JP2005066471A - Microchip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchip in which unnecessary foreign material particles can hardly enter a fine channel for fluid. <P>SOLUTION: The microchip is composed of at least one substrate in which the channel in a prescribed shape is formed in one surface and a substrate which faces the substrate and seals the channel and has a pair of ports which communicate with the channel and are opened toward the air on one of the substrates. Filtration channels having a cross-sectional area smaller than that of the channel are formed between the ports and the channel. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a microchip having an ultrafine structure such as a microchannel called a microchannel or a port in a substrate. More specifically, the present invention relates to a microchip having a structure in which foreign matters are not mixed in a fine flow path and clogging is unlikely to occur.

  Recently, as is known by the names such as Microscale Total Analysis Systems (μTAS) or Lab-on-Chip, a microchannel that forms a flow path of a predetermined shape in a substrate and Providing a fine structure such as a port and performing various operations such as chemical reaction, synthesis, purification, extraction, generation and / or analysis of substances within the fine structure has been proposed and partially put into practical use. A structure manufactured for such a purpose and having a fine structure such as a microchannel and a port in a substrate is generically called a “microchip”.

  Microchips can be used for a wide range of applications such as genetic analysis, clinical diagnosis, drug screening and environmental monitoring. Compared with the same type of equipment of the common size, the microchip is (1) significantly less sample and reagent usage, (2) shorter analysis time, (3) higher sensitivity, (4) carried on-site, It can be analyzed in the field and (5) can be disposable.

  The material, structure, and manufacturing method of the microchip are proposed in, for example, Patent Document 1, Patent Document 2, and Non-Patent Document 1. As shown in FIG. 6, the microchip 100 basically includes a substrate 102 and a facing substrate 110 that seals the microchannel 104 provided in the substrate 102. Further, ports 106 and 108 communicating with the fine flow path 104 are provided in the substrate 102. However, in some cases, the ports 106 and 108 may be disposed on the facing substrate 110. The ports 106 and 108 are used for the purpose of exchanging chemical liquids, sample liquids, products, waste liquids, or the like with the outside of the microchip, or sending in gas for liquid feeding.

  FIG. 7 is a cross-sectional view of an open well type port. The target fluid is dropped into the port 106 with the pipette 112 or the like, or the fluid in the port 106 is sucked up. A fine channel 104 is connected to the port 106 in a communicating state, and the fluid in the port 106 is pushed into or drawn into the channel 104. Conversely, the fluid in the flow path 104 may be guided into the port 106.

  FIG. 8 is a cross-sectional view showing another example of the port. In the case of this port, the tube 116 is connected to the port 106 by a dedicated fitting 114. A certain degree of hermeticity is maintained between the port 106 and the tube 116. After that, the fluid is directly pushed into or drawn into the flow path 104 by a micropump (not shown) or the like through the tube 116. Alternatively, a gas compression pump (not shown), a vacuum pump (not shown), or the like is connected via the tube 116.

JP 2001-157855 A US Pat. No. 5,965,237 David C. Duffy et al, Rapid Prototyping of Microfluidic Systems in Poly (dimethylsiloxane), Analytical Chemistry, Vol.70, No.23, December 1, 1988, pp.4974-4984

  Originally unnecessary foreign particles (particles) 118 are mixed in the fluid to be introduced into the flow path 104 from the port 106, or foreign particles 118 such as dust floating in the atmosphere are erroneously introduced during the fluid introduction process. May enter the flow path 104. In particular, in the case of an open well type port as shown in FIG. 7, foreign particles such as dust in the atmosphere are likely to enter. Even when the hermetic fitting 114 as shown in FIG. 8 is used, foreign particles may be mixed when the fitting 114 is attached or detached. The channel 104 generally has a width of about several μm to several hundreds of μm and a height (or depth) within a range of about several μm to several tens of μm. Therefore, foreign particles mixed in such a fine flow path may interfere with various fluid operations such as agitation, reaction, and detection, or may be clogged in the middle of the flow path 104 to obstruct the fluid flow of the fluid. Cause. In particular, as shown in FIG. 9, when there is a narrow channel 120 whose channel width is narrower than these channels in the middle of the channel 104, the foreign particles 118 are likely to be clogged at that portion.

  Accordingly, an object of the present invention is to provide a structure in which unnecessary foreign particles are hardly mixed in the microchannel of the microchip.

  As a means for solving the above-mentioned problem, the feature of the invention according to claim 1 is that at least one substrate in which a fluid passage having a predetermined shape is disposed on one surface, and the fluid passage. A microchip comprising: a facing substrate to be sealed; perforated in either the substrate or the facing substrate, and having at least one port communicating with the fluid flow path; the port and the fluid flow path; Between the two, a plurality of filtration flow paths having a cross-sectional area smaller than the cross-sectional area of the fluid flow path are disposed.

