JP2005069819A

JP2005069819A - Hardness testing machine

Info

Publication number: JP2005069819A
Application number: JP2003298764A
Authority: JP
Inventors: Eiji Furuta; 英二古田; Fumihiko Koshimizu; 輿水文比古
Original assignee: Akashi Corp
Current assignee: Akashi Corp
Priority date: 2003-08-22
Filing date: 2003-08-22
Publication date: 2005-03-17

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hardness testing machine capable of performing a hardness test of higher precision by reducing the measuring error caused by the moving speed of a penetrator or the effect of disturbance vibration. <P>SOLUTION: The hardness testing machine is equipped with a penetrator shaft (4) having the penetrator (3), the support part (e.g., a folded spring 5) for movably supporting the penetrator shaft and a load applying mechanism part (6) for loading the penetrator shaft with predetermined force. The support part is equipped with the first elastic part (e.g., an inner leaf spring part 53) fixed to the penetrator shaft at one end thereof, the second elastic part (e.g., an outer leaf spring part 54) fixed to the testing machine body of the hardness testing machine and a connection part (e.g., a spring end part 55 and a connection part 52) for connecting the other end of the second elastic part and the other and part of the second elastic part. The penetrator shaft is operated more linearly in its axial direction and a damping means (e.g., a damping coil 64 or the like) for damping the vibration of the penetrator shaft is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、試料表面にくぼみを形成させて、当該試料の硬さを測定する硬さ試験機に関する。 The present invention relates to a hardness tester for forming a dent on a sample surface and measuring the hardness of the sample.

従来、硬さ試験機として、試料表面に荷重を負荷し、くぼみを形成することに基づいて試料の硬さを評価、測定する硬さ試験機が知られている（例えば、特許文献１など）。
特許文献１に記載された硬さ試験機は、先端部に圧子を有する圧子支持棒と、圧子支持棒を運動可能に支持する支持機構と、圧子支持棒をその軸方向に駆動させるアクチュエータ等を備えている。
支持機構は、圧子支持棒の上部及び下部を支持する２枚のＥ字型の板バネから構成されている。これら板バネは、上下２枚、圧子支持棒の軸上に平行かつ同方向に配置されており、各板バネにおける両側端部バネ片の開放端が固定フレームに固定され、中央部バネ片の開放端が圧子を支持した圧子支持棒に固定されている。 Conventionally, as a hardness tester, there is known a hardness tester that evaluates and measures the hardness of a sample based on applying a load to the sample surface and forming a dent (for example, Patent Document 1). .
The hardness tester described in Patent Document 1 includes an indenter support bar having an indenter at the tip, a support mechanism that supports the indenter support bar in a movable manner, an actuator that drives the indenter support bar in the axial direction, and the like. I have.
The support mechanism is composed of two E-shaped leaf springs that support the upper and lower portions of the indenter support rod. These plate springs are arranged in two parallel upper and lower directions on the axis of the indenter support rod, and the open ends of both side end spring pieces of each plate spring are fixed to the fixed frame, and the center spring piece The open end is fixed to an indenter support rod that supports the indenter.

そして、圧子支持棒に軸方向に力を加えたときには、側部バネ片及び中央部バネ片が変形する。この変形とともに、平行に配置された２つの板バネの側部バネ片及び中央部バネ片における円運動がそれぞれ打ち消しあい、圧子支持棒が直進運動できるので、圧子は試料面に対して常に同じ向きを保持して、直進運動のみをすることとなる。
特開２００３−１６１６８４号公報 When a force is applied to the indenter support rod in the axial direction, the side spring pieces and the central spring pieces are deformed. Along with this deformation, the circular motions of the side spring pieces and central spring pieces of the two leaf springs arranged in parallel cancel each other, and the indenter support rod can move straight, so that the indenter is always in the same direction with respect to the sample surface. Will be held and will only move straight.
JP 2003-161684 A

しかしながら、上記構成の支持機構では、圧子支持棒の移動速度を速くした場合に、圧子支持棒にアクチュエータから作用する力により圧子支持棒がその固有振動数で振動して圧子が試料に衝撃的に当たってしまい、測定誤差を生じてしまうという問題点があった。
さらに、圧子支持棒が外乱により振動した場合には、圧子支持棒がその固有振動数で上下方向に振動してしまい、その結果、荷重負荷中に圧子が試料にその外乱振動による影響分だけ荷重負荷力が変動するので、特に薄膜等の微小硬さ試験において測定誤差を生じるという問題点があった。
また、圧子支持棒に力を加えたときに、上下２枚の板バネがそれぞれ独立に運動するため、圧子支持棒がその軸方向に対し垂直方向に僅かにずれ、圧子により形成されるくぼみが歪んでしまい、測定誤差が生じてしまう不具合があった。 However, in the support mechanism configured as described above, when the moving speed of the indenter support rod is increased, the indenter support rod vibrates at its natural frequency due to the force acting on the indenter support rod from the actuator, and the indenter strikes the sample impactively. Therefore, there is a problem that a measurement error occurs.
Furthermore, when the indenter support bar vibrates due to disturbance, the indenter support bar vibrates in the vertical direction at its natural frequency, and as a result, the indenter is loaded on the sample by the influence of the disturbance vibration during loading. Since the load force fluctuates, there is a problem that a measurement error occurs particularly in a microhardness test of a thin film or the like.
Also, when a force is applied to the indenter support rod, the upper and lower two leaf springs move independently from each other, so that the indenter support rod is slightly displaced in the direction perpendicular to the axial direction, and a depression formed by the indenter is generated. There is a problem that the measurement error occurs due to distortion.

そこで、本発明の課題は、圧子の移動速度や外乱振動の影響による測定誤差を低減して、より精度の高い硬さ試験を行うことのできる硬さ試験機を提供することである。 Accordingly, an object of the present invention is to provide a hardness tester capable of reducing the measurement error due to the influence of the moving speed of the indenter and the disturbance vibration and performing a more accurate hardness test.

