われた直後のワーク12に付着した薬液(所定濃度の原液)を洗い流した薬液含有量の多い前洗浄後の洗浄液はバルブMV−4を介して排水処理に送られ、前洗浄が完了し、ある程度薬液が落ちたワーク12の洗浄を行う本洗浄に使用した洗浄液はバルブMV−3を介して貯留タンク24に送られる。   That is, the pre-cleaning cleaning liquid with a large chemical content, in which the chemical liquid (predetermined concentration) adhered to the workpiece 12 immediately after the chemical processing (chemical conversion processing in FIG. 1) is performed, is passed through the valve MV-4. The cleaning liquid used for the main cleaning for cleaning the work 12 after the pre-cleaning is completed and the chemical liquid has dropped to some extent is sent to the storage tank 24 via the valve MV-3.

なお、本実施形態において、前洗浄とは、大量の洗浄液でワーク12の完全な洗浄を行うことを意味するものではなく、スプレーノズル28により供給される少量の洗浄液がワーク12の表面を流れ落ち一通り通過する程度を意味するものである。この場合、前洗浄に使用する洗浄液の量は極少量であり、バルブMV−4を介して排水処理(廃棄)に送られる使用済み洗浄液の量は少量である。ワーク12の洗浄はワーク12の表面に、それまで付着していた液体と流れ落ちる洗浄液が置換されることによって行われるので、前洗浄を行うことによりワーク12に付着する薬液は稀釈され、実質的に後続する本洗浄における洗浄負荷(洗浄液の汚染濃度の上昇)は大きく抑制することができる。また、前洗浄で使用した洗浄液は排出し、本洗浄で使用した洗浄液のみ貯留タンク24に戻すので、原液レベルの薬液が貯留タンク24に戻されることがないので、貯留タンク24内の洗浄液の汚染濃度が極端に上昇することはなく、また、第2洗浄部20から戻し供給される薬液汚染度の低い洗浄液で貯留タンク24内の洗浄液は稀釈されるので、貯留タンク24内の洗浄液の濃度を所定値以下に容易に維持することができる。また、前洗浄で使用する洗浄液の量は、ワーク12の表面積に応じて変化するが、前洗浄で使用する洗浄液量と新水供給部26が供給する新水の量を略一致させることにより、洗浄部全体の濃度管理を容易に行うことが可能となる。   In the present embodiment, pre-cleaning does not mean that the workpiece 12 is completely cleaned with a large amount of cleaning liquid, but a small amount of cleaning liquid supplied from the spray nozzle 28 flows down the surface of the workpiece 12. It means the degree to pass through. In this case, the amount of the cleaning liquid used for the pre-cleaning is extremely small, and the amount of the used cleaning liquid sent to the waste water treatment (disposal) via the valve MV-4 is small. Cleaning of the work 12 is performed by replacing the liquid that has been adhered to the surface of the work 12 with the cleaning liquid that flows down. Therefore, the chemical liquid that adheres to the work 12 is diluted by the pre-cleaning, and substantially. The cleaning load in the subsequent main cleaning (increase in the contamination concentration of the cleaning liquid) can be greatly suppressed. In addition, since the cleaning liquid used in the pre-cleaning is discharged and only the cleaning liquid used in the main cleaning is returned to the storage tank 24, the chemical solution at the stock solution level is not returned to the storage tank 24, so that the cleaning liquid in the storage tank 24 is contaminated. The concentration does not extremely increase, and the cleaning solution in the storage tank 24 is diluted with a cleaning solution with low chemical contamination returned and supplied from the second cleaning unit 20, so the concentration of the cleaning solution in the storage tank 24 is reduced. It can be easily maintained below a predetermined value. Further, the amount of the cleaning liquid used in the pre-cleaning varies depending on the surface area of the workpiece 12, but by substantially matching the amount of the cleaning liquid used in the pre-cleaning with the amount of fresh water supplied by the new water supply unit 26, It is possible to easily manage the concentration of the entire cleaning unit.

