JP2005055266A - Manufacturing method of doubly-curved spectroscopic element, and doubly-curved spectroscopic element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form highly accurately double curves on the crystal surface with prescribed curvatures. <P>SOLUTION: A convex form 1 having the first curvature and the second curvature curved in a convex shape corresponding to the crystal surface of a doubly-curved spectroscopic element is prepared. A concave stand 2 is manufactured by pressing a plastic material onto the convex form 1 through a sheet material 5 having the same thickness as the crystal of the doubly-curved spectroscopic element. The concave stand 2 is hardened and a through-hole 2a is bored on the center part of the concave stand 2, A thin-film crystal 3 is sandwiched by the convex form 1 and the concave stand 2. An adhesive 4 is inserted into the through-hole 2a of the concave stand 2 and pressurized, and the thin-film crystal 3 is fixed onto the concave stand 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a double curved spectroscopic element that has a double curved crystal surface and is used in an X-ray analyzer, an X-ray spectrometer, and the like, and a method for manufacturing the double curved spectroscopic element.

  The double curved spectroscopic element has a first curvature whose crystal surface is curved in a concave shape and a second curvature which is curved in a concave shape in a direction perpendicular to the first curvature. X-rays incident at a Bragg angle with a predetermined spread are Bragg-reflected on the crystal surface of the double-curved spectroscopic element to be monochromatic, and converge at a predetermined position. Such a double curved spectroscopic element is used as an X-ray spectroscopic and focusing means in an X-ray analyzer, an X-ray spectrometer or the like.

  In order to efficiently monochromate X-rays with a double-curved spectroscopic element and focus it on a desired position, a double-curved crystal surface must be formed with a predetermined curvature with high accuracy. Conventionally, a double-curved spectroscopic element has been manufactured by producing a concave mold having a double-curved surface and attaching a thin film crystal to the concave mold with an adhesive. However, in this method, since the thickness of the adhesive becomes uneven, it is difficult to curve the crystal surface to a predetermined curvature.

On the other hand, Patent Document 1 discloses a technique for manufacturing a double-curved spectroscopic element by placing a flexible layer serving as a crystal surface on a convex mold and pressing an epoxy serving as an adhesive layer with a backing plate. Has been. The side surface of the double curved spectroscopic element is constituted by an epoxy of the adhesive layer and a receiving plate for pressure-bonding the epoxy. These adhesive layers and backing plates are not strictly aligned with the flex layer. Therefore, the manufactured double-curved spectroscopic element does not have a reference position for specifying the center of the flexible layer, and thus adjustment such as centering is required when used.
JP 2002-535663 A

  A first object of the present invention is to form a double curve of a crystal surface with a predetermined curvature with high accuracy. A second object of the present invention is to manufacture a double curved spectroscopic element having a reference position for specifying the center of the crystal surface.

  The present invention is a method of manufacturing a double-curved spectroscopic element having a first curvature whose crystal surface is curved in a concave shape and a second curvature which is curved in a concave shape in a direction orthogonal to the first curvature. A convex shape having a first curvature and a second curvature curved in a convex shape corresponding to the crystal surface of the double curved spectroscopic element is prepared, and the convex shape is formed through a sheet material having the same thickness as the crystal. A plastic material is pressed to make a concave base, the concave base is cured, a through hole is made in the center, a thin film crystal is sandwiched between the convex and concave bases, and the concave base is An adhesive is put into the through hole and pressed to fix the thin film crystal to the concave base.

  The present invention also provides a double-curved spectroscopic element in which a crystal surface has a first curvature curved in a concave shape and a second curvature curved in a concave shape in a direction orthogonal to the first curvature. The double curve is provided with a concave base having a through hole in the center, a thin film-like crystal disposed on the concave base, and an adhesive placed in the through hole of the concave base. It is manufactured using the manufacturing method of a spectroscopic element.

  Furthermore, as a simple method, when manufacturing the concave base, it may be omitted to sandwich the sheet material between the convex mold, the present invention is a method for manufacturing such a double curved spectroscopic element and the It also includes a double curved spectroscopic element manufactured using the same.