上記課題を解決するために、例えば、図４、図５に示すように、
請求項１記載の発明は、
先端部に圧子（３）を有する圧子軸（４）と、
前記圧子軸を軸方向に移動可能に支持する支持部（例えば、折り返しばね５）と、
前記圧子軸に対し、軸方向の所定の力を負荷する荷重負荷機構部（６）と、を備え、
前記支持部は、
前記圧子軸に一端部が固定された第１の弾性部（例えば、中板ばね部５３）と、
当該硬さ試験機の試験機本体（２）に一端部が固定された第２の弾性部（例えば、外板ばね部５４）と、
前記第１の弾性部の他端部と、前記第２の弾性部の他端部とを接続する接続部（例えば、ばね端部５５）と、備え、
前記荷重負荷機構部が前記圧子軸に所定の力を負荷したことにより、前記第１の弾性部が前記圧子軸の軸方向に撓むことに伴う、前記圧子軸のその軸方向に対して垂直な方向への移動を打ち消すように、前記第２の弾性部が撓むように構成される硬さ試験機（１）であって、
前記圧子軸の振動を減衰させる減衰手段（例えば、ダンピングコイル６４等）を備えることを特徴とする。 In order to solve the above problem, for example, as shown in FIGS.
The invention described in claim 1
An indenter shaft (4) having an indenter (3) at the tip;
A support portion (for example, a folding spring 5) that supports the indenter shaft so as to be movable in the axial direction;
A load-loading mechanism (6) for applying a predetermined axial force to the indenter shaft,
The support part is
A first elastic portion (for example, a middle leaf spring portion 53) having one end fixed to the indenter shaft;
A second elastic part (for example, an outer leaf spring part 54) having one end fixed to the testing machine main body (2) of the hardness testing machine;
A connection portion (for example, a spring end portion 55) that connects the other end portion of the first elastic portion and the other end portion of the second elastic portion;
When the load loading mechanism portion applies a predetermined force to the indenter shaft, the first elastic portion is perpendicular to the axial direction of the indenter shaft as the first elastic portion bends in the axial direction of the indenter shaft. A hardness tester (1) configured such that the second elastic portion bends so as to cancel movement in any direction,
Attenuating means for attenuating vibration of the indenter shaft (for example, a damping coil 64) is provided.

請求項２記載の発明は、請求項１記載の硬さ試験機において、
前記荷重負荷機構部は、
磁界を形成する磁界形成部（６１）と、
前記磁界形成部により形成された磁界内に配置され、駆動電流が供給される駆動コイル（６２）と、
前記駆動コイルに駆動電流を供給する電源（図示略）と、
前記電源によって駆動電流が供給された前記駆動コイルに生じる駆動力により前記圧子軸を押圧する押圧部（例えば、コイルボビン６３）と、を備え、
前記減衰手段は、
前記磁界形成部により形成された磁界内に配置されるダンピングコイル（６４）を備えることを特徴とする。 The invention according to claim 2 is the hardness tester according to claim 1,
The load loading mechanism is
A magnetic field forming part (61) for forming a magnetic field;
A drive coil (62) disposed in a magnetic field formed by the magnetic field forming unit and supplied with a drive current;
A power supply (not shown) for supplying a drive current to the drive coil;
A pressing portion (for example, a coil bobbin 63) that presses the indenter shaft by a driving force generated in the driving coil to which a driving current is supplied by the power source,
The attenuation means is
A damping coil (64) disposed in the magnetic field formed by the magnetic field forming unit is provided.

請求項３記載の発明は、請求項１又は２記載の硬さ試験機において、
前記減衰手段は、前記ダンピングコイルに接続される可変抵抗器（６５）を備えることを特徴とする。 The invention according to claim 3 is the hardness tester according to claim 1 or 2,
The attenuation means includes a variable resistor (65) connected to the damping coil.

請求項４記載の発明は、請求項１記載の硬さ試験機において、
前記荷重負荷機構部は、
磁界を形成する磁界形成部（６１）と、
前記磁界形成部により形成された磁界内に配置され、駆動電流が供給される駆動コイル（６２）と、
前記駆動コイルに駆動電流を供給する電源（図示略）と、
前記電源によって駆動電流を供給された前記駆動コイルに生じる駆動力により前記圧子軸を押圧する押圧部（例えば、コイルボビン６３）と、を備え、
前記減衰手段は、
導体で形成され、前記駆動コイルが巻回されるコイルボビン（６３）を備えることを特徴とする。 The invention according to claim 4 is the hardness tester according to claim 1,
The load loading mechanism is
A magnetic field forming part (61) for forming a magnetic field;
A drive coil (62) disposed in a magnetic field formed by the magnetic field forming unit and supplied with a drive current;
A power supply (not shown) for supplying a drive current to the drive coil;
A pressing portion (for example, a coil bobbin 63) that presses the indenter shaft by a driving force generated in the driving coil supplied with a driving current by the power source,
The attenuation means is
A coil bobbin (63) formed of a conductor and around which the drive coil is wound is provided.

請求項５記載の発明は、請求項１〜４の何れか一項に記載の硬さ試験機において、
前記圧子軸の軸方向に前記支持部を複数備え、
隣り合う二つの前記支持部の前記接続部同士は連結部（５２）によって連結されていることを特徴とする。 Invention of Claim 5 is a hardness tester as described in any one of Claims 1-4,
A plurality of the support portions are provided in the axial direction of the indenter shaft,
The connection parts of two adjacent support parts are connected by a connection part (52).

請求項６記載の発明は、請求項５記載の硬さ試験機において、
前記連結部の振動を減衰する連結部減衰手段を備えることを特徴とする。 The invention according to claim 6 is the hardness tester according to claim 5,
A connecting portion attenuating means for attenuating the vibration of the connecting portion is provided.

請求項７記載の発明は、
先端部に圧子（３）を有する圧子軸（４）と、
前記圧子軸を軸方向に移動可能に支持する支持部（例えば、折り返しばね５）と、
前記圧子軸に対し、軸方向の所定の力を負荷する荷重負荷機構部（６）と、を備え、
前記支持部は、
前記圧子軸に一端部が固定された第１の弾性部（例えば、中板ばね部５３）と、
当該硬さ試験機の試験機本体（２）に一端部が固定された第２の弾性部（例えば、外板ばね部５４）と、
前記第１の弾性部の他端部と、前記第２の弾性部の他端部とを接続する接続部（例えば、ばね端部５５）と、備え、
前記荷重負荷機構部が前記圧子軸に所定の力を負荷したことにより、前記第１の弾性部が前記圧子軸の軸方向に撓むことに伴う、前記圧子軸のその軸方向に対して垂直な方向への移動を打ち消すように、前記第２の弾性部が撓むように構成される硬さ試験機（１）であって、
前記圧子軸の軸方向に前記支持部を複数備え、
隣り合う二つの前記支持部の前記接続部同士は連結部（５２）によって連結され、
前記連結部の振動を減衰する連結部減衰手段（例えば、連結部ダンピングコイル９０）と、を備えることを特徴とする。 The invention described in claim 7
An indenter shaft (4) having an indenter (3) at the tip;
A support portion (for example, a folding spring 5) that supports the indenter shaft so as to be movable in the axial direction;
A load-loading mechanism (6) for applying a predetermined axial force to the indenter shaft,
The support part is
A first elastic portion (for example, a middle leaf spring portion 53) having one end fixed to the indenter shaft;
A second elastic part (for example, an outer leaf spring part 54) having one end fixed to the testing machine main body (2) of the hardness testing machine;
A connection portion (for example, a spring end portion 55) that connects the other end portion of the first elastic portion and the other end portion of the second elastic portion;
When the load loading mechanism portion applies a predetermined force to the indenter shaft, the first elastic portion is perpendicular to the axial direction of the indenter shaft as the first elastic portion bends in the axial direction of the indenter shaft. A hardness tester (1) configured such that the second elastic portion bends so as to cancel movement in any direction,
A plurality of the support portions are provided in the axial direction of the indenter shaft,
The connecting portions of two adjacent support portions are connected by a connecting portion (52),
It is provided with the connection part attenuation | damping means (for example, connection part damping coil 90) which attenuates the vibration of the said connection part, It is characterized by the above-mentioned.