以下、図2のフローチャートを用いて、第1洗浄部18の動作を説明する。なお、各バルブMV−1,MV−2,MV−3,MV−4の開閉制御やコンベア14によるワーク12の搬送制御を行う図示を省略した制御部には、図示を省略した各種センサ(例えば、コンベア14や昇降装置に設置されたリミットセンサや光電センサ等)からの信号が供給され、ワーク12の移動状態を監視しつつ、各バルブMV−1,MV−2,MV−3,MV−4の動作タイミングの制御に利用されている。   Hereinafter, the operation of the first cleaning unit 18 will be described with reference to the flowchart of FIG. A control unit (not shown) that performs opening / closing control of each valve MV-1, MV-2, MV-3, MV-4 and transport control of the work 12 by the conveyor 14 includes various sensors (for example, not shown). , A signal from a limit sensor, a photoelectric sensor or the like installed on the conveyor 14 or the lifting device), and monitoring the movement state of the workpiece 12, each valve MV-1, MV-2, MV-3, MV- 4 is used to control the operation timing.

まず、制御部は、コンベア14に設けられたセンサの検出結果に基づき、ワーク12が薬液処理を完了したか否か判断する(S100)。薬液処理を完了した場合、制御部は、第1洗浄部18における洗浄作業の前準備として、バルブMV−1,MV−2,MV−3,MV−4を全て閉制御する(S101)。その後、第1洗浄部18の直上に移動してきたワーク12の降下を開始する(S102)。続いて、バルブMV−1,MV−4を開制御すると共に、貯留タンク24の洗浄液を汲み上げるポンプ34の運転を開始する(S103)。この時、バルブMV−1が開いているので、スプレーノズル28から洗浄液がワーク12に向けて供給され、前洗浄が開始される。前述したように薬液処理直後のワーク12に付着した薬液と置換され流れ落ちた薬液濃度の高い洗浄液は、中空ブース18の傾斜した底面から開放されているバルブMV−4を介して系外に排出され必要に応じて排水処理が施され廃棄される。また、制御部では前洗浄の開始からの時間を計測する前洗浄タイマーをスタートさせる(S104)。   First, the control unit determines whether or not the workpiece 12 has completed the chemical processing based on the detection result of the sensor provided on the conveyor 14 (S100). When the chemical solution processing is completed, the control unit controls all the valves MV-1, MV-2, MV-3, and MV-4 to be closed as preparations for the cleaning operation in the first cleaning unit 18 (S101). Then, the descent of the workpiece 12 that has moved right above the first cleaning unit 18 is started (S102). Subsequently, the valves MV-1 and MV-4 are controlled to open, and the operation of the pump 34 that pumps up the cleaning liquid in the storage tank 24 is started (S103). At this time, since the valve MV-1 is open, the cleaning liquid is supplied from the spray nozzle 28 toward the workpiece 12, and pre-cleaning is started. As described above, the cleaning solution having a high concentration of the chemical solution that has been replaced by the chemical solution attached to the workpiece 12 immediately after the chemical processing is discharged from the system through the valve MV-4 opened from the inclined bottom surface of the hollow booth 18. If necessary, wastewater treatment is applied and discarded. Further, the control unit starts a pre-cleaning timer that measures the time from the start of pre-cleaning (S104).

制御部は、前洗浄タイマーがタイムアップしたか否かの監視を行い(S105)、前洗浄タイマーがタイムアップした場合、制御部はポンプ34の運転を停止すると共に、バルブMV−1を閉制御し、液切りタイマーをスタートさせる(S106)。前述したように、前洗浄は、少量の洗浄液をワーク12にスプレーして、表面を流れ落ちる洗浄液によってワーク12の表面に付着した薬液を置換除去するので、スプレー終了後もしばらくワーク12の表面を洗浄液が流れると共に、ワーク12の下端部に停留する場合もある。そこで、スプレー終了後所定時間(数秒〜数十秒)液切り時間を設ける。なお、この液切りの間に、ワーク12を振動させる等して液切りを促進することが望ましい。この結果、前洗浄で使用された薬液を多く含んだ洗浄液はバルブMV−4を介して確実に排出される。   The control unit monitors whether or not the pre-cleaning timer has expired (S105). When the pre-cleaning timer has expired, the control unit stops the operation of the pump 34 and controls the valve MV-1 to be closed. Then, a liquid drain timer is started (S106). As described above, in the pre-cleaning, a small amount of cleaning liquid is sprayed on the work 12 and the chemical liquid adhering to the surface of the work 12 is replaced and removed by the cleaning liquid flowing down the surface. May flow and may stop at the lower end of the workpiece 12. Therefore, a liquid draining time is provided for a predetermined time (several seconds to several tens of seconds) after the end of spraying. In addition, it is desirable to promote liquid draining by vibrating the workpiece 12 during the liquid draining. As a result, the cleaning liquid containing a large amount of the chemical liquid used in the pre-cleaning is surely discharged through the valve MV-4.

