JP2005052823A - Stage apparatus for table coater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage apparatus for a table coater which can prevent the occurrence of application nonuniformity by minute vibration. <P>SOLUTION: In the stage apparatus, a nozzle part 60 is transported uniaxially above a substrate table 30 arranged on a stone surface plate 20 installed on a frame 10 by a slider. The slider includes two Y-axis driving mechanisms 40A and 40B by two linear motors having movable parts which can travel along two rail parts 21A and 21B installed to extend uniaxially in parallel with each other on both sides of the stone surface plate. The yoke part of each linear motor is arranged along the rail parts through arm parts 11A and 11B extending uniaxially which are set to be separated structurally from the stone surface plate, and at least one vibration removing unit 25 is installed between the frame and the stone surface plate. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a stage apparatus, and more particularly to a stage apparatus suitable for a table coater.

  As an example of a coater machine, there is a coater machine that coats and forms a thin film of a specific material on a glass substrate in the manufacturing process of a liquid crystal plate. So far, this type of coater has been mainly a so-called spin coater using a spin coating method. However, the spin coater has a problem that most of the expensive coating material dropped on the substrate is discarded due to its mechanism.

  Therefore, in recent years, table coater machines have begun to be provided in place of spin coater machines. A table coater performs coating by sliding a nozzle unit having a certain length of coating material injection port or a table mounted with a substrate to be processed in a uniaxial direction, and the amount of coating material discarded is small. (See, for example, Patent Document 1).

  However, recently, the substrate to be processed is becoming larger (for example, 2 m × 2 m), and a stage apparatus that can cope with this has been required.

  With reference to FIG. 6 and FIG. 7, an example of a stage apparatus for a table coater machine proposed for a large substrate to be processed will be described. 6 and 7, the stone surface plate 160 is fixed on the gantry 150. The stone surface plate 160 has a concave portion on the upper surface side, and a substrate table 100 for mounting and holding the substrate to be processed is provided in the concave portion. Rail portions 110 </ b> A and 110 </ b> B are provided on both sides of the stone surface plate 160 corresponding to both sides of the substrate table 100, that is, on the portions higher than the recesses, so as to extend in parallel to each other. Hereinafter, this extending direction is referred to as a Y-axis. These rail portions 110A and 110B are combined with Y-axis drive mechanisms 120A and 120B so that they can travel along the rail portions 110A and 110B, respectively. Y-axis drive mechanisms 120A and 120B are realized by linear motors. That is, the fixed magnet part (yoke part) of the linear motor is arranged along the rail parts 110A and 110B, and the Y-axis drive mechanisms 120A and 120B have the movable coil part of the linear motor.

  The Y-axis drive mechanisms 120A and 120B are also provided with Z-axis drive mechanisms 130A and 130B so as to extend upward therefrom. The Z-axis drive mechanisms 130A and 130B are drive sources in the Z-axis direction, that is, in the vertical direction, and are for driving the nozzle unit 140 spanned between them in the Z-axis direction.

  The nozzle unit 140 can be moved in the Y-axis direction together with the Z-axis drive mechanisms 130A and 130B by the Y-axis drive mechanisms 120A and 120B, and can be moved in the Z-axis direction by the Z-axis drive mechanisms 130A and 130B.

  As shown in FIG. 8, the nozzle unit 140 assembled to the stage apparatus has a length larger than the width of the substrate to be processed (not shown) mounted on the substrate table 100, and has a length at the bottom thereof. A coating material is sprayed or dropped from a small slit formed along the direction.

  Hereinafter, the entire movable part including the Y-axis drive mechanisms 120A and 120B, the Z-axis drive mechanisms 130A and 130B, and the nozzle part 140 will be referred to as a slider part.

  The operation at the time of application of the slider portion driven by the table coater stage device as described above is as follows.

A. The nozzle part 140 is moved down to the coating height, and is temporarily stopped immediately before the substrate to be processed.
B. Accelerate while applying until it reaches a constant speed from the stop state.
C. While applying, it moves at a constant speed toward the end of the substrate to be processed.
D. While applying, it decelerates and stops just before the end of the substrate to be processed.
E. After stopping, the nozzle part 140 is moved up by a certain height and returned to the application start position.

  As described above, the conventional table coater machine has the following structure.