請求項８記載の発明は、請求項５又は６に記載の硬さ試験機において、
前記連結部減衰手段は、
前記連結部に設けられる連結部ダンピングコイル（９０）と、
磁界を形成する連結部磁界形成部（８）と、を備え、
前記連結部磁界形成部により形成された磁界内に、前記連結部の少なくとも一部が配置されることを特徴とする。 The invention according to claim 8 is the hardness tester according to claim 5 or 6,
The connecting portion attenuating means is
A connecting portion damping coil (90) provided in the connecting portion;
A coupling part magnetic field forming part (8) for forming a magnetic field,
At least a part of the connecting portion is disposed in the magnetic field formed by the connecting portion magnetic field forming portion.

請求項９記載の発明は、請求項８記載の硬さ試験機において、
前記連結部減衰手段は、前記連結部ダンピングコイルに接続される連結部可変抵抗器（９１）を備えることを特徴とする。 The invention according to claim 9 is the hardness tester according to claim 8,
The coupling part attenuating means includes a coupling part variable resistor (91) connected to the coupling part damping coil.

請求項１０記載の発明は、請求項６又は７に記載の硬さ試験機において、
前記連結部は、非磁性導体により形成され、
前記連結部減衰手段は、
磁界を形成する連結部磁界形成部（８）を備え、
前記連結部磁界形成部により形成された磁界内に、前記連結部の少なくとも一部が配置されることを特徴とする。 The invention described in claim 10 is the hardness tester according to claim 6 or 7,
The connecting portion is formed of a nonmagnetic conductor,
The connecting portion attenuating means is
A connecting part magnetic field forming part (8) for forming a magnetic field;
At least a part of the connecting portion is disposed in the magnetic field formed by the connecting portion magnetic field forming portion.

請求項１記載の発明によれば、減衰手段により、圧子の移動速度や外乱振動の影響により生じる圧子軸の振動を減衰させることができるので、測定誤差が低減されて、より精度の高い測定結果を得ることができる。 According to the first aspect of the present invention, the vibration of the indenter shaft caused by the influence of the moving speed of the indenter and the disturbance vibration can be attenuated by the attenuating means, so that the measurement error is reduced and the measurement result is more accurate. Can be obtained.

請求項２記載の発明によれば、請求項１記載の発明と同様の効果が得られるのは無論のこと、特に、圧子軸に外乱振動が作用して振動した場合に、磁界形成部により形成された磁界内に配置されたダンピングコイルに起電力が生じて電流が流れることにより減衰力が発生することとなって、圧子軸の振動の減衰を好適に実施することができる。 According to the second aspect of the present invention, it is possible to obtain the same effect as the first aspect of the invention. In particular, when a disturbance vibration acts on the indenter shaft and vibrates, it is formed by the magnetic field forming portion. A damping force is generated when an electromotive force is generated in a damping coil arranged in the generated magnetic field and a current flows, so that the vibration of the indenter shaft can be suitably attenuated.

請求項３記載の発明によれば、請求項１又は２記載の発明と同様の効果が得られるのは無論のこと、特に、ダンピングコイルに接続される可変抵抗器によりダンピングコイル内の抵抗値を変えることができるので、圧子軸の振動を減衰させる減衰力を調節することができる。 According to the third aspect of the present invention, the same effect as that of the first or second aspect of the invention can be obtained, and in particular, the resistance value in the damping coil is set by the variable resistor connected to the damping coil. Since it can be changed, the damping force that attenuates the vibration of the indenter shaft can be adjusted.

請求項４記載の発明によれば、請求項１記載の発明と同様の効果が得られるのは無論のこと、特に、圧子軸に外乱振動が作用して振動した場合に、導体で形成され、駆動コイルが巻回されるコイルボビンに起電力が生じて電流が流れることにより、減衰力が発生することとなって、圧子軸の振動の減衰を好適且つ容易に実施することができる。 According to the invention of claim 4, it is natural that the same effect as that of the invention of claim 1 can be obtained, in particular, when a disturbance vibration acts on the indenter shaft and vibrates, it is formed of a conductor, When an electromotive force is generated in the coil bobbin around which the drive coil is wound and a current flows, a damping force is generated, and the vibration of the indenter shaft can be attenuated suitably and easily.

請求項５記載の発明によれば、請求項１〜４の何れか一項に記載の発明と同様の効果が得られるのは無論のこと、特に、隣り合う二つの支持部の接続部同士は連結部によって連結されているので、各支持部が独立して運動してしまうことを防止できることとなって、圧子軸を軸方向により直線的に運動させることができる。 According to the invention described in claim 5, it is needless to say that the same effect as in the invention described in any one of claims 1 to 4 can be obtained. Since it is connected by the connecting portion, it is possible to prevent each support portion from moving independently, and the indenter shaft can be moved linearly in the axial direction.

請求項６記載の発明によれば、請求項５記載の発明と同様の効果が得られるのは無論のこと、特に、連結部減衰手段により連結部の振動が減衰されるので、より減衰力を大きくすることができる。 According to the sixth aspect of the present invention, the same effect as that of the fifth aspect of the invention can be obtained. Particularly, since the vibration of the connecting portion is attenuated by the connecting portion damping means, the damping force can be further increased. Can be bigger.

請求項７記載の発明によれば、隣り合う二つの支持部の接続部同士は連結部によって連結され、連結部減衰手段により連結部の振動が減衰されるので、硬さ試験時において、圧子の移動速度や外乱振動の影響により生じる圧子軸の振動を減衰させることができる。従って、測定誤差を低減して、より精度の高い測定結果を得ることができる。 According to the seventh aspect of the present invention, the connecting portions of the two adjacent support portions are connected by the connecting portion, and the vibration of the connecting portion is attenuated by the connecting portion damping means. The vibration of the indenter shaft caused by the movement speed and the influence of disturbance vibration can be attenuated. Therefore, it is possible to reduce the measurement error and obtain a more accurate measurement result.

請求項８記載の発明によれば、請求項６又は７に記載の発明と同様の効果が得られることは無論のこと、特に、圧子軸に外乱振動が作用して振動した場合に、連結部磁界形成部により形成された磁界内に配置された連結部ダンピングコイルに起電力が生じて電流が流れることにより減衰力が発生することとなって、圧子軸の振動の減衰を好適に実施することができる。 According to the invention described in claim 8, it is natural that the same effect as that of the invention described in claim 6 or 7 can be obtained. In particular, when the disturbance vibration acts on the indenter shaft and vibrates, the connecting portion A damping force is generated when an electromotive force is generated in the coupling portion damping coil arranged in the magnetic field formed by the magnetic field forming portion and a current flows, and thus the vibration of the indenter shaft is preferably attenuated. Can do.