制御部は、液切りタイマーがタイムアップしたか否かの監視を行い(S107)、タイムアップした場合、バルブMV−3を開制御し、バルブMV−4を閉制御して(S108)、配管32の排水経路を貯留タンク24側に切り換える。   The control unit monitors whether or not the liquid drain timer has expired (S107). If the time has expired, the control unit opens the valve MV-3 and closes the valve MV-4 (S108). 32 drainage paths are switched to the storage tank 24 side.

続いて、制御部はバルブMV−2を開制御すると共に、ポンプ34の運転を再開する(S109)。これによりシャワーノズル30による本洗浄が開始される。制御部は本洗浄の開始と同時に本洗浄タイマーをスタートさせ、本洗浄の経過時間の計測を行う(S110)。この時、バルブMV−3が開き、バルブMV−4が閉じているので、ワーク12の本洗浄を行った後の洗浄液は、バルブMV−3を介して貯留タンク24に戻され、洗浄に循環再利用される。前述したように、ワーク12に付着した薬液は既に前洗浄液により置換され稀釈されているので、本洗浄により再度洗浄液の置換を行っても洗浄液の薬液による著しい濃度上昇は発生しない。従って、本洗浄後の洗浄液を貯留タンク24に戻しても、第2洗浄部20から戻し供給されるオーバーフローした薬液汚染度の少ない洗浄液により十分稀釈可能であり、貯留タンク24の濃度を所定値以下に維持管理することができる。   Subsequently, the control unit controls the opening of the valve MV-2 and restarts the operation of the pump 34 (S109). Thereby, the main cleaning by the shower nozzle 30 is started. The control unit starts the main cleaning timer simultaneously with the start of the main cleaning, and measures the elapsed time of the main cleaning (S110). At this time, since the valve MV-3 is opened and the valve MV-4 is closed, the cleaning liquid after the main cleaning of the workpiece 12 is returned to the storage tank 24 via the valve MV-3 and circulated for cleaning. Reused. As described above, since the chemical solution adhering to the workpiece 12 has already been replaced and diluted by the pre-cleaning solution, even if the cleaning solution is replaced again by the main cleaning, a significant concentration increase due to the cleaning solution does not occur. Therefore, even if the cleaning liquid after the main cleaning is returned to the storage tank 24, it can be sufficiently diluted with the overflowing cleaning liquid with a low degree of chemical contamination that is supplied back from the second cleaning unit 20, and the concentration of the storage tank 24 is below a predetermined value. Can be maintained.

制御部は、本洗浄タイマーの監視を行い(S111)、タイムアップした場合には、ポンプ34の運転を停止し(S112)、ワーク12を上昇させて(S113)、第1洗浄部18における処理を終了し、ステップ(S100)に戻り、次のワーク12の第1洗浄部18への投入に備える。   The control unit monitors the main cleaning timer (S111). When the time is up, the operation of the pump 34 is stopped (S112), the work 12 is raised (S113), and the processing in the first cleaning unit 18 is performed. Is completed, the process returns to step (S100) to prepare for the next work 12 to be put into the first cleaning unit 18.