  According to the invention according to claim 1 configured as described above, foreign particles originally contained in the fluid injected into the port and / or foreign particles mixed in the port through the opening of the port flow. Since it is captured by the filtration channel in front of the road, it is possible to effectively prevent foreign particles from entering the original fluid channel. As a result, there is no risk that the foreign particles will adversely affect the fluid operation.

  As a means for solving the above-mentioned problem, the invention according to claim 2 is characterized in that the filtration flow path is used to feed the fluid into the fluid flow path in the at least one port. It is arranged at the port to be done.

  According to the invention according to claim 2 configured as described above, the manufacturing cost of the microchip can be suppressed at low cost because the flow path for filtration only needs to be disposed at a necessary location.

  As a means for solving the above-mentioned problem, the feature of the invention according to claim 3 is that at least one substrate in which a fluid passage having a predetermined shape is disposed on one surface, and the fluid passage. A microchip comprising: a facing substrate to be sealed; perforated in either the substrate or the facing substrate, and having at least one port communicating with the fluid flow path; the port and the fluid flow path; The foreign particles captured by a plurality of filtration flow paths having a cross-sectional area smaller than the cross-sectional area of the fluid flow path disposed between the fluid flow path and the suction port from the port. It is to be removed outside the microchip.

  According to the third aspect of the invention configured as described above, it is effectively prevented that the flow rate of the fluid flowing in the fluid flow path is reduced by the foreign particles captured in the filtration flow path. As a result, the function of the microchip is restored and can be reused.

  According to the present invention, foreign particles do not enter the fluid flow path and block the flow path, so that the fluid operation is ensured and the analysis reliability is improved, and the service life of the microchip is improved. Can be extended.

  FIG. 1 is a partial schematic plan view of an example of the microchip of the present invention. FIG. 2 is a cross-sectional view taken along line II-II in FIG. In the microchip 1 of the present invention, between the port 3 and the fluid flow path 5, a filtration flow path 7 having a cross-sectional area smaller than the cross-sectional area of the plurality of fluid flow paths 5 is disposed. ing. Although not shown, when there are a plurality of flow paths having different cross-sectional areas as the flow paths 5 for fluid, the flow for filtration having a smaller cross-sectional area than the flow path for fluid having the smallest cross-sectional area is used as a reference. Must have a road. This is to reliably prevent foreign particles from entering any fluid channel and closing the channel. On the other hand, the total of the cross-sectional areas of the plurality of filtration channels is preferably equal to or greater than the channel having the largest cross-sectional area among the fluid channels. This is to ensure the flow rate of the liquid sent by the fluid flow path. A port 9 is disposed at the other end of the fluid flow path 5. The port 9 is mainly used for discharging the fluid out of the chip. There is no need to dispose. Thereby, the manufacturing cost of the microchip 1 can be suppressed at low cost. In this case, it is preferable to provide an appropriate means (not shown) for identifying the port 3 in which the filtration flow path 7 is disposed. However, if desired, a filtration flow path 7 can also be provided on the port 9 side. In this case, although the manufacturing cost of the microchip 1 is increased, the microchip 1 can be used without considering the directionality of the chip at all, so that the analysis workability is improved.

  Since the cross-sectional area of the filtration flow path 7 is smaller than the cross-sectional area of the fluid flow path 5, the foreign particles 118 are captured (trapped) at the inlet portion of the filtration flow path 7 of the port 3, and the inside of the fluid flow path 5 Cannot enter. Although the flow of the trapped filtration channel is blocked by the foreign particles 118, since there are a plurality of filtration channels, a necessary flow rate can be ensured as a whole. The height of the flow path 7 for filtration is not limited to that shown in the figure, and may be lower than the height of the flow path 5 for fluid.

  Similarly to the conventional microchip shown in FIG. 6, the microchip 1 of the present invention also has a substrate 11 provided with a filtration flow path 7 and a fluid flow path 5, and a filtration flow provided in the substrate 11. The facing substrate 13 seals the channel 7 and the fluid channel 5. In the illustrated embodiment, the port 3 is provided on the substrate 9, but can also be provided on the facing substrate 13. Further, not only one substrate 11 but also a plurality of substrates 11 can be stacked and used.