請求項９記載の発明によれば、請求項８記載の発明と同様の効果が得られるのは無論のこと、特に、連結部ダンピングコイルに接続される連結部可変抵抗器により、連結部ダンピングコイル内の抵抗値を変えることができるので、圧子軸の振動を減衰させる減衰力を調節することができる。 According to the ninth aspect of the present invention, it is possible to obtain the same effect as that of the eighth aspect of the invention. In particular, the connecting portion damping coil is connected by the connecting portion variable resistor connected to the connecting portion damping coil. Since the resistance value can be changed, the damping force that attenuates the vibration of the indenter shaft can be adjusted.

請求項１０記載の発明によれば、請求項６又は７記載の発明と同様の効果が得られるのは無論のこと、特に、連結部が非磁性導体により形成され、連結部減衰手段が磁界を形成する連結部磁界形成部を備え、当該連結部磁界形成部により形成された磁界内に、当該連結部が配置されるので、連結部に起電力が生じて連結部に電流が流れることにより減衰力が発生することとなって、圧子軸の振動の減衰を好適且つ容易に実施することができる。 According to the invention of claim 10, it is needless to say that the same effect as that of the invention of claim 6 or 7 can be obtained. In particular, the connecting portion is formed of a nonmagnetic conductor, and the connecting portion attenuating means generates a magnetic field. Since the connecting portion is provided in the magnetic field formed by the connecting portion magnetic field forming portion, an electromotive force is generated in the connecting portion, and current is passed through the connecting portion to be attenuated. A force is generated, so that the vibration of the indenter shaft can be attenuated suitably and easily.

以下、図を参照して実施形態としての硬さ試験機について説明する。図１は本発明に係る硬さ試験機の要部を示す側面図、図２は、図１の硬さ試験機のII−II線における平面か
ら見た要部を示す図である。
図１に示すように、硬さ試験機１は、圧子軸取り付け部２１を有する試験機本体２と、先端部（下端側）に圧子３を備える圧子軸４と、試験機本体２の圧子軸取付け部２１に圧子軸４をその軸方向に移動可能に弾性的に支持する支持部としての折り返しばね５と、圧子軸４に対してその軸方向に所定の力を負荷する荷重負荷機構部６と、試料Ｓを載置する載置面７１を有する試料台７等を備えている。 Hereinafter, a hardness tester as an embodiment will be described with reference to the drawings. FIG. 1 is a side view showing the main part of the hardness tester according to the present invention, and FIG.
As shown in FIG. 1, the hardness tester 1 includes a tester main body 2 having an indenter shaft attachment portion 21, an indenter shaft 4 having an indenter 3 at the tip (lower end side), and an indenter shaft of the tester main body 2. A folding spring 5 as a support portion that elastically supports the indenter shaft 4 so as to be movable in the axial direction on the mounting portion 21, and a load loading mechanism portion 6 that applies a predetermined force to the indenter shaft 4 in the axial direction. And a sample stage 7 having a placement surface 71 on which the sample S is placed.

折り返しばね５は、図２に示されるように、図中左方へ延出する第１の弾性部としての中板ばね部５３と、その中板ばね部５３の両側（図中、中板ばね部５３の上下）で、一端部５４１を図中左方へ延出する第２の弾性部としての外板ばね部５４、５４とを有している。その中板ばね部５３の他端部５３２と、外板ばね部５４、５４の他端部５４２、５４２とは、図中右側の接続部としてのばね端部５５において一体的に接続されており、折り返しばね５は、平面視略Ｅ字状に形成されている。 As shown in FIG. 2, the folding spring 5 includes a middle leaf spring portion 53 as a first elastic portion extending leftward in the drawing, and both sides of the middle leaf spring portion 53 (in the drawing, the middle leaf springs). On the upper and lower sides of the portion 53, there are outer plate spring portions 54 and 54 as second elastic portions that extend one end portion 541 to the left in the drawing. The other end portion 532 of the middle leaf spring portion 53 and the other end portions 542 and 542 of the outer leaf spring portions 54 and 54 are integrally connected at a spring end portion 55 as a connection portion on the right side in the drawing. The folding spring 5 is formed in a substantially E shape in plan view.

また、図１に示されるように、折り返しばね５における中板ばね部５３は、その一端部５３１を、図中左下方向に向けるように傾斜し、また、折り返しばね５における外板ばね部５４は、その一端部５４１を、図中左上方向に向けるように傾斜しており、折り返しばね５は、側面視略逆く字状に形成されている。 Further, as shown in FIG. 1, the middle leaf spring portion 53 in the folding spring 5 is inclined so that one end portion 531 thereof is directed in the lower left direction in the drawing, and the outer leaf spring portion 54 in the folding spring 5 is The one end portion 541 is inclined so as to be directed in the upper left direction in the drawing, and the folding spring 5 is formed in a substantially reverse letter shape in a side view.

上側の折り返しばね５（５ａ）は、中板ばね部５３の一端部５３１が圧子軸４の上端部にボルトＢにより固定されており、外板ばね部５４の一端部５４１が、圧子軸取り付け部２１の上面にボルトＢにより固定されている。
下側の折り返しばね５（５ｂ）は、中板ばね部５３の一端部５３１が、圧子軸４の下端部と圧子３との間に固定されており、外板ばね部５４の一端部５４１が、圧子軸取り付け部２１の下面にボルトＢにより固定されている。 In the upper folding spring 5 (5a), one end portion 531 of the middle leaf spring portion 53 is fixed to the upper end portion of the indenter shaft 4 by a bolt B, and one end portion 541 of the outer leaf spring portion 54 is fixed to the indenter shaft attachment portion. The upper surface of 21 is fixed with bolts B.
The lower folding spring 5 (5b) has one end portion 531 of the middle leaf spring portion 53 fixed between the lower end portion of the indenter shaft 4 and the indenter 3, and one end portion 541 of the outer leaf spring portion 54. The bolts B are fixed to the lower surface of the indenter shaft mounting portion 21.

そして、隣り合う２つの折り返しばね５は、連結部５２によって連結されている。
連結部５２は、アルミ、銅等の非磁性導体により形成されている。そして、図１に示されるように、側面視略コ字形状を有しており、連結部５２の上端部５２ａに、上側の折り返しばね５（５ａ）のばね端部５５がボルトＢにより固定され、また、連結部５２の下端部５２ｂに、下側の折り返しばね５（５ｂ）のばね端部５５がボルトＢにより固定されている。そして、連結部５２は、上側の折り返しばね５（５ａ）と、下側の折り返しばね５（５ｂ）とを接続している。 Two adjacent folding springs 5 are connected by a connecting portion 52.
The connecting portion 52 is formed of a nonmagnetic conductor such as aluminum or copper. 1, the spring end portion 55 of the upper folding spring 5 (5a) is fixed to the upper end portion 52a of the connecting portion 52 by a bolt B. The spring end 55 of the lower folding spring 5 (5b) is fixed to the lower end 52b of the connecting portion 52 by a bolt B. And the connection part 52 has connected the upper folding spring 5 (5a) and the lower folding spring 5 (5b).