このように、本実施形態においては、第1洗浄部18における洗浄を前洗浄と本洗浄に分離し、それぞれの洗浄で使用した洗浄液を分別し、薬液含有量の多い前洗浄液のみを廃棄のために排出し、前洗浄効果により薬液含有量が低下した本洗浄の液を洗浄液として再利用するために貯留タンク24に戻している。そのため、洗浄液の廃棄量を低減することができると共に、本洗浄以降の洗浄の負荷を軽減することができる。その結果、新水の供給量も低減することができる。   As described above, in the present embodiment, the cleaning in the first cleaning unit 18 is separated into the pre-cleaning and the main cleaning, the cleaning liquid used in each cleaning is separated, and only the pre-cleaning liquid with a high chemical content is discarded. The main cleaning liquid whose chemical liquid content has decreased due to the pre-cleaning effect is returned to the storage tank 24 for reuse as the cleaning liquid. Therefore, the amount of cleaning liquid discarded can be reduced, and the cleaning load after the main cleaning can be reduced. As a result, the amount of fresh water supplied can also be reduced.

また、実質的に2段階の洗浄を洗浄液の供給タイミングと排出経路の切換により、同一の洗浄部で行うことができるので、設備規模を増大することなく、効率的なワーク洗浄を行うことができる。   In addition, since the two stages of cleaning can be performed in the same cleaning section by switching the supply timing of the cleaning liquid and the discharge path, efficient workpiece cleaning can be performed without increasing the equipment scale. .

なお、本実施形態の図1で示す構成及び図2に示すフローチャートは一例であり、薬液処理の直後に行われる洗浄部において、前洗浄と本洗浄の切り換え及び前洗浄液と本洗浄液の分別と前洗浄液のみの排出が可能な構成であれば、各構成を任意に変更しても上述した実施形態と同様の効果を得ることができる。また、上述して実施形態では薬液として化成処理液を示したが、本構成は、脱脂処理液やその他、ワークの表面処理後に洗浄処理を必要とする薬液を使用する表面処理装置に適用可能であり、同様の効果を得ることができる。   Note that the configuration shown in FIG. 1 and the flowchart shown in FIG. 2 of the present embodiment are only examples, and in the cleaning unit performed immediately after the chemical treatment, switching between pre-cleaning and main cleaning, and separation and pre-cleaning of the pre-cleaning liquid and the main cleaning liquid are performed. As long as only the cleaning liquid can be discharged, the same effects as those of the above-described embodiment can be obtained even if each configuration is arbitrarily changed. Moreover, although the chemical conversion treatment liquid is shown as the chemical liquid in the above-described embodiment, the present configuration can be applied to a degreasing liquid or other surface treatment apparatus that uses a chemical liquid that requires a cleaning process after the surface treatment of the workpiece. Yes, the same effect can be obtained.

本発明の実施の形態に係るワーク表面処理装置の構成概念を説明する説明図である。It is explanatory drawing explaining the structural concept of the workpiece | work surface treatment apparatus which concerns on embodiment of this invention. 本発明の実施の形態に係るワーク表面処理装置の第1洗浄部における動作を説明するフローチャートである。It is a flowchart explaining the operation | movement in the 1st washing | cleaning part of the workpiece | work surface treatment apparatus which concerns on embodiment of this invention.

符号の説明Explanation of symbols

10 表面処理装置、12 ワーク、14 コンベア、16 化成処理部(薬液処理部)、18 第1洗浄部、18a 中空ブース、20 第2洗浄部、20a,22a スロット、22 第3洗浄部、24 貯留タンク、26 新水供給部、28 スプレーノズル、30 シャワーノズル、32 配管、34 ポンプ、MV−1,MV−2,MV3,MV−4 バルブ。   DESCRIPTION OF SYMBOLS 10 Surface treatment apparatus, 12 Workpieces, 14 Conveyor, 16 Chemical conversion processing part (chemical solution processing part), 18 1st washing | cleaning part, 18a Hollow booth, 20 2nd washing | cleaning part, 20a, 22a Slot, 22 3rd washing | cleaning part, 24 Storage Tank, 26 fresh water supply unit, 28 spray nozzle, 30 shower nozzle, 32 piping, 34 pump, MV-1, MV-2, MV3, MV-4 valve.