A. A nozzle unit 140 is mounted on the slider unit.
B. A linear motor for driving the slider portion is disposed on the stone surface plate 160.
C. Rail portions 110A and 110B on which the slider portion slides and the substrate table 100 are also installed on the same stone surface plate 160.

  As a result, the reaction force generated when the slider is accelerated or decelerated is directly received by the stone surface plate 160. For this reason, the stone surface plate 160 itself vibrates at the time of acceleration / deceleration of the slider portion, causing uneven coating.

  In other words, the conventional table coater machine has a wide area in which coating unevenness can occur due to the influence of vibration generated when coating is performed on a substrate to be processed. The portion of the film formation substrate where coating unevenness has occurred cannot be used and must be discarded.

JP 2000-167463 A

  In view of this, the present invention has an object to reduce the influence of vibration generated during coating by minimizing the area where coating unevenness can occur by separating the yoke part of the linear motor that is a vibration source and the coating mechanism part. Yes.

  According to the present invention, in a stage device for a table coater machine including a first slider capable of conveying a nozzle portion in a uniaxial direction on a surface plate installed on a gantry, the first slider is a linear motor. And the movable part of the linear motor is allowed to travel along the rail part extending in the uniaxial direction installed on the surface plate, and the yoke part of the linear motor is installed structurally separated from the surface plate. A stage device for a table coater machine, wherein the stage device is arranged so as to be along the rail portion via an arm extending in a uniaxial direction, and at least one vibration isolation unit is installed between the mount and the surface plate. Provided.

  The first slider is composed of two drive mechanisms by two linear motors that can run along the two rail portions installed so as to extend in the uniaxial direction in parallel to each other on both sides of the surface plate. The arms are also installed in parallel to each other so as to extend in the uniaxial direction, and the two drive mechanisms are combined with a vertical drive mechanism movable in the vertical direction, and the vertical movement portions of the two vertical drive mechanisms are combined. The nozzle part is bridged between them.

  The arm is installed on the gantry or a floor on which the gantry is installed.

  The surface plate is a stone surface plate, and a concave portion is provided on an upper surface thereof, and a substrate table for mounting a substrate to be processed is installed in the concave portion, and the concave portion is provided at a position corresponding to both sides of the substrate table. The rail portion made of the same stone material as that of the stone surface plate is installed in a portion that is higher than the bottom portion of the stone.

  A linear scale extending in the uniaxial direction is installed on the rail part, and a linear sensor head is installed at a position facing the linear scale in the movable part of the linear motor.

  The movable part of the linear motor is guided in the uniaxial direction by a static pressure air bearing with respect to the rail part.

  In the structure of a conventional stage device for a table coater, since the surface plate directly receives the reaction force generated when the slider is accelerated and decelerated, the surface plate itself vibrates and causes uneven coating. On the other hand, in the structure of the stage apparatus according to the present invention, the reaction force is not directly received by the surface plate but by the frame, so even if the frame vibrates due to the reaction force, the vibration isolation installed between the frame and the surface plate. Vibration is reduced by the unit, thereby preventing uneven coating due to minute vibration. Of course, even if the floor itself vibrates for some reason, this vibration is also reduced by the vibration isolation unit.

  With reference to FIGS. 1-4, the 1st Embodiment of the stage apparatus for table coater machines by this invention is described. To summarize the features of the stage apparatus according to the present invention, the configuration of the Y-axis drive mechanism and the relationship between the gantry and the surface plate are improved. Therefore, the form of the two Z-axis drive mechanisms and the nozzle portion spanned between them may be the same as described with reference to FIGS. Therefore, in the following, detailed description of the two Z-axis drive mechanisms and the nozzle portion spanned between them is omitted.

  In FIG. 1 and FIG. 2, a stone surface plate 20 is disposed on the gantry 10 via a plurality of vibration isolation units 25. The stone surface plate 20 has a concave portion formed by greatly grinding the central portion on the upper surface side, and a substrate table 30 for mounting and holding the substrate to be processed is provided in the concave portion. Rail portions 21A and 21B are provided on both sides of the stone surface plate 20 corresponding to both sides of the substrate table 30, that is, on the portion higher than the recess, so as to extend in parallel with each other by the same stone material as the stone surface plate 20. Yes. Y-axis drive mechanisms 40A and 40B having movable parts that can travel along the rail parts 21A and 21B are installed on the rail parts 21A and 21B, respectively. The Y-axis drive mechanisms 40A and 40B are realized by linear motors, and the detailed structure will be described later.