なお、連結部５２の上端部５２ａ及び下端部５２ｂに折り返しばね５（５ａ、５ｂ）のばね端部５５を固定することによって、中板ばね部５３の他端部５３２と、外板ばね部５４，５４の他端部５４２，５４２とが同一の支点を有するように接続されている。 In addition, by fixing the spring end 55 of the folding spring 5 (5a, 5b) to the upper end 52a and the lower end 52b of the connecting portion 52, the other end 532 of the middle leaf spring 53 and the outer leaf spring 54 are secured. , 54 are connected so as to have the same fulcrum.

上述の構成の折り返しばね５によって、圧子軸４は、その軸方向を試料台７の載置面７１に垂直に向けて試験機本体２（圧子軸取り付け部２１）に取り付けられて、弾性的に支持されている。
なお、図１に示されるように、連結部５２は、その上下方向が圧子軸４の軸方向と平行となるように配置されている。 By the folding spring 5 having the above-described configuration, the indenter shaft 4 is attached to the tester main body 2 (indenter shaft attaching portion 21) with its axial direction perpendicular to the mounting surface 71 of the sample stage 7, and elastically. It is supported.
As shown in FIG. 1, the connecting portion 52 is arranged so that its vertical direction is parallel to the axial direction of the indenter shaft 4.

図３は、図１の硬さ試験機の外観斜視図、図４は、図１の硬さ試験機の荷重負荷機構部の内部及び連結部の内部を説明するための斜視図、図５は、荷重負荷機構部の側面断面図である。
連結部５２は、図３に示すように、連結部５２を挟み対向配置される２つの連結部磁界形成部８を備えている。連結部磁界形成部８は、例えば、永久磁石８１と、永久磁石８１の両端部に設けられた一対のヨーク８２とから一体的に構成され、平面視略コ字状に形成されている。 3 is an external perspective view of the hardness tester of FIG. 1, FIG. 4 is a perspective view for explaining the inside of the load-loading mechanism portion and the connection portion of the hardness tester of FIG. 1, and FIG. It is side surface sectional drawing of a load-loading mechanism part.
As shown in FIG. 3, the connecting portion 52 includes two connecting portion magnetic field forming portions 8 that are disposed to face each other with the connecting portion 52 interposed therebetween. The connecting portion magnetic field forming portion 8 is integrally formed from, for example, a permanent magnet 81 and a pair of yokes 82 provided at both ends of the permanent magnet 81, and is formed in a substantially U shape in plan view.

連結部磁界形成部８のヨーク８２の開口側の一端部は、連結部側に折曲して連結部５２と離間して配置されるとともに、他端部で永久磁石８１を挟み支持固定している。従って、ヨーク８２は永久磁石８１の磁束を所定の方向に集中させるとともに極大化させて、磁界を形成する。即ち、連結部５２の一部は磁界内に配置されることとなる。
なお、先述のように連結部５２は非磁性導体により形成されているので、連結部磁界形成部８と磁路を形成しないようになっている。 One end portion on the opening side of the yoke 82 of the connecting portion magnetic field forming portion 8 is bent toward the connecting portion side and is spaced apart from the connecting portion 52, and the other end portion sandwiches and supports and fixes the permanent magnet 81. Yes. Therefore, the yoke 82 concentrates the magnetic flux of the permanent magnet 81 in a predetermined direction and maximizes the magnetic flux to form a magnetic field. That is, a part of the connecting portion 52 is disposed in the magnetic field.
As described above, since the connecting portion 52 is formed of a nonmagnetic conductor, the connecting portion magnetic field forming portion 8 and the magnetic path are not formed.

さらに、図４に示すように、連結部５２は、内部に巻回された連結部ダンピングコイル９０と、連結部ダンピングコイル９０と電気的に接続されている連結部可変抵抗器９１とを備え、連結部磁界形成部８により形成される磁界内に連結部ダンピングコイル９０が配置されるようになっている。従って、硬さ試験時において、圧子軸４が固有振動数での振動に伴って連結部５２が振動すると、その振動の速度に比例して、磁界内に配置された連結部ダンピングコイル９０に起電力が生じる。これにより、連結部ダンピングコイル９０内に電流が流れることととなって、連結部５２に連結部５２の振動を減衰する減衰力が作用するようになっている。
また、連結部可変抵抗器９１によって連結部ダンピングコイル９０の抵抗値を変えることによって、減衰力の大きさを調節できるようになっている。
このように、連結部ダンピングコイル９０、連結部可変抵抗器９１は、連結部減衰手段として機能する。 Further, as shown in FIG. 4, the connecting portion 52 includes a connecting portion damping coil 90 wound inside, and a connecting portion variable resistor 91 electrically connected to the connecting portion damping coil 90. The coupling portion damping coil 90 is arranged in the magnetic field formed by the coupling portion magnetic field forming unit 8. Therefore, during the hardness test, when the coupling portion 52 vibrates with the vibration of the indenter shaft 4 at the natural frequency, the coupling portion damping coil 90 disposed in the magnetic field is caused in proportion to the vibration speed. Electric power is generated. As a result, a current flows in the connecting portion damping coil 90, and a damping force that attenuates the vibration of the connecting portion 52 acts on the connecting portion 52.
The magnitude of the damping force can be adjusted by changing the resistance value of the coupling portion damping coil 90 by the coupling portion variable resistor 91.
Thus, the connection part damping coil 90 and the connection part variable resistor 91 function as a connection part attenuation means.

荷重負荷機構部６は、図５に示すように、磁界を形成する磁界形成部６１と、磁界形成部６１により形成された磁界内に配置される駆動コイル６２と、駆動コイル６２に駆動電流を供給する電源（図示省略）と、駆動コイル６２が巻回され、上下方向に移動可能に設けられるコイルボビン６３等を備えている。 As shown in FIG. 5, the load load mechanism unit 6 includes a magnetic field forming unit 61 that forms a magnetic field, a drive coil 62 that is disposed within the magnetic field formed by the magnetic field forming unit 61, and a drive current to the drive coil 62. A power supply (not shown) to be supplied, a coil bobbin 63 and the like around which a drive coil 62 is wound and provided so as to be movable in the vertical direction are provided.

磁界形成部６１は、例えば、永久磁石により形成され、図４、図５に示すように、中心部に圧子軸４がその軸方向に移動可能に貫通されている。また、磁界形成部６１の上面部には、駆動コイル６２を収容するための溝ａが形成されている。 The magnetic field forming unit 61 is formed of, for example, a permanent magnet, and as illustrated in FIGS. 4 and 5, the indenter shaft 4 is penetrated through the central portion so as to be movable in the axial direction. A groove a for accommodating the drive coil 62 is formed on the upper surface of the magnetic field forming unit 61.