Claims (5)

搬送されてくるワークに対し、処理工程毎に間欠的に表面処理を行うタクト方式の処理装置であって、前記ワークに対し薬液による表面処理を行う薬液処理部と、前記薬液処理部の次段以降に設けられ、薬液処理後のワークに洗浄液を付与し前記ワークに付着した液を置換除去する洗浄部と、を含むワーク表面処理装置において、
前記洗浄部は複数段形成され、最後段の洗浄部には当該最後段の洗浄部で使用する洗浄液の濃度を所定値以下に維持する新水を供給する新水供給手段が設けられ、
各洗浄部には、
前記新水の供給によりオーバーフローした洗浄液を順次前段の洗浄部に戻し供給する戻し供給手段が設けられ、
前記薬液処理部の直後の洗浄部には、
洗浄液を薬液処理後のワークに供給し、ワークの前洗浄を行う前洗浄手段と、
前洗浄後のワークに対し洗浄液を供給し本洗浄を行う本洗浄手段と、
前記前洗浄に使用した洗浄液と本洗浄で使用した洗浄液を分別し、前洗浄で使用した洗浄液を排出し、本洗浄で使用した洗浄液を当該洗浄部で循環再利用するために分離する液分離手段と、
を含むことを特徴とするワーク表面処理装置。
A tact-type processing apparatus that intermittently performs surface treatment on a workpiece to be conveyed for each processing step, and a chemical solution processing unit that performs surface treatment on the workpiece with a chemical solution, and a next stage of the chemical solution processing unit In a workpiece surface treatment apparatus including a cleaning unit that is provided afterwards, and a cleaning unit that applies a cleaning liquid to a workpiece after chemical liquid processing and replaces and removes the liquid adhering to the workpiece,
The cleaning section is formed in a plurality of stages, and the last cleaning section is provided with fresh water supply means for supplying fresh water for maintaining the concentration of the cleaning liquid used in the last cleaning section below a predetermined value,
Each cleaning unit has
Return supply means for supplying the cleaning liquid overflowed by the supply of the fresh water back to the previous cleaning unit is provided.
In the cleaning section immediately after the chemical treatment section,
A pre-cleaning means for supplying the cleaning liquid to the workpiece after chemical treatment and pre-cleaning the workpiece;
A main cleaning means for supplying a cleaning liquid to the pre-cleaned workpiece and performing main cleaning;
Liquid separation means for separating the cleaning liquid used in the pre-cleaning from the cleaning liquid used in the pre-cleaning, discharging the cleaning liquid used in the pre-cleaning, and separating the cleaning liquid used in the main cleaning for circulation and reuse in the cleaning section When,
A workpiece surface treatment apparatus comprising:
請求項1記載の装置において、
前記前洗浄手段はスプレーであり、本洗浄手段はスプレーまたはシャワーであることを特徴とするワーク表面処理装置。
The apparatus of claim 1.
The workpiece surface treatment apparatus, wherein the pre-cleaning means is a spray, and the main-cleaning means is a spray or a shower.
請求項1または請求項2の装置において、
前記液分離手段は、前洗浄後の洗浄液と本洗浄後の洗浄液の排水経路を切り換える切換バルブであることを特徴とするワーク表面処理装置。
The apparatus of claim 1 or claim 2,
The workpiece surface treatment apparatus, wherein the liquid separation means is a switching valve for switching a drain path between the cleaning liquid after the pre-cleaning and the cleaning liquid after the main cleaning.
請求項3に記載の装置において、
前記切換バルブは、前洗浄完了後所定時間経過してから排水経路の切り換え動作を行うことを特徴とするワーク表面処理装置。
The apparatus of claim 3.
The work surface treatment apparatus according to claim 1, wherein the switching valve performs a drainage path switching operation after a predetermined time has elapsed after completion of the pre-cleaning.
請求項1から請求項4のいずれか1つに記載の装置において、
前記前洗浄で使用する洗浄液量と当該洗浄部に戻し供給される後段の洗浄部の洗浄液量とが略一致していることを特徴とするワーク表面処理装置。
The device according to any one of claims 1 to 4,
The workpiece surface treatment apparatus characterized in that the amount of cleaning liquid used in the pre-cleaning and the amount of cleaning liquid in a subsequent cleaning unit supplied back to the cleaning unit substantially coincide with each other.
JP2003317482A 2003-09-09 2003-09-09 Work surface treatment apparatus Pending JP2005081279A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018069109A (en) * 2016-10-24 2018-05-10 株式会社クレオ Cleaning machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018069109A (en) * 2016-10-24 2018-05-10 株式会社クレオ Cleaning machine

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