  As described with reference to FIGS. 6 and 7, the Y-axis drive mechanisms 40A and 40B are provided with the Z-axis drive mechanisms 50A and 50B. The Z-axis drive mechanisms 50A and 50B are drive sources in the Z-axis direction, that is, in the vertical direction, and are for driving the nozzle portion 60 spanned between them in the Z-axis direction. The nozzle unit 60 can be moved in the Y-axis direction together with the Z-axis drive mechanisms 50A and 50B by the Y-axis drive mechanisms 40A and 40B, and can be moved in the Z-axis direction by the Z-axis drive mechanisms 50A and 50B.

  On both sides of the gantry 10, arms 11A and 11B are provided that extend upward along the both sides of the surface plate 20 to the height of the rail portions 21A and 21B and extend in the same direction as the rail portions 21A and 21B. Yes.

  As shown in FIG. 3, a yoke portion (fixed magnet portion) 41B of the linear motor constituting the Y-axis drive mechanism 40B is provided at the upper end portion of the arm 11B. The yoke part (fixed magnet part) 41B is formed by fixing a large number of permanent magnets 42B at regular intervals on the upper and lower inner surfaces of a U-shaped yoke. On the other hand, the movable coil portion 43B that interacts magnetically with the yoke portion 41B is configured to extend from the movable portion 44B traveling on the rail portion 21B to the yoke portion 41B side.

  As shown in FIG. 4, a linear scale 45B extending in the traveling direction is installed on the side surface of the rail portion 21B, and a linear sensor head 46B is installed at a position facing the linear scale 45B in the movable portion 44B of the Y-axis drive mechanism 40B. ing.

  Furthermore, the movable portion 44B has a cross-sectional shape that surrounds at least three surfaces of the rail portion 21B, and at least one hydrostatic air bearing 47-1B on the inner surface facing at least two surfaces, 47-2B is provided. The static pressure air bearings 47-1B and 47-2B travel in a state in which the movable portion 44B floats from the rail portion 21B by blowing compressed air onto the rail portion 21B.

  The above structure is exactly the same for the Y-axis drive mechanism 40A.

  The above structure is summarized as follows.

a. The application nozzle 60 is bridged between a slider, that is, two Y-axis drive mechanisms 40A and 40B.
b. The yoke portions 41A and 41B of the linear motor for driving the slider are fixed to the arms 11A and 11B installed on the gantry 10.
c. The rail portions 21A and 21B and the substrate table 30 on which the slider travels are fixed on the stone surface plate 20.
d. A vibration isolation unit 25 is installed between the gantry 10 and the stone surface plate 20.

  According to the above structure, the reaction force generated in the yoke portions 41A and 41B during acceleration / deceleration of the slider is received by the gantry 10 via the arms 11A and 11B. And since the vibration isolation unit 25 is installed between the gantry 10 and the stone surface plate 20, vibrations from other than the stone surface plate 20 are reduced. In order to improve the vibration reduction effect by the vibration isolation unit 25, it is preferable to dispose at least three vibration isolation units 25 on the bottom surface side of the stone surface plate 20. In the case of three, it is preferable to arrange the stone surface plate 20 at a position corresponding to the apex of the equilateral triangle in order to facilitate the accuracy of the stone surface plate 20.

  Since the reaction force generated during acceleration / deceleration of the slider is reduced from acting on the stone surface plate 20, the space between the linear scales 45A (not shown) and 45B and the linear sensor heads 46A (not shown) and 46B is reduced. Errors due to vibration are also reduced.

  The vibration caused by the reaction force, which is a problem in the present invention, is minute vibration. Even if the yoke portions 41A and 41B are minutely vibrated by the reaction force, the movable coil portions 43A (not shown) and 43B and the permanent magnet 42A are used. (Not shown), the gap between 42B and 42B is larger than this, so that there is no hindrance to the running of the slider, that is, the running of the movable portions 44A (not shown) and 44B of the Y-axis drive mechanisms 40A and 40B.