コイルボビン６３は、所定の幅の巻き枠を有しており、その巻き枠に駆動コイル６２が巻回されている。このコイルボビン６３は、上部で圧子軸４の上端部を嵌合するとともに、駆動コイル６２の一部が磁界形成部６１の溝ａ内に位置するように配置されている。従って、磁界内に配置されている駆動コイル６２へ駆動電流が供給されると駆動力が発生する。この駆動力によって、駆動コイル６２が巻回されているコイルボビン６３が下方に移動することにより圧子軸４を押圧して、その軸方向へ移動させて、圧子軸４を介して試料Ｓに所定の試験力を負荷するようになっている。従って、コイルボビン６３は、圧子軸４を押圧する押圧部として機能することとなる。 The coil bobbin 63 has a winding frame having a predetermined width, and the drive coil 62 is wound around the winding frame. The coil bobbin 63 is disposed so that the upper end portion of the indenter shaft 4 is fitted at the upper portion, and a part of the drive coil 62 is located in the groove a of the magnetic field forming portion 61. Therefore, when a drive current is supplied to the drive coil 62 disposed in the magnetic field, a drive force is generated. By this driving force, the coil bobbin 63 around which the driving coil 62 is wound moves downward to press the indenter shaft 4 and move it in the axial direction, and a predetermined amount is applied to the sample S via the indenter shaft 4. The test force is loaded. Therefore, the coil bobbin 63 functions as a pressing portion that presses the indenter shaft 4.

また、コイルボビン６３は導体で形成され、駆動コイル６２が巻回されている部分は磁界内に配置されているので、コイルボビン６３の駆動コイル６２に駆動力が発生するのと同時に、コイルボビン６３の移動速度に比例してコイルボビン６３に移動方向と逆向きの減衰力が発生する。即ち、例えば、圧子軸４が外乱振動により振動すると、圧子軸４に固定されたコイルボビン６３も振動することとなって、その振動の速度に比例した起電力が導体であるコイルボビン６３に生じる。そして、このことによりコイルボビン６３に電流が流れて減衰力が発生し、この減衰力により、圧子軸４の振動を減衰することとなる。 Further, since the coil bobbin 63 is formed of a conductor and the portion around which the drive coil 62 is wound is disposed in the magnetic field, the drive force is generated in the drive coil 62 of the coil bobbin 63 and at the same time, the coil bobbin 63 is moved. A damping force in the direction opposite to the moving direction is generated in the coil bobbin 63 in proportion to the speed. That is, for example, when the indenter shaft 4 vibrates due to disturbance vibration, the coil bobbin 63 fixed to the indenter shaft 4 also vibrates, and an electromotive force proportional to the speed of the vibration is generated in the coil bobbin 63 that is a conductor. As a result, a current flows through the coil bobbin 63 to generate a damping force, and the damping force attenuates the vibration of the indenter shaft 4.

また、コイルボビン６３には、駆動コイル６２の外側に、圧子軸４の振動を減衰させるためのダンピングコイル６４が巻回されている。さらに、ダンピングコイル６４には、ダンピングコイル６４の抵抗値を可変とする可変抵抗器６５が電気的に接続されている。即ち、例えば圧子軸４が外乱振動により振動すると、圧子軸４の振動の速度に比例した起電力がダンピングコイル６４に発生する。そして、このことによりダンピングコイル６４に電流が流れて、圧子軸４の振動を減衰させる減衰力が発生するようになっている。
また、可変抵抗器６５によって、ダンピングコイル６４の抵抗値を変えることにより、その減衰力の大きさを調節可能である。
このように、コイルボビン６３、ダンピングコイル６４、可変抵抗器６５は圧子軸４の振動を減衰させる減衰手段として機能する。 The coil bobbin 63 has a damping coil 64 wound around the drive coil 62 to attenuate the vibration of the indenter shaft 4. Furthermore, a variable resistor 65 that makes the resistance value of the damping coil 64 variable is electrically connected to the damping coil 64. That is, for example, when the indenter shaft 4 vibrates due to disturbance vibration, an electromotive force proportional to the vibration speed of the indenter shaft 4 is generated in the damping coil 64. As a result, a current flows through the damping coil 64 to generate a damping force that attenuates the vibration of the indenter shaft 4.
Further, the magnitude of the damping force can be adjusted by changing the resistance value of the damping coil 64 by the variable resistor 65.
As described above, the coil bobbin 63, the damping coil 64, and the variable resistor 65 function as an attenuation unit that attenuates the vibration of the indenter shaft 4.

次に、上記構成の硬さ試験機１により硬さ試験を行う際の、各部の動作について説明する。
まず、試料台７の載置面７１に試料Ｓを載置し、操作部（図示省略）により、硬さ試験機１が、硬さ試験の動作を行うための操作を行う。この操作入力に基づいて、制御部（図示省略）が、荷重負荷機構部６の駆動コイル６２に所定の駆動電流を供給して駆動力を発生させる。そして、駆動コイル６２に駆動力が発生すると、駆動コイル６２に巻回されているコイルボビン６３が下方に移動するとともに圧子軸４を押圧して、圧子軸４をその軸方向へ移動させる。 Next, the operation of each part when a hardness test is performed by the hardness tester 1 having the above configuration will be described.
First, the sample S is mounted on the mounting surface 71 of the sample table 7, and the hardness tester 1 performs an operation for performing a hardness test operation by an operation unit (not shown). Based on this operation input, a control unit (not shown) supplies a predetermined driving current to the driving coil 62 of the load load mechanism unit 6 to generate a driving force. When a driving force is generated in the drive coil 62, the coil bobbin 63 wound around the drive coil 62 moves downward and presses the indenter shaft 4 to move the indenter shaft 4 in the axial direction.

この圧子軸４の移動に伴って、圧子軸４に一端部が固定された中板ばね部５３は弾性変形して撓み、また外部ばね部５４も弾性変形して撓む。そして、中板ばね部５３の撓みに伴うばね運動を、外板ばね部５４の撓みに伴うばね運動が打ち消すことにより、圧子軸４のその軸中心を軸方向と垂直な方向へずれることを打ち消すことになり、圧子軸４はその軸方向に移動する。そして、圧子軸４は、折り返しばね５を変形させつつ下方へ移動し、圧子３を試料Ｓの表面に所定の力（荷重）で押し込み、くぼみを形成する。
このように圧子３（圧子軸４）が試料Ｓに形成したくぼみに基づいて、試料Ｓの硬さの測定試験、例えば、微小硬さ試験を行う。 As the indenter shaft 4 moves, the middle leaf spring portion 53 having one end fixed to the indenter shaft 4 is elastically deformed and bent, and the external spring portion 54 is also elastically deformed and bent. Then, the spring movement associated with the bending of the outer leaf spring portion 54 is canceled out by the spring movement associated with the bending of the intermediate leaf spring portion 53, thereby canceling the shift of the axial center of the indenter shaft 4 in the direction perpendicular to the axial direction. As a result, the indenter shaft 4 moves in the axial direction. The indenter shaft 4 moves downward while deforming the folding spring 5 and pushes the indenter 3 into the surface of the sample S with a predetermined force (load) to form a recess.
Based on the indentation formed in the sample S by the indenter 3 (indenter shaft 4) as described above, a test for measuring the hardness of the sample S, for example, a micro hardness test is performed.