  As a material for forming the substrate 11, for example, PDMS (polydimethylsiloxane) which is an elastomer type silicon resin is preferably used. PDMS has excellent characteristics as a microchip member, such as good mold transferability, transparency, chemical resistance, and biocompatibility. Therefore, microchips formed by PDMS do not require complicated processes such as etching and machining such as cutting when forming fine flow paths, and simple and inexpensive molding and sealing. A fine flow path can be formed very simply by stopping. Substrate materials other than PDMS (such as glass or polymethyl methacrylate (PMMA)) can be used as well. The substrate 11 may be transparent or opaque. On the other hand, as a material for forming the facing substrate 13, for example, PDMS, glass, polymethyl methacrylate (PMMA), or the like can be used as appropriate. The substrate 11 may also be transparent or opaque. However, when the microchip 1 of the present invention is used in combination with an optical detection means, the substrate 11 and / or the facing substrate 13 are preferably transparent.

  FIG. 3 is a partial schematic plan view of another example of the microchip of the present invention. In this example, the flow path 7 for filtration is formed so that the connection location with the port 3 of the flow path 7 for filtration is thin and becomes thicker toward the connection location with the fluid flow path. As a result, even finer foreign material particles 118 can be reliably captured, and the fluid flow rate can be ensured because of the divergent shape.

  FIG. 4 is a process diagram showing a manufacturing method of the microchannel 5 shown in FIG. First, in step (a), a silicon wafer 15 having a size substantially the same as the size of the final microchip 1 (for example, 20 mm × 20 mm or 20 mm × 30 mm) is prepared. The silicon wafer 15 can be dried in advance or can be subjected to a desired pretreatment such as a surface treatment. Thereafter, in step (b), a suitable resist material (for example, negative photoresist SU-8) is spin-coated at a rotational speed of 2000 rpm to 5000 rpm for several seconds to several tens of seconds, dried in an oven, and A resist film 17 having a thickness is formed. Next, in step (c), the resist film 17 is exposed through a mask 19 with an appropriate exposure apparatus (not shown). The mask 19 has a layout pattern corresponding to the filtration flow path 7 and the fluid flow path 5 in the microchip 1 of the present invention. Thereafter, in step (d), development is performed in an appropriate developer (for example, 1-methoxy-2-propylacetic acid), and the fine structure 21 corresponding to the filtration flow path 7 and the fluid flow path 5 is provided on the upper surface. A master 23 is generated. If desired, the master 23 can be washed with an organic solvent (eg, isopropyl alcohol) and distilled water. Furthermore, the surface of the master 23 can be treated with a reactive ion etching system in the presence of fluorocarbon. This reactive ion etching process in the presence of fluorocarbon improves the releasability of the PDMS from the master 23 in a later step. Next, in step (e), the PDMS prepolymer and the curing agent are mixed at an appropriate ratio on the upper surface of the master 23, and the degassed PDMS prepolymer mixed solution is poured. At this time, it is preferable that a mold is used to form a casting mold and a PDMS prepolymer mixed solution is poured into the casting mold. As the PDMS prepolymer mixed solution, for example, SYLGARD 184 SILICONE ELASTOMER manufactured by Dow Corning, USA can be suitably used. This is a mixture of a liquid PDMS prepolymer and a curing agent in a ratio of 10: 1. After coating, the substrate is allowed to stand at room temperature for a sufficient time, or, for example, heated in an oven at 65 ° C. for 4 hours, or heated at 135 ° C. for 15 minutes to be cured to generate the PDMS intermediate substrate 25. The PDMS intermediate substrate 25 is a highly transparent rubber-like resin to which the fine structure 21 of the master 23 is transferred. Thereafter, in step (f), the PDMS intermediate substrate 253 is peeled from the master 30, and the PDMS substrate 11 is obtained by drilling the port 3 communicating with the lower filtration flow path 7 from the upper surface of the PDMS intermediate substrate 25. When a port is drilled with a punch 27 so as to cut the filtration channel 7 in the middle of the PDMS intermediate substrate 25 having a longer filtration channel 7 formed, the filtration channel 7 and the port drilling position There is no problem even if the relative position is slightly shifted, and workability is improved. Although not shown, a port 9 is formed at the other end of the fluid flow path 5 at the same time. Finally, in step (g), the microchip 1 of the present invention can be obtained by bonding the PDMS substrate 11 in which the ports 3 and 9 are formed to the facing substrate 13.