  According to the present invention, by pressing the adhesive placed in the through hole of the concave platform, the thin film crystal is pressed against the convex shape, and the double curvature of the crystal surface is formed with a predetermined curvature with high accuracy. can do. Therefore, the double curved spectroscopic element can efficiently monochromatic X-rays and can focus the X-rays at a desired position.

  Further, the side surface or the bottom surface of the concave base constituting the double curved spectroscopic element can be used as a reference position for specifying the center of the crystal surface. Therefore, when using the double curved spectroscopic element, adjustment such as centering becomes unnecessary.

  Furthermore, the convex mold that requires high-precision processing is for producing a concave base to be a crystal attachment base, and can be reused.

  FIG. 1 is a diagram showing a method of manufacturing a double curved spectroscopic element according to an embodiment of the present invention. First, a convex mold 1 having a first curvature and a second curvature curved in a convex shape corresponding to the crystal surface of the double curved spectroscopic element is prepared. The convex mold 1 is produced by machining a material such as brass, for example.

  Next, as shown in FIG. 1A, a concave base 2 is manufactured by pressing a plastic material against the convex mold 1 through a sheet material 5 having the same thickness as the crystal of the double curved spectroscopic element. At this time, at least one surface of the side surface or the bottom surface of the concave base 2 is configured to have a certain positional relationship with the convex mold 1. As the plastic material, for example, a clay-like ceramic material or the like is used. The surface of the fabricated concave table 2 is different in curvature from the crystal surface of the double curved spectroscopic element by the thickness of the sheet material 5 (same as the crystal thickness).

  Subsequently, as shown in FIG. 1 (b), after the concave base 2 is cured, the convex mold 1 is removed from the concave base 2. The degree to which the concave base 2 is cured and how the convex mold 1 is removed is determined according to the plastic material. Depending on the plastic material, the convex base 1 may be cured after the convex mold 1 is removed from the concave base 2.

  Then, as shown in FIG.1 (c), the sheet | seat material 5 is peeled and the through-hole 2a is opened in the center part of the hardened concave base 2. FIG. It is desirable that the size of the through hole 2a is slightly larger than the spread of the X-ray to be Bragg reflected on the crystal surface. When it is difficult to open the through hole 2a after the plastic material is completely cured, the through hole 2a is opened after being cured to some extent, and then further cured.

  Subsequently, as shown in FIG. 1 (d), the thin film crystal 3 is sandwiched between the convex mold 1 and the concave base 2. As an example, when the crystal 3 is an X-ray generated in an X-ray tube using chromium (Cr), tungsten (W), or silver (Ag) as a target, the crystal orientation (1, 1 1) Silicon (Si) crystal is used. In this case, the thickness of the crystal 3 is, for example, about 10 to 200 μm.

  Subsequently, as shown in FIG. 1 (e), the adhesive 4 is put into the through hole 2 a of the concave table 2 and pressed to fix the thin film-like crystal 3 to the concave table 2. As the adhesive material 4, for example, epoxy is used. The thin film crystal 3 sandwiched between the convex mold 1 and the concave base 2 is pressed against the convex mold 1 by pressurizing the adhesive 4.

  After the adhesive 4 has hardened, the convex mold 1 is removed from the concave base 2 as shown in FIG. Thereby, the double curved spectroscopic element 10 which consists of the concave base 2, the crystal | crystallization 3, and the adhesive material 4 is manufactured.

  FIG. 2 is a diagram showing a method of manufacturing a double curved spectroscopic element according to another embodiment of the present invention. In the present embodiment, when the concave base 2 is manufactured in FIG. 2A, the sheet material is not sandwiched between the convex mold 1. Other steps are the same as those in the embodiment shown in FIG. The surface of the concave base 2 manufactured according to the present embodiment has a first curvature and a second curvature that are curved in the same concave shape as the crystal surface of the double curved spectroscopic element.