この一連の硬さ試験において、例えば、圧子軸４の移動速度を速くした場合には、圧子軸４に作用する駆動力により圧子軸４がその固有振動数で振動する。このとき、荷重負荷機構部６のコイルボビン６３及びコイルボビン６３に巻回しているダンピングコイル６４に減衰力が発生して、その減衰力により圧子軸４の振動を減衰させる。
また同時に、連結部５２に設けられている連結部ダンピングコイル９０にその振動に比例する減衰力が発生して、圧子軸４の振動に伴う連結部５２の振動を減衰させる。 In this series of hardness tests, for example, when the moving speed of the indenter shaft 4 is increased, the indenter shaft 4 vibrates at its natural frequency due to the driving force acting on the indenter shaft 4. At this time, a damping force is generated in the coil bobbin 63 of the load load mechanism unit 6 and the damping coil 64 wound around the coil bobbin 63, and the vibration of the indenter shaft 4 is attenuated by the damping force.
At the same time, a damping force proportional to the vibration is generated in the coupling portion damping coil 90 provided in the coupling portion 52 to attenuate the vibration of the coupling portion 52 accompanying the vibration of the indenter shaft 4.

さらに、硬さ試験時に外乱振動によって圧子軸４がその固有振動数で振動している場合においても、上記と同様に減衰力が発生して、圧子軸４の振動及びそれに伴う連結部５２の振動をそれぞれ減衰させる。
この減衰力を調節するには、可変抵抗器６５或いは連結部可変抵抗器９１によってダンピングコイル６４或いは連結部ダンピングコイル９０の抵抗値を変える。 Further, even when the indenter shaft 4 vibrates at its natural frequency due to disturbance vibration during the hardness test, a damping force is generated in the same manner as described above, and the vibration of the indenter shaft 4 and the vibration of the connecting portion 52 associated therewith. Is attenuated respectively.
In order to adjust this damping force, the resistance value of the damping coil 64 or the coupling portion damping coil 90 is changed by the variable resistor 65 or the coupling portion variable resistor 91.

以上説明した本発明に係る硬さ試験機１によれば、圧子軸４に外乱振動が作用して振動した場合に、磁界形成部６１により形成された磁界内に配置されたダンピングコイル６４に起電力が生じて電流が流れることにより減衰力が発生して、圧子軸４の振動を減衰させることができる。
また、ダンピングコイル６４に接続される可変抵抗器６５によりダンピングコイル６４内の抵抗値を変えることができるので、圧子軸４の振動を減衰させる減衰力を調節できる。 According to the hardness tester 1 according to the present invention described above, when disturbance vibration is applied to the indenter shaft 4 and vibrates, the damping coil 64 disposed in the magnetic field formed by the magnetic field forming unit 61 is caused. A damping force is generated when electric power is generated and a current flows, so that the vibration of the indenter shaft 4 can be attenuated.
Further, since the resistance value in the damping coil 64 can be changed by the variable resistor 65 connected to the damping coil 64, the damping force for attenuating the vibration of the indenter shaft 4 can be adjusted.

また、導体で形成され、駆動コイル６２が巻回されるコイルボビン６３に起電力が生じて電流が流れることにより減衰力が発生するので、圧子軸４の振動をより減衰させることができる。
また、隣り合う二つの折り返しばね５のばね端部５５同士は連結部５２によって連結されているので、各折り返しばね５が独立して運動してしまうことを防止できることとなって、圧子軸４を軸方向により直線的に運動させることができる。 Further, since an electromotive force is generated in the coil bobbin 63 that is formed of a conductor and around which the drive coil 62 is wound and a current flows, a damping force is generated, so that the vibration of the indenter shaft 4 can be further attenuated.
Further, since the spring end portions 55 of the two adjacent folding springs 5 are connected to each other by the connecting portion 52, the folding springs 5 can be prevented from moving independently, and the indenter shaft 4 can be moved. It can be moved linearly in the axial direction.

また、連結部磁界形成部８により形成された磁界内に配置された連結部ダンピングコイル９０に起電力が生じて電流が流れることにより減衰力が発生するので、圧子軸４の振動に伴う連結部５２の振動を減衰させることができる。
また、連結部ダンピングコイル９０に接続される連結部可変抵抗器９１により、連結部ダンピングコイル９０内の抵抗値を変えることができるので、圧子軸４の振動に伴う連結部５２の振動を減衰させる減衰力を調節できる。 Further, since an electromotive force is generated in the coupling portion damping coil 90 arranged in the magnetic field formed by the coupling portion magnetic field forming portion 8 and a current flows, a damping force is generated, so that the coupling portion accompanying the vibration of the indenter shaft 4 is generated. The vibration of 52 can be attenuated.
Further, since the resistance value in the coupling portion damping coil 90 can be changed by the coupling portion variable resistor 91 connected to the coupling portion damping coil 90, the vibration of the coupling portion 52 accompanying the vibration of the indenter shaft 4 is attenuated. The damping force can be adjusted.

また、非磁性導体により形成された連結部５２の一部が、連結部磁性形成部８により形成された磁界内に配置されるので、連結部５２に起電力が生じて電流が流れることにより減衰力が発生して、圧子軸４の振動に伴う連結部５２の振動を減衰することができる。 In addition, since a part of the connecting part 52 formed by the nonmagnetic conductor is disposed in the magnetic field formed by the connecting part magnetism forming part 8, an electromotive force is generated in the connecting part 52 and the current flows to attenuate. A force is generated, and the vibration of the connecting portion 52 accompanying the vibration of the indenter shaft 4 can be attenuated.

なお、本発明に係る硬さ試験機は、上記の実施例に限定されるものではない。例えば、連結部には、連結部減衰手段を設けず、荷重負荷機構部に設けた減衰手段（例えば、ダンピングコイル、或いはコイルボビン）を用いて圧子軸の振動を減衰させる構成であってもよい。逆に、荷重負荷機構部には減衰手段を設けず、連結部に設けた連結部減衰手段（例えば、連結部ダンピングコイル等）を用いて圧子軸の振動を減衰させる構成であってもよい。
また、荷重負荷機構部において、減衰手段として、コイルボビンを用いることなく、駆動コイルと、その駆動コイルのさらに外側に減衰手段としてダンピングコイルを巻回した構成であってもよい。 The hardness tester according to the present invention is not limited to the above-described embodiment. For example, the connecting portion may be configured to attenuate the vibration of the indenter shaft using an attenuating means (for example, a damping coil or a coil bobbin) provided in the load load mechanism portion without providing the connecting portion attenuating means. Conversely, a configuration may be used in which the load load mechanism portion is not provided with a damping means, but the vibration of the indenter shaft is attenuated by using a connecting portion attenuating means (for example, a connecting portion damping coil) provided in the connecting portion.
Further, the load load mechanism unit may have a configuration in which a damping coil is wound as a damping means on the outer side of the driving coil without using a coil bobbin as the damping means.