  FIG. 5 is a partial schematic plan view of an example of the microchip of the present invention having a function of removing trapped foreign particles. In the microchip 1 </ b> B shown in FIG. 5, a first opening / closing valve 30 is disposed with respect to the fluid flow path 5, and further, between the first opening / closing valve 30 and the filtration flow path 7. In addition, a pressurizing conduit 32 is disposed. A pressure port 34 is provided at the other end of the pressure line 32, and a second opening / closing valve 36 is provided adjacent to the pressure port 34. Normally, the first on-off valve 30 is used in the “open” state and the second on-off valve is used in the “closed” state. When the fluid is fed from the port 3, the foreign particles captured near the inlet of the filtration flow path 7 are, for example, in a state where the first on-off valve 30 is “closed” and the second on-off valve is “open”. Then, gas (for example, air or the like) or liquid (for example, pure water or the like) is fed from the pressurizing port and pressurized to be pushed back into the port 3. Alternatively, the first on-off valve 30 is closed and the second on-off valve is in the closed state, and it is also captured near the inlet of the filtration flow path 7 by pulling strongly from the port 3 with negative pressure. The foreign particles can be pulled back into the port 3. The foreign particles in the port 3 can be removed from the port 3 by, for example, mixing a liquid (for example, pure water) and sucking it using a pipette or the like. As a result, the original function of the microchip 1 that has caused a decrease in the flow rate due to the trapping of the foreign particles 118 in the filtration flow path 7 can be recovered and reused.

  A master was produced by the method shown in FIG. 4, and a substrate 11 having a thickness of 2 mm was produced by PDMS using this master. The diameter of the port is 3 mm, the flow path for filtration has a height of 30 μm, and is composed of 10 fine flow paths with a width of 10 μm. The flow path for fluid has a height of 30 μm and a width of 100 μm. there were. Glass was used as the facing substrate, and a microchip having a structure as shown in FIG. 5 was manufactured. Pure water containing foreign particles of a known size (about 20 μm) was injected from the port 3 to which the filtration flow path 7 was connected, and the pure water was fed into the fluid flow path. In order to send pure water to the fluid passage through the filtration passage, a pressure of KPa was increased from the port 3 side. At this time, the first on-off valve 30 was “opened” and the second on-off valve 34 was “closed”. As a result of inspection with a magnifier, it was confirmed that the foreign particles were captured at the inlet portion of the filtration channel.

  In the microchip of Example 1, the first on-off valve was “closed”, the second on-off valve was “opened”, and air was fed from the port 34 on the second on-off valve side at a pressure of 10 KPa. Thereafter, when examined with a magnifying glass, it was confirmed that the foreign particles were peeled off from the inlet portion of the filtration channel and were blown near the center of the port 3. Pure water was poured into port 3, and the pure water was sucked with a pipette and discarded. Thereafter, when examined again with a magnifying glass, it was confirmed that the foreign particles no longer exist in the port 3.

  The microchip of the present invention can be widely used in the trace analysis of chemical substances such as DNA, RNA, protein and amino acid in various fields such as medicine, veterinary medicine, agriculture, pharmacy, fisheries and food.

It is a partial outline top view of an example of the microchip of the present invention. FIG. 2 is a partial schematic cross-sectional view taken along line II-II in FIG. 1. It is a partial general | schematic top view of another example of the microchip of this invention. It is process drawing which shows an example of the manufacturing method of the microchip of this invention. It is a partial general | schematic top view of another example of the microchip of this invention. It is a partial outline sectional view of an example of the conventional microchip. FIG. 7 is a partial schematic cross-sectional view of an example of feeding a fluid through a port in the microchip of FIG. 6. FIG. 7 is a partial schematic cross-sectional view of an example of feeding a fluid through a port in the microchip of FIG. 6. It is a partial outline top view of another example of the conventional microchip.

Explanation of symbols

1, 1A, 1B Microchip of the present invention 3, 9 Port 5 Fluid flow path 7 Filtration flow path 118 Foreign particles

Claims (3)

The substrate comprises at least one substrate having a fluid passage having a predetermined shape on one surface and a facing substrate that seals the fluid passage, and is formed in either the substrate or the facing substrate. A plurality of microchips having at least one port communicating with the fluid flow path, each having a cross-sectional area smaller than a cross-sectional area of the fluid flow path between the port and the fluid flow path. A microchip comprising a filtration channel for a book. 2. The micro of claim 1, wherein the filtering flow path is disposed in a port used for feeding the fluid into the fluid flow path among the at least one port. Chip. The substrate comprises at least one substrate having a fluid passage having a predetermined shape on one surface and a facing substrate that seals the fluid passage, and is formed in either the substrate or the facing substrate. And a microchip having at least one port communicating with the fluid flow path, and having a crossing smaller than a cross-sectional area of the fluid flow path disposed between the port and the fluid flow path A foreign particle removal method comprising removing foreign particles captured by a plurality of filtration channels having an area from the port to the outside of the microchip by a pressurizing unit and / or a suction unit.

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