  FIG. 3 is a diagram illustrating the operation of the double curved spectroscopic element. As shown in FIG. 3A, the surface of the crystal 3 of the double curved spectroscopic element 10 is curved in a concave shape with a predetermined curvature R1 in the lateral direction of the drawing. X-rays incident at a Bragg angle with a predetermined spread from the point O are Bragg-reflected on the surface of the crystal 3 of the double curved spectroscopic element, and become monochromatic X-rays. As shown in FIG. 3B, the surface of the crystal 3 of the double curved spectroscopic element 10 is curved in a concave shape with a predetermined curvature R2 in a direction orthogonal to the curvature R1. The X-ray beam diverging from the point O is monochromatic by Bragg reflection on the surface of the crystal 3 of the double curved spectroscopic element 10 by the curvature R1 and the curvature R2, and is focused on the point S.

  According to the embodiment described above, the thin film-like crystal 3 is pressed against the convex mold 1 by pressurizing the adhesive 4 put in the through hole 2 a of the concave base 2. A heavy curve can be formed with a predetermined curvature with high accuracy. Therefore, the double curved spectroscopic element 10 can efficiently monochromate X-rays and focus them on a desired position.

  In addition, at least one of the side surfaces or the bottom surface of the concave base 2 constituting the double curved spectroscopic element 10 is configured to have a certain positional relationship with respect to the convex mold 1, whereby the surface of the crystal 3 It can be used as a reference position for specifying the center of. Therefore, when the double curved spectroscopic element 10 is used, adjustment such as centering becomes unnecessary.

  Furthermore, the convex mold 1 requiring high-precision processing is for manufacturing the concave base 2 to be a base for attaching the crystal 3 and can be reused.

It is a figure which shows the manufacturing method of the double curve spectroscopy element by one embodiment of this invention. It is a figure which shows the manufacturing method of the double curve spectroscopy element by other embodiment of this invention. It is a figure which shows operation | movement of a double curve spectroscopic element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Convex type 2 Concave stand 3 Crystal 4 Adhesive material 5 Sheet material 10 Double curve spectroscopy element

Claims (4)

A method of manufacturing a double-curved spectroscopic element, wherein the crystal surface has a first curvature curved in a concave shape and a second curvature curved in a concave shape in a direction orthogonal to the first curvature,
Preparing a convex mold having a first curvature and a second curvature curved in a convex shape corresponding to the crystal surface of the double curved spectroscopic element;
Through a sheet material of the same thickness as the crystal, press the plastic material against the convex mold to make a concave base,
Harden the concave base, open a through hole in the center,
A thin film crystal is sandwiched between a convex and a concave base,
A method for producing a double-curved spectroscopic element, wherein an adhesive is put into a through hole of a concave base and pressed to fix a thin film crystal to the concave base. A double-curved spectroscopic element having a first curvature curved in a concave shape and a second curvature curved in a concave shape in a direction perpendicular to the first curvature,
A concave base with a through hole in the center,
A thin film-like crystal disposed on the concave platform;
An adhesive placed in the through hole of the concave base,
A double curved spectroscopic element manufactured using the method of manufacturing a double curved spectroscopic element according to claim 1. A method for producing a double-curved spectroscopic element, wherein the crystal surface has a first curvature curved in a concave shape and a second curvature curved in a concave shape in a direction orthogonal to the first curvature,
Preparing a convex mold having a first curvature and a second curvature curved in a convex shape corresponding to the crystal surface of the double curved spectroscopic element;
Press the plastic material against the convex mold to make a concave base,
Harden the concave base, open a through hole in the center,
A thin film crystal is sandwiched between a convex and a concave base,
A method for producing a double-curved spectroscopic element, wherein an adhesive is put into a through hole of a concave base and pressed to fix a thin film crystal to the concave base. A double-curved spectroscopic element having a first curvature curved in a concave shape and a second curvature curved in a concave shape in a direction perpendicular to the first curvature,
A concave base with a through hole in the center,
A thin film-like crystal disposed on the concave platform;
An adhesive placed in the through hole of the concave base,
A double curved spectroscopic element manufactured using the method for manufacturing a double curved spectroscopic element according to claim 3.

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