また、荷重負荷機構部に設けた減衰手段として、コイルボビンのみを用い、ダンピングコイルを用いない構成であってもよい。
さらに、連結部減衰手段として、連結部ダンピングコイルのみを用い、連結部を導体としない構成であってもよいし、逆に連結部減衰手段として、連結部を非磁性導体とするのみで、連結部ダンピングコイルを用いない構成としてもよい。
また、荷重負荷機構部に備える磁界形成部を、電磁コイルにより構成してもよい。この場合は、電磁コイルに電流を供給して、磁界を形成させることとなる。
また、本発明に係る硬さ試験機は、ビッカ−ス硬さ試験及び大ストローク押し込み試験にも適用が可能である。 Moreover, as a damping means provided in the load load mechanism unit, a configuration using only a coil bobbin and not using a damping coil may be employed.
Further, as the coupling part attenuation means, only the coupling part damping coil may be used and the coupling part may not be a conductor. Conversely, as the coupling part attenuation means, the coupling part may be a nonmagnetic conductor. It is good also as a structure which does not use a partial damping coil.
Moreover, you may comprise the magnetic field formation part with which a load load mechanism part is equipped with an electromagnetic coil. In this case, a current is supplied to the electromagnetic coil to form a magnetic field.
The hardness tester according to the present invention can also be applied to a Vickers hardness test and a large stroke indentation test.

本発明に係る硬さ試験機の要部を示す側面図である。It is a side view which shows the principal part of the hardness tester based on this invention. 図１の硬さ試験機のII−II線における平面から見た要部を示す図である。It is a figure which shows the principal part seen from the plane in the II-II line of the hardness tester of FIG. 図１の硬さ試験機の外観斜視図である。It is an external appearance perspective view of the hardness tester of FIG. 図１の硬さ試験機の荷重負荷機構部及び連結部の内部を説明するための斜視図である。It is a perspective view for demonstrating the inside of the load load mechanism part and connection part of the hardness tester of FIG. 本発明に係る硬さ試験機の荷重負荷機構部の断面図である。It is sectional drawing of the load loading mechanism part of the hardness tester which concerns on this invention.

Explanation of symbols

１硬さ試験機
３圧子
４圧子軸
５折り返しばね（支持部）
６荷重負荷機構部
５２連結部
５３中板ばね部（第１の弾性部）
５４外板ばね部（第２の弾性部）
５５ばね端部（接続部）
６１磁界形成部
６２駆動コイル
６３コイルボビン（減衰手段、押圧部）
６４ダンピングコイル（減衰手段）
６５可変抵抗器（減衰手段）
９０連結部ダンピングコイル（連結部減衰手段）
９１連結部可変抵抗器（連結部減衰手段）
５３１一端部
５３２他端部
５４１一端部
５４２他端部

1 Hardness tester 3 Indenter 4 Indenter shaft 5 Folding spring (support)
6 Load-loading mechanism part 52 Connection part 53 Middle leaf | plate spring part (1st elastic part)
54 Outer leaf spring part (second elastic part)
55 Spring end (connection)
61 Magnetic field forming part 62 Drive coil 63 Coil bobbin (attenuating means, pressing part)
64 Damping coil (attenuator)
65 Variable resistor (attenuation means)
90 Connecting part damping coil (Connecting part damping means)
91 Connection variable resistor (connection attenuation means)
531 One end 532 Other end 541 One end 542 Other end

Claims

An indenter shaft having an indenter at the tip;
A support portion for supporting the indenter shaft so as to be movable in the axial direction;
A load-loading mechanism that applies a predetermined axial force to the indenter shaft,
The support part is
A first elastic portion having one end fixed to the indenter shaft;
A second elastic part having one end fixed to the testing machine body of the hardness testing machine;
A connecting portion connecting the other end portion of the first elastic portion and the other end portion of the second elastic portion;
When the load loading mechanism portion applies a predetermined force to the indenter shaft, the first elastic portion is perpendicular to the axial direction of the indenter shaft as the first elastic portion bends in the axial direction of the indenter shaft. A hardness tester configured such that the second elastic portion bends so as to cancel movement in any direction,
A hardness tester comprising damping means for damping vibration of the indenter shaft.

The load loading mechanism is
A magnetic field forming part for forming a magnetic field;
A drive coil disposed in the magnetic field formed by the magnetic field forming unit and supplied with a drive current;
A power supply for supplying a drive current to the drive coil;
A pressing portion that presses the indenter shaft by a driving force generated in the driving coil to which a driving current is supplied by the power source,
The attenuation means is
The hardness tester according to claim 1, further comprising a damping coil disposed in a magnetic field formed by the magnetic field forming unit.

The hardness tester according to claim 1 or 2, wherein the attenuation means includes a variable resistor connected to the damping coil.

The load loading mechanism is
A magnetic field forming part for forming a magnetic field;
A drive coil disposed in the magnetic field formed by the magnetic field forming unit and supplied with a drive current;
A power supply for supplying a drive current to the drive coil;
A pressing portion that presses the indenter shaft by a driving force generated in the driving coil to which a driving current is supplied by the power source,
The attenuation means is
The hardness tester according to claim 1, further comprising a coil bobbin formed of a conductor and wound with the drive coil.

A plurality of the support portions are provided in the axial direction of the indenter shaft,
The hardness tester according to any one of claims 1 to 4, wherein the connection portions of the two adjacent support portions are connected to each other by a connection portion.

The hardness tester according to claim 5, further comprising a connecting portion attenuating means for attenuating vibration of the connecting portion.

An indenter shaft having an indenter at the tip;
A support portion for supporting the indenter shaft so as to be movable in the axial direction;
A load-loading mechanism that applies a predetermined axial force to the indenter shaft,
The support part is
A first elastic portion having one end fixed to the indenter shaft;
A second elastic part having one end fixed to the testing machine body of the hardness testing machine;
A connecting portion connecting the other end portion of the first elastic portion and the other end portion of the second elastic portion;
When the load loading mechanism portion applies a predetermined force to the indenter shaft, the first elastic portion is perpendicular to the axial direction of the indenter shaft as the first elastic portion bends in the axial direction of the indenter shaft. A hardness tester configured such that the second elastic portion bends so as to cancel movement in any direction,
A plurality of the support portions are provided in the axial direction of the indenter shaft,
The connecting portions of two adjacent support portions are connected by a connecting portion,
A hardness tester comprising a connecting portion attenuating means for attenuating vibration of the connecting portion.

The connecting portion attenuating means is
A connecting portion damping coil provided in the connecting portion;
A coupling part magnetic field forming part for forming a magnetic field,
The hardness tester according to claim 6 or 7, wherein at least a part of the connecting portion is disposed in a magnetic field formed by the connecting portion magnetic field forming portion.

The hardness tester according to claim 8, wherein the connecting portion attenuating means includes a connecting portion variable resistor connected to the connecting portion damping coil.

The connecting portion is formed of a nonmagnetic conductor,
The connecting portion attenuating means is
A connecting part that forms a magnetic field, and a magnetic field forming part,
The hardness tester according to claim 6 or 7, wherein at least a part of the connecting portion is disposed in a magnetic field formed by the connecting portion magnetic field forming portion.