  FIG. 5 shows a second embodiment of the present invention. In this embodiment, the arms 71A and 71B for installing the yoke portions 41A and 41B are installed not on the gantry 10 but on the floor on which the gantry 10 is installed. In this case, there is a possibility that minute vibration caused by the reaction force generated during acceleration / deceleration of the slider may be transmitted to the gantry 10 through the floor. However, as described above, the vibration isolation unit is provided between the gantry 10 and the stone surface plate 20. By interposing 25, the vibration to the stone surface plate 20 is reduced. The shapes of the arms 71A and 71B may be the same as the arms 11A and 11B in the first embodiment.

  Although the present invention has been described with respect to the two embodiments, the stone surface plate 20 and the rail portions 21A and 21B may be realized by other materials, for example, ceramic materials instead of the stone materials. The stage apparatus according to the present invention can also operate as follows. That is, by giving a difference between the thrusts of the two Y-axis drive mechanisms 40 </ b> A and 40 </ b> B, a minute rotational motion can be given to the nozzle unit 60. The minute rotational motion is a so-called horizontal swing motion in a horizontal plane centering on the central portion of the nozzle portion 60 in the length direction.

  The present invention is a stage apparatus including a slider that can convey a driven part in a uniaxial direction, and can be applied to all stage apparatuses that are required to reduce vibrations in the driven part as much as possible.

It is a front view of the stage apparatus for table coater machines by a 1st embodiment of the present invention. FIG. 2 is a perspective view of the stage apparatus shown in FIG. 1. It is a figure for demonstrating the relationship between the arm for installing the linear motor which comprises the Y-axis drive mechanism shown by FIG. 1, its yoke part, and a stone surface plate. It is a figure for demonstrating the relationship between the movable part of the linear motor shown by FIG. 3, the rail part which guides the driving | running | working, a linear scale, and a linear sensor head. It is a front view of the stage apparatus for table coater machines by the 2nd Embodiment of this invention. It is a side view of the stage apparatus for table coaters proposed for a large-sized processing substrate. It is a front view of the stage apparatus for table coaters shown in FIG. It is a perspective view for demonstrating the nozzle part in a table coater machine.

Explanation of symbols

10, 150 Base 11A, 11B, 71A, 71B Arm 20, 160 Stone surface plate 21A, 21B, 110A, 110B Rail part 30, 100 Substrate table 40A, 40B, 120A, 120B Y-axis drive mechanism 41B York part 42B Permanent magnet 43B Movable coil section 44B Movable section 45B Linear scale 46B Linear sensor head 47-1B, 47-2B Static pressure air bearing 50A, 50B, 130A, 130B Z-axis drive mechanism 60, 140 Nozzle section

Claims (7)

In a table coater machine stage device including a first slider capable of conveying a nozzle portion in a uniaxial direction on a surface plate installed on a gantry,
The first slider is composed of a linear motor,
The movable part of the linear motor can travel along the rail part extending in the uniaxial direction installed on the surface plate,
The yoke part of the linear motor is arranged along the rail part via an arm extending in the uniaxial direction installed structurally separated from the surface plate,
A stage apparatus for a table coater, wherein at least one vibration isolation unit is installed between the gantry and the surface plate. The first slider is composed of two drive mechanisms by two linear motors that can run along the two rail portions installed so as to extend in the uniaxial direction in parallel to each other on both sides of the surface plate,
Two arms are installed so as to extend in the uniaxial direction parallel to each other,
Each of the two drive mechanisms is combined with a vertical drive mechanism that is movable in the vertical direction.
2. The stage device for a table coater according to claim 1, wherein the nozzle portion is bridged between the vertical movement portions of the two vertical drive mechanisms.   The stage device for a table coater according to claim 1 or 2, wherein the arm is installed on the frame.   The stage device for a table coater according to claim 1 or 2, wherein the arm is installed on a floor on which the gantry is installed.   The surface plate is a stone surface plate, and a concave portion is provided on an upper surface thereof, and a substrate table for mounting a substrate to be processed is installed in the concave portion, and the concave portion is provided at a position corresponding to both sides of the substrate table. The table coater machine stage device according to any one of claims 2 to 4, wherein the rail portion made of the same stone material as that of the stone surface plate is installed at a portion higher than the bottom of the table.   6. The linear scale that extends in the uniaxial direction is installed on the rail portion, and a linear sensor head is installed at a position opposite to the linear scale in the movable portion of the linear motor. Stage device for table coater. The stage device for a table coater according to any one of claims 1 to 6, wherein the movable portion of the linear motor is guided in the uniaxial direction to the rail portion by a static pressure air bearing. .

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